Processing device and processing method

Abstract

To easily detect the remaining amount of a rolled belt-like material when the material is fed and processed. [Solution] The processing device (10) includes a feed section (14) that rotates a roll (19) on which a strip-shaped material (13) is wound to feed out the strip-shaped material, a processing section (25) that processes the fed strip-shaped material, an angle memory section (31) that stores the rotation angle of the roll body when the strip-shaped material is fed out, length detection sections (26, 33) that detect the length of the strip-shaped material fed out when the roll body is rotated by the rotation angle stored in the angle memory section, and a remaining amount detection section (34) that detects the remaining amount of strip-shaped material to be wound on the roll body based on the length detected by the length detection section and the rotation angle of the roll body stored in the angle memory section.

Description

[Technical Field]

[0001] The present invention relates to a processing apparatus and a processing method for feeding out a strip-shaped material and performing a predetermined process on it. [Background technology]

[0002] In processing devices that perform processes such as attaching a strip-shaped member to an object to be processed or pressing and dividing the object to be processed via the strip-shaped member, there is a demand for detecting the remaining amount of a strip-shaped member wound into a roll.

[0003] The device disclosed in Patent Document 1 is equipped with a sensor in which a light-emitting unit and a light-receiving unit are arranged facing each other in a direction parallel to the diameter of the roll tape, which is a rolled, strip-shaped member.When the remaining amount of tape decreases and the diameter of the roll tape falls below a predetermined value, the light emitted from the light-emitting unit is received by the light-receiving unit, detecting that the remaining amount of tape is low. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Publication No. 2022-089474 Summary of the Invention [Problem to be solved by the invention]

[0005] If a dedicated sensor is provided to detect the remaining amount of a strip-shaped material, problems arise such as the need for adjustment of the sensor, increased manufacturing costs, and a complicated structure of the device. In order to solve these problems, the present invention aims to provide a processing device and processing method that can easily detect the remaining amount of a strip-shaped material. [Means for solving the problem]

[0006] A processing device according to one aspect of the present invention includes a feed unit that rotates a roll on which a strip-shaped material is wound to feed out the strip-shaped material, a processing unit that processes the fed strip-shaped material, an angle memory unit that stores the rotation angle of the roll when the strip-shaped material is fed out, a length detection unit that detects the length of the strip-shaped material fed out when the roll is rotated by the rotation angle stored in the angle memory unit, and a remaining amount detection unit that detects the remaining amount of the strip-shaped material wound on the roll based on the length and the rotation angle of the roll.

[0007] In one embodiment of the length detection unit, the length detection unit includes an imaging unit that acquires a first image of a first region of the strip-shaped member before it is fed out by the feeding unit, and a second image of a second region including at least a portion of the first region after it has been fed out by the feeding unit, and a calculation unit that compares the positions of identical feature points in the first image and the second image by image processing, and calculates the amount of movement of the strip-shaped member from the difference in positions.

[0008] In one embodiment of the processing unit, the processing unit includes a first support part that supports one side of the processing object on which a division starting point is formed, and a pressing part that presses the other side of the processing object supported by the first support part via the belt-shaped member, thereby dividing the processing object along the division starting point.

[0009] The apparatus may include a division starting point detection unit that detects an area corresponding to the division starting point from an image of the object to be processed, and a pressing unit positioning unit that positions the pressing unit in the area detected by the division starting point detection unit.

[0010] In one embodiment, the processing section has a fixing section for fixing the belt-shaped member to the processing object.

[0011] A processing method that is one aspect of the present invention includes a feeding step of rotating a roll body around which a strip-shaped material is wound to feed out the strip-shaped material, a processing step of processing the fed-out strip-shaped material, an angle acquisition step of acquiring the rotation angle of the roll body in the feeding step, a length detection step of detecting the length of the strip-shaped material fed out in the feeding step, and a remaining amount detection step of detecting the remaining amount of the strip-shaped material wound on the roll body based on the length and the rotation angle of the roll body. [Effects of the Invention]

[0012] According to the processing device and processing method of the present invention, the remaining amount of the strip-shaped material can be easily detected by referring to the relationship between the length of the strip-shaped material fed out and the rotation angle of the roll body when feeding out. [Brief explanation of the drawings]

[0013] [Figure 1] FIG. 1 is a side view showing a mounter device as a first embodiment of a processing device. [Figure 2] 10A and 10B are diagrams showing a first image and a second image used to detect the length of a fed-out strip-shaped member. [Figure 3] FIG. 2 is a perspective view of an object to be processed by the braking device. [Figure 4] FIG. 10 is a perspective view showing a braking device according to a second embodiment of the processing device. [Figure 5] 10A-10C are side views showing processing steps in a braking device. [Figure 6] 10A-10C are side views showing processing steps in a braking device. [Figure 7] FIG. 10 is a side view showing a feeding step and a length detection step in the braking device. DETAILED DESCRIPTION OF THE INVENTION

[0014] The present invention can be applied to various types of processing devices, such as the mounter device and braking device of each embodiment described below. Specifically, the present invention is applicable to a processing device and processing method that includes a roll body formed by winding a strip-shaped material and performs a predetermined process using the strip-shaped material fed by rotating the roll body. Before describing each embodiment, an overview of the processing device and processing method according to the present disclosure will be provided.

[0015] In processing devices that use a strip-shaped material by unwinding it from a roll, it is necessary to acquire information about the remaining amount of the strip-shaped material in order to determine when the roll should be replaced. If the total length of a new, unused roll is known in advance, the remaining length of the strip-shaped material on the current roll can be determined by continuously recording the amount of the strip-shaped material unwound after the new roll is attached to the processing device and subtracting the cumulative amount of unwound material from the original total length of the roll. However, if there is no data about the total length of the strip-shaped material on the roll before use, or if the current remaining length of the strip-shaped material is unknown because the roll has been replaced after use, the method of subtracting the cumulative amount of unwound material from the original total length of the strip-shaped material cannot detect the remaining amount of the strip-shaped material. The processing device and processing method disclosed herein acquire information about the remaining amount of the strip-shaped material on the roll even in such cases, and can easily acquire the remaining amount information with high versatility by utilizing the configuration of the processing device without adding any dedicated sensors for detecting the remaining amount.

[0016] In one aspect of the processing device of the present disclosure, the processing device includes a feed unit, a processing unit, an angle storage unit, a length detection unit, and a remaining amount detection unit.

[0017] The delivery section rotates the roll on which the strip-shaped material is wound, and delivers the strip-shaped material from the roll (performing the delivery step in the processing method aspect). The rotation of the roll in the delivery section may be an operation in which the roll is rotated by a drive source to pay out the strip-shaped material, or an operation in which the roll is rotated in response to the strip-shaped material pulled out from the roll being pulled by a winding section or the like.

[0018] The processing section processes the belt-shaped material fed from the roll body of the feeding section (performing the processing step in the processing method aspect). Specific examples of the processing performed by the processing section will be described in the embodiments below.

[0019] The angle memory unit stores the rotation angle of the roll body when the strip-shaped material is fed in the feeding step (performing the angle acquisition step in the processing method aspect). In a structure in which the roll body of the feeding unit is rotated by a motor to feed the strip-shaped material, the rotation of the motor's output shaft is generally reduced in speed by a transmission mechanism such as a gear train and transmitted to the roll body, and there is a predetermined correlation between the rotation angle of the motor's output shaft and the rotation angle of the roll body based on the reduction ratio of the transmission mechanism, etc. Therefore, by referring to the rotation angle of the motor, information on the rotation angle of the roll body can be acquired and the rotation angle of the roll body can be stored in the angle memory unit.

[0020] When the rotation angle of the roll body in the delivery section is acquired and stored, the rotation angle of the rotation shaft of the roll body may be directly detected using an encoder or the like. In this case, the roll body may be rotated using a drive source other than a motor. Also, even in a structure in which the roll body is rotated in response to the pulling force of a winding section that winds up the strip-shaped member, rather than being rotated by a drive source such as a motor, the rotation angle of the rotation shaft of the roll body can be detected and stored in the angle memory section.

[0021] The length detection unit detects the length of the strip-shaped material fed when the roll body is rotated by the rotation angle stored in the angle storage unit (performing the length detection step in the processing method aspect). In other words, the length detection unit detects the feed amount of the strip-shaped material fed in the feeding step.

[0022] The length detection unit includes a means for detecting the movement of the strip-shaped member in the feeding direction. For example, the length detection unit may include an imaging unit that captures images of the strip-shaped member, capturing characteristic features on the strip-shaped member with the imaging unit, and detecting the movement of the strip-shaped member by comparing the positional changes of the characteristic features across multiple images as the strip-shaped member is fed. Another form of the length detection unit includes a conveying roller that conveys the strip-shaped member in the feeding direction, and the movement of the strip-shaped member can be detected based on the rotation angle and circumferential length of the conveying roller. Using this movement detection means, the length detection unit detects the movement of the strip-shaped member from the start to the end of the feeding step (the length of the fed strip-shaped member).

[0023] The remaining amount detection unit detects the remaining amount of the strip-shaped material wound around the roll body based on the length (feed amount) of the strip-shaped material detected by the length detection unit and the rotation angle of the roll body stored in the angle memory unit (performs the remaining amount detection step in the processing method aspect).

[0024] The remaining amount detection unit detects the remaining amount of the strip-shaped material wound around the roll using the following method: When the rotation angle of the roll stored in the angle memory unit is θ, the feed amount of the strip-shaped material fed when the roll is rotated by the rotation angle θ is m, and the radius of the roll is r, the following equations (1) and (2) are established. (1) m = (2 × π × r × θ) / 360 (2)r = (360 × m) / (2 × π × θ)

[0025] In this way, the radius r of the roll body can be calculated from the above formula (2) based on the rotation angle θ of the roll body and the feed amount m of the belt-shaped member at this rotation angle θ.

[0026] The device disclosed in the above-mentioned Patent Document 1 is equipped with a sensor that detects when the diameter of the roll tape around which the strip-shaped material is wound falls below a predetermined value, and obtains information regarding the remaining amount of the strip-shaped material in the form of the diameter of the roll tape.

[0027] The processing device and processing method disclosed herein calculate the radius r of the roll using the above formula (2), thereby making it possible to obtain the diameter value of the roll, i.e., information regarding the remaining amount of the strip-shaped material on the roll, without using a dedicated sensor for detecting the remaining amount as in Patent Document 1. Furthermore, the processing device and processing method disclosed herein not only detect whether the roll has reached a specific diameter, but also track and detect changes in the diameter of the roll, thereby achieving more accurate remaining amount detection than conventional methods. Furthermore, being able to accurately detect the remaining amount of the strip-shaped material on the roll results in an effect of enabling the strip-shaped material to be fed out in an accurate amount. When a feeding unit is configured to feed the strip-shaped material by rotating the roll with a motor, the feed amount of the strip-shaped material is typically controlled by the rotation angle of the motor. Because the feed amount of the strip-shaped material per unit rotation angle of the motor varies depending on the diameter of the roll, roll diameter information is required to calculate the number of rotations of the motor required to feed a predetermined amount of the strip-shaped material. According to the method of the present disclosure, the diameter information of the roll can be detected with high accuracy, and therefore it is possible to accurately calculate the rotation angle of the motor corresponding to a predetermined feed amount of the strip-shaped material. Note that although it is possible to improve the accuracy of the feed amount by attaching an encoder that detects the rotation angle to the conveying roller that conveys the strip-shaped material fed from the roll, the method of the present disclosure is advantageous in that it is possible to control the feed of the strip-shaped material with high accuracy by using the configuration of the feed unit without using such an additional detection means.

[0028] Generally, a roll body is formed by winding a strip-shaped material multiple times around a cylindrical or axial core. The remaining amount detection unit can acquire different types of information regarding the remaining amount of the strip-shaped material by adding information such as the thickness of the strip-shaped material and the diameter of the core around which the strip-shaped material is wound to the diameter of the roll body determined as described above. The thickness of the strip-shaped material and the diameter of the core may be acquired from data disclosed as the specifications of the roll body or by actual measurement. In the mounter device and breaking device of each embodiment described below, the thickness of the strip-shaped material supplied during processing may be specified as a processing condition, and in such cases, the thickness of the strip-shaped material is known in advance.

[0029] When the radius of the roll body is r, the diameter of the roll body is R, the thickness of the strip-shaped member is t, the diameter of the core material is d, the number of remaining turns of the strip-shaped member in the roll body is w, and the remaining length of the strip-shaped member in the roll body is L, the following equations (3), (4), and (5) hold. (3) w = (Rd) / 2t (4) L ≒ wπ(r + d / 2) (5)L={(R 2 -d 2 )π / 4t}÷1000

[0030] When the remaining amount of the belt-shaped material on the roll is managed by the number of turns, the remaining amount detection unit calculates the number of turns remaining on the roll using the above formula (3). When the detected number of turns of the belt-shaped material falls below a predetermined number of turns, the unit notifies the operator that it is time to replace the roll, prompting the operator to replace the roll.

[0031] When the remaining amount of the strip-shaped material on the roll is managed by length, the remaining amount detection unit calculates the remaining length of the strip-shaped material on the roll using the above formulas (4) and (5). When the detected length of the strip-shaped material falls below a predetermined length, the unit notifies the operator that it is time to replace the roll, for example, by notifying the operator that it is time to replace the roll.

[0032] Furthermore, in the case of a mounter device described later in which a strip of material is fed out in stages in predetermined length units for processing each individual processing object, the remaining length of the strip of material calculated using the above formula (4) or (5) can be compared with the predetermined unit length of the strip of material for processing each individual processing object to calculate the number of processing objects that can be processed, the number of processing objects can be notified, and the timing for replacing the roll body can be determined based on the calculation result.

[0033] By using the above-described method, the remaining amount detecting unit detects the remaining amount of the strip-shaped material on the roll based on at least the rotation angle of the roll acquired in the angle acquiring step and stored in the angle memory unit, and the length (feed amount) of the strip-shaped material detected by the length detecting unit in the length detecting step. As described above, the remaining amount of the strip-shaped material detected by the remaining amount detecting unit can be obtained in any form, such as the diameter of the roll, the number of turns of the strip-shaped material on the roll, or the remaining length of the strip-shaped material on the roll.

[0034] Next, an embodiment in which the above-described method for detecting the remaining amount of a strip-shaped member is applied to a specific processing device will be described. The processing device of the first embodiment shown in FIG. 1 is applied to a mounter device 10. The mounter device 10 is equipped with a holding table 12 that holds a processing object 11, holds the lower surface of the processing object 11 on the holding surface of the holding table 12, and attaches a strip-shaped member 13 to the upper surface of the processing object 11. In other words, the mounter device 10 performs a process of attaching and fixing the strip-shaped member 13 to the processing object 11. As an example, the processing object 11 is a plate-shaped wafer, and the strip-shaped member 13 is dicing tape that is attached to the wafer when forming a processing groove in the wafer by cutting. Note that the types of the processing object 11 and the strip-shaped member 13 are not limited to this example.

[0035] The strip-shaped member 13 may have a multi-layer structure in which a layer to be attached to the processing object 11 is laminated on a base material, or may have a structure in which a portion of the strip-shaped member 13 is cut out and attached to the processing object 11. The strip-shaped member 13 may have an adhesive layer on the surface facing the processing object 11 and be attached to the processing object 11 by the adhesive layer, or may be formed of a thermoplastic resin without an adhesive layer and be attached by pressing the strip-shaped member 13 against the processing object 11 while heat is applied.

[0036] The mounter device 10 includes a feed unit 14, a winding unit 15, a first conveying roller 16, and a second conveying roller 17 as a belt-shaped member supply mechanism that supplies and conveys the belt-shaped member 13. The belt-shaped member 13 fed from the feed unit 14 moves above the holding table 12 between the first conveying roller 16 and the second conveying roller 17, and then is wound up by the winding unit 15.

[0037] The strip-shaped member 13 is wound around the outside of a cylindrical core material 18 to form a roll 19, and the roll 19 is attached to the delivery section 14. The delivery section 14 has a support shaft 20 that rotatably supports the roll 19. The strip-shaped member 13 delivered from the roll 19 advances diagonally downward to a first conveyor roller 16 disposed near the holding table 12, changes direction along the outer circumferential surface of the first conveyor roller 16, advances in a generally horizontal direction to a second conveyor roller 17, advances diagonally upward from the second conveyor roller 17, and is taken up by a take-up roller 21 that constitutes the take-up section 15. The first conveyor roller 16, the second conveyor roller 17, and the take-up roller 21 are each supported rotatably about an axis extending parallel to the support shaft 20.

[0038] The delivery unit 14 rotates the roll body 19 by transmitting the rotation of the output shaft of the motor 22 at a reduced speed via a transmission mechanism 23 such as a gear train. As a specific configuration example, a support shaft 20 is rotatably supported by a bearing (not shown), and the rotation of the output shaft of the motor 22 is transmitted to the support shaft 20 via the transmission mechanism 23, so that when the support shaft 20 rotates, the roll body 19 rotates integrally with the support shaft 20. As another configuration example, the support shaft 20 may be a fixed shaft that does not rotate, and the rotation of the motor 22 may be transmitted to the core material 18 via the transmission mechanism 23, so that the roll body 19 rotates relative to the support shaft 20, which is a fixed shaft.

[0039] The motor 22 includes a rotation angle detection unit 24 that detects the rotation angle of the motor 22. When the motor 22 is a servo motor, the rotation angle detection unit 24 is configured by an optical encoder that optically detects rotation position information of the output shaft of the motor 22, or a magnetic encoder that detects changes in the magnetic field when the rotor of the motor 22 is rotated. Alternatively, a stepping motor may be used as the motor 22, and the rotation angle detection unit 24 may detect the rotation angle based on the number of pulses when driving the motor 22.

[0040] Although not shown, the strip-shaped material supply mechanism may further include at least one of a motor for rotating the winding roller 21, a motor for rotating the first conveying roller 16, and a motor for rotating the second conveying roller 17. The roll body 19 is rotated by the motor 22 to feed the strip-shaped material 13 from the feeding section 14, and the fed strip-shaped material 13 is advanced in the feeding direction by the rotation of the first conveying roller 16 and the second conveying roller 17, which are driven by the motor, and the strip-shaped material 13 is wound onto the winding section 15 by the rotation of the winding roller 21, which is driven by the motor, thereby enabling the strip-shaped material 13 to be smoothly fed while maintaining an appropriate tension.

[0041] The mounter device 10 includes a bonding roller 25 that constitutes a processing section. In the processing section, the bonding roller 25 functions as a fixing section that fixes the strip-shaped member 13 to the processing object 11. The bonding roller 25 is disposed midway along the transport path of the strip-shaped member 13 between the first transport roller 16 and the second transport roller 17, and is supported so as to be rotatable about an axis extending parallel to the support shaft 20. The bonding roller 25 can move in a horizontal direction parallel to the holding surface of the holding table 12 between the first transport roller 16 and the second transport roller 17, and the bonding roller 25 moves in the horizontal direction by driving a roller movement motor (not shown).

[0042] 1, the attachment roller 25 is held at a position closer in the height direction to the holding surface of the holding table 12 than the first conveying roller 16 and the second conveying roller 17, and is configured so that the attachment roller 25 presses the strip-shaped member 13 against the upper surface of the processing object 11 between the first conveying roller 16 and the second conveying roller 17. When the attachment roller 25 is moved in the horizontal direction, the area of ​​the strip-shaped member 13 pressed against the upper surface of the processing object 11 by the attachment roller 25 changes, and the strip-shaped member 13 can be attached to the entire upper surface of the processing object 11.

[0043] As described above, the mounter device 10 uses the attachment roller 25 constituting the processing section to attach the strip-shaped member 13 fed from the roll 19 to the processing object 11 (a processing step for processing the fed strip-shaped member 13). In the processing step, the attachment roller 25 is used to attach the strip-shaped member 13 to the processing object 11, and then the strip-shaped member 13 is fed from the roll 19 to prepare for attaching the strip-shaped member 13 to the next processing object 11. The amount of the strip-shaped member 13 fed out at this time is equal to or greater than the diameter of the processing object 11 (equal to or greater than the length of the processing object 11 in the left-right direction in FIG. 1 ). In other words, when processing multiple processing objects 11 in succession, the attachment operation using the attachment roller 25 and the operation of feeding out the strip-shaped member 13 from the roll 19 by a length equal to or greater than the diameter of the processing object 11 are repeated.

[0044] The remaining portion of the strip-shaped member 13 other than the area attached to the processing object 11 is guided by the second transport roller 17 and transported to the winding section 15, and then wound up by the winding roller 21. For example, in the case of the strip-shaped member 13 having a structure in which an attachment layer for the processing object 11 is laminated on a base material, the base material after the attachment layer has been transferred to the processing object 11 becomes the remaining portion. In the case of a structure in which the strip-shaped member 13 is attached to the processing object 11 by hollowing out a part of it, the strip-shaped member 13 with the hole after the hollowing out becomes the remaining portion.

[0045] The mounter device 10 includes an imaging unit 26 as an element constituting the length detection unit. The imaging unit 26 is disposed at a position where it can capture an image of the strip-shaped member 13 being conveyed from the delivery unit 14 toward the first conveyor roller 16.

[0046] Note that the length of the unwound strip-shaped member 13 can be detected regardless of whether the image of the strip-shaped member 13 is captured in any region from the delivery section 14 to the winding section 15. For example, an imaging unit can be provided at a position where it can capture an image of the strip-shaped member 13 being transported from the second transport roller 17 toward the winding section 15. However, the remaining portion of the strip-shaped member 13 after being attached to the processing object 11 may be stretched, thinned, or have holes formed therein, and may have a different shape from the original state when wound around the roll body 19. Therefore, imaging the strip-shaped member 13 before being attached to the processing object 11 makes it easier to capture a state in which the shape of the strip-shaped member 13 has changed less than imaging the remaining portion of the strip-shaped member 13 after being attached to the processing object 11, thereby making it easier to detect the feed amount of the strip-shaped member 13 with high accuracy. Therefore, from the perspective of high detection accuracy, it is preferable to place the imaging unit 26 at the position shown in FIG. 1.

[0047] Each part of the mounter device 10 is controlled by a control unit 30. The control unit 30 includes, as its hardware configuration, a processor that performs arithmetic processing, a ROM (Read Only Memory) that stores control programs, a RAM (Random Access Memory) that is used as a temporary data expansion area and storage area, and a control circuit for controlling various devices. The angle storage unit 31, image processing unit 32, calculation unit 33, and remaining amount detection unit 34 shown in FIG. 1 are functional blocks of the control unit 30 that are realized by the individual operation or cooperation of these hardware components. The detection of the remaining amount of the belt-shaped member 13 in the roll body 19, which will be described below, is performed by the processor performing arithmetic processing in accordance with the program stored in the ROM of the control unit 30.

[0048] When detecting the remaining amount of strip-shaped material 13 using the mounter device 10, the following steps are performed: a feed step in which the roll body 19 around which the strip-shaped material 13 is wound is rotated to feed out the strip-shaped material 13; an angle acquisition step in which the rotation angle of the roll body 19 in the feed step is acquired; a length detection step in which the length (feed amount) of the strip-shaped material 13 fed out in the feed step is detected; and a remaining amount detection step in which the remaining amount of strip-shaped material 13 wound around the roll body 19 is detected based on the length of the strip-shaped material 13 detected in the length detection step and the rotation angle of the roll body 19 acquired in the angle acquisition step.

[0049] As described above, in the processing step, after the strip-shaped member 13 is attached to the processing object 11 using the attachment roller 25, the strip-shaped member 13 is fed from the roll body 19 in preparation for attaching the strip-shaped member 13 to the next processing object 11. The feeding operation (transport operation) of the strip-shaped member 13 at this time can be applied as the feeding step. This allows the remaining amount of the strip-shaped member 13 to be detected between processes of attaching the strip-shaped member 13 to multiple processing objects 11, thereby achieving time-efficient operation of the device.

[0050] The control unit 30 detects and monitors the rotation angle of the motor 22 using the rotation angle detection unit 24 from the start to the end of the feeding step, calculates the rotation angle of the roll body 19 based on the rotation angle of the motor 22, and stores the rotation angle of the roll body 19 in the angle memory unit 31. Note that the information stored in the angle memory unit 31 may not be the rotation angle of the roll body 19 itself, but may be the rotation angle of the motor 22 before being converted into the rotation angle of the roll body 19. In other words, the rotation angle of the roll body 19 acquired in the angle acquisition step may be, in a broad sense, information about the rotation angle of the motor 22. The function of the angle memory unit 31 is realized by the RAM constituting the control unit 30. In this way, the process of acquiring the rotation angle of the roll body 19 in the feeding step is performed in the angle acquisition step.

[0051] The control unit 30 includes an image processing unit 32 that processes the image captured by the imaging unit 26, and a calculation unit 33 that calculates the amount of movement of the strip-shaped member 13 based on the captured image. The calculation unit 33 functions as an element that constitutes the length detection unit together with the imaging unit 26, and the imaging unit 26 and the calculation unit 33 are used to perform a length detection step that detects the length (feed amount) of the strip-shaped member 13 fed in the feeding step.

[0052] In the length detection step, the control unit 30 causes the imaging unit 26 to acquire a first image of a first region of the strip-shaped member 13 before the strip-shaped member 13 is fed by the feeding unit 14 in the feeding step (at the start of the feeding step), and a second image of a second region of the strip-shaped member 13 after the strip-shaped member 13 is fed by the feeding unit 14 in the feeding step (at the end of the feeding step). That is, in the angle acquisition step, the angle memory unit 31 stores the rotation angle of the roll body 19 that moves the strip-shaped member 13 from the position where the first image was captured to the position where the second image was captured. The second region is set to include at least a portion of the first region. The ranges Ea and Eb indicated by double arrows in FIG. 1 are examples of the first region (Ea) and the second region (Eb).

[0053] FIG. 2 shows examples of a first image Ga and a second image Gb acquired by the imaging unit 26. The arrow F in FIG. 2 indicates the movement direction of the strip-shaped member 13 as it is fed from the feed unit 14. Note that the image capture areas of the first image Ga and the second image Gb in the direction perpendicular to the movement direction F (the width direction of the strip-shaped member 13) do not need to cover the entire width of the strip-shaped member 13; it is sufficient that only a portion of the strip-shaped member 13 is captured. The imaging unit 26 is a high-resolution camera and is capable of capturing images including elements (hereinafter referred to as "identification elements") that are distinguishable from the smooth surface of the strip-shaped member 13, such as tiny air bubbles and fillers present on the strip-shaped member 13. Examples of identification elements on the strip-shaped member 13 that can be captured by the imaging unit 26 include air bubbles, fillers, and small irregularities and scratches that do not cause practical problems.

[0054] Alternatively, instead of accidentally formed elements such as air bubbles, the identification elements may be markings that are formed in advance at predetermined intervals on the belt-shaped member 13. In this case, it is preferable that the markings are arranged near the edge of the belt-shaped member 13 in the width direction, which is not included in the area where the belt-shaped member 13 is attached to the object 11 to be processed.

[0055] 2 indicate the identification elements on the strip-shaped member 13. When the image processing unit 32 processes the image signal sent from the imaging unit 26 to generate an image, the control unit 30 may perform processing (such as binarization or color adjustment) to make the identification elements stand out.

[0056] The calculation unit 33 compares the positions of the same feature points in the first image Ga and the second image Gb through image processing and calculates the movement amount of the strip-shaped member 13 from the difference in the positions of the feature points within the images. In the example of FIG. 2, a specific identification element Ha included in both the first image Ga and the second image Gb is set as the feature point. The movement amount m' of the strip-shaped member 13 in the movement direction F within the images can be calculated from the difference between the position of the identification element Ha in the first image Ga and the position of the identification element Ha in the second image Gb. Based on the specifications of the imaging unit 26 (e.g., the magnification of the optical system, the size of the light receiving element), it is possible to convert the distance in the first image Ga and the second image Gb to the distance on the actual strip-shaped member 13. Therefore, by performing this conversion on the movement amount m' in the captured image shown in FIG. 2, the feed amount m of the strip-shaped member 13 in the above equations (1) and (2) can be calculated. In addition, in addition to the identification element Ha, the first image Ga and the second image Gb also contain two common identification elements Hb and Hc, and either of these identification elements Hb or Hc may be applied as the same feature point to determine the feed amount of the strip-shaped member 13.

[0057] The timing for capturing the first image Ga and the second image Gb is set according to conditions such as the angle of view of the imaging unit 26. The wider the imaging range of the imaging unit 26, the wider the range of the first image Ga and the second image Gb. Therefore, even if the feed amount of the strip-shaped member 13 in the feeding step is large, the first image Ga and the second image Gb can contain the same feature points. However, even if the imaging range of the imaging unit 26 is narrow, the first image Ga and the second image Gb can be captured with a small feed amount of the strip-shaped member 13 in the feeding step by, for example, increasing the shutter speed using a strobe to capture consecutive images in a short period of time. Therefore, even if the imaging unit 26 does not support wide-angle imaging, the feeding step and the length detection step can be performed by utilizing a portion of the transport operation (the transport operation of the strip-shaped member 13 in the processing step) that feeds the strip-shaped member 13 to the position where it will be attached to the next processing object 11 after attaching the strip-shaped member 13 to the processing object 11.

[0058] The feeding step for detecting the remaining amount of the strip-shaped member 13 may be performed at a timing different from the timing of the transport operation of the strip-shaped member 13 in the processing step. For example, when the mounter device 10 is started, the feeding step can be performed prior to the processing step to check the remaining amount of the strip-shaped member 13. When the imaging range of the imaging unit 26 is narrow, the feed amount of the strip-shaped member 13 required to perform the length detection step using the imaging unit 26 (the movement amount required to obtain the first image Ga and the second image Gb shown in FIG. 2) is extremely small compared to the required transport amount of the strip-shaped member 13 required to move the strip-shaped member 13 while attaching it to each processing object 11 in the processing step (the transport amount equal to or greater than the diameter of the processing object 11). Therefore, even if a dedicated feeding step for detecting the remaining amount is performed, the required time is short, and the feed amount of the strip-shaped member 13 can be minimized.

[0059] As a modified example of the length detection unit in the mounter device 10, the feed amount of the strip-shaped member 13 in the feeding step can be detected based on the amount of movement of at least one of the first conveyor roller 16 and the second conveyor roller 17. When the first conveyor roller 16 and the second conveyor roller 17 rotate following the strip-shaped member 13 without slipping when conveying the strip-shaped member 13, there is a certain correlation between the rotation angle of the first conveyor roller 16 and the second conveyor roller 17 and the feed amount of the strip-shaped member 13 fed by the rotation of the roll body 19. Therefore, the rotation angle of the first conveyor roller 16 or the second conveyor roller 17 is detected, and the calculation unit 33 performs a calculation process in which the rotation angle is multiplied by the circumferential length (which can be determined from the diameter) of the outer circumferential surface of the first conveyor roller 16 or the second conveyor roller 17, thereby detecting the feed amount of the strip-shaped member 13.

[0060] The means for detecting the rotation angle of the first conveyor roller 16 and the second conveyor roller 17 can be configured, for example, by an encoder that detects the rotation angle of a shaft that supports the first conveyor roller 16 and the second conveyor roller 17. Alternatively, if the first conveyor roller 16 and the second conveyor roller 17 are driven to rotate by a motor (servo motor), the rotation angle of the first conveyor roller 16 and the second conveyor roller 17 may be detected using an encoder that detects the rotation angle of the motor.

[0061] It should be noted that the remaining portion of the strip-shaped member 13 after being attached to the processing object 11 may be stretched, thinned, or have holes formed therein, which may be in a state different from the original state when it was wound around the roll body 19. Therefore, the rotation angle of the first conveyor roller 16 that guides the strip-shaped member 13 before being attached to the processing object 11 is more likely to accurately reflect the feed amount of the strip-shaped member 13 sent out from the send-out section 14 than the rotation angle of the second conveyor roller 17 that guides the remaining portion after being attached to the processing object 11. Therefore, when detecting the feed amount of the strip-shaped member 13 based on the rotation angle of the conveyor rollers, it is preferable to refer to the rotation angle of the first conveyor roller 16.

[0062] When a length detection unit such as this modified example is applied, the components of the strip-shaped material supply mechanism, such as the feed unit 14 and each conveying roller 16, 17, can be used to collect all the information necessary to detect the remaining amount of strip-shaped material 13, so it is possible to omit the imaging unit 26 and further simplify the configuration of the mounter device 10.

[0063] In the remaining amount detection step, the remaining amount detection unit 34 of the control unit 30 detects the remaining amount of the strip-shaped material 13 wound around the roll 19 based on the rotation angle of the roll 19 stored in the angle memory unit 31 in the angle acquisition step and the length (feed amount) of the strip-shaped material 13 calculated by the calculation unit 33 in the length detection step. The method for detecting the remaining amount of the strip-shaped material 13 based on this information has been described above. For example, the diameter of the roll 19 (double the radius r calculated by equation (2)) can be calculated using equations (1) and (2) above. Furthermore, after calculating the diameter of the roll 19 and acquiring information on the thickness of the strip-shaped material 13 and the diameter of the core material 18, the remaining number of turns and the remaining length of the strip-shaped material 13 around the roll 19 can be calculated using equations (3), (4), and (5) above.

[0064] When the remaining amount of the strip-shaped member 13 detected in the remaining amount detection step is low (below a set reference value), the control unit 30 issues a notification recommending replacement of the roll 19 via a notification unit (display monitor, indicator lamp, speaker, etc.) included in the mounter device 10 or a communication device (server, personal computer, tablet computer, smartphone, etc.) that can communicate with the mounter device 10. Furthermore, unlike existing sensors for detecting the remaining amount of the roll, the control unit 30 is capable of tracking and detecting changes in the remaining amount of the strip-shaped member 13, and therefore it is also possible to change the content of the notification depending on changes in the remaining amount of the strip-shaped member 13. For example, in addition to recommending replacement of the roll 19 and predicting the replacement time, it is also possible to notify the remaining length or percentage of the strip-shaped member 13 in real time numerical values.

[0065] The remaining amount display can display any desired type of information regarding the remaining amount of the strip-shaped material 13, such as the diameter of the roll body 19, the remaining number of turns of the strip-shaped material 13 on the roll body 19, the remaining length of the strip-shaped material 13 on the roll body 19, the number of processing objects 11 that can be processed, and the time until the strip-shaped material 13 needs to be replaced due to a lack of remaining amount.

[0066] As described above, the mounter device 10 of this embodiment detects the remaining amount of the strip-shaped material 13 by using information obtained from the operation of the strip-shaped material supply mechanism that transports the strip-shaped material 13 and information obtained from images of the strip-shaped material 13 captured by the imaging unit 26. The strip-shaped material supply mechanism is a component necessary for moving the strip-shaped material 13 to the position where it is to be attached to the processing object 11. The imaging unit 26 is used as a means for confirming that the strip-shaped material 13 is being transported appropriately. Therefore, it is possible to easily detect the remaining amount of the strip-shaped material 13 with high versatility by utilizing the components provided in the mounter device 10, without adding a dedicated sensor for detecting the remaining amount of the strip-shaped material 13.

[0067] The processing apparatus of the second embodiment shown in FIGS. 4 to 7 is applied to a breaking apparatus 50 for processing the processing object 40 shown in FIG. 3. As shown in FIG. 3, the processing object 40 is a disk-shaped wafer having a plurality of device regions partitioned in a grid pattern by a plurality of division lines 41, and devices 42 such as semiconductor chips are formed in each device region. Division starting points such as modified portions formed by laser processing or half-cut grooves (processed grooves with bottoms) formed by cutting processing are formed along each division line 41. The breaking apparatus 50 is a processing apparatus for dividing such a processing object 40 along the division starting points of the division lines 41 to separate it into a plurality of devices 42. The X-axis, Y-axis, and Z-axis directions shown in FIGS. 4 to 7 are perpendicular to each other, the X-axis and Y-axis directions are horizontal, and the Z-axis direction is up-down.

[0068] 5 and 6, the workpiece 40 is attached to the inside of a ring-shaped frame 44 via a flexible support tape 43 to form a work unit 45. The workpiece 40 is transported to a breaking device 50 in the form of the work unit 45.

[0069] The breaking device 50 has a holding table 51 that holds a work unit 45. A through-hole 52 that penetrates the holding table 51 in the Z-axis direction is formed in the center of the holding table 51. A frame 44 is held on the upper surface of the holding table 51 around the through-hole 52, and the work unit 45 is attached to the holding table 51 with the processing object 40 positioned above the through-hole 52 (see FIGS. 5 and 6). As shown in FIG. 4, a pair of guide rails 53 extending in the X-axis direction are arranged at a distance in the Y-axis direction, and the holding table 51 is supported across the pair of guide rails 53 and is movable in the X-axis direction along the guide rails 53. The holding table 51 is moved in the X-axis direction by a table feed mechanism 54 that includes a ball screw mechanism that rotates a ball screw that is threaded into the holding table 51 using a motor.

[0070] The breaking device 50 includes a processing section 55 comprising an upper surface holding section 56, a lower surface holding section 57, and a pressing section 58. The upper surface holding section 56 and the lower surface holding section 57 are positioned opposite each other in the Z-axis direction. The upper surface holding section 56 and the pressing section 58 can be moved in the Z-axis direction by a Z-axis moving mechanism 59 configured with a ball screw mechanism or the like. The lower surface holding section 57 can also be moved in the Z-axis direction by a Z-axis moving mechanism 60 configured with a ball screw mechanism or the like. The upper surface holding section 56 is supported by a pressure section 61 (see FIG. 4) configured with an air cylinder or the like. The processing object 40 can be firmly held by applying pressure with the pressure section 61 while sandwiched between the lower end of the upper surface holding section 56 and the upper end of the lower surface holding section 57. The pressing portion 58 can be moved in the Z-axis direction relative to the upper surface holding portion 56 by a pressing drive portion 62, which is composed of a feed screw mechanism that applies a moving force in the Z-axis direction by rotating a feed screw with a motor.

[0071] A first imaging unit 63 and a second imaging unit 64 are provided near the processing unit 55. The first imaging unit 63 is capable of imaging the processing object 40 of the work unit 45 held on the holding table 51 from above. The second imaging unit 64 is capable of imaging the processing object 40 of the work unit 45 held on the holding table 51 from below through the support tape 43. The first imaging unit 63 and the second imaging unit 64 are supported so as to be movable in the Y-axis and Z-axis directions, respectively, and are moved to positions suitable for imaging (positions near the processing object 40 to be imaged) when imaging, and can be retracted from positions near the processing object 40 when imaging is not being performed.

[0072] The breaking device 50 is configured to supply a strip-shaped member 70 between the upper surface holding unit 56 and the lower surface holding unit 57, and the upper surface holding unit 56 and the pressing unit 58 contact the upper surface of the processing object 40 via the strip-shaped member 70. A strip-shaped member supply mechanism for supplying and transporting the strip-shaped member 70 includes a delivery unit 71, a winding unit 72, a first transport roller 73, and a second transport roller 74. The first transport roller 73 and the second transport roller 74 are positioned to sandwich the processing unit 55 in the X-axis direction. The strip-shaped member 70 delivered from the delivery unit 71 passes below the upper surface holding unit 56 and the pressing unit 58 between the first transport roller 73 and the second transport roller 74, and is then wound up by the winding unit 72.

[0073] The feeding section 71, the winding section 72, the first conveyor roller 73, and the second conveyor roller 74 in the braking device 50 are components corresponding to the feeding section 14, the winding section 15, the first conveyor roller 16, and the second conveyor roller 17 in the mounter device 10, respectively. In the feeding section 71, a roll 76 is formed by winding a strip-shaped member 70 around the outside of a cylindrical core material 75, and the roll 76 is rotatably supported by a support shaft 77 extending in the Y-axis direction. The strip-shaped member 70 fed from the roll 76 advances obliquely downward to the first conveyor roller 73, changes direction along the outer circumferential surface of the first conveyor roller 73, advances generally in the X-axis direction to the second conveyor roller 74, advances obliquely upward from the second conveyor roller 74, and is wound up by a winding roller 78 constituting the winding section 72. The winding section 72, the first conveyor roller 73, and the winding roller 78 are each supported rotatably about an axis extending in the Y-axis direction.

[0074] The delivery unit 71 transmits the rotation of the output shaft of the motor 79 at a reduced speed using a transmission mechanism 80 such as a gear train, causing the roll body 76 to rotate around a support shaft 77. The support shaft 77 may be a rotating shaft that rotates together with the roll body 76, or may be a fixed shaft that rotatably supports the core material 75. When the motor 79 is a servo motor, a rotation angle detection unit 81 configured with an optical encoder, a magnetic encoder, or the like detects the rotation angle of the motor 79. When a stepping motor is used as the motor 79, the rotation angle detection unit 81 may detect the rotation angle based on the number of pulses when driving the motor 79.

[0075] Although not shown in the figure, the strip-shaped material supply mechanism may further include at least one of a motor that rotates the winding roller 78, a motor that rotates the first conveying roller 73, and a motor that rotates the second conveying roller 74.

[0076] Each part of the braking device 50 is controlled by a control unit 90. The hardware configuration of the control unit 90 is similar to that of the control unit 30 of the mounter device 10 described above, and therefore description thereof will be omitted. The angle memory unit 91, image processing unit 92, calculation unit 93, and remaining amount detection unit 94 of the control unit 90 are functional blocks corresponding to the angle memory unit 31, image processing unit 32, calculation unit 33, and remaining amount detection unit 34 of the mounter device 10 described above, respectively. The various operations described below are performed by the processor of the control unit 90 performing arithmetic processing and transmitting control signals to each part of the braking device 50 in accordance with programs stored in the ROM of the control unit 90.

[0077] 5 and 6 show processing steps for processing the strip-shaped member 70 sent out from the sending unit 71. In the processing steps, the processing object 40 is divided along the division starting points of the division lines 41 using the processing unit 55. The specific operations of the processing steps will be described.

[0078] The holding table 51 holding the work unit 45 is moved in the X-axis direction by the table feed mechanism 54, and the processing object 40 is positioned at a position where it can be processed by the processing unit 55. At this time, an index point on the processing object 40 is found from an image of the processing object 40 captured by the first imaging unit 63, and the position of the processing object 40 is determined based on the index. As an example of an index on the processing object 40, the notch 46 that is a cutout in the outer periphery shown in FIG. 3 can be used.

[0079] Once the approximate position of the processing object 40 has been determined, the second imaging unit 64 is positioned below the processing object 40, an image of the processing object 40 is taken through the support tape 43, and an area corresponding to the division line 41 is detected from the captured image. In other words, the second imaging unit 64 functions as a division start point detection unit that detects the area corresponding to the division line 41 from the captured image of the processing object 40. Based on the detection result of the division line 41, the table feed mechanism 54 is operated to adjust the position of the processing object 40 in the X-axis direction, and the pressing unit 58 is positioned at a position corresponding to the division line 41. In other words, the table feed mechanism 54 functions as a pressing unit positioning unit that positions the pressing unit 58 in the area of ​​the division start point detected by the second imaging unit 64, which is a division start point detection unit.

[0080] After the relative positions of the processing object 40 and the processing unit 55 are determined as described above, the Z-axis movement mechanism 59 is operated to move the upper surface holding unit 56 and the pressing unit 58 downward, and the Z-axis movement mechanism 60 is operated to move the lower surface holding unit 57 upward, so that the processing object 40 is sandwiched between the lower end of the upper surface holding unit 56 and the upper end of the lower surface holding unit 57, as shown in FIG. 5 . More specifically, the lower end of the upper surface holding unit 56 holds the upper surface of the processing object 40 via the belt-shaped member 70, and the upper end of the lower surface holding unit 57 holds the lower surface of the processing object 40 via the support tape 43. Pressure from the pressure unit 61 causes the upper surface holding unit 56 and the lower surface holding unit 57 to sandwich the processing object 40 from above and below with a predetermined pressure. The lower surface holding unit 57 constitutes a first support unit that supports one surface (lower surface) of the processing object 40 where the division starting point is formed.

[0081] Next, the pressing drive unit 62 is operated, causing the pressing unit 58 to press the processing object 40 downward. The processing object 40 is supported above the penetration portion 52 of the holding table 51 only by the flexible support tape 43. Therefore, a pressing force is applied to the processing object 40 from the pressing unit 58, which is positioned corresponding to the dividing line 41, near the location where the processing object 40 is clamped between the upper surface-side holding unit 56 and the lower surface-side holding unit 57. As a result, the processing object 40 is split from the division starting point of the dividing line 41, as shown in FIG. 6 . In this way, the pressing unit 58 presses the other surface (upper surface) of the processing object 40 supported by the lower surface-side holding unit 57, which is the first support unit, via the strip-shaped member 70, and splits the processing object 40 along the division starting point.

[0082] After dividing the processing object 40 along one dividing line 41 extending in the Y-axis direction, the pressure drive unit 62 is operated to release the pressure applied by the pressure unit 58, and the Z-axis movement mechanism 59 and the Z-axis movement mechanism 60 are operated to release the clamping of the processing object 40 between the upper surface side holding unit 56 and the lower surface side holding unit 57. Next, the table feed mechanism 54 is operated to move the processing object 40 in the X-axis direction, and while the second imaging unit 64 detects the division start point of the next dividing line 41, the pressure unit 58 is positioned so as to correspond to the next undivided dividing line 41. Then, in the same procedure as above, the processing object 40 is clamped by the upper surface side holding unit 56 and the lower surface side holding unit 57, and the processing object 40 is pressed by the pressure unit 58, thereby dividing the processing object 40 along the dividing line 41.

[0083] When division along all division lines 41 extending in the Y-axis direction is complete, the orientation of the work unit 45 held on the holding table 51 is rotated 90°. As a result, the multiple division lines 41 that have not yet been divided extend in the Y-axis direction. Then, by following the same procedure as above, division is performed sequentially along each division line 41 extending in the Y-axis direction. When division along all division lines 41 is complete, the processing object 40 is in a state where multiple devices 42 have been separated.

[0084] When the processing object 40 is divided by the processing unit 55, the upper surface of the processing object 40 is covered with a belt-shaped member 70. The belt-shaped member 70 reduces damage to the processing object 40 and adhesion of foreign matter to the processing object 40 during division. The belt-shaped member 70 also prevents processing debris, such as fragments of the processing object 40, generated during division from scattering around. Therefore, the processing object 40 is protected, and the processing steps can be performed in a clean state without processing debris adhering to the device 42 or each part of the breaking apparatus 50. Furthermore, because the upper surface of the processing object 40 is covered with the belt-shaped member 70, behavior such as excessive vibration of the processing object 40 during division is suppressed, allowing for highly accurate division processing.

[0085] The transport of the strip-shaped member 70 in the processing steps can be performed in any manner. For example, each time division along one dividing line 41 is completed, a certain amount of the strip-shaped member 70 can be fed from the feed unit 71 in accordance with the movement of the workpiece 40 in the X-axis direction by the table feed mechanism 54, so that a fresh strip-shaped member 70 always covers the processing area in the processing unit 55. Alternatively, the same area of ​​the strip-shaped member 70 may be repeatedly used without feeding the strip-shaped member 70 between divisions along multiple dividing lines 41. Even when the same area of ​​the strip-shaped member 70 is repeatedly used, the feed unit 71 must feed the strip-shaped member 70 at a predetermined timing to refresh the area of ​​the strip-shaped member 70 to be used in response to an increase in contamination on the strip-shaped member 70 or a decrease in the durability of the strip-shaped member 70. Therefore, regardless of the transport manner of the strip-shaped member 70 in the processing steps, it is necessary to detect the remaining amount of the strip-shaped member 70 on the roll 76.

[0086] The following describes detection of the remaining amount of the strip-shaped material 70 on the roll 76 in the braking device 50. Detection of the remaining amount of the strip-shaped material 70 in the braking device 50 can be performed in the same manner as detection of the remaining amount of the strip-shaped material 13 in the mounter device 10 described above, and includes a feed-out step of rotating the roll 76 around which the strip-shaped material 70 is wound to feed out the strip-shaped material 70, an angle acquisition step of acquiring the rotation angle of the roll 76 in the feed-out step, a length detection step of detecting the length (feed amount) of the strip-shaped material 70 fed out in the feed-out step, and a remaining amount detection step of detecting the remaining amount of the strip-shaped material 70 wound on the roll 76 based on the length of the strip-shaped material 70 detected in the length detection step and the rotation angle of the motor 79 or the rotation angle of the roll 76 acquired in the angle acquisition step.

[0087] FIG. 7 shows a case where the second imaging unit 64 is used as the length detection unit in the length detection step. In order for the second imaging unit 64 to capture an image of the strip-shaped member 70 from below, it is necessary that the work unit 45 is not positioned below the strip-shaped member 70. Therefore, detection of the remaining amount of the strip-shaped member 70 using the second imaging unit 64 is not performed during the above-mentioned processing steps, but is performed at a timing separate from the processing steps. Note that in FIG. 7, the holding table 51 is positioned below the processing unit 55 so that the holding table 51 does not hold the work unit 45. However, instead of removing the work unit 45 from the holding table 51, the holding table 51 holding the work unit 45 may be moved in the X-axis direction by the table feed mechanism 54 and retracted from below the processing unit 55.

[0088] The area where the image of the strip-shaped material 70 is captured is not limited to the transport path between the first transport roller 73 and the second transport roller 74, but may be the transport path between the delivery unit 71 and the first transport roller 73, or the transport path between the second transport roller 74 and the winding unit 72. However, the transport path between the first transport roller 73 and the second transport roller 74 can be imaged by the second imaging unit 64 that the breaking device 50 originally includes as a division start point detection unit, and is advantageous in that the length of the strip-shaped material 70 can be detected with a simple configuration.

[0089] In the feeding step, the control unit 90 operates the motor 79 to rotate the roll 76 around which the belt-shaped member 70 is wound, thereby feeding out the belt-shaped member 70.

[0090] The control unit 90 monitors the rotation angle of the motor 79 using the rotation angle detection unit 81 from the start to the end of the feeding step, and in the angle acquisition step, the rotation angle of the roll body 76 is calculated based on the rotation angle of the motor 79 and stored in the angle memory unit 91. Note that the information stored in the angle memory unit 91 may not be the rotation angle of the roll body 76 itself, but may be the rotation angle of the motor 79 before being converted into the rotation angle of the roll body 76.

[0091] In the length detection step, the control unit 90 detects the length (feed amount) of the strip-shaped member 70 fed in the feed-out step. This length detection is performed in the same manner as the method described above for the mounter device 10 with reference to FIG. 2. That is, the second imaging unit 64 acquires a first image capturing a first region of the strip-shaped member 70 before the strip-shaped member 70 is fed by the feed-out unit 71 in the feed-out step (at the start of the feed-out step) and a second image capturing a second region of the strip-shaped member 70 after the strip-shaped member 70 is fed by the feed-out unit 71 in the feed-out step (at the end of the feed-out step). The second region is set to include at least a portion of the first region. The ranges Ea and Eb indicated by double arrows in FIG. 7 indicate examples of the first region (Ea) and the second region (Eb). The image processing unit 92 then performs image processing to compare the positions of the same feature points (e.g., the identification element Ha shown in FIG. 2) in the first and second images, and the calculation unit 93 calculates the feed amount of the strip-shaped member 70 in the feed-out step from the difference in the positions of the feature points.

[0092] As a modified example of the length detection unit in the braking device 50, the feed amount of the strip-shaped member 70 in the sending step can be detected based on the amount of movement of at least one of the first conveyor roller 73 and the second conveyor roller 74. In this case, the calculation unit 93 detects the rotation angle of the first conveyor roller 73 or the second conveyor roller 74 in the sending step and performs a calculation process to multiply the rotation angle by the circumferential length of the outer circumferential surface of the first conveyor roller 73 or the second conveyor roller 74, thereby detecting the feed amount of the strip-shaped member 70. When this modified example is applied, it is not necessary for the second imaging unit 64 to capture images of the first and second regions of the strip-shaped member 70 at the start and end of the sending step, and it is also not necessary to position the second imaging unit 64 directly below the strip-shaped member 70 as shown in FIG. 7.

[0093] In the remaining amount detection step, the remaining amount detection unit 94 of the control unit 90 detects the remaining amount of the strip-shaped member 70 wound around the roll 76 based on the rotation angle of the roll 76 stored in the angle memory unit 91 in the angle acquisition step and the length (feed amount) of the strip-shaped member 70 calculated by the calculation unit 93 in the length detection step. The method for detecting the remaining amount of the strip-shaped member 70 based on this information is as described above, and a detailed description will be omitted. However, for example, it is possible to calculate the diameter of the roll 76, the remaining number of turns of the strip-shaped member 70 around the roll 76, and the remaining length of the strip-shaped member 70 around the roll 76 using the above formulas (1) to (5).

[0094] When the remaining amount of the strip-shaped member 70 detected in the remaining amount detection step is low (below a set reference value), the control unit 90 issues a notification recommending replacement of the roll 76 via a notification unit (display monitor, indicator lamp, speaker, etc.) included in the braking device 50 or a communication device (server, personal computer, tablet computer, smartphone, etc.) that can communicate with the braking device 50. Furthermore, unlike existing sensors for detecting the remaining amount of the roll, the control unit 90 is capable of tracking and detecting changes in the remaining amount of the strip-shaped member 70, and therefore it is possible to change the content of the notification depending on changes in the remaining amount of the strip-shaped member 70. For example, in addition to recommending replacement of the roll 76 and predicting the replacement time, it is also possible to notify the remaining length or percentage of the strip-shaped member 70 in real time numerical values.

[0095] The remaining amount display can display any desired type of information regarding the remaining amount of the strip-shaped material 70, such as the diameter of the roll body 76, the number of remaining turns of the strip-shaped material 70 on the roll body 76, the remaining length of the strip-shaped material 70 on the roll body 76, the number of processing objects 40 that can be processed, and the time until the strip-shaped material 70 needs to be replaced due to a lack of remaining amount.

[0096] As described above, the breaking device 50 of this embodiment detects the remaining amount of the strip-shaped material 70 by using information obtained from the operation of the strip-shaped material supply mechanism that transports the strip-shaped material 70 and information obtained from images of the strip-shaped material 70 captured by the second imaging unit 64. The strip-shaped material supply mechanism is a component required to move the strip-shaped material 70 to a position where the processing object 40 is processed by the processing unit 55. The second imaging unit 64 is a component required to grasp the position of the dividing line 41 when the processing object 40 is processed by the processing unit 55. Therefore, the remaining amount of the strip-shaped material 70 can be easily detected with high versatility by utilizing the components provided in the breaking device 50, without adding a dedicated sensor for detecting the remaining amount of the strip-shaped material 70.

[0097] The breaking device 50 of the above embodiment is structured to hold, press, and divide the workpiece 40 at three points: the upper holding portion 56, the lower holding portion 57, and the pressing portion 58. However, it is also possible to apply the breaking device to a type that uses a pressing portion that moves horizontally, such as the attachment roller 25 in the mounter device 10 of the first embodiment, to press and divide the workpiece 40. In such a breaking device, the pressing portion presses the workpiece 40 via a strip-shaped member, thereby preventing processing waste from scattering and other effects, making it a useful subject for application of the present invention.

[0098] The above embodiment is an example of application to a mounter device 10 that attaches a strip-shaped member 13 to a processing object 11 and a breaking device 50 that presses a pressing unit 58 against the processing object 40 via a strip-shaped member 70 and divides the object along a dividing line 41. However, the present invention can also be applied to other processing devices. For example, in a protective member forming device that forms a protective member made of cured liquid resin on the surface of the processing object, a sheet-shaped strip-shaped member is pulled from a roll and placed on a table, liquid resin is dripped onto the strip-shaped member, the object is pressed against the sheet-shaped member to spread the liquid resin, and the liquid resin is then cured to form the protective member. The present invention can also be applied to detecting the remaining amount of strip-shaped member in such a protective member forming device.

[0099] The embodiments of the present invention are not limited to the above-described embodiments and modifications, and may be variously changed, substituted, or modified without departing from the spirit of the technical idea of ​​the present invention. Furthermore, if the technical idea of ​​the present invention can be realized in a different way due to technological advances or other derived technologies, it may be implemented using that method. Therefore, the claims cover all embodiments that may fall within the scope of the technical idea of ​​the present invention. [Industrial Applicability]

[0100] According to the processing device and processing method of the present invention, it is possible to detect the remaining amount of a strip-shaped material using information obtained from a configuration involved in the feeding operation of the strip-shaped material, thereby reducing the cost of detecting the remaining amount of a strip-shaped material and realizing highly versatile remaining amount detection without using a dedicated remaining amount detection sensor, thereby improving convenience. [Explanation of symbols]

[0101] 10: Mounter device (processing device) 11: Processing object 12: Holding table 13: Belt-shaped member 14: Delivery section 15: Winding section 16: First conveying roller 17: Second conveying roller 18: Core material 19: Roll body 20: Support shaft 21: Winding roller 22: Motor 23: Transmission mechanism 24: Rotation angle detection unit 25: Adhesion roller (processing part, fixing part) 26: Imaging unit (length detection unit) 30: Control section 31: Angle memory section 32: Image processing section 33: Calculation unit (length detection unit) 34: Remaining amount detection unit 40: Processing object 41: Dividing line 50: Breaking device (processing device) 51: Holding table 54: Table feed mechanism (pressure part positioning part) 55: Processing section 56:Top side holding part 57: Bottom side holding part (first support part) 58: Pressing part 59:Z-axis movement mechanism 60:Z-axis movement mechanism 61: Pressure section 62: Pressing drive unit 63: First imaging unit 64: Second imaging unit (length detection unit, division start point detection unit) 70: Belt-shaped member 71: Delivery section 72: Winding section 73: First conveying roller 74: Second conveying roller 75: Core material 76: Roll body 77: Support shaft 78: Winding roller 79: Motor 80: Transmission mechanism 81: Rotation angle detection unit 90: Control unit 91: Angle memory section 92: Image processing section 93: Calculation unit (length detection unit) 94: Remaining amount detection unit Ga: First image Gb: Second image Ha: Identification element (feature point)

Claims

1. a delivery section that delivers the belt-shaped material by rotating a roll on which the belt-shaped material is wound; a processing section for processing the delivered strip-shaped material; an angle storage unit that stores the rotation angle of the roll body when the strip-shaped material is fed; a length detection unit that detects the length of the belt-shaped material fed out when the roll body is rotated by the rotation angle stored in the angle storage unit; a remaining amount detection unit that detects the remaining amount of the belt-shaped material wound around the roll body based on the length and the rotation angle of the roll body; A processing device comprising:

2. The length detection unit a first image capturing a first region of the strip-shaped member before the strip-shaped member is fed by the feeding unit; an imaging unit that acquires a second image obtained by imaging a second region including at least a part of the first region after the second region has been sent out by the sending unit; a calculation unit that compares the positions of the same feature points in the first image and the second image by image processing and calculates the amount of movement of the belt-shaped member from the difference in the positions; 2. The processing apparatus according to claim 1, further comprising:

3. The processing unit a first support portion that supports one surface of the processing object on which the division starting points are formed; a pressing unit that presses the other surface of the object supported by the first support unit via the belt-shaped member and divides the object along the division starting point; The processing device according to claim 1 , further comprising:

4. a division starting point detection unit that detects an area corresponding to the division starting point from an image of the processing object; a pressing portion positioning portion that positions the pressing portion in the area detected by the division start point detection portion; 4. The processing device according to claim 3, further comprising:

5. The processing unit 2. The processing apparatus according to claim 1, further comprising a fixing portion for fixing the belt-shaped member to the object to be processed.

6. a feeding step of rotating a roll around which the belt-shaped member is wound and feeding out the belt-shaped member; a processing step for processing the delivered strip-shaped material; an angle acquisition step of acquiring a rotation angle of the roll body in the feeding step; a length detection step of detecting the length of the strip-shaped member fed in the feeding step; a remaining amount detecting step of detecting a remaining amount of the belt-shaped material wound on the roll body based on the length and the rotation angle of the roll body; A processing method comprising:

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