Tilt device

Abstract

In a tilt device that uses a gimbal mechanism as a rocking support mechanism, the aim is to make the device smaller and lighter. [Solution] The tilt device includes a gimbal mechanism that connects a holder to which a mirror, which is the object to be oscillated, is fixed, to a support. The gimbal frame includes a central frame portion located inside the holder, a pair of first extensions extending from the central frame portion to both sides in the direction of the first axis within a plane including the first and second axes, and a pair of second extensions extending to both sides in the direction of the second axis within the same plane as the first extensions. The pair of first extensions are connected to the holder via a pair of first pivot points provided inside the holder. The pair of second extensions extend to the outside of the holder and are connected to the support via a pair of second pivot points provided outside the holder.

Description

Technical Field

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[0001] The present invention relates to a tilt device.

Background Art

[0002] Conventionally, tilt devices for swinging various members have been used. Patent Document 1 describes an antenna device with a shake correction function including a swing device (tilt device) that swings an antenna, which is an object to be swung, in two directions around a swing fulcrum on the central axis of the antenna.

[0003] As devices for swinging an object to be swung in two directions, there are various applications other than antenna devices. For example, there are mirror tilt devices for swinging a mirror, devices for swinging other optical elements, or laser pointer devices for swinging a light-emitting element such as a laser diode.

[0004] Conventionally, an optical unit with a shake correction function including a swing device that swings a camera module including an imaging element and a lens unit in two directions around a swing fulcrum on the optical axis has been used. Patent Documents 2 and 3 describe this type of optical unit with a shake correction function.

[0005] The antenna device with a shake correction function of Patent Document 1 has an umbrella-shaped antenna fixed to the upper end of a resin-made movable body holder. The movable body holder is connected to a fixed body holder surrounding the outer periphery of the movable body holder via a gimbal member. The gimbal member is a flat leaf spring in which an inner ring portion fixed to the outer periphery of the movable body and an outer ring portion fixed to the fixed body are connected via an intermediate ring portion and a connecting portion.

[0006] The optical units with shake correction functions described in Patent Documents 2 and 3 connect a movable body and a fixed body via a gimbal mechanism. In Patent Document 2, the gimbal mechanism includes a rectangular movable frame (gimbal member). The movable frame has point contact with the movable body at one diagonal position and point contact with the fixed body at the other diagonal position. The movable frame is arranged to surround the outer circumference of the optical module provided on the movable body. On the other hand, in Patent Document 3, the shape of the gimbal frame (gimbal member) of the gimbal mechanism includes a first frame portion that overlaps with the movable body in the optical axis direction, and a second frame portion that bends in the optical axis direction from a diagonal position of the first frame portion and is connected to the movable body or the fixed body. [Prior art documents] [Patent Documents]

[0007] [Patent Document 1] Japanese Patent Publication No. 2019-33358 [Patent Document 2] Japanese Patent Publication No. 2014-6522 [Patent Document 3] Japanese Patent Publication No. 2020-160371 [Overview of the project] [Problems that the invention aims to solve]

[0008] As described above, in conventional tilt devices, when a gimbal mechanism is used as the swing support mechanism, space is required to position the gimbal member in the gap between the movable body and the fixed body. Therefore, the planar size of the device increases. As shown in Patent Document 3, it is also possible to position a part of the gimbal member so that it overlaps with the movable body in the optical axis direction, but in this case, the height of the device increases.

[0009] In view of these points, the object of the present invention is to miniaturize and lighten a tilt device that uses a gimbal mechanism as a swing support mechanism. [Means for solving the problem]

[0010] To solve the above problems, one embodiment of the tilt device according to the present invention comprises a holder on which an object to be oscillated is fixed to the outside, a support body surrounding the outer circumference of the holder, a gimbal mechanism connecting the holder and the support body, and a magnetic drive mechanism for oscillating comprising a magnet fixed to one of the support body and the holder, and a coil fixed to the other of the support body and the holder, wherein the axis connecting the pivot center located inside the holder and the object to be oscillated and the axis intersecting the pivot center is defined as the first axis, and the axis intersecting the central axis and the first axis at the pivot center is defined as the second axis, the gimbal mechanism comprises a gimbal frame that supports the holder so as to be able to oscillate around the first axis centered on the first axis, and the The gimbal frame is supported so as to be able to swing with respect to the support body about a second axis centered on the second axis, and the gimbal frame comprises a frame central portion located inside the holder, a pair of first extensions extending from the frame central portion to both sides in the first axial direction along the first axis in a plane including the first axis and the second axis, and a pair of second extensions extending to both sides in the second axial direction along the second axis in the same plane as the first extensions, wherein the pair of first extensions are connected to the holder via a pair of first pivot points provided inside the holder, and the pair of second extensions extend to the outside of the holder and are connected to the support body via a pair of second pivot points provided outside the holder. [Brief explanation of the drawing]

[0011] [Figure 1] Figure 1 is an external perspective view of the tilt device that pivots the mirror. [Figure 2] Figure 2 is an exploded perspective view of the mirror and tilt mechanism. [Figure 3] Figure 3 is a cross-sectional view of the tilt device taken in the XY plane. [Figure 4] Figure 4 is a cross-sectional view of the tilt device, cut along a plane containing the first axis and the Z-axis. [Figure 5] Figure 5 is a cross-sectional view of the tilt device, cut in a plane that includes the second axis and the Z axis. [Figure 6]Figure 6 is an exploded perspective view of the gimbal frame, the first spring member, and the second spring member. [Figure 7] Figure 7 is a perspective view of the holder from the Z2 side. [Figure 8] Figure 8 is a cross-sectional view of the tilt mechanism cut at the position of the third stopper. [Modes for carrying out the invention]

[0012] An embodiment of a tilt device to which the present invention is applied will be described below with reference to the drawings.

[0013] Figure 1 is an external perspective view of the tilt device 1 that swings the mirror 2. Figure 2 is an exploded perspective view of the mirror 2 and the tilt device 1. Figure 3 is a cross-sectional view of the tilt device 1 cut in the XY plane. Figure 4 is a cross-sectional view of the tilt device 1 cut in a plane including the first axis R1 and the Z axis. Figure 5 is a cross-sectional view of the tilt device 1 cut in a plane including the second axis R2 and the Z axis. Figure 6 is an exploded perspective view of the gimbal frame 50, the first spring member 53, and the second spring member 54. Figure 7 is a perspective view of the holder 3 seen from the Z2 side. Figure 8 is a cross-sectional view of the tilt device 1 cut at the position of the third stopper portion 73.

[0014] The tilt device 1 performs a tilt operation to swing the object to be oscillated. The object to be oscillated is not particularly limited, but examples include reflective members such as mirrors, antennas, optical members such as lenses and prisms, and light-emitting elements such as laser diodes. The tilt device 1 performs a tilt operation to swing the object to be oscillated based on a control signal from a higher-level device, for example. The following describes an embodiment in which the object to be oscillated is a mirror 2.

[0015] (Overall structure) As shown in FIGS. 1 to 5, the tilt device 1 includes a resin holder 3 to which a mirror 2 is fixed, a support 4 surrounding the outer periphery of the holder 3, a gimbal mechanism 5 connecting the holder 3 and the support 4, and a swing magnetic drive mechanism 6 that generates a magnetic driving force for swinging the holder 3. The swing magnetic drive mechanism 6 includes a first magnet 61X and a second magnet 61Y fixed to the holder 3, and a first coil 62X and a second coil 62Y fixed to the support 4. Note that the first coil 62X and the second coil 62Y may be arranged on the holder 3, and the first magnet 61X and the second magnet 61Y may be arranged on the support 4.

[0016] The mirror 2 includes a mirror body 20 provided with a circular reflecting surface 2a, and a convex portion 21 protruding from the center of the mirror body 20 to the side opposite to the reflecting surface 2a. As shown in FIGS. 4 and 5, the mirror 2 is fixed to the outside of the holder 3 via the convex portion 21. The mirror 2 and the holder 3 constitute a movable body that swings integrally. As will be described later, in the tilt device 1 of this embodiment, a part of the gimbal mechanism 5 is accommodated inside the holder 3, and the swing center P of the movable body including the mirror 2 and the holder 3 is located in the internal space of the holder 3. Therefore, the swing center P is located outside the mirror 2 that is the swing object, and the mirror 2 is separated from the swing center P.

[0017] In the following description, three axes orthogonal to each other are defined as the X-axis, Y-axis, and Z-axis. The Z-axis coincides with the central axis L connecting the position of the mirror 2 and the swing center P when the mirror 2, which is the swing object, is attached to the holder 3. As shown in FIGS. 4 and 5, the central axis L is a straight line passing through the center point P1 of the reflecting surface 2a of the mirror 2 and the swing center P, and coincides with the optical axis of the reflecting surface 2a.

[0018] The gimbal mechanism 5 supports the holder 3 so as to be swingable about the first axis R1 and also supports the holder 3 so as to be swingable about the second axis R2. The first axis R1 and the second axis R2 intersect with each other and intersect at the swing center P with respect to the Z axis. The first axis R1 and the second axis R2 are inclined with respect to the X axis and the Y axis around the Z axis. In this embodiment, the first axis R1, the second axis R2, and the Z axis are orthogonal to each other. And the first axis R1 and the second axis R2 are inclined at 45° with respect to the X axis and the Y axis around the Z axis. The X axis is the third axis. The Y axis is the fourth axis.

[0019] The tilt device 1 performs a combination of an operation of swinging the holder 3 about the first axis around the first axis R1 and an operation of swinging the holder 3 about the second axis around the second axis R2. Thereby, the angular position of the mirror 2 fixed to the holder 3 around the X axis and the angular position around the Y axis are adjusted.

[0020] Note that the gimbal mechanism 5 may be configured such that the first axis R1 and the second axis R2 are not inclined with respect to the X axis and the Y axis. For example, one of the first axis R1 and the second axis R2 may coincide with one of the X axis and the Y axis. In this case, the other of the first axis R1 and the second axis R2 may coincide with the other of the X axis and the Y axis, or may not coincide.

[0021] In the following description, the direction along the X axis is defined as the X-axis direction, the direction along the Y axis is defined as the Y-axis direction, and the direction along the Z axis is defined as the Z-axis direction. One side in the X-axis direction is defined as the X1 direction, the other side in the X-axis direction is defined as the X2 direction, one side in the Y-axis direction is defined as the Y1 direction, the other side in the Y-axis direction is defined as the Y2 direction, one side in the Z-axis direction is defined as the Z1 direction, and the other side in the Z-axis direction is defined as the Z2 direction. The mirror 2 is located on the Z1 side of the holder 3. Also, the direction along the first axis R1 is defined as the first-axis direction, and the direction along the second axis R2 is defined as the second-axis direction.

[0022] (Support) As shown in Figures 1, 2, and 3, the support 4 comprises a resin case 41 and a plate-shaped cover 40 fixed to the Z1 end face of the case 41. The cover 40 is made of a non-magnetic metal. When the tilt device 1 is assembled, a circular opening 40a is provided in the center of the cover 40. The mirror mounting portion 31 of the holder 3 protrudes in the Z1 direction. The mirror 2 is fixed to the tip of the mirror mounting portion 31.

[0023] The case 41 has a rectangular shape when viewed from the Z-axis direction. The case 41 includes a bottom portion 42 located on the Z2 side of the holder 3, and a side wall portion 43 connected to the outer edge of the bottom portion 42 and surrounding the outer circumference of the holder 3. The side wall portion 43 includes a first wall 431 and a second wall 432 facing each other in the Y-axis direction, and a third wall 433 and a fourth wall 434 facing each other in the X-axis direction.

[0024] (Magnetic drive mechanism for oscillation) As shown in Figure 2, the first wall 431 and the second wall 432 of the case 41 are each provided with a first coil fixing portion 45X. The first coil 62X of the oscillating magnetic drive mechanism 6 is positioned in the first coil fixing portion 45X. The first coil 62X is an oval-shaped air-core coil that is elongated in the X-axis direction. Similarly, the third wall 433 and the fourth wall 434 are each provided with a second coil fixing portion 45Y. The second coil 62Y of the oscillating magnetic drive mechanism 6 is positioned in the second coil fixing portion 45Y. The second coil 62Y is an oval-shaped air-core coil that is elongated in the Y-axis direction.

[0025] As shown in Figure 2, a first magnet 61X is fixed to each side of the holder 3 in the Y-axis direction. A second magnet 61Y is fixed to each side of the holder 3 in the X-axis direction. The first magnet 61X and the second magnet 61Y are polarized and magnetized in the Z-axis direction. As shown in Figure 3, the oscillation magnetic drive mechanism 6 comprises two sets of first magnets 61X and first coils 62X facing each other in the Y-axis direction, and two sets of second magnets 61Y and second coils 62Y facing each other in the X-axis direction. The set of first magnets 61X and first coils 62X constitutes a first magnetic drive mechanism 6X that generates a magnetic driving force to oscillate the holder 3 around the X-axis. The set of second magnets 61Y and second coils 62Y constitutes a second magnetic drive mechanism 6X that generates a magnetic driving force to oscillate the holder 3 around the Y-axis.

[0026] As shown in Figure 2, the first coil 62X and the second coil 62Y are electrically connected to the flexible printed circuit board 8 and powered via the flexible printed circuit board 8. The flexible printed circuit board 8 has four coil connection points 81 that are fitted into recesses 46 provided on the outer circumferential surfaces of the first wall 431, second wall 432, third wall 433, and fourth wall 434 of the case 41. The flexible printed circuit board 8 extends from the recesses 46 toward the bottom 42 and is drawn out in the X1 direction of the case 41 via the outside of the bottom 42.

[0027] A magnetic sensor 63, positioned inside the first coil 62X and the second coil 62Y, is connected to each coil connection section 81. Furthermore, a magnetic member 64 for returning to the origin is fixed to the back side of the first coil 62X and the second coil 62Y at each coil connection section 81. The oscillating magnetic drive mechanism 6 detects the angular position of the holder 3 and the mirror 2 based on the output of the magnetic sensor 63. When power is stopped to the first coil 62X and the second coil 62Y, the magnetic attraction force of the magnet fixed to the holder 3 attracting the magnetic member 64 causes the holder 3 and the mirror 2 to return to their origin positions.

[0028] (Holder) The holder 3 comprises a holder body 30 housed inside the case 41, and a mirror mounting portion 31 protruding in the Z1 direction from the center of the Z1-direction end of the holder body 30. The mirror mounting portion 31 is provided with a recess 32 into which the convex portion 21 of the mirror 2 fits. The holder body 30 has a rectangular shape that is slightly smaller than the case 41 when viewed from the Z-axis direction, and is positioned inside the side wall portion 43 of the case 41. The holder body 30 is provided with a first magnet fixing portion 33X that is recessed inward on the Y1 side and the Y2 side. A yoke 65 is positioned on the first magnet fixing portion 33X, and a first magnet 61X is fixed to the outside of the yoke 65. The sides of the main body 30, on the X1 and X2 sides, are provided with second magnet fixing portions 33Y that are recessed toward the inner circumference. A yoke 65 is positioned on the second magnet fixing portion 33Y, and a second magnet 61Y is fixed to the outside of the yoke 65.

[0029] As shown in Figures 4, 5, and 7, the holder body 30 is provided with a holder recess 34 that opens on the side opposite to the mirror 2. Part of the gimbal mechanism 5 is housed in the holder recess 34. As shown in Figures 3 and 7, the holder recess 34 comprises a central recess 35 located in the center of the holder body 30, a pair of first grooves 36 extending from the central recess 35 to both sides in the first axial direction, and a pair of second grooves 37 extending from the central recess 35 to both sides in the second axial direction. The first grooves 36 do not extend to the outer circumferential surface of the holder body 30 and do not penetrate the holder body 30 in the first axial direction. On the other hand, the second grooves 37 penetrate the holder body 30 in the second axial direction and open to the outer circumferential surface of the holder body 30 at diagonal positions in the second axial direction.

[0030] As shown in Figures 2 and 3, the holder body 30 has a shape in which diagonal portions in the second axial direction are cut out, and the second groove portion 37 opens in the cut-out portion. Due to the diagonal portions in the second axial direction of the holder body 30 being cut out, each side of the holder body 30 is cut out on the side at the diagonal position in the second axial direction. Accordingly, the first magnet fixing portion 33X is provided at a position shifted to the diagonal position in the first axial direction with respect to the center of the holder body 30 in the X direction. The second magnet fixing portion 33Y is provided at a position shifted to the diagonal position in the first axial direction with respect to the center of the holder body 30 in the Y direction.

[0031] In this way, by shifting each magnet fixing part to a diagonal position in the first axis direction, the size of the magnet fixing part on the side of the holder body 30 can be increased, and a larger magnet can be attached, while avoiding interference with the second extension part 57 of the gimbal frame 50. As shown in Figure 3, the first magnet 61X is attached not to the center of the holder body 30 in the X axis direction, but to a position shifted diagonally from the center of the holder body 30 in the X axis direction in the first axis R direction. Similarly, the second magnet 61Y is attached not to the center of the holder body 30 in the Y axis direction, but to a position shifted diagonally from the center of the holder body 30 in the Y axis direction in the first axis direction. On the other hand, the magnetic sensor 63 and the magnetic member 64 for returning to the origin, which are arranged on the support 4, are both positioned at the center of the holder body 30 in the X axis direction, or opposite the center of the holder body 30 in the Y axis direction.

[0032] (Gimbal mechanism) As shown in Figures 3, 4, and 5, the gimbal mechanism 5 comprises a gimbal frame 50, a first pivot point 51 provided on the holder body 30, and two second pivot points 52 provided on the case 41. As shown in Figure 6, the gimbal frame 50 is a rigid plate-shaped body with the Z-axis direction being the plate thickness direction. Metal spheres 501 are fixed by welding to four locations: both ends in the first axis direction and both ends in the second axis direction of the gimbal frame 50.

[0033] As shown in Figures 3 and 5, the first pivot points 51 are positioned on both sides of the gimbal frame 50 in the first axial direction and make point contact on the first axis R1 with respect to the spheres 501 fixed to both ends of the gimbal frame 50 in the first axial direction. As shown in Figures 3 and 4, the second pivot points 52 are positioned on both sides of the gimbal frame 50 in the second axial direction and make point contact on the second axis R2 with respect to the spheres 501 fixed to both ends of the gimbal frame 50 in the second axial direction. As a result, the holder 3 is supported by the gimbal frame 50 so as to be able to swing around the first axis, and the gimbal frame 50 is supported by the support 4 so as to be able to swing around the second axis.

[0034] As shown in Figures 3 and 5, the first pivot point 51 comprises a first spring mounting portion 38 provided on the holder body 30 and a first spring member 53 attached to the first spring mounting portion 38. As shown in Figure 5, the first spring mounting portion 38 extends in the Z1 direction from the tip of the first groove portion 36 of the holder recess 34. The holder body 30 is penetrated in the Z-axis direction.

[0035] As shown in Figures 3 and 4, the second pivot point 52 comprises a second spring mounting portion 47 provided on the case 41 and a second spring member 54 attached to the second spring mounting portion 47. As shown in Figure 4, the second spring mounting portion 47 is recessed from the inner circumferential surface of the diagonal portion in the second axial direction of the case 41 toward the outer circumferential side, extends in the Z2 direction, and penetrates the case 41 in the Z-axis direction.

[0036] As shown in Figure 6, the first spring member 53 and the second spring member 54 have the same shape and are used in opposite directions in the Z-axis direction. The first spring member 53 and the second spring member 54 are leaf springs with a shape that has been folded once in the Z-axis direction. The first spring member 53 and the second spring member 54 include a first plate portion 503 on which a concave curved surface 502 that makes point contact with the sphere 501 is formed, a second plate portion 504 that extends parallel to the first plate portion 503, and a bent portion 505 that connects the first plate portion 503 and the second plate portion 504. The concave curved surface 502 is concave in the direction from the first plate portion 503 toward the second plate portion 504.

[0037] As shown in Figure 3, the first spring member 53 is mounted on the first spring mounting portion 38 with its concave curved surface 502 facing inward. The second spring member 54 is mounted on the second spring mounting portion 47 with its concave curved surface 502 facing inward. When assembling the gimbal mechanism 5, the first plate portion 503 of the pair of first spring members 53 and the first plate portion 503 of the pair of second spring members 54 are bent outward before the gimbal frame 50 is attached. This biases the concave curved surface 502 toward the sphere 501 from both sides in the first axial direction and both sides in the second axial direction of the gimbal frame 50, maintaining a state in which the center of the concave curved surface 502 and the tip of the sphere 501 are in point contact on the first axis R1 and the second axis R2.

[0038] As shown in Figures 2 and 6, the gimbal frame 50 comprises a circular central frame portion 55 when viewed from the Z-axis direction, a pair of first extensions 56 extending from the central frame portion 55 to both sides in the first axis direction, and a pair of second extensions 57 extending from the central frame portion 55 to both sides in the second axis direction within the same plane as the first extensions 56. A circular reinforcing portion 58 recessed in the Z2 direction is provided in the center of the central frame portion 55. As shown in Figures 4 and 5, the portion of the gimbal frame 50 excluding the reinforcing portion 58 is located within the same plane including the first axis R1 and the second axis R2.

[0039] The gimbal frame 50 is positioned in a holder recess 34 provided in the holder body 30. As shown in Figure 3, the central part 55 of the frame is positioned in the central recess 35 of the holder recess 34, the first extension 56 is positioned in the first groove 36, and the second extension 57 is positioned in the second groove 37. In the gimbal frame 50, recesses that are recessed toward the inner circumference are formed on the tip surfaces of the first extension 56 and the second extension 57, and spheres 501 are welded to these recesses. As a result, convex surfaces that make point contact with concave surfaces 502 are positioned at both ends of the gimbal frame 50 in the first axial direction and at both ends in the second axial direction.

[0040] Alternatively, instead of fixing the spheres 501 to both ends of the gimbal frame 50 in the first axial direction and both ends in the second axial direction, a configuration may be adopted in which protrusions are provided, and a convex curved surface that makes point contact with the concave curved surface 502 is provided at the tip of the protrusions.

[0041] The gimbal frame 50 has a reinforcing portion 58, which increases the rigidity of the central portion 55 of the frame. Also, in this embodiment, as shown in Figures 4 and 5, the center of the gimbal frame 50 in the thickness direction and the center of the sphere 501 are offset, so it is necessary to determine the front and back of the gimbal frame 50 when assembling it. By providing the reinforcing portion 58, it is possible to easily determine the front and back of the gimbal frame 50. Note that the central portion 55 of the frame is not limited to the above configuration. For example, the planar shape of the central portion 55 of the frame is not limited to a circle. Also, a through portion that penetrates the center of the central portion 55 of the frame may be provided.

[0042] (Stopper mechanism) As shown in Figures 4 and 5, the tilt device 1 includes a first stopper portion 71 and a second stopper portion 72 that are opposed to the central portion 55 of the gimbal frame 50 in the Z-axis direction. When an impact such as a fall is applied, the tilt device 1 causes the central portion 55 of the frame, which is reinforced by the reinforcing portion 58, to collide with either the first stopper portion 71 or the second stopper portion 72 first. This prevents damage to other parts from the impact.

[0043] The first stopper portion 71 is provided on the holder 3. As shown in Figure 7, the first stopper portion 71 is a circular protrusion projecting in the Z2 direction from the center of the bottom surface of the central recess 35 of the holder recess 34. As shown in Figure 4, the first stopper portion 71 faces the portion of the central frame portion 55 that surrounds the outer circumference of the reinforcing portion 58. The gap S1 in the Z-axis direction between the first stopper portion 71 and the central frame portion 55 is smaller than the gap in the Z2 direction between the case 41 and the holder 3. Therefore, when dropped, the first stopper portion 71 collides with the central frame portion 55 before the holder 3 collides with the case 41.

[0044] The second stopper portion 72 is provided on the case 41. As shown in Figure 2, the case 41 has a circular protrusion 48 that projects in the Z1 direction from the center of the bottom portion 42, and the tip of the circular protrusion 48 functions as the second stopper portion 72. As shown in Figures 4 and 5, the tip of the circular protrusion 48 (the second stopper portion 72) is positioned inside the central recess 35. The second stopper portion 72 faces the reinforcing portion 58 of the central portion 55 of the frame. The gap S2 in the Z-axis direction between the second stopper portion 72 and the reinforcing portion 58 is smaller than the gap in the Z2 direction between the case 41 and the holder 3. Therefore, when dropped, the second stopper portion 72 collides with the central portion 55 of the frame before the holder 3 collides with the case 41.

[0045] As shown in Figures 7 and 8, the portion of the inner surface of the central recess 35 in the holder body 30 that faces radially from the outer circumferential surface of the circular protrusion 48 of the case 41 functions as a third stopper portion 73 for restricting the swing range of the holder 3. The third stopper portion 73 is an inclined surface that slopes inward towards the inner circumference (in other words, towards the central axis L) as it moves toward the side of the swing center P (in this embodiment, the Z1 direction) in the Z-axis direction. As shown in Figure 7, the third stopper portion 73 comprises a pair of first inclined surfaces 73X facing each other in the X-axis direction and a pair of second inclined surfaces 73Y facing each other in the Y-axis direction. Therefore, the swing range of the holder 3 around the X-axis is restricted by the first inclined surfaces 73X, and the swing range of the holder 3 around the Y-axis is restricted by the second inclined surfaces 73Y.

[0046] (Effects and Benefits) As described above, the tilt device 1 of this embodiment includes a holder 3 having a mirror mounting portion 31 as a mounting portion for an object to be swung and fixed to the outside of the mirror 2, a support 4 surrounding the outer circumference of the holder 3, a gimbal mechanism 5 connecting the holder 3 and the support 4, and a magnetic drive mechanism 6 for swung that includes a first magnet 61X and a second magnet 61Y fixed to the holder 3, and a first coil 62X and a second coil 62Y fixed to the support 4. When the axis that intersects the central axis L, which connects the swung center P located inside the holder 3 and the position of the mirror 2 when attached to the mirror mounting portion 31, at the swung center P is defined as the first axis R1, and the axis that intersects the central axis L and the first axis R1 at the swung center P is defined as the second axis R2, the gimbal mechanism 5 includes a gimbal frame 50 that supports the holder 3 so that it can swung around the first axis centered on the first axis R1. The gimbal frame 50 is supported on the support 4 so as to be able to swing about a second axis centered on the second axis R2. The gimbal frame 50 comprises a central frame portion 55 located inside the holder 3, a pair of first extensions 56 extending from the central frame portion 55 to both sides in the first axis direction within a plane including the first axis R1 and the second axis R2, and a pair of second extensions 57 extending to both sides in the second axis direction within the same plane as the first extensions 56. The pair of first extensions 56 are connected to the holder 3 via a pair of first pivots 51 provided inside the holder 3. The pair of second extensions 57 extend to the outside of the holder 3 and are connected to the support 4 via a pair of second pivots 52 provided outside the holder 3. ru.

[0047] In this embodiment, the mirror 2, which is the object to be oscillated, is located outside the holder 3, while the majority of the gimbal frame 50 and the first pivot point 51 are located inside the holder 3. Therefore, the gimbal mechanism 5 can be miniaturized and simplified. For example, in this embodiment, since space for the gimbal frame 50 can be secured inside the holder 3, the gimbal frame 50 can have a planar shape. Also, there is no need to secure space for the first extension 56 and the first pivot point 51 outside the holder 3. Therefore, the planar size and height of the device can be reduced, and the weight can be reduced.

[0048] The gimbal frame 50 in this embodiment is a plate-shaped rigid body whose thickness direction is perpendicular to the plane containing the first and second axes, in other words, along the central axis L. Therefore, the shape of the parts can be simplified and miniaturized, and the weight of the parts can be reduced. In addition, by using a rigid body, impact resistance can be improved.

[0049] In this embodiment, the gimbal frame 50 is provided with a reinforcing portion 58 that is recessed in the thickness direction in the central part 55 of the frame. In the case of plate-shaped parts, it may not be easy to distinguish between the front and back of the part, but by providing the reinforcing portion 58 as described above, it is possible to easily distinguish between the front and back. In addition, by providing the reinforcing portion 58, the rigidity of the part can be increased. Therefore, the impact resistance can be improved.

[0050] The holder 3 in this embodiment is provided with a holder recess 34 that opens in a direction along the central axis L. The holder recess 34 includes a central recess 35 in which the central part 55 of the frame is located, a pair of first grooves 36 extending from the central recess 35 to both sides in the first axial direction in which a pair of first pivot points 51 are located, and a pair of second grooves 37 extending from the central recess 35 to both sides in the second axial direction in which the second grooves 37 open to the outer circumferential surface of the holder 3 in the second axial direction. The pair of second extensions 57 extend to the outside of the holder 3 through the pair of second grooves 37. In this way, the holder 3 is provided with a shape that corresponds to the shape and arrangement of the components of the gimbal mechanism 5. Therefore, the ease of assembly of the gimbal mechanism 5 can be improved.

[0051] In this embodiment, a first stopper portion 71 is provided on the inner surface of the central recess 35, facing the central portion 55 of the frame in a direction along the central axis L. The central portion 55 of the frame is a part where the distance of movement in the Z-axis direction is small when the holder 3 swings relative to the gimbal frame 50. Therefore, by using this part as a stopper mechanism, the gap S1 between the first stopper portion 71 and the central portion 55 of the frame can be reduced. Thus, the function as an impact-resistant stopper can be enhanced.

[0052] In this embodiment, the support 4 has a bottom portion 42 located on the opposite side of the holder 3 from the mirror 2, and the bottom portion 42 has a circular protrusion 48 that projects toward the holder 3. A second stopper portion 72 is provided at the tip of the circular protrusion 48, facing the central portion 55 of the frame. As described above, the central portion 55 of the frame is a part where the distance of movement in the Z-axis direction when the holder 3 swings relative to the gimbal frame 50 is small. Therefore, by using this part as a stopper mechanism, the gap S2 between the second stopper portion 72 and the central portion 55 of the frame can be reduced. Thus, the function as an impact-resistant stopper can be enhanced.

[0053] In this embodiment, the support 4 has a bottom portion 42 located on the opposite side of the holder 3 from the mirror 2. The bottom portion 42 has a circular protrusion 48 that projects toward the holder 3 and is positioned inside the holder recess 34. A third stopper portion 73 is provided on the inner surface of the holder recess 34, facing the circular protrusion 48 from the outer circumference. Thus, in this embodiment, a stopper mechanism that restricts the swing range can be provided inside the holder 3, so the stopper shape is not required on the outside of the holder 3. It is not necessary to install it. Therefore, the device can be made smaller.

[0054] In this embodiment, the third stopper portion 73 is an inclined surface that slopes inward toward the inner circumference as it moves toward the pivot center P. This allows for the regulation of the oscillation range when oscillating around the pivot center P.

[0055] In this embodiment, when the central axis L, the first axis R1, and the second axis R2 intersect at the pivot center P, and the axes that intersect each other in a plane including the first axis R1 and the second axis R2 are defined as the Y axis and the X axis, the holder 3 comprises a pair of first magnet fixing parts 33X facing both sides in the Y axis direction, and a pair of second magnet fixing parts 33Y facing both sides in the X axis direction. The support body 4 comprises a pair of first coil fixing parts 45X facing each of the pair of first magnet fixing parts 33X in the Y axis direction, and a pair of second coil fixing parts 45Y facing each of the pair of second magnet fixing parts 33Y in the X axis direction. The rocking magnetic drive mechanism 6 comprises a first magnetic drive mechanism 6X, which includes a first magnet 61X fixed to a pair of first magnet fixing parts 33X and a first coil 62X fixed to a pair of first coil fixing parts 45X, and a second magnetic drive mechanism 6Y, which includes a second magnet 61Y fixed to a pair of second magnet fixing parts 33Y and a second coil 62Y fixed to a pair of second coil fixing parts 45Y. In this way, the angular positions where the first pivot point 51 and the second pivot point 52 of the gimbal mechanism 5 are not located can be used as space for the magnets and coils. Therefore, the planar size of the device can be reduced.

[0056] In this embodiment, the first magnet 61X is positioned shifted to the side of the first axis R1 from the center of the holder 3 in the X-axis direction. Similarly, the second magnet 61Y is positioned shifted to the side of the first axis R1 from the center of the holder 3 in the Y-axis direction. This arrangement allows for larger sizes of the first magnet 61X and the second magnet 61Y while avoiding interference with the second extension portion 57 of the gimbal frame 50 that extends outside the holder 3.

[0057] In this embodiment, the first support point 51 makes point contact with the tip of the first extension 56 on the first axis R1, and the second support point 52 makes point contact with the tip of the second extension 57 on the second axis R2. As a result, as described above, the gimbal frame 50 supports the holder 3 so that it can swing around the first axis, and the gimbal frame 50 is supported relative to the support 4 so that it can swing around the second axis.

[0058] The first support point 51 only needs to have a structure that allows the tip of the first extension 56 to rotate around the first axis, and does not need to be a structure that includes a concave curved surface 502 that makes point contact with the sphere 501, as in this embodiment. Similarly, the second support point 52 only needs to have a structure that allows the tip of the second extension 57 to rotate around the second axis.

[0059] In this embodiment, a first spring member 53 that elastically deforms in the first axial direction is positioned at the first pivot point 51, and a second spring member 54 that elastically deforms in the second axial direction is positioned at the second pivot point 52. In this configuration, the elastic force of each spring member biases the concave curved surface 502 provided on each spring member toward the sphere 501 provided on the gimbal frame 50, maintaining a state in which the center of the concave curved surface 502 is in point contact with the sphere 501. Furthermore, since the gimbal frame 50 can be easily attached by bending each spring member, the ease of assembly of the gimbal mechanism 5 can be improved.

[0060] In this embodiment, the sphere 501 is fixed to the gimbal frame 50, the first spring member 53 is positioned at the first pivot point 51, and the second spring member 54 is positioned at the second pivot point 52. However, the first spring member 53 and the second spring member 54 may be fixed to the gimbal frame 50, and the sphere 501 may be positioned at the first pivot point 51 and the second pivot point 52. For example, metal plates to which the sphere 501 is fixed may be attached to the first spring mounting portion 38 and the second spring mounting portion 47, respectively. It is possible.

[0061] (summary) The present invention can take the following forms. (1) A holder equipped with a mounting part for fixing the object to be oscillated to the outside, A support surrounding the outer circumference of the holder, A gimbal mechanism connecting the holder and the support, It comprises a magnetic drive mechanism for oscillation, which includes a magnet fixed to one of the support and the holder, and a coil fixed to the other of the support and the holder. When the axis connecting the pivot center located inside the holder and the position of the object to be oscillated when attached to the object mounting part is defined as the first axis and the axis intersecting the pivot center is defined as the second axis, The gimbal mechanism comprises a gimbal frame that supports the holder so as to be able to swing around a first axis centered on the first axis, and the gimbal frame is supported with respect to the support so as to be able to swing around a second axis centered on the second axis. The gimbal frame comprises a central frame portion located inside the holder, a pair of first extensions extending from the central frame portion to both sides in the first axial direction along the first axis within a plane including the first and second axes, and a pair of second extensions extending to both sides in the second axial direction along the second axis within the same plane as the first extensions. The pair of first extensions are connected to the holder via a pair of first support points provided inside the holder, The tilt device is characterized in that the pair of second extensions extend outward from the holder and are connected to the support via a pair of second pivot points provided on the outside of the holder.

[0062] (2) The tilt device according to (1) above, characterized in that the gimbal frame is a plate-shaped rigid body with the direction perpendicular to the plane as the plate thickness direction.

[0063] (3) The tilt device according to (2) above, characterized in that the gimbal frame is provided with a reinforcing portion that is recessed in the direction of the plate thickness in the central part of the frame.

[0064] (4) The holder is provided with a holder recess that opens in a direction along the central axis, The holder recess comprises a central recess in which the central portion of the frame is positioned, a pair of first grooves extending from the central recess to both sides in the first axial direction in which the pair of first support points are positioned, and a pair of second grooves extending from the central recess to both sides in the second axial direction in which the pair of second grooves open to the outer circumferential surface of the holder in the second axial direction. The tilt device according to any one of (1) to (3) above, characterized in that the pair of second extensions extends outward from the holder through the pair of second grooves.

[0065] (5) The tilt device according to (4) above, characterized in that a first stopper portion is provided on the inner surface of the central recess, facing the central portion of the frame in a direction along the central axis.

[0066] (6) The support has a bottom portion located on the opposite side from the object to be swung relative to the holder, The bottom portion is provided with a protrusion that extends toward the holder side, and a second stopper portion is provided at the tip of the protrusion that faces the central portion of the frame, as described in (4) or (5) above. The tilt device described in ).

[0067] (7) The support has a bottom portion located on the opposite side from the object to be swung relative to the holder, The tilt device according to any one of (4) to (6) above, characterized in that the bottom portion has a convex portion that protrudes toward the holder side and is positioned inside the holder recess, and the inner surface of the holder recess is provided with a third stopper portion that faces the convex portion from the outer circumference side.

[0068] (8) The tilt device according to (7) above, characterized in that the third stopper portion is an inclined surface that is inclined toward the inner circumference as it moves toward the pivot center.

[0069] (9) When the axes that intersect the central axis, the first axis, and the second axis at the pivot center and intersect each other in the plane are defined as the third axis and the fourth axis, The holder comprises a pair of first magnet fixing parts facing both sides in the fourth axial direction along the fourth axis, and a pair of second magnet fixing parts facing both sides in the third axial direction along the third axis. The support comprises a pair of first coil fixing portions facing each of the pair of first magnet fixing portions in the fourth axial direction, and a pair of second coil fixing portions facing each of the pair of second magnet fixing portions in the third axial direction. The aforementioned magnetic drive mechanism for oscillation is A first magnetic drive mechanism comprising the magnets fixed to the pair of first magnet fixing parts and the coils fixed to the pair of first coil fixing parts, A tilt device according to any one of (1) to (8) above, characterized by comprising a second magnetic drive mechanism comprising the magnets fixed to the pair of second magnet fixing parts and the coils fixed to the pair of second coil fixing parts.

[0070] (10) The first magnet is positioned so as to be shifted diagonally in the first axial direction from the center of the holder in the third axial direction. The tilt device according to (9) above, characterized in that the second magnet is positioned at a location shifted to the diagonal position in the first axial direction from the center of the holder in the fourth axial direction.

[0071] (11) The first support point makes point contact with the tip of the first extension on the first axis, The tilt device according to any one of (1) to (10) above, characterized in that the second support portion makes point contact with the tip of the second extension portion on the second axis.

[0072] (12) A first spring member that elastically deforms in the first axial direction is positioned at either the first support point or the tip of the first extension. The tilt device according to (11) above, characterized in that a second spring member that elastically deforms in the second axial direction is arranged at one of the second support portion and the tip of the second extension portion. [Explanation of Symbols]

[0073] 1...Tilt device, 2...Mirror, 2a...Reflective surface, 3...Holder, 4...Case, 5...Gimbal mechanism, 6...Magnetic drive mechanism for oscillation, 6X...First magnetic drive mechanism, 6Y...Second magnetic drive mechanism, 8...Flexible printed circuit board, 20...Mirror body, 21...Protrusion, 30...Holder body, 31...Mirror mounting part, 32...Recess, 33X...First magnet fixing part, 33Y...Second magnet fixing part, 34...Holder recess, 35...Central recess, 36...First groove, 37...Second groove, 38...First spring mounting part 40...Cover, 40a...Opening, 41...Case, 42...Bottom, 43...Side wall, 45X...First coil fixing part, 45Y...Second coil fixing part, 46...Recess, 47...Second spring mounting part, 48...Circular protrusion, 50...Gimbal frame, 51...First pivot point, 52...Second pivot point, 53...First spring member, 54...Second spring member, 55...Frame center, 56...First extension part, 57...Second extension part, 58...Reinforcement part, 61X...First magnet, 61Y...Second magnet, 62X...First coil, 62Y...Second coil Il, 63...Magnetic sensor, 64...Magnetic member, 65...Yoke, 71...First stopper part, 72...Second stopper part, 73...Third stopper part, 73X...First inclined surface, 73Y...Second inclined surface, 81...Coil connection part, 431...First wall, 432...Second wall, 433...Third wall, 434...Fourth wall, 501...Sphere, 502...Concave curved surface, 503...First plate part, 504...Second plate part, 505...Bent part, L...Central axis, P...Oscillation center, P1...Center point of the reflective surface, R1...First axis, R2...Second axis, S1, S2...Gap

Claims

1. A holder equipped with a mounting part for fixing the object to be oscillated to the outside, A support surrounding the outer circumference of the holder, A gimbal mechanism connecting the holder and the support, It comprises a magnetic drive mechanism for oscillation, which includes a magnet fixed to one of the support and the holder, and a coil fixed to the other of the support and the holder. When the axis connecting the pivot center located inside the holder and the position of the object to be oscillated when attached to the object mounting part is defined as the first axis and the axis intersecting the pivot center is defined as the second axis, The gimbal mechanism comprises a gimbal frame that supports the holder so as to be able to swing around a first axis centered on the first axis, and the gimbal frame is supported with respect to the support so as to be able to swing around a second axis centered on the second axis. The gimbal frame comprises a central frame portion located inside the holder, a pair of first extensions extending from the central frame portion to both sides in the first axial direction along the first axis within a plane including the first and second axes, and a pair of second extensions extending to both sides in the second axial direction along the second axis within the same plane as the first extensions. The pair of first extensions are connected to the holder via a pair of first support points provided inside the holder. The tilt device is characterized in that the pair of second extensions extend outward from the holder and are connected to the support via a pair of second pivot points provided on the outside of the holder.

2. The tilt device according to claim 1, characterized in that the gimbal frame is a plate-shaped rigid body whose thickness direction is perpendicular to the plane.

3. The tilt device according to claim 2, characterized in that the gimbal frame is provided with a reinforcing portion recessed in the plate thickness direction in the central part of the frame.

4. The holder is provided with a holder recess that opens in a direction along the central axis, The holder recess comprises a central recess in which the central portion of the frame is positioned, a pair of first grooves extending from the central recess to both sides in the first axial direction and in which the pair of first support points are positioned, and a pair of second grooves extending from the central recess to both sides in the second axial direction and opening to the outer circumferential surface of the holder in the second axial direction. The tilt device according to claim 1, characterized in that the pair of second extensions extend outward from the holder through the pair of second grooves.

5. The tilt device according to claim 4, characterized in that a first stopper portion is provided on the inner surface of the central recess, facing the central portion of the frame in a direction along the central axis.

6. The support has a bottom portion located on the opposite side from the object to be swung relative to the holder, The tilt device according to claim 4, characterized in that the bottom portion has a protrusion that projects toward the holder side, and a second stopper portion facing the central portion of the frame is provided at the tip of the protrusion.

7. The support has a bottom portion located on the opposite side from the object to be swung relative to the holder, The tilt device according to claim 4, characterized in that the bottom portion has a convex portion that protrudes toward the holder and is positioned inside the holder recess, and the inner surface of the holder recess is provided with a third stopper portion that faces the convex portion from the outer circumference.

8. The third stopper portion is inclined toward the inner circumference as it moves toward the pivot center. The tilt device according to claim 7, characterized in that it is an inclined surface.

9. When the axes that intersect the central axis, the first axis, and the second axis at the pivot center and intersect each other in the plane are defined as the third axis and the fourth axis, The holder comprises a pair of first magnet fixing parts facing both sides in the fourth axial direction along the fourth axis, and a pair of second magnet fixing parts facing both sides in the third axial direction along the third axis. The support comprises a pair of first coil fixing portions facing each of the pair of first magnet fixing portions in the fourth axial direction, and a pair of second coil fixing portions facing each of the pair of second magnet fixing portions in the third axial direction. The aforementioned magnetic drive mechanism for oscillation is A first magnetic drive mechanism comprising the magnets fixed to the pair of first magnet fixing parts and the coils fixed to the pair of first coil fixing parts, The tilt device according to claim 1, further comprising a second magnetic drive mechanism which includes the magnets fixed to the pair of second magnet fixing parts and the coils fixed to the pair of second coil fixing parts.

10. The first magnet is positioned at a location shifted diagonally in the first axial direction from the center of the holder in the third axial direction, The tilt device according to claim 9, characterized in that the second magnet is positioned at a location shifted diagonally in the first axial direction from the center of the holder in the fourth axial direction.

11. The first support point makes point contact with the tip of the first extension on the first axis, The tilt device according to claim 1, characterized in that the second support portion makes point contact with the tip of the second extension portion on the second axis.

12. A first spring member that elastically deforms in the first axial direction is positioned at one of the first support point and the tip of the first extension. The tilt device according to claim 11, characterized in that a second spring member that elastically deforms in the second axial direction is arranged at one of the second support portion and the tip of the second extension portion.

Images