Temperature sensor

Abstract

This invention prevents the conductive lines of a temperature sensor from functioning as electrodes. [Configuration] The temperature sensor S1 comprises a base body 100, a thermoelectric conversion unit 500, a first electrode 200a, a second electrode 200b, a first conductive line 300a, a second conductive line 300b, and an insulating unit 600. The first electrode 200a and the second electrode 200b are provided on the base body 100 and are in contact with the thermoelectric conversion unit 500 from the Z' direction side. A voltage difference is generated between the first electrode 200a and the second electrode 200b according to the temperature gradient generated in the thermoelectric conversion unit 500. The first conductive line 300a and the second conductive line 300b are provided on the base body 100 and extend from the first electrode 200a and the second electrode 200b. The insulating portion 600 includes a first insulating portion 610 interposed between the thermoelectric conversion portion 500 and the first conductive line 300a, and a second insulating portion 620 interposed between the thermoelectric conversion portion 500 and the second conductive line 300b.

Description

Technical Field

[0001] The present invention relates to a temperature sensor.

Background Art

[0002] The following Patent Document 1 discloses a conventional temperature sensor. This temperature sensor includes a flexible substrate, a plurality of first electrodes, a plurality of second electrodes, and a plurality of thermoelectric conversion units. The plurality of first electrodes are provided in a row at intervals on the flexible substrate. The plurality of second electrodes are provided in a row at intervals on the flexible substrate. The plurality of first electrodes and the plurality of second electrodes are arranged opposite to each other at intervals one by one. The plurality of thermoelectric conversion units are made of a material that converts heat into electric power by the Seebeck effect and extend from the plurality of first electrodes to the plurality of second electrodes.

[0003] When each first electrode is used as a reference electrode and each second electrode is used as a detection electrode, a voltage difference is generated between each first electrode and each second electrode according to the temperature gradient of each thermoelectric conversion unit. The relative temperature near each second electrode is detected according to this voltage difference.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] In the conventional temperature sensor, there is no teaching or suggestion regarding the plurality of first conductive lines each connected to the plurality of first electrodes themselves and the plurality of second conductive lines each connected to the plurality of second electrodes themselves.

[0006] The present invention provides a temperature sensor that prevents a conductive line from contacting a thermoelectric conversion unit and functioning as an electrode. [Means for solving the problem]

[0007] A temperature sensor according to one aspect of the present invention comprises a thermoelectric conversion unit made of a material that converts heat into electricity, a first electrode and at least one second electrode, at least one conductive line, and an insulating unit.

[0008] The first electrode and at least one second electrode are in at least partially direct or indirect contact with the thermoelectric conversion section from one side in the first direction. The at least one second electrode is spaced apart from the first electrode in a direction substantially perpendicular to the first direction. A voltage difference is generated between the first electrode and the at least one second electrode in accordance with the temperature gradient generated in the thermoelectric conversion section. The first direction is the thickness direction of the thermoelectric conversion section.

[0009] At least one conductive line has at least one of a first conductive line extending from a first electrode and at least one second conductive line extending from at least one second electrode.

[0010] The insulating portion includes at least one of a first insulating portion interposed between the thermoelectric conversion portion and the first conductive line, and at least one second insulating portion interposed between the thermoelectric conversion portion and at least one second conductive line.

[0011] The above temperature sensor may further comprise an insulating substrate. The substrate may have a first main surface on the other side of the first direction. A first electrode and at least one second electrode may be provided on the first main surface of the substrate. At least one of a first conductive line and at least one second conductive line may be provided on the first main surface of the substrate.

[0012] The insulating portion is composed of an insulating layer or insulating film that abuts the thermoelectric conversion portion from one side in the first direction, and may further have a first opening and at least one second opening. The first electrode may be in at least partially direct or indirect contact with the thermoelectric conversion portion from one side in the first direction through the first opening. At least one second electrode may be in at least partially direct or indirect contact with the thermoelectric conversion portion from one side in the first direction through at least one second opening. [Effects of the Invention]

[0013] The temperature sensor in the above-described embodiment can prevent the conductive line from contacting the thermoelectric conversion unit and functioning as an electrode. The reason is as follows: If at least one conductive line has a first conductive line and the insulating part has a first insulating part, the first insulating part is interposed between the thermoelectric conversion unit and the first conductive line, so the first conductive line does not come into contact with the thermoelectric conversion unit. If at least one conductive line has at least one second conductive line and the insulating part has at least one second insulating part, at least one second insulating part is interposed between the thermoelectric conversion unit and at least one second conductive line, so at least one second conductive line does not come into contact with the thermoelectric conversion unit. [Brief explanation of the drawing]

[0014] [Figure 1] This is a schematic plan view of a temperature sensor according to Embodiment 1 of the present invention, in which the first electrode, a plurality of second electrodes, a first conductive line, a plurality of second conductive lines, a first terminal portion, and a plurality of second terminal portions of the sensor are shown by dashed lines. [Figure 2] This is a schematic plan view of the temperature sensor according to Example 1, with the thermoelectric conversion section removed and the insulating section exposed, showing the first electrode, multiple second electrodes, first conductive line, multiple second conductive lines, first terminal section, and multiple second terminal sections of the sensor with dashed lines. [Figure 3A] This is an end view of the temperature sensor in Example 1, shown at 3A-3A in Figure 1. [Figure 3B]It is the 3B-3B end view in FIG. 1 of the temperature sensor of Example 1. [Figure 3C] It is the 3C-3C end view in FIG. 1 of the temperature sensor of Example 1. [Figure 4A] It is the end view corresponding to FIG. 3A of the first design modification of the temperature sensor of Example 1. [Figure 4B] It is the end view corresponding to FIG. 3B of the temperature sensor of the first design modification. [Figure 4C] It is the end view corresponding to FIG. 3C of the temperature sensor of the first design modification. [Figure 5A] It is the end view corresponding to FIG. 3A of the second design modification of the temperature sensor of Example 1. [Figure 5B] It is the end view corresponding to FIG. 3B of the temperature sensor of the second design modification. [Figure 5C] It is the end view corresponding to FIG. 3C of the temperature sensor of the second design modification. [Figure 6A] It is a schematic plan view of the temperature sensor according to Example 2 of the present invention, showing the first electrode, a plurality of second electrodes, a plurality of second conductive lines, and a plurality of second terminal portions of the sensor by a dashed line. [Figure 6B] It is a schematic bottom view of the temperature sensor according to Example 2. [Figure 7] It is a schematic plan view of the temperature sensor according to Example 2 with the thermoelectric conversion portion removed to expose the insulating portion, showing the first electrode, a plurality of second electrodes, a plurality of second conductive lines, and a plurality of second terminal portions of the sensor by a dashed line. [Figure 8A] It is a schematic plan view of the temperature sensor according to Example 3 of the present invention, showing the first electrode, a plurality of second electrodes, the first conductive line, and the first terminal portion of the sensor by a dashed line. [Figure 8B] It is a schematic bottom view of the temperature sensor according to Example 3. [Figure 9] It is a schematic plan view of the temperature sensor according to Example 3 with the thermoelectric conversion portion removed to expose the insulating portion, showing the first electrode, a plurality of second electrodes, the first conductive line, and the first terminal portion of the sensor by a dashed line.

Mode for Carrying Out the Invention

[0015] Hereinafter, a plurality of embodiments including Embodiments 1, 2, and 3 of the present invention and their design variations will be described. It should be noted that the components of the embodiments and design variations described below can be combined with each other as long as they do not conflict with each other. Also, it should be noted that the materials, shapes, dimensions, numbers, arrangements, etc. of the components constituting each aspect of the embodiments and design variations described below are only examples, and design changes can be arbitrarily made as long as the same functions can be realized.

Embodiment

[0016] Hereinafter, a temperature sensor S1 (hereinafter, also simply referred to as "sensor S1") according to a plurality of embodiments including Embodiment 1 of the present invention and its design variations will be described with reference to FIGS. 1 to 5C. FIGS. 1 to 3C show the temperature sensor S1 of Embodiment 1. FIGS. 4A to 4C show the first design variation of the temperature sensor S1 of Embodiment 1. FIGS. 5A to 5C show the second design variation of the temperature sensor S1 of Embodiment 1.

[0017] FIGS. 3A to 5C show the Z-Z' direction (first direction). The Z-Z' direction includes the Z' direction (one side of the first direction) and the Z direction (the other side of the first direction). FIGS. 1 to 3A, 4A, and 5A show the X-X' direction (second direction). The X-X' direction is substantially orthogonal to the Z-Z' direction and includes the X direction (one side of the second direction) and the X' direction (the other side of the second direction). FIGS. 1 to 2, 3B to 3C, 4B to 4C, and 5B to 5C show the Y-Y' direction (third direction). The Y-Y' direction is substantially orthogonal to the Z-Z' direction and the X-X' direction and includes the Y direction (one side of the third direction) and the Y' direction (the other side of the third direction). Hereinafter, the diagonal direction including the components in the X direction and the Y direction is referred to as the "first diagonal direction", the diagonal direction including the components in the X direction and the Y' direction is referred to as the "second diagonal direction", the diagonal direction including the components in the X' direction and the Y direction is referred to as the "third diagonal direction", and the diagonal direction including the components in the X' direction and the Y' direction is referred to as the "fourth diagonal direction".

[0018] The sensor S1 comprises an insulating substrate 100. The substrate 100 may be flexible and bendable. If the substrate 100 is flexible, it is made of a film such as polyethylene terephthalate (PET) film, polyethylene naphthalate (PEN) film, or polyimide (PI) film. If the substrate 100 is not flexible, it is made of ceramics or a rigid substrate (single-sided substrate, double-sided substrate, or multilayer substrate), etc.

[0019] The base body 100 has a first main surface 101 on the Z-direction side and a second main surface 102 on the Z'-direction side. The base body 100 may also have a first part 110 and a second part 120 other than the first part 110. For example, the first part 110 is the end or middle part of the base body 100 on the X'-direction side, and the second part 120 is the end or middle part of the base body 100 located on the X-direction side relative to the first part 110 (see Figure 3A). Alternatively, the first part 110 is the end or middle part of the base body 100 on the X-direction side, and the second part 120 is the end or middle part of the base body 100 located on the X'-direction side relative to the first part 110 (not shown). The first main surface 101 of the base body 100 has a first region which is the Z-direction side surface of the first part 110 and a second region which is the Z-direction side surface of the second part 120. The second main surface 102 of the base 100 has a third region which is the Z'-direction side surface of the first part 110 and a fourth region which is the Z'-direction side surface of the second part 120.

[0020] Sensor S1 further comprises a first electrode 200a (reference electrode) and at least one second electrode 200b (detection electrode).

[0021] The first electrode 200a is made of a conductive material such as a metallic material (e.g., copper or silver) or a carbon material. The first electrode 200a is provided on the first main surface 101 of the substrate 100. For example, if the substrate 100 has a first part 110 and a second part 120, the first electrode 200a may be provided on the first region of the first main surface 101 of the substrate 100. In Figures 1 and 2, the first electrode 200a (reference electrode) is shown by a dashed line for illustrative purposes.

[0022] The first electrode 200a may be rectangular in shape (hereinafter referred to as the "first rectangular shape" (see Figures 1 and 2)) or elliptical (hereinafter referred to as the "first elliptical shape" (not shown)) when viewed from the Z direction in a plan view (hereinafter simply referred to as the "plan view"), with the dimension in the Y-Y' direction being larger than the dimension in the X-X' direction, or rectangular in shape (hereinafter referred to as the "second rectangular shape" (not shown)) or elliptical (hereinafter referred to as the "second elliptical shape" (not shown)) when viewed from the Z direction in a plan view (hereinafter simply referred to as the "plan view"), or rectangular in shape (hereinafter referred to as the "second rectangular shape" (not shown)) when the dimension in the X-X' direction is larger than the dimension in the Y-Y' direction, or square (not shown) or approximately circular (not shown), but its shape can be set arbitrarily. The first electrode 200a has a first end on the Y direction side and a second end on the Y' direction side.

[0023] The first electrode 200a has a first part 210a and a second part 220a. The first part 210a is any part of the first electrode 200a, and the second part 220a is any part other than the first part 210a. For example, the first part 210a may be the central part of the first electrode 200a, and the second part 220a may be a substantially annular (substantially circular or substantially polygonal annular) peripheral part around the first part 210a (see Figures 1 to 3B, 4A, 4B, 5A, and 5B), but is not limited thereto.

[0024] At least one second electrode 200b is one or more. For the sake of explanation, it will be described below as at least one second electrode 200b being multiple, but even if there is only one second electrode 200b, that one second electrode 200b can have the same configuration as each of the multiple second electrodes 200b.

[0025] Each second electrode 200b is made of a conductive material such as the metal material or the carbon material. Each second electrode 200b can be a first rectangle (not shown), a first ellipse (not shown), a second rectangle (not shown), a second ellipse (not shown), a square (see Figures 1 and 2), or a nearly perfect circle (not shown) in plan view, and its shape can be set arbitrarily.

[0026] The second electrode 200b has a first part 210b and a second part 220b. The first part 210b is any part of the second electrode 200b, and the second part 220b is any part other than the first part 210b. For example, the first part 210b may be the central part of the second electrode 200b, and the second part 220b may be a substantially annular (substantially circular or substantially polygonal annular) peripheral part around the first part 210b (see Figures 1 to 5C), but is not limited thereto.

[0027] Multiple second electrodes 200b are provided on the first main surface 101 of the substrate 100 and are arranged at intervals. Each of the multiple second electrodes 200b is spaced apart from the first electrode 200a in a direction substantially perpendicular to the Z-Z' direction. In Figures 1 and 2, the multiple second electrodes 200b are shown by dashed lines for illustrative purposes.

[0028] For example, multiple second electrodes 200b may be arranged in a matrix in a plan view (see Figures 1 and 2). In this case, the entire surface of the multiple second electrodes 200b may be arranged in a rectangular (see Figures 1 and 2), square, or circular shape in a plan view, but is not limited to this. Alternatively, multiple second electrodes 200b may be arranged radially (not shown), annular (not shown), arc-shaped (not shown), V-shaped (not shown), L-shaped (not shown), cross-shaped (not shown), or X-shaped (not shown) in a plan view, or they may be arranged in a line with spacing in the Y-Y' direction, first diagonal direction, or second diagonal direction (not shown).

[0029] If the substrate 100 is provided with a first part 110 and a second part 120, the plurality of second electrodes 200b may be arranged on the second region of the first main surface 101 of the substrate 100 as described above. In this case, the plurality of second electrodes 200b are spaced apart from the first electrode 200a on the X-direction side (see Figures 1 and 2) or the X'-direction side (not shown). In other words, the first electrode 200a is spaced apart from the plurality of second electrodes 200b on the X'-direction side (see Figures 1 and 2) or the X-direction side (not shown). The plurality of second electrodes 200b include one or more second electrodes 200b located furthest to the Y-direction side and one or more second electrodes 200b located furthest to the Y'-direction side.

[0030] Hereinafter, the imaginary line extending in the X-X' direction through the Y'-side end of one or more second electrodes 200b located furthest towards the Y direction will be called the "first imaginary line L1", the imaginary line extending in the X-X' direction through the Y-side end of one or more second electrodes 200b located furthest towards the Y' direction will be called the "second imaginary line L2", the imaginary line extending in the X-X' direction through the center of one or more second electrodes 200b located furthest towards the Y direction will be called the "third imaginary line L3", and so on. Let the imaginary line extending in the X-X' direction through the center of one or more second electrodes 200b located on the Y' direction side be called the "fourth imaginary line L4", the imaginary line extending in the X-X' direction through the Y direction end of one or more second electrodes 200b located furthest to the Y direction be called the "fifth imaginary line L5", and the imaginary line extending in the X-X' direction through the Y' direction end of one or more second electrodes 200b located furthest to the Y' direction be called the "sixth imaginary line L6" (see Figure 1). Let the straight-line distance from the first imaginary line L1 to the second imaginary line L2 in the Y-Y' direction be called the "straight-line distance D1", the straight-line distance from the third imaginary line L3 to the fourth imaginary line L4 in the Y-Y' direction be called the "straight-line distance D2", and the straight-line distance from the fifth imaginary line L5 to the sixth imaginary line L6 in the Y-Y' direction be called the "straight-line distance D3" (see Figure 1).

[0031] The dimension of the first electrode 200a in the Y-Y' direction (the straight-line distance in the Y-Y' direction from the first end to the second end of the first electrode 200a) can be made larger than the straight-line distance D1. In this case, the first end of the first electrode 200a is located on the Y-direction side with respect to the first virtual line L1, and the second end of the first electrode 200a is located on the Y'-direction side with respect to the second virtual line L2. For example, the first electrode 200a has one of the following configurations (1) to (5).

[0032] (1) The dimension of the first electrode 200a in the Y-Y' direction can be greater than the straight-line distance D1 but smaller than the straight-line distance D2 (not shown). In this case, the first end of the first electrode 200a is located between the first virtual line L1 and the third virtual line L3 in the Y-Y' direction and the second end of the first electrode 200a is located between the second virtual line L2 and the fourth virtual line L4 in the Y-Y' direction, the first end of the first electrode 200a is located on the first virtual line L1 and the second end of the first electrode 200a is located between the second virtual line L2 and the fourth virtual line L4 in the Y-Y' direction, or the first end of the first electrode 200a is located between the first virtual line L1 and the third virtual line L3 in the Y-Y' direction and the second end of the first electrode 200a is located on the second virtual line L2.

[0033] (2) The dimension of the first electrode 200a in the Y-Y' direction can be the same as the straight-line distance D2 (not shown). The first end of the first electrode 200a is located on the third virtual line L3 and the second end of the first electrode 200a is located on the fourth virtual line L4.

[0034] (3) The dimension of the first electrode 200a in the Y-Y' direction can be greater than the straight-line distance D2 but smaller than the straight-line distance D3 (see Figure 1). In this case, the first end of the first electrode 200a is located between the third virtual line L3 and the fifth virtual line L5 in the Y-Y' direction and the second end of the first electrode 200a is located between the fourth virtual line L4 and the sixth virtual line L6 in the Y-Y' direction (see Figure 1), the first end of the first electrode 200a is located on the third virtual line L3 and the second end of the first electrode 200a is located between the fourth virtual line L4 and the sixth virtual line L6 in the Y-Y' direction (not shown), or the first end of the first electrode 200a is located between the third virtual line L3 and the fifth virtual line L5 in the Y-Y' direction and the second end of the first electrode 200a is located on the fourth virtual line L4 (not shown).

[0035] (4) The dimension of the first electrode 200a in the Y-Y' direction can be the same as the straight-line distance D3 (not shown). The first end of the first electrode 200a is located on the fifth imaginary line L5 and the second end of the first electrode 200a is located on the sixth imaginary line L6.

[0036] (5) The dimension of the first electrode 200a in the Y-Y' direction can be made larger than the straight-line distance D3 (not shown). In this case, the first end of the first electrode 200a is located on the Y side with respect to the fifth virtual line L5 and the second end of the first electrode 200a is located on the Y' side with respect to the sixth virtual line L6; the first end of the first electrode 200a is located on the fifth virtual line L5 and the second end of the first electrode 200a is located on the Y' side with respect to the sixth virtual line L6; the first end of the first electrode 200a is located on the Y side with respect to the fifth virtual line L5 and the second end of the first electrode 200a is located on the sixth virtual line L6.

[0037] Furthermore, the dimension of the first electrode 200a in the Y-Y' direction may be smaller than the straight-line distance D1.

[0038] Alternatively, multiple second electrodes 200b may be arranged in a line with spacing in the X-X' direction in a plan view (not shown). In this case, the Y-Y' dimension of the first electrode 200a can be the same as, slightly larger than, or slightly smaller than, the Y-Y' dimension of each second electrode 200b, but is not limited to this.

[0039] The sensor S1 may further include at least one terminal portion. At least one terminal portion has a first terminal portion 400a and at least one second terminal portion 400b.

[0040] The first terminal portion 400a is made of a conductive material such as the metal material or the carbon material. The first terminal portion 400a may be made of the same material as the first electrode 200a, or it may be made of a different material.

[0041] The first terminal portion 400a is provided on the first main surface 101 of the base body 100. When the first portion 110 and the second portion 120 of the base body 100 are provided, the first electrode 200a may be provided on the second region of the first main surface 101 of the base body 100 (for example, the end of the second region on the X direction side (see Figures 1 and 2), the end of the second region on the X' direction side (not shown), the end of the second region on the Y direction side (not shown), or the end of the second region on the Y' direction side (not shown), etc.), or it may be provided on the first region on the first main surface 101 of the base body 100 (not shown).

[0042] At least one second terminal portion 400b is one or more, depending on the number of at least one second electrode 200b. For the sake of explanation, it will be described below that at least one second terminal portion 400b is multiple, but even if there is only one second terminal portion 400b, that one second terminal portion 400b can have the same configuration as each of the multiple second terminal portions 400b.

[0043] Each second terminal portion 400b is made of a conductive material such as the metal material or the carbon material. Each second terminal portion 400b may be made of the same material as the plurality of second electrodes 200b, or it may be made of a different material. Each second terminal portion 400b is provided on the first main surface 101 of the substrate 100.

[0044] If the base body 100 is provided with a first part 110 and a second part 120, the multiple second terminal parts 400b may be provided at intervals on the second region of the first main surface 101 of the base body 100 (for example, the end of the second region on the X direction side (see Figures 1 and 2), the end of the second region on the X' direction side (not shown), the end of the second region on the Y direction side (not shown), or the end of the second region on the Y' direction side (not shown), etc.), or they may be provided on the first region on the first main surface 101 of the base body 100 (not shown).

[0045] Note that at least one terminal section can be omitted.

[0046] Sensor S1 further comprises at least one conductive line. The at least one conductive line has a first conductive line 300a and at least one second conductive line 300b.

[0047] The first conductive line 300a is made of a conductive material such as the metal material or the carbon material. The first conductive line 300a may be made of the same material as the first electrode 200a, or it may be made of a different material.

[0048] The first conductive line 300a is provided on the first main surface 101 of the substrate 100 and extends from the first electrode 200a. If a first terminal portion 400a is provided, the first conductive line 300a extends from the first electrode 200a to the first terminal portion 400a. If a first terminal portion 400a is provided and the first terminal portion 400a has a second portion 220a, the first conductive line 300a may extend from the second portion 220a of the first electrode 200a to the first terminal portion 400a, but is not limited to this.

[0049] At least one second conductive line 300b is one or more, depending on the number of at least one second electrode 200b. For the sake of explanation, it will be described below that at least one second conductive line 300b is multiple, but even if there is only one second conductive line 300b, that one second conductive line 300b can have the same configuration as each of the multiple second conductive lines 300b.

[0050] Each second conductive line 300b is made of a conductive material such as the metal material or the carbon material. Each second conductive line 300b may be made of the same material as the plurality of second electrodes 200b, or it may be made of a different material.

[0051] Each second conductive line 300b is provided on the first main surface 101 of the substrate 100 and extends from the corresponding second electrode 200b. If a plurality of second terminal portions 400b are provided, each second conductive line 300b extends from the corresponding second electrode 200b to the corresponding second terminal portion 400b. If a plurality of second terminal portions 400b are provided and a plurality of second electrodes 200b have a second portion 220b, each second conductive line 300b may extend from the second portion 220b of the corresponding second electrode 200b to the corresponding second terminal portion 400b, but is not limited thereto.

[0052] The sensor S1 further comprises an insulating portion 600. The insulating portion 600 is made of an electrically insulating material and is provided on the first main surface 101 of the substrate 100. For example, the insulating portion 600 may be made of an insulating film (e.g., a polyimide film) laminated on the first main surface 101 of the substrate 100, an insulating layer such as a resist printed on the first main surface 101 of the substrate 100, or a dielectric ink coated on the first main surface 101 of the substrate 100.

[0053] The insulating portion 600 covers the first conductive line 300a and the plurality of second conductive lines 300b from the Z-direction side. If a first terminal portion 400a and the plurality of second terminal portions 400b are provided, the insulating portion 600 may also cover the first terminal portion 400a and the plurality of second terminal portions 400b from the Z-direction side (see Figures 1 and 2), but it is not required to cover them. In the latter case, the first terminal portion 400a and the plurality of second terminal portions 400b are located outside the insulating portion 600 (not shown).

[0054] The insulating portion 600 has a first insulating portion 610, at least one second insulating portion 620, a first opening 630, and at least one second opening 640. The insulating portion 600 may further have a third insulating portion 650 and at least one fourth insulating portion 660.

[0055] The first insulating portion 610 is a part of the insulating portion 600, is located on the first conductive line 300a, and covers the first conductive line 300a from the Z-direction side. The shape and projected area of ​​the first insulating portion 610 in plan view correspond to the shape and projected area of ​​the first conductive line 300a in plan view.

[0056] At least one second insulating section 620 is one or more, depending on the number of at least one second conductive line 300b. For the sake of explanation, it will be described below that at least one second insulating section 620 is multiple, but even if there is only one second insulating section 620, that one second insulating section 620 can have the same configuration as each of the multiple second insulating sections 620.

[0057] Each second insulating portion 620 is another part of the insulating portion 600, located on the corresponding second conductive line 300b, and covering the corresponding second conductive line 300b from the Z-direction side. The shape and projected area of ​​each second insulating portion 620 in plan view correspond to the shape and projected area of ​​the corresponding second conductive line 300b in plan view.

[0058] The first opening 630 is located on the Z-direction side with respect to the first electrode 200a. In other words, the first electrode 200a is at least partially located on the Z'-direction side with respect to the first opening 630 and at least partially faces the first opening 630. For example, the insulating portion 600 and the first electrode 200a have the following configurations: (a-1) or (a-2).

[0059] (a-1) The first opening 630 may be located on the Z-direction side with respect to the first part 210a of the first electrode 200a. In this case, the shape and projected area of ​​the first opening 630 in plan view corresponds to the shape and projected area of ​​the first part 210a of the first electrode 200a in plan view. The first part 210a of the first electrode 200a is located on the Z'-direction side with respect to the first opening 630 and faces the first opening 630. The third insulating part 650 is another part of the insulating part 600, is placed on the second part 220a of the first electrode 200a and covers the second part 220a of the first electrode 200a from the Z-direction side. The shape and projected area of ​​the third insulating part 650 in plan view corresponds to the shape and projected area of ​​the second part 220a of the first electrode 200a in plan view. When the second part 220a of the first electrode 200a is the peripheral edge of the first electrode 200a, the third insulating part 650 is substantially annular (subtly circular or substantially polygonal annular) corresponding to the shape and projected area of ​​the second part 220a of the first electrode 200a, and forms the peripheral edge of the first opening 630.

[0060] (a-2) The first opening 630 may be located on the Z-direction side with respect to the entire surface of the first electrode 200a on the Z-direction side. In this case, the shape and projected area of ​​the first opening 630 in plan view correspond to the shape and projected area of ​​the first electrode 200a in plan view, and the third insulating portion 650 is omitted. The entire surface of the first electrode 200a is located on the Z'-direction side with respect to the first opening 630 and faces the first opening 630.

[0061] At least one second aperture 640 is one or more, depending on the number of at least one second electrode 200b. For the sake of explanation, it will be described below that at least one second aperture 640 is multiple, but even if there is only one second aperture 640, that one second aperture 640 can be configured in the same way as each of the multiple second apertures 640.

[0062] At least one fourth insulating portion 660 is one or more, depending on the number of second portions 220b of at least one second electrode 200b. For the sake of explanation, it will be described below that at least one fourth insulating portion 660 is multiple, but even if there is only one fourth insulating portion 660, that one fourth insulating portion 660 can have the same configuration as each of the multiple fourth insulating portions 660.

[0063] Each second opening 640 is located on the Z-direction side with respect to the corresponding second electrode 200b. In other words, the corresponding second electrode 200b is at least partially located on the Z'-direction side with respect to each second opening 640 and at least partially faces each second opening 640. For example, the insulating portion 600 and the corresponding second electrode 200b have the following configurations: (b-1) or (b-2).

[0064] (b-1) Each second opening 640 may be located on the Z-direction side with respect to the first part 210b of the corresponding second electrode 200b. In this case, the shape and projected area of ​​each second opening 640 in plan view corresponds to the shape and projected area of ​​the first part 210b of the corresponding second electrode 200b in plan view. The first part 210b of the corresponding second electrode 200b is located on the Z'-direction side with respect to each second opening 640 and faces each second opening 640. Each fourth insulating part 660 is another part of the insulating part 600 and is located on the second part 220b of the corresponding second electrode 200b and covers the second part 220b of the corresponding second electrode 200b from the Z-direction side. The shape and projected area of ​​each fourth insulating part 660 in plan view corresponds to the shape and projected area of ​​the second part 220b of the corresponding second electrode 200b in plan view. If the second portion 220b of the corresponding second electrode 200b is the peripheral edge of the first portion 210b of the corresponding second electrode 200b, then each fourth insulating portion 660 is substantially annular (subtly circular or substantially polygonal annular) corresponding to the shape and projected area of ​​the second portion 220b of the corresponding second electrode 200b, and forms the peripheral edge of each corresponding second opening 640.

[0065] (b-2) Each second opening 640 may be located on the Z-direction side with respect to the entire Z-direction side surface of the corresponding second electrode 200b. In this case, the shape and projected area of ​​each second opening 640 in plan view correspond to the shape and projected area of ​​the corresponding second electrode 200b in plan view, and the multiple fourth insulating portions 660 are omitted. The entire surface of the corresponding second electrode 200b is located on the Z'-direction side with respect to each second opening 640 and faces each second opening 640.

[0066] The sensor S1 may further include a first conductive part 700a and at least one second conductive part 700b (see Figures 4A to 5C), but it is not required to include them (see Figures 1 to 3C).

[0067] The first conductive portion 700a is made of a material that is conductive and corrosion-resistant. The first conductive portion 700a is provided on the first electrode 200a within the first opening 630 of the insulating portion 600. The first conductive portion 700a has, for example, one of the following configurations (c-1) to (c-3).

[0068] (c-1) When the insulating portion 600 and the first electrode 200a have the configuration of (a-1) or (a-2) above, the first conductive portion 700a may be composed of a plated layer of a precious metal or the like formed by plating on the first part 210a of the first electrode 200a within the first opening 630 of the insulating portion 600 or on the entire surface of the first electrode 200a, or it may be composed of a printed layer of carbon paste or the like printed on the first part 210a of the first electrode 200a within the first opening 630 of the insulating portion 600 or on the entire surface of the first electrode 200a (see Figures 4A and 4B). In this case, the shape and projected area of ​​the first conductive portion 700a in plan view corresponds to the shape and projected area of ​​the first opening 630 in plan view.

[0069] (c-2) If the insulating portion 600 and the first electrode 200a have the configuration described in (a-1) above and the first conductive portion 700a is composed of the printed layer, the first conductive portion 700a may be formed not only on the first portion 210a of the first electrode 200a within the first opening 630 of the insulating portion 600, but also on the third insulating portion 650 of the insulating portion 600 on the second portion 220a of the first electrode 200a (see Figures 5A and 5B). In this case, the shape of the first conductive portion 700a in plan view is arbitrary, but may correspond to the shape of the first opening 630 in plan view, and the projected area of ​​the first conductive portion 700a in plan view is larger than the projected area of ​​the first opening 630 in plan view.

[0070] (c-3) If the insulating portion 600 and the first electrode 200a have the configuration described in (a-2) above and the first conductive portion 700a is composed of the printed layer, the first conductive portion 700a may be formed not only on the first portion 210a of the first electrode 200a within the first opening 630 of the insulating portion 600, but also on the peripheral portion of the first opening 630 of the insulating portion 600 (not shown). In this case, the shape of the first conductive portion 700a in plan view is arbitrary, but may correspond to the shape of the first opening 630 in plan view, and the projected area of ​​the first conductive portion 700a in plan view is larger than the projected area of ​​the first opening 630 in plan view.

[0071] At least one second conductive portion 700b is one or more, depending on the number of at least one second electrode 200b. For the sake of explanation, it will be described below that at least one second conductive portion 700b is multiple, but even if there is only one second conductive portion 700b, that one second conductive portion 700b can have the same configuration as each of the multiple second conductive portions 700b.

[0072] Each second conductive portion 700b is made of a material that is conductive and corrosion-resistant. Each second conductive portion 700b is provided on the second electrode 200b in the corresponding second opening 640 of the insulating portion 600. Each second conductive portion 700b has, for example, one of the following configurations (d-1) to (d-3).

[0073] (d-1) When the insulating portion 600 and the corresponding second electrode 200b have the configuration of (b-1) or (b-2) above, each second conductive portion 700b may be composed of a plating layer of a precious metal or the like formed by plating on the first portion 210b of the second electrode 200b in the corresponding second opening 640 of the insulating portion 600 or on the entire surface of the second electrode 200b, or it may be composed of a printed layer of carbon paste or the like printed on the first portion 210b of the second electrode 200b in the corresponding second opening 640 of the insulating portion 600 or on the entire surface of the second electrode 200b (see Figures 4A to 4C). In this case, the shape and projected area of ​​each second conductive portion 700b in plan view corresponds to the shape and projected area of ​​the corresponding second opening 640 in plan view.

[0074] (d-2) If the insulating portion 600 and the corresponding second electrode 200b have the configuration described in (b-1) above, and each second conductive portion 700b is composed of the printed layer, each second conductive portion 700b may be formed not only on the first portion 210b of the second electrode 200b in the corresponding second opening 640 of the insulating portion 600, but also on the corresponding fourth insulating portion 660 of the insulating portion 600 (see Figures 5A to 5C). The shape of each second conductive portion 700b in plan view is arbitrary, but may correspond to the shape of the corresponding second opening 640 in plan view, and the projected area of ​​each second conductive portion 700b in plan view is larger than the projected area of ​​the corresponding second opening 640 in plan view.

[0075] (d-3) If the insulating portion 600 and the corresponding second electrode 200b have the configuration described in (b-2) above, and each second conductive portion 700b is composed of the printed layer, each second conductive portion 700b may be formed not only on the first portion 210b of the second electrode 200b in the corresponding second opening 640 of the insulating portion 600, but also on the peripheral portion of the corresponding second opening 640 of the insulating portion 600 (not shown). The shape of each second conductive portion 700b in plan view is arbitrary, but may correspond to the shape of the corresponding second opening 640 in plan view, and the projected area of ​​each second conductive portion 700b in plan view is larger than the projected area of ​​the corresponding second opening 640 in plan view.

[0076] The first conductive part 700a and the plurality of second conductive parts 700b may be made of a material that is conductive but not corrosion resistant.

[0077] Sensor S1 further comprises a thermoelectric conversion unit 500. The thermoelectric conversion unit 500 is made of a material that converts heat into electricity by the Seebeck effect. The thermoelectric conversion unit 500 may be flexible and bendable, or it may be rigid and not flexible. For example, the thermoelectric conversion unit 500 has one of the following configurations (1) to (5). The Z-Z' direction corresponds to the thickness direction of the thermoelectric conversion unit 500.

[0078] (1) The thermoelectric conversion unit 500 is composed of a gelled film obtained by adding a gelling agent to a solution in which the redox pair and additives are dissolved and / or by evaporating water. In this case, the thermoelectric conversion unit 500 has the flexibility described above.

[0079] (2) The thermoelectric conversion unit 500 is made of a film obtained by adding a polymer, cellulose, or other film-forming agent to a solution in which the redox pair and additives are dissolved, and then cooling and / or drying it. In this case, the thermoelectric conversion unit 500 has the flexibility described above.

[0080] (3) The thermoelectric conversion unit 500 can be made of a plate solidified by adding a film-forming agent to a solution in which the redox pair and additives are dissolved, and then cooling and / or drying. In this case, the thermoelectric conversion unit 500 is thicker than the above-mentioned film, has no flexibility, and is rigid.

[0081] (4) The thermoelectric conversion unit 500 is composed of a resin or gel obtained by adding monomers to a solution in which the redox pair and additives are dissolved, and then polymerizing it. In this case, the thermoelectric conversion unit 500 has the flexibility described above.

[0082] The redox pairs mentioned above can include lithium (Li) and lithium (Li) ions, iron (II) and iron (III) ions, cobalt (II) and cobalt (III) ions, iodide (I-) and triiodide ions, ferrocyanide ions (potassium ferrocyanide, K4Fe(CN)6) and ferricyanide ions (potassium ferricyanide, K3Fe(CN)6), or cobalt trisbipyridine (II) and cobalt trisbipyridine (III). The additives mentioned above include, for example, ionic liquids added to the solvent to adjust the conductivity of the gel. These additives are optional. The solutions can include, for example, aqueous solutions, alcohol-based solvents such as glycerin and ethylene glycol, or glyme-based solvents (glycol ethers) such as tetraglyme and triglyme.

[0083] (5) The thermoelectric conversion unit 500 may be composed of any one of the following: silicon-based compounds, aluminum-based compounds, metal oxides, carbon materials, and organic conductive materials, or it may be composed of a combination of several of these materials. In this case as well, the thermoelectric conversion unit 500 may have the flexibility described above, but it may also have the rigid configuration described above.

[0084] Examples of silicon-based compounds that can be used include tellurium-based compounds such as Bi-Te compounds, Pb-Te compounds, and Sb-Te compounds; antimony-based compounds such as Co-Sb compounds, Fe-Sb compounds, Zn-Sb compounds, and skutterudite compounds; and Fe-Si compounds, Ge-Si compounds, Mn-Si compounds, and Mg-Si compounds.

[0085] Examples of aluminum-based compounds that can be used include boron compounds such as hexaborides, gallium-based compounds such as clathrate compounds, Heusler compounds, and Al clathrate compounds.

[0086] Examples of metal oxides that can be used include tin-based and rare-earth compounds such as Half-Heusler intermetallic compounds, Co oxides, Ti oxides, V oxides, and Zn oxides.

[0087] As the carbon material, one or a combination of materials such as graphite, carbon nanotubes, carbon black, graphene nanoplates, and graphene can be used. The carbon material can also be modified by introducing substituents as needed, or used in combination with compounds that can promote charge transfer.

[0088] As organic conductive materials, organic low molecular weight materials, organic conductive polymers, polymer composite materials, etc., can be used. Examples of organic conductive materials that can be used include polymers with thiophene and its derivatives as a backbone, polymers with phenylenevinylene and its derivatives as a backbone, polymers with aniline and its derivatives as a backbone, oligomers and polymers with pyrrole and its derivatives as a backbone, oligomers and polymers with acetylene and its derivatives as a backbone, polymers with heptadiene and its derivatives as a backbone, phthalocyanines and their derivatives, diamines, phenyldiamines and their derivatives, pentacene and its derivatives, porphyrin and its derivatives, cyanine, quinone, naphthoquinone, and other low molecular weight materials.

[0089] The thermoelectric conversion unit 500 is provided on the insulating unit 600 and is located on the Z-direction side with respect to the insulating unit 600. The thermoelectric conversion unit 500 is also located on the Z-direction side with respect to the first electrode 200a, the plurality of second electrodes 200b, the first conductive line 300a, and the plurality of second conductive lines 300b. The thermoelectric conversion unit 500, the insulating unit 600, the first electrode 200a, and the plurality of second electrodes 200b further have any of the following configurations (e) to (j).

[0090] (e) When the insulating portion 600 and the first electrode 200a have the configuration described in (a-1), and the insulating portion 600 and the plurality of second electrodes 200b have the configuration described in (b-1), and the first conductive portion 700a and the plurality of second conductive portions 700b are not provided (see Figures 3A to 3C), the thermoelectric conversion portion 500 is in direct contact with the first portion 210a of the first electrode 200a in the first opening 630 from the Z-direction side, and is in direct contact with the first portion 210b of the plurality of second electrodes 200b in the plurality of second openings 640 from the Z-direction side. When the thermoelectric conversion portion 500 is gel-like, the thermoelectric conversion portion 500 is in close contact with the first portion 210a of the first electrode 200a and the first portion 210b of the plurality of second electrodes 200b. The first portion 210a of the first electrode 200a is in direct contact with the thermoelectric conversion unit 500 from the Z' direction side through the first opening 630, and the first portions 210b of each of the multiple second electrodes 200b are in direct contact with the thermoelectric conversion unit 500 from the Z' direction side through each of the multiple second openings 640.

[0091] The first insulating portion 610 of the insulating portion 600 is interposed between the thermoelectric conversion unit 500 and the first conductive line 300a. The first insulating portion 610 may be in direct contact with the thermoelectric conversion unit 500 from the Z' direction and may also be in direct contact with the first conductive line 300a from the Z' direction, but a separate component may be interposed between the first insulating portion 610 and the thermoelectric conversion unit 500 and / or between the first insulating portion 610 and the first conductive line 300a. The plurality of second insulating portions 620 of the insulating portion 600 are each interposed between the thermoelectric conversion unit 500 and the plurality of second conductive lines 300b. The multiple second insulating parts 620 may each be in direct contact with the thermoelectric conversion part 500 from the Z' direction and also in direct contact with the multiple second conductive lines 300b from the Z' direction, but separate members may be interposed between the multiple second insulating parts 620 and the thermoelectric conversion part 500 and / or between the multiple second insulating parts 620 and the multiple second conductive lines 300b. The third insulating part 650 of the insulating part 600 is interposed between the thermoelectric conversion part 500 and the second part 220a of the first electrode 200a. The third insulating portion 650 may be in direct contact with the thermoelectric conversion portion 500 from the Z' direction and also in direct contact with the second portion 220a of the first electrode 200a from the Z' direction, but a separate member may be interposed between the third insulating portion 650 and the thermoelectric conversion portion 500 and / or between the third insulating portion 650 and the second portion 220a of the first electrode 200a. The multiple fourth insulating portions 660 of the insulating portion 600 are each interposed between the thermoelectric conversion portion 500 and the second portions 220b of the multiple second electrodes 200b. The multiple fourth insulating parts 660 may each be in direct contact with the thermoelectric conversion part 500 from the Z' direction and may also be in direct contact with the second part 220b of the multiple second electrodes 200b from the Z' direction, but separate members may be interposed between the multiple fourth insulating parts 660 and the thermoelectric conversion part 500 and / or between the multiple fourth insulating parts 660 and the second part 220b of the multiple second electrodes 200b.

[0092] (f) When the insulating portion 600 and the first electrode 200a have the configuration described in (a-2), and the insulating portion 600 and the plurality of second electrodes 200b have the configuration described in (b-2), and the first conductive portion 700a and the plurality of second conductive portions 700b are not provided (not shown), the thermoelectric conversion portion 500 is in direct contact with the entire surface of the first electrode 200a in the first opening 630 from the Z direction side, and is in direct contact with the entire surface of the plurality of second electrodes 200b in the plurality of second openings 640 from the Z direction side. When the thermoelectric conversion portion 500 is gel-like, the thermoelectric conversion portion 500 is in close contact with the entire surface of the first electrode 200a and the entire surface of the second electrode 200b. The entire surface of the first electrode 200a is in direct contact with the thermoelectric conversion unit 500 from the Z' direction side through the first opening 630, and the entire surfaces of the multiple second electrodes 200b are each in direct contact with the thermoelectric conversion unit 500 from the Z' direction side through the multiple second openings 640. The first insulating portion 610 and the multiple second insulating portions 620 of the insulating portion 600 are as described in (e) above.

[0093] (g) When the insulating portion 600 and the first electrode 200a have the configuration of (a-1) above, the insulating portion 600 and the plurality of second electrodes 200b have the configuration of (b-1) above, the first conductive portion 700a has the configuration of (c-1) above, and the plurality of second conductive portions 700b have the configuration of (d-1) above (see Figures 4A to 4C), the thermoelectric conversion portion 500 is in direct contact with the first conductive portion 700a from the Z direction side and is in direct contact with the plurality of second conductive portions 700b from the Z direction side. When the thermoelectric conversion portion 500 is gel-like, the thermoelectric conversion portion 500 is in close contact with the first conductive portion 700a and the plurality of second conductive portions 700b. The first part 210a of the first electrode 200a is indirectly in contact with the thermoelectric conversion unit 500 from the Z' direction side via the first conductive part 700a, and the first parts 210b of each of the multiple second electrodes 200b are indirectly in contact with the thermoelectric conversion unit 500 from the Z' direction side via each of the multiple second conductive parts 700b. The first insulating part 610, the multiple second insulating parts 620, the third insulating part 650, and the multiple fourth insulating parts 660 of the insulating part 600 are as described in (e) above.

[0094] (h) When the insulating portion 600 and the first electrode 200a have the configuration described in (a-2), the insulating portion 600 and the plurality of second electrodes 200b have the configuration described in (b-2), the first conductive portion 700a has the configuration described in (c-1), and the plurality of second conductive portions 700b have the configuration described in (d-1) (not shown), the thermoelectric conversion portion 500 is in direct contact with the first conductive portion 700a from the Z direction side and is in direct contact with the plurality of second conductive portions 700b from the Z direction side. When the thermoelectric conversion portion 500 is gel-like, the thermoelectric conversion portion 500 is in close contact with the first conductive portion 700a and the plurality of second conductive portions 700b. The entire surface of the first electrode 200a is indirectly in contact with the thermoelectric conversion unit 500 from the Z' direction side via the first conductive portion 700a, and the entire surfaces of the plurality of second electrodes 200b are indirectly in contact with the thermoelectric conversion unit 500 from the Z' direction side via the plurality of second conductive portions 700b. The first insulating portion 610 and the plurality of second insulating portions 620 of the insulating portion 600 are as described in (e) above.

[0095] (i) When the insulating portion 600 and the first electrode 200a have the configuration described in (a-1), the insulating portion 600 and the plurality of second electrodes 200b have the configuration described in (b-1), the first conductive portion 700a has the configuration described in (c-2), and the plurality of second conductive portions 700b have the configuration described in (d-2) (see Figures 5A to 5C), the thermoelectric conversion portion 500 is in direct contact with the first conductive portion 700a from the Z direction and is in direct contact with the plurality of second conductive portions 700b from the Z direction. When the thermoelectric conversion portion 500 is gel-like, the thermoelectric conversion portion 500 is in close contact with the first conductive portion 700a and the plurality of second conductive portions 700b. The first portion 210a of the first electrode 200a is indirectly in contact with the thermoelectric conversion unit 500 from the Z' direction side via a portion of the first conductive portion 700a on its Z direction side, and the first portions 210b of each of the multiple second electrodes 200b are indirectly in contact with the thermoelectric conversion unit 500 from the Z' direction side via portions of the multiple second conductive portions 700b on their Z direction sides.

[0096] The first insulating portion 610 and the plurality of second insulating portions 620 of the insulating portion 600 are as described in (e) above. The third insulating portion 650 of the insulating portion 600 is interposed between the remaining portion of the first conductive portion 700a and the second portion 220a of the first electrode 200a. The third insulating portion 650 is in direct contact with the remaining portion of the first conductive portion 700a from the Z' direction and is in direct contact with the second portion 220a of the first electrode 200a from the Z' direction. The plurality of fourth insulating portions 660 of the insulating portion 600 are each interposed between the remaining portions of the plurality of second conductive portions 700b and the second portions 220b of the plurality of second electrodes 200b. The plurality of fourth insulating portions 660 are each in direct contact with the remaining portions of the plurality of second conductive portions 700b from the Z' direction and are each in direct contact with the second portions 220b of the plurality of second electrodes 200b from the Z' direction.

[0097] (j) When the insulating portion 600 and the first electrode 200a have the configuration of (a-2) above, the insulating portion 600 and the plurality of second electrodes 200b have the configuration of (b-2) above, the first conductive portion 700a has the configuration of (c-2) above, and the plurality of second conductive portions 700b have the configuration of (d-2) above (not shown), the thermoelectric conversion portion 500 is in direct contact with the first conductive portion 700a from the Z direction side and is in direct contact with the plurality of second conductive portions 700b from the Z direction side. When the thermoelectric conversion portion 500 is gel-like, the thermoelectric conversion portion 500 is in close contact with the first conductive portion 700a and the plurality of second conductive portions 700b. The entire surface of the first electrode 200a is indirectly in contact with the thermoelectric conversion unit 500 from the Z' direction via a portion of the first conductive portion 700a on its Z-direction side, and the entire surfaces of the multiple second electrodes 200b are indirectly in contact with the thermoelectric conversion unit 500 from the Z' direction via portions of the multiple second conductive portions 700b on their Z-direction sides. The first insulating portion 610 and the multiple second insulating portions 620 of the insulating portion 600 are as described in (e) above. The peripheral edge of the first opening 630 of the insulating portion 600 is in direct contact with the remaining portion of the first conductive portion 700a. The peripheral edges of the multiple second openings 640 of the insulating portion 600 are in direct contact with the remaining portions of the multiple second conductive portions 700b.

[0098] When the object to be measured comes into contact with or approaches the thermoelectric conversion unit 500, and / or when the thermoelectric conversion unit 500 is affected by the ambient temperature of the gas (e.g., air or gas) in the area to be measured, a temperature gradient is generated between the portion that the first electrode 200a of the thermoelectric conversion unit 500 directly or indirectly contacts and the portions that the plurality of second electrodes 200b directly or indirectly contact. A voltage difference is generated between the first electrode 200a and each of the plurality of second electrodes 200b according to this temperature gradient generated in the thermoelectric conversion unit 500.

[0099] If the base body 100 is provided with a first part 110 and a second part 120, the thermoelectric conversion unit 500 has a first part 510 and a second part 520.

[0100] The first part 510 is located on the Z-direction side with respect to the first part 110 of the base 100 and on the Z-direction side with respect to the first electrode 200a and the first conductive line 300a. In this case, as described in (e) above, the first part 210a of the first electrode 200a is in direct contact with the first part 510 of the thermoelectric conversion unit 500 from the Z' direction side, and the first insulating part 610 and the third insulating part 650 of the insulating part 600 are in direct or indirect contact with the first part 510 of the thermoelectric conversion unit 500 from the Z' direction side. As described in (f) above, the entire surface of the first electrode 200a is in direct contact with the first part 510 of the thermoelectric conversion unit 500 from the Z' direction side, and the first insulating part 610 of the insulating part 600 is in direct or indirect contact with the first part 510 of the thermoelectric conversion unit 500 from the Z' direction side. As described in (g) above, the first portion 210a of the first electrode 200a is indirectly in contact with the first portion 510 of the thermoelectric conversion unit 500 via the first conductive portion 700a from the Z' direction side, and the first insulating portion 610 and the third insulating portion 650 of the insulating portion 600 are in direct or indirect contact with the first portion 510 of the thermoelectric conversion unit 500 from the Z' direction side. As described in (h) above, the entire surface of the first electrode 200a is indirectly in contact with the first portion 510 of the thermoelectric conversion unit 500 via the first conductive portion 700a from the Z' direction side, and the first insulating portion 610 of the insulating portion 600 is in direct or indirect contact with the first portion 510 of the thermoelectric conversion unit 500 from the Z' direction side. As described in (i) above, the first part 210a of the first electrode 200a is indirectly in contact with the first part 510 of the thermoelectric conversion unit 500 from the Z' direction side via a portion of the first conductive part 700a, the first insulating part 610 of the insulating part 600 is in direct or indirect contact with the first part 510 of the thermoelectric conversion unit 500 from the Z' direction side, and the third insulating part 650 of the insulating part 600 is indirectly in contact with the first part 510 of the thermoelectric conversion unit 500 from the Z' direction side via the remaining portion of the first conductive part 700a. Alternatively, as described in (j) above, the entire surface of the first electrode 200a is indirectly in contact with the first part 510 of the thermoelectric conversion unit 500 from the Z' direction side via a portion of the first conductive part 700a, the first insulating part 610 of the insulating part 600 is in direct or indirect contact with the first part 510 of the thermoelectric conversion unit 500 from the Z' direction side, and the peripheral edge of the first opening 630 of the insulating part 600 is in direct contact with the remaining portion of the first conductive part 700a.

[0101] The second part 520 is located on the Z-direction side with respect to the second part 120 of the base 100 and on the Z-direction side with respect to the plurality of second electrodes 200b and the plurality of second conductive lines 300b. In this case, as described in (e) above, the first parts 210b of the plurality of second electrodes 200b are in direct contact with the second part 520 of the thermoelectric conversion unit 500 from the Z' direction, and the plurality of second insulating parts 620 and the plurality of fourth insulating parts 660 of the insulating part 600 are in direct or indirect contact with the second part 520 of the thermoelectric conversion unit 500 from the Z' direction. As described in (f) above, the entire surface of the plurality of second electrodes 200b is in direct contact with the second part 520 of the thermoelectric conversion unit 500 from the Z' direction, and the plurality of second insulating parts 620 of the insulating part 600 are in direct or indirect contact with the second part 520 of the thermoelectric conversion unit 500 from the Z' direction. As described in (g) above, the first portion 210b of each of the multiple second electrodes 200b indirectly contacts the second portion 520 of the thermoelectric conversion unit 500 from the Z' direction side via each of the multiple second conductive portions 700b, and the multiple second insulating portions 620 and the multiple fourth insulating portions 660 of the insulating portion 600 are in direct or indirect contact with the second portion 520 of the thermoelectric conversion unit 500 from the Z' direction side. As described in (h) above, the entire surface of each of the multiple second electrodes 200b indirectly contacts the second portion 520 of the thermoelectric conversion unit 500 from the Z' direction side via each of the multiple second conductive portions 700b, and the multiple second insulating portions 620 of the insulating portion 600 are in direct or indirect contact with the second portion 520 of the thermoelectric conversion unit 500 from the Z' direction side. As described in (i) above, the first portion 210b of each of the multiple second electrodes 200b indirectly contacts the second portion 520 of the thermoelectric conversion unit 500 from the Z' direction via a portion of each of the multiple second conductive portions 700b, the multiple second insulating portions 620 of the insulating portion 600 indirectly or directly contact the second portion 520 of the thermoelectric conversion unit 500 from the Z' direction, and the multiple fourth insulating portions 660 of the insulating portion 600 indirectly contact the second portion 520 of the thermoelectric conversion unit 500 from the Z' direction via the remaining portion of each of the multiple second conductive portions 700b.Alternatively, as described in (j) above, the entire surfaces of the multiple second electrodes 200b are indirectly in contact with the second part 520 of the thermoelectric conversion unit 500 via a portion of the multiple second conductive parts 700b from the Z' direction, the multiple second insulating parts 620 of the insulating part 600 are in direct or indirect contact with the second part 520 of the thermoelectric conversion unit 500 from the Z' direction, and the peripheral edges of the first opening 630 of the insulating part 600 are in direct contact with the remaining portions of the multiple second conductive parts 700b.

[0102] The second part 120 of the base body 100 and the second part 520 of the thermoelectric conversion unit 500 are parts that the object to be measured comes into contact with or approaches and / or are located within the measurement area, while the first part 110 of the base body 100 and the first part 510 of the thermoelectric conversion unit 500 are parts that the object to be measured does not come into contact with or approach and / or are located outside the measurement area. A temperature gradient is generated in the thermoelectric conversion unit 500 in the X-X' direction when the object to be measured comes into contact with or approaches the second part 520 of the thermoelectric conversion unit 500, and / or when the second part 520 of the thermoelectric conversion unit 500 is affected by the ambient temperature of the gas (e.g., air or gas) in the measurement area. Specifically, a temperature gradient is generated between the part that the first electrode 200a of the thermoelectric conversion unit 500 comes into direct or indirect contact with and each of the parts that the plurality of second electrodes 200b come into direct or indirect contact with. A voltage difference is generated between the first electrode 200a and each of the multiple second electrodes 200b according to the temperature gradient generated in the thermoelectric conversion unit 500.

[0103] The sensor S1 may further include a sensing unit RS. The sensing unit RS is provided near the first electrode 200a on the first main surface 101 of the substrate 100. If the substrate 100 has a first part 110 and a second part 120, the sensing unit RS is provided on a first region of the first main surface 101 of the substrate 100 and may be positioned on the Y-direction side (see Figures 1 and 2), the Y'-direction side (not shown), the X-direction side (not shown), or the X'-direction side (not shown) with respect to the first electrode 200a. The sensing unit RS has a first end on the Y-direction side and a second end on the Y'-direction side.

[0104] The sensing unit RS is configured to generate or change a signal in accordance with the ambient temperature near the first electrode 200a. For example, the sensing unit RS is composed of a thermocouple or a thermistor. If the sensing unit RS is composed of a thermocouple, a voltage difference (the signal) is generated in the thermocouple in accordance with the temperature near the first electrode 200a. If the sensing unit RS is composed of a thermistor, the resistance value of the thermistor (the signal) changes in accordance with the temperature near the first electrode 200a.

[0105] Note that the sensing unit RS can be omitted.

[0106] Sensor S1 may further include at least one thermal insulation section (not shown). The at least one thermal insulation section has at least one of a first thermal insulation section and a second thermal insulation section.

[0107] The first insulating section is provided at the boundary between the first section 510 and the second section 520 of the thermoelectric conversion section 500. The first insulating section can, for example, have a slit provided in the thermoelectric conversion section 500 and air insulation within this slit, but is not limited to this configuration. The slit may penetrate the thermoelectric conversion section 500 in the Z-Z' direction, or the Z-direction side may be closed. The first insulating section is located between the first electrode 200a and the plurality of second electrodes 200b. If a sensing section RS is provided, the first insulating section may be located between the first electrode 200a and the sensing section RS and the plurality of second electrodes 200b. The first insulating section has a first end on the Y-direction side and a second end on the Y'-direction side.

[0108] The second insulating portion is provided at the boundary between the first portion 110 and the second portion 120 of the base body 100. The second insulating portion can, for example, have a slit provided in the base body 100 and air insulation within this slit, but is not limited to this configuration. The slit may penetrate the base body 100 in the Z-Z' direction, or the Z' direction side may be closed. The second insulating portion is located between the first electrode 200a and the plurality of second electrodes 200b. If a sensing unit RS is provided, the second insulating portion may be located between the first electrode 200a and the sensing unit RS and the plurality of second electrodes 200b. The second insulating portion has a first end on the Y direction side and a second end on the Y' direction side.

[0109] The first and / or second insulation sections may extend in the Y-Y' direction. The dimensions of the first insulation section in the Y-Y' direction (the straight-line distance in the Y-Y' direction from the first end of the first insulation section to the second end of the first insulation section) and / or the dimensions of the second insulation section in the Y-Y' direction (the straight-line distance in the Y-Y' direction from the first end of the second insulation section to the second end of the second insulation section) may be the same as or greater than the dimensions of the first electrode 200a in the Y-Y' direction. If the sensing section RS is positioned on the Y-direction side with respect to the first electrode 200a, the dimensions of the first insulation section in the Y-Y' direction and / or the dimensions of the second insulation section in the Y-Y' direction may be the same as or greater than the straight-line distance in the Y-Y' direction from the first end of the sensing section RS to the second end of the first electrode 200a. If the sensing unit RS is positioned on the Y' direction side with respect to the first electrode 200a, the Y-Y' dimensions of the first insulated section and / or the Y-Y' dimensions of the second insulated section may be the same as or greater than the straight-line distance in the Y-Y' direction from the first end of the first electrode 200a to the second end of the sensing unit RS. The Y-Y' dimensions of the first insulated section and / or the Y-Y' dimensions of the second insulated section may be the same as or greater than the straight-line distance D3.

[0110] If both the second and first insulation sections are provided, the Y-Y' dimension of the first insulation section may be the same as, or different from, the Y-Y' dimension of the second insulation section. Note that both the second and first insulation sections are optional.

[0111] Sensor S1 may further include a detection unit IC. The detection unit IC is a logic circuit such as an IC, and is electrically connected to the first electrode 200a and a plurality of second electrodes 200b. If a first terminal portion 400a and a plurality of second terminal portions 400b are provided, the detection unit IC is electrically connected to the first terminal portion 400a and the plurality of second terminal portions 400b (see Figure 1). If a sensing unit RS is provided, the detection unit IC is also electrically connected to the sensing unit RS. Note that the detection unit IC is shown only in Figure 1.

[0112] The detection unit IC is configured to sequentially detect the voltage difference generated between the first electrode 200a and each of the multiple second electrodes 200b, and to sequentially detect the relative temperature near each of the multiple second electrodes 200b (the temperature difference between the vicinity of the first electrode 200a and the vicinity of each of the multiple second electrodes 200b) based on the voltage difference.

[0113] If a sensing unit RS is provided, the detection unit IC has one of the following configurations: The detection unit IC further has a configuration that detects the temperature near the first electrode 200a (reference temperature) based on the signal (voltage difference or resistance value) of the sensing unit RS each time a voltage difference is detected sequentially (before and after), and a configuration that detects the absolute temperature near each of the multiple second electrodes 200b based on the detected reference temperature and the detected relative temperature (based on the temperature difference). Alternatively, the detection unit IC further has a configuration that detects the temperature near the first electrode 200a (reference temperature) based on the signal (voltage difference or resistance value) of the sensing unit RS and records it in the internal or external memory of the detection unit IC, and a configuration that further has a configuration that detects the absolute temperature near each of the multiple second electrodes 200b based on the reference temperature in the memory and the detected relative temperature (based on the temperature difference) each time a voltage difference is detected sequentially.

[0114] The detection unit IC may further have a configuration that detects the temperature distribution of the relative temperature or absolute temperature after detecting the relative temperature or absolute temperature as described above, but this configuration is optional.

[0115] Note that the detection unit IC can be omitted. In this case, the sensor S1 can be electrically connected to an external control unit (for example, a logic circuit such as an IC in the device on which the sensor S1 is installed, or software processed by the logic circuit). The control unit has the same configuration as the detection unit IC described above.

[0116] The temperature sensor S1 described above exhibits the following technical features and effects (1) to (3).

[0117] Technical features and effects (1) The technical features and effects (1) of sensor S1 will be described below, comparing it with the sensor of the first comparative example. The sensor of the first comparative example has the same configuration as sensor S1 of Example 1, except that it does not have an insulating part 600 and the first electrode 200a, a plurality of second electrodes 200b, the first conductive line 300a, and a plurality of second conductive lines 300b are in direct contact with the thermoelectric conversion unit 500. In the sensor of the first comparative example, because the first conductive line 300a and the plurality of second conductive lines 300b are in direct contact with the thermoelectric conversion unit 500, the first conductive line 300a and the plurality of second conductive lines 300b function as electrodes in accordance with the temperature gradient generated in the thermoelectric conversion unit 500. For example, in accordance with the temperature gradient generated in the thermoelectric conversion unit 500, not only is a voltage difference generated between the first electrode 200a and each of the multiple second electrodes 200b, but a potential difference is also generated between the first electrode 200a and the first conductive line 300a in accordance with the temperature gradient generated in the thermoelectric conversion unit 500, and a potential difference is also generated between the first electrode 200a and each of the multiple second conductive lines 300b in accordance with the temperature gradient generated in the thermoelectric conversion unit 500. For this reason, the detection unit IC or external control unit of the sensor in the first comparative example detects the voltage difference generated between the first electrode 200a and the first conductive line 300a and detects the relative temperature near the first conductive line 300a based on that voltage difference, or sequentially detects the voltage difference generated between the first electrode 200a and each of the multiple second conductive lines 300b one by one and detects the relative temperature near each of the multiple second conductive lines 300b based on that voltage difference.

[0118] In contrast, the sensor S1 has a first insulating portion 610 of the insulating portion 600 interposed between the thermoelectric conversion portion 500 and the first conductive line 300a, and multiple second insulating portions 620 interposed between the thermoelectric conversion portion 500 and multiple second conductive lines 300b, respectively. This prevents the first conductive line 300a and the multiple second conductive lines 300b from functioning as electrodes in response to the temperature gradient generated in the thermoelectric conversion portion 500. As a result, the detection unit IC or external control unit of the sensor S1 can sequentially detect the voltage difference generated between the first electrode 200a and each of the multiple second electrodes 200b without being affected by the first conductive line 300a and the multiple second conductive lines 300b, and sequentially detect the relative temperature near each of the multiple second electrodes 200b (temperature difference between the vicinity of the first electrode 200a and the vicinity of each of the multiple second electrodes 200b) based on the voltage difference. If the sensor S1 is equipped with a sensing unit RS, the detection unit IC or external control unit of the sensor S1 can detect the absolute temperature near each of the multiple second electrodes 200b based on the reference temperature near the first electrode 200a detected based on the signal from the sensing unit RS and the relative temperature near each of the multiple second electrodes 200b detected (based on the temperature difference), without being affected by the first conductive line 300a and the multiple second conductive lines 300b. Furthermore, the detection unit IC or external control unit of the sensor S1 can also detect the temperature distribution of the relative temperature or absolute temperature near each of the multiple second electrodes 200b detected, without being affected by the first conductive line 300a and the multiple second conductive lines 300b.

[0119] Technical features and effects (2) If the insulating portion 600 is composed of an insulating film laminated on the first main surface 101 of the substrate 100, an insulating layer printed on the first main surface 101 of the substrate 100, or dielectric ink applied to the first main surface 101 of the substrate 100, the sensor S1 can be easily manufactured. This is because the insulating portion 600 can be easily formed on the first main surface 101 of the substrate 100 simply by laminating an insulating film, printing an insulating layer, or applying dielectric ink to the first main surface 101 of the substrate 100. Furthermore, the insulating portion 600 can cover the first conductive line 300a and the plurality of second conductive lines 300b from the Z direction at once, the first opening 630 of the insulating portion 600 can be easily formed on the Z direction side with respect to the first part 210a of the first electrode 200a or the entire surface of the first electrode 200a, and the plurality of second openings 640 of the insulating portion 600 can each be easily formed on the Z direction side with respect to the first part 210b of the plurality of second electrodes 200b or the entire surface of the second electrode 200b.

[0120] Furthermore, if the insulating portion 600 has a third insulating portion 650 and a plurality of fourth insulating portions 660, the third insulating portion 650 covers the second portion 220a of the first electrode 200a from the Z-direction side, and the plurality of fourth insulating portions 660 each cover the second portion 220b of the plurality of second electrodes 200b from the Z-direction side. Therefore, it is not necessary to precisely align the position of the first opening 630 of the insulating portion 600 with the first electrode 200a, nor is it necessary to precisely align the positions of the plurality of second openings 640 of the insulating portion 600 with the plurality of second electrodes 200b.

[0121] Furthermore, if the first conductive line 300a extends from the second portion 220a of the first electrode 200a, the third insulating portion 650 covers the second portion 220a of the first electrode 200a from the Z-direction side, and the first insulating portion 610 covers the first conductive line 300a from the Z-direction side, thereby easily covering the end of the first conductive line 300a on the first electrode 200a side with the insulating portion 600. If a plurality of second conductive lines 300b each extend from the second portion 220b of a plurality of second electrodes 200b, the plurality of fourth insulating portions 660 each cover the second portion 220b of a plurality of second electrodes 200b from the Z-direction side, and the plurality of second insulating portions 620 each cover the plurality of second conductive lines 300b from the Z-direction side, thereby easily covering the ends of the plurality of second conductive lines 300b on the second electrode 200b side with the insulating portion 600.

[0122] Technical features and effects (3) If the first conductive line 300a and the multiple second conductive lines 300b are made of certain metallic materials such as copper or silver, and the thermoelectric conversion unit 500 is made of a material that has a corrosive effect on certain metallic materials such as copper or silver, then if the first conductive line 300a and the multiple second conductive lines 300b are in direct contact with the thermoelectric conversion unit 500, there is a risk of corrosion due to the influence of the thermoelectric conversion unit 500. However, even if the first conductive line 300a and the multiple second conductive lines 300b of the sensor S1 are made of certain metallic materials such as copper or silver, the first insulating part 610 is interposed between the first conductive line 300a and the thermoelectric conversion unit 500, and the multiple second insulating parts 620 are interposed between the multiple second conductive lines 300b and the thermoelectric conversion unit 500, respectively, so the first conductive line 300a and the multiple second conductive lines 300b will not corrode due to the influence of the thermoelectric conversion unit 500.

[0123] If the first electrode 200a and the plurality of second electrodes 200b are made of certain metallic materials such as copper or silver, and the thermoelectric conversion unit 500 is made of a material that has a corrosive effect on certain metallic materials such as copper or silver, then the first electrode 200a and the plurality of second electrodes 200b are in direct contact with the thermoelectric conversion unit 500 and are therefore at risk of corrosion due to the influence of the thermoelectric conversion unit 500. However, if the first conductive part 700a is provided on the first electrode 200a and the plurality of second conductive parts 700b are provided on the plurality of second electrodes 200b, then the first conductive part 700a and the plurality of second conductive parts 700b are made of corrosion-resistant materials and are therefore not at risk of corrosion due to the influence of the thermoelectric conversion unit 500. Furthermore, if the first conductive portion 700a is not provided on the first electrode 200a and the plurality of second conductive portions 700b are not provided on the plurality of second electrodes 200b, the first electrode 200a and the plurality of second electrodes 200b may be made of carbon material, or their surfaces may be coated with a material that has excellent corrosion resistance.

[0124] Technical features and effects (4) When multiple second electrodes 200b are arranged in a matrix and the first electrode 200a has any of the configurations (1) to (5) described above, the distance from the first electrode 200a to each of the multiple second electrodes 200b in each row in the X-X' direction (a portion of the multiple second electrodes) can be set to be approximately the same. As a result, when the temperature gradient from the part of the thermoelectric conversion unit 500 that the first electrode 200a contacts to each of the parts of the multiple second electrodes 200b in each row of the thermoelectric conversion unit 500 that contact is approximately the same, the detection unit IC or an external control unit can detect the relative temperature or absolute temperature of each of the multiple second electrodes 200b in each row to be approximately the same. Furthermore, even if multiple second electrodes 200b are arranged radially (not shown), annularly (not shown), arc-shaped (not shown), V-shaped (not shown), L-shaped (not shown), cross-shaped (not shown), or X-shaped (not shown) in a plan view, and the first electrode 200a has any of the above configurations (1) to (5), the distance from the first electrode 200a to each of the second electrodes 200b located at approximately the same position in the X-X' direction (some of the second electrodes out of all the second electrodes) can be set to be approximately the same. Even if multiple second electrodes 200b are arranged in a line with spacing in the Y-Y' direction in a plan view, and the first electrode 200a has any of the above configurations (1) to (5), the distance from the first electrode 200a to each of the multiple second electrodes 200b can be set to be approximately the same.

[0125] Technical features and effects (5) If a first heat insulating section is provided, the first heat insulating section can suppress the transfer of heat from the second section 520 to the first section 510 of the thermoelectric conversion section 500, and as a result, the effect of the heat on the first electrode 200a in contact with the first section 510 can be reduced. If a second heat insulating section is provided, the second heat insulating section can suppress the transfer of heat from the second section 120 to the first section 110 of the base body 100, and as a result, the effect of the heat on the first electrode 200a on the first section 110 can be reduced.

[0126] Technical features and effects (6) If both the base body 100 and the thermoelectric conversion unit 500 have the flexibility to bend, a flexible sensor S1 can be obtained. [Examples]

[0127] Hereinafter, a temperature sensor S2 (hereinafter also simply referred to as "sensor S2") relating to multiple embodiments of the present invention, including Embodiment 2 and its design modifications, will be described with reference to Figures 6A to 7. Figures 6A to 7 show the temperature sensor S2 of Embodiment 2.

[0128] Sensor S2 has the same configuration as the temperature sensor S1 described above, except that (1) sensor S2 has a first connection part 800a, a third conductive line 300c and a third terminal part 400c instead of the first conductive line 300a and the first terminal part 400a, and (2) the insulating part 600 does not have the first insulating part 610. Below, only the differences will be explained in detail, and redundant explanations will be omitted. In addition, in sensor S2, the second electrode 200b, the second conductive line 300b, the second terminal part 400b, the second conductive part 700b (if provided), the second insulating part 620 of the insulating part 600, the second opening 640 of the insulating part 600, and the fourth insulating part 660 of the insulating part 600 (if provided) will be described as multiple, but it is possible to have at least one of each.

[0129] In Figures 6A and 7, the first electrode 200a, multiple second electrodes 200b, multiple second conductive lines 300b, and multiple second terminal portions 400b are shown by dashed lines. Figures 6A to 7 show the Y-Y' and X-X' directions. For the Z-Z' direction, please refer to Figures 3A to 5C.

[0130] The third terminal portion 400c is made of a conductive material such as the metal material or the carbon material. The third terminal portion 400c may be made of the same material as the first electrode 200a, or it may be made of a different material. The third terminal portion 400c is provided on the second main surface 102 of the base body 100. If the first portion 110 and the second portion 120 of the base body 100 are provided, the third terminal portion 400c may be provided on the fourth region of the second main surface 102 of the base body 100 (for example, the X-direction end of the fourth region (see Figure 6B), the X-direction end of the fourth region (not shown), the Y-direction end of the fourth region (not shown), or the Y'-direction end of the fourth region (not shown), etc.), or it may be provided on the third region of the second main surface 102 of the base body 100 (not shown). If a detection unit IC is provided, the detection unit IC is electrically connected to the third terminal 400c and the multiple second terminals 400b (see Figures 6A and 6B).

[0131] The third conductive line 300c is made of a conductive material such as the metal material or the carbon material. The third conductive line 300c may be made of the same material as the first electrode 200a, or it may be made of a different material. The third conductive line 300c is provided on the second main surface 102 of the substrate 100 and extends from the first connection portion 800a to the third terminal portion 400c.

[0132] The first connection portion 800a is provided inside the base body 100. For example, the first connection portion 800a may consist of a through-hole penetrating from the first main surface 101 of the base body 100 (refer to Figures 3A, 4A, and 5A) to the second main surface 102, or the first connection portion 800a may have a plurality of via holes provided inside the base body 100 and at least one conductive line provided inside the base body 100 that connects two of the plurality of via holes. In either case, the first connection portion 800a electrically connects the first electrode 200a and the third conductive line 300c.

[0133] The insulating portion 600 has the same configuration as the insulating portion 600 of the sensor S1, except that it does not have the first insulating portion 610.

[0134] The sensor S2 described above exhibits the following technical features and effects (1) to (3). Furthermore, the sensor S2 exhibits the same technical features and effects (4) to (6) as the temperature sensor S1.

[0135] Technical features and effects (1) The technical features and effects (1) of sensor S2 will be described below, comparing it with the sensor of the second comparative example. The sensor of the second comparative example has the same configuration as sensor S2 of Example 2, except that it does not have an insulating part 600 and the first electrode 200a, the plurality of second electrodes 200b, and the plurality of second conductive lines 300b are in direct contact with the thermoelectric conversion unit 500. In the sensor of the second comparative example, because the plurality of second conductive lines 300b are in direct contact with the thermoelectric conversion unit 500, the plurality of second conductive lines 300b function as electrodes in accordance with the temperature gradient generated in the thermoelectric conversion unit 500. For example, not only is a voltage difference generated between the first electrode 200a and each of the plurality of second electrodes 200b in accordance with the temperature gradient generated in the thermoelectric conversion unit 500, but a potential difference is also generated between the first electrode 200a and each of the plurality of second conductive lines 300b in accordance with the temperature gradient generated in the thermoelectric conversion unit 500. Therefore, the detection unit IC or external control unit of the sensor in the second comparative example sequentially detects the voltage difference generated between the first electrode 200a and each of the multiple second conductive lines 300b, and based on that voltage difference, it detects the relative temperature near each of the multiple second conductive lines 300b.

[0136] In contrast, in the sensor S2, since multiple second insulating parts 620 of the insulating part 600 are interposed between the thermoelectric conversion part 500 and multiple second conductive lines 300b, it is possible to prevent the multiple second conductive lines 300b from functioning as electrodes in response to the temperature gradient generated in the thermoelectric conversion part 500. As a result, the detection unit IC or external control unit of the sensor S2 can sequentially detect the voltage difference generated between the first electrode 200a and each of the multiple second electrodes 200b without being affected by the multiple second conductive lines 300b, and sequentially detect the relative temperature near each of the multiple second electrodes 200b (temperature difference between the vicinity of the first electrode 200a and the vicinity of each of the multiple second electrodes 200b) based on the voltage difference. If the sensor S2 is equipped with a sensing unit RS, the detection unit IC or external control unit of the sensor S2 can detect the absolute temperature near each of the multiple second electrodes 200b based on the reference temperature near the first electrode 200a detected based on the signal from the sensing unit RS and the relative temperature near each of the multiple second electrodes 200b detected (based on the temperature difference), without being affected by the multiple second conductive lines 300b. Furthermore, the detection unit IC or external control unit of the sensor S2 can also detect the temperature distribution of the relative temperature or absolute temperature near each of the multiple second electrodes 200b detected, without being affected by the multiple second conductive lines 300b.

[0137] Technical features and effects (2) If the insulating portion 600 is composed of an insulating film laminated on the first main surface 101 of the substrate 100, an insulating layer printed on the first main surface 101 of the substrate 100, or dielectric ink applied to the first main surface 101 of the substrate 100, the sensor S2 can be easily manufactured. This is because the insulating portion 600 can be easily formed on the first main surface 101 of the substrate 100 simply by laminating an insulating film, printing an insulating layer, or applying dielectric ink to the first main surface 101 of the substrate 100. Furthermore, the insulating portion 600 can cover multiple second conductive lines 300b from the Z-direction side at once, the first opening 630 of the insulating portion 600 can be easily formed on the Z-direction side with respect to the first part 210a of the first electrode 200a or the entire surface of the first electrode 200a, and multiple second openings 640 of the insulating portion 600 can be easily formed on the Z-direction side with respect to the first part 210b of multiple second electrodes 200b or the entire surface of the second electrodes 200b.

[0138] Furthermore, if the insulating portion 600 has a third insulating portion 650 and a plurality of fourth insulating portions 660, the third insulating portion 650 covers the second portion 220a of the first electrode 200a from the Z-direction side, and the plurality of fourth insulating portions 660 each cover the second portion 220b of the plurality of second electrodes 200b from the Z-direction side. Therefore, it is not necessary to precisely align the position of the first opening 630 of the insulating portion 600 with the first electrode 200a, nor is it necessary to precisely align the positions of the plurality of second openings 640 of the insulating portion 600 with the plurality of second electrodes 200b.

[0139] Furthermore, if multiple second conductive lines 300b each extend from the second portion 220b of multiple second electrodes 200b, the multiple fourth insulating portions 660 cover the second portion 220b of each of the multiple second electrodes 200b from the Z direction, and the multiple second insulating portions 620 cover the multiple second conductive lines 300b from the Z direction, thereby easily covering the ends of each of the multiple second conductive lines 300b on the multiple second electrode 200b side with the insulating portions 600.

[0140] Technical features and effects (3) If multiple second conductive lines 300b are made of certain metallic materials such as copper or silver, and the thermoelectric conversion unit 500 is made of a material that has a corrosive effect on certain metallic materials such as copper or silver, then if the multiple second conductive lines 300b are in direct contact with the thermoelectric conversion unit 500, there is a risk of corrosion due to the influence of the thermoelectric conversion unit 500. However, even if the multiple second conductive lines 300b of the sensor S2 are made of certain metallic materials such as copper or silver, since multiple second insulating units 620 are interposed between the multiple second conductive lines 300b and the thermoelectric conversion unit 500, the multiple second conductive lines 300b will not corrode due to the influence of the thermoelectric conversion unit 500.

[0141] If the first electrode 200a and the plurality of second electrodes 200b are made of certain metallic materials such as copper or silver, and the thermoelectric conversion unit 500 is made of a material that has a corrosive effect on certain metallic materials such as copper or silver, then the first electrode 200a and the plurality of second electrodes 200b are in direct contact with the thermoelectric conversion unit 500 and are therefore at risk of corrosion due to the influence of the thermoelectric conversion unit 500. However, if the first conductive part 700a is provided on the first electrode 200a and the plurality of second conductive parts 700b are provided on the plurality of second electrodes 200b, then the first conductive part 700a and the plurality of second conductive parts 700b are made of corrosion-resistant materials and are therefore not at risk of corrosion due to the influence of the thermoelectric conversion unit 500. Furthermore, if the first conductive portion 700a is not provided on the first electrode 200a and the plurality of second conductive portions 700b are not provided on the plurality of second electrodes 200b, the first electrode 200a and the plurality of second electrodes 200b may be made of carbon material, or their surfaces may be coated with a material that has excellent corrosion resistance. [Examples]

[0142] Hereinafter, a temperature sensor S3 (hereinafter also simply referred to as "sensor S3") relating to multiple embodiments of the present invention, including Embodiment 3 and its design modifications, will be described with reference to Figures 8A to 9. Figures 8A to 9 show the temperature sensor S3 of Embodiment 3.

[0143] Sensor S3 has the same configuration as the temperature sensor S1 described above, except that (1) sensor S3 has at least one second connection part 800b, at least one fourth conductive line 300d and at least one fourth terminal part 400d instead of at least one second conductive line 300b and at least one second terminal part 400b, and (2) the insulating part 600 does not have at least one second insulating part 620. Below, only the differences will be explained in detail, and redundant explanations will be omitted. In addition, although the second electrode 200b, the second conductive part 700b (if provided), the second opening 640 of the insulating part 600, and the fourth insulating part 660 of the insulating part 600 (if provided) will be described as multiple in sensor S3, it is possible to have at least one of each.

[0144] In Figures 8A and 9, the first electrode 200a, the multiple second electrodes 200b, the first conductive line 300a, and the first terminal portion 400a are shown by dashed lines. Figures 8A to 9 show the Y-Y' and X-X' directions. For the Z-Z' direction, please refer to Figures 3A to 5C.

[0145] At least one fourth terminal portion 400d is one or more, depending on the number of at least one second electrode 200b. For the sake of explanation, it will be described below that at least one fourth terminal portion 400d is multiple, but even if there is only one fourth terminal portion 400d, that one fourth terminal portion 400d can have the same configuration as each of the multiple fourth terminal portions 400d.

[0146] Each fourth terminal portion 400d is made of a conductive material such as the metal material or the carbon material. Each fourth terminal portion 400d may be made of the same material as the plurality of second electrodes 200b, or it may be made of a different material. Each fourth terminal portion 400d is provided on the second main surface 102 of the substrate 100.

[0147] If the base body 100 is provided with a first part 110 and a second part 120, the multiple fourth terminal parts 400d may be provided at intervals on the fourth region of the second main surface 102 of the base body 100 (for example, the X-direction end of the fourth region (see Figure 8B), the X-direction end of the fourth region (not shown), the Y-direction end of the fourth region (not shown), or the Y'-direction end of the fourth region (not shown), etc.), or they may be provided on the third region of the second main surface 102 of the base body 100 (not shown). If a detection unit IC is provided, the detection unit IC is electrically connected to the first terminal part 400a and the multiple fourth terminal parts 400d (see Figures 8A and 8B).

[0148] At least one second connection portion 800b is one or more, depending on the number of at least one second electrode 200b. For the sake of explanation, it will be described below that at least one second connection portion 800b is multiple, but even if there is only one second connection portion 800b, that one second connection portion 800b can have the same configuration as each of the multiple second connection portions 800b.

[0149] Each second connection portion 800b is provided inside the base body 100. For example, each second connection portion 800b may consist of a through-hole penetrating from the first main surface 101 of the base body 100 (refer to Figures 3A, 4A, and 5A) to the second main surface 102, or each second connection portion 800b may have a plurality of via holes provided inside the base body 100 and at least one conductive line provided inside the base body 100 and connecting two of the via holes. In either case, each second connection portion 800b electrically connects the corresponding second electrode 200b and the corresponding fourth conductive line 300d.

[0150] At least one fourth conductive line 300d is one or more, depending on the number of at least one second connection part 800b. For the sake of explanation, it will be described below that at least one fourth conductive line 300d is multiple, but even if there is only one fourth conductive line 300d, that one fourth conductive line 300d can have the same configuration as each of the multiple fourth conductive lines 300d.

[0151] Each fourth conductive line 300d is made of a conductive material such as the metal material or the carbon material. Each fourth conductive line 300d may be made of the same material as the plurality of second electrodes 200b, or it may be made of a different material. Each fourth conductive line 300d is provided on the second main surface 102 of the substrate 100 and extends from the corresponding second connection portion 800b to the corresponding fourth terminal portion 400d.

[0152] The insulating portion 600 has the same configuration as the insulating portion 600 of the sensor S1, except that it does not have a plurality of second insulating portions 620.

[0153] The sensor S3 described above exhibits the following technical features and effects (1) to (3). Furthermore, the sensor S3 exhibits the same technical features and effects (4) to (6) as the temperature sensor S1.

[0154] Technical features and effects (1) The technical features and effects (1) of sensor S3 will be described below, comparing it with the sensor of the third comparative example. The sensor of the third comparative example has the same configuration as sensor S3 of Example 3, except that it does not have an insulating part 600 and the first electrode 200a, the plurality of second electrodes 200b and the first conductive line 300a are in direct contact with the thermoelectric conversion unit 500. In the sensor of the third comparative example, because the first conductive line 300a is in direct contact with the thermoelectric conversion unit 500, the first conductive line 300a functions as an electrode in accordance with the temperature gradient generated in the thermoelectric conversion unit 500. For example, not only is a voltage difference generated between the first electrode 200a and each of the plurality of second electrodes 200b in accordance with the temperature gradient generated in the thermoelectric conversion unit 500, but a potential difference is also generated between the first electrode 200a and the first conductive line 300a in accordance with the temperature gradient generated in the thermoelectric conversion unit 500. Therefore, the detection unit IC or external control unit of the sensor in the third comparative example detects the voltage difference between the first electrode 200a and the first conductive line 300a, and based on that voltage difference, it detects the relative temperature near the first conductive line 300a.

[0155] In contrast, the sensor S3 has a first insulating portion 610 of the insulating portion 600 interposed between the thermoelectric conversion portion 500 and the first conductive line 300a, which prevents the first conductive line 300a from functioning as an electrode in response to the temperature gradient generated in the thermoelectric conversion portion 500. As a result, the detection unit IC or external control unit of the sensor S3 can sequentially detect the voltage difference generated between the first electrode 200a and each of the multiple second electrodes 200b without being affected by the first conductive line 300a, and sequentially detect the relative temperature near each of the multiple second electrodes 200b (the temperature difference between the vicinity of the first electrode 200a and the vicinity of each of the multiple second electrodes 200b) based on the voltage difference. If the sensor S3 is equipped with a sensing unit RS, the detection unit IC or external control unit of the sensor S3 can detect the absolute temperature near each of the multiple second electrodes 200b based on the temperature difference between the reference temperature near the first electrode 200a detected based on the signal from the sensing unit RS and the relative temperature near each of the multiple second electrodes 200b detected, without being affected by the first conductive line 300a. Furthermore, the detection unit IC or external control unit of the sensor S3 can also detect the temperature distribution of the relative temperature or absolute temperature near each of the multiple second electrodes 200b detected, without being affected by the first conductive line 300a.

[0156] Technical features and effects (2) If the insulating portion 600 is composed of an insulating film laminated on the first main surface 101 of the substrate 100, an insulating layer printed on the first main surface 101 of the substrate 100, or dielectric ink applied to the first main surface 101 of the substrate 100, the sensor S3 can be easily manufactured. This is because the insulating portion 600 can be easily formed on the first main surface 101 of the substrate 100 simply by laminating an insulating film, printing an insulating layer, or applying dielectric ink. Moreover, the insulating portion 600 can easily cover the first conductive line 300a from the Z-direction side, and the first opening 630 of the insulating portion 600 can be easily formed on the Z-direction side relative to the first part 210a of the first electrode 200a or the entire surface of the first electrode 200a.

[0157] Furthermore, if the insulating portion 600 has a third insulating portion 650 and a plurality of fourth insulating portions 660, the third insulating portion 650 covers the second portion 220a of the first electrode 200a from the Z-direction side, and the plurality of fourth insulating portions 660 each cover the second portion 220b of the plurality of second electrodes 200b from the Z-direction side. Therefore, it is not necessary to precisely align the position of the first opening 630 of the insulating portion 600 with the first electrode 200a, nor is it necessary to precisely align the positions of the plurality of second openings 640 of the insulating portion 600 with the plurality of second electrodes 200b.

[0158] Furthermore, if the first conductive line 300a extends from the second portion 220a of the first electrode 200a, the third insulating portion 650 covers the second portion 220a of the first electrode 200a from the Z-direction side, and the first insulating portion 610 covers the first conductive line 300a from the Z-direction side, thereby easily covering the end of the first conductive line 300a on the first electrode 200a side with the insulating portion 600.

[0159] Technical features and effects (3) If the first conductive line 300a is made of a certain metallic material such as copper or silver, and the thermoelectric conversion unit 500 is made of a material that has a corrosive effect on the aforementioned metallic material such as copper or silver, then if the first conductive line 300a is in direct contact with the thermoelectric conversion unit 500, there is a risk of corrosion due to the influence of the thermoelectric conversion unit 500. However, even if the first conductive line 300a of the sensor S3 is made of a certain metallic material such as copper or silver, the first insulating unit 610 is interposed between the first conductive line 300a and the thermoelectric conversion unit 500, so the first conductive line 300a will not be corroded due to the influence of the thermoelectric conversion unit 500.

[0160] If the first electrode 200a and the plurality of second electrodes 200b are made of certain metallic materials such as copper or silver, and the thermoelectric conversion unit 500 is made of a material that has a corrosive effect on certain metallic materials such as copper or silver, then the first electrode 200a and the plurality of second electrodes 200b are in direct contact with the thermoelectric conversion unit 500 and are therefore at risk of corrosion due to the influence of the thermoelectric conversion unit 500. However, if the first conductive part 700a is provided on the first electrode 200a and the plurality of second conductive parts 700b are provided on the plurality of second electrodes 200b, then the first conductive part 700a and the plurality of second conductive parts 700b are made of corrosion-resistant materials and are therefore not at risk of corrosion due to the influence of the thermoelectric conversion unit 500. Furthermore, if the first conductive portion 700a is not provided on the first electrode 200a and the plurality of second conductive portions 700b are not provided on the plurality of second electrodes 200b, the first electrode 200a and the plurality of second electrodes 200b may be made of carbon material, or their surfaces may be coated with a material that has excellent corrosion resistance.

[0161] Furthermore, the temperature sensor described above is not limited to the above embodiment, and its design can be arbitrarily modified within the scope of the claims. Details are described below.

[0162] If the base 100 is provided with a first part 110 and a second part 120, the first part 110 can be any part of the base 100, and the second part 120 can be any part of the base 100 other than the first part 110. For example, the second part 120 can be a part of the base 100 located on the Y-direction side or the Y'-direction side with respect to the first part 110.

[0163] The first part 110 and the second part 120 of the base body 100 are optional. In this case, the first part 510 and the second part 520 of the thermoelectric conversion unit 500 are also omitted.

[0164] Each of the multiple second electrodes 200b should be spaced apart from the first electrode 200a in a direction approximately perpendicular to the Z-Z' direction. For example, each of the multiple second electrodes 200b can be spaced apart from the first electrode 200a on the Y side, Y' side, first diagonal side, second diagonal side, third diagonal side, or fourth diagonal side.

[0165] It is possible for the temperature sensor S1 to be configured without a base 100. In this case, the temperature sensor S1 may be redesigned as follows. The thermoelectric conversion unit 500 has one of the above configurations, except that it is a rigid configuration. The insulating part 600 is provided on the main surface of the thermoelectric conversion unit 500 on the Z' direction side. The first electrode 200a is provided on a portion of the main surface of the thermoelectric conversion unit 500 within the first opening 630 of the insulating part 600 and may be in direct contact with it, or it may be indirectly in contact with a portion of the main surface of the thermoelectric conversion unit 500 within the first opening 630 of the insulating part 600 via the first conductive part 700a. The multiple second electrodes 200b may each directly contact a portion of the main surface of the thermoelectric conversion unit 500 within the multiple second openings 640 of the insulating portion 600, or they may each indirectly contact a portion of the main surface of the thermoelectric conversion unit 500 within the first opening 630 of the insulating portion 600 via the multiple second conductive portions 700b. A first conductive line 300a and multiple second conductive lines 300b are provided on the insulating portion 600. The first insulating portion 610 of the insulating portion 600 is interposed between the thermoelectric conversion unit 500 and the first conductive line 300a, and the multiple second insulating portions 620 of the insulating portion 600 are interposed between the thermoelectric conversion unit 500 and multiple second conductive lines 300b. The insulating portion 600 may have a third insulating portion 650 and multiple fourth insulating portions 660, but it is not required to have them. If a first terminal portion 400a and a plurality of second terminal portions 400b are provided, the first terminal portion 400a and the plurality of second terminal portions 400b are provided on the insulating portion 600 or on the main surface of the thermoelectric conversion portion 500. If a sensing portion RS is provided, the sensing portion RS is provided on the insulating portion 600 or on the main surface of the thermoelectric conversion portion 500 as described above and is located in the vicinity of the first electrode 200a. The first heat insulating portion may be provided on the thermoelectric conversion portion 500 as described above, but it is not required to be provided.

[0166] The temperature sensor S1 can be configured to include a third terminal portion 400c, a first connection portion 800a, and a third conductive line 300c instead of the first terminal portion 400a. In this case, the temperature sensor S1 should be redesigned as follows: The first conductive line 300a has the configuration described above, except that it extends from the first electrode 200a to the first connection portion 800a. The first insulating portion 610 of the insulating portion 600 is interposed between the first conductive line 300a and the thermoelectric conversion portion 500, as described above. The first connection portion 800a has the configuration described above, except that it electrically connects the first electrode 200a and the third conductive line 300c. The third conductive line 300c has the configuration described above.

[0167] The temperature sensor S1 can be configured to have multiple fourth terminals 400d, multiple second connection points 800b, and multiple fourth conductive lines 300d instead of multiple second terminals 400b. In this case, the temperature sensor S1 should be redesigned as follows: Each second conductive line 300b has the configuration described above, except that it extends from the corresponding second electrode 200b to the corresponding second connection point 800b. Each second insulating part 620 of the insulating part 600 is interposed between the corresponding second conductive line 300b and the thermoelectric conversion part 500, as described above. Each second connection point 800b has the configuration described above, except that it electrically connects the corresponding second electrode 200b and the corresponding fourth conductive line 300d, respectively. Each fourth conductive line 300d has the configuration described above.

[0168] The insulating portion 600 is not limited to being composed of an insulating film, insulating layer, dielectric ink, etc., provided on the first main surface 101 of the substrate 100. For example, the insulating portion 600 can be configured to have a first insulating portion 610 and at least one second insulating portion 620 made of an electrically insulating material, a first insulating portion 610, at least one second insulating portion 620, a third insulating portion 650, and at least one fourth insulating portion 660 made of an electrically insulating material, a first insulating portion 610, at least one second insulating portion 620, and a third insulating portion 650 made of an electrically insulating material, or a first insulating portion 610, at least one second insulating portion 620, and at least one fourth insulating portion 660 made of an electrically insulating material. If the third insulating portion 650 and at least one fourth insulating portion 660 are omitted, the first opening 630 and the second opening 640 are also omitted. Even if a third insulating portion 650 and at least one fourth insulating portion 660 are provided, if the third insulating portion 650 and at least one fourth insulating portion 660 do not form a substantially annular shape, the first opening 630 and the second opening 640 are also omitted.

[0169] The thermoelectric conversion unit 500 is not limited to being made of a material that converts heat into electricity through the Seebeck effect; it is sufficient if it is made of a material that converts heat into electricity.

[0170] While the first electrode 200a is assumed to be a reference electrode and at least one second electrode 200b is assumed to be a detection electrode, the reverse is also possible. [Explanation of Symbols]

[0171] S1, S2, S3: Temperature sensors 100: Base 101: Main surface 102: Main surface 2 110: Part 1 120: Part 2 200a: 1st electrode 200b: 2nd electrode 300a: First conductive line 300b: Second conductive line 300c: Third conductive line 300d: Fourth conductive line 400a: First terminal section 400b: Second terminal section 400c: Third terminal section 400d: Fourth terminal section 500: Thermoelectric conversion unit 510: Part 1 520: Part 2 600: Insulation part 610: First insulation part 620: Second insulation part 630: First opening 640: Second opening 650: Third insulation part 660: Fourth insulation part 700a: First conductive part 700b: Second conductive part 800a: First connection point 800b: Second connection point IC: Detection unit RS: Sensing Unit

Claims

1. A thermoelectric conversion unit composed of materials that convert heat into electricity, A first electrode and at least one second electrode, At least one conductive line, It is equipped with an insulating part made of an electrically insulating material, The first electrode and the at least one second electrode are in at least partially direct or indirect contact with the thermoelectric conversion section from one side in the first direction, the at least one second electrode is spaced apart from the first electrode in a direction substantially perpendicular to the first direction, and a voltage difference is generated between the first electrode and the at least one second electrode in accordance with the temperature gradient generated in the thermoelectric conversion section, the first direction being the thickness direction of the thermoelectric conversion section. The at least one conductive line comprises at least one of a first conductive line extending from the first electrode and at least one second conductive line extending from the at least one second electrode. The insulating portion of the temperature sensor comprises at least one of a first insulating portion interposed between the thermoelectric conversion portion and the first conductive line, and at least one second insulating portion interposed between the thermoelectric conversion portion and at least one second conductive line.

2. In the temperature sensor according to claim 1, It further comprises an insulating substrate, The substrate has a first main surface on the other side in the first direction, The first electrode and the at least one second electrode are provided on the first main surface of the substrate, A temperature sensor in which at least one of the first conductive line and the at least one second conductive line is provided on the first main surface of the substrate.

3. In the temperature sensor according to claim 1, The insulating portion is composed of an insulating layer or insulating film that is in contact with the thermoelectric conversion portion from one side in the first direction, and further has a first opening and at least one second opening. The first electrode is in at least partially direct or indirect contact with the thermoelectric conversion section from one side in the first direction through the first opening. A temperature sensor wherein at least one second electrode is in at least partially direct or indirect contact with the thermoelectric conversion portion from one side in the first direction through at least one second opening.

4. In the temperature sensor according to claim 1, 2, or 3, The first electrode has a first portion that is in direct contact with the thermoelectric conversion section from one side in the first direction, and a second portion that is the portion of the first electrode other than the first portion. The at least one second electrode has a first portion that is in direct contact with the thermoelectric conversion section from one side in the first direction, and a second portion that is the portion of the at least one second electrode other than the first portion. The insulating portion further comprises at least one of a third insulating portion interposed between the second portion of the first electrode and the thermoelectric conversion portion, and at least one fourth insulating portion interposed between the second portion of at least one second electrode and the thermoelectric conversion portion, wherein the insulating portion is a temperature sensor.

5. In the temperature sensor according to claim 4, A temperature sensor in which the first conductive line extends from the second portion of the first electrode and / or the at least one second conductive line extends from the second portion of the at least one second electrode.

6. In the temperature sensor according to claim 1, 2, or 3, It further comprises at least one of a first conductive part made of a conductive and corrosion-resistant material and at least one second conductive part made of a conductive and corrosion-resistant material. The first electrode is indirectly in contact with the thermoelectric conversion section via the first conductive portion. A temperature sensor in which at least one second electrode is indirectly in contact with the thermoelectric conversion unit via at least one second conductive part.

7. In the temperature sensor according to claim 2, It further includes at least one terminal section, The aforementioned at least one terminal portion has a first terminal portion and at least one second terminal portion. The first terminal portion is provided on the first main surface of the base body, The at least one second terminal portion is provided on the first main surface of the base body, The first conductive line extends from the first electrode to the first terminal portion, The at least one second conductive line extends from the at least one second electrode to the at least one second terminal portion. The insulating portion comprises the first insulating portion and the at least one second insulating portion, wherein the temperature sensor.

8. In the temperature sensor according to claim 2, It further comprises at least one terminal section and at least one connection section, The aforementioned at least one terminal section has at least one second terminal section and a third terminal section. The at least one connecting portion has a first connecting portion, The at least one conductive line has a third conductive line in addition to the at least one second conductive line. The at least one second terminal portion is provided on the first main surface of the base body, The at least one second conductive line extends from the at least one second electrode to the at least one second terminal portion. The substrate further has a second main surface on one side in the first direction, The third terminal portion is provided on the second main surface of the base body, The first connection portion is provided inside the substrate and electrically connects the first electrode and the third conductive line. The third conductive line is provided on the second main surface of the substrate and extends from the first connection portion to the third terminal portion. The insulating portion has at least one second insulating portion, wherein the temperature sensor.

9. In the temperature sensor according to claim 2, It further comprises at least one terminal section and at least one connection section, The aforementioned at least one terminal section has a first terminal section and at least one fourth terminal section. The aforementioned at least one connecting portion has at least one second connecting portion, The at least one conductive line has at least one fourth conductive line in addition to the first conductive line. The first terminal portion is provided on the first main surface of the base body, The first conductive line extends from the first electrode to the first terminal portion, The substrate further has a second main surface on one side in the first direction, The at least one fourth terminal portion is provided on the second main surface of the base body, The at least one second connection portion is provided inside the substrate and electrically connects the at least one second electrode and the at least one fourth conductive line. The at least one fourth conductive line is provided on the second main surface of the substrate and extends from the at least one second connection portion to the at least one fourth terminal portion. The aforementioned insulating portion has the first insulating portion, and is a temperature sensor.

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