Heat dissipation device for Marx generator and Marx generator

Abstract

A heat dissipation device for a Marx generator is provided, comprising N sequentially arranged cooling plates, each of which has a switching element of the Marx generator fixed to it, and the switching elements located on the N cooling plates are connected in series in sequence, each cooling plate having an inlet and an outlet, with cooling water flowing into the interior of the cooling plate from the inlet and flowing out from the outlet, and the inlets and outlets of different cooling plates being connected by water cooling wiring so that the cooling water flows across the cooling plates. This is achieved so that the cooling water flows in from the inlet of the first cooling plate, flows out from the outlet of the first cooling plate, passes through the m cooling plates (excluding the second cooling plate) in order, flows into the inlet of the Nth cooling plate, flows out from the outlet of the Nth cooling plate, flows through the k cooling plates in order, and flows out from the outlet of the second cooling plate, where m+k=N-3, 0≦m≦N-3, and 0≦k≦N-3, and the m cooling plates and the k cooling plates are all different from each other.

Description

Technical Field

[0001] The present disclosure relates to the field of heat dissipation technology, and in particular, to a heat dissipation device for a Marx generator and a Marx generator.

Background Art

[0002] The main function of a pulse high-voltage modulator is to generate a pulse high-voltage to supply power to a magnetron so as to generate the microwave required for an accelerating tube. A switching element machine is a core member of the pulse high-voltage modulator, and forms a pulse high-voltage by controlling the discharge of an energy storage element.

[0003] The switching element machine includes a Marx pulse generator. The Marx generator includes a plurality of sets of switching elements connected in series to form a high-voltage switch combination. It is a circuit that generates a high-voltage pulse by charging capacitors in groups and then discharging the capacitors. Since the switching element has an internal resistance, when a large charge-discharge current flows through its body for a long time, heat is concentrated and generated, and the switching element becomes hot. If the heat in the switching element cannot be conducted and released in time, and the temperature exceeds its normal operating effective range, the switching element will burn out. Therefore, at present, it is necessary to effectively dissipate heat from the switching element.

[0004] However, since the switching element generates a large voltage during discharge, there is a problem that a high-voltage hazard is likely to occur during heat dissipation due to this high voltage difference.

[0005] The above information disclosed herein is only for understanding the background of the disclosure idea of the present disclosure, and the above information may include information that does not constitute the prior art.

Summary of the Invention

[0006] In view of at least one of the above technical problems, the present disclosure provides a heat dissipation device for a Marx generator and a Marx generator.

[0007] According to a first aspect of this disclosure, a heat dissipation device for a Marx generator is provided, comprising N sequentially arranged cooling plates, each of which has a switching element of the Marx generator fixed to it, and the switching elements located on the N cooling plates are sequentially connected in series, each cooling plate having an inlet and an outlet, cooling water flowing into the interior of the cooling plate from the inlet and out from the outlet, and the inlets and outlets of different cooling plates are connected by water cooling wiring so that the cooling water crosses the cooling plates. The following flow is achieved: the cooling water flows in through the inlet of the first cooling plate, flows out through the outlet of the first cooling plate, passes through the m cooling plates (excluding the second cooling plate) in order, flows into the inlet of the Nth cooling plate, flows out through the outlet of the Nth cooling plate, flows through the k cooling plates in order, and then flows out through the outlet of the second cooling plate, where m+k=N-3, 0≦m≦N-3, 0≦k≦N-3, and the m cooling plates and k cooling plates are all distinct from each other.

[0008] According to embodiments of this disclosure, the water cooling wiring sequentially connects the 1st cooler and m coolers according to a first connection rule in which the inlet of the 1+a×p-th cooler is connected to the outlet of the 1+(a+1)p-th cooler, and the outlet of the 1+m×p-th cooler is connected to the inlet of the Nth cooler, where a∈[0,m-1], p is an integer greater than 1, m≧1, and 1+m×p <Nである。

[0009] According to the embodiments of this disclosure, 1 ≤ N - (1 + m × p) ≤ p.

[0010] According to the embodiments of this disclosure, 2 ≤ p ≤ 4.

[0011] According to the embodiments of this disclosure, the value of p is 2.

[0012] According to the embodiments of this disclosure, N is an odd number, and N - (1 + m × p) = 2.

[0013] According to the embodiments of this disclosure, N is an even number and N - (1 + m × p) = 1.

[0014] According to embodiments of the present disclosure, the water cooling wiring sequentially connects the first cooling plate and k cooling plates according to a second connection rule in which the outlet of the Nb×q-th cooling plate is connected to the inlet of the N-(b+1)×q-th cooling plate, and the outlet of the Nk×q-th cooling plate is connected to the inlet of the second cooling plate, where b∈[0,k-1], q is an integer greater than 1, k≧1, and Nk×q>2.

[0015] According to the embodiments of this disclosure, 1 ≤ (Nk × q) - 2 ≤ q.

[0016] According to the embodiments of this disclosure, 2 ≤ q ≤ 4.

[0017] According to embodiments of the present disclosure, the cooling plate includes opposing first and second surfaces, and the switching element is located on the first surface and is metal-connected to the first surface.

[0018] According to the embodiments of this disclosure, N cooling plates are arranged sequentially along a first direction, and water inlets and outlets are provided on the sides of the cooling plates, with the water inlets and outlets corresponding to the N cooling plates being arranged alternately along the first direction.

[0019] According to embodiments of the present disclosure, the switching element of the Marx generator includes an IGBT, a Zener diode whose input terminal is electrically connected to the first terminal of the IGBT, a capacitor connected in series between the second terminal of the IGBT and the output terminal of the Zener diode, and an input diode electrically connected to the first terminal of the IGBT.

[0020] A second aspect of this disclosure further provides a Marx generator including any of the heat dissipation devices described above.

[0021] In the heat dissipation device for a Marx generator according to the embodiment of this disclosure, the switching elements located on N cooling plates are connected in series in sequence to perform charging and discharging. During discharge, each switching element generates a voltage of 1 unit, and the N switching elements generate a voltage of N units.

[0022] After the cooling water flows out of the first cooling plate, it sequentially passes through m cooling plates, and finally flows to the Nth cooling plate. Then, it is affected by the voltage due to the discharge of the switching element, and a voltage difference of N units is accumulated. After that, the cooling water flows out of the Nth cooling plate, sequentially passes through k cooling plates, and then refluxes to and flows out of the second cooling plate. In this reflux process, the accumulated voltage difference of N units is offset, so that the voltage difference between the water outlet of the final second cooling plate and the water inlet of the first cooling plate is only 2 units of voltage difference. Also, m + k = N - 3, that is, for the cooling water to flow through each cooling plate, heat dissipation is realized for each switching element. At the same time, compared with the situation where the cooling water flows into the first cooling plate and finally flows out of the Nth cooling plate, the voltage of the cooling water is greatly reduced, and further the high-voltage hazard is greatly reduced.

[0023] To better understand the present disclosure, the present disclosure will be described in detail based on the following drawings.

Brief Description of the Drawings

[0024] [Figure 1] FIG. 1 is a structural block diagram of a conventional pulse high-voltage modulator. [Figure 2] FIG. 2 is a schematic structural diagram of a conventional Marx generator. [Figure 3] FIG. 3 is an enlarged view of the structure within the dotted line frame in FIG. 2. [Figure 4] FIG. 4 is a schematic structural diagram of a heat dissipation device for a conventional Marx generator. [Figure 5] FIG. 5 is a schematic structural diagram of another heat dissipation device for a conventional Marx generator. [Figure 6] FIG. 6 is an enlarged view of a local structure in a heat dissipation device for a Marx generator according to an embodiment of the present disclosure. [Figure 7] FIG. 7 is a connection schematic diagram of the water-cooling wiring of a heat dissipation device for a Marx generator according to some exemplary embodiments of the present disclosure. [Figure 8] FIG. 8 is a connection schematic diagram of the water-cooling wiring of a heat dissipation device for a Marx generator according to some other exemplary embodiments of the present disclosure. [Figure 9] FIG. 9 shows a schematic diagram of connecting the water-cooling wiring of the heat dissipation device for the Marx generator according to an embodiment of the present disclosure in accordance with the first connection rule. [Figure 10] FIG. 10 shows a specific connection schematic diagram of connecting the water-cooling wiring of the heat dissipation device for the Marx generator according to an embodiment of the present disclosure in accordance with the first connection rule. [Figure 11] FIG. 11 shows another specific connection schematic diagram of connecting the water-cooling wiring of the heat dissipation device for the Marx generator according to an embodiment of the present disclosure in accordance with the first connection rule. [Figure 12] FIG. 12 shows another specific connection schematic diagram of connecting the water-cooling wiring of the heat dissipation device for the Marx generator according to an embodiment of the present disclosure in accordance with the first connection rule. [Figure 13] FIG. 13 shows another specific connection schematic diagram of connecting the water-cooling wiring of the heat dissipation device for the Marx generator according to an embodiment of the present disclosure in accordance with the first connection rule. [Figure 14] FIG. 14 shows a schematic diagram of connecting the water-cooling wiring of the heat dissipation device for the Marx generator according to an embodiment of the present disclosure in accordance with the second connection rule. [Figure 15] FIG. 15 is a connection schematic diagram of the water-cooling wiring of the heat dissipation device for the Marx generator according to yet another exemplary embodiment of the present disclosure.

DETAILED DESCRIPTION OF THE INVENTION

[0025] Hereinafter, specific embodiments of the present disclosure will be described in detail. However, the embodiments described here are for illustrative purposes only and do not limit the present disclosure. In the following description, a large number of specific details are described for a complete understanding of the present disclosure. However, as will be apparent to those skilled in the art, it is not necessary to implement the present disclosure using these specific details. In other embodiments, well-known structures, materials, or methods are not specifically described to avoid confusion in the present disclosure.

[0026] Throughout the specification, any reference to “one embodiment,” “an example,” “a sample,” or “a case” means that the specific features, structures, or properties described in that embodiment or case are included in at least one embodiment of the present disclosure. Therefore, the phrases “in one embodiment,” “in an embodiment,” “a sample,” or “a case” appearing in various places throughout the specification do not necessarily refer to the same embodiment or case. Furthermore, specific features, structures, or properties may be combined in any suitable combination and / or subcombinations in one or more embodiments or cases. Also, those skilled in the art should understand that the term “and / or” as used herein includes any and all combinations of one or more items listed in relation to the present.

[0027] The terms used herein are for illustrative purposes only and are not intended to limit the disclosure. Terms such as “includes” and “contains” as used herein indicate the presence of features, steps, operations and / or components, but do not preclude the presence or addition of one or more other features, steps, operations or components.

[0028] All terms used herein (including technical and scientific terms) have the meanings that a person skilled in the art would ordinarily understand unless otherwise defined. Terms used herein should be interpreted to have meanings consistent with the context of this specification, and not in an idealistic or overly rigid manner.

[0029] Figure 1 is a structural block diagram of a conventional pulse high-voltage modulator, Figure 2 is a structural schematic diagram of a conventional Marx generator, Figure 3 is an enlarged view of the structure within the dotted frame in Figure 2, Figure 4 is a structural schematic diagram of a heat dissipation device for a conventional Marx generator, and Figure 5 is a structural schematic diagram of another conventional heat dissipation device for a Marx generator.

[0030] The main function of a pulsed high-voltage modulator is to generate a pulsed high voltage to power the magnetron, thereby generating the microwaves required for the accelerator tube. As shown in Figure 1, the pulsed high-voltage modulator may include an accelerator control system 1, a DC power supply 2, a switch slave unit 3, a pulse transformer 4, a magnetron filament power supply 5, and a magnetron 6.

[0031] In the control of the accelerator control system 1, the DC power supply 2 generates DC power by rectifying and inverting the commercial power supply, for example, generating 700V DC power, which is then supplied to the switch slave unit 3.

[0032] The switch slave unit 3 is the core component of the pulse high-voltage modulator. The switch slave unit 3 mainly consists of a Marx generator 31, a trigger sequence control circuit 32, and an auxiliary power supply circuit 33.

[0033] After the Marx generator 31 in the switch slave unit 3 is charged, it is discharged to the pulse transformer 4 under the control of the trigger sequence control unit 32. The DC output of the DC power supply 2 is converted into pulsed power, supplied to the pulse transformer 4, and after being boosted, a pulsed high voltage is generated, which then supplies power to the magnetron 6.

[0034] The Marx generator 31 is one method for realizing a pulse-modulated power supply, and it is a device that uses capacitors to charge in parallel and then discharge in series. The Marx generator 31 can realize narrow pulses on the order of nanoseconds and high pulse frequencies.

[0035] As shown in Figure 2, the Marx generator may include a DC charging power supply 311 and a plurality of switching elements 312 connected in series. The DC charging power supply 311 is a power supply, and each switching element 312 is used in a circuit that generates high-voltage pulses by charging and discharging, and the number of switching elements 312 may be set according to the required pulse voltage.

[0036] Specifically, referring to Figure 3, in some embodiments, the switching element of the Marx generator 312 may include an IGBT (insulated gate bipolar transistor) 3121, a Zener diode 3123 whose input terminal is electrically connected to the first terminal of the IGBT, a capacitor C connected in series between the second terminal of the IGBT 3121 and the output terminal of the Zener diode 3123, and an input diode 3122 electrically connected to the first terminal of the IGBT 3121.

[0037] Specifically, the gate of the IGBT 3121 is connected to a drive circuit (not shown) and is switched on / off in response to a drive signal from the drive circuit.

[0038] The first terminal of capacitor C is connected to the collector of IGBT 3121, and the second terminal of capacitor C is connected to the output terminal of Zener diode 3123, which in turn is connected to the emitter of IGBT 3121 via Zener diode 3123.

[0039] In some embodiments, the switching element 312 further includes a resistor 3124 connected in series with the Zener diode 3123. Both the resistor 3124 and the Zener diode 3123 play a role in voltage stabilization, providing a stable voltage to the emitter of the IGBT 3121.

[0040] The IGBT 3121 is used for pulse modulation. Specifically, the DC charging power supply charges capacitor C via the input diodes 3122 of the charging inductor and each switching element 312, forming a parallel charging capacitor array and a charging circuit, which is shown by the light gray arrow in Figure 2.

[0041] When the discharge trigger is received, each IGBT 3121 turns on, and the capacitor in the switching element 312 forms a discharge circuit connected in series by the IGBT 3121. As shown by the dark gray arrows in Figure 2, the voltage generated by the discharge of each switching element is 1Vc, and for n switching elements, the voltage generated by the discharge is nVc.

[0042] The Zener diode 3123, input diode 3122, and IGBT 3121 collect a large amount of heat during the charging and discharging process. To dissipate this heat to the switching element 312, a large volume of toothed heat dissipation fins is usually added to the switching element, and the switching element is cooled by conduction.

[0043] However, the inventors discovered that high-power heat dissipation fins have problems such as complex structure, large volume, inconvenient installation, and high cost, which limit the practical application of switching elements. When a water-cooling heat dissipation method is used to cool switching elements, the cooling effect is higher, the noise during operation is lower, the structure of the switching element becomes more compact, and miniaturization of the switching element can be achieved.

[0044] However, the inventors discovered that when using the method shown in Figure 5 to perform water cooling for the switching elements of the Marx generator, while the water cooling effect is good, there is a problem in that a voltage difference exists between the inlet and outlet of the cooling water, which can cause high-voltage hazards and easily injure workers.

[0045] Specifically, referring to Figure 5, there are nine cooling plates 10, and each cooling plate 10 is provided with a water inlet 11 and a water outlet 12, which enable the flow of cooling water inside the cooling plate 10.

[0046] The water cooling wiring 13 connects the water inlets 11 and outlets 12 of the first to ninth cooling plates in order, enabling the cooling water to flow across the cooling plates, and further ensuring that the cooling water flows sequentially through the nine cooling plates and out through the outlet of the ninth cooling plate.

[0047] The switching elements of the Marx generator are located on the cooling plate 10, and the switching elements on different cooling plates 10 are connected in series. When the discharge trigger is received, each IGBT turns on, and the capacitors in the switching elements form a discharge circuit connected in series via the IGBTs. Each switching element generates a voltage of 1Vc, and the entire series-connected circuit generates a voltage of 9Vc.

[0048] Since the cooling plates 10 and the switching elements are at the same potential, a voltage of 1Vc is generated across all cooling plates. Therefore, the voltage at the inlet of the first cooling plate is 0V, and the voltage at the outlet of the first cooling plate is 1Vc. There is a voltage difference of 2Vc between the inlet 11 of the first cooling plate and the outlet 12 of the second cooling plate, and a voltage difference of 9Vc between the inlet 11 of the first cooling plate and the outlet 12 of the ninth cooling plate. Thus, when water cooling is performed using the method shown in Figure 5, a voltage difference of 9Vc exists between the inlet and the final outlet.

[0049] Figure 5 illustrates the case using only nine cooling plates as an example. When there are n cooling plates (see Figure 4), it can be understood that a voltage difference of nVc exists between the inlet and the final outlet. If n is sufficiently large, this voltage difference becomes high, on the order of 10kV. Since the internal resistance of the cooling water is about 1kΩ, the current in the cooling water becomes approximately 120A, which poses a high-voltage danger and can easily damage the human body.

[0050] In view of this, an embodiment of the present disclosure provides a heat dissipation device for a Marx generator, the heat dissipation device comprising N cooling plates, wherein the cooling water flows out from the first cooling plate, then sequentially through m cooling plates, finally to the Nth cooling plate, then sequentially through k cooling plates 10, and finally recirculates and flows out to the second cooling plate. This recirculation process can almost completely cancel out the N units of voltage difference caused by the cooling water flowing from the first cooling plate and through m cooling plates to the Nth cooling plate 10, and the final voltage of the cooling water is only the voltage difference between the outlet of the second cooling plate and the inlet of the first cooling plate, i.e., only two voltage differences, thus significantly reducing the voltage of the cooling water. Furthermore, since m + k = N - 3, i.e., the cooling water flows through each cooling plate, heat dissipation is achieved for each switching element, and furthermore, effective heat dissipation for each cooling plate is achieved, while significantly reducing the risk of high voltage.

[0051] Figure 6 is a local structural enlargement view of a heat dissipation device for a Marx generator according to an embodiment of the present disclosure. Figure 7 is a schematic diagram of the water cooling wiring connections for a heat dissipation device for a Marx generator according to several exemplary embodiments of the present disclosure. Figure 8 is a schematic diagram of the water cooling wiring connections for a heat dissipation device for a Marx generator according to another exemplary embodiment of the present disclosure. Figure 9 shows a schematic diagram of connecting the water cooling wiring for a heat dissipation device for a Marx generator according to an embodiment of the present disclosure according to a first connection rule. Figure 10 shows a specific connection schematic diagram of connecting the water cooling wiring for a heat dissipation device for a Marx generator according to an embodiment of the present disclosure according to a first connection rule. Figure 11 shows another specific connection schematic diagram of connecting the water cooling wiring for a heat dissipation device for a Marx generator according to an embodiment of the present disclosure according to a first connection rule. Figure 12 shows another specific connection schematic diagram of connecting the water cooling wiring for a heat dissipation device for a Marx generator according to an embodiment of the present disclosure according to a first connection rule. Figure 13 shows another specific schematic diagram of water-cooled wiring for a heat sink for a Marx generator according to an embodiment of the present disclosure, in accordance with the first connection rule. Figure 14 shows a schematic diagram of water-cooled wiring for a heat sink for a Marx generator according to an embodiment of the present disclosure, in accordance with the second connection rule. Figure 15 shows a schematic diagram of water-cooled wiring for a heat sink for a Marx generator according to yet another exemplary embodiment of the present disclosure.

[0052] Referring to Figures 6 to 15, the heat dissipation device for the Marx generator includes N cooling plates 10 arranged in sequence, with the switching elements of the Marx generator fixed to each cooling plate 10, and the switching elements located on the N cooling plates 10 connected in series in sequence. Each cooling plate 10 has an inlet 11 and an outlet 12, and cooling water flows into the interior of the cooling plate 10 from the inlet 11 and out from the outlet 12. The inlets 11 and outlets 12 of different cooling plates 10 are connected by water cooling wiring to realize the flow of cooling water across the cooling plates 10. Cooling water flows in from the inlet 11 of the first cooling plate, out from the outlet 12 of the first cooling plate, passes through the m cooling plates other than the second cooling plate in sequence, then flows into the inlet 11 of the Nth cooling plate, out from the outlet 12 of the Nth cooling plate, flows through the k cooling plates 10 in sequence, and then flows out from the outlet 12 of the second cooling plate. However, m+k=N-3, 0≦m≦N-3, 0≦k≦N-3, and m cooling plates and k cooling plates 10 are distinct from each other.

[0053] In some embodiments, the cooling plate 10 includes opposing first and second surfaces, and the switching element is located on the first surface and is metal-connected to the first surface.

[0054] In some embodiments, the metal connection may be a bolted connection, a riveted connection, or a welded connection.

[0055] In one specific embodiment, the cooling plate 10 is made of metal, and the cooling plate 10 and the switching element are fixedly connected by bolts.

[0056] Referring to Figure 3, in some embodiments, the switching element of the Marx generator includes an IGBT 3121, a Zener diode 3123 whose input terminal is electrically connected to the first terminal of the IGBT 3121, a capacitor C connected in series between the second terminal of the IGBT 3121 and the output terminal of the Zener diode 3123, and an input diode 3122 electrically connected to the first terminal of the IGBT 3121.

[0057] The gate of the IGBT 3121 is connected to a drive circuit (not shown) and is switched on and off in response to a drive signal from the drive circuit.

[0058] The first terminal of capacitor C is connected to the collector of IGBT 3121, and the second terminal of capacitor C is connected to the output terminal of Zener diode 3123, which in turn is connected to the emitter of IGBT 3121 via Zener diode 3123.

[0059] In some embodiments, the switching element further includes a resistor connected in series with the Zener diode 3123. Both the resistor and the Zener diode 3123 play a role in voltage stabilization, providing a stable voltage to the emitter of the IGBT 3121.

[0060] The IGBT 3121 is used for pulse modulation. Specifically, the DC charging power supply charges capacitor C via the charging inductor and the input diodes 3122 of each switching element, forming a capacitor array that is charged in parallel.

[0061] When the discharge trigger is received, each IGBT 3121 turns on, and the capacitor C in the switching element forms a discharge circuit connected in series by the IGBT 3121. The voltage generated by the discharge of each switching element is 1Vc, and the voltage generated by the discharge of N switching elements is NVc.

[0062] As shown in Figure 6, in the switching element located on the first surface of the cooling plate 10, the number of IGBTs 3121 may be two, and the number of diodes 3120 may be eight, with the diodes 3120 including an input diode 3122 and a Zener diode 3123.

[0063] Since the cooling plate 10 is made of metal and is metal-connected to the switching element, the cooling plate 10 is at the same potential as the switching element. The voltage across the cooling plate 10 matches the voltage generated by the switching element. When the cooling water flows through the inside of the cooling plate 10, the voltage across each cooling plate is accumulated. After the cooling water has flowed from the first cooling plate to the Nth cooling plate, the voltages across N cooling plates 10 are accumulated.

[0064] When cooling water recirculates from the Nth cooling plate towards the first cooling plate, the flow direction reverses, and therefore the direction of the voltage drop of the accumulated voltage is reversed. For example, the voltage accumulated when cooling water flows from the first cooling plate to the Nth cooling plate may be a positive voltage, and the voltage accumulated when cooling water flows from the Nth cooling plate to the first cooling plate may be a negative voltage. Since positive and negative voltages cancel each other out, the voltage accumulated when cooling water recirculates from the Nth cooling plate towards the first cooling plate can cancel out the voltage accumulated when cooling water flows from the first cooling plate to the Nth cooling plate, and the final voltage is only the voltage difference between the outlet 12 of the second cooling plate and the inlet 11 of the first cooling plate.

[0065] If the voltage from one switching element is 1Vc, then the final voltage of the cooling water will be only the voltage across the two cooling plates, i.e., 2Vc.

[0066] Referring to Figure 9, in some embodiments, N cooling plates 10 are arranged sequentially along a first direction X, and the water inlets 11 and outlets 12 are provided on the sides of the cooling plates 10, with the water inlets 11 and outlets 12 corresponding to the N cooling plates 10 being arranged alternately along the first direction X.

[0067] Cooling water circulation piping is provided inside the cooling plate 10, and both ends of the cooling water circulation piping are connected to an inlet 11 and an outlet 12, respectively. The cooling water flows through the cooling water circulation piping, removing the heat generated by the switching element.

[0068] In some embodiments, a thermally conductive silicone grease may be applied to the second surface, and the thermally conductive silicone grease has good thermal conductivity and can further dissipate the heat generated by the switching element.

[0069] m cooling plates 10 and k cooling plates 10 are all cooling plates 10 other than the 1st, 2nd, and Nth cooling plates out of the N cooling plates 10, and m cooling plates and k cooling plates 10 are all different from each other. In other words, cooling water flows from the 1st cooling plate and finally out through the 2nd cooling plate, flowing through the N cooling plates 10 and cooling all N cooling plates 10.

[0070] The value of N can be determined according to the number of switching elements, and each cooling plate 10 is used to cool and dissipate heat from one switching element. The number of switching elements can be set according to the required pulse voltage. The embodiments of this disclosure do not specifically limit the value of N.

[0071] In some embodiments, when the value of m is 0, the k cooling plates 10 are the remaining cooling plates 10 other than the 1st cooling plate, the 2nd cooling plate, and the Nth cooling plate. That is, the water cooling wiring connects the outlet 12 of the 1st cooling plate to the inlet 11 of the Nth cooling plate, and the cooling water flows out from the outlet 12 of the 1st cooling plate and then flows directly into the inlet 11 of the Nth cooling plate via the water cooling wiring. The water cooling wiring connects the Nth cooling plate, the k cooling plates 10, and the 2nd cooling plate in sequence.

[0072] Specifically, the above connection configuration will be explained using the case where there are nine cooling plates 10 as an example. If m is 0, then k is 6. The k cooling plates 10 are the 8th through 3rd cooling plates, respectively.

[0073] Referring to Figure 7, a water cooling wire is connected to the inlet 11 of the first cooling plate, and cooling water flows from the water cooling wire into the inlet 11 of the first cooling plate. The outlet 12 of the first cooling plate and the inlet 11 of the ninth cooling plate are connected by a water cooling wire. The outlet 12 of the ninth cooling plate is connected to the inlet 11 of the eighth cooling plate by a water cooling wire, the outlet 12 of the eighth cooling plate is connected to the inlet 11 of the seventh cooling plate by a water cooling wire, and so on, until the outlet 12 of the fourth cooling plate is connected to the inlet 11 of the third cooling plate by a water cooling wire. Finally, the outlet 12 of the third cooling plate is connected to the inlet 11 of the second cooling plate by a water cooling wire. A water cooling wire is connected to the outlet 12 of the second cooling plate, and the cooling water finally flows out from the outlet 12 of the second cooling plate via the water cooling wire.

[0074] In some embodiments, when the value of k is 0, the m cooling plates are the remaining cooling plates 10, excluding the 1st, 2nd, and Nth cooling plates. That is, the water cooling wiring connects the outlet of the 1st cooling plate to the inlet of the 3rd cooling plate, the outlet of the 3rd cooling plate to the inlet of the 4th cooling plate, and so on, sequentially until it is connected to the inlet of the Nth cooling plate. The outlet of the Nth cooling plate is directly connected to the outlet of the 2nd cooling plate via the water cooling wiring, and the water cooling wiring is connected to the outlet of the 2nd cooling plate, and the cooling water finally flows out of the outlet of the 2nd cooling plate via the water cooling wiring.

[0075] As shown in FIG. 8, the number of cooling plates 10 is nine, and when k is 0, m is 6. A water cooling line is connected to the water inlet 11 of the first cooling plate, and cooling water flows into the water inlet 11 of the first cooling plate from the water cooling line. The water outlet 12 of the first cooling plate and the water inlet 11 of the third cooling plate are connected by a water cooling line. The water outlet 12 of the third cooling plate and the water inlet 11 of the fourth cooling plate are connected by a water cooling line. The water outlet 12 of the fourth cooling plate and the water inlet 11 of the fifth cooling plate are connected by a water cooling line. The water outlet 12 of the fifth cooling plate and the water inlet 11 of the sixth cooling plate are connected by a water cooling line. The water outlet 12 of the sixth cooling plate and the water inlet 11 of the seventh cooling plate are connected by a water cooling line. The water outlet 12 of the seventh cooling plate and the water inlet 11 of the eighth cooling plate are connected by a water cooling line. The water outlet 12 of the eighth cooling plate and the water inlet 11 of the ninth cooling plate are connected by a water cooling line. The water outlet 12 of the ninth cooling plate is connected to the water inlet 11 of the second cooling plate by a water cooling line. A water cooling line is connected to the water outlet 12 of the second cooling plate, and the cooling water finally flows out from the water outlet 12 of the second cooling plate through the water cooling line.

[0076] In some embodiments, 0 < m < N - 3 and 0 < k < N - 3. That is, neither m nor k is 0. The first cooling plate is not directly connected to the Nth cooling plate, and the Nth cooling plate is not directly connected to the second cooling plate. In this way, the length of the water cooling line is made shorter than when the first cooling plate and the Nth cooling plate are directly connected, and when the Nth cooling plate and the second cooling plate are directly connected, facilitating manufacturing.

[0077] On the other hand, if the first and Nth cooling plates are directly connected by a water-cooling wire, the pressure drop of the cooling water flowing through this wire is equal to the sum of the voltages across the N cooling plates. If the sum of the voltages across the N cooling plates is too large, the power loss will be too great, and excessive heat loss will occur, which is unfavorable for heat dissipation. From this, it can be seen that the more cooling plates the water-cooling wire spans, the greater the pressure drop of the cooling water in that wire, and the greater the heat loss. Therefore, compared to the cases where the first and Nth cooling plates are directly connected, and the Nth and second cooling plates are directly connected, the case where the first cooling plate is not directly connected to the Nth cooling plate, and the Nth cooling plate is not directly connected to the second cooling plate, results in fewer cooling plates being spanned by the water-cooling wire, and the pressure drop of the cooling water flowing through each water-cooling wire is even smaller, thus reducing heat loss.

[0078] Referring to Figure 9, in some embodiments, the water cooling wiring sequentially connects the 1st cooler and m coolers according to a first connection rule in which the outlet 12 of the 1+a×p-th cooler is connected to the inlet 11 of the 1+(a+1)p-th cooler, and the outlet 12 of the 1+m×p-th cooler is connected to the inlet 11 of the Nth cooler, where a∈[0,m-1], p is an integer greater than 1, m≧1, and 1+m×p <Nである。

[0079] In other words, the water cooling wiring may connect the cooling plates 10 according to a predetermined first connection rule, and in this way, the connection of the water cooling wiring becomes more regular, which is advantageous in the manufacture of the heat dissipation device. Furthermore, since the first connection rule is the same for different cooling plates 10, the number of cooling plates 10 that the water cooling wiring crosses is the same, which results in the same voltage drop of the cooling water in different water cooling wiring, and furthermore, the heat loss due to different water cooling wiring crossing cooling plates 10 is also the same, which is advantageous for heat dissipation balance.

[0080] Here, the values ​​of a are 0, 1, 2, ..., m-1, respectively. p-1 represents the number of cooling plates 10 straddled. In other words, the above-described rule means that when the water cooling wiring connects the cooling plates 10, the outlet 12 and inlet 11 of two cooling plates with p-1 cooling plates in between are connected.

[0081] For example, if the p-value is 2, the number of connections when the water cooling wiring connects the cooling plates 10 using the first connection rule described above is 1. The values ​​of a are 0, 1, 2, ..., m-1, in that order. The outlet 12 of the first cooling plate is connected to the inlet 11 of the third cooling plate, the outlet 12 of the third cooling plate is connected to the inlet 11 of the fifth cooling plate, and so on, until the outlet 12 of the 1+(m-1)×p-th cooling plate is connected to the inlet 11 of the 1+m×p-th cooling plate. The outlet 12 of the 1+m×p-th cooling plate is connected to the inlet 11 of the Nth cooling plate.

[0082] It should be understood that the above first connection rule limits the selection of m cooling plates. That is, the m cooling plates are, in order, the 3rd cooling plate, ..., the 1+(m-1)×pth cooling plate, and the 1+m×pth cooling plate. The k cooling plates 10 are the remaining cooling plates 10 after excluding the above-selected m cooling plates, the 1st cooling plate, the 2nd cooling plate, and the Nth cooling plate.

[0083] Since the first, second, and Nth cooling plates are fixed, it can be seen that after connecting m cooling plates according to the first connection rule described above, the remaining k cooling plates 10 are also fixed. The water cooling wiring can be connected sequentially to the Nth cooling plate, the k cooling plates 10, and the second cooling plate. In this way, by connecting the cooling plates 10 according to the first connection rule described above, it is possible to ensure that the cooling water cools all the switching elements located on the N cooling plates 10, thereby reducing high-pressure hazards and reducing heat loss during the flow process of the cooling water.

[0084] It can be understood that the water cooling wiring connects m cooling plates up to the 1+m×p-th cooling plate according to the first connection rule described above. In other words, the connection of cooling plate 10 between the 1+m×p-th cooling plate and the Nth cooling plate is not limited by the first connection rule described above. The following will be a concrete explanation using the example that N is 9 and m is 2.

[0085] Referring to Figure 10, according to the first connection rule described above, the first cooling plate is connected to the third cooling plate, the third cooling plate is connected to the fifth cooling plate, and the cooling plates from the fifth onward are not limited by the first connection rule described above; that is, the fifth cooling plate may be directly connected to the ninth cooling plate.

[0086] By connecting many cooling plates 10 in accordance with the above rules, the water cooling wiring can be made more regular in its connection to the cooling plates 10, and the heat loss due to the flow of cooling water in different water cooling wirings can be made more uniform. In some embodiments, 1 ≤ N - (1 + m × p) ≤ p. Here, N represents the number of the Nth cooling plate, and 1 + m × p represents the number of the 1 + m × pth cooling plate. In other words, the number of cooling plates 10 interposed between the Nth cooling plate and the 1 + m × pth cooling plate is limited. To put it another way, the value of m can be limited to further limit the number of cooling plates 10 connected according to the above first connection rule.

[0087] For example, if the value of N-(1+m×p) is 1, then the number of cooling plates 10 between the Nth cooling plate and the 1+m×pth cooling plate is 0. If the value of N-(1+m×p) is p, then the number of cooling plates 10 between the Nth cooling plate and the 1+m×pth cooling plate is p-1.

[0088] The condition 1 ≤ N - (1 + m × p) ≤ p indicates that the number of cooling plates 10 between the Nth cooling plate and the 1 + m × pth cooling plate is between 0 and p-1. The water cooling wiring can connect a maximum of 1st cooling plate to the Nth cooling plate according to the first connection rule described above. The following example will specifically explain the case where N is 9 and p is 2.

[0089] Referring to Figure 11, we have 1 ≤ 9 - (1 + m × 2) ≤ 2, which means 3 ≤ m ≤ 3.5, i.e., the value of m is 3. According to the first connection rule above, the m cooling plates are the 3rd cooling plate, the 5th cooling plate, and the 7th cooling plate, in order. Since the 7th cooling plate is the last cooling plate between the 1st cooling plate and the Nth cooling plate that conforms to the first connection rule above, by limiting the value of m using the above formula, all the cooling plates 10 that are connected between the 1st cooling plate and the Nth cooling plate in accordance with the first connection rule above can be selected and connected.

[0090] In some embodiments, 2 ≤ p ≤ 4. When p is equal to 2, the number of cooling plates 10 that the water cooling wiring crosses may be one, i.e., the first cooling plate is connected to the third cooling plate, the third cooling plate is connected to the fifth cooling plate, and so on. When p is equal to 3, the number of cooling plates 10 that the water cooling wiring crosses may be two, i.e., the first cooling plate is connected to the fourth cooling plate, the fourth cooling plate is connected to the seventh cooling plate, and so on. When p is equal to 4, the number of cooling plates 10 that the water cooling wiring crosses may be three, i.e., the first cooling plate is connected to the fifth cooling plate, the fifth cooling plate is connected to the ninth cooling plate, and so on. Within the above range, the number of cooling plates 10 that the water cooling wiring crosses may not be too large, and the voltage drop due to the cooling water in the water cooling wiring may not be too large, ensuring that heat loss is not too great and that it is advantageous for heat dissipation.

[0091] Referring to Figures 12 and 13, in some embodiments, the value of p is 2. That is, the water cooling wiring spans only one coolant, and in this way, the water cooling wiring connects the next coolant with one coolant in between, so that the length of the water cooling wiring connecting different coolant plates 10 is approximately the same. Furthermore, when connecting the first coolant, m coolant plates, and so on to the Nth coolant plate, the connection spans one coolant plate, so among the remaining k coolant plates 10, the number of gaps between two adjacent coolant plates 10 is also 1. Moreover, when connecting the k coolant plates 10, the water cooling wiring also spans one coolant plate. Furthermore, by making the length of the water cooling wire connecting m coolant plates 10 the same as the length of the water cooling wire connecting k coolant plates 10, it is achieved that the heat loss is minimized when the generated heat loss is the same.

[0092] The following explanation will use the example of N = 9, p = 2, and m = 3.

[0093] If N is 9 and m is 3, then k is equal to 3. The m cooling plates are, in order, the 3rd cooling plate, the 5th cooling plate, and the 7th cooling plate. The k cooling plates 10 are, in order, the 8th cooling plate, the 6th cooling plate, and the 4th cooling plate.

[0094] The first cooling plate is connected to the third cooling plate, the third cooling plate is connected to the fifth cooling plate, the fifth cooling plate is connected to the seventh cooling plate, and the seventh cooling plate is connected to the ninth cooling plate.

[0095] During recirculation, the 9th cooling plate is connected to the 8th cooling plate, the 8th cooling plate is connected to the 6th cooling plate, the 6th cooling plate is connected to the 4th cooling plate, and the 4th cooling plate is connected to the 2nd cooling plate. It can be seen that between adjacent cooling plates 10 belonging to m cooling plates, there is one cooling plate belonging to k cooling plates 10 in between. In this way, whether connecting m cooling plates or k cooling plates 10, the water cooling wiring is connected across one cooling plate.

[0096] Referring to Figure 12, in some embodiments, the value of p is 2, N is odd, and N - (1 + m × p) = 2. That is, when N is odd, there is one cooling plate between the Nth cooling plate and the 1 + m × pth cooling plate. In this way, the maximum value of m that satisfies the first connection rule above when N is odd can be limited. That is, the 1 + m × pth cooling plate is the N-2th cooling plate.

[0097] If N is an odd number, the water cooling wiring connects two cooling plates separated by one cooling plate, following a first connection rule that involves connecting across one cooling plate when connecting from the first cooling plate to the Nth cooling plate.

[0098] During recirculation, the Nth cooling plate is connected to the (N-1)th cooling plate, meaning there is no connection across a cooling plate between the Nth and (N-1)th cooling plates. Subsequently, when connecting k cooling plates 10, the water cooling wiring connects the k cooling plates 10 sequentially according to a second connection rule that connects across one cooling plate.

[0099] Referring to Figure 13, in some embodiments, the value of p is 2, N is even, and N - (1 + m × p) = 1. That is, when N is even, there are 0 cooling plates between the Nth cooling plate and the 1 + m × pth cooling plate. In this way, the maximum value of m that satisfies the first connection rule when N is even can be limited. That is, the 1 + m × pth cooling plate is the N-1th cooling plate.

[0100] If N is an even number, the water cooling wiring connects two cooling plates separated by one cooling plate, following a first connection rule that involves connecting across one cooling plate when connecting the first cooling plate and the m cooling plates. Once the connection of the m cooling plates is complete, the N-1th cooling plate and the Nth cooling plate are connected, meaning that there is no connection across cooling plate 10 between the last cooling plate and the Nth cooling plate among the m cooling plates.

[0101] During reflux, the Nth cooling plate was connected to the second cooling plate sequentially according to a second connection rule, which connects across one cooling plate.

[0102] Referring to Figure 14, in some embodiments, the water cooling wiring sequentially connects the Nth cooling plate and k cooling plates 10 according to a second connection rule, where the outlet 12 of the Nb×q-th cooling plate is connected to the inlet 11 of the N-(b+1)×q-th cooling plate, and the outlet 12 of the Nk×q-th cooling plate is connected to the inlet 11 of the 2nd cooling plate, where b∈[0,k-1], q is an integer greater than 1, k≧1, and Nk×q>2.

[0103] The second connection rule is used to limit the selection of k cooling plates 10. The water cooling wiring may also be connected to the cooling plates 10 according to the second connection rule, which makes the water cooling wiring connections more regular.

[0104] Here, the values ​​of b are 0, 1, 2, ..., k-1, respectively. q-1 represents the number of cooling plates 10 straddled. In other words, the above-described rule means that when the water cooling wiring connects the cooling plates 10, it connects the outlet 12 and inlet 11 of two cooling plates with q-1 cooling plates in between.

[0105] For example, if the q value is 2, the number of connections when the water cooling wiring connects the cooling plates 10 using the second connection rule described above is 1. The values ​​of b are 0, 1, 2, ..., k-1, in that order. The outlet 12 of the Nth cooling plate is connected to the inlet 11 of the N-2nd cooling plate, the outlet 12 of the N-2nd cooling plate is connected to the inlet 11 of the N-4th cooling plate, and so on, until the inlet 11 of the N-(k-1)×qth cooling plate is connected to the outlet 12 of the Nk×qth cooling plate. The outlet 12 of the Nk×qth cooling plate is connected to the inlet 11 of the 2nd cooling plate.

[0106] The second connection rule limits the selection of k cooling plates 10, and it is understood that of the N cooling plates 10, the first, second, and Nth cooling plates 10, as well as the remaining cooling plates 10 other than the k cooling plates 10, all belong to the m cooling plates. The water cooling wiring should be connected sequentially to the first cooling plate, the m cooling plates, and the Nth cooling plate.

[0107] In some embodiments, 1 ≤ (Nk × q) - 2 ≤ q. Here, Nk × q represents the number of the Nk × q-th cooling plate. In other words, it limits the number of cooling plates 10 between the Nk × q-th cooling plate and the second cooling plate. To put it another way, by limiting the value of k and further limiting the number of cooling plates 10 connected according to the second connection rule described above, the value of k can be maximized.

[0108] For example, if the value of (Nk×q)-2 is 1, then the number of cooling plates 10 between the Nk×q-th cooling plate and the second cooling plate is 0. If the value of (Nk×q)-2 is q, then the number of cooling plates 10 between the Nk×q-th cooling plate and the second cooling plate is q-1.

[0109] 1 ≤ (Nk × q) - 2 ≤ q indicates that the number of cooling plates 10 between the Nk × q-th cooling plate and the second cooling plate is between 0 and q-1. The water cooling wiring can connect up to a maximum of N cooling plates 10 between the N-th cooling plate and the second cooling plate according to the second connection rule.

[0110] The following explanation will use the example of N being 9 and q being 2.

[0111] Since 1 ≤ (9 - k × 2) - 2 ≤ 2, we have 2.5 ≤ k ≤ 3, which means the value of k is limited to 3. According to the second connection rule above, the k cooling plates 10 are the 7th cooling plate, the 5th cooling plate, and the 3rd cooling plate, in that order. The 3rd cooling plate is the last cooling plate between the Nth cooling plate and the 2nd cooling plate that satisfy the second connection rule. Therefore, by limiting the value of k using the above formula, all the cooling plates 10 that are connected between the Nth cooling plate and the 2nd cooling plate in accordance with the second connection rule can be selected and connected.

[0112] In some embodiments, 2 ≤ q ≤ 4. When q is equal to 2, the number of cooling plates 10 that the water-cooling wiring spans may be one. When q is equal to 3, the number of cooling plates 10 that the water-cooling wiring spans may be two. When q is equal to 4, the number of cooling plates 10 that the water-cooling wiring spans may be three. Within the above range, it is possible to ensure that the number of cooling plates 10 that the water-cooling wiring spans is not too large, and furthermore, that the voltage drop due to the cooling water in the water-cooling wiring is not too large, thereby ensuring that the heat loss is not too great, which is advantageous for heat dissipation.

[0113] In some embodiments, the selection of m cooling plates and k cooling plates 10 is not limited to the first and second connection rules, and other connection methods may be used.

[0114] For example, when connecting the first cooling plate and m cooling plates, the number of cooling plates 10 that the water cooling wiring spans may vary, and may be 0, 1, 2, or any other number.

[0115] Referring to Figure 15, and using N as an example, the water cooling wiring may connect the outlet 12 of the first cooling plate to the inlet 11 of the third cooling plate 10, the outlet 12 of the third cooling plate to the inlet 11 of the fourth cooling plate, the outlet 12 of the fourth cooling plate to the inlet 11 of the sixth cooling plate, and the outlet 12 of the sixth cooling plate to the inlet 11 of the eighth cooling plate. In other words, the m cooling plates are the third, fourth, sixth, and eighth cooling plates, respectively. The k cooling plates 10 are the seventh, fifth, and so on. The water cooling wiring connects the outlet 12 of the ninth cooling plate to the inlet 11 of the seventh cooling plate, the outlet 12 of the seventh cooling plate 10 to the inlet 11 of the fifth cooling plate, and the outlet 12 of the fifth cooling plate to the inlet 11 of the second cooling plate.

[0116] As can be seen from the example above, the water cooling wiring may also be connected to the outlets 12 and inlets 11 of different cooling plates 10 in other ways, thereby enabling the flow of cooling water across the cooling plates 10.

[0117] In the heat dissipation device for the Marx generator according to the above embodiment, the cooling water flows out from the first cooling plate 10, then sequentially through m cooling plates, finally to the Nth cooling plate, then sequentially through k cooling plates 10, and finally recirculates and flows out to the second cooling plate. This recirculation process can almost completely cancel out the N units of voltage difference caused by the cooling water flowing from the first cooling plate and through m cooling plates to the Nth cooling plate 10. The final voltage of the cooling water is only the voltage difference between the outlet 12 of the second cooling plate and the inlet 11 of the first cooling plate, i.e., only two voltage differences, which significantly reduces the voltage of the cooling water.

[0118] A second aspect of this disclosure further provides a Marx generator including a heat dissipation device for the Marx generator according to the above embodiment. The Marx generator may include a DC charging power supply and a plurality of switching elements connected in series. The DC charging power supply is a power supply, and each switching element is used in a circuit that generates high-voltage pulses by charging and discharging, and the number of switching elements can be set according to the required pulse voltage. The switching elements in the Marx generator are fixed to a cooling plate 10 in the heat dissipation device.

[0119] The embodiments of this disclosure have been described above. However, these embodiments are for illustrative purposes only and do not limit the scope of the present invention. Although each embodiment has been described individually above, this does not mean that the measures in each embodiment cannot be suitably combined and used. The scope of this disclosure is defined by the claims and their equivalents. Without departing from the scope of this disclosure, various substitutions and modifications can be made, and such substitutions and modifications should remain within the scope of this disclosure.

Claims

1. A heat dissipation device for a Marx generator, The device includes N cooling plates arranged in sequence, with a switching element of the Marx generator fixed to each cooling plate, and the switching elements located on the N cooling plates are connected in series in sequence, each cooling plate having an inlet and an outlet, cooling water flows into the interior of the cooling plate from the inlet and out from the outlet, and the inlets and outlets of different cooling plates are connected by water cooling wiring to enable the cooling water to flow across the cooling plates. The cooling water flows in through the inlet of the first cooling plate, flows out through the outlet of the first cooling plate, passes through the m cooling plates (excluding the second cooling plate) in order, flows into the inlet of the Nth cooling plate, flows out through the outlet of the Nth cooling plate, flows through the k cooling plates in order, and then flows out through the outlet of the second cooling plate. m + k = N - 3, 0 ≤ m ≤ N - 3, 0 ≤ k ≤ N - 3, The m cooling plates and the k cooling plates are different from each other. A heat dissipation device for a Marx generator, characterized by the following features.

2. The water cooling wiring sequentially connects the first cooling plate and the m cooling plates according to a first connection rule in which the inlet of the 1+a×p cooling plate is connected to the outlet of the 1+(a+1)p cooling plate, and the outlet of the 1+m×p cooling plate is connected to the inlet of the Nth cooling plate, where a∈[0, m-1], p is an integer greater than 1, m≧1, and 1+m×p<N. A heat dissipation device for a Marx generator according to claim 1, characterized in that it is a heat dissipation device.

3. 1 ≤ N - (1 + m × p) ≤ p The heat dissipation device for a Marx generator according to claim 2.

4. 2 ≤ p ≤ 4, The heat dissipation device for a Marx generator according to claim 3.

5. The value of p is 2. The heat dissipation device for a Marx generator according to feature 4.

6. N is an odd number, and N - (1 + m × p) = 2. The heat dissipation device for a Marx generator according to feature 5.

7. N is an even number, and N - (1 + m × p) = 1. The heat dissipation device for a Marx generator according to feature 5.

8. The water cooling wiring sequentially connects the Nth cooling plate and the k cooling plates according to a second connection rule in which the outlet of the N-b×qth cooling plate is connected to the inlet of the N-(b+1)×qth cooling plate, and the outlet of the N-k×qth cooling plate is connected to the inlet of the second cooling plate, where b∈[0,k-1], q is an integer greater than 1, k≧1, and N-k×q>2. A heat dissipation device for a Marx generator according to claim 1, characterized in that it is a heat dissipation device.

9. 1 ≤ (N - k × q) - 2 ≤ q A heat dissipation device for a Marx generator according to claim 1, characterized in that it is a heat dissipation device.

10. 2 ≤ q ≤ 4, A heat dissipation device for a Marx generator according to claim 1, characterized in that it is a heat dissipation device.

11. The cooling plate includes opposing first and second surfaces, and the switching element is located on the first surface and is metal-connected to the first surface. A heat dissipation device for a Marx generator according to any one of claims 1 to 10.

12. The N cooling plates are arranged sequentially along a first direction, the water inlets and outlets are provided on the sides of the cooling plates, and the water inlets and outlets corresponding to the N cooling plates are arranged alternately along the first direction. The heat dissipation device for a Marx generator according to claim 11.

13. The switching element of the Marx generator is IGBT and, A Zener diode whose input terminal is electrically connected to the first terminal of the IGBT, A capacitor connected in series between the second terminal of the IGBT and the output terminal of the Zener diode, The input diode is electrically connected to the first end of the IGBT, The heat dissipation device for a Marx generator according to claim 11.

14. A heat dissipation device according to any one of claims 1 to 13, A Marx generator characterized by the following features.

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