A direct current pulse power supply, a control method and a semiconductor process equipment

Abstract

The embodiment of the application discloses a kind of direct current pulse power supply, control method and semiconductor process equipment, by controller response to direct current output instruction, the working mode of first switch is controlled to be on mode, and the working mode of second switch and third switch is controlled to be off mode, to make the negative pole of direct current power supply and second output port conduct, so that direct current pulse power supply is in direct current output mode.And, by controller response to pulse output instruction, the working mode of first switch to third switch is switched between first control state and second control state, to make the negative pole of direct current power supply and the positive pole of bias power supply and second output port alternate conduction, so that direct current pulse power supply is in pulse output mode.Based on this, direct current pulse power supply in the application, direct current output mode and pulse output mode can be compatible, so as to improve the utilization of equipment, reduce cost and site area.

Description

Technical Field

[0001] This application relates to the field of power supply technology, and in particular to a DC pulse power supply, control method, and semiconductor process equipment. Background Technology

[0002] In semiconductor device fabrication, semiconductor processing equipment is typically used to perform processes such as deposition and etching. This equipment usually includes a reaction chamber and a power supply. The reaction chamber contains a first electrode and a second electrode positioned opposite each other. The power supply is connected to both electrodes, applying voltage to achieve the deposition and etching processes. Currently, power supplies are mainly DC power supplies with a DC output mode and pulse power supplies with a pulse output mode. However, in practical applications, multiple different fabrication processes are often performed within the same reaction chamber. Different processes require different output modes, necessitating the replacement of power supplies to meet these diverse process requirements. This results in bulky semiconductor processing equipment, large space requirements, and difficulties in system integration and control. Summary of the Invention

[0003] This application provides a DC pulse power supply, a control method, and a semiconductor process apparatus to be compatible with both DC output mode and pulse output mode of the power supply, so as to meet the different output modes required by different process fabrication processes.

[0004] In a first aspect, embodiments of this application provide a DC pulse power supply, including: a DC power supply, a bias power supply, a DC pulse generator, a first output port, a second output port, and a controller. The DC pulse generator includes a first switch, a second switch, and a third switch. The first output port is connected to the positive terminal of the DC power supply and the negative terminal of the bias power supply, and is used to connect to a first electrode in a reaction chamber. The second output port is used to connect to a second electrode in the reaction chamber. The first terminal of the first switch is connected to the negative terminal of the DC power supply, the second terminal of the first switch is connected to the second output port, and the control terminal of the first switch is connected to the controller. The first terminal of the second switch is connected to the positive terminal of the bias power supply, the second terminal of the second switch is connected to the second output port, and the control terminal of the second switch is connected to the controller. The first terminal of the third switch is connected to the first output port, the second terminal of the third switch is connected to the first terminal of the first switch, and the control terminal of the third switch is connected to the controller.

[0005] The controller can respond to the DC output command, control the first switch to the on mode, and control the second and third switches to the off mode, so that the negative terminal of the DC power supply is connected to the second output port, thereby putting the DC pulse power supply in the DC output mode, and then realizing the DC signal output through the DC power supply.

[0006] Furthermore, the controller can respond to pulse output commands by switching the operating modes of the first, second, and third switches between a first control state and a second control state, so that the DC pulse power supply is in pulse output mode. In the first control state, the first switch is in conduction mode, and the second and third switches are in off mode. In the second control state, the first switch is in off mode, and the second and third switches are in conduction mode. Also, in the second control state, the bias power supply is controlled to output a bias voltage. Based on this, the first and second switches are controlled to alternately conduct, and the third switch is controlled to conduct simultaneously with the second switch. When the second switch is in conduction mode, the bias power supply is controlled to output a bias voltage, so that the negative terminal of the DC power supply and the positive terminal of the bias power supply are alternately connected to the second output port, thereby putting the DC pulse power supply in pulse output mode, and thus achieving pulse signal output through the DC power supply and the bias power supply.

[0007] Based on this, the DC pulse power supply in this application is compatible with both DC output mode and pulse output mode to meet the different output modes required by different process preparations, thereby improving equipment utilization, reducing costs and space requirements.

[0008] Furthermore, existing power supplies capable of outputting pulse signals typically employ a full-bridge inverter and rectification method, resulting in a large number of power switches, increased power supply cost, and complex power supply control, which affects power supply reliability. The DC pulse power supply in this application, through the coordinated operation of a first switch, a second switch, and a third switch, can achieve pulse signal output, thereby reducing power supply cost, simplifying control, and improving power supply reliability.

[0009] The DC power supply is a high-power constant current (CC) or constant voltage (CV) power supply. The bias power supply is a low-power CC or CV power supply. Furthermore, the power of the DC power supply is greater than the power of the bias power supply. For example, the power of the DC power supply is greater than or equal to 6 kW, while the power of the bias power supply 150 is less than or equal to 1 kW.

[0010] During the manufacturing process, positive charges accumulate on the target surface, potentially leading to arcing. Arcing can cause defects in the film deposited on the substrate. Therefore, the DC pulse power supply in this application can also extinguish the arc when in DC output mode or pulse output mode. For example, the controller is further configured to: acquire impedance parameters when the DC pulse power supply is in DC output mode or pulse output mode, compare the impedance parameters with a first parameter threshold, and if the impedance parameters are less than the first parameter threshold, control the first switch to operate in off mode, control the second and third switches to operate in on mode, and control the bias power supply to output a bias voltage, causing the current in the output cable to decrease and reverse, thereby putting the DC pulse power supply in arc-extinguishing mode.

[0011] Furthermore, in order to improve the stability of the power supply, when the DC pulse power supply is in arc-extinguishing mode, and after controlling the first switch to operate in the off mode and the second and third switches to operate in the on mode, the controller also controls the first switch to operate from the off mode to the on mode, controls the second switch to operate from the on mode to the off mode, and controls the third switch to continue operating in the on mode, so that the energy of the parasitic inductance on the output cable is dissipated in the reaction chamber and the first and third switches.

[0012] Furthermore, in order to improve the stability of the power supply, before controlling the first switch to the off mode and the second and third switches to the on mode in response to the impedance parameter being less than the first parameter threshold, the controller also controls the first switch to the off mode, controls the second and third switches to the on mode, and controls the bias power supply to pause output, thereby realizing the energy transfer of parasitic inductance on the output cable.

[0013] Furthermore, in order to improve the stability of the power supply, when the DC pulse power supply is in arc extinguishing mode, and before controlling the first switch to open mode, controlling the second and third switches to conduction mode, and controlling the bias power supply to pause output, the controller also controls the first and third switches to conduction mode and controls the second switch to open mode, thereby dissipating the energy of the parasitic inductance on the output cable.

[0014] In practical applications, the occurrence of arc discharge indicates a sudden decrease in the impedance of the load in the reaction chamber. Therefore, the arc discharge can be detected by the impedance of the load in the reaction chamber. Based on this, the controller is connected to the first and second output ports respectively. The sampling voltage between the first and second output ports and the sampling current flowing through the second output port are collected. The ratio between the sampling voltage and the sampling current (which corresponds to the impedance of the load in the reaction chamber) is determined, and thus the ratio between the sampling voltage and the sampling current is defined as the impedance parameter. Furthermore, the threshold value of the first parameter can be determined according to process requirements and is not limited here.

[0015] Furthermore, in order to improve the stability of the power supply, when the DC pulse power supply is in pulse output mode, the controller also controls the first switch to switch from open mode to open mode, controls the second switch to switch from open mode to open mode, and controls the third switch to remain in open mode after the first switch, second switch, and third switch are in the second control state (i.e., after the second control state and before the first control state), so that the energy of the parasitic inductance on the output cable is dissipated in the reaction chamber and the first and third switches.

[0016] Furthermore, to improve power supply stability, when the DC pulse power supply is in pulse output mode, the controller, after the first, second, and third switches have reached the first control state (i.e., after the first control state and before the second control state), controls the third switch to switch from off mode to on mode, while keeping the first switch on mode and the second switch off mode, thus dissipating energy from the parasitic inductance on the output cable. Subsequently, it also controls the first switch to switch from on mode to off mode, the second switch to switch from off mode to on mode, keeps the third switch on mode, and pauses the bias power supply output, thereby transferring energy from the parasitic inductance on the output cable.

[0017] For example, the first switch includes a first transistor, a first terminal of which is connected to the negative terminal of a DC power supply, a second terminal of which is connected to a second output port, and a control terminal of which is connected to a controller. Thus, the controller controls the first switch to be in an on mode by controlling the first transistor to be turned on, and controls the first switch to be in an off mode by controlling the first transistor to be turned off.

[0018] For example, the second switch includes a second transistor, a first terminal of which is connected to the positive terminal of a bias power supply, a second terminal of which is connected to a second output port, and a control terminal of which is connected to a controller. Thus, the controller controls the second switch to be in an on mode by controlling the second transistor to be turned on, and controls the second switch to be in an off mode by controlling the second transistor to be turned off.

[0019] For example, the third switch includes a third transistor, a first terminal of which is connected to a first output port, a second terminal of a second transistor is connected to the first terminal of the second switch, and a control terminal of the third transistor is connected to a controller. Thus, the controller controls the third switch to be in an on mode by controlling the third transistor to be turned on, and controls the third switch to be in an off mode by controlling the third transistor to be turned off.

[0020] Furthermore, the first, second, and third transistors are configured as metal-oxide-semiconductor (MOS) transistors. This allows the DC pulse power supply in this application to be compatible with both DC output and pulse output modes through the combined control of the three MOS transistors, thereby reducing the number of MOS transistors used. Additionally, the gate of the MOS transistor serves as the control terminal, the source (or drain) of the MOS transistor serves as the first terminal, and the drain (or source) of the MOS transistor serves as the second terminal.

[0021] Furthermore, the DC pulse generator also includes a clamping pre-charge circuit, which comprises a clamping power supply and a fourth switch. The positive terminal of the clamping power supply is connected to the first output port, the negative terminal of the clamping power supply is connected to the first terminal of the fourth switch, the second terminal of the fourth switch is connected to the first terminal of the first switch, and the control terminal of the fourth switch is connected to the controller. To prevent the clamping power supply from interfering with the DC signal output, the controller also controls the fourth switch to an off mode in response to a DC output command. Additionally, to prevent the clamping power supply from interfering with the pulse signal output, the controller also controls the fourth switch to an off mode in response to a pulse output command.

[0022] The power of the clamping power supply mentioned above is less than the power of the DC power supply and the power of the bias power supply. For example, the power of the clamping power supply is several hundred watts.

[0023] When an arc occurs in DC output mode or pulse output mode, the impedance parameter will be less than the first parameter threshold. In this case, the controller will continue to control the fourth switch to the open mode to prevent the clamping pre-charge circuit from being connected and to avoid the clamping power supply from interfering with the arc extinguishing process.

[0024] Furthermore, when the DC pulse power supply operates in DC output mode or pulse output mode, the impedance of the load in the reaction chamber may suddenly increase. Therefore, the controller also responds to impedance parameters exceeding a second threshold by controlling the first, second, and third switches to open mode and the fourth switch to conduction mode, thus activating the clamping pre-charge circuit to absorb energy from the high-power DC power supply, acting as a buffer and reducing voltage spikes. Without the clamping pre-charge circuit, the high-power DC power supply would continue to transfer energy to the downstream end, releasing all energy onto the third switch and causing damage. The second threshold parameter can be determined according to process requirements and is not limited here.

[0025] In some examples, the clamping pre-charge circuit further includes a clamping resistor and a clamping capacitor, wherein a first terminal of the clamping resistor is connected to the positive terminal of the clamping power supply, and a second terminal of the clamping resistor is connected to the negative terminal of the clamping power supply. A first terminal of the clamping capacitor is connected to the positive terminal of the clamping power supply, and a second terminal of the clamping capacitor is connected to the negative terminal of the clamping power supply.

[0026] For example, the fourth switch includes a fourth transistor, the first terminal of which is connected to the negative terminal of the clamping power supply, the second terminal of which is connected to the first terminal of the first switch, and the control terminal of which is connected to a controller. Thus, the controller controls the fourth switch to be in an on mode by controlling the fourth transistor to be turned on, and controls the fourth switch to be in an off mode by controlling the fourth transistor to be turned off.

[0027] Furthermore, the DC pulse generator also includes a first capacitor, wherein a first terminal of the first capacitor is connected to the positive terminal of the DC power supply, and a second terminal of the first capacitor is connected to the negative terminal of the DC power supply. This configuration allows the first capacitor to filter the voltage output from the DC power supply.

[0028] Furthermore, the DC pulse generator also includes a second capacitor, wherein a first terminal of the second capacitor is connected to the positive terminal of the bias power supply, and a second terminal of the second capacitor is connected to the negative terminal of the bias power supply. This configuration allows the second capacitor to filter the voltage output from the bias power supply.

[0029] In addition, the DC pulse generator also includes an inductor. The negative terminal of the DC power supply is connected to the first terminal of the first transistor and the second terminal of the third transistor through the inductor; that is, an inductor is provided between the negative terminal of the DC power supply and the first and second terminals of the first and third transistors. Furthermore, the first terminal of the inductor is connected to the negative terminal of the DC power supply, and the second terminal of the inductor is connected to the first and second terminals of the first and third switches. Of course, the inductor can be omitted to further reduce the number of components used in the DC pulse power supply.

[0030] This application also provides a semiconductor process apparatus, which includes a reaction chamber and a DC pulse power supply. A first output port of the DC pulse power supply is connected to a first electrode in the reaction chamber and a ground terminal, and a second output port of the DC pulse power supply is connected to a second electrode in the reaction chamber. Furthermore, the DC pulse power supply is as described in the first aspect or various possible designs of the first aspect. Since the DC pulse power supply provided in this application is compatible with both DC output mode and pulse output mode, it can improve equipment utilization, reduce costs, and minimize space requirements. Additionally, the semiconductor process apparatus includes, for example, physical vapor deposition (PVD) equipment (e.g., magnetron sputtering equipment), chemical vapor deposition (CVD) equipment, etching equipment, etc.

[0031] This application also provides a method for controlling a DC pulse power supply, comprising: controlling the operating mode of a first switch to an ON mode and the operating modes of a second and third switch to OFF modes in response to a DC output command, so that the DC pulse power supply is in a DC output mode; and controlling the operating modes of the first, second, and third switches to switch between a first control state and a second control state in response to a pulse output command, so that the DC pulse power supply is in a pulse output mode; wherein, in the first control state, the operating mode of the first switch is ON mode and the operating modes of the second and third switches are OFF modes, and in the second control state, the operating mode of the first switch is OFF mode and the operating modes of the second and third switches are ON mode, and in the second control state, the bias power supply is also controlled to output a bias voltage. Attached Figure Description

[0032] Figure 1a This is a schematic diagram of a magnetron sputtering device in an embodiment of this application;

[0033] Figure 1b This is another structural schematic diagram of the magnetron sputtering apparatus in the embodiments of this application;

[0034] Figure 2 This is a schematic diagram of a DC pulse power supply in an embodiment of this application;

[0035] Figure 3a This is a schematic diagram of the DC pulse power supply in the DC output mode in the embodiments of this application;

[0036] Figure 3b This is a schematic diagram of the voltage between the first output port and the second output port when the DC pulse power supply in the embodiment of this application is in DC output mode;

[0037] Figures 4a to 4e This is a schematic diagram of the DC pulse power supply in pulse output mode in an embodiment of this application.

[0038] Figure 5 This is a schematic diagram of the voltage between the first output port and the second output port when the DC pulse power supply in the pulse output mode is in the embodiment of this application.

[0039] Figures 6a to 6d These are schematic diagrams of a DC pulse power supply in arc-extinguishing mode in an embodiment of this application.

[0040] Figure 7 This is another schematic diagram of the DC pulse power supply in the embodiments of this application;

[0041] Figure 8 This is a schematic diagram of the structure of the DC pulse power supply in the reaction chamber when the impedance of the load suddenly increases in an embodiment of this application.

[0042] Figure label:

[0043] 100 - DC pulse power supply; 110 - First switch; 120 - Second switch; 130 - Third switch; 140 - DC power supply; 150 - Bias power supply; 160 - Controller; 170 - Clamping pre-charge circuit; 180 - DC pulse generator; 190 - Output cable; 171 - Clamping power supply; 172 - Fourth switch; RS - Clamping resistor; CS - Clamping capacitor; M1 - First transistor; M2 - Second transistor; M3 - Third transistor; M4 - Fourth transistor; C1 - First capacitor; C2 - Second capacitor; L0 - Inductor; 200 - Reaction chamber; 210 - First electrode; 211 - Substrate; 220 - Second electrode; 222 - Target; DA - First output port; DB - Second output port. Detailed Implementation

[0044] To make the objectives, technical solutions, and advantages of this application clearer, the application will be further described in detail below with reference to the accompanying drawings. The specific operational methods in the method embodiments can also be applied to the device embodiments or system embodiments. It should be noted that in the description of this application, "multiple" can be understood as "at least two". Furthermore, it should be understood that in the description of this application, terms such as "first" and "second" are used only for distinguishing purposes and should not be construed as indicating or implying relative importance, nor as indicating or implying order.

[0045] It should be noted that the same reference numerals in the accompanying drawings of this application denote the same or similar structures, and therefore repeated descriptions of them will be omitted. Terms expressing position and direction described in this application are illustrative based on the accompanying drawings, but may be modified as needed, and all modifications are included within the scope of protection of this application. The accompanying drawings of this application are for illustrating relative positional relationships only and do not represent actual scale.

[0046] To facilitate understanding of the technical solutions provided in the embodiments of this application, the application scenarios of the solutions in this application will be described first below.

[0047] The DC pulse power supply provided in this application embodiment can be applied to semiconductor process equipment. Because the DC pulse power supply provided in this application embodiment is compatible with both DC output mode and pulse output mode, it can improve equipment utilization, reduce costs, and save space. Furthermore, semiconductor process equipment includes, for example, physical vapor deposition (PVD) equipment (e.g., magnetron sputtering equipment), chemical vapor deposition (CVD) equipment, etching equipment, etc. It is understood that the DC pulse power supply provided in this application embodiment is intended for application, including but not limited to, in these and any other suitable types of semiconductor process equipment.

[0048] The following is a detailed description of the application of the DC pulse power supply provided in the embodiments of this application to a magnetron sputtering device. For the working process of applying the DC pulse power supply provided in the embodiments of this application to other devices, please refer to the following working process applied to a magnetron sputtering device; repeated details will not be discussed further.

[0049] Figure 1a This is a schematic diagram of a magnetron sputtering apparatus according to an embodiment of this application. (Refer to...) Figure 1aThe magnetron sputtering apparatus includes a DC pulse power supply 100 and a reaction chamber 200. The reaction chamber 200 has a first electrode 210 and a second electrode 220 disposed opposite to each other. The first electrode 210 is typically connected to the outer wall of the reaction chamber 200, which is grounded. The DC pulse power supply 100 has a first output port DA and a second output port DB. The first output port DA is connected to the outer wall of the reaction chamber 200 via an output cable (e.g., a high-power cable), thus connecting the first output port DA to the first electrode 210. The second output port DB is also connected to the second electrode 220 via an output cable. In the semiconductor device fabrication process, a substrate (e.g., a wafer) 211 is fixed on a first electrode 210, and a target 222 is fixed on a second electrode 220. An inert gas (e.g., Ar) is pre-introduced into a reaction chamber 200 as a discharge gas. A DC pulse power supply 100 outputs a corresponding voltage to the second electrode 220, generating an electric field between the first electrode 210 and the second electrode 220. This ionizes the discharge gas introduced into the reaction chamber 200 and accelerates the ionized argon ions, which bombard the surface of the target 222, causing the particles to escape from the target 222. Consequently, the sputtered particles are deposited on the substrate 211, forming a thin film on the substrate 211. In practical applications, various fabrication processes are typically performed in the reaction chamber 200. Different fabrication processes require different output modes of the DC pulse power supply. Therefore, this application provides a DC pulse power supply that is compatible with both DC output mode and pulse output mode, thereby improving equipment utilization, reducing costs, and minimizing space requirements.

[0050] Figure 1b This is another structural schematic diagram of the magnetron sputtering apparatus in the embodiments of this application. (Refer to...) Figure 1b , refer to Figure 1bThe DC pulse power supply 100 includes a DC power supply 140, a bias power supply 150, a DC pulse generator 180, and a controller 160. The DC power supply 140 and the bias power supply 150 are respectively connected to a first output port DA and a second output port DB via the DC pulse generator 180. The first output port DA and the second output port DB are connected to a reaction chamber 200 via output cables (e.g., high-power cables) 190. The controller 160 can control the DC pulse generator 180 to conduct the DC power supply 140 to the first output port DA and the second output port DB, enabling the DC pulse power supply to achieve a DC output mode. The controller 160 can also control the DC pulse generator 180 to alternately conduct the DC power supply 140 and the bias power supply 150 to the first output port DA and the second output port DB, enabling the DC pulse power supply to achieve a pulse output mode. This configuration allows the DC pulse generator 180 to be compatible with both DC output and pulse output modes. Furthermore, the DC pulse power supply 100 in this embodiment can be applied to scenarios where the output cable has a certain inductive reactance. In addition, the controller 160 also detects the voltage and current of the first output port DA and the second output port DB. By using the ratio U / I of the voltage U sampled by the ADC, it determines whether an arcing discharge has occurred. When an arcing occurs, it quickly controls the output combination of the DC power supply 140 and the bias power supply 150 to achieve the purpose of arc extinguishing.

[0051] Figure 2 This is a schematic diagram of a DC pulse power supply in an embodiment of this application. (Refer to...) Figure 2The DC pulse power supply 100 also includes: a DC power supply 140, a bias power supply 150, a first switch 110, a second switch 120, a third switch 130, and a controller 160. The first output port DA is connected to the positive terminal of the DC power supply 140 and the negative terminal of the bias power supply 150. The first terminal of the first switch 110 is connected to the negative terminal of the DC power supply 140, the second terminal of the first switch 110 is connected to the second output port DB, and the control terminal of the first switch 110 is connected to the controller 160. The first terminal of the second switch 120 is connected to the positive terminal of the bias power supply 150, the second terminal of the second switch 120 is connected to the second output port DB, and the control terminal of the second switch 120 is connected to the controller 160. The first terminal of the third switch 130 is connected to the first output port DA, the second terminal of the third switch 130 is connected to the first terminal of the first switch 110, and the control terminal of the third switch 130 is connected to the controller 160. The controller 160 is either communicatively or electrically connected to a host computer. The host computer sends a DC output command to the controller 160 based on the automatic selection or the operator's input. In response to the DC output command, the controller 160 inputs corresponding control signals to the control terminals of the first switch 110, the second switch 120, and the third switch 130, respectively. The controller controls the first switch 110 to the on mode and the second switch 120 and the third switch 130 to the off mode, so that the negative terminal of the DC power supply 140 is connected to the second output port DB. This puts the DC pulse power supply 100 in the DC output mode, thereby realizing the DC signal output through the DC power supply 140. Furthermore, the host computer also sends pulse output commands to the controller 160 according to the automatic selection or the operator's input instructions, so that the controller 160 responds to the pulse output commands by inputting corresponding control signals to the control terminals of the first switch 110, the second switch 120, and the third switch 130, respectively, and controls the working modes of the first switch 110, the second switch 120, and the third switch 130 to switch between a first control state and a second control state. In the first control state, the first switch 110 is in the on mode and the second switch 120 and the third switch 130 are in the off mode. In the second control state, the first switch 110 is in the off mode and the second switch 120 and the third switch 130 are in the on mode. In addition, in the second control state, the bias power supply 150 is also controlled to output a bias voltage. Based on this, the first switch 110 and the second switch 120 are controlled to operate in an alternating conduction mode, and the third switch 130 is controlled to conduct simultaneously with the second switch 120, so that the negative terminal of the DC power supply 140 and the positive terminal of the bias power supply 150 are alternately connected to the second output port DB, thereby putting the DC pulse power supply 100 in pulse output mode, and then realizing pulse signal output through the DC power supply 140 and the bias power supply 150.Based on this, the DC pulse power supply 100 in this application is compatible with both DC output mode and pulse output mode, thereby improving equipment utilization, reducing costs and space requirements.

[0052] Furthermore, existing power supplies capable of outputting pulse signals typically employ a full-bridge inverter and rectification method, resulting in a large number of power switches, increased power supply cost, and complex power supply control, which affects power supply reliability. The DC pulse power supply in this application, through the coordinated operation of a first switch, a second switch, and a third switch, can achieve pulse signal output, thereby reducing power supply cost, simplifying control, and improving power supply reliability.

[0053] The aforementioned DC power supply 140 is a high-power constant current (CC) power supply or a constant voltage (CV) power supply. The bias power supply 150 is a low-power CC power supply or a CV power supply. Furthermore, the power of the DC power supply 140 is greater than the power of the bias power supply 150. For example, the power of the DC power supply 140 is greater than or equal to 6 kW, and the power of the bias power supply 150 is less than or equal to 1 kW. Exemplarily, the DC power supply 140 can be configured as an AC-DC conversion circuit, and this AC-DC conversion circuit is connected to AC power (e.g., mains power) to convert AC power into DC power as the output of the DC power supply. Alternatively, the DC power supply 140 can be configured as a combination of an AC-DC conversion circuit and a DC-DC conversion circuit. The AC-DC conversion circuit is connected to AC power (e.g., mains power) and converts the AC power to DC power. The DC-DC conversion circuit then boosts or bucks the DC power output from the AC-DC conversion circuit to output DC power as the DC power supply output. Similarly, the bias power supply 150 can also be configured as an AC-DC conversion circuit, connected to AC power (e.g., mains power) and converting the AC power to DC power as the bias power supply output. Alternatively, the bias power supply 150 can also be configured as a combination of an AC-DC conversion circuit and a DC-DC conversion circuit. The AC-DC conversion circuit is connected to AC power (e.g., mains power) and converts the AC power to DC power. The DC-DC conversion circuit then boosts or bucks the DC power output from the AC-DC conversion circuit to output DC power as the bias power supply output. In addition, the controller 160 is also connected to the AC-DC conversion circuit or DC-DC conversion circuit in the bias power supply 150 to control whether the bias power supply 150 outputs a bias voltage.

[0054] Continue to refer to Figure 2The first switch 110 includes a first transistor M1, wherein a first terminal of the first transistor M1 is connected to the negative terminal of the DC power supply 140, a second terminal of the first transistor M1 is connected to the second output port DB, and a control terminal of the first transistor M1 is connected to a controller 160. Thus, the controller 160 controls the first switch 110 to be in an on mode by controlling the first transistor M1 to be on, and controls the first switch 110 to be in an off mode by controlling the first transistor M1 to be off. For example, the first transistor M1 can be a low-voltage transistor, thereby utilizing the low on-resistance of the low-voltage device to reduce conduction losses in DC output mode, reduce heat dissipation, and lower costs.

[0055] Continue to refer to Figure 2 The second switch 120 includes a second transistor M2. The first terminal of the second transistor M2 is connected to the positive terminal of the bias power supply 150, the second terminal of the second transistor M2 is connected to the second output port DB, and the control terminal of the second transistor M2 is connected to the controller 160. Thus, the controller 160 controls the second switch 120 to be in an on mode by controlling the second transistor M2 to be on, and controls the second switch 120 to be in an off mode by controlling the second transistor M2 to be off. For example, the second transistor M2 may be a high-voltage transistor.

[0056] Continue to refer to Figure 2 The third switch 130 includes a third transistor M3. The first terminal of the third transistor M3 is connected to the first output port DA, the second terminal of the second transistor M2 is connected to the first terminal of the second switch 120, and the control terminal of the third transistor M3 is connected to the controller 160. Thus, the controller 160 controls the third switch 130 to be in an on mode by controlling the third transistor M3 to be on, and controls the third switch 130 to be in an off mode by controlling the third transistor M3 to be off. For example, the third transistor M3 may be a high-voltage transistor.

[0057] For example, the first, second, and third transistors are configured as metal-oxide-semiconductor (MOS) transistors. By controlling the combination of these three MOS transistors, the DC pulse power supply in this application can be compatible with both DC output mode and pulse output mode, thereby reducing the number of MOS transistors used. Furthermore, the gate of the MOS transistor serves as the control terminal, the source (or drain) of the MOS transistor serves as the first terminal, and the drain (or source) of the MOS transistor serves as the second terminal.

[0058] Continue to refer to Figure 2The DC pulse generator 180 also includes a first capacitor C1, wherein a first terminal of the first capacitor C1 is connected to the positive terminal of the DC power supply 140, and a second terminal of the first capacitor C1 is connected to the negative terminal of the DC power supply 140. This configuration allows the first capacitor C1 to filter the voltage output from the DC power supply 140.

[0059] Continue to refer to Figure 2 The DC pulse generator 180 also includes a second capacitor C2, wherein the first terminal of the second capacitor C2 is connected to the positive terminal of the bias power supply 150, and the second terminal of the second capacitor C2 is connected to the negative terminal of the bias power supply 150. This configuration allows the second capacitor C2 to filter the voltage output from the bias power supply 150.

[0060] Continue to refer to Figure 2 The DC pulse generator 180 also includes an inductor L0, wherein the negative terminal of the DC power supply 140 is connected to the first terminal of the first transistor and the second terminal of the third transistor through the inductor L0; that is, an inductor L0 is provided between the negative terminal of the DC power supply 140 and the first terminal of the first transistor and the second terminal of the third transistor. Furthermore, the first terminal of the inductor L0 is connected to the negative terminal of the DC power supply 140, and the second terminal of the inductor L0 is connected to the first terminal of the first switch 110 and the second terminal of the third switch 130. Alternatively, the inductor L0 can be omitted to further reduce the number of components used in the DC pulse power supply 100.

[0061] The controller in this application embodiment can be a general-purpose central processing unit (CPU), a general-purpose processor, a digital signal processing unit (DSP), an application-specific integrated circuit (ASIC), a field-programmable gate array (FPGA), or other programmable logic devices, transistor logic devices, hardware components, or any combination thereof. The aforementioned processor can also be a combination that implements computational functions, such as a combination of one or more microprocessors, a combination of a DSP and a microprocessor, etc.

[0062] The following is based on Figure 2 Taking the structure shown as an example, combined with Figure 3a and Figure 3b The operation of the DC pulse power supply in DC output mode is explained. Figure 3a This is a schematic diagram of the DC pulse power supply in the DC output mode according to an embodiment of this application. Figure 3bThis is a schematic diagram showing the voltage between the first output port and the second output port when the DC pulse power supply in the embodiment of this application is in DC output mode. (Refer to...) Figure 3a and Figure 3b During the process, the controller 160 inputs a corresponding control signal to the gate of the first transistor M1, controlling the first transistor M1 to conduct, so that the negative terminal of the DC power supply 140 is connected to the second output port DB. Furthermore, the controller 160 also inputs corresponding control signals to the gates of the second transistor M2 and the third transistor M3, respectively, controlling both the second transistor M2 and the third transistor M3 to disconnect. Based on this, the positive terminal of the DC power supply 140 is connected to the first output port DA, and the negative terminal of the DC power supply 140 is connected to the second output port DB, thereby supplying power to the first output port DA and the second output port DB through the DC power supply 140, making the voltage UAB between the first output port DA and the second output port DB a negative voltage, and consequently making the voltage between the first electrode 210 and the second electrode 220 in the reaction chamber 200 a negative voltage, realizing DC signal output, so that the DC pulse power supply 100 is in DC output mode. Additionally, Figure 3a The dashed arrows in the diagram indicate the direction of current flow.

[0063] The following is based on Figure 2 Taking the structure shown as an example, combined with Figures 4a to 5 The operation of the DC pulse power supply in pulse output mode is explained. Figures 4a to 4e These are schematic diagrams illustrating the structure of the DC pulse power supply in pulse output mode according to embodiments of this application. Figure 5 This is a schematic diagram of the voltage signal between the first output port and the second output port when the DC pulse power supply in the embodiment of this application is in pulse output mode. (Refer to...) Figure 4a and Figure 5 During the process, the controller 160 inputs a corresponding control signal to the gate of the first transistor M1, controlling the first transistor M1 to conduct, so that the negative terminal of the DC power supply 140 is connected to the second output port DB. Furthermore, the controller 160 also inputs corresponding control signals to the gates of the second transistor M2 and the third transistor M3, respectively, controlling both the second transistor M2 and the third transistor M3 to disconnect. Based on this, the operating mode of the first transistor M1 to the third transistor M3 is the first control state, and the positive terminal of the DC power supply 140 is connected to the first output port DA, and the negative terminal of the DC power supply 140 is connected to the second output port DB. This allows the DC power supply 140 to supply power to the first output port DA and the second output port DB, making the voltage UAB1 between the first output port DA and the second output port DB a negative voltage, thereby making the voltage between the first electrode 210 and the second electrode 220 in the reaction chamber 200 a negative voltage.

[0064] Then, refer to Figure 4b The controller 160 controls both the first transistor M1 and the third transistor M3 to be turned on, and controls the second transistor M2 to be turned off, thereby enabling the output of the high-power DC power supply 140 to be shut off in a timely manner. Furthermore, due to the parasitic inductance on the output cable, the current cannot immediately drop to 0, and will continue through the first transistor M1 and the third transistor M3, with energy dissipated in the reaction chamber 200 and on the first transistor M1 and the third transistor M3, thus achieving energy dissipation.

[0065] Then, refer to Figure 4c The controller 160 controls the first transistor M1 to turn off, and controls the second transistor M2 and the third transistor M3 to turn on, thereby shutting down the output of the high-power DC power supply 140. Furthermore, it controls the bias power supply 150 to stop working, preventing it from outputting a bias voltage. Due to the parasitic inductance on the output cable, the current cannot immediately drop to zero and will continue flowing through the second transistor M2. The energy will be fed back to the second capacitor C2. Alternatively, the DC-DC conversion circuit in the bias power supply 150 can also be a bidirectional DC-DC conversion circuit, feeding the energy back to the previous stage, thus achieving energy transfer.

[0066] Then, refer to Figure 4d and Figure 5 The controller 160 controls the first transistor M1 to turn off, and controls the second transistor M2 and the third transistor M3 to turn on. Based on this, the operating mode of the first transistor M1 to the third transistor M3 is the second control state, and the positive terminal of the bias power supply 150 is connected to the second output port DB. Based on the conduction of the third transistor M3, the energy of the DC power supply 140 is blocked from flowing into the reaction chamber 200. In addition, the controller 160 controls the bias power supply 150 to turn on the output, so that the bias power supply 150 outputs a positive bias voltage, which allows the current on the output cable to decrease and reverse. The positive terminal of the bias power supply 150 is connected to the second output port DB, and the negative terminal of the bias power supply 150 is connected to the first output port DA. Thus, the bias power supply 150 supplies power to the first output port DA and the second output port DB, making the voltage UAB2 between the first output port DA and the second output port DB a positive voltage, thereby making the voltage between the first electrode 210 and the second electrode 220 in the reaction chamber 200 a positive voltage.

[0067] Then, refer to Figure 4eThe controller 160 turns on both the first transistor M1 and the third transistor M3, while turning off the second transistor M2, thereby cutting off the output of the bias power supply 150. Due to the parasitic inductance on the output cable, the current cannot immediately drop to zero and will continue through the first transistor M1 and the third transistor M3, with energy dissipated in the reaction chamber 200 and on the first transistor M1 and the third transistor M3. Furthermore, by turning on the first transistor M1 in advance, the voltage withstand capability problem of the low-voltage transistor can be solved.

[0068] Then, the above process is repeated to output a pulse signal, thereby putting the DC pulse power supply 100 into pulse output mode. Additionally, Figures 4a to 4e The dashed arrows in the diagram indicate the direction of current flow. Furthermore, by... Figure 4a The process shown is the same as Figure 4d The process settings shown Figure 4b and Figure 4c This process can improve the stability and reliability of DC pulse power supplies. Furthermore, by... Figure 4d The process shown is the same as Figure 4a The process settings shown Figure 4e This process can also improve the stability and reliability of DC pulse power supplies.

[0069] During the manufacturing process, positive charge accumulates on the target surface, leading to arcing. Arcing can cause defects in the film deposited on the substrate. Therefore, the DC pulse power supply in this application can also extinguish the arc in either DC output mode or pulse output mode. Furthermore, in practical applications, the occurrence of arcing indicates a sudden decrease in the impedance of the load in the reaction chamber 200. Therefore, the impedance of the load in the reaction chamber 200 can be used to detect arcing. Based on this, the sampling voltage between the first output port DA and the second output port DB, as well as the sampling current flowing through the second output port DB, can be collected. The ratio between the sampling voltage and the sampling current (which corresponds to the impedance of the load in the reaction chamber 200) can be determined, thus defining the ratio of the sampling voltage and the sampling current as an impedance parameter. (Continuing to refer to...) Figure 2 The controller 160 is also connected to the first output port DA and the second output port DB. The controller 160 can also obtain impedance parameters based on the first output port DA and the second output port DB. The impedance parameters are compared with a first parameter threshold (which can be determined according to process requirements and is not limited here). If the impedance parameters are less than the first parameter threshold, it indicates that an arc discharge has occurred or that the possibility of an arc discharge is high. The controller 160 can then control the first to third switches to be in the following modes 1 to 4, so that the DC pulse power supply is in the arc extinguishing mode to realize the arc extinguishing process.

[0070] Mode 1: Figure 6a This is a schematic diagram of a DC pulse power supply in arc-extinguishing mode in an embodiment of this application, referring to... Figure 6a If the impedance parameter is less than the first parameter threshold, the controller 160 controls both the first transistor M1 and the third transistor M3 to conduct, and controls the second transistor M2 to turn off, thereby enabling timely shutdown of the high-power DC power supply 140's output. Furthermore, due to the parasitic inductance on the output cable, the current cannot immediately drop to zero and will continue flowing through the first transistor M1 and the third transistor M3. Energy is dissipated in the reaction chamber 200 and on the first transistor M1 and the third transistor M3, thus achieving energy dissipation from the parasitic inductance on the output cable. Additionally, Figure 6a The dashed arrows in the diagram indicate the direction of current flow.

[0071] Mode 2: Figure 6b This is another structural schematic diagram of the DC pulse power supply in arc-extinguishing mode in the embodiments of this application, referring to... Figure 6b If the impedance parameter is less than the first threshold parameter, the controller 160 controls the first transistor M1 to turn off and controls the second transistor M2 and the third transistor M3 to turn on, thereby shutting off the output of the high-power DC power supply 140. Furthermore, it controls the bias power supply 150 to stop working, preventing it from outputting a bias voltage. Due to the parasitic inductance on the output cable, the current cannot immediately drop to zero and will continue flowing through the second transistor M2. The energy will be fed back to the second capacitor C2. Alternatively, the DC-DC conversion circuit in the bias power supply 150 can also be a bidirectional DC-DC conversion circuit, feeding the energy back to the previous stage, thus achieving energy transfer from the parasitic inductance on the output cable. Additionally, Figure 6b The dashed arrows in the diagram indicate the direction of current flow.

[0072] Mode 3: Figure 6c This is another structural schematic diagram of the DC pulse power supply in arc-extinguishing mode in the embodiments of this application, referring to... Figure 6c The controller 160 controls the first transistor M1 to turn off, and controls the second transistor M2 and the third transistor M3 to turn on. It also controls the bias power supply 150 to operate, causing it to output a positive bias voltage, thus reducing and reversing the current in the output cable. Additionally, Figure 6c The dashed arrows in the diagram indicate the direction of current flow.

[0073] Mode 4: Figure 6d This is another structural schematic diagram of the DC pulse power supply in arc-extinguishing mode in the embodiments of this application, referring to... Figure 6dThe controller 160 turns on both the first transistor M1 and the third transistor M3, and turns off the second transistor M2, thereby cutting off the output of the bias power supply 150. Due to the parasitic inductance on the output cable, the current cannot immediately drop to zero and will continue through the first transistor M1 and the third transistor M3. The energy of the parasitic inductance on the output cable is dissipated in the reaction chamber 200 and on the first transistor M1 and the third transistor M3. Furthermore... Figure 6d The dashed arrows in the diagram indicate the direction of current flow.

[0074] Based on this, when the DC pulse power supply experiences arcing discharge in DC output mode, it can be... Figure 3a The DC output mode shown can sequentially enter the arc-extinguishing mode of mode 1 → mode 2 → mode 3 → mode 4, or enter the arc-extinguishing mode of mode 1, or sequentially enter the arc-extinguishing mode of mode 2 → mode 3 → mode 4, thereby achieving arc extinguishing. Afterwards, further... Figure 3a The process shown is the DC pulse power supply 100 in DC output mode. If the arc cannot be extinguished, the above arc extinguishing mode process can be repeated.

[0075] Furthermore, when the DC pulse power supply experiences arcing discharge in pulse output mode, and... Figures 4a to 4e In any state, it can directly enter the arc extinguishing mode of mode 1→mode 2→mode 3→mode 4 sequentially, or enter the arc extinguishing mode of mode 1, or sequentially enter the arc extinguishing mode of mode 2→mode 3→mode 4, thereby achieving arc extinguishing and improving the stability and reliability of the DC pulse power supply. Afterwards, it can proceed sequentially... Figures 4a to 4e The process shown is the DC pulse power supply 100 in pulse output mode. If the arc cannot be extinguished, the above arc extinguishing mode process can be repeated.

[0076] Furthermore, the DC pulse power supply in this embodiment can reduce reactive power cycling and has the ability to quickly extinguish arcs in any mode, including DC mode and pulse mode. Also, the DC pulse power supply in this embodiment achieves a simple circuit through a four-transistor structure and integrates multiple modes such as pulse output, DC output, zero-voltage output, and cable energy recovery. Furthermore, based on the topology of the DC pulse power supply in this embodiment, all control and detection can be based on a stable capacitor midpoint (i.e., the connection point between the second terminal of the second capacitor and the first terminal of the first capacitor C1), avoiding the need for fiber optic detection and control due to large common-mode signals.

[0077] Figure 7This is a schematic diagram of another structure of the DC pulse power supply in this application embodiment. This embodiment is a modification of the implementation method in the above embodiments. The differences between this embodiment and the above embodiments will only be described below; the similarities will not be repeated here. (Refer to...) Figure 7 The DC pulse power supply 100 includes not only a DC power supply 140, a bias power supply 150, a first switch 110, a second switch 120, a third switch 130, a controller 160, a first output port DA, and a second output port DB, but also a clamping pre-charge circuit 170 in the DC pulse generator 180. This clamping pre-charge circuit 170 includes a fourth switch 172, a clamping power supply 171, a clamping resistor RS, and a clamping capacitor CS. The positive terminal of the clamping power supply 171 is connected to the first output port DA, and the negative terminal of the clamping power supply 171 is connected to the first terminal of the fourth switch 172. The second terminal of the fourth switch 172 is connected to the first terminal of the first switch 110, and the control terminal of the fourth switch 172 is connected to the controller 160. The first terminal of the clamping resistor RS is connected to the positive terminal of the clamping power supply 171, and the second terminal of the clamping resistor RS is connected to the negative terminal of the clamping power supply 171. The first terminal of the clamping capacitor CS is connected to the positive terminal of the clamping power supply 171, and the second terminal of the clamping capacitor CS is connected to the negative terminal of the clamping power supply 171. In response to a DC output command, the controller 160 also controls the fourth switch 172 to operate in the off mode to prevent the clamping power supply 171 from interfering with the DC signal output, thereby placing the DC pulse power supply 100 in DC output mode. Furthermore, in response to a pulse output command, the controller 160 also controls the fourth switch 172 to operate in the off mode to prevent the clamping power supply 171 from interfering with the pulse signal output, thereby placing the DC pulse power supply 100 in pulse output mode.

[0078] The clamping power supply is, for example, a low-power CC or CV power supply, and the power of the clamping power supply 171 is less than the power of the DC power supply 140 and the bias power supply 150. For example, the power of the clamping power supply 171 is several hundred watts. Exemplarily, the clamping power supply 171 can also be configured as an AC-DC conversion circuit, connected to AC power (e.g., mains power), converting the AC power to DC power as the output of the clamping power supply 171. Alternatively, the clamping power supply 171 can also be configured as a combination of an AC-DC conversion circuit and a DC-DC conversion circuit, where the AC-DC conversion circuit is connected to AC power (e.g., mains power), converting the AC power to DC power, and the DC-DC conversion circuit then boosts or bucks the DC power output from the AC-DC conversion circuit to output DC power as the output of the clamping power supply 171.

[0079] Continue to refer to Figure 7The fourth switch 172 includes a fourth transistor M4, wherein the first terminal of the fourth transistor M4 is connected to the negative terminal of the clamping power supply 171, the second terminal of the fourth transistor M4 is connected to the first terminal of the first switch 110, and the control terminal of the fourth transistor M4 is connected to the controller 160. Thus, the controller 160 controls the fourth switch 172 to be in the on mode by controlling the fourth transistor M4 to be on, and controls the fourth switch 172 to be in the off mode by controlling the fourth transistor M4 to be off. Exemplarily, the fourth transistor M4 is also configured as a MOS transistor, so that the DC pulse power supply 100 in this application can be compatible with both DC output mode and pulse output mode through the combined control of four MOS transistors, thereby reducing the number of MOS transistors used. Furthermore, the gate of the MOS transistor serves as the control terminal of the fourth transistor M4, the source (or drain) of the MOS transistor serves as the first terminal of the fourth transistor M4, and the drain (or source) of the MOS transistor serves as the second terminal of the fourth transistor M4.

[0080] Furthermore, since the fourth switch 172 (i.e. the fourth transistor M4) is in the off state when the DC pulse power supply 100 is in DC output mode or pulse output mode, the clamping pre-charge circuit 170 is not connected. Therefore, the working process of the DC pulse power supply 100 in the present application embodiment when it is in DC output mode or pulse output mode can be referred to the working process in the above embodiment, and will not be repeated here.

[0081] Furthermore, when an arc occurs in the DC pulse power supply 100 while it is in DC output mode or pulse output mode, the impedance parameter will be less than the first parameter threshold. In this case, the controller 160 will continue to control the fourth switch 172 (i.e., the fourth transistor M4) to operate in the off mode, so that the clamping pre-charge circuit 170 is also not connected. Therefore, the working process of the DC pulse power supply 100 in this embodiment when an arc occurs in DC output mode or pulse output mode can also refer to the working process in the above embodiment, and will not be repeated here.

[0082] Furthermore, when the DC pulse power supply 100 operates in DC output mode or pulse output mode, the impedance of the load in the reaction chamber 200 may suddenly increase. Therefore, the controller 160 is also configured to, in response to the impedance parameter exceeding a second parameter threshold, control the first switch 110, the second switch 120, and the third switch 130 to be in the off mode, and the fourth switch 172 to be in the on mode, thus connecting the clamping pre-charge circuit 170. The second parameter threshold can be determined according to process requirements and is not limited here. For example, the following describes... Figure 7 Taking the structure shown as an example, combined with Figure 8The operating process of the DC pulse power supply when the impedance of the load in the reaction chamber suddenly increases is explained. Specifically, Figure 8 This is a schematic diagram illustrating a scenario where the impedance of the load in the reaction chamber suddenly increases when the DC pulse power supply 100 is operating in DC output mode. The example provided is a case where the impedance of the load in the reaction chamber 200 suddenly increases. Figure 3a The DC pulse power supply 100 outputs a DC signal in DC output mode. If the impedance parameter is greater than the second parameter threshold, refer to... Figure 8 The controller 160 controls the first transistor M1, the second transistor M2, and the third transistor M3 to be turned off, and controls the fourth transistor M4 to be turned on, thus connecting the clamping pre-charge circuit 170 to absorb the energy from the high-power DC power supply 140, acting as a buffer and reducing voltage spikes. If the clamping pre-charge circuit 170 is not present, the high-power DC power supply 140 will continue to transfer energy to the downstream end, and all the energy will be released onto the third transistor M3, causing damage. Furthermore, Figure 8 The dashed arrows in the diagram indicate the direction of current flow.

[0083] Based on this, the DC pulse power supply in this embodiment achieves a simple circuit through a four-transistor structure, and realizes the integration of multiple modes such as pulse output, DC output, bias output, zero-voltage output, and cable energy recovery.

[0084] This application also provides a semiconductor process apparatus, which includes a reaction chamber and a DC pulse power supply as described in the various embodiments above. The first output port of the DC pulse power supply is connected to a first electrode and a ground terminal in the reaction chamber, and the second output port of the DC pulse power supply is connected to a second electrode in the reaction chamber. Since the DC pulse power supply provided in this application is compatible with both DC output mode and pulse output mode, it can improve equipment utilization, reduce costs, and minimize space requirements.

[0085] This application also provides a control method for a DC pulse power supply, comprising: in response to a DC output command, controlling the operating mode of a first switch to an ON mode and the operating modes of a second and third switch to OFF modes, so that the DC pulse power supply is in a DC output mode. Furthermore, in response to a pulse output command, controlling the operating modes of the first to third switches to switch between a first control state and a second control state, so that the DC pulse power supply is in a pulse output mode; wherein, in the first control state, the first switch is ON mode and the second and third switches are OFF modes; in the second control state, the first switch is OFF mode and the second and third switches are ON mode; and in the second control state, further controlling the bias power supply to output a bias voltage.

[0086] The above description is only a specific implementation of this application, but the protection scope of this application is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the protection scope of this application.

Claims

1. A DC pulse power supply, characterized in that, include: The system includes a DC power supply, a bias power supply, a DC pulse generator, a first output port, a second output port, and a controller; the DC pulse generator includes a first switch, a second switch, and a third switch. The first output port is connected to the positive terminal of the DC power supply and the negative terminal of the bias power supply, and the first output port is used to connect to the first electrode in the reaction chamber; The second output port is used to connect to the second electrode in the reaction chamber; The first terminal of the first switch is connected to the negative terminal of the DC power supply, the second terminal of the first switch is connected to the second output port, and the control terminal of the first switch is connected to the controller. The first terminal of the second switch is connected to the positive terminal of the bias power supply, the second terminal of the second switch is connected to the second output port, and the control terminal of the second switch is connected to the controller. The first end of the third switch is connected to the first output port, the second end of the third switch is connected to the first end of the first switch, and the control end of the third switch is connected to the controller. The controller is used for: In response to a DC output command, the first switch is controlled to operate in the ON mode, and the second and third switches are controlled to operate in the OFF mode, so that the DC pulse power supply is in the DC output mode. In response to a pulse output command, the operating modes of the first switch, the second switch, and the third switch are switched between a first control state and a second control state to put the DC pulse power supply in pulse output mode. In the first control state, the first switch is in conduction mode and the second and third switches are in off mode. In the second control state, the first switch is in off mode and the second and third switches are in conduction mode. Furthermore, in the second control state, the bias power supply is also controlled to output a bias voltage.

2. The DC pulse power supply as described in claim 1, characterized in that, The controller is also used for: When the DC pulse power supply is in the DC output mode or the pulse output mode, the impedance parameters are obtained; In response to the impedance parameter being less than a first parameter threshold, the operating mode of the first switch is controlled to be the off mode, the operating modes of the second switch and the third switch are controlled to be the on mode, and the bias power supply is controlled to output a bias voltage so that the DC pulse power supply is in the arc extinguishing mode.

3. The DC pulse power supply as described in claim 2, characterized in that, The controller is also used for: After the DC pulse power supply is in arc extinguishing mode, the operating mode of the first switch is switched from the off mode to the on mode, and the operating mode of the second switch is switched from the on mode to the off mode.

4. The DC pulse power supply as described in claim 2, characterized in that, The controller is also used for: Before controlling the first switch to the off mode and the second and third switches to the on mode in response to the impedance parameter being less than the first parameter threshold, the first switch is controlled to the off mode, the second and third switches are controlled to the on mode, and the bias power supply is controlled to pause output.

5. The DC pulse power supply as described in claim 4, characterized in that, The controller is also used for: Before controlling the first switch to the off mode, controlling the second and third switches to the on mode, and controlling the bias power supply to pause output, the first and third switches are controlled to the on mode, and the second switch is controlled to switch to the off mode.

6. The DC pulse power supply according to any one of claims 2-5, characterized in that, The controller is also connected to the first output port and the second output port respectively; The controller acquires impedance parameters including: The sampling voltage between the first output port and the second output port, and the sampling current flowing through the second output port are collected; The ratio between the sampling voltage and the sampling current is determined as the impedance parameter.

7. The DC pulse power supply according to any one of claims 1-5, characterized in that, The controller is also used for: After the first switch, the second switch, and the third switch are in the second control state, the operating mode of the first switch is switched from the off mode to the on mode, and the operating mode of the second switch is switched from the on mode to the off mode.

8. The DC pulse power supply according to any one of claims 1-5, characterized in that, The controller is also used for: After the first switch, the second switch and the third switch are in the first control state, the operating mode of the third switch is switched from the disconnect mode to the conduction mode. Subsequently, the operating mode of the first switch is switched from the on mode to the off mode, and the operating mode of the second switch is switched from the off mode to the on mode, and the bias power supply is paused from output.

9. The DC pulse power supply according to any one of claims 1-5, characterized in that, The first switch includes: a first transistor, a first terminal of the first transistor being connected to the negative terminal of the DC power supply, a second terminal of the first transistor being connected to the second output port, and a control terminal of the first transistor being connected to the controller; And / or, the second switch includes: a second transistor, a first terminal of the second transistor being connected to the positive terminal of the bias power supply, a second terminal of the second transistor being connected to the second output port, and a control terminal of the second transistor being connected to the controller; And / or, the third switch includes: a third transistor, the first terminal of which is connected to the first output port, the second terminal of the second transistor being connected to the first terminal of the second switch, and the control terminal of the third transistor being connected to the controller.

10. The DC pulse power supply according to any one of claims 1-5, characterized in that, The DC pulse generator further includes a clamping pre-charge circuit, which includes a clamping power supply and a fourth switch. The power of the clamping power supply is less than the power of the DC power supply and the power of the bias power supply. The positive terminal of the clamping power supply is connected to the first output port, the negative terminal of the clamping power supply is connected to the first terminal of the fourth switch, the second terminal of the fourth switch is connected to the first terminal of the first switch, and the control terminal of the fourth switch is connected to the controller. The controller is also used for: In response to the DC output command, the fourth switch is controlled to operate in the off mode; In response to the pulse output command, the fourth switch is controlled to operate in the off mode.

11. The DC pulse power supply as described in claim 10, characterized in that, The controller is also used for: In response to the impedance parameter being less than the first parameter threshold, the fourth switch is controlled to operate in the off mode. In response to the impedance parameter being greater than the second parameter threshold, the first switch, the second switch, and the third switch are all controlled to be in the off mode, and the fourth switch is controlled to be in the on mode.

12. The DC pulse power supply as described in claim 10, characterized in that, The clamping pre-charge circuit also includes: a clamping resistor and a clamping capacitor; The first end of the clamping resistor is connected to the positive terminal of the clamping power supply, and the second end of the clamping resistor is connected to the negative terminal of the clamping power supply. The first end of the clamping capacitor is connected to the positive terminal of the clamping power supply, and the second end of the clamping capacitor is connected to the negative terminal of the clamping power supply.

13. The DC pulse power supply as described in claim 10, characterized in that, The fourth switch includes a fourth transistor, the first terminal of which is connected to the negative terminal of the clamping power supply, the second terminal of which is connected to the first terminal of the first switch, and the control terminal of which is connected to the controller.

14. The DC pulse power supply according to any one of claims 1-5, characterized in that, The DC pulse generator further includes at least one of a first capacitor, a second capacitor, and an inductor; The first terminal of the first capacitor is connected to the positive terminal of the DC power supply, and the second terminal of the first capacitor is connected to the negative terminal of the DC power supply. The first terminal of the second capacitor is connected to the positive terminal of the bias power supply, and the second terminal of the second capacitor is connected to the negative terminal of the bias power supply. The first end of the inductor is connected to the negative terminal of the DC power supply, and the second end of the inductor is connected to the first end of the first switch and the second end of the third switch.

15. A semiconductor process apparatus, characterized in that, include: The reaction chamber and the DC pulse power supply as described in any one of claims 1-14; The first output port of the DC pulse power supply is connected to the first electrode and the ground terminal in the reaction chamber, and the second output port of the DC pulse power supply is connected to the second electrode in the reaction chamber.

16. A control method for a DC pulse power supply, characterized in that, The DC pulse power supply includes: a DC power supply, a bias power supply, a DC pulse generator, a first output port, and a second output port; the DC pulse generator includes a first switch, a second switch, and a third switch; the first output port is connected to the positive terminal of the DC power supply and the negative terminal of the bias power supply, and the first output port is used to connect to a first electrode in the reaction chamber; the second output port is used to connect to a second electrode in the reaction chamber; the first terminal of the first switch is connected to the negative terminal of the DC power supply, and the second terminal of the first switch is connected to the second output port; the first terminal of the second switch is connected to the positive terminal of the bias power supply, and the second terminal of the second switch is connected to the second output port; the first terminal of the third switch is connected to the first output port, and the second terminal of the third switch is connected to the first terminal of the first switch; The method includes: In response to a DC output command, the first switch is controlled to operate in the ON mode, and the second and third switches are controlled to operate in the OFF mode, so that the DC pulse power supply is in the DC output mode. In response to a pulse output command, the operating modes of the first switch, the second switch, and the third switch are switched between a first control state and a second control state to put the DC pulse power supply in pulse output mode. In the first control state, the first switch is in conduction mode and the second and third switches are in off mode. In the second control state, the first switch is in off mode and the second and third switches are in conduction mode. Furthermore, in the second control state, the bias power supply is also controlled to output a bias voltage.

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