Substrate support structure having a joining slit hiding
The substrate support structure addresses the issue of substrate damage by concealing the joining slit at the ends of each shelf, preventing insertion and collision with the slit, thus enhancing safety and reducing the risk of substrate damage.
Patent Information
- Application Number
- JP2025001159U
- Authority / Receiving Office
- JP · JP
- Patent Type
- Utility models
- Current Assignee / Owner
- Priority Date
- 2025-03-11
- Filing Date
- 2025-04-14
- Publication Date
- 2025-06-11
- Estimated Expiration
- 2035-04-14
AI Technical Summary
Conventional substrate support structures have bonding slits that can cause substrates to be inserted into or collide with the slits during insertion or removal, leading to potential damage or cracking.
The substrate support structure features a joining slit concealment design where each shelf has a side panel extending from the upper surface and a contact portion on the bottom surface, forming a joining slit at the junction. This slit is hidden at the lower or upper end of each bottom plate, preventing substrates from being inserted into it.
The concealed joining slit design prevents substrates from being inserted into or colliding with the slit, reducing the risk of damage or cracking during insertion and removal operations.
Smart Images
Figure 0003251614000001_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to a substrate support structure, and more particularly to a substrate support structure having a bonding slit concealment.
Background Art
[0002] For example, substrates such as wafers, glass, and PCBs are important base materials in semiconductor processes, and a container having a substrate support frame is used as a main tool for transporting substrates. The substrate support frame is used to position the positions of a plurality of substrates so as to prevent displacement and collision of the plurality of substrates, and the container is used to protect the plurality of substrates so as to prevent a situation where the plurality of substrates are contaminated or damaged during transportation.
[0003] In addition, many of the substrate support frames are configured by stacking a plurality of shelves on top of each other. By increasing or decreasing the number of shelves, the overall height of the substrate support frame is adjusted, and the substrate support frame is made compatible with containers of various different heights, thereby improving the convenience of the substrate support frame.
Summary of the Invention
Problems to be Solved by the Invention
[0004] However, since the side panels of the conventional shelves extend from the upper and lower surfaces of the bottom plate, when a plurality of shelves are stacked vertically, the bonding slits of the plurality of side panels are formed at the middle positions of each of the two adjacent bottom plates, and there is a clear height difference between the two adjacent bonding slits at each bonding slit due to the difference in tolerance. When the substrate is inserted into and removed from each shelf, situations such as the substrate being inserted into the bonding slit or colliding with the height difference of the bonding slit are likely to occur, and the edge of the substrate may collide with the shelf and be damaged or cracked.
[0005] Therefore, the present inventor considered that the above-mentioned drawbacks could be improved, and as a result of intensive studies, it was found that the above object could be achieved by adopting the following configuration, and the present invention was completed.
[0006] The present invention has been made in view of such circumstances, and an object thereof is to provide a substrate support structure having a joining slit concealment. That is, each shelf of the present invention has a bottom plate, a side panel is extended on the upper surface of each bottom plate, and a contact portion is provided on the bottom surface. One side panel of the shelves stacked on each other is brought into contact with the contact portion of the other shelf, so that a joining slit is formed, and each joining slit and each bottom plate are installed adjacent to each other, so that the substrate support structure according to the present invention has a joining slit concealment so as to prevent the situation where the substrate is inserted into the joining slit.
Means for Solving the Problems
[0007] In order to achieve the above object, a substrate support structure having a joining slit concealment according to an aspect of the present invention is housed in a container, and the substrate support structure is side support frames respectively arranged on the left and right sides of the container. Each of the side support frames includes a plurality of shelves stacked vertically. Each of the shelves has a bottom plate. A side panel is extended on one of the upper surface and the bottom surface of each bottom plate, and a contact portion is provided on the other. One of the side panels of the shelves stacked on each other is brought into contact with the contact portion of the other shelf, and a joining slit is formed at the junction of each side panel and each contact portion. A pair of side support frames in which each joining slit and each bottom plate are installed adjacent to each other is provided.
[0008] In a preferred example of the present invention, a convex strip is protruded on one of each side panel and each contact portion, and a linear groove is provided on the other, and each convex strip is fitted into each linear groove.
[0009] In a preferred example of the present invention, each of the convex ridges protrudes from each of the side panels, and each of the linear grooves is formed from each of the abutting portions.
[0010] In a preferred example of the present invention, each of the convex ridges protrudes from each of the abutting portions, and each of the linear grooves is formed from each of the side panels.
[0011] In a preferred example of the present invention, each of the side panels extends upward from the upper surface of each of the bottom plates, and each of the abutting portions is formed on the bottom surface of each of the bottom plates.
[0012] In a preferred example of the present invention, each of the side panels extends downward from the bottom surface of each of the bottom plates, and each of the abutting portions is formed on the upper surface of each of the bottom plates.
[0013] In a preferred example of the present invention, it further includes at least one pair of fixtures. At least one hollow sleeve extends on each of the shelves. Each of the fixtures is penetrated so as to be clamped by each of the plurality of hollow sleeves, and each of the plurality of hollow sleeves is closely laminated with each other.
[0014] In a preferred example of the present invention, the number of hollow sleeves on each of the shelves is two. Each of the two hollow sleeves extends from the front and rear ends outside each of the shelves respectively, and the number of fixtures is two pairs.
[0015] In a preferred example of the present invention, on each of the shelves, a hook extends along its axial direction at the position of the hollow sleeve at the rear end, and the cross section of each of the hooks is in an L shape.
[0016] In a preferred example of the present invention, each of the fixtures includes a screw penetrated through each of the plurality of hollow sleeves, and two bolts screwed to both ends of each of the screws.
Advantages of the Invention
[0017] As described above, the joining slit of the substrate support structure according to the present invention is hidden at the lower end or the upper end of each bottom plate. When the substrate is inserted into and removed from the shelf, it becomes difficult for the substrate to fit into the joining slit with height differences, or it becomes difficult for the substrate to be interfered with by the joining slit with height differences. Further, inside the joining slit, there are ridges and linear grooves that exhibit unevenness and fit into each other. The side panel and the abutting portion are more closely attached to the joining slit portion so as to be in a seamlessly hidden state. In this way, the substrate support structure according to the present invention achieves the feature of having a joining slit concealment so as to prevent the situation where the substrate fits into the joining slit.
Brief Description of the Drawings
[0018]
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Mode for Carrying Out the Invention
[0019] Hereinafter, embodiments of the present invention will be described in detail. However, the present invention is not limited thereto, and various modifications are possible within the described scope. Embodiments obtained by appropriately combining the technical means disclosed in different embodiments are also included in the technical scope of the present invention.
[0020] Here, in this specification, terms indicating orientation or positional relationship such as "front side", "rear side", "left side", "right side", "front end", "rear end", "terminal end", "longitudinal direction", "lateral direction", "vertical direction", "upper part", "bottom part", etc. are based on the orientation or positional relationship shown in the attached drawings, and are only used for the sake of simplicity and convenience in the description of the present invention. They do not indicate or imply that the designated device or member has a specific orientation, structure and operation in a specific orientation, and should not be construed as a limiting condition for the present invention.
[0021] A detailed description and technical content of the present invention will be described below with reference to the drawings. However, the attached drawings are for illustrative purposes only and do not limit the present invention.
[0022] First, with reference to FIGS. 1 to 16, a substrate support structure having a joining slit hiding according to the present invention will be specifically described. The substrate support structure having a joining slit hiding according to the present invention is housed in a container 100 and is used to support a substrate 200 such as a wafer. The container 100 is a box body having an opening 101 on the front side, and the opening 101 can be opened at any position of the container 100 and is not limited by this embodiment. This substrate support structure 10 mainly includes a pair of side support frames 1.
[0023] As shown in FIGS. 1 to 16, a pair of the side support frames 1 are arranged to be fixed to the left and right sides of the container 100, respectively. Each side support frame 1 includes a plurality of shelves 11 stacked vertically, and each shelf 11 has a bottom plate 111. On the upper surface of each bottom plate 111, a side panel 112 extends, and on the bottom surface, a contact portion 113 is provided. One side panel 112 of the shelves 11 stacked on each other is in contact with the contact portion 113 of the other shelf 11, and a joining slit S is formed at the junction of each side panel 112 and each contact portion 113. Each joining slit S and each bottom plate 111 are installed adjacent to each other.
[0024] Specifically, a ridge 114 is provided protruding on one of each side panel 112 and each contact portion 113, and a linear groove 115 is provided on the other. Each ridge 114 is fitted into each linear groove 115, and inside the joining slit S, there are a ridge 114 and a linear groove 115 that exhibit unevenness and are fitted into each other. The side panels 112 and the contact portions 113 are more closely adhered to each other at the joining slit S portion so as to present a seamless hidden state.
[0025] Each joining slit S is formed at the lower end of each bottom plate 111. When the substrate 200 is placed on each shelf 11, since it abuts against the bottom plate 111, the joining slit S is formed at the lower end of the bottom plate 111 so as to prevent the situation where the substrate 200 is inserted into the joining slit S.
[0026] In addition, each rib 114 in this embodiment protrudes from each side panel 112, and each linear groove 115 is formed from each contact portion 113. However, the present invention is not limited to these. Each rib 114 may protrude from each contact portion 113, and each linear groove 115 may be formed from each side panel 112.
[0027] Moreover, one or more hollow sleeves 12 are extended on each shelf 11. Each hollow sleeve 12 has an upper end 121 and a lower end 122, a notch portion 123 provided from the upper end 121 and the lower end 122, and an elastic sheet 124 that extends into the notch portion 123 and protrudes from the hollow sleeve 12.
[0028] Each elastic sheet 124 includes a lateral elastic arm 125 extending from the inner peripheral edge of the notch portion 123, and a bump 126 that protrudes from the lateral elastic arm 125 and protrudes from one of the upper end 121 and the lower end 122. When the bump 126 is compressed, it expands and contracts elastically and retracts into the notch portion 123.
[0029] In addition, each notch portion 123 in this embodiment is an open hollow notch that penetrates the inner surface and the outer surface upward from each lower end 122. The lateral elastic arm 125 extends from the left inner wall or the right inner wall of the hollow notch, and the bump 126 protrudes at a range of about 0.1 to 0.3 mm from the lower end 122. The bump 126 in this embodiment is a rectangular block. However, it is not limited thereto, and the bump 126 may have any geometric shape such as a triangular block or a trapezoidal block. The bottom surface of each lateral elastic arm 125 and the lower end 122 are located in the same plane, and the outer surface of each lateral elastic arm 125 and the outer peripheral edge of the hollow sleeve 12 are located on the same curved surface.
[0030] The optimal size for the bump 126 to protrude from the lower end 122 is 0.2 mm. The optimal size for the length of the lateral elastic arm 125 ranges between 4 and 5 mm, and the optimal size for the thickness of the lateral elastic arm 125 ranges between 1 and 2 mm. However, each size of the elastic sheet 124 is not limited to the above numerical values in the present invention.
[0031] Each notch 123 is an open hollow notch that penetrates the inner and outer surfaces and is opened downward from each upper end 121. The lateral elastic arm 125 extends from the left inner wall or the right inner wall of the hollow notch. The bump 126 protrudes from the upper end 121 in the range of about 0.1 to 0.3 mm. The optimal size for the bump 126 to protrude from the upper end 121 is 0.2 mm. The upper surface of each lateral elastic arm 125 and the upper end 121 are located in the same plane. However, the present invention is not limited to the above-described embodiments.
[0032] Also, the number of the hollow sleeves 12 of each shelf 11 in this embodiment is two. Each of the two hollow sleeves 12 extends from the front and rear ends of each bottom plate 111 and each side panel 112 respectively, that is, each of the two hollow sleeves 12 extends from the front and rear ends outside each shelf 11. The rear end of each shelf 11 is installed to be farther away from the opening 101 of the container 100 than the front end. A hook 13 extends along the axial direction of the hollow sleeve 12 located at the rear end of each shelf 11. The cross section of each hook 13 is in an L shape. The hook 13 is used to lock the substrate 200 so that the substrate 200 is engaged with the carrier body and the substrate 200 is firmly positioned on the shelf 11.
[0033] Each shelf 11 is manufactured by plastic injection molding. However, the present invention is not limited thereto. The bottom plate 111, the side panel 112, the hollow sleeve 12, the elastic sheet 124, and the rib 114 may be manufactured by integrally injection molding plastics so that they cannot be detached from each other.
[0034] Referring to FIGS. 1 to 5, FIGS. 11 to 14, and FIG. 16, the substrate support structure 10 according to the present invention further includes one pair or a plurality of pairs of fixtures 2. Each fixture 2 is provided so as to be penetrated and held between a plurality of hollow sleeves 12. By tightly laminating the plurality of hollow sleeves 12 with each other, each bump 126 is tightly abutted against the other of each upper end 121 and each lower end 122. That is, each elastic sheet 124 is tightly abutted against the other of each upper end 121 and each lower end 122.
[0035] When each bump 126 of the present embodiment protrudes from the lower end 122, the bump 126 of each elastic sheet 124 is tightly abutted against each upper end 121. On the contrary, when each bump 126 protrudes from the upper end 121, the bump 126 of each elastic sheet 124 is tightly abutted against each lower end 122.
[0036] More specifically, the number of fixtures 2 in the present embodiment is two pairs. Each fixture 2 includes a screw 21 penetrating through a plurality of hollow sleeves 12, and two bolts 22 screwed to both ends of each screw 21. Threaded holes (not shown) are provided at both ends of the screw 21. The two bolts 22 are screwed into the threaded holes at both ends of the screw 21 and are arranged at the upper and lower ends of the plurality of stacked hollow sleeves 12. The two bolts 22 jointly clamp the plurality of hollow sleeves 12 tightly.
[0037] Since the side panels of the conventional shelves extend from the upper and lower surfaces of the bottom plate, when a plurality of shelves are stacked vertically, the joint slits of the plurality of side panels are formed at the intermediate positions of the two adjacent bottom plates respectively. In addition, since each shelf 11 has manufacturing tolerances, a clear height difference occurs between the two adjacent joint slits at each joint slit due to the difference in tolerances. When the substrate is inserted into and removed from the shelf, the substrate is likely to be inserted into the joint slit with a height difference, or is likely to be interfered by the joint slit with a height difference. As a result, the insertion and removal operation of the substrate fails, and ultimately, the substrate may be damaged or cracked.
[0038] In contrast, referring to FIGS. 1 to 9, FIGS. 11 to 13, and FIG. 16, in the usage state of the substrate support structure 10 according to the present invention, the bonding slit S is hidden at the lower end or the upper end of each bottom plate 111, so that when the substrate 200 is inserted into and removed from the shelf 11, it becomes difficult for the substrate 200 to be inserted into the bonding slit S having a height difference, or it becomes difficult for the substrate 200 to be interfered with by the bonding slit S having a height difference. Further, inside the bonding slit S, there are protruding ridges 114 and linear grooves 115 that are concave and convex and fit into each other.
[0039] As a result, the side panel 112 and the abutting portion 113 are more closely adhered to the bonding slit S portion so as to be in a seamlessly hidden state. And thereby, the substrate support structure 10 according to the present invention achieves the feature of hiding the bonding slit S and preventing the substrate 200 from being inserted into the bonding slit S.
[0040] Also, in the examples of FIGS. 1 to 11, FIGS. 13 to 15, each shelf 11 of the substrate support structure 10 according to the present invention has manufacturing tolerances. Therefore, the height of each hollow sleeve 12 has tolerances, or the surfaces to be stacked on each other are non-flat. When a plurality of hollow sleeves 12 are stacked, due to the above tolerances or the non-flatness of the surface, an error occurs in the overall size, and it becomes incompatible with the assembly into the container 100. The height of the substrate support structure 10 becomes too high and cannot be accommodated in the container 100, or the height of the substrate support structure 10 becomes too low, and vibration and shaking will occur in the container 100. However, each hollow sleeve 12 has a protruding elastic sheet 124, and by tightly screwing or loosening two bolts 22 with respect to the screw 21, the force for sandwiching a plurality of hollow sleeves 12 is adjusted, and the deformation amount when the elastic sheet 124 receives pressure is further adjusted. When the elastic sheet 124 abuts against another hollow sleeve 12 and expands and contracts with respect to the notch portion 123, the height tolerance of each hollow sleeve 12 or the non-flatness of the surfaces stacked on each other is adjusted, and the deformation amount of the elastic sheet 124 is increased or decreased by the locking force of the two bolts 22, and the height of the substrate support structure 10 is tightened and adjusted.
[0041] As shown in FIGS. 2 to 3, each bolt 22 of this embodiment includes a screw 221 and a fastening member 222. A hole 223 is provided in each fastening member 222, and a plurality of through holes 102 are provided in the bottom plate of the container 100. The fastening member 222 disposed above the screw 21 is sandwiched between the container 100 and the screw 21. The screw 221 disposed above the screw 21 penetrates through the hole 223, is accommodated in the fastening member 222, and is screwed into the upper screw hole of the screw 21. The fastening member 222 disposed below the screw 21 is located outside the container 100 and penetrates through the through hole 102. The screw 221 disposed below the screw 21 penetrates through the hole 223, is accommodated in the fastening member 222, and is screwed into the lower screw hole of the screw 21. When the screws 221 disposed above and below the screw 21 lock the screw 21, the fastening member 222 is tightened. By the fastening member 222, the plurality of stacked hollow sleeves 12 are further tightened, and the substrate support structure 10 is fixed in the container 100. However, the present invention is not limited thereto, and the bolt 22 may omit the fastening member 222 and only have the screw 221.
[0042] Thereby, the total height of the plurality of stacked hollow sleeves 12 eliminates the assembly tolerance by compressing the elastic sheet 124 with the fixture 2, and the substrate support structure 10 according to the present invention achieves the advantage of having the accuracy of the assembly size.
[0043] FIGS. 17 to 18 show other embodiments of the elastic sheet 124 according to the present invention. The embodiments shown in FIGS. 17 to 18 are substantially the same as the embodiments shown in FIGS. 6 to 11 and FIGS. 14 to 15. The embodiments shown in FIGS. 17 to 18 are different from the embodiments shown in FIGS. 6 to 11 and FIGS. 14 to 15 in that the structure of the elastic sheet 124 is different.
[0044] More specifically, each elastic sheet 124 includes a lateral elastic arm 125 extending from the inner peripheral edge of the notch 123, and an inclined surface 127 protruding from the surface of the lateral elastic arm 125 spaced apart from the notch 123. Each inclined surface 127 gradually protrudes toward one of the upper end 121 and the lower end 122 in a direction approaching the end of the lateral elastic arm 125, and is in close contact with the other of the upper end 121 and the lower end 122. In this way, the same functions and effects as those in FIGS. 1 to 16 are achieved.
[0045] In each notch 123 of this embodiment, it is opened from each lower end 122. One side of each inclined surface 127 is connected to each lower end 122 and is located in the same plane. The other side gradually protrudes in a range of about 0.1 to 0.3 mm from each lower end 122, and each inclined surface 127 is in close contact with each upper end 121.
[0046] Also, the optimal size at which the highest end of the inclined surface 127 protrudes from the lower end 122 is 0.2 mm. The optimal size of the length of the lateral elastic arm 125 is in the range of 4 to 5 mm, and the optimal size of the thickness of the lateral elastic arm 125 is in the range of 1 to 2 mm. However, the sizes of each elastic sheet 124 are not limited to the above numerical values.
[0047] However, each notch 123 may also be opened from each upper end 121. One side of each inclined surface 127 is connected to each upper end 121 and is located in the same plane. The other side gradually protrudes in a range of about 0.1 to 0.3 mm from each upper end 121. The optimal size at which the highest end of the inclined surface 127 protrudes from the upper end 121 is 0.2 mm, and each inclined surface 127 is in close contact with each lower end 122. However, the present invention is not limited to the embodiments.
[0048] As described above, the embodiments of the present invention have been described in detail with reference to the drawings. However, the specific configuration is not limited to this embodiment, and design changes and the like within the scope not departing from the gist of the present invention are also included.
Description of Reference Numerals
[0049] 100 Container 101 Opening 102 Through-hole 10 Substrate support structure 1 Side support frame 11 Shelf 111 Bottom plate 112 Side panel 113 Contact portion 114 Rib 115 Linear groove 12 Hollow sleeve 121 Upper end 122 Lower end 123 Notch 124 Elastic sheet 125 Lateral elastic arm 126 Bump 127 Inclined surface 13 Hook 2 Fixture 21 Screw 22 Bolt 221 Thread 222 Tightening member 223 Hole portion S Joining slit
Claims
1. A substrate support structure having a joint slit cover housed in a container, comprising: The substrate support structure has side support frames respectively arranged on the left and right sides of the container, each of the side support frames including a plurality of shelves stacked one above the other, each of the shelves having a bottom plate, a side panel extending from the upper surface of each of the bottom plates and an abutment portion provided on the bottom surface, the side panel of one of the shelves stacked on top of each other abutting against the abutment portion of the other of the shelves, a joint slit formed at the intersection point between each of the side panels and each of the abutment portions, and each of the joint slits and each of the bottom plates are provided with a pair of side support frames that are installed adjacent to each other.
2. A substrate support structure with a joint slit cover as described in claim 1, characterized in that one of each of the side panels and each of the abutment portions has a protruding rib and the other has a linear groove, and each of the protruding ribs is fitted into each of the linear grooves.
3. The substrate support structure having a joint slit cover as described in claim 2, characterized in that each of the protrusions is protruded from each of the side panels, and each of the linear grooves is opened from each of the abutment portions.
4. The substrate support structure having a joint slit cover as described in claim 2, characterized in that each of the protrusions is protruded from each of the abutment portions, and each of the linear grooves is opened from each of the side panels.
5. The substrate support structure having a joint slit cover as described in claim 1, characterized in that each of the side panels extends upward from the upper surface of each of the bottom plates, and each of the abutment portions is formed on the bottom surface of each of the bottom plates.
6. The substrate support structure having a joint slit cover as described in claim 1, characterized in that each of the side panels extends downward from the bottom surface of each of the bottom plates, and each of the abutment portions is formed on the upper surface of each of the bottom plates.
7. The substrate support structure with joint slit hiding described in claim 1, further comprising at least one pair of fasteners, each of the shelves having at least one hollow sleeve extending therefrom, each of the fasteners being inserted through each of the plurality of hollow sleeves so as to be clamped therebetween, and each of the plurality of hollow sleeves being stacked closely together.
8. The substrate support structure with joint slit hiding device according to claim 7, characterized in that the number of hollow sleeves on each shelf is two, each of the two hollow sleeves extends from both the front and rear ends of the outer side of each shelf, and the number of fasteners is two pairs.
9. The substrate support structure with joint slit hiding portion as described in claim 8, characterized in that each shelf has a hook extending along its axial direction at the position of the hollow sleeve at the rear end, and the cross section of each hook is L-shaped.
10. The substrate support structure with joint slit hiding device according to claim 7, characterized in that each of the fasteners comprises a screw penetrating each of the plurality of hollow sleeves and two bolts screwed into both ends of each of the screws.