Grinding Equipment

Abstract

This grinding device comprises a chuck, a casing, a tool driving unit, a nozzle, a sensor, and a sensor cover. The chuck retains a substrate. The casing houses the chuck. The tool driving unit drives a grinding tool that is pressed against the substrate inside the casing. The nozzle supplies a grinding liquid to the substrate inside the casing. The sensor is positioned inside the casing, and detects the liquid surface level of liquid collected inside the casing. The sensor cover is positioned between the chuck and the sensor.

Description

[Technical field]

[0001] The present disclosure relates to a grinding device. [Background technology]

[0002] The processing device described in Patent Document 1 includes a turntable, a pair of holding tables, a processing means, and a water case. The water case has an opening that exposes the turntable, receives processing waste liquid that flows down from the turntable and contains processing waste from processing the workpiece, and drains the waste liquid from a drain outlet.

[0003] The grinding device described in Patent Document 2 includes a holding table, a grinding means for supplying grinding water to perform grinding, a turntable on which two or more holding tables are arranged at equal angles around the rotation axis, and a table cover for covering the upper surface of the turntable. The upper surface of the table cover is inclined downward from the rotation axis toward the outer periphery. The grinding water is discharged from the outlet of the water case. A net is set in the outlet of the water case to collect grinding chips mixed in with the grinding water. The grinding chips are removed from the net as appropriate.

[0004] The surface processing device described in Patent Document 3 has a partition plate. The partition plate is fixed to an index table and formed in a cross shape so as to separate four chucks mounted on the index table. The surface processing device has a casing that houses the chucks and the index table, and grinds the substrate with a grinding wheel while supplying a grinding fluid to the substrate inside the casing. Brushes are attached to the top and side surfaces of the casing. The brushes come into contact with the top and side surfaces of the partition plate when the chucks are positioned at the processing position. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Publication No. 2017-222015 [Patent Document 2] Japanese Patent Publication No. 2013-188813 [Patent Document 3] Japanese Patent Application Publication No. 2010-124006 Summary of the Invention [Problem to be solved by the invention]

[0006] One aspect of the present disclosure provides a technique for suppressing malfunctions and failures of a liquid level sensor located inside a housing. [Means for solving the problem]

[0007] A grinding apparatus according to one aspect of the present disclosure includes: The device comprises a chuck for holding a substrate, a housing for accommodating the chuck, a tool driving unit for driving a grinding tool pressed against the substrate inside the housing, a nozzle for supplying grinding fluid to the substrate inside the housing, a sensor located inside the housing for detecting the liquid level of the liquid that accumulates inside the housing when an outlet for the liquid containing the grinding fluid becomes clogged with grinding debris, and a sensor cover located between the chuck and the sensor for blocking the liquid midway as it flows from the substrate held by the chuck to the sensor. Effect of the Invention

[0008] According to one aspect of the present disclosure, malfunctions and failures of a liquid level sensor located inside a housing can be suppressed. [Brief description of the drawings]

[0009] [Figure 1] FIG. 1 is a plan view showing a grinding device according to one embodiment, seen through a top panel of a housing. [Diagram 2] FIG. 2 is a cross-sectional view showing an example of a tool driving unit. [Diagram 3] FIG. 3 is a perspective view showing an example of a carry-in / out chamber of a housing. [Figure 4] Figure 4(A) shows an example of a fixed partition wall, Figure 4(B) is a view from the direction of arrow B in Figure 4(A), Figure 4(C) is a view through the side wall from the direction of arrow C in Figure 4(A), and Figure 4(D) is a cross-sectional view along line DD in Figure 4(C). [Diagram 5] FIG. 5 is a cross-sectional view showing an example of the chuck cover, the table cover, and the base cover. [Figure 6] 6(A) is a top view showing an example of the inner cylindrical portion shown in FIG. 5, and FIG. 6(B) is a top view showing an example of the inner cylindrical portion of FIG. 6(A) with a part thereof removed. [Figure 7] FIG. 7 is a cross-sectional view showing an example of a state in which a part of the inner cylindrical portion shown in FIG. 5 is removed. [Figure 8] FIG. 8 is a plan view showing an example of the flow of the cleaning liquid. [Figure 9] Figure 9(A) is a cross-sectional view showing an example of an exhaust box, taken along line AA in Figure 9(B), and Figure 9(B) is a diagram showing an example of a side panel and fixed partition wall as viewed from the direction of arrow B in Figure 9(A). [Figure 10] Figure 10(A) is a cross-sectional view showing an example of panning as viewed from the X-axis direction, Figure 10(B) is a cross-sectional view showing an example of panning as viewed from the negative Y-axis direction, and Figure 10(C) is a cross-sectional view showing an example of panning as viewed from the positive Y-axis direction. [Figure 11] FIG. 11 is a plan view showing an example of the housing and the tool driving unit shown in FIG. [Figure 12] FIG. 12 is a plan view showing an example of the arrangement of the liquid level sensor. [Figure 13] FIG. 13 is a cross-sectional view taken along line XIII-XIII in FIG. [Figure 14] FIG. 14(A) is a perspective view showing an example of the exterior of a grinding device, and FIG. 14(B) is a perspective view showing an example of a recovery section. [Figure 15] FIG. 15(A) is a cross-sectional view showing an example of a destination for storing grinding chips, and FIG. 15(B) is a cross-sectional view showing an example of a destination after switching. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] Hereinafter, an embodiment of the present disclosure will be described with reference to the drawings. In each drawing, the same or corresponding configurations are denoted by the same reference numerals, and the description may be omitted. In this specification, the X-axis direction, the Y-axis direction, and the Z-axis direction are perpendicular to each other. The X-axis direction and the Y-axis direction are horizontal directions, and the Z-axis direction is vertical.

[0011] First, the grinding apparatus 1 will be described with reference to FIG. 1. The grinding apparatus 1 grinds a substrate W. The substrate W includes a semiconductor substrate such as a silicon wafer or a compound semiconductor wafer, or a glass substrate. The substrate W may further include a device layer formed on the surface of the semiconductor substrate or the glass substrate. The device layer includes an electronic circuit. The substrate W may also be a laminated substrate in which a plurality of substrates are bonded together. Grinding includes polishing. The grinding apparatus 1 includes, for example, a table 10, four chucks 20, three tool driving units 30, a housing 40, and a control unit 16.

[0012] The control unit 16 is, for example, a computer, and includes a CPU (Central Processing Unit) 17 and a storage medium 18 such as a memory. The storage medium 18 stores programs that control various processes executed in the grinding device 1. The control unit 16 controls the operation of the grinding device 1 by having the CPU 17 execute the programs stored in the storage medium 18.

[0013] The table 10 holds the four chucks 20 around a rotation center line R1 and rotates around the rotation center line R1. When viewed from above, the rotation direction of the table 10 can be switched between a clockwise direction and a counterclockwise direction.

[0014] The four chucks 20 are disposed at equal intervals around the rotation center line R1 of the table 10. Each chuck 20 rotates together with the table 10, and moves to a carry-in / out position A0, a first grinding position A1, a second grinding position A2, a third grinding position A3, and the carry-in / out position A0 in this order.

[0015] The loading / unloading position A0 is a position where the substrate W is loaded / unloaded from the chuck 20, and serves as both the position where the substrate W is loaded and the position where the substrate W is unloaded. The primary grinding position A1 is a position where the primary grinding of the substrate W is performed. The secondary grinding position A2 is a position where the secondary grinding of the substrate W is performed. The tertiary grinding position A3 is a position where the tertiary grinding of the substrate W is performed. Note that, although the loading position and the unloading position are the same position in this embodiment, the loading position and the unloading position may be different positions.

[0016] The four chucks 20 are attached to the table 10 so as to be rotatable about their respective rotation center lines R2 (see FIG. 2). A chuck driving unit 19 that drives the chuck 20 is provided for each chuck 20.

[0017] The chuck driving unit 19 includes, for example, a motor 19a that rotates the chuck 20. The rotational driving force of the motor 19a is transmitted to the chuck 20 via a timing belt or the like. Note that a gear may be used instead of the timing belt.

[0018] One tool driving unit 30 drives the grinding tool D for primary grinding. The tool driving unit 30 rotates and raises and lowers the grinding tool D. Another tool driving unit 30 drives the grinding tool D for secondary grinding. The remaining tool driving unit 30 drives the grinding tool D for tertiary grinding.

[0019] Next, the tool driving unit 30 will be described with reference to Fig. 2. The tool driving unit 30 includes a movable part 31 to which a grinding tool D is attached. The grinding tool D is pressed against the substrate W to grind the substrate W. The grinding tool D includes, for example, a disk-shaped grinding wheel D1 and a plurality of grindstones D2 arranged in a ring shape on the lower surface of the grinding wheel D1.

[0020] The movable part 31 has a flange 32 on which the grinding tool D is attached, a spindle shaft 33 on whose lower end the flange 32 is provided, and a spindle motor 34 that rotates the spindle shaft 33. The flange 32 is arranged horizontally, and the grinding tool D is attached to its lower surface. The spindle shaft 33 is arranged vertically. The spindle motor 34 rotates the spindle shaft 33 to rotate the grinding tool D attached to the flange 32. A rotation center line R3 of the grinding tool D is the rotation center line of the spindle shaft 33.

[0021] The tool driving unit 30 further has a lifting unit 35 that raises and lowers the movable unit 31. The lifting unit 35 has, for example, a vertical Z-axis guide 36, a Z-axis slider 37 that moves along the Z-axis guide 36, and a Z-axis motor 38 that moves the Z-axis slider 37. The movable unit 31 is fixed to the Z-axis slider 37, and the movable unit 31 and the grinding tool D rise and fall together with the Z-axis slider 37. The lifting unit 35 further has a position detector 39 that detects the position of the grinding tool D. The position detector 39 detects, for example, the rotation of the Z-axis motor 38 to detect the position of the grinding tool D.

[0022] The lifting unit 35 lowers the grinding tool D from the standby position. The grinding tool D rotates while descending, comes into contact with the upper surface of the rotating substrate W, and grinds the entire upper surface of the substrate W. When the thickness of the substrate W reaches a set value, the lifting unit 35 stops the lowering of the grinding tool D. Thereafter, the lifting unit 35 raises the grinding tool D to the standby position.

[0023] The grinding device 1 includes a housing 40 that houses a plurality of chucks 20. The housing 40 prevents grinding debris and grinding fluid from scattering to the outside. The grinding debris is powder or debris generated by grinding the substrate W. The powder includes powder cut out from the substrate W and abrasive grains detached from the grinding tool D. The debris is, for example, arc-shaped flakes generated at the periphery of the substrate W. The housing 40 may also house the table 10.

[0024] The housing 40 has an upper panel 41 located above the chuck 20 and a side panel 42 located to the side of the chuck 20. The upper panel 41 is horizontal, and the side panel 42 is vertical. The upper panel 41 is located above the side panel 42. An insertion opening 41a for the movable part 31 is formed in the upper panel 41.

[0025] 1, the upper panel 41 covers, for example, the first grinding position A1, the second grinding position A2, and the third grinding position A3. The upper panel 41 also opens above the loading / unloading position A0. For example, the upper panel 41 has a rectangular shape with one corner cut out in an L-shape when viewed from above.

[0026] 2, the grinding apparatus 1 includes a nozzle 50 that supplies a grinding fluid to the substrate W held by the chuck 20. The grinding fluid is, for example, pure water such as DIW (Deionized Water). The grinding fluid penetrates between the substrate W and the grinding tool D to reduce the grinding resistance and suppress the generation of heat. The nozzle 50 can also supply pure water as a cleaning fluid for the chuck 20 to the chuck 20 after the substrate W is unloaded.

[0027] 1, the grinding device 1 includes fixed partition walls 45 that divide the interior of the housing 40 into a plurality of rooms around the rotation center line R1 of the table 10. The fixed partition walls 45 are fixed to the lower surface of the upper panel 41. When viewed from above, the fixed partition walls 45 extend in the radial direction of the table 10 (in a direction perpendicular to the rotation center line R1).

[0028] The fixed partition wall 45 is provided, for example, in a cross shape, and divides the inside of the housing 40 into four rooms B0 to B3 around the rotation center line R1 of the table 10. The three rooms B1 to B3 are grinding chambers where grinding of the substrate W is performed. B1 is a primary grinding chamber, B2 is a secondary grinding chamber, and B3 is a tertiary grinding chamber. The remaining room B0 is a load / unload chamber where the substrate W is loaded and unloaded. Loading and unloading of the substrate W includes the transfer of the substrate W between an external transport device and the chuck 20.

[0029] When viewed from above, the inside of the housing 40 is partitioned in a counterclockwise direction into a loading / unloading chamber B0, a first grinding chamber B1, a second grinding chamber B2, and a third grinding chamber B3, in that order. Note that the order of the four chambers B0 to B3 may be reversed, and when viewed from above, the inside of the housing 40 may be partitioned in a clockwise direction into a loading / unloading chamber B0, a first grinding chamber B1, a second grinding chamber B2, and a third grinding chamber B3, in that order.

[0030] As shown in FIG. 3, the grinding device 1 includes a plurality of rotary partition walls 15 that rotate together with the table 10. Each of the rotary partition walls 15 is located between a plurality of chucks 20 that are adjacent to each other in the circumferential direction of the table 10, rotates together with the table 10, stops directly below the fixed partition wall 45, and contacts the lower end of the fixed partition wall 45. The fixed partition wall 45 and the rotary partition wall 15 suppress the movement of grinding chips and grinding fluid between the adjacent chambers. The upper end of the rotary partition wall 15 and the lower end of the fixed partition wall 45 do not have to contact each other.

[0031] For example, the fixed partition wall 45 and the rotary partition wall 15 prevent grinding chips and the like from entering the loading / unloading chamber B0 from the primary grinding chamber B1 and the tertiary grinding chamber B3, thereby keeping the loading / unloading chamber B0 clean. The fixed partition wall 45 and the rotary partition wall 15 also prevent primary grinding chips with large grain size from entering the secondary grinding chamber B2 from the primary grinding chamber B1, thereby preventing roughness of the ground surface after secondary grinding. Furthermore, the fixed partition wall 45 and the rotary partition wall 15 also prevent secondary grinding chips with large grain size from entering the tertiary grinding chamber B3 from the secondary grinding chamber B2, thereby preventing roughness of the ground surface after tertiary grinding.

[0032] 4, the fixed partition wall 45 includes an upper wall 100 extending in the radial direction of the table 10 (the Y-axis direction in FIG. 4), a first upper sheet 111 suspended from the upper wall 100 along the upper wall 100, and a second upper sheet 112 facing the first upper sheet 111 at a distance. The first upper sheet 111 and the second upper sheet 112 are, for example, resin sheets or rubber sheets.

[0033] Unlike the brush described in Patent Document 3, the first upper sheet 111 and the second upper sheet 112 inhibit the movement of grinding chips and grinding fluid with a surface rather than a line. Furthermore, the first upper sheet 111 and the second upper sheet 112 inhibit the movement of grinding chips and grinding fluid doubly. Therefore, the movement of grinding chips and grinding fluid between adjacent rooms can be inhibited more effectively than in the past.

[0034] 4(B), the upper wall 100 has at its lower end a horizontal portion 101 extending in the radial direction of the table 10 and a vertical portion 102 protruding downward from one end of the horizontal portion 101 in the width direction. The horizontal portion 101 and the vertical portion 102 form an L-shaped angle 103. The fixed partition wall 45 has a fastener that fastens the first upper sheet 111 and the second upper sheet 112 to the vertical portion 102. The fastener is not particularly limited, but is, for example, a bolt 120.

[0035] A plurality of bolts 120 are provided at intervals in the radial direction of the table 10. A shaft portion 121 of the bolt 120 passes through a through hole in the first upper sheet 111 and a through hole in the second upper sheet 112, and is screwed into a bolt hole in the vertical portion 102. A head portion 122 of the bolt 120 presses the first upper sheet 111 and the second upper sheet 112 via a presser plate 123 or the like.

[0036] The first upper sheet 111 or the second upper sheet 112 can be replaced by loosening or tightening the bolts 120. It is also possible to change the dimensions or shape of the first upper sheet 111 before or after replacing the first upper sheet 111. The same applies to the second upper sheet 112.

[0037] When viewed from above, the first upper sheet 111, the second upper sheet 112, and the head 122 of the bolt 120 do not protrude from the horizontal portion 101. This makes it possible to suppress interference between the head 122 of the bolt 120 and other members.

[0038] The first upper sheet 111 and the second upper sheet 112 are disposed with spacers 114, 115 interposed therebetween, and protrude downward beyond the spacers 114, 115. The spacers 114, 115 are formed with a through hole through which the shaft portion 121 of the bolt 120 passes.

[0039] The fixed partition wall 45 may further include a third upper sheet 113 disposed between the first upper sheet 111 and the second upper sheet 112. The third upper sheet 113 is, for example, a resin sheet or a rubber sheet. The first upper sheet 111, the second upper sheet 112, and the third upper sheet 113 triple-block the movement of grinding chips and grinding fluid.

[0040] The third upper sheet 113 and the first upper sheet 111 are disposed with a spacer 114 therebetween, and protrude downward beyond the spacer 114. The third upper sheet 113 and the second upper sheet 112 are disposed with a spacer 115 therebetween, and protrude downward beyond the spacer 115.

[0041] 4(B), the upper end of the rotating partition wall 15 may have an upwardly convex curved surface when viewed from the radial direction of the table 10. The third upper sheet 113 contacts the upper end of the rotating partition wall 15. On the other hand, the first upper sheet 111 and the second upper sheet 112 do not contact the upper end of the rotating partition wall 15.

[0042] The third upper sheet 113 contacts the upper end of the rotating partition wall 15. Thus, the thickness T3 of the third upper sheet 113 may be thicker than the thickness T1 of the first upper sheet 111 and the thickness T2 of the second upper sheet 112. This makes it possible to achieve both the durability of the third upper sheet 113 and the flexibility of the first upper sheet 111 and the second upper sheet 112. The first upper sheet 111 and the second upper sheet 112 may contact the upper end of the rotating partition wall 15 and deform to follow the upper end.

[0043] In addition, a member other than the third upper sheet 113, for example, a brush, may be arranged between the first upper sheet 111 and the second upper sheet 112. In addition, neither the third upper sheet 113 nor the brush may be arranged between the first upper sheet 111 and the second upper sheet 112, and nothing may be arranged. Various sealing members can be replaced by the bolts 120, and the number of sealing members can be changed. When the third upper sheet 113 is not present, either or both of the first upper sheet 111 and the second upper sheet 112 contact the upper end of the rotating partition wall 15. In addition, when the third upper sheet 113 is not present, both the first upper sheet 111 and the second upper sheet 112 do not need to contact the upper end of the rotating partition wall 15.

[0044] The fixed partition wall 45 includes a side wall 130 located between the upper wall 100 and the side panel 42 and protruding downward from the upper wall 100, a first horizontal sheet 141 protruding from the side wall 130 toward the table 10, and a second horizontal sheet 142 facing the first horizontal sheet 141 at a distance. The first horizontal sheet 141 and the second horizontal sheet 142 are, for example, resin sheets or rubber sheets.

[0045] 4(C), the first horizontal sheet 141 is disposed, for example, on the same plane as the first upper sheet 111. The thickness of the first horizontal sheet 141 may be the same as the thickness T1 of the first upper sheet 111. Moreover, the second horizontal sheet 142 is disposed, for example, on the same plane as the second upper sheet 112. The thickness of the second horizontal sheet 142 may be the same as the thickness T2 of the second upper sheet 112.

[0046] Unlike the brush described in Patent Document 3, the first horizontal sheet 141 and the second horizontal sheet 142 inhibit the movement of grinding chips and grinding fluid with a surface rather than a line. Furthermore, the first horizontal sheet 141 and the second horizontal sheet 142 inhibit the movement of grinding chips and grinding fluid doubly. Therefore, the movement of grinding chips and grinding fluid between adjacent rooms can be inhibited more effectively than in the past.

[0047] The fixed partition wall 45 may further include a third horizontal sheet 143 disposed between the first horizontal sheet 141 and the second horizontal sheet 142. The third horizontal sheet 143 is, for example, a resin sheet or a rubber sheet.

[0048] The third horizontal sheet 143 is disposed, for example, on the same plane as the third upper sheet 113. The thickness of the third horizontal sheet 143 may be the same as the thickness T3 of the third upper sheet 113. The thickness of the third horizontal sheet 143 is greater than the thickness of the first horizontal sheet 141 and the thickness of the second horizontal sheet 142.

[0049] 4(C), the third horizontal sheet 143 protrudes upward from the first horizontal sheet 141 and the second horizontal sheet 142, and is inserted between the first upper sheet 111 and the second upper sheet 112. As a result, even if there is a gap between the first upper sheet 111 and the first horizontal sheet 141, the gap can be blocked by the third horizontal sheet 143, and the movement of grinding chips and grinding fluid through the gap can be inhibited. Similarly, even if there is a gap between the second upper sheet 112 and the second horizontal sheet 142, the gap can be blocked by the third horizontal sheet 143, and the movement of grinding chips and grinding fluid through the gap can be inhibited.

[0050] 4(D), the first upper sheet 111 and the second upper sheet 112 protrude further toward the side wall 130 than the third upper sheet 113. As a result, even if there is a gap between the third upper sheet 113 and the third horizontal sheet 143, the gap can be sandwiched and hidden between the first upper sheet 111 and the second upper sheet 112, and the movement of grinding chips and grinding fluid through the gap can be inhibited.

[0051] Next, the chuck cover 70 and the like will be described with reference to Fig. 5. As shown in Fig. 5, the grinding apparatus 1 includes a chuck cover 70 that rotates together with the chuck 20. The chuck 20 includes a holder 21 that holds the substrate W, and a flange 23 provided on the lower edge of the holder 21. The holder 21 has a porous body 21a and a base 21b. A recess is formed on the upper surface of the base 21b, and a disk-shaped porous body 21a is embedded in the recess.

[0052] When the gas inside the porous body 21a is sucked and the air pressure in the porous body 21a becomes a negative pressure lower than atmospheric pressure, the substrate W is adsorbed to the porous body 21a. On the other hand, when the suction of the gas is stopped and the air pressure in the porous body 21a is returned to atmospheric pressure, the adsorption of the substrate W is released.

[0053] The chuck 20 is placed on a rotating table 25 and fixed to the rotating table 25 by a fastener. The fastener is not particularly limited, but is, for example, a bolt 24. A plurality of bolts 24 are provided at intervals in the circumferential direction of the flange 23 of the chuck 20. The shaft portion of the bolt 24 passes through a through hole in the flange 23 and is screwed into a bolt hole in the rotating table 25. The head of the bolt 24 presses the flange 23 from above. The chuck 20 can be replaced by loosening and tightening the bolt 24.

[0054] The chuck cover 70 includes an annular eaves portion 71. The annular eaves portion 71 has an opening 71a in its center into which the holding base 21 of the chuck 20 fits. The upper surface of the eaves portion 71 is disposed at the same height as the upper surface of the holding base 21 of the chuck 20 or lower than the upper surface of the holding base 21. In addition, the upper surface of the eaves portion 71 is disposed above an inclined portion 61 of the table cover 60 described later.

[0055] The upper surface of the eaves portion 71 slopes downward as it moves away from the rotation center line R2 of the chuck 20. The upper surface of the eaves portion 71 may be horizontal. However, if the upper surface of the eaves portion 71 is inclined, the grinding fluid can be discharged obliquely downward by gravity, and the accumulation of grinding chips mixed in the grinding fluid can be suppressed. The upper surface of the eaves portion 71 has, for example, a conical shape.

[0056] The eaves portion 71 is disposed above the flange 23 of the chuck 20, and covers the bolt 24, which is a fastener, from above. The diameter of an opening 71a formed in the center of the eaves portion 71 is larger than the diameter of the holding base 21 and smaller than the diameter of the flange 23. The bolt 24 can be hidden directly below the eaves portion 71, which prevents the grinding fluid from hitting the bolt 24 and thus prevents the grinding fluid from splashing.

[0057] According to this embodiment, the chuck cover 70 rotates together with the chuck 20. When the chuck 20 is rotated during grinding of the substrate W, the eaves portion 71 rotates, and the grinding fluid attached to the eaves portion 71 can be blown outward in the radial direction by centrifugal force. Therefore, accumulation of grinding chips mixed in the grinding fluid can be suppressed, and the grinding chips can be suppressed from accumulating around the chuck 20. As a result, it is possible to suppress the worker or the working robot from becoming dirty during maintenance such as replacement of the chuck 20 or the grinding tool D. In addition, it is possible to suppress the accumulated grinding chips from peeling off and adhering to the chuck 20 or the substrate W.

[0058] Spacers 28 are provided between the overhanging portion 71 of the chuck cover 70 and the flange 23 of the chuck 20. A plurality of spacers 28 are provided at intervals in the circumferential direction of the flange 23. The overhanging portion 71 is placed on the plurality of spacers 28. Note that the spacers 28 may be integrated with the overhanging portion 71. In that case, the spacers 28 are placed on the flange 23, and the shafts of bolts 29, which will be described later, are screwed into bolt holes in the flange 23.

[0059] Spacer 28 forms a gap between eaves portion 71 and flange 23. Compared to when there is no gap, eaves portion 71 can be made thinner, reducing the weight of eaves portion 71. In addition, a space for arranging the head of bolt 24 can be secured between eaves portion 71 and flange 23.

[0060] The spacer 28 has a bolt hole on its upper surface. The shaft of a bolt 29 that fixes the eaves portion 71 to the spacer 28 is screwed into the bolt hole. The head of the bolt 29 presses the eaves portion 71 from above. A groove 71b extending in the radial direction of the chuck 20 is formed in the upper surface of the eaves portion 71. The groove 71b receives the head of the bolt 29, and the head of the bolt 29 presses the bottom surface of the groove 71b from above. The head of the bolt 29 and the bottom surface of the groove 71b are horizontal.

[0061] The upper surface of the eaves portion 71 is inclined, whereas the lower surface of the eaves portion 71 is horizontal. If the lower surface of the eaves portion 71 is horizontal, the eaves portion 71 can be stably placed on a plurality of spacers 28. The number of spacers 28 is preferably three or more.

[0062] The chuck cover 70 includes an outer cylinder portion 77 extending downward from the periphery of the eaves portion 71. The outer cylinder portion 77 extends straight down in FIG. 5, but may extend diagonally downward. The outer cylinder portion 77 extends downward beyond the upper end of an inner cylinder portion 67 of the table cover 60 (described later) and surrounds the inner cylinder portion 67. The inner cylinder portion 67 and the outer cylinder portion 77 form a labyrinth that prevents the infiltration of grinding fluid.

[0063] The boundary between the eaves portion 71 and the outer tube portion 77 has, for example, a chamfered shape and a curved shape. In the case of a broken line-shaped boundary, the surface tension of the droplets prevents the droplets from crossing the boundary. As a result, a ring-shaped pool of the droplets is likely to form. If the boundary between the eaves portion 71 and the outer tube portion 77 has a curved shape, the droplets can easily cross the boundary, and the grinding fluid can be easily discharged. Therefore, it is possible to prevent grinding chips mixed in the grinding fluid from accumulating in a ring shape.

[0064] 5, the grinding apparatus 1 has a table cover 60 that rotates together with the table 10. The table cover 60 has an inclined portion 61 that inclines downward as it becomes farther away from the rotation center line R1 of the table 10.

[0065] The inclined portion 61 is disposed below the upper surface of the holding base 21 of the chuck 20 and above the table 10. Unlike the horizontal flat portion, the inclined portion 61 can discharge the grinding fluid obliquely downward by gravity. Therefore, accumulation of grinding chips mixed in the grinding fluid can be suppressed.

[0066] The inclined portion 61 has, for example, a conical shape with a constant height in the circumferential direction of the table 10. When the inclined portion 61 has a conical shape, the grinding fluid can be radially discharged as shown by the arrows in FIG.

[0067] The inclined portion 61 may have a pyramidal shape. However, when the inclined portion 61 has a pyramidal shape, a groove G shown by a two-dot chain line in Fig. 3 is formed. The chuck 20 is located at the bottom of the groove G, and the grinding fluid tends to collect near the chuck 20, and grinding chips mixed with the grinding fluid tend to accumulate.

[0068] 5, the inclined portion 61 forms an opening 61a between the top and bottom, into which the turntable 25 fits. A plurality of openings 61a are formed for each turntable 25 at intervals around the rotation center line R1 of the table 10. The plurality of openings 61a are formed, for example, at equal intervals.

[0069] The table cover 60 includes an inner cylinder portion 67 that rises upward from the edge of the opening 61a of the inclined portion 61. The inner cylinder portion 67 rises straight up in FIG. 5, but may rise diagonally upward. The upper edge of the inner cylinder portion 67 is horizontal over the entire circumferential direction. The inner cylinder portion 67 prevents the grinding fluid from entering the opening 61a.

[0070] 6(A), the inner cylinder portion 67 includes a first arc-shaped cylinder portion 67a, a second arc-shaped cylinder portion 67b, and a connecting portion 67c. The first arc-shaped cylinder portion 67a is fixed to the inclined portion 61. The second arc-shaped cylinder portion 67b is detachably connected to the first arc-shaped cylinder portion 67a. The connecting portion 67c connects the first arc-shaped cylinder portion 67a and the second arc-shaped cylinder portion 67b in an annular shape.

[0071] The connecting portion 67c includes, for example, a connecting plate 67c1 and a bolt 67c2. The connecting plate 67c1 is fixed, for example, to the inner peripheral surface of the second arc-shaped cylindrical portion 67b and extends to the inner peripheral surface of the first arc-shaped cylindrical portion 67a. The shaft portion of the bolt 67c2 passes through a through hole of the first arc-shaped cylindrical portion 67a and is screwed into a bolt hole of the connecting plate 67c1. The head portion of the bolt 67c2 presses the first arc-shaped cylindrical portion 67a from the radially outer side.

[0072] The structure of the connecting portion 67c is not particularly limited. For example, the connecting plate 67c1 may be fixed to the inner peripheral surface of the first arc-shaped cylindrical portion 67a and extend to the inner peripheral surface of the second arc-shaped cylindrical portion 67b. In this case, the shaft portion of the bolt 67c2 passes through a through hole of the second arc-shaped cylindrical portion 67b and is screwed into a bolt hole of the connecting plate 67c1. The head of the bolt 67c2 presses the second arc-shaped cylindrical portion 67b from the radially outer side.

[0073] In either case, the second arc-shaped cylindrical portion 67b can be removed or attached by loosening or tightening the bolt 67c2. As is clear from Fig. 6(B), by removing the second arc-shaped cylindrical portion 67b, the chuck 20 can be easily replaced.

[0074] 5, the second arc-shaped cylindrical portion 67b is disposed radially outward of the table 10 relative to the first arc-shaped cylindrical portion 67a. At least a portion of the lower edge of the second arc-shaped cylindrical portion 67b is disposed below the upper surface of the turntable 25.

[0075] As a result, by removing the second arcuate cylinder portion 67b, the chuck 20 placed on the upper surface of the rotating table 25 can be pulled out sideways as shown in Fig. 7. This is effective when the adhesion between the chuck 20 and the rotating table 25 is strong and the chuck 20 cannot be pulled upwards and removed.

[0076] 5, the inner cylindrical portion 67 may further include a third arcuate cylindrical portion 67d on which the second arcuate cylindrical portion 67b is placed. The third arcuate cylindrical portion 67d may be fixed to the inclined portion 61 and integrated with the first arcuate cylindrical portion 67a.

[0077] The inner cylinder portion 67 may further include an alignment portion 67e that aligns the second arc-shaped cylinder portion 67b and the third arc-shaped cylinder portion 67d. The alignment portion 67e is, for example, fixed to the inner circumferential surface of the second arc-shaped cylinder portion 67b, inserted into the inside of the third arc-shaped cylinder portion 67d, and comes into contact with the inner circumferential surface to align the second arc-shaped cylinder portion 67b and the third arc-shaped cylinder portion 67d.

[0078] The table cover 60 has a cylindrical portion 63 extending downward from the lower edge of the inclined portion 61. The cylindrical portion 63 extends straight down in FIG. 5, but may extend obliquely downward. The cylindrical portion 63 drops the grinding fluid to the outside of the table 10. The outer diameter of the cylindrical portion 63 is larger than the diameter of the table 10.

[0079] The boundary between the inclined portion 61 and the cylindrical portion 63 has, for example, a chamfered shape and a curved shape. Compared to a boundary having a broken line shape, droplets can easily get over the boundary, and the grinding fluid can be easily discharged. Therefore, it is possible to prevent grinding chips mixed in the grinding fluid from accumulating in a ring shape.

[0080] The inclined portion 61 has an opening 61b at its top, through which the fixed shaft 11 passes. The table cover 60 has a central cylinder portion 69 that rises upward from the edge of the opening 61b of the inclined portion 61. The central cylinder portion 69 rises straight up in FIG. 5, but may rise diagonally upward. The central cylinder portion 69 prevents grinding fluid from entering the opening 61b.

[0081] The table cover 60 is divided into a plurality of split covers in the circumferential direction of the table 10. The number of the split covers is the same as the number of the chucks 20. A rotating partition wall 15 is disposed between adjacent split covers in the circumferential direction.

[0082] The multiple split covers are individually and removably attached to the table 10. During maintenance, the split covers can be removed individually, without having to remove the entire table cover 60 all at once, improving workability.

[0083] The grinding device 1 includes a base cover 90. The base cover 90 has a horizontal disk portion 91. The disk portion 91 is disposed below the table cover 60 and above the table 10, and is disposed concentrically with the table 10. The diameter of the disk portion 91 is larger than the diameter of the table 10.

[0084] The disk portion 91 forms an opening 91a through which the rotation shaft 26 of the chuck 20 passes, around the rotation center line R1 of the table 10. A plurality of openings 91a are formed at equal intervals around the rotation center line R1 of the table 10.

[0085] The base cover 90 includes an inner cylinder portion 93 that rises upward from the edge of the opening 91a. The inner cylinder portion 93 rises straight up in FIG. 5, but may rise obliquely upward. The rotation shaft 26 is inserted into the inner cylinder portion 93.

[0086] The rotation shaft 26 extends vertically downward from the center of rotation of the rotation table 25. A downward-extending outer cylinder portion 27 is provided on the periphery of the rotation table 25. The outer cylinder portion 27 extends straight downward in Fig. 5, but may extend obliquely downward.

[0087] The outer cylinder portion 27 extends downward beyond the upper end of the inner cylinder portion 93 of the base cover 90, and surrounds the inner cylinder portion 93. The inner cylinder portion 93 and the outer cylinder portion 27 form a labyrinth that prevents the infiltration of grinding fluid.

[0088] As described above, the openings 91a are arranged at equal intervals around the rotation center line R1 of the table 10. The rotary partition wall 15 is arranged between adjacent openings 91a in the circumferential direction of the table 10. The rotary partition wall 15 is provided on the disk portion 91.

[0089] The base cover 90 has a tubular portion 94 extending downward from the periphery of the disk portion 91. The tubular portion 94 extends straight downward in FIG. 5, but may extend obliquely downward.

[0090] The boundary between the disk portion 91 and the tube portion 94 has, for example, a chamfered or curved shape. Compared to a broken line shape, droplets can easily get over the boundary, and the grinding fluid can be easily discharged. Therefore, it is possible to prevent grinding chips mixed in the grinding fluid from accumulating in a ring shape.

[0091] As shown in FIG. 5, the grinding device 1 includes a nozzle 51 that supplies a cleaning liquid to the inclined portion 61 of the table cover 60 between the top of the inclined portion 61 and the chuck 20. The nozzle 51 supplies the cleaning liquid to the inclined portion 61 from above. The nozzle 51 may be provided in the central tube portion 69. The cleaning liquid is, for example, pure water. After being supplied to the inclined portion 61, the cleaning liquid flows diagonally downward due to gravity. The cleaning liquid can clean a wide range of the inclined portion 61, and can prevent grinding debris from accumulating around the chuck 20. The nozzle 51 may supply the cleaning liquid to the inclined portion 61 at a position where the cleaning liquid reaches the top of the inclined portion 61. The entire inclined portion 61 can be cleaned from the top to the bottom.

[0092] The nozzle 51 discharges a cleaning liquid, for example, when the substrate W is being ground, to wash away the grinding liquid and grinding debris adhering to the inclined portion 61. The nozzle 51 is provided not only in the first grinding chamber B1 but also in the second grinding chamber B2 and the third grinding chamber B3. The nozzle 51 may also be provided in the load / unload chamber B0. The nozzle 51 may discharge a cleaning liquid at times other than when the substrate W is being ground.

[0093] The inclined portion 61 of the table cover 60 has an opening 61b at its top through which the fixed shaft 11 passes. A central cylinder 69 rises from the edge of the opening 61b, and the nozzle 51 is disposed radially outward of the central cylinder 69. This makes it possible to prevent the cleaning liquid from entering the inside of the central cylinder 69.

[0094] The grinding apparatus 1 includes a measuring device 95 for measuring the thickness of the substrate W. The measuring device 95 includes a nozzle 51. Inside the measuring device 95, flow paths L1 and L2 for the cleaning liquid are formed. The flow path L2 passes through the base end of at least one of a first arm 95c and a second arm 95d described later. The cleaning liquid passes through the flow path L2, absorbs heat from the first height sensor 95a via the first arm 95c, and is discharged from the nozzle 51. Alternatively, the cleaning liquid passes through the flow path L2, absorbs heat from the second height sensor 95b via the second arm 95d, and is discharged from the nozzle 51. At least one of the first height sensor 95a and the second height sensor 95b can be cooled by the cleaning liquid. The cooling flow path L2 may be formed separately from the flow path L1 for the nozzle.

[0095] The measuring device 95 includes, for example, a first height sensor 95a that measures the height of the substrate W and a second height sensor 95b that measures the height of the chuck 20. The thickness of the substrate W can be measured from the difference between the height of the substrate W and the height of the chuck 20. Note that although the measuring device 95 is of a contact type in FIG. 5, it may be of a non-contact type.

[0096] The measuring device 95 includes a first arm 95c that holds the first height sensor 95a, a second arm 95d that holds the second height sensor 95b, and a bracket 95e that holds the first arm 95c and the second arm 95d. A nozzle 51 is provided on the lower surface of the bracket 95e.

[0097] A bracket 95e of the measuring device 95 is attached to the upper surface of the fixed shaft 11 and protrudes radially outward from the fixed shaft 11. A nozzle 51 is provided on the lower surface of the bracket 95e at a portion protruding radially outward from the fixed shaft 11, and supplies a cleaning liquid to the inclined portion 61.

[0098] As shown in FIG. 8, the nozzle 51 has a plurality of supply ports 51a provided at intervals in the circumferential direction of the table cover 60 (the rotation direction of the table cover 60). A single chamber (for example, the first grinding chamber B1) may have a plurality of supply ports 51a. The plurality of supply ports 51a allows a wide range in the circumferential direction of the inclined portion 61 of the table cover 60 to be cleaned simultaneously. The supply port 51a of the nozzle 51 is an arc-shaped slit along the circumferential direction of the table cover 60. The cleaning liquid can be supplied to a position close to the top of the inclined portion 61 of the table cover 60. The supply port 51a of the nozzle 51 may be a linear slit or a circular hole.

[0099] However, the surface tension of the droplets prevents the droplets from climbing over the bottom of the inclined portion 61. As a result, a ring-shaped pool of liquid is likely to form, and ring-shaped stains are likely to adhere.

[0100] Therefore, the grinding device 1 is provided with nozzles 52-1 and 52-2 that supply cleaning liquid from above to the bottom of the inclined portion 61 of the table cover 60. The cleaning liquid is, for example, pure water. The cleaning liquid washes away the grinding liquid contaminated with grinding debris and prevents ring-shaped dirt from adhering.

[0101] Nozzle 52-1 is located, for example, near the boundary between primary grinding chamber B1 and load / unload chamber B0. The vicinity of the boundary refers to a range within 50 mm from fixed partition wall 45, which is the boundary. At least a part of the outlet of nozzle 52-1 needs to be located within that range.

[0102] On the other hand, the nozzle 52-2 is located near the boundary between the third grinding chamber B3 and the load / unload chamber B0. The vicinity of the boundary refers to a range within 50 mm from the boundary, which is the fixed partition wall 45. It is sufficient that at least a part of the discharge port of the nozzle 52-2 is located within that range.

[0103] While rotating table 10 in the clockwise direction as viewed from above, control unit 16 supplies cleaning liquid from nozzle 52-1 arranged in primary grinding chamber B1 to the bottom of inclined portion 61 of table cover 60. The bottom of inclined portion 61 can be cleaned immediately before the bottom of inclined portion 61 moves from primary grinding chamber B1 to load / unload chamber B0, preventing dirt from being brought into load / unload chamber B0.

[0104] Meanwhile, while rotating table 10 in the counterclockwise direction as viewed from above, control unit 16 supplies cleaning liquid from nozzle 52-2 arranged in tertiary grinding chamber B3 to the bottom of inclined portion 61 of table cover 60. The bottom of inclined portion 61 can be cleaned immediately before the bottom of inclined portion 61 moves from tertiary grinding chamber B3 to load / unload chamber B0, thereby preventing dirt from being brought into load / unload chamber B0.

[0105] As shown in FIG. 8, the grinding apparatus 1 includes an exhaust box 43 located outside the housing 40 and discharging gas from the housing 40. The exhaust box 43 is connected to a suction source (not shown) via a pipe 44. The suction source is, for example, a vacuum pump or an ejector. The suction source may be part of a factory facility. The pipe 44 is installed, for example, on a ceiling 43a of the exhaust box 43. The exhaust box 43 discharges gas from inside the housing 40 by the suction force of the suction source, making the inside of the housing 40 under a negative pressure compared to the outside of the housing 40, and suppresses leakage of grinding chips and grinding fluid.

[0106] The three exhaust boxes 43 exhaust gas from the three grinding chambers B1 to B3 individually, making the three grinding chambers B1 to B3 under a negative pressure relative to the outside of the housing 40. The air pressure in the loading / unloading chamber B0 is higher than the air pressure in the grinding chambers B1 to B3. This pressure difference limits the scattering of grinding chips and grinding fluid from the grinding chambers B1 to B3 to the loading / unloading chamber B0.

[0107] The number of exhaust boxes 43 and the number of grinding chambers are not limited to three. The number of exhaust boxes 43 and the number of pipes 44 may not be the same. For example, one pipe 44 may be connected across two exhaust boxes 43 adjacent to each other.

[0108] Incidentally, when exhausting gas from inside the housing 40, the exhaust box 43 also exhausts droplets of grinding fluid from inside the housing 40. The droplets of grinding fluid contain grinding chips generated during grinding.

[0109] Therefore, as shown in FIG. 9, the side panel 42 of the housing 40 includes a liquid receiving portion 42a, an exhaust port 42b, and a return port 42c to prevent the grinding fluid contaminated with grinding debris from being discharged to the outside of the grinding apparatus 1 together with the gas.

[0110] The liquid receiving portion 42a is located at the same height as the substrate W held by the chuck 20, and receives the grinding fluid that splashes horizontally from the upper surface of the substrate W. The liquid receiving portion 42a restricts a large amount of the grinding fluid from entering the exhaust box 43.

[0111] The exhaust port 42b is located above the liquid receiving portion 42a, for example, directly above the liquid receiving portion 42a. After hitting the liquid receiving portion 42a, the grinding fluid falls downward due to gravity, so that almost no grinding fluid enters the exhaust port 42b.

[0112] The exhaust port 42b communicates with the inside of the exhaust box 43. The exhaust box 43 exhausts gas from the inside of the housing 40 through the exhaust port 42b. Droplets of the grinding fluid are mixed in the gas.

[0113] The exhaust box 43 separates the droplets of the grinding fluid from the gas inside. The droplets of the grinding fluid have a density greater than that of the gas, and are separated from the gas by gravity or the like. The separated grinding fluid falls.

[0114] The return port 42c is located below the liquid receiving portion 42a, for example, directly below the liquid receiving portion 42a. The return port 42c returns the grinding fluid separated from the gas inside the exhaust box 43 to the inside of the housing 40. This makes it possible to prevent the grinding fluid contaminated with grinding chips from being discharged to the outside of the grinding device 1 together with the gas.

[0115] The exhaust box 43 has an inclined surface 43b that guides the grinding fluid separated from the gas inside the exhaust box 43 obliquely downward toward the return port 42c of the side panel 42. The more the inclined surface 43b goes downward, the closer it is to the side panel 42. The grinding fluid flows down along the inclined surface 43b. This flow can prevent dirt from adhering to the inclined surface 43b.

[0116] The inclined surface 43b of the exhaust box 43 approaches the side panel 42 as it moves downward, for example, from a position higher than the exhaust port 42b of the side panel 42 to a position at the same height as the return port 42c of the side panel 42. After passing through the exhaust port 42b of the side panel 42 together with the gas, the droplets of the grinding fluid adhere to the inclined surface 43b of the exhaust box 43 and flow down along the inclined surface 43b.

[0117] The grinding apparatus 1 may include a nozzle 53 that supplies a cleaning liquid to the inside of the housing 40 through the inside of the exhaust box 43. The cleaning liquid is, for example, pure water such as DIW. After being supplied to the inside of the exhaust box 43, the cleaning liquid passes through the return port 42c of the side panel 42 and is supplied to the inside of the housing 40. Unlike the grinding liquid, the cleaning liquid does not contain dirt such as grinding dust, and therefore can clean the inside of the exhaust box 43 and the inside of the housing 40.

[0118] The nozzle 53 is provided, for example, on the inclined surface 43b of the exhaust box 43. The cleaning liquid flows down along the inclined surface 43b. This flow can prevent dirt from adhering to the inclined surface 43b. The nozzle 53 may or may not protrude upward from the inclined surface 43b.

[0119] 8, when viewed from above, the gap between the circular table cover 60 or the like and the side panel 42 is the narrowest at the boundary between adjacent rooms (for example, B1 and B2, or B0 and B3). Grinding debris easily becomes clogged in such a narrow gap.

[0120] Even when there is no table cover 60, the gap between the table 10 and the side panel 42 is narrowest at the boundary between adjacent rooms when viewed from above. Grinding debris easily becomes clogged in this narrow gap.

[0121] Therefore, in this embodiment, the return opening 42c of the side panel 42 is disposed near the boundary between adjacent rooms (for example, B1 and B2, or B0 and B3), and disposed near the fixed partition wall 45. Near the fixed partition wall 45 means, for example, a range within 50 mm from the fixed partition wall 45. It is sufficient that at least a part of the return opening 42c is within that range.

[0122] The return port 42c of the side panel 42 is disposed near the boundary between adjacent rooms (e.g., B1 and B2, or B0 and B3) to supply cleaning liquid to the gap between the table cover 60 or the like and the side panel 42, forming a flow of liquid. This flow prevents grinding waste from clogging the gap.

[0123] As shown in FIG. 9(B), when viewed from the front of the side panel 42, the outlet 53a of the nozzle 53 may be positioned as close as possible to the boundary between the adjacent rooms, that is, as close as possible to the fixed partition wall 45.

[0124] For example, when viewed from the front of the side panel 42, the distance between the fixed partition wall 45 and the discharge port 53a of the nozzle 53 may be approximately the same as the distance between the fixed partition wall 45 and the return port 42c. The cleaning liquid can be supplied to the inside of the housing 40 from the end of the return port 42c closest to the fixed partition wall 45.

[0125] Although not shown, a nozzle for supplying cleaning liquid to the inside of the housing 40 may be provided in the liquid receiving portion 42a of the side panel 42. This nozzle is provided, for example, on the upper portion of the liquid receiving portion 42a. After being discharged from the nozzle, the cleaning liquid flows down the liquid receiving portion 42a, washing away grinding debris adhering to the liquid receiving portion 42a.

[0126] As shown in Figures 8 and 10, the housing 40 is located below the multiple chucks 20 and includes a pan 46 that receives the falling grinding fluid and grinding debris. The pan 46 also receives cleaning fluid. Hereinafter, the grinding fluid and cleaning fluid are collectively referred to as liquid. In addition, liquid contaminated with grinding debris is also referred to as dirty liquid. The pan 46 has two inclined surfaces 210, 220 on its upper surface.

[0127] 10(A), the two inclined surfaces 210, 220 are combined in a mountain shape, and the further away from the boundary line BL between the two adjacent rooms B0, B1 and the remaining two rooms B2, B3, the more downwardly they slope. The two inclined surfaces 210, 220 allow wastewater to flow down on both sides of the boundary line BL.

[0128] According to this embodiment, two inclined surfaces 210, 220 are combined in a mountain shape. Therefore, compared to the case where only one inclined surface is provided, if the height difference of the inclined surface is the same, the horizontal distance of the inclined surface is shorter and the gradient of the inclination is steeper. Therefore, the dirty liquid is more likely to flow down. Therefore, the flow of the grinding chips and grinding liquid in the pan 46 can be improved.

[0129] 10(A), the pan 46 has two gutters 230, 240 along the lower edges 211, 221 of the two inclined surfaces 210, 220. The waste liquid flows down along the two inclined surfaces 210, 220 and then enters the two gutters 230, 240.

[0130] 10(B) and 10(C), each gutter 230, 240 has a guide surface 231, 241 at the bottom of the groove, which slopes downward from one end to the other end of the lower edge 211, 221. The guide surfaces 231, 241 enable waste liquid to be collected.

[0131] 10(B), the bottom of the gutter 230 has a guide surface 231 that slopes downward from the load / unload chamber B0 toward the primary grinding chamber B1. The slope of the guide surface 231 can prevent primary grinding chips contained in the dirty liquid from entering the load / unload chamber B0 from the primary grinding chamber B1, and can keep the load / unload chamber B0 clean.

[0132] 10(B), the gutter 230 may have, at its groove bottom, a guide surface 232 that is inclined in the opposite direction to the guide surface 231. The guide surface 232 is shorter than the guide surface 231, and is disposed at the end of the primary grinding chamber B1 opposite the load / unload chamber B0.

[0133] 10(C), the bottom of the trough 240 has a guide surface 241 that slopes downward from the tertiary grinding chamber B3 toward the secondary grinding chamber B2. The slope of the guide surface 241 can prevent secondary grinding chips with a large particle size from entering the tertiary grinding chamber B3 from the secondary grinding chamber B2, and can prevent roughness of the grinding surface after tertiary grinding.

[0134] 10(C), the gutter 240 may have, at its groove bottom, a guide surface 242 that is inclined in the opposite direction to the guide surface 241. The guide surface 242 is shorter than the guide surface 241 and is disposed at the end of the second grinding chamber B2 opposite to the third grinding chamber B3.

[0135] Each of the gutters 230, 240 includes an outlet 233, 243 for discharging wastewater at the lowest part of the bottom of the gutter. Pipes 250, 260 extending downward from the outlets 233, 243 are connected to the outlets 233, 243.

[0136] The waste liquid flows down along the guide surfaces 231, 241 and is discharged from the discharge outlets 233, 243 into the pipes 250, 260. The discharge outlets 233, 243 are located at the lowest positions, so that the collected waste liquid can be efficiently discharged.

[0137] 11, the tool driving unit 30 includes a movable unit 31 to which the grinding tool D is attached, and a lifting unit 35 that raises and lowers the movable unit 31. The lifting unit 35 faces the mountain-shaped inclined edges 212, 222 of the inclined surfaces 210, 220, rather than the lower edges 211, 221 of the inclined surfaces 210, 220. Since the lifting unit 35 does not face the gutters 230, 240, maintenance of the gutters 230, 240 is easy.

[0138] As described above, the grinding fluid and the cleaning fluid are supplied to the inside of the housing 40. Together with these fluids, grinding debris flows into the discharge ports 233 and 243. As a result, the discharge ports 233 and 243 may become clogged.

[0139] 12, the grinding device 1 includes first liquid level sensors 80-1, 80-2 located inside the housing 40. The first liquid level sensors 80-1, 80-2 detect the liquid level of the liquid accumulated inside the housing 40. When the detected liquid level exceeds a preset height, the control unit 16 determines that the discharge ports 233, 243 are clogged.

[0140] The grinding apparatus 1 also includes sensor covers 81-1 and 81-2 located between the chuck 20 and the first liquid level sensors 80-1 and 80-2. The sensor covers 81-1 and 81-2 block the contaminated liquid traveling from the substrate W held by the chuck 20 to the first liquid level sensors 80-1 and 80-2. This prevents the first liquid level sensors 80-1 and 80-2 from being contaminated, and prevents malfunction of the first liquid level sensors 80-1 and 80-2. In addition, the impact applied to the first liquid level sensors 80-1 and 80-2 can be reduced, and the failure of the first liquid level sensors 80-1 and 80-2 can be prevented.

[0141] The housing 40 includes four side panels 42-1, 42-2, 42-3, and 42-4 located on the sides of the chuck 20. These side panels 42 are combined to form a rectangle, forming four corners CR0 to CR3. CR0 is a corner of the loading / unloading chamber B0, CR1 is a corner of the first grinding chamber B1, CR2 is a corner of the second grinding chamber B2, and CR3 is a corner of the third grinding chamber B3. B It is the corner of 3.

[0142] A first liquid level sensor 80-1 is located at a corner CR1, and another first liquid level sensor 80-2 is located at another corner CR2. By disposing the first liquid level sensors 80-1 and 80-2 at the corners CR1 and CR2, interference with other members can be prevented.

[0143] When viewed from above, the sensor cover 81-1 has an inclined plate 81a-1 that is inclined with respect to each of the two side panels 42-1, 42-2 that form the corner CR1. The first liquid level sensor 80-1 is located in a space surrounded by the two side panels 42-1, 42-2 and the inclined plate 81a-1. By hiding the corner CR1 with the inclined plate 81a-1, it is possible to prevent dirt from accumulating at the corner CR1.

[0144] Also, when viewed from above, the sensor cover 81-2 has an inclined plate 81a-2 that is inclined with respect to each of the two side panels 42-2, 42-3 that form the corner CR2. The first liquid level sensor 80-2 is located in a space surrounded by the two side panels 42-2, 42-3 and the inclined plate 81a-2. By hiding the corner CR2 with the inclined plate 81a-2, it is possible to prevent dirt from accumulating at the corner CR2.

[0145] When viewed from above, a first liquid level sensor 80-1 overlaps with the gutter 230, and another first liquid level sensor 80-2 overlaps with another gutter 240. The first liquid level sensors 80-1, 80-2 may be embedded inside the gutter 230, 240, or may be positioned above the gutter 230, 240. In either case, the liquid level can be detected at the position of the gutter 230, 240 where the liquid collects.

[0146] When viewed from above, the first liquid level sensors 80-1, 80-2 are located near the discharge ports 233, 243. By disposing the first liquid level sensors 80-1, 80-2 near the discharge ports 233, 243, it is possible to reliably detect clogging of the discharge ports 233, 243. The vicinity of the discharge ports 233, 243 is, for example, within a range of 50 mm from the discharge ports 233, 243.

[0147] The grinding device 1 includes second liquid level sensors 82-1 and 82-2 that detect the liquid level of the liquid accumulated inside the housing 40, in addition to the first liquid level sensors 80-1 and 80-2. The first liquid level sensor 80-1 and the second liquid level sensor 82-1 are arranged at the same corner CR1 and detect the same liquid level. The first liquid level sensor 80-2 and the second liquid level sensor 82-2 are arranged at the same corner CR2 and detect the same liquid level. The same liquid level can be double-checked by the two sensors. Even if one sensor malfunctions or breaks down, the remaining sensor can detect the liquid level. The second liquid level sensors 82-1 and 82-2 may detect the liquid level at a position higher than the detection range of the first liquid level sensors 80-1 and 80-2.

[0148] Next, a pair of a first liquid level sensor 80-1 and a second liquid level sensor 82-1 will be described with reference to Fig. 13. Another pair of a first liquid level sensor 80-2 and a second liquid level sensor 82-2 is configured in the same manner, and therefore description thereof will be omitted.

[0149] The grinding device 1 includes a vertical pipe 83 outside the housing 40, which communicates with the inside of the housing 40. A horizontal pipe 86 extending from the lower end of the vertical pipe 83 is inserted into, for example, the inside of the gutter 230. A horizontal pipe 87 extending from the upper end of the vertical pipe 83 is disposed, for example, above the top panel 41 of the housing 40.

[0150] Outside air enters the interior of the vertical pipe 83. Therefore, the liquid level of the liquid in the vertical pipe 83 becomes the same as the liquid level of the liquid in the housing 40. The second liquid level sensor 82-1 is attached to the vertical pipe 83 and detects the liquid level of the liquid in the vertical pipe 83.

[0151] Unlike the first liquid level sensor 80-1, the second liquid level sensor 82-1 is disposed outside the housing 40. Therefore, it is possible to prevent dirty liquid from splashing onto the second liquid level sensor 82-1, and to prevent malfunction and failure of the second liquid level sensor 82-1.

[0152] The first liquid level sensor 80-1 includes a displacement meter that measures the displacement of the liquid level. For example, the first liquid level sensor 80-1 has a float 80a that rises and falls according to the fluctuation of the liquid level, a guide 80b for the float 80a, and a displacement meter 80c that measures the displacement of the float 80a. Note that the displacement meter is not limited to the float type. The displacement meter continuously measures the height of the liquid level within a predetermined range.

[0153] On the other hand, the second liquid level sensor 82-1 includes a switch that detects when the liquid level reaches a set value. The switch is, for example, a proximity switch. The type of the proximity switch is not particularly limited, but is, for example, an optical type. The optical proximity switch detects the light transmitted through the transparent vertical tube 83, and detects when the liquid level reaches the set value from a change in the amount of light. The proximity switch may be of a capacitance type or the like. In this case, the vertical tube 83 may be opaque. By using a type different from that of the first liquid level sensor 80-1 as the second liquid level sensor 82-1, it is possible to avoid simultaneous malfunction or failure of the two sensors.

[0154] The switch of the second liquid level sensor 82-1 includes a switch that detects when the liquid level reaches a set value. The set value of the liquid level may be lower than the height H of the crest 201 (see FIG. 10(A)) of the two inclined surfaces 210, 220 that are combined in a mountain shape. Before the flow along the inclined surfaces 210, 220 disappears and grinding debris begins to deposit, clogging of the discharge ports 233, 243 can be detected.

[0155] 12, the grinding apparatus 1 may have a corner cover 84 that covers the corner CR3 in addition to the sensor covers 81-1 and 81-2. The corner cover 84 has an inclined plate 84a that is inclined with respect to each of the two side panels 42-3 and 42-4 that form the corner CR3. By hiding the corner CR3 with the inclined plate 84a, it is possible to prevent dirt from accumulating at the corner CR3. The corner cover 84 does not have to be installed in the loading / unloading chamber B0.

[0156] The grinding device 1 may also have a second corner cover 85 that covers the corner between the side panel 42 and the fixed partition wall 45. The second corner cover 85 has a second inclined plate 85a that is inclined with respect to each of the side panel 42 and the fixed partition wall 45. By hiding the corner with the second inclined plate 85a, it is possible to prevent dirt from accumulating in the corner. The second corner cover 85 is installed in the first grinding chamber B1, the second grinding chamber B2, and the third grinding chamber B3. The second corner cover 85 does not have to be installed in the loading / unloading chamber B0.

[0157] As shown in FIG. 14(A), the grinding device 1 includes an exterior 300 that forms the outer surface of the grinding device 1. The exterior 300 accommodates therein the table 10, the chuck 20, the chuck driving unit 19, the tool driving unit 30, the housing 40, and a collection unit 320. The collection unit 320 collects the grinding chips. The grinding chips flow into the collection unit 320 together with a liquid such as a grinding fluid. The collection unit 320 separates the liquid from the grinding chips, discharges the liquid, and leaves the grinding chips. Details of the collection unit 320 will be described later.

[0158] A first opening 301 and a second opening 302 are separately formed in the exterior 300. The first opening 301 allows an operator or a working robot to access the chuck 20 or the tool driving unit 30 from outside the grinding apparatus 1. On the other hand, the second opening 302 allows an operator or a working robot to access the collection unit 320 from outside the grinding apparatus 1.

[0159] The grinding device 1 includes a first door 311 for opening and closing the first opening 301, and a second door 312 for opening and closing the second opening 302 separately from the first door 311. An operator or a working robot operates the first door 311 to open and close the first opening 301. Similarly, an operator or a working robot operates the second door 312 to open and close the second opening 302.

[0160] According to this embodiment, the first opening 301 and the second opening 302 are separately formed on the outer surface of the grinding apparatus 1. The second opening 302 is formed closer to the collection section 320 than the first opening 301. As a result, when touching the collection section 320, the worker or the working robot does not need to operate the first door 311 and does not need to open the first opening 301. Therefore, the worker or the working robot does not need to touch the chuck 20 or the tool driving section 30. Therefore, the grinding chips can be taken out to the outside of the grinding apparatus 1 without interrupting the grinding of the substrate W while driving the chuck 20 and the grinding tool D. In other words, the grinding chips can be taken out to the outside of the grinding apparatus 1 while the substrate W is being ground.

[0161] The first opening 301 and the second opening 302 are formed, for example, on a side surface of the grinding device 1 facing the same direction. The first opening 301 and the second opening 302 may also be formed on a side surface of the grinding device 1 facing the opposite direction, and the number of the first openings 301 and the second openings 302 may be multiple. In addition, the number of the collection units 320 may also be multiple. The collection unit 320 is located below the housing 40 shown in FIG. 13 and the like, and collects grinding chips that drop from the discharge ports 233, 243 of the housing 40.

[0162] 14(A), the grinding device 1 includes a door sensor 321 that detects the opening of the first opening 301 by the first door 311. The door sensor 321 is not particularly limited, but is, for example, a proximity switch. When the door sensor 321 detects the opening of the first opening 301, it transmits a signal indicating the opening to the control unit 16 (see FIG. 1).

[0163] When the door sensor 321 detects that the first opening 301 is open while the chuck 20 and the grinding tool D are being driven, the control unit 16 stops the driving of the chuck 20 and the grinding tool D. Similarly, when the door sensor 321 detects that the first opening 301 is open while the table 10 is being driven, the control unit 16 stops the driving of the table 10. This makes it possible to prevent contact between a moving object and a worker or a working robot.

[0164] On the other hand, even if the second door 312 opens the second opening 302 while the chuck 20 and the grinding tool D are being driven, the control unit 16 continues to drive the chuck 20 and the grinding tool D. Similarly, even if the second door 312 opens the second opening 302 while the table 10 is being driven, the control unit 16 continues to drive the table 10. There is no need to interrupt grinding of the substrate W in order to remove the grinding debris outside the grinding apparatus 1.

[0165] As described above, the control unit 16 continues to drive the object even if the second door 312 opens the second opening 302. Therefore, a door sensor that detects the opening of the second opening 302 is not necessary.

[0166] 14(B), the recovery section 320 includes walls 341, 342, 343, 344, and 345 that limit access from the second opening 302 to the chuck 20 or the tool driving section 30. The walls 341, 342, 343, 344, and 345 form a box 340. The box 340 is open toward the second opening 302.

[0167] 15, a wall 341, which is the ceiling of the box 340, is formed with an inlet 346 for grinding chips. The inlet 346 communicates with the exhaust outlet 233 or 243 of the housing 40 via a pipe 250 or 260. The inlet 346 may communicate with both the exhaust outlets 233 and 243 via both the pipes 250 and 260. The grinding chips pass through the inlet 346 of the box 340 and fall into the inside of the box 340.

[0168] The collection section 320 may include a pair of guide walls 351 , 352 inside the box 340 that guide the grinding chips dropping from the entrance 346 of the box 340 .

[0169] 15, the collection unit 320 includes a plurality of containers 331, 332 for storing grinding chips. The plurality of containers 331, 332 are separately removable from inside the box 340. For example, while grinding chips are being collected in one container 331, another container 332 can be removed and emptied. However, the number of containers may be one.

[0170] 14(B), box 340 has doors 347, 348 that open and close the removal openings for containers 331, 332. Doors 347, 348 are separate doors from second door 312, but may also serve as second door 312. A worker or a working robot opens doors 347, 348 and removes containers 331, 332 to the outside of box 340. Thereafter, the worker or the working robot returns the empty containers 331, 332 to the inside of box 340 and closes doors 347, 348.

[0171] 15, the collection section 320 includes a switching mechanism 360 that switches the storage destination of the grinding chips. The switching mechanism 360 has, for example, a rotating plate 361 and an operating lever 362. The rotating plate 361 is located in the passage through which the grinding chips fall and is inclined. The operating lever 362 rotates the rotating plate 361 and switches the inclination direction of the rotating plate 361. By switching the inclination direction of the rotating plate 361, the storage destination of the grinding chips can be switched.

[0172] The rotation diameter of the rotating plate 361 is larger than the distance between the pair of guide walls 351, 352. The pair of guide walls 351, 352 are provided within the rotation range of the rotating plate 361. The pair of guide walls 351, 352 also serve as stoppers that stop the rotation of the rotating plate 361. The rotation shaft 363 of the rotating plate 361 is disposed horizontally, and is located directly below the horizontal center of the pair of guide walls 351, 352.

[0173] 15(A), the rotating plate 361, in a state where it hits the right guide wall 352, tilts downward to the left and drops the grinding chips into the left container 331. In this case, the grinding chips are stored in the left container 331.

[0174] 15(B), the rotating plate 361, in a state where it hits the left guide wall 351, tilts downward to the right and drops the grinding chips into the right container 332. In this case, the grinding chips are stored in the right container 332.

[0175] The recovery unit 320 includes a locking mechanism 370. The locking mechanism 370 restricts removal of the container 331 that contains the grinding chips, and allows removal of the other containers 332. Alternatively, the locking mechanism 370 restricts removal of the container 332 that contains the grinding chips, and allows removal of the other containers 331. This makes it possible to prevent the container that contains the grinding chips from being removed accidentally while the grinding chips are being stored, and to prevent the grinding chips from scattering inside the box 340.

[0176] As the lock mechanism 370, for example, the operating lever 362 of the switching mechanism 360 is used. The operating lever 362 extends, for example, in a straight line from the rotation axis 363 of the rotating plate 361 to the path along which the container passes, and restricts the removal of the container. For example, as shown in FIG. 14(B), the operating lever 362 restricts the removal of the container 331 by pressing the door 347. Also, the operating lever 362 restricts the removal of another container 332 by pressing another door 348. The operating lever 362 switches between a state in which only the door 347 is pressed and a state in which only the other door 348 is pressed. If the operating lever 362 is the lock mechanism 370, the lock destination can be switched at the same time as the storage destination is switched, and forgetting to switch the lock destination can be prevented.

[0177] The containers 331 and 332 include a mesh to separate the liquid from the grinding debris while leaving the grinding debris. The containers 331 and 332 are entirely mesh cages, but only the bottom wall may be made of mesh. The collection unit 320 includes a mesh-like placement unit 333 that supports the containers 331 and 332 from below and drops the liquid downward. A partition plate 334 may be provided on the placement unit 333 to separate the adjacent containers 331 and 332. After dripping from the containers 331 and 332, the liquid passes through the placement unit 333 and is discharged to the outside of the collection unit 320. Only the grinding debris can be left inside the collection unit 320, and the frequency of removing the containers 331 and 332 from the box 340 can be reduced.

[0178] Although the grinding device and grinding method according to the present disclosure have been described above, the present disclosure is not limited to the above-mentioned embodiments. Various changes, modifications, substitutions, additions, deletions, and combinations are possible within the scope of the claims. These naturally fall within the technical scope of the present disclosure.

[0179] For example, the number of tool driving units 30 may be one or more. The number of chucks 20 may be greater than the number of tool driving units 30. The interior of the housing 40 is divided into four rooms B0 to B3 by fixed partition walls 45, but the number of rooms is not limited to four and may be two or more.

[0180] This application claims priority based on Japanese Patent Application No. 2020-161264, filed with the Japan Patent Office on September 25, 2020, the entire contents of which are incorporated herein by reference. [Explanation of symbols]

[0181] 1 Grinding equipment 20 Chuck 30 Tool drive unit 40 Case 50 nozzles 80 Liquid level sensor (sensor) 81 Sensor cover W substrate

Claims

1. A chuck for holding the substrate; A housing that houses the chuck; a tool driving unit that drives a grinding tool pressed against the substrate inside the housing; and a nozzle for supplying a grinding fluid to the substrate within the housing; a sensor located inside the housing for detecting a liquid level of the liquid that accumulates inside the housing due to a drainage port of the liquid containing the grinding fluid being clogged with grinding debris; a sensor cover positioned between the chuck and the sensor, the sensor cover blocking the liquid flowing from the substrate held by the chuck to the sensor.

2. The housing includes a plurality of side panels positioned on sides of the chuck, The grinding apparatus of claim 1 , wherein the sensors are located at corners of a plurality of the side panels.

3. When viewed from above, the sensor cover has an inclined plate inclined with respect to each of the plurality of side panels forming the corner, The grinding device according to claim 2 , wherein the sensor is located in a space surrounded by the side panels and the inclined plate.

4. the housing is located below the chuck and includes a pan for receiving the falling grinding fluid and the grinding chips; The pan has a trough on its periphery; 4. The grinding apparatus according to claim 1, wherein the sensor overlaps with the groove when viewed from above.

5. a table that holds a plurality of the chucks around a rotation center line and rotates around the rotation center line; Fixed partition walls that divide the interior of the housing into four rooms around the rotation center line of the table; The pan has, on its upper surface, two inclined surfaces that are inclined downward as they move away from the boundary lines between the two adjacent chambers and the remaining two chambers, The pan has two troughs along the lower edges of the two inclined surfaces, 5. The grinding apparatus according to claim 4, wherein, when viewed from above, one of the sensors overlaps one of the grooves and another of the sensors overlaps another of the grooves.

6. the gutter includes a discharge port for discharging the grinding fluid and the grinding chips at a portion of the groove bottom that is at the lowest height, The grinding apparatus according to claim 4 or 5, wherein the sensor is located in the vicinity of the discharge port when viewed from above.

7. The grinding apparatus according to any one of claims 1 to 6, further comprising a second sensor for detecting the liquid level in addition to the sensor.

8. a vertical pipe provided outside the housing and communicating with the inside of the housing; The grinding apparatus of claim 7 , wherein the second sensor is attached to the vertical pipe.

9. The sensor includes a displacement meter that measures a displacement of the liquid level, 9. The grinding apparatus according to claim 7, wherein the second sensor includes a switch that detects when the liquid level reaches a set value.

10. a table that holds a plurality of the chucks around a rotation center line and rotates around the rotation center line; Fixed partition walls that divide the interior of the housing into four rooms around the rotation center line of the table; the housing is located below the plurality of chucks and includes a pan for receiving the dropping grinding fluid and the grinding chips; The pan has, on its upper surface, two inclined surfaces that are inclined downward as they move away from the boundary lines between the two adjacent chambers and the remaining two chambers, 10. The grinding apparatus according to claim 9, wherein the set value of the liquid level is lower than the height of the peaks of the two inclined surfaces.

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