Semiconductor device manufacturing method and substrate processing apparatus

Abstract

To provide a method of manufacturing a semiconductor device and a substrate processing device that enable a silicon film to be embedded in a recess while preventing generation of voids by bottom-up film formation without repeating a DED process.SOLUTION: A method of manufacturing a semiconductor device includes the steps of: supplying a silicon-containing gas to a substrate with a recess provided on its surface to deposit an amorphous silicon film in the recess; supplying an etching gas to the substrate to etch the amorphous silicon film so as to leave the amorphous silicon film on the bottom in the recess; and supplying dichlorosilane to the substrate to deposit a silicon film on the amorphous silicon film.SELECTED DRAWING: Figure 6

Description

[Technical field]

[0001] The present invention relates to a method for manufacturing a semiconductor device and a substrate processing apparatus. [Background technology]

[0002] Conventionally, a method for manufacturing a semiconductor device has been known in which the steps of supplying a film-forming gas containing silicon to a workpiece having a recess formed on its surface to form a silicon film in the recess, supplying a process gas containing a halogen gas for etching the silicon film and a roughness suppressing gas for suppressing roughness of the surface of the silicon film after etching with the halogen gas to the workpiece, and further providing a ground energy to the process gas to activate it and perform etching, thereby widening the opening width of the recess, are repeated to fill the recess with a silicon film (see, for example, Patent Document 1). This filling method is called a Deposition Etch Deposition (DED) process, since deposition and etching are repeated. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2017-228580 A Summary of the Invention [Problem to be solved by the invention]

[0004] A method for manufacturing a semiconductor device and a substrate processing apparatus are provided that can fill a recess with a silicon film by bottom-up film formation without generating voids and without repeating the DED process. [Means for solving the problem]

[0005] In order to achieve the above object, a method for manufacturing a semiconductor device according to one aspect of the present invention includes the steps of: supplying a silicon-containing gas to a substrate having a recess on a surface thereof, and depositing an amorphous silicon film in the recess; supplying an etching gas to the substrate and etching the amorphous silicon film so as to leave the amorphous silicon film on a bottom of the recess; The substrate is coated with dichlorosilane only On the amorphous silicon film, Poly and depositing a silicon film. Effect of the Invention

[0006] According to the present invention, the silicon film can be embedded in the recess without repeating the DED process. [Brief description of the drawings]

[0007] [Figure 1] FIG. 1 illustrates a substrate processing apparatus according to an embodiment of the present disclosure. [Diagram 2] 3A to 3C are diagrams showing examples of shapes of recesses formed on the surface of a wafer W. [Diagram 3] FIG. 1 illustrates an example of a typical conventional DED process. [Figure 4] FIG. 4 is a diagram for explaining a conventional selective growth method which is improved from FIG. 3. [Diagram 5] FIG. 5 is based on a TEM image corresponding to FIG. 4. [Figure 6] 1A to 1C are diagrams for explaining an example of a manufacturing method of a semiconductor device according to an embodiment of the present disclosure. [Figure 7] 7 is a diagram based on a TEM image corresponding to FIG. 6 for explaining an example of a manufacturing method of a semiconductor device according to an embodiment of the present disclosure. [Figure 8] 1A to 1C are diagrams based on TEM images showing results of implementing the semiconductor device manufacturing method according to the present embodiment. [Figure 9] 1A to 1C are diagrams illustrating problems with a conventional method for manufacturing a semiconductor device. [Figure 10]6 is a diagram comparing the state of the fins of a semiconductor device manufactured by the conventional DED process described with reference to FIGS. 4 and 5 and the semiconductor device manufacturing method according to the present embodiment. FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0008] Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

[0009] FIG. 1 is a diagram showing a substrate processing apparatus according to an embodiment of the present disclosure. In this embodiment, an example in which the substrate processing apparatus is configured as a vertical heat processing apparatus will be described. Note that the substrate processing apparatus according to the present disclosure is not limited to a vertical heat processing apparatus, and can be applied to various substrate processing apparatuses capable of alternately performing film formation and etching. Applicable substrate processing apparatuses include single-wafer substrate processing apparatuses and semi-batch substrate processing apparatuses. In this embodiment, an example in which the substrate processing apparatus is configured as a vertical heat processing apparatus will be described.

[0010] The vertical thermal processing apparatus performs a DED process to form logic elements of a semiconductor device on a substrate, a wafer W. In other words, a film formation process and an etching process are performed on the wafer W. The film formation process is a process using thermal CVD (Chemical Vapor Deposition), and the etching process is a reactive gas etching process performed by supplying thermal energy to an etching gas.

[0011] The logic elements to be manufactured include, in addition to conventionally manufactured logic elements, logic elements using FinFETs, which are the next generation transistors after MOSFETs (Metal Oxide Semiconductor Field Effect Transistors), for example.

[0012] The vertical heat treatment apparatus includes a reaction tube 11, which is a substantially cylindrical vacuum vessel with its longitudinal direction oriented vertically. The reaction tube 11 has a double-tube structure consisting of an inner tube 12 and an outer tube 13 with a ceiling that covers the inner tube 12 and is formed to have a certain distance from the inner tube 12. The inner tube 12 and the outer tube 13 are made of a heat-resistant material, for example, quartz. The reaction tube 11 may be called a processing chamber because it forms a closed space in which substrates are processed.

[0013] A cylindrical manifold 14 made of stainless steel (SUS) is disposed below the outer tube 13. The manifold 14 is airtightly connected to the lower end of the outer tube 13. The inner tube 12 protrudes from the inner wall of the manifold 14 and is supported by a support ring 15 formed integrally with the manifold 14.

[0014] A lid 16 is disposed below the manifold 14, and the lid 16 can be raised and lowered between an upper position and a lower position by the boat elevator 10. FIG. 1 shows the lid 16 in the upper position, and in this upper position, the lid 16 closes an opening 17 of the reaction tube 11 below the manifold 14, making the inside of the reaction tube 11 airtight. A wafer boat 3 made of, for example, quartz is placed on the lid 16. The wafer boat 3 is configured to hold a number of wafers W to be processed as substrates horizontally at a predetermined interval in the vertical direction. A heat insulator 18 is provided around the reaction tube 11 so as to surround the reaction tube 11, and a heater 19 made of, for example, a resistance heating element, which is a heating unit, is provided on the inner wall surface of the heat insulator 18, which can heat the inside of the reaction tube 11.

[0015] In the manifold 14, a process gas introduction pipe 21 and a purge gas introduction pipe 31 are inserted below the support ring 15, and the downstream ends of the gas introduction pipes 21 and 31 are arranged so as to supply gas to the wafer W in the inner pipe 12. For example, the upstream side of the process gas introduction pipe 21 branches to form branch paths 22A to 22E, and the upstream ends of the branch paths 22A to 22E are connected to a diisopropylaminosilane (DIPAS) gas supply source 23A, a disilane (Si2H6) gas supply source 23B, a monoaminosilane (SiH4) gas supply source 23C, a chlorine (Cl2) gas supply source 23D, and a dichlorosilane (SiH2Cl2, Dichlorosilane, hereinafter may be referred to as "DCS") gas supply source 23E. Gas supply mechanisms 24A to 24E are interposed in the branch paths 22A to 22E, respectively. The gas supply mechanisms 24A to 24E each include a valve and a mass flow controller, and are configured to be able to control the flow rate of the process gas supplied to the process gas introduction pipe 21 from the gas supply sources 23A to 23E, respectively.

[0016] The DIPAS gas is a seed layer formation gas for forming a first seed layer on the surface of a silicon oxide film formed on the surface of the wafer W, and the gas supply source 23A and the gas supply mechanism 24A constitute a DIPAS gas supply unit.

[0017] The Si2H6 gas is a seed layer forming gas for forming a second seed layer on the surface of the first seed layer, and the gas supply source 23B and the gas supply mechanism 24B constitute a Si2H6 (disilane) gas supply unit.

[0018] The Si2H6 gas may also be used as a silicon-containing gas to further deposit an amorphous silicon film on the second seed layer, as will be described in detail later.

[0019] The DIPAS gas supply unit and the disilane gas supply unit are gas supply units for forming a seed layer, and therefore may be called a seed layer forming gas supply unit.

[0020] In this embodiment, an example is described in which two types of gases for forming a seed layer are used, but any one of the gases for forming a seed layer may be used. In addition, when forming a film on a wafer W on which a seed layer has already been formed, the seed layer forming gas supply unit may not be required. Furthermore, even when the seed layer forming gas supply unit is used, gases other than DIPAS gas and Si2H6 gas may be used. In this way, the DIPAS gas supply unit and disilane gas supply unit, which are given as examples, and the seed layer forming gas supply unit may be provided as necessary.

[0021] The SiH4 gas is a film-forming gas for forming a silicon (Si) film on the wafer W on which the sheet layer is formed, and the gas supply source 23C and the gas supply mechanism 24C constitute a silicon-containing gas supply unit. Note that since the silicon-containing gas is a gas used in film formation, the silicon-containing gas supply unit may also be called a film-forming gas supply unit.

[0022] The Cl2 gas is an etching gas for etching the Si film, and the gas supply source 23D and the gas supply mechanism 24D constitute a chlorine gas supply unit. Since the chlorine gas is supplied as an etching gas, the chlorine gas supply unit may be called an etching gas supply unit.

[0023] The DCS gas is a silicon-containing gas for bottom-up deposition, that is, deposition of a silicon film in a recess. The gas supply source 23E and the gas supply mechanism 24E constitute a DCS gas supply unit. Since the DCS gas is used for deposition, the DCS gas supply unit may be called a filling gas supply unit.

[0024] The upstream side of the purge gas introduction pipe 31 is connected to a supply source 32 of nitrogen (N2) gas, which is a purge gas. A gas supply mechanism 33 is provided in the purge gas introduction pipe 31. The gas supply mechanism 33 is configured similarly to the gas supply mechanisms 24A to 24E, and controls the flow rate of the purge gas to the downstream side of the introduction pipe 31.

[0025] Further, the manifold 14 has an exhaust port 25 opening on a side surface above the support ring 15, and exhaust gas generated in the inner tube 12 is exhausted to the exhaust port 25 through a space formed between the inner tube 12 and the outer tube 13. An exhaust pipe 26 is airtightly connected to the exhaust port 25. A valve 27 and a vacuum pump 28 are installed in the exhaust pipe 26 from its upstream side in this order. By adjusting the opening of the valve 27, the pressure inside the reaction tube 11 is controlled to a desired pressure.

[0026] The vertical heat treatment apparatus is provided with a control unit 30 configured by a computer, and the control unit 30 is provided with a program. This program is structured with a group of steps so that a series of processing operations described below can be performed on the wafer W by outputting control signals to each part of the vertical heat treatment apparatus 1 to control the operation of each part. Specifically, control signals are output so that the boat elevator 10 raises and lowers the lid 16, the output of the heater 19 (i.e., the temperature of the wafer W), the opening of the valve 27, the supply flow rate of each gas into the reaction tube 11 by the gas supply mechanisms 24A to 24C and 33, and the like are controlled. This program is stored in the control unit 30 in a state of being stored in a storage medium such as a hard disk, a flexible disk, a compact disk, a magnet optical disk (MO), or a memory card.

[0027] Fig. 2 is a diagram showing an example of the shape of a recess formed on the surface of a wafer W. As shown in Fig. 2, a silicon (Si) layer 41 is provided on the surface of the wafer W. The surface of the Si layer 41 is oxidized to form a silicon oxide film 43. A recess 42 having a depth D and an opening width S is also formed. The recess 42 is formed as, for example, a trench or a through hole, but any shape is acceptable as long as it is a recessed shape.

[0028] 2, the aspect ratio of the recess 42 is D / S. The aspect ratio of the recess is, for example, 2 or more.

[0029] First, a general method for filling a silicon film into a recess 42 as shown in FIG. 2 by applying a DED process will be described.

[0030] FIG. 3 is a diagram showing an example of a typical conventional DED process.

[0031] 3(a) is a diagram showing a seed layer formation process for forming a seed layer 44 on the surface of a wafer W having a recess 42 on the surface. In the seed layer formation process, a thin silicon film is formed as the seed layer 44 on the surface of a silicon oxide film 43 on the surface. To form the seed layer 44, for example, Si2H6 is used as a film formation gas.

[0032] 3(b) is a diagram showing the first film formation process. In the first film formation process, for example, SiH4 gas is used as a film formation gas, and a silicon film 45 is formed on the surface of the wafer W and deposited in the recess 42.

[0033] 3(c) is a diagram showing an example of an etching process. In the etching process, the formed silicon film 45 is etched to widen the opening width so that the upper end is not blocked. Then, a V-shaped cross section is formed in the silicon film 45.

[0034] 3(d) shows the second film formation process. In the second film formation process, a new silicon film 45a is deposited on the V-shaped silicon film 45, and the entire recess 42 is filled with the silicon films 45, 45a.

[0035] The filling method is the DED process, but for the recess 42 with a high aspect ratio, it is not always possible to fill the recess 42 with a single DED process, and it is often necessary to repeat the DED process, which results in a problem of a long process time.

[0036] In response to this, a method has been proposed in which SiH4 and DCS are supplied to the substrate in parallel, and an etching gas is supplied before the end of the incubation time on the silicon oxide film (the time from when the silicon-containing gas is supplied to when film formation actually begins) to reset the incubation time, thereby performing selective growth.

[0037] Fig. 4 is a diagram for explaining a conventional selective growth method which is an improvement over Fig. 3. Fig. 5 is a diagram based on a TEM image corresponding to Fig. 4. The explanation will be centered on Fig. 4, but the actual state can be understood by appropriately referring to Fig. 5.

[0038] 4(a) and 5(a) are cross-sectional views showing the shape of a recess 42 formed in a wafer W. A silicon oxide film 43 is formed on the surface of the wafer W, and further a seed layer 44 is already formed.

[0039] 4(b) and 5(b) are diagrams illustrating a first film formation process. In the first film formation process, a silicon-containing gas (e.g., SiH4 gas) is supplied to deposit a conformal silicon film 45 in the recess 42 and on the surface of the wafer W.

[0040] 4(c) and 5(c) are diagrams showing the first etching step. In the first etching step, an etching gas (e.g., chlorine) is supplied to the wafer W, and the etching gas is performed so that a silicon film 45 remains on the bottom surface of the recess 42. An etching gas 46 remains on the surfaces of the wafer W and the silicon film 45.

[0041] 4(d) and 5(d) are diagrams showing the second film formation process. In the second film formation process, SiH4 and DCS are supplied, and a new silicon film 45a is further deposited on the silicon film 45.

[0042] 4(e) and 5(e) show a process of intermittently supplying an etching gas. Here, the etching gas is supplied to reset the incubation time on the silicon film 45a and the wafer W, rather than to etch the silicon film 45a.

[0043] 4(f) and 5(f) are diagrams showing a selective growth step. In the selective growth step, a silicon film 45b is newly deposited on the silicon film 45a.

[0044] 4(e), 5(e), 4(f), and 5(f) are repeated to selectively grow silicon film 45b, thereby performing bottom-up filling deposition, which ensures bottom-up deposition and allows silicon films 45, 45a, and 45b to fill recess 42 without generating voids.

[0045] 4(g) and 5(g) are diagrams showing the completion and final stages of the filling process. The silicon films 45, 45a to 45c are filled in the recesses 42, and no voids are generated.

[0046] In this way, the etching gas was used to reset the incubation time, and the silicon films 45, 45a to 45c were selectively grown, improving the filling performance in the recesses 42. However, the problem of long process time was not solved because the DE process was repeated.

[0047] Therefore, the present disclosure proposes a manufacturing method for a semiconductor device and a substrate processing apparatus that selectively grows a silicon film in a bottom-up manner, eliminating the need for repeated DE processes.

[0048] Fig. 6 is a diagram for explaining an example of a method for manufacturing a semiconductor device according to an embodiment of the present disclosure. Fig. 7 is a diagram based on a TEM image corresponding to Fig. 6 for explaining an example of a method for manufacturing a semiconductor device according to an embodiment of the present disclosure. The example of a method for manufacturing a semiconductor device according to an embodiment of the present disclosure will be explained mainly with reference to Fig. 6, and the actual state is shown corresponding to Fig. 7. Also, Fig. 1 showing the device configuration will be referred to as appropriate.

[0049] First, the wafers W described in FIG. 2 are transferred to the wafer boat 3 by a transfer mechanism (not shown) and held thereon. Then, the wafer boat 3 is placed on the lid 16 located at the lowered position. Then, the lid 16 is raised to the raised position, the wafer boat 3 is carried into the reaction tube 11, the opening 17 of the reaction tube 11 is closed by the lid 16, and the reaction tube 11 is made airtight. Next, a purge gas is supplied into the reaction tube 11, and the reaction tube 11 is evacuated to a vacuum atmosphere of a predetermined pressure, and the wafers W are heated to a predetermined temperature by the heater 19. The temperature at this time is set to a predetermined film formation temperature suitable for depositing a silicon film on the wafers W. The temperature of the heater 19 may be controlled by the control unit 30.

[0050] For example, when SiH4 gas is used as the deposition gas, the temperature is within the range of 440 to 530°C.

[0051] FIG. 6(a) and FIG. 7(a) are diagrams illustrating an example of a seed layer forming step.

[0052] After the wafer W is heated, the supply of the purge gas is stopped, and the DIPAS gas is supplied into the reaction tube 11. The DIPAS gas is deposited on the surface of the silicon oxide film 43 of the wafer W, and a seed layer 44 is formed so as to cover the silicon oxide film 43 (not shown).

[0053] Thereafter, the supply of DIPAS gas is stopped, a purge gas is supplied into the reaction tube 11, the DIPAS gas is purged from the reaction tube 11, and then Si2H6 gas is supplied into the reaction tube 11. This Si2H6 gas is deposited on the first seed layer, and a second seed layer is formed so as to cover the first seed layer. Thereafter, the supply of Si2H6 gas is stopped, a purge gas is supplied into the reaction tube 11, and the Si2H6 gas is purged from the reaction tube 11.

[0054] FIG. 6(b) and FIG. 7(b) are diagrams showing an example of the first film forming step.

[0055] After the seed layer formation process, the supply of the purge gas is stopped, and SiH4 gas is supplied into the reaction tube 11. As shown in FIG. 6(b), the SiH4 gas is deposited on the second seed layer, and a Si film 44 is formed on the entire surface of the wafer W so as to cover the second seed layer. Then, the deposition of the SiH4 gas continues, and the Si film 45 grows. That is, the thickness of the Si film 45 increases. Then, as shown in FIG. 6(b), for example, the supply of the SiH4 gas is stopped before the upper side of the recess 42a is blocked by the Si film 45. At this stage, the opposing distance of the silicon film 45 becomes very narrow in the portion of the protrusion 42b.

[0056] In the first film formation step, it is preferable to deposit the silicon films 45 so that the gap between the opposing silicon films 45 is as narrow as possible without contacting each other. This is because, in the next etching step, etching is performed so that the silicon film 45 on the bottom of the recess 42 remains, so it is preferable to make it difficult for the etching gas to reach the bottom of the recess 42. The gap between the opposing silicon films 45 is, for example, 10 nm to 100 nm.

[0057] In addition, Si2H6 gas may be used instead of SiH2 gas. In this case, the seed layer forming process and the first film forming process may be performed consecutively.

[0058] In the first film formation step, an amorphous silicon film 45 is formed inside the recess 42 and on the surface of the wafer W.

[0059] After the supply of the SiH4 gas or Si2H6 gas is stopped, a purge gas is supplied into the reaction tube 11, and the SiH4 gas or Si2H6 gas is purged from the reaction tube 11.

[0060] 6(c) and 7(c) are diagrams showing an example of the first etching process. In the first etching process, Cl2 gas is supplied from the gas supply source 23D to the process gas introduction pipe 21 and supplied to the wafer W in the reaction tube 11 (FIG. 1).

[0061] The Cl2 gas is an etching gas for the silicon film 45, and generates active species such as Cl radicals by being heated in the reaction tube 11 and supplied with thermal energy. Since the active species has a relatively high reactivity with Si, it reacts with Si outside the recess 42 and on the upper side of the recess 42 before reaching the lower part of the recess 42 of the wafer W to generate SiCl4 (silicon tetrachloride), and the silicon film 45 is etched. Therefore, etching is performed so that the decrease in the thickness of the Si film 45 on the upper side of the recess 42 is greater than the decrease in the thickness of the Si film 45 on the lower side of the recess 42, and the opening width on the upper side of the recess 42 is enlarged. In addition, 2 moles of Cl radicals are generated from 1 mole of Cl2. In other words, since a relatively large number of active species are generated, the enlargement of the opening width can proceed at a relatively high speed.

[0062] At this time, the etching gas is supplied under the condition of the supply rate limiting mode so that the silicon film 45 remains on the bottom of the recess 42. Specifically, the flow rate and / or concentration of the etching gas is controlled so that the silicon film 45 remains only on the bottom. That is, the silicon film 45 and the seed layer 44 are removed by etching from the upper part of the recess 42 and the surface of the wafer W, and the silicon oxide film 43 is exposed, but the etching gas is supplied so that the silicon film 45 remains on the bottom of the recess 42. It is ideal that the silicon film 45 is completely removed from the upper part of the recess 42 and the surface of the wafer W, and the silicon film 45 remains only on the bottom of the recess 42. However, even if some silicon film 45 remains on the upper part of the recess 42 and the surface of the wafer, as long as the surrounding silicon oxide film 43 is exposed, the process is not significantly affected. However, since a silicon film may grow from there, the silicon film 45 and the seed layer 44 are removed as completely as possible except for the upper and lower parts of the bottom of the recess 42.

[0063] In order to set the etching gas supply rate-limiting mode, the temperature is set to, for example, 250° C. or higher.

[0064] 6(d) and 7(d) are diagrams showing an example of the second film forming process. In the second film forming process, DCS gas is supplied from the dichlorosilane gas supply source 23E, and a new silicon film 45a is deposited on the etched silicon film 45. At that time, since the amorphous silicon film 45 exists only on the bottom of the recess 42a, the silicon film 45a is selectively grown upward. That is, the silicon film 45a grows bottom-up and fills the inside of the recess 42. Because of the bottom-up growth, the silicon film 45a can fill the recess 42 without generating a void.

[0065] Thereafter, the second film formation process can be continued to fill the recesses 42 with the silicon film 45a. The silicon film 45a is a polysilicon film. Therefore, the polysilicon film 45a can be selectively grown in the recesses 42 without generating voids.

[0066] After filling all the recesses 42a, the temperature inside the reaction tube 11 is lowered. During the process, a constant film formation temperature is maintained, but after the process is completed, the temperature inside the reaction tube 11 is lowered in order to remove the wafer W. This causes the temperature of the wafer W to drop.

[0067] Subsequently, the lid 16 is lowered to unload the wafer boat 3 from the reaction tube 11, and then the wafers W are removed from the wafer boat 3 by a transfer mechanism (not shown), completing the processing of one batch of wafers W. Since the processing temperature can be kept constant during the processing, the embedding process can be completed in a short time.

[0068] Thus, according to the method for manufacturing a semiconductor device of this embodiment, by performing etching in the etching step so as to leave amorphous silicon film 45 on the bottom of recess 42, a polysilicon film can be selectively grown in recess 42, and recess 42 can be filled without generating voids.

[0069] 8 is a diagram based on a TEM image showing the result of carrying out the method for manufacturing a semiconductor device according to this embodiment. A silicon film 45a is deposited on the bottom of the recess 42, and the silicon oxide film 43 on the upper part of the recess and the surface of the wafer W is exposed. In this way, FIG. 8 shows that this is a method for manufacturing a semiconductor device that allows bottom-up growth.

[0070] 9A and 9B are diagrams showing problems with the conventional semiconductor device manufacturing method. Fig. 9A is a diagram showing the occurrence of fin bending. Fig. 9B is a diagram showing the occurrence of fin bending in more detail.

[0071] As shown in Figures 9(a) and (b), when silicon film 45 is deposited on the sidewall of recess 42 or the side surface of fin 47 and there is a difference in film thickness between the left and right, a phenomenon called fin bending occurs in which fin 47 is bent. This often occurs when annealing is performed after film formation. If silicon film 45 is deposited on the sidewall without selectively growing from the bottom of recess 42, stress is generated due to contraction of silicon film 45 when heated. Here, there is no problem if the deposition amount of silicon film 45 on the left and right sidewalls is equal, but if there is a difference in the deposition amount between the left and right, a difference in stress occurs between the left and right, and the fin 47 is bent due to an imbalance in the stress from the left and right.

[0072] FIG. 10 is a diagram comparing the state of the fins of a semiconductor device manufactured by the conventional DED process described with reference to FIGS. 4 and 5 and the method for manufacturing a semiconductor device according to this embodiment.

[0073] 10, the upper part shows the state of the fin by the conventional DED process, and the lower part shows the state of the fin by the manufacturing method of the semiconductor device according to the present embodiment. Also, the left side shows the state at the time of film formation, and the right side shows the state after annealing.

[0074] 10, there is no significant difference in the degree of warping of the wafer W during film formation between the conventional DED process and the semiconductor device manufacturing method according to this embodiment. However, in the conventional DED process, the silicon film is deposited in an amorphous state, whereas in the semiconductor device manufacturing method according to this embodiment, the silicon film is deposited in a polysilicon state, and therefore is deposited in a state where crystallization has already been completed.

[0075] As can be seen from the right column, after annealing, in the conventional DED process, the wafer W is significantly warped, but in the method for manufacturing a semiconductor device according to this embodiment, the degree of warping is almost the same as during film formation.

[0076] This is because when heated at high temperatures, the silicon film in the conventional DED process is deposited in an amorphous state, and hydrogen escapes, causing the silicon film to shrink significantly. On the other hand, the silicon film manufactured by the semiconductor device manufacturing method according to this embodiment is a polysilicon film, and is crystallized, so the state of the silicon film does not change even when heated, and no warping occurs in the wafer W.

[0077] In this way, according to the semiconductor device manufacturing method and substrate processing apparatus of this embodiment, a high-quality silicon film free from fin bending can be embedded in the recess without generating voids.

[0078] Although the preferred embodiments of the present invention have been described in detail above, the present invention is not limited to the above-described embodiments, and various modifications and substitutions can be made to the above-described embodiments without departing from the scope of the present invention. [Explanation of symbols]

[0079] 11 Reaction tube 19 Heater 21, 31 Gas inlet pipe 23A~23E, 32 Gas supply source 24A~24E, 33 Gas supply mechanism 27 Valve 30 Control section 42 Recess 43 Silicon oxide film 44 Seed Layer 45, 45a-45c Silicone membrane W wafer

Claims

1. supplying a silicon-containing gas to a substrate having a recess on a surface thereof to deposit an amorphous silicon film in the recess; supplying an etching gas to the substrate and etching the amorphous silicon film so as to leave the amorphous silicon film on a bottom of the recess; supplying only dichlorosilane to the substrate and depositing a polysilicon film on the amorphous silicon film.

2. 2. The method for manufacturing a semiconductor device according to claim 1, wherein a surface of the recess is covered with an oxide film, and in the step of etching the amorphous silicon film, the oxide film is exposed except on a bottom of the recess.

3. 3. The method for manufacturing a semiconductor device according to claim 2, wherein the oxide film is a silicon dioxide film.

4. 4. The method for manufacturing a semiconductor device according to claim 1, wherein the step of etching the amorphous silicon film is performed by supplying the etching gas in a supply rate-limited mode so as not to completely etch down to the bottom surface of the recess.

5. 5. The method for manufacturing a semiconductor device according to claim 4, wherein the supply rate-limited mode is performed by controlling at least one of a flow rate and a concentration of the etching gas.

6. 6. The method for manufacturing a semiconductor device according to claim 4, wherein the etching gas is chlorine.

7. 7. The method for manufacturing a semiconductor device according to claim 1, wherein in the step of depositing an amorphous silicon film in the recess, the silicon-containing gas contains monosilane or disilane.

8. 8. The method for manufacturing a semiconductor device according to claim 1, wherein in the step of depositing an amorphous silicon film in the recess, the amorphous silicon film is deposited within a range in the recess so as not to come into contact with an opposing surface and so as to have an opening width that makes it difficult for the etching gas to pass through.

9. 9. The method for manufacturing a semiconductor device according to claim 1, wherein the step of depositing a polysilicon film on the amorphous silicon film is performed until the recess is filled with the polysilicon film.

10. A processing chamber; a substrate holding member provided in the processing chamber and capable of holding a substrate having a recess formed on a surface thereof; a silicon-containing gas supply unit for supplying a silicon-containing gas to the substrate; an etching gas supply unit for supplying an etching gas to the substrate; a dichlorosilane supply unit for supplying dichlorosilane to the substrate; A control unit; having The control unit is the silicon-containing gas supply unit supplies the silicon-containing gas to the substrate to deposit an amorphous silicon film in the recess; the etching gas supply unit supplies the etching gas to the substrate, and etches the amorphous silicon film so as to leave the amorphous silicon film on a bottom of the recess; the dichlorosilane supply unit supplies only the dichlorosilane to the substrate to deposit a polysilicon film on the amorphous silicon film; To carry out Substrate processing equipment.

Images