Laser processing equipment

Abstract

To provide a laser processing device that can suppress noise caused by a scanning optical system.SOLUTION: In a laser processing device, a laser beam emitting unit 20 comprises: a laser oscillator 22 that emits a laser beam 21; a light collector 26 that collects the laser beam 21 emitted from the laser oscillator 22 and then emits the beam to a work-piece 100 held on a holding table 10; and a scan unit 30 including a scan mirror 31, arranged on a light path between the laser oscillator 22 and the light collector 26, which scans the laser beam 21 and guides the beam to the light collector 26. The scan mirror 31 is arranged inside a chamber 33. The chamber 33 has a first window part 34 through which the laser beam 21 emitted from the laser oscillator 22 is transmitted and then guided to the scan mirror 31 and a second window part 35 through which the laser beam 21 scanned by the scan mirror 31 is transmitted to the light collector 26.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present invention relates to a laser processing apparatus. [Background technology]

[0002] As a method for dividing a semiconductor wafer having a functional layer such as a low-k film stacked on its surface into chips, a processing method has been proposed in which the stacked functional layer is removed by irradiating the wafer with a laser beam, and then the wafer is divided by cutting using a cutting blade (see Patent Document 1).

[0003] However, this method requires the laser beam to be irradiated multiple times to form a groove of sufficient width in order to prevent molten material such as debris generated by the irradiation of the laser beam from being sufficiently removed and filling back into the groove, resulting in poor productivity.

[0004] To solve this problem, a laser processing device has been developed that places a scanning optical system that scans a laser beam between the laser oscillator and the collector, and irradiates the laser beam while scanning it, enabling efficient processing while preventing the molten material from filling back in (see Patent Document 2). [Prior art documents] [Patent documents]

[0005] [Patent Document 1] JP 2005-064231 A [Patent Document 2] JP 2016-068149 A Summary of the Invention [Problem to be solved by the invention]

[0006] However, when the above-mentioned scanning optical system is operated at high speed, a loud noise is generated, which makes it difficult for an operator to continue working around the apparatus.

[0007] The present invention has been made in consideration of the above problems, and an object of the present invention is to provide a laser processing apparatus capable of suppressing noise caused by a scanning optical system. [Means for solving the problem]

[0008] In order to solve the above problems and achieve the object, the laser processing apparatus of the present invention is a laser processing apparatus including a holding table for holding a workpiece, a laser beam irradiating unit for irradiating a pulsed laser beam onto the workpiece held on the holding table to perform processing, and a moving unit for relatively moving the holding table and the focal point of the laser beam, the laser beam irradiating unit including a laser oscillator for emitting a laser beam, a condenser for condensing the laser beam emitted from the laser oscillator and irradiating the workpiece held on the holding table, and a scan unit including a scan mirror disposed on an optical path between the laser oscillator and the condenser for scanning the laser beam and guiding it to the condenser, the scan mirror being disposed inside a chamber, and the chamber having a first window portion for transmitting the laser beam emitted from the laser oscillator and guiding it to the scan mirror, and a second window portion for transmitting the laser beam scanned by the scan mirror to the condenser. At the same time, the inside of the chamber is connected to a suction source capable of reducing pressure. It is characterized by:

[0010] The laser processing apparatus of the present invention may further include a cooling unit capable of cooling the inside of the chamber. Effect of the Invention

[0011] The present invention can suppress noise caused by the scanning optical system. [Brief description of the drawings]

[0012] [Figure 1] FIG. 1 is a perspective view showing an example of the configuration of a laser processing device according to an embodiment. [Diagram 2]FIG. 2 is an explanatory diagram illustrating a schematic configuration of a laser beam irradiation unit of the laser processing apparatus shown in FIG. [Diagram 3] FIG. 3 is an explanatory diagram showing an enlarged view of the periphery of a scan unit of a laser beam irradiation unit according to a modified example. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0013] The form (embodiment) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiment. Furthermore, the components described below include those that a person skilled in the art can easily imagine and those that are substantially the same. Furthermore, the configurations described below can be appropriately combined. Furthermore, various omissions, substitutions, or modifications of the configurations can be made without departing from the gist of the present invention.

[0014] [Embodiment] First, the configuration of a laser processing device 1 according to an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view showing an example of the configuration of a laser processing device 1 according to an embodiment. In the following description, the X-axis direction is one direction on a horizontal plane. The Y-axis direction is a direction perpendicular to the X-axis direction on a horizontal plane. The Z-axis direction is a direction perpendicular to the X-axis direction and the Y-axis direction. In the laser processing device 1 of the embodiment, the processing feed direction is the X-axis direction, and the indexing feed direction is the Y-axis direction.

[0015] 1, the laser processing apparatus 1 includes a holding table 10, a laser beam emitting unit 20, a moving unit 40, a display unit 50, and a control unit 60. The laser processing apparatus 1 according to the embodiment is an apparatus that processes the workpiece 100 by irradiating the workpiece 100 held on the holding table 10 with a pulsed laser beam 21 by the laser beam emitting unit 20. The processing of the workpiece 100 by the laser processing apparatus 1 is, for example, groove processing for forming grooves on the surface of the workpiece 100, or cutting processing for cutting the workpiece 100 along a planned division line.

[0016] In the embodiment, the workpiece 100 is a wafer such as a disk-shaped semiconductor device wafer or an optical device wafer, using silicon (Si), sapphire (Al2O3), gallium arsenide (GaAs), silicon carbide (SiC), lithium tantalate (LiTa3), or the like as the substrate 101. Note that the workpiece 100 is not limited to the embodiment, and does not have to be disk-shaped in the present invention.

[0017] The workpiece 100 has division lines 103 set in a grid pattern on a surface 102 of a substrate 101, and devices 104 formed in areas partitioned by the division lines 103. The devices 104 are, for example, integrated circuits such as ICs (Integrated Circuits) or LSIs (Large Scale Integrations), or image sensors such as CCDs (Charge Coupled Devices) or CMOSs ​​(Complementary Metal Oxide Semiconductors). The workpiece 100 is supported within an opening of the frame 110, with, for example, a ring-shaped frame 110 attached thereto and an adhesive tape 111 having a diameter larger than the outer diameter of the workpiece 100 attached to a back surface 105 of the workpiece 100.

[0018] The holding table 10 holds the workpiece 100 on a holding surface 11. The holding surface 11 is a disk shape made of porous ceramics or the like. In the embodiment, the holding surface 11 is a plane parallel to the horizontal direction. The holding surface 11 is connected to a vacuum suction source, for example, via a vacuum suction path. The holding table 10 holds the workpiece 100 placed on the holding surface 11 by suction. A plurality of clamps 12 are arranged around the holding table 10 to clamp a frame 110 that supports the workpiece 100.

[0019] The holding table 10 is rotated around an axis parallel to the Z-axis direction by a rotation unit 13. The rotation unit 13 is supported by an X-axis direction moving plate 14. The rotation unit 13 and the holding table 10 are moved in the X-axis direction by an X-axis direction moving unit 41 of the moving unit 40 via the X-axis direction moving plate 14. The rotation unit 13 and the holding table 10 are moved in the Y-axis direction by a Y-axis direction moving unit 42 of the moving unit 40 via the X-axis direction moving plate 14, the X-axis direction moving unit 41, and the Y-axis direction moving plate 15.

[0020] The laser beam irradiation unit 20 is a unit that irradiates the workpiece 100 held on the holding table 10 with a pulsed laser beam 21 having a predetermined wavelength for processing the workpiece 100. In the embodiment, a part of the laser beam irradiation unit 20 is supported on the tip of a support column 4 whose base end is attached to an erected portion 3 erected from the device body 2. The detailed configuration of the laser beam irradiation unit 20 will be described later.

[0021] The moving unit 40 is a unit that relatively moves the holding table 10 and the focal point (for example, the focal point 211 in FIG. 3) of the laser beam 21 irradiated from the laser beam irradiation unit 20. The moving unit 40 includes an X-axis direction moving unit 41 and a Y-axis direction moving unit 42.

[0022] The X-axis direction moving unit 41 is a unit that relatively moves the holding table 10 and the focal point (for example, focal point 211 in FIG. 3) of the laser beam 21 irradiated from the laser beam irradiation unit 20 in the X-axis direction, which is the processing feed direction. In the embodiment, the X-axis direction moving unit 41 moves the holding table 10 in the X-axis direction. In the embodiment, the X-axis direction moving unit 41 is installed on the apparatus body 2 of the laser processing apparatus 1. The X-axis direction moving unit 41 supports the X-axis direction moving plate 14 so as to be freely movable in the X-axis direction.

[0023] The Y-axis direction moving unit 42 is a unit that relatively moves the holding table 10 and the focal point (for example, focal point 211 in FIG. 3) of the laser beam 21 irradiated from the laser beam irradiation unit 20 in the Y-axis direction, which is the indexing feed direction. In the embodiment, the Y-axis direction moving unit 42 moves the holding table 10 in the Y-axis direction. In the embodiment, the Y-axis direction moving unit 42 is installed on the apparatus body 2 of the laser processing apparatus 1. The Y-axis direction moving unit 42 supports the Y-axis direction moving plate 15 so that it can be freely moved in the Y-axis direction.

[0024] Each of the X-axis direction moving unit 41 and the Y-axis direction moving unit 42 includes, for example, a well-known ball screw, a well-known pulse motor, and a well-known guide rail. The ball screw is provided so as to be rotatable about its axis. The pulse motor rotates the ball screw about its axis. The guide rail of the X-axis direction moving unit 41 is provided so as to be fixed to the Y-axis direction moving plate 15, and supports the X-axis direction moving plate 14 so as to be movably in the X-axis direction. The guide rail of the Y-axis direction moving unit 42 is provided so as to be fixed to the device body 2, and supports the Y-axis direction moving plate 15 so as to be movably in the Y-axis direction.

[0025] The display unit 50 is a display section configured by a liquid crystal display device or the like. The display unit 50 displays, for example, a setting screen for processing conditions, the state of the workpiece 100 captured by an imaging unit (not shown), the state of the processing operation, and the like on the display surface 51. When the display surface 51 of the display unit 50 includes a touch panel, the display unit 50 may include an input unit. The input unit can receive various operations such as an operator registering processing content information. The input unit may be an external input device such as a keyboard. The display unit 50 switches information and images displayed on the display surface 51 by operations from the input unit or the like. The display unit 50 may include an alarm device. The alarm device emits at least one of sound and light to notify the operator of the laser processing device 1 of predetermined alarm information. The alarm device may be an external alarm device such as a speaker or a light-emitting device.

[0026] The control unit 60 controls each of the above-mentioned components of the laser processing apparatus 1, and causes the laser processing apparatus 1 to execute a processing operation on the workpiece 100. The control unit 60 is a computer including an arithmetic processing device as a calculation means, a storage device as a storage means, and an input / output interface device as a communication means. The arithmetic processing device includes, for example, a microprocessor such as a CPU (Central Processing Unit). The storage device has a memory such as a ROM (Read Only Memory) or a RAM (Random Access Memory). The arithmetic processing device performs various calculations based on a predetermined program stored in the storage device. The arithmetic processing device outputs various control signals to each of the above-mentioned components via the input / output interface device according to the calculation results, thereby controlling the laser processing apparatus 1.

[0027] Next, a detailed description will be given of the configuration of the laser beam irradiation unit 20. Fig. 2 is an explanatory diagram for explaining a schematic configuration of the laser beam irradiation unit 20 of the laser processing apparatus 1 shown in Fig. 1. As shown in Fig. 2, the laser beam irradiation unit 20 has a laser oscillator 22, an acousto-optic deflector (AOD) 23, mirrors 24 and 25, a condenser 26, a scan unit 30, and a chamber 33.

[0028] The laser oscillator 22 emits a laser beam 21 having a predetermined wavelength for processing the workpiece 100. In the embodiment, the laser beam 21 irradiated by the laser beam irradiation unit 20 is a laser beam having a wavelength that is absorbed by the workpiece 100.

[0029] When a predetermined high frequency is applied to the acousto-optical element 23, the acousto-optical element 23 deflects the optical axis of the laser beam 21 emitted from the laser oscillator 22 in a predetermined direction (the Y-axis direction in this embodiment) to perform scanning. The acousto-optical element 23 adjusts the angle at which the optical axis of the laser beam 21 is deflected in accordance with the frequency of the applied high frequency. As a result, the laser beam 21 is scanned in the Y-axis direction.

[0030] In this embodiment, the mirrors 24 and 25 are provided on the optical path between the acousto-optical element 23 and the scan unit 30. The mirrors 24 and 25 propagate the laser beam 21, which is emitted from the laser oscillator 22 and polarized by the acousto-optical element 23, to the scan unit 30.

[0031] The laser beam 21 scanned by the scan unit 30 is incident on the condenser 26. The condenser 26 condenses the laser beam 21 emitted from the laser oscillator 22 and irradiates the workpiece 100 held on the holding table 10 with the laser beam. In the embodiment, the condenser 26 is an fθ lens. The condenser 26 is a compound lens made up of a combination of multiple lenses.

[0032] The scan unit 30 is disposed on the optical path between the laser oscillator 22 and the condenser 26, and is a unit that scans the laser beam 21 and guides it to the condenser 26. The scan unit 30 includes a polygon scanner in the embodiment, but may include a resonant scanner in the present invention. The scan unit 30 includes a scan mirror 31 and a scan motor 32.

[0033] The scan mirror 31 is provided so as to be rotatable or swingable about an axis parallel to the indexing feed direction (Y-axis direction). In this embodiment, the scan mirror 31 is provided on each side of a polygonal prism (in this embodiment, an octagonal prism) that rotates about its axis. The axis of the scan mirror 31 is held by a mirror holder (not shown). The front focal point of the condenser 26 is positioned on the scan mirror 31 where the laser beam 21 is incident from the mirror 25 side in the scan unit 30. The scan motor 32 outputs a rotational driving force for rotating or swinging the scan mirror 31 about its axis.

[0034] In the embodiment, the laser beam 21 polarized by the acousto-optical element 23 is incident on the scan unit 30. The scan unit 30 reflects the laser beam 21 by the scan mirror 31 in a direction parallel to the XZ plane toward the condenser 26, and rotates the scan mirror 31 around an axis parallel to the Y-axis direction, thereby scanning the laser beam 21 in the X-axis direction.

[0035] The chamber 33 has the scan mirror 31 disposed therein. The chamber 33 has a first window 34 and a second window 35. The first window 34 and the second window 35 are arranged in a wall separating the interior of the chamber 33 from the surrounding environment so as to transmit the laser beam 21. The first window 34 transmits the laser beam 21 emitted from the laser oscillator 22 and guides it to the scan mirror 31. The second window 35 transmits the laser beam 21 scanned by the scan mirror 31 to the condenser 26.

[0036] [Modifications] Next, the configuration of the laser beam irradiation unit 20-1 according to the modified example will be described with reference to the drawings. Note that, for the laser beam irradiation unit 20-1 according to the modified example, the same components as those of the laser beam irradiation unit 20 according to the embodiment will be denoted by the same reference numerals and will not be described. Figure 3 is an explanatory diagram showing an enlarged view of the periphery of the scan unit 30 of the laser beam irradiation unit 20-1 according to the modified example.

[0037] The laser beam irradiation unit 20-1 of the modified example has a chamber 33-1 instead of the chamber 33, as compared with the laser beam irradiation unit 20 of the embodiment. The chamber 33-1 has a scan mirror 31 disposed therein, similar to the chamber 33 of the embodiment. Moreover, the chamber 33-1 does not have the scan motor 32 of the scan unit 30 disposed therein.

[0038] The chamber 33 has a first window 34 and a second window 35-1. The first window 34 and the second window 35-1 are arranged in a wall separating the inside of the chamber 33 from the surrounding environment so as to transmit the laser beam 21. The first window 34 transmits the laser beam 21 emitted from the laser oscillator 22 and guides it to the scan mirror 31.

[0039] The second window 35-1 of the modified example is provided as a condenser 26 that condenses the laser beam 21 scanned by the scan mirror 31 and irradiates the workpiece 100 held on the holding table 10. The second window 35-1 is fixed to the chamber 33-1. The condenser 26 is arranged in a window shape that transmits the laser beam 21 in a wall that separates the inside of the chamber 33 from the surrounding environment. In other words, the chamber 33-1 of the modified example functions as a lens holder for the condenser 26. As a result, the condenser 26 is unitized with the distance and position relative to the scan mirror 31 fixed.

[0040] Moreover, the chamber 33-1 of the modified example communicates with the suction source 36. The suction source 36 can reduce the pressure inside the chamber 33-1. The chamber 33-1 is depressurized to, for example, about 1 / 10 of atmospheric pressure. By reducing the pressure inside the chamber 33-1, the air resistance when the scan mirror 31 rotates can be reduced, and therefore the generation of noise can be suppressed. Furthermore, by reducing the pressure inside the chamber 33-1, the sound leakage of sound generated inside can be suppressed.

[0041] Moreover, the chamber 33-1 of the modified example further includes a cooling unit 37. The cooling unit 37 is capable of cooling the inside of the chamber 33-1. The cooling unit 37 is disposed, for example, such that the cooling parts sandwich the scan mirror 31 in the axial direction of the scan mirror 31. The cooling unit 37 is connected to a cooling source 38, and cools the inside of the chamber 33-1 with, for example, cooling water supplied from the cooling source 38.

[0042] As described above, the laser processing apparatus according to the embodiment and the modified example can suppress noise by disposing the scan mirror 31, which operates at high speed, inside the chamber 33, 33-1.

[0043] Furthermore, the laser processing apparatus according to the modified example can reduce the pressure inside chamber 33-1 to suppress noise caused by high-speed rotation of scan mirror 31 and also suppress sound leakage. Also, by cooling the inside of chamber 33-1, the thermal load caused by the heat generated by high-speed operation of scan mirror 31 can be reduced, thereby suppressing the occurrence of processing defects such as shifting of the processing position.

[0044] It should be noted that the present invention is not limited to the above-described embodiment, and can be practiced in various modified forms without departing from the gist of the present invention. [Explanation of symbols]

[0045] 1 Laser processing equipment 10 Holding table 20, 20-1 Laser beam irradiation unit 21 Laser Beam 211 Focus point 22 Laser Oscillator 26 Concentrator 30 Scan Unit 31 Scan Mirror 33, 33-1 Chamber 34 First window 35, 35-1 Second window 36 Suction source 37 Cooling Unit 40 Mobile Units 100 Workpiece

Claims

1. A holding table for holding the workpiece; a laser beam irradiation unit that irradiates a workpiece held on the holding table with a focused pulsed laser beam to process the workpiece; a moving unit for relatively moving the holding table and the focal point of the laser beam; A laser processing apparatus comprising: The laser beam irradiation unit includes: A laser oscillator that emits a laser beam; a condenser that condenses the laser beam emitted from the laser oscillator and irradiates the laser beam on the workpiece held on the holding table; a scan unit including a scan mirror disposed on an optical path between the laser oscillator and the condenser, the scan unit scanning the laser beam and guiding the laser beam to the condenser; Equipped with The scan mirror is disposed within the chamber; The chamber comprises: a first window portion that transmits the laser beam emitted from the laser oscillator and guides it to the scan mirror; a second window that transmits the laser beam scanned by the scan mirror to the collector; With The inside of the chamber is connected to a suction source capable of reducing pressure. Laser processing equipment.

2. The apparatus further comprises a cooling unit capable of cooling the inside of the chamber. The laser processing apparatus according to claim 1.

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