Method for crystallizing amorphous silicon film

Abstract

To provide an amorphous silicon film crystallization method and a film formation device that aggregate surface silicon of a deposited amorphous silicon film to form crystal nuclei to crystallize the amorphous silicon.SOLUTION: An amorphous silicon film crystallization method includes the steps of forming an amorphous silicon film on a seed layer formed on a substrate while heating at a first temperature, and heating the amorphous silicon film at a second temperature higher than the first temperature to agglomerate silicon on the surface of the amorphous silicon film to form crystal nuclei on the surface.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The present invention relates to a method for crystallizing an amorphous silicon film. By law Regarding. [Background technology]

[0002] Conventionally, a method for forming a silicon film has been known which includes a step of supplying an aminosilane-based gas onto a surface to be treated to form a seed layer, and a step of supplying a silane-based gas not containing an amino group onto the seed layer to form a silicon film, in which the treatment temperature in the seed layer formation step is in the range of 350°C or lower and room temperature (25°C) or higher (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2015-45082 A Summary of the Invention [Problem to be solved by the invention]

[0004] The present disclosure provides a method and film formation apparatus for crystallizing an amorphous silicon film, which causes silicon in the surface layer of a deposited amorphous silicon film to aggregate to form crystal nuclei, thereby crystallizing the amorphous silicon. [Means for solving the problem]

[0005] In order to achieve the above object, a method for crystallizing an amorphous silicon film according to one aspect of the present invention includes the steps of: forming an amorphous silicon film on a seed layer formed on a substrate while heating the amorphous silicon film at a first temperature; heating the amorphous silicon film at a second temperature higher than the first temperature to aggregate silicon in a surface layer of the amorphous silicon film and form crystal nuclei in the surface layer. The step of forming the crystal nuclei includes desorbing hydrogen from a surface layer of the amorphous silicon film by vacuum evacuation to form a film having a low hydrogen concentration. . Effect of the Invention

[0006] According to the present disclosure, crystallization can be performed from the surface layer of an amorphous silicon film. [Brief description of the drawings]

[0007] [Figure 1] FIG. 1 illustrates a film forming apparatus according to an embodiment of the present disclosure. [Diagram 2] 1A to 1C are diagrams showing an example of a conventional method for crystallizing amorphous silicon and an example of a method for crystallizing amorphous silicon according to an embodiment of the present invention; [Diagram 3] 1A to 1C are diagrams showing an example of a cross-sectional configuration of a method for crystallizing an amorphous silicon film according to an embodiment of the present invention. [Figure 4] 1A to 1C are diagrams illustrating an example of a method for crystallizing an amorphous silicon film according to a first embodiment of the present disclosure. [Diagram 5] 6A to 6C are diagrams illustrating an example of a method for crystallizing an amorphous silicon film according to a second embodiment of the present disclosure. [Figure 6] 1A to 1C are diagrams showing an example in which a method for crystallizing an amorphous silicon film according to an embodiment of the present disclosure is carried out using a film forming apparatus according to the embodiment. [Figure 7] FIG. 2 is a diagram showing the starting points of crystallization in the examples. [Figure 8] FIG. 13 is a diagram showing evaluation results of the crystallization temperature in the method for crystallizing an amorphous silicon film according to the embodiment. [Figure 9] 9 is a diagram comparing the cross-sectional structures of an embodiment relating to the characteristic B and an embodiment relating to the characteristic C shown in FIG. 8. FIG. [Figure 10] FIG. 13 is a diagram showing the results of implementing an embodiment relating to characteristic B by changing the temperature of the high-temperature amorphous silicon film formation process. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0008] Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

[0009] FIG. 1 is a diagram showing a film forming apparatus according to an embodiment of the present disclosure. In this embodiment, an example in which the film forming apparatus is configured as a vertical heat treatment apparatus will be described. The film forming apparatus according to the present disclosure is not limited to a vertical heat treatment apparatus, and can be applied to various film forming apparatuses capable of film formation. Applicable film forming apparatuses include single-wafer type film forming apparatuses and semi-batch type film forming apparatuses. In this embodiment, an example in which the film forming apparatus is configured as a vertical heat treatment apparatus will be described.

[0010] The vertical heat treatment apparatus performs a CVD process to form a crystallized silicon film on a substrate, a wafer W. That is, a film formation process is performed on the wafer W. This film formation process is a process using thermal CVD (Chemical Vapor Deposition).

[0011] The vertical heat treatment apparatus includes a reaction tube 11, which is a substantially cylindrical vacuum vessel with its longitudinal direction oriented vertically. The reaction tube 11 has a double-tube structure consisting of an inner tube 12 and an outer tube 13 with a ceiling that covers the inner tube 12 and is formed to have a certain distance from the inner tube 12. The inner tube 12 and the outer tube 13 are made of a heat-resistant material, for example, quartz. The reaction tube 11 may be called a processing chamber because it forms a closed space in which substrates are processed.

[0012] A cylindrical manifold 14 made of stainless steel (SUS) is disposed below the outer tube 13. The manifold 14 is airtightly connected to the lower end of the outer tube 13. The inner tube 12 protrudes from the inner wall of the manifold 14 and is supported by a support ring 15 formed integrally with the manifold 14.

[0013] A lid 16 is disposed below the manifold 14, and the lid 16 can be raised and lowered between an upper position and a lower position by the boat elevator 10. FIG. 1 shows the lid 16 in the upper position, and in this upper position, the lid 16 closes an opening 17 of the reaction tube 11 below the manifold 14, making the inside of the reaction tube 11 airtight. A wafer boat 3 made of, for example, quartz is placed on the lid 16. The wafer boat 3 is configured to hold a number of wafers W to be processed as substrates horizontally at a predetermined interval in the vertical direction. A heat insulator 18 is provided around the reaction tube 11 so as to surround the reaction tube 11, and a heater 19 made of, for example, a resistance heating element, which is a heating unit, is provided on the inner wall surface of the heat insulator 18, which can heat the inside of the reaction tube 11.

[0014] In the manifold 14, the process gas introduction pipe 21 and the purge gas introduction pipe 31 are inserted below the support ring 15, and the downstream ends of the gas introduction pipes 21 and 31 are arranged so as to supply gas to the wafer W in the inner pipe 12. For example, the upstream side of the process gas introduction pipe 21 branches to form branch paths 22A to 22C, and the upstream ends of the branch paths 22A to 22C are connected to a diisopropylaminosilane (DIPAS) gas supply source 23A, a disilane (Si2H6) gas supply source 23B, and a monoaminosilane (SiH4) gas supply source 23C. Gas supply mechanisms 24A to 24C are respectively provided in the branch paths 22A to 22C. The gas supply mechanisms 24A to 24C each include a valve and a mass flow controller, and are configured so as to be able to control the flow rate of the process gas supplied from the gas supply sources 23A to 23C to the process gas introduction pipe 21.

[0015] The DIPAS gas is a seed layer formation gas for forming a first seed layer on the surface of a silicon oxide film formed on the surface of the wafer W, and the gas supply source 23A and the gas supply mechanism 24A constitute a DIPAS gas supply unit.

[0016] The Si2H6 gas is a seed layer forming gas for forming a second seed layer on the surface of the first seed layer, and the gas supply source 23B and the gas supply mechanism 24B constitute a Si2H6 (disilane) gas supply unit.

[0017] The Si2H6 gas may also be used as a silicon-containing gas to further deposit an amorphous silicon film on the second seed layer, as will be described in detail later.

[0018] The DIPAS gas supply unit and the disilane gas supply unit are gas supply units for forming a seed layer, and therefore may be called a seed layer forming gas supply unit.

[0019] In this embodiment, an example is described in which two types of gases for forming a seed layer are used, but any one of the gases for forming a seed layer may be used. In addition, when forming a film on a wafer W on which a seed layer has already been formed, the seed layer forming gas supply unit may not be required. Furthermore, even when the seed layer forming gas supply unit is used, gases other than DIPAS gas and Si2H6 gas may be used. In this way, the DIPAS gas supply unit and disilane gas supply unit, which are given as examples, and the seed layer forming gas supply unit may be provided as necessary.

[0020] The SiH4 gas is a deposition gas for depositing an amorphous silicon (Si) film on the wafer W on which a sheet seed layer is formed, and the gas supply source 23C and the gas supply mechanism 24C constitute a silane gas supply unit. Note that since the silane gas is a gas used for depositing an amorphous silicon film, the silane gas supply unit may be called a deposition gas supply unit.

[0021] The upstream side of the purge gas introduction pipe 31 is connected to a supply source 32 of nitrogen (N2) gas, which is a purge gas. A gas supply mechanism 33 is provided in the purge gas introduction pipe 31. The gas supply mechanism 33 is configured similarly to the gas supply mechanisms 24A to 24E, and controls the flow rate of the purge gas to the downstream side of the introduction pipe 31.

[0022] Further, the manifold 14 has an exhaust port 25 opening on a side surface above the support ring 15, and exhaust gas generated in the inner tube 12 is exhausted to the exhaust port 25 through a space formed between the inner tube 12 and the outer tube 13. An exhaust pipe 26 is airtightly connected to the exhaust port 25. A valve 27 and a vacuum pump 28 are installed in the exhaust pipe 26 from its upstream side in this order. By adjusting the opening of the valve 27, the pressure inside the reaction tube 11 is controlled to a desired pressure.

[0023] The vertical heat treatment apparatus is provided with a control unit 30 configured by a computer, and the control unit 30 is provided with a program. This program is structured with a group of steps so that a series of processing operations described below can be performed on the wafer W by outputting control signals to each part of the vertical heat treatment apparatus 1 to control the operation of each part. Specifically, control signals are output so that the boat elevator 10 raises and lowers the lid 16, the output of the heater 19 (i.e., the temperature of the wafer W), the opening of the valve 27, the supply flow rate of each gas into the reaction tube 11 by the gas supply mechanisms 24A to 24C and 33, and the like are controlled. This program is stored in the control unit 30 in a state of being stored in a storage medium such as a hard disk, a flexible disk, a compact disk, a magnet optical disk (MO), or a memory card.

[0024] Although details will be described later, the control unit 30 also performs control so that the heater 19 is set to different temperatures when forming the amorphous silicon film and when forming the crystal nuclei.

[0025] FIG. 2 is a diagram showing an example of a conventional method for crystallizing amorphous silicon and an example of a method for crystallizing amorphous silicon according to this embodiment.

[0026] Fig. 2(a) is a diagram showing a conventional method for crystallizing an amorphous silicon film, and Fig. 2(b) is a diagram showing an example of an amorphous silicon film 60 formed by the method for forming an amorphous silicon film according to this embodiment. As shown in Fig. 2(a), in the conventional crystallization of an amorphous silicon film, a crystal nucleus is formed from the bottom surface of the underlying SiO2, and then the crystal grows based on the crystal nucleus on the bottom surface (crystal growth from the bottom surface toward the surface).

[0027] On the other hand, as shown in Fig. 2(b), in the method for forming an amorphous silicon film according to this embodiment, crystal nuclei 61 are formed on the surface side, and the crystal nuclei 61 grow from the surface to the bottom side. That is, as shown in Fig. 2(b), the amorphous silicon film 60 formed by the method for forming an amorphous silicon film according to this embodiment has crystal nuclei 61 in the surface layer. That is, aggregation occurs in the surface layer of the amorphous silicon film 60, and the crystal nuclei 61 are formed. Then, crystallization progresses from the surface layer where the crystal nuclei 61 exist toward the bottom.

[0028] 2(c) is a diagram showing an amorphous silicon film formed by a conventional method for crystallizing an amorphous silicon film. A seed layer 50 is formed on a silicon oxide film 40, and an amorphous silicon film 160 is formed on the seed layer 50. Then, by heating in this state, crystal nuclei 161 are formed near the silicon oxide film 40.

[0029] 3 is a diagram showing an example of a cross-sectional configuration of the method for crystallizing an amorphous silicon film according to the present embodiment. As shown in FIG. 3, a silicon oxide film 40 and a seed layer 50 are formed on a wafer W, and an amorphous silicon film 60 is formed on the seed layer 50. A high-temperature amorphous silicon film 65 is formed on the surface layer of the amorphous silicon film 60. The high-temperature amorphous silicon film 65 is an amorphous silicon film formed in a temperature range higher than that of the amorphous silicon film 60, and has a different film quality from the amorphous silicon film 60 on the seed layer 50, and is an amorphous silicon film in which crystal nuclei are formed.

[0030] In this manner, in the method for crystallizing an amorphous silicon film according to this embodiment, a high-temperature amorphous silicon film 65 having a different film quality is formed on the surface layer of the amorphous silicon film 60, and crystal nuclei are formed in the surface layer and crystals grow from the surface layer.

[0031] FIG. 4 is a diagram showing an example of a method for crystallizing an amorphous silicon film according to the first embodiment of the present disclosure.

[0032] FIG. 4(a) is a diagram showing an example of a substrate introduction step, illustrating a cross-sectional configuration of a wafer W in an initial state.

[0033] First, the wafer W shown in FIG. 4(a) is transferred to the wafer boat 3 by a transfer mechanism (not shown) and held thereon. Then, the wafer boat 3 is placed on the lid 16 located at the lowered position. Then, the lid 16 is raised to the raised position, the wafer boat 3 is carried into the reaction tube 11, and the opening 17 of the reaction tube 11 is closed by the lid 16, making the reaction tube 11 airtight. Next, a purge gas is supplied into the reaction tube 11, and the reaction tube 11 is evacuated to a vacuum atmosphere of a predetermined pressure, and the wafer W is heated by the heater 19 to a predetermined temperature. The temperature at this time is set to a predetermined film formation temperature suitable for depositing a silicon film on the wafer W. The temperature of the heater 19 may be controlled by the control unit 30.

[0034] FIG. 4(b) illustrates an example of a seed layer forming step.

[0035] After the wafer W is heated, the supply of the purge gas is stopped, and the DIPAS gas is supplied into the reaction tube 11. The DIPAS gas is deposited on the surface of the silicon oxide film 40 of the wafer W, and a seed layer 50 is formed so as to cover the silicon oxide film 40 (not shown).

[0036] Thereafter, the supply of DIPAS gas is stopped, a purge gas is supplied into the reaction tube 11, the DIPAS gas is purged from the reaction tube 11, and then Si2H6 gas is supplied into the reaction tube 11. This Si2H6 gas is deposited on the first seed layer, and a second seed layer is formed so as to cover the first seed layer. Thereafter, the supply of Si2H6 gas is stopped, a purge gas is supplied into the reaction tube 11, and the Si2H6 gas is purged from the reaction tube 11.

[0037] FIG. 4(c) shows an example of a film forming process.

[0038] After the seed layer formation process, the supply of the purge gas is stopped, and SiH4 gas is supplied into the reaction tube 11. As shown in FIG. 4(b), the SiH4 gas is deposited on the second seed layer, and an amorphous silicon film 60 is formed on the entire surface of the wafer W so as to cover the second seed layer. Then, the deposition of the SiH4 gas continues, and the amorphous silicon film 60 grows. That is, the thickness of the amorphous silicon film 60 increases, and it functions as an amorphous silicon bulk layer.

[0039] The amorphous silicon film 60 is formed within a temperature range of 440 to 530° C. when, for example, SiH4 gas is used as the film forming gas.

[0040] Note that Si2H6 gas may be used instead of SiH2 gas. In this case, the film formation process may be performed continuously from the seed layer formation process. Note that even when Si2H6 gas is used as the film formation gas, the amorphous silicon film 60 is formed within a temperature range of 440 to 530°C.

[0041] In the film formation process, an amorphous silicon film 60 is formed on a seed layer 50 formed on the surface of the wafer W.

[0042] After the supply of the SiH4 gas or Si2H6 gas is stopped, a purge gas is supplied into the reaction tube 11, and the SiH4 gas or Si2H6 gas is purged from the reaction tube 11.

[0043] Fig. 4(d) is a diagram showing an example of a high-temperature amorphous silicon film formation process. As shown in Fig. 4(d), in the high-temperature amorphous silicon film formation process, an amorphous silicon film is formed in a high-temperature zone. The high-temperature zone is in the range of 550°C or more and less than 600°C, and preferably in the range of 560°C or more and 580°C or less.

[0044] By forming the amorphous silicon film 65 in such a high temperature zone, it is possible to form the amorphous silicon film 65 containing crystal nuclei formed by the aggregation of the amorphous silicon film 65 .

[0045] The temperature settings for the film forming process and the high-temperature amorphous silicon film forming process may be set by the control unit 30 controlling the heater 19 .

[0046] Although not shown, thereafter, the amorphous silicon films 60, 65 are annealed in the range of 600° C. or higher and lower than 700° C., thereby promoting crystal growth from the crystal nuclei of the high-temperature amorphous silicon film 65, and crystallizing the high-temperature amorphous silicon film 65 and the amorphous silicon film 60.

[0047] The annealing may be performed in a vertical mold heat treatment furnace, or the wafer W may be transferred to an external annealing device.

[0048] FIG. 5 is a diagram showing an example of a method for crystallizing an amorphous silicon film according to the second embodiment of the present disclosure.

[0049] FIG. 5(a) is a diagram showing an example of a wafer introduction step, which is the same step as FIG. 4(a), and therefore its description will be omitted.

[0050] Fig. 5(b) is a diagram showing an example of a seed layer formation step, which is the same step as Fig. 4(b) and therefore will not be described.

[0051] Fig. 5(c) is a diagram showing an example of a film forming process. Fig. 5(c) is the same process as Fig. 4(c), so the description thereof will be omitted.

[0052] Fig. 5(d) is a diagram showing an example of a heat load application step. In the heat load application step, a heat load is applied to the surface layer of the amorphous silicon film 60 formed in the film formation process. Specifically, an inert gas such as nitrogen is supplied to the surface layer of the amorphous silicon film 60. The temperature is set to a high temperature zone, in the range of 550°C or more and less than 600°C, as in the high-temperature amorphous silicon film formation step of Fig. 4(d). Also, it is preferably set to a temperature range of 560°C or more and 580°C or less.

[0053] Although no silane gas is supplied, by setting the temperature in the same high temperature zone as in the high-temperature amorphous silane film formation process, the surface layer of the amorphous silicon film 60 aggregates and crystal nuclei 61 are formed. That is, a high-temperature amorphous silicon film 62 is formed. The number of crystal nuclei generated at this time is often smaller than in the high-temperature amorphous silane film formation process of Fig. 4(d), but since the crystal nuclei are formed in the surface layer, subsequent annealing makes it possible to crystallize from the surface layer.

[0054] In this way, by exposing the film to an inert gas atmosphere and heating it, crystal nuclei can be formed in the surface layer of the amorphous silicon film, and crystallization from the surface layer can be achieved.

[0055] Annealing may be performed thereafter, as described in the first embodiment.

[0056] Also, the temperature setting may be performed by the control unit 30 controlling the heater 19, similarly to the first embodiment.

[0057] Next, a method for crystallizing an amorphous silicon film according to a third embodiment will be described. In the first and second embodiments, silicon agglomerates are generated on the surface layer of the amorphous silicon film 60 by the high-temperature amorphous silicon film formation process, and crystal nuclei 61 are formed.

[0058] In the third embodiment, the reaction tube 11 is evacuated at a high temperature to cause agglomeration in the surface layer of the amorphous silicon film 60, thereby forming crystal nuclei 61. That is, hydrogen is desorbed from the surface layer of the amorphous silicon film 60 by evacuation, and a film with a low hydrogen concentration is formed, causing agglomeration in the surface layer, thereby forming crystal nuclei 61. In this way, crystal nuclei 61 may be generated in the surface layer of the amorphous silicon film 60 by evacuation as well as by supplying silane gas or nitrogen gas.

[0059] [Example] FIG. 6 is a diagram showing an example in which the method for crystallizing an amorphous silicon film according to an embodiment of the present disclosure is carried out using the film forming apparatus according to the present embodiment.

[0060] As shown in Fig. 6, when the method for crystallizing an amorphous silicon film according to this embodiment was carried out, silicon agglomeration was confirmed in the surface layer. This example is a result of carrying out the method for crystallizing an amorphous silicon film according to the first embodiment.

[0061] The temperature in the film formation step was 450° C. or higher and 500° C. or lower, and the temperature in the high-temperature amorphous silicon film formation step was 560° C. or higher and 580° C. or lower.

[0062] When crystal nuclei are formed on the surface in this manner, crystallization proceeds from the surface layer toward the bottom when annealed, and the entire amorphous silicon film 60 can be crystallized.

[0063] Fig. 7 is a diagram showing the starting points of crystallization in the example. As shown in Fig. 7, most of the starting points are in the surface layer.

[0064] FIG. 8 is a diagram showing the evaluation results of the crystallization temperature of the amorphous silicon film crystallization method according to the embodiment. FIG. 8 shows an example of comparison between the results of annealing an amorphous silicon film formed by a conventional amorphous silicon film formation method at 580° C., the results of the amorphous silicon film crystallization method according to the first embodiment, and the results of the amorphous silicon film crystallization method according to the second embodiment. In FIG. 8, the horizontal axis shows the annealing time, and the vertical axis shows the k value. The k value is a value indicating the degree of crystallization. In the case of silicon, a k value of 0.05 or less indicates crystallization.

[0065] In Figure 8, characteristic A shows the crystallization time characteristics when an amorphous silicon film is formed at 450°C to 500°C and then annealed at 580°C. Characteristic B shows the crystallization time characteristics when an amorphous silicon film is formed at 450°C to 500°C and then capped with an amorphous silicon film at 560°C to 580°C. Characteristic C shows the crystallization time characteristics when an amorphous silicon film is formed at 450°C to 500°C and then exposed to nitrogen gas at 560°C to 580°C.

[0066] As shown in Fig. 8, the characteristics B and C according to this embodiment were crystallized in about 6 hours. On the other hand, the characteristic A according to the comparative example took 24 hours to crystallize. In other words, the characteristics B and C according to this embodiment were about 18 hours shorter than the characteristic A according to the comparative example.

[0067] There is no significant difference between characteristics B and C, and both crystallize very quickly, but characteristic B has a shorter incubation time for crystal nucleation and is slightly better than characteristic C.

[0068] In this way, it was shown that the method for crystallizing an amorphous silicon film according to this embodiment allows crystallization in an extremely short time compared to the conventional method for crystallizing an amorphous silicon film according to the comparative example.

[0069] FIG. 9 is a diagram comparing the cross-sectional structures of an example relating to the characteristic B shown in FIG. 8 with an example relating to the characteristic C. FIG. 9(a) is an example relating to the characteristic B, in which an amorphous silicon film is formed at 450° C. or more and 500° C. or less, and then an amorphous silicon film is formed at 560° C. or more and 580° C. or less. FIG. 9(b) is an example relating to the characteristic B, in which an amorphous silicon film is formed at 450° C. or more and 500° C. or less, and then exposed to a nitrogen atmosphere at 560° C. or more and 580° C. or less. In the cross-sectional structures photographed with a transmission electron microscope (TEM), crystal nuclei are formed on the surface layer in both cases. The example relating to the characteristic B in FIG. 9(a) has a larger number of crystal nuclei formed, and it can be said that the probability of silicon agglomeration is higher.

[0070] However, good cross-sectional structures were obtained in both cases, and it is clear that crystallization had occurred from the surface layer.

[0071] FIG. 10 is a diagram showing the results of implementing the example relating to characteristic B by changing the temperature of the high-temperature amorphous silicon film formation process.

[0072] FIG. 10(a) shows an example in which the high-temperature amorphous silicon film formation process was carried out at a temperature of 550°C, FIG. 10(b) at 560°C, FIG. 10(c) at 570°C, and FIG. 10(d) at 580°C.

[0073] In the case of Fig. 10(a), no silicon agglomeration occurs, but in Fig. 10(b) to (d), it occurs. Furthermore, the number of silicon agglomerates increases as the temperature increases to 560°C, 570°C, and 580°C. Thus, it was shown that when performing a high-temperature amorphous silicon film formation process using monosilane, it is preferable to set the temperature in the range of 560°C to 580°C.

[0074] The high-temperature amorphous silicon film formation process can be performed with various silane gases such as disilane and trisilane, and not all silanes are optimally heated to 560° C. to 580° C., and the temperature is not necessarily limited to this range.

[0075] As described above, according to the method for crystallizing an amorphous silicon film and the film formation apparatus of this embodiment, silicon agglomerates are generated on the surface side to form crystal nuclei, and crystallization can proceed from the surface side toward the bottom side.

[0076] Although the preferred embodiments and examples of the present disclosure have been described in detail above, the present disclosure is not limited to the above-described embodiments and examples, and various modifications and substitutions can be made to the above-described embodiments and examples without departing from the scope of the present disclosure. [Explanation of symbols]

[0077] 11 Reaction tube 19 Heater 21, 31 Gas inlet pipe 23A~23C, 32 Gas supply source 24A~24C, 33 Gas supply mechanism 27 Valve 30 Control section 40 Silicon oxide film 50 Seed Layer 60, 62, 65 Amorphous silicon film 61 Crystal Nucleus W wafer

Claims

1. forming an amorphous silicon film on a seed layer formed on a substrate while heating the seed layer at a first temperature; and heating the amorphous silicon film at a second temperature higher than the first temperature to aggregate silicon in a surface layer of the amorphous silicon film and form crystal nuclei in the surface layer. The step of forming the crystal nuclei includes desorbing hydrogen from a surface layer of the amorphous silicon film by evacuation to form a film having a low hydrogen concentration. A method for crystallizing an amorphous silicon film.

2. The first temperature is in the range of 440° C. or more and less than 530° C.

2. The method for crystallizing an amorphous silicon film according to claim 1, wherein the second temperature is within a range of 550° C. or more and less than 600° C.

3. 3. The method for crystallizing an amorphous silicon film according to claim 2, wherein the step of forming the crystal nuclei is carried out at a temperature of 560° C. or more and 580° C. or less.

4. 4. The method for crystallizing an amorphous silicon film according to claim 1, further comprising the step of forming the seed layer made of silicon on the substrate before the step of forming the amorphous silicon film.

5. 5. The method for crystallizing an amorphous silicon film according to claim 1, further comprising the step of annealing the amorphous silicon film at a third temperature higher than the second temperature after the step of forming the crystal nuclei.

6. 6. The method for crystallizing an amorphous silicon film according to claim 5, wherein the third temperature is a temperature of 650° C. or more and 750° C. or less.

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