Heating system for powder sintering

Abstract

To provide a powder sintering heating system which can reduce a process time and improve a yield.SOLUTION: A system comprises an enclosure, a heating device, an atmosphere control device, and a process pressure control device. The heating device is arranged at the inside or the outside of the enclosure and is used for heating a member to be heated for removing impurities from the member to be heated. The atmosphere control device is used for feeding reactive gases such as hydrogen, oxygen, water and plasma, and these are reacted with impurities in an element to be heated to cause a phase change or a chemical change for vaporizing, oxidizing, carbonizing, or decomposing the impurities, therefore accelerate the removal of the impurities and remarkably reduce a process temperature. The process pressure control device is used for controlling a process pressure in the enclosure and controls the process pressure to 800 to 10-2 Torr using an inert gas (such as nitrogen and argon). Simultaneously, it can arrange various gas partial pressures for promoting a reaction process and reducing a process time.SELECTED DRAWING: Figure 5

Description

[Technical field]

[0001] The present invention relates to a heating device, and more particularly to a heating system for powder sintering that can control the atmosphere and process pressure. [Background technology]

[0002] In the manufacture of electronic ceramics and other parts, heating is sometimes performed to remove impurities contained in the parts. Conventionally, heating was performed at atmospheric pressure, but the parts to be heated contain complex impurities with varying boiling points, so if the parts are not heated slowly, layer cracking and peeling will occur, so it is necessary to heat them slowly and the yield will decrease. Summary of the Invention [Problem to be solved by the invention]

[0003] The technical problem that the present invention aims to solve is, in view of the shortcomings of the conventional technology, to provide a heating system for powder sintering that can control the atmosphere and process pressure, shorten the process time, and improve the yield. [Means for solving the problem]

[0004] In order to solve the above technical problems, the present invention discloses a heating system for powder sintering capable of controlling the atmosphere and process pressure. The heating system for powder sintering includes a housing having a chamber for accommodating a heated element, a heating device provided inside or outside the housing for heating the heated element to remove impurities in the heated element, an atmosphere control device connected to the housing for transporting a reaction gas to the chamber, and a process pressure control device connected to the housing for controlling the process pressure in the chamber.

[0005] Preferably, the housing has an open bottom side, the housing is provided on a cooling sheet, the cooling sheet is a hollow sheet, the top side and the bottom side of the cooling sheet are open, the housing is provided on the top side of the cooling sheet, the cooling sheet is provided with a water cooling line, the bottom side of the cooling sheet can be closed by a bottom cover, the bottom cover is connected to at least one bottom cover driving member that drives the bottom cover up and down, and the bottom cover can be positioned at a position away from the bottom side of the cooling sheet.

[0006] Preferably, the heating device is provided on a lift sheet, the lift sheet being connected to at least one lift drive member, the lift drive member being capable of driving the lift sheet up and down so that the lift sheet and the heating device are selectively positioned in the housing.

[0007] Preferably, the process pressure control device uses an inert gas to control the process pressure to 800 to 10 -2 Adjust to Torr.

[0008] Preferably, a work platform for holding the heated element is disposed within the chamber, the work platform being connected to at least one work platform drive member capable of driving the work platform up and down. Effect of the Invention

[0009] The present invention provides a heating system for powder sintering, which includes a housing, a heating device, an atmosphere control device, and a process pressure control device, and can control the atmosphere and process pressure. The heating device is disposed inside or outside the housing and can be used to heat the heated element to remove impurities from the heated element. The atmosphere control device is connected to the housing and can be used to transport reactive gas into the housing. The process pressure control device is connected to the housing and can be used to control the process pressure in the housing. The atmosphere control device of the present invention can transport reactive gas into the housing, and the process pressure control device can control the process pressure in the housing, and can enhance the ability to draw out impurities, thereby providing beneficial effects of shortening the process time and improving the yield.

[0010] In order to make the features and technical contents of the present invention more readily apparent, reference is made to the following detailed description of the present invention and the accompanying drawings, which are provided for reference and explanation only and are not intended to limit the scope of the present invention. [Brief description of the drawings]

[0011] [Figure 1] FIG. 1 is a three-dimensional diagram of an invention of a powder sintering heating apparatus capable of controlling the atmosphere and process pressure. [Diagram 2] FIG. 1 is a front view showing an invention of a powder sintering heating apparatus capable of controlling the atmosphere and process pressure. [Diagram 3] FIG. 1 is a right side view showing an invention of a powder sintering heating apparatus capable of controlling the atmosphere and process pressure. [Figure 4] FIG. 1 is an overhead view showing an invention of a powder sintering heating apparatus capable of controlling the atmosphere and process pressure. [Diagram 5] This shows a VV cross section of Figure 4. [Figure 6] FIG. 1 is a block diagram of the present invention of a powder sintering heating apparatus capable of controlling the atmosphere and process pressure. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0012] The specific embodiments shown below are the disclosed embodiments of the present invention. The present invention can be implemented or applied by other specific embodiments, and various details in this specification can be modified and changed according to different views and applications without departing from the spirit of the present invention. In addition, it should be noted that the accompanying drawings of the present invention are for the purpose of simple explanation and are not intended to depict actual dimensions. In the following embodiments, the relevant technical aspects of the present invention will be described in more detail, but this disclosure is not intended to limit the protection scope of the present invention.

[0013] [Embodiment] 1 to 6, the present invention provides a heating system for powder sintering, which includes a housing 1, a heating device 2, an atmosphere control device 3, and a process pressure control device 4, and is capable of controlling the atmosphere and process pressure.

[0014] Please refer to Figs. 2 to 5. The housing 1 may be a quartz tube or the like, and the housing 1 is a heat-resistant closed element having a chamber 11 (shown in Fig. 5) for accommodating a heated element such as an electroceramic, for example, a ceramic capacitor. The housing 1 may be provided with an open bottom side, and the housing 1 may be placed on a cooling sheet 5. The cooling sheet 5 is a hollow sheet, and the top and bottom sides of the cooling sheet 5 are open. The housing 1 may be placed on the top side of the cooling sheet 5. The cooling sheet 5 is made of a metal material with good thermal conductivity such as aluminum, and the cooling sheet 5 may be provided with a water cooling line 6 that can transport and circulate cooling water to assist in cooling the temperature.

[0015] The bottom side of the cooling sheet 5 can be closed by a bottom cover 7 (shown in FIG. 5 ). In this embodiment, the bottom cover 7 may be connected to at least one bottom cover drive device 8, which may be an air cylinder or the like. The bottom cover drive device 8 can drive the bottom cover 7 up and down to cover the bottom side of the cooling sheet 5 to close the bottom of the cooling sheet 5, or to remove it from the bottom of the cooling sheet 5 to open the bottom of the cooling sheet 5.

[0016] The heating device 2 is disposed inside or outside the chamber 1. The structure of the heating device 2 is not particularly limited, and it can be various heating devices, for example, an infrared heater. In addition, by combining it with the housing 1, which is a quartz tube, a better heating effect can be obtained. The heating device 2 can be used to heat the heated element in order to remove impurities contained in the heated element. The impurities here are usually organic solvents to be removed.

[0017] The heating temperature of the heating device 2 may be, for example, 200°C to 500°C, and may be 200°C, 210°C, 220°C, 230°C, 240°C, 250°C, 300°C, 350°C, 400°C, 450°C, or 500°C. Preferably, the heating temperature of the heating device 2 is 300°C to 500°C, which can more effectively remove impurities to be heated. The heating temperature of the heating device 2 is not particularly limited, and can be increased or decreased according to actual needs.

[0018] In this embodiment, the heating device 2 is installed on a lift-up sheet 9, and the lift-up sheet 9 is connected to at least one lift-up drive device 10 such as a pneumatic cylinder. The lift-up sheet 9 and the heating device 2 can be selectively installed in the housing 1 by driving the lift-up sheet 9 up and down with the lift-up drive device 10, and the lift-up sheet 9 and the heating device 2 can be removed from the housing 1 to quickly cool the housing 1.

[0019] Atmosphere control device 3 connected to housing 1 (as shown in FIG. 6), atmosphere control device 3 is used to transport reactive gas into chamber 11, reactive gas can be, for example, hydrogen, oxygen, water or plasma, etc., not limited to a certain type. Reactive gas can react with impurities in heated element, resulting in phase change or chemical change, thus promoting gasification, oxidation, carbonization, etc. of impurities to be removed, and the temperature of the process can be greatly reduced. Reactive gas can be used to react with organic solvent, in this embodiment, reactive gas is oxygen, which can be used to oxidize organic solvent.

[0020] A process pressure control device 4 is connected to the housing 1 (see FIG. 6). The process pressure control device 4 controls the process pressure in the chamber 11 to 800 to 1000 s by using an inert gas (nitrogen, argon, etc.). -2 The pressure can be adjusted to 800 Torr, 700 Torr, 600 Torr, 500 Torr, 400 Torr, 300 Torr, 200 Torr, 100 Torr, 50 Torr, 10 Torr, 10 Torr, 10 -1 Torr or 10 -2 Torr. At the same time, various gas partial pressures can be adjusted to promote the reaction and shorten the process time. The process pressure controller 4 can control the decrease in the process pressure, and the lower the pressure, the lower the boiling point and the shorter the process time. Preferably, the process pressure controller 4 can be used to control the process pressure in the chamber 11 to be negative, for example, slightly negative, in order to promote the decomposition and disintegration of organic substances (organic solvents) and to promote the exhaust of gas from the heated heating element so that no gas remains.

[0021] The chamber 11 may also include a working platform 20 (as shown in FIG. 5) used to place the heated element. The working platform 20 is connected to at least one working platform driving member 30, which may be a motor screw or the like, and the working platform driving member 30 can drive the working platform 20 to rise and fall, so that the heated element can be driven by the working platform 20 to move quickly. The working platform driving member 30 can drive the working platform 20 up and down, so that the heated element can be driven by the working platform 20 to move quickly out of the heating zone for cooling. In this embodiment, the heating system also includes a frame 40 for supporting and fixing the components of the housing 1 and the heating device 2.

[0022] [Beneficial Effects of the Embodiments] The present invention has a beneficial effect of providing a heating system for powder sintering, which includes a housing, a heating device, an atmosphere control device, and a process pressure control device, and can control the atmosphere and process pressure. The heating device is disposed inside or outside the housing and can be used to heat the heated element to remove impurities from the heated element. The atmosphere control device is connected to the housing and can be used to transport reactive gas into the housing. The process pressure adjustment device is connected to the housing and can be used to control the process pressure in the housing. The atmosphere control device of the present invention can transport reactive gas into the housing, and the process pressure control device can control the process pressure in the housing, and can enhance the ability to draw out impurities, thereby shortening the process time and improving the yield.

[0023] The contents disclosed above are merely preferred embodiments of the present invention, and do not limit the scope of the claims of the present invention. Therefore, all equivalent technical modifications made based on the contents of the specification and accompanying drawings of the present invention are intended to be included in the scope of the claims of the present invention. [Explanation of symbols]

[0024] 1: Housing 11: Chamber 2: Heating device 3: Atmosphere control device 4: Process pressure control device 5: Cooling sheet 6: Water cooling line 7: Bottom cover 8: Bottom cover drive unit 9: Liftable seat 10: Lifting drive device 20:Work platform 30: Working platform driving member 40: Frame

Claims

1. A heating system for powder sintering that controls the atmosphere and process pressure, comprising: A housing having a chamber capable of accommodating an object to be heated; A heating device provided inside or outside the housing, which heats the object to be heated in order to remove impurities from the object to be heated; an atmospheric control device connected to the enclosure for delivering a reactive gas to the chamber; a process pressure control device connected to the housing and configured to control a process pressure in the chamber; Equipped with The heating system for powder sintering, characterized in that the housing includes a platform for holding a heated element, the platform being connected to at least one platform drive member capable of driving the raising and lowering of the platform.

2. The bottom side of the housing is open, the housing is placed on a cooling sheet, the cooling sheet is a hollow sheet, the top side and the bottom side of the cooling sheet are open, the housing is placed on the top side of the cooling sheet, the cooling sheet has a water cooling line, the bottom side of the cooling sheet can be closed by a bottom cover, the bottom cover is connected to at least one cover driving device, the cover driving device drives the bottom cover up and down to place and remove it from the bottom side of the cooling sheet.

2. The heating system for powder sintering according to claim 1.

3. the heating device is provided on a lift sheet, the lift sheet is connected to at least one lift drive device, and the lift drive device drives the lift sheet up and down so that the lift sheet and the heating device are selectively disposed within the housing; 2. The heating system for powder sintering according to claim 1.

4. The reactive gas includes at least one of hydrogen, oxygen, water, and plasma.

2. The heating system for powder sintering according to claim 1.

5. The process pressure control device uses an inert gas and controls the process pressure to 800 to 10 －２ Adjust to Torr.

2. The heating system for powder sintering according to claim 1.

6. The heating system for powder sintering according to claim 1 , wherein the heated body is an electroceramic.

7. The heating system for powder sintering according to claim 1 , wherein the housing is a quartz tube and the heating device is an infrared heater.

8. the impurities are an organic solvent in the heated body, the reactive gas is usable for reacting with the organic solvent, and the process pressure control device controls the process pressure in the chamber to a negative pressure to promote exhaust of the gas from the heated body; 2. The heating system for powder sintering according to claim 1.

9. The heating system for powder sintering according to claim 8, wherein the heating device has a heating temperature of 300 to 500°C.

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