Protective member attachment device and protective member attachment method

Abstract

To enable a sticking of a sheet without glue layer to a substrate while suppressing generating wrinkles.SOLUTION: A protective member sticking device 1 comprises: a decompression chamber 10 having an upper casing 11 and a lower casing 12; a support table 20 which is provided to an inner part of the lower casing 12 and on which a substrate 200 is mounted; a sheet fixing part 30 that fixes a sheet 210 so as to separate an internal space 17 of the decompression chamber 10 into a first space 171 and a second space 172; a heating unit 40 that heats the sheet 210 to be softened; and a control part 50. The sheet fixing part 30 includes: an outer peripheral fixing part 32 fixing an outer periphery 212 of the sheet 210; and a temporal fixing part 31 that temporally fixes the central part 211 of the sheet 210 via a substrate 200 mounted on the support table 20 and a gap. The temporal fixing part 31 is a support plate 34 having a resin layer 33 holding the sheet 210 with a tack force on the lower surface, and an air hole 35 is formed in the resin layer 33 and the support plate 34.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a protective member application device and a protective member application method. [Background technology]

[0002] Semiconductor devices and various device chips used in various electronic devices are manufactured by thinning the substrate on which the device is formed with a grinding wheel and dividing it along the planned dividing lines. When grinding or dividing, the device is generally processed with protective tape attached to protect it and to prevent the chip from falling apart.

[0003] Protective tape is attached to the substrate by an adhesive layer formed on the surface to which it is attached, but when it is peeled off, residue remains on the surface of the substrate, which may adversely affect the device. In particular, for semiconductor wafers equipped with bumps that serve as electrodes, protective tape with a thick adhesive layer that absorbs the unevenness of the bumps is used, which makes it easy for adhesive residue to remain.

[0004] Therefore, a processing method has been devised in which a sheet without an adhesive layer is softened by heat while being pressed to adhere to a substrate (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0005] [Patent Document 1] JP 2019-201016 A Summary of the Invention [Problem to be solved by the invention]

[0006] The method described in Patent Document 1 solves the problem of residues, but in order to reliably fix a sheet without an adhesive layer to a substrate, it is important to ensure that the sheet is tightly attached to the substrate (the semiconductor wafer) without trapping air between the sheet and the substrate.

[0007] Therefore, a method of attachment using a reduced pressure chamber was devised. However, even a slight pressure difference would cause the sheet, which is fixed only on the outer periphery, to bend and sway while being attached to the substrate, causing the sheet to wrinkle. Another problem was that the high temperature inside the chamber would cause the sheet to shrink and wrinkle easily.

[0008] The present invention has been made in consideration of such problems, and its object is to provide a protective member application device and a protective member application method that can apply a sheet without an adhesive layer to a substrate while preventing wrinkling. [Means for solving the problem]

[0009] In order to solve the above-mentioned problems and achieve the object, the protective member application device of the present invention is a protective member application device that applies a thermoplastic resin sheet to a surface of a substrate having an uneven surface side, the protective member application device comprising: a decompression chamber that can be separated into an upper housing and a lower housing, the upper housing and the lower housing each having a decompression unit and an atmosphere release unit connected thereto; a support table that is provided inside the lower housing and on which the substrate is placed; a sheet fixing section that fixes the sheet so as to divide the internal space of the decompression chamber into the upper housing side and the lower housing side when the upper housing and the lower housing are integrated; a heating unit that heats and softens the sheet; and a control unit that controls a pressure difference between the upper housing and the lower housing, and after reducing the pressure between the upper housing and the lower housing, opens the upper housing to the atmosphere to generate a pressure difference that softens and adheres the sheet to the substrate placed on the support table, and the sheet fixing unit has an outer periphery fixing unit that fixes the outer periphery of the sheet, and a temporary fixing unit that holds the area of ​​the sheet that faces the support table from the upper housing side and temporarily fixes the sheet through a gap with the substrate placed on the support table, and the temporary fixing unit is a support plate having a resin layer on its underside that holds the sheet with a tack force, and the resin layer and the support plate have air holes formed in them.

[0010] In the protective member application device, the heating unit may heat the support table.

[0011] The protective member attachment method of the present invention is a protective member attachment method using the protective member attachment device to attach a thermoplastic resin sheet to a surface of a substrate having an uneven surface side, and is characterized in that it comprises a heating step of operating the heating unit, a preparation step of fixing the sheet to the sheet fixing portion and placing the substrate on the support table, a depressurization step of integrating the upper housing and the lower housing after performing the heating step and the preparation step, and depressurizing the upper housing and the lower housing with the sheet held in the temporary fixing portion above the substrate facing the substrate, and a sheet adhesion step of bringing the air pressure inside the upper housing closer to atmospheric pressure after performing the depressurization step, thereby setting the air pressure difference between the inside of the lower housing and the inside of the upper housing to a predetermined value or more, thereby separating the sheet from the temporary fixing portion and adhering it to the substrate.

[0012] In the method for attaching the protective member, the sheet adhesion step may include a preliminary adhesion step of bringing the inside of the upper housing closer to atmospheric pressure and adhering the center of the sheet to the substrate, and a final adhesion step of bringing the inside of the upper housing to atmospheric pressure and expanding the adhesion area from the center of the sheet adhered in the preliminary adhesion step to the outside. Effect of the Invention

[0013] The present invention has an effect of being able to adhere a sheet without an adhesive layer to a substrate while suppressing wrinkling. [Brief description of the drawings]

[0014] [Figure 1] FIG. 1 is a cross-sectional view of a configuration example of a protection member application device according to a first embodiment. [Diagram 2] FIG. 2 is a perspective view showing an example of a substrate to which a sheet is attached by the protective member attachment device shown in FIG. [Diagram 3] FIG. 3 is a cross-sectional view of a main part of the substrate shown in FIG. [Figure 4] FIG. 4 is a flowchart showing the flow of the method for attaching the protection member according to the first embodiment. [Diagram 5] FIG. 5 is a cross-sectional view showing a preparation step of the method for attaching the protective member shown in FIG. [Figure 6] FIG. 6 is a cross-sectional view showing a decompression step of the method for attaching the protective member shown in FIG. [Figure 7] FIG. 7 is a cross-sectional view showing a preliminary adhesion step of the adhesion step of the method of attaching the protection member shown in FIG. [Figure 8] FIG. 8 is a cross-sectional view showing the final adhering step of the adhering step of the method of adhering the protective member shown in FIG. [Figure 9] FIG. 9 is a cross-sectional view of a main part of the substrate after the adhesion step of the method of attaching the protective member shown in FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0015] The form (embodiment) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiment. Furthermore, the components described below include those that a person skilled in the art can easily imagine and those that are substantially the same. Furthermore, the configurations described below can be appropriately combined. Furthermore, various omissions, substitutions, or modifications of the configurations can be made without departing from the gist of the present invention.

[0016] [Embodiment 1] A protective member application device according to a first embodiment of the present invention will be described with reference to the drawings. Fig. 1 is a cross-sectional view of a configuration example of the protective member application device according to the first embodiment. Fig. 2 is a perspective view showing an example of a substrate to which a sheet is applied by the protective member application device shown in Fig. 1. Fig. 3 is a cross-sectional view of a main part of the substrate shown in Fig. 2.

[0017] The protective member attachment device 1 shown in Fig. 1 according to the first embodiment is an apparatus for attaching a thermoplastic sheet 210 to a surface 201 of a substrate 200 having irregularities 202 (shown in Fig. 2) on the surface 201 side. In the first embodiment, the substrate 200 is a wafer such as a disk-shaped semiconductor wafer or an optical device wafer, whose base material is silicon (Si), sapphire (Al2O3), gallium arsenide (GaAs), silicon carbide (SiC), or the like. Note that Fig. 1 omits the irregularities 202 on the surface 201 side of the substrate 200.

[0018] As shown in Fig. 2, the substrate 200 has devices 204 formed in each region of a surface 201 partitioned by a plurality of intersecting division lines 203. As shown in Figs. 2 and 3, the devices 204 have bumps 205 connected to electrodes of the devices 204 and protruding from the surface 201. The devices 204 are, for example, integrated circuits such as ICs (Integrated Circuits) or LSIs (Large Scale Integrations), image sensors such as CCDs (Charge Coupled Devices) or CMOSs ​​(Complementary Metal Oxide Semiconductors), or MEMS (Micro Electro Mechanical Systems). The bumps 205 are made of conductive metal and are formed in a spherical shape in the first embodiment.

[0019] The bumps 205 electrically connect the device 204 to electrodes of a substrate or the like on which the device 204 is mounted. In the first embodiment, the substrate 200 has the bumps 205 protruding from the surface 201, thereby forming the unevenness 202 on the surface 201. In the first embodiment, the substrate 200 has the bumps 205, thereby providing the unevenness 202 on the surface 201.

[0020] In the first embodiment, a sheet 210 is attached to a front surface 201 side of a substrate 200, and a back surface 206 behind the front surface 201 is ground in a state in which the front surface 201 side is held on a chuck table of a grinding device via the sheet 210, thereby thinning the substrate 200 to a predetermined finish thickness. After being thinned, the substrate 200 is divided into individual devices 204 along intended division lines 203.

[0021] The sheet 210 is formed in a sheet shape from a thermoplastic resin, and is formed in a sheet shape with a planar shape larger than that of the substrate 200. In the first embodiment, the sheet 210 is formed with both the front and back surfaces being flat. The sheet 210 is made of a flexible and non-adhesive thermoplastic resin, and does not have a glue layer made of an adhesive resin. The thermoplastic resin constituting the sheet 210 has elasticity, and softens when heated above its softening point, and shrinks when further heated. In the first embodiment, the sheet 210 is made of a resin that is transparent or translucent to visible light. In the first embodiment, the sheet 210 is a sheet of a polymer synthesized using an alkene as a monomer, and is made of, for example, polyethylene, polypropylene, or polystyrene as the thermoplastic resin. In the first embodiment, the thickness of the sheet 210 is 50 μm or more and 150 μm or less.

[0022] The protective member application device 1 according to the first embodiment includes a decompression chamber 10, a support table 20, a sheet fixing section 30, a heating unit 40, and a control section 50, as shown in FIG.

[0023] The decompression chamber 10 can be separated into an upper housing 11 and a lower housing 12, and decompression units 13, 14 and atmosphere release units 15, 16 are connected to the upper housing 11 and the lower housing 12, respectively.

[0024] The upper housing 11 and the lower housing 12 each include flat plates 111, 121 and peripheral plates 112, 122 standing from the outer edges of the flat plates 111, 121. The flat plates 111, 121 of the upper housing 11 and the lower housing 12 are formed to have the same planar shape. The upper housing 11 and the lower housing 12 are moved by a moving unit (not shown) between a position where the edges 113, 123 of the peripheral plates 112, 122 on the sides away from the flat plates 111, 121 overlap each other and a position where the edges 113, 123 are separated from each other. The upper housing 11 and the lower housing 12 are integrated when the edges 113, 123 of the peripheral plates 112, 122 on the sides away from the flat plates 111, 121 overlap each other.

[0025] The decompression units 13, 14 include pipes 131, 141 having one end connected to a suction source (not shown) and the other end opening inside the housings 11, 12, and on-off valves 132, 142 provided on the pipes 131, 141. The decompression units 13, 14 reduce the pressure inside the housings 11, 12 by opening the on-off valves 132, 142 and sucking in the suction source.

[0026] The atmosphere opening units 15, 16 include pipes 151, 161 having one end open to the atmosphere and the other end opening to the inside of the housings 11, 12, and on-off valves 152, 162 provided on the pipes 151, 161. The atmosphere opening units 15, 16 open the inside of the housings 11, 12 to the atmosphere by opening the on-off valves 152, 162. The pipes 151 of the atmosphere opening unit 15 of the upper housing 11 open to the center of the inner surface of the flat plate 111.

[0027] The support table 20 is provided inside the lower housing 12, and a back surface 206 behind the front surface 201 of the substrate 200 is placed on the support table 20. The support table 20 is formed larger than the substrate 200, and is placed on a flat plate 121 of the lower housing 12. The upper surface 21 of the support table 20 is formed flat along an edge 123 of a peripheral plate 122 of the lower housing 12, and the back surface 206 of the substrate 200 is placed on the support table 20.

[0028] Further, distance 22 from edge 123 of peripheral plate 122 to upper surface 21 of support table 20 is longer than thickness 207 of substrate 200, and is also longer than thickness 207 of substrate 200 at the position where bumps 205 are provided. For this reason, surface 201 and bumps 205 of substrate 200 placed on upper surface 21 of support table 20 are positioned closer to flat plate 121 than edge 123 of peripheral plate 122 of lower housing 12, i.e., on the inside of lower housing 12.

[0029] The sheet fixing part 30 fixes the sheet 210 such that, when the upper housing 11 and the lower housing 12 are integrated, the sheet 210 divides the internal space 17 of the reduced pressure chamber 10 into a first space 171 which is the interior on the upper housing 11 side and a second space 172 which is the interior on the lower housing 12 side. The sheet fixing part 30 has a temporary fixing part 31 and a peripheral fixing part 32.

[0030] The temporary fixing portion 31 holds the central portion 211, which is an area of ​​the sheet 210 facing the support table 20, from the upper housing 11 side, and temporarily fixes the sheet 210 via a gap with the substrate 200 placed on the support table 20. Note that the central portion 211 of the sheet 210 is an area of ​​the sheet 210 that faces the support table 20 along a direction perpendicular to the surface 201 of the substrate 200. Also, temporary fixing refers to fixing the sheet 210 to an extent that allows it to separate.

[0031] In the first embodiment, the temporary fixing part 31 is a support plate 34 having a resin layer 33 on its underside, which holds the sheet 210 by tacking force. The support plate 34 is formed in a flat plate shape having the same outer shape as the flat plate 111 of the upper housing 11, and is attached to the upper housing 11 in such a manner as to cover an opening surrounded by an edge 113 of a peripheral plate 112 of the upper housing 11. In the first embodiment, the support plate 34 is made of an aluminum alloy and has a thickness of 15 mm.

[0032] The support plate 34 has a resin layer 33 of a constant thickness laminated on its lower surface. The resin layer 33 is made of a resin that exerts a tack force (also called adhesive force) to the extent that the sheet 210 does not shift in position, and fixes the sheet 210 by the tack force (hereinafter, described as temporarily fixing). In the first embodiment, the resin layer 33 is made of a urethane resin (so-called urethane gel that has cushioning properties and adhesive force, and has earthquake resistance, vibration prevention, soundproofing, and impact resistance) with an Asker C hardness of 30 or so, and has a thickness of 1 mm. In addition, the resin layer 33 and the support plate 34 have ventilation holes 35 formed therethrough. A plurality of ventilation holes 35 are provided in the resin layer 33 and the support plate 34 at intervals, and in the first embodiment, the ventilation holes 35 are provided uniformly throughout the resin layer 33 and the support plate 34.

[0033] The support plate 34 fixes the central portion 211, which is the region of the sheet 210 facing the support table 20, to the resin layer 33 by the tack force of the resin layer 33, and holds the sheet 210 on the upper housing 11 side. In addition, the lower surface of the support plate 34, which fixes the sheet 210 of the resin layer 33, is disposed on the same plane as the edge 113 of the peripheral plate 112 of the upper housing 11. Therefore, when the housings 11 and 12 are positioned at a position where the edges 113 and 123 of the peripheral plates 112 and 122 overlap each other, the support plate 34 provisionally fixes the sheet 210 to the substrate 200 placed on the support table 20 via a gap, since the above-mentioned distance 22 is longer than the thickness 207.

[0034] The outer periphery fixing part 32 fixes the outer periphery 212 rather than the central part 211 of the sheet 210. In the first embodiment, the outer periphery fixing part 32 is attached to the entire circumference of the edge 113 of the peripheral plate 112 of the upper housing 11. In the first embodiment, the outer periphery fixing part 32 is made of an elastic body that is elastically deformable such as rubber, and comes into contact with the outer periphery 212 of the sheet 210 temporarily fixed to the temporary fixing part 31 to fix the outer periphery 212 of the sheet 210.

[0035] In addition, when the housings 11, 12 are positioned at a position where the edges 113, 123 of the peripheral plates 112, 122 overlap each other, the outer periphery fixing portion 32 elastically deforms in a direction reducing its thickness, thereby sealing the gap between the edge 113 of the peripheral plate 112 of the upper housing 11 and the outer periphery 212 of the sheet 210, and restricting gas from passing between the upper housing 11 and the sheet 210.

[0036] The heating unit 40 heats and softens the sheet 210. In the first embodiment, the heating unit 40 is a heater installed in the support table 20, and heats the support table 20, thereby heating the sheet 210 via the support table 20 and the substrate 200. In the first embodiment, the heating unit 40 heats the sheet 210 to a temperature exceeding the softening point of the thermoplastic resin constituting the sheet 210, thereby softening the sheet 210.

[0037] The control unit 50 controls the above-mentioned components of the protective member attachment device 1, i.e., the decompression chamber 10 and the heating unit 40, and after the upper housing 11 and the lower housing 12 are decompressed, the upper housing 11 is opened to the atmosphere, thereby generating a pressure difference between the housings 11, 12, which softens and adheres the sheet 210 to the substrate 200 placed on the support table 20. In other words, the control unit 50 causes the protective member attachment device 1 to perform the operation of attaching the sheet 210 to the substrate 200.

[0038] The control unit 50 is a computer having an arithmetic processing device having a microprocessor such as a CPU (central processing unit), a storage device having a memory such as a ROM (read only memory) or a RAM (random access memory), and an input / output interface device. The arithmetic processing device of the control unit 50 performs arithmetic processing according to a computer program stored in the storage device, and outputs control signals for controlling the protective member attachment device 1 to the above-mentioned components of the protective member attachment device 1 via the input / output interface device.

[0039] The control unit 50 is connected to a display unit (not shown) configured with a liquid crystal display device or the like for displaying the status and images of the machining operation, and an input unit (not shown) used by the operator to register machining content information, etc. The input unit is configured with at least one of a touch panel provided on the display unit and an external input device such as a keyboard.

[0040] 1, in the protective member attachment device 1, a sealing member 60 made of an elastic body capable of elastic deformation, such as rubber, is attached to the entire periphery of an edge 123 of a peripheral plate 122 of a lower housing 12. When the housings 11, 12 are positioned at a position where the edges 113, 123 of the peripheral plates 112, 122 overlap each other, the sealing member 60 elastically deforms in a direction to reduce its thickness, thereby sealing between the edge 123 of the peripheral plate 122 of the lower housing 12 and the outer periphery 212 of the sheet 210, and restricts gas from passing between the lower housing 12 and the sheet 210.

[0041] Next, a method for attaching a protective member according to the first embodiment of the present invention will be described with reference to the drawings. FIG. 4 is a flow chart showing the flow of the method for attaching a protective member according to the first embodiment. The method for attaching a protective member according to the first embodiment is a method for attaching a thermoplastic resin sheet 210 to a surface 201 of a substrate 200 having unevenness 202 on the surface 201 side by using the protective member attachment device 1 described above. That is, the method for attaching a protective member according to the first embodiment is also an attachment operation of the protective member attachment device 1 described above. The method for attaching a protective member according to the first embodiment includes a heating step 101, a preparation step 102, a decompression step 103, and a sheet adhesion step 104, as shown in FIG. 4.

[0042] (Heating step) The heating step 101 is a step of operating the heating unit 40. In the first embodiment, in the heating step 101, the control unit 50 of the protective member application device 1 receives processing conditions for the application operation via the input unit and stores them in the storage device, and when the control unit 50 receives an instruction to start the application operation from an operator, the control unit 50 starts the application operation and operates the heating unit 40 to heat the heating unit 40 to a temperature (e.g., 100° C.) determined by the processing conditions.

[0043] (Preparation step) Fig. 5 is a cross-sectional view showing a preparation step of the method for attaching the protective member shown in Fig. 4. The preparation step 102 is a step of fixing the sheet 210 to the sheet fixing part 30 and placing the substrate 200 on the support table 20.

[0044] In the preparation step 102, the protective member attachment apparatus 1 positions the housings 11, 12 of the reduced pressure chamber 10 at positions where the edges 113, 123 are spaced apart, closes the on-off valves 142, 162, and places the back surface 206 side of the substrate 200 on the support table 20 provided inside the lower housing 12 by a conveying means or the like (not shown). Also, in the preparation step 102, the protective member attachment apparatus 1 closes the on-off valves 132, 152, and conveys the sheet 210 by a sheet conveying means or the like so that the central portion 211 abuts against the resin layer 33 of the sheet fixing portion 30 and the outer periphery 212 abuts against the outer periphery fixing portion 32.

[0045] In the preparation step 102, the protection member attachment device 1 temporarily fixes a central portion 211 of the sheet 210 to the resin layer 33 by tacking force, and fixes an outer periphery 212 of the sheet 210 to the outer periphery fixing portion 32, as shown in FIG.

[0046] (Decompression step) Fig. 6 is a cross-sectional view showing a depressurizing step of the method for attaching the protective member shown in Fig. 4. In the depressurizing step 103, after the heating step 101 and the preparation step 102 are performed, the upper housing 11 and the lower housing 12 are integrated together, and the upper housing 11 and the lower housing 12 are depressurized in a state in which the sheet 210 held by the temporary fixing part 31 above the substrate 200 faces the substrate 200.

[0047] 6, the protective member attachment device 1 positions the housings 11, 12 at a position where the edges 113, 123 of the peripheral plates 112, 122 overlap each other, and integrates the housings 11, 12. Then, in the protective member attachment device 1, the internal space 17 of the reduced pressure chamber 10 is sealed by the sheet 210, the peripheral fixing part 32, and the sealing member 60, and the internal space 17 of the reduced pressure chamber 10 is divided into a first space 171 and a second space 172.

[0048] In the depressurizing step 103, the protective member attachment device 1 opens the on-off valves 132, 142, and reduces the pressure inside the housings 11, 12, i.e., the first space 171 and the second space 172, by the depressurizing units 13, 14. At this time, the sheet 210 is in close contact with the resin layer 33, and a gap is provided between the sheet 210 and the substrate on the support table 20. Note that in the first embodiment, in the depressurizing step 103, the protective member attachment device 1 opens the on-off valves 132, 142 for a predetermined time, and reduces the pressure inside the first space 171 and the second space 172 by the depressurizing units 13, 14, and closes the on-off valves 132, 142 after the pressure inside the spaces 171, 172 has been reduced.

[0049] (Sheet adhesion step) Fig. 7 is a cross-sectional view showing a preliminary adhesion step of the adhesion step of the method for adhering a protective member shown in Fig. 4. Fig. 8 is a cross-sectional view showing a final adhesion step of the adhesion step of the method for adhering a protective member shown in Fig. 4. Fig. 9 is a cross-sectional view of a main part of a substrate after the adhesion step of the method for adhering a protective member shown in Fig. 4.

[0050] The sheet adhesion step 104 is a step in which, after the depressurization step 103, the air pressure in the first space 171 inside the upper housing 11 is brought closer to atmospheric pressure and the air pressure difference between the second space 172 inside the lower housing 12 and the first space 171 of the upper housing 11 is set to a predetermined value or more, so that the sheet 210 separates from the temporary fixing portion 31 and adheres to the substrate 200.

[0051] In the sheet adhesion step 104, the protective member attachment device 1 opens the on-off valve 152 while keeping the on-off valves 132, 142, and 162 closed. Then, gas enters the first space 171 through the pipe 151 of the atmosphere release unit 15, and the air pressure in the first space 171 approaches atmospheric pressure. Since the pipe 151 opens in the center of the flat plate 111, the gas that has entered the first space 171 passes through the central vent hole 35 near the opening of the pipe 151 among the vent holes 35 penetrating the support plate 34 and the resin layer 33, and presses the center of the sheet 210 against the surface 201 of the substrate 200. When the air pressure difference between the second space 172 and the first space 171 of the upper housing 11 becomes greater than a predetermined value, the protective member attachment device 1 separates the center of the sheet 210 from the resin layer 33 of the temporary fixing portion 31 against the tack force of the resin layer 33, as shown in Figure 7, and the center of the sheet 210 comes into contact with the surface 201 of the substrate 200.

[0052] When sheet 210 comes into contact with surface 201 of substrate 200, because substrate 200 is heated by heating unit 40 in support table 20, sheet 210 is heated through substrate 200 to a temperature above its softening point, and adheres closely (i.e., adheres to) surface 201 of substrate 200 and also adheres closely (i.e., adheres to) the surfaces of bumps 205.

[0053] In the sheet adhering step 104, the protective member attachment device 1 adheres the center of the central portion 211 of the sheet 210 to the surface 201 of the substrate 200 and also to the surfaces of the bumps 205, as shown in Fig. 7. Note that Fig. 7 shows a preliminary adhering step 104-1 in which the first space 171 of the upper housing 11 is brought close to atmospheric pressure, so that the center of the sheet is adhered to the substrate 200 and a gap is provided between the outer periphery 212 side of the central portion 211 and the substrate 200.

[0054] In the sheet adhering step 104, as gas enters the first space 171 through the piping 151 of the atmosphere release unit 15, the central portion 211 of the sheet 210 adheres to the surface 201 of the substrate 200 in sequence from the center toward the outer periphery 212, and also adheres to the surfaces of the bumps 205. In the sheet adhering step 104, when the first space 171 becomes atmospheric pressure, as shown in FIG. 8, the protective member adhering device 1 adheres the entire central portion 211 of the sheet 210 to the surface 201 of the substrate 200, and also adheres to the surfaces of the bumps 205.

[0055] 8 shows a final adhesion step 104-2 in which the first space 171 of the upper housing 11 is brought to atmospheric pressure and the adhesion area of ​​the sheet 210 adhered in the preliminary adhesion step 104-1 is expanded from the center to the outer periphery 212 side. Thus, the sheet adhesion step 104 includes a preliminary adhesion step 104-1 in which the first space 171 of the upper housing 11 is brought close to atmospheric pressure and the center of the sheet 210 is adhered to the substrate 200, and a final adhesion step 104-2 in which the first space 171 of the upper housing 11 is brought to atmospheric pressure and the adhesion area of ​​the sheet 210 adhered in the preliminary adhesion step 104-1 is expanded from the center to the outer periphery 212 side, as shown in FIG.

[0056] In the sheet adhering step 104, when a predetermined time has elapsed since the opening of the on-off valve 152, the protective member adhering device 1 adheres the entire central portion 211 of the sheet 210 to the surface 201 of the substrate 200 and the surfaces of the bumps 205, as shown in Fig. 9. In the sheet adhering step 104, the protective member adhering device 1 opens the on-off valve 162 to open the second space 172 of the lower housing 12 to the atmosphere, positions the housings 11, 12 in positions where the edges 113, 123 of the peripheral plates 112, 122 are separated from each other, and the substrate 200 with the sheet 210 adhered thereto on the support table 20 is carried out by a conveying means (not shown), and the method for adhering a protective member, i.e., the adhering operation of the protective member adhering device 1, is completed.

[0057] As described above, in the protective member attachment device 1 and the protective member attachment method according to the first embodiment, the sheet 210 is temporarily fixed by the resin layer 33 having a tackiness in a state where the sheet 210 faces the substrate 200 with a gap therebetween, and therefore the sheet 210 separates from the resin layer 33 and adheres closely to the substrate 200 only when the air pressure difference between the first space 171 and the second space 172 reaches a predetermined level or more. In addition, in the protective member attachment device 1 and the protective member attachment method, the center of the sheet 210, which is the position farthest from the outer periphery fixing portion 32, separates from the temporary fixing portion 31 first, so that by aligning the center of the support table 20 with the center of the sheet 210, the sheet 210 can be gradually attached to the substrate 200 from the center of the substrate 200 toward the outer periphery 212, and thus it is possible to suppress the sheet 210 attached to the substrate 200 from wrinkling.

[0058] As a result, the protective member attachment device 1 and the protective member attachment method have the advantage that the sheet 210 without an adhesive layer can be attached to the substrate 200 while preventing wrinkling.

[0059] Furthermore, in the protective member attachment device 1 and the protective member attachment method, the housings 11, 12 of the decompression chamber 10 are positioned at positions where the edges 113, 123 are separated from each other, the sheet 210 is temporarily fixed to the resin layer 33 by tacking force, and then the housings 11, 12 of the decompression chamber 10 are positioned at positions where the edges 113, 123 overlap each other, and the sheet 210 is attached to the substrate 200. For this reason, in the protective member attachment device 1 and the protective member attachment method, even if the sheet 210 is heated in the closed decompression chamber 10, the sheet 210 is temporarily fixed to the resin layer 33 until it is attached to the substrate 200, so that the sheet 210 is less likely to shrink and wrinkle.

[0060] The present invention is not limited to the above embodiment. In other words, various modifications can be made without departing from the gist of the present invention. In the present invention, the upper housing 11 may be provided with a sheet holding part that holds the outer periphery 212 of the sheet 210 by a clamp or the like, in addition to the outer periphery fixing part 32. In the present invention, the unevenness of the substrate 200 may include the unevenness of the pattern forming the device 204 in addition to the bumps 205. In the present invention, the substrate 200 may be a resin package substrate in addition to a wafer. [Explanation of symbols]

[0061] 1 Protective material pasting device 10. Decompression Chamber 11 Upper case 12 Lower housing 13,14 Pressure reducing unit 15,16 Atmospheric release unit 17 Interior Space 20 Support Table 30 Seat fixing part 31 Temporary fixing part 32 Outer periphery fixed part 33 Resin layer 34 Support plate 35 Ventilation holes 101 Heating Step 102 Preparation Steps 103 Decompression Step 104 Sheet Adhesion Step 104-1 Pre-adhesion step 104-2 Final adhesion step 171 First space (upper housing side, inside the upper housing) 172 Second space (lower housing side, inside the lower housing) 200 boards 201 Surface 202 Unevenness 210 seats 211 Central part (area facing the support table)

Claims

1. A protective member attachment device that attaches a thermoplastic resin sheet to a surface of a substrate having an uneven surface side, the protective member attachment device comprising: A decompression chamber that can be separated into an upper housing and a lower housing, and a decompression unit and an air release unit are connected to the upper housing and the lower housing, respectively; a support table provided inside the lower housing and on which the substrate is placed; a sheet fixing portion that fixes the sheet so as to divide an internal space of the decompression chamber into an upper housing side and a lower housing side when the upper housing and the lower housing are integrated; a heating unit for heating and softening the sheet; a control unit that controls the decompression chamber and the heating unit, and after reducing the pressure in the upper housing and the lower housing, opens the upper housing to the atmosphere to generate a pressure difference, thereby softening and adhering the sheet to the substrate placed on the support table; The sheet fixing portion is An outer periphery fixing portion that fixes the outer periphery of the sheet; a temporary fixing portion that holds an area of ​​the sheet facing the support table from the upper housing side and temporarily fixes the sheet to the substrate placed on the support table via a gap, The temporary fixing portion is The protective member attachment device comprises a support plate having a resin layer on its underside that holds the sheet with a tacky force, and the resin layer and the support plate have ventilation holes formed therein.

2. 2. The protective member application device according to claim 1, wherein the heating unit heats the support table.

3. A method for attaching a protective member, comprising the steps of: attaching a thermoplastic resin sheet to a surface of a substrate having an uneven surface side by using the protective member attachment device according to claim 1; a heating step of operating the heating unit; a preparation step of fixing the sheet to the sheet fixing portion and placing a substrate on the support table; a depressurizing step of integrating the upper housing and the lower housing after the heating step and the preparation step, and depressurizing the upper housing and the lower housing in a state in which the sheet held on the temporary fixing portion above the substrate faces the substrate; The method for attaching a protective member includes a sheet adhesion step in which, after the decompression step, the air pressure inside the upper housing is brought closer to atmospheric pressure to set the air pressure difference between the inside of the lower housing and the inside of the upper housing to a predetermined value or more, thereby causing the sheet to separate from the temporary fixing portion and adhere to the substrate.

4. The sheet contact step includes: a preliminary adhesion step of bringing the inside of the upper housing closer to atmospheric pressure and bringing the center of the sheet into close contact with the substrate; The method for attaching a protective member according to claim 3 , further comprising a final adhesion step of bringing the inside of the upper housing to atmospheric pressure and expanding the adhesion area from the center of the sheet adhered in the preliminary adhesion step to the outside.

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