Transport System

Abstract

To provide a carrier system that can hold or place a display panel even when a processing unit processes the display panel.SOLUTION: In a carrier system 1, a drive unit 56A rotates a holding arm 53A at a first position P1 where a first suction unit 54A holds a display panel 100 before inspection mounted on a first stage 41A, a second position P2 that is rotated by 90° counterclockwise from the first position P1, and where a second suction unit 55A holds the inspected display panel 100 mounted on an inspection unit 6A, a third position P3 that is rotated by 90° counterclockwise from the second position P2 and where the first suction unit 54A mounts the display panel 100 before inspection in the first inspection unit 6A, and a fourth position P4 that is rotated by 180° clockwise from the third position P3, and where the second suction unit 55A mounts the inspected display panel 100 on the first stage 41A.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a transport system for transporting a workpiece. [Background technology]

[0002] A conveying system that is incorporated into a manufacturing line for small liquid crystal displays and conveys display panels is disclosed in Patent Document 1. The conveying system in this document includes a first placement unit, a moving mechanism that simultaneously switches display panels between the first placement unit and a second placement unit of an inspection device, and a conveying mechanism that brings in uninspected display panels to the first placement unit and ejects inspected display panels placed on the first placement unit.

[0003] The moving mechanism includes a holding member, two holding mechanisms provided at both ends of the holding member for holding the display panel, and a rotation mechanism for rotating the holding member around the center position of the two holding mechanisms as the rotation axis. When the inspection of the display panel is completed by the inspection device, a shutter of the inspection device opens, and the moving mechanism rotates the holding member by 180° to simultaneously swap the display panels between the first placement unit and the second placement unit of the inspection device. After the swapping of the display panels is completed, the moving mechanism rotates the holding member by 90° to move the holding member to a standby position. After the holding member has moved to the standby position, the inspection device closes the shutter and performs inspection of the display panel. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2019-52914 A Summary of the Invention [Problem to be solved by the invention]

[0005] The transport system of Patent Document 1 requires a reduction in the takt time of the transport mechanism. However, in the transport system of Patent Document 1, when the display panel is being inspected by an inspection device, the moving mechanism cannot hold the display panel placed on the first placement unit, which causes a problem that it is difficult to reduce the takt time of the transport mechanism.

[0006] Therefore, an object of the present invention is to provide a transport system that is capable of holding or placing a display panel even when the display panel is being processed in a processing section. [Means for solving the problem]

[0007] In order to solve the above problems, a transport system of the present invention includes a first robot that holds a workpiece, an alignment camera that detects the position of the workpiece held by the first robot, a transport mechanism that includes a stage on which the workpiece held by the first robot is placed, and a moving mechanism that moves the workpiece placed on the stage to a processing section that processes the workpiece, and moves the processed workpiece that has been processed in the processing section to the stage, and the moving mechanism includes a holding arm in which a first arm and a second arm are connected in an L-shape, and a moving mechanism that is provided at the tip of the first arm and moves the workpiece. a first suction unit that holds the workpiece, a second suction unit that is provided at the tip of the second arm and holds the workpiece, and a drive unit that rotates the holding arm around a connection position of the first arm and the second arm as a rotation axis, and the drive unit has three positions: a first position where the first suction unit holds an unprocessed workpiece placed on the stage, a second position where the first suction unit rotates 90° in one direction from the first position and the second suction unit holds the processed workpiece placed on the processing unit, a third position where the first suction unit rotates 90° in the one direction from the second position and places the unprocessed workpiece on the processing unit, and a third position where the first suction unit rotates 90° in the one direction from the third position and places the unprocessed workpiece on the processing unit. 270° in the other direction and rotating the holding arm to a fourth position where the second suction portion places the processed work on the stage. After the processed workpiece is placed on the stage, the transport mechanism moves the stage to a discharge position, and the moving direction of the stage is the X-axis direction and the up-down direction is the Z-axis direction. , the direction perpendicular to the X-axis direction and the Z-axis direction is defined as the Y-axis direction, and the first robot aligns the position of the workpiece relative to the stage in the Y-axis direction and in a rotation direction about the Z-axis as a rotation axis based on the detection result of the alignment camera, and the transport mechanism moves the stage to align the position of the stage in the X-axis direction relative to the workpiece based on the detection result of the alignment camera. It is characterized by:

[0008] According to the transport system of the present invention, when the drive unit rotates the holding arm to the first position, the first suction unit can hold the unprocessed workpiece placed on the stage, but the second suction unit cannot hold the processed workpiece placed on the processing unit. That is, the second suction unit does not overlap with the processing unit in the vertical direction. Therefore, even if the workpiece is inspected in the processing unit, the moving mechanism can hold the uninspected workpiece placed on the stage, so that the takt time of the transport mechanism can be shortened. Also, when the drive unit rotates the holding arm to the fourth position, the first suction unit can place the processed workpiece on the stage, but the second suction unit cannot hold the processed workpiece placed on the processing unit. That is, the second suction unit does not overlap with the processing unit in the vertical direction. Therefore, even if the workpiece is inspected in the processing unit, the moving mechanism can place the processed workpiece on the stage, so that the takt time of the transport mechanism can be shortened. With this configuration, the transport mechanism moves the stage to align the stage with the workpiece in the X-axis direction, so the first robot can omit a mechanism for moving the workpiece in the X-axis direction, which makes it possible to simplify the configuration of the first robot.

[0010] In the present invention, it is preferable that the stage includes a loading stage that moves the unprocessed workpiece placed by the first robot to the moving mechanism, and a discharge stage that moves the processed workpiece placed by the moving mechanism to the discharge position. In this configuration, the loading stage and the discharge stage each transport a workpiece, and therefore the travel distances of the loading stage and the discharge stage are shorter than when there is only one stage. This makes it possible to shorten the tact time for the transport mechanism to transport the workpiece.

[0011] In the present invention, a configuration can be adopted in which the moving mechanism is arranged in a plurality in the X-axis direction. Also, in the present invention, a configuration can be adopted in which the moving mechanism includes a first moving mechanism arranged on one side in the Y-axis direction and a second moving mechanism arranged on the other side in the Y-axis direction, and the transport mechanism includes a first transport mechanism arranged on one side in the Y-axis direction and a second transport mechanism arranged on the other side in the Y-axis direction.

[0012] In the present invention, it is preferable that the first robot moves the workpiece arranged between the first transport mechanism and the second transport mechanism to the stage of the first transport mechanism and the stage of the transport mechanism when viewed from above and below. With this configuration, the movement range of the first robot to the first transport mechanism and the movement range of the first robot to the second transport mechanism can be made the same.

[0013] In the present invention, a second robot is provided which moves the processed workpiece from the stage of the first transport mechanism and the stage of the second transport mechanism to a next process after the stage of the first transport mechanism and the stage of the second transport mechanism have moved to the discharge position. With this configuration, the workpieces transported by the stage of the first transport mechanism and the stage of the second transport mechanism can be moved to the next process by a single second robot.

[0014] In the present invention, the first robot may be configured to be capable of holding a plurality of the workpieces at the same time. Effect of the Invention

[0015] The present invention can provide a transport system capable of holding or placing a display panel even when the display panel is being processed in a processing section. [Brief description of the drawings]

[0016] [Figure 1] FIG. 1 is a plan view of a transport system according to an embodiment of the present invention. [Diagram 2] FIG. 2 is a front view of the transport system as seen from the direction AA in FIG. [Diagram 3] This is a side view of the transport system as seen from the BB direction in FIG. [Figure 4] 6A to 6C are diagrams illustrating the movement of a first moving mechanism. [Diagram 5] 6A to 6C are diagrams illustrating the movement of a first moving mechanism. [Figure 6] 11A to 11C are diagrams illustrating the movement of a second moving mechanism. [Figure 7] 11A to 11C are diagrams illustrating the movement of a second moving mechanism. [Figure 8] FIG. 13 is a schematic diagram of a transport mechanism according to another embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0017] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In the following description, the case where the work is a display panel 100 will be mainly described. In addition, in the following description, the case where an inspection corresponding to the work is performed as processing for the work will be mainly described. Therefore, the processing unit for the work is an inspection unit for the work. FIG. 1 is a plan view of a conveying system according to an embodiment of the present invention. FIG. 2 is a front view of the conveying system as seen from the AA direction in FIG. 1. FIG. 3 is a side view of the conveying system as seen from the BB direction in FIG. 1.

[0018] (Configuration of Transport System 1) 1 to 3, a conveying system 1 of this embodiment is incorporated into a manufacturing line for small liquid crystal displays used in portable devices, etc. The conveying system 1 conveys a display panel 100, which is a workpiece, and supplies the display panel 100 to an inspection unit 6 that performs a predetermined inspection on the display panel 100.

[0019] The display panel 100 is a liquid crystal panel, an organic EL panel, or the like. The display panel 100 is formed in a rectangular shape, and has a flexible wiring 101 in this embodiment. The display panel 100 has a recording section in which data such as test data of the display panel 100 is recorded in a location outside the display area of ​​the display panel 100. Specifically, the data such as the test data is recorded as a two-dimensional code or a one-dimensional code in a location outside the display area of ​​the display panel 100. Also, as shown in FIG. 1, in this embodiment, two display panels 100 consisting of a first display panel 100A and a second display panel 100B are simultaneously transported as the display panel 100.

[0020] 1 to 3, the transfer system 1 includes a first robot 3 that holds a display panel 100, an alignment camera 10 that detects the position of the display panel 100 held by the first robot 3, and a transfer mechanism 4 that includes a stage 41 on which the display panel 100 held by the first robot 3 is placed. In this embodiment, the transfer mechanism 4 includes a first transfer mechanism 4A that includes a first stage 41A on which the display panel 100 held by the first robot 3 is placed, and a second stage 41 on which the display panel 100 held by the first robot 3 is placed. and a second transport mechanism 4B equipped with a second transport mechanism 4B.

[0021] The conveying system 1 also includes a moving mechanism 5 that moves the display panel 100 placed on the stage 41 to an inspection section 6 that performs an inspection on the display panel 100, and moves the inspected display panel 100 inspected by the inspection section 6 to the stage 41. In this embodiment, the moving mechanism 5 includes a first moving mechanism 5A that moves the display panel 100 placed on the first stage 41A to a first inspection section 6A that performs an inspection on the display panel 100, and moves the inspected display panel 100 inspected by the first inspection section 6A to the first stage 41A, and a second moving mechanism 5B that moves the display panel 100 placed on the second stage 41B to a second inspection section 6B that performs the same inspection as the first inspection section 6A, and moves the inspected display panel 100 inspected by the second inspection section 6B to the second stage 41B.

[0022] The transport system 1 includes an ID reader 11 that reads data recorded at a location outside the display area of ​​the display panel 100. The transport system 1 includes a second robot 7 that moves the inspected display panel 100 transported by the stage 41 to the next process. The second robot 7 moves the inspected display panel 100 to the transport mechanism 8 or discharge platform 9 for the next process based on the inspection results in the first inspection unit 6A and the second inspection unit 6B. The transport system 1 also causes the first robot 3 to move the uninspected display panel 100 that has been transported by the carry-in mechanism 2.

[0023] In the following description, the movement direction of stage 41 is defined as the X-axis direction, the up-down direction as the Z-axis direction, and the direction perpendicular to the X-axis direction and the Z-axis direction as the Y-axis direction. On stage 41, the direction in which display panel 100 is transported is defined as the X1 direction, and the opposite direction is defined as the X2 direction. In the up-down direction, the upward direction is defined as the Z1 direction, and the downward direction is defined as the Z2 direction. In the Y-axis direction, one side is defined as the Y1 direction, and the other side is defined as the Y2 direction.

[0024] As shown in FIG. 1 and FIG. 2, the carry-in mechanism 2 carries the display panel 100 to the conveying system 1. The carry-in mechanism 2 is composed of an electric cylinder or the like. The carry-in mechanism 2 includes a stage 21 on which the display panel 100 is placed. The carry-in mechanism 2 moves the stage 21 back and forth in the X direction. The carry-in mechanism 2 conveys the display panel 100 placed on the stage 21 at the end in the X2 direction to the end in the X1 direction. The stage 21 is a rectangle that is long in the X direction. The stage 21 is large enough to hold two display panels 100 in the X direction. In this embodiment, the carry-in mechanism 2 is disposed between the first conveying mechanism 4A and the second conveying mechanism 4B when viewed from the Z-axis direction. That is, the display panel 100 placed on the stage 21 is disposed between the first conveying mechanism 4A and the second conveying mechanism 4B.

[0025] As shown in FIGS. 1 to 3, the first robot 3 is disposed between the first transport mechanism 4A and the second transport mechanism 4B when viewed from the Z-axis direction. The first robot 3 includes an adhesion unit 31 that holds the display panel 100 placed on the stage 21 of the loading mechanism 2, a position adjustment unit 32 that moves the adhesion unit 31 in the vertical direction and rotates it about the Z-axis direction, and a drive unit 33 that moves the position adjustment unit 32 back and forth in the Y-axis direction. The drive unit 33 is configured with an electric cylinder or the like. The drive unit 33 moves the adhesion unit 31 back and forth in the Y-axis direction via the position adjustment unit 32. When the adhesion unit 31 moves back and forth in the Y-axis direction, the adhesion unit 31 overlaps in the vertical direction with the stage 21 located at the end of the loading mechanism 2 in the X1 direction. That is, the first robot 3 is capable of moving the adhesion unit 31 in the Y-axis direction and the Z-axis direction between the first transport mechanism 4A and the second transport mechanism 4B. Therefore, when viewed from the Z-axis direction, the first robot 3 moves the display panel 100, which is disposed between the first transport mechanism 4A and the second transport mechanism 4B, to the first stage 41A of the first transport mechanism 4A and the second stage 41B of the second transport mechanism 4B. In this embodiment, the first robot 3 places the display panel 100 on the first stage 41A of the first transport mechanism 4A so that the tip of the flexible wiring 101 faces the Y2 direction. The display panel 100 is placed on the second stage 41B of the second transport mechanism 4B so that the tip of the flexible wiring 101 faces the Y1 direction.

[0026] As shown in FIGS. 1 to 3, the first transport mechanism 4A is located on the Y1 direction side relative to the carry-in mechanism 2. The first transport mechanism 4A is located on the Z1 direction side relative to the carry-in mechanism 2. The first transport mechanism 4A moves the first stage 41A back and forth in the X-axis direction. The first stage 41A includes a main body 411 that is large enough to accommodate two display panels 100 in the X direction, and an FPC holder 412 on which the flexible wiring 101 is placed. Here, the position where the first stage 41A has moved to the end in the X1 direction is the discharge position.

[0027] As shown in FIG. 1 and FIG. 3, the second transport mechanism 4B is located on the Y2 side relative to the loading mechanism 2. The second transport mechanism 4B is located on the Z1 side relative to the loading mechanism 2. The second transport mechanism 4B reciprocates the second stage 41B in the X-axis direction. The second stage 41B includes a main body 411 having a size large enough to accommodate two display panels 100 in the X direction, and an FPC holder 412 on which the flexible wiring 101 is placed. Here, the position where the second stage 41B has moved to the end in the X1 direction is the ejection position. Here, the position where the second stage 41B has moved to the end in the X1 direction is the ejection position.

[0028] 2, the alignment camera 10 is positioned above the first robot 3. When the first robot 3 holds the display panel 100 placed on the stage 21 of the carry-in mechanism 2, the alignment camera 10 photographs the display panel 100 from above and detects the position of the display panel.

[0029] As shown in FIG. 1 and FIG. 2, the ID reader 11 optically reads data recorded in the recording section of the display panel 100. The ID reader 11 is, for example, an imaging element. The display panel 100 is inspected in the inspection section 6 based on the data of the display panel 100 read by the ID reader 11. As shown in FIG. 1, the ID reader 11 includes a first ID reader 11A and a second ID reader 11B. The first ID reader 11A is located between the first transport mechanism 4A and the second transport mechanism 4B and above the first transport mechanism 4A and the second transport mechanism 4B. The first ID reader 11A is moved in the Y-axis direction by the upper drive section 111. The first ID reader 11A reads data recorded in the recording section of the display panel 100 from above. The second ID reader 11B is located between the first transport mechanism 4A and the second transport mechanism 4B and below the first transport mechanism 4A and the second transport mechanism 4B. The second ID reader 11B is moved in the Y-axis direction by the lower drive unit 112. The second ID reader 11B reads the data recorded in the recording unit of the display panel 100 from below.

[0030] As shown in FIGS. 1 to 3, the first moving mechanism 5A is located on the Y1 direction side of the first transport mechanism 4A. The first moving mechanism 5A moves the uninspected display panel 100 placed on the first stage 41A, and also moves the inspected display panel 100 placed on the first inspection unit 6A. The first moving mechanism 5A includes a holding arm 53A in which a first arm 51A and a second arm 52A are connected in an L-shape, a first suction unit 54A provided at the tip of the first arm 51A and holding the display panel 100, and a second suction unit 55A provided at the tip of the second arm 52A and holding the display panel 100. The first suction unit 54A and the second suction unit 55A hold the flexible wiring 101 together with the display panel 100.

[0031] The first moving mechanism 5A includes a driving unit 56A that rotates the holding arm 53A around the connecting position of the first arm 51A and the second arm 52A as a rotation axis, and a position adjustment unit 57A that moves the driving unit 56A up and down. The driving unit 56A rotates the holding arm 53A, thereby moving the first suction unit 54A and the second suction unit 55A. In this embodiment, two first moving mechanisms 5A are provided side by side in the X-axis direction.

[0032] As shown in FIG. 1 and FIG. 3, the second moving mechanism 5B is located on the Y2-direction side of the second transport mechanism 4B. The second moving mechanism 5B moves the uninspected display panel 100 placed on the second stage 41B, and also moves the inspected display panel 100 placed on the second inspection unit 6B. The second moving mechanism 5B includes a holding arm 53B in which a first arm 51B and a second arm 52B are connected in an L-shape, a first suction unit 54B that is provided at the tip of the first arm 51B and that holds the display panel 100, and a second suction unit 55B that is provided at the tip of the second arm 52B and that holds the display panel 100. The first suction unit 54B and the second suction unit 55B hold the flexible wiring 101 together with the display panel 100. In this embodiment, the first arm 51B, the second arm 52B, the first suction portion 54B and the second suction portion 55B are arranged so as to be linearly symmetrical with the first arm 51A, the second arm 52A, the first suction portion 54A and the second suction portion 55A about the X-axis.

[0033] The second movement mechanism 5B includes a drive unit 56B that rotates the holding arm 53B around the connection position of the first arm 51B and the second arm 52B as a rotation axis, and a position adjustment unit 57B that moves the drive unit 56B up and down. The drive unit 56B rotates the holding arm 53B to move the first suction unit 54B and the second suction unit 55B. In this embodiment, two second movement mechanisms 5B are provided side by side in the X-axis direction.

[0034] As shown in FIG. 1 to FIG. 3, the first inspection unit 6A and the second inspection unit 6B are devices for performing a lighting inspection of the display panel 100. In this embodiment, the first inspection unit 6A and the second inspection unit 6B are each provided in pairs in the X-axis direction. The first inspection unit 6A and the second inspection unit 6B each include a mounting unit 12 on which the display panel 100 is mounted, a camera 13 disposed above the mounting unit 12, a backlight 14 that irradiates light from the lower surface of the display panel 100 during lighting inspection, and a housing 15 that accommodates the mounting unit 12, the camera 13, and the backlight 14. The housing 15 is provided with a shutter 17 for closing an opening 18 formed in the housing 15. An air cylinder 19 that moves the shutter 17 up and down is connected to the shutter 17. During lighting inspection, the opening 18 can be closed by the shutter 17 to make the inside of the housing 15 a dark room. Furthermore, by opening the opening 18 with the shutter 17, the first movement mechanism 5A and the second movement mechanism 5B become able to move the display panel 100 relative to the first inspection unit 6A and the second inspection unit 6B.

[0035] As shown in FIG. 1 and FIG. 2, the second robot 7 includes an adsorption unit 71 that holds the inspected display panel 100, a position adjustment unit 72 that moves the adsorption unit 71 in the vertical direction and rotates it about the Z-axis direction, a first drive unit 73 that moves the position adjustment unit 72 back and forth in the X-axis direction, and a second drive unit 74 that moves the first drive unit 73 back and forth in the X-axis direction. The first drive unit 73 and the second drive unit 74 are composed of an electric cylinder or the like. The first drive unit 73 moves the adsorption unit 71 back and forth in the X-axis direction via the position adjustment unit 72. The second drive unit 74 moves the adsorption unit 71 back and forth in the Y-axis direction via the first drive unit 73 and the position adjustment unit 72. In this embodiment, the second robot 7 places the display panel 100 that has been inspected as a "good product" on the transport mechanism 8, and places the display panel 100 that has been inspected as a "defective product" on the discharge placement unit 9.

[0036] 1 and 2, the transport mechanism 8 is a mechanism that transports inspected display panels 100 to the next process. In this embodiment, the transport mechanism 8 is formed of a belt conveyor.

[0037] 1, a defective pallet 200 is placed on the discharge tray 9. The second robot 7 places the display panel 100, whose inspection result is “defective”, on the defective pallet 200 placed on the discharge tray 9.

[0038] (Operation of the transport system 1) Next, the operation of the transport system 1 will be described. In this embodiment, the transport system 1 transports two display panels 100. Figs. 4 and 5 are schematic diagrams for explaining the movement of the first moving mechanism. Figs. 6 and 7 are schematic diagrams for explaining the movement of the second moving mechanism. Note that in Figs. 4 to 7, the flexible wiring 101 of the display panel 100 is omitted.

[0039] (Movement of the first robot 3) The carry-in mechanism 2 transports the first display panel 100A and the second display panel 100B placed on the stage 21 to the end of the carry-in mechanism 2 in the X1 direction. The first robot 3 moves the suction unit 31 to the stage 21 and holds the first display panel 100A and the second display panel 100B. After the first display panel 100A and the second display panel 100B are held by the suction unit 31, the carry-in mechanism 2 moves the stage 21 to the end of the carry-in mechanism 2 in the X2 direction. After the stage 21 has moved to the end of the carry-in mechanism 2 in the X2 direction, the next display panel 100 is placed on the stage 21.

[0040] Furthermore, after the first display panel 100A and the second display panel 100B are held by the suction portions 31, the alignment camera 10 detects the positions of the first display panel 100A and the second display panel 100B. When the alignment camera 10 detects the first display panel 100A and the second display panel 100B, the first robot 3 recognizes the positions of the first display panel 100A and the second display panel 100B relative to the suction portions 31.

[0041] Next, the first robot 3 moves the suction unit 31 to above the first stage 41A. After the first robot 3 moves the suction unit 31 to above the first stage 41A, the first robot 3 performs rotational alignment of the first display panel 100A in the Y-axis direction and the Z-axis direction with respect to the first stage 41A based on the position of the first display panel 100A detected by the alignment camera 10. The first transport mechanism 4A performs alignment of the first stage 41A in the X-axis direction with respect to the first display panel 100A based on the position of the first display panel 100A detected by the alignment camera 10. After the alignment of the position of the first display panel 100A is performed, the first robot 3 places only the first display panel 100A on the first stage 41A.

[0042] After the first display panel 100A is placed on the first stage 41A, the first robot 3 moves the suction unit 31 in the Z1 direction. Next, based on the position of the first display panel 100A detected by the alignment camera 10, the second display panel 100B is aligned in the Y-axis direction and the Z-axis direction relative to the first stage 41A. Based on the position of the second display panel 100B detected by the alignment camera 10, the first transport mechanism 4A aligns the first stage 41A in the X-axis direction relative to the second display panel 100B. After the position of the second display panel 100B is aligned, the first robot 3 places the second display panel 100B on the first stage 41A.

[0043] The first robot 3 places the first display panel 100A and the second display panel 100B on the first stage 41A, and then moves the suction unit 31 to the carry-in mechanism 2. After the suction unit 31 has moved to the carry-in mechanism 2, the first transport mechanism 4A moves the first display panel 100A and the second display panel 100B placed on the first stage 41A to the position of the ID reader 11. Either the first ID reader 11A or the second ID reader 11B reads the first display panel 100A and the second display panel 100B and acquires inspection data and the like.

[0044] After the first display panel 100A and the second display panel 100B have been read by the ID reader 11, the first transport mechanism 4A moves the first display panel 100A and the second display panel 100B placed on the first stage 41A to the first inspection section 6A.

[0045] The first robot 3 again holds the first display panel 100A and the second display panel 100B placed on the stage 21. Thereafter, as described above, the alignment camera 10 detects the positions of the first display panel 100A and the second display panel 100B. When the alignment camera 10 detects the first display panel 100A and the second display panel 100B, the first robot 3 recognizes the positions of the first display panel 100A and the second display panel 100B relative to the suction portion 31.

[0046] Next, the first robot 3 moves the suction unit 31 to above the second stage 41B. After the first robot 3 moves the suction unit 31 to above the second stage 41B, the first robot 3 performs rotational alignment of the first display panel 100A in the Y-axis direction and the Z-axis direction with respect to the second stage 41B based on the position of the first display panel 100A detected by the alignment camera 10. The second transport mechanism 4B performs alignment of the second stage 41B in the X-axis direction with respect to the first display panel 100A based on the position of the first display panel 100A detected by the alignment camera 10. After the alignment of the position of the first display panel 100A is performed, the first robot 3 places only the first display panel 100A on the second stage 41B.

[0047] After the first display panel 100A is placed on the second stage 41B, the first robot 3 moves the suction unit 31 in the Z1 direction. Next, based on the position of the first display panel 100A detected by the alignment camera 10, the second robot 3 performs rotational alignment of the second display panel 100B in the Y-axis direction and the Z-axis direction relative to the second stage 41B. Based on the position of the second display panel 100B detected by the alignment camera 10, the second transport mechanism 4B performs alignment of the second stage 41B in the X-axis direction relative to the second display panel 100B. After the position of the second display panel 100B is aligned, the first robot 3 places the second display panel 100B on the second stage 41B.

[0048] The first robot 3 places the first display panel 100A and the second display panel 100B on the second stage 41B, and then moves the suction unit 31 to the carry-in mechanism 2. After the suction unit 31 has moved to the carry-in mechanism 2, the second transport mechanism 4B moves the first display panel 100A and the second display panel 100B placed on the second stage 41B to the position of the ID reader 11. Either the first ID reader 11A or the second ID reader 11B reads the first display panel 100A and the second display panel 100B and acquires inspection data and the like.

[0049] After the first display panel 100A and the second display panel 100B have been read by the ID reader 11, the second transport mechanism 4B moves the first display panel 100A and the second display panel 100B placed on the second stage 41B to the second inspection unit 6B.

[0050] The first robot 3 repeats the above operation. That is, the first robot 3 alternately moves the first display panel 100A and the second display panel 100B to the first stage 41A and the second stage 41B.

[0051] (Operations of the First Moving Mechanism 5A and the Second Moving Mechanism 5B) The operation of the first moving mechanism 5A will be described. As shown in FIG. 4(a), first, when the first display panel 100A and the second display panel 100B are transported to the first moving mechanism 5A by the first stage 41A, the drive unit 56A moves the holding arm 53A so that the first suction unit 54A is positioned above the first stage 41A. Thereafter, the first suction unit 54A is moved in the Z2 direction by the position adjustment unit 57A and comes into contact with the first display panel 100A and the second display panel 100B placed on the first stage 41A. After the first suction unit 54A suctions the first display panel 100A and the second display panel 100B, the first suction unit 54A is moved in the Z1 direction by the position adjustment unit 57A.

[0052] 4(b), after the shutter 17 of the first inspection unit 6A opens, the holding arm 53A is rotated 180° counterclockwise by the drive unit 56A. As the holding arm 53A rotates 180°, the first display panel 100A and the second display panel 100B that are sucked by the first suction unit 54A move to the first inspection unit 6A. Thereafter, the position adjustment unit 57A moves the first suction unit 54A in the Z2 direction, so that the first display panel 100A and the second display panel 100B are placed on the placement unit 12 of the first inspection unit 6A.

[0053] Next, as shown in FIG. 4(c), the driving unit 56A rotates the holding arm 53A clockwise by 180° to move the holding arm 53A to the first position P1. When the holding arm 53A moves to the first position P1, the first suction unit 54A moves to a position overlapping with the first stage 41A. After the holding arm 53A moves to the first position P1, the first inspection unit 6A closes the shutter 17 to perform a lighting inspection of the first display panel 100A and the second display panel 100B. At this time, the first stage 41A transports the next first display panel 100A and second display panel 100B to the first moving mechanism 5A. The first suction unit 54A moves in the Z2 direction by the position adjustment unit 57A and abuts against the first display panel 100A and the second display panel 100B placed on the first stage 41A. After the first suction portion 54A has suctioned the first display panel 100A and the second display panel 100B, the first suction portion 54A is moved in the Z1 direction by the position adjustment portion 57A.

[0054] Next, as shown in FIG. 4(d), when the lighting inspection by the first inspection unit 6A is completed, the shutter 17 opens. After the shutter 17 opens, the drive unit 56A rotates the holding arm 53A counterclockwise by 90 degrees to move the holding arm 53A to the second position P2. When the holding arm 53A moves to the second position P2, the second suction unit 55A moves to a position overlapping with the placement unit 12. After the holding arm 53A moves to the second position P2, the second suction unit 55A moves in the Z2 direction by the position adjustment unit 57A and abuts against the first display panel 100A and the second display panel 100B placed on the placement unit 12. After the second suction unit 55A suctions the first display panel 100A and the second display panel 100B, the second suction unit 55A moves in the Z1 direction by the position adjustment unit 57A.

[0055] Next, as shown in FIG. 5(e), the driving unit 56A rotates the holding arm 53A counterclockwise by 90 degrees, thereby moving the holding arm 53A to the third position P3. When the holding arm 53A moves to the third position P3, the first suction unit 54A moves to a position overlapping with the placement unit 12. After the holding arm 53A moves to the third position P3, the second suction unit 55A moves in the Z2 direction by the position adjustment unit 57A, and places the first display panel 100A and the second display panel 100B on the placement unit 12. After the first display panel 100A and the second display panel 100B are placed on the placement unit 12, the second suction unit 55A moves in the Z1 direction by the position adjustment unit 57A.

[0056] next, The drive unit 56A rotates the holding arm 53A clockwise. 270° By rotating the holding arm 53A, the holding arm 53A is moved to the fourth position P4. When the holding arm 53A is moved to the fourth position P4, Second suction portion 55A The holding arm 53A moves to a position where it overlaps with the first stage 41A. After the holding arm 53A moves to the fourth position P4, the second suction unit 55A is moved in the Z2 direction by the position adjustment unit 57A, and the first display panel 100A and the second display panel 100B are placed on the first stage 41A. After the first display panel 100A and the second display panel 100B are placed on the first stage 41A, Second suction portion 55A is moved in the Z1 direction by position adjustment unit 57A.

[0057] 5(g), the first inspection section 6A closes the shutter 17 and performs a lighting inspection of the first display panel 100A and the second display panel 100B. After the inspected first display panel 100A and the second display panel 100B are placed on the first stage 41A by the first moving mechanism 5A, the first transport mechanism 4A moves the first stage 41A to a discharge position at the end in the X1 direction. After the inspected first display panel 100A and the second display panel 100B are removed from the first stage 41A at the discharge position, the first transport mechanism 4A moves the first stage 41A to the end in the X2 direction. Additionally, the drive unit 56A rotates the holding arm 53A counterclockwise by 90 degrees.

[0058] Next, as shown in FIG. 5(h), the first stage 41A transports the next first and second display panels 100A and 100B to the first moving mechanism 5A. The first suction portion 54A is moved in the Z2 direction by the position adjustment portion 57A and comes into contact with the first and second display panels 100A and 100B placed on the first stage 41A. After the first suction portion 54A has adsorbed the first and second display panels 100A and 100B, the first suction portion 54A is moved in the Z1 direction by the position adjustment portion 57A. The first moving mechanism 5A is moved in the Z2 direction by the position adjustment portion 57A as shown in FIG. 4(d) to FIG. (e), (g), (h) Repeat the operation up to

[0059] As described above, the first movement mechanism 5A can hold the display panel 100 from the first stage 41A at the first position P1 even when the first inspection unit 6A is performing a lighting inspection of the display panel 100. Also, the first movement mechanism 5A can place the display panel 100 on the first stage 41A at the fourth position P4 even when the first inspection unit 6A is performing a lighting inspection of the display panel 100. Note that, for the first movement mechanism 5A, a counterclockwise direction is the "one direction" and a clockwise direction is the "other direction."

[0060] Next, the operation of the second moving mechanism 5B will be described. As shown in FIG. 6(a), first, when the first display panel 100A and the second display panel 100B are transported to the second moving mechanism 5B by the second stage 41B, the driving unit 56B moves the holding arm 53B so that the first suction unit 54B is positioned above the second stage 41B. Thereafter, the first suction unit 54B is moved in the Z2 direction by the position adjustment unit 57B and comes into contact with the first display panel 100A and the second display panel 100B placed on the second stage 41B. After the first suction unit 54B suctions the first display panel 100A and the second display panel 100B, the first suction unit 54B is moved in the Z1 direction by the position adjustment unit 57B.

[0061] 6(b), after the shutter 17 of the first inspection unit 6A opens, the holding arm 53B is rotated 180° clockwise by the drive unit 56B. As the holding arm 53B rotates 180°, the first display panel 100A and the second display panel 100B that are sucked by the first suction unit 54B move to the second inspection unit 6B. Thereafter, the position adjustment unit 57B moves the first suction unit 54B in the Z2 direction, so that the first display panel 100A and the second display panel 100B are placed on the placement unit 12 of the second inspection unit 6B.

[0062] Next, as shown in FIG. 6(c), the driving unit 56B rotates the holding arm 53B 180° counterclockwise to move the holding arm 53B to the first position P1. When the holding arm 53B moves to the first position P1, the first suction unit 54B moves to a position overlapping with the second stage 41B. After the holding arm 53B moves to the first position P1, the second inspection unit 6B closes the shutter 17 to perform a lighting inspection of the first display panel 100A and the second display panel 100B. At this time, the second stage 41B transports the next first display panel 100A and second display panel 100B to the second moving mechanism 5B. The first suction unit 54B moves in the Z2 direction by the position adjustment unit 57B and abuts against the first display panel 100A and the second display panel 100B placed on the second stage 41B. After the first suction portion 54B has suctioned the first display panel 100A and the second display panel 100B, the first suction portion 54B is moved in the Z1 direction by the position adjustment portion 57B.

[0063] Next, as shown in FIG. 6(d), when the second inspection unit 6B finishes the lighting inspection, the shutter 17 opens. After the shutter 17 opens, the drive unit 56B rotates the holding arm 53B clockwise by 9 By rotating the holding arm 53B by 0°, the holding arm 53B is moved to the second position P2. When the holding arm 53B moves to the second position P2, the second suction portion 55B moves to a position overlapping with the placement unit 12. After the holding arm 53B moves to the second position P2, the second suction portion 55B is moved in the Z2 direction by the position adjustment unit 57B and comes into contact with the first display panel 100A and the second display panel 100B placed on the placement unit 12. After the second suction portion 55B adsorbs the first display panel 100A and the second display panel 100B, the second suction portion 55B is moved in the Z1 direction by the position adjustment unit 57B.

[0064] 7(e), the driving unit 56B rotates the holding arm 53B clockwise by 90 degrees, thereby moving the holding arm 53B to the third position P3. When the holding arm 53B moves to the third position P3, the first suction unit 54B moves to a position overlapping with the placement unit 12. After the holding arm 53B moves to the third position P3, the second suction unit 55B moves in the Z2 direction by the position adjustment unit 57B, and places the first display panel 100A and the second display panel 100B on the placement unit 12. After the first display panel 100A and the second display panel 100B are placed on the placement unit 12, the second suction unit 55B moves in the Z1 direction by the position adjustment unit 57B.

[0065] next, The drive unit 56B rotates the holding arm 53B counterclockwise. 270° By rotating the holding arm 53B, the holding arm 53B is moved to the fourth position P4. When the holding arm 53B is moved to the fourth position P4, Second suction part 55B The holding arm 53B moves to a position where it overlaps with the second stage 41B. After the holding arm 53B moves to the fourth position P4, the second suction unit 55B is moved in the Z2 direction by the position adjustment unit 57B, and the first display panel 100A and the second display panel 100B are placed on the second stage 41B. After the first display panel 100A and the second display panel 100B are placed on the second stage 41B, Second suction part 55B is moved in the Z1 direction by position adjustment unit 57B.

[0066] 7(g), the second inspection section 6B closes the shutter 17 and performs a lighting inspection of the first display panel 100A and the second display panel 100B. The first display panel 100A and the second display panel 100B that have been inspected are moved to the second stage by the second moving mechanism 5B. After the inspected first display panel 100A and second display panel 100B are placed on 41B, the second transport mechanism 4B moves the second stage 41B to an ejection position at the end in the X1 direction. After the inspected first display panel 100A and second display panel 100B are ejected from the second stage 41B by the second robot 7, the second transport mechanism 4B moves the second stage 41B to an end in the X2 direction. After the inspected first display panel 100A and second display panel 100B are removed from the second stage 41B at the ejection position, the second transport mechanism 4B moves the second stage 41B to an end in the X2 direction. Additionally, the drive unit 56B rotates the holding arm 53B clockwise by 90 degrees.

[0067] Next, as shown in FIG. 7(h), the second stage 41B transports the next first and second display panels 100A and 100B to the second moving mechanism 5B. The first suction portion 54B is moved in the Z2 direction by the position adjustment portion 57B and comes into contact with the first and second display panels 100A and 100B placed on the second stage 41B. After the first suction portion 54B has adsorbed the first and second display panels 100A and 100B, the first suction portion 54B is moved in the Z1 direction by the position adjustment portion 57B. The second moving mechanism 5B is moved in the Z1 direction by the position adjustment portion 57B as shown in FIG. 6(d) to FIG. (e), (g), (h) Repeat the operation up to

[0068] As described above, the second movement mechanism 5B can hold the display panel 100 from the first stage 41A at the first position P1 even when the second inspection section 6B is performing a lighting inspection of the display panel 100. Also, the second movement mechanism 5B can place the display panel 100 on the first stage 41A at the fourth position P4 even when the second inspection section 6B is performing a lighting inspection of the display panel 100. In B, clockwise is "one way" and counterclockwise is "the other way".

[0069] (Movement of the second robot 7) The movement of the second robot 7 will be described. The second robot 7 alternately moves the inspected display panels 100, which are transported by the first stage 41A and the second stage 41B, from the first stage 41A and the second stage 41B to the transport mechanism 8. Specifically, after the inspected first display panel 100A and the second display panel 100B are placed on the first stage 41A by the first moving mechanism 5A, the first moving mechanism 5A moves the first stage 41A to a discharge position at the end in the X1 direction. After the first stage 41A moves to the discharge position, the second robot 7 moves the suction unit 71 to above the inspected first display panel 100A and the second display panel 100B. The suction unit 71 moves in the Z2 direction by the position adjustment unit 72 to hold the inspected first display panel 100A and the second display panel 100B. Thereafter, the second robot 7 places the display panels 100 for which the inspection result is "non-defective" on the transport mechanism 8, and places the display panels 100 for which the inspection result is "defective" on the discharge tray 9.

[0070] The transport mechanism 8 moves the first display panel 100A and the second display panel 100B to the end in the X1 direction. The robot for the next process moves the inspected first display panel 100A and second display panel 100B that have arrived.

[0071] After the inspected first display panel 100A and second display panel 100B are moved from the first stage 41A by the second robot 7, the first movement mechanism 5A moves the first stage 41A in the X2 direction.

[0072] After the first stage 41A moves in the X2 direction, the second transport mechanism 4B moves the inspected first display panel 100A and second display panel 100B placed on the second stage 41B to a discharge position at the end in the X1 direction. After the second stage 41B moves to the discharge position at the end in the X1 direction, the second robot 7 moves the suction unit 71 to above the inspected first display panel 100A and second display panel 100B. The suction unit 71 moves in the Z2 direction by the position adjustment unit 72 and holds the inspected first display panel 100A and second display panel 100B. After that, the second robot 7 places the display panel 100 whose inspection result is "good" on the transport mechanism 8, and places the display panel 100 whose inspection result is "defective" on the discharge placement unit 9.

[0073] The transport mechanism 8 moves the first display panel 100A and the second display panel 100B to the end in the X1 direction. The robot for the next process moves the inspected first display panel 100A and second display panel 100B that have arrived.

[0074] After the inspected first display panel 100A and second display panel 100B are moved from the second stage 41B by the second robot 7, the second transport mechanism 4B moves the second stage 41B in the X2 direction.

[0075] (Effects of this embodiment) In the transfer system 1 of this embodiment, the first moving mechanism 5A includes a holding arm 53A in which a first arm 51A and a second arm 52A are connected in an L-shape, a first suction unit 54A provided at the tip of the first arm 51A and holding the display panel 100, a second suction unit 55A provided at the tip of the second arm 52A and holding the display panel 100, and a drive unit 56A that rotates the holding arm 53A about the connection position of the first arm 51A and the second arm 52A as a rotation axis. In this embodiment, the drive unit 56A moves the holding arm 53A to a first position P1 where the first suction unit 54A holds the uninspected display panel 100 placed on the first stage 41A, and a second suction unit 55A located 90 degrees counterclockwise from the first position P1. The holding arm 53A is rotated 90° counterclockwise from the second position P2 to a second position P2 where the second suction portion 55A holds the inspected display panel 100 placed on the first inspection portion 6A, rotated 90° counterclockwise from the second position P2 to a third position P3 where the first suction portion 54A places the display panel 100 before inspection on the first inspection portion 6A, and rotated 180° clockwise from the third position P3 to a fourth position P4 where the second suction portion 55A places the inspected display panel 100 on the first stage 41A.

[0076] According to this embodiment, when the driving unit 56A rotates the holding arm 53A to the first position P1, the first suction unit 54A can hold the uninspected display panel 100 placed on the first stage 41A, but the second suction unit 55A cannot hold the inspected display panel 100 placed on the first inspection unit 6A. That is, the second suction unit 55A does not overlap with the first inspection unit 6A in the vertical direction. Therefore, even if the display panel 100 has been inspected by the first inspection unit 6A, the first moving mechanism 5A can hold the uninspected display panel 100 placed on the first stage 41A, and therefore the tact time of the transport mechanism can be shortened. Furthermore, when the drive unit 56A rotates the holding arm 53A to the fourth position P4, the first suction unit 54A can place the inspected display panel 100 on the first stage 41A, but the second suction unit 55A cannot hold the inspected display panel 100 placed on the first inspection unit 6A. That is, the second suction unit 55A does not overlap with the first inspection unit 6A in the vertical direction. Therefore, even when the display panel 100 is being inspected by the first inspection unit 6A, the first moving mechanism 5A can place the inspected display panel 100 on the first stage 41A, and the tact time of the transport mechanism can be shortened.

[0077] In the transport system 1 of this embodiment, the second moving mechanism 5B is configured similarly to the first moving mechanism 5A. Therefore, even if the display panel 100 has been inspected by the second inspection section 6B, the second moving mechanism 5B can hold the uninspected display panel 100 placed on the second stage 41B, thereby shortening the tact time of the transport mechanism. Also, even if the display panel 100 is being inspected by the second inspection section 6B, the second moving mechanism 5B can place the inspected display panel 100 on the second stage 41B, thereby shortening the tact time of the transport mechanism.

[0078] In the transfer system 1 of this embodiment, the first robot aligns the display panel 100 relative to the first stage 41A in the Y-axis direction and in the rotation direction about the Z-axis based on the detection result of the alignment camera 10, and the first transfer mechanism 4A moves the first stage 41A to align the first stage 41A relative to the display panel 100 in the X-axis direction based on the detection result of the alignment camera 10. Similarly, the first robot aligns the display panel 100 relative to the second stage 41B in the Y-axis direction and in the rotation direction about the Z-axis based on the detection result of the alignment camera 10, and the second transfer mechanism 4B moves the second stage 41B to align the second stage 41B relative to the display panel 100 in the X-axis direction based on the detection result of the alignment camera 10. With this configuration, the transport mechanism 4 moves the stage 41 to align the stage 41 in the X-axis direction with respect to the display panel 100, so the first robot 3 can omit a mechanism for moving the display panel 100 in the X-axis direction. This makes it possible to simplify the configuration of the first robot 3.

[0079] In the transfer system 1 of this embodiment, when viewed from the Z-axis direction, the first robot 3 moves the display panel 100 arranged between the first transfer mechanism 4A and the second transfer mechanism 4B to the first stage 41A of the first transfer mechanism 4A and the second stage 41B of the second transfer mechanism 4B. With this configuration, the movement range of the first robot 3 to the first transfer mechanism 4A can be made the same as the movement range of the first robot 3 to the second transfer mechanism 4B.

[0080] (Other embodiments) A transfer mechanism 4 according to another embodiment will be described. FIG. 8 is a schematic diagram of a transfer mechanism according to another embodiment. As shown in FIG. 8, in this embodiment, the stage 41 includes an input stage 42 that moves the uninspected display panel 100 placed by the first robot 3 to the moving mechanism 5, and an unloading stage 43 that moves the inspected display panel 100 placed by the moving mechanism 5 to a unloading position. In this case, the moving mechanism 5 aligns the input stage 42 with respect to the display panel 100 in the X-axis direction based on the position of the display panel 100 detected by the alignment camera 10.

[0081] With this configuration, compared to when there is only one stage 41, the carry-in stage 42 and the discharge stage 43 each transport the display panel 100, and therefore the travel distance of the carry-in stage 42 and the discharge stage 43 is shorter. This makes it possible to reduce the tact time required for the transport mechanism 4 to transport the display panel 100. Note that, similar to the above embodiment, the transport mechanism 4 in this embodiment may include a first transport mechanism and a second transport mechanism.

[0082] In the above embodiment, the inspection unit 6 as the processing unit performs a lighting inspection, but is not limited thereto. For example, the processing unit may perform a surface inspection of a glass substrate in a display panel. The processing unit may also perform a process of applying an adhesive to the display panel. [Explanation of symbols]

[0083] REFERENCE SIGNS LIST 1...Transport system, 2...Loading mechanism, 3...First robot, 4...Transport mechanism, 4A...First transport mechanism, 4B...Second transport mechanism, 5...Moving mechanism, 5A...First moving mechanism, 5B...Second moving mechanism, 6...Inspection section, 6A...First inspection section, 6B...Second inspection section, 7...Second robot, 8...Transport mechanism, 9...Discharge placement section, 10...Alignment camera, 11...ID reader, 11A...First ID reader, 11B...Second ID reader, 12...Placement section, 13...Camera, 14...Backlight, 15...Housing, 17...Shutter, 18...Opening, 19...Air cylinder, 21...Stage, 31...Suction section, 32...Position adjustment section, 33...Drive section, 41...Stage, 41A...First stage, 41B...Second stage, 42...Loading stage, 43 ...removal stage, 51A...first arm, 51B...first arm, 52A...second arm, 52B...second arm, 53A...holding arm, 53B...holding arm, 54A...first suction portion, 54B...first suction portion, 55A...second suction portion, 55B...second suction portion, 56A...driving portion, 56B...driving portion, 57A...position adjustment portion, 57B...position adjustment portion, 71...suction portion, 72...position adjustment portion, 73...first driving portion, 74...second driving portion, 100...display panel, 100A...first display panel, 100B...second display panel, 101...flexible wiring, 111...upper driving portion, 112...lower driving portion, 200...defective product pallet, 411...main body, 412...FPC holding portion, P1...position, P2...position, P3...position, P4...position

Claims

1. A first robot that holds a workpiece; an alignment camera that detects the position of a workpiece held by the first robot; a transport mechanism including a stage on which a workpiece held by the first robot is placed; a moving mechanism for moving the workpiece placed on the stage to a processing section that performs processing on the workpiece, and moving the processed workpiece that has been processed in the processing section to the stage; the moving mechanism includes a holding arm in which a first arm and a second arm are connected in an L-shape, a first suction unit provided at a tip of the first arm and configured to hold the workpiece, a second suction unit provided at a tip of the second arm and configured to hold the workpiece, and a drive unit that rotates the holding arm around a connection position of the first arm and the second arm as a rotation axis; the drive unit rotates the holding arm to a first position where the first suction unit holds an unprocessed workpiece placed on the stage, a second position rotated 90° in one direction from the first position where the second suction unit holds the processed workpiece placed on the processing unit, a third position rotated 90° in the one direction from the second position where the first suction unit places the unprocessed workpiece on the processing unit, and a fourth position rotated 270° in the other direction from the third position where the second suction unit places the processed workpiece on the stage, The transport mechanism moves the stage to a discharge position after the processed workpiece is placed on the stage, If the moving direction of the stage is the X-axis direction, the up-down direction is the Z-axis direction, and the direction perpendicular to the X-axis direction and the Z-axis direction is the Y-axis direction, The first robot aligns the workpiece relative to the stage in a Y-axis direction and a rotation direction about a Z-axis based on a detection result of the alignment camera; A conveying system characterized in that the conveying mechanism moves the stage to align the stage in the X-axis direction relative to the workpiece based on the detection results of the alignment camera.

2. 2. The transport system according to claim 1, The stage includes a carry-in stage for moving the unprocessed workpiece placed by the first robot to the moving mechanism, and a stage for moving the processed workpiece placed by the moving mechanism. and a discharge stage that moves the workpiece to the discharge position.

3. 3. The transport system according to claim 1, A conveying system characterized in that the moving mechanism is arranged in plurality in the X-axis direction.

4. The conveying system according to any one of claims 1 to 3, the moving mechanism includes a first moving mechanism disposed on one side in the Y-axis direction and a second moving mechanism disposed on the other side in the Y-axis direction, The transport system is characterized in that the transport mechanism includes a first transport mechanism arranged on one side in the Y-axis direction, and a second transport mechanism arranged on the other side in the Y-axis direction.

5. The transport system according to claim 4, A conveying system characterized in that, when viewed from above, the first robot moves the workpiece arranged between the first conveying mechanism and the second conveying mechanism to a stage of the first conveying mechanism and a stage of the second conveying mechanism.

6. The transport system according to claim 4, A conveying system characterized by comprising a second robot that moves the processed work from the stage of the first conveying mechanism and the stage of the second conveying mechanism to a next process after the stage of the first conveying mechanism and the stage of the second conveying mechanism have moved to the discharge position.

7. The conveying system according to any one of claims 1 to 6, A conveying system, wherein the first robot is capable of holding a plurality of the workpieces at the same time.

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