Probe storage jig, probe storage system, and probe storage method

Abstract

To provide a probe storage jig, a probe storage system, and a probe storage method that facilitate the confirmation of defects of a probe.SOLUTION: A probe storage jig stores a probe having an arm portion of a cantilever structure and a support portion connected to a fixed end of the arm portion. The probe storage jig has a structure in which a first guide plate and a second guide plate are laminated. Each of the first guide plate and the second guide plate is formed with a through-hole that penetrates from an upper surface to a lower surface. The probe storage jig holds the probe that penetrates through the respective through-holes of the first and second guide plates, in a state in which an upper part of the support portion is exposed when viewed from above the probe storage jig and the tip of a free end of the arm portion is exposed when viewed from below the probe storage jig. The probe storage jig is designed such that the first and second guide plates are movable so that the probe is sandwiched between the first and second guide plates.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a probe storage jig for storing a probe used to inspect an object under inspection, a probe storage system, and a probe storage method. [Background technology]

[0002] An electrical connection device having a probe that is brought into contact with an object under test, such as an integrated circuit, is used for testing. In testing using the electrical connection device, one end of the probe is brought into contact with an electrode terminal of the object under test. The other end of the probe is electrically connected to a connection terminal arranged on a circuit board of the electrical connection device. The connection terminal is electrically connected to a testing device such as a tester. Signals can be transmitted and received between the object under test and the testing device via the probe.

[0003] The probes are stored, for example, in a jig that holds the probes in a stable position. In the following, the jig that stores the probes is referred to as a "probe storage jig." A configuration including the probes and the probe storage jig is referred to as a "probe storage system." When the probes are joined to a circuit board to assemble an electrical connection device, the probes are removed from the probe storage jig using a handler or the like. The probes removed from the probe storage jig are joined to the circuit boards one by one. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Patent No. 2846851 Summary of the Invention [Problem to be solved by the invention]

[0005] When assembling an electrical connecting device, it is desirable to check for defects in a probe before bonding the probe to a circuit board. An object of the present invention is to provide a probe storage jig, a probe storage system, and a probe storage method that make it easy to check for defects in a probe. [Means for solving the problem]

[0006] According to one aspect of the present invention, there is provided a probe storage jig for storing a probe having an arm portion with a cantilever structure and a support portion connected to a fixed end of the arm portion. The probe storage jig has a configuration in which a first guide plate and a second guide plate, each of which has both sides defined by an upper surface and a lower surface facing each other, are stacked. Each of the first guide plate and the second guide plate has a through hole penetrating from the upper surface to the lower surface. The probe storage jig holds a probe that has passed through each of the through holes of the first guide plate and the second guide plate in a state in which an upper portion of the support portion is exposed when viewed from above the probe storage jig and a tip of a free end of the arm portion is exposed when viewed from below the probe storage jig. The probe storage jig is configured such that the first guide plate and the second guide plate are movable so that the probe is sandwiched between the first guide plate and the second guide plate. Effect of the Invention

[0007] According to the present invention, it is possible to provide a probe storage jig, a probe storage system, and a probe storage method that make it easy to check for defects in a probe. [Brief description of the drawings]

[0008] [Figure 1] FIG. 1 is a schematic diagram showing the configuration of a probe storage jig according to an embodiment. [Diagram 2] FIG. 2 is a schematic cross-sectional view taken along the line II-II in FIG. 1, showing the configuration of a probe storage jig according to the embodiment. [Diagram 3] FIG. 3 is a schematic plan view showing the configuration of a probe storage jig according to the embodiment. [Figure 4]FIG. 4 is a schematic plan view showing the overall configuration of the probe storage jig according to the embodiment. [Diagram 5] FIG. 5 is a schematic diagram showing the configuration of a probe storage jig of a comparative example. [Figure 6A] FIG. 6A is a schematic front view for explaining a probe storage method according to an embodiment (part 1). [Figure 6B] FIG. 6B is a schematic cross-sectional view (part 1) for explaining a probe storage method according to an embodiment. [Figure 6C] FIG. 6C is a schematic plan view for explaining a probe storage method according to an embodiment (part 1). [Figure 7A] FIG. 7A is a schematic front view for explaining a probe storage method according to an embodiment (part 2). [Figure 7B] FIG. 7B is a schematic cross-sectional view (part 2) for explaining the probe storage method according to the embodiment. [Figure 7C] FIG. 7C is a schematic plan view for explaining a probe storage method according to an embodiment (part 2). [Figure 8] FIG. 8 is a schematic diagram showing a configuration of a probe storage jig according to a modified example of the embodiment. [Figure 9] FIG. 9 is a schematic diagram showing an example of the posture of a probe stored in a probe storage jig. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] Next, an embodiment of the present invention will be described with reference to the drawings. In the following description of the drawings, the same or similar parts are denoted by the same or similar reference numerals. However, the drawings are schematic, and the length and thickness ratios of each part are different from the actual ones. In addition, the drawings include parts whose dimensional relationships and ratios differ from each other.

[0010] A probe storage jig 10 according to an embodiment of the present invention shown in Fig. 1 stores a probe 20 used for inspecting an object to be inspected. As shown in Fig. 1, the probe 20 has an arm portion 21 with a cantilever structure and a support portion 22 connected to a fixed end 201 of the arm portion 21.

[0011] The probe storage jig 10 has a configuration in which a first guide plate 111 and a second guide plate 112, each of which has opposing upper and lower surfaces defined thereon, are stacked together. Each of the first guide plate 111 and the second guide plate 112 has a through hole 100 formed therein, penetrating from the upper surface to the lower surface.

[0012] The probe storage jig 10 holds the probe 20 in a state where the upper part of the support part 22 is exposed when viewed from above the probe storage jig 10, and the tip of the free end 202 of the arm part 21 is exposed when viewed from below the probe storage jig 10. Here, viewing from above the probe storage jig 10 means viewing from the support part 22 of the probe 20 to the arm part 21. Viewing from below the probe storage jig 10 means viewing from the arm part 21 of the probe 20 to the support part 22. More specifically, the probe storage jig 10 holds the probe 20 in a state where the probe 20 penetrates the through-holes 100 of the first guide plate 111 and the second guide plate 112. When the probe 20 is stored in the probe storage jig 10, the upper part of the support part 22 of the probe 20 is exposed above the upper surface of the first guide plate 111. A tip 210 of the free end 202 of the arm portion 21 of the probe 20 is exposed below the lower surface of the second guide plate 112. The tip 210 is the portion that comes into contact with the object under test.

[0013] Note that even if the upper part of the support part 22 is not located above the probe storage jig 10, the upper part of the support part 22 may be exposed when viewed from above the probe storage jig 10. In the following, a state in which the upper part of the support part 22 can be observed from the outside will also be expressed as the upper part of the support part 22 being exposed above the probe storage jig 10. Also, even if the tip of the free end 202 of the arm part 21 is not located below the probe storage jig 10, the tip of the free end 202 may be exposed when viewed from below the probe storage jig 10. In the following, a state in which the tip of the free end 202 can be observed from the outside will also be expressed as the tip of the free end 202 of the arm part 21 being exposed below the probe storage jig 10.

[0014] In the following description, when there is no need to limit the guide plates constituting the probe storage jig 10, such as the first guide plate 111 and the second guide plate 112, they will be referred to as guide plates 11. Each of the guide plates 11 has a through hole 100.

[0015] As shown in Fig. 1, the penetration direction of the through-hole 100, i.e., the thickness direction of the guide plate 11, is defined as the Z direction. In Fig. 1, the Z direction is the up-down direction on the paper, the X direction is the left-right direction on the paper, and the Y direction is the depth direction on the paper. In the explanation of the embodiment, a view seen from the Y direction is defined as a front view. The front view shows a cross section of the guide plate 11 along a plane parallel to the Z direction.

[0016] 1, the support portion 22 of the probe 20 is provided with a protrusion 23 that protrudes outward from the support portion 22 when viewed in the Z direction. The protrusion 23 of the probe 20 stored in the probe storage jig 10 abuts against the upper surface of the first guide plate 111. The protrusion 23 of the probe 20 functions as a stopper to prevent the probe 20 from falling inside the through-hole 100. In a probe 20 having a plurality of protrusions 23, the respective protrusions 23 may be disposed at the same height.

[0017] In the probe storage system shown in Fig. 1, the protrusion 23 of the probe 20 abuts against the upper surface of the first guide plate 111, and the upper part of the support part 22 is exposed above the upper surface of the first guide plate 111. When the probe storage jig 10 holds the probe 20 with the arm part 21 at the bottom and the support part 22 at the top, it is preferable that the protrusion 23 is located at a position above the center of gravity of the probe 20. Since the protrusion 23 is located above the center of gravity of the probe 20, the position of the center of gravity of the probe 20 is lower than the position at which the probe storage jig 10 supports the probe 20. By placing the center of gravity of the probe 20 below the position at which the probe 20 is supported, the probe storage jig 10 can hold the probe 20 with the probe 20 in a stable posture.

[0018] FIG. 2 is a cross-sectional view of the probe storage jig 10 along the II-II direction in FIG. 1. FIG. 3 is a plan view of the probe storage jig 10 as viewed from the Z direction. As shown in FIG. 3, the plan view shows a cross section of the probe 20 along the XY plane at a position below the protrusion 23 (the same applies below). In addition, in the plan view, the through hole 100 of the second guide plate 112 is shown by a broken line through the first guide plate 111. Although details will be described later, the probe storage jig 10 is configured such that the first guide plate 111 and the second guide plate 112 are relatively movable in a direction intersecting the penetrating direction of the through hole 100. For example, the probe storage jig 10 is configured such that the first guide plate 111 and the second guide plate 112 are relatively movable in the XY plane, which is a direction perpendicular to the penetrating direction of the through hole 100.

[0019] In a plan view seen from the penetration direction, the probe 20 has a rectangular shape. Also, in a plan view, the through hole 100 has a rectangular shape. In a plan view, the outer shape of the probe 20 and the shape of the through hole 100 may be similar. As shown in FIGS. 1 to 3, two adjacent side surfaces of the probe 20 abut against the inner wall surface of the through hole 100 of the first guide plate 111. Then, the other two adjacent side surfaces of the probe 20 abut against the inner wall surface of the through hole 100 of the second guide plate 112.

[0020] That is, the four sides of the probe 20 facing the inner wall surface of the through hole 100 abut against either the inner wall surface of the through hole 100 in the first guide plate 111 or the inner wall surface of the through hole 100 in the second guide plate 112. By abutting the four sides of the probe 20 against the inner wall surface of the through hole 100, the probe storage jig 10 stably holds the probe 20.

[0021] An adhesive 25 is disposed on the side of the support portion 22 of the probe 20. For example, a solder material is used for the adhesive 25, and in the process of assembling the electrical connection device, the upper surface of the support portion 22 of the probe 20 is joined to the circuit board by reflow soldering. By joining the support portion 22 to the electrode terminal of the circuit board with the adhesive 25, the probe 20 is electrically connected to the circuit pattern formed on the circuit board. By exposing the portion on which the adhesive 25 is disposed above the probe storage jig 10, the state of the adhesive 25 can be observed while the probe is stored in the probe storage jig 10.

[0022] In addition, when the upper surface of the support 22 is a region to be bonded to the circuit board, as shown in FIG. 1, the adhesive 25 may be disposed on a portion of the upper part of the support 22 that is extended in the Z direction (hereinafter referred to as the "extended portion"). Hereinafter, the region of the probe 20 that is bonded to the circuit board is also referred to as the "bonding portion." In the probe 20 shown in FIG. 1, the upper surface of the extended portion is the bonding portion. By disposing the adhesive 25 on the side surface of the extended portion, the solder material flows around the upper surface of the extended portion during reflow soldering. By flowing the solder material around the bonding portion, the adhesive 25 can be prevented from spreading to the circuit board.

[0023] A plurality of probes 20 can be stored in one probe storage jig 10. For example, as shown in Fig. 4, a plurality of through holes 100 may be formed in a disk-shaped guide plate 11. The probes 20 are inserted into the respective through holes 100 formed in the guide plate 11, and the probe storage jig 10 stores the plurality of probes 20. The arrangement of the through holes 100 formed in the guide plate 11 can be arbitrarily set according to a desired layout.

[0024] In the probe storage system shown in Fig. 1, the upper part of the support part 22 of the probe 20 is exposed above the probe storage jig 10. Therefore, when the upper surface of the support part 22 is a joint part to be joined to a circuit board, the state of the joint part of the probe 20 can be observed while stored in the probe storage jig 10. Therefore, when a defect occurs in the joint part that makes it difficult to join the probe 20 to the circuit board, the defect in the joint part can be detected before the process of assembling the electrical connection device. For example, the probe 20 having a defect in the joint part or the probe 20 having an insufficient amount of adhesive 25 for joining can be excluded from the process of assembling the electrical connection device.

[0025] 1, the tip 210 of the arm 21 of the probe 20 is exposed below the probe storage jig 10. Therefore, the state of the tip 210 of the arm 21 of the probe 20 can be observed while the probe is stored in the probe storage jig 10. Therefore, if the arm 21 has a defect that makes it difficult to bring the tip 210 into contact with the object to be inspected, the defect in the arm 21 can be detected before the process of assembling the electrical connection device. For example, a probe 20 in which the tip 210 of the arm 21 is bent or broken can be excluded from the process of assembling the electrical connection device.

[0026] For comparison with the probe storage system shown in Fig. 1, a case in which a probe 20 is stored in a comparative probe storage fixture 10M shown in Fig. 5 will be considered below. The comparative probe storage fixture 10M has a first slit plate 11M and a second slit plate 12M. The first slit plate 11M and the second slit plate 12M each have comb-tooth slits.

[0027] When the probe 20 is stored in the comparative probe storage jig 10M, the probe 20 is inserted into the slit of the first slit plate 11M and the slit of the second slit plate 12M, for example, as shown by arrows M1 and M2 in Fig. 5. The support portion 22 of the probe 20 is sandwiched in the slit of the first slit plate 11M with the tip 210 of the arm portion 21 of the probe 20 facing upward. Then, the arm portion 21 of the probe 20 is sandwiched in the slit of the second slit plate 12M.

[0028] Therefore, when the probe 20 is stored in the comparative probe storage jig 10M, the joint of the probe 20 cannot be observed. Because the joint cannot be observed, defects in the joint of the probe 20 cannot be detected until the probe 20 is removed from the comparative probe storage jig 10M. Furthermore, the probe 20 is held in the slits of the first slit plate 11M and the slits of the second slit plate 12M by its own weight. For this reason, in order to stably transport the probe 20 stored in the comparative probe storage jig 10M, a mechanism for fixing the probe 20 to the comparative probe storage jig 10M is required.

[0029] On the other hand, in a probe storage system using the probe storage jig 10, the joint of the probe 20 is exposed above the probe storage jig 10, and the tip 210 of the arm portion 21 of the probe 20 is exposed below the probe storage jig 10. Therefore, the joint and tip 210 of the probe 20 can be observed in a state where the probe 20 is stored in the probe storage jig 10. Furthermore, the center of gravity of the probe 20 is lower than the position where the probe storage jig 10 supports the probe 20. Since the center of gravity of the probe 20 is lower, the posture of the probe 20 stored in the probe storage jig 10 is stable. Therefore, even if the probe 20 is not fixed to the probe storage jig 10, the probe 20 stored in the probe storage jig 10 can be transported in a stable posture.

[0030] As described above, the probe storage jig 10 according to the embodiment stores the probe 20 in a state in which the joints of the probe 20 and the tips 210 of the arms 21 are exposed. Therefore, the probe storage jig 10 makes it easy to check for defects in the probe.

[0031] An example of a probe storage method for storing the probe 20 in the probe storage jig 10 will be described below with reference to Figures 6A, 6B, 6C to 7A, 7B, and 7C. Figures 6A and 7A are front views, Figures 6B and 7B are cross-sectional views taken along the II-II direction in Figure 1, and Figures 6C and 7C are plan views viewed from the Z direction. The adhesive 25 is not shown in Figures 6A, 6B, 6C to 7A, 7B, and 7C.

[0032] First, the probe storage jig 10 and the probe 20 are prepared. Then, as shown in Fig. 6A, Fig. 6B, and Fig. 6C, in the probe storage jig 10, the position of the through hole 100 of the first guide plate 111 and the position of the through hole 100 of the second guide plate 112 are aligned when viewed from the Z direction. Next, the probe 20 is inserted into each of the through holes 100 of the first guide plate 111 and the second guide plate 112. Specifically, the probe 20 is inserted into the through hole 100 from the side of the upper surface of the first guide plate 111 until the convex portion 23 formed on the support portion 22 abuts against the upper surface of the first guide plate 111.

[0033] When the probe 20 is inserted into the through-hole 100 until the protrusion 23 abuts against the upper surface of the first guide plate 111, the upper part of the support part 22 is exposed above the upper surface of the first guide plate 111. Then, the tip 210 of the free end 202 of the arm part 21 is exposed below the lower surface of the second guide plate 112.

[0034] Next, as shown in FIG. 7A, FIG. 7B, and FIG. 7C, the first guide plate 111 and the second guide plate 112 are moved relatively in a direction intersecting the through-hole 100 penetration direction (Z direction). For example, as shown in FIG. 7A, in the X direction, the first guide plate 111 is moved to the right of the paper as shown by the arrow DX1, and the second guide plate 112 is moved to the left of the paper as shown by the arrow DX2. Then, in the Y direction, the first guide plate 111 is moved to the right of the paper as shown by the arrow DY1, and the second guide plate 112 is moved to the left of the paper as shown by the arrow DY2. That is, as shown in FIG. 7C, in the XY plane, the first guide plate 111 is moved to the lower right of the paper as shown by the arrow DZ1, and the second guide plate 112 is moved to the upper left of the paper as shown by the arrow DZ2. Note that the position of either the first guide plate 111 or the second guide plate 112 may be fixed, and the position of the other may be moved.

[0035] As the first guide plate 111 moves relative to the probe 20, a first inner wall surface 101 of the through hole 100 of the first guide plate 111 comes into contact with the probe 20. On the other hand, a second inner wall surface 102 opposing the first inner wall surface 101 is spaced apart from the probe 20. Also, as the second guide plate 112 moves relative to the probe 20, a third inner wall surface 103 of the second guide plate 112 facing the same direction as the first inner wall surface 101 is spaced apart from the probe 20, and a fourth inner wall surface 104 opposing the third inner wall surface 103 comes into contact with the probe 20.

[0036] As described above, by moving the first guide plate 111 and the second guide plate 112 on the XY plane, the probe 20 is sandwiched between the first guide plate 111 and the second guide plate 112. The probe storage jig 10 fixes the position of the probe 20 by sandwiching the probe 20 between the guide plates 11.

[0037] According to the above-described probe storage method, the probe 20 is stored in the probe storage jig 10 in a state in which the joint of the probe 20 and the tip 210 of the arm portion 21 are exposed. Therefore, according to the probe storage method according to the embodiment, it is easy to check for defects in the probe.

[0038] <Modification> In the above, an example in which the probe storage jig 10 has two guide plates 11 has been described. The number of guide plates 11 in the probe storage jig 10 may be three or more. For example, as shown in FIG. 8, the probe storage jig 10 may further have a third guide plate 113. The third guide plate 113 is stacked on a stack of the first guide plate 111 and the second guide plate 112. The third guide plate 113 has a through hole 100 through which the probe 20 penetrates. The third guide plate 113 is configured to be movable relatively to the first guide plate 111 and the second guide plate 112 in a direction intersecting the penetration direction.

[0039] 9, the probe 20 sandwiched between the first guide plate 111 and the second guide plate 112 may be stored in the probe storage jig 10 at an angle with respect to the Z direction. The probe storage jig 10 having the third guide plate 113 can adjust the attitude of the probe 20 sandwiched between the first guide plate 111 and the second guide plate 112 at an angle.

[0040] That is, in the state shown in Fig. 9, the third guide plate 113 is moved in the XY plane relative to the first guide plate 111 and the second guide plate 112. Specifically, the third guide plate 113 is moved so as to apply pressure to the side surface of the probe 20 sandwiched between the first guide plate 111 and the second guide plate 112 in a direction to correct the inclination of the probe 20. According to the probe storage jig 10 shown in Fig. 8, it is also possible to adjust the attitude of the probe 20 held in the probe storage jig 10 by moving the third guide plate 113 as described above.

[0041] (Other embodiments) Although the present invention has been described above by way of the embodiment, the description and drawings forming part of this disclosure should not be understood as limiting the present invention. Various alternative embodiments, examples and operating techniques will become apparent to those skilled in the art from this disclosure.

[0042] For example, in the above description, an example has been described in which the probe storage jig 10 stores the probe 20 having the protrusion 23 as a stopper that abuts against the upper surface of the first guide plate 111. However, the probe 20 may not have the protrusion 23. That is, the probe 20 without a stopper is inserted into the through hole 100 of the probe storage jig 10 to stabilize the position of the probe 20. At this time, the probe storage jig 10 holds the probe 20 in a state in which the upper part of the support part 22 is exposed above the probe storage jig 10 and the tip 210 is exposed below the probe storage jig 10. Then, the guide plate 11 is moved to fix the position of the probe 20.

[0043] Thus, the present invention naturally includes various embodiments not described herein. Therefore, the technical scope of the present invention is defined only by the invention-specifying matters related to the scope of the claims appropriate from the above description. [Explanation of symbols]

[0044] 10…Probe storage jig 11...Guide plate 20…Probe 21…Arm section 22...Support part 25...Adhesive 100...Through hole 101…First inner wall 102…Second inner wall surface 103…Third inner wall 104…4th inner wall 111…First guide plate 112…Second guide plate 113…Third guide plate 201…Fixed end 202…Free end 210…Apex

Claims

1. A probe storage jig for storing a probe having an arm portion of a cantilever structure and a support portion connected to a fixed end of the arm portion, The plate has a configuration in which a first guide plate and a second guide plate are stacked, the first guide plate and the second guide plate each having a through hole formed therein, the first guide plate and the second guide plate being opposed to each other and each having a through hole formed therein, the first guide plate and the second guide plate being stacked together, the probe is held in a state in which the probe passes through the through-hole of each of the first guide plate and the second guide plate, an upper portion of the support portion is exposed when viewed from above, and a tip of a free end of the arm portion is exposed when viewed from below; The first guide plate and the second guide plate are configured to be relatively movable in a direction intersecting a penetration direction of the through hole so that the probe is sandwiched between the first guide plate and the second guide plate. Probe storage fixture.

2. The probe storage jig according to claim 1 , wherein a protrusion protruding from the support portion abuts against the upper surface of the first guide plate.

3. two adjacent side surfaces of the probe abut against an inner wall surface of the through hole of the first guide plate; The other two adjacent side surfaces of the probe abut against the inner wall surface of the through hole of the second guide plate. The probe storage jig according to claim 1 or 2.

4. a third guide plate that is stacked on the stack of the first guide plate and the second guide plate and has the through hole through which the probe passes, The third guide plate is configured to be movable relative to the first guide plate and the second guide plate in a direction intersecting the penetration direction. The probe storage jig according to claim 1 .

5. A probe storage system including a probe used for inspecting an object to be inspected and a probe storage jig for storing the probe, the probe having an arm portion of a cantilever structure and a support portion connected to a fixed end of the arm portion, the support portion being provided with a protrusion protruding from the support portion; a probe storage jig having a configuration in which a first guide plate and a second guide plate are stacked, each of which has opposing upper and lower surfaces defined thereon and has a through hole formed therein that penetrates from the upper surface to the lower surface; Equipped with the probe storage jig holds the probe passing through the through-hole of each of the first guide plate and the second guide plate; the protrusion of the probe abuts on the upper surface of the first guide plate, When viewed from above the probe storage jig, an upper portion of the support portion is exposed, When viewed from below the probe storage jig, a tip of the free end of the arm portion is exposed, the probe storage jig is configured such that the first guide plate and the second guide plate are relatively movable in a direction intersecting a penetration direction of the through hole, and the probe is sandwiched between the first guide plate and the second guide plate. Probe storage system.

6. two adjacent side surfaces of the probe abut against an inner wall surface of the through hole of the first guide plate; The other two adjacent side surfaces of the probe abut against the inner wall surface of the through hole of the second guide plate. The probe storage system of claim 5 .

7. 7. The probe storage system according to claim 5, wherein when the probe storage jig holds the probe with the arm portion at a lower position and the support portion at an upper position, the convex portion is disposed at a position above a center of gravity of the probe.

8. the probe storage jig further includes a third guide plate that is stacked on the stack of the first guide plate and the second guide plate and has the through hole through which the probe passes, The third guide plate is configured to be movable relative to the first guide plate and the second guide plate in a direction intersecting the penetration direction. A probe storage system according to any one of claims 5 to 7.

9. 1. A probe storage method for storing a probe used for inspecting an object to be inspected in a probe storage jig, comprising the steps of: A probe is provided having an arm portion of a cantilever structure and a support portion connected to a fixed end of the arm portion; preparing a probe storage jig having a configuration in which a first guide plate and a second guide plate are stacked, each of which has a through hole formed therein, the first guide plate and the second guide plate being defined by opposing upper and lower surfaces, the through hole penetrating from the upper surface to the lower surface; inserting the probe into the through-holes of the first guide plate and the second guide plate such that an upper portion of the support portion is exposed when viewed from above the probe storage jig and a tip of a free end of the arm portion is exposed when viewed from below the probe storage jig; the first guide plate and the second guide plate are moved relatively in a direction intersecting a penetration direction of the through hole, and the probe is held by the probe storage jig in a state in which the probe is sandwiched between the first guide plate and the second guide plate. Probe storage method.

10. The probe storage method according to claim 9 , further comprising contacting a protrusion protruding from the support portion with the upper surface of the first guide plate.

11. preparing the probe storage jig, the probe storage jig further including a third guide plate stacked on the stack of the first guide plate and the second guide plate, the third guide plate having the through hole through which the probe penetrates; moving the third guide plate relatively to the first guide plate and the second guide plate in a direction intersecting the penetration direction to adjust a posture of the probe in a state in which the probe is sandwiched between the first guide plate and the second guide plate; The method for storing a probe according to any one of claims 9 to 10.

Images