Method and apparatus for backside physical vapor deposition - Patents.com

Abstract

To provide a cluster tool for deposition of a backside film layer on the back side of a substrate that enables the backside film to be turned over and grown on the substrate maintaining strain of the backside film after an annealing process.SOLUTION: A cluster tool comprises a physical vapor-phase deposition chamber 400 which has a chamber lid 410 and one or a plurality of side walls 403. The physical vapor-phase deposition chamber includes: a processing region 408 having its border defined at least in part with the chamber lid and the side walls; a substrate support 402 which has a substrate supporting surface 414; a shadow mask 418 which defines a deposition region on the backside of the substrate, and is arranged above the substrate support; a gas conduit 413 which is arranged at the side walls of the physical vapor-phase deposition chamber; and a magnetron 489.SELECTED DRAWING: Figure 4

Description

[Technical field]

[0001] SUMMARY OF THE DISCLOSURE Embodiments of the present disclosure relate generally to methods and apparatus, and more particularly to methods and cluster tools for depositing a film layer on the backside of a substrate. [Background technology]

[0002] As 3D NAND continues to expand vertically, the density of elements / layers formed on the integrated circuit increases. Thermal expansion, plasma non-uniformity distribution, and / or plasma density differences during plasma etching or plasma deposition processes can result in various film stresses between one layer and the next. Such film stresses can result in localized deformations of the substrate surface and cause the substrate to fail to pattern due to excessive substrate warpage. Substrate bowing also increases the likelihood of misalignment between film layers deposited thereon in subsequent manufacturing processes. Furthermore, substrate bowing causes mistakes in the lithography process on the substrate, since lithography designs rely on the wafer being substantially flat.

[0003] One solution to the bowing problem is to also deposit a film on the backside of the substrate, which reduces the strain on the backside of the substrate by matching the strain of the film grown on the top side of the substrate, thus reducing the bowing of the substrate. Depositing a film on the backside of the substrate requires either flipping the substrate or depositing the film from below the substrate. Deposition from below requires an additional source located in a specially designed processing chamber, which can be prohibitive due to the cost and additional engineering required to build such a chamber. Flipping the substrate without damaging the already grown film requires a protective layer grown on top of the deposited film, or specialized flipping equipment that does not damage or contact critical areas of the topside film. One drawback of current backside deposition methods is that the strain in the backside film is reduced after the substrate undergoes an annealing process.

[0004] Therefore, there is a need for an apparatus and method that allows for backside films to be flipped and grown on a substrate that maintains the strain of the backside film after the annealing process. Summary of the Invention

[0005] In one embodiment, a method of depositing a backside film layer on a substrate is provided that includes loading a substrate into a factory interface of a cluster tool, the substrate having a front side and a back side, the front side having an active area, flipping the substrate at the factory interface so that the back side of the substrate faces up, transferring the flipped substrate from the factory interface to a physical vapor deposition chamber, and depositing a backside film layer on the back side of the substrate. The backside film layer is deposited using a method that includes physical vapor deposition.

[0006] In another embodiment, a method is provided for depositing a backside film layer on a substrate, the method including loading a substrate into a factory interface of a cluster tool, the substrate having a front side and a back side, the front side having an active area, flipping the substrate at the factory interface so that the back side of the substrate faces up, transferring the flipped substrate from the factory interface to a physical vapor deposition chamber, and depositing a backside film layer on the backside of the substrate. The backside film layer is formed from sputtering from a sputter target, the backside film layer being deposited by providing direct current (DC) power to the sputter target.

[0007] In another embodiment, a cluster tool for depositing a backside film layer on a substrate is provided, comprising a physical vapor deposition chamber having a chamber lid and one or more sidewalls, a sputter target having a first surface in contact with a processing region and a second surface opposite the first surface, a power source coupled to the sputter target, a substrate support having a substrate support surface facing the sputter target, a shadow mask disposed on the substrate support such that a backside of the substrate is exposed to the sputter target, the shadow mask defining a deposition region on the backside of the substrate, a gas conduit disposed on a sidewall of the physical vapor deposition chamber, and a magnetron disposed adjacent the second surface of the sputter target, the magnetron including an inner pole including an inner plurality of magnets, and an outer pole including an outer plurality of magnets surrounding the inner pole.

[0008] Growing a backside film on the backside of the substrate reduces the substrate distortion caused by a film grown on the frontside of the substrate. Films deposited by physical vapor deposition (PVD) processes allow for good control of the distortion engineering.

[0009] In order that the above-mentioned features of the present disclosure may be understood in detail, a more detailed description of the present disclosure, briefly summarized above, will be obtained by referring to the embodiments. Some embodiments are illustrated in the accompanying drawings. It should be noted, however, that the accompanying drawings only illustrate exemplary embodiments, and therefore should not be considered as limiting the scope of the present disclosure, as other equally effective embodiments may be allowed. [Brief description of the drawings]

[0010] [Figure 1] 1 illustrates a flow diagram of a method for depositing a film layer on the backside of a substrate, according to one embodiment. [Diagram 2] 4 is a graph of a DC voltage pulse supplied to a magnetron. [Figure 3A]1 is a graph of the stress of a physical vapor deposition (PVD) silicon nitride (SiN) backside film layer plotted as a function of the thickness of the SiN backside film layer before and after an annealing process. [Figure 3B] 1 is a graph of the stress of a PVDSiN backside film layer plotted as a function of deposition power applied to the target before and after an annealing process. [Figure 3C] 1 is a graph of substrate bowing plotted as a function of backside film layer thickness. [Figure 4] 1 shows a schematic cross-sectional view of a PVD chamber according to one embodiment. [Diagram 5] 1 illustrates a cluster tool, according to one embodiment. [Figure 6] 1 illustrates a substrate transfer apparatus, according to one embodiment. [Figure 7] 2 illustrates a perspective view of a portion of a substrate support according to one embodiment.

[0011] For ease of understanding, wherever possible, like reference numbers have been used to designate identical elements that are common to several figures. It is contemplated that elements and features of one embodiment may be beneficially incorporated in other embodiments without further recitation. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0012] The embodiments of the present disclosure generally relate to methods and apparatus for backside stress engineering of a substrate to combat film stress and bowing issues as outlined above. As discussed above, excessive stress on the frontside of the substrate can lead to failure of substrate patterning due to excessive substrate warpage. It has been observed that backside deposition can compensate for the stress and correct substrate warpage. Specifically, physical vapor deposition (PVD) techniques are used to deposit a film (e.g., silicon nitride (SiN)) on the backside of the substrate to counteract the stress from the frontside deposition, thereby resulting in a neutral stress substrate that does not exhibit bowing (or is substantially free of bending). Details of various embodiments are discussed further below.

[0013] As used herein, the term "about" refers to a + / - 10% variation from the nominal value. It should be understood that such a variation can be included in any value provided herein.

[0014] FIG. 1 illustrates a flow diagram of a method 100 for depositing a backside film layer on a backside of a substrate, according to one embodiment. Although the method operations are described in conjunction with FIG. 1, one skilled in the art will understand that any system configured to perform the method operations in any order is within the scope of the embodiments described herein. The method 100 begins in operation 102 by loading a substrate into a factory interface (FI) of a cluster tool, such as the cluster tool 500 shown in FIG. 5. The substrate may be crystalline silicon (e.g., Si <100> Also Si <111> The substrate may be a material such as doped or undoped silicon wafers and patterned or unpatterned wafers, such as silicon oxide, strained silicon, silicon germanium, doped or undoped polysilicon, silicon-on-insulator (SOI), carbon-doped silicon oxide, silicon nitride, germanium, gallium arsenide, glass, or sapphire wafers. The substrate may have one or more film stacks deposited on the front side. The film stacks may be utilized to form gate structures for three-dimensional (3D) NAND semiconductor applications. The stacks may include, but are not limited to, stacks of alternating oxide and nitride layers, or stacks of alternating oxide and silicon-containing layers (e.g., polycrystalline silicon, amorphous silicon layers, or crystalline silicon).

[0015] In operation 104, the substrate is flipped by a flipper, which according to some embodiments can be attached to or placed in a factory interface or placed in a processing chamber. In one embodiment, the substrate is flipped at the factory interface so that the front side of the substrate (e.g., the side on which the active area and / or most of the integrated devices are located) faces down. The flipper has a substrate handler / carrier that can hold and flip the substrate in an edge contact approach. Thus, contact to the front side of the substrate is limited to the edge exclusion region of the substrate. According to one embodiment, no physical contact is made to the active area of ​​the front side of the substrate. In various embodiments, the edge exclusion region is a radial distance of about 1 mm to about 5 mm, e.g., about 2 mm, measured from the edge of the substrate.

[0016] In operation 106, the flipped substrate is transferred from the factory interface to a deposition chamber in the cluster tool by a substrate transfer mechanism without contacting the frontside active area. The substrate transfer mechanism may be a flipper as described above, or the substrate transfer mechanism may be a separate device. The substrate transfer mechanism transfers the substrate by gripping at or near its periphery (e.g., edge exclusion area). Because the substrate is flipped and transferred to the deposition chamber without contacting the frontside active area, no protective layer is required on the frontside of the substrate prior to deposition of the backside film layer. This eliminates the deposition strip process required to create a protective layer often used in conventional backside engineering to protect underlying device layers / structures on the frontside from damage that may occur during backside deposition or subsequent handling, movement, chucking, and / or dechucking of the substrate.

[0017] In one embodiment, the deposition chamber is a physical vapor deposition (PVD) chamber, such as the PVD chamber shown in FIG. 4. While PVD is discussed in this disclosure, various deposition techniques such as chemical vapor deposition (CVD), plasma enhanced chemical vapor deposition (PECVD), atomic layer deposition (ALD), plasma enhanced atomic layer deposition (PEALD), low pressure chemical vapor deposition (LPCVD), and the like are also contemplated. The inverted substrate is placed and secured on a substrate support in the deposition chamber without contacting the frontside active area. The substrate support may be an electrostatic chuck having a substrate support surface. Alternatively, the substrate support may be a ring structure such that the substrate is held by the ring structure at the periphery of the substrate. In either case, the frontside of the substrate faces downward when placed on the substrate support, while the backside of the substrate faces upward and is exposed to the PVD source.

[0018] Additionally, no contact with the active area on the front side of the wafer is required during flipping of the substrate, as described in operation 106. Also, no front side protection is required, such as using carbon deposition to protect the active area or peeling off a protective layer on the wafer, reducing costs and facilitating consumer use.

[0019] In operation 107, a front film layer is deposited on the back side of the substrate in a deposition chamber. The back film layer can be a dielectric layer with compressive or tensile stress, depending on the stress profile of the front side of the substrate. For example, if the film deposited on the front side is under tensile strain, the back film layer should also be under tensile strain to balance the overall stress, resulting in a substrate with a substantially more neutral stress (e.g., reduced bowing). In one embodiment, the back film layer comprises silicon. As an example, growing a metallic back film layer under high chamber pressure using a balanced magnetron results in a tensilely strained back film. According to one embodiment, the metallic back film layer comprises chromium (Cr). As another example, growing a back film layer with high RF applied substrate bias, low chamber pressure, and an unbalanced magnetron results in a compressively strained back film layer.

[0020] The as-deposited backside film layer exhibits radially symmetric local stress on the substrate. The as-deposited backside film layer may have a compressive stress of about 1.5 GPa, with a high stress retention of about 60%, e.g., about 70%, after annealing. The backside film layer may have a different thickness to compensate for the stress profile on the front side of the substrate. For example, the backside film layer may be deposited to a thickness at which the bow of the substrate becomes negligible (e.g., a bow of less than about 300 μm, such as a bow of about 200 μm). The deposition rate of the PVD process may be about 5 A / s to about 25 A / s, e.g., about 20 A / s. The backside film layer may have a thickness of about 0.1 μm to about 1 μm, e.g., about 0.2 μm to about 0.5 μm. The thickness of the backside film layer discussed herein may be increased or decreased depending on the thickness of one or more layers deposited on the surface of the substrate.

[0021] During the backside film deposition process, a radio frequency (RF) power source can be coupled to the sputter target to deposit the backside film layer. The sputter target can include silicon. The plasma can be generated from a non-reactive gas, such as argon (Ar), krypton (Kr), or from a process gas including a nitrogen-containing gas (e.g., N2) for nitride deposition, according to some embodiments. The non-reactive gas and any process gas can be introduced into the deposition chamber through a gas conduit located on the sidewall and / or top of the deposition chamber. According to one embodiment, a gas source is in fluid communication with the gas conduit, such that the gas source supplies the process gas to the sputter target. Once the plasma is formed, the sputtering plasma is supplied to the sputter target to form ionized species, which form a silicon-containing layer (e.g., SiN) on the backside of the substrate. According to one embodiment, RF power can be applied to the sputter target at a power level of about 300 W to about 800 W, for example, about 500 W.

[0022] The frequency of the RF power can be in the range of about 10 MHz to about 30 MHz, for example, about 13.56 MHz. The deposition chamber can be maintained at a pressure of about 1.5 mTorr to about 10 Torr, for example, about 2.5 mTorr to about 1 Torr. A highly stressed backside film layer can be achieved by increasing the sputtering rate and sputter ionization rate of the sputter target. For example, the PVD deposition chamber can use an unbalanced magnetron (e.g., magnetron 489 shown in FIG. 4) to project a magnetic field into the processing region toward the substrate support. Such an unbalanced magnetron can be disposed on or adjacent to the backside of the sputter target and can include an inner pole and an outer pole. The inner pole includes a plurality of inner magnets of one magnetic polarity, and the outer pole includes a plurality of outer magnets of the opposite magnetic polarity. According to one embodiment, the outer pole surrounds the inner pole. The magnetic field creates a high density plasma region adjacent to the front side of the sputter target, thereby significantly increasing the sputtering rate. According to one embodiment, the magnetron is unbalanced in the sense that the ratio of the magnetic field strength of the inner pole to the magnetic field strength of the outer pole is 0.5 or more, for example about 0.55 to 0.73, although different ratios are contemplated depending on the application.

[0023] Additionally or alternatively, according to some embodiments, a direct current (DC) power source can be coupled to the sputter target to ignite and maintain a plasma of a process gas (e.g., an inert gas or a nitrogen-containing gas for nitride deposition). The process gas is excited to ignite the plasma, generating positive ions that are accelerated into the sputter target (e.g., a silicon sputter target) to sputter the sputter target material. The power of the DC supplied can be from about 50 W to about 1000 W, such as from about 100 W to about 5000 W. When radio frequency (RF) power and DC power are used, the ratio of the applied RF power to the applied DC power can be from about 2:1 to about 8:1, for example, from about 4:1 to about 6:1, according to some embodiments.

[0024] In some embodiments, the sputter target can be biased with pulsed DC power to adjust the stress level of the backside film layer. In such cases, a high power impulse magnetron sputtering process can be performed to ignite and sustain a plasma that provides the sputtering and etching phases of the waveform. Pulsed DC is known to be more effective for dielectric sputtering targets.

[0025] FIG. 2 is a graph 200 of a DC voltage pulse supplied to a magnetron. The DC power is supplied at high voltage for a short period of time to generate a dense, energetic plasma during the high power impulse magnetron sputtering process. The high voltage may range from about 2000 V to about 60000 V. The power impulses 252 (or energy pulses) can be generated by a DC power source of duration 254 (or pulse width) and pulse cycle time 256. The duration 254 of each power impulse 252 can be between about 10 μsec and about 40 μsec, and the pulse cycle time 256 is about 200 μsec, which corresponds to a pulse repetition frequency of 5000 Hz, i.e., an interval between successive pulses of about 160 μsec and about 190 μsec. While a square wave is shown, the power or energy delivered over the pulse cycle time 256 can have a non-square waveform (not shown) during the period 254, such that the average power over the period 254 can be between about 1 kW and about 100 kW, for example, between about 10 kW and about 40 kW. The pulses can be sinusoidal, triangular, or sawtooth. In some embodiments, each power impulse 252 provided to the sputter target can have an equal amount of power and / or an equal duration. If desired, each power impulse 252 provided to the sputter target can have a different amount of power and / or a different duration. It has been found that when a high power impulse 252 is applied to the sputter target, the sputtered material can have a large amount of reactive energy and a high degree of ionization, which results in a denser coating and a faster coating process.

[0026] Certain deposition parameters can also be adjusted to produce a backside film layer having a desired stress level. In some embodiments that can be combined with any of the embodiments of the present disclosure, an RF bias can be applied to the substrate support to promote the formation of a highly stressed backside film layer. In such cases, a gap that can be about 1 mm can be maintained between the substrate and the substrate support surface of the substrate support for coupling to the RF bias. Alternatively, the RF bias can be connected to the substrate support, which is conductive and acts as an electrode, via a capacitive coupling circuit. In the presence of a plasma, the RF biased substrate support can attract and accelerate positive ions in the plasma to promote ion bombardment at the backside of the substrate. In either case, the RF bias can have a power level in the range of about 100 W to about 600 W, such as in the range of about 200 W to about 400 W. The RF bias controls resputtering to optimize the coverage of the deposited backside film layer. The RF bias also helps to control ion bombardment at the backside of the substrate, thereby affecting backside film properties such as film density. The frequency of the RF bias can be about 356 kHz to about 60 MHz. The RF bias increases the stress in the deposited backside film. The RF bias attracts more charged particles from the plasma 416 than without the RF bias. Depending on the application, it is contemplated that the substrate may be electrically floating or may have no RF bias.

[0027] Other deposition parameters that can be used to control the stress level of the backside film layer include, but are not limited to, the exposure time of the PVD source, the temperature of the substrate, the pressure in the deposition chamber, etc. In some embodiments, the substrate can be heated by one or more lamps that can be located on the substrate support and / or on the top and / or bottom of the deposition chamber. In such cases, the temperature of the substrate can be maintained in a range of about 10° C. to about 600° C., for example, about 30° C. to about 400° C. In some embodiments, the substrate is maintained at about 350° C. or less during the PVD process.

[0028] In some embodiments that can be combined with any of the embodiments of the present disclosure, the substrate can be subjected to a backside annealing process to further adjust the stress level of the backside film layer. For example, the substrate can be subjected to the annealing process by heating the substrate to a temperature of about 650° C. or higher, for example, about 750° C. to about 950° C., for example, about 1 minute to about 180 minutes, for example, about 3 minutes to about 15 minutes. In one example, the substrate is heated to a temperature of about 650° C. for about 180 minutes. In another example, the substrate is heated to a temperature of about 850° C. for about 3 minutes. If necessary, the backside film layer can be subjected to photolithography prior to annealing. The annealing and deposition process can be repeated multiple times.

[0029] FIG. 3A is a graph of the stress of the PVD SiN backside film layer plotted as a function of the thickness of the SiN backside film layer before 310 and after the annealing process (850° C. for 15 minutes) of 320. As can be seen, the film stress of the SiN backside film layer is improved after the annealing process. Moreover, the stress is comparable after annealing with a thinner (~1000 Å) film layer.

[0030] FIG. 3B is a graph of the stress of the PVD SiN backside film layer plotted as a function of deposition power applied to the sputter target before 330 and after the annealing process (850° C. for 15 minutes) in 340. As can be seen, high power deposition has a small effect on the stress. For example, the PVD SiN backside film layer has a compressive stress of 0.96 GPa at the high power of the post-annealing 9 kW deposition (deposition rate 20 Å / s). Furthermore, the PVD SiN backside film layer can achieve about 64% retention of the pre-annealing stress after post-annealing.

[0031] 3C is a graph of bowing of substrate 350 plotted as a function of backside film layer thickness. Increasing the thickness of the backside film layer significantly reduces bowing (more negative bowing, i.e., less bowing).

[0032] Using PVD offers several advantages over other deposition methods. For example, the as-deposited SiN backside film layer has two times higher stress retention (approximately 60-70%) than a backside film layer deposited by CVD techniques. The high stress retention (thermal stability) of the PVD-deposited backside film allows the number of passes required for the deposition of the backside film to be minimized. The backside film layer deposited by PVD can provide radially uniform local stress without in-plane distortion (IPD) or local surface curvature (LSC) that would occur if the backside film layer was deposited by CVD techniques. To compensate for a 200 μm bow of the substrate, a thinner PVD-deposited backside film is required than a CVD-deposited backside film.

[0033] In operation 108, the substrate with the PVD deposited backside film layer is transferred from the deposition chamber back to the factory interface by the substrate support. The substrate is transferred without contacting the frontside active area. According to one embodiment, the substrate support is configured to receive the substrate from the factory interface. The substrate is then flipped again at the factory interface so that the backside film layer faces down.

[0034] In operation 110, the substrate with the PVD deposited backside film layer is unloaded into a front-opening unified pod (FOUP) coupled to a factory interface. Alternatively, the substrate with the PVD deposited backside film layer may be transferred to one or more processing chambers in a cluster tool for further processing.

[0035] FIG. 4 shows a schematic cross-sectional view of a PVD chamber 400, according to one embodiment. The PVD chamber 400 generally includes a chamber lid 410 and sidewalls 403 that define a processing region 408 therein. A substrate support 402, which may be an electrostatic chuck, is disposed within the processing region 408. The processing region 408 is typically maintained at a pressure in a range of about 1 mTorr to about 20 Torr by a vacuum pump (not shown), such as about 3 mTorr to about 10 mTorr. The substrate support 402 includes a pedestal 406 and a susceptor 407. According to one embodiment, the substrate support 402 is configured to receive a substrate 404 from a factory interface 503 (FIG. 5). The susceptor 407 has a substrate support surface 414 that supports the substrate 404, which is disposed in an upside-down orientation (i.e., the backside of the substrate faces the chamber lid 410), according to an embodiment of the present disclosure. The substrate support surface 414 is configured to support the substrate 404 at or near the periphery of the substrate support surface without contacting an active area on the front side of the substrate such that the backside of the substrate is exposed to the sputter target 411. The substrate support surface 414 may include a support ring, support fins, or lift pins positioned such that the active area of ​​the substrate 404 is not contacted.

[0036] The pedestal 406 is connected to a lift mechanism 438 or other actuator disposed through the bottom of the PVD chamber 400. A chamber lid 410 is disposed on top of the PVD chamber 400. The chamber lid 410 includes one or more sputter targets 411. According to one embodiment, the chamber lid 410 includes a sputter target material. According to one embodiment, the one or more sputter targets 411 are integrated into the chamber lid 410. The sputter target 411 has a first surface 411S in contact with the processing region 408 and a second surface 411S' disposed opposite the first surface. The PVD chamber 400 can include metrology tools (not shown), such as X-ray diffraction (XRD), ellipsometry, nanotopography, WaferSight™, patterned wafer geometry (PWG), dual Fizeau interferometry, or laser metrology tools, to measure wafer properties such as lattice constant, strain, stress, substrate bow, IPD, LSC, etc.

[0037] The magnetron 489 is disposed adjacent to the chamber lid 410 and can be rotated about a central axis 481 of the chamber lid 410 by a magnetron actuator 482. The magnetron actuator 482 is coupled to the magnetron 489 by a magnetron shaft 483. The magnetron 489 is disposed adjacent to a second surface 411S' of the sputter target 411. The magnetron 489 can have an unbalanced magnet configuration. For example, the magnetron 489 can include an inner pole 424 including multiple magnets of one magnetic polarity and an outer pole 425 surrounding the inner pole 424 and including multiple magnets with an opposite magnetic polarity. The inner pole 424 and the outer pole 425 can form a closed loop magnetron assembly. The inner pole 424 generates an inner magnetic field and the outer pole 425 generates an outer magnetic field, with the ratio of the magnetic field strength of the inner magnetic field to the magnetic field strength of the outer magnetic field being between about 0.2 and about 3, for example, about 0.5 to about 1.6. The unbalanced magnet configuration increases the magnetic field strength at a particular portion of the magnetron 489, which generates more charged particles in the generated plasma 416. As noted above, it is contemplated that the ratio can be adjusted to alter the sputtering rate.

[0038] According to some embodiments, the sputter target 411 material may include silicon, a dielectric material, or a metal. The sputter target provides a sputtering surface arranged to deposit sputtered material on the top surface of the substrate 404. The chamber lid 410 may be negatively biased by a power supply 419 to form a cathode. The chamber lid 410 is electrically isolated from the rest of the PVD chamber 400 by an insulator ring 412. The insulator ring 412 electrically insulates the chamber lid 410 from a grounded annular shield member 434 such that a negative voltage may be maintained on the sputter target. The annular shield member 434 at least partially surrounds a portion of the processing region 408 and is electrically coupled to ground. For nitride deposition, a nitrogen-containing gas (e.g., N2) and an optional inert gas (e.g., Ar or He) may be provided to the PVD chamber 400 to react with the sputtered target material (silicon in one example). The power supply 419 applies a negative voltage to the sputter target in the chamber lid 410 with respect to the grounded annular shield member 434, thereby exciting the nitrogen-containing (and inert gas, if added) into a plasma 416. Ions from the plasma bombard the sputter target surface and the sputter target material from the sputter target. The power supply 419 can be any type of power supply, including DC, pulsed DC, RF, alternating current (AC), and any combination thereof. The power supply 419 can be configured to perform a high power impulse magnetron sputtering process, as discussed above. According to one embodiment, the DC power supply is configured to provide pulsed DC power at a voltage between about 2,000 V and about 60,000 V, a duration of about 10 μs and about 40 μs, and a pulse cycle time of about 200 μs.

[0039] The sputter target 411 can include silicon. According to some embodiments, the plasma 416 can be generated from a non-reactive gas, such as argon (Ar), krypton (Kr), or from a process gas including a nitrogen-containing gas (e.g., N2) for nitride deposition. The non-reactive gas and any process gas can be introduced into the deposition chamber through a gas conduit 413 located on the sidewall 403 and / or top of the PVD chamber 400, such as the chamber lid 410. According to one embodiment, a gas source 480 is in fluid communication with the gas source 413 such that the gas source provides the process gas to the sputter target 411. Once the plasma 416 is formed, the sputtering plasma is provided to the sputter target 411 to form ionized species, which form a silicon-containing layer (e.g., SiN) on the backside of the substrate 404. According to one embodiment, RF power can be applied to the sputter target 411 at a power level between about 300 W and about 800 W, such as about 500 W.

[0040] The PVD chamber 400 includes a shadow mask 418 that defines a target deposition area on the backside of the substrate 404. The shadow mask 418 can also prevent deposition from occurring at undesired locations, such as the bevel and / or active areas, on the frontside of the substrate 404. Therefore, no additional bevel cleaning is required. The shadow mask 418 can have different size options to protect the bevel area of ​​the substrate from deposition. The bevel area can be between about 1 mm and about 2 mm, measured from the edge of the substrate 404.

[0041] The PVD chamber 400 can be part of a cluster tool. Figure 5 shows a cluster tool 500, according to one embodiment. The cluster tool 500 features at least one PVD chamber 400, as described above. An example of a cluster tool 500 is the Endura® system available from Applied Materials, Inc., Santa Clara, Calif. Cluster tools manufactured by other manufacturers can also be used.

[0042] The cluster tool 500 includes a factory interface (FI) 503 connected to the cluster tool 500. The FI 503 includes one or more front-opening unified pods (FOUPs) 501 for handling and transporting substrates from one area of ​​the semiconductor fab to another. The FI 503, according to one embodiment, removes the substrate from the FOUP 501 and flips the substrate as described above using a flipper 505 located within or attached to the FI 503. The flipper 505 may also be located within the PVD chamber 400. The sides of the FI 503 are attached to load lock chambers 506A, 506B that transfer substrates between the FI 503 and various process chambers of the cluster tool 500. A first robot 510 may transfer substrates between the load lock chambers 506A, 506B and a first set of one or more process chambers 512, 514, 516, 518 (four shown). Each process chamber 512, 514, 516, 518 can be equipped to perform a number of substrate processing operations, including the PVD and etch processes described herein, cyclic layer deposition (CLD), atomic layer deposition (ALD), chemical vapor deposition (CVD), pre-cleaning, degassing, alignment, and other substrate processes (ALD).

[0043] The first robot 510 can also transfer substrates to / from one or more intermediate transfer chambers 522, 524. The intermediate transfer chambers 522, 524 can be used to maintain ultra-high vacuum conditions while allowing substrates to be transferred within the cluster tool 500. The second robot 530 can transfer substrates between the intermediate transfer chambers 522, 524 and a second set of one or more processing chambers 532, 534, 536, 538. The process chambers 532, 534, 536, 538 can be equipped to perform a variety of substrate processing operations similar to the process chambers 512, 514, 516, 518. Any of the process chambers 512, 514, 516, 518, 532, 534, 536, 538 can be removed from the cluster tool 500 when a particular process does not need to be performed by the cluster tool 500.

[0044] The exemplary multi-processing cluster tool 500 can include up to four process chambers 532, 534, 536, 538 configured similarly to the PVD chamber 400 described above. For example, process chamber 512 can be a PVD chamber configured to deposit a backside film layer (e.g., SiN) on the backside of a substrate.

[0045] The cluster tool 500 can be used to perform the method described in FIG. 1 above. For example, a substrate is flipped in the FI 503 to position the substrate so that its front side (the surface having active areas and / or integrated devices) faces down. The substrate is then transferred by the first robot 510 to the processing chamber 512 where a backside film layer is deposited on the backside of the substrate. The substrate with the backside film layer deposited can be returned to the FI 503 where the substrate is flipped again so that the front side faces up. The substrate can then be transferred to any of the processing chambers 514, 516, 518, 532, 534, 536, 538 for further processing or unloaded into the FOUP 501.

[0046] FIG. 6 illustrates a substrate transfer apparatus 600, according to one embodiment. A substrate 404 is disposed on the substrate transfer apparatus 600. Although the substrate 404 is illustrated as transparent for ease of illustrating FIG. 6, the substrate can be transparent or opaque depending on the substrate composition and the film composition thereon, and thus does not limit the optical properties of the substrate. The flipper 604 can have a blade 607 and two fork-like arms 609, 611 extending from the blade 607. A clamp spring 602 can be disposed at the distal end of the arms 609, 611 and can cooperate with a vertical wall 606 to help secure the substrate. The clamp spring 602 can be attached to a contact pad 608. The height of the contact pad 608 can be increased to avoid front side contact of the blade with the substrate. Additionally, the blade 607 can have a soft-touch edge contact to minimize defects, scratches, and wear to the substrate. The vertical walls 606 of the blade 607 define a substrate pocket 612 to restrict the movement of the substrate. In some embodiments, the substrate transfer apparatus 600 is located within the PVD chamber 400 rather than the FI 503.

[0047] FIG. 7 is a perspective view of a portion of the substrate support 402, according to one embodiment. A shadow mask 702 can be used to replace the shadow mask 418 shown in FIG. 4. As can be seen, the shadow mask 702 is supported by an annular shield member 434 and a process shield 704 configured to surround the substrate support 402. The shadow mask 702 is a ring-shaped structure disposed radially outward of the substrate support 402. The shadow mask 702 defines a deposition area (i.e., a target area) on the backside of the substrate (not shown), such that only the target area is exposed to the PVD source for deposition of the backside film layer. In particular, the shadow mask 702 allows for deposition of the backside film layer on the backside of the substrate without deposition on the bevel and the active area on the frontside of the substrate. This eliminates the need for bevel etching and cleaning, reducing costs for the consumer.

[0048] The shadow mask 702 can have different designs (e.g., different shapes or sizes) and is configured to be interchangeable. In some embodiments, a non-circular shadow mask 702 can be used to compensate for different stress profiles on the front side of the substrate. The shadow mask 702 can have different designs depending on the desired stress profile of the backside film. The shadow mask 702 can be adjusted so that the gap between the shadow mask and the substrate 404 achieves a profiled deposition, thereby being movable to compensate for different stress profiles on the front side of the substrate. Different designs of the shadow mask 702 can also be used to provide persistence to compensate for non-concentric stress profiles. The shadow mask 702 also allows for selective PVD backside film growth, which is useful for correcting localized strains. For example, if the substrate 404 has a large strain mismatch in a particular portion, the shadow mask 702 can be designed such that only that portion of the backside of the substrate is exposed during deposition, and the backside film is only grown at that portion, so that the strain is locally rectified.

[0049] As shown above, the substrate 404 is loaded into the factory interface 503 of the cluster tool 500, the substrate is flipped so that the backside of the substrate faces up, and the flipped substrate is transferred from the factory interface to a physical vapor deposition (PVD) chamber 400 for depositing a backside film layer on the backside of the substrate. The backside film layer is deposited using PVD, where the backside film layer is formed from sputtering from a sputter target 411.

[0050] The as-deposited SiN backside film layer has two times higher stress retention (approximately 60-70%) than backside film layers deposited by CVD techniques. The high stress retention (thermal stability) of the backside film allows the number of passes required for backside deposition to be minimized. The backside film layer deposited by PVD can provide radially uniform local stress without the in-plane distortion issues that would otherwise occur if the backside film layer was deposited by CVD techniques. The transfer and deposition of the backside film layer is done by a non-contact approach (surface active areas are not touched), thereby eliminating the need for surface protection layers and associated processes (such as removal / strip processes and substrate bevel cleaning). The contemplated system allows for wafer deposition rates of over 65 wafers per hour (WPH).

[0051] While the forgoing is directed to embodiments of the present disclosure, other and further embodiments of the present disclosure may be devised without departing from the basic scope thereof, which scope is determined by the following claims.

Claims

1. A physical vapor deposition chamber having a chamber lid and one or more sidewalls, comprising: The physical vapor deposition chamber comprises: a processing region at least partially bounded by the chamber lid and the one or more sidewalls; a substrate support having a substrate support surface configured to support the substrate at or near a periphery of the substrate support surface without contacting a front side active area of ​​the substrate; a shadow mask disposed above the substrate support that defines a deposition area on a backside of the substrate; a gas conduit disposed in the sidewall of the physical vapor deposition chamber; A magnetron, an internal pole including an internal plurality of magnets that generate an internal magnetic field; and an outer pole including an outer plurality of magnets surrounding the inner pole and concentric with and separated from the inner plurality of magnets, the outer pole generating an external magnetic field, where the strength of the external magnetic field is different from the strength of the internal magnetic field; 1. A physical vapor deposition chamber comprising:

2. A cluster tool for depositing a backside film layer on a backside of a substrate, comprising the physical vapor deposition chamber of claim 1.

3. 3. The cluster tool of claim 2, further comprising a sputter target, said sputter target comprising silicon, said gas conduit in fluid communication with a gas source, said gas source supplying a process gas to said sputter target, said process gas comprising a nitrogen-containing gas.

4. 3. The cluster tool of claim 2, further comprising a power supply configured to supply DC power to the sputter target at a voltage between about 2,000 V and about 60,000 V, a duration between about 10 μsec and about 40 μsec, and a pulse cycle time of about 200 μsec.

5. The cluster tool of claim 2 , wherein a power supply is configured to apply an RF bias to the substrate support.

6. The cluster tool of claim 2 , further comprising a factory interface, the substrate support being configured to receive the substrate from the factory interface.

7. The cluster tool of claim 6 , wherein the factory interface comprises a flipper configured to hold and flip the substrate without contacting an active area on a front side of the substrate.

8. the inner pole and the outer pole form a closed loop magnetron assembly; The ratio of the magnetic field strength of the internal magnetic field to the magnetic field strength of the external magnetic field is 0.5 to 0.73; The cluster tool of claim 2 .

9. 8. The cluster tool of claim 7, wherein the flipper is configured to contact only an edge exclusion region of the substrate, the edge exclusion region being measured from an edge of the substrate to a distance of about 1 mm to about 5 mm radially inward.

10. The cluster tool of claim 9 , wherein the radially inner distance is between about 1 mm and about 2 mm.

11. The cluster tool of claim 9 , wherein the flipper includes a blade and an arm extending from the blade.

12. The cluster tool of claim 11 , wherein each arm of the blade includes a clamp spring disposed at a distal end of each arm.

13. The cluster tool of claim 12 , wherein the blade further comprises a vertical wall coupled to the clamp spring and configured to contact an edge of the substrate.

14. The cluster tool of claim 12 , further comprising a contact pad coupled to the clamp spring, the contact pad configured to contact an edge exclusion region of the substrate.

15. The cluster tool of claim 2 , wherein the physical vapor deposition chamber further comprises a flipper configured to hold and flip the substrate without contacting an active area on a front side of the substrate.

16. The cluster tool of claim 2 , further comprising a direct current (DC) power supply.

17. The cluster tool of claim 16 , wherein the DC power supply is configured to provide a pulsed DC voltage to the sputter target.

18. The cluster tool of claim 17 , wherein the sputter target is a dielectric sputter target.

19. The cluster tool of claim 18 , wherein the sputter target is a silicon sputter target.

20. 20. The cluster tool of claim 17, wherein the power supply further supplies alternating current (AC) power to the sputter target, wherein a ratio of RF power levels to DC power levels is from about 2:1 to about 8:

1.

21. The cluster tool of claim 2 , wherein the substrate support comprises one or more lamps configured to anneal a substrate to between about 750° C. and about 950° C.

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