Semiconductor laser light source device

Abstract

A temperature control module (4) is mounted on a metal stem (1). A support block (5) is mounted on the temperature control module (4). The back surface of a dielectric substrate (6) is bonded to a side surface of the support block (5). On a main surface of the dielectric substrate (6), a differential drive signal line (7a, 7b) is provided and a semiconductor optical modulation element (10) is mounted. A first lead pin (2b, 2c) and one end of the differential drive signal line (7a, 7b) are connected. The other end of the differential drive signal line (7a, 7b) and the semiconductor optical modulation element (10) are connected by wire. The temperature control module (4) and a second lead pin (2e, 2f) are connected by wire. The dielectric substrate (6) has a cutout (6a) on the metal stem (1) side. The temperature control module (4) and the support block (5) are partly disposed in the inner space of the cutout (6a).

Description

[Technical field]

[0001] The present disclosure relates to a semiconductor laser light source device that controls the temperature of a semiconductor optical modulation element by a temperature control module. [Background technology]

[0002] Social networking sites, video sharing services, and other services are becoming more and more popular on a global scale, and data transmission capacity is increasing at an accelerating rate. In order to accommodate the high speed and large capacity of signals in a limited mounting space, optical transceivers are becoming faster and more compact. In addition to high speed and low cost, optical devices are also required to consume less power to keep running costs down.

[0003] The TO-CAN (Transistor-Outlined CAN) type is generally used as the structure of laser light source devices equipped with semiconductor optical modulation elements, as it can be manufactured at low cost. In the TO-CAN structure, the lead pins are generally sealed and fixed to the metal stem using glass. Since the pressure caused by the difference in the thermal expansion coefficient of each is utilized, the arrangement of the lead pins and the spacing between the lead pins are important in order to ensure high airtightness.

[0004] The oscillation wavelength or optical output of a semiconductor optical modulation element changes due to a change in temperature caused by heat generation. Therefore, a temperature control module is used in a laser light source device equipped with a semiconductor optical modulation element to keep the temperature of the semiconductor optical modulation element constant (for example, see Patent Document 1). [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent No. 5188625 Summary of the Invention [Problem to be solved by the invention]

[0006] In the conventional structure, a semiconductor modulation element is mounted on a first dielectric substrate, a second dielectric substrate is mounted on a support block on a metal stem, the high-frequency line of the second dielectric substrate is joined to a lead pin, and the high-frequency line of the first dielectric substrate and the high-frequency line of the second dielectric substrate are connected by a conductive wire. This causes impedance mismatch between the lead pin and the semiconductor modulation element or an increase in inductance components, resulting in deterioration of high-frequency characteristics. In addition, the existence of the second dielectric substrate and the support block on which it is mounted increases costs. In addition, power consumption is high because the electrical signal input to the semiconductor optical modulation element is a single-phase drive system.

[0007] The present disclosure has been made to solve the above-mentioned problems, and has an object to obtain a semiconductor laser light source device that can improve high-frequency characteristics and reduce costs and power consumption. [Means for solving the problem]

[0008] The semiconductor laser light source device according to the present disclosure comprises a metal stem, first and second lead pins penetrating the metal stem, a temperature control module mounted on the metal stem, a support block mounted on the temperature control module, a dielectric substrate having a main surface and a back surface opposite to each other, the back surface being joined to a side surface of the support block, a differential drive signal line provided on the main surface of the dielectric substrate, a semiconductor optical modulation element mounted on the main surface of the dielectric substrate, a conductive bonding material connecting the first lead pins and one end of the differential drive signal line, a first conductive wire connecting the other end of the differential drive signal line and the semiconductor optical modulation element, and a second conductive wire connecting the temperature control module and the second lead pin, and the dielectric substrate has a notch on the side of the metal stem, and the temperature control module and a part of the support block are arranged in an internal space of the notch. Effect of the Invention

[0009] In the present disclosure, the dielectric substrate has a notch on the side of the metal stem, and the temperature control module and a part of the support block are disposed in the internal space of the notch. This allows the dielectric substrate on which the semiconductor modulation element is mounted to be extended close to the metal stem, so that the differential drive signal line of the dielectric substrate can be connected to the lead pin without going through another dielectric substrate. This improves high frequency characteristics and reduces costs. In addition, since the electrical signal input method to the semiconductor optical modulation element is a differential drive method, the voltage amplitude of the signal generator can be reduced compared to the conventional single-phase drive method, and the power consumption of the signal generator can be reduced. [Brief description of the drawings]

[0010] [Figure 1] 1 is a front perspective view showing a semiconductor device according to a first embodiment. [Diagram 2] 1 is a top view showing a semiconductor laser light source device according to a first embodiment. [Diagram 3] 1 is a side view showing a semiconductor laser light source device according to a first embodiment. [Figure 4] 1 is a rear perspective view showing a semiconductor laser light source device according to a first embodiment. [Diagram 5] FIG. 11 is a rear perspective view showing a semiconductor laser light source device according to a second embodiment. [Figure 6] FIG. 11 is a top view showing a semiconductor laser light source device according to a third embodiment. [Figure 7] FIG. 11 is a rear perspective view showing a semiconductor laser light source device according to embodiment 3. [Figure 8] FIG. 11 is a side view showing a semiconductor laser light source device according to embodiment 4. [Figure 9] FIG. 9 is an enlarged view of the area surrounded by the dashed line in FIG. 8. [Figure 10] FIG. 11 is a side perspective view showing a semiconductor laser light source device according to a fourth embodiment. [Figure 11] FIG. 11 is an enlarged view of the area surrounded by the dashed line in FIG. [Figure 12] FIG. 13 is a schematic diagram showing a semiconductor laser light source device according to a fifth embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0011] A semiconductor laser light source device according to an embodiment will be described with reference to the drawings. The same or corresponding components are designated by the same reference numerals, and repeated description may be omitted.

[0012] Embodiment 1 Fig. 1 is a front perspective view showing a semiconductor device according to embodiment 1. Fig. 2 is a top view showing a semiconductor laser light source device according to embodiment 1. Fig. 3 is a side view showing the semiconductor laser light source device according to embodiment 1. Fig. 4 is a rear perspective view showing the semiconductor laser light source device according to embodiment 1.

[0013] The metal stem 1 is a roughly circular metal plate. A number of lead pins 2a to 2g pass through the metal stem 1. In general, glass 3 is used to fix the lead pins 2a to 2g to the metal stem 1. The material of the metal stem 1 and the lead pins 2a to 2g is a metal such as copper, iron, or stainless steel. The surfaces of the metal stem 1 and the lead pins 2a to 2g may be gold-plated or nickel-plated. If impedance mismatch occurs, the frequency response characteristics will deteriorate due to multiple reflections of the signal, making high-speed modulation difficult. Therefore, the glass 3 is made of a material with a low dielectric constant so that it has the same impedance as the signal generator.

[0014] A temperature control module 4 is mounted on the metal stem 1. The temperature control module 4 has a plurality of thermoelectric elements 4a made of a material such as BiTe sandwiched between a lower substrate 4b and an upper substrate 4c made of a material such as AlN. The upper surface of the metal stem 1 and the lower substrate 4b of the temperature control module 4 are joined by a joining material such as SnAgCu solder or AuSn solder. The lower substrate 4b has a protruding portion that protrudes forward from the upper substrate 4c, and metallizations 4d and 4e for supplying power to the thermoelectric elements 4a are provided on the protruding portion.

[0015] A support block 5 is provided on the temperature control module 4. The support block 5 is a block of a metal material, for example, copper, iron, stainless steel, or other metal, with Au plating or the like applied to the surface of the metal. Note that the support block 5 may have a structure in which a metal is coated on an insulator such as ceramic or resin.

[0016] The dielectric substrate 6 has a main surface and a back surface opposite to each other. The back surface of the dielectric substrate 6 is joined to the side surface of the support block 5. The dielectric substrate 6 is a C-shaped or U-shaped plate having a notch 6a opening on the side of the metal stem 1. The temperature control module 4 is disposed in the notch 6a of the dielectric substrate 6. The dielectric substrate 6 is made of a ceramic material such as aluminum nitride (AlN) and has electrical insulation and heat transfer functions. The dielectric substrate 6 may be formed as a single piece, or may be formed by combining rectangular substrates.

[0017] Two differential drive signal lines 7a, 7b and a ground conductor 8 are provided on the main surface of the dielectric substrate 6 by Au plating and metallization. The differential drive signal lines 7a, 7b are microstrip lines or coplanar lines, and have an impedance equivalent to the output impedance of the signal generator. The ground conductor 8 is provided from the main surface to the top and back surfaces of the dielectric substrate 6, and the back surface side ground conductor 8 is joined to the support block 5. In addition, a signal conductor 9 is provided from the main surface to the top surface of the dielectric substrate 6.

[0018] A semiconductor optical modulation element 10 is mounted on a dielectric substrate 6. The modulator section of the semiconductor optical modulation element 10 is composed of a plurality of electroabsorption type optical modulators. The semiconductor optical modulation element 10 is, for example, a modulator integrated laser diode (EAM-LD) in which an electroabsorption type optical modulator using an InGaAsP-based quantum well absorption layer and a distributed feedback type laser diode are monolithically integrated. Laser light is emitted from the light emitting point of the semiconductor optical modulation element 10 along an optical axis perpendicular to the chip end face and parallel to the chip main surface.

[0019] A light receiving element 11, a temperature sensor 12, and a ceramic block 13 are mounted on a support block 5. For example, SnAgCu solder or AuSn solder is used as a bonding material for bonding the temperature sensor 12 and the ceramic block 13 to the support block 5. The temperature sensor 12 is, for example, a thermistor. The ceramic block 13 is, for example, an AlN substrate. A conductor film is provided on the upper surface of the ceramic block 13. Here, the light receiving element 11 is disposed on the negative Z-axis direction side of the semiconductor optical modulation element 10.

[0020] The conductive wire 14a connects the distributed feedback laser diode of the semiconductor optical modulator 10 to the signal conductor 9 on the main surface of the dielectric substrate 6. The conductive wire 14b connects the signal conductor 9 on the upper surface of the dielectric substrate 6 to the lead pin 2a. The conductive wires 14c and 14d connect one end of each of the two differential drive signal lines 7a and 7b to an EAM (electro-absorption modulator) electrode of the semiconductor optical modulator 10. The conductive wires 14e and 14f connect the other end of each of the two differential drive signal lines 7a and 7b to the lead pins 2b and 2c. The other end of each of the two differential drive signal lines 7a and 7b to the lead pins 2b and 2c may be connected using a conductive bonding material such as SnAgCu solder or AuSn solder.

[0021] Conductive wire 14g connects the temperature sensor 12 to the conductive film of the ceramic block 13. Conductive wire 14h connects the conductive film of the ceramic block 13 to the lead pin 2d. Conductive wire 14i connects the support block 5 to the metal stem 1. Multiple conductive wires 14i may be connected to improve high frequency characteristics by strengthening the GND. Conductive wires 14j and 14k connect the metallizations 4d and 4e of the temperature control module 4 to the lead pins 2e and 2f, respectively. Conductive wire 14l connects the light receiving element 11 to the lead pin 2g.

[0022] The differential electrical signals input to the lead pins 2b and 2c are transmitted to the differential drive signal lines 7a and 7b via the conductive wires 14e and 14f, respectively, and are applied to the modulator of the semiconductor optical modulation element 10 via the conductive wires 14c and 14d. Here, the electrical signals input to the lead pins 2b and 2c are electromagnetically coupled to the metal stem 1. The metal stem 1 is connected to a support block 5 via a conductive wire 14i, and the support block 5 is connected to a ground conductor 8 of the dielectric substrate 6. Therefore, the metal stem 1, the support block 5, and the ground conductor 8 act as an AC ground.

[0023] A change in the temperature of the semiconductor optical modulation element 10 changes the oscillation wavelength, so it is necessary to keep the temperature constant. Therefore, when the temperature of the semiconductor optical modulation element 10 rises, the temperature control module 4 cools it, and when the temperature drops, the temperature control module 4 generates heat to keep the temperature of the semiconductor optical modulation element 10 constant. The heat generated in the semiconductor optical modulation element 10 is transferred to the upper substrate 4c of the temperature control module 4 via the dielectric substrate 6 and the support block 5. The temperature control module 4 absorbs the heat received from the semiconductor optical modulation element 10. The heat absorbed by the temperature control module 4 is propagated from the lower substrate 4b of the temperature control module 4 through the metal stem 1 in the negative direction of the Z axis, and is dissipated to the lower surface side of the metal stem 1.

[0024] The temperature sensor 12 indirectly measures the temperature of the semiconductor optical modulation element 10 via the dielectric substrate 6 and the support block 5. The measured temperature is fed back to the temperature control module 4, and if the temperature of the semiconductor optical modulation element 10 is higher than the target value, the temperature control module 4 performs cooling, and conversely, if it is lower, the temperature control module 4 generates heat. This makes it possible to stabilize the temperature of the semiconductor optical modulation element 10.

[0025] If the temperature sensor 12 and the lead pin 2d were directly connected by wire, the ambient temperature transmitted from the outside world to the metal stem 1 would flow through the wire into the temperature sensor 12, making it impossible to measure the temperature accurately. Therefore, a ceramic block 13 is placed between the temperature sensor 12 and the lead pin 2d to relay the temperature. This reduces the amount of heat flowing into the temperature sensor 12, allowing the temperature sensor 12 to measure the temperature accurately.

[0026] The light receiving element 11 converts the optical signal into an electrical signal (O / E conversion). The electrical signal is transmitted to the lead pin 2g via the connected conductive wire 14l. By providing the light receiving element 11, the number of lead pins penetrating the metal stem 1 increases by one, but the intensity of the backlight of the semiconductor optical modulation element 10 can be monitored. By feeding back the monitoring results, the drive current of the semiconductor optical modulation element 10 can be controlled so that the optical output is constant.

[0027] As described above, in this embodiment, the dielectric substrate 6 has a notch 6a on the side of the metal stem 1, and the temperature control module 4 and a part of the support block 5 are disposed in the internal space of the notch 6a. This allows the dielectric substrate 6 on which the semiconductor optical modulation element 10 is mounted to be extended close to the metal stem 1, so that the differential drive signal lines 7a, 7b of the dielectric substrate 6 can be connected to the lead pins 2b, 2c without passing through another dielectric substrate. This reduces signal reflection points and improves high frequency characteristics.

[0028] In addition, costs can be reduced because the second dielectric substrate and support block on which it is mounted, as well as the conductive wires connecting the signal lines of the first dielectric substrate and the signal lines of the second dielectric substrate, which are required in the prior art, are no longer required.

[0029] Furthermore, since the electrical signal input method to the semiconductor optical modulation element is a differential driving method, the voltage amplitude of the signal generator can be reduced compared to the conventional single-phase driving method, and the power consumption of the signal generator can be reduced.

[0030] In the conventional structure, a second dielectric substrate is present between the semiconductor modulation element and the lead pin. This causes signal reflection due to impedance mismatch at the connection point, reducing the bandwidth gain. On the other hand, in this embodiment, the second dielectric substrate is not required, so there is no signal reflection point, making it possible to achieve a wider bandwidth than the conventional structure.

[0031] In the conventional structure, heat flows from the support block joined to the metal stem through the second dielectric substrate and the conductive wire to the first dielectric substrate on which the semiconductor optical modulation element is mounted, increasing the amount of heat absorbed by the temperature control module and increasing power consumption. On the other hand, in this embodiment, there is no support block joined to the metal stem, so power consumption can be reduced compared to the conventional structure.

[0032] In order to seal and fix the lead pins 2a to 2g to the metal stem 1 with glass 3, a compression method or a matching method is generally used. In order to maintain airtightness, it is important that the lead pins 2a to 2g are under equal pressure during sealing. Therefore, it is desirable that the lead pins 2a to 2g are arranged in a circular shape with respect to the metal stem 1. Also, if the adjacent lead pins 2a to 2g are too close to each other, the sealing performance deteriorates, so a certain distance is necessary.

[0033] In the conventional structure, it was necessary to secure a space on the metal stem for providing a support block for mounting the second dielectric substrate, so the lead pins could not be arranged evenly and airtightness could not be achieved. On the other hand, in the present embodiment, since there is no support block on the metal stem 1, the lead pins 2a to 2g can be arranged evenly, improving airtightness.

[0034] Moreover, the lead pins 2b, 2c, 2e to 2g are arranged on the main surface side of the dielectric substrate 6. On the other hand, the lead pin 2a for feeding power to the distributed feedback laser diode of the semiconductor optical modulation element 10 and the lead pin 2d for feeding power to the temperature sensor 12 are arranged on the back surface side of the dielectric substrate 6. Therefore, the lead pins 2a to 2g can be evenly arranged in a circular shape on the metal stem 1, improving airtightness.

[0035] Furthermore, the conductive wire 14a connects the distributed feedback laser diode of the semiconductor optical modulation element 10 to the signal conductor 9 of the dielectric substrate 6, and the conductive wire 14b connects the signal conductor 9 to the lead pin 2a. This makes it possible to supply electricity from the lead pin 2a on the back side of the dielectric substrate 6 to the distributed feedback laser diode of the semiconductor optical modulation element 10 on the main surface side of the dielectric substrate 6 without using a complex mechanism of a wire bonding device.

[0036] Furthermore, if the dielectric substrate 6 is in contact with the metal stem 1, heat from the outside transmitted to the metal stem 1 flows into the semiconductor optical modulation element 10 and the temperature sensor 12 via the dielectric substrate 6. This makes it difficult to control the temperature by the temperature control module 4. For this reason, it is preferable that the dielectric substrate 6 does not come into contact with the metal stem 1.

[0037] Moreover, the lead pins 2b, 2c connected to the differential drive signal lines 7a, 7b have inner lead portions protruding from the upper surface of the metal stem 1. The shorter the length of the inner lead portion, the smaller the inductance component, which reduces loss due to signal reflection at the inner lead portion and improves the passband. In order to obtain the maximum voltage amplitude from the signal generator, a matching resistor may be provided on the main surface of the dielectric substrate 6 and connected in parallel to the semiconductor optical modulation element 10.

[0038] Embodiment 2 5 is a rear perspective view showing a semiconductor laser light source device according to embodiment 2. A ground conductor 8 is provided not only on the rear surface of the dielectric substrate 6 but also on a side surface of the dielectric substrate 6 perpendicular to the upper surface of the metal stem 1. A conductive wire 15 connects the ground conductor 8 provided on the side surface of the dielectric substrate 6 to the metal stem 1. The conductive wire 15 is preferably connected to both the lead pin 2b side and the lead pin 2c side, and a plurality of conductive wires may be provided on each side.

[0039] In the first embodiment, the ground of the semiconductor modulation element is connected from the ground conductor 8 of the dielectric substrate 6 to the support block 5 and to the metal stem 1 via the conductive wire 14i. Therefore, the distance to the ground is long, and the ground may be weakened and the high-frequency characteristics may deteriorate. On the other hand, in the present embodiment, the ground of the semiconductor modulation element is connected from the ground conductor 8 of the dielectric substrate 6 to the metal stem 1 via the conductive wire 15, and the distance to the ground is shortened and the high-frequency characteristics are improved. In addition, by connecting with the conductive wire 15, the ground can be strengthened while suppressing the heat flow from the metal stem 1 to the dielectric substrate 6 compared to direct bonding. In addition, by providing the ground conductor 8 on the side of the dielectric substrate 6, the conductive wire 15 can be connected without changing the arrangement of the lead pins.

[0040] Embodiment 3 Fig. 6 is a top view showing the semiconductor laser light source device according to embodiment 3. Fig. 7 is a rear perspective view showing the semiconductor laser light source device according to embodiment 3.

[0041] The dielectric substrate 6 is enlarged in both the positive and negative directions of the X-axis compared to the first embodiment, and extends outward beyond the lead pins 2b and 2c in a plan view. A conductive wire 16 connects the metal stem 1 to a ground conductor 8 provided on the rear surface of the dielectric substrate 6. As in the second embodiment, the conductive wire 16 is preferably connected to both the lead pin 2b side and the lead pin 2c side, and multiple conductive wires may be provided on each side.

[0042] According to this embodiment, as in the second embodiment, it is possible to strengthen the ground while suppressing the heat flow from the metal stem 1 to the dielectric substrate 6. Moreover, by enlarging the dielectric substrate 6, it is possible to connect the conductive wire 16 from the back surface of the dielectric substrate 6 without changing the arrangement of the lead pins.

[0043] Embodiment 4 Fig. 8 is a side view showing a semiconductor laser light source device according to embodiment 4. Fig. 9 is an enlarged view of a portion surrounded by a dashed line in Fig. 8. Fig. 10 is a side perspective view showing a semiconductor laser light source device according to embodiment 4. Fig. 11 is an enlarged view of a portion surrounded by a dashed line in Fig. 10.

[0044] The ground conductors 8 are provided on the left and right protruding portions of the dielectric substrate 6 connected to the lead pins 2b and 2c, not only on the rear surface of the dielectric substrate 6 but also on the lower surface of the dielectric substrate 6 facing the upper surface of the metal stem 1. The ground conductors 8 provided on the lower surface of the dielectric substrate 6 and the metal stem 1 are connected by a conductive spring 17. One end of the conductive spring 17 is bonded to the ground conductor 8 provided on the lower surface of the dielectric substrate 6 or to the upper surface of the metal stem 1 using a bonding material such as SnAgCu solder or AuSn solder. The conductive spring 17 is mounted so as to be pressed against the upper surface of the metal stem 1 by the dielectric substrate 6. The conductive spring 17 may be, for example, a metal material such as copper, iron, or stainless steel processed into a leaf spring or coil spring shape, or may be a conductive rubber material.

[0045] In this embodiment, the contact area between the dielectric substrate 6 and the metal stem 1 can be reduced by using the conductive spring 17. Therefore, similar to the second embodiment, the ground can be strengthened while suppressing the heat flow from the metal stem 1 to the dielectric substrate 6. In addition, by providing the conductive spring 17 in the space between the dielectric substrate 6 and the metal stem 1, the ground can be strengthened without changing the arrangement of the lead pins.

[0046] Embodiment 5. 12 is a schematic diagram showing a semiconductor laser light source device according to a fifth embodiment. A lensed cap 18 is joined to the metal stem 1 of the semiconductor laser light source device according to any one of the first to fourth embodiments. The lensed cap 18 is an airtight sealing cap that airtightly seals the temperature control module 4, the support block 5, the dielectric substrate 6, the semiconductor optical modulation element 10, the temperature sensor 12, and the like mounted on the metal stem 1. The lensed cap 18 can improve moisture resistance and resistance to disturbance. The lens of the lensed cap 18 is made of glass such as SiO2, and focuses the laser light emitted from the semiconductor optical modulation element 10 and makes it enter the fiber. [Explanation of symbols]

[0047] 1 metal stem, 2a to 2g lead pins, 4 temperature control module, 5 support block, 6 dielectric substrate, 6a notch, 7a, 7b differential drive signal line, 8 ground conductor, 10 semiconductor optical modulation element, 11 light receiving element, 12 temperature sensor, 13 ceramic block, 14a to 14l, 15, 16 conductive wire, 17 conductive spring, 18 cap with lens

Claims

1. Metal stem and first and second lead pins penetrating the metal stem; a temperature control module mounted on the metal stem; a support block mounted on the temperature control module; a dielectric substrate having a main surface and a back surface opposite to each other, the back surface being joined to a side surface of the support block; a differential drive signal line provided on the main surface of the dielectric substrate; a semiconductor optical modulation element mounted on the main surface of the dielectric substrate; a conductive bonding material that connects the first lead pin and one end of the differential drive signal line; a first conductive wire connecting the other end of the differential drive signal line and the semiconductor optical modulation element; a second conductive wire connecting the temperature control module and the second lead pin; the dielectric substrate has a notch on the side of the metal stem; a semiconductor laser light source device, characterized in that the temperature control module and a part of the support block are disposed in the internal space of the notch.

2. a ground conductor provided on the rear surface of the dielectric substrate and joined to the support block; 2. The semiconductor laser light source device according to claim 1, further comprising a third conductive wire connecting the support block and the metal stem.

3. a ground conductor provided on the rear surface and the side surface of the dielectric substrate; 2. The semiconductor laser light source device according to claim 1, further comprising a third conductive wire connecting the ground conductor provided on the side surface of the dielectric substrate and the metal stem.

4. a ground conductor provided on the back surface of the dielectric substrate, the ground conductor extending outward beyond the first lead pin; 2. The semiconductor laser light source device according to claim 1, further comprising a third conductive wire connecting the ground conductor and the metal stem.

5. a ground conductor provided on the rear surface and a lower surface of the dielectric substrate; 2. The semiconductor laser light source device according to claim 1, further comprising a conductive spring that connects the ground conductor provided on the lower surface of the dielectric substrate to the metal stem.

6. The semiconductor laser light source device according to any one of claims 1 to 5, further comprising a lens-equipped cap joined to the metal stem and hermetically sealing the temperature control module, the support block, the dielectric substrate, and the semiconductor optical modulation element.

7. 6. The semiconductor laser light source device according to claim 1, wherein the dielectric substrate is not in contact with the front metal stem.

8. 6. The semiconductor laser light source device according to claim 1, wherein the conductive bonding material is a conductive wire.

9. 6. The semiconductor laser light source device according to claim 1, wherein the conductive bonding material is solder.

10. a third lead pin penetrating the metal stem; a temperature sensor mounted on the support block; 6. The semiconductor laser light source device according to claim 1, further comprising a fourth conductive wire connecting the temperature sensor and the third lead pin.

11. The ceramic block is mounted on the support block and has a conductive film thereon. the fourth conductive wire is a conductive wire connecting the temperature sensor and the conductive film; 11. The semiconductor laser light source device according to claim 10, further comprising a conductive wire connecting the conductive film and the third lead pin.

12. 6. The semiconductor laser light source device according to claim 1, wherein the modulator section of the semiconductor optical modulation element is composed of a plurality of electroabsorption type optical modulators.

13. 6. The semiconductor laser light source device according to claim 1, further comprising a light receiving element for monitoring an intensity of backlight of the semiconductor optical modulation element.

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