Substrate transport device and substrate transport method

Abstract

To prevent an end effector from interfering with a board in a magazine.SOLUTION: A substrate transfer device 10 includes a magazine 20 that has a pair of side plates 21 formed with a plurality of grooves 22 extending in a first direction, and in which the grooves 22 support both side ends of a substrate 1 along the first direction and guide the movement of the substrate 1 in the first direction, an end effector 30 for pushing the substrate 1 supported in the groove 22 of the magazine 20 in the first direction, and a moving unit 40 that moves the end effector 30 along the first direction. The end effector 30 includes a body portion 31 that pushes the substrate 1, and a guide pin 32 that protrudes from the body portion 31 in a direction intersecting the first direction. The moving unit 40 moves the end effector 30 along the first direction while the tip of the guide pin 32 is in the groove 22.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present disclosure relates to a substrate transport apparatus and a substrate transport method. [Background technology]

[0002] Conventionally, a plasma cleaning device for a substrate is known (for example, Patent Document 1). The plasma cleaning device of Patent Document 1 includes a substrate transport device for transporting a substrate along a predetermined transport path. This substrate transport device has a sending-out means for pushing and feeding the substrates one by one from a magazine that holds a plurality of substrates in a stacked state using a rod-shaped end effector. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 9-129581 Summary of the Invention [Problem to be solved by the invention]

[0004] However, as described above, multiple substrates are stacked in a magazine. When one of the multiple substrates in such a stack is pushed forward by a rod-shaped end effector, the end effector may bend due to its own weight or the like, and may interfere with the substrate next to the substrate being pushed forward. In such a situation, one of the objectives of the present disclosure is to prevent the end effector from interfering with the substrates in the magazine. [Means for solving the problem]

[0005] One aspect of the present disclosure relates to a substrate transport device, the substrate transport device including a magazine having a pair of side plates with a plurality of grooves extending in a first direction, the grooves supporting both side ends of a substrate along the first direction and guiding movement of the substrate in the first direction, an end effector for pushing the substrate supported in the grooves of the magazine in the first direction, and a moving unit for moving the end effector along the first direction, the end effector having a main body for pushing the substrate and a guide pin protruding from the main body in a direction intersecting the first direction, the moving unit moving the end effector along the first direction with a tip of the guide pin in the groove.

[0006] Another aspect of the present disclosure relates to a substrate transport method for transporting a substrate in a substrate transport device including: a magazine having a pair of side plates formed with a plurality of grooves extending in a first direction, the grooves supporting both side ends of the substrate along the first direction and guiding movement of the substrate in the first direction; and an end effector for pushing the substrate supported in the grooves of the magazine in the first direction, the end effector having a main body for pushing the substrate and a guide pin protruding from the main body in a direction intersecting the first direction, the substrate transport method including a moving step of moving the end effector along the first direction with a tip of the guide pin in the groove. Effect of the Invention

[0007] According to the present disclosure, it is possible to prevent the end effector from interfering with the substrates in the magazine. [Brief description of the drawings]

[0008] [Figure 1] 1 is a front view showing a schematic configuration of a substrate transport device according to the present disclosure; [Diagram 2] FIG. 2 is a perspective view showing a configuration of a magazine and an end effector. [Diagram 3]FIG. 2 is a perspective view showing a configuration of an end effector. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] The substrate transport apparatus and the substrate transport method according to the present disclosure will be described below with reference to examples. However, the present disclosure is not limited to the examples described below. In the following description, specific numerical values ​​and materials may be exemplified, but other numerical values ​​and materials may be applied as long as the effects of the present disclosure are obtained.

[0010] (Substrate transport device) A substrate transport apparatus according to the present disclosure includes a magazine, an end effector, and a moving unit.

[0011] The magazine has a pair of side plates in which a plurality of grooves extending in a first direction are formed. The pair of side plates are arranged parallel to each other. The plurality of grooves may be formed side by side in a second direction intersecting the first direction. Such grooves support both side ends of the substrate along the first direction and guide the movement of the substrate in the first direction. The first direction may be a horizontal direction, and the second direction may be a vertical direction.

[0012] The end effector pushes the substrate supported in the groove of the magazine in a first direction. The end effector has a main body that pushes the substrate, and a guide pin that protrudes from the main body in a third direction that intersects with the first direction. The main body may be, for example, rod-shaped extending along the first direction. The guide pin may have, for example, a substantially D-shaped or circular cross-sectional shape perpendicular to the third direction. The third direction may intersect with the first direction and the second direction, and may particularly be perpendicular to the first direction and the second direction.

[0013] The moving unit moves the end effector along a first direction. The moving unit may move the end effector by air pressure, for example. The moving unit moves the end effector along the first direction with the tip of the guide pin in a groove of the magazine. The guide pin entering the groove while the end effector is moving prevents the end effector from bending due to its own weight or the like. This prevents the end effector from interfering with the substrate in the magazine.

[0014] (Substrate transport method) A substrate transport method according to the present disclosure can be used, for example, in the above-mentioned substrate transport apparatus, and includes a moving step.

[0015] In the moving process, the end effector is moved along the first direction with the tip of the guide pin of the end effector in the groove of the magazine. The guide pin entering the groove prevents the end effector from bending due to its own weight during movement. This prevents the end effector from interfering with the substrate in the magazine.

[0016] As described above, according to the present disclosure, it is possible to prevent the end effector from interfering with the substrates in the magazine.

[0017] The guide pin may be in the groove when the substrate pushed by the end effector exits the groove. A substrate, particularly a bent substrate, may swing when exiting a groove of the magazine. The end effector pushing the substrate receives a force in the swinging direction from the swinging substrate. However, if the guide pin is in the groove when the end effector receives such a force, the end effector hardly swings. This prevents the end effector from swinging and interfering with the substrate in the magazine when the substrate pushed by the end effector exits the groove.

[0018] A plurality of guide pins may be provided at intervals in the first direction. When a plurality of guide pins enter the groove, the deflection of the end effector is further suppressed, and therefore the end effector is further prevented from interfering with the substrate in the magazine. Also, depending on the position of the end effector, a guide pin that was in the groove of the magazine may come out of the groove. In this way, even if a guide pin comes out of the groove, if another guide pin is in the groove, the deflection of the end effector can be suppressed. Therefore, the end effector is prevented from interfering with the substrate in the magazine over a wider range of movement of the end effector.

[0019] At least one of the guide pins may be in the groove of the magazine when the end effector completes pushing the substrate. In this way, when the end effector starts to return to the standby position, the movement of the end effector is guided by the guide pin in the groove. Note that the standby position is a position where the end effector waits before starting to push the substrate.

[0020] In the following, an example of the substrate transport apparatus and the substrate transport method according to the present disclosure will be specifically described with reference to the drawings. The above-mentioned components and steps can be applied to the components of the substrate transport apparatus and the steps of the substrate transport method of the example described below. The components of the substrate transport apparatus and the steps of the substrate transport method of the example described below can be modified based on the above description. In addition, the matters described below may be applied to the above embodiment. Among the components of the substrate transport apparatus and the steps of the substrate transport method of the example described below, the components and steps that are not essential to the substrate transport apparatus and the substrate transport method according to the present disclosure may be omitted. Note that the figures shown below are schematic and do not accurately reflect the shapes and numbers of actual members.

[0021] The substrate transfer apparatus 10 of this embodiment is an apparatus for transferring the substrate 1 along a predetermined transfer direction (first direction). The substrate transfer apparatus 10 is applicable to, for example, a substrate processing apparatus (not shown) for subjecting the substrate 1 to a plasma cleaning process. In the following, the configuration of the substrate transfer apparatus 10 will first be described, and then a substrate transfer method using the substrate transfer apparatus 10 will be described.

[0022] (Substrate transport device) As shown in FIG. 1, the substrate transport device 10 includes a magazine 20, an end effector 30, a moving unit 40, and a guide unit 50. The magazine 20 includes an end effector 30, a moving unit 40, and a guide unit 50.

[0023] The magazine 20 has a pair of side plates 21 in which a plurality of grooves 22 extending in a first direction (the transport direction of the substrate 1) are formed (see FIG. 2). The pair of side plates 21 are connected to each other by a top plate 23 and a bottom plate 24. The plurality of grooves 22 are formed side by side in a second direction (e.g., the vertical direction) intersecting the first direction. The plurality of grooves 22 may be formed at equal intervals. In the magazine 20, each groove 22 supports both side ends of the substrate 1 along the first direction and guides the movement of the substrate 1 in the first direction.

[0024] The magazine 20 is configured to be movable in the vertical direction by a lifting mechanism (not shown). The magazine 20 may be configured to feed out the substrates 1 in sequence from the bottom, or may be configured to feed out the substrates 1 in sequence from the top. In the former case, the magazine 20 moves downward while feeding out the substrates 1 in sequence, whereas in the latter case, the magazine 20 moves upward while feeding out the substrates 1 in sequence.

[0025] As shown in Figs. 1 to 3, the end effector 30 pushes the substrate 1 supported in the groove 22 of the magazine 20 in a first direction. The end effector 30 has a main body 31 that pushes the substrate 1, and a guide pin 32 that protrudes from the main body 31 in a third direction. Here, the third direction is a direction that intersects with the first direction and the second direction, and may particularly be a direction that is perpendicular to the first direction and the second direction. The third direction is also a direction in which a pair of side plates 21 of the magazine 20 face each other.

[0026] The main body 31 has a rod 31a extending along a first direction and a claw 31b fixed to a tip of the rod 31a. The claw 31b may be fixed to the rod 31a by, for example, screwing. The end effector 30 may push the substrate 1 while moving in the first direction with the tip of the claw 31b in contact with the substrate 1.

[0027] A plurality of guide pins 32 (in this example, two for each main body 31) are provided at intervals in the first direction. Each guide pin 32 protrudes toward the side plate 21 of the magazine 20 in the third direction. Each guide pin 32 may be fixed to the main body 31 by, for example, screwing.

[0028] The multiple guide pins 32 are disposed behind the claws 31b in the first direction (i.e., the transport direction of the substrate 1). In the first direction, the distance between the tip of the claws 31b and the guide pin 32 closest to the claws 31b is shorter than the length of the magazine 20. Therefore, at least one guide pin 32 is in the groove 22 of the magazine 20 when the substrate 1 pushed by the end effector 30 leaves the groove 22.

[0029] Guide pin 32 has a cross-sectional shape (transverse cross-sectional shape) perpendicular to the third direction that is substantially D-shaped. A flat portion of such a substantially D-shape constitutes the lower surface of guide pin 32. In this manner, the cross-sectional shape of guide pin 32 has a height dimension at both ends in the first direction (dimension in the second direction) that is smaller than the height dimension at the center in the first direction. This allows guide pin 32 to easily enter and exit groove 22 of magazine 20. Note that the cross-sectional shape of guide pin 32 may be another shape, such as a circle.

[0030] The maximum height dimension of the guide pin 32 is slightly smaller than the width (length in the second direction) of the groove 22 of the magazine 20. For example, the maximum height dimension of the guide pin 32 may be approximately 0.5 mm smaller than the width of the groove 22 of the magazine 20. This makes it difficult for the end effector 30 to swing up and down when the guide pin 32 is inserted in the groove 22.

[0031] The moving unit 40 moves the end effector 30 along the first direction. Here, the moving unit 40 moves the end effector 30 along the first direction in a state where the tip of the guide pin 32 is in the groove 22 of the magazine 20. The moving unit 40 in this embodiment is configured with a pneumatic actuator, but is not limited to this. For example, the moving unit 40 may be configured with another driving mechanism such as an electric actuator.

[0032] The guide unit 50 is provided facing the discharge surface (the right side surface in FIG. 1) of the magazine 20. The guide unit 50 guides the substrate 1 pushed out of the magazine 20 by the end effector 30 in the first direction. The guide unit 50 has an upper member 51 and a lower member 52.

[0033] The upper member 51 and the lower member 52 are members that extend along the first direction. A movement space 53 in which the substrate 1 coming out of the magazine 20 moves is formed between the upper member 51 and the lower member 52. The entrance of the movement space 53 is tapered so as to widen toward the magazine 20. This makes it easy for the substrate 1 coming out of the magazine 20 to enter the movement space 53.

[0034] (Substrate transport method) A description will now be given of a substrate transport method using the above-mentioned substrate transport apparatus 10. The substrate transport method includes a moving step.

[0035] In the moving step, the end effector 30 is moved along the first direction with the tip of the guide pin 32 in the groove 22 of the magazine 20. At this time, the end effector 30 is moved in the first direction by the moving unit 40. The moving end effector 30 pushes the substrate 1 in the magazine 20 in the first direction. The pushed substrate 1 leaves the magazine 20 and is sent into the moving space 53 of the guide unit 50. [Industrial Applicability]

[0036] The present disclosure can be used for a substrate transport apparatus and a substrate transport method. [Explanation of symbols]

[0037] 1: Substrate 10: Substrate transport device 20: Magazine 21: Side panel 22: Groove 23: Tabletop 24: Bottom plate 30: End effector 31: Main body 31a: Rod 31b: Claw 32: Guide pin 40: Mobile section 50: Guide section 51: Upper member 52: Lower part 53: Moving Space

Claims

1. a magazine having a pair of side plates with a plurality of grooves extending in a first direction, the grooves supporting both side ends of a substrate along the first direction and guiding movement of the substrate in the first direction; an end effector for pushing the substrate supported in the groove of the magazine in the first direction; a moving unit that moves the end effector along the first direction; Equipped with the end effector has a main body portion that pushes the substrate, and a guide pin that protrudes from the main body portion in a direction intersecting the first direction, The moving part moves the end effector along the first direction with the tip of the guide pin in the groove.

2. The substrate transport apparatus according to claim 1 , wherein the guide pin is in the groove when the substrate pushed by the end effector exits the groove.

3. The substrate transport device according to claim 1 , wherein the guide pin comprises a plurality of guide pins provided at intervals in the first direction.

4. a magazine having a pair of side plates with a plurality of grooves extending in a first direction, the grooves supporting both side ends of a substrate along the first direction and guiding movement of the substrate in the first direction; an end effector for pushing the substrate supported in the groove of the magazine in the first direction; Equipped with A substrate transport method for transporting a substrate in a substrate transport device, the end effector having a main body portion that pushes the substrate, and a guide pin that protrudes from the main body portion in a direction intersecting the first direction, the method comprising: A substrate transport method comprising: a moving step of moving the end effector along the first direction with the tip of the guide pin inserted into the groove.

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