Gas purge unit and load port device

Abstract

To provide a gas purge unit or the like having a vertical movement mechanism of a nozzle with good maintainability.SOLUTION: A gas purge unit includes a first purge nozzle that has a gas flow path formed inside and communicates with a first purge port provided at the bottom of a container to introduce gas into the container or discharge gas from the container, a first connecting portion having a first holding portion for holding the first purge nozzle at one end, and a first actuator to which the first connecting portion is connected and that moves the first connecting portion and the first purge nozzle up and down.SELECTED DRAWING: Figure 4

Description

Technical Field

[0001] The present invention relates to a gas purge unit for introducing gas into a container or discharging gas from a container, and a load port device having the gas purge unit.

Background Art

[0002] In a semiconductor factory or the like, a gas purge unit for improving the cleanliness inside a container for housing a silicon wafer or other substrates has been proposed. Further, as a gas purge unit, one has been proposed in which a purge nozzle communicating with a purge port formed at the bottom of a container is moved up and down like a piston with respect to a mounting table (see Patent Document 1 and the like).

[0003] A conventional gas purge unit discloses, for example, disposing a cylindrical nozzle in a cylindrical holder to form a sealed space surrounded by the flange of the nozzle, the outer peripheral surface of the nozzle, the inner peripheral surface of the cylinder, and the bottom wall of the cylinder, and a vertical movement mechanism of the nozzle for adjusting the pressure in the sealed space.

[0004] However, in a conventional gas purge unit, when repairing the vertical movement mechanism or in case of failure, it is necessary to disassemble the mechanism around the nozzle, and there are problems in terms of maintainability.

Prior Art Documents

Patent Documents

[0005]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0006] In view of such a situation, the present invention provides a gas purge unit having a vertical movement mechanism of a nozzle with good maintainability, and the like.

Means for Solving the Problems

[0007] In order to achieve the above object, the gas purge unit according to the present invention includes: a first purge nozzle having a gas flow path formed therein, communicating with a first purge port provided at the bottom of the container, and introducing gas into the container or discharging gas from the container; a first connecting portion having a first holding portion that holds the first purge nozzle at one end; a first actuator that is connected to the first connecting portion and moves the first connecting portion and the first purge nozzle up and down.

[0008] In the gas purge unit according to the present invention, since the first purge nozzle and the first actuator are connected by the first connecting portion, the first purge nozzle and the first actuator are separate bodies. Such a gas purge unit does not require the nozzle to be disassembled when the first actuator is repaired or fails, and has good maintainability.

[0009] Further, for example, the gas purge unit according to the present invention may further include a second purge nozzle having a gas flow path formed therein, communicating with a second purge port provided at the bottom of the container, and introducing gas into the container or discharging gas from the container. The first connecting portion may have a second holding portion that holds the second purge nozzle at the other end, and an arm portion that connects the first holding portion and the second holding portion. The first connecting portion may be connected to the first actuator via the arm portion. The first actuator may move the first connecting portion, the first purge nozzle, and the second purge nozzle up and down.

[0010] Since such a gas purge unit operates two purge nozzles with a single actuator, the operations of the two purge nozzles can be easily synchronized, preventing poor connection between the purge nozzles and the purge ports. Also, by operating two purge nozzles with a single actuator, the number of components can be reduced, and in this regard, the assemblability and maintainability are good.

[0011] Further, for example, it may have a common gas flow path through which gas is supplied to both the first purge nozzle and the second purge nozzle or into which the gas discharged from both flows. Both the first purge nozzle and the second purge nozzle may introduce gas into the container or discharge gas from the container.

[0012] In such a gas purge unit, having a common gas flow path for gas introduction or gas discharge simplifies the gas flow path and results in good maintainability. Also, since the total gas flow path length included in the entire gas purge unit can be shortened, the number of components can be reduced, contributing to the improvement of assemblability and maintainability. Further, since gas can be introduced or discharged through a plurality of nozzles, the gas in the container can be purged efficiently.

[0013] Further, for example, the branch portion where the flow path branches from the common gas flow path to the first purge nozzle and the second purge nozzle may be arranged closer to the first actuator than the first and second purge nozzles.

[0014] By arranging the branch portion closer to the first actuator in the horizontal direction, the difference in the flow path length from the common gas flow path to the first purge nozzle and the flow path length from the common gas flow path to the second purge nozzle is reduced, and gas can be introduced into the container or discharged from the container from the two nozzles in a well-balanced manner. Further, by arranging the branch portion closer to the first actuator in the horizontal and vertical directions, the total length of the flow path from the common gas flow path to the first purge nozzle and the flow path from the common gas flow path to the second purge nozzle can be shortened. By shortening the flow path length, improvement in pressure transmissibility, reduction in the amount of gas leakage, etc. can be expected.

[0015] Also, for example, it has a flexible pipe portion formed with a gas flow path inside and connected to the lower end of the first purge nozzle and having flexibility. The flexible pipe portion may be deformed according to the vertical movement of the first purge nozzle.

[0016] By having such a flexible pipe portion, the flow path can be connected to the vertically moving first purge nozzle with a simple structure.

[0017] Also, for example, the gas purge unit according to the present invention has a gas flow path formed inside, communicates with a third purge port provided at the bottom of the container, and a third purge nozzle for introducing gas into the container or discharging gas from the container, a second connecting portion having a third holding portion for holding the third purge nozzle at one end, and may further include a second actuator to which the second connecting portion is connected and which moves the second connecting portion and the third purge nozzle up and down.

[0018] Such a gas purge unit can operate the third purge nozzle independently of the first purge nozzle by using the second actuator.

[0019] Further, for example, the first purge nozzle that moves up and down by the first actuator may introduce gas into the container. The third purge nozzle that moves up and down by the second actuator may discharge gas from the container.

[0020] Such a gas purge unit can operate the first purge nozzle for introducing gas and the third purge nozzle for discharging gas independently. Therefore, when only gas introduction is performed or only gas discharge is performed, the purge port not in use at that time can be closed.

[0021] The load port device according to the present invention includes any one of the above gas purge units and a mounting table on which the container can be placed and where the gas purge unit is provided. A first guide ring through which the first purge nozzle is inserted is detachably fixed to the mounting table. A notch portion for restricting the rise of the stepped surface formed on the outer peripheral wall of the first purge nozzle is formed on the lower inner peripheral edge of the first guide ring.

[0022] In such a load port device, the first guide ring can move the first purge nozzle with high positional accuracy. Further, by configuring a stopper with the notch portion and the stepped surface, it is possible to prevent the nozzle from tilting at the raised position and realize good vertical movement. Furthermore, since the first guide ring is detachable, the assemblability and maintainability are good.

Brief Description of the Drawings

[0023]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

Figure 9

DETAILED DESCRIPTION OF THE INVENTION

[0024] Hereinafter, the present invention will be described based on the embodiments shown in the drawings. FIG. 1 is a schematic view of an EFEM 97 including a load port device 10 having a gas purge unit 20 (see FIG. 3) according to an embodiment of the present invention, and a container 90 placed on the load port device 10.

[0025] The load port device 10 shown in FIG. 1 constitutes a part of an EFEM (E-Fem) 97. In the substrate transfer chamber 99 of the EFEM 97 to which the load port device 10 is connected, a transfer robot for transferring the substrate 96 is provided. The transfer robot takes out a substrate 96 such as a silicon wafer accommodated in the container 90 from the container 90 connected to the substrate transfer chamber 99 by the load port device 10, and transfers it to a load lock chamber, a semiconductor processing device, or the like.

[0026] Container 90 is a container used to transport substrate 96 to be processed to each device in a semiconductor factory. As an example, a FOUP (Front Opening Unified Pod) etc. can be mentioned. Container 90 can accommodate a plurality of substrates 96, and has a shelf (not shown in the attached drawings) for aligning and accommodating substrates 96, and a lid 94 that closes the main opening for taking in and out substrates 96. Loading port device 10 has a door 98 for opening and closing lid 94 of container 90, and lid 94 can be removed from the main body portion of container 90.

[0027] Also, as shown in FIG. 1, a first purge port 91 and a third purge port 93 are provided at the bottom 90a of container 90. As will be described later, the first purge nozzle 30 and the third purge nozzle 43 of loading port device 10 communicate with the first purge port 91 and the third purge port 93 of container 90, and a purifying gas can be introduced into the interior 88 of container 90. Although not shown in FIG. 1, a second purge port that communicates with a second purge nozzle 42 (see FIG. 3) and a fourth purge port that communicates with a fourth purge nozzle 44 (see FIG. 3) are also provided at the bottom 90a of container 90, similar to the first and third purge ports 91, 93.

[0028] FIG. 2 is a schematic perspective view of the periphery of mounting table 80 of loading port device 10 as seen obliquely from above. As shown in FIG. 2, loading port device 10 has a mounting table 80 on which container 90 for accommodating substrate 96 can be mounted. On mounting table 80, there are provided a positioning pin 85 for positioning container 90 with respect to mounting table 80, a fixing mechanism 86 for fixing container 90 to mounting table 80, a mounting sensor 87 for detecting that container 90 has been mounted, etc.

[0029] Also, as shown in FIG. 3 which is a schematic perspective view of the mounting table 80 seen from obliquely below, a gas purge unit 20 is provided on the mounting table 80. The gas purge unit 20 has four purge nozzles, namely a first purge nozzle 30, a second purge nozzle 42, a third purge nozzle 43, and a fourth purge nozzle 44. However, the number of purge nozzles that the gas purge unit 20 has is not limited to only four, and it may have 1 to 3 purge nozzles, or the gas purge unit 20 may have 5 or more purge nozzles.

[0030] As shown in FIG. 2, through-holes 88 for inserting the first purge nozzle 30, the second purge nozzle 42, the third purge nozzle 43, and the fourth purge nozzle 44 are formed in the mounting table 80. Also, first to fourth guide rings 81 to 84 are provided in each through-hole 88 so as to correspond to the first to fourth purge nozzles 30, 42, 43, 44. The first to fourth purge nozzles 30, 42, 43, 44 pass through the through-holes 88 and are exposed above the mounting table 80.

[0031] As shown in FIG. 3, the first to fourth purge nozzles 30, 42, 43, 44 are provided downward from near the upper surface of the mounting table 80. On the lower side of the mounting table 80, as will be described later, an actuator for moving the first to fourth purge nozzles 30, 42, 43, 44 up and down, pipes (not shown) connected to the first to fourth purge nozzles 30, 42, 43, 44, etc. are arranged.

[0032] FIG. 4 is a partial perspective view showing a state in which the first and second purge nozzles 30, 42 of the gas purge unit 20 shown in FIG. 3 are in the lowered position. The first purge nozzle 30 and the second purge nozzle 42 shown in FIG. 4 communicate with a first purge port 91 and a second purge port of the container 90 respectively, and introduce gas into the container 90. Note that, differently from this, either one or both of the first purge nozzle 30 and the second purge nozzle 42 may discharge gas from the container 90.

[0033] FIG. 8 is a schematic cross-sectional view showing the first purge nozzle 30 and the first guide ring 81 in the lowered position. The first purge nozzle 30 is composed of a first portion 31, a second portion 32, and a third portion 33. A gas flow path 30b is formed inside the first purge nozzle 30. Note that, for the second to fourth purge nozzles 42 to 44 as well, a gas flow path is formed inside in the same manner as the first purge nozzle 30 shown in FIG. 8.

[0034] As shown in FIG. 4, the gas purge unit 20 includes a first connection portion 60, a first actuator 51, a bracket 54, a support portion 55, a common gas flow path 73, a branch portion 74, a first flexible tube portion 71, a second flexible tube portion 72, and the like. The first actuator 51 is fixed to the mounting table 80 shown in FIG. 3 via the bracket 54.

[0035] The first actuator 51 has a drive shaft 51a that moves up and down. The first actuator 51 is not particularly limited as long as it moves the first connection portion 60, the first purge nozzle 30, the second purge nozzle 42, etc. up and down via the drive shaft 51a or the like. For example, examples of the first actuator 51 include a linear motor, a combination of a rotary motor and a gear or cam mechanism, an air cylinder, an electromagnetic solenoid, and the like.

[0036] Further, in the first actuator 51, the transmission means for transmitting the driving force to the first connection portion 60 is not limited to only the mode in which the first connection portion 60 is directly connected to the drive shaft 51a of the first actuator 51 as shown in FIG. 4. For example, the first actuator 51 may be connected to the first connection portion 60 via a link mechanism, a cam mechanism, a drive belt, or the like.

[0037] As shown in FIG. 4, the first connecting portion 60 includes a first holding portion 61, a second holding portion 62, and an arm portion 63. The first holding portion 61 is provided at one end portion 60a of the first connecting portion 60 and holds the first purge nozzle 30. The first holding portion 61 has a ring portion that can be opened and closed, and the first purge nozzle 30 is fixed to the first holding portion 61 by engaging the ring structure of the first holding portion 61 with a connecting groove 32ab (see FIG. 8) formed in the outer peripheral wall 32a of the second portion 32.

[0038] The second holding portion 62 is provided at the other end portion 60b of the first connecting portion 60, which is opposite to the one end portion 60a, and holds the second purge nozzle 42. Similar to the first holding portion 61, the second holding portion 62 also has a ring portion that can be opened and closed, and holds the second purge nozzle 42 by the same mechanism as the first holding portion 61.

[0039] The arm portion 63 connects the first holding portion 61 and the second holding portion 62 in a substantially horizontal direction. The first connecting portion 60 is connected to the first actuator 51 at approximately the center of the arm portion 63. Thereby, the first actuator 51 moves the first connecting portion 60, the first purge nozzle 30, and the second purge nozzle 42 up and down.

[0040] Note that the connection structure between the first purge nozzle 30 and the second purge nozzle 42 and the first actuator 51 is not limited to only using the first connecting portion 60 having the arm portion 63 as shown in FIG. 4. For example, the first purge nozzle 30 and the second purge nozzle 42 may be connected to the first actuator 51 via separate connecting portions, or may be connected to individual actuators.

[0041] As shown in FIG. 4, the gas purge unit 20 has a common gas flow path 73 that supplies gas to both the first purge nozzle 30 and the second purge nozzle 42. Gas flows into the common gas flow path 73 from a gas supply portion (not shown), and the flow path branches from a branch portion 74 of the common gas flow path 73 to the first purge nozzle 30 and the second purge nozzle 42.

[0042] As shown in FIG. 4, a branch portion 74 where the flow path branches from the common gas flow path 73 to the first purge nozzle 30 and the second purge nozzle 42 is disposed near the first actuator 51 relative to the first and second purge nozzles 30 and 42. Further, a support portion 55 that supports the branch portion 74 from below is connected to the bottom of the first actuator 51. Therefore, these members are fixed to the mounting table 80 via the bracket 54. By disposing the branch portion 74 near the first actuator 51, the branch portion 74 is positioned near the center of the first purge nozzle 30 and the second purge nozzle 42 on both horizontal sides. Thereby, the flow path lengths from the branch portion 74 to the respective purge nozzles 30 and 42 can be made equal. Further, by disposing the branch portion 74 near the first actuator 51 in the vertical direction, the flow path lengths from the branch portion 74 to the respective purge nozzles 30 and 42 can be shortened, which is advantageous from the viewpoints of the gas pressure propagation speed and leak prevention.

[0043] The gas purge unit 20 includes a first flexible pipe portion 71 that connects the branch portion 74 and the first purge nozzle 30, and a second flexible pipe portion 72 that connects the branch portion 74 and the second purge nozzle 42. A gas flow path is formed inside the first flexible pipe portion 71, and the gas branched at the branch portion 74 flows into the first purge nozzle 30 through the first flexible pipe portion 71.

[0044] The first flexible pipe portion 71 is connected to the lower end of the first purge nozzle 30 and has flexibility. Since the first flexible pipe portion 71 deforms according to the vertical movement of the first purge nozzle 30 described later, a gas path to the first purge nozzle 30 is ensured both in the lowered position (FIG. 4) and the raised position (FIG. 5). The first flexible pipe portion 71 is not particularly limited as long as it has flexibility, and examples thereof include a resin tube, a metal bellows tube, and a braided tube.

[0045] Inside the second flexible tube portion 72 as well, a gas flow path is formed in the same manner as in the first flexible tube portion 71. The gas branched at the branch portion 74 flows into the second purge nozzle 42 through the second flexible tube portion 72. The second flexible tube portion 72 is connected to the lower end of the second purge nozzle 42 and has flexibility, similar to the first flexible tube portion 71. The second flexible tube portion 72 has the same function as the first flexible tube portion 71, except that it is connected to the second purge nozzle 42. Also, the material of the second flexible tube portion 72 is the same as that of the first flexible tube portion 71.

[0046] In the embodiments shown in FIGS. 4 and 5, the case of introducing gas from the first purge nozzle 30 and the second purge nozzle 42 into the container 90 will be taken as an example for explanation. However, in other embodiments, it may be possible to discharge gas from the container 90 through the first purge nozzle 30 and the second purge nozzle 42. In an embodiment where both the first purge nozzle 30 and the second purge nozzle 42 discharge gas from the container 90, the common gas flow path 73 has gas discharged from both the first purge nozzle 30 and the second purge nozzle 42 flowing into it. In this case, the common gas flow path 73 is connected to an exhaust pipe portion or an exhaust pump (not shown).

[0047] FIG. 5 is a perspective view of a main part showing a state where the first and second purge nozzles 30 and 42 of the gas purge unit 50 are in the raised position. As shown in FIGS. 4 and 5, the first and second purge nozzles 30 and 42 move up and down by the first actuator 51. As shown in FIG. 4, when the first and second purge nozzles 30 and 42 are in the lowered position, the drive shaft 51a of the first actuator 51 is retracted downward, and the first connecting portion 60 connected to the drive shaft 51a is also located lower than the state shown in FIG. 5. As a result, the first purge nozzle 30 and the second purge nozzle 42 held at both ends of the first connecting portion 60 are also located at the lowered position shown in FIG. 4.

[0048] FIG. 8 is a schematic cross-sectional view showing the first purge nozzle 30 and the first guide ring 81 in the lowered position. As shown in FIG. 8, the first guide ring 81 is fixed to the mounting table 80 (see FIG. 3) with bolts and does not move up and down in conjunction with the up and down movement of the first purge nozzle 30 relative to the mounting table 80.

[0049] As shown in FIG. 8, a first portion 31, which is the uppermost portion of the first purge nozzle 30, has a first portion upper part 31a and a seal ring 31c. A part of the first portion upper part 31a, such as its top 30a (see FIG. 5), is exposed on the upper surface side of the mounting table 80 shown in FIG. 2. Also, a part of the first portion upper part 31a in the lowered position protrudes upward with respect to the upper surfaces of the first guide ring 81 and the mounting table 80. However, differently, the whole of the first portion upper part 31a in the lowered position may be flush with or recessed downward with respect to the upper surfaces of the first guide ring 81 and the mounting table 80.

[0050] As shown in FIG. 8, the first portion 31 has a flange portion 31ab that protrudes in the outer diameter direction from an adjacent portion in the vertical direction in the first portion upper part 31a. On the other hand, an upper notch portion 81aa with which the flange portion 31ab engages is formed on the upper inner peripheral edge of the first guide ring 81. For example, when the first actuator 51 is being replaced or the like, in a case where the first purge nozzle 30 is not supported from below by the first connecting portion 60, the movement range of the first purge nozzle 30 is restricted by the flange portion 31ab and the upper notch portion 81aa of the first guide ring 81, thereby preventing problems such as the first purge nozzle 30 moving downward more than necessary or falling out downward from the first guide ring 81.

[0051] As shown in FIG. 5, when the first and second purge nozzles 30 and 42 rise, the drive shaft 51a of the first actuator 51 protrudes upward, and the first connecting portion 60 connected to the drive shaft 51a also moves upward from the state shown in FIG. 4. The first purge nozzle 30 and the second purge nozzle 42 held at both ends of the first connecting portion 60 also move in conjunction with the upward movement of the drive shaft 51a of the first actuator 51 and the first connecting portion 60 and are located at the raised position shown in FIG. 5.

[0052] FIG. 9 is a schematic cross-sectional view showing the first purge nozzle 30 and the first guide ring 81 in the raised position. As shown in FIG. 9, in the raised position, a part of the first portion 31 and the second portion 32 of the first purge nozzle 30 is located above the first guide ring 81 and the upper surface of the mounting table 80. Further, the seal ring 31c provided on the upper surface of the first portion 31 contacts the first purge port 91 (see FIG. 1) of the container 90, and seals the connection portion between the first purge nozzle 30 and the first purge port 91 so that gas does not leak from that portion.

[0053] As shown in FIG. 9, a stepped surface 32aa that protrudes in the outer diameter direction from the upper portion is formed on the outer peripheral wall 32a of the second portion 32 of the first purge nozzle 30. On the other hand, a lower notch portion 81ab with which the stepped surface 32aa engages is formed on the lower inner peripheral edge 81a of the first guide ring 81. The first purge nozzle 30 is regulated in the upward movement range of the stepped surface 32aa by the lower notch portion 81ab, thereby preventing the problem that the first purge nozzle 30 moves upward more than necessary. Further, the first purge nozzle 30 and the first guide ring 80 form a stopper by the lower notch portion 81ab and the stepped surface 32aa, thereby preventing the first purge nozzle 30 from tilting and realizing a smooth vertical movement.

[0054] In the height direction of the first purge nozzle 30, the small-diameter portion 32ac located between the flange portion 31ab and the stepped surface 32aa has a smaller outer diameter than the flange portion 31ab and the outer peripheral wall 32a below the stepped surface 32aa. The inner diameter of the inner peripheral wall 81ac of the first guide ring 81 is substantially the same as or slightly larger than the outer diameter of the small-diameter portion 32ac, and the inner peripheral wall 81ac faces the small-diameter portion 32ac and guides the vertical movement of the small-diameter portion 32ac. Note that the second purge nozzle 42 and the second guide ring 82 shown in FIGS. 4 and 5 also have the same shape as the first purge nozzle 30 and the first guide ring 81 shown in FIGS. 8 and 9.

[0055] As shown in FIG. 3, the first purge nozzle 30 and the second purge nozzle 42 are arranged at positions spaced apart from the door 98 shown in FIG. 1 with respect to the center of the mounting table 80. On the other hand, the third purge nozzle 43 and the fourth purge nozzle 44 are arranged on the side closer to the door 98 shown in FIG. 1 with respect to the center of the mounting table 80.

[0056] FIG. 6 is a partial perspective view showing a state in which the third purge nozzle 43 shown in FIG. 3 is in the lowered position. As shown in FIG. 6, the third purge nozzle 43 of the gas purge unit 20 communicates with the third purge port 93 (FIG. 1) of the container 90 at the raised position shown in FIG. 7 and discharges gas from the container 90. However, the third purge port 93 may be capable of introducing gas into the container 90, and may be capable of switching between gas introduction and discharge.

[0057] As shown in FIG. 6, the gas purge unit 20 includes a second connecting portion 76, a second actuator 52, a third flexible pipe portion 75, etc. Although not shown in FIG. 6, the second actuator 52 is fixed to the mounting table 80 via a bracket connected above the second actuator 52. Further, the third guide ring 83 through which the third purge nozzle 43 is inserted is fixed to the mounting table 80 and does not move in conjunction with the vertical movement of the third purge nozzle 43.

[0058] Similar to the first actuator 51 shown in FIG. 4, the second actuator 52 has a drive shaft 52a that moves up and down. However, the second actuator 52 is not limited to only the one shown in FIG. 4, and similar to the first actuator 51, it is also possible to adopt an actuator having a transmission means other than the drive shaft 52a.

[0059] The second connecting portion 76 has a third holding portion 77 that holds the third purge nozzle 43. The third holding portion 77 is disposed at one end of the second connecting portion 76, and the other end of the second connecting portion 76 is connected to the drive shaft 52a of the second actuator 52. With such a structure, the second actuator 52 moves the second connecting portion 76 and the third purge nozzle 43 up and down. The third holding portion 77 sandwiches and holds the third purge nozzle 43.

[0060] FIG. 7 is a perspective view of a main part showing a state in which the third purge nozzle 43 of the gas purge unit 20 is in the raised position. As shown in FIGS. 6 and 7, the third purge nozzle 43 can move up and down independently of the first and second purge nozzles by the second actuator 52. As shown in FIG. 6, when the third purge nozzle 43 is in the lowered position, the drive shaft 52a of the second actuator 52 is retracted downward, and the second connecting portion 76 connected to the drive shaft 52a is also located below the state shown in FIG. 7. Thereby, the third purge nozzle 43 held by the second connecting portion 76 is also located at the lowered position shown in FIG. 6.

[0061] As shown in FIG. 7, when the third purge nozzle 43 rises, the drive shaft 52a of the second actuator 52 projects upward, and the second connecting portion 76 connected to the drive shaft 52a also moves upward from the state shown in FIG. 6. The third purge nozzle 43 held by the second connecting portion 76 also moves in conjunction with the upward movement of the drive shaft 52a of the second actuator 52 and the second connecting portion 76, and is located at the raised position shown in FIG. 7.

[0062] In the raised position, the top 43a of the third purge nozzle 43 projects upward with respect to the upper surfaces of the third guide ring 83 and the mounting table 80, and the third purge nozzle 43 is connected to the third purge port 93 of the container 90. As shown in FIGS. 6 and 7, a third flexible tube portion 75 is connected to the lower end of the third purge nozzle 43, and the third flexible tube portion 75 can be deformed according to the up and down movement of the third purge nozzle 43. The material and the like of the third flexible tube portion 75 are not particularly limited, and for example, it can be the same as the first and second flexible tube portions 71, 72.

[0063] Inside the third flexible pipe portion 75, a gas flow path is formed, and the gas discharged from the container 90 and passing through the third purge nozzle 43 can flow into the inside of the third flexible pipe portion 75. The end portion of the third flexible pipe portion 75 on the side opposite to the third purge nozzle 43 is preferably connected to a space at a lower pressure than the container 90, such as a gas flow path or a discharge pump.

[0064] Regarding the mechanism for vertically moving the fourth purge nozzle 44 shown in FIG. 3, since it is the same as the mechanism for vertically moving the third purge nozzle 43 shown in FIGS. 6 and 7, the description thereof is omitted. Further, the fourth purge nozzle 44 is connected to the fourth purge port of the container 90 and can introduce gas into the container 90. However, similar to the third purge nozzle 43, the fourth purge nozzle 44 may be able to discharge gas from the inside of the container 90.

[0065] The gas purge unit 20 shown in FIG. 3 uses the first and second purge nozzles 30 and 42 that move up and down by the first actuator 51 to introduce gas into the container 90. Further, the third purge nozzle 43 that moves up and down by the second actuator 52 is used to discharge gas from the container 90. Such a gas purge unit 20 can operate the first and second purge nozzles 30 and 42 for introducing gas and the third purge nozzle 43 for discharging gas independently. Thereby, in the case of only introducing gas or only discharging gas, the purge port not used at that time can be closed, and efficient purging can be performed.

[0066] Further, the gas purge unit 20 has a fourth purge nozzle 44 that moves up and down by a third actuator 53 as purge nozzles for introducing gas into the container 90. The gas purge unit 20 can change the direction and speed of the gas flow inside the container 90 by switching the connection and disconnection between the fourth purge nozzle 44 and the fourth purge port, change the purge speed, or purge the inside of the container 90 more uniformly.

[0067] The gas introduced into the container 90 from the first, second, and fourth purge nozzles 30, 42, 44 is not particularly limited, and examples thereof include dry air (CDA) and inert gas, and nitrogen gas is preferable.

[0068] Since the gas purge unit 20 shown in FIG. 3 connects each purge nozzle 30, 42, 43, 44 and each actuator 51, 52 by the connecting parts 60, 76, the purge nozzles 30, 42, 43, 44 and the actuators 51, 52 are separate bodies. Such a gas purge unit 20 does not require the nozzles to be disassembled when the actuators 51, 52 are repaired or malfunction, and has good maintainability.

[0069] In addition, since the gas purge unit 20 operates two purge nozzles 30, 42 with one first actuator 51, the operations of the two purge nozzles 30, 42 can be easily synchronized, and disconnection between the purge nozzles 30, 42 and the purge port 91 can be prevented. Also, variation in the operation of each nozzle, which has been a problem with the piston-type purge nozzles of conventional air cylinders, can be prevented. Furthermore, by operating two purge nozzles 30, 42 with one first actuator 51, the number of parts can be reduced, and in this respect as well, the assemblability and maintainability are good.

[0070] In the gas purge unit 20, by having a common gas flow path 73 for gas introduction, the gas flow path becomes simple and the maintainability is good. Also, since the total gas flow path length included in the entire gas purge unit 20 can be shortened, the number of parts can be reduced, which contributes to the improvement of assemblability and maintainability. Also, since gas can be introduced or discharged through a plurality of nozzles, the gas in the container can be purged efficiently.

[0071] The present invention has been described above by way of embodiments. However, the present invention is not limited to only the above-described embodiments, and it goes without saying that many other embodiments and variations are included in the technical scope of the present invention. For example, the number of actuators included in the gas purge unit 20 is not limited to only three, the purge nozzles and the actuators may correspond one-to-one, or one actuator may move up and down three or more purge nozzles.

Explanation of Reference Numerals

[0072] 10… Load port device 20… Gas purge unit 30… First purge nozzle 30a… Top 30b… Flow path 31… First part 31a… Upper part of the first part 31c… Seal ring 31ab… Flange part 32… Second part 32a… Outer peripheral wall 32aa… Step surface 32ab… Connection groove 33… Third part 42… Second purge nozzle 43… Third purge nozzle 44… Fourth purge nozzle 43a… Top 51… First actuator 51a… Drive shaft 52… Second actuator 52a… Drive shaft 53… Third actuator 54… Bracket 55… Support part 60… First connection part 60a… One end 61… First holding part 60b… The other end 62… Second holding part 63… Arm part 71… First flexible pipe part 72… Second flexible pipe part 73… Common gas flow path 74…Branch portion 75…Third flexible tube portion 76…Second connecting portion 77…Third holding portion 80…Mounting table 81…First guide ring 81a…Lower inner peripheral edge 81aa…Upper notch portion 81ab…Lower notch portion 82…Second guide ring 83…Third guide ring 84…Fourth guide ring 85…Positioning pin 86…Fixing mechanism 87…Mounting sensor 88…Through hole 90…Container 90a…Bottom 91…First purge port 93…Third purge port 94…Cover 96…Substrate 97…EFEM 98…Door 99…Substrate transfer chamber

Claims

1. A first purge nozzle having a gas flow path formed therein, communicating with a first purge port provided at the bottom of the container, and introducing gas into the container or discharging gas from the container; A first connecting portion having a first holding portion for holding the first purge nozzle at one end; A first actuator connected to the first connecting portion and moving the first connecting portion and the first purge nozzle up and down; A second purge nozzle having a gas flow path formed therein, communicating with a second purge port provided at the bottom of the container, and introducing gas into the container or discharging gas from the container; A common gas flow path for supplying gas to both the first purge nozzle and the second purge nozzle or into which gas discharged from both flows; And a branch portion where the flow path branches from the common gas flow path to the first purge nozzle and the second purge nozzle, The branch portion being a gas purge unit disposed closer to the first actuator than the first and second purge nozzles.

2. The first connecting portion has a second holding portion for holding the second purge nozzle at the other end and an arm portion connecting the first holding portion and the second holding portion, The first connecting portion is connected to the first actuator via the arm portion, The first actuator moves the first connecting portion, the first purge nozzle, and the second purge nozzle up and down. The gas purge unit according to claim 1, characterized in that.

3. Both the first purge nozzle and the second purge nozzle introduce gas into the container or both discharge gas from the container. The gas purge unit according to claim 2.

4. A flexible tube portion having a gas flow path formed therein and connected to the lower end of the first purge nozzle and having flexibility, The flexible tube portion deforms according to the up and down movement of the first purge nozzle. The gas purge unit according to any one of claims 1 to 3.

5. A third purge nozzle having a gas flow path formed therein, communicating with a third purge port provided at the bottom of the container, and introducing gas into the container or discharging gas from the container; A second connecting portion having a third holding portion for holding the third purge nozzle at one end; The gas purge unit according to any one of claims 1 to 4, further comprising a second actuator that is connected to the second connecting portion and moves the second connecting portion and the third purge nozzle up and down.

6. The first purge nozzle that moves up and down by the first actuator introduces gas into the container. The gas purge unit according to claim 5, wherein the third purge nozzle that moves up and down by the second actuator discharges gas from the container.

7. A gas purge unit according to any one of claims 1 to 6, and a mounting table on which the container can be mounted and the gas purge unit is provided. A first guide ring through which the first purge nozzle passes is fixed to the mounting table. A load port device in which a notch portion for restricting an upward movement of a stepped surface formed on an outer peripheral wall of the first purge nozzle is formed on a lower inner peripheral edge of the first guide ring.

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