A substrate transfer device for transferring a substrate inside a vacuum chamber

Abstract

Provided is a vacuum transfer mechanism capable of transferring a high-load substrate over a long distance and reducing sagging. 【Solution means】The substrate transfer device TA includes a lifting robot 1000, a traveling robot 2000 coupled to the lifting robot 1000, and a transfer robot 3000 coupled to the traveling robot 2000. Thereby, a high-load substrate can be accurately transferred over a long distance, sagging of the robot can be reduced, and slipping of the substrate at the process station can be reduced.

Description

Technical Field

[0001] The present invention relates to a substrate transfer device, and more particularly to a substrate transfer device capable of long-distance transfer of a high-load substrate in a vacuum chamber.

Background Art

[0002] Generally, substrates such as wafers for semiconductor elements, glass substrates for display devices, or glass substrates for thin-film solar cells are manufactured by performing various processes on the substrates. At this time, the substrates are loaded into substrate processing apparatuses that provide optimal conditions required for each process and processed. In addition, masks are used to form various patterns on the substrates.

[0003] In recent years, cluster-type substrate processing apparatuses that can process substrates collectively to improve productivity have been developed and used.

[0004] The cluster-type substrate processing apparatus includes a load lock chamber into which substrates are loaded and discharged, a transfer chamber for transferring substrates, and a plurality of process chambers for performing respective processes.

[0005] Then, a transfer robot for transferring substrates is installed in the transfer chamber that is in a vacuum state, and can perform substrate transfer from the load lock chamber to the transfer chamber, substrate transfer from the transfer chamber to the load lock chamber, substrate transfer between transfer chambers, or substrate transfer for pulling in and out to / from the process chamber.

[0006] Recently, in order to improve substrate processing capabilities in response to the increase in the size of substrates, research has been conducted to change the structure so that two substrates can be processed in one process chamber, or to change the octagonal structure in which four process chambers are installed at equal intervals in the transfer chamber to a four-corner structure in which the process chambers are installed on both sides of the substrate transfer path in the transfer chamber.

[0007] In particular, when two substrates are placed in one process chamber, in order to correspond to the offset with respect to the position for each substrate and to correspond to the installation position of each process chamber in a four-corner structure, there may inevitably be a positional movement with respect to the transfer robot.

[0008] For this reason, recently, a traveling robot is installed in the vacuum chamber, and with the transfer robot installed on the traveling robot, after driving the traveling robot to move the transfer robot to a set position in the vacuum chamber, the transfer robot is driven so that the substrate is transferred.

[0009] However, in such a conventional substrate transfer device, when transferring a high-load substrate over a long distance, the robot for transferring the substrate sags downward due to the high load.

[0010] Therefore, when placing a substrate tilted due to the sag of the robot on the process station in the process chamber, the front of the substrate touches the process station first and slip occurs.

[0011] At this time, if the slip of the substrate exceeds the preset error range, the substrate will depart from the preset landing position, so the substrate must be realigned to the fixed position again. Therefore, a loss of time for realigning the substrate occurs. Summary of the Invention Problems to be Solved by the Invention

[0012] An object of the present invention is to solve all of the above-described problems.

[0013] Another object of the present invention is to provide a substrate transfer device that can accurately transfer a high-load substrate over a long distance.

[0014] Another object of the present invention is to provide a substrate transfer device that reduces the sag of the robot when transferring a high-load substrate over a long distance.

[0015] Another object of the present invention is to provide a substrate transfer device that reduces slippage of a substrate at a process station when transporting a high-load substrate over a long distance.

[0016] Another object of the present invention is to provide a substrate transfer device that accurately positions a substrate at a process station when transporting a high-load substrate over a long distance.

Means for Solving the Problems

[0017] According to an embodiment of the present invention, in a substrate transfer device for transferring a substrate in a vacuum chamber, a first linear direction on a plane has a1_1 through holes to a1_n through holes (where n is an integer of 2 or more), an elevating plate formed at a lower part of the vacuum chamber and moving up and down by an elevating drive unit; and each having a hollow, and one end of each being coupled to an upper surface of the elevating plate such that the hollow axis of each corresponds to the center of each of the a1_1 through holes to the a1_n through holes, and the other end of each being located inside the vacuum chamber, a first elevating shaft to an nth elevating shaft; including an elevating robot coupled to be sealed to a vacuum chamber through hole formed in a lower region of the vacuum chamber; a b1_1 stop member to a b1_n stop member formed with b1_1 through holes to b1_n through holes corresponding to the hollows of the first elevating shaft to the nth elevating shaft in the first linear direction, and divided into a b1_1 upper space and a b1_1 lower space to a b1_n upper space and a b1_n lower space by each of them, and each of the b1_1 upper space to the b1_n upper space being sealed by a b1_1 cover to a b1_n cover, a b1_1 coupling hole to a b1_n coupling hole; formed in a first tip region in a second linear direction orthogonal to the first linear direction, divided into a b2 upper space and a b2 lower space by a b2 stop member formed with a b2 through hole, and the b2 lower space being sealed by a b2 cover, a b2 coupling hole; and formed in a first other tip region in the second linear direction, divided into a b3 upper space and a b3 lower space by a b3 stop member formed with a b3 through hole, and the b3 lower space being sealed by a b3 cover, a b3 coupling hole is formed, and the other end of the first elevating shaft to the other end of the nth elevating shaft drawn into each of the b1_1 lower space to the b1_n lower space is fixedly coupled to each of the b1_1 stop member to the b1_n stop member, a traveling arm platform;A first traveling drive motor and a first speed reducer that is interlocked with the first traveling drive motor and reduces the rotational speed by half are installed in a sealed internal space. A first _1 drive shaft with a hollow formed therein that is interlocked with the first speed reducer and a first _1 output shaft that is interlocked with the first _1 drive shaft are installed so as to be sealed at a first _1 tip region. A first _2 drive shaft with a hollow formed therein that is interlocked with the first traveling drive motor and a first _2 output shaft that is interlocked with the first _2 drive shaft are installed so as to be sealed at a first _1 other tip region. A first _1 traveling link arm in which the first _1 output shaft is fixedly coupled to a first _1 connecting member that is drawn into the upper space of the b2 of the traveling arm platform and fixedly coupled to the b2 stop member, and a first _2 traveling link arm in which a first _2 tip region is fixedly coupled to the first _2 output shaft of the first _1 traveling link arm; A second traveling drive motor and a second speed reducer that is interlocked with the second traveling drive motor and reduces the rotational speed by half are installed in a sealed internal space. A second _1 drive shaft with a hollow formed therein that is interlocked with the second speed reducer and a second _1 output shaft that is interlocked with the second _1 drive shaft are installed so as to be sealed at a second _1 tip region. A second _2 drive shaft with a hollow formed therein that is interlocked with the second traveling drive motor and a second _2 output shaft that is interlocked with the second _2 drive shaft are installed so as to be sealed at a second _1 other tip region. A second _1 traveling link arm in which the second _1 output shaft is fixedly coupled to a first _2 connecting member that is drawn into the upper space of the b3 of the traveling arm platform and fixedly coupled to the b3 stop member, and a second _2 traveling link arm in which a second _2 tip region is fixedly coupled to the second _2 output shaft of the second _1 traveling link arm; and a second tip region is rotatably coupled to a first _2 other tip region of the first _2 traveling link arm, and a second other tip region is rotatably coupled to a second _2 other tip region of the second _2 traveling link arm, and a rotation drive motor is formed at a first central region; a conveyance robot coupling portion; including, a traveling robot that reciprocates the conveyance robot coupling portion in the first linear direction by the operation of the first traveling drive motor and the second traveling drive motor; and a conveyance robot that is coupled to the conveyance robot coupling portion and conveys a substrate;A substrate transfer device including the same is provided.;

[0018] In one example, the lifting drive unit of the lifting robot includes a first screw nut fixedly coupled to one side surface of the lifting plate; a second screw nut fixedly coupled to the other side surface symmetric to the one side surface; a first screw shaft formed in a vertical direction perpendicular to the first linear direction and perpendicular to the ground, and coupled to and rotated by the first screw nut; a second screw shaft formed in the vertical direction and coupled to and rotated by the second screw nut; a lifting drive motor providing a driving force for rotating the first screw shaft and the second screw shaft; and a first belt and a second belt transmitting the driving force of the lifting drive motor to each of the first screw shaft and the second screw shaft.

[0019] In one example, the lifting drive unit of the lifting robot further includes at least one first sliding guide formed on the one side surface of the lifting plate to support the vertical movement direction of the lifting plate; and at least one second sliding guide formed on the other side surface of the lifting plate to support the vertical movement direction of the lifting plate.

[0020] In one example, the lifting robot further includes a first cover to which a first through hole a2_1 to an nth through hole a2_n into which the first lifting shaft to the nth lifting shaft are respectively drawn in the first linear direction are formed and which is coupled to be sealed to the vacuum chamber through hole of the vacuum chamber; and first bellows to nth bellows into which the first lifting shaft to the nth lifting shaft are respectively drawn in, one side end of which is coupled to the upper surface of the lifting plate and the other side end of which is coupled to the first cover.

[0021] In one example, the conveyance robot coupling portion of the traveling robot further includes compliance for changing, within the conveyance robot coupling portion, any one position among positions where the other distal end region of the first and second traveling link arms can rotate in response to an external force in any one of the first distal end region to the second other distal end region, or positions where the other distal end region of the second and second traveling link arms can rotate.

[0022] In one example, the compliance includes: a compliance body that is movable in the longitudinal direction of the conveyance robot coupling portion inside any one of the first distal end region to the second other distal end region and is coupled so as to be rotatable to any one of the other distal end region of the first and second traveling link arms to the other distal end region of the second and second traveling link arms; at least one first sliding member formed on the upper surface of the compliance body; at least one second sliding member having one side coupled to the first sliding member and sliding in the longitudinal direction of the conveyance robot coupling portion and the other side fixedly coupled to the conveyance robot coupling portion; and elastic members respectively formed on both side movement paths of the compliance body inside any one of the first distal end region to the second other distal end region of the conveyance robot coupling portion.

[0023] In one example, the traveling arm platform of the traveling robot further includes: a first wiring hole connecting the b1_k upper space, which is any one of the b1_1 upper space to the b1_n upper space, and the b2 lower space; and a second wiring hole connecting the b1_k upper space and the b3 lower space.

[0024] In one example, the traveling arm platform of the traveling robot includes: a first wiring hole that connects any one of the first b1_k upper spaces within the first b1_1 upper space to the first b1_n upper space on one side of the body of the traveling arm platform; a second wiring hole that connects the second b2 lower space on one side of the body of the traveling arm platform; a first wiring hole that connects the first b1_k upper space on the other side of the body of the traveling arm platform that is symmetric to one side of the body of the traveling arm platform with respect to the first linear direction; a second wiring hole that connects the second b3 lower space on the other side of the body of the traveling arm platform; a first sealing cover that seals the first wiring hole and the second wiring hole on one side of the body of the traveling arm platform; and a second sealing cover that seals the first wiring hole and the second wiring hole on the other side of the body of the traveling arm platform.

[0025] In one example, for the traveling robot, a position where a second linear direction line connecting the center points of the b2 coupling holes and the center points of the b3 coupling holes of the traveling arm platform intersects the longitudinal center line of the first_1 traveling link arm is defined as the first_1 contact point, a position where the second linear direction line intersects the longitudinal center line of the second_1 traveling link arm is defined as the first_2 contact point, a position where the longitudinal center line of the first_1 traveling link arm intersects the longitudinal center line of the first_2 traveling link arm is defined as the second_1 contact point, a position where the longitudinal center line of the second_1 traveling link arm intersects the longitudinal center line of the second_2 traveling link arm is defined as the second_2 contact point, a position where the longitudinal center line of the first_2 traveling link arm intersects the longitudinal center line of the transport robot coupling part is defined as the third_1 contact point, and a position where the longitudinal center line of the second_2 traveling link arm intersects the longitudinal center line of the transport robot coupling part is defined as the third_2 contact point. In this case, the distance between the first_1 contact point and the first_2 contact point and the distance between the third_1 contact point and the third_2 contact point are made the same, the distance between the first_1 contact point and the second_1 contact point, the distance between the second_1 contact point and the third_1 contact point, the distance between the first_2 contact point and the second_2 contact point, and the distance between the second_2 contact point and the third_2 contact point are made the same, the absolute value of the angle formed by the traveling arm platform and the first_1 traveling link arm at the first_1 contact point and the absolute value of the angle formed by the traveling arm platform and the second_1 traveling link arm at the first_2 contact point are made the same, the absolute value of the angle formed by the first_1 traveling link arm and the first_2 traveling link arm at the second_1 contact point and the absolute value of the angle formed by the second_1 traveling link arm and the second_2 traveling link arm at the second_2 contact point are made the same, and the absolute value of the angle formed by the first_2 traveling link arm and the transport robot coupling part at the third_1 contact point and the absolute value of the angle formed by the second_2 traveling link arm and the transport robot coupling part at the third_2 contact point are made the same.

[0026] In one example, the first traveling drive motor and the second traveling motor of the traveling robot operate identically and are configured to rotate in opposite directions.

[0027] In one example, the transfer robot is formed in a second central region, which is a specific region on a central line corresponding to the linear movement direction of the substrate moved by the transfer robot. The transfer robot is divided into a first c1 upper space and a first c1 lower space by a first c1 locking member in which a first c1 through hole corresponding to the hollow of the rotary drive shaft of the rotary drive motor of the transfer robot coupling portion is formed. The first c1 upper space is sealed by a first c1 cover, and the first c1 coupling hole is formed; the first c1 coupling hole is formed in a third one-tip region in one side region with respect to the central line, and is divided into a second c2 upper space and a second c2 lower space by a second c2 locking member in which a second c2 through hole is formed. The second c2 lower space is sealed by a second c2 cover, and the second c2 coupling hole is formed; the second c2 coupling hole is formed in a third other-tip region corresponding to the third one-tip region in the other side region with respect to the central line, and is divided into a third c3 upper space and a third c3 lower space by a third c3 locking member in which a third c3 through hole is formed. The third c3 lower space is sealed by a third c3 cover, and the third c3 coupling hole is formed; a first_1 blade and a first_2 blade are respectively formed in front (the front is the direction in which the process chamber is located in a state where the transfer robot is positioned to transfer the substrate to the process chamber coupled to the vacuum chamber) and behind (the behind is the opposite direction of the front) of the second c2 coupling hole; and a second_1 blade and a second_2 blade are respectively formed in front and behind of the third c3 coupling hole. The rotary drive shaft of the rotary drive motor drawn into the first c1 lower space is fixedly coupled to the first c1 locking member to form a transfer arm platform;A first conveyance drive motor and a third speed reducer that is linked to the first conveyance drive motor and reduces the rotational speed by half are installed in a sealed internal space. A hollow third_1 drive shaft linked to the third speed reducer and a third_1 output shaft linked to the third_1 drive shaft are installed so as to be sealed in a first end region of the third_1. A hollow third_2 drive shaft linked to the first conveyance drive motor and a third_2 output shaft linked to the third_2 drive shaft are installed so as to be sealed in another end region of the third_1. A first_1 conveyance link arm having the third_1 output shaft fixedly coupled to a second_1 connecting member that is drawn into the upper space of the c2 of the conveyance arm platform and fixedly coupled to the c2 locking member: A first_2 conveyance link arm having a first end region of the third_2 fixedly coupled to the third_2 output shaft of the first_1 conveyance link arm through a first fixed coupling shaft: A first common link arm having a central region of the third fixedly coupled to the first fixed coupling shaft so as to be rotatable: A first_1 auxiliary link arm parallel to the first_1 conveyance link arm, having a first end region of the third_4 rotatably coupled to the first_1 blade of the conveyance arm platform and a second end region of the third_4 rotatably coupled to a first end region of the third_3 of the first common link arm: A first_2 auxiliary link arm parallel to the first_1 conveyance link arm, having a first end region of the third_5 rotatably coupled to the first_2 blade of the conveyance arm platform and a second end region of the third_5 rotatably coupled to another end region of the third_3 of the first common link arm: A first_3 auxiliary link arm parallel to the first_2 conveyance link arm, having a first end region of the third_6 rotatably coupled to another end region of the third_3 of the first common link arm: A first_4 auxiliary link arm parallel to the first common link arm, having a first end region of the third_7 rotatably coupled to a second end region of the third_6 of the first_3 auxiliary link arm and a second end region of the third_7 rotatably coupled to a second end region of the third_2 of the first_2 conveyance link arm: And a first end effector fixed to the second end region of the third_7 of the first_4 auxiliary link arm and supporting the substrate: The first conveyance arm unit including;And a second conveyance drive motor and a fourth speed reducer that is interlocked with the second conveyance drive motor and reduces the rotation speed to 1 / 2 are installed in the sealed internal space. A hollow fourth_1 drive shaft that is interlocked with the fourth speed reducer and a fourth_1 output shaft that is interlocked with the fourth_1 drive shaft are installed so as to be sealed at a first end region of the fourth_1. A hollow fourth_2 drive shaft that is interlocked with the second conveyance drive motor and a fourth_2 output shaft that is interlocked with the fourth_2 drive shaft are installed so as to be sealed at a second end region of the fourth_1. A second_1 conveyance link arm in which the fourth_1 output shaft is fixedly coupled to a second_2 coupling member that is drawn into the upper space of the c3 of the conveyance arm platform and fixedly coupled to the c3 locking member: A second_2 conveyance link arm in which a first end region of the fourth_2 is fixedly coupled to the fourth_2 output shaft of the second_1 conveyance link arm through a second fixed coupling shaft: A second common link arm in which a central region of the fourth is coupled to the second fixed coupling shaft so as to be rotatable: A second_1 auxiliary link arm that is parallel to the second_1 conveyance link arm, a first end region of the fourth_4 is coupled to the second_1 blade of the conveyance arm platform so as to be rotatable, and a second end region of the fourth_4 is coupled to a first end region of the fourth_3 of the second common link arm so as to be rotatable: A second_2 auxiliary link arm that is parallel to the second_1 conveyance link arm, a first end region of the fourth_5 is coupled to the second_2 blade of the conveyance arm platform so as to be rotatable, and a second end region of the fourth_5 is coupled to a second end region of the fourth_3 of the second common link arm so as to be rotatable: A second_3 auxiliary link arm that is parallel to the second_2 conveyance link arm, a first end region of the fourth_6 is coupled to the second end region of the fourth_3 of the second common link arm so as to be rotatable: A second_4 auxiliary link arm that is parallel to the second common link arm, a first end region of the fourth_7 is coupled to a second end region of the fourth_6 of the second_3 auxiliary link arm so as to be rotatable, and a second end region of the fourth_7 is coupled to a second end region of the fourth_2 of the second_2 conveyance link arm so as to be rotatable: And a second end effector that is fixed to the second end region of the fourth_7 of the second_4 auxiliary link arm and supports the substrate: A second conveyance arm unit including the above; including.

[0028] In one example, the height of the second fixed coupling shaft is made higher than the height of the first fixed coupling shaft so that the first end effector and the second end effector are located at different heights on the same path.

[0029] In one example, the transport arm platform further includes a third wiring hole connecting the first c1 upper space and the second c2 lower space and a fourth wiring hole connecting the first c1 upper space and the third c3 lower space.

[0030] In one example, the transport arm platform includes an upper plate including the first_1 blade, the first_2 blade, the second_1 blade, and the second_2 blade, and a lower plate coupled to the upper plate. In the second central region of the upper plate, a first c1 upper coupling hole, which is a part of the first c1 coupling hole, is formed. In the third one-tip region of the upper plate, a first c2 upper coupling hole, which is a part of the first c2 coupling hole, is formed. Inside the first c2 upper coupling hole, a first c2 stop member with a first c2 through hole formed therein is formed to separate the internal space of the first c2 upper coupling hole. In the third other-tip region of the upper plate, a first c3 upper coupling hole, which is a part of the first c3 coupling hole, is formed. Inside the first c3 upper coupling hole, a first c3 stop member with a first c3 through hole formed therein is formed to separate the internal space of the first c3 upper coupling hole. In the second central region of the lower plate, a first c1 lower coupling hole, which is the other part of the first c1 coupling hole, is formed. Inside the first c1 lower coupling hole, a first c1 stop member with a first c1 through hole formed therein is formed to separate the internal space of the first c1 lower coupling hole. In the third one-tip region of the lower plate, a first c2 lower coupling hole, which is the other part of the first c2 coupling hole, is formed. In the third other-tip region of the lower plate, a first c3 lower coupling hole, which is the other part of the first c3 coupling hole, is formed.

[0031] In one example, on the lower surface of the upper plate, a third upper wiring groove connecting the internal space of the c1 upper coupling hole and the lower space of the c2 upper coupling hole and a fourth upper wiring groove connecting the internal space of the c1 upper coupling hole and the lower space of the c3 upper coupling hole are formed, and on the upper surface of the lower plate, a third lower wiring groove connecting the upper space of the c1 lower coupling hole and the internal space of the c2 lower coupling hole and a fourth lower wiring groove connecting the upper space of the c1 lower coupling hole and the internal space of the c3 lower coupling hole are formed.

Advantages of the Invention

[0032] The present invention can provide a substrate transfer device that accurately transfers a high-load substrate over a long distance.

[0033] Also, the present invention can provide a substrate transfer device that can reduce the sag of a robot when transferring a high-load substrate over a long distance.

[0034] Also, the present invention can provide a substrate transfer device that can reduce the slip of a substrate at a process station when transferring a high-load substrate over a long distance.

[0035] Also, the present invention can provide a substrate transfer device that can accurately position a substrate at a process station when transferring a high-load substrate over a long distance.

Brief Description of the Drawings

[0036] The following attached drawings, which are used for the description of the embodiments of the present invention, are merely a part of the embodiments of the present invention, and for those with ordinary knowledge in the technical field to which the present invention belongs (hereinafter referred to as "ordinary technicians"), other drawings can be obtained based on these drawings without inventive work.

[0037]

Figure 1

Figures 2a - 2b

Figures 3a - 3b

Figures 4a - 4c

Figure 5

Figure 6

Figure 7

Figures 8a - 8b

Figures 9a - 9c

Figure 10

Figure 11

Mode for Carrying Out the Invention

[0038] The detailed description of the present invention described below refers to the accompanying drawings that illustrate specific embodiments in which the present invention can be implemented in order to clarify each object, each technical solution, and each advantage of the present invention. These embodiments are described in sufficient detail so that an ordinary technician can implement the present invention.

[0039] The detailed description of the present invention described below refers to the accompanying drawings that illustrate specific embodiments in which the present invention can be implemented as examples. These embodiments are described in sufficient detail so that an ordinary technician can implement the present invention. It should be understood that the various embodiments of the present invention are different from each other but do not necessarily have to be mutually exclusive. For example, the specific shapes, structures, and characteristics described herein can be embodied in other embodiments without departing from the spirit and scope of the present invention in relation to one embodiment. Also, it should be understood that the position or arrangement of individual components within each disclosed embodiment can be changed without departing from the spirit and scope of the present invention. Therefore, the following detailed description is not intended to be taken in a limiting sense, and the scope of the present invention is limited only by the appended claims together with all scopes equivalent to what the claims claim when appropriately described. Similar reference numerals in the drawings are the same or refer to similar functions across various aspects.

[0040] Hereinafter, in order to enable a person having ordinary knowledge in the technical field to which the present invention pertains to easily implement the present invention, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

[0041] FIG. 1 schematically shows a cluster-type substrate processing apparatus in which a substrate transfer apparatus according to an embodiment of the present invention is installed.

[0042] FIG. 1 relates to a substrate processing apparatus in which one process chamber PC1 and PC2 are installed on each side of a vacuum chamber VC, which is a transfer chamber having a rectangular structure, and each process chamber can accommodate two substrates. The substrate transfer apparatus TA is fixedly installed at a specific position P1 within the vacuum chamber VC, and a transfer robot of the substrate transfer apparatus TA travels to transfer substrates so as to correspond to the positions of the respective process chambers and the positions of the two substrates in each process chamber.

[0043] As an example, the traveling robot of the substrate transfer device TA travels the transfer robot so as to correspond to the first substrate position S1 in the first process chamber PC1, and the transfer robot is positioned at the first position P2. The transfer robot of the substrate transfer robot TA faces the first substrate position S1 in the first process chamber PC1 through a rotational operation, and can operate the end effector to load a substrate at the first substrate position S1 or unload a substrate from the first substrate position S1.

[0044] Further, the traveling robot of the substrate transfer device TA travels the transfer robot so as to correspond to the second substrate position S2 in the first process chamber PC1, and the transfer robot is positioned at the second position P3. The transfer robot of the substrate transfer device TA faces the second substrate position S2 in the first process chamber PC1 through a rotational operation, and can operate the end effector to load a substrate at the second substrate position S2 or unload a substrate from the second substrate position S2.

[0045] FIG. 1 exemplarily illustrates a substrate processing apparatus having a rectangular structure, but the present invention is not limited thereto. The traveling robot can travel the transfer robot along various set paths in a vacuum chamber having various structures with the substrate transfer device TA according to an embodiment of the present invention fixed and installed at a specific position.

[0046] FIGS. 2a and 2b schematically show a substrate transfer device TA according to an embodiment of the present invention.

[0047] Referring to FIGS. 2a and 2b, the substrate transfer device TA can include a lifting robot 1000, a traveling robot 2000 coupled to the lifting robot 1000, and a transfer robot 3000 coupled to the traveling robot 2000.

[0048] First, the lifting robot 1000 is located in the outer lower region of the housing that seals the inside of the vacuum chamber VC, and its upper end can be coupled to be sealed in a vacuum chamber through-hole (not shown) formed in the lower region of the housing of the vacuum chamber VC. The first lifting shaft to the nth lifting shaft 1200_1, 1200_2 with a hollow formed therein can be moved up and down. At this time, n is an integer of 2 or more. Although only two lifting shafts are shown in the drawings, the present invention is not limited thereto, and the lifting shafts can also be formed in two or more. Also, in the following drawings, the components corresponding to the lifting shafts are shown to correspond to the two lifting shafts, but each component corresponding to the lifting shafts can be formed to have a number corresponding to the number of the formed lifting shafts.

[0049] Through this, the lifting robot 1000 can position the transfer robot 3000 at an appropriate height for the transfer robot 3000 to load or unload a substrate in a process chamber or the like by adjusting the vertical position of the transfer robot 3000.

[0050] As an example, referring to FIGS. 3a and 3b, the lifting robot 1000 will be described in more detail as follows.

[0051] The lifting robot 1000 can include a lifting plate 1100 formed at the lower part of the vacuum chamber and moving up and down by a lifting driving unit. In the lifting plate 1100, first through-holes to nth through-holes 1110_1, 1110_2 in a first linear direction L on a plane can be formed.

[0052] Further, the lifting robot 1000 can include first to nth lifting shafts 1200_1 and 1200_2, each having one end coupled to the upper surface of the lifting plate 1100 and the other end located inside the vacuum chamber. The first to nth lifting shafts 1200_1 and 1200_2, each having a hollow interior, can have one end coupled to the upper surface of the lifting plate 1100 such that their respective hollow axes correspond to the centers of the first to nth through holes 1110_1 and 1110_2, respectively.

[0053] On the other hand, the lifting drive unit of the lifting robot 1000 for moving the lifting plate 1100 up and down can include a first screw nut 1310_1 fixedly coupled to one side surface of the lifting plate 1100 and a second screw nut (not shown) fixedly coupled to the other side surface of the lifting plate 1100 corresponding to one side surface of the lifting plate 1100. At this time, one side surface and the other side surface of the lifting plate 1100 may be side surfaces that are symmetric to each other with respect to the center of gravity of the lifting plate 1100, but are not limited thereto.

[0054] And, each of the first screw nut 1310_1 and the second screw nut can be coupled such that the first and second screw shafts 1320_1 and 1320_2, respectively formed in a vertical direction orthogonal to the first linear direction L, can rotate.

[0055] Further, the lifting drive unit of the lifting robot 1000 can include a lifting drive motor 1330 that provides a driving force for rotating the first and second screw shafts 1320_1 and 1320_2, and a first belt 1340_1 that transmits the driving force of the lifting drive motor 1330 to the first screw shaft 1320_1 and a second belt (not shown) that transmits the driving force of the lifting drive motor 1330 to the second screw shaft 1320_2 can be installed.

[0056] At this time, the first belt and the second belt may be timing belts. The first belt can be coupled to timing pulleys respectively coupled to the drive shaft of the lifting drive motor 1330 and the first screw shaft 1320_1, and the second belt can be coupled to timing pulleys respectively coupled to the drive shaft of the lifting drive motor 1330 and the second screw shaft 1320_2. However, although the transmission of the driving force between the lifting drive motor and the screw shaft has been described as being performed by the pulley method, the present invention is not limited thereto, and various methods for transmitting the driving force, such as the gear method, can be used.

[0057] Thereby, in the lifting drive unit of the lifting robot 1000, the first screw shaft and the second screw shaft rotate by the operation of the lifting drive motor, and thereby, the lifting plate 1100 to which the first screw nut and the second screw nut are coupled moves up and down corresponding to the rotation direction of the lifting drive motor.

[0058] In addition, the lifting drive unit of the lifting robot 1000 can include at least one first sliding guide 1350_1 formed on one side surface of the lifting plate 1100 to support the vertical movement direction of the lifting plate 1100 and at least one second sliding guide 1350_2 formed on the other side surface of the lifting plate 1100 to support the vertical movement direction of the lifting plate. At this time, a plurality of sliding guides can be formed on each side surface to more stably support the vertical movement direction of the lifting plate 1100.

[0059] And the lifting robot 1000 can be coupled to be sealed to the vacuum chamber through hole of the vacuum chamber using the first cover 1400. The first cover 1400 can be formed with first through holes to nth through holes 1410_1, 1410_2 into which the first lifting shaft to the nth lifting shafts 1200_1, 1200_2 are respectively drawn in the first linear direction.

[0060] In addition, the lifting robot 1000 can include first to nth bellows 1500_1 and 1500_2, each of the first to nth lifting shafts 1200_1 and 1200_2 being drawn in, one side end being coupled to the upper surface of the lifting plate 1100, and the other side end being coupled to the first cover 1400. Through this, the vacuum chamber can be sealed from the external environment by the bellows to maintain a vacuum. On the other hand, although bellows are installed on each of the first to nth lifting shafts as described above, alternatively, one bellows having a diameter capable of drawing in all of the first to nth lifting shafts can be installed.

[0061] Next, referring also to FIG. 2b, the traveling robot 2000 includes a traveling arm platform 2100 coupled to the first to nth lifting shafts 1200_1 and 1200_2 of the lifting robot 1000, a first traveling arm portion 2200 and a second traveling arm portion 2300 coupled to the traveling arm platform 2100 symmetrically to each other, and a transfer robot coupling portion 2400 to which a transfer robot 3000 for substrate transfer is coupled and which is coupled to the first traveling arm portion 2200 and the second traveling arm portion 2300. By the operations of the first traveling arm portion 2200 and the second traveling arm portion 2300, the transfer robot 3000 can be made to travel within the vacuum chamber by moving the transfer robot coupling portion 2400 forward and backward.

[0062] Through this, the traveling robot 2000 moves the transfer robot coupling part 2400 forward and backward by the operations of the first traveling arm part 2200 and the second traveling arm part 2300 while being fixed at a specific position within the vacuum chamber, so that the transfer robot 3000 coupled to the transfer robot coupling part 2400 travels to a set position, that is, a position located in a process chamber or the like for loading or unloading a substrate. By adjusting the position of the transfer robot 3000 in the height direction by the vertical movement of the lifting robot 1000, the transfer robot 3000 can load or unload the substrate in a process chamber or the like.

[0063] A more detailed description of the traveling robot 2000 of the substrate transfer device according to such an embodiment of the present invention is as follows.

[0064] First, referring to FIGS. 4a to 4b, the traveling arm platform 2100 can include b1_1 coupling holes to b1_n coupling holes 2110_1, 2110_2 formed in a first linear direction L on a plane, a b2 coupling hole 2120 formed in a first tip region in a second linear direction orthogonal to the first linear direction L, and a b3 coupling hole 2130 formed in a first other tip region in the second linear direction.

[0065] Each of the b1_1 coupling holes to b1_n coupling holes 2110_1, 2110_2 is divided into a b1_1 upper space 2113 and a b1_1 lower space 2114 to a b1_n upper space (not shown) and a b1_n lower space (not shown) by respective b1_1 stop members to b1_n stop members in which b1_1 through holes to b1_n through holes corresponding to the hollow portions of the first lifting shaft to the nth lifting shaft of the lifting robot are formed, and each of the b1_1 upper space 2113 to the b1_n upper space can be sealed by b1_1 covers to b1_n covers 2111_1, 2111_2.

[0066] The second b2 coupling hole 2120 is partitioned into a second b2 upper space 2123 and a second b2 lower space 2124 by a second b2 stop member in which a second b2 through hole is formed, and the second b2 lower space 2124 can be sealed by a second b2 cover 2121.

[0067] Further, the second b3 coupling hole 2130 is partitioned into a second b3 upper space 2133 and a second b3 lower space 2134 by a second b3 stop member in which a second b3 through hole is formed, and the second b3 lower space 2134 can be sealed by a second b3 cover 2131.

[0068] The traveling arm platform 2100 can be coupled to the lifting robot. Specifically, with each of the other ends of the first lifting shaft to the other ends of the nth lifting shaft being drawn into the respective second b1_1 lower space to the second b1_n lower space of the second b1_1 coupling holes to the second b1_n coupling holes 2110_1, 2110_2, each of the other ends of the first lifting shaft to the other ends of the nth lifting shaft can be fixedly coupled to the respective second b1_1 stop member to the second b1_n stop member.

[0069] At this time, when fixedly coupling each of the other ends of the first lifting shaft to the other ends of the nth lifting shaft to the respective second b1_1 stop member to the second b1_n stop member, sealing members such as O-rings and gaskets can be added to improve the sealing performance in the fixed coupling region. The configuration of adding sealing members such as O-rings and gaskets can be similarly applied to other coupling parts to be described later, so it will be omitted in the following description.

[0070] Through this, the external environment due to the hollow of the first lifting shaft to the nth lifting shaft can be sealed from the vacuum environment inside the vacuum chamber at the second b1_1 coupling holes to the second b1_n coupling holes 2110_1, 2110_2.

[0071] On one hand, wiring holes can be formed in the traveling arm platform 2100 for drawing wiring that is drawn through the hollow of at least one of the first to nth lifting shafts of the lifting robot into the first traveling arm portion 2200 and the second traveling arm portion 2300.

[0072] That is, a first-1 wiring hole 2141 connecting any one of the first-b1_1 upper space to the first-b1_n upper space (assuming that the first-b1_k upper space is the first-b1_1 upper space in FIGS. 4a and 4b) is formed on one side surface of the body of the traveling arm platform 2100, a second-1 wiring hole 2142 connecting the first-b2 lower space 2124 is formed on one side surface of the body of the traveling arm platform 2100, a first-2 wiring hole 2151 connecting the first-b1_k upper space 2113 is formed on the other side surface of the body of the traveling arm platform 2100 symmetric to one side surface of the body of the traveling arm platform 2100 with respect to the first straight line direction L, and a second-2 wiring hole 2152 connecting the first-b3 lower space 2134 can be formed on the other side surface of the body of the traveling arm platform 2100.

[0073] And, for sealing the wiring holes, a first sealing cover 2143 for sealing the first-1 wiring hole 2141 and the second-1 wiring hole 2142 on one side surface of the body of the traveling arm platform 2100 and a second sealing cover 2153 for sealing the first-2 wiring hole 2151 and the second-2 wiring hole 2152 on the other side surface of the body of the traveling arm platform 2100 can be installed.

[0074] Also, referring to FIG. 4c, as another example, wiring holes for drawing wiring that is drawn through the hollow of at least one of the first to nth lifting shafts of the lifting robot into the first traveling arm portion 2200 and the second traveling arm portion 2300 can also be formed inside the body of the traveling arm platform 2100.

[0075] That is, inside the body of the traveling arm platform 2100, a first wiring hole 2125 that connects any one of the first b1_1 upper space to the first b1_n upper space, specifically the first b1_k upper space (assuming that the first b1_k upper space is the first b1_1 upper space in Fig. 4c) and the second b2 lower space 2124, and a second wiring hole 2135 that connects the first b1_k upper space 2113 and the third b3 lower space 2134 can be formed so that the inside of the traveling arm platform 2100 is sealed without a separate sealing member.

[0076] Next, referring to Fig. 2b, the first 1_1 traveling link arm 2210 of the first traveling arm part 2200 can be coupled to the first b2 coupling hole 2120 of the traveling arm platform 2100, and the second 2_1 traveling link arm 2310 of the second traveling arm part 2300 can be coupled to the first b3 coupling hole 2130 of the traveling arm platform 2100.

[0077] At this time, referring to Fig. 5, the first 1_1 traveling link arm 2210 of the first traveling arm part 2200 has a sealed internal space, and a first traveling drive motor 2211 and a first speed reducer 2212 that is interlocked with the first traveling drive motor 2211 and reduces the rotational speed to 1 / 2 can be installed in the sealed internal space.

[0078] Further, in the first leading end region of the first traveling link arm 2210, a first drive shaft 2213 with a hollow formed therein that is interlocked with the first speed reducer 2212 and a first output shaft 2214 that is interlocked with the first drive shaft 2213 can be installed so as to be sealed. In the other leading end region of the first traveling link arm 2210, a second drive shaft 2216 with a hollow formed therein that is interlocked with the first traveling drive motor 2211 and a second output shaft 2217 that is interlocked with the second drive shaft 2216 can be installed so as to be sealed. At this time, the interlock between the first traveling drive motor 2211 and the first speed reducer 2212, the interlock between the first speed reducer 2212 and the first drive shaft 2213, and the interlock between the first traveling drive motor 2211 and the second drive shaft 2216 can each be performed by a pulley system. However, the present invention is not limited thereto, and various systems for transmitting rotational force, such as a gear system, can be used. Further, the first drive shaft 2213 and the first output shaft 2214, and the second drive shaft 2216 and the second output shaft 2217 can each be formed by speed reducers having the same reduction ratio. In addition, the first output shaft 2214 and the second output shaft 2217 may have opposite rotational directions. Then, the first output shaft 2214 installed in the first leading end region of the first traveling link arm 2210 of the first traveling arm portion 2200 can be drawn into the upper space 2123 of the second coupling hole 2120 of the traveling arm platform 2100 and fixedly coupled to the second stopper member.

[0079] At this time, a first connecting member 2215 can be used for coupling the first output shaft 2214 and the second stopper member. The first connecting member 2215 is a tube-shaped shaft having a length extended by the distance between the first output shaft 2214 and the second stopper member at the position where the traveling arm platform 2100 and the first traveling link arm 2210 are coupled. Both ends of the first connecting member 2215 can be fixedly coupled to the first output shaft 2214 and the second stopper member, respectively.

[0080] Then, the second first traveling link arm 2310 of the second traveling arm portion 2300 can be configured similarly to the first first traveling link arm 2210 of the first traveling arm portion 2200 described with reference to FIG. 5.

[0081] That is, the second first traveling link arm 2310 of the second traveling arm portion 2300 has a sealed internal space, and a second traveling drive motor and a second speed reducer that is interlocked with the second traveling drive motor and reduces the rotational speed to 1 / 2 can be installed in the sealed internal space.

[0082] Also, in the first tip region of the second first traveling link arm 2310, a second first drive shaft having a hollow formed therein and interlocked with the second speed reducer and a second first output shaft interlocked with the second first drive shaft can be installed so as to be sealed. In the other tip region of the second first traveling link arm 2310 of the second traveling arm portion 2300, a second second drive shaft having a hollow formed therein and interlocked with the second traveling drive motor and a second second output shaft interlocked with the second second drive shaft can be installed so as to be sealed. At this time, the interlock between the second traveling drive motor and the second speed reducer, the interlock between the second speed reducer and the second first drive shaft, and the interlock between the second traveling drive motor and the second second drive shaft can each be performed by a pulley method. However, the present invention is not limited to this, and various methods for transmitting rotational force such as a gear method can be used. Also, the second first drive shaft and the second first output shaft, and the second second drive shaft and the second second output shaft can each be formed by a speed reducer having the same reduction ratio. In addition to this, the rotational directions of the second first output shaft and the second second output shaft may be opposite to each other.

[0083] Then, the second first output shaft installed in the first tip region of the second first traveling link arm 2310 of the second traveling arm portion 2300 can be drawn into the upper space of the b3 coupling hole 2130 of the traveling arm platform 2100 and fixedly coupled to the b3 stop member.

[0084] At this time, the first connecting member can be used for coupling the second output shaft and the b3 stop member. The first connecting member is a tube-shaped shaft having a length extended by the distance between the second output shaft and the b3 stop member at the position where the traveling arm platform 2100 and the second traveling link arm 2310 are coupled. Both ends of the first connecting member can be fixedly coupled to the second output and the b3 stop member, respectively.

[0085] Next, the first end region of the first second traveling link arm 2220 can be fixedly coupled to the second output shaft 2217 of the first traveling link arm 2210 of the first traveling arm portion 2200, and the first end region of the second second traveling link arm 2320 can be fixedly coupled to the second output shaft of the second traveling link arm 2310 of the second traveling arm portion 2300.

[0086] At this time, a connecting member can be used for coupling the second output shaft 2217 and the first end region. The connecting member 2218 is a tube-shaped shaft having a length extended by the distance between the second output shaft 2217 and the coupling region of the first end region at the position where the first traveling link arm 2210 and the first second traveling link arm 2220 are coupled. Both ends of the connecting member 2218 can be fixedly coupled to the coupling regions of the second output shaft 2217 and the first end region, respectively. Also, a connecting member can be used for coupling the second output shaft and the first end region. The connecting member is a tube-shaped shaft having a length extended by the distance between the second output shaft and the coupling region of the first end region at the position where the second traveling link arm 2310 and the second second traveling link arm 2320 are coupled. Both ends of the connecting member can be fixedly coupled to the coupling regions of the second output and the first end region, respectively.

[0087] Next, referring also to FIG. 2b, the transport robot coupling portion 2400 can be coupled to the first second traveling link arm 2220 and the second second traveling link arm 2320.

[0088] That is, the second leading end region of the transfer robot coupling part 2400 can be coupled so as to be rotatable to the first other leading end region of the first and second traveling link arms 2220, and the second other leading end region of the transfer robot coupling part 2400 can be coupled so as to be rotatable to the second other leading end region of the second and second traveling link arms 2320.

[0089] And, in the first central region of the transfer robot coupling part 2400, a rotary drive motor (not shown) including a hollow rotary drive shaft 2410 can be formed so as to be sealed, and a transfer robot 3000 for substrate transfer can be coupled so as to be sealed to the hollow rotary drive shaft 2410.

[0090] Also, in any one of the leading ends from the second leading end to the second other leading end of the transfer robot coupling part 2400, a compliance 2420 can be formed to change any one of the positions where the first other leading end region of the first and second traveling link arms 2220 can rotate or the second other leading end region of the second and second traveling link arms 2320 can rotate in response to an external force within the transfer robot coupling part 2400.

[0091] At this time, referring to FIG. 6, the compliance 2420 can include a compliance body 2421 formed inside any one of the second leading end to the second other leading end of the transfer robot coupling part 2400. And the lower surface of the compliance body 2421 can be coupled so as to be rotatable to any one of the first other leading end region of the first and second traveling link arms 2220 to the second other leading end region of the second and second traveling link arms 2320, and FIG. 6 shows a state of being coupled so as to be rotatable to the second and second traveling link arms 2320. Also, the compliance body 2421 can be formed so as to be movable in the longitudinal direction of the transfer robot coupling part 2400 inside any one of the second leading end to the second other leading end of the transfer robot coupling part 2400.

[0092] On one side, at least one first sliding member 2423, in which a transfer robot coupling part 2400 is formed in the longitudinal direction, can be formed on the upper surface of the compliance body 2421.

[0093] And at least one second sliding member 2424 can be coupled to each of the at least one first sliding members 2423. At this time, one side surface of the second sliding member 2424 can be coupled to the first sliding member and slid in the longitudinal direction of the transfer robot coupling part, and the other side surface can be fixedly coupled to the transfer robot coupling part.

[0094] In addition, the compliance 2420 can be configured to include elastic members 2422 respectively formed on both side movement paths of the compliance body 2421 inside any one of the first tip to the second tip of the transfer robot coupling part. However, the compliance 2420 according to the present invention can be implemented in various ways, such as a cylinder shape using hydraulic pressure, in addition to the configuration using elastic members.

[0095] On the one hand, referring to FIG. 7, the position where the second linear direction line connecting the center points of the second b2 coupling holes (corresponding to 2120 in FIG. 5a) and the second b3 coupling holes (corresponding to 2130 in FIG. 5a) of the traveling arm platform 2100 intersects the longitudinal center line of the first_1 traveling link arm 2210 is the first_1 contact point C1, the position where the second linear direction line of the traveling arm platform 2100 intersects the longitudinal center line of the second_1 traveling link arm 2310 is the first_2 contact point C2, the position where the longitudinal center line of the first_1 traveling link arm 2210 intersects the longitudinal center line of the first_2 traveling link arm 2220 is the second_1 contact point C3, the position where the longitudinal center line of the second_1 traveling link arm 2310 intersects the longitudinal center line of the second_2 traveling link arm 2320 is the second_2 contact point C4, the position where the longitudinal center line of the 1_2 traveling link arm 2220 intersects the longitudinal center line of the transport robot coupling part 2400 is the third_1 contact point C5, and the position where the longitudinal center line of the second_2 traveling link arm 2320 intersects the longitudinal center line of the transport robot coupling part 2400 is the third_2 contact point C6. In this case, the distance between the first_1 contact point C1 and the first_2 contact point C2 is made the same as the distance between the third_1 contact point C5 and the third_2 contact point C6. Also, the distance between the first_1 contact point C1 and the second_1 contact point C3, the distance between the second_1 contact point C3 and the third_1 contact point C5, the distance between the first_2 contact point C2 and the second_2 contact point C4, and the distance between the second_2 contact point C4 and the third_2 contact point C6 are made the same.

[0096] In addition, the absolute value of the angle formed by the traveling arm platform 2100 and the first traveling link arm 2210 at the first contact point C1 and the absolute value of the angle formed by the traveling arm platform 2100 and the second traveling link arm 2310 at the first contact point C2 are made the same, the absolute value of the angle formed by the first traveling link arm 2210 and the second traveling link arm 2220 at the second contact point C3 and the absolute value of the angle formed by the second traveling link arm 2310 and the second traveling link arm 2320 at the second contact point C4 are made the same, and the absolute value of the angle formed by the second traveling link arm 2220 and the transfer robot coupling part 2400 at the third contact point C5 and the absolute value of the angle formed by the second traveling link arm 2320 and the transfer robot coupling part 2400 at the third contact point C6 are made the same.

[0097] Through this, the traveling robot 2000 can travel forward or backward in the first linear direction with the transfer robot 3000 supported by the transfer robot coupling part 2400.

[0098] At this time, the first traveling drive motor 2211 installed on the first traveling link arm 2210 and the second traveling motor installed on the second traveling link arm 2310 can operate identically and be made to have opposite rotation directions.

[0099] And the first wiring for the operation of the first traveling drive motor 2211 and the second wiring for the operation of the second traveling drive motor can be respectively arranged in the sealed space inside the traveling robot 2000.

[0100] At this time, the first wiring can be drawn into the first traveling drive motor 2211 through the respective hollows of at least one lifting shaft and the first_1 drive shaft 2213 so as to be sealed from the internal space of the vacuum chamber, and the second wiring can be drawn into the second traveling drive motor through the respective hollows of at least one lifting shaft and the second_1 drive shaft so as to be sealed from the internal space of the vacuum chamber. On the other hand, the first wiring and the second wiring can be branched from at least one lifting shaft to the first traveling arm portion 2200 and the second traveling arm portion 2300 respectively through the wiring holes formed in the traveling arm platform 2100.

[0101] Next, the transfer robot 3000 of the substrate transfer device according to an embodiment of the present invention will be described as follows.

[0102] Referring to FIGS. 8a and 8b, the transfer robot 3000 can include a transfer arm platform 3100 coupled to the transfer robot coupling portion 2400 of the traveling robot 2000, and a first transfer arm portion 3200 and a second transfer arm portion 3300 coupled to the transfer arm platform 3100. A first end effector 3400 and a second end effector 3500 for supporting a substrate can be coupled to each of the first transfer arm portion 3200 and the second transfer arm portion 3300. For reference, FIG. 8a shows a state in which a mask, which is a substrate, is supported by the first end effector 3400 and a glass substrate, which is a substrate, is supported by the second end effector 3500, and FIG. 8b shows a state in which the forks for supporting the substrate by the first end effector 3400 and the second end effector 3500 are removed.

[0103] Through this, the transfer robot 3000 travels within the vacuum chamber by the operations of the first traveling arm portion and the second traveling arm portion of the traveling robot to be positioned at a specific position. With the first end effector 3400 or the second end effector 3500 positioned at the loading or unloading position of the substrate by the vertical movement of the lifting robot, the substrate supported by the first end effector 3400 or the second end effector 3500 can be loaded or unloaded by the operation of the first transfer arm portion 3200 or the second transfer arm portion 3300.

[0104] And the transfer arm platform 3100 includes a first c1 coupling hole 3110 formed in a second central region which is a specific region on the central line CL that bisects the transfer arm platform 3100 with respect to the linear movement direction of the first transfer arm portion 3200 or the second transfer arm portion 3300, that is, the linear movement direction of the substrate moved by the transfer robot 3000, a second c2 coupling hole 3120 formed in a third one-tip region of one side region with respect to the central line CL, and a third c3 coupling hole 3130 formed in a third other-tip region of the other side region corresponding to the third one-tip region with respect to the central line CL.

[0105] And in front of and behind the second c2 coupling hole 3120 in the transfer arm platform 3100, a first_1 blade 3171 and a first_2 blade 3172 for link coupling are formed, and in front of and behind the third c3 coupling hole 3130, a second_1 blade 3181 and a second_2 blade 3182 for link coupling can be formed. At this time, the front may be the direction in which the process chamber is positioned with the transfer robot 3000 positioned to transfer the substrate to the process chamber coupled to the vacuum chamber, and the rear may be the opposite direction of the front.

[0106] At this time, referring to FIG. 9a, the c1 coupling hole 3110 of the transfer arm platform 3100 is divided into a c1 upper space 3113 and a c1 lower space 3114 by a c1 stop member 3112 in which a c1 through hole 3111 corresponding to the hollow of the rotary drive shaft of the transfer robot coupling portion is formed in the second central region, and the c1 upper space 3113 can be sealed by a c1 cover 3140.

[0107] And the c2 coupling hole 3120 of the transfer arm platform 3100 is divided into a c2 upper space 3123 and a c2 lower space 3124 by a c2 stop member 3122 in which a c2 through hole 3121 is formed in the third one-tip region, and the c2 lower space 3124 can be sealed by a c2 cover 3150.

[0108] Also, the c3 coupling hole 3130 of the transfer arm platform 3100 is divided into a c3 upper space 3133 and a c3 lower space 3134 by a c3 stop member 3132 in which a c3 through hole 3131 is formed in the third other-tip region, and the c3 lower space 3134 can be sealed by a c3 cover 3160.

[0109] And the transfer arm platform 3100 can include wiring holes for drawing wiring drawn through the hollow of the rotary drive shaft of the traveling robot into the first transfer arm portion 3200 and the second transfer arm portion 3300.

[0110] That is, inside the transfer arm platform 3100, a third wiring hole H110 connecting the c1 upper space 3113 and the c2 lower space 3124 and a fourth wiring hole H120 connecting the c1 upper space 3113 and the c3 lower space 3134 can be formed.

[0111] As an example, in addition to FIG. 9a, referring further to FIGS. 9b and 9c, the transport arm platform 3100 can be formed by coupling an upper plate 3100a including a first_1 blade 3171, a first_2 blade 3172, a second_1 blade 3181, and a second_2 blade 3182 and a lower plate 3100b.

[0112] In the second central region of the upper plate 3100a, a first c1 upper coupling hole 3110_1 which is a part of the first c1 coupling hole is formed. In the third one tip region, a first c2 upper coupling hole 3120_1 which is a part of the first c2 coupling hole is formed. In the third other tip region, a first c3 upper coupling hole 3130_1 which is a part of the first c3 coupling hole is formed.

[0113] And inside the first c2 upper coupling hole 3120_1, a first c2 stop member 3122 in which a first c2 through hole 3121 is formed is formed to separate the internal space of the first c2 upper coupling hole 3120_1. Inside the first c3 upper coupling hole 3130_1, a first c3 stop member 3132 in which a first c3 through hole 3131 is formed is formed to separate the internal space of the first c3 upper coupling hole 3130_1.

[0114] Also, on the lower surface of the upper plate 3100a, a third upper wiring groove H110_1 connecting the internal space of the first c1 upper coupling hole 3110_1 and the lower space of the first c2 upper coupling hole 3120_1 and a fourth upper wiring groove H120_1 connecting the internal space of the first c1 upper coupling hole 3110_1 and the lower space of the first c3 upper coupling hole 3130_1 are formed.

[0115] On the other hand, in the second central region of the lower plate 3100b, a first c1 lower coupling hole 3110_2 which is the other part of the first c1 coupling hole is formed. In the third one tip region, a first c2 lower coupling hole 3120_2 which is the other part of the first c2 coupling hole is formed. In the third other tip region, a first c3 lower coupling hole 3130_2 which is the other part of the first c3 coupling hole is formed.

[0116] And inside the first c1 lower coupling hole 3110_2, a first c1 stop member 3112 in which a first c1 through hole 3111 is formed is formed to separate the internal space of the first c1 lower coupling hole 3110_2.

[0117] Also, on the upper surface of the lower plate 3100b, a third lower wiring groove H110_2 that connects the upper space of the first c1 lower coupling hole 3110_2 and the internal space of the second c2 lower coupling hole 3120_2 and a fourth lower wiring groove H120_2 that connects the upper space of the first c1 lower coupling hole 3110_2 and the internal space of the third c3 lower coupling hole 3130_2 are formed.

[0118] Therefore, by coupling the upper plate 3100a and the lower plate 3100b, the first c1 upper coupling hole 3110_1 and the first c1 lower coupling hole 3110_2 are coupled to form the first c1 coupling hole 3110, the second c2 upper coupling hole 3120_1 and the second c2 lower coupling hole 3120_2 are coupled to form the second c2 coupling hole 3120, and the third c3 upper coupling hole 3130_1 and the third c3 lower coupling hole 3130_2 are coupled to form the second c2 coupling hole 3130. Also, by coupling the upper plate 3100a and the lower plate 3100b, the third upper wiring groove H110_1 and the third lower wiring groove H110_2 are coupled to form the third wiring hole H110, and the fourth upper wiring groove H120_1 and the fourth lower wiring groove H120_2 are coupled to form the fourth wiring hole H120.

[0119] Referring also to FIGS. 8a and 8b, the transfer arm platform 3100 can be coupled to the traveling robot. Specifically, the rotary drive shaft of the rotary drive motor of the transfer robot coupling part of the traveling robot is drawn into the lower c1 space of the c1 coupling hole 3110, so that the rotary drive shaft can be fixedly coupled to the c1 stop member. At this time, when fixedly coupling the rotary drive shaft to the c1 stop member, sealing members such as O-rings and gaskets can be added to improve the sealing performance in the fixed coupling region. The configuration of adding sealing members such as O-rings and gaskets can be similarly applied to other coupling parts to be described later, so it will be omitted in the following description.

[0120] Through this, the external environment due to the hollow of the rotary drive shaft can be sealed from the vacuum environment inside the vacuum chamber at the c1 coupling hole 3110.

[0121] And the first transfer link arm 3210 of the first transfer arm part 3200 can be coupled to the c2 coupling hole 3120 of the transfer arm platform 3100, and the second transfer link arm 3310 of the second transfer arm part 3300 can be coupled to the c3 coupling hole 3130 of the transfer arm platform 3100.

[0122] At this time, referring to FIG. 10, the first transfer link arm 3210 of the first transfer arm part 3200 has a sealed internal space, and a first transfer drive motor 3211 and a third speed reducer 3212 that is interlocked with the first transfer drive motor 3211 and reduces the rotation speed to 1 / 2 can be installed in the sealed internal space.

[0123] Further, in the first tip region of the first transfer link arm 3210, a third drive shaft 3213 with a hollow formed to be interlocked with the third reducer 3212 and a third output shaft 3214 interlocked with the third drive shaft 3213 can be installed so as to be sealed. In the other tip region of the first transfer link arm 3210, a third drive shaft 3216 with a hollow formed to be interlocked with the first transfer drive motor 3211 and a third output shaft 3217 interlocked with the third drive shaft 3216 can be installed so as to be sealed. At this time, the interlock between the first transfer drive motor 3211 and the third reducer 3212, the interlock between the third reducer 3212 and the third drive shaft 3213, and the interlock between the first transfer drive motor 3211 and the third drive shaft 3216 can each be performed by a pulley method. However, the present invention is not limited to this, and various methods for transmitting rotational force, such as a gear method, can be used. Further, the third drive shaft 3213 and the third output shaft 3214, and the third drive shaft 3216 and the third output shaft 3217 can each be formed by a reducer having the same reduction ratio. In addition, the third output shaft 3214 and the third output shaft 3217 may have opposite rotational directions.

[0124] Also, referring to FIGS. 8a and 8b, the third output shaft installed in the first tip region of the first transfer link arm 3210 of the first transfer arm portion 3200 can be drawn into the upper space of the c2 coupling hole 3120 of the transfer arm platform 3100 and fixedly coupled to the c2 stop member.

[0125] At this time, a first connecting member (3215 in FIG. 10) can be used for coupling the third output shaft and the c2 stop member. The first connecting member is a tube-shaped shaft having a length extended by the distance between the third output shaft and the c2 stop member at the position where the transfer arm platform 3100 and the first transfer link arm 3210 are coupled, and both ends of the first connecting member can be fixedly coupled to the third output shaft and the c2 stop member, respectively.

[0126] Then, the first end region of the third second of the first one transport link arm 3210 of the first transport arm portion 3200 can be fixedly coupled to the output shaft of the third second.

[0127] At this time, for the coupling between the output shaft of the third second of the first one transport link arm 3210 and the first end region of the third second of the first two transport link arm 3220, a first fixed coupling shaft (3218 in FIG. 10) can be utilized, and the first fixed coupling shaft is a tube-shaped shaft having a length extended by the distance between the coupling region of the output shaft of the third second and the first end region of the third second at the position where the first one transport link arm 3210 and the first two transport link arm 3220 are coupled, and both ends of the first fixed coupling shaft can be fixedly coupled to the coupling regions of the output shaft of the third second and the first end region of the third second, respectively.

[0128] And a first common link arm 3230 can be installed in the coupling region between the first one transport link arm 3210 and the first two transport link arm 3220, that is, the coupling region between the output shaft of the third second and the first end region of the third second.

[0129] That is, referring to FIG. 11, the first common link arm 3230 can be coupled to the first fixed coupling shaft 3218 that couples the output shaft of the third second 3217 and the first end region such that the third central region can rotate.

[0130] And also referring to FIGS. 8a and 8b, the first transport arm portion 3200 can include a first one auxiliary link arm 3240, the first one auxiliary link arm 3240 is parallel to the first one transport link arm 3210, the first end region of the third fourth of the first one auxiliary link arm 3240 is rotatably coupled to the first one blade 3171 of the transport arm platform 3100, and the other end region of the third fourth of the first one auxiliary link arm 3240 can be rotatably coupled to the first end region of the third third of the first common link arm 3230.

[0131] In addition, the first transfer arm portion 3200 can include a first auxiliary link arm 3250. The first auxiliary link arm 3250 is parallel to the first transfer link arm 3210. The third fifth tip region of the first auxiliary link arm 3250 is coupled to the first second blade 3172 of the transfer arm platform 3100 so as to be rotatable, and the third fifth other tip region of the first auxiliary link arm 3250 can be coupled to the third third other tip region of the first common link arm 3230 so as to be rotatable.

[0132] Through this, in the region of the first transfer link arm 3210, two single parallel links can be formed into a double parallel link facing each other with the first transfer link arm 3210 as a reference.

[0133] That is, the joint where the third first tip region of the first transfer link arm 3210 and the c2 coupling hole 3120 of the transfer arm platform 3100 are coupled and the joint where the third fourth tip region of the first auxiliary link arm 3240 and the first first blade 3171 of the transfer arm platform 3100 are coupled form a frame. The first transfer link arm 3210 forms an input link. The joint where the third first other tip region of the first transfer link arm 3210 and the third central region of the first common link arm 3230 are coupled and the first common link arm between the joint where the third third tip region of the first common link arm 3230 and the third fourth other tip region of the first auxiliary link arm 3240 are coupled form a connecting arm. The first auxiliary link arm 3240 forms a follower to constitute one single parallel link. Here, the frame is a concept that can physically exist or not exist, and is a predetermined reference line or reference plane that fixes one end of the input link and one end of the follower constituting the parallel link. The term "frame" mentioned below must also be interpreted similarly.

[0134] In addition, a joint where the third first tip region of the first conveyance link arm 3210 is coupled to the c2 coupling hole 3120 of the conveyance arm platform 3100 and a joint where the third fifth tip region of the first auxiliary link arm 3250 is coupled to the first blade 3172 of the conveyance arm platform 3100 form a frame, the first conveyance link arm 3210 forms an input link, a joint where the third other tip region of the first conveyance link arm 3210 is coupled to the third central region of the first common link arm 3230 and a first common link arm between the joints where the third third other tip region of the first common link arm 3230 is coupled to the third fifth other tip region of the first auxiliary link arm 3250 form a connecting arm, and the first auxiliary link arm 3250 forms a follower to constitute another single parallel link.

[0135] Such a double parallel link enables reduction of vibration and / or disturbance of the first end effector 3400 in the substrate conveyance path.

[0136] And the first conveyance arm unit 3200 can include a first auxiliary link arm 3260. The first auxiliary link arm 3260 is parallel to the first conveyance link arm 3220, and the third sixth tip region of the first auxiliary link arm 3260 can be coupled to the third third other tip region of the first common link arm 3230 so as to be rotatable. At this time, the joint where the third sixth tip region of the first auxiliary link arm 3260 is coupled to the third third other tip region of the first common link arm 3230 can be formed at the same position as the joint where the third fifth other tip region of the first auxiliary link arm 3250 is coupled to the third third other tip region of the first common link arm 3230, or can be formed at different positions from each other.

[0137] In addition, the first transfer arm unit 3200 can include a first auxiliary link arm 3270. The first auxiliary link arm 3270 is parallel to the first common link arm 3230. The third-seventh tip region of the first auxiliary link arm 3270 is coupled to be rotatable with the third-sixth other tip region of the first auxiliary link arm 3260, and the third-seventh other tip region of the first auxiliary link arm 3270 can be coupled to be rotatable with the third-second other tip region of the first transfer link arm 3220.

[0138] And the first transfer arm unit 3200 can include a first end effector 3400. The first end effector 3400 is fixed to the third-seventh other tip region of the first auxiliary link arm 3270 and can support the substrate. For reference, FIG. 8b shows that a plate for fixing the fork for supporting the substrate of the first end effector 3400 is integrally formed with the first auxiliary link arm 3270.

[0139] The first transfer arm unit 3200 configured in this way enables the first end effector 3400 to move forward and backward linearly by the respective transfer arms and auxiliary arms due to the operation of the first transfer drive motor 3211, so that the substrate can be loaded or unloaded at the position set through the first end effector 3400.

[0140] And referring to FIGS. 8a and 8b, the second transfer arm unit 3300 can be configured similarly to the first transfer arm unit 3200 and can be installed on the transfer arm platform 3100 to be symmetric with the first transfer arm unit 3200 with respect to the central line CL of the transfer arm platform 3100.

[0141] That is, the second transfer link arm 3310 of the second transfer arm unit 3300 has a sealed internal space, and a second transfer drive motor and a fourth speed reducer that is interlocked with the second transfer drive motor and reduces the rotation speed to 1 / 2 can be installed in the sealed internal space.

[0142] Further, in the first tip region of the second transport link arm 3310, a fourth drive shaft with a hollow formed to be interlocked with the fourth speed reducer and a fourth output shaft interlocked with the fourth drive shaft can be installed so as to be sealed. In the other tip region of the second transport link arm 3310, a fourth drive shaft with a hollow formed to be interlocked with the second transport drive motor and a fourth output shaft interlocked with the fourth drive shaft can be installed so as to be sealed. At this time, the interlock between the second transport drive motor and the fourth speed reducer, the interlock between the fourth speed reducer and the fourth drive shaft, and the interlock between the second transport drive motor and the fourth drive shaft can each be performed by a pulley method, but the present invention is not limited thereto, and various methods for transmitting rotational force such as a gear method can be used. Also, the fourth drive shaft and the fourth output shaft, and the fourth drive shaft and the fourth output shaft can each be formed of a speed reducer having the same reduction ratio. In addition, the fourth output shaft and the fourth output shaft may have opposite rotational directions.

[0143] Then, the fourth output shaft installed in the first tip region of the second transport link arm 3310 of the second transport arm portion 3300 can be drawn into the upper space of the c3 coupling hole 3130 of the transport arm platform 3100 and fixedly coupled to the c3 stopper member.

[0144] At this time, a second connecting member can be used for coupling the fourth output shaft and the c3 stopper member. The second connecting member is a tube-shaped shaft having a length extended by the distance between the fourth output shaft and the c3 stopper member at the position where the transport arm platform 3100 and the second transport link arm 3310 are coupled, and both ends of the second connecting member can be fixedly coupled to the fourth output shaft and the c3 stopper member, respectively.

[0145] Then, the fourth_2 output shaft of the second_1 transfer link arm 3310 of the second transfer arm unit 3300 can be fixedly coupled to the fourth_2 tip region of the second_2 transfer link arm 3320.

[0146] At this time, a second fixed coupling shaft 3318 can be used for coupling the fourth_2 output shaft of the second_1 transfer link arm 3310 and the fourth_2 tip region of the second_2 transfer link arm 3320. The second fixed coupling shaft 3318 is a tube-shaped shaft having a length extended by the distance between the coupling region of the fourth_2 output shaft and the fourth_2 tip region at the position where the second_1 transfer link arm 3310 and the second_2 transfer link arm 3320 are coupled. Both ends of the second fixed coupling shaft 3318 can be fixedly coupled to the coupling regions of the fourth_2 output and the fourth_2 tip region, respectively. And the height of the second fixed coupling shaft 3318 that connects the second_1 transfer link arm 3310 and the second_2 transfer link arm 3320 of the second transfer arm unit 3300 is made higher than the height of the first fixed coupling shaft that connects the first_1 transfer link arm 3210 and the first_2 transfer link arm 3220 of the first transfer arm unit 3200, so that the first end effector 3400 of the first transfer arm unit 3200 and the second end effector 3500 of the second transfer arm unit 3300 can be positioned at different heights on the same path. However, the present invention is not limited to this, and the height of the first fixed coupling shaft can also be formed higher than the height of the second fixed coupling shaft.

[0147] Next, a second common link arm 3330 can be installed in the coupling region between the second_1 transfer link arm 3310 and the second_2 transfer link arm 3320, that is, in the coupling region between the fourth_2 output shaft and the fourth_2 tip region.

[0148] That is, the second common link arm 3330 can be coupled to the second fixed coupling shaft that couples the fourth_2 output shaft and the fourth_2 tip region so that the fourth central region can rotate.

[0149] And the second transfer arm part 3300 can include a second_1 auxiliary link arm 3340. The second_1 auxiliary link arm 3340 is parallel to the second_1 transfer link arm 3310. The fourth_4 one tip region is coupled to the second_1 blade 3181 of the transfer arm platform 3100 so as to be rotatable, and the fourth_4 other tip region can be coupled to the fourth_3 one tip region of the second common link arm 3330 so as to be rotatable.

[0150] Also, the second transfer arm part 3300 can include a second_2 auxiliary link arm 3350. The second_2 auxiliary link arm 3350 is parallel to the second_1 transfer link arm 3310. The fourth_5 one tip region of the second_2 auxiliary link arm 3350 is coupled to the second_2 blade 3182 of the transfer arm platform 3100 so as to be rotatable, and the fourth_5 other tip region of the second_2 auxiliary link arm 3350 can be coupled to the fourth_3 other tip region of the second common link arm 3330 so as to be rotatable.

[0151] Through this, in the region of the second_1 transfer link arm 3310, two single parallel links can form a double parallel link opposed with respect to the second_1 transfer link arm 3310.

[0152] That is, a joint where the fourth_1 one tip region of the second_1 transfer link arm 3310 and the c3 coupling hole 3320 of the transfer arm platform 3100 are coupled and a joint where the fourth_4 one tip region of the second_1 auxiliary link arm 3340 and the second_1 blade 3181 of the transfer arm platform 3100 are coupled form a frame. The second_1 transfer link arm 3310 forms an input link. A joint where the fourth_1 other tip region of the second_1 transfer link arm 3310 and the fourth central region of the second common link arm 3330 are coupled and the second common link arm 3330 between the joint where the fourth_3 one tip region of the second common link arm 3330 and the fourth_4 other tip region of the second_1 auxiliary link arm 3340 are coupled form a connecting arm. The second_1 auxiliary link arm 3340 forms a follower to constitute one single parallel link.

[0153] In addition, a joint where the fourth-first tip region of the second-first transfer link arm 3310 is coupled to the c3 coupling hole 3130 of the transfer arm platform 3100 and a joint where the fourth-fifth tip region of the second-second auxiliary link arm 3350 is coupled to the second-second blade 3182 of the transfer arm platform 3100 form a frame, the second-first transfer link arm 3310 forms an input link, a joint where the fourth-first other tip region of the second-first transfer link arm 3310 is coupled to the fourth central region of the second common link arm 3330 and a joint where the fourth-third other tip region of the second common link arm 3330 is coupled to the fourth-fifth other tip region of the second-second auxiliary link arm 3350, the second common link arm 3330 therebetween forms a connecting arm, and the second-second auxiliary link arm 3250 forms a follower to constitute another single parallel link.

[0154] Such a double parallel link enables reduction of vibrations and / or disturbances of the second end effector 3500 in the substrate transfer path.

[0155] And the second transfer arm portion 3300 can include a second-third auxiliary link arm 3360. The second-third auxiliary link arm 3360 is parallel to the second-second transfer link arm 3320, and the fourth-sixth tip region can be coupled to the fourth-third other tip region of the second common link arm 3330 so as to be rotatable. At this time, the joint where the fourth-sixth tip region of the second-third auxiliary link arm 3360 is coupled to the fourth-third other tip region of the second common link arm 3330 can be formed at the same position as the joint where the fourth-fifth other tip region of the second-second auxiliary link arm 3350 is coupled to the fourth-third other tip region of the second common link arm 3330, or can be formed at different positions from each other.

[0156] Further, the second transfer arm unit 3300 can include a second _4 auxiliary link arm 3370. The second _4 auxiliary link arm 3370 is parallel to the second common link arm 3330, and the fourth _7 one tip region is coupled to be rotatable to the fourth _6 other tip region of the second _3 auxiliary link arm 3360, and the fourth _7 other tip region can be coupled to be rotatable to the fourth _2 other tip region of the second _2 transfer link arm 3320.

[0157] And the second transfer arm unit 3300 can include a second end effector 3500. The second end effector 3500 is fixed to the fourth _7 other tip region of the second _4 auxiliary link arm 3370 and can support the substrate. For reference, FIG. 8b shows that a plate for fixing the fork supporting the substrate of the second end effector 3500 is configured separately from the second _4 auxiliary link arm 3370, and the plate for fixing the fork supporting the substrate of the second end effector 3500 is fixedly coupled to the fourth _7 other tip region of the second _4 auxiliary link arm 3370 by the second end effector 3500.

[0158] The second transfer arm unit 3300 configured in this way enables the second end effector 3500 to move forward and backward linearly by the respective transfer arms and auxiliary arms according to the operation of the second transfer drive motor, so that the substrate can be loaded or unloaded at the set position through the second end effector 3500.

[0159] At this time, the third _1 other tip region of the first _1 transfer link arm 3210 of the first transfer arm unit 3200 and the fourth _1 other tip region of the second _1 transfer link arm 3310 of the second transfer arm unit 3300 can be positioned in the front region or the rear region of the transfer arm platform 3100 identically.

[0160] On the other hand, differently, the third_1 other tip region of the first_1 transfer link arm 3210 of the first transfer arm unit 3200 is positioned in the front region of the transfer arm platform 3100, and the fourth_1 other tip region of the second_1 transfer link arm 3310 of the second transfer arm unit 3300 can be positioned in the rear region of the transfer arm platform 3100.

[0161] And the third wiring for the operation of the first transfer drive motor 3211 and the fourth wiring for the operation of the second transfer drive motor can be respectively arranged in a sealed space inside the transfer robot 3000.

[0162] At this time, the third wiring can be drawn into the first transfer drive motor 3211 through the respective hollow portions of at least one lifting shaft of the lifting robot 1000, the first_1 drive shaft 2213, the first_2 drive shaft 2216, the rotational drive shaft 2410 of the traveling robot 2000, and the third_1 drive shaft 3213 of the transfer robot 3000 so as to be sealed from the internal space of the vacuum chamber. The fourth wiring can be drawn into the second transfer drive motor through the respective hollow portions of at least one lifting shaft of the lifting robot 1000, the second_1 drive shaft, the second_2 drive shaft, the rotational drive shaft 2410 of the traveling robot 2000, and the fourth_1 drive shaft of the transfer robot 3000 so as to be sealed from the internal space of the vacuum chamber. On the other hand, the third wiring and the fourth wiring can be branched from the rotational drive shaft 2410 to the first transfer arm unit 3200 and the second transfer arm unit 3300 respectively through the wiring holes formed in the transfer arm platform 3100.

[0163] According to the substrate transfer device according to an embodiment of the present invention configured as described above, a plurality of lifting shafts of the lifting robot are formed in the first linear direction, the traveling arm platform of the traveling robot is coupled to the plurality of lifting shafts, and the respective traveling arm portions are coupled to both side regions that are symmetric to each other with respect to the first linear direction in which the plurality of lifting shafts are coupled on the traveling arm platform. Thus, when transporting a high-load substrate over a long distance, the sag amount of the robot can be improved.

[0164] Therefore, in the substrate transfer device according to an embodiment of the present invention, it is possible to improve the sag amount due to a high-load substrate and transfer the high-load substrate to a fixed position in the process chamber.

[0165] As described above, the present invention has been described by way of specific examples and drawings limited to specific matters such as specific components. However, this is only provided to assist in a more general understanding of the present invention, and the present invention is not limited to the above-described examples. Those having ordinary knowledge in the technical field to which the present invention pertains can make various modifications and variations from such descriptions.

[0166] Therefore, the idea of the present invention should not be defined as being limited to the described embodiments, and not only the scope of the following claims, but all those equivalently or equivalently modified from the scope of these claims belong to the scope of the idea of the present invention.

Explanation of Reference Numerals

[0167] TA: Substrate transfer device, 1000: Lifting robot 2000: Traveling robot 3000: Transfer robot

Claims

1. A substrate transport device that transports a substrate within a vacuum chamber, a lift plate having a1_1 through hole and a1_2 through hole formed in a first linear direction on a plane, formed in a lower portion of a vacuum chamber, and moved up and down by a lift driving part; and first and second lift shafts each having a hollow, one side end of each of which is coupled to an upper surface of the lift plate so that each hollow shaft corresponds to a center of the a1_1 through hole and a1_2 through hole, and the other side end of each of which is located inside the vacuum chamber; and a lift robot coupled to a vacuum chamber through hole formed in a lower region of the vacuum chamber so as to be sealed; The b1_1 upper space and the b1_1 lower space and the b1_2 upper space are divided into a b1_1 upper space and a b1_1 lower space and a b1_2 lower space by b1_1 stop members through b1_2 stop members each having a b1_1 through hole through b1_2 through hole formed in the first linear direction and corresponding to the hollow of the first lift shaft through the second lift shaft, and the b1_1 upper space through the b1_2 upper space are sealed by a b1_1 cover through b1_2 cover, respectively. a b2 upper space and a b2 lower space are divided by a b2 stop member having a b2 through hole formed therein, the b2 lower space being divided into a b2 upper space and a b2 lower space by a b2 connecting hole sealed by a b2 cover, and a b3 upper space and a b3 lower space are divided by a b3 stop member having a b3 through hole formed therein, the b3 lower space being divided into a b3 upper space and a b3 lower space by a b3 stop member having a b3 through hole formed therein, the b3 lower space being divided into a b3 connecting hole sealed by a b3 cover, and the b1_1 lower space to the b1_2 lower space a traveling arm platform in which the other end of the first lifting shaft through the other end of the second lifting shaft, which are respectively retracted between the first lifting shaft and the second lifting shaft, are fixedly coupled to the b1_1 stop member through the b1_2 stop member, respectively; a first traveling drive motor and a first reducer, which is linked to the first traveling drive motor and reduces a rotation speed to 1 / 2, are installed in the sealed internal space, and a 1_1 driving shaft, which is hollow and linked to the first reducer, and a 1_1 output shaft, which is linked to the 1_1 driving shaft, are installed to be sealed in a 1_1 end region; a first traveling arm unit including a first_1 driving shaft having a hollow formed therein and connected to the first traveling drive motor and a first_2 output shaft connected to the first_2 driving shaft, the first_1 output shaft being fixedly connected to a first_1 connecting member which is drawn into the b2 upper space of the traveling arm platform and fixedly connected to the b2 stop member, and a first_2 traveling link arm having a first_2 end region fixedly connected to the first_2 output shaft of the first_1 traveling link arm;A second traveling drive motor and a second reducer which is linked to the second traveling drive motor and reduces a rotation speed to 1 / 2 are installed in the sealed internal space, a 2_1 driving shaft which is formed with a hollow and which is linked to the second reducer, and a 2_1 output shaft which is linked to the 2_1 driving shaft are installed to be sealed in a 2_1 first end region, a 2_2 driving shaft which is formed with a hollow and which is linked to the second traveling drive motor, and a 2_2 output shaft which is linked to the 2_2 driving shaft are installed to be sealed in a 2_1 other end region, and the 2_1 connecting member is fixedly connected to the b3 stop member by a 1_2 connecting member which is drawn into the b3 upper space of the traveling arm platform and fixedly connected to the b3 stop member. a second traveling arm unit including a 2_1 traveling link arm having an output shaft fixedly connected thereto, and a 2_2 traveling link arm having a 2_2 first end region fixedly connected to the 2_2 output shaft of the 2_1 traveling link arm; and a transport robot coupling unit having a 2_1 first end region rotatably connected to the 1_2 other end region of the 1_2 traveling link arm, a 2 other end region rotatably connected to the 2_2 other end region of the 2_2 traveling link arm, and a rotation drive motor formed in a first central region; and a traveling robot that reciprocates the transport robot coupling unit in the first linear direction by operation of the first traveling drive motor and the second traveling drive motor; a transport robot coupled to the transport robot coupling portion for transporting a substrate; A substrate transport apparatus comprising:

2. The lifting and lowering drive unit of the lifting robot is a first screw nut fixedly coupled to one side of the lift plate; a second screw nut fixedly coupled to the other side symmetrical to the one side; a first screw shaft that is formed in a vertical direction perpendicular to the first linear direction and perpendicular to the ground and is coupled to the first screw nut to be rotated; a second screw shaft formed in the vertical direction and coupled to the second screw nut to be rotated; an elevation drive motor for providing a driving force for rotating the first screw shaft and the second screw shaft; a first belt and a second belt that transmit a driving force of the lifting drive motor to the first screw shaft and the second screw shaft, respectively; The substrate transport apparatus of claim 1 , comprising:

3. The lifting and lowering drive unit of the lifting robot is at least one first sliding guide formed on the one side of the lift plate and supporting the lift plate in a vertical movement direction; at least one second sliding guide formed on the other side of the lift plate and configured to support the lift plate in a vertical movement direction; The substrate transport apparatus of claim 2 , further comprising:

4. The lifting robot is a through hole a2_1 through a hole a2_2 into which the first lift shaft through the second lift shaft are inserted in the first linear direction, and a cover a is coupled to the vacuum chamber through hole of the vacuum chamber so as to be sealed; a first bellows and a second bellows, one side end of which is coupled to the upper surface of the lift plate and the other side end of which is coupled to the a cover, the first bellows and the second bellows, each of which is retracted, the first bellows and the second bellows, each of which is coupled to the a cover; The substrate transport apparatus of claim 1 , further comprising:

5. The transport robot coupling portion of the traveling robot is 2. The substrate transport device of claim 1, further comprising a compliance that changes one of a position where the 1_2 other end region of the 1_2 traveling link arm is rotatably coupled to a position where the 2_2 other end region of the 2 ...

6. 6. The substrate transport device of claim 5, wherein the compliance includes: a compliant body that is movable in a longitudinal direction of the transport robot coupling part within any one of the second first end region through the second other end region and is rotatably coupled to any one of the first_2 other end region of the first_2 traveling link arm through the second_2 other end region of the second_2 traveling link arm; at least one first sliding member formed on an upper surface of the compliant body; at least one second sliding member having one side coupled to the first sliding member and sliding in the longitudinal direction of the transport robot coupling part and having the other side fixedly coupled to the transport robot coupling part; and elastic members respectively formed on both side movement paths of the compliant body within any one of the second first end region through the second other end region of the transport robot coupling part.

7. The traveling arm platform of the traveling robot includes: a first wiring hole connecting one of the upper spaces b1_1 through b1_2 (a first upper space b1_k) and the lower space b2; a second wiring hole connecting the b1_k upper space and the b3 lower space; The substrate transport apparatus of claim 1 , further comprising:

8. The traveling arm platform of the traveling robot includes: a first wiring hole connecting one of the b1_1 upper spaces to the b1_k upper space, the first wiring hole being disposed on one side of the body of the traveling arm platform; a wiring hole 2_1 connecting the b2 lower space to one side of the body of the traveling arm platform; a first wiring hole 1_2 connecting the b1_k upper space to another side of the body of the traveling arm platform symmetrically to one side of the body of the traveling arm platform with respect to the first linear direction; a second wiring hole connecting the b3 lower space to the other side of the body of the traveling arm platform; a first sealing cover for sealing the first wiring hole and the second wiring hole on one side of the body of the traveling arm platform; a second sealing cover for sealing the first wiring hole and the second wiring hole on another side of the body of the traveling arm platform; The substrate transport apparatus of claim 1 , further comprising:

9. The traveling robot is a position where a second linear line connecting the center point of the b2 coupling hole and the center point of the b3 coupling hole of the traveling arm platform intersects with a longitudinal center line of the 1_1 traveling link arm as a 1_1 tangent point, a position where the second linear line intersects with a longitudinal center line of the 2_1 traveling link arm as a 1_2 tangent point, a position where the longitudinal center line of the 1_1 traveling link arm intersects with a longitudinal center line of the 1_2 traveling link arm as a 2_1 tangent point, a position where the longitudinal center line of the 2_1 traveling link arm intersects with a longitudinal center line of the 2_2 traveling link arm as a 2_2 tangent point, a position where the longitudinal center line of the 1_2 traveling link arm intersects with a longitudinal center line of the transport robot coupling part as a 3_1 tangent point, and a position where the longitudinal center line of the 2_2 traveling link arm intersects with a longitudinal center line of the transport robot coupling part as a 3_2 tangent point, a distance between the 1_1 contact and the 1_2 contact and a distance between the 3_1 contact and the 3_2 contact are made equal, a distance between the 1_1 contact and the 2_1 contact, a distance between the 2_1 contact and the 3_1 contact, a distance between the 1_2 contact and the 2_2 contact, and a distance between the 2_2 contact and the 3_2 contact are made equal, 2. The substrate transport device of claim 1, wherein an absolute value of an angle formed between the traveling arm platform and the 1_1 traveling link arm at the 1_1 junction and an absolute value of an angle formed between the traveling arm platform and the 2_1 traveling link arm at the 1_2 junction are made identical, an absolute value of an angle formed between the 1_1 traveling link arm and the 1_2 traveling link arm at the 2_1 junction and an absolute value of an angle formed between the 2_1 traveling link arm and the 2_2 traveling link arm at the 2_2 junction are made identical, and an absolute value of an angle formed between the 1_2 traveling link arm and the transport robot coupling part at the 3_1 junction and an absolute value of an angle formed between the 2_2 traveling link arm and the transport robot coupling part at the 3_2 junction are made identical.

10. The substrate transport apparatus of claim 1 , wherein the first travel drive motor and the second travel drive motor of the traveling robot operate in the same manner but rotate in opposite directions.

11. The transport robot includes: a c1 coupling hole formed in a second central region, which is a specific region on a central line corresponding to a linear movement direction of the substrate moved by the transfer robot, and divided into a c1 upper space and a c1 lower space by a c1 stop member having a c1 through hole corresponding to a hollow of a rotation drive shaft of the rotation drive motor of the transfer robot coupling part; a c1 coupling hole sealed by a c1 cover, which is formed in a third first end region of one side region based on the central line; a c2 coupling hole formed in a c2 through hole, which is divided into a c2 upper space and a c2 lower space by a c2 stop member having a c2 through hole, which is formed in a third other end region of the other side region based on the central line, which corresponds to the third first end region; a c3 coupling hole, the c3 upper space and the c3 lower space being divided by a c3 stop member having a c3 through hole, the c3 lower space being sealed by a c3 cover; a 1_1 blade and a 1_2 blade formed in front of the c2 coupling hole (the front is a direction in which the process chamber is located when the transfer robot is located to transfer the substrate to the process chamber coupled to the vacuum chamber) and rear of the c2 coupling hole (the rear is a direction opposite to the front); and a 2_1 blade and a 2_2 blade formed in front of the c3 coupling hole and rear of the c3 coupling hole, respectively, and the rotary drive shaft of the rotary drive motor drawn into the c1 lower space is fixedly coupled to the c1 stop member; A first transport driving motor and a third reducer interlocked with the first transport driving motor to reduce a rotation speed to 1 / 2 are installed in the sealed internal space, a 3_1 driving shaft interlocked with the third reducer and having a hollow formed therein and a 3_1 output shaft interlocked with the 3_1 driving shaft are installed to be sealed at a 3_1 first end region, a 3_2 driving shaft interlocked with the first transport driving motor and having a hollow formed therein and a 3_2 output shaft interlocked with the 3_2 driving shaft are installed to be sealed at a 3_1 other end region, and the transport arm platform a 1_1 conveying link arm having the 3_1 output shaft fixedly connected to a 2_1 connecting member which is drawn into the c2 upper space of the platform and fixedly connected to the c2 stop member; a 1_2 conveying link arm having a 3_2 first end region fixedly connected to the 3_2 output shaft of the 1_1 conveying link arm through a first fixed connection shaft; a 1_2 conveying link arm having a 3_2 first end region fixedly connected to the 3_2 output shaft of the 1_1 conveying link arm through a first fixed connection shaft; a 1_3 conveying link arm having a 3_4 first end region rotatably connected to the first fixed connection shaft; a 1_1 auxiliary link arm which is parallel to the 1_1 transport link arm and has a 3_5-first end region rotatably connected to the 1_2 blade of the transport arm platform and a 3_5-second end region rotatably connected to the 3_3-second end region of the first common link arm; a 1_2 auxiliary link arm which is parallel to the 1_2 transport link arm and has a 3_6-first end region rotatably connected to the 1_2 blade of the transport arm platform and a 3_6-second end region rotatably connected to the 3_3-second end region of the first common link arm; a first transport arm unit including: a first_3 auxiliary link arm rotatably connected to the third other end region of the link arm; a first_4 auxiliary link arm parallel to the first common link arm, the first_7 first end region of which is rotatably connected to the third other end region of the first_3 auxiliary link arm and the third_7 other end region of which is rotatably connected to the third other end region of the first_2 transport link arm; and a first end effector fixed to the third other end region of the first_4 auxiliary link arm to support the substrate; A second transport driving motor and a fourth reducer interlocked with the second transport driving motor and reducing a rotation speed to 1 / 2 are installed in the sealed internal space, a 4_1 driving shaft interlocked with the fourth reducer and having a hollow formed therein and a 4_1 output shaft interlocked with the 4_1 driving shaft are installed to be sealed at a 4_1 first end region, a 4_2 driving shaft interlocked with the second transport driving motor and having a hollow formed therein and a 4_2 output shaft interlocked with the 4_2 driving shaft are installed to be sealed at a 4_1 other end region, and the transport arm platform a 2_1 conveying link arm having a 2_2 connecting member fixedly connected to the 4_1 output shaft, the 2_2 connecting member being drawn into the c3 upper space of the conveying arm platform and fixedly connected to the c3 stop member; a 2_2 conveying link arm having a 4_2-1 end region fixedly connected to the 4_2 output shaft of the 2_1 conveying link arm through a second fixed connection shaft; a 2_2 conveying link arm having a 4_2-1 end region rotatably connected to the second fixed connection shaft; a 2_3 conveying link arm having a 4_4-1 end region rotatably connected to the 2_1 brake of the conveying arm platform; a 2_1 auxiliary link arm which is rotatably connected to the 2_1 blade of the transport arm platform and has a 4_4 other end region rotatably connected to the 4_3 other end region of the second common link arm; a 2_2 auxiliary link arm which is parallel to the 2_1 transport link arm and has a 4_5 other end region rotatably connected to the 2_2 blade of the transport arm platform and has a 4_5 other end region rotatably connected to the 4_3 other end region of the second common link arm; a second transport arm unit including: a second_3 auxiliary link arm rotatably connected to the 4_3 other end region of the link arm; a second_4 auxiliary link arm parallel to the second common link arm, the 4_7 first end region of which is rotatably connected to the 4_6 other end region of the 2_3 auxiliary link arm and the 4_7 other end region of which is rotatably connected to the 4_2 other end region of the 2_2 transport link arm; and a second end effector fixed to the 4_7 other end region of the 2_4 auxiliary link arm to support the substrate; The substrate transport apparatus of claim 1 , comprising:

12. The substrate transport device of claim 11 , wherein the height of the second fixed coupling shaft is higher than the height of the first fixed coupling shaft, so that the first end effector and the second end effector are positioned at different heights on the same path.

13. The substrate transport device of claim 11 , wherein the transport arm platform further includes a third wiring hole connecting the c1 upper space and the c2 lower space, and a fourth wiring hole connecting the c1 upper space and the c3 lower space.

14. the transport arm platform includes an upper plate including the first blade, the first blade, the second blade, the first blade, and the second blade, and a lower plate coupled to the upper plate; a c1 upper coupling hole which is a part of the c1 coupling hole is formed in the second central region of the upper plate, a c2 upper coupling hole which is a part of the c2 coupling hole is formed in the third first end region of the upper plate, the c2 stop member having the c2 through hole formed therein is formed inside the c2 upper coupling hole to separate an internal space of the c2 upper coupling hole, a c3 upper coupling hole which is a part of the c3 coupling hole is formed in the third other end region of the upper plate, and the c3 stop member having the c3 through hole formed therein is formed inside the c3 upper coupling hole to separate an internal space of the c3 upper coupling hole, the second central region of the lower plate is formed with a c1 lower coupling hole which is another part of the c1 coupling hole, the c1 stop member having the c1 through hole formed inside the c1 lower coupling hole is formed to separate the internal space of the c1 lower coupling hole, the third one end region of the lower plate is formed with a c2 lower coupling hole which is another part of the c2 coupling hole, and the third other end region of the lower plate is formed with a c3 lower coupling hole which is another part of the c3 coupling hole.

15. a third upper wiring groove connecting an inner space of the c1 upper coupling hole and a lower space of the c2 upper coupling hole, and a fourth upper wiring groove connecting an inner space of the c1 upper coupling hole and a lower space of the c3 upper coupling hole are formed on a lower surface of the upper plate; The substrate transport device of claim 14, wherein a third lower wiring groove connecting an upper space of the c1 lower coupling hole and an internal space of the c2 lower coupling hole and a fourth lower wiring groove connecting an upper space of the c1 lower coupling hole and an internal space of the c3 lower coupling hole are formed on an upper surface of the lower plate.

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