Method for manufacturing a workpiece with a protective member and method for processing a workpiece

Abstract

To provide a manufacturing method of a workpiece with a protective member, which can easily process the protective member into a sheet shape and can reduce the influence of the surface side of the workpiece to which the protective member adheres on the machining of the workpiece, a processing method of the workpiece, and a workpiece with the protective member.SOLUTION: In a manufacturing method of a workpiece with a protective member, a protective member 119 has a melt mass flow rate (MFR) of 30 to 3000 g / 10 minutes based on JIS K 7210, and is a sheet-like resin layer formed by heating a plate-like, powder-like, lump-like, string-like, granular, film-like or fluid-like thermoplastic resin, and spreading the resin while softening or melting, and is pressed and adhered to the surface 4 which is one surface of a workpiece 1 while being heated.SELECTED DRAWING: Figure 9

Description

Technical Field

[0001] The present invention relates to a method for manufacturing a workpiece with a protective member. and The processing method of the workpiece by law is concerned.

Background Art

[0002] When various plate-shaped workpieces such as semiconductor wafers, resin package substrates, ceramic substrates, and glass substrates are thinned by grinding with a grinding device or divided with a cutting blade or a laser beam, the workpiece is sucked and held by a chuck table. For the purpose of preventing damage, contamination, etc. of the workpiece due to contact between the held surface side of the workpiece and the holding surface of the chuck table, and for the purpose of collectively transporting all chips after the workpiece is divided into a plurality of chips (chip-shaped devices), usually, an adhesive tape as a protective member is attached to the held surface side of the workpiece (see, for example, Patent Document 1).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] An adhesive tape generally has a laminated structure of a resin base material layer and an adhesive layer formed of a resin adhesive. When the adhesive layer of the adhesive tape is adhered closely to the held surface side, there is a problem that when the adhesive tape is peeled off, the residue of the adhesive remains on the workpiece. In addition, since the adhesive layer acts as a cushion, the workpiece is likely to vibrate during processing, and as a result, there is a problem that the workpiece may be chipped or the chips after division may scatter.

[0005] Therefore, a method has been devised in which the adhesive layer is eliminated and only the base material layer is used, and the base material layer is fixed by thermocompression bonding. This solves the problem of the adhesive layer becoming a cushion or remaining as a residue. However, depending on the properties of the thermoplastic resin forming the protective member, it is difficult to process it into a sheet form like an adhesive tape, resulting in a problem of reduced production efficiency. Also, when there are irregularities such as bumps on the adhesion surface of the workpiece, it is desired to prevent the irregularities from being transferred to the thickness of the workpiece ground due to the resin adhering following the irregularities. However, depending on the properties of the thermoplastic resin, there is also a problem that satisfactory results may not be obtained.

[0006] The present invention has been made in view of such problems, and its object is to provide a method for manufacturing a workpiece with a protective member that can easily process the protective member into a sheet form and can reduce the influence of the surface side of the workpiece to which the protective member adheres on the processing of the workpiece. and The processing method of the workpiece the law is to provide.

Means for Solving the Problems

[0007] In order to solve the above-described problems and achieve the object, a method for manufacturing a workpiece with a protective member according to the present invention is a method for manufacturing a workpiece with a protective member comprising a plate-shaped workpiece and a protective member that adheres to one surface of the workpiece to protect the workpiece. The protective member is a sheet-shaped resin layer formed by heating and softening or melting a thermoplastic resin in the form of a plate, powder, lump, string, granule, film, or fluid and spreading it while having a melt mass flow rate (MFR) based on JIS K 7210 of 30 to 3000 g / 10 minutes. is only composed of It is pressed while being heated onto the one surface of the workpiece and is in close contact therewith.

[0008] The thermoplastic resin may be a polyolefin.

[0009] A sheet forming step of heating the thermoplastic resin supplied to the support surface of the support table to soften or melt it, spreading it along the support surface, and forming it into a sheet shape; and a protection member fixing step of heating and bringing into close contact with each other one surface side of the formed sheet and one surface side of the workpiece, and fixing the protection member, which is a sheet-like layer, to the workpiece may be provided.

[0010] The thermoplastic resin supplied to one surface side of the workpiece may be heated to soften or melt it, spread along the one surface, and a sheet-like layer may be formed on one surface side of the workpiece. In addition, the protective member may be made of a thermoplastic resin whose main component is polyolefin and the ratio of the mass of polyolefin to the mass excluding fillers and compounding agents from the whole thermoplastic resin is 100% by mass. Further, the protective member may be made of a thermoplastic resin containing an ethylene-unsaturated carboxylic acid copolymer as a main component and the ratio of the mass of the ethylene-unsaturated carboxylic acid copolymer to the mass excluding fillers and compounding agents from the whole thermoplastic resin is 10% by mass.

[0011] In order to solve the above-described problems and achieve the object, a method for processing a plate-shaped workpiece according to the present invention includes a step of manufacturing a workpiece with a protection member by the above-described method for manufacturing a workpiece with a protection member, a processing step of holding the protection member side of the workpiece with a protection member by a chuck table of a processing apparatus and processing the workpiece with a processing unit, and a peeling step of peeling the protection member from the workpiece after the processing step is performed.

Effect of the Invention

[0013] The present invention can easily process a protection member into a sheet shape, and can reduce the influence of the surface side of the workpiece with which the protection member is in close contact on the processing of the workpiece.

Brief Description of the Drawings

[0014]

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BEST MODE FOR CARRYING OUT THE INVENTION

[0015] Embodiments (embodiments) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited by the contents described in the following embodiments. Further, the constituent elements described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Furthermore, the configurations described below can be combined as appropriate. Also, various omissions, substitutions, or changes in the configuration can be made without departing from the gist of the present invention.

[0016] 〔Embodiment 1〕 A method for manufacturing a workpiece with a protective member, a method for processing a workpiece, and a workpiece with a protective member according to Embodiment 1 of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view showing a workpiece 1 which is the object of the method for manufacturing a workpiece with a protective member and the method for processing a workpiece according to Embodiment 1. In Embodiment 1, the workpiece 1 is a wafer such as a disk-shaped semiconductor wafer or an optical device wafer having a substrate 2 such as silicon, sapphire, gallium arsenide, SiC substrate, GaN substrate, LT substrate, or single crystal diamond substrate. Note that the workpiece 1 is not limited to a disk shape in the present invention, and may be other plate shapes such as a resin package substrate or a metal substrate.

[0017] In Embodiment 1, as shown in FIG. 1, chip-shaped devices 5 are formed in respective regions of a surface 4 partitioned by a plurality of division planned lines 3 (orthogonal in Embodiment 1) that intersect. The workpiece 1 is divided along each division planned line 3 and divided into individual devices 5 (chips). Note that the semiconductor wafer of the workpiece 1 is not limited to this in the present invention, and the device 5 may or may not be formed. A plurality of electrode bumps 6 protruding from the surface 4 of the device 5 are mounted on the surface 4 of the workpiece 1. The workpiece 1 and the device 5 have a concavo-convex structure by having the bumps 6 mounted on the surface 4. Note that the workpiece 1 and the device 5 do not necessarily have the bumps 6 or the concavo-convex structure on the surface 4 in the present invention. In Embodiment 1, the surface 4 serves as a surface to be held when the workpiece 1 and the device 5 are sucked and held by chuck tables 145, 155, 165 (see FIGS. 13, 14, and 15). In Embodiment 1, the back surface 7 on the side opposite to the surface 4 of the workpiece 1 and the device 5 is formed flat, but the present invention is not limited to this, and a concavo-convex structure may be formed on the back surface 7 side.

[0018] First, a manufacturing method of a workpiece with a protective member and the workpiece with a protective member according to Embodiment 1 will be described. FIG. 2 is a flowchart showing the processing procedure of the manufacturing method of the workpiece with a protective member according to Embodiment 1. As shown in FIG. 2, the manufacturing method of the workpiece with a protective member according to Embodiment 1 includes a sheet forming step 1001 and a protective member fixing step 1002.

[0019] In the manufacturing method of the workpiece with a protective member, in Embodiment 1, the surface 4 of the workpiece 1 is used as the holding surface, and the sheet 110 (see FIGS. 5 and 6, etc.) is adhered and fixed to the surface 4, and the sheet 110 is used as the protective member 119 (see FIGS. 9 and 10, etc.) to manufacture the workpiece 120 with a protective member (see FIG. 11, etc.). However, the present invention is not limited to this, and the sheet 110 may be adhered and fixed to the back surface 7 with the back surface 7 of the workpiece 1 as the holding surface.

[0020] FIG. 3 is a perspective view for explaining the sheet forming step 1001 in FIG. 2. FIGS. 4, 5, and 6 are cross-sectional views for explaining the sheet forming step 1001 in FIG. 2. As shown in FIGS. 3, 4, 5, and 6, the sheet forming step 1001 is a step of heating the thermoplastic resin 100 supplied to the flat support surface 11 of the support table 10 to soften or melt it, and spreading it along the support surface 11 to form a sheet shape with both sides flat, and forming a sheet 110 made of the thermoplastic resin 100 on the support surface 11.

[0021] In the sheet forming step 1001, first, as shown in FIG. 3, the thermoplastic resin 100 is supplied onto the support surface 11 of the support table 10. The thermoplastic resin 100 before molding supplied in the sheet forming step 1001 is in a lump shape in the first embodiment, but the present invention is not limited thereto, and may be in a plate shape, a powder shape, a string shape, a granular shape, a film shape, a fluid shape, or the like. The thermoplastic resin 100 supplied and molded in the sheet forming step 1001 has a volume capable of covering the bumps 6 over the entire surface 4 of the workpiece 1. That is, the thermoplastic resin 100 supplied and molded in the sheet forming step 1001 has a volume capable of forming a protective member 119 that covers the surface 4 without interruption in the protective member fixing step 1002 described later, and is thicker than the unevenness on the surface 4 formed by the bumps 6. The thermoplastic resin 100 supplied and molded in the sheet forming step 1001 preferably has a volume that does not protrude from the outer edge of the surface 4 of the workpiece 1 when molded to a predetermined thickness. In the sheet forming step 1001, the thickness of the sheet 110 obtained by molding the thermoplastic resin 100 can be changed by changing the volume of the thermoplastic resin 100 that is supplied.

[0022] In the first embodiment, the thermoplastic resin 100 supplied and molded in the sheet forming step 1001 is a rigid body with no fluidity in a hardened state below its softening point, and does not substantially have adhesive properties like an adhesive, so that excessive adhesion to the surface 4 of the workpiece 1 is suppressed. Also, the thermoplastic resin 100 supplied in the sheet forming step 1001 has fluidity in a softened state above its softening point, but does not substantially have adhesive properties like an adhesive, so that excessive adhesion to the surface 4 of the workpiece 1 is suppressed.

[0023] In Embodiment 1, the thermoplastic resin 100 supplied and molded in the sheet forming step 1001 is preferably a polyolefin such as polyethylene, polypropylene, poly(4-methyl-1-pentene), poly(1-butene), etc. The thermoplastic resin 100 supplied and molded in the sheet forming step 1001, other than polyolefins, includes acrylic resin, methacrylic resin, vinyl resin, polyacetal, natural rubber, butyl rubber, isoprene rubber, chloroprene rubber, polyesters such as polyethylene terephthalate and polybutylene terephthalate, polyamides such as nylon-6, nylon-66, and polymetaxylylene adipamide, polyacrylate, polymethacrylate, polyvinyl chloride, polyetherimide, polyacrylonitrile, polycarbonate, polystyrene, polysulfone, polyethersulfone, polyphenylene, ether polybutadiene resin, polycarbonate resin, thermoplastic polyimide resin, thermoplastic polyurethane resin, phenoxy resin, polyamideimide resin, fluororesin, ethylene-unsaturated carboxylic acid copolymer resin, ethylene-vinyl acetate copolymer resin, ionomer, ethylene-vinyl acetate-maleic anhydride terpolymer resin, saponified ethylene-vinyl acetate copolymer resin, and ethylene-vinyl alcohol copolymer resin, etc. One or more selected from these can be mentioned.

[0024] The unsaturated carboxylic acids that constitute the above ethylene-unsaturated carboxylic acid copolymer used in the thermoplastic resin 100 supplied and molded in the sheet forming step 1001 include acrylic acid, methacrylic acid, maleic acid, itaconic acid, monomethyl maleate, monoethyl maleate, maleic anhydride, and itaconic anhydride. Here, the ethylene-unsaturated carboxylic acid copolymer includes not only a binary copolymer of ethylene and an unsaturated carboxylic acid but also a multi-component copolymer in which other monomers are copolymerized. Examples of the other monomers that may be copolymerized in the ethylene-unsaturated carboxylic acid copolymer include vinyl esters such as vinyl acetate and vinyl propionate, and unsaturated carboxylic acid esters such as methyl acrylate, ethyl acrylate, isobutyl acrylate, n-butyl acrylate, methyl methacrylate, isobutyl methacrylate, dimethyl maleate, and diethyl maleate.

[0025] In Embodiment 1, the thermoplastic resin 100 supplied and molded in the sheet forming step 1001 has a melt mass-flow rate (MFR) of 30 g / 10 min or more and 3000 g / 10 min or less under the conditions of test method JIS K 7210-1 or 7210-2 at a temperature of 150 °C and a load of 5 kg. That is, the thermoplastic resin 100 supplied and molded in the sheet forming step 1001 can be easily molded into a sheet shape that covers an area of the workpiece 1 in order to spread over the surface 4 of the workpiece 1 at a sufficient speed when forming the protective member 119 in the protective member fixing step 1002 described later, and has a fluidity that can be molded into a sheet shape with a sufficient thickness.

[0026] In Embodiment 1, the softening point of the thermoplastic resin 100 supplied and molded in the sheet forming step 1001 is a temperature within the range of 0°C or higher and 150°C or lower. Since the compound groups exemplified above are used for the thermoplastic resin 100 supplied and molded in the sheet forming step 1001, the softening point can be a temperature within the range of 0°C or higher and 150°C or lower. The softening point of the thermoplastic resin 100 supplied and molded in the sheet forming step 1001 can be adjusted by mixing different types of compounds exemplified above. For example, by adjusting the softening point to a temperature higher than about 40°C to 100°C, which is the temperature of the workpiece 1 during dry polishing, it is possible to prevent the thermoplastic resin 100 from becoming soft during dry polishing.

[0027] The thermoplastic resin 100 supplied and molded in the sheet forming step 1001 does not contain either sodium or zinc, which are metals that may cause malfunction of the device 5 by contacting the workpiece 1 and entering the device 5. Note that sodium and zinc are generally intentionally added to give the base material layer of the adhesive tape toughness (i.e., flexibility and strength), and are not basically contained if not intentionally added. Here, the fact that the thermoplastic resin 100 does not contain either sodium or zinc means that even when the thermoplastic resin 100 is analyzed using a well-known component detection method applicable at the time of filing this application, such as inductively coupled plasma mass spectrometry (ICP-MS) or secondary ion mass spectrometry (SIMS), neither sodium nor zinc is below the detection limit.

[0028] The thermoplastic resin 100 supplied and molded in the sheet forming step 1001 is mixed with a filler having a size of 0.1 nm or more and 400 nm or less. In Embodiment 1, the filler is granular, but the present invention is not limited thereto, and it may have a columnar shape such as a fiber. In this specification, the size of the filler is defined by the particle diameter of the filler. There are known methods for representing the particle diameter, such as the geometric diameter, the equivalent diameter, etc. The geometric diameters include the Feret diameter, the maximum diameter in a fixed direction (i.e., the Krummbein diameter), the Martin diameter, the sieve diameter, etc., and the equivalent diameters include the projected area circle equivalent diameter (i.e., the Heywood diameter), the equivalent surface area sphere equivalent diameter, the equivalent volume sphere equivalent diameter, the Stokes diameter, the light scattering diameter, etc. Even when the filler has a columnar shape such as a fiber, the size of the filler can be defined in the same manner as in the case where the filler is granular. In this specification, the filler having a size of 0.1 nm or more and 400 nm or less is appropriately referred to as a nanofiller as a filler having a size on the order of nm.

[0029] The sheet 110 (protective member 119) fixed to the workpiece 1 formed using the thermoplastic resin 100 mixed with such a nanofiller has a size of the mixed nanofiller smaller than the wavelength of visible light and cannot absorb or scatter visible light, so it becomes nearly transparent and does not prevent the observation of the workpiece 1 through the sheet 110 (protective member 119). Therefore, the alignment for observing the device 5 through the sheet 110 (protective member 119) can be easily carried out. Note that a sheet (protective member) formed using a thermoplastic resin mixed with a filler larger than 400 nm may have a reduced transparency because the proportion of the mixed filler that absorbs or scatters visible light increases.

[0030] The thermoplastic resin 100 supplied and molded in the sheet forming step 1001 preferably contains more than 50 wt% (mass%) of nanofillers among all the fillers. For example, when fillers with a size of 500 nm are mixed at ratios of 40 wt%, 50 wt%, and 60 wt% respectively among all the fillers, in the case of 40 wt%, the visibility of the device 5 observed through the sheet 110 (protective member 119) obtained by molding this thermoplastic resin 100 was good. However, in the cases of 50 wt% and 60 wt%, although the device 5 can be visually recognized through the sheet 110 (protective member 119) obtained by molding this thermoplastic resin 100, its visibility decreased compared to the case of 40 wt%.

[0031] The nanofiller mixed in the thermoplastic resin 100 supplied and molded in the sheet forming step 1001 is a filler having a coefficient of thermal expansion smaller than that of the thermoplastic resin 100. As the nanofiller mixed in the thermoplastic resin 100 supplied and molded in the sheet forming step 1001, an inorganic filler or an organic filler having a coefficient of thermal expansion smaller than that of the thermoplastic resin 100 is preferably used. By mixing such a nanofiller in the thermoplastic resin 100, when the sheet 110 (protective member 119) is cooled during the cooling process after forming the sheet 110 in the sheet forming step 1001 or when the protective member 119 (sheet 110) is cooled in the protective member fixing step 1002, the shrinkage can be reduced and prevented. Along with this, it is possible to prevent the workpiece 1 with the sheet 110 (protective member 119) fixed from being bent or deformed.

[0032] The nanofiller mixed with the thermoplastic resin 100 is preferably an inorganic filler. Specifically, fused silica, crystalline silica, alumina, calcium carbonate, calcium silicate, barium sulfate, talc, clay, magnesium oxide, aluminum oxide, beryllium oxide, iron oxide, titanium oxide, aluminum nitride, silicon nitride, boron nitride, mica, glass, quartz, mica, etc. are preferably used. Further, the nanofiller mixed with the thermoplastic resin 100 may be used by mixing two or more of the above. Among the above-mentioned inorganic fillers, it is preferable to use silicas such as fused silica and crystalline silica as the nanofiller mixed with the thermoplastic resin 100. In this case, the cost of the nanofiller can be suitably suppressed.

[0033] The content ratio (mixing ratio) of the nanofiller in the thermoplastic resin 100 can be changed in the range of 0.01 wt% to 90 wt%. The larger the content ratio of the nanofiller, the smaller the thermal expansion coefficient of the sheet 110 (protective member 119) and the higher the dressing effect. However, if it is too much, the whole of the sheet 110 (protective member 119) may become brittle. Therefore, an appropriate ratio is selected to form the sheet 110 (protective member 119).

[0034] In addition to the filler, various compounding agents such as an antioxidant, a light stabilizer, a binder resin, an antistatic agent, a silane coupling agent, a release agent, a surfactant, a dye, a pigment, a fluorescent agent, and an ultraviolet absorber can be added to the thermoplastic resin 100 supplied and molded in the sheet forming step 1001 as needed.

[0035] In the sheet forming step 1001, after supplying the thermoplastic resin 100 onto the support surface 11 of the support table 10, the supplied thermoplastic resin 100 is heated from the support surface 11 side by a heat source 12 provided inside the support table 10 to be softened. In the sheet forming step 1001, also, as shown in FIG. 4, the flat pressing surface 21 of the pressing member 20 is brought close to and contacted with the thermoplastic resin 100 from the side opposite to the support surface 11 side. In the sheet forming step 1001, also, the thermoplastic resin 100 is further heated and softened from the pressing surface 21 side by a heat source 22 provided inside the pressing member 20.

[0036] In the sheet forming step 1001, while heating and softening or melting the thermoplastic resin 100 by the heat sources 12 and 22 in this way, as shown in FIG. 5, the thermoplastic resin 100 on the support surface 11 is spread along the support surface 11 with the pressing surface 21 parallel to the support surface 11, and formed into a sheet shape, thereby forming a sheet 110 of the thermoplastic resin 100 on the support surface 11. In the sheet forming step 1001, since both the support surface 11 and the pressing surface 21 are flat and parallel to each other, a sheet 110 is formed in which one surface 113 and the other surface 114 are both flat and parallel to each other. In the sheet forming step 1001, since the thermoplastic resin 100 of sufficient volume is being molded as described above, a sheet 110 of a size capable of covering the bumps 6 over the entire surface 4 of the workpiece 1 is formed. In the sheet forming step 1001, it is preferable to form a sheet 110 of a size that does not protrude from the outer edge of the surface 4 of the workpiece 1. In the sheet forming step 1001, in Embodiment 1, for example, while heating at a predetermined temperature (for example, 150°C in Embodiment 1) by the heat sources 12 and 22 for a predetermined time (for example, 10 minutes in Embodiment 1) or more, the support table 10 and the pressing member 20 apply a predetermined pressure (for example, 10 MPa or more in Embodiment 1 (the pressure in this specification is all gauge pressure except for the vacuum pressure inside the vacuum chamber 31 described later)) to mold the thermoplastic resin 100, thereby forming the sheet 110. In the sheet forming step 1001, in Embodiment 1, the thickness of the sheet 110 to be formed can be adjusted by adjusting the ascending amount of the support table 10 and the descending amount of the pressing member 20.

[0037] In the sheet forming step 1001, the thermoplastic resin 100 with an MFR of 30 g / 10 min or more and 3000 g / 10 min or less under the conditions of test method JIS K 7210-1 or 7210-2 at a temperature of 150°C and a load of 5 kg is formed into a sheet shape. Due to the high fluidity of the thermoplastic resin 100, a sheet 110 with an area that can easily cover the workpiece 1 can be formed by spreading it on the support surface 11 of the support table 10 at a sufficient speed. Moreover, since the fluidity is not excessively high, a sheet 110 with a sufficient thickness can be formed.

[0038] The support table 10 used in the sheet forming step 1001 is preferably coated with a release material on the support surface 11. In this case, the possibility of the softened thermoplastic resin 100 adhering to the support surface 11 can be further suppressed. Similarly, the pressing member 20 used in the sheet forming step 1001 is preferably coated with a release material on the pressing surface 21. In this case, the possibility of the softened thermoplastic resin 100 adhering to the pressing surface 21 can be further suppressed. As the coating method, for example, a release material is sprayed and applied. As the release material coated on the support surface 11 and the pressing surface 21, those containing neither sodium nor zinc are used, and fluororesin is exemplified as a suitable one. Alternatively, a flat resin sheet containing neither sodium nor zinc that functions as a release sheet may be arranged on the support surface 11 and the pressing surface 21, and after the sheet 110 is formed, this resin sheet may be peeled off by turning it up from the sheet 110. Note that the resin sheet arranged on the support surface 11 and the pressing surface 21 is preferably coated with a release material on the surface.

[0039] In the sheet forming step 1001, in Embodiment 1, the heat sources 12 and 22 heat and soften the thermoplastic resin 100 from both sides of the support surface 11 side and the pressing surface 21 side. However, the present invention is not limited to this. The thermoplastic resin 100 may be heated and softened from either one of the support surface 11 side and the pressing surface 21 side by either one of the heat sources 12 and 22. In the sheet forming step 1001, the temperatures of both heat sources 12 and 22 may be the same or different. Since the sheet 110 is more likely to adhere to the lower temperature side, the temperatures may be set respectively according to the convenience of the next process or the like.

[0040] Also, the sheet forming step 1001 may be carried out in a decompression chamber. In this case, it is possible to suppress the mixing of air bubbles into the sheet 110.

[0041] In the sheet forming step 1001, in Embodiment 1, after forming the sheet 110, in order to cool the sheet 110, immediately after forming it into a sheet shape, the thermoplastic resin 100 constituting the sheet 110 is cured, so that the shape of the sheet 110 can be quickly stabilized. In the sheet forming step 1001, in Embodiment 1, for example, by turning off the heat sources 12 and 22 and stopping the heating of the sheet 110 by the heat sources 12 and 22, the cooling of the sheet 110 is started, and the sheet 110 is cooled to about the temperature of the atmosphere, for example, by the atmosphere.

[0042] In the sheet forming step 1001, the present invention is not limited to this. After turning off the heat sources 12 and 22, with the sheet 110 being pressed by the pressing member 20, the sheet 110 may be cooled from the support surface 11 side and the pressing surface 21 side by a cooling mechanism (such as air cooling or water cooling, not shown) provided inside the support table 10 and the pressing member 20. In the sheet forming step 1001, also, instead of turning off the heat source 22, the heating of the sheet 110 by the heat source 22 may be stopped by separating the pressing member 20 from the sheet 110. In the sheet forming step 1001, the method of the cooling process can be appropriately changed according to whether the heat sources 12 and 22 are used for heating and softening the thermoplastic resin 100 or not.

[0043] In the sheet forming step 1001, thereafter, the pressing member 20 is separated from the sheet 110, and as shown in FIG. 6, the sheet 110 is peeled off from the support surface 11 of the support table 10 to obtain the sheet 110. As described above, the sheet 110 formed in the sheet forming step 1001 is formed of the thermoplastic resin 100 containing neither sodium nor zinc. Since neither sodium nor zinc is contained in the surface 113 that contacts the workpiece 1, the possibility of malfunction of the device 5 of the workpiece 1 when fixed to one surface of the workpiece 1 is suppressed. Note that the sheet 110 prepared in the sheet forming step 1001 serves as the protective member 119 that is fixed to the surface 4 of the workpiece 1 and protects the surface 4 side in the first embodiment. However, the present invention is not limited thereto, and it may serve as the protective member 119 that is fixed to the back surface 7 of the workpiece 1 and protects the back surface 7 side.

[0044] FIGS. 7, 8, 9, and 10 are cross-sectional views for explaining the protective member fixing step 1002 of FIG. 2. Note that in FIGS. 7 to 10, the illustration of the bump 6 is omitted. The protective member fixing step 1002 is performed after the sheet forming step 1001. As shown in FIGS. 7, 8, and 9, the protective member fixing step 1002 is a step of heating and bringing into close contact with each other the surface 113 side of the sheet 110 made of the thermoplastic resin 100 formed in the sheet forming step 1001 and the surface 4 side which is one surface of the workpiece 1, and fixing the protective member 119 which is a sheet-like layer to the workpiece 1.

[0045] In the protection member fixing step 1002, first, as shown in FIG. 7, the workpiece 1 is placed on the support base 32 installed in the lower central region within the vacuum chamber 31 of the sheet adhesion device 30 with the surface 4 side facing upward. In the protection member fixing step 1002, next, with the surface 113 of the sheet 110 facing downward, both ends of the sheet 110 are inserted through a pair of through holes 33 formed on the sides of the vacuum chamber 31 with the support base 32 interposed therebetween, and pulled with a predetermined force from outside the vacuum chamber 31. In the protection member fixing step 1002, in this way, the sheet 110 is arranged so as to cover above the surface 4 with the surface 113 facing the surface 4 side of the workpiece 1 on the support base 32.

[0046] In the protection member fixing step 1002, after arranging the sheet 110 above the workpiece 1, as shown in FIG. 7, the inside of the vacuum chamber 31 is evacuated and depressurized from the first communication passage 34 provided in the upper central region of the vacuum chamber 31 and the second communication passage 35 provided outside the support base 32 below the vacuum chamber 31. In the protection member fixing step 1002, by this depressurization process, it is reduced and prevented that air is trapped between the surface 4 of the workpiece 1 and the surface 113 of the sheet 110. In the protection member fixing step 1002, in Embodiment 1, for example, by a dry pump, an oil rotary pump, etc. provided in communication with the first communication passage 34 and the second communication passage 35, the inside of the vacuum chamber 31 is depressurized to a low vacuum of about 10 5 Pa to 10 1 Pa.

[0047] In the protection member fixing step 1002, after evacuating and depressurizing the inside of the vacuum chamber 31 from the first communication passage 34 and the second communication passage 35, as shown in FIG. 8, with the exhaust from the second communication passage 35 continuing, gas is introduced into the vacuum chamber 31 from the first communication passage 34. In the protection member fixing step 1002, in this way, by making the air pressure above the sheet 110 higher than the air pressure below the sheet 110, as shown in FIG. 8, the surface 113 of the sheet 110 is brought into close contact with the surface 4 of the workpiece 1 below the sheet 110.

[0048] In the protective member fixing step 1002, the vertical positional relationship between the sheet 110 and the workpiece 1 may be reversed, and the workpiece 1 may be pressed from above so that the surface 4 of the workpiece 1 is brought into close contact with the surface 113 of the sheet 110 located below the workpiece 1.

[0049] Also, in the protective member fixing step 1002, the support base 32 that supports the workpiece 1 may be raised so that the surface 4 of the workpiece 1 is brought into close contact with the surface 113 of the sheet 110 located above the workpiece 1. In this case, it is preferable that the surface 114 side of the sheet 110 is pressed from above by the support surface of a predetermined support member. Further, heat sources similar to the heat sources 42 and 52 described later may be provided inside the support base 32 that supports the workpiece 1 and inside the support member that supports the surface 114 side of the sheet 110.

[0050] In the protective member fixing step 1002, after the surface 113 of the sheet 110 is brought into close contact with the surface 4 of the workpiece 1, the sheet 110 and the workpiece 1 are taken out from the vacuum chamber 31 of the sheet contact device 30, and as shown in FIG. 9, the surface 4 side, which is the other surface side of the workpiece 1, is placed facing the holding surface 41 of the suction holding table 40 and suction held. Here, the suction holding table 40 is provided with a holding portion 43 having a holding surface 41 and formed of porous ceramics or the like, and is connected to a vacuum suction source (not shown). By being suctioned by the vacuum suction source, the workpiece 1 is suction held on the holding surface 41.

[0051] In the protection member fixing step 1002, the heat source 42 provided inside the suction holding table 40 heats the sheet 110 through the workpiece 1 from the holding surface 41 side to soften it. In the protection member fixing step 1002, also, as shown in FIG. 9, the flat pressing surface 51 of the pressing member 50 similar to the pressing member 20 is brought close to and contacted with the surface 114 side of the sheet 110 adhered to the surface 4 of the workpiece 1 suction-held by the suction holding table 40 from the side opposite to the holding surface 41 side. In the protection member fixing step 1002, also, the heat source 52 provided inside the pressing member 50 heats the sheet 110 from the pressing surface 51 side to soften it. Note that, in the first embodiment, the pressing member 20 used in the sheet forming step 1001 and the pressing member 50 used in the protection member fixing step 1002 are separate, but the present invention is not limited to this, and the same member may be used.

[0052] In the protection member fixing step 1002, while heating one surface 113 side of the sheet 110 and the surface 4 side of the workpiece 1 by the heat sources 42 and 52 to a predetermined temperature (for example, 150°C in the first embodiment) equal to or higher than the softening point of the thermoplastic resin 100 in this way, the pressing surface 51 parallel to the holding surface 41 presses one surface 113 side of the sheet 110 against the surface 4 side of the workpiece 1 with a predetermined pressing force (for example, 0.3 MPa or more in the first embodiment), so that one surface 113 side of the sheet 110 and the surface 4 side of the workpiece 1 are adhered to each other for a predetermined time (for example, 30 seconds or more in the first embodiment) or more, and the protection member 119, which is a sheet-like layer, is fixed to the workpiece 1. The sheet 110 becomes the protection member 119 that adheres to the surface 4 of the workpiece 1 and protects the surface 4 side of the workpiece 1 by being thermocompression-bonded and fixed to the surface 4 of the workpiece 1 through the protection member fixing step 1002.

[0053] In the protection member fixing step 1002, since both the holding surface 41 and the pressing surface 51 are flat and parallel to each other, the sheet 110 is adhered to and fixed to the workpiece 1 so that the surface 114, which is the exposed surface of the sheet 110 (protection member 119), and the back surface 7 of the workpiece 1 are parallel to each other.

[0054] In the protective member fixing step 1002, a sheet 110 made of a thermoplastic resin 100, whose MFR under the conditions of test method JIS K 7210-1 or 7210-2 is 30 g / 10 min or more and 3000 g / 10 min or less at a temperature of 150 °C and a load of 5 kg, is heat-pressed and fixed to the surface 4 of the workpiece 1 to form a protective member 119. Due to the high fluidity of the thermoplastic resin 100, it is easy to conform to the bumps 6 (concavo-convex structures) on the surface 4 of the workpiece 1, and the protective member 119 can be made into a homogeneous sheet-like resin layer that adheres closely to the surface 4 of the workpiece 1 without gaps.

[0055] In the protective member fixing step 1002, it is preferable to limit the area where the sheet 110 is adhered to and fixed to the workpiece 1 and heat it with heat sources 42 and 52 to soften it. For this reason, it is preferable that the heat sources 42 and 52 are limitedly provided facing the area where the sheet 110 is adhered to and fixed to the workpiece 1. In the first embodiment, as shown in FIG. 9, the heat source 42 is limitedly provided facing the area where the sheet 110 is adhered to and fixed to the workpiece 1.

[0056] In the protective member fixing step 1002, in the first embodiment, after the sheet 110 is adhered to and fixed to the workpiece 1 to form the protective member 119, the protective member 119 is cooled. In the protective member fixing step 1002, by cooling the protective member 119 immediately after it is formed by adhering to and fixing to the workpiece 1 in this way, the thermoplastic resin 100 constituting the protective member 119 is cured, so that the shape of the protective member 119 can be stabilized.

[0057] In the protective member fixing step 1002, in the first embodiment, for example, by turning off the heat sources 42 and 52 to stop heating the protective member 119 by the heat sources 42 and 52, the cooling of the protective member 119 is started, and the protective member 119 is cooled to about the temperature of the atmosphere, for example, by the atmosphere.

[0058] In the protection member fixing step 1002, although not limited thereto in the present invention, after turning off the heat sources 42 and 52, with the protection member 119 being pressed by the pressing member 50, the protection member 119 may be cooled from the holding surface 41 side and the pressing surface 51 side by a cooling mechanism (such as air cooling or water cooling, not shown) provided inside the suction holding table 40 and the pressing member 50. In the protection member fixing step 1002, also, instead of turning off the heat source 52, the heating of the protection member 119 by the heat source 52 may be stopped by separating the pressing member 50 from the protection member 119. The protection member fixing step 1002 can be appropriately changed according to whether the heat sources 42 and 52 are respectively used for heating and softening the sheet 110.

[0059] Also, the protection member fixing step 1002 may be carried out in a decompression chamber. In this case, it is possible to suppress the entry of air bubbles between the sheet 110 (protection member 119) and the workpiece 1.

[0060] Moreover, the protective member fixing step 1002 is not limited to the method of forming the protective member 119 by closely attaching the sheet 110 to the workpiece 1 using the suction holding table 40 and the pressing member 50. By rotating and moving a roller from one end to the other end of the surface 4 side of the workpiece 1 through the sheet 110 facing the surface 4 side of the workpiece 1, while sequentially placing the sheet 110 from one end of the surface 4 side of the workpiece 1, the placed sheet 110 is heated to a predetermined temperature (for example, 150 °C or higher in Embodiment 1) by a predetermined heat source provided on the side holding the workpiece 1 or a heat source provided inside the roller, etc., to be softened. While pressing the placed sheet 110 toward the workpiece 1 from the surface 114 side with a predetermined pressing force (for example, 0.3 MPa or higher in Embodiment 1), the surface 113 of the softened sheet 110 is thermocompression-bonded and adhered to the surface 4 of the workpiece 1, and the sheet 110 may be fixed to the workpiece 1 to form the protective member 119 that protects the workpiece 1. Further, in the protective member fixing step 1002, similarly, after sequentially placing the sheet 110 from one end of the surface 4 side of the workpiece 1 by rotating and moving the roller, the sheet 110 is heated and softened by blowing hot air at a predetermined temperature (for example, 150 °C or higher in Embodiment 1) from an industrial dryer on the sheet 110 side. Without pressing the sheet 110 toward the workpiece 1, that is, with a pressing force below 0 MPa, the surface 113 of the softened sheet 110 is adhered to the surface 4 of the workpiece 1, and the sheet 110 may be fixed to the workpiece 1 to form the protective member 119 that protects the workpiece 1.

[0061] In the protective member fixing step 1002, thereafter, the pressing member 50 is separated from the protective member 119, and the workpiece 1 with the protective member 119 fixed is removed from the suction holding table 40. In the protective member fixing step 1002, in Embodiment 1, after removing the workpiece 1 with the protective member 119 fixed from the suction holding table 40, as shown in FIG. 10, a post-treatment of cutting off the outer peripheral region 116, which is the portion protruding radially from the outer edge of the workpiece 1, of the protective member 119 (sheet 110) is performed.

[0062] In the post - processing of the protective member fixing step 1002, first, as shown in FIG. 10, the back surface 7 side of the workpiece 1 with the protective member 119 fixed is sucked and held by the holding surface 61 of the suction holding table 60. Here, the suction holding table 60 is obtained by changing the holding part 43 to the holding part 63 in the suction holding table 40 without the heat source 42. The holding part 63 has an annular groove 65 formed on the holding surface 61 side with a diameter similar to the outer diameter of the workpiece 1.

[0063] In the post - processing of the protective member fixing step 1002, next, as shown in FIG. 10, the outer peripheral region 116 of the protective member 119 (sheet 110) fixed to the workpiece 1 held by the holding surface 61 of the suction holding table 60 is cut by the cutter 71 of the cutting device 70. Here, the cutting device 70 includes a disk 72 that holds the cutter 71 toward the outer edge of the workpiece 1 and a rotation drive source (not shown) that rotationally drives the disk 72 around the axis. By rotating the disk 72 around the axis by the rotation drive source with the cutting edge of the cutter 71 inserted into the groove 65, the cutter 71 is rotationally moved along the outer edge of the workpiece 1 to cut the outer peripheral region 116. In the protective member fixing step 1002, in this way, the workpiece 120 with a protective member (see FIG. 11) is obtained.

[0064] FIG. 11 is a perspective view showing the workpiece 120 with a protective member according to Embodiment 1 manufactured by the manufacturing method of the workpiece with a protective member according to Embodiment 1. As shown in FIG. 11, the workpiece 120 with a protective member includes a plate - shaped workpiece 1 and a protective member 119 that adheres to the surface 4, which is one surface of the workpiece 1, to protect the workpiece 1 during processing. The protective member 119 of the workpiece 120 with a protective member is a sheet - like resin layer made of a thermoplastic resin 100 whose MFR under the conditions according to Test Method JIS K 7210 - 1 or 7210 - 2 is 30 g / 10 min or more and 3000 g / 10 min or less at a temperature of 150°C and a load of 5 Kg weight. This resin layer is pressed and adhered to the surface 4 of the workpiece 1 while being heated and fixed.

[0065] Since the surface 113 of the workpiece 120 with the protective member that contacts and is fixed to the workpiece 1 of the protective member 119 is formed of the thermoplastic resin 100 that contains neither sodium nor zinc, the possibility of a malfunction occurring in the device 5 of the workpiece 1 is suppressed.

[0066] Next, a method for processing a workpiece according to Embodiment 1 will be described. FIG. 12 is a flowchart showing the processing procedure of the method for processing a workpiece according to Embodiment 1. As shown in FIG. 12, the method for processing a workpiece according to Embodiment 1 includes a step 1011 of manufacturing a workpiece with a protective member, a step 1012 of processing, and a step 1013 of peeling.

[0067] The step 1011 of manufacturing a workpiece with a protective member is a step of manufacturing the workpiece 120 with a protective member by implementing the above-described method for manufacturing a workpiece with a protective member. Note that the step 1011 of manufacturing a workpiece with a protective member is not limited to this in the present invention, and a workpiece with a protective member in which the protective member 119 is in close contact with the back surface 7 of the workpiece 1 may be manufactured by implementing a method similar to the above-described method for manufacturing a workpiece with a protective member.

[0068] FIG. 13 is a cross-sectional view for explaining a cutting process which is the first example of the processing step 1012 in FIG. 12. FIG. 14 is a cross-sectional view for explaining a grinding process which is the second example of the processing step 1012 in FIG. 12. FIG. 15 is a cross-sectional view for explaining a laser processing which is the third example of the processing step 1012 in FIG. 12. Note that in FIGS. 13 to 15, the illustration of the bump 6 is omitted. As shown in FIGS. 13, 14, and 15, the processing step 1012 is a step of holding the protection member 119 side of the workpiece 120 with the protection member manufactured in the workpiece manufacturing step 1011 with the protection member by the chuck tables 145, 155, 165 of the processing apparatus and processing the workpiece 1 with the processing unit. The cutting processing apparatus 140 shown in FIG. 13, the grinding processing apparatus 150 shown in FIG. 14, and the laser processing apparatus 160 shown in FIG. 15 which perform the processing step 1012 in the first embodiment are all examples of the processing apparatus according to the present invention. Further, in the first embodiment, the cutting blade 141 shown in FIG. 13 which performs cutting processing, the grinding wheel 153 shown in FIG. 14 which performs grinding processing, and the laser irradiator 161 shown in FIG. 15 which performs laser processing are all examples of the processing unit according to the present invention. Note that the processing step 1012 is not limited to this in the present invention, and the protection member 119 side of the workpiece with the protection member in which the protection member 119 is in close contact with the back surface 7 of the workpiece 1 may be held by the chuck tables 145, 155, 165 of the processing apparatus and the workpiece 1 may be processed with the processing unit.

[0069] In the first example of processing step 1012, in Embodiment 1, in the workpiece 120 with a protective member, the workpiece 1 is machined from the back surface 7 side by the machining device 140. However, the present invention is not limited to this. In the workpiece with a protective member where the protective member 119 is in close contact with the back surface 7 of the workpiece 1, the workpiece 1 may be machined from the front surface 4 side. As shown in FIG. 13, in the first example of processing step 1012, with the workpiece 120 with a protective member suction-held from the protective member 119 side by the holding surface 146 of the chuck table 145, while supplying cutting fluid to the back surface 7 of the workpiece 1, the cutting blade 141 mounted on the machining device 140 is rotated around the axis, and the chuck table 145 or the cutting blade 141 of the machining device 140 is fed for machining, indexing, and cutting by a drive source (not shown), so as to machine the workpiece 1 from the back surface 7 side. In the first example of processing step 1012, for example, the workpiece 1 is machined from the back surface 7 side along the division planned line 3 to form a cutting groove 149, thereby dividing (full cut) the workpiece 1 into each device 5, for example. In the first example of processing step 1012, by cutting the protective member 119 in which the filler is mixed with the cutting blade 141, the consumption of the cutting blade 141 is promoted by the filler, and the dressing effect of the cutting blade 141 occurs.

[0070] The second example of processing step 1012 is, in Embodiment 1, in the workpiece 120 with a protective member, the workpiece 1 is ground from the back surface 7 side by a grinding device 150. The second example of processing step 1012 is, in Embodiment 1, to grind the entire surface on the back surface 7 side of the workpiece 1, but the present invention is not limited to this. The outermost peripheral side end portion of the workpiece 1 is left, and only the inner circumference thereof is ground from the back surface 7 side to thin the workpiece 1, which is a so-called TAIKO (registered trademark) grinding process. As shown in FIG. 14, the second example of processing step 1012 is to rotate the chuck table 155 around the axis by a rotation drive source (not shown) while sucking and holding the workpiece 120 with a protective member from the protective member 119 side on the holding surface 156 of the chuck table 155, and supply grinding fluid 152 to the back surface 7 of the workpiece 1 from the grinding fluid supply unit 151 of the grinding device 150, and rotate the grinding wheel 153 mounted on the grinding device 150 around the axis and bring it into contact with the back surface 7 of the workpiece 1 for grinding.

[0071] The third example of processing step 1012 is that in Embodiment 1, in the workpiece 120 with a protective member, the workpiece 1 is laser-processed from the back surface 7 side by the laser processing apparatus 160. However, the present invention is not limited to this. In the workpiece with a protective member where the protective member 119 is in close contact with the back surface 7 of the workpiece 1, the workpiece 1 may be laser-processed from the front surface 4 side. As shown in FIG. 15, the third example of processing step 1012 is a so-called ablation process in which, while the workpiece 120 with a protective member is sucked and held from the protective member 119 side by the holding surface 166 of the chuck table 165 and a laser beam 164 having a wavelength absorbable by the workpiece 1 or a wavelength transmissive to the workpiece 1 is irradiated from the laser irradiator 161 toward the back surface 7 of the workpiece 1, the chuck table 165 or the laser irradiator 161 is relatively moved by a driving source (not shown), thereby sublimating or evaporating the workpiece 1 from the back surface 7 side by the laser beam 164, or a method of forming a modified layer inside the workpiece 1. In the third example of the processing step 1012 according to Embodiment 1, for example, by laser-processing (ablation processing) the workpiece 1 from the back surface 7 side along the planned division line 3 to form a laser processing groove 169, the workpiece 1 can be divided (fully cut) into each device 5, or a modified layer can be formed inside the workpiece 1. Note that in the third example of the processing step 1012, a pulsed laser beam 164 may be used.

[0072] The third example of the processing step 1012 may further be to laser-process the workpiece 1 from the side where the protective member 119 is fixed in the workpiece 120 with a protective member or the like. In this case, the protective member 119 suppresses the adhesion of debris generated by the ablation process to the workpiece 1 or the device 5.

[0073] In machining step 1012, during the cutting process of the first example or the laser processing of the third example, a camera unit 142, 162 such as a visible light camera or an infrared camera provided above the chuck tables 145, 165 photographs the patterns of the device 5 and the planned division line 3 on the front surface 4 side from the back surface 7 side of the workpiece 1. After performing alignment to determine the planned division line 3, which is the area to be machined, based on the positions of the patterns photographed by the camera units 142, 162, the workpiece 1 may be machined. Also, in the cutting process of the first example or the laser processing of the third example in machining step 1012, when further performing alignment and machining on the workpiece 1 from the side where the protective member 119 is fixed, since the protective member 119 has good light transmittance due to the mixing of nanofillers, alignment can be accurately performed.

[0074] Also, in machining step 1012, during the cutting process of the first example or the laser processing of the third example, the workpiece 1 is held using a light-transmissive chuck table 145, 165 such as glass. A camera unit 143, 163 provided below the chuck tables 145, 165 photographs the patterns of the device 5 and the planned division line 3 formed on the front surface 4 side of the workpiece 1 to which the protective member 119 is attached, through the light-transmissive chuck tables 145, 165 and the protective member 119. After determining the planned division line 3 based on the positions of the patterns photographed by the camera units 143, 163, the workpiece 1 may be machined. Note that, in this way, photographing the pattern on the front surface 4 of the workpiece 1 through the chuck tables 145, 165 to determine the machining position is referred to as backside alignment. In machining step 1012, since the protective member 119 has good light transmittance due to the mixing of nanofillers, backside alignment can be accurately performed.

[0075] In addition, the processing step 1012 may continuously perform two or more of the first example of cutting, the second example of grinding, and the third example of laser processing. The protective member 119 such as the work piece 120 with a protective member is made of a thermoplastic resin 100 whose MFR under the conditions of test method JIS K 7210-1 or 7210-2 is 30 g / 10 min or more and 3000 g / 10 min or less at a temperature of 150°C and a load of 5 kgf. Since it is a homogeneous sheet-like resin layer that adheres closely to the surface 4 of the work piece 1 without gaps, it is possible to suppress the occurrence of processing defects such as the transfer of the bumps 6 (concave and convex structures) on the surface 4 of the work piece 1 during the implementation of the processing step 1012, and it is possible to perform the desired processing on the work piece 1.

[0076] The peeling step 1013 is a step of peeling the protective member 119 from the work piece 1 after the implementation of the processing step 1012. The protective member 119 such as the work piece 120 with a protective member does not substantially have adhesiveness like an adhesive, and since it is suppressed from excessively adhering to the surface 4 of the work piece 1, it can be easily peeled from the work piece 1.

[0077] The manufacturing method of the work piece with a protective member, the processing method of the work piece, and the work piece 120 with a protective member according to Embodiment 1 having the above configuration are different from the adhesive layer used for an adhesive tape. Substantially, excessive adhesiveness like an adhesive is hardly seen. Since the sheet 110 that solidifies by being cooled and has a property of substantially not having excessive adhesiveness is fixed to the work piece 1 to form the protective member 119, even if the protective member 119 is peeled from the work piece 1, it does not remain as a residue on the work piece 1. Also, since it is suppressed that the protective member 119 becomes a cushion during processing, it is possible to reduce the possibility of the phenomenon that the work piece 1 chips due to the processing treatment.

[0078] In addition, in the manufacturing method of the workpiece with a protective member according to Embodiment 1, the processing method of the workpiece, and the workpiece 120 with a protective member, etc., the thermoplastic resin 100 that is formed into a sheet 110 and thermocompression bonded and fixed to the surface 4 of the workpiece 1 to form the protective member 119 has an MFR of 30 g / 10 min or more and 3000 g / 10 min or less under the conditions of Test Method JIS K 7210-1 or 7210-2 with a temperature of 150 °C and a load of 5 Kg. Therefore, the sheet 110 (protective member 119) can be easily processed into a sheet shape covering the area of the workpiece 1, and the protective member 119 can be formed into a homogeneous sheet-like resin layer that closely adheres to the surface 4 of the workpiece 1 without gaps, achieving the effect of reducing the influence of the surface side of the workpiece 1 where the protective member 119 adheres on the processing of the workpiece 1.

[0079] In addition, in the manufacturing method of the workpiece with a protective member according to Embodiment 1, the processing method of the workpiece, and the workpiece 120 with a protective member, etc., since neither sodium nor zinc is contained in the surface 113 of the protective member 119 (sheet 110) that comes into contact with and is fixed to the workpiece 1, it has the effect of suppressing the possibility of malfunction in the device 5 of the workpiece 1.

[0080] In addition, in the manufacturing method of the workpiece with a protective member according to Embodiment 1, the processing method of the workpiece, and the workpiece 120 with a protective member, etc., on the surface 114 of the sheet 110 that becomes the protective member 119, which is opposite to the surface 113 that comes into contact with and is fixed to the workpiece 1, within a range not contrary to the object of the present invention, a sheet of any thermoplastic resin may be laminated.

[0081] 〔Embodiment 2〕 The manufacturing method of the workpiece with a protective member according to Embodiment 2 of the present invention, the processing method of the workpiece, and the workpiece with a protective member will be described with reference to the drawings. FIG. 16 is a cross-sectional view for explaining the protective member fixing step 1002 of the manufacturing method of the workpiece with a protective member according to Embodiment 2. In FIG. 16, the illustration of the bumps 6 is omitted. In FIG. 16, the same parts as those in Embodiment 1 are denoted by the same reference numerals and the description thereof is omitted.

[0082] The manufacturing method of the workpiece with a protective member according to Embodiment 2 is obtained by changing the protective member fixing step 1002 in Embodiment 1. In Embodiment 2, the protective member fixing step 1002 is obtained by changing the vertical positional relationship between the workpiece 1 and the sheet 110 when fixing the protective member 119, which is a sheet-like layer, to the workpiece 1 by heating and closely adhering one surface 113 side of the sheet 110 made of the thermoplastic resin 100 and the surface 4 side, which is one surface of the workpiece 1, as shown in FIG. 16, in Embodiment 1.

[0083] In the protective member fixing step 1002 according to Embodiment 2, after bringing the surface 4 of the workpiece 1 into close contact with the surface 113 of the sheet 110, as shown in FIG. 16, the surface 114 side of the sheet 110 is placed facing the support surface 81 of the support table 80, and the sheet 110 is heated from the support surface 81 side by the heat source 82 provided inside the support table 80 to be softened. In the protective member fixing step 1002 according to Embodiment 2, further, the pressing surface 51 of the pressing member 50 is brought close to and contacted with the workpiece 1 with which the surface 113 of the sheet 110 supported by the support table 80 is in close contact, from the side opposite to the support surface 81 side, and the sheet 110 is further heated and softened through the workpiece 1 from the pressing surface 51 side by the heat source 52 of the pressing member 50. In the protective member fixing step 1002 according to Embodiment 2, then, the one surface 113 side of the sheet 110 and the surface 4 side of the workpiece 1 are brought into close contact with each other for a predetermined time or more with the pressing surface 51 parallel to the support surface 81, and the protective member 119, which is a sheet-like layer, is fixed to the workpiece 1.

[0084] In this protective member fixing step 1002 according to Embodiment 2, a workpiece 120 with a protective member similar to that in Embodiment 1 is obtained. The processing method of the workpiece according to Embodiment 2 is the same as that in Embodiment 1.

[0085] The manufacturing method of the workpiece with a protective member, the processing method of the workpiece, and the workpiece 120 with a protective member according to Embodiment 2 having the above configuration are the same as those in Embodiment 1, except that when heating and closely adhering one surface 113 side of the sheet 110 made of the thermoplastic resin 100 and the surface 4 side which is one surface of the workpiece 1 to fix the protective member 119 which is a sheet-like layer to the workpiece 1, the vertical positional relationship between the workpiece 1 and the sheet 110 is reversed. Therefore, they exhibit the same operational effects as Embodiment 1.

[0086] 〔Embodiment 3〕 The manufacturing method of the workpiece with a protective member, the processing method of the workpiece, and the workpiece 130 with a protective member according to Embodiment 3 of the present invention will be described with reference to the drawings. FIG. 17 is a cross-sectional view for explaining the protective member fixing step 1002 of the manufacturing method of the workpiece with a protective member according to Embodiment 3. FIG. 18 is a perspective view showing the workpiece 130 with a protective member according to Embodiment 3 manufactured by the manufacturing method of the workpiece with a protective member according to Embodiment 3. FIG. 19 is a cross-sectional view for explaining the cutting process which is the first example of the processing step 1012 of the processing method of the workpiece according to Embodiment 3. FIG. 20 is a cross-sectional view for explaining the grinding process which is the second example of the processing step 1012 of the processing method of the workpiece according to Embodiment 3. FIG. 21 is a cross-sectional view for explaining the laser processing which is the third example of the processing step 1012 of the processing method of the workpiece according to Embodiment 3. In addition, in FIGS. 17, 19 to 21, the illustration of the bump 6 is omitted. In FIGS. 17 to 21, the same parts as those in Embodiment 1 and Embodiment 2 are denoted by the same reference numerals and the description thereof is omitted.

[0087] The manufacturing method of the workpiece with a protective member according to Embodiment 3 is a modification of the sheet forming step 1001 and the protective member fixing step 1002 in Embodiment 1. In the sheet forming step 1001 according to Embodiment 3, the volume of the thermoplastic resin 100 supplied onto the support surface 11 of the support table 10 in Embodiment 1 is changed. The thermoplastic resin 100 supplied and molded in the sheet forming step 1001 according to Embodiment 3 further has a volume that can continuously cover the opening 9-1 (see FIGS. 17 and 18) of the metal frame 9 that houses the workpiece 1 when molded to a predetermined thickness. The thermoplastic resin 100 supplied and molded in the sheet forming step 1001 according to Embodiment 3 preferably has a volume that does not protrude from the outer edge of the metal frame 9 when covering the opening 9-1 of the metal frame 9 when molded to a predetermined thickness.

[0088] In the protective member fixing step 1002 according to Embodiment 3, as shown in FIG. 17, while heating one surface 113 side of the sheet 110 made of the thermoplastic resin 100 and the surface 4 side which is one surface of the workpiece 1 to make them adhere to each other, when fixing the protective member 119 which is a sheet-like layer to the workpiece 1, further, while heating one surface 113 side of the sheet 110 and the surface 9-2 of the metal frame 9 to make them adhere to each other, by fixing the protective member 119 which is a sheet-like layer to the metal frame 9 as well, the workpiece 130 with a protective member and a metal frame 9 shown in FIG. 18 is obtained.

[0089] The metal frame 9 used in the protective member fixing step 1002 according to Embodiment 3 is made of metal, for example, made of SUS. The metal frame 9 has a circular opening 9-1 in the center and is formed in a plate shape. The inner diameter of the opening 9-1 of the metal frame 9 is larger than the outer diameter of the workpiece 1.

[0090] In the protective member fixing step 1002 according to Embodiment 3, as shown in FIG. 17, a metal frame 9 is placed on a frame placement portion 94 formed in an annular depression in an outer peripheral region of a holding surface 91 of a suction holding table 90, and a workpiece 1 with a sheet 110 adhered thereto is placed on the holding surface 91 of the suction holding table 90 corresponding to a position accommodated in an opening 9-1 of the metal frame 9 with the workpiece 1 side facing downward, and is suction-held. Note that the suction holding table 90 includes a holding portion 93 similar to the suction holding table 40, and the workpiece 1 is suction-held on the holding surface 91 by a mechanism similar to that of the suction holding table 40. In the protective member fixing step 1002 according to Embodiment 3, by suction-holding the workpiece 1 on the holding surface 91, a region 115 on the outer periphery of the sheet 110 is placed on a surface 9-2 of the metal frame 9.

[0091] Note that the sheet 110 used in the protective member fixing step 1002 according to Embodiment 3 and the protective member 119 formed by this sheet 110 may be formed of a thermoplastic resin 100 mainly composed of an ethylene-unsaturated carboxylic acid copolymer in an annular outer peripheral region 115 (see FIGS. 17 and 18) on the surface 113 side that contacts and is fixed to the metal frame 9. Here, the thermoplastic resin 100 having an ethylene-unsaturated carboxylic acid copolymer (ethylene-unsaturated carboxylic acid copolymer resin) as a main component means that the ratio of the mass of the unsaturated carboxylic acid to the mass excluding the filler containing the nanofiller and various other compounding agents from the entire thermoplastic resin 100 is at least 1% by mass or more, preferably 5% by mass or more, and more preferably 10% by mass or more. Note that the ratio of the mass of the unsaturated carboxylic acid to the mass excluding the filler containing the nanofiller and various other compounding agents from the entire thermoplastic resin 100 is 50% by mass or less. Such a sheet 110 can preferably form a workpiece 130 with a protective member by exerting a high fixing force on the metal frame 9 and preferably fixing it to the metal frame 9, and can reduce the risk that the protective member 119 formed by this sheet 110 peels off from the metal frame 9 during processing or conveyance.

[0092] In Embodiment 3, the sheet 110 is formed using a thermoplastic resin 100 in which the mass ratio of the unsaturated carboxylic acid to the mass excluding the filler containing the nanofiller and various other compounding agents in the entire thermoplastic resin 100 is 1% by mass or more. Therefore, since the contained unsaturated carboxylic acid forms an ethylene-unsaturated carboxylic acid copolymer (ethylene-unsaturated carboxylic acid copolymer resin) with ethylene at a sufficient mass ratio, it exhibits a sufficiently high fixing force with respect to the metal frame 9 and can sufficiently reduce the risk of peeling from the metal frame 9. Further, when the sheet 110 is formed using a thermoplastic resin 100 in which the mass ratio of the unsaturated carboxylic acid is 5% by mass or more, since the contained unsaturated carboxylic acid forms an ethylene-unsaturated carboxylic acid copolymer (ethylene-unsaturated carboxylic acid copolymer resin) with ethylene at a larger mass ratio, it exhibits a higher fixing force with respect to the metal frame 9 and can further reduce the risk of peeling from the metal frame 9. Furthermore, when the sheet 110 is formed using a thermoplastic resin 100 in which the mass ratio of the unsaturated carboxylic acid is 10% by mass or more, since the contained unsaturated carboxylic acid forms an ethylene-unsaturated carboxylic acid copolymer (ethylene-unsaturated carboxylic acid copolymer resin) with ethylene at an even larger mass ratio, it exhibits a higher fixing force with respect to the metal frame 9 and can almost completely suppress the risk of peeling from the metal frame 9. On the other hand, a sheet formed using a thermoplastic resin in which the mass ratio of the unsaturated carboxylic acid to the mass excluding the filler containing the nanofiller and various other compounding agents in the entire thermoplastic resin 100 is less than 1% by mass cannot form an ethylene-unsaturated carboxylic acid copolymer (ethylene-unsaturated carboxylic acid copolymer resin) with ethylene at a sufficient mass ratio for the contained unsaturated carboxylic acid, and thus cannot exhibit a sufficiently high fixing force with respect to the metal frame 9. Note that if the mass ratio of the unsaturated carboxylic acid to the mass excluding the filler containing the nanofiller and various other compounding agents exceeds 50% by mass, the thermoplastic resin becomes a rubbery substance and loses its thermoplastic properties.

[0093] Also, in the protective member fixing step 1002 according to Embodiment 3, an adhesion promoting member that promotes the adhesion of the thermoplastic resin 100 to the metal frame 9 may be provided between the surface 9-2 of the metal frame 9 and the outer peripheral region 115 of the sheet 110. Further, the adhesion promoting member may be disposed on the surface 9-2 of the metal frame 9. Here, the adhesion promoting member is formed of a material that promotes the adhesion reaction occurring between the metal frame 9 and the thermoplastic resin 100.

[0094] In the protective member fixing step 1002 according to Embodiment 3, and by the heat source 92 provided inside the suction holding table 90, the sheet 110 is heated and softened from the holding surface 91 side through the workpiece 1 and the metal frame 9. In the protective member fixing step 1002 according to Embodiment 3, also, as shown in FIG. 17, the flat pressing surface 51 of the pressing member 50 is made to approach and contact the surface 4 of the workpiece 1 and the surface 114 side of the sheet 110 adhered to the surface 9-2 of the metal frame 9, which are suction-held by the suction holding table 90, from the side opposite to the holding surface 91 side. In the protective member fixing step 1002 according to Embodiment 3, also, the sheet 110 is heated and softened from the pressing surface 51 side by the heat source 52 provided inside the pressing member 50.

[0095] In the protective member fixing step 1002 according to Embodiment 3, while heating one surface 113 side of the sheet 110 and the surface 4 side of the workpiece 1 by the heat sources 52 and 92 in this way, the one surface 113 side of the sheet 110 and the surface 4 side of the workpiece 1 are brought into close contact with each other for a predetermined time or more by the pressing surface 51 parallel to the holding surface 91, and the protective member 119, which is a sheet-like layer, is fixed to the workpiece 1 and the metal frame 9. The sheet 110 becomes the protective member 119 by being thermocompression-bonded and fixed to the surface 4 of the workpiece 1 and the surface 9-2 of the metal frame 9 through the protective member fixing step 1002.

[0096] Also, in the protection member fixing step 1002 according to Embodiment 3, similar to the protection member fixing step 1002 according to Embodiment 1, a roller may be used to perform thermocompression bonding on the workpiece 1 of the sheet 110 and the metal frame 9 under similar temperature conditions and pressing conditions. Further, in the protection member fixing step 1002 according to Embodiment 3, similar to the protection member fixing step 1002 according to Embodiment 1, after the sheet 110 is adhered under similar pressing conditions using a roller, a thermocompression bonding process may be performed on the workpiece 1 of the sheet 110 and the metal frame 9 under similar temperature conditions using an industrial dryer.

[0097] After the protection member fixing step 1002 according to Embodiment 3, the workpiece 130 with a protection member formed by thermocompression bonding the sheet 110 to the surface 4 of the workpiece 1 and the surface 9-2 of the metal frame 9 is removed from the suction holding table 90. As shown in FIG. 18, the workpiece 130 with a protection member includes a plate-shaped workpiece 1, a protection member 119 that adheres to the surface 4, which is one surface of the workpiece 1, to protect the workpiece 1 during processing, and a metal frame 9 that houses the workpiece 1 within the opening 9-1 on the surface 113 of the protection member 119. The protection member 119 of the workpiece 130 with a protection member is a sheet-like resin layer made of a thermoplastic resin 100 whose MFR under the conditions according to Test Method JIS K 7210-1 or 7210-2 is 30 g / 10 min or more and 3000 g / 10 min or less at a temperature of 150°C and a load of 5 Kg weight. This resin layer is fixed by being pressed while heated onto the surface 4 of the workpiece 1 and the surface 9-2 of the metal frame 9.

[0098] Since the surface 113 of the protection member 119 of the workpiece 130 with a protection member, which comes into contact with and is fixed to the workpiece 1 and the metal frame 9, is formed of a thermoplastic resin 100 that does not contain either sodium or zinc, the possibility of a malfunction occurring in the device 5 of the workpiece 1 is suppressed.

[0099] The workpiece manufacturing step 1011 of the workpiece processing method according to Embodiment 3 is a step of manufacturing a workpiece 130 with a protective member by implementing the manufacturing method of the workpiece with a protective member according to Embodiment 3 described above. Note that the workpiece manufacturing step 1011 with a protective member is not limited to this in the present invention, and a workpiece with a protective member in which the protective member 119 is in close contact with the back surface 7 of the workpiece 1 and the surface 9-2 of the metal frame 9 may be manufactured by implementing a method similar to the manufacturing method of the workpiece with a protective member described above.

[0100] The processing step 1012 of the workpiece processing method according to Embodiment 3 is the same as that of Embodiment 1 except that, in Embodiment 1, as shown in FIGS. 19, 20, and 21, the side of the protective member 119 is held by the chuck tables 145, 155, 165 of the processing device, and the object to be processed of the workpiece 1 by the processing unit is changed to the workpiece 130 with a protective member with a metal frame 9 or the like. The first example of the processing step 1012 according to Embodiment 3 is the same as that of Embodiment 1 except that, as shown in FIG. 19, cutting is performed in a state where the metal frame 9 of the workpiece 130 with a protective member or the like is held by the frame holding portion 147 of the cutting device 140. The second example of the processing step 1012 according to Embodiment 3 is the same as that of Embodiment 1 except that, as shown in FIG. 20, grinding is performed in a state where the metal frame 9 of the workpiece 130 with a protective member or the like is held by the frame holding portion 157 of the grinding device 150. The third example of the processing step 1012 according to Embodiment 3 is the same as that of Embodiment 1 except that, as shown in FIG. 21, laser processing is performed in a state where the metal frame 9 of the workpiece 130 with a protective member or the like is held by the frame holding portion 167 of the laser processing device 160.

[0101] The manufacturing method of the workpiece with a protective member, the processing method of the workpiece, and the workpiece 130 with a protective member according to Embodiment 3 having the above configuration have the same operational effects as those of Embodiment 1. When fixing the protective member 119, which is a sheet-like layer, to the workpiece 1 by heating and closely adhering the surface 113 side of the sheet 110 made of the thermoplastic resin 100 and the surface 4 side, which is one surface of the workpiece 1, the surface 113 side of the sheet 110 and the surface 9-2 of the metal frame 9 are also heated and closely adhered to each other, and the protective member 119, which is a sheet-like layer, is fixed to the metal frame 9 as well.

[0102] In addition, for the manufacturing method of the workpiece with a protective member, the processing method of the workpiece, and the workpiece 130 with a protective member according to Embodiment 3, the object to which the protective member 119, which is a sheet-like layer, is fixed by closely adhering the surface 113 side of the sheet 110 together with the workpiece 1 is not limited to the metal frame 9 in the present invention, and a resin frame having a similar shape may also be used.

[0103] 〔Embodiment 4〕 The manufacturing method of the workpiece with a protective member, the processing method of the workpiece, and the workpiece 130-3 with a protective member according to Embodiment 4 of the present invention will be described with reference to the drawings. FIG. 22 is a cross-sectional view for explaining the sheet forming step 1001 of the manufacturing method of the workpiece with a protective member according to Embodiment 4. FIG. 23 is a cross-sectional view for explaining the protective member fixing step 1002 of the manufacturing method of the workpiece with a protective member according to Embodiment 4. In FIG. 23, the illustration of the bump 6 is omitted. In FIGS. 22 and 23, the same parts as those in Embodiments 1, 2, and 3 are denoted by the same reference numerals, and the description thereof is omitted.

[0104] As shown in FIG. 22, the sheet forming step 1001 of the manufacturing method of the workpiece with a protective member according to Embodiment 4 further forms the thick portion 139 of the thermoplastic resin 100 on the outer peripheral edge of the sheet 110 in Embodiment 1. Here, the thick portion 139 is a portion thicker than the sheet 110. In Embodiment 4, for example, it is thicker than the sheet 110 by the same thickness as the metal frame 9 in Embodiment 3.

[0105] In the sheet forming step 1001 according to Embodiment 4, first, the thermoplastic resin 100 is supplied to the flat support surface 181 of the support table 180 and the groove portion 184 formed in an annular depression in the region of the outer periphery of the support surface 181. Here, the inner diameter of the groove portion 184 is larger than the outer diameter of the workpiece 1.

[0106] In the sheet forming step 1001 according to Embodiment 4, as shown in FIG. 22, while heating and softening or melting the thermoplastic resin 100 by the heat source 182 provided inside the support table 180 and the heat source 22 of the pressing member 20, with the pressing surface 21 parallel to the support surface 181, the thermoplastic resin 100 on the support surface 181 is spread along the support surface 181 and formed into a sheet shape, and the thermoplastic resin 100 in the groove portion 184 is formed into a thickness according to the groove portion 184, thereby forming a sheet 110 with a thick portion 139 of the thermoplastic resin 100 at the outer peripheral edge.

[0107] In the sheet forming step 1001 according to Embodiment 4, an annular frame core material may be supplied to the groove portion 184, and the thick portion 139 may be formed by the annular frame core material and the thermoplastic resin 100 in the groove portion 184. Here, the annular frame core material is, for example, a core material having a diameter equal to that of the groove portion 184 at the center in the radial direction and a width and thickness in the radial direction smaller than those of the groove portion 184.

[0108] The protection member fixing step 1002 of the manufacturing method of the workpiece with a protection member according to Embodiment 4 is, as shown in FIG. 23, in Embodiment 1, while heating together with the surface 4 side which is one surface of the workpiece 1, they are brought into close contact with each other and fixed to the workpiece 1, and the object to be fixed is changed to the sheet 110 with the thick portion 139. In the protection member fixing step 1002 according to Embodiment 4, first, in the same manner as in Embodiment 1, the surface 113 which is the protruding side surface of the thick portion 139 of the sheet-like region of the sheet 110 with the thick portion 139 (the bottom surface of the recess surrounded by the thick portion 139) is brought into close contact with the surface 4 of the workpiece 1.

[0109] In the protection member fixing step 1002 according to Embodiment 4, after the surface 4 of the workpiece 1 is brought into close contact with the surface 113 of the sheet 110 with the thick portion 139, as shown in FIG. 23, the sheet 110 side with the thick portion 139 is placed facing the holding surface 191 of the suction holding table 190 and suction held, and the sheet 110 with the thick portion 139 is heated and softened from the holding surface 191 side by the heat source 192 provided inside the suction holding table 190. Note that the suction holding table 190 includes a holding portion 193 similar to the holding portion 40 of the suction holding table 40, and the workpiece 1 is suction held on the holding surface 191 by a mechanism similar to that of the suction holding table 40. In the protection member fixing step 1002 according to Embodiment 4, further, the pressing surface 51 of the pressing member 50-2 is brought close to and contacted with the workpiece 1 with which the surface 113 of the sheet 110 with the thick portion 139 suction held by the suction holding table 190 is in close contact, from the side opposite to the holding surface 191 side, and the sheet 110 with the thick portion 139 is further heated and softened from the pressing surface 51 side through the workpiece 1 by the heat source 52 of the pressing member 50-2. In the protection member fixing step 1002 according to Embodiment 4, and then, by pressing the workpiece 1 against the sheet 110 with the thick portion 139 softened by the pressing surface 51 parallel to the holding surface 191, the surface 4 of the workpiece 1 is thermocompression bonded to the surface 113 of the sheet 110 with the thick portion 139 softened. Here, the pressing member 50-2 has a radial width smaller than the inner diameter of the surface 113 of the sheet 110 with the thick portion 139.

[0110] Also, in the protection member fixing step 1002 according to Embodiment 4, similar to the protection member fixing step 1002 according to Embodiment 1, a roller may be used to perform a thermocompression bonding process of the sheet 110 with the thick portion 139 to the workpiece 1 under the same temperature conditions and pressing conditions. Also, in the protection member fixing step 1002 according to Embodiment 4, similar to the protection member fixing step 1002 according to Embodiment 1, after the sheet 110 with the thick portion 139 is brought into close contact using a roller under the same pressing conditions, a thermocompression bonding process of the sheet 110 with the thick portion 139 to the workpiece 1 may be performed using an industrial dryer under the same temperature conditions.

[0111] In the protective member fixing step 1002 according to the fourth embodiment, in the workpiece 130 with a protective member according to the third embodiment, the metal frame 9 is changed to a thick portion 139 that houses the workpiece 1 within the opening 139-1, and thus a workpiece 130-3 with a protective member according to the fourth embodiment is obtained. The processing method of the workpiece according to the fourth embodiment is generally the same as that of the third embodiment. In the processing step 1012, during the processing of the workpiece 1, the thick portion 139 is held by the frame holding portions 147, 157, and 167 instead of the metal frame 9.

[0112] In the manufacturing method of the workpiece with a protective member, the processing method of the workpiece, and the workpiece 130-3 with a protective member according to the fourth embodiment having the above configuration, in the first embodiment, while heating together with the surface 4 side which is one surface of the workpiece 1, they are brought into close contact with each other and fixed to the workpiece 1. The object to be fixed to the workpiece 1 is changed to the sheet 110 with the thick portion 139, so the same operational effects as those of the third embodiment are achieved.

[0113] 〔Embodiment 5〕 The manufacturing method of the workpiece with a protective member, the processing method of the workpiece, and the workpiece with a protective member according to the fifth embodiment of the present invention will be described with reference to the drawings. FIG. 24 is a flowchart showing the processing procedure of the manufacturing method of the workpiece with a protective member according to the fifth embodiment. FIG. 25 is a cross-sectional view for explaining the thermoplastic resin supply step 1021 and the protective member fixing step 1022 of FIG. 24. In FIG. 25, the illustration of the bump 6 is omitted. In FIGS. 24 and 25, the same parts as those in the first to fourth embodiments are denoted by the same reference numerals and the description thereof is omitted.

[0114] The manufacturing method of the workpiece with a protective member and the workpiece with a protective member according to the fifth embodiment will be described. The manufacturing method of the workpiece with a protective member according to the fifth embodiment includes, as shown in FIG. 24, a thermoplastic resin supply step 1021 and a protective member fixing step 1022.

[0115] The thermoplastic resin supply step 1021 according to the fifth embodiment is a step of supplying the thermoplastic resin 100 to the surface 4 which is one surface of the workpiece 1, as shown in FIG. 25.

[0116] In the thermoplastic resin supply step 1021 according to Embodiment 5, first, as shown in FIG. 25, the back surface 7 side, which is the other surface side of the workpiece 1, is placed and suction-held toward the holding surface 41 of the suction holding table 40. In the thermoplastic resin supply step 1021 according to Embodiment 5, next, the thermoplastic resin 100 is supplied onto the surface 4 of the workpiece 1 held by the suction holding table 40. Note that various properties of the thermoplastic resin 100 supplied in the thermoplastic resin supply step 1021 according to Embodiment 5 are the same as those of the thermoplastic resin 100 supplied and molded in the sheet forming step 1001 according to Embodiment 1.

[0117] The protective member fixing step 1022 according to Embodiment 5 is a step of heating the thermoplastic resin 100 supplied to the surface 4, which is one surface side of the workpiece 1, to soften or melt it, spreading it along the surface 4, and forming a sheet-like layer of the protective member 119 on the surface 4 side of the workpiece 1.

[0118] In the protective member fixing step 1022 according to Embodiment 5, the thermoplastic resin 100 supplied onto the surface 4 of the workpiece 1 is heated and softened from the holding surface 41 side by the heat source 42 provided inside the suction holding table 40. In the protective member fixing step 1022 according to Embodiment 5, also, as shown in FIG. 25, the flat pressing surface 51 of the pressing member 50 is brought close to and contacted with the thermoplastic resin 100 from the side opposite to the holding surface 41 side. In the protective member fixing step 1022 according to Embodiment 5, also, the thermoplastic resin 100 is further heated and softened from the pressing surface 51 side by the heat source 52 provided inside the pressing member 50.

[0119] In the protection member fixing step 1022 according to Embodiment 5, while heating the thermoplastic resin 100 at a temperature equal to or higher than the softening point (for example, 150°C in Embodiment 5) by heat sources 42 and 52 to soften or melt it, the thermoplastic resin 100 is pressed against the surface 4 of the workpiece 1 with a predetermined pressing force (for example, 10 MPa or more in Embodiment 5) for a predetermined time (for example, 10 minutes or more in Embodiment 5) with the pressing surface 51 parallel to the holding surface 41. By doing so, the softened thermoplastic resin 100 on the surface 4 of the workpiece 1 is spread along the surface 4 of the workpiece 1 by the pressing surface 51 and formed into a sheet shape, and while being formed into a sheet shape, the thermoplastic resin 100 formed into a sheet shape is thermocompression bonded to the surface 4 of the workpiece 1 to adhere closely, and the thermoplastic resin 100 is fixed to the workpiece 1 to serve as a protection member 119 that protects the workpiece 1.

[0120] In the manufacturing method of the workpiece with a protective member according to Embodiments 1 to 4, after the thermoplastic resin 100 is formed into a sheet 110 by the first heating and pressing process in the sheet forming step 1001, the sheet 110 is thermocompression bonded to the workpiece 1 by the second heating and pressing process in the protective member fixing step 1002. On the other hand, in the manufacturing method of the workpiece with a protective member according to Embodiment 5, the thermoplastic resin 100 is formed into a sheet shape while being thermocompression bonded to the workpiece 1 by one heating and pressing process in the protective member fixing step 1022. Therefore, in order to obtain the same adhesion state between the protective member 119 and the workpiece 1 as that in the protective member fixing step 1002 according to Embodiments 1 to 4 by the protective member fixing step 1022 according to Embodiment 5, the processing time for pressing the thermoplastic resin 100 against the workpiece 1 while forming the thermoplastic resin 100 in the protective member fixing step 1022 according to Embodiment 5 is longer than the processing time for pressing the thermoplastic resin 100 against the workpiece 1 in the protective member fixing step 1002 according to Embodiments 1 to 4. Also, the heating temperature required when pressing the thermoplastic resin 100 against the workpiece 1 while forming the thermoplastic resin 100 in the protective member fixing step 1022 according to Embodiment 5 is higher than the heating temperature required when pressing the thermoplastic resin 100 against the workpiece 1 in the protective member fixing step 1002 according to Embodiments 1 to 4. Further, the pressing force required when pressing the thermoplastic resin 100 against the workpiece 1 while forming the thermoplastic resin 100 in the protective member fixing step 1022 according to Embodiment 5 is greater than the pressing force required when pressing the thermoplastic resin 100 against the workpiece 1 in the protective member fixing step 1002 according to Embodiments 1 to 4. Note that the manufacturing method of the workpiece with a protective member according to Embodiments 1 to 4 is referred to as "Off Wafer" because the sheet 110 is formed from the thermoplastic resin 100 at a location other than on the workpiece 1, while the manufacturing method of the workpiece with a protective member according to Embodiment 5 is referred to as "On Wafer" because the thermoplastic resin 100 is formed into a sheet shape on the workpiece 1.

[0121] In the protection member fixing step 1022 according to Embodiment 5, a sheet 110 made of a thermoplastic resin 100, whose melt flow rate (MFR) under the conditions of test method JIS K 7210-1 or 7210-2 is 30 g / 10 min or more and 3000 g / 10 min or less at a temperature of 150°C and a load of 5 kg, is thermocompression bonded and fixed to the surface 4 of the workpiece 1 to form a protection member 119. Due to the high fluidity of the thermoplastic resin 100, it can easily conform to the bumps 6 (concave-convex structures) on the surface 4 of the workpiece 1, and the protection member 119 can be made into a homogeneous sheet-like resin layer that closely adheres to the surface 4 of the workpiece 1 without gaps.

[0122] In the protection member fixing step 1022 according to Embodiment 5, while molding the thermoplastic resin 100, it is thermocompression bonded and fixed to the surface 4 of the workpiece 1 to form a protection member 119 for protecting the workpiece 1. Then, if necessary, post-treatment similar to the protection member fixing step 1002 of Embodiment 1 is performed to obtain a processed workpiece 120 with a protection member similar to that of Embodiment 1. The processing method of the workpiece according to Embodiment 5 is the same as that of Embodiment 1.

[0123] In the manufacturing method of the processed workpiece with a protection member, the processing method of the workpiece, and the processed workpiece 120 with a protection member according to Embodiment 5, etc., the thermoplastic resin 100, which is formed into a sheet shape and thermocompression bonded and fixed to the surface 4 of the workpiece 1 to form a protection member 119, has an MFR of 30 g / 10 min or more and 3000 g / 10 min or less under the conditions of test method JIS K 7210-1 or 7210-2 at a temperature of 150°C and a load of 5 kg. Therefore, the protection member 119 can be easily processed into a sheet shape, and the protection member 119 can be made into a homogeneous sheet-like resin layer that closely adheres to the surface 4 of the workpiece 1 without gaps, and the influence of the surface side of the workpiece 1 where the protection member 119 adheres on the processing of the workpiece 1 can be reduced. Also, the manufacturing method of the processed workpiece with a protection member, the processing method of the workpiece, and the processed workpiece 120 with a protection member according to Embodiment 5, etc., have the same effects as those of Embodiment 1.

[0124] 〔Embodiment 6〕 A method for manufacturing a workpiece with a protective member, a method for processing a workpiece, and a workpiece with a protective member according to Embodiment 6 of the present invention will be described with reference to the drawings. FIG. 26 is a cross-sectional view for explaining a thermoplastic resin supply step 1021 and a protective member fixing step 1022 of the method for manufacturing a workpiece with a protective member according to Embodiment 6. In FIG. 26, the illustration of the bumps 6 is omitted. In FIG. 26, the same parts as those in Embodiments 1 to 5 are denoted by the same reference numerals, and the description thereof is omitted.

[0125] The method for manufacturing a workpiece with a protective member according to Embodiment 6 is obtained by changing the thermoplastic resin supply step 1021 and the protective member fixing step 1022 in Embodiment 5, and is also referred to as "On Wafer" in the same manner as in Embodiment 5.

[0126] In the thermoplastic resin supply step 1021 according to Embodiment 6, first, as shown in FIG. 26, the back surface 7 side of the workpiece 1 is placed facing the holding surface 91 of the suction holding table 90-2, suction-held, and the metal frame 9 is placed on the frame placement portion 94 formed to be annularly recessed in the outer peripheral region of the holding surface 91 and the support surface 96. Here, the suction holding table 90-2 is formed with a support surface 96 that is in the same plane as the surface 4 of the workpiece 1 placed on the holding surface 91 and the surface 9-2 of the metal frame 9 placed on the frame placement portion 94 in the region between the holding surface 91 and the frame placement portion 94 in the suction holding table 90. In the thermoplastic resin supply step 1021 according to Embodiment 6, next, the thermoplastic resin 100 is supplied onto the surface 4 of the workpiece 1 held by the suction holding table 90-2, on the support surface 96, or on the surface 9-2 of the metal frame 9. The various properties of the thermoplastic resin 100 and the metal frame 9 supplied in the thermoplastic resin supply step 1021 according to Embodiment 6 are the same as those of the thermoplastic resin 100 and the metal frame 9 supplied in the sheet forming step 1001 according to Embodiment 3.

[0127] The protection member fixing step 1022 according to Embodiment 6 is as follows. In Embodiment 5, while heating and softening or melting the thermoplastic resin 100 supplied to the surface 4 on one surface side of the workpiece 1, the thermoplastic resin 100 is spread along the surface 4, and when forming the protection member 119 in the form of a sheet on the surface 4 side of the workpiece 1, further, the thermoplastic resin 100 is pressed toward the surface 9-2 of the metal frame 9, and the protection member 119 is also fixed to the metal frame 9, thereby obtaining the workpiece 130 with the protection member and the metal frame 9 similar to that in Embodiment 3.

[0128] In the protection member fixing step 1022 according to Embodiment 6, the thermoplastic resin 100 supplied on the surface 4 of the workpiece 1, on the support surface 96, or on the surface 9-2 of the metal frame 9 is heated and softened from the holding surface 91 side by the heat source 92 provided inside the suction holding table 90-2. In the protection member fixing step 1022 according to Embodiment 6, also, as shown in FIG. 26, the flat pressing surface 51 of the pressing member 50 is brought close to and contacted with the thermoplastic resin 100 from the side opposite to the holding surface 91 side. In the protection member fixing step 1022 according to Embodiment 5, also, the thermoplastic resin 100 is further heated and softened from the pressing surface 51 side by the heat source 52 provided inside the pressing member 50.

[0129] In the protection member fixing step 1022 according to Embodiment 6, while heating the thermoplastic resin 100 to a temperature equal to or higher than the softening point by the heat sources 52 and 92 to soften or melt it in this way, the thermoplastic resin 100 is pressed against the surface 4 of the workpiece 1 and the surface 9-2 of the metal frame 9 with a predetermined pressing force for a predetermined time or more by the pressing surface 51 parallel to the holding surface 91. Thus, the softened thermoplastic resin 100 on the surface 4 of the workpiece 1 is spread along the surface 4 of the workpiece 1, the support surface 96, and the surface 9-2 of the metal frame 9 and formed into a sheet shape, and the thermoplastic resin 100 formed into a sheet shape is thermocompression-bonded and adhered to the surface 4 of the workpiece 1 and the surface 9-2 of the metal frame 9, and the thermoplastic resin 100 is fixed to the workpiece 1 and the metal frame 9 to serve as the protection member 119 for protecting the workpiece 1.

[0130] In the protection member fixing step 1022 according to Embodiment 6, a workpiece 130 with a protection member similar to that in Embodiment 3 is obtained. The method for processing the workpiece according to Embodiment 6 is the same as that in Embodiment 3.

[0131] In the manufacturing method of the workpiece with a protection member, the processing method of the workpiece, and the workpiece 130 with a protection member according to Embodiment 6, in Embodiment 5, while heating the thermoplastic resin 100 supplied to the surface 4 on one surface side of the workpiece 1 to soften or melt it, spreading the thermoplastic resin 100 along the surface 4, and forming a sheet-like layer of the protection member 119 on the surface 4 side of the workpiece 1, further pressing the thermoplastic resin 100 toward the surface 9-2 of the metal frame 9 to fix the protection member 119 to the metal frame 9 as well. Therefore, it has the same operational effects as Embodiment 5.

[0132] [Modification Example 1] The manufacturing method of the workpiece with a protection member, the processing method of the workpiece, and the workpiece with a protection member according to Modification Example 1 of the present invention will be described with reference to the drawings. FIGS. 27 and 28 are perspective views showing the workpiece 1-2 which is the object of the manufacturing method of the workpiece with a protection member and the processing method of the workpiece according to Modification Example 1. FIG. 27 is a perspective view of the workpiece 1-2 seen from the surface 4-2 side, and FIG. 28 is a perspective view of the workpiece 1-2 seen from the back surface 7-2 side.

[0133] The manufacturing method of the workpiece with a protective member according to Modification 1 is the same as the above-described embodiments, except that the workpiece to be formed with the protective member 119 is the workpiece 1-2 shown in FIGS. 27 and 28, and the shapes of the support tables 10, 80, 180, the pressing members 20, 50, 50-2, the sheet adhesion device 30, the suction holding tables 40, 60, 90, 90-2, 190, and the cutting device 70 used differ according to the shape of the workpiece 1-2. The workpiece with a protective member according to Modification 1 is the same as the above-described embodiments, except that the workpiece to be formed with the protective member 119 is the workpiece 1-2 shown in FIGS. 27 and 28. The processing method of the workpiece according to Modification 1 is the same as the above-described embodiments, except that the workpiece to be processed is the workpiece 1-2, and the shapes of the cutting device 140, the grinding device 150, and the laser processing device 160 used differ according to the shape of the workpiece 1-2.

[0134] In Modification 1, the workpiece 1-2 is a package substrate including an insulating board with insulation properties and a ground line formed by a conductive metal embedded inside the insulating board, and having electrodes and various wirings formed on the front surface 4-2 and the back surface 7-2. As shown in FIG. 27, in the workpiece 1-2, devices 5-2 are respectively formed in each region of the front surface 4-2 partitioned by a plurality of division planned lines 3-2 that intersect (orthogonal in Modification 1). On the back surface 7-2 of the wiring substrate 2-2 of the workpiece 1-2, a sealing agent 8 (see FIG. 28) for sealing each device 5-2 and wires (not shown) formed by wire bonding to each device 5-2 is formed. The sealing agent 8 is a so-called mold resin composed of an epoxy resin, a silicone resin, a urethane resin, an unsaturated polyester resin, an acrylic urethane resin, a polyimide resin, or the like. The workpiece 1-2 has a concavo-convex structure by having the device 5-2 formed on the front surface 4-2 and the sealing agent 8 formed on the back surface 7-2. The workpiece 1-2 is divided along each division planned line 3-2 and divided into individual devices 5-2.

[0135] The manufacturing method of the workpiece with a protective member according to Modification Example 1, the processing method of the workpiece, and the workpiece with a protective member are obtained by changing the formation target and processing target of the protective member 119 to the workpiece 1-2 in each of the above-described embodiments. Therefore, they have the same operational effects as those of each of the above-described embodiments.

[0136] Further, in the installation method of the protective member and the processing method of the workpiece according to Modification Example 1, since various thermoplastic resins 100 described above are used for forming the protective member 119, the thermoplastic resin 100 hardly reacts with the cured resin that has undergone a curing reaction and is used in the sealing agent 8 such as an epoxy resin, a silicone resin, a urethane resin, an unsaturated polyester resin, an acrylic urethane resin, or a polyimide resin. Thus, it has the effect of being able to stably form the protective member 119.

[0137] 〔Modification Example 2〕 The manufacturing method of the workpiece with a protective member and the processing method of the workpiece according to Modification Example 2 of the present invention will be described with reference to the drawings. FIGS. 29 to 38 are perspective views showing an example of a method of supplying the thermoplastic resin in the sheet forming step 1001 or the thermoplastic resin supply step 1021 in the manufacturing method of the frame unit according to Modification Example 2. In FIGS. 29 to 38, the same reference numerals are given to the same parts as in Embodiments 1 to 6 and Modification Example 1, and the description thereof will be omitted.

[0138] The manufacturing method of the workpiece with a protective member and the processing method of the workpiece according to Modification Example 2 are the same as those of Embodiments 1 to 6 and Modification Example 1, except that the method of supplying the thermoplastic resin 100 in the sheet forming step 1001 or the thermoplastic resin supply step 1021 is different. Note that FIGS. 29 to 38 show an example of supplying the thermoplastic resins 100-2 to 100-13 to the support surface 11 of the support table 10 used in Embodiment 1.

[0139] In the first example, as shown in Fig. 29, powdery thermoplastic resin 100-2 (thermoplastic resin powder) is supplied. In the second example, as shown in Fig. 30, one or more block-shaped thermoplastic resins 100-3 (thermoplastic resin blocks) are supplied. In the third example, as shown in Fig. 31, donut-shaped thermoplastic resin 100-4 (thermoplastic resin donut) is supplied. In the fourth example, as shown in Fig. 32, noodle-shaped (fibrous) thermoplastic resin 100-5 (thermoplastic resin fiber) is supplied.

[0140] In the fifth example, as shown in Fig. 33, one or more tablet-shaped thermoplastic resins 100-6 (thermoplastic resin tablets) are supplied. In the sixth example, as shown in Fig. 34, spiral-shaped fibrous (string-shaped) thermoplastic resin 100-7 (thermoplastic resin spiral) is supplied. In the seventh example, as shown in Fig. 35, solid thermoplastic resin 100 is sliced thinly into sheet-shaped thermoplastic resin 100-8 (thermoplastic resin sheet) and supplied. In the eighth example, as shown in Fig. 36, the solid square-columnar thermoplastic resin 100-9 supplied through the inside of the square-tubular supply cylinder 211 of the resin supply section 210 is cut by a cutter 212 provided along the supply port of the supply cylinder 211 to supply cut-like mochi-shaped thermoplastic resin 100-10 (thermoplastic resin mochi pieces).

[0141] In the ninth example, as shown in Fig. 37, the columnar solid thermoplastic resin 100-11 supplied through the inside of the cylindrical heating section 221 of the resin supply section 220 is heated and softened by the heating section 221, and is extruded downward by the pressing section 222 from above the heating section 221, thereby supplying the thermoplastic resin 100-12 (thermoplastic resin fluid) that has been softened and become a fluid. In the tenth example, as shown in Fig. 38, the fluid thermoplastic resin 100-13 (thermoplastic resin fluid) is supplied from the resin supply section 230. Note that, in the present invention, the method of supplying the fluid thermoplastic resins 100-12 and 100-13 is not limited to these methods, and the thermoplastic resin 100 may be heated and softened by a heating body provided in a glue gun or the like using a glue gun or the like, and the thermoplastic resin 100 may be supplied from the glue gun or the like to the support surface 11 of the support table 10.

[0142] The manufacturing method of the workpiece with a protective member and the processing method of the workpiece according to these second modification examples change the method of supplying the thermoplastic resin 100-2 to the thermoplastic resin 100-13 in the sheet forming step 1001 or the thermoplastic resin supply step 1021 in Embodiments 1 to 6. Therefore, they exhibit the same operational effects as those of Embodiments 1 to 6.

[0143] 〔Examples〕 Next, the inventors of the present invention confirmed the manufacturing method of the workpiece with a protective member, the processing method of the workpiece, and the operational effects of the workpiece with a protective member 120 according to Embodiment 1. Fig. 39 is a diagram for explaining the manufacturing method of the workpiece with a protective member, the processing method of the workpiece, and the operational effects of the workpiece with a protective member 120 according to Embodiment 1. Fig. 39 summarizes the results obtained when the operational effects of Embodiment 1 were confirmed.

[0144] FIG. 39 shows the evaluation results of the formation of each protective member when a sheet is formed by changing the thermoplastic resin to be supplied in the same manner as in the sheet forming step 1001 of Embodiment 1, and the sheet is thermocompression bonded to the workpiece 1 to form a protective member in a reduced-pressure atmosphere with the heating temperature of the sheet set to 150° C., the pressing force set to the above-described predetermined pressing force according to each form of the protective member fixing step 1002 of Embodiment 1, and the time of the heating and pressing treatment set to 30 seconds. It also shows the evaluation results of the processing of the workpiece 1 when the same grinding process as in the second example of the processing step 1012 of Embodiment 1 is performed on each workpiece with a protective member obtained by forming a protective member on the workpiece 1.

[0145] In the row of "Thermoplastic resin" in FIG. 39, the row of "Component" indicates the type of the thermoplastic resin to be supplied, and the row of "MFR [g / 10 min]" indicates the MFR under the conditions of Test Method JIS K 7210-1 or 7210-2 of the thermoplastic resin at a temperature of 150° C. and a load of 5 Kg. In the row of "Evaluation results of the formation of the protective member" in FIG. 39, "◯" indicates that the thermoplastic resin can easily form a sheet-like shape that spreads over the surface of the workpiece at a sufficient speed and covers the workpiece 1, and can also form a sheet-like shape with a sufficient thickness. "×" indicates that the thermoplastic resin cannot easily form a sheet-like shape covering the workpiece 1 because the spreading speed on the surface of the workpiece is slow, or that the thermoplastic resin cannot form a sheet-like shape with a sufficient thickness because the spreading speed on the surface of the workpiece is too fast. In the row of "Evaluation results of the influence on the processing step" in FIG. 39, "◯" indicates that no gap has occurred between the workpiece and the protective member, and the thickness of the workpiece after grinding can be made uniform. "×" indicates that a gap has occurred between the workpiece and the protective member, or that the thickness of the workpiece after grinding cannot be made uniform due to the influence of the uneven structure.

[0146] "Resin 1" to "Resin 5" in Figure 39 are all thermoplastic resins 100 where the main component is polyolefin such as polyethylene, polypropylene, poly(4-methyl-1-pentene), poly(1-butene), etc., and the ratio of the mass of the polyolefin to the mass excluding the filler containing the nanofiller and various other compounding agents described below in the entire thermoplastic resin 100 is 100% by mass. "Resin 1", "Resin 2", "Resin 3", "Resin 4", and "Resin 5" in Figure 39 each show that by mixing each compound of the polyolefin, the melt flow rate (MFR) under the conditions of Test Method JIS K 7210-1 or 7210-2 with a temperature of 150°C and a load of 5 kg was adjusted to 20 g / 10 min, 25 g / 10 min, 30 g / 10 min, 3000 g / 10 min, and 3100 g / 10 min respectively, and the thermoplastic resin 100 was supplied.

[0147] "Resin 6" to "Resin 10" in Figure 39 are all thermoplastic resins 100 that contain an ethylene-unsaturated carboxylic acid copolymer as the main component, and the ratio of the mass of the ethylene-unsaturated carboxylic acid copolymer to the mass excluding the filler containing the nanofiller and various other compounding agents described below in the entire thermoplastic resin 100 is 10% by mass. "Resin 6", "Resin 7", "Resin 8", "Resin 9", and "Resin 10" in Figure 39 each show that by mixing each compound of the ethylene-unsaturated carboxylic acid copolymer, the melt flow rate (MFR) under the conditions of Test Method JIS K 7210-1 or 7210-2 with a temperature of 150°C and a load of 5 kg was adjusted to 20 g / 10 min, 25 g / 10 min, 30 g / 10 min, 3000 g / 10 min, and 3100 g / 10 min respectively, and the thermoplastic resin 100 was supplied.

[0148] As shown in FIG. 39, when resins 3, 4, 8, and 9 with MFRs of 30 g / 10 min and 3000 g / 10 min at a temperature of 150° C. and a load of 5 kg according to test methods JIS K 7210-1 or 7210-2 are formed into sheets and then these sheets 110 are used as a protective member 119 for protecting the workpiece 1 by an Off Wafer method, the thermoplastic resin 100 can easily spread on the surface of the workpiece 1 at a sufficient speed and be formed into a sheet covering an area that can cover the workpiece 1, and moreover, it can be formed into a sheet with a sufficient thickness. Further, even after grinding, no gap is generated between the workpiece 1 and the protective member 119, and the thickness of the workpiece 1 after grinding can be made uniform. On the other hand, as shown in FIG. 39, when resins 1, 2, 6, and 7 with MFRs of 20 g / 10 min and 25 g / 10 min at a temperature of 150° C. and a load of 5 kg according to test methods JIS K 7210-1 or 7210-2 are formed into sheets and then these sheets are used as a protective member for protecting the workpiece 1 by an Off Wafer method, since the speed at which the thermoplastic resin spreads on the surface of the workpiece is slow, it cannot be easily formed into a sheet covering an area that can cover the workpiece 1. Further, a gap is generated between the workpiece and the protective member after grinding, and the thickness of the workpiece after grinding is affected by the uneven structure and cannot be made uniform. Also, as shown in FIG. 39, when resins 5 and 10 with an MFR of 3100 g / 10 min at a temperature of 150° C. and a load of 5 kg according to test methods JIS K 7210-1 or 7210-2 are formed into sheets and then these sheets are used as a protective member for protecting the workpiece 1 by an Off Wafer method, since the speed at which the thermoplastic resin spreads on the surface of the workpiece is too fast, it cannot be formed into a sheet with a sufficient thickness. However, on the other hand, no gap is generated between the workpiece and the protective member after grinding, and the thickness of the workpiece after grinding can be made uniform.

[0149] Thus, in the example shown in Fig. 39, a thermoplastic resin 100 with an MFR of 30 g / 10 min or more and 3000 g / 10 min or less under the conditions of test method JIS K 7210-1 or 7210-2 at a temperature of 150°C and a load of 5 kg is formed into a sheet shape, and by thermocompression bonding and fixing the sheet 110 to the surface 4 of the workpiece 1 in an Off Wafer method to form a protective member 119, the sheet 110 (protective member 119) can be easily processed into a sheet shape covering the area of the workpiece 1, and the protective member 119 can be made into a homogeneous sheet-like resin layer that adheres closely to the surface 4 of the workpiece 1 without gaps. It has become clear that the influence of the surface side of the workpiece 1 where the protective member 119 adheres on the processing of the workpiece 1 can be reduced.

[0150] Also, in the same On Wafer method as the protective member fixing step 1022 of Embodiment 5, using the same thermoplastic resins (resin 1 to resin 10) as in the example shown in Fig. 39, in a reduced-pressure atmosphere, the heating temperature of the sheet is set to 150°C, the pressing force is set to a predetermined pressing force of 10 MPa or more, and the heating and pressing treatment time is set to 10 minutes. While forming the thermoplastic resin into a sheet shape, the evaluation of the formation of each protective member when thermocompression bonding it to the workpiece 1 to form a protective member, and the evaluation of the processing of the workpiece 1 when performing the same grinding process as the second example of the processing step 1012 of Embodiment 5 on each workpiece with a protective member obtained by forming a protective member on the workpiece 1 were carried out. As a result, the same results as the Off Wafer example shown in Fig. 39 were obtained. Thus, even in the case of On Wafer, by forming a thermoplastic resin 100 with an MFR of 30 g / 10 min or more and 3000 g / 10 min or less under the conditions of test method JIS K 7210-1 or 7210-2 at a temperature of 150°C and a load of 5 kg into a sheet shape and thermocompression bonding and fixing the sheet 110 to the surface 4 of the workpiece 1 to form a protective member 119, the sheet 110 (protective member 119) can be easily processed into a sheet shape covering the area of the workpiece 1, and the protective member 119 can be made into a homogeneous sheet-like resin layer that adheres closely to the surface 4 of the workpiece 1 without gaps. It has become clear that the influence of the surface side of the workpiece 1 where the protective member 119 adheres on the processing of the workpiece 1 can be reduced.

[0151] Note that the present invention is not limited to the above-described embodiments. That is, various modifications can be made and implemented without departing from the gist of the present invention. For example, the thermoplastic resin 100 used in each of the above-described embodiments and each modification example may be colored in a dark color such as black for the purpose of circuit protection from ultraviolet rays and circuit concealment, or an ultraviolet absorber may be kneaded.

Explanation of Reference Numerals

[0152] 1 Workpiece 4 Surface 5 Device 6 Bump 7 Back surface 100 Thermoplastic resin 110 Sheet 113, 114 Surfaces 119 Protection member 120, 130, 130-3 Workpiece with protection member 140 Cutting device (an example of a processing device) 141 Cutting blade (an example of a processing unit) 145, 155, 165 Chuck table 150 Grinding device (an example of a processing device) 153 Grinding wheel (an example of a processing unit) 160 Laser processing device (an example of a processing device) 161 Laser irradiator (an example of a processing unit)

Claims

1. A method for manufacturing a workpiece with a protective member, comprising a plate-shaped workpiece and a protective member that adheres to one surface of the workpiece to protect the workpiece, wherein the protective member has a melt mass flow rate (MFR) based on JIS K 7210 of 30 to 3000 g / 10 min, and is composed only of a sheet-shaped resin layer formed by heating and spreading a thermoplastic resin in a plate shape, powder shape, lump shape, string shape, granular shape, film shape, or fluid shape while softening or melting it, and the workpiece with the protective member is pressed and adhered to the one surface of the workpiece while heating.

2. The method for manufacturing a workpiece with a protective member according to claim 1, wherein the thermoplastic resin is a polyolefin.

3. A sheet forming step of heating the thermoplastic resin supplied to the support surface of the support table to soften or melt it, spreading it along the support surface, and forming it into a sheet shape; A protective member fixing step of heating and bringing into close contact with each other one surface side of the formed sheet and one surface side of the workpiece, and fixing the protective member, which is the sheet-shaped layer, to the workpiece; The method for manufacturing a workpiece with a protective member according to claim 1 or 2, comprising the above steps.

4. The method for manufacturing a workpiece with a protective member according to claim 1 or 2, wherein the thermoplastic resin supplied to one surface side of the workpiece is heated to soften or melt it, spread along the one surface, and a sheet-shaped layer is formed on one surface side of the workpiece.

5. The method for manufacturing a workpiece with a protective member according to claim 1, 2, 3, or 4, wherein the protective member is made of a thermoplastic resin whose main component is a polyolefin and the ratio of the mass of the polyolefin to the mass excluding the filler and compounding agent from the whole thermoplastic resin is 100% by mass.

6. The method for manufacturing a workpiece with a protective member according to claim 1, 2, 3, or 4, wherein the protective member is made of a thermoplastic resin containing an ethylene / unsaturated carboxylic acid copolymer as a main component, and the ratio of the mass of the ethylene / unsaturated carboxylic acid copolymer to the mass excluding the filler and compounding agent from the whole thermoplastic resin is 10% by mass.

7. A method for processing a plate-shaped workpiece, a workpiece with a protective member manufacturing step of manufacturing a workpiece with a protective member by the method for manufacturing a workpiece with a protective member according to claim 1, 2, 3, 4, 5, or 6; A processing step of holding the protection member side of the workpiece with the protection member by a chuck table of a processing apparatus and processing the workpiece with a processing unit; A peeling step of peeling the protection member from the workpiece after the processing step is performed; A method for processing a workpiece, comprising the above steps.

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