Expansion method and expansion device

Abstract

To make it possible to inhibit a tape from being peeled from a frame.SOLUTION: An expanding method comprises an expanding step 1001 of expanding a tape by pinching the tape using pinching members and separating the pinching members from each other, a frame mounting step 1005 of pasting a frame having an opening on the tape and cutting the tape along the frame: a suction holding step 1002 of sucking and holding a tape's region corresponding to an inner side of the opening of the frame in a state of expanding the tape pinched by the pinching members, before performing the frame mounting step 1005 after performing the expanding step 1001; and an outside extension releasing step 1003 of releasing extension of the outside of the region while keeping extension of the tape's region by making the pinching members move so as to be closer to each other, before performing the frame mounting step 1005 after performing the suction holding step 1002.SELECTED DRAWING: Figure 5

Description

Technical Field

[0001] The present invention relates to an expansion method and an expansion device.

Background Art

[0002] Chips formed by dividing a wafer are handled using a frame. An expansion device that divides a wafer while the wafer is attached to the frame via a tape is widely used (see, for example, Patent Document 1).

[0003] However, when the tape is expanded, it becomes slack, and there is a risk that the chips formed by division during handling may come into contact with adjacent chips and be damaged. In addition, in the case of a wafer with a small chip size, the tape may not be sufficiently expanded, and an undivided region may occur.

[0004] Therefore, an expansion device that attaches a frame after expansion has been proposed (see, for example, Patent Document 2).

Prior Art Documents

Patent Documents

[0005]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0006] In the expansion device disclosed in Patent Document 2, a frame is attached in a state where the tape is expanded, and the tape is cut along the frame. However, the tape may peel off from the frame. If the tape peels off from the frame, there is a risk that adjacent chips may come into contact with each other and be damaged, and handling becomes impossible.

[0007] An object of the present invention is to provide an expand method and an expand device capable of suppressing peeling of a tape from a frame.

Means for Solving the Problems

[0008] In order to solve the above-described problems and achieve the object, an expand method of the present invention is an expand method for expanding a tape to which a work is attached, and includes an expand step of sandwiching the tape with sandwiching members facing each other across the work and separating the sandwiching members from each other to expand the tape, and after performing the expand step, a frame having an opening with a diameter capable of accommodating the work therein is attached to the tape, the work is accommodated in the opening, and the tape is cut along the frame to form a frame unit including the work, the tape to which the work is attached, and the frame to which the tape is attached. A frame mounting step, and after performing the expand step and before performing the frame mounting step, in a state where the tape is sandwiched and expanded by the sandwiching members, a region of the tape corresponding to the inside of the opening of the frame to be attached in the frame mounting step is sucked and held to maintain expansion of the region. A suction holding step, and after performing the suction holding step and before performing the frame mounting step, an outer expansion release step of moving the sandwiching members closer to each other to release the expansion outside the region while maintaining the expansion of the region of the tape. It is characterized by comprising.

[0009] In the expand method, in the suction holding step, the tape may be sucked and held by a suction holding unit having a holding surface for sucking and holding the entire surface of the region of the tape corresponding to the inside of the opening.

[0010] In the expand method, in the suction holding step, the tape may be sucked and held by a suction holding unit having an annular suction portion for sucking a region of the tape corresponding to the inner periphery of the opening.

[0011] In the above expansion method, after performing the suction holding step and the outer expansion release step, before performing the frame mounting step, a positioning step of aligning the opening of the frame with the region may be further provided.

[0012] The expansion device of the present invention is an expansion device that expands a tape to which a workpiece is attached, and includes a pair of clamping units facing each other that clamp the tape with the workpiece sandwiched therebetween, a moving unit that moves the clamping units in a direction approaching and separating from each other, a holding unit that holds a frame having an opening with a diameter capable of accommodating the workpiece attached to the tape clamped and expanded by the clamping units, a holding unit moving mechanism that moves the holding unit and attaches the frame held by the holding unit to the tape, a suction holding unit that sucks and holds the tape in a region corresponding to the inside of the opening of the frame, and a cutting unit that cuts the tape along the frame attached to the tape and held by the holding unit. With the pair of clamping units clamping the tape with the workpiece attached thereto, the moving unit moves the clamping units in a direction away from each other to expand the tape. With the tape in the expanded state, the suction holding unit sucks and holds the tape in the region. After the suction holding unit sucks and holds the tape in the region, the moving unit moves the clamping units in a direction closer to each other to release the expansion of the outer peripheral side of the region of the tape. After the expansion of the outer peripheral side of the region of the tape is released, the holding unit moving mechanism attaches the frame held by the holding unit to the outer peripheral side of the region of the tape, and the cutting unit cuts the tape along the frame to form a frame unit composed of the workpiece, the tape with the workpiece attached thereto, and the frame with the tape attached thereto. It is characterized by this.

Effect of the Invention

[0013] The present invention has the effect of being able to suppress the tape from peeling off from the frame.

Brief Description of the Drawings

[0014]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

Figure 9

Figure 10

Figure 11

Figure 12

Figure 13

Figure 14

[0015] Embodiments for implementing the present invention will be described in detail with reference to the drawings. The present invention is not limited by the content described in the following embodiments. Further, the constituent elements described below include those that can be easily assumed by those skilled in the art and substantially identical ones. Furthermore, the configurations described below can be combined as appropriate. Also, various omissions, substitutions, or changes in the configuration can be made without departing from the gist of the present invention.

[0016] [Embodiment 1] The expand device according to Embodiment 1 of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view showing a configuration example of the expand device according to Embodiment 1. FIG. 2 is a perspective view showing a work to be processed by the expand device shown in FIG. 1. FIG. 3 is a perspective view showing the work and a tape or the like shown in FIG. 2. FIG. 4 is a perspective view schematically showing a suction holding unit or the like of the expand device shown in FIG. 1.

[0017] The expand device 1 shown in FIG. 1 according to Embodiment 1 is a device that expands (also referred to as expands) a tape 201 (shown in FIG. 3) to which a work 200 shown in FIG. 2 is attached and divides the work 200 into individual chips 220. The work 200 to be processed by the expand device 1 according to Embodiment 1 is, as shown in FIG. 2, a wafer such as a disk-shaped semiconductor wafer or an optical device wafer having a substrate 203 made of silicon, sapphire, gallium arsenide, or SiC (silicon carbide).

[0018] In Embodiment 1, as shown in FIG. 2, devices 202 are formed in respective regions of the surface 204 of the substrate 203 partitioned by a plurality of planned division lines 205 intersecting each other. In the workpiece 200, a modification layer 206 (shown by a broken line in FIG. 2), which is a starting point for division, is formed inside the substrate 203 along the planned division line 205. The modification layer 206 means a region in which the density, refractive index, mechanical strength, and other physical properties are different from those of the surroundings, and examples thereof include a melting treatment region, a crack region, an insulation breakdown region, a refractive index change region, and a region in which these regions are mixed. In Embodiment 1, the modification layer 206 has a lower mechanical strength than other parts of the substrate 203.

[0019] Also, in Embodiment 1, as shown in FIG. 3, a tape 201 is adhered to the back surface 207 side of the substrate 203, and the tape 201 is expanded by the expansion device 1 and divided into individual chips 220 along the modification layer 206. The chip 220 includes a part of the substrate 203 and a device 202 formed on the surface 204 of the substrate 203.

[0020] The tape 201 has stretchability. For example, while the heated synthetic resin is stretched along the first direction 211, it is stretched in the second direction 212 orthogonal to the first direction 211 and formed into a strip shape. The tape 201 includes a base material layer made of a stretchable synthetic resin and an adhesive layer laminated on the base material layer and made of a synthetic resin having stretchability and adhesiveness. In Embodiment 1, the first direction 211 is the so-called machine direction (MD), and the second direction 212 is the so-called transverse direction (TD). Hereinafter, the surface of the adhesive layer is referred to as an adhesive surface 201-1, and the surface of the base material layer is referred to as a base material surface 201-2.

[0021] The expand device 1 according to Embodiment 1 expands the tape 201 adhered to the work 200 in the first direction 211 and the second direction 212, divides the work 200 into individual chips 220, and forms a gap between the chips 220 adjacent to each other. Further, after the expand device 1 expands the tape 201 to form a gap between the chips 220 adjacent to each other, a frame 209 having an inner diameter larger than that of the work 200 is adhered to the tape 201, the work 200 is supported within the opening 210 of the frame 209, and the tape 201 is cut between the inner edge and the outer edge of the frame 209. The expand device 1 forms a frame unit 213 composed of the work 200, the tape 201 to which the work 200 is adhered, and the frame 209 to which the tape 201 is adhered. Note that since the inner diameter of the frame 209 is larger than that of the work 200, the frame 209 has an opening 210 with a diameter that can accommodate the work 200 inside.

[0022] As shown in FIG. 1, the expand device 1 includes a flat fixed base 2, a suction holding unit 10 provided at the center of the fixed base 2, a work transfer unit (not shown), a tape sandwiching unit 30, a moving unit 40, a holding unit 50, a holding unit moving mechanism 60, and a control unit 100.

[0023] The suction holding unit 10 is formed in a disk shape, and the holding surface 11 contacts the tape 201. As shown in FIG. 4, the suction holding unit 10 is provided so as to be movable in the vertical direction by a lifting mechanism 20 and is rotatable about an axis parallel to the vertical direction and passing through the center of the holding surface 11 by a rotation mechanism 21. In Embodiment 1, the lifting mechanism 20 supports the suction holding unit 10 at the upper end of a telescopic rod 22 that can be telescoped along the vertical direction. In Embodiment 1, the rotation mechanism 21 is provided on the fixed base 2 and rotates a disk-shaped member 23 that supports the lifting mechanism 20 about the axis. The rotation mechanism 21 rotates the disk-shaped member 23 about the axis, thereby rotating the suction holding unit 10 about the axis together with the lifting mechanism 20. Note that in Embodiment 1, the disk-shaped member 23 is arranged at a position coaxial with the suction holding unit 10.

[0024] The suction holding unit 10 includes a disc-shaped holding member 12 made of a porous material such as porous ceramics, and a frame body 13 provided with a concave portion 14 for fitting the holding member 12 on the upper surface and made of a non-porous material such as stainless steel. The upper surface of the holding member 12 is a holding surface 11 for holding the tape 201, and is formed flat along the horizontal direction.

[0025] The outer diameter of the holding member 12, that is, the holding surface 11, is larger than the outer diameter of the workpiece 200, and is equal to or less than the inner diameter of the frame 209 and smaller than the outer diameter of the frame 209. In the first embodiment, the outer diameter of the holding member 12, that is, the holding surface 11, is equal to the inner diameter of the frame 209. The holding surface 11 contacts the region 214 (shown in FIG. 8) of the tape 201 corresponding to the inside of the opening 210 of the frame 209. The region 214 of the tape 201 corresponding to the inside of the opening 210 of the frame 209 is a region surrounded by the opening 210 of the frame 209 to which the tape 201 is adhered. The planar shape of the concave portion 14 of the frame body 13 is a circle with an inner diameter equal to the outer diameter of the holding member 12.

[0026] When the suction holding unit 10 is lifted by the lifting mechanism 20, the holding surface 11 is positioned on the same plane as the base material surface 201-2 of the tape 201 clamped by the tape clamping unit 30. When the suction holding unit 10 is lowered by the lifting mechanism 20, the holding surface 11 is positioned below the base material surface 201-2 of the tape 201 clamped by the tape clamping unit 30.

[0027] The suction holding unit 10 has a holding member 12 provided in a recess 14 of a frame body 13 connected to a suction source 17 by a suction passage 16 provided with an on-off valve 15. When the on-off valve 15 is opened and suctioned by the suction source 17, the suction holding unit 10 suction-holds the region 214 of the tape 201 corresponding to the inside of the opening 210 of the frame 209, that is, the tape 201 in the region 214 corresponding to the inside of the opening 210 of the frame 209 on the holding surface 11. In Embodiment 1, since the holding member 12 of the suction holding unit 10 is formed in a disc shape, the entire surface of the region 214 of the tape 201 corresponding to the inside of the opening 210 of the frame 209 is suction-held on the holding surface 11.

[0028] The work transfer unit is disposed above the tape clamping unit 30 and holds the work 200 on its lower surface. The work transfer unit is provided so as to be vertically movable by a lifting unit and horizontally movable by a horizontal movement unit. The work transfer unit positions the work 200 held on its lower surface by the horizontal movement unit at a position coaxial with the suction holding unit 10 and facing the suction holding unit 10 in the vertical direction. Further, the work transfer unit adheres the work 200 to the tape 201 by being lowered by the lifting unit.

[0029] The tape clamping unit 30 holds the tape 201. The tape clamping unit 30 includes a pair of first clamping units 31-1 and a pair of second clamping units 31-2. The first clamping unit 31-1 and the second clamping unit 31-2 are clamping units that clamp the tape 201 to which the work 200 is adhered on the outer periphery of the work 200. The first clamping unit 31-1 and the second clamping unit 31-2 respectively clamp and hold positions on the outer peripheral side of the work 200 of the tape 201.

[0030] Note that the same reference numerals are given to the same parts of the first clamping unit 31-1 and the second clamping unit 31-2 for description. The first clamping unit 31-1 and the second clamping unit 31-2 include a columnar moving base 32 provided on a fixed base 2.

[0031] A pair of first clamping units 31-1 each include a pair of first clamping members 33-1. The first clamping member 33-1 of one first clamping unit 31-1 and the first clamping member 33-1 of the other first clamping unit 31-1 face each other with the workpiece 200 adhered to the tape 201 that contacts the holding surface 11 of the suction holding unit 10 therebetween. In Embodiment 1, the first clamping member 33-1 of one first clamping unit 31-1 and the first clamping member 33-1 of the other first clamping unit 31-1 face each other along the first direction 211. The pair of first clamping members 33-1 of each first clamping unit 31-1 are formed in a straight line parallel to the second direction 212 and are arranged at intervals in the vertical direction.

[0032] One of the pair of first clamping members 33-1 of each first clamping unit 31-1 is supported at the tip of a support arm 34 extending horizontally from the upper end of the moving base 32 of each first clamping unit 31-1, and the other is supported at the tip of a support arm 34 extending horizontally from the central portion of the moving base 32 of each first clamping unit 31-1. The pair of first clamping members 33-1 of each first clamping unit 31-1 rotatably support a plurality of cylindrical rollers 35 around their axes on the corresponding surfaces. Note that the axis of the roller 35 of the first clamping unit 31-1 is parallel to the first direction 211, and the rollers 35 are arranged at equal intervals in the second direction 212.

[0033] Also, each of the pair of first clamping units 31-1 includes a member moving unit 36. The member moving unit 36 is provided on the moving base 32 of each first clamping unit 31-1.

[0034] The member moving unit 36 includes a motor 37 provided on the moving base 32 of each first clamping unit 31-1, a ball screw 38 rotated by the motor 37 around an axis parallel to the vertical direction, and a nut 39 screwed onto the ball screw 38 and connected to the support arm 34 supporting the first clamping member 33-1 at its tip.

[0035] The member moving unit 36 moves the nut 39, the support arm 34, and the first clamping member 33-1 closer to or away from each other along the vertical direction by rotating the ball screw 38 around its axis by the motor 37. Hereinafter, the direction of approaching or separating from each other will be referred to as the approaching / separating direction. Further, the member moving unit 36 can also move the pair of first clamping members 33-1 in the same direction as each other in the vertical direction by rotating the ball screw 38 around its axis by the motor 37.

[0036] The pair of second clamping units 31-2 each include a pair of second clamping members 33-2. The second clamping members 33-2 of the pair of second clamping units 31-2 face each other with the workpiece 200 sandwiched therebetween, which is adhered to the tape 201 placed on the holding surface 11 of the suction holding unit 10. In Embodiment 1, the second clamping members 33-2 of the pair of second clamping units 31-2 face each other along the second direction 212. The pair of second clamping members 33-2 of each second clamping unit 31-2 are formed in a straight line parallel to the first direction 211 and are arranged at intervals in the vertical direction.

[0037] One of the pair of second clamping members 33-2 of each second clamping unit 31-2 is supported at the tip of the support arm 34 extending horizontally from the upper end of the moving base 32 of each second clamping unit 31-2, and the other is supported at the tip of the support arm 34 extending horizontally from the central portion of the moving base 32 of each second clamping unit 31-2. The pair of second clamping members 33-2 of each second clamping unit 31-2 rotatably support a plurality of columnar rollers 35 around their axes on the corresponding surfaces. Note that in the second clamping unit 31-2, the axes of the rollers 35 are parallel to the second direction 212, and the rollers 35 are arranged at equal intervals in the first direction 211.

[0038] Further, the pair of second clamping units 31-2 each include a member moving unit 36. The member moving unit 36 is provided on the moving base 32 of each second clamping unit 31-2.

[0039] The member moving unit 36 includes a motor 37 provided on the moving base 32 of each of the second clamping units 31-2, a ball screw 38 rotated by the motor 37 about an axis parallel to the vertical direction, and a nut 39 screwed onto the ball screw 38 and connected to a support arm 34 that supports the second clamping member 33-2 at its tip.

[0040] When the motor 37 rotates the ball screw 38 about its axis, the member moving unit 36 moves the nut 39, the support arm 34, and the second clamping member 33-2 in the approaching and separating directions along the vertical direction. Also, when the motor 37 rotates the ball screw 38 about its axis, the member moving unit 36 can move the pair of second clamping members 33-2 in the same direction as each other in the vertical direction.

[0041] The tape clamping unit 30 clamps the tape 201 between the clamping members 33-1 and 33-2 by moving the clamping members 33-1 and 33-2 of the first clamping unit 31-1 and the second clamping unit 31-2 in the direction of approaching each other in the vertical direction, and releases the clamping of the tape 201 between the clamping members 33-1 and 33-2 by moving the clamping members 33-1 and 33-2 in the direction of separating from each other in the vertical direction.

[0042] The moving unit 40 moves the pair of first clamping units 31-1 in the approaching and separating directions from each other and moves the pair of second clamping units 31-2 in the approaching and separating directions from each other. The moving unit 40 includes a pair of first direction moving units 41-1 and a pair of second direction moving units 41-2.

[0043] Each of the first direction moving units 41-1 moves the moving base 32 of the first clamping unit 31-1 along the first direction 211, thereby moving the first clamping members 33-1 of the pair of first clamping units 31-1 in the approaching and separating directions along the first direction 211.

[0044] The second-direction moving units 41-2 each move the moving base 32 of the second clamping unit 31-2 along the second direction 212, thereby moving the second clamping members 33-2 of the pair of second clamping units 31-2 in the approaching and separating direction along the second direction 212.

[0045] Since the first-direction moving unit 41-1 and the second-direction moving unit 41-2 are substantially identical in configuration, the same reference numerals will be used for the same parts in the description.

[0046] The first-direction moving unit 41-1 and the second-direction moving unit 41-2 include a motor 42 provided on the fixed base 2, and a ball screw 43 that is rotated around its axis by the motor 42 to move the moving bases 32 of the respective clamping units 31-1, 31-2 in the first direction 211 or the second direction 212.

[0047] The first-direction moving unit 41-1 and the second-direction moving unit 41-2 move the respective clamping units 31-1, 31-2 away from each other in the first direction 211 or the second direction 212, thereby expanding the tape 201 clamped by the clamping units 51-1, 51-2, and move the respective clamping units 31-1, 31-2 closer to each other in the first direction 211 or the second direction 212, thereby releasing the expansion of the tape 201 clamped by the clamping units 51-1, 51-2.

[0048] The holding unit 50 holds the frame 209. In Embodiment 1, the holding unit 50 includes a plurality of suction pads 51 that suction-hold the upper surface of the frame 209 on the lower surface.

[0049] The holding unit moving mechanism 60 moves the holding unit 50 to attach the frame 209 suction-held by the holding unit 50 to the tape 201. In Embodiment 1, the holding unit moving mechanism 60 moves the holding unit 50 in the vertical direction and also in the horizontal direction.

[0050] The holding unit moving mechanism 60 aligns the opening 210 of the frame 209 held by the holding unit 50 with the region corresponding to the inside of the opening 210 of the frame 209 of the tape 201 held by the tape clamping unit 30. In the first embodiment, the holding unit moving mechanism 60 positions the holding unit 50 above the suction holding unit 10 and at a position where the opening 210 of the frame 209 held by the holding unit 50 is coaxial with the suction holding unit 10, thereby aligning the opening 210 of the frame 209 with the region of the tape 201 corresponding to the inside of the opening 210 of the frame 209.

[0051] Further, the holding unit moving mechanism 60 lowers the holding unit 50 from the above-described aligned position, thereby attaching the frame 209 to the tape 201 clamped and expanded by the tape clamping unit 30. For this purpose, the holding unit 50 holds the frame 209 attached to the tape 201 clamped and expanded by the clamping units 31-1 and 31-2.

[0052] Also, as shown in FIG. 4, the expanding device 1 includes a cutting unit 70. The cutting unit 70 cuts the tape 201 along the frame 209 held by the holding unit 50 and attached to the tape 201 by cutting between the inner edge and the outer edge of the frame 209 of the tape 201 to which the frame 209 is attached.

[0053] As shown in Fig. 2, the cutting unit 70 includes a roller lifting mechanism 71, a support member 72, a roller 73, a cutter lifting mechanism 74, and a cutter 75. The roller lifting mechanism 71 is provided on the outer edge of the disk-shaped member 23 and supports the support member 72 at the upper end of a telescopic rod 76 that can expand and contract along the vertical direction. The roller lifting mechanism 71 moves the roller 73 and the cutter 75 in the vertical direction through the support member 72 by expanding and contracting the telescopic rod 76. In Embodiment 1, the roller lifting mechanism 71 includes two telescopic rods 76 that are spaced apart in the circumferential direction of the disk-shaped member 23 and parallel to each other. The support member 72 has both longitudinal ends supported at the upper ends of the telescopic rods 76 of the roller lifting mechanism 71.

[0054] The roller 73 is formed in a cylindrical shape and is rotatably supported about an axis at one longitudinal end of the support member 72. The axis, which is the rotation center of the roller 73, is parallel to the radial direction of the disk-shaped member 23 and the suction holding unit 10. When the upper end of the outer peripheral surface of the roller 73 is raised by the roller lifting mechanism 71, it is located on the same plane as the holding surface 11 of the suction holding unit 10 that holds the tape 201 clamped by the tape clamping unit 30. When the upper end of the outer peripheral surface of the roller 73 is lowered by the roller lifting mechanism 71, it is located below the holding surface 11 of the suction holding unit 10 that holds the tape 201 clamped by the tape clamping unit 30.

[0055] The cutter lifting mechanism 74 is provided on the other end of the support member 72 and supports the cutter 75 at the upper end of a telescopic rod (not shown) that can expand and contract along the vertical direction. The cutter 75 is formed in a disk shape with a cutting edge 77 for cutting into the tape 201 formed on its outer edge, and is rotatably supported about an axis at the upper end of the telescopic rod of the cutter lifting mechanism 74.

[0056] The axis, which is the center of rotation of the cutter 75, is parallel to the radial direction of the disk-shaped member 23 and the suction holding unit 10. When the upper end of the cutting edge 77 of the cutter 75 is raised by the cutter lifting mechanism 74, it is positioned above the holding surface 11 of the suction holding unit 10 that suction-holds the tape 201 held by the tape clamping unit 30. When the upper end of the cutting edge 77 of the cutter 75 is lowered by the cutter lifting mechanism 74, it is positioned below the holding surface 11 of the suction holding unit 10 that suction-holds the tape 201 held by the tape clamping unit 30. Also, the upper end of the cutting edge 77 of the cutter 75 is positioned between the inner edge and the outer edge of the frame 209 attached to the tape 201 by the holding unit moving mechanism 60.

[0057] The cutting unit 70 suction-holds the tape 201 held by the tape clamping unit 30 on the holding surface 11 of the suction holding unit 10. When the frame 209 is attached to the tape 201 held on the holding surface 11 of the suction holding unit 10 by the holding unit moving mechanism 60, the cutter lifting mechanism 74 lowers the cutter 75 while the roller lifting mechanism 71 raises the roller 73 and the like, and the roller 73 is rotated by the rotation mechanism 21 to sandwich the tape 201 between the roller 73 and the frame 209, and attach the frame 209 to the tape 201. After the cutting unit 70 sandwiches the tape 201 between the roller 73 and the frame 209 and attaches the frame 209 to the tape 201, the cutter lifting mechanism 74 raises the cutter 75, and the cutter 75 is rotated by the rotation mechanism 21 so that the upper end of the cutting edge 77 cuts between the inner edge and the outer edge of the frame 209 of the tape 201, and cuts the tape 201 with the frame 209 attached along the frame 209.

[0058] The control unit 100 controls each component of the expansion device 1 to cause the expansion device 1 to perform operations such as the operation of attaching the workpiece 200 to the tape 201, the expansion operation of the tape 201, and the operation of attaching the frame 209 to the tape 201. The control unit 100 is a computer having an arithmetic processing unit with a microprocessor such as a CPU (central processing unit), a storage device having a memory such as a ROM (read only memory) or a RAM (random access memory), and an input / output interface device. The arithmetic processing unit of the control unit 100 performs arithmetic processing according to a computer program stored in the storage device, and outputs a control signal for controlling the expansion device 1 to each component of the expansion device 1 via the input / output interface device.

[0059] Further, the control unit 100 is connected to a display unit composed of a liquid crystal display device or the like that displays various information, images, etc., and an input unit used when an operator registers processing content information or the like. The input unit is composed of at least one of a touch panel provided on the display unit and an external input device such as a keyboard.

[0060] In the present invention, in addition to the above-described configuration, the expansion device 1 may include a sheet clamping unit that holds the tape 201 wound around a roll, and a feeding unit that feeds the tape 201 from the sheet clamping unit with the adhesive surface 201-1 facing upward to the tape clamping unit 30.

[0061] Next, this specification will describe the expansion method according to Embodiment 1 with reference to the drawings. FIG. 5 is a flowchart showing the flow of the expansion method according to Embodiment 1. The expansion method according to Embodiment 1 is a method of expanding the tape 201 to which the workpiece 200 is attached.

[0062] The expansion method according to Embodiment 1 is also the expansion operation of the tape 201 of the expansion device 1 described above. When the expansion device 1 receives the processing content information input by an operator operating the input unit or the like and receives the start instruction of the processing operation input by the operator operating the input unit or the like, the control unit 100 controls each component of the expansion device 1 to start the expansion operation, that is, the expansion method. As shown in FIG. 5, the expansion method includes an expansion step 1001, a suction holding step 1002, an outer expansion release step 1003, a positioning step 1004, and a frame mounting step 1005.

[0063] (Expansion Step) FIG. 6 is a side view schematically showing a partially cross-sectional view of the state where the tape clamping unit clamps the tape in the expansion step of the expansion method shown in FIG. 5. FIG. 7 is a side view schematically showing a partially cross-sectional view of the state where the tape is expanded in the expansion step of the expansion method shown in FIG. 5. The expansion step 1001 is a step of expanding the tape 201 by sandwiching the tape 201 with the opposing clamping members 33-1 and 33-2 sandwiching the workpiece 200 and separating the clamping members 33-1 and 33-2 from each other.

[0064] In the expansion step 1001, the expansion device 1 lowers the suction holding unit 10 by the elevating mechanism 20, lowers the roller 73 and the cutter 75 by the roller elevating mechanism 71, lowers the cutter 75 by the cutter elevating mechanism 74, and moves the pair of first clamping units 31-1 by the moving units 41-1 and 41-2 to bring the first clamping members 33-1 closer to each other and the pair of second clamping units 31-2 to bring the second clamping members 33-2 closer to each other. In the expansion step 1001, as shown in FIG. 6, the expansion device 1 clamps the tape 201 between the first clamping members 33-1 of the pair of first clamping units 31-1 and between the second clamping members 33-2 of the pair of second clamping units 31-2.

[0065] In the expand step 1001, the expand device 1 opposes the back surface 207 of the workpiece 200 having the reformed layer 206 held by the workpiece transfer unit to the region surrounded by the first clamping member 33-1 of the pair of first clamping units 31-1 of the tape 201 and the second clamping member 33-2 of the pair of second clamping units 31-2. Then, the workpiece transfer unit is lowered, and as shown in FIG. 6, the back surface 207 of the workpiece 200 is adhered to the center of the region 214 of the tape 201.

[0066] In the expand step 1001, in a state where the tape 201 is clamped by the first clamping member 33-1 of the pair of first clamping units 31-1 and the second clamping member 33-2 of the pair of second clamping units 31-2, the expand device 1 moves the clamping members 33-1 and 33-2 of the clamping units 51-1 and 51-2 in the first direction 211 or the second direction 212 away from each other along the directions indicated by the arrows 300 in FIG. 6. Then, the expand device 1 moves the first clamping member 33-1 of the pair of first clamping units 31-1 in a direction away from each other along the first direction 211 along with the movement of the moving base 32 of the clamping units 51-1 and 51-2, and moves the second clamping member 33-2 of the pair of second clamping units 31-2 in a direction away from each other along the second direction 212, thereby expanding the tape 201 in both the first direction 211 and the second direction 212. As a result of the expansion of the tape 201, tensile forces along both the first direction 211 and the second direction 212 act on the tape 201.

[0067] When a tensile force acts on the tape 201 with the workpiece 200 adhered thereto along both the first direction 211 and the second direction 212 in this way, since the modified layer 206 is formed along the division planned line 205 on the workpiece 200, the workpiece 200 is divided into individual chips 220 along the division planned line 205 with the modified layer 206 as a base point, and a gap is formed between adjacent chips 220. In the first embodiment, in the expand step 1001, the clamping members 33-1 and 33-2 of the clamping units 51-1 and 51-2 are separated and moved in the first direction 211 or the second direction 212 at the same time. However, in the present invention, without being limited thereto, after moving the first clamping member 33-1 of the first clamping unit 31-1 in the direction of separation along the first direction 211, the second clamping member 33-2 of the second clamping unit 31-2 may be moved in the direction of separation along the second direction 212.

[0068] (Suction holding step) FIG. 8 is a side view schematically showing a partial cross section of the suction holding step of the expand method shown in FIG. 5. The suction holding step 1002 is a step of suction holding the region 214 of the tape 201 corresponding to the inside of the opening 210 of the frame 209 to be adhered in the frame mounting step 1005 while sandwiching and expanding the tape 201 with the clamping members 33-1 and 33-2 after performing the expand step 1001 and before performing the frame mounting step 1005 to maintain the expansion of the region 214.

[0069] In the suction holding step 1002, with the tape 201 sandwiched between the first clamping members 33-1 of the pair of first clamping units 31-1 and the second clamping members 33-2 of the pair of second clamping units 31-2, the expand device 1 raises the suction holding unit 10 by the elevating mechanism 20 to bring the holding surface 11 into contact with the region 214 of the tape 201. As shown in FIG. 8, the on-off valve 15 is opened, and the region 214 of the tape 201 is suction held on the holding surface 11 by the suction source 17. Thus, in the suction holding step 1002, the expand device 1 suction holds the tape 201 with the suction holding unit 10 having the holding surface 11 that suction holds the entire surface of the region 214 of the tape 201.

[0070] (Outer expansion release step) FIG. 9 is a side view schematically showing a partial cross section of the outer expansion release step of the expansion method shown in FIG. 5. The outer expansion release step 1003 is a step of releasing the expansion of the outer region 215 on the outer peripheral side of the region 214 while maintaining the expansion of the region 214 of the tape 201 by moving the clamping members 33-1 and 33-2 closer to each other after performing the suction holding step 1002 and before performing the frame mounting step 1005.

[0071] In the outer expansion release step 1003, with the tape 201 clamped between the first clamping member 33-1 of the pair of first clamping units 31-1 and the second clamping member 33-2 of the pair of second clamping units 31-2, the expansion device 1 moves the clamping members 33-1 and 33-2 of the clamping units 51-1 and 51-2 in the direction approaching each other along the first direction 211 or the second direction 212 as shown by an arrow 301 opposite to the arrow 300 in FIG. 9.

[0072] Then, since the region 214 of the tape 201 is suction-held on the holding surface 11 of the suction holding unit 10, the region 214 of the tape 201 is fixed on the holding surface 11 and the expansion of the region 214 of the tape 201 is maintained. Also, since the outer region 215 on the outer peripheral side of the region 214 of the tape 201 is not suction-held on the holding surface 11, it shrinks as the clamping members 33-1 and 33-2 move, and the expansion is released. Further, since the workpiece 200 is adhered to the center of the region 214 of the tape 201 suction-held and fixed on the holding surface 11 of the suction holding unit 10, the interval between adjacent chips 220 is maintained. In Embodiment 1, in the outer expansion release step 1003, the expansion device 1 positions the clamping members 33-1 and 33-2 of the clamping units 51-1 and 51-2 at the positions before expanding the tape 201 in the expansion step 1001 by bringing the clamping members 33-1 and 33-2 of the clamping units 51-1 and 51-2 closer by the moving units 41-1 and 41-2.

[0073] (Positioning Step) FIG. 10 is a side view schematically showing a partial cross section of the positioning step of the expansion method shown in FIG. 5. The positioning step 1004 is a step of aligning the opening 210 of the frame 209 with the region 214 of the tape 201 after performing the suction holding step 1002 and the outer expansion release step 1003 and before performing the frame mounting step 1005.

[0074] In the positioning step 1004, the expansion device 1 moves the holding unit 50 that sucks and holds the frame 209 by the holding unit moving mechanism 60, and positions the holding unit 50 such that the inside of the opening 210 of the frame 209 is above the suction holding unit 10 and coaxial with the suction holding unit 10 as shown in FIG. 10.

[0075] (Frame Mounting Step) FIG. 11 is a side view schematically showing a partial cross section of a state where a frame is attached to a tape in the frame mounting step of the expansion method shown in FIG. 5. FIG. 12 is a side view schematically showing a partial cross section of a state where the tape to which the frame is attached is cut in the frame mounting step of the expansion method shown in FIG. 5. FIG. 13 is a side view schematically showing a partial cross section of a state where the frame and the workpiece are carried out after attaching the tape in the frame mounting step of the expansion method shown in FIG. 5.

[0076] The frame mounting step 1005 is a step of attaching the frame 209 to the tape 201 to accommodate the workpiece 200 in the opening 210, cutting the tape 201 along the frame 209, and forming the frame unit 213 after performing the expansion step 1001. In the frame mounting step 1005, the expansion device 1 lowers the holding unit 50 by the holding unit moving mechanism 60, and attaches the frame 209 held by the holding unit 50 to the inner edge of the outer region 215 of the tape 201.

[0077] In the frame mounting step 1005, the expanding device 1 raises the roller 73 by the roller lifting mechanism 71 and brings the roller 73 into contact with the outer region 215 of the tape 201. In the frame mounting step 1005, as shown in FIG. 11, the expanding device 1 rotates the disk-shaped member 23, that is, the roller 73, by the rotation mechanism 21, and sandwiches the outer region 215 of the tape 201 between the frame 209 and the roller 73 over the entire circumference, and closely adheres the frame 209 to the outer region 215 of the tape 201.

[0078] In the frame mounting step 1005, as shown in FIG. 12, while the expanding device 1 rotates the disk-shaped member 23 by the rotation mechanism 21, the expanding device 1 raises the cutter 75 by the cutter lifting mechanism 74 and makes the cutting edge 77 of the cutter 75 cut between the inner edge and the outer edge of the frame 209 in the outer region 215 of the tape 201. In the frame mounting step 1005, the expanding device 1 cuts between the inner edge and the outer edge of the frame 209 in the outer region 215 of the tape 201 along the frame 209 with the cutter 75 of the cutting unit 70 to form the frame unit 213.

[0079] In the frame mounting step 1005, the expanding device 1 stops the rotation of the disk-shaped member 23 by the rotation mechanism 21, closes the on-off valve 15, and stops the suction holding of the region 214 of the tape 201 on the holding surface 11. In the frame mounting step 1005, as shown in FIG. 13, the expanding device 1 raises the holding unit 50 that sucks and holds the frame 209 of the frame unit 213 by the holding unit moving mechanism 60, and carries out the frame unit 213 from the expanding device 1. In the frame mounting step 1005, the expanding device 1 conveys the frame unit 213 to a predetermined position and ends the expanding operation of the expanding device 1, that is, the expanding method according to Embodiment 1.

[0080] In this way, the control unit 100 of the expansion device 1 causes the pair of first clamping units 31-1 and the pair of second clamping units 31-2 to clamp the tape 201. After the workpiece 200 is attached to the tape 201 by the workpiece transfer unit, the control unit 100 of the expansion device 1 moves the clamping members 33-1 and 33-2 of the clamping units 31-1 and 31-2 in a direction away from each other by the moving unit 40. The control unit 100 of the expansion device 1 sucks and holds the area 214 of the tape 201 on the holding surface 11 of the suction holding unit 10, and then moves the clamping members 33-1 and 33-2 of the clamping units 31-1 and 31-2 in a direction approaching each other. The control unit 100 of the expansion device 1 aligns the opening 210 of the frame 209 with the area 214 of the tape 201 by the holding unit moving mechanism 60, and attaches the frame 209 to the outer area 215 of the tape 201. The control unit 100 of the expansion device 1 causes the cutting unit 70 to cut along the frame 209 between the inner edge and the outer edge of the frame 209 of the tape 201. Further, in the expansion method and the expansion device 1 according to Embodiment 1, the area 214 of the tape 201 is sucked and held on the holding surface 11 of the suction holding unit 10 to maintain the expansion, the expansion of the outer area 215 of the tape 201 to which the frame 209 is attached is released, and the frame 209 is attached to the tape 201.

[0081] When tension due to expansion is generated in the tape 201 and the frame 209 is attached to the tape 201 in a state where the tape 201 is expanded, contraction of the reaction force due to expansion occurs in the tape 201, and the tape 201 peels off from the frame 209. On the other hand, when the expansion of the tape 201 is released and the frame 209 is attached, the gap between the angled chips 220 is narrowed, and a contact risk between the chips 220 occurs.

[0082] Therefore, the expansion method and the expansion device 1 according to Embodiment 1 described above, in the expansion step 1001, with the tape 201 in an expanded state, in the suction holding step 1002, the region 214 corresponding to the inside of the opening 210 of the frame 209 of the tape 201 in the expanded state is suction-held on the holding surface 11 of the suction holding unit 10 to maintain the expansion. In the outer expansion release step 1003, the expansion of the outer region 215 of the tape 201 to which the frame 209 is adhered is released, and the frame 209 is adhered to the tape 201. Therefore, the expansion of the region 214 of the tape 201 corresponding to the inside of the opening 210 of the frame 209 can be maintained while preventing the tape 201 from peeling off from the frame 209.

[0083] For this reason, the expansion method and the expansion device 1 according to Embodiment 1 can suppress the generation of a contracting force in the outer region 215 of the tape 201 to which the frame 209 is adhered. As a result, the expansion method and the expansion device 1 according to Embodiment 1 have the effect of suppressing the peeling of the tape 201 from the frame 209.

[0084] 〔Modification Example〕 The expansion device and the expansion method according to a modification example of Embodiment 1 of the present invention will be described with reference to the drawings. FIG. 14 is a side view schematically showing a partial cross section of the suction holding step of the expansion method of the expansion device according to the modification example of Embodiment 1. In addition, in FIG. 14, the same parts as those in Embodiment 1 are denoted by the same reference numerals, and the description thereof is omitted.

[0085] As shown in FIG. 14, the expandable device 1-1 according to the modification of Embodiment 1 is the same as Embodiment 1 except that a holding member 12-1 made of a porous material such as porous ceramics of the suction holding unit 10-1 is formed in an annular shape, and the recess 14-1 of the frame body 13-1 is formed in an annular shape. The inner diameter and the outer diameter of the holding member 12-1, that is, the holding surface 11-1, are larger than the outer diameter of the workpiece 200, and the outer diameter of the holding member 12-1, that is, the holding surface 11-1, is equal to or less than the inner diameter of the frame 209 and smaller than the outer diameter of the frame 209. In the modification, the outer diameter of the holding member 12-1, that is, the holding surface 11-1, is equal to the inner diameter of the frame 209. In the modification, the holding surface 11-1 is formed in an annular shape and is an annular suction portion that sucks and holds the outer edge portion of the region 214 of the tape 201.

[0086] In the expandable device 1-1 according to the modification of Embodiment 1, in the suction holding step 1002, with the tape 201 sandwiched between the first sandwiching members 33-1 of the pair of first sandwiching units 31-1 and the second sandwiching members 33-2 of the pair of second sandwiching units 31-2, the expandable device 1-1 raises the suction holding unit 10-1 by the elevating mechanism 20 to bring the holding surface 11-1 into contact with the outer edge portion of the region 214 of the tape 201. In the expandable device 1-1 according to the modification, in the suction holding step 1002, as shown in FIG. 14, the on-off valve 15 is opened, and the outer edge portion of the region 214 of the tape 201 is sucked and held on the holding surface 11-1 by the suction source 17. Thus, in the modification, in the suction holding step 1002, the expandable device 1-1 sucks and holds the tape 201 with the suction holding unit 10-1 having the holding surface 11-1 which is an annular suction portion that sucks and holds the outer edge portion of the region 214 of the tape 201.

[0087] Note that the present invention is not limited to the above-described embodiments and the like. That is, various modifications can be made and implemented without departing from the gist of the present invention. In the present invention, laser processing grooves formed by irradiating a laser beam and performing ablation processing or cutting grooves formed by performing cutting processing may be formed in the workpiece 200 as a division starting point. Further, in the present invention, the tape 201 divided into chips 220 along the division planned line 205 may be carried into the expanders 1, 1-1, and the expanders 1, 1-1 may expand the tape 201 to increase the interval between the chips 220.

Explanation of Signs

[0088] 1, 1-1 Expander 10, 10-1 Suction holding unit 11 Holding surface 11-1 Holding surface (annular suction portion) 31-1 First clamping unit (clamping unit) 31-2 Second clamping unit (clamping unit) 33-1 First clamping member (clamping member) 33-2 Second clamping member (clamping member) 40 Moving unit 50 Holding unit 60 Holding unit moving mechanism 70 Cutting unit 200 Workpiece 201 Tape 209 Frame 210 Opening 213 Frame unit 214 Region 1001 Expand step 1002 Suction holding step 1003 Outer expansion release step 1004 Positioning step 1005 Frame mounting step

Claims

1. An expanding method for expanding a tape to which a workpiece is attached, comprising: an expanding step of sandwiching the tape with opposing sandwiching members sandwiching the workpiece and separating the sandwiching members from each other to expand the tape; after performing the expanding step, attaching a frame having an opening with a diameter capable of accommodating the workpiece to the tape, accommodating the workpiece in the opening, and cutting the tape along the frame to form a frame unit including the workpiece, the tape to which the workpiece is attached, and the frame to which the tape is attached; and a frame mounting step; after performing the expanding step and before performing the frame mounting step, a suction holding step of suction holding a region of the tape corresponding to the inside of the opening of the frame to be attached in the frame mounting step while the tape is sandwiched and expanded by the sandwiching members to maintain the expansion of the region; an expanding method comprising, after performing the suction holding step and before performing the frame mounting step, an outer expansion release step of moving the sandwiching members closer to each other to release the outer expansion of the region while maintaining the expansion of the region of the tape.

2. The expanding method according to claim 1, wherein in the suction holding step, the tape is suction held by a suction holding unit having a holding surface for suction holding the entire surface of the region of the tape corresponding to the inside of the opening.

3. The expanding method according to claim 1, wherein in the suction holding step, the tape is suction held by a suction holding unit having an annular suction portion for suctioning a region of the tape corresponding to the inner periphery of the opening.

4. The expanding method according to any one of claims 1 to 3, further comprising a positioning step of aligning the opening of the frame with the region after performing the suction holding step and the outer expansion release step and before performing the frame mounting step.

5. An expanding device for expanding a tape to which a workpiece is attached, comprising: a pair of opposing sandwiching units for sandwiching the tape with the workpiece therebetween; a moving unit for moving the sandwiching units in a direction of approaching and separating from each other; a holding unit for holding a frame having an opening with a diameter capable of accommodating the workpiece attached to the tape sandwiched and expanded by the sandwiching units; A holding unit moving mechanism that moves the holding unit and attaches the frame held by the holding unit to the tape; A suction holding unit that suction holds the tape in a region corresponding to the inside of the opening of the frame; A cutting unit that cuts the tape along the frame that is held by the holding unit and attached to the tape, and includes: With the tape to which the workpiece is attached being sandwiched by the pair of sandwiching units, the moving unit moves the sandwiching units in a direction away from each other to expand the tape; With the tape expanded, the suction holding unit suction holds the tape in the region; After the suction holding unit suction holds the tape in the region, the moving unit moves the sandwiching units in a direction approaching each other to release the expansion on the outer peripheral side of the region of the tape; After the expansion on the outer peripheral side of the region of the tape is released, the holding unit moving mechanism attaches the frame held by the holding unit to the outer peripheral side of the region of the tape, and the cutting unit cuts the tape along the frame to form a frame unit including the workpiece, the tape to which the workpiece is attached, and the frame to which the tape is attached. An expanding device.

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