Expansion device

Abstract

To provide an extension device capable of suppressing detachment of a sheet after expansion.SOLUTION: An extension device comprises: a holding unit 10 that holds a workpiece; an adhesive unit that adheres a sheet having an ultraviolet light hardening type glue layer to the workpiece; an expansion mechanism that has a nipping unit that has a pair of first nipping parts and a pair of second nipping parts which nip a nipped region of the sheet to which the workpiece is adhered and a movement unit that makes the first nipping parts and the second nipping parts move in directions in which they may approach or be separated from each other; a delivering unit that delivers the workpiece to which the sheet is adhered in the adhesive unit and held by the holding unit 10 to the extension mechanism; and an ultraviolet light radiation unit 70 that hardens the glue layer by radiating ultraviolet light toward the nipped region of the sheet before the nipped region of the sheet is nipped with the nipping units.SELECTED DRAWING: Figure 5

Description

Technical Field

[0001] The present invention relates to an expanding device.

Background Art

[0002] As a device for dividing a wafer into individual chips, for example, an expanding device that sandwiches and expands the four sides of a sheet is used (see, for example, Patent Document 1).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] The sheet to be expanded is composed of a base material and an adhesive layer 210 laminated on the base material, and is adhered to the workpiece through the adhesive layer 210. When this sheet is sandwiched by a sandwiching member and expanded, there is a problem that the adhesive of the sheet adheres to the sandwiching member and the sheet does not come off the sandwiching member after expansion.

[0005] And there is also a risk of damaging the wafer attached to the sheet when trying to remove the sheet from the sandwiching member.

[0006] An object of the present invention is to provide an expanding device capable of suppressing the difficulty of the expanded sheet from coming off.

Means for Solving the Problems

[0007] In order to solve the above-described problems and achieve the object, an expansion device of the present invention is an expansion device for expanding a sheet, and includes a holding unit having a holding portion for holding a workpiece, and a sticking roller having an ultraviolet curable adhesive layer and sticking a sheet having a size larger than that of the workpiece to the workpiece held by the holding unit. A sticking unit, a pair of first clamping portions disposed opposite to each other with the workpiece interposed therebetween in a first direction and clamping a clamped region of the sheet to which the workpiece is stuck, and a second direction intersecting the first direction. A clamping unit having a pair of second clamping portions disposed opposite to each other with the workpiece interposed therebetween and clamping a clamped region of the sheet to which the workpiece is stuck, and moving the first clamping portions in a direction approaching and separating from each other in the first direction and moving the second clamping portions in a direction approaching and separating from each other in the second direction. An expansion mechanism having a moving unit, a delivery unit for delivering the workpiece held by the holding unit and to which the sheet is stuck by the sticking unit to the expansion mechanism, and at least before the clamping unit clamps the clamped region of the sheet, the ultraviolet irradiation unit irradiating ultraviolet rays toward the clamped region of the sheet to cure the adhesive layer. When the sticking roller moves in the sticking direction for sticking the sheet to the workpiece on the outer periphery of the holding portion, the holding unit is disposed so as to sandwich the holding portion, and includes a sheet sticking portion that protrudes from the sheet-sticking surface of the workpiece held by the holding portion. After sticking the sheet to the workpiece held by the holding portion with the sticking roller and sticking it to the sheet sticking portion, the ultraviolet irradiation unit irradiates ultraviolet rays on the sandwiched region of the sheet. It is characterized by this.

Effect of the Invention

[0009] The present invention has an effect that it is possible to suppress the loosening of the expanded sheet.

Brief Description of the Drawings

[0010]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

Figure 9

Figure 10

Figure 11

DETAILED DESCRIPTION OF THE INVENTION

[0011] A mode (embodiment) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited by the content described in the following embodiments. In addition, the constituent elements described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Furthermore, the configurations described below can be combined as appropriate. Also, various omissions, substitutions, or changes in the configuration can be made without departing from the gist of the present invention.

[0012] 〔Embodiment 1〕 The expansion device according to Embodiment 1 of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view showing a configuration example of the expansion device according to Embodiment 1. FIG. 2 is a perspective view showing a workpiece to be processed by the expansion device shown in FIG. 1.

[0013] The expansion device 1 shown in FIG. 1 according to Embodiment 1 is a device that expands the sheet 201 (shown in FIG. 1) to which the workpiece 200 shown in FIG. 2 is attached and divides the workpiece 200 into individual chips 220. As shown in FIG. 2, the workpiece 200 to be processed by the expansion device 1 according to Embodiment 1 is a wafer such as a disk-shaped semiconductor wafer or an optical device wafer having a substrate 203 made of silicon, sapphire, gallium arsenide, or SiC (silicon carbide).

[0014] In Embodiment 1, as shown in FIG. 2, devices 202 are formed in respective regions of the workpiece 200 partitioned by a plurality of division planned lines 205 intersecting each other on the surface 204 of the substrate 203. In the workpiece 200, a modification layer 206 (shown by a broken line in FIG. 2), which is a division starting point, is formed inside the substrate 203 along the division planned line 205. The modification layer 206 means a region in which the density, refractive index, mechanical strength, and other physical properties are different from those of the surroundings, and examples thereof include a melting treatment region, a crack region, an insulation breakdown region, a refractive index change region, and a region in which these regions are mixed. In Embodiment 1, the modification layer 206 has a lower mechanical strength than other parts of the substrate 203.

[0015] Also, in Embodiment 1, as shown in FIG. 2, the workpiece 200 is supplied to the expansion device 1 with a protective tape 208 (shown by a broken line in FIG. 2) for protecting the device 202 attached to the surface 204 side of the substrate 203. By the expansion device 1, the sheet 201 is attached to the back surface 207 side of the substrate 203, the protective tape 208 is peeled off, the sheet 201 is expanded, and the workpiece 200 is divided into individual chips 220 along the modification layer 206. Each chip 220 includes a part of the substrate 203 and a device 202 formed on the surface 204 of the substrate 203. In Embodiment 1, the back surface 207 is a surface to which the sheet 201 of the workpiece 200 is attached.

[0016] The sheet 201 has elasticity. For example, while the heated synthetic resin is being stretched along the first direction 211, it is stretched in the second direction 212 that intersects (orthogonal in Embodiment 1) the first direction 211 and formed into a strip shape. As shown in FIG. 8, the sheet 201 includes a base material layer 209 made of an elastic synthetic resin, and an adhesive layer 210 laminated on the base material layer 209 and made of an elastic and adhesive synthetic resin.

[0017] In Embodiment 1, the first direction 211 is the so-called machine direction (MD), and the second direction 212 is the so-called transverse direction (TD). The adhesive layer 210 is composed of a synthetic resin that cures when irradiated with ultraviolet rays and has a reduced adhesive force compared to before being irradiated with ultraviolet rays. That is, in Embodiment 1, the adhesive layer 210 is an ultraviolet-curable adhesive layer 210.

[0018] The length of the sheet 201 in the first direction 211 and the width in the second direction 212 are larger than the outer diameter of the workpiece 200. That is, the sheet 201 is a sheet with a size larger than the workpiece 200. The sheet 201 is wound into a roll shape to form a sheet roll 221 with a release paper (not shown) attached to the adhesive layer 210 and is mounted on the expanding device 1. In Embodiment 1, the sheet 201 is wound into a roll shape such that the base material layer 209 is located on the outer peripheral side and the adhesive layer 210 is located on the inner periphery. The release paper protects the adhesive layer 210 of the sheet 201.

[0019] The expansion device 1 according to Embodiment 1 is a device that expands the sheet 201 attached to the workpiece 200 in the first direction 211 and the second direction 212, divides the workpiece 200 into individual chips 220, and forms a gap between the chips 220 adjacent to each other. Further, after the expansion device 1 expands the sheet 201 to form a gap between the chips 220 adjacent to each other, a frame having an inner diameter larger than that of the workpiece 200 is attached to the sheet 201, the workpiece 200 is supported within the opening of the frame, and the sheet 201 is cut between the inner edge and the outer edge of the frame. The expansion device 1 forms a frame unit including the workpiece 200, the sheet 201 to which the workpiece 200 is attached, and the frame to which the sheet 201 is attached.

[0020] As shown in FIG. 1, the expansion device 1 includes a workpiece loading unit (not shown), a holding unit 10, an attachment unit 20, a holding unit moving mechanism 29, an expansion mechanism 30, a frame loading unit 39, a delivery unit 40, a delivery unit moving mechanism 59, a peeling unit 60, and a control unit 100.

[0021] First, the holding unit 10 will be described with reference to the drawings. FIG. 3 is a perspective view showing a state in which the holding table of the holding unit of the expansion unit shown in FIG. 1 faces downward. FIG. 4 is a perspective view of the sheet attachment plate of the holding unit shown in FIG. 3 as viewed from below. FIG. 5 is an enlarged perspective view showing a portion V in FIG. 4.

[0022] As shown in FIG. 3, the holding unit 10 includes a unit body 11 movably provided in the first direction 211 along the first direction 211 at one end of the device body 2 of the expansion device 1 by a holding unit moving mechanism 29, a holding table 12 that is a holding portion for holding the workpiece 200, a holding table elevating unit 13, a holding table reversing unit 14, and a sheet attachment plate 15.

[0023] The unit body 11 is movably supported in the first direction 211 at one end of the device body 2 in the first direction 211 by a holding unit moving mechanism 29.

[0024] The holding table 12 is formed in a disk shape with an outer diameter larger than the outer diameter of the workpiece 200, and has a holding surface 16 parallel to the horizontal direction at the center. The holding surface 16 is made of a porous material such as porous ceramics and is connected to a suction source (not shown). The holding table 12 has the surface 204 of the workpiece 200 placed on the holding surface 16 via the protective tape 208 by the workpiece loading unit, and the holding surface 16 is sucked by the suction source, so that the workpiece 200 is sucked and held on the holding surface 16. In Embodiment 1, the outer diameter of the holding surface 16 is equal to the outer diameter of the workpiece 200.

[0025] The holding table inversion unit 14 rotates the holding table 12 and inverts the vertical direction with respect to the holding table 12 between a state where the holding surface 16 faces upward and a state where the holding surface 16 faces downward. The holding table lifting unit 13 is supported by the unit main body 11 and moves the holding table inversion unit 14 and the holding table 12 up and down along a direction orthogonal to the holding surface 16 (in the vertical direction in Embodiment 1).

[0026] The sheet sticking plate 15 is disposed below the holding table 12, the holding table lifting unit 13, and the holding table inversion unit 14, and is formed in a flat plate shape parallel to the horizontal direction with a circular hole 17 provided at the center. The sheet sticking plate 15 is supported by the unit main body 11, the hole 17 penetrates along the vertical direction, and the inner diameter of the hole 17 is larger than the outer diameter of the holding table 12.

[0027] The outer edge of the sheet sticking plate 15 is formed parallel to the first direction 211 and the second direction 212, and the planar shape of the outer edge is formed in a rectangular shape larger than the size of the workpiece 200. As shown in FIGS. 4 and 5, the sheet sticking plate 15 includes a pair of sheet adherend portions 18 and a pair of roller guides 19 on the lower surface.

[0028] The sheet adhering portion 18 is formed in the shape of a prism (a quadrangular prism in Embodiment 1) whose longitudinal direction is parallel to the second direction 212, and is attached to the lower surfaces of both ends of the sheet adhering plate 15 in the first direction 211. The sheet adhering portion 18 is provided over the entire length of the outer edge parallel to the second direction 212 of the sheet adhering plate 15.

[0029] The pair of sheet adhering portions 18 are positioned on the outer periphery of the holding surface 16 of the holding table 12 that has entered the hole 17 with the holding surface 16 directed downward by the holding table inversion unit 14 and lowered by the holding table lifting unit 13, and are arranged sandwiching the holding surface 16 of the holding table 12 along the first direction 211 with each other. Also, the lower surfaces of the pair of sheet adhering portions 18 are positioned below the back surface 207 of the workpiece 200 held on the holding surface 16 of the holding table 12 that has entered the hole 17 with the holding surface 16 directed downward by the holding table inversion unit 14 and lowered by the holding table lifting unit 13. The pair of sheet adhering portions 18 protrude below the back surface 207 of the workpiece 200 held on the holding surface 16 of the holding table 12 that has entered the hole 17 with the holding surface 16 directed downward by the holding table inversion unit 14 and lowered by the holding table lifting unit 13. The sheet 201 to be adhered to the back surface 207 of the workpiece 200 is adhered to the lower surface of the sheet adhering portion 18. In Embodiment 1, the sheet adhering portion 18 is made of a material that can transmit ultraviolet rays.

[0030] The roller guide 19 is formed in a rod shape whose longitudinal direction is parallel to the first direction 211, and is attached to the lower surfaces of both ends of the sheet adhering plate 15 in the second direction 212. The sheet adhering portion 18 is provided over the entire length of the outer edge parallel to the first direction 211 of the sheet adhering plate 15.

[0031] The pair of roller guides 19 are positioned on the outer periphery of the holding surface 16 of the holding table 12 that has entered the hole 17 with the holding surface 16 directed downward by the holding table inversion unit 14 and lowered by the holding table lifting unit 13, and are arranged sandwiching the holding surface 16 of the holding table 12 along the second direction 212 with each other.

[0032] The sticking unit 20 is provided at one end of the apparatus main body 2 in the first direction 211, and includes a sheet roll support portion 21 that supports a sheet roll 221, a sticking member (not shown), a sticking roller 22 that sticks a sheet 201 to the back surface 207 of a workpiece 200 held on the holding surface 16 of the holding table 12 of the holding unit 10, a release paper winding roller (not shown), a plurality of tension applying rollers, and a sheet cutting unit 23.

[0033] The sheet roll support portion 21 positions the axis of the sheet roll 221 parallel to the second direction 212 and rotatably supports the sheet roll 221 around the axis. The sheet roll support portion 21 feeds out the sheet 201 from the sheet roll 221 toward the sticking member.

[0034] The sticking member is formed in a rod shape with its longitudinal direction parallel to the second direction 212 and is provided so as to be movable up and down by a lifting unit (not shown). When the sticking member moves up, it sandwiches the sheet 201 with the release paper peeled off between one of the sheet sticking portions 18 and the other end of the first direction 211 among the pair of sheet sticking portions 18, and sticks the sheet 201 to the sheet sticking portion 18.

[0035] The sticking roller 22 has its axis arranged parallel to the second direction and is rotatably supported around the axis. The sticking roller 22 has its holding surface 16 directed downward by the holding table inversion unit 14 and lowered by the holding table lifting unit 13, and presses the sheet 201 against the workpiece 200 held on the holding surface 16 of the holding table 12 that has entered the hole 17, thereby sticking the sheet 201 to the back surface 207 of the workpiece 200.

[0036] Also, the sticking unit 20 includes a peel plate (not shown) that peels the release paper from the sheet 20 of the sheet roll 221 between the sheet roll support portion 21 and the sticking roller 22.

[0037] The peeling paper winding roller has its axis arranged parallel to the second direction and is rotatably supported around the axis. The peeling paper winding roller winds up the peeling paper peeled off from the sheet 201 on its outer peripheral surface. The tension applying roller is arranged between the sheet roll support portion 21 and the adhering member, and between the adhering roller 22 and the peeling paper winding roller, and applies tension to the sheet 201 and the peeling paper peeled off from the sheet 201.

[0038] The sheet cutting unit 23 cuts the sheet 201 adhered to the back surfaces of the pair of sheet adherend portions 18 and the workpiece 200 and separates it from the sheet roll 221 side. Note that the sheet 201 cut by the sheet cutting unit 23 and separated from the sheet roll 221 side has a rectangular planar shape larger than the planar shape, that is, the size, of the workpiece 200. As shown in FIG. 3, the sheet cutting unit 23 includes a cutter blade housing case 24, a cutter blade 25, and a cutter blade moving mechanism 26.

[0039] The cutter blade housing case 24 is formed in a box shape with an opening provided downward, and is movably supported in the second direction 212 on the outer edge on the one end side in the first direction 211 of the outer edge parallel to the second direction 212 of the sheet adhering plate 15 by the cutter blade moving mechanism 26. The cutter blade 25 is provided with a cutting blade that cuts into the sheet 201 at its lower end, and is provided so as to be movable up and down by a lifting unit (not shown) over a position where it is housed in the cutter blade housing case 24 and a position where the cutting blade protrudes below the cutter blade housing case 24 and cuts into the sheet 201.

[0040] The cutter blade moving mechanism 26 is provided on the outer edge on the one end side in the first direction 211 of the outer edge parallel to the second direction 212 of the sheet adhering plate 15, and moves the cutter blade housing case 24, that is, the cutter blade 25, in the second direction 212.

[0041] The holding unit moving mechanism 29 moves the holding unit 10 in the first direction 211 at one end of the apparatus main body 2 between a position where the holding table 12 and the sheet sticking plate 15 are located above the sheet roll support portion 21, the sticking member, and the sticking roller 22 of the sticking unit 20 and a position where they are retracted above the sheet roll support portion 21, the sticking member, and the sticking roller 22.

[0042] The expanding mechanism 30 expands the sheet 201 stuck to the back surface 207 of the workpiece 200 and cut from the sheet roll 221 side. The expanding mechanism 30 is provided at the other end of the apparatus main body 2 in the first direction 211. As shown in FIG. 1, the expanding mechanism 30 includes a clamping unit 31 and a moving unit 37.

[0043] The clamping unit 31 holds the sheet 201 cut and separated from the sheet roll 221 side and stuck to the back surface 207 of the workpiece 200. The clamping unit 31 has a pair of first clamping portions 31-1 and a pair of second clamping portions 31-2. The first clamping portion 31-1 and the second clamping portion 31-2 clamp the sheet 201 to which the workpiece 200 is stuck on the outer periphery of the workpiece 200. The first clamping portion 31-1 and the second clamping portion 31-2 respectively clamp and hold the clamped region 222 (shown in FIGS. 7 and 8) on the outer peripheral side of the sheet 201 with respect to the workpiece 200.

[0044] Note that the clamped region 222 of the sheet 201 is a region extending along the outer edge of the rectangular sheet 201 cut and separated from the sheet roll 221 side. The clamped region 222 of the sheet 201 faces the pair of sheet sticking portions 18, the pair of roller guides 19 in the thickness direction, and is also a region stuck to the pair of sheet sticking portions 18.

[0045] Note that the same reference numerals are given to the same portions of the first clamping portion 31-1 and the second clamping portion 31-2 for description. The first clamping portion 31-1 and the second clamping portion 31-2 include a columnar moving base 32 provided on the apparatus main body 2.

[0046] A pair of first clamping parts 31-1 each include a pair of first clamping members 33-1. The first clamping member 33-1 of one first clamping part 31-1 and the first clamping member 33-1 of the other first clamping part 31-1 face each other with the workpiece 200 adhered to the sheet 201 in the first direction 211 therebetween. In Embodiment 1, the first clamping member 33-1 of one first clamping part 31-1 and the first clamping member 33-1 of the other first clamping part 31-1 are arranged to face each other along the first direction 211. The pair of first clamping members 33-1 of each first clamping part 31-1 are formed in a straight line parallel to the second direction 212 and are arranged at intervals in the vertical direction.

[0047] One of the pair of first clamping members 33-1 of each first clamping part 31-1 is supported at the tip of a support arm 34 extending horizontally from the upper end of the moving base 32 of each first clamping part 31-1, and the other is supported at the tip of a support arm 34 extending horizontally from the central part of the moving base 32 of each first clamping part 31-1. The pair of first clamping members 33-1 of each first clamping part 31-1 rotatably support a plurality of cylindrical rollers around their axes on the corresponding surfaces. Note that the axis of the roller of the first clamping part 31-1 is parallel to the first direction 211, and the rollers are arranged at equal intervals in the second direction 212.

[0048] Also, each of the pair of first clamping parts 31-1 includes a member moving unit 36. The member moving unit 36 is provided on the moving base 32 of each first clamping part 31-1.

[0049] The member moving unit 36 moves the first clamping members 33-1 closer to or away from each other along the vertical direction. Hereinafter, the direction of approaching or separating from each other will be referred to as the approaching / separating direction. Also, the member moving unit 36 can move the pair of first clamping members 33-1 in the same direction vertically with respect to each other.

[0050] The pair of second clamping parts 31-2 each include a pair of second clamping members 33-2. The second clamping members 33-2 of the pair of second clamping parts 31-2 are arranged opposite to each other with the workpiece 200 adhered to the sheet 201 in the second direction 212 therebetween. In Embodiment 1, the second clamping members 33-2 of the pair of second clamping parts 31-2 face each other along the second direction 212. The pair of second clamping members 33-2 of each second clamping part 31-2 are formed in a straight line parallel to the first direction 211 and are arranged at intervals in the vertical direction.

[0051] One of the pair of second clamping members 33-2 of each second clamping part 31-2 is supported at the tip of a support arm 34 extending horizontally from the upper end of the moving base 32 of each second clamping part 31-2, and the other is supported at the tip of a support arm 34 extending horizontally from the central part of the moving base 32 of each second clamping part 31-2. The pair of second clamping members 33-2 of each second clamping part 31-2 rotatably support a plurality of cylindrical rollers around their axes on the corresponding surfaces. Note that for the second clamping part 31-2, the axes of the rollers are parallel to the second direction 212, and the rollers are arranged at equal intervals in the first direction 211.

[0052] Also, each of the pair of second clamping parts 31-2 includes a member moving unit 36. The member moving unit 36 moves the second clamping member 33-2 in the approaching and separating directions along the vertical direction. Also, the member moving unit 36 can move the pair of second clamping members 33-2 in the same direction in the vertical direction.

[0053] The clamping unit 31 clamps the clamped area 222 of the sheet 201 with the workpiece 200 adhered therebetween between the clamping members 33-1, 33-2 by the member moving unit 36 moving the clamping members 33-1, 33-2 of the first clamping part 31-1 and the second clamping part 31-2 in the direction of approaching each other in the vertical direction, and releases the clamping of the clamped area 222 of the sheet 201 between the clamping members 33-1, 33-2 by moving the clamping members 33-1, 33-2 in the direction of separating from each other in the vertical direction.

[0054] The moving unit 37 moves a pair of first clamping parts 31-1 in the first direction 211 in a direction approaching and separating from each other, and moves a pair of second clamping parts 31-2 in the second direction 212 in a direction approaching and separating from each other. The moving unit 37 includes a pair of first-direction moving units 35-1 and a pair of second-direction moving units 35-2.

[0055] Each of the first-direction moving units 35-1 moves the moving base 32 of the first clamping part 31-1 along the first direction 211, thereby moving the first clamping members 33-1 of the pair of first clamping parts 31-1 in a direction approaching and separating from each other along the first direction 211.

[0056] Each of the second-direction moving units 35-2 moves the moving base 32 of the second clamping part 31-2 along the second direction 212, thereby moving the second clamping members 33-2 of the pair of second clamping parts 31-2 in a direction approaching and separating from each other along the second direction 212.

[0057] The first-direction moving units 35-1 and the second-direction moving units 35-2 move the respective clamping parts 31-1, 31-2 in a direction separating from each other in the first direction 211 or the second direction 212, thereby expanding the sheet 201 clamped by the clamping parts 31-1, 31-2, and move the respective clamping parts 31-1, 31-2 in a direction approaching each other in the first direction 211 or the second direction 212, thereby releasing the expansion of the sheet 201 clamped by the clamping parts 31-1, 31-2.

[0058] The frame loading unit 39 sucks and holds the frame and attaches the frame to the sheet 201 expanded by the clamping unit 31. The frame loading unit 39 holds the frame of the frame unit formed by cutting the sheet 201 between the inner edge and the outer edge of the frame, and carries the frame unit out of the expansion device 1.

[0059] Next, the delivery unit 40 will be described with reference to the drawings. FIG. 6 is a perspective view showing a state in which a workpiece is delivered from the holding unit of the expansion device shown in FIG. 1 to the delivery unit. The delivery unit 40 is held on the holding surface 16 of the holding table 12 of the holding unit 10, and delivers the workpiece 200 with the sheet 201 attached by the pasting unit 20 to the expansion mechanism 30.

[0060] As shown in FIGS. 1 and 6, the delivery unit 40 includes a unit body 41 movably provided along the first direction 211 by a delivery unit moving mechanism 59 in the device body 2, a holding table 42 for holding the workpiece 200, a holding table lifting unit 43, a holding table rotating unit 44, a plurality of sheet clamping portions 45, a frame pasting roller 46, and a cutting cutter 47.

[0061] The unit body 41 is movably supported in the first direction 211 between one end and the other end of the device body 2 in the first direction 211 by the delivery unit moving mechanism 59.

[0062] The holding table 42 is formed in a disk shape with an outer diameter larger than the outer diameter of the workpiece 200, and has a holding surface 48 parallel to the horizontal direction at the center. The holding surface 48 is made of a porous material such as porous ceramics and is connected to a suction source (not shown). The workpiece 200 held on the holding table 12 of the holding unit 10 is placed on the holding surface 48 via the sheet 201 attached to the workpiece 200, and the holding surface 48 is sucked by the suction source, so that the workpiece 200 is sucked and held on the holding surface 48. In the first embodiment, the outer diameter of the holding surface 48 is equal to the outer diameter of the workpiece 200, and the outer diameter of the holding table 42 is equal to the inner diameter of the hole 17 of the sheet pasting plate 15.

[0063] The holding table lifting unit 43 raises and lowers the holding table 42 along a direction orthogonal to the holding surface 48 (in Embodiment 1, the vertical direction). The holding table rotating unit 44 is supported by the unit main body 41 and supports the holding table lifting unit 13 via the disk 49. The holding table rotating unit 44 rotates the disk 49, the holding table lifting unit 13, and the holding table 12 about an axis parallel to the vertical direction.

[0064] A plurality of sheet clamp portions 45 are provided at equal intervals around the holding table 12, are attached to the workpiece 200 held by the holding table 12, and sandwich the corner portions of the sheet 201 cut and separated from the sheet roll 221 side.

[0065] The frame attaching roller 46 and the cutting cutter 47 are formed in a columnar or disk shape with their axes parallel to the radial direction of the holding surface 16 of the holding table 12. The frame attaching roller 46 and the cutting cutter 47 are raised and lowered by a lifting unit 50 installed on the disk 49. When the frame attaching roller 46 is raised by the lifting unit 50, it presses the sheet 201 toward the frame attached to the expanded sheet 201 to attach the sheet 201 to the frame. When the cutting cutter 47 is raised by the lifting unit 50, it cuts into the space between the inner edge and the outer edge of the frame of the sheet 201 that is expanded and attached to the frame to cut the sheet 201 between the inner edge and the outer edge of the frame.

[0066] The delivery unit moving mechanism 59 moves the delivery unit 40 in the first direction 211 between one end and the other end of the apparatus main body 2 over a position where the holding table 12 retreats from the sheet roll support portion 21, the attaching member, and the attaching roller 22 of the attaching unit 20 and the holding surface 16 faces downward and is located below the holding unit 10, and a position located between the holding members 33-1, 33-2 of the clamping portions 31-1, 31-2 of the clamping unit 31 of the expanding mechanism 30 in a plan view.

[0067] The peeling unit 60 is transferred from the holding unit 10 to the delivery unit 40 and peels the protective tape 208 from the surface 204 of the workpiece 200 held on the holding surface 48 of the holding table 42. The peeling unit 60 includes a unit main body 61 fixed to the central portion of the apparatus main body 2 in the first direction 211, a peeling portion 62, and a peeling movement unit 63 that moves the peeling portion 62 along the first direction 211 with respect to the unit main body 61. The unit main body 61 is disposed above the delivery unit 40 and allows the delivery unit 40 that is moved by the delivery unit movement mechanism 59 below to pass through.

[0068] The peeling portion 62 includes a peeling start point forming mechanism (not shown) that peels an end portion of the protective tape 208 from the extension mechanism 30 adhered to the workpiece 200, and a clamping mechanism that clamps the end portion of the protective tape 208 formed by the peeling start point forming mechanism and peeled from the workpiece 200. The peeling movement unit 63 moves the peeling portion 62 with respect to the unit main body 61 in the first direction 211 over a position above the holding surface 48 of the holding table 42 of the delivery unit 40 positioned at the central portion of the apparatus main body 2 in the first direction 211 and a position where it retreats from above the holding surface 48 of the holding table 42 of the delivery unit 40 positioned at the central portion of the apparatus main body 2 in the first direction 211.

[0069] The control unit 100 controls each component of the stretching device 1 to cause the stretching device 1 to perform operations such as an operation of attaching the workpiece 200 to the sheet 201, an operation of stretching the sheet 201, and an operation of attaching the frame to the sheet 201. The control unit 100 is a computer having an arithmetic processing unit having a microprocessor such as a CPU (central processing unit), a storage device having a memory such as a ROM (read only memory) or a RAM (random access memory), and an input / output interface device. The arithmetic processing unit of the control unit 100 performs arithmetic processing according to a computer program stored in the storage device and outputs a control signal for controlling the stretching device 1 to each component of the stretching device 1 via the input / output interface device.

[0070] The control unit 100 is also connected to a display unit composed of a liquid crystal display device or the like that displays various types of information, images, etc., and an input unit used when an operator registers processing content information or the like. The input unit is composed of at least one of a touch panel provided on the display unit and an external input device such as a keyboard.

[0071] Also, as shown in FIGS. 4 and 5, the expansion device 1 includes an ultraviolet irradiation unit 70. In Embodiment 1, the expansion device 1 is provided with the ultraviolet irradiation unit 70 within each sheet adhesion portion 18 of the holding unit 10 and on each roller guide 19.

[0072] The ultraviolet irradiation unit 70 is formed in a rod shape and is provided along the entire length of each sheet adhesion portion 18 and each roller guide 19 in parallel with them. The ultraviolet irradiation unit 70 faces the clamped region 222 of the sheet 201 adhered to each sheet adhesion portion 18. In Embodiment 1, the ultraviolet irradiation units 70 are arranged at intervals in the longitudinal direction of each sheet adhesion portion 18 and each roller guide 19, and each has a plurality of LEDs (Light Emitting Diodes) that irradiate ultraviolet rays.

[0073] Next, the expansion operation for expanding the sheet 201 of the expansion device 1 according to Embodiment 1 will be described with reference to the drawings. FIG. 7 is a cross-sectional view schematically showing a state in which the ultraviolet irradiation unit of the expansion device shown in FIG. 1 irradiates ultraviolet rays on the clamped region of the sheet. FIG. 8 is a side view showing in partial cross-section a state in which the sheet is positioned between the clamping members of each clamping portion of the expansion mechanism of the expansion device shown in FIG. 1.

[0074] The expansion device 1 according to Embodiment 1 receives the processing content information input by an operator, such as by operating the input unit, and when receiving the start instruction of the expansion operation input by the operator, such as by operating the input unit, the control unit 100 controls each component of the expansion device 1 to start the expansion operation. At the start of the expansion operation, the ultraviolet irradiation unit 70 is turned off.

[0075] In the expansion operation, the expansion device 1 causes the control unit 100 to retract the holding unit 10 from above the sticking member, the sticking roller 22, and the sheet roll support portion 21 of the sticking unit 20, and lower the holding surface 16 of the holding table 12 upward. In the expansion operation, the expansion device 1 causes the control unit 100 to place the surface 204 side of the workpiece 200 on the work carrier unit on the holding surface 16 of the holding table 12 of the holding unit 10 via the protective tape 208. In the expansion operation, the expansion device 1 causes the control unit 100 to suck and hold the workpiece 200 on the holding surface 16 of the holding table 12 of the holding unit 10 via the protective tape 208.

[0076] In the expansion operation, the expansion device 1 causes the control unit 100 to reverse the orientation of the holding surface 16 of the holding table 12 by the holding table inversion unit 14, and as shown in FIG. 3, turn the holding surface 16 holding the surface 204 side of the workpiece 200 on the holding table 12 of the holding unit 10 downward. In the expansion operation, the expansion device 1 causes the control unit 100 to move the holding unit 10 along the first direction 211 upward toward the sticking member, the sticking roller 22, and the sheet roll support portion 21 of the sticking unit 20 by the holding unit moving mechanism 29.

[0077] In the expansion operation, the expansion device 1 positions the holding unit 10 above the adhering member, the adhering roller 22, and the sheet roll support portion 21 of the adhering unit 20 by the control unit 100, lowers the holding table 12 of the holding unit 10, and raises the adhering member to adhere the sheet 201 to one sheet adhering portion 18. In the expansion operation, the expansion device 1 moves the holding unit 10 in the direction toward the other end of the device body 2 along the first direction 211 from above the adhering member, the adhering roller 22, and the sheet roll support portion 21 of the adhering unit 20 by the control unit 100 via the holding unit moving mechanism 29.

[0078] Then, in the expansion operation, along with the movement of the holding unit 10, the adhering roller 22 moves relative to the holding unit 10 toward the other sheet adhering portion 18, and the sheet 201 is adhered to the back surface 207 of the work 200 in order from the one sheet adhering portion 18 side due to the relative movement of the adhering roller 22. At this time, the relative movement direction of the adhering roller 22 with respect to the holding unit 10 is guided by the roller guide 19. In this way, when the expansion device 1 adheres the sheet 201 to the work 200, the adhering roller 22 moves relative to the work 200 held on the holding table 12 of the holding unit 10 along the first direction 211. The first direction 211 is also the adhering direction in which the adhering roller 22 moves relative to the work 200 held on the holding table 12 of the holding unit 10 when the sheet 201 is adhered to the work 200.

[0079] In the expansion operation, when the holding unit 10 retracts from above the adhering member, the adhering roller 22, and the sheet roll support portion 21, the expansion device 1 also adheres the sheet 201 to the other sheet adhering portion 18. In the expansion operation, after the control unit 100 lowers the cutter blade 25 to the sheet cutting unit 23, the expansion device 1 moves the cutter blade 25 in the second direction 212 to cut the sheet 201 adhered to the work 200 and the sheet adhering portion 18 with the cutter blade 25 and separate it from the sheet roll 221 side. The sheet 201 adhered to the sheet adhering portion 18 and separated from the sheet roll 221 side has a rectangular shape.

[0080] In the expansion operation, the expansion device 1 moves the delivery unit 40 in a state where the control unit 100 has lowered the holding table 42 of the delivery unit moving mechanism 59 downward along the first direction 211 toward the lower side of the holding table 12 of the holding unit 10. In the expansion operation, when the holding table 12 of the delivery unit 40 is positioned below the holding table 12 of the holding unit 10, the expansion device 1 raises the holding table 12 of the delivery unit 40 by the control unit 100.

[0081] In the expansion operation, the expansion device 1 sucks and holds the back surface 207 side of the workpiece 200 via the sheet 201 on the holding surface 48 of the holding table 42 of the delivery unit 40 by the control unit 100, stops the suction holding of the holding surface 16 of the holding table 12 of the holding unit 10, and clamps the corners of the rectangular sheet 201 attached to the workpiece 200 by the sheet clamp portion 45 as shown in FIG. 6. In the expansion operation, the expansion device 1 lights the ultraviolet irradiation unit 70 by the control unit 100, and irradiates ultraviolet rays from the ultraviolet irradiation unit 70 to the clamped region 222 of the sheet 201 as shown in FIG. 7 to cure the adhesive layer 210 of the clamped region 222 of the sheet 201 and reduce the adhesive force.

[0082] Thus, in the first embodiment, the expansion device 1 adheres the sheet 201 to the back surface 207 of the workpiece 200 held on the holding surface 16 of the holding table 12 of the holding unit 10 by the adhering roller 22, and after adhering the sheet 201 to the sheet adhered portion 18, the ultraviolet irradiation unit 70 irradiates ultraviolet rays to the clamped region 222 of the sheet 201. Further, before the expansion device 1 clamps the clamped region 222 of the sheet 201 between the clamping members 33-1 and 33-2 of each clamping portion 31-1 and 31-2 of the clamping unit 31 of at least the expansion mechanism 30, the expansion device 1 irradiates ultraviolet rays toward the clamped region 222 of the sheet 201 to cure the adhesive layer 210 and reduce the adhesive force of the adhesive layer 210.

[0083] In the expansion operation, after the control unit 100 irradiates the ultraviolet irradiation unit 70 with ultraviolet rays for a predetermined time, the expansion device 1 turns off the ultraviolet irradiation unit 70, raises the holding table 12 of the holding unit 10, and then moves the delivery unit 40 toward the center of the apparatus main body 2 in the first direction 211 by the delivery unit moving mechanism 59. In the expansion operation, when the delivery unit 40 is positioned below the peeling unit 60, the expansion device 1 stops the movement of the delivery unit 40 by the delivery unit moving mechanism 59 by the control unit 100 and positions the delivery unit 40 below the peeling unit 60.

[0084] In the expansion operation, the expansion device 1 causes the control unit 100 to peel the end portion of the protective tape 208 from the surface 204 of the workpiece 200 by the peeling start point forming mechanism of the peeling unit 60 and causes the clamping mechanism to clamp the end portion of the protective tape 208 peeled from the workpiece 200. In the expansion operation, the expansion device 1 causes the control unit 100 to move the peeling portion 62 in the first direction 211 along the holding unit 10 in a direction in which the peeling portion 62 retreats from above the delivery unit 40 by the peeling movement unit 63 of the peeling unit 60.

[0085] Then, in the expansion operation, as the peeling portion 62 moves, the protective tape 208 is peeled from the surface 204 of the workpiece 200 in order from the end portion. In the expansion operation, when the protective tape 208 is peeled from the surface 204 of the workpiece 200, the expansion device 1 causes the control unit 100 to move the delivery unit 40 along the first direction 211 of the apparatus main body 2 toward the other end by the delivery unit moving mechanism 59. Note that the protective tape 208 peeled from the surface 204 of the workpiece 200 is discarded in a waste container or the like. In the expansion operation, when the holding table 42 of the delivery unit 40 is positioned between the clamping members 33-1 and 33-2 of each clamping portion 31-1 and 31-2 of the clamping unit 31 of the expansion mechanism 30 in a plan view, the expansion device 1 stops the movement of the delivery unit 40 by the delivery unit moving mechanism 59.

[0086] Then, as shown in FIG. 8, the clamped area 222 of the sheet 201 attached to the workpiece 200 held on the holding surface 16 of the holding table 12 of the delivery unit 40 is located between the first clamping members 33-1 of the pair of first clamping parts 31-1 of the clamping unit 31 of the expansion mechanism 30 and between the second clamping members 33-2 of the pair of second clamping parts 31-2. In the expansion operation, the expansion device 1 causes the control unit 100 to move the first clamping members 33-1 of the pair of first clamping parts 31-1 closer to each other and the second clamping members 33-2 of the pair of second clamping parts 31-2 closer to each other by the member moving unit 36.

[0087] In the expansion operation, the expansion device 1 clamps the clamped area 222 of the sheet 201 between the first clamping members 33-1 of the pair of first clamping parts 31-1 and between the second clamping members 33-2 of the pair of second clamping parts 31-2. In the expansion operation, the expansion device 1 causes the control unit 100 to stop the suction holding of the holding surface 48 of the holding table 42 of the delivery unit 40, release the clamping of the corners of the sheet 201 by the sheet clamping part 45, and lower the holding table 12 of the delivery unit 40.

[0088] In the expansion operation, with the clamped area 222 of the sheet 201 clamped between the first clamping members 33-1 of the pair of first clamping parts 31-1 and between the second clamping members 33-2 of the pair of second clamping parts 31-2, the control unit 100 moves the clamping members 33-1, 33-2 of the clamping parts 31-1, 31-2 away from each other and in the same direction along the first direction 211 or the second direction 212 by the moving units 35-1, 35-2.

[0089] Then, as the moving bases 32 of the clamping parts 31-1, 31-2 move, the expansion device 1 moves the first clamping members 33-1 of the pair of first clamping parts 31-1 away from each other in the direction along the first direction 211 and moves the second clamping members 33-2 of the pair of second clamping parts 31-2 away from each other in the direction along the second direction 212 to expand the sheet 201 in both the first direction 211 and the second direction 212. As a result of the expansion of the sheet 201, tensile forces along both the first direction 211 and the second direction 212 act on the sheet 201.

[0090] When tensile forces act on the sheet 201 with the workpiece 200 adhered thereto along both the first direction 211 and the second direction 212 in this manner, since the modified layer 206 is formed along the division planned line 205 on the workpiece 200, the workpiece 200 is divided into individual chips 220 along the division planned line 205 with the modified layer 206 as a base point, and intervals are formed between adjacent chips 220. In Embodiment 1, in the expansion operation, the clamping members 33-1 and 33-2 of the clamping portions 31-1 and 31-2 are separated and moved in the direction along the first direction 211 or the second direction 212. However, in the present invention, without being limited thereto, after moving the first clamping member 33-1 of the first clamping portion 31-1 in the direction of separation along the first direction 211, the second clamping member 33-2 of the second clamping portion 31-2 may be moved in the direction of separation along the second direction 212.

[0091] In the expansion operation, the expansion device 1 causes the control unit 100 to suck and hold the frame by the frame loading unit 39, and attach the sucked and held frame between the clamped area 222 of the expanded sheet 201 and the workpiece 200 by the clamping unit 31. In the expansion operation, the expansion device 1 causes the control unit 100 to raise the holding table 42 of the delivery unit 40 again, and place the workpiece 200 on the holding surface 48 of the holding table 42 via the sheet 201.

[0092] In the expansion operation, the expansion device 1 causes the control unit 100 to raise the frame attaching roller 46 and the cutting cutter 47 to the lifting unit 50 of the delivery unit 40, and rotate the disk 49, the holding table 42, the frame attaching roller 46, and the cutting cutter 47 around the axis of the holding table 42 by the holding table rotating unit 44, attach the frame to the sheet 201, and cut the sheet 201 between the inner edge and the outer edge of the frame. In this way, the expansion device 1 forms a frame unit, and the formed frame unit is placed on the holding surface 48 of the holding table 42.

[0093] In the expansion operation, when the control unit 100 rotates the frame - attaching roller 46 and the cutting cutter 47 at least once around the axis, the expansion device 1 stops the rotation of the holding table 12, the frame - attaching roller 46, and the cutting cutter 47 by the holding - table rotation unit 44, and lowers the frame - attaching roller 46 and the cutting cutter 47 by the lifting unit 50. In the expansion operation, the expansion device 1 causes the control unit 100 to hold the frame of the frame unit by the frame - carrying unit 39, carry the frame unit out of the expansion device 1, and ends the expansion operation.

[0094] The expansion device 1 according to Embodiment 1 described above includes an ultraviolet - irradiation unit 70 that irradiates ultraviolet rays toward the clamped region 222 of the sheet 201 before each clamping member 33 - 1, 33 - 2 of each clamping unit 31 of the clamping mechanism 30 clamps the clamped region 222 of the sheet 201. For this purpose, the expansion device 1 irradiates the adhesive layer 210 in the clamped region 222 of the sheet 201 with ultraviolet rays, cures the adhesive layer 210 in the clamped region 222 to reduce the adhesive force, and then clamps the clamped region 222 of the sheet 201 with the clamping members 33 - 1, 33 - 2.

[0095] As a result, the expansion device 1 can suppress the clamped region 222 of the sheet 201 from being adhered to the clamping members 33 - 1, 33 - 2 due to the adhesive force of the adhesive layer 210, and thus has the effect of suppressing the expanded sheet 201 from being difficult to come off from the clamping members 33 - 1, 33 - 2.

[0096] 〔Modification Example 1〕 An expansion device according to Modification Example 1 of Embodiment 1 of the present invention will be described with reference to the drawings. FIG. 9 is a perspective view of the delivery unit of the expansion device according to Modification Example 1 of Embodiment 1. In FIG. 9, the same parts as those in Embodiment 1 are denoted by the same reference numerals, and the description thereof is omitted.

[0097] As shown in FIG. 9, the expansion device 1-1 according to Modification 1 of Embodiment 1 is provided with an ultraviolet irradiation unit 70 between the sheet clamp portions 45 of the delivery unit 40. The ultraviolet irradiation unit 70 faces the clamped region 222 of the sheet 201 whose corners are clamped by the sheet clamp portions 45. In the expansion operation of the expansion device 1-1 according to Modification 1 of Embodiment 1, after the control unit 100 clamps the corners of the sheet 201 with the sheet clamp portions 45, the ultraviolet irradiation unit 70 is turned on for a predetermined time to cure the adhesive layer 210 in the clamped region 222 of the sheet 201 and reduce the adhesive force.

[0098] Similar to Embodiment 1, the expansion device 1-1 according to Modification 1 of Embodiment 1 includes an ultraviolet irradiation unit 70 that irradiates ultraviolet rays toward the clamped region 222 of the sheet 201. After curing the adhesive layer 210 in the clamped region 222 of the clamped region 222 of the sheet 201 to reduce the adhesive force, the clamped region 222 of the sheet 201 is clamped by the clamping members 33-1 and 33-2. As a result, similar to Embodiment 1, the expansion device 1-1 according to Modification 1 of Embodiment 1 can achieve the effect of suppressing the expanded sheet 201 from being easily detached from the clamping members 33-1 and 33-2.

[0099] 〔Modification 2〕 The expansion device according to Modification 2 of Embodiment 1 of the present invention will be described with reference to the drawings. FIG. 10 is a perspective view of the peeling unit and the delivery unit of the expansion device according to Modification 2 of Embodiment 1. In FIG. 10, the same parts as those in Embodiment 1 are denoted by the same reference numerals, and the description thereof will be omitted.

[0100] As shown in Fig. 10, the expansion device 1-2 according to Modification Example 2 of Embodiment 1 is provided with an ultraviolet irradiation unit 70 around the peeling portion 62 of the peeling unit 60. The ultraviolet irradiation unit 70 faces the clamped area 222 of the sheet 201 whose corners are clamped by the sheet clamp portion 45 of the delivery unit 40. In the expansion operation of the expansion device 1-2 according to Modification Example 2 of Embodiment 1, before and after the peeling unit 60 peels the protective tape 208 from the surface 204 of the workpiece 200, the control unit 100 lights the ultraviolet irradiation unit 70 for a predetermined time to cure the adhesive layer 210 in the clamped area 222 of the sheet 201 and reduce the adhesive force.

[0101] Similar to Embodiment 1, the expansion device 1-2 according to Modification Example 2 of Embodiment 1 includes an ultraviolet irradiation unit 70 that irradiates ultraviolet rays toward the clamped area 222 of the sheet 201. After curing the adhesive layer 210 in the clamped area 222 of the clamped area 222 of the sheet 201 to reduce the adhesive force, the clamped area 222 of the sheet 201 is clamped by the clamping members 33-1 and 33-2. As a result, similar to Embodiment 1, the expansion device 1-2 according to Modification Example 2 of Embodiment 1 can achieve the effect of suppressing the peeled sheet 201 from being easily detached from the clamping members 33-1 and 33-2.

[0102] 〔Modification Example 3〕 The expansion device according to Modification Example 3 of Embodiment 1 of the present invention will be described with reference to the drawings. Fig. 11 is a side view showing a state in which a sheet is positioned between the clamping members of each clamping portion of the expansion mechanism of the expansion device according to Modification Example 3 of Embodiment 1 in a partial cross-section. In addition, the same reference numerals are given to the same parts as those in Embodiment 1, and the description thereof is omitted.

[0103] As shown in FIG. 11, in the expansion device 1-3 according to Modification 3 of Embodiment 1, a UV irradiation unit 70 is attached to one of the pair of holding members 33-1 and 33-2 of each holding unit 31 of the holding mechanism 30. The UV irradiation unit 70 faces the clamped area 222 of the sheet 201 whose corners are clamped by the sheet clamp portion 45 of the delivery unit 40 where the holding table 12 is located between the holding members 33-1 and 33-2 in a plan view. In the expansion operation, in the expansion device 1-3 according to Modification 3 of Embodiment 1, before the holding table 12 is located between the holding members 33-1 and 33-2 in a plan view and the clamped area 222 of the sheet 201 is clamped by the holding members 33-1 and 33-2, the control unit 100 lights the UV irradiation unit 70 for a predetermined time to cure the adhesive layer 210 in the clamped area 222 of the sheet 201 and reduce the adhesive force.

[0104] Similar to Embodiment 1, the expansion device 1-3 according to Modification 3 of Embodiment 1 includes a UV irradiation unit 70 that irradiates ultraviolet rays toward the clamped area 222 of the sheet 201. After the adhesive layer 210 in the clamped area 222 of the clamped area 222 of the sheet 201 is cured to reduce the adhesive force, the clamped area 222 of the sheet 201 is clamped by the holding members 33-1 and 33-2. As a result, similar to Embodiment 1, the expansion device 1-3 according to Modification 3 of Embodiment 1 can achieve the effect of suppressing the expanded sheet 201 from being easily detached from the holding members 33-1 and 33-2.

[0105] Note that the present invention is not limited to the above-described embodiments and the like. That is, it can be implemented with various modifications without departing from the gist of the present invention. In the present invention, a laser processing groove formed by irradiating a laser beam and performing ablation processing or a cutting groove formed by performing cutting processing may be formed in the workpiece 200 as a starting point for division. Further, in the present invention, the sheet 201 divided into the chips 220 along the division planned line 205 may be carried into the expanding devices 1, 1-1, 1-2, 1-3, and the expanding devices 1, 1-1, 1-2, 1-3 may expand the sheet 201 to widen the interval between the chips 220. Further, in the present invention, a DAF (Die Attach Film) may be laminated on the back surface 207 of the workpiece 200.

Explanation of Signs

[0106] 1, 1-1, 1-2, 1-3 Expanding device 10 Holding unit 12 Holding table 18 Sheet adhering portion 20 Adhering unit 22 Adhering roller 30 Expanding mechanism 31 Clamping unit 31-1 First clamping portion 31-2 Second clamping portion 37 Moving unit 40 Delivery unit 70 Ultraviolet irradiation unit 200 Workpiece 201 Sheet 207 Back surface (sheet adhering surface) 210 Adhesive layer 211 First direction (adhering direction) 212 Second direction 222 Clamped region

Claims

【Claim 1】 An expanding device for expanding a sheet, comprising: a holding unit having a holding portion for holding a workpiece; a sticking unit having a sticking roller for sticking a sheet having an ultraviolet-curable adhesive layer and having a size larger than that of the workpiece to the workpiece held by the holding unit; a pair of first clamping portions disposed opposite to each other with the workpiece therebetween in a first direction and clamping a clamped region of the sheet to which the workpiece is stuck; and a pair of second clamping portions disposed opposite to each other with the workpiece therebetween in a second direction intersecting the first direction and clamping the clamped region of the sheet to which the workpiece is stuck, a clamping unit; and a moving unit for moving the first clamping portions in a direction approaching and separating from each other in the first direction and moving the second clamping portions in a direction approaching and separating from each other in the second direction, an expanding mechanism; a delivery unit for delivering the workpiece held by the holding unit and to which the sheet is stuck by the sticking unit to the expanding mechanism; an ultraviolet irradiation unit for irradiating ultraviolet rays toward the clamped region of the sheet to cure the adhesive layer at least before the clamping unit clamps the clamped region of the sheet; and the holding unit is provided with a sheet sticking portion that is disposed sandwiching the holding portion in a sticking direction in which the sticking roller moves when sticking the sheet to the workpiece on the outer periphery of the holding portion and protrudes from a sheet sticking surface of the workpiece held by the holding portion; an expanding device, wherein the sticking roller sticks the sheet to the workpiece held by the holding portion and to the sheet sticking portion, and then the ultraviolet irradiation unit irradiates ultraviolet rays to the clamped region of the sheet.

Images