Information processing apparatus, display control method, program, substrate processing apparatus, and method for manufacturing an article

Abstract

To provide an information processing apparatus that can search for recipe data in a shorter time.SOLUTION: An information processing apparatus controls display of a user interface, and the information processing apparatus has: an acquisition unit that acquires recipe data on a processing condition for a substrate processing apparatus that processes a substrate, layout data on the arrangement of a portion to be processed of the substrate processed by the substrate processing apparatus, and feature information indicating the feature of the arrangement of the portion to be processed; a selection unit that selects the layout data based on the feature of the arrangement indicated by the feature information; and a display control unit that controls such that information on the layout data selected by the selection unit and information on the recipe data related to the layout data are displayed in association with each other on the user interface.SELECTED DRAWING: Figure 6

Description

Technical Field

[0001] The present invention relates to an information processing apparatus, a display control method, a program, a substrate processing apparatus, and a method for manufacturing an article.

Background Art

[0002] In a substrate processing apparatus for processing a substrate for manufacturing an article such as a semiconductor device, it is necessary to prepare recipe data regarding processing conditions for processing the substrate for each type of article to be manufactured. The recipe data is composed of a plurality of data such as layout data regarding the arrangement of the processed portion of the substrate to be processed by the substrate processing apparatus, control data regarding the control of each unit of the substrate processing apparatus, and the like. Further, the recipe data differs for each type of article to be manufactured from the substrate, and also differs depending on the manufacturing process and the substrate processing apparatus even for the same type of article. Further, in an information processing apparatus for managing recipe data, an operator can display the recipe data on a screen and edit a plurality of data constituting the recipe data.

[0003] Patent Document 1 discloses a data editing apparatus and the like having a function of arranging and displaying a plurality of data constituting recipe data on a screen and rewriting the held data according to an input command in a state where this screen is being displayed.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] With the improvement of the performance of substrate processing equipment and the diversification of articles such as semiconductor devices, the number of data constituting recipe data has increased. Therefore, when creating recipe data, an operator may create new recipe data by duplicating existing recipe data and editing some of the data in order to shorten the creation time.

[0006] However, as the number of recipe data stored in the information processing device increases, an operator needs a lot of time to search for existing recipe data to find the target recipe data.

[0007] Therefore, an object of the present invention is to provide an information processing device, a display control method, a program, a substrate processing device, and a method for manufacturing an article that can search for recipe data in a shorter time.

Means for Solving the Problems

[0008] An information processing device according to one aspect of the present invention for solving the above problems is an information processing device that controls the display of a user interface, and includes a substrate Exposure conditions of an exposure apparatus for exposure recipe data related to, the Exposure apparatus layout data related to the arrangement of the substrate Exposure formed by, and Exposure area feature information indicating the characteristics of the arrangement of the Exposure area acquisition unit for acquiring, a selection unit for selecting the layout data based on the characteristics of the arrangement indicated by the feature information, and the information related to the layout data selected by the selection unit and the information related to the recipe data associated with the layout data are associated and displayed on the user interface. A display control unit for controlling so as to be.

Effects of the Invention

[0009] According to the present invention, an information processing device, a display control method, a program, a substrate processing device, and a method for manufacturing an article that can search for recipe data in a shorter time are provided.

Brief Description of the Drawings

[0010]

Figure 1

Figure 2

Figure 3

Figure 4

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Figure 6

Figure 7

Figure 8

Figure 9

Figure 10

Figure 11

Figure 12

Embodiments for Carrying Out the Invention

[0011] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. In each figure, the same members are denoted by the same reference numerals, and duplicate explanations are omitted.

[0012] <First Embodiment> In this embodiment, an exposure apparatus is used as an example of a substrate processing apparatus. FIG. 1 is a perspective view showing the appearance of the exposure apparatus. As shown in the figure, the exposure apparatus includes a chamber 101 for controlling the environmental temperature of the apparatus main body, and a control unit 106 having a CPU for controlling the apparatus main body. Further, the exposure apparatus includes a console unit including a display 102 for displaying various information, a monitor 105 for displaying image information obtained via imaging means in the apparatus main body, an operation panel 103 for an operator to input, a keyboard 104, and the like. In the figure, 107 is an ON-OFF switch, 108 is an emergency stop switch, and 109 is various switches, a mouse, and the like. The exposure apparatus main body is installed inside the chamber 101.

[0013] The display 102 is a thin flat type such as an organic EL, plasma, or liquid crystal, is housed in front of the chamber 101, and is connected to the control unit 106 by a LAN cable (not shown). The control unit 106 is an information processing apparatus, and details will be described later. The operation panel 103, the keyboard 104, the monitor 105, etc. are also installed in front of the chamber 101 so that operations in the console unit can be performed from the front of the chamber 101.

[0014] Figure 2 is a diagram showing the internal structure of an exposure apparatus. In the figure, a stepper is shown as the exposure apparatus. In the figure, 202 is a reticle (original plate, mask), and 203 is a wafer (substrate). When a light beam emitted from the light source device 204 illuminates the reticle 202 through the illumination optical system 205, the pattern on the reticle 202 can be transferred to the photosensitive layer on the wafer 203 by the projection lens 206. The reticle 202 is supported by a reticle stage 207 for holding and moving the reticle 202. The wafer 203 is exposed while being vacuum-sucked by a wafer chuck 208. The wafer chuck 208 is movable in each axial direction by a wafer stage 209. Above the reticle 202, a reticle optical system 281 for detecting the amount of displacement of the reticle is arranged. Above the wafer stage 209, an off-axis microscope 282 is arranged adjacent to the projection lens 206. The main role of the off-axis microscope 282 is to detect the relative position between an internal reference mark and an alignment mark on the wafer 203. In addition, a reticle library 220 and an elevator 230, which are peripheral devices, are arranged adjacent to the stepper main body, and necessary reticles and wafers are transported to the stepper main body by a reticle transport device 221 and a wafer transport device 231.

[0015] Figure 3 is a block diagram showing the electrical circuit configuration of a control unit that controls the exposure apparatus. In the figure, 321 is a CPU (Central Processing Unit) built into the control unit 106 that controls the entire apparatus. 322 is a wafer stage drive device, 323 is an alignment detection system such as the off-axis microscope 282, 324 is a reticle stage drive device, 325 is an illumination system such as the light source device 204, 326 is a shutter drive device, 327 is a focus detection system, and 328 is a Z drive device. Also, these are controlled by the CPU 321. 329 is a transport system such as the reticle transport device 221 and the wafer transport device 231.

[0016] 330 is a console unit having a display 102, a keyboard 104, a mouse (not shown), a touch pen (not shown), etc., and is for giving various commands and parameters regarding the operation of this exposure apparatus to the CPU 321. That is, the console unit is for exchanging information with an operator and serves as a user interface of the exposure apparatus. 331 is an external memory that stores recipe data, layout data, etc. The recipe data includes information indicating processing conditions for performing exposure processing such as data related to the reticle to be used, the opening amount of the masking blade, the exposure amount, focus-related data, and layout data. The exposure apparatus performs exposure processing according to the information indicating the processing conditions of the exposure processing included in the recipe data. Further, the control unit 106 serves as an acquisition unit that acquires parameters of various recipe data from the external memory 331 and a display control unit that controls the display of the display 102. Further, the control unit 106 acquires recipe data from the external memory 331, but may also acquire it from an external device connected via a network.

[0017] Here, the layout data related to the recipe data will be described. FIG. 4 is a top view of the wafer 203 processed by the exposure apparatus. 401 indicates an exposure area that is the target of exposure processing by the exposure apparatus. In the example of FIG. 4(a), 26 exposure areas 401 are arranged. The plurality of exposure areas 401 are sequentially subjected to exposure processing by the exposure apparatus. That is, the exposure area 401 is the portion to be processed of the wafer 203 on which the exposure processing is performed, and the layout data includes information regarding the arrangement of the portion to be processed of the wafer 203 on which the exposure processing is performed. Here, the portion to be processed is not limited to a region having a certain area such as the exposure area 401. For example, a point or a line having no area such as a predetermined point within the exposure area 401 or a line indicating the boundary of the exposure area 401 may be used as the portion to be processed.

[0018] The layout data includes data regarding the arrangement of exposure regions on the wafer 203 where the exposure apparatus performs exposure processing. For example, it includes the coordinates, size, number, etc. of the exposure region 401. The coordinates of the exposure region 401 may be the coordinates for defining the outer shape of the exposure region 401, or may be the coordinates of the center of the exposure region 401. Also, the size of the exposure region 401 may be the length of the side defining the outer shape of the exposure region 401, or may be the area of the exposure region 401. Further, the number of exposure regions 401 is the number of exposure regions 401 arranged on the wafer 203.

[0019] Also, as shown in FIG. 4(b), when multiple exposure processes are performed on the wafer 203, the recipe data may be associated with multiple layout data. For example, in FIG. 4(b), exposure processing is performed in order on the exposure region 401 shown in the left figure, the exposure region 401 shown in the center figure, and the exposure region 401 shown in the right figure. In this case, three layout data are associated with the recipe data, and each layout data includes data regarding the arrangement of the exposure region 401 shown in each figure.

[0020] Next, the relationship between the recipe data and the layout data will be described. FIG. 5 is a diagram showing the relationship between the recipe data and the layout data. FIG. 5(a) shows that the layout data 506 is associated with the recipe data 501. Here, the layout data 506 includes information regarding the arrangement of the portion to be processed on the wafer 203 as described above. Specifically, the layout data 506 is data regarding the coordinates, size, number, etc. of the exposure region 401, but in FIG. 5, for clarity, the layout data is represented by a diagram showing the wafer 203 and the exposure region 401.

[0021] In addition, the same layout data may be associated with a plurality of recipe data. FIG. 5(b) shows that layout data 507 is associated with recipe data 502, 503, and 504. Although recipe data 502, 503, and 504 are different recipe data because the values of at least some parameters are different, the same layout data 507 is associated because the arrangement of the exposure area 401 is the same.

[0022] In addition, a plurality of layout data may be associated with one recipe data. FIG. 5(c) shows that layout data 508, 509, and 510 are associated with recipe data 505. In the exposure process according to recipe data 505, three exposure processes are performed in order while switching the layout data, and the exposure areas shown in layout data 508, 509, and 510 are exposed in their respective exposure processes. Thus, by performing the exposure process while switching a plurality of layout data, a complex device pattern can be formed on the wafer 203.

[0023] FIG. 6 is a diagram showing a search screen for searching for recipe data according to the first embodiment. The control unit 106 controls to display a search screen 600 including layout data acquired from the external memory 331 or the like and information related to the recipe data on the display 102. The search screen 600 includes an area 601, a button 602, an area 603, and an area 604. The area 601 is an area for inputting the characteristics of the arrangement of the exposure area 401. An image showing the outer shape of the wafer 203 is displayed in the area 601 to assist the input. Details of the characteristics of the arrangement of the exposure area 401 input to the area 601 will be described later.

[0024] Also, button 602 is a button to start a search. When button 602 is pressed, the layout image and recipe data to be displayed on the search screen 600 are narrowed down according to the characteristics of the arrangement of the exposure area 401 input in area 601. When button 602 is pressed, the control unit 106 searches for and acquires layout data that matches the characteristics of the arrangement of the exposure area 401 input in area 601 and recipe data associated with the layout data. That is, the control unit 106 acquires layout data and recipe data related to the layout data based on the information input in area 601. Then, the control unit 106 associates the information about the acquired recipe data with the information about the layout data and controls to display it on the search screen 600.

[0025] Also, area 603 is an area for displaying information about layout data. In area 603, a layout image including the exposure area on the wafer imaged based on the layout data is displayed. Also, when a layout image of layout data associated with other recipe data is displayed, a boundary line is displayed between the other layout images in area 603, and each of the layout images is displayed separately. That is, the information about the recipe data is classified and displayed for each associated layout data on area 603.

[0026] Also, area 604 is an area for displaying recipe data. Here, in area 604, for example, the identifier of the recipe data or the name of the recipe data is displayed as information about the recipe data. Also, the recipe data related to the layout data of the layout image displayed in area 603 is displayed side by side in the area 604 beside the layout image. Also, the boundary line that separates the layout images in area 603 extends to area 604, and the recipe data is classified and displayed for each associated layout data.

[0027] In the example of the search screen 600 shown in FIG. 6, recipe data 501 related to the layout data 506 is displayed side by side in the area to the side of the area where the layout image showing the layout data 506 is displayed. Also, recipe data 502, 503, and 505 related to the layout data 507 are displayed side by side in the area to the side of the area where the layout image showing the layout data 507 is displayed.

[0028] As a result, on the search screen 600, information regarding the layout data and information regarding the recipe data are associated and displayed, so that the operator can search for the recipe data based on the information regarding the layout data.

[0029] Also, in the search screen 600 shown in FIG. 6, two layout images are displayed, but the number of layout images to be displayed is not limited to two. Also, the number of recipe data to be displayed can be any number. Also, when there are many layout images or recipe data to be displayed and not all of the layout images or recipe data can be displayed on the search screen 600, the displays in areas 603 and 604 on the search screen 600 may be made scrollable.

[0030] Also, in the search screen 600 shown in FIG. 6, a layout image is displayed as information regarding the layout data, but an identifier indicating the layout data or a name indicating the layout data may be displayed.

[0031] Also, on the search screen 600, a line connecting information regarding related layout data and information regarding recipe data as shown in FIG. 5 may be displayed. Thereby, it is possible to clearly display that the information regarding the layout data and the information regarding the recipe data are associated.

[0032] Also, on the search screen 600, information regarding related layout data and information regarding recipe data may be displayed using related colors. Specifically, the information regarding related layout data and the information regarding recipe data are displayed using the same color or similar colors so as to be distinguishable from other unrelated information. Also by this, it is possible to clearly display that the information regarding layout data and the information regarding recipe data are associated with each other.

[0033] Next, an area 601 for inputting the characteristics of the arrangement of the exposure areas 401 will be described. FIG. 7 is a diagram showing a layout image and characteristic information input into the area. In FIG. 7(a), the layout image 701 shows that a plurality of exposure areas 401 are arranged on the wafer 203. Further, in FIG. 7(b), characteristic information 704 indicating the characteristics of the arrangement of the exposure areas 401, which is input into the area 601 to search for the layout image 701 shown in FIG. 7(a), is shown. The characteristic information 704 indicates at least one area composed of lines drawn by an operator using a mouse, a touch pen, or the like. That is, the characteristic information 704 is information on the area input via the user interface of the exposure apparatus. Also, the characteristic information 704 can include a plurality of areas, and can also include the positional relationship between the image showing the outer shape of the wafer 203 and the areas, which is displayed in the area 601. Also, in the example of FIG. 7(b), the characteristic information 704 is represented by lines drawn by hand, but is not limited to such an example. For example, an operator may specify an area by drawing a figure such as a circle or a polygon in the area 601 using a keyboard 104, a mouse, or the like. Also, for example, an operator may specify an area by selecting a plurality of lattice-shaped figures previously displayed in the area 601 using a keyboard 104, a mouse, or the like.

[0034] Next, a method for selecting layout data based on the feature information 704 will be described. FIG. 8 is a diagram showing the area of the feature information superimposed on the layout image. In FIG. 8(a), the area of the feature information 704 superimposed on the layout image 701 is shown. Further, FIG. 8(b) is a diagram showing the extraction of the area 802 in FIG. 8(a). In FIG. 8(b), 401a, 401b, and 401c are exposure areas near one area included in the feature information 704. Also, 801a, 801b, and 801c indicate the centers of the exposure areas 401a, 401b, and 401c, respectively.

[0035] First, the control unit 106 determines whether the center of each of the exposure areas 401 is within the area of the feature information 704. In the example of FIG. 8(b), the centers 801a and 801b of the exposure areas 401a and 401b are within the area of the feature information 704. On the other hand, the center 801c of the exposure area 401c is not within the area of the feature information 704. In this case, the control unit 106 determines that the exposure areas 401a and 401b are within the area of the feature information 704, and determines that the exposure area 401c is not within the area of the feature information 704.

[0036] In this way, the control unit 106 determines whether all the exposure areas 401 included in the layout data are within the area of the feature information 704. And when it is determined that all the exposure areas 401 are within the area of the feature information 704, the control unit 106 selects the layout data as layout data having the characteristics of the arrangement of the exposure areas 401 indicated by the feature information 704. That is, the control unit 106 serves as a selection unit that selects layout data based on the characteristics of the arrangement of the exposure areas 401.

[0037] Further, when it is determined that the exposure area 401 of a predetermined ratio (e.g., 80%) or more is within the area of the feature information 704, the control unit 106 may select the layout data as layout data having the characteristics of the arrangement of the exposure areas indicated by the feature information. Also, the predetermined ratio may be determined by a value stored in advance in the external memory 331, or may be determined by a value input by an operator via the user interface.

[0038] Further, the control unit 106 may compare the layout image indicating the layout data with the image of the area of the feature information 704 to determine whether the exposure area 401 is within the area of the feature information 704. Also, the control unit 106 may calculate the coordinates of the center of the exposure area 401 included in the layout data and the coordinates of the area of the feature information 704 to determine whether the exposure area 401 is within the area of the feature information 704.

[0039] Also, although it has been determined whether it is within the area of the feature information 704 using the center of the exposure area 401, it is not limited to the center of the exposure area 401. For example, positions on the outer periphery of the exposure area 401 (e.g., four corners) may be used, or predetermined positions within the exposure area 401 may be used. Also, a plurality of positions on the outer periphery or within the area of the exposure area 401 may be used.

[0040] Next, a method of displaying the layout data and recipe data acquired based on the feature information 704 on the screen will be described. FIG. 9 is a flowchart showing a method of controlling the display of the search screen.

[0041] When an operator inputs feature information 704 indicating the characteristics of the arrangement of the exposure area 401 into the area 601 of the search screen 600 via the user interface and presses the button 602, the flowchart shown in FIG. 9 is started. In S901, the control unit 106 acquires layout data and information regarding recipe data from an external memory 331 or the like. Also in S901, the control unit 106 acquires the feature information 704 input into the area 601 via the user interface by the operator. In S902, the control unit 106 selects layout data based on the characteristics of the arrangement of the exposure area indicated by the acquired feature information 704. The detailed selection method is as described above. In S903, the control unit 106 acquires recipe data related to the layout data selected in S902. In S904, the control unit 106 controls to display each of the layout data selected in S902 and the recipe data acquired in S903 in association with the areas 603 and 604 of the search screen 600.

[0042] As described above, according to the information processing apparatus according to the present embodiment, layout data having the characteristics of the arrangement of the portion to be processed on the substrate is acquired. Then, since the information regarding the layout data having the characteristics of the arrangement of the portion to be processed on the substrate and the information regarding the recipe data are associated and displayed on the search screen, the operator can search for the recipe data in a shorter time.

[0043] <Second Embodiment> Next, an information processing apparatus according to the second embodiment will be described. Note that matters not mentioned here may follow the first embodiment. In the second embodiment, the display of a search screen for searching for recipe data associated with a plurality of layout data will be described.

[0044] FIG. 10 is a diagram showing a search screen for searching recipe data according to the second embodiment. The control unit 106 controls to display on the display 102 a search screen 600 including layout data acquired from an external memory 331 or the like and information related to the recipe data. Note that descriptions of items similar to those in the first embodiment are omitted for the search screen 600.

[0045] In the search screen 600 in the present embodiment, a plurality of layout images including the exposure areas on the wafer imaged based on the layout data are displayed in the area 603 for displaying the layout data. The plurality of layout images are imaged based on the layout data associated with the same recipe data.

[0046] In addition, the plurality of layout images displayed in the area 603 include at least one layout image of the layout data selected as having the characteristics of the arrangement of the exposure areas indicated by the feature information 704 input to the area 601.

[0047] Here, in the search screen 600 in FIG. 10, different display methods of the layout images are illustrated in the upper area and the lower area. In the upper area, an example is shown in which a plurality of layout images are arranged side by side horizontally. By arranging them side by side horizontally, a plurality of layout images can be confirmed at the same time.

[0048] On the other hand, in the lower area of the search screen 600, some of the plurality of layout images (one layout image in the example of FIG. 10) are displayed. Then, when the layout image on the screen is instructed by the operator using an input means such as a keyboard or a mouse, the area 1008 where the layout image is displayed in a reduced size is displayed. That is, usually only some of the layout images are displayed, but the layout images are displayed as thumbnails only when instructed by the operator. Thereby, when the number of the plurality of layout images is large and all the layout images cannot be displayed on the search screen 600, the operator can confirm the plurality of layout images when needed.

[0049] As described above, according to the information processing apparatus according to the present embodiment, a plurality of layout data having features of the arrangement of the portion to be processed on the substrate are acquired. Then, since information regarding a plurality of layout data having features of the arrangement of the portion to be processed on the substrate and information regarding recipe data are associated and displayed on the search screen, an operator can search for recipe data in a shorter time.

[0050] <Third Embodiment> Next, an information processing apparatus according to the third embodiment will be described. Note that matters not mentioned here may follow the first embodiment. In the third embodiment, display of a search screen for searching for recipe data based on information included in the recipe data will be described.

[0051] FIG. 11 is a diagram showing a search screen for searching for recipe data according to the third embodiment. The control unit 106 controls to display a search screen 600 including layout data acquired from an external memory 331 or the like and information regarding recipe data on the display 102. Note that description of items similar to those in the first embodiment in the search screen 600 will be omitted.

[0052] In the search screen 600 in the present embodiment, there is an area for searching for recipe data according to information regarding the recipe data or the like. In the search screen 600, 1101 and 1103 are labels indicating parameters included in the recipe data, and 1102 and 1104 are input areas for inputting values of the parameters indicated by the labels 1101 and 1103, respectively. In the example of FIG. 11, the parameter indicated by the label 1101 is the exposure dose, and the parameter indicated by the label 1103 is the reticle identifier, but other parameters included in the recipe data may be displayed. Further, information regarding the layout data, such as the coordinates, size, and number of the exposure area 401, may be displayed on the search screen 600.

[0053] First, when the button 602 is pressed, in S901 of the flowchart in FIG. 9, the control unit 106 acquires layout data and recipe data that satisfy the search conditions. Then, the control unit 106 searches for and acquires recipe data and layout data in which the parameter values set are the same as the parameter values input to the input areas 1102 and 1104 from among the layout data and recipe data acquired in S901. That is, the control unit 106 acquires recipe data and layout data that satisfy the search conditions. Since the processing after S902 is the same as that in the first embodiment, the description thereof is omitted.

[0054] Also, the parameters in FIG. 11 are examples, and the number of labels indicating the displayed parameters and input areas for inputting the parameter values can be arbitrarily determined. Regarding the search conditions, not only the condition of whether or not the parameter values match, but also other search conditions such as conditions for specifying the range of parameter values and conditions using wildcards may be displayed with labels and input areas so that they can be input. Further, recipe data that satisfies some of the plurality of search conditions may be displayed, or recipe data that satisfies all of the plurality of search conditions may be displayed.

[0055] As described above, according to the information processing apparatus according to the present embodiment, layout data that satisfies a predetermined search condition and has the characteristics of the arrangement of the portion to be processed on the substrate is acquired. Then, since the information regarding the layout data having the characteristics of the arrangement of the portion to be processed on the substrate and the information regarding the recipe data that satisfy the predetermined search condition are associated and displayed on the search screen, the operator can search for the recipe data in a shorter time.

[0056] <Fourth Embodiment> Next, an information processing apparatus according to the fourth embodiment will be described. Note that matters not mentioned here may follow the first embodiment. In the fourth embodiment, an example will be described in which an information processing apparatus arranged outside the substrate processing apparatus controls to display information related to recipe data and information related to layout data in association with each other on a search screen.

[0057] FIG. 12 is a diagram showing the configuration of the information processing apparatus according to the fourth embodiment. The information processing apparatus can be realized by a computer (information processing apparatus) communicably connected to the substrate processing apparatus. In FIG. 12, a CPU 1201 (processing unit) is a central processing unit (CPU) that executes an OS (Operating System) and various application programs. Further, the CPU 1201 is not limited to a central processing unit (CPU), and may be a processor or a circuit such as a microprocessing unit (MPU), a graphics processing unit (GPU), or an application specific integrated circuit (ASIC). Further, the CPU 1201 may be any combination of these processors or circuits.

[0058] The ROM 1202 is a memory that stores fixed data among programs and arithmetic parameters executed by the CPU 1201. The RAM 1203 is a memory that provides a work area and a temporary storage area for data of the CPU 1201. The ROM 1202 and the RAM 1203 are connected to the CPU 1201 via a bus 1208.

[0059] 1205 is an input device (input unit) including a mouse, a keyboard, etc., and 1206 is a display device (display unit) such as a CRT or a liquid crystal display. The input device 1205 and the display device 1206 serve as a user interface of the information processing apparatus. Further, the input device 1205 and the display device 1206 may be an integrated device such as a touch panel. Further, the input device 1205 and the display device 1206 may be configured as devices separate from the computer.

[0060] 1204 is a storage device such as a hard disk drive, CD, DVD, memory card, etc., and stores various data such as various programs and recipe data. The input device 1205, the display device 1206, and the storage device 1204 are each connected to the bus 1208 via an interface (not shown). Also, a communication device 1207 for connecting to a network and performing communication is connected to the bus 1208. The communication device 1207 is used, for example, when connecting to a LAN and performing data communication using a communication protocol such as TCP / IP and communicating with other communication devices. The communication device 1207 functions as a data transmission unit and a reception unit, and receives, for example, information regarding recipe data, information regarding layout data, etc. from a transmission unit (not shown) in the substrate processing device and stores them in the storage device 1204.

[0061] The information processing apparatus according to the present embodiment is disposed outside the substrate processing apparatus, and controls to associate and display on a search screen information regarding recipe data and information regarding layout data acquired from the storage device 1204 and the like.

[0062] <Embodiment of a method for manufacturing an article> As an article, for example, a method for manufacturing a device (such as a semiconductor device, a magnetic storage medium, a liquid crystal display element, etc.), a color filter, or a hard disk will be described. Such a manufacturing method includes a step of forming a pattern on a substrate (such as a wafer, a glass plate, a film-like substrate, etc.) using a pattern forming apparatus (such as an exposure apparatus, an imprint apparatus, a drawing apparatus, etc.). Such a manufacturing method further includes a step of processing the substrate on which the pattern is formed. The processing step may include a step of removing the remaining film of the pattern. Also, the manufacturing method of the article in the present embodiment is advantageous in at least one of the performance, quality, productivity, and production cost of the article as compared with the prior art.

[0063] <Other embodiments> The present invention can also be implemented by supplying a program that realizes one or more functions of the above-described embodiments to a system or apparatus via a network or a storage medium, and causing one or more processors in a computer of the system or apparatus to read and execute the program. It can also be implemented by a circuit (for example, ASIC) that realizes one or more functions.

[0064] As described above, the preferred embodiments of the present invention have been described. Needless to say, the present invention is not limited to these embodiments, and various modifications and changes are possible within the scope of the gist thereof.

[0065] As an example of a substrate processing apparatus, an exposure apparatus has been described, but the present invention is not limited thereto. As an example of a substrate processing apparatus, an imprint apparatus that forms a composition in which the shape of a mold is transferred by bringing an imprint material supplied onto a substrate into contact with a mold (master, mold) and applying energy for curing to the imprint material may be used. Further, as an example of a substrate processing apparatus, a drawing apparatus that performs drawing on a substrate with a charged particle beam (such as an electron beam or an ion beam) through a charged particle optical system to form a pattern on the substrate may be used. Further, the substrate processing apparatus may include an apparatus that performs a process other than the process performed by an apparatus such as the exposure apparatus described above in the manufacture of an article such as a device, such as a coating apparatus that coats a photosensitive medium on the surface of a substrate, and a developing apparatus that develops a substrate on which a pattern has been transferred. Further, as an example of a substrate processing apparatus, an apparatus that inspects a processed substrate, such as an overlay inspection apparatus, a line width inspection apparatus, a pattern inspection apparatus, and an electrical characteristic inspection apparatus, may also be included.

[0066] In addition, the first to fourth embodiments can be implemented not only individually but also in any combination of the first to fourth embodiments.

Claims

1. An information processing apparatus for controlling the display of a user interface, comprising: an acquisition unit that acquires recipe data related to exposure conditions of an exposure apparatus for exposing a substrate, layout data related to the arrangement of an exposure area of the substrate to be exposed by the exposure apparatus, and feature information indicating features of the arrangement of the exposure area; a selection unit that selects the layout data based on the features of the arrangement indicated by the feature information; a display control unit that controls so that information related to the layout data selected by the selection unit and information related to recipe data associated with the layout data are associated and displayed on the user interface. An information processing apparatus characterized by the above.

2. The information processing apparatus according to claim 1, wherein the display control unit controls so that a layout image obtained by imaging information related to the arrangement as information related to the layout data is displayed on the user interface.

3. The information processing apparatus according to claim 1 or 2, wherein the display control unit controls so that information related to a plurality of the recipe data is associated with information related to one of the layout data and displayed on the user interface.

4. The information processing apparatus according to any one of claims 1 to 3, wherein the display control unit controls so that information related to a plurality of the layout data is associated with information related to one of the recipe data and displayed on the user interface.

5. The information processing apparatus according to claim 4, wherein when the display control unit displays a part of information related to a plurality of the layout data on the user interface, the display control unit controls so that all of the information related to the plurality of the layout data is displayed according to an input from the user interface.

6. The display control unit controls so that a display for inputting search conditions based on information regarding the recipe data and information regarding the layout data is displayed on the user interface. The acquisition unit acquires the recipe data and the layout data that satisfy the search conditions input from the user interface, the information processing apparatus according to any one of claims 1 to 5.

7. The display control unit controls so that the information regarding the layout data and the information regarding the recipe data related to the layout data are displayed side by side, whereby the information regarding the layout data and the information regarding the recipe data related to the layout data are associated and displayed on the user interface, the information processing apparatus according to any one of claims 1 to 6.

8. The display control unit controls so that a line connecting the information regarding the layout data and the information regarding the recipe data related to the layout data is displayed, whereby the information regarding the layout data and the information regarding the recipe data related to the layout data are associated and displayed on the user interface, the information processing apparatus according to any one of claims 1 to 7.

9. The display control unit controls so that the information regarding the layout data and the information regarding the recipe data related to the layout data are displayed using a color related to them, whereby the information regarding the layout data and the information regarding the recipe data related to the layout data are associated and displayed on the user interface, the information processing apparatus according to any one of claims 1 to 8.

10. The display control unit controls so that a display for inputting feature information indicating the features of the arrangement of the exposure regions is displayed on the user interface. The acquisition unit acquires the feature information input from the user interface, and the information processing apparatus according to any one of claims 1 to 9.

11. A display control method for controlling the display of a user interface, an acquisition step of acquiring recipe data regarding exposure conditions of an exposure apparatus for exposing a substrate, layout data regarding the arrangement of an exposure region of the substrate to be exposed by the exposure apparatus, and feature information indicating features of the arrangement of the exposure region; a selection step of selecting the layout data based on the arrangement indicated by the feature information; and a display control step of controlling to display, on the user interface, information regarding the layout data selected in the selection step and information regarding recipe data associated with the layout data, characterized in that.

12. A program that causes a computer to execute a display control method for controlling the display of a user interface, wherein, an acquisition step of acquiring recipe data regarding exposure conditions of an exposure apparatus for exposing a substrate, layout data regarding the arrangement of an exposure region of the substrate to be exposed by the exposure apparatus, and feature information indicating features of the arrangement of the exposure region; a selection step of selecting the layout data based on the arrangement indicated by the feature information; and a display control step of controlling to display, on the user interface, information regarding the layout data selected in the selection step and information regarding recipe data associated with the layout data, characterized in that the program causes a computer to execute the display control method.

13. An exposure apparatus for exposing a substrate, comprising the information processing apparatus according to any one of claims 1 to 10, wherein the information processing apparatus controls the display of the user interface of the exposure apparatus An exposure apparatus characterized by the following.

14. An exposure apparatus for exposing a substrate, a display unit that associates and displays layout data regarding the arrangement of an exposure region of the substrate to be exposed by the exposure apparatus and information regarding recipe data regarding exposure conditions of the exposure apparatus related to the layout data; a control unit that controls the display unit, and the display unit performs a display for a user to input feature information indicating features of the arrangement of the exposure region, and displays the layout data based on the feature information An exposure apparatus characterized by the following.

15. Using the exposure apparatus according to claim 13 or 14, a step of processing a substrate, and a step of manufacturing an article from the substrate processed in the step, and A method for manufacturing an article characterized by the following.

16. The information processing apparatus according to claim 1, wherein the display control unit controls such that a layout image obtained by imaging information regarding the arrangement as information regarding the layout data is displayed on the user interface, and a thumbnail image of the layout image is displayed.

17. The information processing apparatus according to claim 16, wherein the display control unit controls such that a plurality of the thumbnail images are arranged and displayed on the user interface.

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