Sheet attaching device and sheet attaching method

Abstract

To provide a sheet sticking device and a sheet sticking method, capable of preventing increase in running cost for protecting a first and a second surface of an adherend.SOLUTION: A sheet sticking device EA comprises: supplying means 10 for supplying an adhesive sheet AS deformable by prescribed energy; pressing means 20 for pressing and sticking the adhesive sheet AS supplied by the supplying means 10 to a first surface WK1 so as to form a protruding region ASH in which the adhesion sheet AS protrudes from an outer edge WKE of the first surface WK1 in an adherend WK; and folding and sticking means 30 for deforming the adhesive sheet by giving prescribed energy to the protruding region ASH, folding the protruding region ASH in a second surface WK2 direction different from the first surface WK1, and sticking the protruding region ASH to the second surface WK2. When a plurality of pieces of different energy is given to the adhesive sheet AS, prescribed deformation corresponding to each energy occurs in the adhesive sheet. The folding and sticking means 30 includes energy giving means 31 for giving a plurality of pieces of different energy to the protruding region ASH.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a sheet sticking device and a sheet sticking method.

Background Art

[0002] A sheet sticking device for sticking an adhesive sheet to an adherend is known (see, for example, Patent Document 1).

Prior Art Document

Patent Document

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In the sheet sticking device 10 (sheet sticking device) described in Patent Document 1, since the first surface and the second surface different from the first surface of the wafer W (adherend) are protected by two materials, the protective tape A and the protective tape B, there is a disadvantage that the running cost for protecting the first surface and the second surface increases.

[0005] An object of the present invention is to provide a sheet sticking device and a sheet sticking method capable of preventing an increase in the running cost for protecting the first surface and the second surface of an adherend.

Means for Solving the Problems

[0006] The present invention employs the configuration described in the claims.

Effects of the Invention

[0007] According to the present invention, the protruding region of the adhesive sheet attached to the first surface is deformed, and the protruding region is bent and attached in the direction of the second surface different from the first surface, so that one adhesive sheet is sufficient to protect the first surface and the second surface of the adherend. Therefore, it is possible to prevent an increase in the running cost for protecting the first surface and the second surface of the adherend.

Brief Description of the Drawings

[0008]

Figure 1

Embodiments for Carrying Out the Invention

[0009] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In addition, the X-axis, Y-axis, and Z-axis in the present embodiment are in an orthogonal relationship with each other. The X-axis and Y-axis are axes in a predetermined plane, and the Z-axis is an axis orthogonal to the predetermined plane. Further, in the present embodiment, based on the case when viewed from the front direction in FIG. 1 parallel to the Y-axis, when the direction is indicated without specifying the figure, "up" is the arrow direction of the Z-axis, "down" is the opposite direction, "left" is the arrow direction of the X-axis, "right" is the opposite direction, "front" is the front direction in FIG. 1 parallel to the Y-axis, and "rear" is the opposite direction.

[0010] The sheet sticking device EA of the present invention includes a supply means 10 that performs a supply process of supplying an adhesive sheet AS that can be deformed by heat as a predetermined energy, and an overhang region ASH is formed where the adhesive sheet AS supplied by the supply means 10 protrudes from the outer edge WKE of the first surface WK1 of the adherend WK. A pressing means 20 that performs a pressing process of pressing and sticking the adhesive sheet AS to the first surface WK1, and heat is applied to the overhang region ASH to deform it, and the overhang region ASH is bent in the direction of the second surface WK2 different from the first surface WK1, and the overhang region ASH is bent and stuck to the second surface WK2. A bending and sticking means 30 that performs a bending and sticking process, a guiding means 40 that performs a guiding process of guiding the overhang region ASH in the direction of the second surface WK2, and an overhang region pressing means 50 that performs an overhang region pressing process of pressing the overhang region ASH against the second surface WK2, and is arranged in the vicinity of a moving means 60 that performs a moving process of relatively moving the pressing means 20 and the adherend WK. In addition, the adhesive sheet AS is configured to undergo a predetermined deformation corresponding to each energy when different first energy and second energy as a plurality of energies are applied. Specifically, the adhesive sheet AS includes a first base material BS1 that undergoes a first deformation with shrinkage due to heat at 80°C as the first energy, a second base material BS2 that is laminated on the first base material BS1 and undergoes a second deformation with shrinkage due to heat at 150°C as the second energy, and an adhesive layer AD laminated on the second base material BS2. Further, in the present embodiment, a circular adherend WK centered on the reference position WKR is adopted.

[0011] The supply means 10 includes a support roller 11 that supports a web RS in which an adhesive sheet AS is temporarily attached to a strip-shaped release sheet RL, a guide roller 12 that guides the web RS, a release plate 13 as a release means for folding back the release sheet RL at a release edge 13A and peeling the adhesive sheet AS from the release sheet RL, a drive roller 14 that is supported by an output shaft (not shown) of a rotation motor 14A as a drive device and sandwiches the release sheet RL with a pinch roller 14B, and a recovery roller 15 as a recovery means that is supported by an output shaft of a drive device (not shown) and constantly applies a predetermined tension to the release sheet RL existing between the release sheet RL and the pinch roller 14B while the automatic operation of the sheet pasting device EA is being performed, and recovers the release sheet RL.

[0012] The pressing means 20 includes a pressing roller 21.

[0013] The bending and pasting means 30 includes an energy applying means 31 that applies different energies, i.e., heat of 80°C and heat of 150°C, as a plurality of energies to the protruding region ASH, and a blowing head 32 provided in an annular shape centered on a center line CL that is a straight line parallel to the Z axis. The energy applying means 31 includes a first hot air blowing means 31A that heats a gas such as air or gas with a heating device (not shown) such as a heating side of a coil heater or a heat pipe to generate a first hot air AR1, and blows the first hot air AR1 through a pipe 31C to heat the protruding region ASH to 80°C, and a second hot air blowing means 31B that heats a gas such as air or gas with a heating device (not shown) such as a heating side of a coil heater or a heat pipe to generate a second hot air AR2, and blows the second hot air AR2 through a pipe 31D to heat the protruding region ASH to 150°C. The blowing head 32 includes an annular nozzle 32A in which an annular jet outlet 32B for jetting the first and second hot airs AR1 and AR2 blown through the pipes 31C and 31D is formed.

[0014] The guiding means 40 includes a linear motion motor 41 as a drive device, and a guiding head 43 that is supported by an output shaft 41A of the linear motion motor 41 via a bracket 42 and is provided in an annular shape centered on the center line CL. An annular ejection port 43C for ejecting the second hot air AR2 blown from the second hot air blowing means 31B through the pipe 43B is formed on the inner wall 43A of the induction head 43.

[0015] The protruding region pressing means 50 includes a linear motor 51 as a driving device supported by the induction head 43 via a bracket 51A, and an annular pressing member 52 supported by the output shaft 51B thereof.

[0016] The moving means 60 is supported by a slider 61A of a linear motor 61 as a driving device, and includes a support table 62 having a holding surface 62A that can be suction-held by a decompression means (holding means) such as a decompression pump or a vacuum ejector (not shown), a linear motor 63 as a driving device disposed in a recess 62B formed in the holding surface 62A, and a lift table 64 supported by the output shaft 63A thereof and having an upper surface that is a holding surface 64A that can be suction-held by a decompression means (holding means) such as a decompression pump or a vacuum ejector (not shown). Note that a non-adhesive material such as a fluororesin or a silicone resin on which the adhesive sheet AS does not adhere or can be peeled off even if the adhesive sheet AS adheres is laminated on the holding surface 62A.

[0017] The operation of the above sheet sticking device EA will be described. First, with respect to the sheet sticking device EA in which each member is arranged at the initial position indicated by the solid line in Fig. 1(A), after the user of the sheet sticking device EA (hereinafter simply referred to as the "user") sets the original fabric RS as shown in the figure, a signal for starting automatic operation is input via an operation means (not shown) such as an operation panel or a personal computer. Then, the supply means 10 drives the rotation motor 14A, feeds out the original fabric RS, and when the leading end portion in the feeding direction of the adhesive sheet AS is peeled off by a predetermined length at the peeling edge 13A of the peeling plate 13, the drive of the rotation motor 14A is stopped. Next, the user or a conveying means (not shown) such as an articulated robot or a belt conveyor places the adherend WK on the holding surfaces 62A and 64A so that the reference position WKR overlaps with the center 64R of the lift table as shown in Fig. 1(A). Then, the moving means 60 drives a decompression means (not shown) and starts adsorption and holding on the holding surfaces 62A and 64A.

[0018] Thereafter, the moving means 60 drives the linear motor 61 to move the support table 62 to the left. When the adherend WK reaches a predetermined position with respect to the supply means 10, the supply means 10 drives the rotation motor 14A and feeds out the original fabric RS in accordance with the moving speed of the adherend WK. As a result, the adhesive sheet AS is peeled off from the peeling sheet RL, and the adhesive sheet AS peeled off from the peeling sheet RL is pressed against the adherend WK by the pressing roller 21 and is pasted on the first surface WK1 so as to form an overhanging region ASH as shown by the two-dot chain line in Fig. 1(A). Next, after the entire leading adhesive sheet AS is pasted on the adherend WK, when the leading end portion in the feeding direction of the next adhesive sheet AS following the leading adhesive sheet AS is peeled off by a predetermined length at the peeling edge 13A of the peeling plate 13, the supply means 10 stops the drive of the rotation motor 14A. Then, as shown by the two-dot chain line in Fig. 1(A), when the center 64R (reference position WKR) of the lift table coincides with the center line CL, the moving means 60 stops the drive of the linear motor 61, stops the leftward movement of the adherend WK, then stops the drive of the decompression means (not shown), and releases the adsorption and holding on the holding surface 62A.

[0019] Next, as shown by the two-dot chain line in FIG. 1(A), after the moving means 60 drives the linear motor 63 to raise the lift table 64, as shown in FIG. 1(B), the bending and attaching means 30 drives the first hot air blowing means 31A to blow the first hot air AR1 from the nozzle outlet 32B to the protruding area ASH. As a result, the first base material BS1 located in the protruding area ASH undergoes a first deformation with shrinkage, and as shown by the solid line in FIG. 1(B), the protruding area ASH hangs downward from the outer edge WKE of the adherend WK. Note that the adhesive layer AD may or may not contact the second surface WK2 during the first deformation. Then, after the bending and attaching means 30 stops driving the first hot air blowing means 31A, it drives the second hot air blowing means 31B to blow the second hot air AR2 from the nozzle outlet 32B to the protruding area ASH through the pipe 31D. As a result, the second base material BS2 located in the protruding area ASH undergoes a second deformation with shrinkage, and as shown by the two-dot chain line in FIG. 1(B), the protruding area ASH adheres to the second surface WK2 to form an integrated object UP. Next, the moving means 60 drives the linear motor 63 to lower the lift table 64 to return it to the initial position.

[0020] Note that depending on various conditions such as the characteristics, properties, nature, material, composition, structure, shape, dimensions, and weight of the adhesive sheet AS, and the conditions of the atmosphere and other factors (hereinafter referred to as "characteristics, etc."), when the first deformation or the second deformation occurs, the protruding region ASH may not deform in the desired direction. That is, in the context of this embodiment, if it may bend upward without bending downward, an induction step of guiding the protruding region ASH in the direction of the second surface WK2 may be performed by the guiding means 40. This induction step is such that when the first base material BS1 begins to undergo the first deformation by the first hot air AR1, the guiding means 40 drives the linear motion motor 41, and as shown in FIG. 1(C), the guiding head 43 is lowered so that the protruding region ASH enters the inner peripheral surface 43A thereof, suppressing the deformation of the protruding region ASH so that it bends upward. When the protruding region ASH enters the inner peripheral surface 43A of the guiding head 43, the bending and attaching means 30 drives the second hot air blowing means 31B, and blows the second hot air AR2 from the nozzle 43C onto the protruding region ASH. Thereby, the second base material BS2 undergoes the second deformation, and as shown by the two-dot chain line in FIG. 1(C), the protruding region ASH adheres to the second surface WK2 (the above is the "induction step").

[0021] Here, depending on the characteristics, etc. of the adhesive sheet AS, there may be cases where the protruding region ASH does not bend until it contacts the second surface WK2, or even if the protruding region ASH bends until it contacts the second surface WK2, the predetermined adhesive force cannot be obtained due to insufficient pressing force, or for safety reasons, it may be desired to press the protruding region ASH against the second surface WK2. In such cases, the following protruding region pressing step of pressing the protruding region ASH against the second surface WK2 may be performed by the protruding region pressing means 50. This protruding region pressing step is such that after the lift table 64 is lowered, the protruding region pressing means 50 drives the linear motion motor 51 to lower the pressing member 52, and as shown in FIG. 1(D), the protruding region ASH is pressed against the second surface WK2 by the pressing member 52 and the holding surface 62A. Thereby, the protruding region ASH is surely adhered to the second surface WK2 of the adherend WK (the above is the "protruding region pressing step").

[0022] Then, the bending and attaching means 30 stops driving the second hot air blowing means 31B, and the guiding means 40 and the protruding area pressing means 50 drive the linear motors 41 and 51 respectively to return the guiding head 43 and the pressing member 52 to their initial positions. Next, the moving means 60 stops driving the decompression means (not shown), releases the adsorption and holding on the holding surface 64A, and then when the user or the conveying means (not shown) conveys the integrated object UP to the next process, the linear motor 61 is driven to return the support table 62 to its initial position, and thereafter the same operations as above are repeated.

[0023] According to the above-described embodiment, the protruding area ASH of the adhesive sheet AS attached to the first surface WK1 is deformed, and the protruding area ASH is bent and attached in the direction of the second surface WK2 different from the first surface WK1. Therefore, one adhesive sheet AS is sufficient to protect the first surface WK1 and the second surface WK2 of the adherend WK. Accordingly, it is possible to prevent an increase in the running cost for protecting the first surface WK1 and the second surface WK2 of the adherend WK.

[0024] The means and steps in the present invention are not limited at all as long as they can perform the operations, functions or steps described for those means and steps. Moreover, they are not limited to the configurations and steps of merely one embodiment shown in the above embodiment. For example, the supply means may be any means that can supply an adhesive sheet deformable by a predetermined energy, and is not limited as long as it is within the technical scope in light of the common general knowledge in the art at the time of filing (the same applies to other means and steps).

[0025] The supply means 10 may feed out a web RS in which a predetermined area partitioned by a cut formed in a loop shape or across the entire short width direction in a strip-shaped adhesive sheet base material temporarily attached to a strip-shaped release sheet RL is the adhesive sheet AS, and then peel and supply the adhesive sheet AS. Alternatively, a strip-shaped adhesive sheet web in which a strip-shaped adhesive sheet base material is temporarily attached to a strip-shaped release sheet RL may be adopted. During the feeding out of the strip-shaped adhesive sheet web, a cut in a loop shape or across the entire short width direction is formed in the adhesive sheet base material with a cutting blade as a cutting means, and the adhesive sheet AS is peeled and supplied from the web RS in which the predetermined area partitioned by the cut is the adhesive sheet AS. Alternatively, the strip-shaped adhesive sheet AS may be peeled and supplied from a web RS in which the strip-shaped adhesive sheet AS is temporarily attached to a strip-shaped release sheet RL. Alternatively, the adhesive sheet AS may be peeled and supplied from a web RS that is, for example, fan-folded without being wound. Alternatively, a recovery means may be adopted to recover the release sheet RL by, for example, fan-folding, cutting into pieces with a shredder, or randomly accumulating without winding. Alternatively, a recovery means may not be adopted. Alternatively, an adhesive sheet AS not temporarily attached to the release sheet RL may be fed out and supplied.

[0026] The pressing means 20 may attach the adhesive sheet AS to the first surface WK1 such that the entire outer edge of the adhesive sheet AS becomes the protruding area ASH, or attach the adhesive sheet AS to the first surface WK1 such that a part of the outer edge of the adhesive sheet AS becomes the protruding area ASH.

[0027] The bending and attaching means 30 may be such that the air blowing head 32 is not annular but may be a polygonal annular shape such as a quadrilateral or an octagonal shape, or an elliptical annular shape, etc., or may be provided with a plurality of nozzles instead of the annular nozzle 32A. For example, a plurality of ejection ports 32B may be provided in the vertical direction according to the position of the protruding area ASH to be deformed, or the ejection port 32B may be configured to move in the vertical direction, for example, according to the position of the protruding area ASH to be deformed. After applying the second energy to the protruding area ASH, the first energy may be applied, or the first energy and the second energy may be applied simultaneously. The ejection port 32B may not be annular but may be a plurality of or a single hole. The temperature of the first hot air AR1 may be a temperature at which the protruding area ASH can be first deformed (80°C in the above embodiment), or a temperature higher than the temperature at which the protruding area ASH can be first deformed (85°C, 100°C, etc. in the above embodiment). The temperature of the second hot air AR2 may be a temperature at which the protruding area ASH can be second deformed (150°C in the above embodiment), or a temperature higher than the temperature at which the protruding area ASH can be second deformed (160°C, 180°C, etc. in the above embodiment). An annular member heated to a temperature at which the protruding area ASH can be first deformed (80°C or a temperature higher than that in the above embodiment) may be brought into contact with the protruding area ASH to first deform the protruding area ASH. An annular member heated to a temperature at which the protruding area ASH can be second deformed (150°C or a temperature higher than that in the above embodiment) may be brought into contact with the protruding area ASH to second deform the protruding area ASH. It may be configured to lower the annular member in a state where it is in contact with the protruding area ASH after heating the protruding area ASH to a temperature at which it can be first deformed, and the annular member may function as a guiding means. It may be configured to lower the annular member in a state where it is in contact with the protruding area ASH after heating the protruding area ASH to a temperature at which it can be second deformed, and the annular member may function as a guiding means. The second hot air blowing means 31B does not have to be shared with the guiding means 40. The heat applied to the adhesive sheet AS may be a fluid such as heated water, oil, gel, etc. The temperatures of the first and second hot air AR1, AR2 and the fluid can be arbitrarily determined by the user considering the characteristics of the adhesive sheet AS, etc.As the predetermined energy to be applied to the adhesive sheet AS, it may be electromagnetic waves such as ultraviolet rays, infrared rays, visible light, sound waves, X-rays or gamma rays, or heat such as hot water or hot air, and can be arbitrarily determined in consideration of the characteristics, qualities, properties, materials, compositions and configurations of the adhesive sheet AS. In addition to the first and second energies, it may be configured to apply more energies such as the third energy and the fourth energy, and the number of energies to be applied can be arbitrarily determined in consideration of the characteristics, qualities, properties, materials, compositions and configurations of the adhesive sheet AS.

[0028] The guiding means 40 may, instead of or in combination with the guiding head 43, blow gases such as air or gas, and the first and second hot gases AR1 and AR2 to guide the protruding region ASH in the direction of the second surface WK2. Alternatively, a brush or a plate-like member supported by the output portion of the driving device may be pressed against the protruding region ASH to guide the protruding region ASH in the direction of the second surface WK2. The second hot gas blowing means 31B may be provided with a separate second hot gas blowing means without sharing with the bending and attaching means 30. The guiding head 43 may not be annular, but may be a polygonal annular shape such as a quadrilateral or an octagonal shape, or an elliptical annular shape. Instead of ejecting the second hot gas AR2 from the ejection port 43C, for example, a blowing means different from the second hot gas blowing means 31B that ejects cold air, hot air, or normal temperature gas may be employed, and the gas ejected by the blowing means may be used to guide the protruding region ASH in the direction of the second surface WK2. It is not necessary to have a configuration for ejecting the second hot gas AR2 or cold air, etc. Instead of or in combination with the configuration for ejecting the second hot gas AR2 or another blowing means, a configuration may be adopted in which a brush or a plate-like member supported by the output portion of the driving device is pressed against the protruding region ASH to guide the protruding region ASH in the direction of the second surface WK2. A guiding head having holes or gaps through which the first and second hot gases AR1 and AR2 ejected from the blowing head 32 pass may be adopted instead of the guiding head 43, and the protruding region ASH may be guided in the direction of the second surface WK2 without blocking the first and second hot gases AR1 and AR2 from the blowing head 32 blown onto the protruding region ASH. The ejection port 43C may not be annular, but may be a plurality or a single hole. Even when the protruding region ASH is deformed in a desired direction due to the first and second deformations, a guiding operation may be performed. It may or may not be provided in the sheet attaching device EA of the present invention.

[0029] The protruding area pressing means 50 may employ a linear motor 63 and a lift table 64 in place of the linear motor 51 and the pressing member 52, and perform a protruding area pressing step of pressing the protruding area ASH against the adherend WK with the force by which the lift table 64 returns to the initial position. Alternatively, even when the adhesive force of the protruding area ASH with respect to the second surface WK2 becomes a predetermined adhesive force only by bending by the bending and attaching means 30, the protruding area pressing step may or may not be performed. It may or may not be provided in the sheet attaching device EA of the present invention.

[0030] The moving means 60 may move the supply means 10 and the pressing means 20 with or without moving the support table 62, and attach the adhesive sheet AS to the adherend WK. When the protruding area ASH is sandwiched between the adherend WK (see FIG. 1(D)), an energy applying means for applying a predetermined energy equivalent to the predetermined energy applied by the bending and attaching means 30 may be arranged at the position of the holding surface 62A with which the protruding area ASH abuts. Alternatively, a support table 64 having a holding surface 64A with a size such that the outer edge of the adherend WK protrudes may be employed, and a configuration may be adopted in which the bending and attaching means 30 can attach the protruding area ASH to the second surface WK2 without lifting the adherend WK with the lift table 64. Alternatively, a configuration may be adopted in which the adherend WK is lifted by other driving devices without employing the lift table 64, and the bending and attaching means 30 can attach the protruding area ASH to the second surface WK2. It may or may not be provided in the sheet attaching device EA of the present invention.

[0031] The sheet attaching device EA may attach a plurality of adhesive sheets AS to the adherend WK, or may attach the adhesive sheet AS to the adherend WK with the adherend WK arranged upside down or sideways.

[0032] Subsequently, the sheet AS may be deformed in a first manner by heat other than 80°C, such as 60°C or 200°C, or by electromagnetic waves such as ultraviolet rays, infrared rays, visible light, sound waves, X-rays or gamma rays, or by first energy such as hot water or hot air. It may also be deformed in a first manner with shrinkage or expansion or without shrinkage or expansion due to the first energy. It may be deformed in a second manner by heat other than 150°C, such as 50°C or 100°C, or by electromagnetic waves such as ultraviolet rays, infrared rays, visible light, sound waves, X-rays or gamma rays, or by second energy such as hot water or hot air. It may also be deformed in a second manner with shrinkage or expansion or without shrinkage or expansion due to the second energy. For example, the first base material BS1 may be deformed in a first manner by ultraviolet rays as the first energy, and the second base material BS2 may be deformed in a second manner by infrared rays as the second energy. Or the first base material BS1 may be deformed in a first manner by X-rays as the first energy, and the second base material BS2 may be deformed in a second manner by cold air as the second energy, etc. The combination of the first energy and the second energy may be any combination. The first base material BS1 may be laminated on the second base material BS2, and the adhesive layer AD may be laminated on the first base material BS1. One or more base materials may be laminated between the first base material BS1 and the second base material BS2. One or more base materials may be laminated between the adhesive layer AD and the first base material BS1 or the second base material BS2. The first base material BS1, the second base material BS2 and the adhesive layer AD may be laminated, and one or more base materials may be laminated on the surface opposite to the surface on which the adhesive layer AD is laminated. For example, it may have a two-layer structure with the adhesive layer AD laminated on one base material. This one base material may be deformed in a first manner by the first energy, and the adhesive layer AD may be deformed in a second manner by the second energy. Or it may contain both a substance that is deformed in a first manner by the first energy and a substance that is deformed in a second manner by the second energy in one base material, etc. It may also have a single-layer structure of only the adhesive layer AD.The adhesive layer AD may also include both a substance that causes a first deformation with a first energy and a substance that causes a second deformation with a second energy. Alternatively, in addition to the first and second energies, even more energies such as a third energy and a fourth energy may be applied to cause even more deformations such as a third deformation and a fourth deformation. The sheet affixing device EA may employ an adhesive sheet AS that is formed into an annular shape by forming a hole in the central portion, and affix the adhesive sheet AS to the outer edge of the first surface WK1 and the outer edge of the second surface WK2 of the adherend WK. The adherend WK may have a second surface WK2 that is the back surface located on the back side of the first surface WK1, or may be any surface different from the first surface WK1, such as a side surface where the second surface WK2 is located between the first surface WK1 and the back surface.

[0033] The materials, types, shapes, etc. of the adhesive sheet AS and the adherend WK in the present invention are not particularly limited. For example, the adhesive sheet AS and the adherend WK may be circular, elliptical, polygonal such as triangular or quadrilateral, or other shapes. The adhesive sheet AS may also be of an adhesive form such as pressure-sensitive adhesiveness or heat-sensitive adhesiveness. When a heat-sensitive adhesive adhesive sheet AS is adopted, it may be adhered by an appropriate method such as providing a heating means such as an appropriate coil heater or the heating side of a heat pipe for heating the adhesive sheet AS. Further, such an adhesive sheet AS may be, for example, a single-layer one having only an adhesive layer, a two-layer one in which a base material and an adhesive layer are laminated, a three-layer or more-layer one in which one or more intermediate layers are laminated between the base material and the adhesive layer, a three-layer or more-layer one in which one or more cover layers are laminated on the upper surface of the base material, one in which the base material, the intermediate layer or the cover layer is detachably provided, a single-layer double-sided adhesive sheet composed only of an adhesive layer, a double-sided adhesive sheet in which adhesive layers are laminated on both outermost surfaces of one or more intermediate layers, or the like, and may be of any type. Furthermore, as the adherend WK, for example, it may be a single object such as food, a resin container, a semiconductor wafer such as a silicon semiconductor wafer or a compound semiconductor wafer, a circuit board, an information recording substrate such as an optical disk, a glass plate, a steel plate, a pottery, a wooden board or a resin, or a composite formed of two or more of them, and can also target any form of member or article. Note that the adhesive sheet AS may be, for example, any sheet, film, tape, etc., such as a label for information description, a decorative label, a protective sheet, a dicing tape, a die attach film, a die bonding tape, a resin sheet for forming a recording layer, etc., when read in terms of function and application.

[0034] The drive devices in the above embodiment can employ electric devices such as a rotary motor, a linear motor, a linear motor, a single-axis robot, an articulated robot having two or three or more joints, actuators such as an air cylinder, a hydraulic cylinder, a rodless cylinder and a rotary cylinder, etc., and can also employ those directly or indirectly combined. In the above-described embodiment, when a rotating member such as a roller is employed, a driving device for rotationally driving the rotating member may be provided, or the surface of the rotating member or the rotating member itself may be formed of a deformable member such as rubber or resin, or the surface of the rotating member or the rotating member itself may be formed of a non-deformable member. Further, instead of a roller, other members such as a shaft or a blade that rotates or does not rotate may be employed. When a pressing means such as a pressing roller or a pressing head or a pressing member that presses an object to be pressed is employed, in addition to or in place of those exemplified above, in addition to a roller, a round bar, a blade material, a brush-like member, a means using blowing of a gas such as air or gas may be employed. The pressing member may be formed of a deformable member such as rubber, resin, or sponge, or may be formed of a non-deformable member such as metal or resin. When a peeling means such as a peeling plate or a peeling roller or a peeling member that peels an object to be peeled is employed, in addition to or in place of those exemplified above, a plate-like member, a round bar, a roller, or the like may be employed. The peeling member may be formed of a deformable member such as rubber or resin, or may be formed of a non-deformable member. When a supporting (holding) means or a supporting (holding) member that supports (holds) a supported member (held member) is employed, a gripping means such as a mechanical chuck or a chuck cylinder, a Coulomb force, an adhesive (adhesive sheet, adhesive tape), a pressure-sensitive adhesive (pressure-sensitive adhesive sheet, pressure-sensitive adhesive tape), a magnetic force, Bernoulli adsorption, suction adsorption, a driving device, or the like may be employed to support (hold) the supported member. When a cutting means or a cutting member that cuts a member to be cut or forms a notch or a cutting line in the member to be cut is employed, in addition to or in place of those exemplified above, a cutter blade, a laser cutter, an ion beam, firepower, heat, water pressure, a heating wire, a means using blowing of a gas or a liquid, or the like may be employed for cutting, or a combination of an appropriate driving device may be moved for cutting.

Explanation of Reference Numerals

[0035] EA…Sheet sticking device 10…Feeding means 20…Pressing means 30…Bending and sticking means 31…Energy imparting means 40…Inducing means 50…Overhang region pressing means AS…Adhesive sheet ASH…Overhang region WK…Adherend WK1…First surface WK2…Second surface WKE…Outer edge

Claims

1. Supply means for supplying an adhesive sheet deformable by a predetermined energy; Pressing means for pressing and attaching the adhesive sheet to the first surface so as to form an overhanging region in which the adhesive sheet supplied by the supply means protrudes from the outer edge of the first surface of the adherend; In a sheet attaching device comprising bending and attaching means for deforming the overhanging region by applying the predetermined energy thereto and bending the overhanging region in a direction of a second surface different from the first surface and attaching the overhanging region to the second surface, The adhesive sheet undergoes a predetermined deformation corresponding to each energy when different plural energies are applied thereto; The sheet attaching device, wherein the bending and attaching means includes energy applying means for applying different plural energies to the overhanging region.

2. The sheet attaching device according to claim 1, further comprising guiding means for guiding the overhanging region in the direction of the second surface.

3. The sheet attaching device according to claim 1 or 2, further comprising overhanging region pressing means for pressing the overhanging region against the second surface.

4. A supply step of supplying an adhesive sheet deformable by a predetermined energy; A pressing step of pressing and attaching the adhesive sheet to the first surface so as to form an overhanging region in which the adhesive sheet supplied in the supply step protrudes from the outer edge of the first surface of the adherend; In a sheet attaching method of performing a bending and attaching step of deforming the overhanging region by applying the predetermined energy thereto and bending the overhanging region in a direction of a second surface different from the first surface and attaching the overhanging region to the second surface, The adhesive sheet undergoes a predetermined deformation corresponding to each energy when different plural energies are applied thereto; The sheet attaching method, wherein in the bending and attaching step, an energy applying step of applying different plural energies to the overhanging region is performed.

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