Cutting blade and method for manufacturing the cutting blade

Abstract

To provide a cutting blade which suppresses strain generated in a blade body, and can perform cutting work with high accuracy, and a cutting blade manufacturing method.SOLUTION: A cutting blade 100 includes: a blade body 10 which is annularly formed and has a cutting edge 11A formed on an outer peripheral surface 11; a first hub member 110 which has a first blade mounting surface 112 that is annularly formed around an axial line O and is arranged on one side A of the blade body 10; a second hub member 120 which has a second blade mounting surface 122 that is annularly formed around the axial line O and is arranged on the other side B of the blade body 10; a first adhesive resin part 118 for connecting the first hub member 110 and the blade body 10; and a second adhesive resin part 128 for connecting the second hub member 120 and the blade body 10.SELECTED DRAWING: Figure 3

Description

Technical Field

[0001] The present invention relates to a cutting blade used for cutting a substrate such as a semiconductor material into chip-like pieces and a method for manufacturing the cutting blade.

Background Art

[0002] As is well known, when cutting a substrate such as a semiconductor material into chip-like pieces, a cutting blade formed in a circular shape is used. As such a cutting blade for fragmenting such a substrate, for example, a resin blade (cutting blade) in which abrasive grains are dispersed and arranged in a bond phase made of a resin material (resin), or a metal blade in which abrasive grains are dispersed and arranged in a metal bond phase mainly composed of Cu-Sn is widely used (see, for example, Patent Documents 1 and 2).

[0003] On the other hand, as one form for stably rotating the cutting blade, a hub-type cutting blade in which a blade body is integrally formed and held on a hub member is disclosed (see, for example, Patent Document 3). Further, in order to efficiently manufacture such a hub-type cutting blade, a technique for efficiently manufacturing by connecting a hub member and a blade body with an adhesive is disclosed (see, for example, Patent Document 4).

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Patent Document 2

Patent Document 3

Patent Document 4

Summary of the Invention

Problems to be Solved by the Invention

[0005] However, in the hub-type cutting blade (cutting blade) described in Patent Document 4, depending on the material of the adhesive or the like, when it cures between the hub member and the blade body, it may shrink and cause distortion in the blade body. Such distortion generated in the blade body may cause, for example, significant vibration or the like at the tip side (outer peripheral edge) of the blade body when performing a cut with a large load applied to the blade body.

[0006] Also, for example, when cutting electronic material components such as a QFN (Quad Flat Non lead package) in which a large number of elements are collectively mounted on a lead frame and molded together, or an IrDA (Infrared Data Association) standard optical transmission module (hereinafter referred to as IrDA) having a substrate with plating such as Ni, Au, or Cu applied to the inner peripheral surface of through holes formed in a glass epoxy resin substrate, it is desirable that the distortion generated in the blade body be as small as possible.

[0007] This invention has been made in consideration of such circumstances, and an object thereof is to provide a cutting blade and a cutting blade manufacturing method capable of suppressing distortion generated in the blade body and performing cutting processing with high precision.

Means for Solving the Problems

[0008] In order to solve the above problems, this invention proposes the following means. (1) The first aspect of the present invention is a cutting blade that rotates around an axis to cut a workpiece, which is formed in an annular shape centered on the axis, and abrasive grains are dispersed and arranged in a bond phase having a circular hole centered on the axis on the inner peripheral side, and a blade body having a cutting edge formed on the outer peripheral surface of the bond phase; a first hub member formed in an annular shape centered on the axis and having a first blade mounting surface with a circular hole centered on the axis formed on the inner peripheral side, and disposed on one side of the blade body in the axial direction; a first adhesive resin portion disposed between the blade body and the first blade mounting surface; a second hub member formed in an annular shape centered on the axis and having a second blade mounting surface with a circular hole centered on the axis formed on the inner peripheral side, and disposed on the other side of the blade body in the axial direction; and a second adhesive resin portion disposed between the blade body and the second blade mounting surface. The first hub member is connected to the blade body and the first adhesive resin portion, and the second hub member is connected to the blade body and the second adhesive resin portion.

[0009] According to the cutting blade of the present invention, it includes a blade body, a first hub member having a first blade mounting surface formed in an annular shape and disposed on one side of the blade body in the axial direction, a first adhesive resin portion disposed between the blade body and the first blade mounting surface, a second hub member having a second blade mounting surface formed in an annular shape and disposed on the other side of the blade body, and a second adhesive resin portion disposed between the blade body and the second blade mounting surface. The first hub member is connected to the blade body and the first adhesive resin portion, and the second hub member is connected to the blade body and the second adhesive resin portion. That is, one side of the blade body in the axial direction is connected to the first hub member via the first adhesive resin portion, and the other side is connected to the second hub member via the second adhesive resin portion. Therefore, shrinkage occurs in the blade body due to the first adhesive resin portion and the second adhesive resin portion. Therefore, even if the adhesive cures and shrinkage occurs, the shrinkage on the first blade mounting surface side and the second blade mounting surface side cancels each other out, so that the distortion generated in the blade body due to shrinkage can be reduced. As a result, the distortion generated in the blade body can be suppressed, and cutting can be performed with high precision. Moreover, even when cutting is performed at high speed rotation or high load, the workpiece can be cut with high precision.

[0010] In addition, since the blade body is connected to the hub member via the adhesive resin portion, the blade body is prevented from being abruptly bent at the outer peripheral edge of the hub member, and when the blade body comes into contact with the workpiece, the blade body is prevented from cracking.

[0011] Here, the adhesive resin portion refers to a portion where an adhesive applied or disposed between the hub member and the blade body cures due to changes over time, drying, chemical reaction, etc., and adheres (connects) the hub member and the blade body. In addition, the adhesive includes anaerobic adhesives, ultraviolet curable resins that are cured by ultraviolet rays, etc. Also included are adhesive resins having fluidity, sheet-like adhesive resins formed in a sheet shape, and those that do not have fluidity at normal temperature but have fluidity and cure under physical conditions such as temperature to function as an adhesive. In addition, the adhesive resin portion (adhesive) may be composed of a plurality of substances, such as a mixture of a conductive substance, etc., being dispersed. Moreover, for example, the anaerobic adhesive may have the property of reacting with ultraviolet rays and curing. When it has a plurality of properties, it may be classified as either an anaerobic or ultraviolet curable adhesive within the range recognized by those skilled in the art based on the main property.

[0012] (2) The cutting blade according to (1) above, wherein the first hub member has a boss portion extending along the axial direction toward the second hub member, and a hole into which the boss portion is inserted along the axis may be formed in the second hub member.

[0013] According to the cutting blade of the present invention, the first hub member has a boss portion extending along the axial direction toward the second hub member, and a hole is formed in the second hub member for inserting the boss portion along the axis. Therefore, by approaching the first hub member and the second hub member toward each other along the axis and inserting the boss portion into the hole, the first hub member and the second hub member can be easily and efficiently coaxially arranged.

[0014] (3) In the cutting blade according to the above (1) or (2), at least one of the first blade mounting surface and the second blade mounting surface may have a surface roughness formed to be Rmax 5 to 50 μm.

[0015] According to the cutting blade of the present invention, since at least one of the first blade mounting surface and the second blade mounting surface has a surface roughness Rmax of 5 to 50 μm, when a fluid adhesive is applied and then cured to form an adhesive resin portion, the adhesive resin portion can stably adhere to the blade mounting surface. Further, even when a low-fluidity (plastic-deformable) adhesive resin is disposed and cured to form an adhesive resin portion, the adhesive resin portion stably adheres to the blade mounting surface. As a result, the blade body and the hub member can be stably adhered and connected.

[0016] (4) A second aspect of the present invention is that, in the cutting blade according to any one of the above (1) to (3), at least one side surface of the blade body in the axial direction may have abrasive grains protruding from the surface of the bond phase.

[0017] According to the cutting blade of the present invention, since at least one side surface of the blade body in the axial direction has abrasive grains protruding from the surface of the bond phase, when an adhesive is applied and cured to form an adhesive resin portion, the adhesive resin portion can stably adhere to the blade body. As a result, the blade body and the hub member can be stably adhered and connected.

[0018] (5) The second aspect of this invention is a cutting blade manufacturing method for manufacturing the cutting blade according to any one of the above (1) to (4), comprising a hub preparation step of preparing a first hub member and a second hub member, a blade body preparation step of preparing a blade body, and a hub mounting step of bringing the first hub member with an adhesive applied to the first blade mounting surface and the second hub member with an adhesive applied to the second blade mounting surface close to and into contact with the blade body along the axis to connect the blade body with the first hub member and the second hub member.

[0019] According to the cutting blade manufacturing method of this invention, in the hub preparation step, a first hub member and a second hub member are prepared, in the blade body preparation step, a blade body is prepared, and in the hub mounting step, the first hub member with an adhesive applied to the first blade mounting surface and the second hub member with an adhesive applied to the second blade mounting surface are brought close to and into contact with the blade body along the axis to connect the blade body with the first hub member and the second hub member. Therefore, the blade body can be efficiently connected with the first hub member and the second hub member. As a result, it is possible to efficiently manufacture a cutting blade capable of suppressing distortion generated in the blade body and performing cutting processing with high precision.

[0020] (6) In the cutting blade manufacturing method according to the above (5), an anaerobic adhesive may be applied to the first blade mounting surface and the second blade mounting surface.

[0021] According to the cutting blade manufacturing method of this invention, since an anaerobic adhesive is applied (disposed) to the first blade mounting surface and the second blade mounting surface, the anaerobic adhesive cures by bringing the blade body into close contact with the first blade mounting surface and the second blade mounting surface. As a result, the blade body can be efficiently connected with the first hub member and the second hub member.

Effects of the Invention

[0022] According to the cutting blade of the present invention, it is possible to suppress the distortion generated in the blade body and perform cutting processing with high precision. According to the method for manufacturing a cutting blade of the present invention, it is possible to efficiently manufacture a cutting blade capable of suppressing the distortion generated in the blade body and performing cutting processing with high precision.

Brief Description of the Drawings

[0023]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

Figure 9

Figure 10

Modes for Carrying Out the Invention

[0024] <First Embodiment> Hereinafter, with reference to FIGS. 1 to 5, a cutting blade according to a first embodiment of the present invention will be described. FIG. 1 is a perspective view for explaining a schematic configuration of a cutting blade according to a first embodiment of the present invention, FIG. 2 is a perspective view showing a disassembled state excluding an adhesive resin portion, and FIG. 3 is a longitudinal sectional view including an axis. Further, FIG. 4 is a view seen along the axis for explaining a schematic configuration of the blade body, and FIG. 5 is a sectional view taken along the arrow V-V in FIG. 4.

[0025] In FIGS. 1 to 5, reference numeral 100 denotes a cutting blade, reference numeral 10 denotes a blade body, reference numeral 110 denotes a first hub member, reference numeral 112 denotes a first blade mounting surface, reference numeral 118 denotes a first adhesive resin portion, reference numeral 120 denotes a second hub member, reference numeral 122 denotes a second blade mounting surface, and reference numeral 128 denotes a second adhesive resin portion.

[0026] As shown in FIGS. 1 to 3, the cutting blade 100 includes, for example, a blade body 10, a first hub member 110, a first adhesive resin portion 118 disposed between the blade body 10 and the first hub member 110, a second hub member 120, and a second adhesive resin portion 128 disposed between the blade body 10 and the second hub member 120. The blade body 10 and the first hub member 110 are connected by the first adhesive resin portion 118, and the blade body 10 and the second hub member 120 are connected by the second adhesive resin portion 128.

[0027] The cutting blade 100 is capable of cutting a wafer (a substrate such as a semiconductor material) into individual pieces such as IC chips. Specifically, the cutting blade 100 is used, for example, for precision cutting (cutting) of a workpiece such as a brittle material (hard and brittle material) such as glass, ceramics, or quartz used in semiconductor devices (electronic material components).

[0028] Further, although not particularly shown, the cutting blade 100 has its blade body 10 attached to the main shaft of the cutting device via a first hub member 110. While rotating the blade body 10 around the axis (central axis) O, it is moved in a direction perpendicular to the axis O (for example, the vertical direction) to cut a workpiece (not shown).

[0029] Here, in this specification, the direction along the axis O direction of the blade body 10 is referred to as the width direction, the direction perpendicular to the axis O is referred to as the radial direction, and the direction of orbiting around the axis O may be referred to as the circumferential direction. Also, in FIGS. 1 to 5, for convenience of explanation, the thickness of the blade body 10 is shown thicker than the actual.

[0030] Also, at the central portion in the radial direction (axis O) of the blade body 10, a circular mounting hole 13 that penetrates the blade body 10 in the width direction with the axis O as the center is formed. That is, the blade body 10 is specifically in an annular plate shape. Here, the "blade body 10 having a circular plate shape" as used in this specification is intended to include the case of being in an annular plate shape. Also, the numerical range indicated by "~" in the specification includes the lower limit value and the upper limit value (that is, it indicates "above" and "below").

[0031] As shown in FIGS. 2 to 5, the blade body 10 is formed in a disk shape (annular shape). Also, on the inner peripheral side of the blade body 10, for example, a circular hole 13 with a diameter of 42.00 mm is formed coaxially with the axis O1. The dimensions of the cutting blade 100 can be arbitrarily set. In this embodiment, for example, the outer diameter is φ55.05 mm, the inner diameter (diameter of the mounting hole) is φ40 mm, and the thickness t is 20 μm (set to 10 to 40 μm).

[0032] Further, the blade body 10 includes, for example, an electroformed nickel (Ni) bond phase (e.g., a dispersed nickel (Ni) plating layer, (nickel (Ni) bond phase), electroformed metal layer) 15 and diamond super abrasive grains (abrasive grains) 16 dispersed and arranged in the electroformed nickel (Ni) bond phase 15. Also, the blade body 10 has a cutting edge 11A formed on its outer peripheral surface (outer peripheral portion) 11. Further, a filler may be provided as necessary.

[0033] The electroformed nickel (Ni) bond phase 15 is formed by plating nickel (Ni) or an alloy mainly composed of nickel (Ni). As the alloy mainly composed of nickel constituting the electroformed nickel (Ni) bond phase 15, for example, nickel - phosphorus (Ni - P), nickel - cobalt (Ni - Co), nickel - boron (Ni - B) are preferably applied.

[0034] Also, the diamond super abrasive grains 16 are composed of, for example, diamonds with a size of 3 - 10 μm (average particle size 5 μm) and a concentration of 50 - 125. Also, the diamond super abrasive grains 16 are exposed from the surface of the electroformed nickel (Ni) bond phase 15 by about 2 μm on both side surfaces 12A, 12B (12) on both sides in the axial direction O of the blade body 10.

[0035] As shown in FIGS. 1 - 3, the first hub member 110 is arranged, for example, on one side A in the axial direction O of the blade body 10. The material for forming the first hub member 110 can be arbitrarily set, but in this embodiment, it is formed of, for example, an aluminum (Al) alloy.

[0036] The first hub member 110 includes a first blade mounting surface 112 facing the blade body 10, a cylindrical boss portion (boss portion) 113 extending from the first blade mounting surface 112 toward the other side B, an inclined portion 114 extending from the first blade mounting surface 112 toward the one side A and having a reduced diameter toward the one side A, and a drive source mounting portion 115 connected to the one side A of the inclined portion 114 and having an increased diameter toward the one side A.

[0037] When viewed along the axis O direction, the first blade mounting surface 112 has an outer shape formed in a circular shape, and a cylindrical boss portion (boss portion) 113 centered on the axis O is disposed on the inner peripheral side. That is, the first blade mounting surface 112 is formed in an annular shape.

[0038] Also, the outer diameter of the first blade mounting surface 112 is formed to be smaller than that of the blade body 10. Specifically, from the outer peripheral portion of the first blade mounting surface 112 outward, the outer peripheral edge portion of the blade body 10 protrudes as a cutting edge 11A.

[0039] Also, the surface roughness of the first blade mounting surface 112 can be arbitrarily set. In this embodiment, for example, it is formed with a surface roughness Rmax of 5 to 50 μm (JIS B0601 1982). In order to form the surface roughness of the first blade mounting surface 112 to a surface roughness Rmax of 5 to 50 μm, for example, sandblasting, shot blasting, or the like is performed.

[0040] The cylindrical boss portion (boss portion) 113 is disposed, for example, on the inner peripheral side of the first blade mounting surface 112 centered on the axis O and is formed in a cylindrical shape coaxial with the axis O. Also, when viewed along the axis O, a circular hole 110H centered on the axis O is formed on the inner peripheral side of the cylindrical boss portion (boss portion) 113. The circular hole 110H is formed, for example, to penetrate from the one side A to the other side B of the first hub member 110 along the axis O. The outer diameter of the cylindrical boss portion (boss portion) 113 can be arbitrarily set. In this embodiment, it is formed so as to be insertable into the circular hole 13 of the blade body 10 and the circular hole 120H of the second hub member 120 described later.

[0041] As shown in FIGS. 1 to 3, for example, the inclined portion 114 extends from the first blade mounting surface 112 along the axis O toward the other side B, and is formed in a substantially truncated conical shape that tapers as it goes toward the one side A.

[0042] As shown in FIGS. 1 to 3, for example, the drive source mounting portion 115 is formed in a substantially truncated conical shape opposite to the inclined portion 114 that is connected to the one side A of the inclined portion 114 and expands in diameter as it goes toward the one side A. Then, by inserting and attaching the main shaft of the cutting device into the circular hole 110H, rotation is transmitted from the cutting device to the cutting blade 100.

[0043] As shown in FIG. 3, the first adhesive resin portion 118 is disposed between the blade body 10 and the first blade mounting surface 112, and connects the blade body 10 and the first hub member 110. The first adhesive resin portion 118 can be arbitrarily set. For example, it is preferably such that the shrinkage rate during curing is small.

[0044] In this embodiment, the first adhesive resin portion 118 is formed, for example, by curing an anaerobic adhesive. Note that instead of the anaerobic adhesive, it may be formed by curing an ultraviolet curable adhesive, an adhesive mainly composed of an epoxy resin or a cyanoacrylate resin. Note that instead of the epoxy resin or the cyanoacrylate resin, the first adhesive resin portion 118 may be formed by an acrylic resin-based adhesive or the like.

[0045] Further, the first adhesive resin portion 118 is set such that its outer diameter, thickness (e.g., 40 μm to 100 μm), elastic modulus, holding force (adhesive force), etc. can maintain, for example, the flatness (perpendicularity with respect to the axis O1) of the blade body 10 and the blade body 10 will not be damaged by torsional deformation due to the cutting torque when the cutting blade 100 cuts the workpiece. This setting is preferably adopted. Also, for example, it is preferable that the first hub member 110 and the blade body 10 have conductivity to the extent that they function as a touch sensor, but whether the adhesive resin portion 118 has conductivity can be arbitrarily set.

[0046] As shown in FIGS. 2 and 3, the second hub member 120 has, for example, a circular outer shape, and a circular hole 120H centered on the axis O is formed on the inner peripheral side. That is, the second hub member 120 is, for example, a ring-shaped flat plate formed in an annular shape when viewed along the axis O direction. The material forming the second hub member 120 can be arbitrarily set, but in this embodiment, it is formed of, for example, an aluminum (Al) alloy.

[0047] The second blade mounting surface 122 is formed on the surface of one side A of the second hub member 120. Also, the second blade mounting surface 122 is formed in an annular shape with a circular hole 120H centered on the axis O formed on the inner peripheral side when viewed along the axis O.

[0048] Also, the outer diameter of the second blade mounting surface 122 is formed to be smaller than that of the blade body 10. Specifically, from the outer peripheral portion of the second blade mounting surface 122 outward, the outer peripheral edge of the blade body 10 protrudes as the cutting edge 11A.

[0049] Also, the surface roughness of the second blade mounting surface 122 can be arbitrarily set, but in this embodiment, it is formed to have a surface roughness Rmax of 5 to 50 μm (JIS B0601 1982), for example. In order to form the surface roughness of the second blade mounting surface 122 to a surface roughness Rmax of 5 to 50 μm, for example, sandblasting, shot blasting, or the like is performed.

[0050] The circular hole 120H is formed coaxially and substantially the same diameter as the circular hole 13 of the blade body 10 when viewed along the axis O, and penetrates the second hub member 120 in the thickness direction from one side A to the other side B. Further, as shown in FIG. 3, the cylindrical boss portion (boss portion) 113 of the first hub member 110 can be inserted into the circular hole 120H.

[0051] As shown in FIG. 3, the second adhesive resin portion 128 is disposed between the blade body 10 and the second blade mounting surface 122, and connects the blade body 10 and the second hub member 120. In this embodiment, the second adhesive resin portion 128 is formed, for example, by curing an anaerobic adhesive. The second adhesive resin portion 128 can be arbitrarily set. For example, it is preferable that the shrinkage rate during curing is small. Also, it is preferable that the material is the same as that of the first adhesive resin portion 118. Since the others are the same as the first adhesive resin portion 118, the description is omitted.

[0052] Next, with reference to FIG. 6, an outline of the manufacturing process of the cutting blade according to the first embodiment of the present invention will be described. FIG. 6 is a flowchart for explaining an outline of the manufacturing process of the cutting blade according to the first embodiment. As shown in FIG. 6, the manufacturing process of the cutting blade includes, for example, a hub member preparation step (S101), a blade body preparation step (S102), a blade body mounting step (S103), and a dicing dres step (S104). Then, through the hub member preparation step (S101), the blade body preparation step (S102), the blade body mounting step (S103), and the dicing dres step (S104), the cutting blade 100 is completed.

[0053] (1) Hub member preparation step (S101) First, prepare the first hub member 110 and the second hub member 120. The hub member preparation step is performed, for example, in the following (1-1) to (1-2).

[0054] (1-1) The first hub member 110 and the second hub member 120 are formed, for example, by using a well-known machining device to cut a round bar made of an aluminum alloy while rotating it around its axis and then cutting it into individual hub members.

[0055] (1-2) Surface-treat the blade mounting surfaces 112 and 122 by sandblasting or shot blasting to form unevenness. When performing surface treatment by sandblasting or shot blasting, for example, use alumina (Al2O3) of #120 (about 90 to 108 μm). When surface-treating the blade mounting surfaces 11 and 122 to form unevenness, for example, setting the surface roughness Rmax to 5 to 50 μm is suitable for stably fixing the adhesive to the first hub member 110 and the second hub member 120. Note that whether to form the blade mounting surfaces 11 and 122 can be arbitrarily set.

[0056] Note that the processing method for forming unevenness on the blade mounting surfaces 112 and 122 can be arbitrarily set. Also, the range of the surface roughness in the case of processing can be arbitrarily set.

[0057] (2) Blade body forming step (electroformed nickel (Ni) blade body forming step) (S102) The blade body (electroformed nickel (Ni) blade body) performs the following (2-1) to (2-5).

[0058] (2-1) Prepare a SUS base alloy (stainless steel base alloy) First, for example, prepare a SUS base alloy (stainless steel base alloy). The SUS base metal is preferably mirror-finished. Also, it is preferable to mask the portions of the SUS base metal that do not require nickel plating according to the shape of the blade body 10.

[0059] (2-2) Dispersion plating Next, a nickel plating solution in which diamond superabrasives 16 are dispersed is stored in a dispersion plating apparatus (not shown), and the SUS base metal is immersed in the nickel plating solution. Using nickel as the anode, while stirring the nickel plating solution, nickel plating is grown on the SUS base metal by electrolytic plating. As a result, a blade body original plate (dispersion nickel plating layer (nickel layer in which diamond superabrasives 16 are dispersed)) constituting the blade body is formed. When a filler is to be dispersed and arranged in the bond phase 15, it is dispersed in this plating solution. Note that instead of the electrolytic plating method, a plating layer may be formed by electroless plating.

[0060] (2-3) Etching process of the blade body original plate Next, by etching the blade body original plate, diamond superabrasives 16 are exposed from the surfaces of the side surfaces 12A, 12B (12) on both sides of the electroformed nickel (Ni) (bond phase) 15 to make them prominent. Whether or not to expose the diamond superabrasives 16 from the surfaces of the side surfaces 12A, 12B (12) on both sides of the electroformed nickel (Ni) (bond phase) 15 can be arbitrarily set.

[0061] (2-4) Inner diameter machining (2-5) Outer diameter machining (2-4) Inner diameter machining and (2-5) outer diameter machining are carried out using well-known machining. Also, (2-5) outer diameter machining may be carried out after the blade body mounting process. By performing the above (2-1) to (2-5), the blade body is completed. Note that the above (2-1) to (2-5) are shown as an example and can be appropriately changed or omitted.

[0062] (3) Blade body mounting process (S103) Mount the blade body 10 on the hub members 110 and 120. The mounting of the blade body 10 to the hub members 110 and 120 is performed, for example, as follows in (3-1) to (3-2).

[0063] (3-1) Adhesive application Next, apply an adhesive for forming the first adhesive resin portion 118 and the second adhesive resin portion 128 to the first blade mounting surface 112 of the first hub member 110 and the second blade mounting surface 122 of the second hub member 120. When applying the adhesive for forming the first adhesive resin portion 118 to the blade mounting surfaces 112 and 122 of the hub members 110 and 120, it is preferable to apply it to a uniform thickness, for example, by a doctor blade or spin coating. Note that the application of the adhesive is not limited to a doctor blade or spin coating, and various well-known application means (for example, a spray nozzle, etc.) can be applied according to the physical properties (for example, viscosity, etc.) of the adhesive. Also, the adhesive for forming the first adhesive resin portion 118 and the second adhesive resin portion 128 can be arbitrarily set, but it is preferable to use anaerobic adhesion of the same material.

[0064] (3-2) Adhesion of the blade body and the hub member Next, bond the blade body to the first hub member and the second hub member. When mounting (adhering) the blade body 10 to the first hub member 110 and the second hub member 120, for example, place the first hub member 110 on a flat surface plate with the first blade mounting surface 112 and the cylindrical boss portion 113 facing upward. Then, while aligning the axis O1 of the first hub member 110 with the axis O of the blade body 10, specifically insert the cylindrical boss 113 of the first hub member 110 into the circular hole 13 of the blade body 10, place the blade body 10 on the first blade mounting surface 112, press, and bond. After that, the second hub member 120 with the second mounting surface 122 facing downward is placed on and pressed against the blade body 10 bonded to the first hub member 110 along the axis O, and then bonded. After that, the adhesive is cured to form the first adhesive resin portion 118 and the second adhesive portion 128.

[0065] (4) Dicing dressing process (S104) Next, the blade body is diced and dressed to make it prominent. The dressing of the blade body 10 in the dicing dressing process is performed, for example, by setting it in a dicing machine and cutting a dressing board. By dicing and dressing, the outer peripheral portion 11 of the blade body 10 is made prominent to form the cutting edge 11A.

[0066] According to the cutting blade 100 according to the first embodiment, one side of the blade body in the axial direction is connected to the first hub member via the first adhesive resin portion, and the other side is connected to the second hub member via the second adhesive resin portion. Therefore, shrinkage occurs in the blade body due to the first adhesive resin portion and the second adhesive resin portion. Therefore, even if the adhesive cures and shrinkage occurs, the shrinkage on the first blade mounting surface side and the second blade mounting surface side cancels each other out, so that the distortion generated in the blade body due to shrinkage can be reduced. As a result, the cutting blade can be manufactured with high precision and efficiency while suppressing distortion in the blade body. Also, even when performing cutting processing at high speed rotation or high load, the workpiece can be cut with high precision.

[0067] Also, according to the cutting blade 100 according to the first embodiment, the first hub member has a boss portion extending along the axial direction toward the second hub member, and a hole into which the boss portion is inserted along the axis is formed in the second hub member. Therefore, the first hub member and the second hub member can be easily and efficiently coaxially arranged by approaching each other along the axis and inserting the boss portion into the hole.

[0068] Further, according to the cutting blade 100 according to the first embodiment, at least one of the first blade mounting surface and the second blade mounting surface is formed with a surface roughness Rmax of 5 to 50 μm. Therefore, when a fluid adhesive is applied and then cured to form the adhesive resin part, the adhesive resin part can be stably fixed to the blade mounting surface. Further, even when an adhesive resin with low fluidity (capable of plastic deformation) is disposed and cured to form the adhesive resin part, the adhesive resin part is stably fixed to the blade mounting surface. As a result, the blade body and the hub member can be stably adhered and connected.

[0069] Further, according to the cutting blade 100 according to the first embodiment, on both side surfaces 12A, 12B (12) of the blade body 10, diamond superabrasives 16 protrude from the surface of the electroformed nickel (Ni) phase (bond phase) 15. Therefore, the adhesive resin parts 118, 128 can be stably fixed to the blade body 10. As a result, the blade body 10 and the first and second hub members 110, 120 can be stably adhered and connected.

[0070] Further, according to the cutting blade 100 according to the first embodiment, since the hub members 110, 120 are formed of an aluminum alloy, they are lightweight and can cope with high-speed rotation (for example, 30,000 rpm or more), and the workpiece can be efficiently cut.

[0071] <Second Embodiment> Hereinafter, with reference to FIGS. 7 and 8, a cutting blade according to the second embodiment of the present invention will be described. FIG. 7 is a perspective view showing an exploded state excluding the adhesive resin part for explaining the schematic configuration of the cutting blade according to the second embodiment, and FIG. 8 is a longitudinal sectional view including the axis. In FIGS. 7 and 8, reference numeral 200 denotes a cutting blade, reference numeral 10 denotes a blade body, reference numeral 210 denotes a first hub member, reference numeral 212 denotes a first blade mounting surface, reference numeral 218 denotes a first adhesive resin portion, reference numeral 220 denotes a second hub member, reference numeral 222 denotes a second blade mounting surface, and reference numeral 228 denotes a second adhesive resin portion.

[0072] As shown in FIGS. 7 and 8, the cutting blade 200 includes, for example, a blade body 10, a first hub member 210, a first adhesive resin portion 218 disposed between the blade body 10 and the first hub member 210, a second hub member 220, and a second adhesive resin portion 228 disposed between the blade body 10 and the second hub member 220. The blade body 10 and the first hub member 210 are connected by the first adhesive resin portion 228, and the blade body 10 and the second hub member 220 are connected by the second adhesive resin portion 218.

[0073] As shown in FIGS. 7 and 8, the first hub member 210 is disposed, for example, on one side A in the direction of the axis O of the blade body 10. Although the material forming the first hub member 210 can be arbitrarily set, in this embodiment, it is formed of, for example, an aluminum (Al) alloy.

[0074] As shown in FIGS. 7 and 8, the first hub member 210 has, for example, a circular outer shape, and includes a first blade mounting surface 212 facing the blade body 10 and a cylindrical boss portion (boss portion) 213 extending from the first blade mounting surface 212 toward the other side B. That is, the first hub member 210 is formed in a multi-stage cylindrical shape centered on the axis O.

[0075] The first blade mounting surface 212 is formed on one side surface of the first hub member 210. Further, when viewed along the direction of the axis O, the first blade mounting surface 212 has a circular outer shape, and a cylindrical boss portion (boss portion) 213 centered on the axis O is disposed on the inner peripheral side. That is, the first blade mounting surface 212 is formed in an annular shape.

[0076] Further, the first blade mounting surface 212 is formed with an outer diameter smaller than that of the blade body 10. Specifically, from the outer peripheral portion of the first blade mounting surface 212 outward, the outer peripheral edge of the blade body 10 is formed to protrude as a cutting edge 11A.

[0077] The cylindrical boss portion (boss portion) 213 is disposed, for example, on the inner peripheral side of the first blade mounting surface 212 centered on the axis O and is formed in a cylindrical shape coaxial with the axis O. Further, when viewed along the axis O, the cylindrical boss portion (boss portion) 213 is formed with a circular hole 210H centered on the axis O on the inner peripheral side. The circular hole 210H is formed to penetrate, for example, from one side A to the other side B of the first hub member 210 along the axis O. The outer diameter of the cylindrical boss portion (boss portion) 213 can be arbitrarily set, but in this embodiment, it is formed to be insertable into the circular hole 13 of the blade body 10 and the circular hole 220H of the second hub member 220 described later. And by inserting and attaching the main shaft of the cutting device into the circular hole 210H, rotation is transmitted from the cutting device to the cutting blade 300.

[0078] As shown in FIG. 8, the first adhesive resin portion 218 is disposed between the blade body 10 and the first blade mounting surface 212 and connects the blade body 10 and the first hub member 210. The first adhesive resin portion 218 can be arbitrarily set, but for example, it is preferable that the shrinkage rate during curing is small. Further, in this embodiment, the first adhesive resin portion 218 is formed, for example, by curing an anaerobic adhesive. Since the first adhesive resin portion 218 is the same as the first adhesive resin portion 118 of the first embodiment, the description thereof is omitted.

[0079] The second hub member 220 includes a second blade mounting surface 222 facing the blade body 10, an inclined portion 224 extending from the second blade mounting surface 222 toward the other side B and having a reduced diameter as it extends toward the other side B, and a drive source mounting portion 225 connected to the other side B of the inclined portion 224 and having an increased diameter as it extends toward the other side B.

[0080] The material forming the second hub member 220 can be arbitrarily set. In this embodiment, for example, it is formed of an aluminum (Al) alloy.

[0081] The second blade mounting surface 222 is formed on the surface of the other side B of the second hub member 220. Further, when viewed along the direction of the axis O, the outer shape of the second blade mounting surface 222 is circular, and a circular hole 220H centered on the axis O is formed on the inner peripheral side. That is, the second blade mounting surface 222 is formed in an annular shape.

[0082] Also, the outer diameter of the second blade mounting surface 222 is formed to be smaller than that of the blade body 10. Specifically, from the outer peripheral portion of the second blade mounting surface 222 outward, the outer peripheral edge portion of the blade body 10 protrudes as a cutting edge 11A.

[0083] Also, the surface roughness of the second blade mounting surface 222 can be arbitrarily set. In this embodiment, for example, it is formed to have a surface roughness Rmax of 5 to 50 μm (JIS B0601 1982). In order to form the surface roughness of the second blade mounting surface 222 to a surface roughness Rmax of 5 to 50 μm, for example, sandblasting, shot blasting, or the like is performed.

[0084] As shown in FIG. 8, the second adhesive resin portion 228 is disposed between the blade body 10 and the second blade mounting surface 222 and connects the blade body 10 and the second hub member 220. In this embodiment, the second adhesive resin portion 128 is formed, for example, by curing an anaerobic adhesive. Since the second adhesive resin portion 228 is the same as the second adhesive resin portion 12 of the first embodiment, its description will be omitted.

[0085] <Third Embodiment> Hereinafter, with reference to FIGS. 9 and 10, a cutting blade according to the third embodiment of the present invention will be described. FIG. 9 is a perspective view showing an exploded state excluding the adhesive resin portion for explaining the schematic configuration of the cutting blade according to the third embodiment, and FIG. 10 is a longitudinal sectional view including the axis. In FIGS. 9 and 10, reference numeral 300 denotes a cutting blade, reference numeral 10 denotes a blade body, reference numeral 310 denotes a first hub member, reference numeral 312 denotes a first blade mounting surface, reference numeral 318 denotes a first adhesive resin portion, reference numeral 320 denotes a second hub member, reference numeral 322 denotes a second blade mounting surface, and reference numeral 328 denotes a second adhesive resin portion.

[0086] As shown in FIGS. 9 and 10, the cutting blade 300 includes, for example, a blade body 10, a first hub member 310, a first adhesive resin portion 318, a second hub member 320, and a second adhesive resin portion 328. The blade body 10 and the first hub member 310 are connected by the first adhesive resin portion 318, and the blade body 10 and the second hub member 320 are connected by the second adhesive resin portion 328.

[0087] As shown in FIGS. 9 and 10, the first hub member 310 is disposed, for example, on one side A in the direction of the axis O of the blade body 10. The material for forming the first hub member 310 can be arbitrarily set. In this embodiment, for example, it is formed of an aluminum (Al) alloy.

[0088] The first hub member 310 includes a first blade mounting surface 312 facing the blade body 10, an inclined portion 314 extending from the first blade mounting surface 312 toward one side A and having a reduced diameter as it extends toward one side A, and a drive source mounting portion 315 connected to one side A of the inclined portion 314 and having an increased diameter as it extends toward one side A.

[0089] When viewed along the direction of the axis O, the first blade mounting surface 312 has a circular outer shape, and a circular hole 310 is formed on the inner peripheral side, which penetrates from one side A to the other side B of the first hub member 310 with the axis O as the center. That is, the first blade mounting surface 112 is formed in an annular shape. Also, the outer diameter of the first blade mounting surface 312 is formed to be smaller than that of the blade body 10.

[0090] As shown in FIG. 10, the first adhesive resin portion 318 is disposed between the blade body 10 and the first blade mounting surface 312, and connects the blade body 10 and the first hub member 310. Since the first adhesive resin portion 318 is the same as the first adhesive resin portion 118, the description thereof is omitted.

[0091] As shown in FIGS. 9 and 10, for example, the second hub member 320 has a circular outer shape, and a circular hole 320H is formed on the inner peripheral side with the axis O as the center. That is, for example, when viewed along the direction of the axis O, the second hub member 320 is a ring-shaped flat plate formed in an annular shape. The material forming the second hub member 320 can be arbitrarily set. In this embodiment, for example, it is formed of an aluminum (Al) alloy.

[0092] The second blade mounting surface 322 is formed on the surface of one side A of the second hub member 320. Also, when viewed along the axis O, the second blade mounting surface 322 is formed in an annular shape with a circular hole 320H formed on the inner peripheral side with the axis O as the center. Further, the second blade mounting surface 322 is formed to have an outer diameter smaller than that of the blade body 10. The circular hole 320H is formed coaxially with and having substantially the same diameter as the circular hole 13 of the blade body 10 and penetrates the second hub member 320 in the thickness direction from one side A to the other side B, for example, when viewed along the axis O.

[0093] As shown in FIG. 3, the second adhesive resin portion 228 is disposed between the blade body 10 and the second blade mounting surface 322 and connects the blade body 10 and the second hub member 320. Since the second adhesive resin portion 328 is the same as the second adhesive resin portion 128, the description thereof is omitted.

[0094] In this embodiment, since the first hub member 310 and the second hub member 320 do not have a boss portion, it is preferable to use a jig or the like when mounting the first boss portion 310 and the second boss portion 320 coaxially with the axis O of the blade body 10.

[0095] According to the cutting blade 300 according to the third embodiment, since the first hub member 310 and the second hub member 320 are formed to be lightweight without having a boss portion, the blade body 10 can be easily rotated at high speed. Further, since the structure is simple, the manufacturing cost can be reduced.

[0096] Regarding the technical matters described in the above embodiment, various modifications can be made without departing from the gist of the invention.

[0097] For example, in the above embodiment, the case where the cutting blades 100, 200, and 300 include the first hub member and the second hub member has been described. However, it may be configured to include either one of the first hub member and the second hub member, or another hub member used together with the first hub member and the second hub member.

[0098] In the above-described embodiment, the case where the first hub members 110, 210, 310 and the second hub members 120, 220, 320 are formed of an aluminum alloy has been described. However, the materials for forming the first hub members 110, 210, 310 and the second hub members 120, 220, 320 may be arbitrarily set. For example, instead of an aluminum alloy, they may be formed of other metallic materials such as pure aluminum, titanium alloy, pure titanium (Ti), magnesium alloy, etc. Further, the first hub members 110, 210, 310 and the second hub members 120, 220, 320 may be formed of various resin materials that can be put to practical use, such as engineering plastics including polycarbonate, fiber-reinforced plastics, and general-purpose plastics such as acrylic resin.

[0099] In the above-described embodiment, the case where the first adhesive resin part and the second adhesive resin part are formed of an anaerobic adhesive has been described. However, the type of the adhesive can be arbitrarily set. For example, an adhesive resin formed by curing an adhesive mainly composed of an ultraviolet curable resin, an epoxy resin, or a cyanoacrylate resin may be used.

[0100] In the above-described embodiment, the case where the first blade mounting surface and the second blade mounting surface are formed with a surface roughness Rmax of 5 or more and 50 μm or less has been described. However, the surface roughness of the first blade mounting surface and the second blade mounting surface can be arbitrarily set. For example, one or both of the first hub member and the second hub member may be formed with a surface roughness Rmax of less than 5 or greater than 50 μm.

[0101] In the above-described embodiment, for example, the case where the diamond super abrasive grains (abrasive grains) 16 protrude from the bond phase 15 on the side surfaces 12A, 12B (12) on both sides of the blade body 10 has been described. However, whether or not to protrude the diamond super abrasive grains (abrasive grains) 16 from the bond phase 15 and the amount of protrusion in the case of protrusion can be arbitrarily set. For example, the diamond super abrasive grains (abrasive grains) 16 may protrude only from one side surface 12 of the blade body 10, or may be configured not to protrude on the side surfaces 12A, 12B (12) on both sides.

[0102] In addition, in the above-described embodiment, the case where the blade body 10 is an electroformed blade in which diamond super abrasive grains 16 are dispersed and arranged in a bond phase 15 made of nickel plating has been described. However, for example, an electroformed blade in which abrasive grains are dispersed in various applicable metal compounds such as Ni-P plating, Ni-Co plating, Ni-B plating, copper (Cu) or copper alloys (for example, Cu-Sn), or an electroformed blade formed of cemented carbide, a resin blade made of a phenolic resin or the like, a porous vitrified blade formed by firing a glassy (inorganic material), or various other blade bodies may be used.

[0103] For example, when forming the bond phase 15 with a resin instead of electroformed nickel (Ni), it is formed, for example, according to the following procedure. (1) First, for example, a mixed powder of materials is cold-pressed to form a resin blade blank. The mixed powder of materials is prepared by blending a powder that is a raw material for the resin bond phase and diamond super abrasive grains (abrasive grains) 16 in a predetermined ratio and mixing them until they are uniform. For example, a ball mill is used for mixing the material powders. Instead of the ball mill, a known applicable mixing device may be used. Then, this mixed powder is filled into a mold (not shown) and cold-pressed in the mold to form a disk-shaped resin blade blank. Also, a filler may be mixed as necessary.

[0104] (2) Next, the resin blade blank is hot-pressed and sintered. The hot pressing of the resin blade blank is, for example, a hot plate temperature of 200°C, a heating time of 30 minutes, and a pressure of 10 MPa. Here, hot pressing means, for example, applying pressure at a temperature at which the resin material powder is flowable.

[0105] (3) Thereafter, the inner peripheral portion and the outer peripheral portion of the resin blade blank after hot pressing are each ground to a predetermined diameter dimension, whereby the blade body (resin blade) is formed (manufactured).

[0106] Also, when forming the bond phase 15 by a metal bond phase instead of electroformed nickel (Ni), for example, it is formed by the following procedure. (1) First, a material powder constituting the metal bond phase and abrasive grains are blended at a predetermined ratio and mixed until uniform. Further, a filler may be mixed as necessary. For mixing the material powder, for example, a ball mill is used. Note that instead of the ball mill, a known applicable mixing device may be used. (2) Then, this mixed powder is filled into a mold (not shown) to form a compacted molded product. (3) Next, this compacted molded product is put into a sintering furnace and held at 800 °C for about 1 hour in an inert gas atmosphere such as nitrogen or argon to form a metal blade blank.

[0107] Also, when forming the bond phase by a vitrified bond phase instead of electroformed nickel (Ni), for example, it is formed by the following procedure. (1) First, a material powder forming the vitrified bond phase and abrasive grains are mixed to form a material powder. Further, a filler may be mixed as necessary. For mixing the material powder, for example, a ball mill is used. Note that instead of the ball mill, a known applicable mixing device may be used. (2) Next, this material powder is set in a mold to form a vitrified blade blank. (3) Then, this vitrified blade blank is sintered (for example, put into a sintering furnace and heated) to form a vitrified blade blank (cutting blade blank) of a porous body having a three-dimensional crosslinked structure.

[0108] Also, the flowchart shown in FIG. 6 shows an example and may be appropriately changed (omitted, added).

Industrial Applicability

[0109] According to the cutting blade and the method for manufacturing the cutting blade of the present invention, a highly accurate cutting blade with little distortion can be efficiently manufactured, so it is industrially applicable.

Explanation of reference numerals

[0110] 10 Blade body 15 Electroformed nickel bond phase (bond phase) 16 Diamond super abrasive grains (abrasive grains) 100, 200, 300 Cutting blades 110, 220, 310 First hub member 112, 222, 312 First blade mounting surface 113, 223 Cylindrical boss portion (boss portion) 118, 228, 318 First adhesive resin portion (adhesive) 120, 210, 320 Second hub member 122, 212, 322 Second blade mounting surface 128, 218, 328 Second adhesive resin portion (adhesive)

Claims

1. A cutting blade that rotates around an axis to cut a workpiece, a blade body in which abrasive grains are dispersed and arranged in a bond phase formed in an annular shape centered on the axis, and a circular hole centered on the axis is formed on the inner peripheral side, and a cutting edge is formed on the outer peripheral surface of the bond phase; a first hub member formed in an annular shape centered on the axis, having a first blade mounting surface in which a circular hole centered on the axis is formed on the inner peripheral side, and disposed on one side in the axial direction of the blade body; a first adhesive resin part disposed between the blade body and the first blade mounting surface; a second hub member formed in an annular shape centered on the axis, having a second blade mounting surface in which a circular hole centered on the axis is formed on the inner peripheral side, and disposed on the other side in the axial direction of the blade body; a second adhesive resin part disposed between the blade body and the second blade mounting surface; comprising: the first hub member is adhered by the blade body and the first adhesive resin part, and the second hub member is adhered by the blade body and the second adhesive resin part; the first adhesive resin part and the second adhesive resin part are applied symmetrically with respect to each other with respect to the blade body. A cutting blade characterized by the above.

2. The cutting blade according to claim 1, wherein the first hub member has a boss portion extending along the axial direction toward the second hub member, and a hole into which the boss portion is inserted along the axis is formed in the second hub member. A cutting blade characterized by the above.

3. The cutting blade according to claim 1 or 2, wherein at least one of the first blade mounting surface and the second blade mounting surface is formed with a surface roughness Rmax of 5 to 50 μm. A cutting blade characterized by the above.

4. The cutting blade according to any one of claims 1 to 3, wherein at least one side surface in the axial direction of the blade body is characterized in that abrasive grains protrude from the surface of the bond phase.

5. A method for manufacturing a cutting blade for manufacturing the cutting blade according to any one of claims 1 to 4, a hub preparation step of preparing a first hub member and a second hub member; a blade body preparation step of preparing a blade body; A hub mounting step of adhering the first hub member with an adhesive applied to the first blade mounting surface and the second hub member with an adhesive applied to the second blade mounting surface to the blade body along the axis line by bringing them close to and into contact with the blade body, and adhering the blade body to the first hub member and the second hub member. Comprising A method for manufacturing a cutting blade, characterized by this.

6. The method for manufacturing a cutting blade according to claim 5, Applying an anaerobic adhesive to the first blade mounting surface and the second blade mounting surface A method for manufacturing a cutting blade, characterized by this.

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