Fixture chuck, grinding device, and method for dividing a plate-shaped workpiece

Abstract

To implement a DBG process without using a tape.SOLUTION: A plate-like workpiece 20 in which lattice-like grooves 29 are formed on its surface 21 is held by suction using a suction surface 110 of a first jig chuck 100 having suction holes 111. Further, in this state, a rear surface 22 of the plate-like workpiece 20 is ground with a grindstone 77 so that the plate-like workpiece 20 is divided into a plurality of chips 27. At this point, the suction holes 111 of the first jig chuck 100 are respectively arranged below the chips 27 in correspondence with the respective chips 27 of the plate-like workpiece 20. Therefore, the chips 27 remain held on the suction surface 110 by being suctioned by the corresponding suction holes 111, even when the plate-like workpiece 20 is divided into the plurality of chips 27. Accordingly, the chips 27 obtained through the division can be prevented from being scattered without attaching a tape on the surface 21 of the plate-like workpiece 20.SELECTED DRAWING: Figure 12

Description

Technical Field

[0001] The present invention relates to a jig chuck, a grinding device, and a method for dividing a plate-shaped workpiece.

Background Art

[0002] In a cutting device that cuts a plate-shaped workpiece (package substrate) into chips, in order to prevent the chips from becoming scattered during cutting, instead of using a tape, a jig for holding the chips may be used (see Patent Documents 1 to 5).

[0003] Further, when a wafer having a device formed on its surface is cut by cutting a cutting blade into the surface, chipping is formed on the back surface along the kerf (cutting edge).

[0004] In order to reduce chipping, there is a DBG (Dicing Before Grinding) process in which a half cut is made from the surface of the wafer with a cutting blade to form a lattice-shaped groove, then a tape is attached to the surface and the back surface is ground with a grinding stone to form chips.

Prior Art Documents

Patent Documents

[0005]

Patent Document 1

Patent Document 2

Patent Document 3

Patent Document 4

Patent Document 5

Summary of the Invention

Problems to be Solved by the Invention

[0006] In the above-mentioned DBG process, when grinding the back surface of the wafer, a tape is used to suppress the scattering of chips. Also, when half-cutting the wafer, a tape may be used so that the chuck table can easily suck and hold the wafer.

[0007] An object of the present invention is to perform the DBG process without using a tape.

Means for Solving the Problems

[0008] The jig chuck (this jig chuck) of the present invention sucks and holds one surface of a plate-shaped workpiece having lattice-shaped grooves of a depth that does not reach the other surface on one surface, and grinds the other surface with a grinding wheel to expose the grooves and suck and hold the chips obtained by dividing the plate-shaped workpiece. which is possible A jig chuck that sucks and holds the one surface of the plate-shaped workpiece a suction surface for suction and a suction hole having one end opening to the suction surface corresponding to the chip, a supported surface which is the opposite surface of the suction surface a first communication port opening to the, a first communication path connecting the other end of the suction hole and the first communication port, and a first check valve disposed in the first communication path and closing when the suction source is detached from the suction hole; a gripped member which is arranged on the side surface of the jig chuck and holds the jig chuck, is provided. This jig chuck includes a branch portion disposed between the contact point of the first communication path with the suction hole and the first check valve, and a second communication port opening to the the periphery suction surface or side surface, a second communication path connecting the branch portion and the second communication port, and a second check valve disposed in the second communication path and closing when the suction source is detached from the suction hole. The first grinding device of the present invention is a grinding device that sucks and holds one surface of a plate-shaped workpiece in which the grooves are formed using this jig chuck, and grinds the other surface with a grinding wheel, and the the supported surface support table having a support surface for supporting the jig chuck, the support table having a first opening portion that opens the first check valve when the support surface supports the jig chuck, and the suction hole being communicable with the suction source when the support surface supports the jig chuck, and being opened on the support surface firstA table connection path, and the plate-shaped workpiece sucked and held by the suction surface of the jig chuck supported by the support surface of the support table the other surface Until the groove is exposed in the above, the grinding wheel grinds the plate-shaped workpiece the other surface To grind further includes a grinding mechanism. In the first grinding device, the support table may further include an opening / closing mechanism that opens and closes the first check valve of the jig chuck supported by the support surface by moving the first opening portion in a direction perpendicular to the support surface. The second grinding device of the present invention is a grinding device that sucks and holds one surface of a plate-shaped workpiece in which a groove is formed using the present jig chuck including the second check valve, etc., and grinds the other surface with a grinding wheel, and the jig chuck the supported surface A support table having a support surface for supporting, the support table includes a first opening portion that opens the first check valve when the support surface supports the jig chuck, and a support table connection path that is opened in the support surface so that the suction hole can communicate with the suction source when the support surface supports the jig chuck. a grinding mechanism that grinds the other surface of the plate-shaped workpiece with the grinding wheel until the groove is exposed on the other surface of the plate-shaped workpiece sucked and held by the suction surface of the jig chuck supported by the support surface of the support table, , holding the chips obtained by dividing the plate-shaped workpiece by grinding by the grinding mechanism The jig chuck holding A carry-out mechanism for carrying out from the support table and Further provided, the carry-out mechanism includes a second opening portion that opens the second check valve when the jig chuck holding Is provided. and a second table connection path that communicates the suction hole with the suction source when the second check valve is opened by the second opening portion, The method for dividing a plate-shaped workpiece of the present invention is using the first jig chuck which is this jig chuck and the second jig chuck which is this jig chuck provided with the second check valve etc., A method for dividing a plate-shaped workpiece for dividing a plate-shaped workpiece, by a first support table of a groove forming device capable of forming a lattice-shaped groove having a depth that does not reach the other surface on one surface of the plate-shaped workpiece, the A first support step of supporting a first jig chuck, and a suction surface of the first jig chuck that communicates with a suction source and sucks and holds the plate-shaped workpiece, a first suction holding step of sucking and holding the other surface of the plate-shaped workpiece, a groove forming step of forming the groove on one surface of the plate-shaped workpiece supported by the first support table and sucked and held by the first jig chuck, and maintaining the state where the first jig chuck sucks and holds the plate-shaped workpiece the , remaining , holding the first jig chuck using the gripped member, ​A first detachment step of detaching the first jig chuck from the first support table, and a suction source is communicated to suck and hold a plate-shaped workpiece the A second support step of supporting the second jig chuck by a second support table of a grinding device, and inverting the first jig chuck in a state where the plate-shaped workpiece is sucked and held, using the gripped member, One surface of the plate-shaped workpiece held by suction by the first jig chuck plate A second suction holding step of sucking and holding by a suction surface of the second jig chuck, a second detachment step of detaching the first jig chuck from the plate-shaped workpiece, and grinding the other surface of the plate-shaped workpiece held by suction by the second jig chuck supported by the second support table with a grinding wheel to expose the groove, and a grinding step.

Advantages of the Invention

[0009] In this jig chuck, a plate-shaped workpiece having lattice-shaped grooves formed on one surface is sucked and held by a suction surface having suction holes. Here, the suction holes are respectively formed corresponding to the tips of the plate-shaped workpiece divided by the grooves. Therefore, when the plate-shaped workpiece is divided into a plurality of tips by grinding the other surface of the plate-shaped workpiece with a grinding wheel, each tip is sucked by the corresponding suction hole and remains held on the suction surface.

[0010] Therefore, by using this jig chuck, it is possible to suppress the scattering of the tips when the plate-shaped workpiece is divided into a plurality of tips without sticking a tape on one surface of the plate-shaped workpiece.

Brief Description of the Drawings

[0011]

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Embodiments for Carrying Out the Invention

[0012] As shown in FIG. 1, the grinding device 1 according to the present embodiment is a device for grinding a plate-shaped workpiece 20 as a workpiece. The plate-shaped workpiece 20 is, for example, a rectangular plate-shaped workpiece and includes a front surface 21 and a back surface 22.

[0013] On the front surface 21 of the plate-shaped workpiece 20, a lattice-shaped division planned line 23 is formed. And in each region partitioned by the division planned line 23 in the plate-shaped workpiece 20, a device 25 is formed.

[0014] Before the plate-shaped workpiece 20 is ground by the grinding device 1, lattice-shaped grooves having a depth that does not reach the back surface 22 are formed on the front surface 21 along this division planned line 23. By grinding the back surface 22 of such a plate-shaped workpiece 20 with a grinding wheel, the grooves are exposed on the back surface 22, and the plate-shaped workpiece 20 is divided into a plurality of chips 27 each including one device 25 (DBG process).

[0015] As shown in FIG. 1, the grinding device 1 includes a rectangular parallelepiped base 10, a column 11 extending upward, and a control unit 7 that controls each member of the grinding device 1.

[0016] On the upper surface side of the base 10, an opening 13 is provided. And within the opening 13, a work holding mechanism 30 is arranged. The work holding mechanism 30 includes a rectangular first jig chuck 100 that holds the plate-like work 20, a grinding support table 200 that supports the first jig chuck 100, a support member 36 that supports the grinding support table 200, a table motor 34 as a table rotating member that rotates the grinding support table 200 and the support member 36, and a support column 35 capable of adjusting the inclination of the grinding support table 200.

[0017] The first jig chuck 100 holds the plate-like work 20 by sucking and holding the surface 21, which is one surface of the plate-like work 20, on which a grid-like groove having a depth that does not reach the back surface 22 is formed. The first jig chuck 100 has a suction surface 110 that sucks and holds the surface 21 of the plate-like work 20. The suction surface 110 is arranged on the upper surface of the first jig chuck 100.

[0018] The grinding support table 200 is formed in a circular shape and has a circular support surface 202 on its upper surface. The grinding support table 200 supports the first jig chuck 100 that holds the plate-like work 20 by this support surface 202.

[0019] The table motor 34 rotates the grinding support table 200 about the center of the support surface 202. That is, the grinding support table 200 can rotate together with the support member 36 about a table rotation axis passing through the center of the support surface 202 while holding the first jig chuck 100 by the support surface 202 by the table motor 34 provided below.

[0020] Around the grinding support table 200, a cover plate 39 that moves along the Y-axis direction together with the grinding support table 200 is provided. Also, a bellows cover 12 that expands and contracts in the Y-axis direction is connected to the cover plate 39. And below the work holding mechanism 30, a Y-axis direction movement mechanism 40 is disposed.

[0021] The Y-axis direction moving mechanism 40 moves the work holding mechanism 30 and the grinding mechanism 70 relative to each other in the Y-axis direction, which is a direction parallel to the support surface 202. In the present embodiment, the Y-axis direction moving mechanism 40 is configured to move the work holding mechanism 30 including the grinding support table 200 in the Y-axis direction with respect to the grinding mechanism 70.

[0022] The Y-axis direction moving mechanism 40 includes a pair of Y-axis guide rails 42 parallel to the Y-axis direction, a Y-axis moving table 45 that slides on the Y-axis guide rails 42, a Y-axis ball screw 43 parallel to the Y-axis guide rails 42, a Y-axis motor 44 connected to the Y-axis ball screw 43, and a holding base 41 that holds these components.

[0023] The Y-axis moving table 45 is slidably installed on the Y-axis guide rails 42. A nut portion (not shown) is fixed to the lower surface of the Y-axis moving table 45. The Y-axis ball screw 43 is screwed into this nut portion. The Y-axis motor 44 is connected to one end of the Y-axis ball screw 43.

[0024] In the Y-axis direction moving mechanism 40, when the Y-axis motor 44 rotates the Y-axis ball screw 43, the Y-axis moving table 45 moves in the Y-axis direction along the Y-axis guide rails 42. The support member 36 of the work holding mechanism 30 is placed on the Y-axis moving table 45 via the support column 35. Therefore, as the Y-axis moving table 45 moves in the Y-axis direction, the work holding mechanism 30 including the grinding support table 200 moves in the Y-axis direction.

[0025] In the present embodiment, the work holding mechanism 30 including the grinding support table 200 is moved in the Y-axis direction along the Y-axis by the Y-axis direction moving mechanism 40 between a jig chuck support region on the -Y direction side for supporting the first jig chuck 100 that holds the plate-shaped work 20 on the support surface 202 and a grinding region on the +Y direction side where the plate-shaped work 20 is ground.

[0026] Further, a column 11 is erected on the rear side (+Y direction side) of the base 10. On the front surface of the column 11, a grinding mechanism 70 for grinding the plate-shaped workpiece 20 and a grinding feed mechanism 50 are provided.

[0027] The grinding feed mechanism 50 relatively moves a workpiece holding mechanism 30 including a grinding support table 200 and the grinding mechanism 70 in the Z-axis direction (grinding feed direction), which is a direction perpendicular to the support surface 202. In the present embodiment, the grinding feed mechanism 50 is configured to move the grinding mechanism 70 in the Z-axis direction with respect to the grinding support table 200.

[0028] The grinding feed mechanism 50 includes a pair of Z-axis guide rails 51 parallel to the Z-axis direction, a Z-axis moving table 53 that slides on the Z-axis guide rails 51, a Z-axis ball screw 54 parallel to the Z-axis guide rails 51, a Z-axis motor 52, and a holder 56 attached to the Z-axis moving table 53. The holder 56 holds the grinding mechanism 70.

[0029] The Z-axis moving table 53 is slidably installed on the Z-axis guide rails 51. A nut portion (not shown) is fixed to the Z-axis moving table 53. The Z-axis ball screw 54 is screwed into this nut portion. The Z-axis motor 52 is connected to one end of the Z-axis ball screw 54.

[0030] In the grinding feed mechanism 50, when the Z-axis motor 52 rotates the Z-axis ball screw 54, the Z-axis moving table 53 moves in the Z-axis direction along the Z-axis guide rails 51. As a result, the holder 56 attached to the Z-axis moving table 53 and the grinding mechanism 70 held by the holder 56 move in the Z-axis direction together with the Z-axis moving table 53.

[0031] The grinding mechanism 70 includes a spindle housing 71 fixed to the holder 56, a spindle 72 rotatably held by the spindle housing 71, a spindle motor 73 that rotationally drives the spindle 72, a wheel mount 74 attached to the lower end of the spindle 72, and a grinding wheel 75 supported by the wheel mount 74.

[0032] The spindle housing 71 is held by the holder 56. The spindle 72 extends along the Z-axis direction and is supported by the spindle housing 71 so as to be rotatable about an axis along the extending direction.

[0033] The spindle motor 73 is connected to the upper end side of the spindle 72 and rotates the spindle 72.

[0034] The wheel mount 74 is formed in a disc shape and is fixed to the lower end (tip) of the spindle 72. The wheel mount 74 supports the grinding wheel 75.

[0035] The grinding wheel 75 is formed so that its outer diameter is substantially the same as the outer diameter of the wheel mount 74. The grinding wheel 75 includes an annular wheel base (ring-shaped base) 76 formed of a metal material. Inside the wheel base 76, a processing water channel (not shown) for supplying processing water from a water source (not shown) to the grinding stone 77 is formed.

[0036] An annular grinding stone 77 composed of a plurality of grinding stones arranged annularly over the entire circumference is fixed to the lower surface of the wheel base 76. The annular grinding stone 77 has an inner diameter such that when it is arranged so that the lower surface passes through the center of the support surface 202 of the grinding support table 200, it protrudes in the horizontal direction from the support surface 202. In the annular grinding stone 77, a plurality of segment grinding stones are arranged annularly with gaps.

[0037] This annular grinding wheel 77 is formed on the wheel base 76 such that the extending direction of the spindle 72 passes through its center. Therefore, the grinding wheel 77 is rotated by the spindle motor 73 through the spindle 72, the wheel mount 74, and the wheel base 76 about the spindle rotation axis passing through its center, and grinds the back surface 22 of the plate-shaped workpiece 20 held by the first jig chuck 100 supported by the grinding support table 200 disposed in the grinding area.

[0038] Thus, the grinding apparatus 1 is a grinding apparatus that sucks and holds the front surface 21, which is one surface of the plate-shaped workpiece 20 having lattice-shaped grooves formed thereon, using the first jig chuck 100, and grinds the other surface, which is the back surface 22, with the grinding wheel 77.

[0039] Also, as shown in FIG. 1, a thickness measurement mechanism 60 is disposed on the side portion of the opening 13 in the base 10. The thickness measurement mechanism 60 can measure the thickness of the plate-shaped workpiece 20 held by the first jig chuck 100 in a contact manner.

[0040] That is, the thickness measurement mechanism 60 brings the first contact 61 into contact with the same surface as the suction surface 110 of the first jig chuck 100 held by the grinding support table 200, and brings the second contact 62 into contact with the upper surface of the plate-shaped workpiece 20 sucked and held by the suction surface 110 of the first jig chuck 100. Thereby, the thickness measurement mechanism 60 can measure the height of the suction surface 110 of the first jig chuck 100 and the upper surface height of the plate-shaped workpiece 20. Then, the thickness measurement mechanism 60 can calculate the difference between the measured height of the suction surface 110 and the upper surface height of the plate-shaped workpiece 20 as the thickness of the plate-shaped workpiece 20. In addition, in the thickness measurement mechanism 60, the first contact 61 may be brought into contact with the support surface height measurement surface 204 of the grinding support table 200 to measure the height of the support surface height measurement surface 204. In this case, the thickness measurement mechanism 60 subtracts the preset distance between the suction surface 110 and the support surface height measurement surface 204 of the grinding support table 200 from the difference between the height of the support surface height measurement surface 204 measured by the first contact 61 and the upper surface height of the plate-shaped workpiece 20 measured by the second contact 62, thereby calculating the thickness of the plate-shaped workpiece 20.

[0041] Further, instead of the first contact 61 and the second contact 62, the thickness measurement mechanism 60 may be provided with a non-contact distance measuring device, for example, a laser distance measuring device. This distance measuring device irradiates the plate-shaped workpiece 20 with a laser beam having a wavelength that penetrates the plate-shaped workpiece 20, receives the reflected light from the lower surface of the plate-shaped workpiece 20 and the reflected light from the upper surface of the plate-shaped workpiece 20, and measures the thickness of the plate-shaped workpiece 20 based on the optical path difference between the reflected lights. Further, the non-contact thickness measurement unit may be a spectroscopic interference type wafer thickness meter that measures the thickness of the plate-shaped workpiece 20 by analyzing the interference light between the reflected light from the lower surface of the plate-shaped workpiece 20 and the reflected light from the upper surface of the plate-shaped workpiece 20. As a light source for emitting measurement light, an SLD (Super Luminescent Diode) may be provided.

[0042] Further, the non-contact distance measuring device may use, for example, light or sound waves having a wavelength that does not penetrate the plate-shaped workpiece 20 and the suction surface 110. Thereby, the height of the suction surface 110 and the height of the upper surface of the plate-shaped workpiece 20 can be measured. Based on the difference between the measured height of the suction surface 110 and the height of the plate-shaped workpiece 20, the thickness of the plate-shaped workpiece 20 can be calculated.

[0043] Further, the control unit 7 includes a CPU that performs arithmetic processing according to a control program, and a storage medium such as a memory. The control unit 7 controls the above-described respective members of the grinding device 1 to control the support operation of the first jig chuck 100 by the grinding support table 200 and the grinding process for the plate-shaped workpiece 20.

[0044] Here, the configuration of the first jig chuck 100 will be described. As shown in FIGS. 2 and 3(a), the first jig chuck 100 has the above-described suction surface 110 and an annular peripheral portion 120 provided outside the suction surface 110.

[0045] The suction surface 110 is a portion for sucking the plate-shaped workpiece 20 and is disposed on the upper surface of the first jig chuck 100. The lower surface of the first jig chuck 100 serves as a supported surface 140 supported by the grinding support table 200.

[0046] Further, the first jig chuck 100 has a plurality of suction holes 111 inside thereof. The suction holes 111 are formed corresponding to a plurality of chips 27 (see FIG. 1) in the plate-shaped workpiece 20 sucked and held on the suction surface 110. The suction holes 111 have suction ports 112 as one ends opening to the suction surface 110 corresponding to the chips 27.

[0047] Also, the first jig chuck 100 has a first communication passage 114 on the other end side (supported surface 140 side) of the suction holes 111. The first communication passage 114 connects the other end of the suction hole 111 and the supported surface 140. That is, the first communication passage 114 extends inside the first jig chuck 100 so as to connect the other ends of the plurality of suction holes 111, extends toward the supported surface 140 at the peripheral portion 120, and communicates with the supported surface 140. That is, the first communication passage 114 has a terminal portion 1141 extending toward the supported surface 140 at the peripheral portion 120.

[0048] At the end of the first communication path 114 on the side of the supported surface 140 (i.e., the end of the end portion 1141 on the side of the supported surface 140), a first communication port 115 that opens to the supported surface 140 is provided. That is, the first communication path 114 communicates the other end of the suction hole 111 with the first communication port 115. As shown in FIG. 3(b), the first communication port 115 (and the end portion 1141) is provided at the four corners of the supported surface 140 of the square first jig chuck 100. Further, the first communication port 115 has a diameter smaller than the diameter of the end portion 1141 of the first communication path 114.

[0049] Also, as shown in FIG. 2, the first jig chuck 100 has a first check valve 116 (vacuum maintenance valve). The first check valve 116 is disposed near each first communication port 115 at the end portion 1141 of the first communication path 114. Therefore, the first check valve 116 is also disposed at the four corners of the first jig chuck 100.

[0050] The first check valve 116 has a first valve body 117 that can engage with the first communication port 115 and a biasing member 118 that biases the first valve body 117 inside the end portion 1141 of the first communication path 114.

[0051] The first valve body 117 has a diameter smaller than the diameter of the end portion 1141 of the first communication path 114 and larger than the diameter of the first communication port 115. The biasing member 118 is, for example, a coil spring, one end of which is connected to the first valve body 117 and the other end of which is attached to the end of the end portion 1141 on the suction surface 110 side. The biasing member 118 biases the first valve body 117 toward the first communication port 115 inside the end portion 1141. Thus, when the first valve body 117 does not receive other external forces, it is pressed against the first communication port 115 by the biasing member 118 and is configured to close the first communication port 115 against atmospheric pressure.

[0052] Also, a gripped member 119 is provided on the side surface of the first jig chuck 100. The gripped member 119 is a portion that is gripped by the gripping member of the moving mechanism or the hand of an operator when moving the first jig chuck 100.

[0053] Next, the configuration of the grinding support table 200 will be described. As shown in FIGS. 4 and 5, the grinding support table 200 has a rectangular support surface 202 for supporting the supported surface 140 of the first jig chuck 100. The surfaces around the support surface 202 are support surface height measurement surfaces 204, which are formed flush with the support surface 202.

[0054] In addition, first connecting portions 210 are provided at the four corners of the support surface 202 of the grinding support table 200. The first connecting portions 210 are provided at positions corresponding to the first communication ports 115 (see FIG. 2) of the first jig chuck 100 supported by the support surface 202.

[0055] As shown in FIGS. 5 and 6, the first connecting portion 210 has a first table connecting path (support table connecting path) 213, which is a passage reaching the support surface 202 from the inside of the grinding support table 200, and a first opening portion 211 provided near the end on the support surface 202 side in the first table connecting path 213.

[0056] The first opening portion 211 is a columnar protrusion protruding from the support surface 202. The first opening portion 211 is provided at a position corresponding to the first check valve 116 (see FIG. 2) of the first jig chuck 100 supported by the support surface 202. That is, the first opening portion 211 is for opening the first check valve 116 by pressing the first valve body 117 from below against the biasing force of the biasing member 118 when the first jig chuck 100 is supported by the support surface 202.

[0057] The first table connecting path 213 is opened to the support surface 202 so that the suction holes 111 can communicate with the first suction source 230 when the support surface 202 supports the first jig chuck 100. As shown in FIG. 6, the first table connecting path 213 has a first table connecting port 214 opened to the support surface 202. The first opening portion 211 protrudes to the outside through the first table connecting port 214.

[0058] Further, as shown in FIG. 5, the first table connection path 213 is connected to the first suction source 230 via the first suction passage 227 and can communicate with the first suction source 230. A first suction valve 221 for opening and closing the communication between the first suction source 230 and the first table connection path 213 is arranged in the first suction passage 227.

[0059] The first table connection path 213 is connected to the suction hole 111 via the first communication port 115 and the first communication path 114 of the first jig chuck 100 when the first check valve 116 is opened by the first opening 211.

[0060] Further, as shown in FIG. 6, the first connection portion 210 has a suction cup 216 disposed around the first table connection port 214. The suction cup 216 is formed in a cylindrical shape having a bellows. The suction cup 216 contracts along the direction perpendicular to the support surface 202 (the direction in which the first opening 211 extends) when the support surface 202 supports the first jig chuck 100 and is pressed against the supported surface 140 of the first jig chuck 100.

[0061] Further, as shown in FIG. 5, an air passage 226 is provided inside the grinding support table 200. One end of the air passage 226 is connected to the support surface 202. Also, the other end of the air passage 226 is connected to the first air source 231 and the first suction source 230. An air valve 223 for opening and closing the communication between the air passage 226 and the first air source 231 is provided. Also, a support surface suction valve 224 for opening and closing the communication between the air passage 226 and the first suction source 230 is provided.

[0062] Hereinafter, a processing method for the plate-shaped workpiece 20 using the grinding apparatus 1 having such a configuration will be described. This processing method is an example of a method for dividing a plate-shaped workpiece for dividing the plate-shaped workpiece 20.

[0063] [Groove forming step] Before machining using the grinding device 1, first, a groove is formed in the plate-shaped workpiece 20. For example, as shown in FIG. 7, using a rotating cutting blade 301, the division planned line 23 formed on the surface 21 of the plate-shaped workpiece 20 is cut. As a result, a groove 29 having a depth that does not reach the back surface 22 is formed on the surface 21 along the division planned line 23. As a result, the plate-shaped workpiece 20 is divided by the groove 29 into a plurality of chips 27 each including one device 25.

[0064] [Suction holding process] In this process, first, as shown in FIG. 8, an operator places the first jig chuck 100 on the support surface 202 of the grinding support table 200 located in the jig chuck support area in the grinding device 1 so that the supported surface 140 faces downward. At this time, the positions of the first check valve 116 of the first jig chuck 100 and the first connecting portion 210 of the grinding support table 200 are made to coincide with each other.

[0065] As a result, as shown in FIG. 9, the first opening 211 of the grinding support table 200 presses the first valve body 117 from below against the biasing force of the biasing member 118 of the first check valve 116 in the first jig chuck 100. As a result, the first valve body 117 moves away from the first communication port 115, and the first check valve 116 opens. As a result, the first table connection path 213 of the grinding support table 200, the first connection path 114 and the suction hole 111 of the first jig chuck 100 are communicated with each other.

[0066] Thereafter, as shown in FIG. 8, the control unit 7 closes the air valve 223 and opens the support surface suction valve 224. As a result, the first suction source 230 is communicated with the support surface 202 via the air passage 226, and the supported surface 140 of the first jig chuck 100 is sucked and supported by the support surface 202 of the grinding support table 200.

[0067] Next, as shown in FIG. 8, the operator places the plate-shaped workpiece 20 on the suction surface 110 of the first jig chuck 100 such that the surface 21 on which the lattice-shaped planned division lines 23 (see FIG. 1) are formed faces downward and the back surface 22 faces upward. As a result, the suction holes 111 formed corresponding to the plurality of chips 27 in the plate-shaped workpiece 20 are respectively disposed below each chip 27 on the surface 21 of the plate-shaped workpiece 20.

[0068] Thereafter, the control unit 7 opens the first suction valve 221. At this time, since the first check valve 116 is open, the first suction source 230 communicates with the suction holes 111 through the first suction passage 227 of the grinding support table 200, the first table connection path 213, and the first communication path 114 of the first jig chuck 100. As a result, the inside of the first communication path 114 and the suction holes 111 becomes a negative pressure, and the surface 21 of the plate-shaped workpiece 20 is suction-held by the suction surface 110. Thus, the first check valve 116 is configured to be opened by the first opening portion 211 when the suction holes 111 are communicated with the first suction source 230.

[0069] [Grinding Process] Next, the control unit 7 moves the workpiece holding mechanism 30 (see FIG. 1) including the grinding support table 200 to the grinding region below the grinding mechanism 70 using the Y-axis direction moving mechanism 40. Further, the control unit 7 controls the spindle motor 73 of the grinding mechanism 70 to rotate the grinding wheel 77 about the spindle rotation axis 700 as shown in FIG. 10 (arrow 701). Further, the control unit 7 controls the table motor 34 to rotate the grinding support table 200. Then, while moving the grinding mechanism 70 along the Z-axis direction using the grinding feed mechanism 50, the control unit 7 grinds the back surface 22 of the plate-shaped workpiece 20 suction-held on the suction surface 110 of the first jig chuck 100 supported by the support surface 202 of the grinding support table 200 with the lower surface of the rotating grinding wheel 77 until the grooves are exposed on the back surface 22.

[0070] In this way, the grinding device 1 can suck and hold the surface 21 of the plate-shaped workpiece 20 in which the groove 29 is formed by using the first jig chuck 100, and grind the back surface 22 with the grinding wheel 77. Then, when the back surface 22 is ground in this way, the bottom portion of the groove 29 shown in FIG. 7 (the portion between the groove 29 and the back surface 22) 28 is removed, and as shown in FIG. 11, the groove 29 is exposed from the back surface 22. As a result, the plate-shaped workpiece 20 is divided into a plurality of chips 27 each including one device 25.

[0071] As described above, the plurality of suction holes 111 of the first jig chuck 100 are respectively arranged below each chip 27 of the plate-shaped workpiece 20 corresponding to each chip 27. For this reason, the divided chips 27 are respectively sucked by the corresponding suction holes 111 and remain held on the suction surface 110.

[0072] [Detachment process] In this process, the first jig chuck 100 is removed from the grinding support table 200. At this time, as shown in FIG. 11, the control unit 7 closes the support surface suction valve 224 and the first suction valve 221, and opens the air valve 223 to communicate the first air source 231 with the support surface 202 of the grinding support table 200. As a result, air is sent between the support surface 202 and the supported surface 140 of the first jig chuck 100, and the supported surface 140 of the first jig chuck 100 is pushed up by the air as indicated by the arrow 250.

[0073] In this state, an operator, for example, grips the gripped member 119 and raises the first jig chuck 100, so that the first jig chuck 100 including the suction holes 111 is detached from the grinding support table 200 including the first suction source 230. At this time, as shown in FIG. 12, the first valve body 117 of the first jig chuck 100 is separated from the first opening portion 211 of the grinding support table 200 and is pressed against the first communication port 115 by the biasing force of the biasing member 118 to close the first communication port 115, and the first check valve 116 closes. In this way, the first check valve 116 is configured to close when detached from the first suction source 230 from the suction hole 111.

[0074] Therefore, even if the first jig chuck 100 is removed from the grinding support table 200, the negative pressure state in the first communication passage 114 and the suction holes 111 is maintained, and each tip 27 of the plate-shaped workpiece 20 is sucked into the corresponding suction hole 111 and remains held on the suction surface 110.

[0075] As described above, in the present embodiment, the plate-shaped workpiece 20 having the lattice-shaped grooves 29 formed on the surface 21 is sucked and held by the suction surface 110 of the first jig chuck 100 having the suction holes 111. Then, in this state, the back surface 22 of the plate-shaped workpiece 20 is ground by the grinding wheel 77 to remove the bottom portion 28 (see FIG. 7) of the groove 29, and the plate-shaped workpiece 20 is divided into a plurality of tips 27 (DBG process).

[0076] Here, the suction holes 111 of the first jig chuck 100 are respectively disposed below each tip 27 corresponding to each tip 27 of the plate-shaped workpiece 20. For this reason, even if the plate-shaped workpiece 20 is divided into a plurality of tips 27, each tip 27 is sucked into the corresponding suction hole 111 and remains held on the suction surface 110.

[0077] Therefore, in the present embodiment, it is possible to suppress the scattering of the tips 27 when the plate-shaped workpiece 20 is divided into a plurality of tips 27 without attaching a tape to the surface 21 of the plate-shaped workpiece 20.

[0078] In addition, in the present embodiment, the second jig chuck 101 as shown in FIGS. 13 and 14 can be used.

[0079] This second jig chuck 101, in the configuration of the first jig chuck 100 shown in FIGS. 2, 3(a), and 3(b), further includes a branch portion 121 disposed in the middle of the first communication passage 114, a second communication passage 123 branched from the first communication passage 114 by the branch portion 121, a second communication port 125 which is an opening of the second communication passage 123, and a second check valve 127. These branch portion 121, second communication passage 123, second communication port 125, and second check valve 127 are provided at the four corners of the square second jig chuck 101, similar to the first communication port 115 and the first check valve 116, etc.

[0080] The branch portion 121 is provided near the end portion 1141 in the first communication passage 114. That is, the branch portion 121 is disposed between the contact point of the first communication passage 114 with the suction hole 111 and the first check valve 116. The second communication passage 123 communicates the branch portion 121 and the second communication port 125. The second communication passage 123 has the same diameter as the end portion 1141 of the first communication passage 114, and extends toward the suction surface 110 side at the peripheral edge 120 so as to form a path penetrating the peripheral edge 120 of the second jig chuck 101 together with this end portion 1141.

[0081] The second communication port 125 is opened on the surface of the peripheral edge 120 on the suction surface 110 side and communicates with the second communication passage 123. The second communication port 125 has a diameter smaller than that of the second communication passage 123.

[0082] The second check valve 127 is disposed near the second communication port 125 in the second communication passage 123. The second check valve 127 has a second valve body 129 provided in the second communication passage 123 and engageable with the second communication port 125. The second valve body 129 has a diameter smaller than that of the second communication passage 123 and larger than that of the second communication port 125.

[0083] Also, the second check valve 127 includes the biasing member 118 of the first check valve 116 described above. That is, in the second jig chuck 101, one end of the biasing member 118 is connected to the first valve body 117, and the other end is connected to the second valve body 129. And the biasing member 118 biases the first valve body 117 toward the first communication port 115 side and biases the second valve body 129 toward the second communication port 125 side. Thereby, when the first valve body 117 and the second valve body 129 are not subjected to other external forces, they are pressed against the first communication port 115 and the second communication port 125 by the biasing member 118, respectively, and are configured to block them.

[0084] Also, as shown in FIG. 1, a carry-out mechanism 500 for carrying the second jig chuck 101 that holds the plate-shaped workpiece 20 is provided on the base 10 of the grinding device 1. The carry-out mechanism 500 particularly has a function of carrying out the second jig chuck 101 from the grinding support table 200.

[0085] The carry-out mechanism 500 has a jig chuck support member 510 that supports the second jig chuck 101, a transfer arm 550 attached to the jig chuck support member 510 via a connecting member 553, and a transfer rod 540 that supports the transfer arm 550 and the jig chuck support member 510.

[0086] The transfer rod 540 expands and contracts in the vertical direction with respect to the base 10 and is rotatable about an axis extending in the longitudinal direction. Therefore, the transfer rod 540 can move the jig chuck support member 510 in the vertical direction and pivot it in a direction parallel to the upper surface of the base 10.

[0087] The carry-out mechanism 500 having such a configuration can carry the second jig chuck 101 to an arbitrary position by controlling the expansion and contraction and rotation of the transfer rod 540 after supporting the second jig chuck 101 by the jig chuck support member 510.

[0088] Here, the configuration of the jig chuck support member 510 will be described. As shown in FIG. 15, the jig chuck support member 510 has a plate-shaped support plate 511 for supporting the second jig chuck 101.

[0089] The support plate 511 has a rectangular shape that is substantially the same as that of the second jig chuck 101. Suction cup members 520 are formed on four side portions of the peripheral edge of the support plate 511, respectively. The suction cup member 520 has a suction cup 521 at its tip and is communicable with a third suction source 533 via a third suction passage 534 provided with a third suction valve 535.

[0090] In the jig chuck support member 510 having such a support plate 511, the second jig chuck 101 can be suction-supported by pressing the suction cup 521 of the suction cup member 520 against the peripheral edge portion 120 (see FIG. 14) of the second jig chuck 101 and communicating the suction cup member 520 with the third suction source 533.

[0091] In addition, second connecting portions 512 are provided at the four corners of the support plate 511, respectively. As shown in FIG. 16, the second connecting portion 512 has a cylindrical body 513 that penetrates the support plate 511. And the second connecting portion 512 has, inside the cylindrical body 513, a second table connecting path (support table connecting path) 514 that is a passage penetrating the cylindrical body 513, and a second opening portion 516 that opens the second check valve 127 when holding the second jig chuck 101 from above.

[0092] The second opening portion 516 is provided near the end portion on the lower end side in the second table connecting path 514. The second opening portion 516 is a columnar protrusion protruding downward. The second opening portion 516 is provided at a position corresponding to the second check valve 127 (see FIG. 13) of the second jig chuck 101 supported by the suction cup member 520. That is, the second opening portion 516 is for opening the second check valve 127 by pressing the second valve body 129 from above against the biasing force of the biasing member 118 when the second jig chuck 101 is supported by the suction cup member 520.

[0093] As shown in FIG. 16, the second table connection path 514 has a second table connection port (conveying and suction port) 517 that is open at the lower end of the cylindrical body 513. The second open portion 516 protrudes to the outside through the second table connection port 517.

[0094] The second table connection path 514 is connected to a second suction source 530 via a second suction passage 531 provided with a second suction valve 532 shown in FIG. 15 and is communicable with the second suction source 530. When the second check valve 127 is opened by the second open portion 516, the second table connection path 514 is connected to the suction hole 111 via the second communication port 125, the second communication path 123, and the first communication path 114 of the second jig chuck 101.

[0095] Also, as shown in FIG. 16, the second connecting portion 512 has a suction cup 518 disposed around the second table connection port 517. The suction cup 518 is formed in a cylindrical shape with a bellows. The suction cup 518 contracts when it is pressed against the peripheral edge 120 of the second jig chuck 101 when the second jig chuck 101 is supported by the suction cup member 520.

[0096] Here, a method for processing the plate-shaped workpiece 20 using the first jig chuck 100 and the second jig chuck 101 will be described. This processing method is also an example of a method for dividing a plate-shaped workpiece that divides the plate-shaped workpiece 20 without using a tape.

[0097] [First Support Step] In this step, the groove forming device 300 shown in FIG. 17 is used. The groove forming device 300 can form a lattice-shaped groove 29 having a depth that does not reach the back surface 22, which is the other surface, on the surface 21, which is one surface of the plate-shaped workpiece 20. The groove forming device 300 includes a groove forming support table (first support table) 201, a cutting blade 301, a moving mechanism 303 that moves the groove forming support table 201 with respect to the cutting blade 301, and a cutting control unit 305 that controls the operation of the groove forming device 300.

[0098] The groove forming support table 201 has the same configuration as the grinding support table 200 shown in FIGS. 4 to 6, except that it does not have the support surface height measurement surface 204. For this reason, the groove forming support table 201 has, for example, a rectangular shape corresponding to the first jig chuck 100. The groove forming device 300 supports the first jig chuck 100 by this groove forming support table 201.

[0099] In this step, for example, an operator places the first jig chuck 100 on the support surface 202 of the groove forming support table 201 so that the supported surface 140 faces downward. At this time, the positions of the first check valve 116 of the first jig chuck 100 and the first connecting portion 210 of the groove forming support table 201 are made to coincide with each other.

[0100] As a result, as shown in FIG. 18, the first opening 211 of the groove forming support table 201 presses the first valve body 117 from below against the biasing force of the biasing member 118 of the first check valve 116 in the first jig chuck 100. Thereby, the first valve body 117 moves away from the first communication port 115, and the first check valve 116 opens. As a result, the first table connection path 213 of the groove forming support table 201, the first connection path 114 of the first jig chuck 100, and the suction hole 111 communicate with each other.

[0101] Thereafter, as shown in FIG. 17, the cutting control unit 305 closes the air valve 223 and opens the support surface suction valve 224. As a result, the first suction source 230 is communicated with the support surface 202 via the air passage 226, and the supported surface 140 of the first jig chuck 100 is sucked and supported by the support surface 202.

[0102] [First Suction Holding Step] In this step, the back surface 22 of the plate-shaped workpiece 20 is sucked and held by the suction surface 110 (first suction surface) of the first jig chuck 100 that is communicated with the first suction source 230 and sucks and holds the plate-shaped workpiece 20.

[0103] That is, as shown in FIG. 17, the operator places the plate-shaped workpiece 20 on the suction surface 110 of the first jig chuck 100 such that the surface 21 on which the lattice-shaped planned division line 23 (see FIG. 1) is formed faces upward and the back surface 22 faces downward. Also, at this time, the cutting control unit 305 opens the first suction valve 221. As a result, the first suction source 230 communicates with the suction holes 111 via the first suction passage 227 of the groove formation support table 201, the first table connection path 213, and the first communication path 114 of the first jig chuck 100. As a result, the inside of the first communication path 114 and the suction holes 111 becomes a negative pressure, and the back surface 22 of the plate-shaped workpiece 20 is suction-held by the suction surface 110.

[0104] [Groove formation step] In this step, a groove 29 is formed in the surface 21 of the plate-shaped workpiece 20 supported by the groove formation support table 201 and suction-held by the first jig chuck 100. That is, the cutting control unit 305 rotates the cutting blade 301 and uses the movement mechanism 303 to set the position of the plate-shaped workpiece 20 relative to the cutting blade 301 to a position where a groove can be formed along the planned division line 23 formed in the surface 21. Further, the cutting control unit 305 uses the movement mechanism 303 to move the groove formation support table 201 relative to the rotating cutting blade 301. In this way, a groove 29 (see FIG. 19) is formed in the surface 21 of the plate-shaped workpiece 20 along the planned division line 23. As a result, the plate-shaped workpiece 20 is divided by the groove 29 into a plurality of chips 27 each including one device 25.

[0105] [First detachment step] In this step, the first jig chuck 100 maintains the state of suction-holding the plate-shaped workpiece 20, and the first jig chuck 100 is detached from the groove formation support table 201. Specifically, as shown in FIG. 19, the first jig chuck 100 is moved to the grinding support table 200 (see FIG. 1) of the grinding device 1 using a transfer mechanism 400 for moving the first jig chuck 100 between the groove formation device 300 and the grinding device 1.

[0106] As shown in FIG. 19, the transfer mechanism 400 includes a holder 401 that holds the first jig chuck 100. The holder 401 has a holding arm 403 and a gripping portion 405. The gripping portion 405 is provided at the tip of the holding arm 403 and grips the gripped member 119 of the first jig chuck 100.

[0107] Furthermore, the holder 401 is provided with a pressing member 415. The pressing member 415 has a pressing shaft 417 and a pressing cylinder 416 for moving the pressing shaft 417 in the vertical direction. The pressing member 415 is configured such that the first valve body 117 of the first check valve 116 of the first jig chuck 100 gripped by the gripping portion 405 can be pressed by the pressing shaft 417.

[0108] Also, in the transfer mechanism 400, a generally cylindrical connecting member 407 is attached to the upper part of the holder 401. And an elevating mechanism 410 for moving the holder 401 in the Z-axis direction (vertical direction) is attached to this connecting member 407. Furthermore, a horizontal movement mechanism 412 is attached to the elevating mechanism 410. The horizontal movement mechanism 412 moves the elevating mechanism 410 and the holder 401 in the horizontal plane (XY plane).

[0109] In the first detachment step, first, the gripping portion 405 of the holder 401 of the transfer mechanism 400 grips the first jig chuck 100 using the gripped member 119 on its side surface. Thereby, the first jig chuck 100 is held by the holder 401.

[0110] After that, as shown in FIG. 19, the cutting control unit 305 closes the support surface suction valve 224 and the first suction valve 221, and opens the air valve 223 to communicate the first air source 231 with the support surface 202 of the groove forming support table 201. Thereby, air is sent between the supported surface 140 of the first jig chuck 100 and the support surface 202, and as shown by the arrow 250, the supported surface 140 of the first jig chuck 100 is pushed up by the air.

[0111] In this state, the lifting mechanism 410 of the transfer mechanism 400 raises the holding body 401 that holds the first jig chuck 100, causing the first jig chuck 100 to separate from the groove-forming support table 201. At this time, the first valve body 117 of the first jig chuck 100 moves away from the first opening 211 of the groove-forming support table 201. As a result, as shown in FIG. 20, the first valve body 117 is pressed against the first communication port 115 by the biasing force of the biasing member 118 to close the first communication port 115, and the first check valve 116 closes.

[0112] Therefore, even if the first jig chuck 100 is removed from the groove-forming support table 201, the negative pressure state in the first communication passage 114 and the suction holes 111 is maintained, and the plate-shaped workpiece 20 remains held on the suction surface 110.

[0113] [Inversion process] In this process, the upper and lower surfaces of the plate-shaped workpiece 20 are inverted. That is, as shown in FIG. 21, the gripping portion 405 of the transfer mechanism 400 rotates as indicated by the arrow 251 while holding the first jig chuck 100. As a result, the first jig chuck 100 is inverted, and the suction surface 110 supporting the plate-shaped workpiece 20 faces downward. Then, the transfer mechanism 400 moves the inverted first jig chuck 100 to the grinding support table 200 (see FIG. 1) of the grinding device 1.

[0114] [Second support process] In this process, the second jig chuck 101 that is communicated with the first suction source 230 and sucks and holds the plate-shaped workpiece 20 is supported by the grinding support table 200 of the grinding device 1.

[0115] Specifically, in the grinding apparatus 1, an operator places the second jig chuck 101 shown in FIG. 13 on the support surface 202 of the grinding support table (second support table) 200 located in the jig chuck support region as shown in FIG. 22, with the supported surface 140 facing downward. As a result, as described with reference to FIGS. 8 and 9, the first check valve 116 of the second jig chuck 101 opens, and the first table connection path 213 of the grinding support table 200, the first communication path 114, and the suction holes 111 of the second jig chuck 101 communicate with each other. Further, as shown in FIG. 22, the control unit 7 (see FIG. 1) of the grinding apparatus 1 closes the air valve 223 and opens the support surface suction valve 224. Thereby, the supported surface 140 of the second jig chuck 101 is sucked and supported by the support surface 202 of the grinding support table 200.

[0116] [Second Suction Holding Step] In this step, the surface 21 of the plate-shaped workpiece 20 held by the first jig chuck 100 is sucked and held by the suction surface 110 (second suction surface) of the second jig chuck 101.

[0117] Specifically, as shown in FIG. 22, the transfer mechanism 400 places the plate-shaped workpiece 20 held by the inverted first jig chuck 100 on the suction surface 110 of the second jig chuck 101 supported by the grinding support table 200 of the grinding apparatus 1, with the surface 21 facing downward. As a result, the suction holes 111 of the second jig chuck 101 are respectively disposed below each tip 27 on the surface 21 of the plate-shaped workpiece 20.

[0118] Also, at this time, in the transfer mechanism 400, as shown in FIG. 22, the pressing member 415 presses the first valve body 117 of the first check valve 116 of the first jig chuck 100 by the pressing shaft 417. As a result, the first check valve 116 of the first jig chuck 100 held by the transfer mechanism 400 opens, and the air pressure in the first communication path 114 and the suction holes 111 of the first jig chuck 100 becomes atmospheric pressure. Thereby, the suction of the plate-shaped workpiece 20 by the suction surface 110 of the first jig chuck 100 stops.

[0119] Furthermore, in response thereto, the control unit 7 of the grinding device 1 opens the first suction valve 221 of the grinding support table 200. As a result, in the second jig chuck 101, since the first check valve 116 is open, the first suction source 230 communicates with the suction hole 111 via the first communication passage 114 and the like. As a result, the inside of the first communication passage 114 and the suction hole 111 becomes a negative pressure, and the surface 21 of the plate-shaped workpiece 20 is suction-held by the suction surface 110. In this way, the plate-shaped workpiece 20 held by the first jig chuck 100 is transferred to and held by the second jig chuck 101.

[0120] [Second detachment step] In this step, the first jig chuck 100 is detached from the plate-shaped workpiece 20. That is, as shown in FIG. 23, the lifting mechanism 410 of the transfer mechanism 400 raises the holding body 401 that holds the first jig chuck 100, so that the first jig chuck 100 is detached from the plate-shaped workpiece 20 held by the second jig chuck 101.

[0121] [Grinding step] In this step, the back surface 22 of the plate-shaped workpiece 20 suction-held by the second jig chuck 101 supported by the groove forming support table 201 is ground by the grinding wheel 77 to expose the groove 29.

[0122] Specifically, the control unit 7 moves the workpiece holding mechanism 30 (see FIG. 1) including the grinding support table 200 to the grinding area below the grinding mechanism 70 using the Y-axis direction moving mechanism 40. Further, the control unit 7 controls the spindle motor 73 of the grinding mechanism 70 to rotate the grinding wheel 77 about the spindle rotation axis 700 as shown in FIG. 24 (arrow 701). Further, the control unit 7 controls the table motor 34 to rotate the grinding support table 200. Then, the control unit 7 uses the grinding feed mechanism 50 to move the grinding mechanism 70 along the Z-axis direction, and grinds the back surface 22 of the plate-shaped workpiece 20 held by the second jig chuck 101 supported by the grinding support table 200 with the lower surface of the rotating grinding wheel 77.

[0123] In this way, the grinding device 1 can suck and hold the surface 21 of the plate-shaped workpiece 20 having the groove 29 formed thereon by using the second jig chuck 101, and grind the back surface 22 with the grinding wheel 77. Then, by grinding the back surface 22 in this manner, the bottom portion (the portion between the groove 29 and the back surface 22) 28 (see FIG. 7) of the groove 29 is removed, and the groove 29 is exposed from the back surface 22 (see FIG. 11). As a result, the plate-shaped workpiece 20 is divided into a plurality of chips 27 each including one device 25.

[0124] As described above, the plurality of suction holes 111 of the second jig chuck 101 are respectively arranged below each chip 27 of the plate-shaped workpiece 20 corresponding to each chip 27. For this reason, the divided chips 27 are respectively sucked by the corresponding suction holes 111 and remain held on the suction surface 110.

[0125] [Third detachment step] In this step, the second jig chuck 101 is carried out from the grinding support table 200 of the grinding device 1 by using the carry-out mechanism 500 shown in FIGS. 1 and 15.

[0126] Specifically, first, as shown in FIG. 25, the control unit 7 closes the support surface suction valve 224 and the first suction valve 221, and opens the air valve 223 to communicate the first air source 231 with the support surface 202 of the grinding support table 200. Thereby, air is sent between the support surface 202 and the supported surface 140 of the second jig chuck 101, and the supported surface 140 of the second jig chuck 101 is pushed up by the air as indicated by the arrow 250.

[0127] Furthermore, the control unit 7 presses the suction cup member 520 of the carry-out mechanism 500 shown in FIG. 15 against the peripheral edge portion 120 of the second jig chuck 101 and opens the third suction valve 535. Thereby, the suction cup member 520 is communicated with the third suction source 533 to suction and support the peripheral edge portion 120 of the second jig chuck 101.

[0128] As a result, as shown in FIGS. 25 and 26, the second opening portion 516 of the second connecting portion 512 of the carry-out mechanism 500 presses the second valve body 129 from above against the biasing force of the biasing member 118 of the second check valve 127 of the second jig chuck 101. Thereby, the second check valve 127 opens.

[0129] Accordingly, the control unit 7 opens the second suction valve 532. Thereby, the second suction source 530 communicates with the suction hole 111 via the second suction passage 531, the second table connection path 514 of the second connecting portion 512, and the first communication path 114 of the second jig chuck 101. As a result, the negative pressure in the first communication path 114 and the suction hole 111 is maintained, and the suction and holding of the plate-shaped workpiece 20 by the suction surface 110 is maintained. Thus, the second check valve 127 is configured to open when the suction hole 111 is communicated with the second suction source 530. In addition, in FIGS. 25 and 27 described later, the illustration of the suction cup member 520 is omitted.

[0130] In this state, the control unit 7 controls the carry-out mechanism 500 to raise the second jig chuck 101, so that the second jig chuck 101 detaches from the grinding support table 200. At this time, the first valve body 117 of the second jig chuck 101 separates from the first opening portion 211 of the grinding support table 200 and is pressed against the first communication port 115 by the biasing force of the biasing member 118 to close the first communication port 115, and the first check valve 116 closes. Therefore, the negative pressure state in the first communication path 114 and the suction hole 111 is maintained.

[0131] Further, when removing the second jig chuck 101 from the carry-out mechanism 500, the control unit 7 closes the second suction valve 532 and the third suction valve 535 to stop the suction by the second suction source 530 and the third suction source 533 (see FIG. 15).

[0132] In this state, an operator grips, for example, the gripped member 119 and detaches the second jig chuck 101 including the suction hole 111 from the carry-out mechanism 500 including the second suction source 530. At this time, the second valve body 129 of the second jig chuck 101 moves away from the second opening 516 of the carry-out mechanism 500. As a result, the second valve body 129 is pressed against the second communication port 125 by the biasing force of the biasing member 118 to close the second communication port 125, and the second check valve 127 closes (see FIG. 13). Thus, the second check valve 127 is configured to close when it is detached from the second suction source 530 from the suction hole 111.

[0133] As described above, also in the method for processing the plate-shaped workpiece 20 using the first jig chuck 100 and the second jig chuck 101, when the plate-shaped workpiece 20 is divided into a plurality of chips 27, each chip 27 is sucked into the corresponding suction hole 111 of the second jig chuck 101 and remains held on the suction surface 110. Therefore, it is possible to suppress the chips 27 from scattering.

[0134] Also, in this method, the steps from the groove forming step of forming the groove 29 by the groove forming device 300 to the third detachment step can be carried out without relying on manual labor using the groove forming device 300, the transfer mechanism 400, and the grinding device 1. Therefore, the working efficiency can be improved.

[0135] Note that the second jig chuck 101 may have a suction surface 113 made of a porous material communicating with the first communication path 114 as shown in FIG. 28 instead of the suction surface 110 including the suction hole 111 and the suction port 112. Also in this configuration, when the plate-shaped workpiece 20 is divided into a plurality of chips 27, each chip 27 is sucked by the pores of the porous material and remains held on the suction surface 113. Therefore, it is possible to suppress the chips 27 from scattering. Note that the first jig chuck 100 may also have a suction surface 113 instead of the suction surface 110.

[0136] Further, the groove forming support table 201 of the groove forming device 300 may have a third connecting portion 260 as shown in FIG. 29 instead of the first connecting portion 210. The third connecting portion 260 has the first table connecting path 213 and the opening and closing mechanism 270 described above. In addition, the grinding support table 200 of the grinding device 1 may also have a third connecting portion 260 instead of the first connecting portion 210.

[0137] The opening and closing mechanism 270 opens and closes the first check valve 116 of the first jig chuck 100 (or the second jig chuck 101) supported by the support surface 202 by moving the first opening portion 211 in a direction perpendicular to the support surface 202.

[0138] The opening and closing mechanism 270 is a piston cylinder, and includes a cylinder tube 271 below the third table connecting path 263, a flat piston 272 disposed inside the cylinder tube 271, and a columnar first opening portion 211 connected to the piston 272.

[0139] The first opening portion 211 is inserted into the cylinder tube 271. The upper end of the first opening portion 211 can come into contact with the first valve body 117 of the first check valve 116 of the first jig chuck 100 supported by the support surface 202. The lower end of the second release portion 273 is attached to the piston 272.

[0140] A first air passage 281 is connected to the upper surface side of the piston 272 in the cylinder tube 271. On the other hand, a second air passage 282 is connected to the lower surface side of the piston 272 in the cylinder tube 271.

[0141] The first air passage 281 and the second air passage 282 are for allowing air to flow into the cylinder tube 271. The first air passage 281 and the second air passage 282 are selectively connected to the second air source 285 via a solenoid valve 283. The solenoid valve 283 is controlled by the cutting control unit 305 of the groove forming device 300.

[0142] In this configuration, when the first jig chuck 100 is supported on the support surface 202 of the groove-forming support table 201 of the groove-forming device 300, when opening the first check valve 116 of the first jig chuck 100 by the first opening portion 211, as shown in FIG. 29, the cutting control unit 305 controls the solenoid valve 283 to put the second air source 285 in communication with the second air passage 282. As a result, a predetermined amount of air is supplied from the second air source 285 through the second air passage 282 below the piston 272 in the cylinder tube 271. At this time, the air above the piston 272 in the cylinder tube 271 is discharged through the first air passage 281.

[0143] As a result, due to the pressure of the air supplied from the second air passage 282, the piston 272 rises inside the cylinder tube 271, and at the same time, the first opening portion 211 rises. By raising the first opening portion 211 in this way, the first opening portion 211 presses the first valve body 117 from below against the biasing force of the biasing member 118 to open the first check valve 116.

[0144] On the other hand, when closing the first check valve 116, as shown in FIG. 30, the control unit 7 controls the solenoid valve 283 to put the second air source 285 in communication with the first air passage 281. As a result, a predetermined amount of air is supplied from the second air source 285 through the first air passage 281 above the piston 272 in the cylinder tube 271. At this time, the air below the piston 272 in the cylinder tube 271 is discharged through the second air passage 282.

[0145] As a result, due to the pressure of the air supplied from the first air passage 281, the piston 272 descends inside the cylinder tube 271, and at the same time, the first opening portion 211 descends. By lowering the first opening portion 211 in this way, the first opening portion 211 separates from the first valve body 117. As a result, the first valve body 117 is pressed against the first communication port 115 by the biasing force of the biasing member 118 to close the first communication port 115, and the first check valve 116 closes.

[0146] When the groove formation support table 201 has the third connecting portion 260 in this way, for example, in the first support step, the first suction holding step, and the groove formation step described with reference to FIG. 17, as shown in FIG. 31, the cutting control unit 305 controls the solenoid valve 283 to raise the first opening portion 211 and open the first check valve 116.

[0147] On the other hand, in the first detachment step described with reference to FIG. 19, as shown in FIG. 32, the cutting control unit 305 controls the solenoid valve 283 to lower the first opening portion 211 and close the first check valve 116. Thereby, the detachment operation of the first jig chuck 100 can be smoothly performed.

[0148] In addition, in the present embodiment, the first jig chuck 100 and the second jig chuck 101 have the gripped member 119. However, the first jig chuck 100 and the second jig chuck 101 do not necessarily need to include the gripped member 119. Further, the plate-like workpiece 20 may be a PCB substrate or a silicon substrate.

[0149] In the present embodiment, the second communication port 125 of the second jig chuck 101 shown in FIG. 13 is formed on the upper surface of the peripheral edge portion 120 around the suction surface 110. Instead of this, the second communication port 125 may be opened on the side surface of the first jig chuck 100.

[0150] In the present embodiment, the first support step of supporting the first jig chuck 100 by the groove formation support table 201 of the groove formation device 300 is performed before the first suction holding step of sucking and holding the back surface 22 of the plate-like workpiece 20 by the suction surface 110 of the first jig chuck 100 (see FIG. 17). Regarding this, the first suction holding step may be performed before the first support step. That is, after holding the plate-like workpiece 20 by the first jig chuck 100, the first jig chuck 100 may be supported by the groove formation support table 201.

[0151] Also, in this embodiment, a second support step of supporting the second jig chuck 101 by the grinding support table 200 of the grinding apparatus 1 is performed before a second suction holding step of sucking and holding the surface 21 of the plate-shaped workpiece 20 by the suction surface 110 of the second jig chuck 101 (see FIG. 22). In this regard, the second suction holding step may be performed before the second support step. That is, after holding the plate-shaped workpiece 20 by the second jig chuck 101, the second jig chuck 101 may be supported by the grinding support table 200.

Explanation of Signs

[0152] 1: Grinding apparatus, 7: Control unit, 10: Base, 11: Column, 12: Bellows cover, 13: Opening, 30: Work holding mechanism, 34: Table motor, 35: Support column, 36: Support member, 39: Cover plate, 40: Y-axis direction movement mechanism, 50: Grinding feed mechanism, 60: Thickness measurement mechanism, 70: Grinding mechanism, 71: Spindle housing, 72: Spindle, 73: Spindle motor, 74: Wheel mount, 75: Grinding wheel, 76: Wheel base, 77: Grinding stone, 100: First jig chuck, 101: Second jig chuck, 110: Suction surface, 120: Peripheral portion, 111: Suction hole, 112: Suction port, 113: Suction surface, 114: First communication path, 1141: End portion, 115: First communication port, 116: First check valve, 117: First valve body, 118: Biasing member, 119: Member to be gripped, 121: Branch portion, 123: Second communication path, 125: Second communication port, 127: Second check valve, 129: Second valve body, 140: Surface to be supported, 200: Grinding support table, 201: Groove formation support table, 202: Support surface, 204: Support surface height measurement surface, 210: First connection portion, 211: First open portion, 213: First table connection path, 214: First table connection port, 216: Suction cup, 221: First suction valve, 223: Air valve, 224: Support surface suction valve, 226: Air passage, 227: First suction passage, 230: First suction source, 231: First air source, 260: Third connection part, 263: Third table connection path, 270: Opening and closing mechanism, 271: Cylinder tube, 272: Piston, 273: Second release part, 281: First air passage, 282: Second air passage, 283: Solenoid valve, 285: Second air source, 300: Groove forming device, 301: Cutting blade, 303: Moving mechanism, 305: Cutting control unit, 400: Conveying mechanism, 401: Holding body, 403: Holding arm, 405: Gripping part, 407: Connecting member, 410: Lifting mechanism, 412: Horizontal moving mechanism, 415: Pressing member, 416: Pressing cylinder, 417: Pressing shaft, 500: Unloading mechanism, 510: Fixture chuck support member, 511: Support plate, 512: Second connection part, 513: Cylindrical body, 514: Second table connection path, 516: Second release part, 517: Second table connection port, 518: Suction cup, 520: Suction cup member, 521: Suction cup, 530: Second suction source, 531: Second suction passage, 532: Second suction valve, 533: Third suction source, 534: Third suction passage, 535: Third suction valve, 540: Conveying rod, 550: Conveying arm, 553: Connecting member, 20: Plate-shaped workpiece, 21: Surface, 22: Back surface, 23: Division planned line, 25: Device, 27: Chip, 29: Groove

Claims

1. A jig chuck capable of sucking and holding one surface of a plate-shaped workpiece having lattice-shaped grooves with a depth that does not reach the other surface, exposing the grooves by grinding the other surface with a grinding wheel, and sucking and holding the chips obtained by dividing the plate-shaped workpiece, comprising: a suction surface for sucking the one surface of the plate-shaped workpiece; a suction hole having one end opening to the suction surface corresponding to the chip; a first communication port opening to a supported surface which is the opposite surface of the suction surface; a first communication path connecting the other end of the suction hole and the first communication port; a first check valve disposed in the first communication path and closing when the suction source is detached from the suction hole; a gripped member disposed on a side surface of the jig chuck for holding the jig chuck; The jig chuck comprising the above.

2. a branch portion disposed between a contact point of the first communication path with the suction hole and the first check valve; a second communication port opening to the periphery or side surface of the suction surface; a second communication path connecting the branch portion and the second communication port; a second check valve disposed in the second communication path and closing when the suction source is detached from the suction hole, The jig chuck according to claim 1, comprising: The jig chuck according to claim 1.

3. A grinding apparatus for sucking and holding one surface of a plate-shaped workpiece having grooves formed therein using the jig chuck according to claim 1, and grinding the other surface with a grinding wheel, comprising: a support table having a support surface for supporting the supported surface of the jig chuck; The support table includes a first opening portion that opens the first check valve when the support surface supports the jig chuck, and a first table connection path that is opened on the support surface so that the suction hole can communicate with a suction source when the support surface supports the jig chuck; The grinding apparatus further includes a grinding mechanism for grinding the other surface of the plate-shaped workpiece with the grinding wheel until the grooves are exposed on the other surface of the plate-shaped workpiece sucked and held by the suction surface of the jig chuck supported by the support surface of the support table. The grinding apparatus.

4. The support table further includes an opening and closing mechanism for opening and closing the first check valve of the jig chuck supported by the support surface by moving the first opening portion in a direction perpendicular to the support surface. The grinding apparatus according to claim 3. The grinding apparatus according to claim 3.

5. A grinding apparatus for sucking and holding one surface of a plate-shaped workpiece having grooves formed therein using the jig chuck according to claim 2, and grinding the other surface with a grinding wheel, comprising: a support table having a support surface for supporting the supported surface of the jig chuck; The support table includes a first opening portion that opens the first check valve when the support surface supports the jig chuck, and a support table connection path that is opened on the support surface and allows the suction hole to communicate with the suction source when the support surface supports the jig chuck. A grinding mechanism that grinds the other surface of the plate-shaped workpiece with a grinding wheel until the groove is exposed on the other surface of the plate-shaped workpiece held by suction by the suction surface of the jig chuck supported by the support surface of the support table. The apparatus further includes a carry-out mechanism that holds the jig chuck holding the chip obtained by dividing the plate-shaped workpiece by grinding by the grinding mechanism and carries it out from the support table. The carry-out mechanism includes a second opening portion that opens the second check valve when holding the jig chuck, and a second table connection path that communicates the suction hole with the suction source when the second check valve is opened by the second opening portion. Grinding device.

6. A method for dividing a plate-shaped workpiece, using a first jig chuck that is the jig chuck according to claim 1 and a second jig chuck that is the jig chuck according to claim 2, A first support step of supporting the first jig chuck by a first support table of a groove forming device capable of forming a lattice-shaped groove having a depth that does not reach the other surface on one surface of the plate-shaped workpiece. A first suction holding step of suction holding the other surface of the plate-shaped workpiece by a suction surface of the first jig chuck that is communicated with a suction source and suction holds the plate-shaped workpiece. A groove forming step of forming the groove on one surface of the plate-shaped workpiece supported by the first support table and suction held by the first jig chuck. A first detachment step of holding the first jig chuck using the gripped member while maintaining the state in which the first jig chuck suction holds the plate-shaped workpiece, and detaching the first jig chuck from the first support table. A second support step of supporting the second jig chuck that is communicated with a suction source and suction holds the plate-shaped workpiece by a second support table of a grinding device. A second suction holding step of inverting the first jig chuck holding the plate-shaped workpiece using the gripped member and suction holding one surface of the plate-shaped workpiece held by the first jig chuck by the suction surface of the second jig chuck. A second detachment step of detaching the first jig chuck from the plate-shaped workpiece. A grinding step of grinding the other surface of the plate-shaped workpiece sucked and held by the second jig chuck supported by the second support table with a grinding wheel to expose the groove; A method for dividing a plate-shaped workpiece, including the above.

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