Substrate Rotation Device for Film Forming Apparatus

Abstract

To provide a substrate rotation apparatus for a film deposition apparatus capable of rotating a substrate with a simple structure.SOLUTION: A substrate rotation apparatus 10 for a film deposition apparatus according to the invention includes: multiple holding members 80 each of which holds a substrate 5 as an object to be deposited; multiple bearing parts 70 for holding multiple holding members 80 such that multiple holding members can be rotated around multiple rotation axes Ax that are parallel with each other; a revolution body 30 including multiple connection parts 33 each of which is connected to multiple holding members 80; and a drive part 50 for revolving the revolution body 30 around a revolution axis Ax0 that is parallel to multiple rotation axes Ax. The drive part 50 is configured so as to revolve the revolution body 30 while a direction of the revolution body 30 in a view of an axis direction of the revolution axis Ax0. Each of the connection parts 33 is arranged so as to revolve around the rotation axis Ax of the holding members 80 corresponding to each connection part 33 when the revolution body 30 is revolved by the drive part 50.SELECTED DRAWING: Figure 3

Description

Technical Field

[0001] The present invention relates to a substrate rotating device for a film forming apparatus.

Background Art

[0002] Film forming apparatuses for forming a film on the surface of an object have been conventionally known. For example, Patent Document 1 discloses a hot filament CVD apparatus for forming a diamond film on the surface of a substrate by a hot filament CVD method. Further, for example, Patent Document 2 discloses a hot filament CVD apparatus for forming a silicon-based layer on a substrate by a hot filament CVD method (referred to as a hot wire CVD method in Patent Document 1).

[0003] The hot filament CVD apparatus of Cited Document 1 has a mechanism capable of holding a plurality of cutting tools in a chamber where film formation is performed. As seen in the hot filament CVD apparatus of Cited Document 1, in a known film forming apparatus, film formation is performed on a plurality of substrates at once.

[0004] Also, in film formation, in order to perform film formation uniformly in the circumferential direction of the substrate, each substrate is rotated (in this specification, rotation around the rotation axis passing through the substrate is meant). In the hot filament CVD apparatus of Patent Document 2, a plurality of substrates are each supported by a support, and each support is rotated by a rotation motor. Thereby, each substrate rotates together with the support.

Prior Art Documents

Patent Documents

[0005]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0006] In the thermal filament CVD apparatus of Patent Document 2, the number of rotary motors is the same as the number of supports. If the same number of rotary actuators as the holding members of the substrates are provided in order to rotate a plurality of substrates as in such a thermal filament CVD apparatus, the rotary device for the substrates becomes large-scale.

[0007] The present invention has been made in view of such a point, and an object thereof is to provide a substrate rotating device for a film forming apparatus, which can rotate a plurality of substrates with a simple configuration.

Means for Solving the Problems

[0008] The substrate rotating device for a film forming apparatus according to the present invention includes a plurality of holding members that respectively hold substrates to be film formed, a plurality of bearing portions that support the plurality of holding members so as to be respectively rotatable around a plurality of rotation axes parallel to each other, a rotating body provided with a plurality of connection portions respectively connected to the plurality of holding members, and a driving portion that rotates the rotating body around a turning axis parallel to the plurality of rotation axes. The driving portion is configured to rotate the rotating body while maintaining the orientation of the rotating body in the axial direction view of the turning axis. Each of the connection portions is arranged to rotate around the rotation axis of the holding member corresponding to the connection portion when the rotating body is rotated by the driving portion.

[0009] According to the above substrate rotating device, when the rotating body rotates while maintaining its orientation in the axial direction view of the turning axis, the plurality of connection portions provided on the rotating body respectively rotate around the rotation axes of the corresponding holding members. As a result, the holding members connected to the respective connection portions and supported by the bearing portions rotate. Therefore, according to the above substrate rotating device, it is possible to rotate a plurality of substrates with a simple configuration including one rotating body and a driving portion for rotating the rotating body.

[0010] According to a preferred embodiment of the present invention, the driving unit includes a first driving unit and a second driving unit. The first driving unit includes a first connecting member slidably connected to the rotating body, and rotates the first connecting member around a first turning axis parallel to the plurality of rotating axes. The second driving unit includes a second connecting member slidably connected to the rotating body, and rotates the second connecting member around a second turning axis parallel to the plurality of rotating axes in synchronization with the rotation of the first connecting member.

[0011] According to the above-described base rotating device, the first connecting member and the second connecting member, both of which are slidably connected to the rotating body, rotate synchronously around their respective turning axes parallel to the rotation axis of the holding member. Thereby, the rotating body can be rotated without changing the orientation of the rotating body in the axial direction view of the turning axis.

[0012] According to a preferred embodiment among the above embodiments, the driving unit includes an actuator having a rotating main shaft, and a transmission mechanism that connects the main shaft of the actuator to the first driving unit and the second driving unit. The transmission mechanism transmits the rotation of the main shaft to the first driving unit and the second driving unit.

[0013] According to the above-described base rotating device, the first driving unit and the second driving unit are driven by one actuator via a transmission mechanism. Therefore, it is possible to easily rotate the first connecting member and the second connecting member synchronously.

[0014] According to a preferred embodiment of the present invention, the rotating body is configured in a plate shape extending along a horizontal plane. The base rotating device further includes a plurality of support portions provided below the rotating body for supporting the rotating body. Each of the plurality of support portions includes a rotatable ball that contacts the lower surface of the rotating body and supports the rotating body.

[0015] According to the above-described base rotating device, since each ball of the plurality of support portions is rotatable, the ball can support the rotating body so as to be rotatable.

[0016] According to a preferred embodiment of the present invention, each of the connection portions includes a pin. Each of the holding members includes a force receiving portion against which the pin abuts when the pin pivots around the rotation axis.

[0017] According to the above-described base rotating device, the holding member rotates by a simple configuration in which the pin abuts against the force receiving portion and pushes the force receiving portion. Therefore, for example, the risk of the connection portion and the holding member meshing with each other can be reduced as compared with a connection by a gear or the like.

[0018] According to a preferred embodiment among the above-described embodiments, the pin is configured to bend or flex so as not to be able to abut against the force receiving portion when the rotation of the holding member is stopped while the driving portion is pivoting the pivoting body.

[0019] According to the above-described base rotating device, when the rotation of the holding member is stopped while the driving portion is pivoting the pivoting body, the pin does not abut against the force receiving portion. That is, the connection between the holding member whose rotation is inhibited and the pivoting body is broken. Therefore, even if the rotation of the holding member is inhibited for some reason, the rotational resistance of the holding member is less likely to affect the pivoting of the pivoting body and the rotation of other holding members.

[0020] According to another preferred embodiment, the force receiving portion is configured to bend or flex so as not to be able to abut against the pin when the rotation of the holding member is stopped while the driving portion is pivoting the pivoting body. According to the above-described base rotating device, the same operational effects as those of the configuration in which the pin bends or flexes can be achieved.

[0021] According to a preferred embodiment of the present invention, the base rotating device further includes a plate on which the plurality of bearing portions are provided and which extends along a horizontal plane. Each of the holding members is exposed on the upper surface of the plate. The pivoting body and the driving portion are disposed below the plate.

[0022] According to the above-described substrate rotating device, a plurality of holding members are exposed, and the rotating body and the driving unit are arranged on the lower side of the plate instead of the upper surface side of the plate that holds the substrate by the holding members. Therefore, a large number of holding members can be provided on the plate.

Advantages of the Invention

[0023] According to the substrate rotating device for a film forming apparatus according to the present invention, a plurality of substrates can be rotated with a simple configuration.

Brief Description of the Drawings

[0024]

Figure 1

Figure 2

Figure 3

Figure 4

Embodiments for Carrying Out the Invention

[0025] Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a schematic perspective view of a film forming apparatus 100 according to an embodiment. In the following description, the front means the direction in which an operator on the front side of the film forming apparatus 100 moves away from the film forming apparatus 100. The rear means the direction in which an operator on the front side of the film forming apparatus 100 approaches the film forming apparatus 100. Left, right, up, and down respectively mean left, right, up, and down when the film forming apparatus 100 is viewed from the front side. The reference signs F, Rr, L, R, U, and D in the drawings respectively represent front, rear, left, right, up, and down. However, the above directions are merely directions defined for convenience of explanation, and do not limit the installation mode of the film forming apparatus 100 in any way, nor do they limit the present invention in any way.

[0026] The film forming apparatus 100 according to this embodiment is a thermal filament CVD apparatus. The thermal filament CVD apparatus heats the source gas introduced into the chamber by a thermal filament and deposits the product generated from the source gas on a substrate. Here, the film forming apparatus 100 generates diamond by heating a hydrocarbon gas and a hydrogen gas to a high temperature with the thermal filament 102. The generated diamond forms a diamond film on the surface of the substrate. The film forming apparatus 100 according to this embodiment is an apparatus for performing diamond coating on the cutting tool 5. The cutting tool 5 is, for example, a drill or an end mill. However, the substrate to be film formed is not necessarily limited to the cutting tool 5. By performing diamond coating on the cutting tool 5, the durability of the cutting tool 5 can be improved.

[0027] As shown in FIG. 1, the film forming apparatus 100 includes a chamber 101 and a plurality of thermal filaments 102. The chamber 101 is a sealed furnace body. However, in FIG. 1, the chamber 101 with some wall portions removed is illustrated. Diamond is generated in the chamber 101 and coated on the cutting tool 5. A vacuum pump (not shown) is connected to the chamber 101. Further, an inlet for the source gas (not shown) is provided in the chamber 101. The chamber 101 is configured to be highly airtight so that its interior can be depressurized by the vacuum pump.

[0028] The thermal filament 102 is a wire that generates heat when energized. The thermal filament 102 is formed of, for example, tungsten. The plurality of thermal filaments 102 are each stretched substantially horizontally in the chamber 101. The plurality of thermal filaments 102 are arranged side by side in the front-rear direction and the up-down direction and each extend in the left-right direction.

[0029] Inside the chamber 101, a base rotating device 10 is provided that holds a plurality of cutting tools 5 and can rotate them respectively. As shown in FIG. 1, the base rotating device 10 is provided below a plurality of thermal filaments 102. FIG. 2 is a partially broken plan view of the base rotating device 10. FIG. 3 is a cross-sectional view of the base rotating device 10. As shown in FIGS. 2 and 3, the base rotating device 10 includes a base plate 20, a swing plate 30, a plurality of support portions 40 that support the swing plate 30, a drive portion 50 that swings the swing plate 30, an upper plate 60, a plurality of bearings 70 provided on the upper plate 60, and a plurality of holders 80 respectively supported by the plurality of bearings 70. The plurality of holders 80 are each configured to be able to hold one cutting tool 5.

[0030] The base plate 20 is configured in a rectangular flat plate shape in plan view. The base plate 20 is placed on the bottom surface of the chamber 101. On the base plate 20, a part of the drive portion 50 and a plurality of support portions 40 are provided. The plurality of support portions 40 are provided below the swing plate 30 and support the swing plate 30. As shown in FIG. 2, here, the number of support portions 40 is four. The four support portions 40 are each provided near the corner of the base plate 20. However, the plurality of support portions 40 only need to support the swing plate 30 so that it can swing along the horizontal plane, and their quantity and position are not limited. For example, the number of support portions 40 may be three. The plurality of support portions 40 each include a rotatable ball 41. The ball 41 is a spherical body made of metal here. The ball 41 abuts against the lower surface of the swing plate 30 and supports the swing plate 30 so that it can swing. Each support portion 40 includes a ball holder 42 that rotatably holds the ball 41.

[0031] The drive unit 50 rotates the swing plate 30 around the swivel axis Ax0 extending in the vertical direction. The swivel axis Ax0 of the swing plate 30 will be described later. As shown in Fig. 3, the drive unit 50 includes a first drive unit 51, a second drive unit 52, a drive motor 53, and a transmission mechanism 54. Here, the transmission mechanism 54 includes a drive gear 54a and a connecting gear 54b.

[0032] The drive motor 53 is an electric motor here. As shown in Fig. 3, the drive motor 53 includes a main shaft 53a. Here, the main shaft 53a extends in the vertical direction and rotates around the vertical line. The drive motor 53 is provided outside the chamber 101. The drive gear 54a is provided at the tip of the main shaft 53a. When the drive motor 53 rotates the main shaft 53a, the drive gear 54a rotates along the horizontal plane.

[0033] As shown in Fig. 3, the first drive unit 51 includes a first driven gear 51a and a first connecting pin 51b. The first driven gear 51a is provided in front of the drive gear 54a and meshes with the drive gear 54a. When the drive motor 53 drives and the drive gear 54a rotates, the first driven gear 51a also rotates along the horizontal plane. The first connecting pin 51b extends upward from the first driven gear 51a. The first connecting pin 51b is a cylindrical member. As shown in Fig. 3, the first connecting pin 51b is provided at a position radially displaced from the rotation center Ax1 of the first driven gear 51a. The distance (displacement amount) between the rotation center Ax1 of the first driven gear 51a and the first connecting pin 51b is the distance R1. When the first driven gear 51a rotates around the rotation center Ax1, the first connecting pin 51b rotates around the rotation center Ax1 of the first driven gear 51a along a circle with a turning radius R1. Hereinafter, the rotation center Ax1 of the first driven gear 51a will also be referred to as the first swivel axis Ax1. The first swivel axis Ax1 extends in the vertical direction. The first drive unit 51 rotates the first connecting pin 51b around the first swivel axis Ax1.

[0034] The connecting gear 54b is provided in front of the first driven gear 51a and meshes with the first driven gear 51a. When the first driven gear 51a rotates, the connecting gear 54b also rotates along the horizontal plane. The second driving part 52 is provided further in front of the connecting gear 54b and has the same configuration as the first driving part 51. The second driving part 52 includes a second driven gear 52a and a second connecting pin 52b. The second driven gear 52a is provided in front of the connecting gear 54b and meshes with the connecting gear 54b. When the connecting gear 54b rotates, the second driven gear 52a also rotates along the horizontal plane. The radius of the second driven gear 52a is set to be the same as the radius of the first driven gear 51a. Therefore, the second driven gear 52a rotates in synchronization with the first driven gear 51a.

[0035] The second connecting pin 52b extends upward from the second driven gear 52a. The second connecting pin 52b is a cylindrical member. As shown in FIG. 3, the second connecting pin 52b is provided at a position displaced by a distance R1 in the radial direction from the rotation center Ax2 of the second driven gear 52a. When the second driven gear 52a rotates around the rotation center Ax2, the second connecting pin 52b orbits around the rotation center Ax2 of the second driven gear 52a along a circle with a turning radius R1. Hereinafter, the rotation center Ax2 of the second driven gear 52a is also referred to as the second turning axis Ax2. The second turning axis Ax2 is parallel to the first turning axis Ax1. The second turning axis Ax2 extends in the vertical direction here. With such a configuration, the second driving part 52 orbits the second connecting pin 52b around the second turning axis Ax2 parallel to the first turning axis Ax1 in synchronization with the turning of the first connecting pin 51b.

[0036] The driving gear 54a and the connecting gear 54b constitute a transmission mechanism 54 that connects the main shaft 53a of the drive motor 53 to the first drive unit 51 and the second drive unit 52. The transmission mechanism 54 transmits the rotation of the main shaft 53a of the drive motor 53 to the first drive unit 51 and the second drive unit 52. The first connecting pin 51b and the second connecting pin 52b are rotated by the drive motor 53 via the transmission mechanism 54, the first drive unit 51, and the second drive unit 52. The fact that the transmission mechanism 54 connects the main shaft 53a of the drive motor 53 and the second drive unit 52 includes the case where the first drive unit 51 is interposed between the main shaft 53a of the drive motor 53 and the second drive unit 52 as in the present embodiment. However, the transmission mechanism 54 may connect the drive motor 53 and the second drive unit 52 without the interposition of the first drive unit 51. The configuration of the transmission mechanism 54 is not particularly limited. The transmission mechanism 54 may further include other gears. The transmission mechanism 54 may include, for example, a chain or a cam. The actuator that drives the first drive unit 51 and the second drive unit 52 is not limited to an electric motor. The actuator that drives the first drive unit 51 and the second drive unit 52 may be, for example, an air-driven rotary actuator.

[0037] The swing plate 30 is supported by a plurality of support portions 40 and is connected to the first connecting pin 51b and the second connecting pin 52b. As shown in FIG. 3, on the lower surface of the swing plate 30, a first insertion hole 31 into which the first connecting pin 51b is inserted and a second insertion hole 32 into which the second connecting pin 52b is inserted are provided. The first connecting pin 51b and the first insertion hole 31 are connected so as to slide between them. The first connecting pin 51b is slidably connected to the swing plate 30. Similarly, the second connecting pin 52b and the second insertion hole 32 are connected so as to slide between them. The second connecting pin 52b is slidably connected to the swing plate 30. However, the connecting members slidably connected to the swing plate 30 are not limited to the first connecting pin 51b and the second connecting pin 52b. For example, when the swing plate 30 has a convex portion and the first driving portion 51 and the second driving portion 52 each have a concave portion corresponding to the convex portion, the connecting member slidably connected to the swing plate 30 may be the concave portion configured to slide with respect to the convex portion.

[0038] As shown in FIG. 2, the swing plate 30 is a rectangular flat plate-shaped member in plan view. The swing plate 30 extends along the horizontal plane. However, the shape of the swing plate 30 is not particularly limited. For example, the swing plate 30 may not be flat plate-shaped. When the first connecting pin 51b and the second connecting pin 52b rotate along a circle with a turning radius R1, the swing plate 30 also rotates around a turning axis Ax0 parallel to the first turning axis Ax1 and the second turning axis Ax2 along a circle with a turning radius R1. The turning axis Ax0 of the swing plate 30 extends in the vertical direction. Here, the swing plate 30 rotates along the horizontal plane. At this time, the swing plate 30 is restricted from rotating by engaging with both the first connecting pin 51b and the second connecting pin 52b that rotate synchronously. Therefore, the orientation of the swing plate 30 in the axial direction view (here, plan view) of the turning axis Ax0 is maintained even while the swing plate 30 is turning. As a result, all points on the swing plate 30 rotate on the horizontal plane along a circle with a turning radius R1. The turning axis Ax0 of the swing plate 30 is illustrated at the position in FIG. 2 for convenience. However, the turning axis Ax0 of the swing plate 30 can pass through all points on the swing plate 30 in plan view.

[0039] As shown in FIG. 3, the swing plate 30 includes a plurality of connecting portions 33 respectively connected to a plurality of holders 80. Each connecting portion 33 is arranged to swing around the rotation axis Ax of the corresponding holder 80 when the swing plate 30 is swung by the driving portion 50. The rotation axes Ax of the plurality of holders 80 extend in the vertical direction respectively. The rotation axes Ax of the plurality of holders 80 are parallel to each other. Also, the rotation axis Ax of each holder 80, the swing axis Ax0 of the swing plate 30, the first swing axis Ax1, and the second swing axis Ax2 are also parallel to each other. Here, the connecting portion 33 includes a swing pin 33a. When the swing plate 30 is swung by the driving portion 50, each swing pin 33a swings around the rotation axis Ax of the corresponding holder 80, drawing a circle with a swing radius R1. The swing axis of the swing pin 33a substantially coincides with the rotation axis Ax of the corresponding holder 80. Each swing pin 33a is configured in a rod shape and extends upward from the upper surface of the swing plate 30. Here, each swing pin 33a is configured in a columnar shape. However, the shape of the swing pin 33a is not limited to a columnar shape. For example, each swing pin 33a may be configured in a prismatic shape.

[0040] An upper plate 60 is arranged above the swing plate 30. The swing plate 30 and the driving portion 50 are arranged below the upper plate 60. In the present embodiment, the upper plate 60 is also configured in a rectangular flat plate shape in plan view. However, the shape of the upper plate 60 is not particularly limited. The upper plate 60 is fixedly attached to the base plate 20 so as not to move. The upper plate 60 extends along a horizontal plane. A plurality of bearings 70 are provided on the upper plate 60. Here, the bearings 70 are provided in a matrix in the front-rear direction and the left-right direction. A plurality of bearing insertion holes 61 into which the bearings 70 are respectively inserted are formed in a matrix on the upper surface of the upper plate 60. The bearing insertion holes 61 penetrate the upper plate 60 in the vertical direction.

[0041] FIG. 4 is a partially broken side view of the lower part of the holder 80 and a part of the bearing 70. As shown in FIG. 4, each bearing 70 is provided with a through hole 71 into which the holder 80 is inserted. The through hole 71 is configured to be substantially circular in plan view and penetrates the bearing 70 in the vertical direction. The rotating shaft Ax passes through the center of the through hole 71. The plurality of bearings 70 support the plurality of holders 80 so as to be rotatable around the rotating shaft Ax respectively. The bearing 70 is, for example, a bush. However, the configuration of the bearing portion that rotatably supports the holder 80 is not limited as long as it can rotatably support the holder 80. The bearing portion may be, for example, a through hole formed in the upper plate 60.

[0042] As shown in FIG. 4, the holder 80 includes a work holder 81 that holds the cutting tool 5 as a base, a shaft portion 82 inserted into the through hole 71, and a force-receiving lever 83 connected to the connection portion 33 of the swing plate 30. The shaft portion 82 has a cross-sectional shape corresponding to the through hole 71 of the bearing 70 and is inserted into the through hole 71. By sliding between the shaft portion 82 and the bearing 70, the holder 80 is rotatable along the through hole 71 of the bearing 70. The work holder 81 is connected to the upper part of the shaft portion 82. As shown in FIG. 3, the work holder 81 protrudes above the upper surface of the upper plate 60. Here, the work holder 81 is configured in a cylindrical shape with an open upper surface. A rod-shaped cutting tool 5 is inserted into the inside of the cylinder of the work holder 81. However, the shape of the work holder 81 only needs to correspond to the shape of the cutting tool 5 and is not limited to the cylindrical shape. The cutting edge 5a of the cutting tool 5 protrudes above the work holder 81 and is exposed in the chamber 101. In a state where the cutting tool 5 is held by the holder 80, the cutting edge 5a is located between the thermal filaments 102 arranged in the front-rear direction. As shown in FIG. 3, in the vertical direction, the cutting edge 5a is located at the same position as the thermal filament 102.

[0043] In this embodiment, the holder 80 protrudes upward from the upper plate 60. However, the holder 80 may be embedded in the upper plate 60 so as to be recessed from the upper surface of the upper plate 60. The holder 80 only needs to be exposed at least on the upper surface of the upper plate 60.

[0044] As shown in FIG. 4, the force-receiving lever 83 of the holder 80 is provided below the shaft portion 82. The force-receiving lever 83 is a member with which the turning pin 33a comes into contact when the turning pin 33a turns around the rotation axis Ax of the holder 80. As shown in FIG. 4, the force-receiving lever 83 protrudes outward in the radial direction from the shaft portion 82. Here, the force-receiving lever 83 is a rod-shaped member extending in the horizontal direction. However, the shape of the force-receiving lever 83 is not particularly limited. The force-receiving lever 83 extends radially outward beyond the turning orbit of the turning pin 33a so as to come into contact with the turning pin 33a when the turning pin 33a turns around the rotation axis Ax of the holder 80. The force-receiving lever 83 has a tip at a position horizontally separated from the rotation axis Ax of the holder 80 by a distance R1 or more.

[0045] When the drive motor 53 is driven and the plurality of turning pins 33a turn around their respective turning axes (the rotation axes Ax of the corresponding holders 80), the turning pin 33a and the force-receiving lever 83 come into contact. Thereby, the turning force of the turning pin 33a is transmitted to the holder 80. As a result, each holder 80 rotates around the rotation axis Ax. The cutting tool 5 rotates together with the holder 80.

[0046] In this embodiment, the plurality of holders 80 are rotated at an extremely slow rotation speed. However, the rotation speed of the holder 80 is not limited. The plurality of holders 80 may be continuously rotated during film formation. Alternatively, the plurality of holders 80 may be rotated intermittently (for example, by 90 degrees each time). By the cutting tool 5 rotating together with the holder 80, variations in the distance from the thermal filament 102 due to the circumferential position of the cutting tool 5 are eliminated. Thereby, diamond is uniformly deposited on the blade portions 5a of each cutting tool 5.

[0047] In this embodiment, each turning pin 33a is configured such that when the rotation of the holder 80 stops while the drive unit 50 is turning the swing plate 30, it bends and cannot contact the force receiving lever 83. A situation where the rotation of the holder 80 stops while the drive unit 50 is turning the swing plate 30 is, for example, a situation where the holder 80 and the bearing 70 are engaged. The turning pin 33a may be configured such that, for example, a part or all of it is thin so that it easily bends when a force is applied. The turning pin 33a may be configured such that when the rotation of the holder 80 stops while the drive unit 50 is turning the swing plate 30, it breaks and cannot contact the force receiving lever 83. The turning pin 33a may be made of a brittle material such as cemented carbide or ceramics, or may be brittle-treated (for example, quenched) so that it easily breaks when a force is applied.

[0048] However, when the rotation of the holder 80 stops while the drive unit 50 is turning the swing plate 30, what breaks or bends may be the force receiving lever 83. The force receiving lever 83 may be configured to break or bend so that it cannot contact the turning pin 33a when the rotation of the holder 80 stops while the drive unit 50 is turning the swing plate 30.

[0049] [Advantages and effects of this embodiment] The operation and effect of the substrate rotating device 10 according to the present embodiment will be described below. The substrate rotating device 10 for a film forming apparatus according to the present embodiment includes a plurality of holders 80 that respectively hold substrates to be film formed (for example, cutting tools 5), a plurality of bearings 70 that support the plurality of holders 80 so as to be rotatable around a plurality of rotation axes Ax parallel to each other, a swing plate 30 having a plurality of connection parts 33 respectively connected to the plurality of holders 80, and a drive part 50 that swings the swing plate 30 around a turning axis Ax0 parallel to the plurality of rotation axes Ax. The drive part 50 swings the swing plate 30 while maintaining the orientation of the swing plate 30 in the axial direction view of the turning axis Ax0. Each connection part 33 is arranged to turn around the rotation axis Ax of the holder 80 corresponding to each connection part 33 when the swing plate 30 is swung by the drive part 50. According to such a substrate rotating device 10, while the swing plate 30 turns while maintaining its orientation in the axial direction view of the turning axis Ax0, the plurality of connection parts 33 provided on the swing plate 30 respectively turn around the rotation axis Ax of the corresponding holder 80. As a result, the holders 80 that are connected to the respective connection parts 33 and supported by the bearings 70 rotate. Therefore, according to such a substrate rotating device 10, it is possible to rotate a plurality of substrates with a simple configuration of one swing plate 30 and a drive part 50 that swings the swing plate 30.

[0050] The above configuration is simpler than, for example, a conventional configuration in which a plurality of actuators rotate one holder each. The above configuration is also simpler compared to, for example, a configuration in which the driving force of one actuator is transmitted to a plurality of holders via a plurality of gears or the like. Such a conventional configuration is likely to fail in a short period of time in an environment of high temperature (in a thermal filament CVD apparatus, the temperature of the substrate may be 600 °C or higher) and reactive gas atmosphere inside the chamber 101 of the film forming apparatus 100. For example, in a configuration where gears mesh with each other, in a high temperature environment, the gears are likely to bite due to dimensional changes caused by thermal expansion of the gears. Also, in an environment of reactive gas atmosphere, for example, products resulting from the reaction of reactive gas adhere to the bearing portion or the like, easily causing poor rotation. On the other hand, since the configuration of the substrate rotating device 10 according to the present embodiment is simple, it is less likely to fail even in the above-described environment. Although the products of the reactive gas can adhere to the movable parts regardless of the configuration of the substrate rotating device, the simpler the configuration of the substrate rotating device, the lower the risk of failure due to adhesion of the products.

[0051] Furthermore, the above configuration enables the holders 80 to be densely arranged on the upper plate 60. In a conventional configuration in which a plurality of actuators rotate one holder each, since the actuators occupy space, there is a limit to densely arranging the holders. In a configuration in which the driving force of one actuator is transmitted to a plurality of holders via a plurality of gears or the like, since the gears or the like occupy space, there is also a limit to densely arranging the holders. In contrast, in the present embodiment, the space required for the rotation of one holder 80 is within the rotation orbit of the holder 80 (specifically, the rotation orbit of the force receiving lever 83). Therefore, the holders 80 can be densely arranged.

[0052] One swing plate 30 includes a plurality of connection portions 33 and rotates a plurality of holders 80. However, the substrate rotating device 10 may include a plurality of swing plates 30 configured to rotate a plurality of holders 80 respectively. In that case, one driving unit 50 may swing a plurality of swing plates 30.

[0053] In this embodiment, the drive unit 50 includes a first drive unit 51 and a second drive unit 52. The first drive unit 51 includes a first connecting pin 51b slidably connected to the swing plate 30, and rotates the first connecting pin 51b around a first turning axis Ax1 parallel to the rotation axis Ax of the holder 80. The second drive unit 52 includes a second connecting pin 52b slidably connected to the swing plate 30, and rotates the second connecting pin 52b around a second turning axis Ax2 parallel to the rotation axis Ax of the holder 80 in synchronization with the rotation of the first connecting pin 51b. According to such a base rotating device 10, the first connecting pin 51b and the second connecting pin 52b, both of which are slidably connected to the swing plate 30, rotate synchronously around the respective turning axes Ax1 and Ax2 parallel to the rotation axis Ax of the holder 80. Thereby, the swing plate 30 can be rotated without changing the orientation of the swing plate 30 in the axial direction view of the turning axis Ax0. Note that the drive unit 50 may further include another drive unit having another connecting member that rotates synchronously with the first connecting pin 51b and the second connecting pin 52b.

[0054] Furthermore, in this embodiment, the drive unit 50 includes a drive motor 53 having a main shaft 53a, and a transmission mechanism 54 that connects the main shaft 53a of the drive motor 53 to the first drive unit 51 and the second drive unit 52. The transmission mechanism 54 transmits the rotation of the main shaft 53a to the first drive unit 51 and the second drive unit 52. According to such a base rotating device 10, the first drive unit 51 and the second drive unit 52 are driven by one drive motor 53 via the transmission mechanism 54. Therefore, it is possible to easily rotate the first connecting pin 51b and the second connecting pin 52b synchronously.

[0055] Note that the first connecting pin 51b and the second connecting pin 52b may be rotated synchronously by separate actuators. Alternatively, only one of the first connecting pin 51b and the second connecting pin 52b may be rotated by an actuator, and the other may only rotate passively.

[0056] In this embodiment, the swing plate 30 is configured in a plate shape extending along the horizontal plane, and the base rotating device 10 includes a plurality of support portions 40 provided below the swing plate 30 for supporting the swing plate 30. The plurality of support portions 40 each include a rotatable ball 41 that abuts against the lower surface of the swing plate 30 and supports the swing plate 30. According to such a base rotating device 10, since each ball 41 of the plurality of support portions 40 is rotatable, the swing plate 30 can be rotatably supported by the balls 41. Since such a configuration is simple, it is less likely to fail even in the high-temperature gas atmosphere in the chamber 101. Furthermore, such a simple configuration also contributes to cost reduction of the base rotating device 10.

[0057] In this embodiment, each connecting portion 33 includes a pivot pin 33a, and each holder 80 includes a force-receiving lever 83 against which the pivot pin 33a abuts when the pivot pin 33a pivots around the rotation axis Ax of the holder 80. According to such a base rotating device 10, the holder 80 rotates by a simple configuration in which the pivot pin 33a abuts against the force-receiving lever 83 and pushes the force-receiving lever 83. Therefore, for example, compared with connection by gears or the like, the risk of the connecting portion 33 and the holder 80 meshing can be reduced. Furthermore, in this embodiment, the pivot pin 33a and the force-receiving lever 83 are detachably connected. Therefore, the risk of the connecting portion 33 and the holder 80 meshing can be further reduced. The high-temperature gas atmosphere in the chamber 101 is an environment where there is a high risk of the movable parts meshing. The configuration in which the force of the driving portion 50 is transmitted to the holder 80 by the pivot pin 33a and the force-receiving lever 83 abutting against each other exhibits an effect particularly in such an environment.

[0058] In this embodiment, when the rotation of the holder 80 stops while the drive unit 50 is rotating the swing plate 30, the turning pin 33a is configured to bend so as not to be able to contact the force-receiving lever 83. The turning pin 33a may be bent so as not to be able to contact the force-receiving lever 83. According to such a configuration, when the rotation of the holder 80 stops while the drive unit 50 is rotating the swing plate 30, the turning pin 33a will not contact the force-receiving lever 83. That is, the connection between the holder 80 whose rotation is inhibited and the swing plate 30 is broken. Therefore, even if the rotation of the holder 80 is inhibited for some reason, the rotational resistance of the holder 80 is less likely to affect the rotation of the swing plate 30 and the rotation of other holders 80. If the turning pin 33a continues to contact the force-receiving lever 83 even when the rotation of the holder 80 stops while the drive unit 50 is rotating the swing plate 30, the rotation of all the holders 80 will stop due to a rotation failure of one holder 80. The configuration in which the turning pin 33a bends or breaks is for preventing such a situation. Further, according to the configuration in which the turning pin 33a is deformed (bent or broken) in this way, by inspecting the turning pin 33a after film formation, it can be easily understood that the substrate corresponding to the deformed turning pin 33a has not been rotating at least from the middle. Therefore, it is possible to surely remove the substrate as a film formation defect.

[0059] The same applies to the case where the force-receiving lever 83 bends or breaks so as not to be able to contact the turning pin 33a when the rotation of the holder 80 stops while the drive unit 50 is rotating the swing plate 30.

[0060] The substrate rotating device 10 according to this embodiment is provided with a plurality of bearings 70 and includes an upper plate 60 that extends along a horizontal plane. The holder 80 is exposed on the upper surface of the upper plate 60. The swing plate 30 and the drive unit 50 are disposed below the upper plate 60. According to such a substrate rotating device 10, the swing plate 30 and the drive unit 50 are disposed not on the upper surface side of the upper plate 60 where a plurality of holders 80 are exposed, but on the lower side of the upper plate 60. Therefore, a large number of holders 80 can be provided on the upper plate 60. Further, the upper plate 60 can protect the swing plate 30 and the drive unit 50 from a high-temperature gas atmosphere generated above the upper plate 60.

[0061] [Other Embodiments] As described above, a preferred embodiment has been described. However, the above embodiment is merely an example, and various other embodiments are possible. For example, in the above-described embodiment, the swing plate 30 was provided below the holder 80. However, the positional relationship between the holding member that holds the substrate and the swivel body is not limited to this. For example, the swivel body may be provided above the holding member. The plurality of holding members may be provided, for example, so as to be arranged in the vertical direction, and the swivel body may be provided on the side of the plurality of holding members.

[0062] The turning of the swivel body is not limited to being caused by the synchronized turning of two or more connecting pins. For example, the swivel body may be slidably connected to one connecting member that turns, and the connection portion and the holding member may be connected in a non-changeable positional relationship, so that the direction in the axial direction view of the turning axis is maintained. Even with such a configuration, the swivel body can be turned while maintaining the direction of the swivel body. The support portion that supports the swivel body is not limited to one provided with balls. The support portion may be, for example, a member having a curved surface formed at the tip. If the swivel body can be supported by the drive unit, the support portion may not be provided.

[0063] The connecting part may not be provided with a swivel pin. For example, the connecting part may be provided with a recess through which the force-receiving lever is inserted. The connecting part may not be able to move away from the holding member. The swivel pin may extend in a direction intersecting the rotation axis instead of in a direction parallel to the rotation axis of the holder. For example, the force-receiving part of the holding member that abuts against the swivel pin may be a recess through which a swivel pin extending in the radial direction of the holding member is inserted.

[0064] Part or all of the substrate rotating device may be removable from within the chamber of the film forming apparatus. Describing using the reference numerals of the above-described embodiments, for example, in one preferred example, within the chamber 101 of the film forming apparatus 100, rails for slidably supporting members other than the drive motor 53 and the driving gear 54a of the substrate rotating device 10 (hereinafter also referred to as the upper mechanism) in the front-rear direction may be provided. The upper mechanism is a part of the substrate rotating device 10 that is directly or indirectly supported by the base plate 20. In such a configuration, the upper mechanism can be easily taken in and out of the chamber 101 along the rails. When connecting the upper mechanism and the drive motor 53, the upper mechanism and the drive motor 53 can be connected simply by pushing the upper mechanism until the driving gear 54a and the first driven gear 51a come into contact. According to such a configuration, the substrate can be mounted and the upper mechanism can be cleaned in a state where the upper mechanism is pulled out or removed from the outside of the chamber 101. Therefore, these operations are easy. Also, as described above, the operation of connecting or separating the upper mechanism and the drive motor 53 is also easy.

[0065] The film forming method, configuration, etc. of the film forming apparatus are not particularly limited. The material to be film-formed is also not limited to diamond. The arrangement of the holding members in the substrate rotating device is not limited to a matrix shape and can take any arrangement.

Description of Reference Numerals

[0066] 5 Cutting tool (substrate) 10 Substrate rotating device 30 Swing plate (swiveling body) 33 Connecting part 33a Swivel pin (pin) 40 Support section 41 Ball 50 Driving section 51 First driving section 51b First connecting pin (first connecting member) 52 Second driving section 52b Second connecting pin (second connecting member) 53 Driving motor (actuator) 53a Main shaft 54 Transmission mechanism 60 Upper plate (plate) 70 Bearing (bearing section) 80 Holder (holding member) 83 Force-receiving lever (force-receiving section) 100 Film-forming device 101 Chamber 102 Thermal filament Ax Rotation axis of the holder (rotation axis of the swivel pin) Ax0 Swivel axis of the swing plate Ax1 First swivel axis Ax2 Second swivel axis

Claims

1. A plurality of holding members that respectively hold substrates to be film-formed; A plurality of bearing portions that support the plurality of holding members so as to be respectively rotatable around a plurality of rotation axes parallel to each other; A swivel body including a plurality of connection portions respectively connected to the plurality of holding members; A drive portion that swivels the swivel body around a swivel axis parallel to the plurality of rotation axes, wherein the drive portion is configured to swivel the swivel body while maintaining the orientation of the swivel body in a view in the axial direction of the swivel axis; each of the connection portions is arranged to swivel around the rotation axis of the holding member corresponding to each connection portion when the swivel body is swiveled by the drive portion; A substrate rotation device for a film-forming apparatus.

2. The drive portion includes a first connection member slidably connected to the swivel body, and a first drive portion that swivels the first connection member around a first swivel axis parallel to the plurality of rotation axes; includes a second connection member slidably connected to the swivel body, and a second drive portion that swivels the second connection member around a second swivel axis parallel to the plurality of rotation axes in synchronization with the swiveling of the first connection member; The substrate rotation device according to Claim 1.

3. The drive portion includes an actuator having a rotating main shaft; and a transmission mechanism that connects the main shaft of the actuator to the first drive portion and the second drive portion and transmits the rotation of the main shaft to the first drive portion and the second drive portion; The substrate rotation device according to Claim 2.

4. The swivel body is configured in a plate shape extending along a horizontal plane, and further includes a plurality of support portions provided below the swivel body and supporting the swivel body; each of the plurality of support portions includes a rotatable ball that contacts the lower surface of the swivel body and supports the swivel body; The substrate rotation device according to any one of Claims 1 to 3.

5. Each of the connection portions includes a pin; each of the holding members includes a force-receiving portion that the pin contacts when the pin swivels around the rotation axis; The substrate rotation device according to any one of Claims 1 to 4.

6. The pin is configured to break or bend so as not to be able to contact the force-receiving portion when the rotation of the holding member stops while the drive portion is swiveling the swivel body; The substrate rotation device according to Claim 5.

7. When the rotation of the holding member is stopped while the driving part is rotating the swivel body, the force receiving part is configured to break or bend so as not to be able to contact the pin. The base rotating device according to claim 5.

8. A plurality of bearing parts are provided, and further includes a plate extending along a horizontal plane. Each of the holding members is exposed on the upper surface of the plate. The swivel body and the driving part are disposed below the plate. The base rotating device according to any one of claims 1 to 7.

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