Fluid flow path device and method for manufacturing fluid flow path device

Abstract

A fluid flow path device is provided that can improve the flowability of a fluid to be treated in a turn-back flow path. [Solution] The fluid channel device (10) includes a main body (20) formed by stacking multiple substrates, a pair of lids (30) covering a pair of end faces of the main body (20), and a fluid channel (40) spanning the main body (20) and the pair of lids (30). The fluid channel (40) includes a first channel (41) formed between a pair of first substrates (213), a second channel (42) formed between the pair of first substrates (213) or between a pair of second substrates (214) positioned at different positions from the pair of first substrates (213) in the stacking direction, and a return channel (43) connecting the first channel (41) and the second channel (42) adjacent to each other so that the fluid to be treated flowing out of one of the first channel (41) and the second channel (42) turns back toward the other channel. The return channel (43) is an internal channel formed inside each lid (30) or a concave channel formed in a concave shape on the surface of each lid (30) facing the main body (20).

Description

[Technical Field]

[0001] The present invention relates to a fluid channel device and a method for manufacturing a fluid channel device. [Background technology]

[0002] BACKGROUND ART Conventionally, a fluid channel device provided with a fluid channel through which a fluid to be treated flows is known (see, for example, Patent Document 1).

[0003] This fluid flow path device has a main body made of multiple substrates stacked on top of each other, and a pair of lids detachably attached to the main body. The main body has a pair of end faces facing opposite each other in a predetermined direction perpendicular to the substrate stacking direction, and the pair of lids are arranged to cover the pair of end faces of the main body, respectively.

[0004] A fluid flow path through which the fluid to be treated flows is formed inside the main body. The fluid flow path has a first flow path that penetrates between the pair of end faces and flows the fluid to be treated from one end face side to the other end face side, as viewed from the substrate stacking direction, and a second flow path that penetrates between the pair of end faces and flows the fluid to be treated from the other end face side to the one end face side. The first flow path and the second flow path are alternately arranged in a direction perpendicular to the predetermined direction, as viewed from the substrate stacking direction.

[0005] The first flow path and the second flow path are respectively formed between a pair of substrates at different positions in the substrate stacking direction. An end of the first flow path and the second flow path are connected via a third flow path (turning flow path) extending in the substrate stacking direction. The third flow path is formed by covering grooves formed in each end face of the main body with the lid. The fluid to be treated flows alternately through the first flow path and the second flow path from the upstream side to the downstream side. The fluid to be treated flows through the third flow path in the section between the first flow path and the second flow path. A recess in which a seal member is housed is formed in the portion of the lid facing the third flow path.

[0006] In the fluid flow path device shown in Patent Document 1, the first flow path and the second flow path are formed between a pair of substrates at different positions in the substrate stacking direction, but they may also be formed between a pair of substrates at the same position in the substrate stacking direction. [Prior art documents] [Patent documents]

[0007] [Patent Document 1] Japanese Patent Application Publication No. 2018-176034 Summary of the Invention [Problem to be solved by the invention]

[0008] However, in the conventional fluid channel device disclosed in Patent Document 1, the surface of the seal member bulges toward the third channel (turnback channel) because the seal member is sandwiched and compressed between the lid and main body.

[0009] FIG. 22 is a schematic diagram showing a state in which the seal member 500 bulges toward the return flow path, corresponding to an enlarged view of the return flow path portion in FIG. 12 of Patent Document 1. As shown in this figure, when the seal member 500 bulges toward the return flow path 501, the flowability of the treated fluid decreases and stagnation occurs at a contact position 502 between the seal member 500 and the edge of the return flow path 501. In the return flow path 501, the flow direction of the treated fluid changes abruptly, which tends to decrease the flowability of the treated fluid. Therefore, if the seal member 500 bulges toward the return flow path 501 and causes stagnation of the flow at the contact position 502, foreign matter may accumulate or adhere to a level that makes it impossible to remove. Furthermore, the decrease in the flowability of the treated fluid in the return flow path 501 may prevent a desired reaction (e.g., a chemical reaction) from occurring sufficiently in the treated fluid.

[0010] The present invention has been made to solve the above-mentioned problems, and aims to provide a fluid flow path device and a manufacturing method thereof that can improve the flowability of the fluid to be treated in the return flow path. [Means for solving the problem]

[0011] A fluid channel device according to one aspect of the present invention comprises a main body portion made of a plurality of substrates stacked on top of each other and having a pair of end faces facing opposite each other in a predetermined direction perpendicular to a stacking direction of the plurality of substrates; a pair of lid portions detachably attached to the main body portion and covering the pair of end faces, respectively; and a fluid channel formed across the main body portion and the pair of lid portions, through which a fluid to be treated flows, wherein the fluid channel formed in the main body portion among the fluid channels comprises, as viewed from the stacking direction of the plurality of substrates, a first channel penetrating between the pair of end faces and circulating the fluid to be treated from one end face side to the other end face side, and a second channel penetrating between the pair of end faces and circulating the fluid to be treated from the other end face side to the one end face side, and the first channel is alternately arranged in an orthogonal direction perpendicular to the predetermined direction. the first flow path is formed between a pair of first substrates among the plurality of substrates that are adjacent to each other in the stacking direction, and the second flow path is formed between the pair of first substrates, or between a pair of second substrates that are arranged at positions different from the pair of first substrates in the stacking direction and are adjacent to each other in the stacking direction; the fluid flow paths consist of internal flow paths formed inside each of the lid parts or concave flow paths formed in a concave shape on a surface of each of the lid parts that faces the main body part, and further include a return flow path that connects the first flow path and the second flow path that are adjacent to each other so that the fluid to be treated flowing out of one of the first flow path and the second flow path is turned back toward the other flow path.

[0012] According to this configuration, the return flow path connecting the first flow path and the second flow path is formed inside the lid or on the surface of the lid facing the main body, eliminating the need for a seal member facing the return flow path. This prevents the seal member from bulging inward in the return flow path, which could lead to a decrease in the flowability of the treated fluid in the return flow path. In other words, the flow direction of the treated fluid in the return flow path changes suddenly, which tends to decrease the flowability of the treated fluid. Therefore, if the seal member bulges inward in the return flow path, causing stagnation in the flow, there is a risk that foreign matter will accumulate or adhere to a level that makes it impossible to remove. In contrast, according to the above configuration, the return flow path is formed inside the lid or on the surface facing the lid, so the seal member does not face the return flow path, as in the conventional configuration. This prevents a decrease in the flowability of the treated fluid in the return flow path and prevents foreign matter from accumulating or adhering in the return flow path. Furthermore, the improved flowability of the fluid to be treated within the return flow path allows the fluid to undergo a desired reaction sufficiently. Here, an example of the desired reaction includes, but is not limited to, a chemical reaction between multiple fluids when the fluid flow path device is used as a microchannel reactor.

[0013] The return flow path is the internal flow path and has a first end opening that opens to the opposing surface of each of the lid portions and is connected to the first flow path, and a second end opening that opens to the opposing surface and is connected to the second flow path, and it is preferable that the return flow path further includes a pair of sheet-like sealing members that are respectively sandwiched between the pair of end faces of the main body portion and the opposing surfaces of the pair of lid portions, and that the pair of sealing members each have a first through hole that communicates with the first end opening and allows the flow of the treated fluid, and a second through hole that communicates with the second end opening and allows the flow of the treated fluid.

[0014] According to this configuration, by forming a return flow path inside the lid and disposing a sheet-like sealing member between the lid and the main body, the sealing member can be positioned as far away as possible from the turning point of the flow path in the return flow path, thereby preventing the influence of stagnation of the treated fluid on the surface of the sealing member from extending to the turning point of the flow path in the return flow path, thereby preventing a decrease in the flowability of the treated fluid in the return flow path.

[0015] The return flow path is preferably made up of the concave flow path and further includes a pair of sheet-like sealing members sandwiched between the pair of end faces of the main body portion and the opposing surfaces of the pair of lid portions, and each of the pair of sealing members preferably has a flow hole that communicates with the concave flow path that constitutes the return flow path and allows the flow of the treated fluid.

[0016] According to this configuration, the return flow path is formed concavely on the surface of the lid facing the main body, thereby improving the cleanability of the return flow path compared to when the return flow path is formed inside the lid. Furthermore, by disposing a seal member between the lid and the main body, the seal member is not disposed facing the return flow path. This prevents stagnation in the return flow path, where the flow of the treated fluid is likely to be reduced, due to the surface of the seal member expanding toward the flow path. This ultimately improves the flow of the treated fluid in the return flow path.

[0017] It is preferable that the flow holes comprise a third through hole that allows the treated fluid to flow between the first flow path and the concave flow path that constitutes the return flow path, and a fourth through hole that is formed independently of the third through hole and allows the treated fluid to flow between the second flow path and the concave flow path.

[0018] According to this configuration, the flow hole formed in the seal member is configured with a first through-hole portion for the first flow path and a second through-hole portion for the second flow path, rather than a single hole for communication, which makes it possible to prevent abrupt changes in the flow path cross-sectional area at the boundary position between the first flow path and the flow hole of the seal member and at the boundary position between the second flow path and the flow hole of the seal member.

[0019] It is preferable that the device further comprises holding plates respectively arranged between the pair of end faces of the main body portion and the opposing surfaces of the pair of lid portions and holding each of the sheet-shaped sealing members, and that each of the pair of holding plates has a fitting hole that fits into the outer edge of each of the sealing members.

[0020] According to this configuration, by holding a pair of seal members on a pair of holding plates, the positioning of each seal member can be facilitated. Furthermore, each seal member is sandwiched and compressed between a pair of end faces of the main body and a pair of lids, and the amount of compression of each seal member can be regulated by the thickness of each holding plate. This reduces variation in the amount of compression of each seal member, thereby improving sealing performance. In this configuration, in which the amount of compression of the seal members is regulated using holding plates, it is preferable that the thickness of the seal members before compression is greater than the thickness of the holding plates.

[0021] The second flow path is preferably formed between the pair of second substrates.

[0022] According to this configuration, the second flow path and the first flow path are formed at different positions in the substrate stacking direction. When such a two-stage flow path structure is adopted, the flow velocity distribution in the return flow path, which is the connection between the first flow path and the second flow path, becomes more complex than when the second flow path and the first flow path are formed at the same position in the substrate stacking direction, making it easier for foreign matter to accumulate in the return flow path. Therefore, the configuration of the present invention is particularly useful.

[0023] It is preferable that the return flow path has a first end opening that opens to the opposing surface of each of the lid portions and is connected to the first flow path, and a second end opening that opens to the opposing surface and is connected to the second flow path, the first flow path being a linear flow path extending along the predetermined direction, and the second flow path has an overlapping flow path that is connected to the second end opening formed in each of the lid portions and extends parallel to the first flow path at a position that overlaps with the first flow path when viewed from the stacking direction, and a crossing flow path that is connected to an end of the overlapping flow path on the opposite side from the second end opening side and extends so as to diagonally intersect the first flow path when viewed from the stacking direction.

[0024] According to this configuration, the second flow path does not extend obliquely across the main body portion and the pair of lids, making it easy to align the main body portion, the pair of lids, and the pair of holding plates relative to each other. That is, according to this configuration, the second flow path has an overlapping flow path that extends parallel to the first flow path at a position overlapping the first flow path formed in the main body portion when viewed from the stacking direction of the substrates, and the obliquely extending intersecting flow path branches off from this overlapping flow path. Therefore, the obliquely extending intersecting flow path is formed only in the main body portion and does not extend across the main body portion, the pair of lids, and the pair of holding members. Therefore, the relative alignment of the main body portion, the pair of lids, and each sealing member held by the pair of holding members can be easily and accurately performed without causing any problems, such as the position of the flow path hole.

[0025] It is preferable that the number of the fluid flow paths is plural, the plural fluid flow paths are formed so as to extend adjacent to each other in parallel, and the second flow path is formed between the pair of first substrates.

[0026] According to this configuration, the second flow path and the first flow path are located at the same position in the substrate stacking direction. In such a planar flow path structure, when multiple fluid flow paths are arranged adjacent to each other and parallel to each other as in the above configuration, the outer fluid flow path is arranged to have a larger circuit than the inner fluid flow path. As a result, foreign matter is likely to accumulate and adhere to the wall surface of the outer fluid flow path due to centrifugal force. Therefore, the configuration of the present invention is particularly useful from the viewpoint of preventing such adhesion of foreign matter.

[0027] The turn-back flow path is preferably formed so that the cross-sectional shape of the flow path is maintained as a circle throughout the entire flow direction of the fluid to be treated.

[0028] With this configuration, by maintaining the cross section of the return flow path as a circle, it is possible to suppress the occurrence of stagnation of the flow in the return flow path. That is, if the cross section of the return flow path has a shape with corners (for example, a square shape), for example, stagnation of the flow occurs at the corners, but with this configuration, this can be avoided.

[0029] The turn-back flow path is preferably formed so that the cross-sectional area of the flow path is constant throughout the flow direction of the fluid to be treated.

[0030] According to this configuration, the cross-sectional area of the return flow path is constant, so that the occurrence of stagnation in the return flow path can be further suppressed.

[0031] It is preferable that the number of the fluid flow paths is plural, and the plural fluid flow paths are formed so as to extend adjacent to each other and in parallel.

[0032] In this way, in a fluid flow path device having multiple fluid flow paths, the time required for cleaning the return flow paths increases as the number of fluid flow paths increases. Therefore, it is preferable to adopt a structure that makes it as difficult as possible for foreign matter to accumulate in the return flow paths, and therefore the configuration of the present invention is particularly useful.

[0033] Another aspect of the present invention is a method for manufacturing the fluid flow path device, comprising a substrate forming step of forming a substrate having the fluid flow path therein and constructed by stacking the plurality of substrates; a cutting step of cutting the substrate along a pair of cutting lines extending in the perpendicular direction at predetermined positions on both ends of the fluid flow path in the predetermined direction, as viewed from the stacking direction of the plurality of substrates; a main body forming step of forming the main body using a portion of the substrate cut in the cutting step between the pair of cutting lines; and a lid forming step of forming the pair of lids using a portion of the substrate cut in the cutting step outside the pair of cutting lines.

[0034] According to this method, by cutting both ends of a substrate having a fluid flow path therein, forming a pair of lid portions from the portions of the cut substrate located outside a pair of cutting lines, and forming a main body portion from the portion between the pair of cutting lines, it is possible to suppress misalignment between the return flow paths formed in the pair of lid portions and the first and second flow paths formed in the main body portion, compared to when the pair of lid portions and the main body portion are formed in different lamination processes. Furthermore, according to this method, by integrally forming the pair of lid portions and the main body portion in the same process (the substrate formation process) and then separating them, it is possible to simplify the manufacturing process and reduce costs. [Effects of the Invention]

[0035] According to the present invention, a fluid channel device capable of improving the flowability of a fluid to be treated in a turn-back channel and a method for manufacturing the same are provided. [Brief explanation of the drawings]

[0036] [Figure 1] FIG. 1 is a plan view showing a fluid channel device according to an embodiment of the present invention. [Figure 2] FIG. 2 is a view taken in the direction of the arrow II in FIG. [Figure 3] FIG. 3 is a cross-sectional view taken along line III-III in FIG. [Figure 4] FIG. 4 is a schematic diagram of the upper temperature control channel and the lower temperature control channel as viewed from the substrate stacking direction. [Figure 5] FIG. 5 is a cross-sectional view taken along line VV in FIG. [Figure 6] FIG. 6 is a cross-sectional view taken along line VI-VI in FIG. [Figure 7] FIG. 7 is a plan view mainly showing the first flow channel extracted from the reaction flow channels. [Figure 8] FIG. 8 is a plan view mainly showing the second flow channel extracted from the reaction flow channel. [Figure 9] FIG. 9 is an enlarged view showing a portion IX in FIG. [Figure 10] FIG. 10 is a schematic diagram for explaining the configuration of the return flow path, and corresponds to a cross section taken along line XX in FIG. [Figure 11] FIG. 11 is a cross-sectional view taken along line XI in FIG. [Figure 12] FIG. 12 is a schematic view showing a state in which the right packing is held by the packing holding plate, and corresponds to a cross section taken along line XII-XII in FIG. [Figure 13] FIG. 13 is a schematic view showing a state in which the left packing is held by the packing holding plate, and corresponds to a cross section taken along line XIII-XIII in FIG. [Figure 14] FIG. 14 is a view corresponding to FIG. 10, showing a modification of the first embodiment. [Figure 15] FIG. 15 is a view corresponding to FIG. 10, showing a modification of the first embodiment. [Figure 16] FIG. 16 is a view corresponding to FIG. 1 and shows the second embodiment. [Figure 17] FIG. 17 is a cross-sectional view taken along line XVII-XVII in FIG. [Figure 18] FIG. 18 is a cross-sectional view taken along line XVIII-XVIII in FIG. [Figure 19] FIG. 19 is a view corresponding to FIG. 17, showing a modification of the second embodiment. [Figure 20] FIG. 20 is a cross-sectional view taken along line XX-XX in FIG. [Figure 21] FIG. 21 is a view corresponding to FIG. 9 and shows another embodiment. [Figure 22]FIG. 22 is an explanatory diagram for explaining the problems of the conventional technology. DETAILED DESCRIPTION OF THE INVENTION

[0037] Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings.

[0038] (Embodiment 1) FIG. 1 is a plan view of a fluid channel device 10 according to an embodiment of the present invention, FIG. 2 is a view taken along the arrow II in FIG. 1 , and FIG. 3 is a cross-sectional view taken along the line III-III in FIG. 1 . The fluid channel device 10 is used to merge multiple fluids to cause interaction. Hereinafter, the fluid channel device 10 will be described as a microchannel reactor, but the present invention is not limited thereto. For example, the fluid channel device 10 can also be used as a heat exchanger, a reaction device for extraction reactions, or a mixing device for emulsification. In the following description, the up-down direction in FIG. 1 is defined as the front-rear direction of the fluid channel device 10, the left-right direction in FIG. 1 is defined as the left-right direction (corresponding to a predetermined direction) of the fluid channel device 10, and the direction perpendicular to the plane of FIG. 1 is defined as the up-down direction of the fluid channel device 10. However, these directions are defined for convenience in describing the structure of the fluid channel device 10 and do not limit the configuration of the present invention in any way.

[0039] [Overall configuration of fluid flow path device] The fluid channel device 10 of this embodiment merges a first fluid to be treated and a second fluid to be treated in a reaction channel 40, and causes a predetermined chemical reaction (an example of the interaction) in the merged fluid to be treated. Note that the reaction channel 40 is an example of a fluid channel, and the first fluid to be treated, the second fluid to be treated, and the merged fluid to be treated correspond to the fluid to be treated flowing in the fluid channel.

[0040] As shown in Figures 1 and 2, the fluid flow path device 10 comprises a rectangular parallelepiped main body 20 that is elongated in the left-right direction, a pair of flange portions 30 (corresponding to lid portions) that cover the left end face 20a and the right end face 20b of the main body 20, two (one example of multiple) reaction flow paths 40 arranged adjacent to each other and parallel to each other, a pair of gaskets 50 that are respectively sandwiched between the main body 20 and the pair of flange portions 30, and a pair of gasket holding plates 60 that respectively hold the pair of gaskets 50.

[0041] The two reaction channels 40 are formed across the main body 20 and the pair of flanges 30. Because the two reaction channels 40 have the same configuration, they will be described below without distinguishing between them. Each reaction channel 40 is formed so as to extend in a zigzag pattern in the front-to-back direction while reciprocating left-to-right in a plan view. Each reaction channel 40 has a plurality of first channels 41, a plurality of second channels 42 disposed at a different height from the plurality of first channels 41, and a plurality of return channels 43 connecting adjacent first channels 41 and second channels 42. Each reaction channel 40 is configured so that fluid flowing therethrough alternates between the first channels 41 and the second channels 42 from the upstream side to the downstream side.

[0042] The fluid flow path device 10 further includes a first supply port 11 for supplying a first treated fluid to the reaction flow path 40, a second supply port 12 for supplying a second treated fluid to the reaction flow path 40, a treated fluid discharge port 13 for discharging the treated fluid (fluid after a chemical reaction of the first and second treated fluids) after passing through the reaction flow path 40, a temperature-controlled fluid supply port 14 for supplying a temperature-controlled fluid (fluid for adjusting the temperature of the treated fluid) to the temperature-controlled flow paths 71, 72 (see Figure 5 described later), and a temperature-controlled fluid discharge port 15 for discharging the temperature-controlled fluid after passing through the temperature-controlled flow paths 71, 72.

[0043] The main body 20 has a rectangular parallelepiped shape that is long in the left-right direction when viewed from above. The main body 20 has a left end face 20a, a right end face 20b, an upper end face 20c, and a lower end face 20d. The left end face 20a and the right end face 20b (an example of a pair of end faces facing opposite directions) are vertical surfaces that extend in the up-down direction, and the upper end face 20c and the lower end face 20d are horizontal surfaces that extend in the left-right direction.

[0044] 3, the main body 20 has six flow path forming substrates 21 stacked in the vertical direction, an upper cover substrate 22 stacked on the upper surface of the uppermost flow path forming substrate 21, and a lower cover substrate 23 stacked on the lower surface of the lowermost flow path forming substrate 21. The outer edges of the substrates 21 to 23 are aligned when viewed in the substrate stacking direction. The upper surface of the upper cover substrate 22 forms an upper end surface 20c of the main body 20, and the lower surface of the lower cover substrate 23 forms a lower end surface 20d of the main body 20. The left and right end surfaces of the six flow path forming substrates 21, the upper cover substrate 22, and the lower cover substrate 23 form a left end surface 20a and a right end surface 20b of the main body 20.

[0045] The six flow path forming substrates 21 include an uppermost substrate 211 located at the top, a lowermost substrate 212 located at the bottom, a pair of first substrates 213 that are in contact with each other in the vertical direction, and a pair of second substrates 214 that are in contact with each other in the vertical direction. The pair of first substrates 213 are located at a different height from the pair of second substrates 214. That is, the pair of first substrates 213 are disposed adjacent to each other below the uppermost substrate 211, and form a plurality of first flow paths 41. The pair of second substrates 214 are disposed adjacent to each other above the lowermost substrate 212, and form a plurality of second flow paths 42. Details of the reaction flow paths 40, including the first flow paths 41 and the second flow paths 42, will be described later.

[0046] The top substrate 211 and the upper cover substrate 22 in contact with the top surface thereof form an upper temperature control flow path 71. The upper temperature control flow path 71 is formed so as to be located within the top substrate 211 and in contact with the upper cover substrate 22. More specifically, the upper temperature control flow path 71 is a flow path with a semicircular cross section, and is formed by blocking a groove formed by etching in the top surface of the top substrate 211 from above with the upper cover substrate 22. Furthermore, the bottom substrate 212 and the second substrate 214 in contact with the top surface thereof form a lower temperature control flow path 72. The lower temperature control flow path 72 is formed so as to be located within the bottom substrate 212 and in contact with the second substrate 214. More specifically, the lower temperature control flow path 72 is a flow path with a semicircular cross section, and is formed by blocking a groove formed by etching in the top surface of the bottom substrate 212 from above with the second substrate 214.

[0047] FIG. 4 is a schematic diagram of the upper temperature control channel 71 and the lower temperature control channel 72 as viewed from the substrate stacking direction. Because the upper temperature control channel 71 and the lower temperature control channel 72 have the same planar shape, they are not distinguished in FIG. 4 . As shown in this figure, each temperature control channel 71, 72 consists of multiple channels 700 arranged parallel to one another. These channels 700 extend in a zigzag pattern, reciprocating left and right from the rear to the front. The upstream end of each temperature control channel 71, 72 is connected to an upstream through-hole 701. The downstream end of each temperature control channel 71, 72 is connected to a downstream through-hole 702. The temperature control fluid supplied from the temperature control fluid supply port 14 is supplied to each temperature control channel 71, 72 via the upstream through-hole 701 and then discharged to the outside from the temperature control fluid discharge port 15 via the downstream through-hole 702.

[0048] The pair of flange portions 30 consists of a right flange portion 31 and a left flange portion 32. In the following description, the reference numeral 30 will be used when there is no need to particularly distinguish between the right flange portion 31 and the left flange portion 32.

[0049] Returning to FIG. 1 , each of the pair of flange portions 30 is made of a rectangular block body that is long in the front-rear direction. The pair of flange portions 30 are arranged so as to sandwich the main body portion 20 from both the left and right sides. The pair of flange portions 30 have a plurality of bolt insertion holes 30b aligned along their outer edges when viewed from the left and right direction. A plurality of bolts 16 are inserted into each of the plurality of bolt insertion holes 30b. The pair of flange portions 30 are fixed to the left and right end faces of the upper cover substrate 22 and the left and right end faces of the lower cover substrate 23 by the plurality of bolts 16, respectively. A plurality of return flow paths 43, which are part of the reaction flow paths 40, are formed inside the pair of flange portions 30.

[0050] The pair of flange portions 30 have the same layered structure as the main body portion 20. That is, each flange portion 30 has six flow path forming substrates 35 (see FIG. 10 etc. described later), an upper cover substrate 33 layered on the upper surface of the uppermost flow path forming substrate 35, and a lower cover substrate 34 layered on the lower surface of the lowermost flow path forming substrate 35. The upper cover substrate 33, the lower cover substrate 34 and the six flow path forming substrates 35 are substantially continuously connected to the upper cover substrate 22, the lower cover substrate 23 and the six flow path forming substrates 21 of the main body portion 20, respectively, with packings 50 (see FIG. 1) sandwiched therebetween. Each return flow path 43 is formed across the second to fourth stages from the top of the six flow path forming substrates 35. Details of each return flow path 43 will be described later.

[0051] 5 is a cross-sectional view taken along line VV in FIG. 1, and FIG. 6 is a cross-sectional view taken along line VI-VI in FIG.

[0052] 5, the above-mentioned first supply port 11 and treated-fluid discharge port 13 are opened in the right flange portion 31. Inside the right flange portion 31, a first inlet flow path 17 is formed to guide the first treated fluid supplied from the first supply port 11 to the reaction flow path 40 (the most upstream end of the multiple first flow paths 41), and a discharge flow path 19 is formed to guide the treated fluid after passing through the reaction flow path 40 to the treated-fluid discharge port 13.

[0053] 6, the above-mentioned second supply port 12 opens into the left flange portion 32. Inside the left flange portion 32, a second introduction flow path 18 is formed that guides the second fluid to be treated supplied from the second supply port 12 to the reaction flow path 40 (the most upstream end of the multiple second flow paths 42).

[0054] In the fluid channel device 10 configured as described above, the first treated fluid supplied from the first supply port 11 flows through the first inlet channel 17 into the upstream end (most upstream end) of the first channel 41, which is located at the front, and then flows from right to left through the first channel 41 before flowing through the return channel 43 into the second channel 42, which is located at the front. Meanwhile, the second treated fluid supplied from the second supply port 12 flows through the second inlet channel 18 into the upstream end (most upstream end) of the second channel 42, which is located at the front, and merges with the first treated fluid before flowing from left to right through the second channel 42. Thereafter, the mixed fluid of the first treated fluid and the second treated fluid flows alternately from upstream to downstream through the first channel 41 and the second channel 42 as the treated fluid, and is finally discharged from the downstream end of the second channel 42, which is located at the rear, via the outlet channel 19 and the treated-fluid discharge port 13 to the outside.

[0055] [Reaction channel details] As described above, the reaction channel 40 has a plurality of first channels 41, a plurality of second channels 42, and a plurality of return channels 43.

[0056] Fig. 7 is a plan view mainly showing the first flow path 41 extracted from the reaction flow path 40, and Fig. 8 is a plan view mainly showing the second flow path 42 extracted from the reaction flow path 40. Fig. 9 is an enlarged view showing a portion IX in Fig. 1.

[0057] As shown in FIG. 7 , each of the multiple first flow paths 41 penetrates between the left end surface 20a and the right end surface 20b of the main body 20, allowing the fluid to be treated to flow from the right end surface 20b toward the left end surface 20a. When viewed from the substrate stacking direction, each first flow path 41 extends linearly in the left-right direction. As shown in FIG. 3 , the first flow path 41 is a cylindrical flow path with a circular cross section. The first flow path 41 is formed so that the cross-sectional shape and cross-sectional area are constant throughout its entire length. The first flow path 41 is formed by butting together grooves with semicircular cross sections formed on the opposing surfaces of a pair of first substrates 213. The grooves of each first substrate 213 are formed, for example, by etching, but are not limited to this. Alternatively, the grooves may be formed by cutting or other processes.

[0058] As shown in FIG. 8, each of the multiple second flow paths 42 penetrates between the left end face 20a and the right end face 20b of the main body 20, and allows the fluid to be treated to flow from the left end face 20a toward the right end face 20b. As shown in FIG. 3, the second flow paths 42 are cylindrical flow paths with a circular cross section. The second flow paths 42 are formed by butting together grooves with semicircular cross sections formed on the opposing surfaces of a pair of second substrates 214. The grooves of each second substrate 214 are formed by, for example, etching, but are not limited to this. In other words, the grooves may also be formed by cutting or the like.

[0059] 9, each second flow path 42 has an overlapping flow path 421 located at its upstream end and an intersecting flow path 422 connected to the downstream end of the overlapping flow path 421. When viewed from the substrate stacking direction, the overlapping flow path 421 extends parallel to the first flow path 41 at a position where it overlaps with the first flow path 41. When viewed from the substrate stacking direction, the intersecting flow path 422 extends so as to intersect the first flow path 41 at an angle. In this example, when viewed from the substrate stacking direction, the intersecting flow path 422 is inclined forward from right to left. The multiple first flow paths 41 and the multiple second flow paths 42 are alternately arranged in the front-to-rear direction except for the portion where the overlapping flow path 421 is located (see FIG. 1).

[0060] [Details of the return flow path] Next, a description will be given of the plurality of return flow channels 43 directed toward the reaction channel 40. The plurality of return flow channels 43 are formed inside the pair of flange portions 30, respectively, as described above.

[0061] The turning flow path 43 connects the first flow path 41 and the second flow path 42, which are adjacent in the front-rear direction, to each other so that the treated fluid flowing out of one of the first flow path 41 and the second flow path 42 turns back toward the other flow path. Specifically, in the right flange portion 31, the turning flow path 43 connects the downstream end of the second flow path 42 to the upstream end of the first flow path 41 adjacent to the second flow path 42, and turns back the treated fluid flowing out of the second flow path 42 toward the first flow path 41. On the other hand, in the left flange portion 32, the turning flow path 43 connects the downstream end of the first flow path 41 to the upstream end of the second flow path 42 adjacent to the first flow path 41, and turns back the treated fluid flowing out of the first flow path 41 toward the second flow path 42.

[0062] Fig. 10 is an explanatory diagram for explaining the configuration of the return flow path 43, and is a diagram corresponding to the cross section taken along line XX in Fig. 1. Fig. 11 is a cross section taken along line XI-XI in Fig. 10. Note that since the multiple return flow paths 43 all have the same configuration, only one of them will be described here as a representative.

[0063] 10 , the six flow path forming substrates 35 constituting each flange portion 30 are composed of an uppermost substrate 351 located at the top, a lowermost substrate 352 located at the bottom, a pair of third substrates 353 adjacent to and in contact with each other below the uppermost substrate 351, and a pair of fourth substrates 354 adjacent to and in contact with each other above the pair of lowermost substrates 352, and the return flow path 43 is formed from the pair of third substrates 353 to the pair of fourth substrates 354.

[0064] The return flow path 43 is formed in a U-shape that opens to the left when viewed from the front-to-rear direction. Both ends of the return flow path 43 open to the surfaces 30a of each flange portion 30 that face the main body portion 20. The openings at both ends of the return flow path 43 consist of a first end opening 43a connected to the first flow path 41 and a second end opening 43b connected to the second flow path 42.

[0065] The first end opening 43a is connected to the first flow path 41 via a first through hole 50a formed in a packing 50 (described later). The second end opening 43b is connected to the second flow path 42 via a second through hole 50b formed in the packing 50.

[0066] The return flow path 43 includes a first horizontal flow path portion 43c connected to the first end opening 43a and extending linearly in the left-right direction, a second horizontal flow path portion 43d connected to the second end opening 43b and extending linearly in the left-right direction, and a connection flow path portion 43e connecting the ends of the first horizontal flow path portion 43c and the second horizontal flow path portion 43d opposite to the opening sides and extending in the up-down direction (substrate stacking direction). The upper right corner of the return flow path 43 is formed at a right angle when viewed from the front-to-back direction (the direction perpendicular to the paper surface of FIG. 10). The lower right corner of the return flow path 43 is also formed at a right angle when viewed from the front-to-back direction (the direction perpendicular to the paper surface of FIG. 10).

[0067] The first horizontal flow path portion 43c, the second horizontal flow path portion 43d, and the connecting flow path portion 43e are each made up of a linear cylindrical flow path having a circular cross section and a constant cross-sectional area.

[0068] The first horizontal flow path portion 43c is formed by butting together grooves having semicircular cross sections formed on the opposing surfaces of the pair of third substrates 353. The grooves are formed by, for example, etching, but are not limited to this and may be formed by, for example, cutting work or the like.

[0069] The second horizontal flow path portion 43d is formed by butting together grooves having semicircular cross sections formed on the opposing surfaces of the pair of fourth substrates 354. The grooves are formed by, for example, etching, but are not limited to this and may be formed by, for example, cutting work or the like.

[0070] The connection flow path portion 43e is disposed more inward (opposite the main body portion 20) than the opposing surface 30a of the flange portion 30. The connection flow path portion 43e is composed of a recess having a semicircular cross section formed in the lower surface of the upper third substrate 353, a circular through-hole that passes vertically through the lower third substrate 353, a circular through-hole that passes vertically through the upper fourth substrate 354, and a recess having a semicircular cross section formed in the upper surface of the lower fourth substrate 354. These recesses or through-holes may be formed by, for example, but are not limited to, etching or cutting.

[0071] The solid arrows in Figure 10 indicate the flow direction of the treated fluid in the return flow path 43. In the example of Figure 10, the arrows indicate the flow direction of the treated fluid in the return flow path 43 in the right flange portion 31. In the right flange portion 31, the treated fluid flowing out from the downstream end of the second flow path 42 flows from the second end opening 43b into the second horizontal flow path portion 43d and flows from left to right. Then, the treated fluid flows from bottom to top in the connecting flow path portion 43e and into the first horizontal flow path portion 43c and flows from right to left. The treated fluid is then discharged from the downstream end of the first horizontal flow path portion 43c into the first flow path 41. The flow direction in the return flow path 43 in the left flange portion 32 is simply the opposite of the flow direction in the return flow path 43 in the right flange portion 31, and a detailed description thereof will be omitted here.

[0072] [Details of packing and packing retaining plate] 12 and 13, the configuration of the pair of packings 50 and the packing holding plate 60 that holds each packing 50 will be described. The pair of packings 50 are an example of a sheet-like sealing member, and are compressed and held between the main body 20 and the pair of flanges 30.

[0073] The pair of packings 50 consists of a right packing 51 and a left packing 52. In the following description, when there is no need to particularly distinguish between the right packing 51 and the left packing 52, the reference numeral 50 will be used.

[0074] Fig. 12 is a schematic diagram showing a state in which the right-side packing 51 is held by the packing holding plate 60, and corresponds to the cross section taken along line XII-XII in Fig. 1. Fig. 13 is a schematic diagram showing a state in which the left-side packing 52 is held by the packing holding plate 60, and corresponds to the cross section taken along line XIII-XIII in Fig. 1.

[0075] The right packing 51 is compressed and sandwiched between the right end surface 20b of the main body 20 and the right flange 31. The thickness of the right packing 51 before compression is greater than the thickness of the packing holding plate 60.

[0076] As shown in Figure 12, the right-side gasket 51 has a plurality of first through holes 50a communicating with the first end opening 43a of the return flow path 43 formed in the right-side flange portion 31, and a plurality of second through holes 50b communicating with the second end opening 43b of the return flow path 43 formed in the right-side flange portion 31.

[0077] Each first through hole 50a allows the fluid to be treated to flow between each first end opening 43a of the right flange portion 31 and each first flow path 41 of the main body portion 20. Each second through hole 50b allows the fluid to be treated to flow between each second end opening 43b of the right flange portion 31 and each second flow path 42 of the main body portion 20.

[0078] In addition, the right-side gasket 51 further has a third through hole 50h that allows the treated fluid to flow between the first inlet flow path 17 and the first flow path 41 located at the most upstream side, and a fourth through hole 50i that allows the treated fluid to flow between the second flow path 42 located at the most downstream side and the outlet flow path 19.

[0079] The right-side packing 51 is held by a packing holding plate 60. The packing holding plate 60 is a rectangular plate that is long in the front-to-rear direction. The packing holding plate 60 is made of a metal member that has higher rigidity in the thickness direction than the right-side packing 51. The packing holding plate 60 has a fitting hole 60a that fits onto the outer edge of the right-side packing 51. The packing holding plate 60 is positioned relative to the main body 20 using a positioning pin (not shown).

[0080] 13, the left packing 52 has a plurality of first through holes 50a communicating with the first end opening 43a of the turning flow path 43 of the left flange portion 32, and a plurality of second through holes 50b communicating with the second end opening 43b of the turning flow path 43 of the left flange portion 32. The thickness of the left packing 52 before compression is greater than the thickness of the packing retaining plate 60. The configuration of the packing retaining plate 60 that holds the left packing 52 is similar to the configuration of the packing retaining plate 60 that holds the right packing 51, and therefore a description thereof will be omitted.

[0081] In the fluid flow path device 10 configured as described above, if foreign matter accumulates in the return flow path 43, the pair of flange portions 30 and the pair of gaskets 50 can be removed and the inside of the return flow path 43 can be cleaned through the first end opening 43a and the second end opening 43b exposed on the opposing surfaces 30a of each flange portion 30.

[0082] [Manufacturing method explanation] Next, we will explain a manufacturing method of the above-mentioned fluid channel device 10. When manufacturing the fluid channel device 10, the main body portion 20 and the pair of flange portions 30 are not formed in separate lamination processes, but are integrally molded in the same lamination process, and then the portions corresponding to the pair of flange portions 30 are cut and separated.

[0083] Specifically, the manufacturing method of the fluid flow path device 10 includes a base material forming process, a cutting process, a main body forming process, a flange forming process (corresponding to a lid forming process), a packing unit forming process, and an assembly process.

[0084] In the substrate formation process, a plurality of base plates (six substrates and two substrates on either side of them, for a total of eight substrates) are stacked to form a substrate having two reaction channels 40. When stacking the substrates, grooves for forming the two reaction channels 40 are formed in advance in predetermined substrates. Then, the stacked substrates are bonded by diffusion bonding to complete the formation of the substrate.

[0085] In the cutting process, the substrate formed in the substrate forming process is cut along a pair of cutting lines extending in the front-rear direction (a direction perpendicular to the left-right direction in which the pair of flange portions 30 face each other) at predetermined positions on both left and right ends of the reaction channel 40 when viewed from the substrate stacking direction. The cutting can be performed by, for example, but is not limited to, wire-cut discharge. The positions of the cutting lines are positions corresponding to the facing surfaces 30a of the pair of flange portions 30 and are set in advance based on the design dimensions.

[0086] In the main body forming step, the main body 20 is formed by the portion between the pair of cutting lines of the base material cut in the cutting step.

[0087] In the flange portion forming step, a pair of flange portions 30 are formed by the portions of the base material cut in the cutting step that are outside the pair of cutting lines.

[0088] In the packing unit forming step, the packings 50 are fitted into the fitting holes 60a of the pair of packing holding plates 60, respectively, to form a pair of packing units.

[0089] In the assembly process, the flange portion 30 is fixed to the left end face 20a of the main body portion 20 with the bolt 16, with the packing unit sandwiched between them, and the flange portion 30 is fixed to the right end face 20b of the main body portion 20 with the bolt 16, with the packing unit sandwiched between them.

[0090] [Action and effect] As described above, in this embodiment, the return flow path 43 connecting the first flow path 41 and the second flow path 42 is formed inside the flange portion 30, eliminating the need to provide a seal member facing the return flow path 43. This prevents the seal member from expanding toward the inside of the return flow path 43, which could reduce the flowability of the treated fluid in the return flow path 43. In other words, the flow direction of the treated fluid in the return flow path 43 changes suddenly, which tends to reduce the flowability of the treated fluid. Therefore, if the seal member expands toward the return flow path in the return flow path 43, causing stagnation in the flow, foreign matter may accumulate or adhere to a level that makes it impossible to remove. However, in this embodiment, the return flow path 43 is formed inside the flange portion 30, so the seal member does not face the return flow path 43, as in the conventional case. This prevents the flowability of the treated fluid in the return flow path 43 from decreasing, and prevents foreign matter from accumulating or adhering to the return flow path 43. Furthermore, it is possible to prevent the chemical reaction of the fluid to be treated from becoming insufficient due to stagnation of the flow in the return flow path 43.

[0091] In this embodiment, the return flow paths 43 have a first end opening 43a that opens into the surface 30a of each flange portion 30 facing the main body portion 20 and is connected to the first flow path 41, and a second end opening 43b that opens into the facing surface 30a and is connected to the second flow path 42. The fluid flow path device 10 further includes a pair of gaskets 50 (sheet-like gaskets 50) that are respectively sandwiched between the pair of end surfaces 20a, 20b of the main body portion 20 and the facing surfaces 30a of the pair of flange portions 30. Each of the pair of gaskets 50 has a first through hole 50a that communicates with the first end opening 43a to allow the flow of the fluid to be treated, and a second through hole 50b that communicates with the second end opening 43b to allow the flow of the fluid to be treated.

[0092] According to this configuration, by forming the return flow path 43 inside the flange portion 30 and disposing the sheet-like packing 50 between the flange portion 30 and the main body portion 20, it is possible to position the packing 50 as far away as possible from the position where the flow path direction changes in the return flow path 43 (the portion where the connection flow path portion 43e is located in this embodiment). Therefore, it is possible to prevent the influence of stagnation of the treated fluid on the surface of the packing 50 from affecting the position where the flow path direction changes in the return flow path 43, thereby preventing a decrease in the flowability of the treated fluid in the return flow path 43.

[0093] In this embodiment, the fluid channel device 10 further includes a pair of packing retaining plates 60. The pair of packing retaining plates 60 are respectively disposed between the pair of end faces 20a, 20b of the main body 20 and the opposing faces 30a of the pair of flange portions 30, and retain the respective sheet-like packings 50. The pair of packing retaining plates 60 each have a fitting hole 60a that fits onto the outer edge of each packing 50.

[0094] According to this configuration, by holding the pair of packings 50 on the packing holding plates 60, it is possible to facilitate the positioning of each packing 50. Furthermore, each packing 50 is compressed while being sandwiched between the left and right end faces 20a, 20b of the main body 20 and the pair of flanges 30, and the amount of compression of each packing 50 at this time can be regulated by the thickness of each packing holding plate 60. This makes it possible to suppress variations in the amount of compression of each packing 50 and improve sealing performance.

[0095] In the present embodiment, the return flow path 43 has a first end opening 43a that opens to the opposing surface 30a of each flange portion 30 and is connected to the first flow path 41, and a second end opening 43b that opens to the opposing surface 30a and is connected to the second flow path 42. The first flow path 41 is a linear flow path extending in a predetermined direction, and the second flow path 42 is connected to the second end opening 43b formed in each flange portion 30 and includes an overlapping flow path 421 that extends parallel to the first flow path 41 at a position that overlaps with the first flow path 41 as viewed from the substrate stacking direction, and an intersecting flow path 422 that is connected to an end of the overlapping flow path 421 on the opposite side from the second end opening 43b and extends so as to diagonally intersect with the first flow path 41 as viewed from the substrate stacking direction (see FIG. 9 ).

[0096] According to this configuration, the second flow path 42 does not extend obliquely across the main body portion 20 and the pair of flange portions 30, which facilitates the relative alignment of the main body portion 20, the pair of flange portions 30, and the pair of gaskets 50. That is, according to this configuration, the second flow path 42 has an overlapping flow path 421 (see FIG. 9 ) that extends parallel to the first flow path 41 at a position overlapping the first flow path 41 formed in the main body portion 20 when viewed from the substrate stacking direction, and the obliquely extending intersecting flow path 422 branches off from this overlapping flow path 421. Therefore, the obliquely extending intersecting flow path 422 is formed only within the main body portion 20 and is not formed across the main body portion 20, the pair of flange portions 30, and the pair of gaskets 50. Therefore, the relative alignment of the main body portion 20, the pair of flange portions 30, and the gaskets 50 can be easily and accurately performed without causing misalignment of the flow path holes, etc.

[0097] In this embodiment, the second flow path 42 is formed between the pair of second substrates 214. That is, the first flow path 41 and the second flow path 42 are formed at different height positions.

[0098] When such a two-stage flow path structure is adopted, the flow velocity distribution in the return flow path 43, which is the connection between the first flow path 41 and the second flow path 42, becomes more complex than when a planar flow path structure is adopted, and foreign matter is more likely to accumulate in the return flow path 43. In a fluid flow path device 10 configured in this way, the configuration of the present invention, which can improve the flowability of the fluid to be treated in the return flow path 43 and suppress the accumulation of foreign matter, is particularly useful.

[0099] In this embodiment, there are a plurality of reaction channels 40, and the reaction channels 40 are formed so as to extend adjacent to each other in parallel.

[0100] In this way, in a fluid channel device 10 equipped with a plurality of reaction channels 40, the time required for cleaning the return channels 43 increases in proportion to the number of reaction channels 40. Therefore, it is preferable to employ a structure in which foreign matter is as unlikely to accumulate as possible in the return channels 43, and therefore the configuration of the present invention is particularly useful.

[0101] According to the manufacturing method for the fluid channel device 10 of this embodiment, both left and right ends of a substrate having a reaction channel 40 therein are cut, a pair of flange portions 30 are formed from the portions of the cut substrate located outside the pair of cutting lines, and the main body portion 20 is formed from the portion between the pair of cutting lines. This makes it possible to suppress misalignment between the return channel 43 formed in the pair of flange portions 30 and the first channel 41 and second channel 42 formed in the main body portion 20, compared to when the pair of flange portions 30 and the main body portion 20 are formed in different lamination processes. Furthermore, by integrally forming the pair of flange portions 30 and the main body portion 20 in the same lamination process (the base material forming process) and then separating them, the manufacturing process can be simplified and costs can be reduced.

[0102] (Modification of the first embodiment) Fig. 14 is a view equivalent to Fig. 10 showing a modification of embodiment 1. Fig. 15 is a cross-sectional view taken along line XV-XV in Fig. 14. In Fig. 14 and Fig. 15, the same components as those in the embodiment are denoted by the same reference numerals, and the description thereof will be omitted as appropriate.

[0103] In this modification, the shape of the return flow path 43 (particularly the shape of the connection flow path portion 43e) is different from that of the above embodiment.

[0104] That is, in this modification, the connection flow path section 43e is curved in an arc shape so that the shape and cross-sectional area of the cross-section perpendicular to the axial direction are constant throughout the axial direction (the entire flow direction of the fluid to be treated). As a result, the shape and cross-sectional area of the flow path cross-section perpendicular to the axis are maintained constant throughout the first horizontal flow path section 43c, the connection flow path section 43e, and the second horizontal flow path section 43d. That is, the return flow path 43 forms a curved circular pipe flow path with a constant diameter throughout the axial direction.

[0105] [Action and effect] According to this modification, the turn flow paths 43 are formed so that the cross-sectional shape of the flow path is maintained as a circle throughout the entire flow direction of the treated fluid, thereby making it possible to suppress the occurrence of stagnation of the flow in the turn flow paths 43. That is, if the cross-sectional shape of the turn flow paths 43 has, for example, a shape with corners (e.g., a square shape), the flow will stagnate at the corners, but this can be avoided with this configuration.

[0106] In this modification, the return flow path 43 is formed so that the cross-sectional area of the flow path is constant over the entire flow direction of the fluid to be treated.

[0107] According to this configuration, the cross-sectional area of the return flow path 43 is constant, so that the occurrence of stagnation in the return flow path 43 can be further suppressed.

[0108] (Embodiment 2) Fig. 16 is a view corresponding to Fig. 1 showing embodiment 2, and Fig. 17 is a cross-sectional view taken along line XVII-XVII in Fig. 16. In this embodiment, the shape of each return flow path 43 differs from that of embodiment 1. In the following description, the same components as those in the embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted as appropriate.

[0109] That is, in this embodiment, each of the return flow paths 43 is composed of a concave flow path 43g (see FIG. 17) formed in a concave shape on the surface 30a of the pair of flange portions 30 facing the main body portion 20. When viewed from the right side, the concave flow path 43g is formed so as to straddle the first flow path 41 and the second flow path 42. The concave flow path 43g opens on the facing surface 30a of the flange portions 30. That is, the concave flow path 43g has an opening edge 43h on the facing surface 30a. The concave flow path 43g can be formed by, for example, etching, but is not limited to this.

[0110] Fig. 18 is a cross-sectional view taken along line XVIII-XVIII in Fig. 17. As shown in this figure, the right-side packing 51 has a plurality of elongated communication holes 50e corresponding to the opening edges 43h of the plurality of return flow paths 43. The communication holes 50e allow the fluid to be treated to flow between each of the recessed flow paths 43g constituting the plurality of return flow paths 43 and the first flow path 41 and the second flow path 42 facing each of the recessed flow paths 43g. Note that while Fig. 18 only shows the right-side packing 51, the left-side packing 52 also has a similar plurality of communication holes 50e, and therefore illustration and detailed description thereof will be omitted.

[0111] [Action and effect] According to the present embodiment, the return flow path 43 is formed of a recessed flow path 43g, and has an opening that opens to the opposing surface 30a of each flange portion 30. The fluid flow path device 10 further includes a pair of sheet-like gaskets 50 that are respectively sandwiched between the pair of end surfaces 20a, 20b of the main body portion 20 and the opposing surfaces 30a of the pair of flange portions 30, and the pair of gaskets 50 each have a flow hole 50e that communicates with the opening of the return flow path 43 and allows the flow of the fluid to be treated.

[0112] According to this configuration, the return flow paths 43 are formed in a concave shape on the surface 30a of the flange portion 30 facing the main body portion 20, thereby improving the cleanability of the return flow paths 43 compared to when the return flow paths 43 are formed inside the flange portion 30. Furthermore, by disposing the packing 50 between the flange portion 30 and the main body portion 20, the packing 50 is not disposed facing the return flow paths 43. This prevents the surface of the packing 50 from swelling inward in the return flow paths 43, which is prone to reducing the flowability of the treated fluid. This in turn improves the flowability of the treated fluid in the return flow paths 43.

[0113] (Modification of the second embodiment) Fig. 19 is a view equivalent to Fig. 17 showing a modification of the second embodiment. Fig. 20 is a cross-sectional view taken along the line XX-XX in Fig. 19. In this modification, the configuration of the packing 50 differs from that of the second embodiment.

[0114] That is, in this modification, the plurality of communication holes 50e formed in the packing 50 are each composed of a third through hole 50h that allows the fluid to be treated to flow between the first flow path 41 and the recessed flow path 43g (turn flow path 43), and a fourth through hole 50i that is formed independently of the third through hole 50h and allows the fluid to be treated to flow between the second flow path 42 and the recessed flow path 43g. In this example, the diameter of the third through hole 50h is equal to the diameter of the first flow path 41, and the diameter of the fourth through hole 50i is equal to the diameter of the second flow path 42. Note that while FIG. 20 shows only the right-side packing 51, a similar plurality of third through holes 50h and fourth through holes 50i are also formed in the left-side packing 52, and illustration and detailed description thereof will be omitted.

[0115] The concave flow path 43g may be an arc-shaped flow path as shown in a modified example of Embodiment 1. In this case, the flow path diameter of the series of reaction flow paths 40 including the first flow path 41, the third through-hole 50h, the concave flow path 43g (the return flow path 43), the fourth through-hole 50i, and the second flow path 42 may be maintained constant.

[0116] [Action and effect] According to this embodiment, the flow hole 50e consists of a third through hole 50h that allows the treated fluid to flow between the first flow path 41 and the concave flow path 43g that constitutes the return flow path 43, and a fourth through hole 50i that is formed independently of the third through hole 50h and allows the treated fluid to flow between the second flow path 42 and the concave flow path 43g.

[0117] According to this configuration, the communication hole 50e formed in the packing 50 is not a single hole that communicates the first flow path 41, but is configured to include a third through hole 50h for the first flow path 41 and a fourth through hole 50i for the second flow path 42. This makes it possible to prevent the flow path cross-sectional area of the series of reaction flow paths 40 spanning the first flow path 41, the recessed flow path 43g, and the second flow path 42 from suddenly changing at the communication hole 50e of the packing 50.

[0118] (Other embodiments) Although the fluid channel device 10 according to the embodiment of the present invention has been described above, the present invention is not limited to this.

[0119] In each of the above-described embodiments and modifications, the configuration has overlapping flow paths, but this is not limited to this. For example, as shown in FIG. 21, the configuration may have no overlapping flow paths 421.

[0120] In each of the above-described embodiments and modifications, the number of reaction channels 40 (an example of a fluid channel) is two, but this is not limited to this. The number of fluid channels may be one, or three or more.

[0121] In the above-described embodiments and modifications, the reaction channel 40 (an example of a fluid channel) has a two-tiered channel structure in which the first channel 41 and the second channel 42 are arranged at different heights. However, this is not limiting. For example, as shown in JP 2013-56315 A, the first channel 41 and the second channel 42 may be formed between the same pair of laminated plates. In a fluid channel device 10 having such a channel structure, when multiple fluid channels are arranged adjacent to each other in parallel, the outer fluid channel is arranged in a more circular path than the inner fluid channel. As a result, foreign matter tends to accumulate and adhere to the wall surfaces of the outer fluid channel due to centrifugal force. Therefore, the configuration of the present invention is particularly useful from the perspective of preventing such adhesion of foreign matter.

[0122] In each of the above-described embodiments and modified examples, examples have been described in which the substrate stacking direction of the main body portion 20 in the fluid flow path device 10 is vertical, but this is not limited to this, and the substrate stacking direction may be, for example, horizontal.

[0123] In the above-described embodiments and modifications, the fluid channel device 10 has the temperature control channels 71 and 72, but the temperature control channels 71 and 72 are not necessarily required. That is, the fluid channel device 10 may have a configuration that does not include the temperature control channels 71 and 72.

[0124] In each of the above-described embodiments and modified examples, the fluid flow path device 10 is configured to have one process unit including a reaction flow path 40 (an example of a fluid flow path), but this is not limited to this. For example, as shown in JP 2018-176034 A, multiple process units may be arranged in multiple stages in the substrate stacking direction.

[0125] In each of the above-described embodiments and modifications, the thickness (dimension in the left-right direction) of the packing retaining plate 60 is set to be larger than the diameter of the first flow path 41 and the diameter of the second flow path 42, but this is not limited to this. That is, the thickness of the packing retaining plate 60 may be equal to or smaller than the diameter of the first flow path 41. Furthermore, the thickness of the packing retaining plate 60 may be equal to or smaller than the diameter of the second flow path 42. Note that in each of the above-described embodiments and modifications, the first flow path 41 and the second flow path 42 have the same diameter, but this is not limited to this, and they may have different diameters. [Explanation of symbols]

[0126] 10: Fluid flow path device 20: Main body 20a: Left end face 20b: Right end surface 21: Flow path forming substrate (substrate) 22: Upper cover board (board) 23: Lower cover board (board) 30: Flange part (lid part) 30a: Opposite surface 31: Right flange (lid) 32: Left flange (lid) 40: Reaction channel (fluid channel) 41: First flow path 42: Second flow path 43: Turning flow path 43a: First end opening 43b: Second end opening 43g: Concave channel 50: Packing (sheet-shaped sealing material) 50a: 1st through hole 50b: 2nd through hole 50h: 3rd through hole 50i: 4th through hole 50e :Flow hole 51: Right side packing (sheet-shaped sealing material) 52: Left side packing (sheet-shaped sealing material) 60: Packing retaining plate (retaining plate) 60a: fitting hole 213: First substrate 214: Second board 421: Overlapping flow channels 422: Intersecting flow path

Claims

1. a main body portion including a plurality of substrates stacked on one another and having a pair of end faces facing opposite each other in a predetermined direction perpendicular to the stacking direction of the plurality of substrates; a pair of lids detachably attached to the main body and covering the pair of end surfaces, respectively; a fluid flow path formed across the body portion and the pair of lid portions, through which a fluid to be treated flows; Among the fluid flow paths, the flow paths formed in the main body portion, when viewed from the stacking direction of the plurality of substrates, include first flow paths that penetrate between the pair of end faces and cause the fluid to be treated to flow from one end face side to the other end face side, and second flow paths that penetrate between the pair of end faces and cause the fluid to be treated to flow from the other end face side to the one end face side, which are alternately arranged in an orthogonal direction that is perpendicular to the predetermined direction, and are configured so that the fluid to be treated flows alternately through the first flow paths and the second flow paths from the upstream side to the downstream side, the first flow path is formed between a pair of first substrates among the plurality of substrates that are in contact with each other in the stacking direction, the second flow path is formed between the pair of first substrates or between a pair of second substrates that are arranged at positions different from the pair of first substrates in the stacking direction and are in contact with each other in the stacking direction, the fluid flow path comprises an internal flow path formed inside each of the lid portions, and further includes a return flow path connecting the first flow path and the second flow path adjacent to each other so as to return the fluid to be treated flowing out of one of the first flow path and the second flow path toward the other flow path, the return flow path has a first end opening that opens on a surface of each of the lid portions facing the main body portion and is connected to the first flow path, and a second end opening that opens on the facing surface and is connected to the second flow path, a pair of sealing members respectively sandwiched between the pair of end surfaces of the main body portion and the pair of opposing surfaces of the pair of lid portions; A fluid flow path device, wherein the pair of sealing members each have a first through hole that communicates with the first end opening and allows the flow of the treated fluid, and a second through hole that communicates with the second end opening and allows the flow of the treated fluid.

2. A main body portion consisting of a plurality of substrates stacked on one another, the main body portion having a pair of end faces facing opposite each other in a predetermined direction perpendicular to the stacking direction of the plurality of substrates; a pair of lids detachably attached to the main body and covering the pair of end surfaces, respectively; a fluid flow path formed across the body portion and the pair of lid portions, through which a fluid to be treated flows; Among the fluid flow paths, the flow paths formed in the main body portion, when viewed from the stacking direction of the plurality of substrates, include first flow paths that penetrate between the pair of end faces and cause the fluid to be treated to flow from one end face side to the other end face side, and second flow paths that penetrate between the pair of end faces and cause the fluid to be treated to flow from the other end face side to the one end face side, which are alternately arranged in an orthogonal direction that is perpendicular to the predetermined direction, and are configured so that the fluid to be treated flows alternately through the first flow paths and the second flow paths from the upstream side to the downstream side, the first flow path is formed between a pair of first substrates among the plurality of substrates that are in contact with each other in the stacking direction, the second flow path is formed between the pair of first substrates or between a pair of second substrates that are arranged at positions different from the pair of first substrates in the stacking direction and are in contact with each other in the stacking direction, the fluid flow path comprises an internal flow path formed inside each of the lid portions, and further includes a return flow path connecting the first flow path and the second flow path adjacent to each other so as to return the fluid to be treated flowing out of one of the first flow path and the second flow path toward the other flow path, the return flow path has a first end opening that opens on a surface of each of the lid portions facing the main body portion and is connected to the first flow path, and a second end opening that opens on the facing surface and is connected to the second flow path, a pair of sheet-shaped sealing members sandwiched between the pair of end surfaces of the main body portion and the pair of opposing surfaces of the pair of lid portions, each of the pair of sealing members has a first through hole communicating with the first end opening to allow the flow of the fluid to be treated, and a second through hole communicating with the second end opening to allow the flow of the fluid to be treated; the housing further includes a holding plate disposed between the pair of end surfaces of the body portion and the pair of opposing surfaces of the pair of lid portions, the holding plate holding each of the seal members; The pair of holding plates each have a fitting hole that fits onto an outer edge of each of the seal members.

3. A main body portion consisting of a plurality of substrates stacked on one another, the main body portion having a pair of end faces facing opposite each other in a predetermined direction perpendicular to the stacking direction of the plurality of substrates; a pair of lids detachably attached to the main body and covering the pair of end surfaces, respectively; a fluid flow path formed across the body portion and the pair of lid portions, through which a fluid to be treated flows; Among the fluid flow paths, the flow paths formed in the main body portion, when viewed from the stacking direction of the plurality of substrates, include first flow paths that penetrate between the pair of end faces and cause the fluid to be treated to flow from one end face side to the other end face side, and second flow paths that penetrate between the pair of end faces and cause the fluid to be treated to flow from the other end face side to the one end face side, which are alternately arranged in an orthogonal direction that is perpendicular to the predetermined direction, and are configured so that the fluid to be treated flows alternately through the first flow paths and the second flow paths from the upstream side to the downstream side, the first flow path is formed between a pair of first substrates among the plurality of substrates that are in contact with each other in the stacking direction, the second flow path is formed between the pair of first substrates or between a pair of second substrates that are arranged at positions different from the pair of first substrates in the stacking direction and are in contact with each other in the stacking direction, the fluid flow path comprises a concave flow path formed in a concave shape on a surface of each of the lid portions facing the main body portion, and further includes a return flow path connecting the first flow path and the second flow path adjacent to each other so as to return the fluid to be treated flowing out of one of the first flow path and the second flow path toward the other flow path, a pair of sheet-shaped sealing members sandwiched between the pair of end surfaces of the main body portion and the pair of opposing surfaces of the pair of lid portions, the pair of sealing members each have a flow hole communicating with a recessed flow path constituting the turnback flow path to allow the flow of the fluid to be treated; the housing further includes a holding plate disposed between the pair of end surfaces of the body portion and the pair of opposing surfaces of the pair of lid portions, the holding plate holding each of the seal members; The pair of holding plates each have a fitting hole that fits onto an outer edge of each of the seal members.

4. 4. The fluid flow path device according to claim 3, the flow passage device, wherein the flow holes comprise a third through hole that allows the fluid to be treated to flow between the first flow passage and the concave flow passage that constitutes the return flow passage, and a fourth through hole that is formed independently of the third through hole and allows the fluid to be treated to flow between the second flow passage and the concave flow passage.

5. 5. The fluid flow path device according to claim 1, The second flow path is formed between the pair of second substrates.

6. 6. The fluid flow path device according to claim 5, the return flow path has a first end opening that opens on the opposing surface of each of the lid portions and is connected to the first flow path, and a second end opening that opens on the opposing surface and is connected to the second flow path, the first flow path is a linear flow path extending along the predetermined direction, The second flow path is an overlapping flow path connected to the second end opening formed in each of the lid portions and extending parallel to the first flow path at a position overlapping the first flow path when viewed from the stacking direction; a crossing flow path connected to an end of the overlapping flow path opposite to the second end opening side, and extending so as to cross the first flow path obliquely when viewed from the stacking direction.

7. 5. The fluid flow path device according to claim 1, The number of the fluid flow paths is plural, The plurality of fluid flow paths are formed to extend adjacent to each other in parallel, The second flow path is formed between the pair of first substrates.

8. 5. The fluid flow path device according to claim 1, The turning flow path is formed so that the cross-sectional shape of the flow path is kept circular or the cross-sectional area of the flow path is constant over the entire flow direction of the fluid to be treated.

9. 5. The fluid flow path device according to claim 1, The number of the fluid flow paths is plural, The fluid flow path device, wherein the plurality of fluid flow paths are formed so as to extend adjacent to each other and in parallel.

10. A fluid flow path device according to any one of claims 1 to 4, the fluid flow path is a microchannel, The fluid flow path device is configured with a microchannel reactor that merges a first fluid and a second fluid within the fluid flow path, and causes a predetermined chemical reaction in the merged fluid, which serves as the fluid to be treated.

11. A fluid flow path device according to any one of claims 1 to 4, The fluid channel device, wherein the cover portion is configured by stacking a plurality of substrates including a plurality of channel forming substrates that form the fluid channel.

12. A method for manufacturing a fluid flow path device, comprising: The fluid flow path device is a main body portion including a plurality of substrates stacked on one another and having a pair of end faces facing opposite each other in a predetermined direction perpendicular to the stacking direction of the plurality of substrates; a pair of lids detachably attached to the main body and covering the pair of end surfaces, respectively; a fluid flow path formed across the body portion and the pair of lid portions, through which a fluid to be treated flows; Among the fluid flow paths, the flow paths formed in the main body portion, when viewed from the stacking direction of the plurality of substrates, include first flow paths that penetrate between the pair of end faces and cause the fluid to be treated to flow from one end face side to the other end face side, and second flow paths that penetrate between the pair of end faces and cause the fluid to be treated to flow from the other end face side to the one end face side, which are alternately arranged in an orthogonal direction that is perpendicular to the predetermined direction, and are configured so that the fluid to be treated flows alternately through the first flow paths and the second flow paths from the upstream side to the downstream side, the first flow path is formed between a pair of first substrates among the plurality of substrates that are in contact with each other in the stacking direction, the second flow path is formed between the pair of first substrates or between a pair of second substrates that are arranged at positions different from the pair of first substrates in the stacking direction and are in contact with each other in the stacking direction, the fluid flow path comprises an internal flow path formed inside each of the lid portions or a concave flow path formed in a concave shape on a surface of each of the lid portions facing the main body portion, and further includes a return flow path connecting the first flow path and the second flow path adjacent to each other so as to return the fluid to be treated flowing out of one of the first flow path and the second flow path toward the other flow path, a base material forming step of forming a base material having the fluid flow path therein and configured by stacking the plurality of substrates; a cutting step of cutting the base material along a pair of cutting lines extending in the perpendicular direction at predetermined positions on both ends of the fluid flow path in the predetermined direction, when viewed from the stacking direction of the plurality of substrates; a main body forming step of forming the main body by a portion of the base material cut in the cutting step between the pair of cutting lines; and forming a lid portion by forming the pair of lid portions from portions of the base material cut in the cutting step that are outside the pair of cutting lines.

Images