Panel storage container

Abstract

To provide a panel housing container which allows improvement in gas exchange performance inside a housing space in a container body.SOLUTION: A panel housing container 1 comprises: a container body 2 which has an opening, and defines a housing space for housing a plurality of panels P in a manner of aligning in the vertical direction; a lid for closing the opening; and a gas feeder mechanism 52A and a gas feeder mechanism 52B which feed gas to the housing space. The container body 2 has a lateral wall 23A and a lateral wall 23B which face each other in the horizontal direction while defining the housing space. The gas feeder mechanism 52A feeds the gas into the housing space from the lateral wall 23A toward the lateral wall 23B. The gas feeder mechanism 52B feeds the gas into the housing space from the lateral wall 23B toward the lateral wall 23A.SELECTED DRAWING: Figure 6

Description

[Technical Field]

[0001] The present disclosure relates to a panel enclosure. [Background technology]

[0002] In a panel storage container that stores multiple panels, the gas inside the panel storage container is replaced to maintain cleanliness and low humidity. For example, Patent Document 1 describes a substrate storage container that includes a container body that can store multiple substrates and a gas replacement unit that blows gas into the internal space of the container body. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] International Publication No. 2018 / 047541 Summary of the Invention [Problem to be solved by the invention]

[0004] In the substrate storage container described in Patent Document 1, gas replacement units are arranged at both rear ends of the container body. With this configuration, the gas becomes more difficult to distribute the further away from the rear of the container body, so there is a risk that gas replacement within the internal space (storage space) of the container body may not be sufficient.

[0005] The present disclosure describes a panel housing container that can improve the gas exchange performance within the housing space of the container body. [Means for solving the problem]

[0006] A panel storage container according to one aspect of the present disclosure includes a container body having an opening and defining a storage space for storing a plurality of panels arranged in a first direction, a lid for closing the opening, and first and second air supply mechanisms for supplying gas to the storage space. The container body defines the storage space and includes a first side wall and a second side wall facing each other in a second direction intersecting the first direction. The first air supply mechanism supplies gas to the storage space from the first side wall toward the second side wall. The second air supply mechanism supplies gas to the storage space from the second side wall toward the first side wall.

[0007] In this panel storage container, gas is supplied to the storage space from the first side wall toward the second side wall, and from the second side wall toward the first side wall. Because the first side wall and the second side wall face each other in the second direction, the sum of the distance to the first side wall and the distance to the second side wall is constant at any position within the storage space. This facilitates gas distribution within the storage space. As a result, it is possible to improve the gas exchange performance within the storage space of the container body.

[0008] In some embodiments, the first air supply mechanism may include an air supply valve that draws in gas from outside the container body, a discharge portion that is provided along the first side wall and discharges the gas, and a connection portion that is provided with a flow path that connects the air supply valve and the discharge portion. The discharge portion may be provided with multiple discharge holes for discharging gas toward the second side wall. In this case, even if the air supply valve and the discharge portion are separated from each other, the connection portion allows gas to be supplied from the air supply valve to the discharge portion. This improves the flexibility of the arrangement of the first air supply mechanism.

[0009] In some embodiments, the discharge section may be provided within the accommodation space and include a first chamber and a second chamber arranged in a third direction intersecting the first and second directions. The connection section may be provided with a first flow path connecting the air intake valve and the first chamber, and a second flow path connecting the air intake valve and the second chamber. In this case, the degree of freedom in arranging the discharge section within the accommodation space is improved. Therefore, the discharge section can be arranged within the accommodation space without interfering with other components provided within the accommodation space.

[0010] In some embodiments, the length of the first flow path may be equal to the length of the second flow path. In this case, the timing at which gas starts to be supplied from the intake valve to the first chamber can be synchronized with the timing at which gas starts to be supplied from the intake valve to the second chamber, thereby reducing the difference between the timing at which gas starts to be supplied from the first chamber to the storage space and the timing at which gas starts to be supplied from the second chamber to the storage space. This increases the directivity of the gas, making it easier for the gas to spread throughout the storage space. As a result, it is possible to further improve the gas exchange performance within the storage space of the container body.

[0011] In some embodiments, the container body may include a bottom plate that defines the storage space, an inner wall that faces the first side wall in the second direction, and a connecting member that connects the bottom plate, the first side wall, and the inner wall. The discharge portion may be formed by the first side wall and the inner wall. In this case, the discharge portion is formed using the first side wall that constitutes the container body, which makes it possible to reduce the number of dedicated parts used in the first air supply mechanism.

[0012] In some embodiments, the connecting member may be provided with a first engagement groove for holding the bottom plate, a second engagement groove for holding the first side wall, and a third engagement groove for holding the inner wall. In this case, the bottom plate, the first side wall, and the inner wall are connected simply by inserting the bottom plate into the first engagement groove, the first side wall into the second engagement groove, and the inner wall into the third engagement groove. Therefore, the bottom plate, the first side wall, and the inner wall can be connected without using fastening members such as bolts. As a result, the number of parts can be reduced.

[0013] In some embodiments, a plurality of release holes may be provided for each storage tier in which a plurality of panels are stored. The flow of gas is obstructed by the panels stored in the storage space. According to the above configuration, gas is supplied to each storage tier, so that even if the gas flow is obstructed by the panels, the gas can be distributed throughout the storage space. As a result, the gas exchange performance within the storage space can be further improved. [Effects of the Invention]

[0014] According to the present disclosure, the gas exchange performance within the storage space of the container body can be improved. [Brief explanation of the drawings]

[0015] [Figure 1] FIG. 1 is an exploded perspective view of a panel storage container according to one embodiment. [Figure 2] FIG. 2 is a bottom view of the panel housing container shown in FIG. [Figure 3] FIG. 3 is a cross-sectional view taken along line III-III in FIG. [Figure 4] FIG. 4 is an exploded perspective view of the air supply mechanism shown in FIG. [Figure 5] FIG. 5 is a cross-sectional view taken along line VV in FIG. [Figure 6] FIG. 6 is a diagram for explaining the supply of gas by the gas supply mechanism shown in FIG. [Figure 7] FIG. 7 is a diagram showing a modified example of the air supply mechanism. DETAILED DESCRIPTION OF THE INVENTION

[0016] Hereinafter, embodiments of the present disclosure will be described in detail with reference to the drawings. In the description of the drawings, the same elements are given the same reference numerals, and duplicated explanations will be omitted. Each drawing shows an XYZ coordinate system. The Y-axis direction (third direction) is a direction that intersects (here, is perpendicular to) the X-axis direction (second direction) and the Z-axis direction (first direction). The Z-axis direction is a direction that intersects (here, is perpendicular to) the X-axis direction and the Y-axis direction. As an example, the X-axis direction is the left-right direction (width direction), the Y-axis direction is the front-back direction (depth direction), and the Z-axis direction is the up-down direction (height direction). For convenience of explanation, the terms "front," "rear," "up," "down," "left," and "right" are used, but are not limited to these directions.

[0017] A panel storage container according to one embodiment will be described with reference to FIG. 1. FIG. 1 is an exploded perspective view of a panel storage container according to one embodiment. The panel storage container 1 shown in FIG. 1 is a container for storing a plurality of panels P (see FIG. 3). The panel storage container 1 complies with, for example, the SEMI (Semiconductor Equipment and Materials International) standard. Examples of the panels P include glass substrates for liquid crystal panels and panels equipped with electronic components. The panels P have a rectangular shape. Examples of the sizes of the panels P include 510 mm x 515 mm and 600 mm x 600 mm. The number of panels P that can be stored in the panel storage container 1 is determined arbitrarily and may be, for example, 6, 12, 16, or 24.

[0018] The panel storage container 1 is used, for example, in a manufacturing device for manufacturing electronic component assemblies. Electronic component assemblies are manufactured through a process of mounting a large number of electronic components on a large carrier panel such as a glass plate or a stainless steel plate, sealing these electronic components with epoxy resin or the like, peeling the sealed electronic components from the carrier panel in panel form, and cutting out the panel-shaped electronic components individually. The panel storage container 1 is used to transport the panels P between these processes.

[0019] The panel storage container 1 includes a container body 2 and a lid body 3.

[0020] The container body 2 is a rectangular parallelepiped container with an open front (front face). In other words, the container body 2 is a front-open box-type container with an opening 2a on the front face. The container body 2 stores a plurality of panels P. Specifically, the container body 2 stores a plurality of panels P arranged in a vertical direction. The panels P are inserted into and removed from the container body 2 via the opening 2a. Details of the container body 2 will be described later.

[0021] The lid body 3 is a member for closing the opening 2a of the container body 2. The lid body 3 airtightly closes the opening 2a of the container body 2 via a sealing member such as a gasket. The lid body 3 is detachably attached to a flange 25 that defines the opening 2a. The lid body 3 includes a lid main body 31 and a locking mechanism 32. The lid main body 31 is the main body portion of the lid body 3. The lid main body 31 is a rectangular plate material. The lid main body 31 is made of a metal material such as aluminum or a magnesium alloy. The lid main body 31 may also be made of a thermoplastic resin such as a polycarbonate resin. A keyhole 31h is provided on the front surface of the lid main body 31. A key (not shown) is inserted into the keyhole 31h.

[0022] The locking mechanism 32 locks or unlocks the lid 3 by operating a key inserted in a keyhole 31h. The locking mechanism 32 includes a latch (not shown). With the lid 3 attached to the flange 25, the latch is inserted into a locking hole 25h provided in the flange 25 by operating the key, thereby locking the lid 3. With the lid 3 locked, the latch is pulled out of the locking hole 25h by operating the key, thereby unlocking the lid 3.

[0023] The container body 2 and the lid 3 are formed by combining multiple parts molded from metal or resin materials. Examples of resins contained in the molding material of the resin material include thermoplastic resins. Examples of thermoplastic resins include polycarbonate, cycloolefin polymer, polyetherimide, polyetherketone, polyetheretherketone, polybutylene terephthalate, polyacetal, liquid crystal polymer, acrylic resins such as polymethyl methacrylate, and acrylonitrile butadiene styrene copolymer. Alloys of these resins may also be used as the resin contained in the molding material of the resin material.

[0024] Conductive materials and various antistatic agents may be added to these resins. Examples of conductive materials include carbon fibers, carbon powder, carbon nanotubes, and conductive polymers. Examples of antistatic agents that can be used include anionic, cationic, and nonionic antistatic agents. Benzotriazole-based, salicylate-based, cyanoacrylate-based, oxalic acid anilide-based, and hindered amine-based ultraviolet absorbers may also be added. Glass fibers or carbon fibers, which improve rigidity, may also be added selectively.

[0025] Next, a detailed description will be given of the container body 2. The container body 2 includes a top plate 21, a bottom plate 22, a side wall 23A (first side wall), a side wall 23B (second side wall), a rear wall 24, a flange 25, a frame 26, a base portion 27 (see FIG. 2), a pair of rail members 28 (see FIG. 2), and a side plate 29.

[0026] The top plate 21, the bottom plate 22, the side walls 23A and 23B, and the rear wall 24 are made of substantially rectangular plate materials. The top plate 21 and the bottom plate 22 face each other in the up-down direction and are disposed substantially parallel to each other. The side walls 23A and 23B face each other in the left-right direction and are disposed substantially parallel to each other. The rear wall 24 connects the rear end of the top plate 21 to the rear end of the bottom plate 22, and also connects the rear ends of the side walls 23A and 23B. The top plate 21, the bottom plate 22, the side walls 23A and 23B, and the rear wall 24 define a storage space 20 for storing multiple panels P.

[0027] The top plate 21, the bottom plate 22, and the side walls 23A, 23B are made of, for example, a metal material such as aluminum or stainless steel. The rear wall 24 is made of, for example, a transparent resin material that allows the storage space 20 to be seen from the outside of the container body 2. A portion of the rear wall 24 may be made of a transparent resin material. Examples of transparent resin materials include acrylic resin, polycarbonate, vinyl chloride resin, and cycloolefin polymer.

[0028] The flange 25 is a rectangular frame body that is provided across the front end of the top plate 21, the front end of the bottom plate 22, and the front ends of the side walls 23A and 23B. The flange 25 defines the opening 2a. The flange 25 is made of, for example, the above-mentioned resin material or a metal material such as aluminum or stainless steel. Two locking holes 25h are provided in each of the upper and lower frame portions of the flange 25, spaced apart in the left-right direction. The locking holes 25h in the upper frame portion and the locking holes 25h in the lower frame portion are provided in positions that face each other in the up-down direction.

[0029] The frame body 26 is used to secure the top plate 21, the bottom plate 22, the side walls 23A and 23B, and the rear wall 24. The frame body 26 is made of a metal material such as aluminum or stainless steel. The frame body 26 is provided on the front surface of the rear wall 24. The frame body 26 has a frame portion 26a (see FIG. 3), a support column 26b (see FIG. 3), and a pair of support columns 26c (see FIG. 3). The frame portion 26a is a rectangular member and is provided along the periphery of the rear wall 24.

[0030] The support pillar 26b and the pair of support pillars 26c are columnar members extending in the up-down direction. One support pillar 26c, support pillar 26b, and the other support pillar 26c are arranged in that order in the left-right direction and are disposed approximately parallel to each other. The support pillar 26b and the pair of support pillars 26c extend from the upper frame portion to the lower frame portion of the frame portion 26a. The support pillar 26b is provided in the center of the frame body 26 in the left-right direction, and the pair of support pillars 26c are provided near both ends of the frame body 26 in the left-right direction. The support pillar 26b has a plurality of fitting holes for attaching a shaft 61a (described later). The support pillar 26c has a plurality of fitting holes for attaching a shaft 62a (described later).

[0031] The pedestal portion 27 is a portion that serves as the base of the container body 2. The pedestal portion 27 is made of a metal material such as aluminum or stainless steel. The pedestal portion 27 is provided on the lower surface of the bottom plate 22. The pedestal portion 27 is made by combining a plurality of columnar support members 27a.

[0032] The pair of rail members 28 are members for placing the panel storage container 1 on a transport device such as a conveyor. Each rail member 28 is a plate-shaped member extending in the front-rear direction. Each rail member 28 is made of, for example, the resin material described above. The pair of rail members 28 are provided below the base portion 27 at both left and right ends of the container body 2.

[0033] The side plates 29 are members for attaching the support body 65 described below. The side plates 29 are plate-shaped members extending in the vertical direction. The side plates 29 are made of a metal material such as aluminum or stainless steel. The side plates 29 are provided on the outer surfaces of the side walls 23A, 23B. In this embodiment, two side plates 29 are provided on each side wall. The two side plates 29 are aligned in the front-to-rear direction and arranged substantially parallel to each other. One side plate 29 is provided near the center of the side wall in the front-to-rear direction, and the other side plate 29 is provided near the front end of the side wall in the front-to-rear direction.

[0034] At the corners of the container body 2, cover members are provided to prevent particles from entering the accommodation space 20.

[0035] Next, the members provided at the bottom of the container body 2 will be described with reference to Fig. 2. Fig. 2 is a bottom view of the panel storage container shown in Fig. 1. As shown in Fig. 2, the panel storage container 1 further includes a positioning member 51, an air supply mechanism 52A (first air supply mechanism), an air supply mechanism 52B (second air supply mechanism), and an exhaust valve 53.

[0036] The positioning member 51 is a member used by an external device such as a conveying device or a processing device to position the panel storage container 1 (container body 2). The positioning member 51 is made of a metal material such as aluminum or stainless steel. The positioning member 51 is a V-shaped plate. The positioning member 51 is recessed (upward) toward the bottom plate 22. A V-shaped groove is defined by the V-shaped surface of the positioning member 51. The V-shaped surface may be subjected to a surface treatment to improve wear resistance and sliding properties, as necessary. In this embodiment, the panel storage container 1 includes three positioning members 51. The number and arrangement of the positioning members 51 may be changed as appropriate.

[0037] The air supply mechanisms 52A and 52B are mechanisms for supplying gas into the storage space 20 in order to maintain cleanliness and low humidity inside the panel storage container 1 (the storage space 20). An example of the gas supplied into the storage space 20 is an inert gas. The air supply mechanism 52A supplies gas into the storage space 20 from the side wall 23A toward the side wall 23B. The air supply mechanism 52B supplies gas into the storage space 20 from the side wall 23B toward the side wall 23A. The air supply mechanisms 52A and 52B will be described in detail below.

[0038] The exhaust valve 53 is a mechanism for discharging gas from the housing space 20. In this embodiment, the panel housing container 1 includes two exhaust valves 53, and each exhaust valve 53 is provided in front of the panel housing container 1. Note that the number and arrangement of the exhaust valves 53 can be changed as desired.

[0039] Next, the configuration inside the storage space 20 will be described with reference to Figure 3. Figure 3 is a cross-sectional view taken along line III-III in Figure 1. As shown in Figure 3, the panel storage container 1 further includes a panel support portion 60. The panel support portion 60 is a portion for supporting a plurality of panels P. The panel support portion 60 is provided inside the container body 2 (storage space 20). The panel support portion 60 includes a plurality of support portions 61, a plurality of support portions 62, a plurality of stoppers 63, and a plurality of stoppers 64.

[0040] The numbers of support portions 61, support portions 62, stoppers 63, and stoppers 64 vary depending on the number of panels P that can be stored in the panel storage container 1. In this embodiment, the panel support portion 60 includes one support portion 61, two support portions 62, two stoppers 63, and two stoppers 64 per panel P. In other words, the one support portion 61, the two support portions 62, the two stoppers 63, and the two stoppers 64 form a storage stage that stores one panel P.

[0041] The support portion 61 is a portion for supporting the center portion of the panel P in the left-right direction. The support portion 61 has a shaft 61a and a plurality of elastic bodies 61b. The shaft 61a is a columnar (for example, cylindrical) member extending in the front-rear direction. The shaft 61a is used to support one panel P. The rear end of the shaft 61a is fitted into a fitting hole in the support column 26b and fixed to the support column 26b with a screw. The shaft 61a is made of, for example, a material with high bending rigidity. Examples of materials that can be used to make the shaft 61a include metals such as stainless steel and aluminum, and carbon fiber reinforced plastic.

[0042] The elastic body 61b is an annular (for example, circular) member provided on the outer circumferential surface of the shaft 61a. The elastic body 61b is provided to prevent the panel P from slipping and improve the positioning accuracy of the panel P. From the viewpoint of preventing the panel P from slipping, the elastic body 61b may have a higher frictional force than the shaft 61a. From the viewpoint of preventing damage to the panel P, the elastic body 61b may have a higher elasticity (cushioning property) than the shaft 61a. The elastic body 61b is made of, for example, a rubber material. Examples of rubber materials include EPDM (ethylene propylene diene rubber), silicone rubber, and fluororubber. The elastic body 61b is, for example, an O-ring. The multiple elastic bodies 61b are arranged at regular intervals in the extension direction of the shaft 61a.

[0043] The support portion 62 is a portion for supporting both left and right ends of the panel P. The support portion 62 has a shaft 62a, multiple elastic bodies 62b, and multiple supports 65. The shaft 62a is a columnar (e.g., cylindrical) member extending in the front-rear direction. The shaft 62a is used to support one panel P. The rear end of the shaft 62a is fitted into a fitting hole in the support column 26c and fixed to the support column 26c with a screw. The shaft 62a is made of, for example, a material with high bending rigidity. Examples of materials that can be used to make the shaft 62a include metals such as stainless steel and aluminum, and carbon fiber reinforced plastic.

[0044] The length of the shaft 62a in the front-rear direction is slightly longer than the length of the panel P in the front-rear direction and is longer than the length of the shaft 61a in the front-rear direction. The shaft 61a and the pair of shafts 62a are arranged in the left-right direction. The shaft 61a is disposed between the pair of shafts 62a.

[0045] The elastic body 62b is an annular (for example, circular) member provided on the outer circumferential surface of the shaft 62a. The elastic body 62b is provided to prevent the panel P from slipping and to improve the positioning accuracy of the panel P. The constituent material and arrangement of the elastic body 62b are the same as those of the elastic body 61b, and therefore detailed description thereof will be omitted.

[0046] The support body 65 is a member that holds (supports) the shaft 62a and supports the left-right end of the panel P. An insertion hole that penetrates the support body 65 in the front-rear direction is provided at the tip portion of the support body 65, and the shaft 62a is inserted through the insertion hole. The base end portion of the support body 65 abuts against the inner surface of the side wall (side wall 23A, 23B), and the side plate 29, side wall, and support body 65 are positioned by a knock pin (not shown). In this state, a screw is inserted from the outside of the side plate 29 through the insertion hole provided in the side plate 29 and threaded into a screw hole provided in the base end portion of the support body 65. As a result, the support body 65 is fixed to the side plate 29 with the side wall sandwiched between the support body 65 and the side plate 29.

[0047] The stopper 63 is a member that prevents the panel P from popping out and determines the position of the front end of the panel P. The stopper 63 is made of, for example, the resin material described above. The stopper 63 is provided at the front end of the shaft 62a. For example, the front end of the shaft 62a is fitted into a mounting hole provided in the stopper 63, thereby attaching the stopper 63 to the shaft 62a.

[0048] The stopper 64 is a member for determining the position of the rear end of the panel P. The stopper 64 is made of, for example, the resin material described above. The stopper 64 is provided at the rear end of the shaft 62a. The stopper 64 has a block shape. The stopper 64 has an insertion hole for inserting the shaft 62a in the front-rear direction. With the shaft 62a inserted through the insertion hole of the stopper 64, the rear surface of the stopper 64 abuts against the front surface of the support column 26c, and the stopper 64 is fixed to the support column 26c with a screw.

[0049] Next, the air intake mechanisms 52A and 52B will be described in detail with reference to Figures 4 and 5. Figure 4 is an exploded perspective view of the air intake mechanism shown in Figure 3. Figure 5 is a cross-sectional view taken along line VV in Figure 4. Since the air intake mechanism 52B has a similar configuration to the air intake mechanism 52A, only the air intake mechanism 52A will be described in detail here. As shown in Figures 4 and 5, the air intake mechanism 52A includes an air intake valve 71, a release portion 72, and a connection portion 73. The air intake valve 71 is a mechanism for taking in gas from outside the container body 2. The air intake valve 71 is housed in a housing space 73a, which will be described later.

[0050] The release section 72 is a section that releases gas into the storage space 20. The release section 72 is provided along the side wall 23A. The release section 72 includes a chamber 74 (first chamber), a chamber 75 (second chamber), and a chamber 76. Each of the chambers 74 to 76 is capable of storing gas and releases the stored gas into the storage space 20. The chambers 74, 75, and 76 are provided in the storage space 20 and are arranged in that order in the front-to-rear direction. The chamber 74 is provided between the cover 3 and the front support 65 when the cover 3 is closing the opening 2a. The chamber 75 is provided between the two supports 65. The chamber 76 is provided between the rear support 65 and the rear wall 24.

[0051] The chamber 74 includes a box body 74a and a connecting pipe 74b. The box body 74a has a flat box shape and defines a space capable of storing gas. The box body 74a extends in the vertical direction along the inner surface of the side wall 23A and is disposed along the inner surface of the side wall 23A. A plurality of discharge holes 74h are provided on a surface 74c of the box body 74a. The surface 74c faces the side wall 23B (storage space 20) in the left-right direction. Each discharge hole 74h is a hole for discharging gas toward the side wall 23B.

[0052] The multiple discharge holes 74h are arranged in the vertical direction. Each discharge hole 74h extends to the vicinity of both front and rear edges of the surface 74c. The number of discharge holes 74h is the same as the number of panels P that can be stored in the panel storage container 1. One discharge hole 74h is provided for each storage level of the panels P. The connecting pipe 74b is a pipe that connects the box body 74a to a flow path 73b (first flow path) described below. The connecting pipe 74b is provided on the bottom surface of the box body 74a and protrudes downward from the bottom surface of the box body 74a.

[0053] The chamber 75 includes a box body 75a and a connecting pipe 75b. The box body 75a has a flat box shape and defines a space capable of storing gas. The box body 75a extends in the vertical direction along the inner surface of the side wall 23A and is disposed along the inner surface of the side wall 23A. A plurality of discharge holes 75h are provided on a surface 75c of the box body 75a. The surface 75c faces the side wall 23B (storage space 20) in the left-right direction. Each discharge hole 75h is a hole for discharging gas toward the side wall 23B.

[0054] The multiple discharge holes 75h are arranged two by two in the front-rear direction in the up-down direction. Of the two discharge holes 75h arranged in the front-rear direction, the front discharge hole 75h extends from near the front edge of the surface 75c to near the center of the surface 75c in the front-rear direction. Of the two discharge holes 75h arranged in the front-rear direction, the rear discharge hole 75h extends from near the center of the surface 75c in the front-rear direction to near the rear edge of the surface 75c. The number of discharge holes 75h is twice the number of panels P that can be stored in the panel storage container 1. Two discharge holes 75h are provided for each storage level of the panels P. The connecting pipe 75b is a pipe that connects the box body 75a to a flow path 73c (second flow path) described below. The connecting pipe 75b is provided on the bottom surface of the box body 75a and protrudes downward from the bottom surface of the box body 75a.

[0055] The chamber 76 includes a box body 76a and a connecting pipe 76b. The box body 76a has a flat box shape and defines a space capable of storing gas. The box body 76a extends in the vertical direction along the inner surface of the side wall 23A and is disposed so as to follow the inner surface of the side wall 23A. A surface 76c of the box body 76a is provided with a plurality of discharge holes 76h. The surface 76c faces the side wall 23B (the storage space 20) in the left-right direction. Each discharge hole 76h is a hole for discharging gas toward the side wall 23B.

[0056] The multiple discharge holes 76h are arranged in the vertical direction. Each discharge hole 76h extends to the vicinity of both front-to-rear edges of the surface 76c. The number of discharge holes 76h is the same as the number of panels P that can be stored in the panel storage container 1. One discharge hole 76h is provided for each storage level of the panels P. The connecting pipe 76b is a pipe that connects the box body 76a to the flow path 73d, which will be described later. The connecting pipe 76b is provided on the bottom surface of the box body 76a and protrudes downward from the bottom surface of the box body 76a.

[0057] The connection part 73 is a part that connects the intake valve 71 and the release part 72. In this embodiment, the connection part 73 is a plate-shaped member, and is provided therein with an accommodation space 73a and flow paths 73b, 73c, and 73d. The accommodation space 73a is a space for accommodating the intake valve 71. An introduction port 73h (see FIGS. 2 and 6) is provided in the bottom plate of the connection part 73 that defines the accommodation space 73a, through which the intake valve 71 takes in gas from outside the container body 2.

[0058] Flow path 73b connects air intake valve 71 and chamber 74. Specifically, one end of flow path 73b is connected to accommodation space 73a, and the other end of flow path 73b is connected to connecting pipe 74b. Flow path 73c connects air intake valve 71 and chamber 75. Specifically, one end of flow path 73c is connected to accommodation space 73a, and the other end of flow path 73c is connected to connecting pipe 75b. Flow path 73d connects air intake valve 71 and chamber 76. Specifically, one end of flow path 73d is connected to accommodation space 73a, and the other end of flow path 73d is connected to connecting pipe 76b.

[0059] In this embodiment, flow paths 73b, 73c, and 73d each have a uniform cross-sectional shape, and the cross-sectional areas of flow paths 73b, 73c, and 73d are equal to each other. The flow path lengths of flow paths 73b, 73c, and 73d are equal to each other.

[0060] Next, with reference to FIG. 6, gas exchange within the storage space 20 will be described. FIG. 6 is a diagram for explaining gas supply by the gas supply mechanism shown in FIG. 3. As shown in FIG. 6, in the gas supply mechanisms 52A and 52B, gas is taken in from the outside of the container body 2 into the gas supply valve 71 via the inlet port 73h, and the taken in gas is supplied to the chambers 74 to 76 through the flow paths 73b to 73d in the connection part 73. Then, gas is supplied to the storage space 20 from the discharge holes 74h, 75h, and 76h provided for each storage stage. At this time, in the gas supply mechanism 52A, gas is supplied from the side wall 23A toward the side wall 23B, and in the gas supply mechanism 52B, gas is supplied from the side wall 23B toward the side wall 23A. Then, the gas within the storage space 20 is exhausted to the outside of the container body 2 via the exhaust valve 53. In this manner, gas exchange within the storage space 20 is performed.

[0061] In the panel storage container 1 described above, gas is supplied to the storage space 20 from the side wall 23A toward the side wall 23B, and gas is also supplied from the side wall 23B toward the side wall 23A. Because the side walls 23A and 23B face each other in the left-right direction, the sum of the distance to the side wall 23A and the distance to the side wall 23B is constant at any position within the storage space 20. In other words, the further away from the air supply mechanism 52A within the storage space 20, the closer to the air supply mechanism 52B, which reduces variation in the amount of gas supplied within the storage space 20. This facilitates gas distribution within the storage space 20. As a result, it is possible to improve the gas exchange performance within the storage space 20 of the container body 2. This reduces variation in gas concentration and humidity within the storage space 20.

[0062] The flow of gas is obstructed by the panels P stored in the storage space 20. In the panel storage container 1, one release hole 74h, two release holes 75h, and one release hole 76h are provided for each storage stage in which the panels P are stored. Therefore, because gas is supplied to each storage stage, even if the gas flow is obstructed by the panels P, the gas can be distributed throughout the storage space 20. As a result, the gas exchange performance within the storage space 20 can be further improved.

[0063] Air intake valve 71 is provided below bottom plate 22, and discharge section 72 (chambers 74 to 76) is provided within accommodation space 20. In this way, even if air intake valve 71 and discharge section 72 are separated from each other, gas is supplied from air intake valve 71 to discharge section 72 via connection section 73. This improves the degree of freedom in the arrangement of air intake mechanisms 52A and 52B.

[0064] Discharge section 72 includes chambers 74 to 76, and connection section 73 is provided with flow path 73b connecting air intake valve 71 and chamber 74, flow path 73c connecting air intake valve 71 and chamber 75, and flow path 73d connecting air intake valve 71 and chamber 76. This configuration improves the degree of freedom in arranging discharge section 72 within storage space 20. Therefore, discharge section 72 can be arranged within storage space 20 without interfering with other members (for example, support body 65) provided within storage space 20.

[0065] Because chamber 76 is close to intake valve 71 and chamber 74 is far from intake valve 71, if intake valve 71 and each chamber are connected by a linear flow path, gas will be supplied to chamber 76 before chamber 74. In this case, gas may be supplied to storage space 20 from chamber 76 first. At this time, gas is not supplied from chambers 74 and 75, so the gas supplied from chamber 76 tends to diffuse, and there is a risk that its ability to move linearly in the left-right direction may be impaired. In this case, there is a risk that the gas may not be distributed throughout storage space 20.

[0066] On the other hand, in the panel storage container 1, the flow path length of flow path 73b, the flow path length of flow path 73c, and the flow path length of flow path 73d are all equal to one another. This allows the timing at which gas starts to be supplied from the air intake valve 71 to each chamber to be synchronized, thereby reducing the difference in timing between the timing at which gas starts to be supplied from chamber 74 to the storage space 20, the timing at which gas starts to be supplied from chamber 75 to the storage space 20, and the timing at which gas starts to be supplied from chamber 76 to the storage space 20. This increases the linearity of the gas, making it easier for the gas to spread throughout the storage space 20. As a result, it is possible to further improve the gas exchange performance within the storage space of the container body.

[0067] The panel storage container according to the present disclosure is not limited to the above embodiment.

[0068] The sum of the volume of flow path 73b and the volume of chamber 74, the sum of the volume of flow path 73c and the volume of chamber 75, and the sum of the volume of flow path 73d and the volume of chamber 76 may be equal to one another. In this case, the volumes from the intake valve 71 to each release hole are equal to one another, so that the timing at which gas starts to be supplied from each chamber to the accommodation space 20 can be synchronized.

[0069] The flow path length of flow path 73b, the flow path length of flow path 73c, and the flow path length of flow path 73d may be different from one another. In this case, although the timing at which the gas starts to be supplied from each chamber to storage space 20 may differ, the gas can be sufficiently distributed throughout storage space 20 by extending the gas supply time.

[0070] The discharge hole 74h does not have to be provided for each storage tier. For example, one discharge hole 74h may be provided across multiple storage tiers. Similarly, the discharge hole 75h does not have to be provided for each storage tier, and the discharge hole 76h does not have to be provided for each storage tier.

[0071] In the above embodiment, the discharge section 72 includes three chambers, but the discharge section 72 may include only one chamber, two chambers, or four or more chambers. The number of flow paths provided in the connection section 73 can be changed depending on the number of chambers included in the discharge section 72.

[0072] In the above embodiment, the release section 72 is separate from the container body 2, but it may be integrated with the container body 2. Modified examples of the air supply mechanisms 52A and 52B will be described with reference to FIG. 7. FIG. 7 is a diagram showing a modified example of the air supply mechanism. Since the air supply mechanism 52B has a similar configuration to the air supply mechanism 52A, the air supply mechanism 52A will be described in detail here. As shown in FIG. 7, the air supply mechanism 52A according to the modified example differs from the air supply mechanism 52A according to the above embodiment mainly in the configurations of the release section 72 and the connection section 73.

[0073] The container body 2 further includes an inner wall 77, a connecting frame 78 (connecting member), and piping 79. The inner wall 77 faces the side wall 23A in the left-right direction and is disposed substantially parallel to the side wall 23A. The side wall 23A and the inner wall 77 form a discharge section 72. The inner wall 77 is disposed at a predetermined distance from the side wall 23A so that the storage space 72a defined by the side wall 23A and the inner wall 77 has a sufficient volume for storing the gas to be supplied to the accommodation space 20. The inner wall 77 is provided with a plurality of discharge holes 77h. Each discharge hole 77h is a hole for discharging gas toward the side wall 23B and penetrates the inner wall 77 in the left-right direction. The number and arrangement of the discharge holes 77h may be the same as the number and arrangement of the discharge holes 74h, the discharge holes 75h, and the discharge holes 76h in the above embodiment.

[0074] The connecting frame 78 is a long member extending in the front-rear direction. The connecting frame 78 connects the bottom plate 22, the side wall 23A, and the inner wall 77, and also fixes the support member 27a and the rail member 28. The connecting frame 78 is provided with an engagement groove 78a (first engagement groove), an engagement groove 78b (second engagement groove), and an engagement groove 78c (third engagement groove). The engagement groove 78a is a groove for holding the bottom plate 22. The engagement groove 78a is provided on a surface of the connecting frame 78 facing the side wall 23B, and is open toward the side wall 23B and extends in the front-rear direction. A side end of the bottom plate 22 is inserted into the engagement groove 78a.

[0075] The engagement groove 78b is a groove for holding the side wall 23A. The engagement groove 78c is a groove for holding the inner wall 77. The engagement grooves 78b and 78c are provided at the upper end of the portion of the connecting frame 78 that protrudes upward, and are open upward and extend in the front-to-rear direction. The lower end of the side wall 23A is inserted into the engagement groove 78b. The lower end of the inner wall 77 is inserted into the engagement groove 78c.

[0076] The connecting frame 78 is placed on the upper surface of the rail member 28 and overlapped so as to be in contact with the side end surfaces of each support member 27a in the left-right direction. In this state, fastening members such as bolts are inserted into insertion holes that pass through the connecting frame 78 in the left-right direction, and the fastening members are screwed into screw holes provided in the end surfaces of the support members 27a. Furthermore, fastening members such as bolts are inserted into insertion holes that pass through the rail member 28 in the up-down direction, and the fastening members are screwed into screw holes provided in the lower surface of the connecting frame 78.

[0077] Connecting frame 78 is provided with flow path 78d that connects piping 79 and storage space 72a. Pipe 79 connects air intake valve 71 and flow path 78d so that they can communicate with each other. Therefore, in air intake mechanism 52A according to the modified example, connecting frame 78 and piping 79 form connection portion 73.

[0078] In the panel storage container equipped with the modified air supply mechanisms 52A, 52B, the same configuration as the panel storage container 1 according to the above embodiment also achieves the same effects as the panel storage container 1 according to the above embodiment. Furthermore, in the panel storage container equipped with the modified air supply mechanisms 52A, 52B, the discharge section 72 is configured by the side wall 23A (side wall 23B) and the inner wall 77. With this configuration, the discharge section 72 is configured using the side walls 23A, 23B that configure the container body 2, and therefore it is possible to reduce the number of dedicated parts used in the air supply mechanisms 52A, 52B.

[0079] The connecting frame 78 is provided with an engagement groove 78a for holding the bottom plate 22, an engagement groove 78b for holding the side wall 23A, and an engagement groove 78c for holding the inner wall 77. With this configuration, the bottom plate 22, the side wall 23A, and the inner wall 77 are connected together simply by inserting the bottom plate 22 into the engagement groove 78a, the side wall 23A into the engagement groove 78b, and the inner wall 77 into the engagement groove 78c. Therefore, the bottom plate 22, the side wall 23A, and the inner wall 77 can be connected together without using fastening members such as bolts. As a result, the number of parts can be reduced. [Explanation of symbols]

[0080] 1...panel storage container, 2...container body, 2a...opening, 3...lid body, 20...storage space, 22...bottom plate, 23A...side wall (first side wall), 23B...side wall (second side wall), 52A...air supply mechanism (first air supply mechanism), 52B...air supply mechanism (second air supply mechanism), 53...exhaust valve, 71...air supply valve, 72...discharge portion, 73...connection portion, 73b...flow path (first flow path), 73c...flow path (second flow path), 73d...flow duct, 74...chamber (first chamber), 74h...discharge hole, 75...chamber (second chamber), 75h...discharge hole, 76...chamber, 76h...discharge hole, 77...inner wall, 77h...discharge hole, 78...connecting frame (connecting member), 78a...engagement groove (first engagement groove), 78b...engagement groove (second engagement groove), 78c...engagement groove (third engagement groove), 78d...flow path, 79...piping, P...panel.

Claims

1. a container body having an opening and defining a storage space for storing a plurality of panels arranged in a first direction; a lid for closing the opening; a first air supply mechanism and a second air supply mechanism for supplying gas to the accommodation space; Equipped with the container body includes a first side wall and a second side wall that define the storage space and face each other in a second direction that intersects with the first direction, the first air supply mechanism supplies gas to the accommodation space from the first side wall toward the second side wall; the second air supply mechanism supplies gas to the accommodation space from the second side wall toward the first side wall, The first air supply mechanism includes: an air intake valve that takes in gas from the outside of the container body; a discharge portion provided along the first side wall and configured to discharge a gas; a connection portion provided with a flow path connecting the air intake valve and the release portion; Equipped with the discharge portion is provided with a plurality of discharge holes for discharging gas toward the second side wall, The discharge section includes a first chamber and a second chamber provided in the accommodation space, the first chamber and the second chamber are arranged along the first sidewall while being separated from each other in a third direction intersecting the first direction and the second direction; the connecting portion is provided with a first flow path connecting the air intake valve and the first chamber, and a second flow path connecting the air intake valve and the second chamber.

2. The panel storage container according to claim 1 , wherein a length of the first flow path is equal to a length of the second flow path.

3. a container body having an opening and defining a storage space for storing a plurality of panels arranged in a first direction; a lid for closing the opening; a first air supply mechanism and a second air supply mechanism for supplying gas to the accommodation space; Equipped with the container body includes a first side wall and a second side wall that define the storage space and face each other in a second direction that intersects with the first direction, the first air supply mechanism supplies gas to the accommodation space from the first side wall toward the second side wall; the second air supply mechanism supplies gas to the accommodation space from the second side wall toward the first side wall, The first air supply mechanism includes: an air intake valve that takes in gas from the outside of the container body; a discharge portion provided along the first side wall and configured to discharge a gas; a connection portion provided with a flow path connecting the air intake valve and the release portion; Equipped with the discharge portion is provided with a plurality of discharge holes for discharging gas toward the second side wall, The container body is a bottom plate defining the storage space; an inner wall facing the first side wall in the second direction; a connecting member connecting the bottom plate, the first side wall, and the inner wall; Equipped with The discharge portion is configured by the first side wall and the inner wall.

4. 4. The panel storage container according to claim 3, wherein the connecting member is provided with a first engagement groove for holding the bottom plate, a second engagement groove for holding the first side wall, and a third engagement groove for holding the inner wall.

5. The panel storage container according to any one of claims 1 to 4, wherein the plurality of discharge holes are provided for respective storage stages in which the plurality of panels are stored.

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