Method and system for high speed signal processing

Abstract

To provide a method for acquiring data from a pixelated image sensor for detecting charged particles.SOLUTION: A method of acquiring data from a pixelated image sensor includes reading a voltage of one or more of multiple pixels multiple times without resetting the image sensor, and digitizing the pixels to a first bit number. The camera outputs a digitized compressed pixel voltage with a second lower number of bits. The maximum range of digitized compressed pixel voltage is smaller than the maximum range of pixel voltage.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] This description relates generally to methods and systems for data acquisition using cameras, and more particularly to high speed camera readout and real time signal processing of the readout data. [Background technology]

[0002] A charged particle microscopy system may include a camera for detecting charged particles emitted from a sample, digitizing the detected raw signal, and outputting the digitized signal to an image processor for real-time signal processing. To increase data acquisition speed, the microscopy system requires a short sensor response time, fast sensor data readout, and real-time data processing and storage. For cameras with pixelated image sensors, it may be necessary to reset the pixels when the pixel voltage exceeds a predetermined level. One method for increasing the readout speed of such pixelated image sensors is multiframe correlated double sampling (mfCDS), disclosed in U.S. Application No. 13 / 645,725, filed October 5, 2012, by Janssen et al., entitled "Method for acquiring data with an image sensor." In mfCDS, multiple frames of raw data are read out from the image sensor before resetting the image sensor or specific pixels of the image sensor. Particle counts can then be determined based on differences in sequentially acquired pixel voltages. However, the applicant recognizes that limited bandwidth within the camera and / or between the camera and the image processor can be a bottleneck for high-speed signal processing. Summary of the Invention

[0003] In one embodiment, a method for acquiring data from a camera including a pixelated image sensor for detecting charged particles includes: reading pixel voltages of one or more pixels of the image sensor multiple times without resetting the image sensor; digitizing the pixel voltages to a first number of bits; and outputting the digitized compressed pixel voltages with a second, lower number of bits, where the maximum range of the digitized compressed pixel voltages is smaller than the maximum range of the pixel voltages, and the digitized compressed pixel voltages are generated by deleting at least the most significant bit (MSB) of the digitized pixel voltages. In this manner, the pixel voltages at each pixel of the image sensor can be read out and transferred from the camera to an image processor with fewer bits without sacrificing data quality or accuracy. Fast signal readout and processing can be achieved with limited bandwidth within the camera and / or between the camera and the image processor.

[0004] It should be understood that the foregoing summary is provided to introduce in a simplified form selected concepts that are further described in the detailed description. It is not intended to identify key or essential features of the claimed subject matter, the scope of which is defined uniquely by the claims that follow the detailed description. Moreover, the claimed subject matter is not limited to implementations that solve any disadvantages noted above or in any part of this disclosure. [Brief explanation of the drawings]

[0005] [Figure 1] 1 shows a charged particle microscope. [Figure 2] 2 is a flowchart of a method for acquiring data from the camera of the charged particle microscope of FIG. 1. [Figure 3] 2 illustrates the data flow of the method of FIG. 1. [Figure 4A] 1 illustrates a method for compressing pixel voltages read from an image sensor. [Figure 4B] 10 shows an example for implementing pixel voltage compression. [Figure 4C] 10 shows another example for implementing pixel voltage compression. [Figure 5] 1 is a flow chart of a method for detecting sensor overexposure. [Figure 6A] 1 illustrates a method for adjusting pixel values ​​of a differentially compressed frame to a valid range. [Figure 6B] 1 illustrates a method for adjusting pixel values ​​of a differentially compressed frame to a valid range.Like reference numerals refer to corresponding parts throughout the several views of the drawings. DETAILED DESCRIPTION OF THE INVENTION

[0006] The following description relates to systems and methods for data acquisition and data processing in a microscopy system, such as the charged particle microscope of Figure 1. A charged particle microscope may include a source for generating charged particles. In response to irradiating the sample with the charged particles, different types of charged particles emitted from the sample are detected by different cameras or detectors.

[0007] The camera or detector may include a pixelated image sensor for converting charged particles striking pixels of the image sensor into pixel voltages. The pixel voltages can be read out from the image sensor using mfCDS techniques. Specifically, the pixel voltage of a particular pixel is read out multiple times before resetting the pixel voltage to a reset value. The number of charged particles detected by the pixel can be determined based on the difference between successive readouts of the pixel voltages. Using mfCDS, multiple frames can be read out before resetting the image sensor. By calculating the difference between successive readouts, reset noise is reduced. Furthermore, the maximum frame rate of the image sensor readout can be increased by reducing the frequency at which the pixel voltages are reset.

[0008] The pixel voltages read from the image sensor can be digitized by an analog-to-digital converter (ADC) and transferred from the camera to an image processor for further processing. While high frame rate readout from the image sensor can be achieved using mfCDS techniques, the data transfer rate (i.e., bandwidth) between the ADC and the readout electronics in the camera, and / or the data transfer rate between the camera and the image processor, can limit the overall data acquisition rate and data quality of the microscopy system. To increase the frame rate of the data received at the image processor, it is necessary to reduce the bit depth (i.e., number of bits) of the digitized pixel voltage for each pixel. However, reducing the bit depth can reduce the precision of the data. Herein, the precision of a digital signal is the value represented by the least significant bit (LSB) of the digitized signal.

[0009] To address the above issues, a method for high-speed camera readout and real-time processing of data received from the camera is presented in Figure 2. The data flow is shown in Figure 3. Specifically, the pixel voltages of the image sensor are read out multiple times before a sensor reset. The pixel voltage readouts are compressed before being transferred from the camera to an image processor. The image processor receives the compressed pixel voltages from the camera and generates a differential voltage between successively received compressed pixel voltages. A sample image can be formed based on the differential voltages. Between adjacent image sensor resets, the pixel voltages are approximately monotonic. That is, between sensor resets, the pixel voltage of each pixel is a monotonic signal superimposed with noise. The noise amplitude is within 1% of the maximum amplitude of the pixel voltage. The sensor is reset before the pixel voltage amplitude exceeds the maximum pixel voltage amplitude. Due to the approximately monotonic change in pixel voltage between sensor resets and the change in pixel voltage between successive (or adjacent) image sensor readouts being within threshold levels, no information is lost when the compressed pixel voltages are transferred between the camera and the image processor.

[0010] The maximum range of the compressed pixel voltage is less than the maximum range of the pixel voltage. The pixel voltage amplitude can be from zero to a maximum pixel voltage amplitude. The pixel voltage can be compressed by subtracting a first threshold voltage from the pixel voltage in response to a pixel voltage amplitude greater than or equal to a first threshold voltage amplitude and less than a second threshold voltage amplitude. The first threshold voltage can be determined based on the amount of change in the pixel voltage between adjacent pixel readouts. For example, the first threshold voltage amplitude is greater than the amount of change in the pixel value between adjacent pixel readouts. To further reduce the maximum range of the compressed pixel voltage, the pixel voltage can be further compressed by subtracting a second threshold voltage from the pixel voltage in response to a pixel voltage amplitude greater than or equal to the second threshold voltage amplitude and less than a third threshold voltage amplitude, and by subtracting a third threshold voltage from the pixel voltage in response to a pixel voltage greater than or equal to the third threshold voltage amplitude and less than a fourth threshold voltage amplitude. The first through fourth threshold voltages can be analog voltages having units of volts. In one example, the pixel voltage of the image sensor increases in response to a charged particle striking the pixel, and the threshold voltage is positive. In another example, the pixel voltage of the image sensor decreases in response to a charged particle striking the pixel, and the pixel voltage is converted to a substantially monotonically increasing positive voltage before subtracting the positive threshold voltage. In yet another example, the pixel voltage of the image sensor decreases in response to a charged particle striking the pixel, and the threshold voltage is negative. The compressed pixel voltage can be digitized into fewer bits than the pixel voltage read from the image sensor. In this way, the pixel voltage is compressed or wrapped into a reduced range compared to the range of the uncompressed pixel voltage. The range of the compressed voltage is equal to or less than the amplitude of the first threshold voltage.

[0011] In another example, pixel voltage readouts from an image sensor are digitized to a first number of bits. The digitized pixel voltage is compressed into a digitized compressed pixel voltage having a second, lower number of bits. The digitized pixel voltage and the digitized compressed pixel voltage have the same precision. The digitized pixel voltage may be unsigned. In one example, if the pixel voltage is approximately monotonically decreasing and negative, the digitized pixel voltage can be converted to unsigned. The compression process of subtracting the threshold voltage from the pixel voltage can be implemented by deleting one or more bits from the digitized pixel voltage. In one example, the digitized pixel voltage can be compressed by deleting at least the MSB of the digitized pixel voltage. In another example, the digitized pixel voltage can be compressed by keeping the first bit of the digitized first pixel voltage as the second bit and deleting the remaining bits, where neither the first bit nor the second bit is the MSB. In one example, neither the first bit nor the second bit is the least significant bit (LSB). FIGS. 4A-4C illustrate an exemplary method for compressing pixel values.

[0012] The camera continuously and repeatedly reads pixel voltages from each pixel within a region of the image sensor (i.e., a frame of pixel voltages) and transmits the compressed pixel voltages or digitized compressed pixel voltages (i.e., compressed frames) to an image processor. A difference frame is reconstructed based on the difference between the sequentially received compressed frames. A sample image can then be generated based on the difference frames. In one example, for each pixel, the differential compressed pixel voltage is the difference between the first compressed pixel voltage and the second compressed pixel voltage. The first compressed pixel voltage corresponds to the pixel voltage readout at a first time point, and the second compressed pixel voltage corresponds to the pixel voltage readout at a second time point immediately after the first time point. There is no reset of the pixel or the image sensor between the first and second time points. As shown in FIGS. 6A-6B, the differential pixel voltage is reconstructed by adjusting the differential compressed pixel voltage to a valid range. The valid range is determined based on a first threshold voltage for compressing the pixel voltage and a predetermined noise amplitude. For example, the valid range is from the noise offset to the sum of the first threshold voltage amplitude and the noise offset. The noise offset is determined based on the noise amplitude and may be negative or zero. Adjusting the differential compressed pixel voltage to the valid range includes adding a first threshold voltage amplitude to the differential compressed pixel voltage in response to the differential compressed pixel voltage being lower than the noise offset, and subtracting the first threshold voltage amplitude from the differential compressed pixel voltage in response to the differential compressed pixel voltage being greater than the sum of the first threshold voltage amplitude and the noise offset. The precision of the differential pixel voltage is the same as that of the digitized compressed pixel voltage.

[0013] In some examples, a dark frame can be subtracted from the compressed frame before reconstructing the difference frame to dark correct the compressed frame. The dark correction process can be used to remove fixed patterns present in images from a sensor that is not exposed to radiation. Additionally, overexposure of the sensor can be detected based on the digitized compressed pixel voltages received by the image processor, as shown in FIG. 5.

[0014] In this way, pixel voltages can be transferred between the camera and the image processor with a reduced number of bits. The characteristics of the pixel voltages, i.e., being nearly monotonic and having limited change over time, allow the differences between successive pixel voltage readouts to be losslessly reconstructed in the image processor, even though the dynamic range of the signal transferred between the camera and the image processor is reduced.

[0015] Turning to FIG. 1 , a transmission charged particle microscope 100, such as a transmission electron microscopy (TEM) system or a scanning transmission electron microscopy (STEM) system, is shown. The microscope includes a vacuum enclosure 2 and a charged particle source 4 for generating a charged particle beam 111 propagating along a primary axis 110 and traversing an electron-optical illuminator 6. The electron-optical illuminator 6 serves to direct / focus the charged particles onto a selected portion of a sample 60 (e.g., which may be (locally) thinned / flattened). A deflector 8 is also shown and can be used to induce a scanning motion of the beam 111.

[0016] The sample 60 is held on a sample holder 61, which can be positioned in multiple degrees of freedom by a positioning device / stage 62 that moves a cradle 63 to which the holder 61 is (removably) mounted; for example, the sample holder 61 can be equipped with fingers that can be moved in the XY plane (see the depicted Cartesian coordinate system, which typically also allows movement parallel to Z and tilting about X / Y). Such movement allows various portions of the sample 60 to be illuminated / imaged / inspected by the electron beam 111 traveling along a primary axis 110 (in the Z direction) (and / or a scanning movement can be performed instead of a beam scan). If desired, an optional cooling device (not depicted) can be in intimate thermal contact with the sample holder 61, thereby maintaining the sample holder 61 (and the sample 60 thereon) at, for example, a cryogenic temperature.

[0017] The electron beam 111 interacts with the sample 60 in such a way as to cause various types of “stimulated” radiation to emanate from the sample 60, including (for example) secondary electrons, backscattered electrons, X-rays, and optical radiation (cathodoluminescence). If desired, one or more of these radiation types can be detected using a detector 22, which may be, for example, a combined scintillator / photomultiplier tube or an EDX (energy dispersive X-ray spectroscopy) module; in such cases, images can be constructed using essentially the same principles as in scanning electron microscopy (SEM). However, alternatively or additionally, electrons that traverse (pass) the sample 60, exit / diverge therefrom, and continue propagating along the axis 110 (substantially, although typically deflected / scattered to some degree) can be examined. Such a transmitted electron flux enters a projection lens 24, which typically includes various electrostatic / magnetic lenses, deflectors, correctors (such as stigmators), and the like. In normal (non-scattering) TEM mode, the projection lens 24 can focus the transmitted electron beam onto a detector 26 which can be retracted / retracted (as indicated diagrammatically by arrow 27) out of the way of the axis 110, if desired. An image (or diffractogram) of (a portion of) the sample 60 is formed by the projection lens 24 on the detector 26 (such as a screen), which can be viewed through a viewing port located in a suitable part of the wall of the enclosure 2. The retraction mechanism of the detector 26 can, for example, be mechanical and / or electrical in nature and is not depicted here.

[0018] As an alternative to viewing the image on detector 26, one can instead take advantage of the fact that the focusing depth of the electron beam leaving projection lens 24 is typically very deep (e.g., on the order of one meter). As a result, various other types of analytical equipment can be used downstream of detector 26, such as a TEM camera 30, a STEM camera 32, and a spectrometer 34.

[0019] In the TEM camera 30, the electron flux can form a still image (or diffractogram) that can be processed by the image processor 20 and controller 50. When not needed, the camera 30 can be retracted (as indicated diagrammatically by arrow 31) so that it is out of the way of the axis 110.

[0020] The output from the STEM camera 32 can be recorded as a function of the (X,Y) scanning position of the beam 111 on the sample 60, and an image can be constructed that is a "map" of the output from the camera 32 as a function of X,Y. The camera 32 may comprise a matrix of pixels. When not needed, the camera 32 can be retracted / backed out of the way of the axis 110 (as indicated diagrammatically by arrow 33). (Such retraction may not be necessary, for example, if the camera 32 is a donut-shaped annular dark field camera, e.g., in such cameras a central hole allows the passage of the beam when the camera is not in use.)

[0021] In addition to imaging using cameras 30 and / or 32, a spectroscopy device 34, which may be, for example, an EELS module, may also be activated. The EELS module includes a spectrometer 35 for dispersing charged particles based on particle energy and a detector / camera 36 for capturing a spectrum.

[0022] It should be noted that the order / position of the detectors 26, 30, 32, 34, and 36 is not strict and many possible variations are possible. For example, the spectroscopic device 34 could be integrated with the projection lens 24.

[0023] Controller 50 is connected to the various illustrated components via control lines. The controller comprises a processor 54 and non-transitory memory 55. Instructions may be stored in non-transitory memory 55 which, when executed, cause controller 50 to provide various functions such as synchronizing actions, providing set points, processing signals, performing calculations, receiving operator input from user input device 53, and displaying messages / information on display device 51. Controller 50 may be (partially) inside or outside enclosure 2, as desired, and may be of unitary or composite construction.

[0024] The one or more detectors 22 and 26, the cameras 30 and 32, and the spectroscopic device 34 may be electrically connected to the image processor 20. The image processor may include a processor, memory, and one or more field programmable gate arrays (FPGAs). Embedded software may run in the image processor to process image data received from the cameras and / or detectors at high frame rates. The processed data from the image processor may be transferred from the image processor to a controller for further processing. For example, the controller generates a sample image based on the data received from the image processor. The cameras and / or detectors may have separate image processors or a shared image processor. In one embodiment, the image processor and the controller may be integrated together as one component. In another embodiment, the image processor may be integrated with the camera.

[0025] Although transmission electron microscopy is described as an example, it should be understood that the imaging system may be other types of charged particle microscopy systems, such as SEM or focused ion beam combined with scanning electron microscopy (FIB-SEM). The charged particles may be electrons, ions, or X-rays. One or more of the detectors or cameras, such as detectors 22 and 36, cameras 30 and 32, may include one or more image sensors having multiple pixels. The pixelated image sensors may be operated according to the methods disclosed below.

[0026] Figure 2 shows a method 200 for reading and processing data acquired by a camera including at least a pixelated image sensor. The camera can detect charged particles emitted from a sample in a microscope, such as the charged particle microscope 100 of Figure 1. The data flow between components of the microscope while performing method 200 is shown in Figure 3. The camera data is read using an mfCDS method combined with data compression to increase the transfer rate of frames within and from the camera to an image processor.

[0027] In 201, data acquisition parameters for the microscope are set. The data acquisition parameters may include one or more of the dose of the charged particle beam at the sample plane, the imaging / scanning area, the data readout rate at the image sensor, and the number of frames N readout between adjacent image sensor resets. The number of frames N between adjacent sensor resets can be determined based on an estimated pixel voltage change between adjacent pixel voltage readouts and the full well capacity of the pixel. For example, the image sensor pixel is reset before reaching a predetermined maximum pixel voltage amplitude. The maximum pixel voltage amplitude is lower than the full well capacity of the pixel. The change in pixel voltage between adjacent pixel voltage readouts can be estimated based on the dose of the charged particle beam and the sample type.

[0028] At 204, the charged particle beam is directed to the sample. In response to the charged particle irradiation, various types of charged particles, such as secondary electrons and X-rays, are emitted from the sample. Multiple cameras (or detectors) within the microscope sense the emitted charged particles. For example, the cameras may include one or more of a TEM camera, a STEM camera or detector, an EDX detector, and a detector within a spectrometer for sensing EELS spectra. The camera includes a pixelated image sensor. The pixel voltage of a particular pixel changes approximately monotonically in response to one or more charged particles impinging on the pixel.

[0029] At 206, pixel voltages are read from the image sensor at the frequency determined in step 201 and digitized into a first number of bits. In one example, pixel voltages of a plurality of pixels of the image sensor are read out according to a predetermined pattern to form a frame of pixel voltages. During readout of the image sensor, the image sensor is repeatedly read out at the frame rate determined in step 201. After consecutively acquiring N frames, the image sensor is reset by resetting the pixel voltage of each pixel to a reset voltage. The reset voltage may be different for each reset. For each pixel of the plurality of pixels, the pixel voltage is read out once during each frame readout. The pixel voltage of each pixel of the plurality of pixels is repeatedly read out N times before resetting the image sensor.

[0030] At 208, the pixel voltage is compressed and the compressed pixel voltage is output to the image processor. In one example, the compressed pixel voltage may be digitized and transferred to the image processor. In another example, the pixel voltage is digitized before being compressed. The digitized compressed pixel voltage has a second number of bits that is lower than the first number of bits of the digitized pixel voltage. The pixel voltage is compressed to a range smaller than the maximum range of the pixel voltage. The maximum range of the compressed pixel voltage is equal to or less than a first threshold voltage amplitude. In one example, the first threshold voltage is subtracted from the pixel voltage in response to the pixel voltage amplitude being equal to or greater than the first threshold voltage amplitude and smaller than the second threshold voltage amplitude. In another example, the digitized pixel voltage is compressed by removing at least the MSB. The first threshold voltage may be represented by a number of bits lower than the number of bits used to represent the maximum value of the pixel voltage.

[0031] 3, in one example configuration, camera 301 includes image sensor 302, ADC 303, and readout electronics 304. Pixel voltages read from image sensor 302 are digitized by the ADC into a first number of bits and then compressed into a second number of bits. Readout electronics 304 can control the timing of data readout and output the compressed digitized pixel voltages to image processor 320.

[0032] 4A-4C illustrate the process of compressing a pixel voltage as it increases in response to a charged particle striking the pixel. The y-axis in FIG. 4A is the pixel voltage or corresponding digitized pixel voltage of a particular pixel of the image sensor. The x-axis represents time, which increases as indicated by the arrows. Solid plot 403 is the uncompressed pixel voltage readout from the image sensor. The uncompressed pixel voltage can be an analog or digital signal. Dashed plot 404 is the compressed pixel voltage. At T0, the image sensor is reset. As a result, the pixel voltage is reset to a reset voltage. In this specification, the reset voltage is zero. In other examples, the reset voltage can be a non-zero value. The reset voltage changes with each reset, which can result in reset noise. From T0, as more charged particles strike the pixel, the pixel voltage 403 increases from T0 to T4. At T4, the image sensor is reset again. Arrows 401 and 402 indicate reset events for the image sensor. The pixel voltage is read out at a frequency of 1 / ΔT. In other words, the image sensor is read out at a frame rate of 1 / ΔT. From T0 to T1, the pixel voltage 403 is between the reset voltage and the first threshold voltage V1, and the compressed pixel voltage 404 is equal to the pixel voltage 403. From T1 to T3, in response to the pixel voltage 403 being equal to or greater than the first threshold voltage V1 and less than the second threshold voltage V2, the compressed pixel voltage 404 is equal to the pixel voltage 403 minus the first threshold voltage V1. The second threshold voltage V2 is twice the first threshold voltage V1. From T2 to T3, in response to the pixel voltage 403 being equal to or greater than the second threshold voltage V2 and less than the third threshold voltage V3, the compressed pixel voltage 404 is equal to the pixel voltage 403 minus the second threshold voltage V2. The third threshold voltage V3 is three times the first threshold voltage V1. From T3 to T4, in response to the pixel voltage 403 being greater than or equal to the third threshold voltage V3 and less than the fourth threshold voltage V4, the compressed pixel voltage 404 is equal to the pixel voltage 403 minus the third threshold voltage V3. The fourth threshold voltage V4 is four times the first threshold voltage V1.At T4, N frames have been acquired since the previous reset at T0, so the pixel voltage is reset to the reset voltage again. From T4 to T5, the pixel voltage 403 is lower than the first threshold voltage, so the pixel voltage 403 is equal to the compressed pixel voltage 404. After T5, when the pixel voltage 403 increases to above V1 and below V2, the compressed pixel voltage 404 is equal to the pixel voltage 403 minus V1. Therefore, the compressed pixel voltage 404 is between zero and V1. For digitized signals, the compression process shown in FIG. 4A can reduce the bit depth of the digitized compressed pixel voltage by two bits. For example, the digitized pixel voltage is 12 bits, and the digitized compressed pixel voltage is 10 bits. The first through fourth threshold voltages are 1024, 2048, 3072, and 4096, respectively. Value aliasing is introduced into the compressed pixel voltage through compression. For example, pixel voltages between T1 and T2 will be aliased with (and therefore indistinguishable from) pixel voltages between T0 and T1. Value aliasing can be corrected or resolved within the image processor by adjusting the pixel values ​​of the differentially compressed frame to a valid range.

[0033] If the pixel voltage is digitized, a compressed digitized pixel voltage can be generated by retaining the first bit of the digitized first pixel voltage as the second bit and deleting the remaining bits. Neither the first nor the second bit is the MSB. In one example, subtracting the threshold voltage from the pixel voltage can be achieved by deleting one or more bits from the MSB, as shown in FIG. 4B. As an example, the digitized pixel voltage 410 has 12 bits. The compression shown in FIG. 4A can be implemented by deleting two bits from the MSB. The compressed digitized pixel voltage is 10 bits from the LSB, as shown by 412. Thus, in FIG. 4A, D1 is 1024, D2 is 2048, D3 is 3072, and D4 is 4096.

[0034] In another example, subtracting the threshold voltage from the pixel voltage can be achieved by deleting one or more bits from both the MSB and LSB sides, as shown in FIG. 4C. As an example, the digitized pixel voltage 410 has 12 bits. The digitized compressed pixel voltage is from bit 1 to bit 10, as shown by 421. In this example, the signal precision of the digitized compressed pixel voltage is reduced compared to the digitized pixel voltage, increasing the data transfer rate.

[0035] FIG. 4A shows an uncompressed pixel voltage that increases monotonically between successive sensor resets. In another embodiment, the uncompressed pixel voltage read from the image sensor decreases monotonically between successive resets. In one example, the pixel voltage may be compressed by subtracting a negative threshold voltage from the uncompressed pixel voltage. In another example, the uncompressed pixel voltage may be converted to a monotonically increasing pixel voltage, such as by subtracting it from a threshold pixel voltage, before being compressed as shown in FIGS. 4A-4C.

[0036] Returning to Figure 2, at 210, the image processor receives compressed pixel voltages or digitized compressed pixel voltages from the camera and uses the compressed pixel voltages to form a compressed frame. In one example, as shown in Figure 3, the image processor 320 may include one or more FPGAs 322 and memory 323. The FPGA 322 has direct memory access to the memory 323. The image processor 320 may optionally include a processor 321 for controlling data / image processing within the FPGA 322.

[0037] At 212, sensor overexposure is determined based on the compressed frame. Sensor overexposure can be determined based on pixel values ​​and the variance of pixel values ​​in the compressed frame. Dose protection block 324 in FIG. 3 represents the process of determining sensor overexposure. Details of overexposure detection are provided in FIG. 5. If sensor overexposure is detected, at 214, method 200 can prevent charged particles from reaching the image sensor, for example, by closing a shutter. Method 200 can send a notification indicating sensor overexposure to an operator. Method 200 can further adjust data acquisition parameters for the current imaging session or stop the current imaging session. If sensor overexposure is not detected, method 200 proceeds to 218.

[0038] At 218, a differentially compressed frame is generated by subtracting the compressed frame from a previously acquired compressed frame. The pixel values ​​of the differentially compressed frame are then adjusted to a valid range. For example, the differentially compressed frame may be generated by subtracting a first compressed frame acquired at a first time point t1 from a second compressed frame acquired at a second time point t2 immediately after acquiring the first compressed frame, i.e., E t2 -E t1 is obtained by

[0039] Step 218 may optionally include dark-correcting the differentially compressed frame before subtraction. That is, the differentially compressed frame is generated by subtracting sequentially acquired dark-corrected compressed frames. For example, as shown in FIG. 3 , a dark frame 331 stored in memory 323 can be optionally subtracted from the compressed frame at 325 to generate a dark-corrected compressed frame 326. The dark-corrected compressed frame 326 is temporarily stored in memory 323. The dark-corrected compressed frame 326 is also transmitted to 328 for subtraction from the previously stored compressed frame. After a delay 327, when the next dark-corrected compressed frame is received, the dark-corrected compressed frame 326 is subtracted from the next dark-corrected compressed frame at 328 to generate a differentially compressed frame.

[0040] The pixel values ​​of the differentially compressed frame are adjusted to a valid range in block 329 of FIG. 3. The valid range is determined based on a predetermined noise amplitude and a first threshold voltage used to compress the pixel voltage in 208 of FIG. 2. The noise may include one or more of sensor dark noise, sensor thermal noise, sensor readout noise, and sensor quantization noise. The noise amplitude may be determined in advance from an inspection of image frames acquired without illumination. For example, the noise amplitude may be determined based on the standard deviation of pixel values ​​in image frames acquired without illuminating the sample with a charged particle beam. A noise offset is determined based on the noise amplitude. The noise offset may be a negative value of the noise amplitude. In one example, the valid range is from the noise offset to the sum of the first threshold voltage and the noise offset, where the noise offset is non-positive. If the pixel value is less than the noise offset, the first threshold voltage is added to the pixel value. If the pixel value is greater than the sum of the first threshold voltage and the noise offset, the first threshold voltage is subtracted from the pixel value. The first threshold voltage is the pixel voltage V1 or digitized pixel voltage D1 used to compress the pixel voltage at 208.

[0041] FIG. 6A illustrates adjusting pixel values ​​of a differentially compressed frame to a valid range when there is no noise or zero noise. Because the compressed pixel voltages range from zero to a first threshold voltage, pixel values ​​of the differentially compressed frame (i.e., the difference between two compressed pixel voltages) range from a negative first threshold voltage −V1 to a first threshold voltage V1. The valid range 610 extends from zero to V1. As indicated by the shaded area, if a pixel value is within the invalid range (i.e., outside the valid range 610), the pixel value is adjusted to the valid range by adding the first threshold voltage to the pixel value. For example, pixel value 611 is adjusted to pixel value 612. Thus, the pixel value within the invalid range is moved into the valid range, as indicated by arrow 613.

[0042] FIG. 6B illustrates adjusting pixel values ​​of a differentially compressed frame to a valid range when noise is present in the pixel voltage. The noise offset 601 is negative. The valid range 620 extends from the noise offset 601 to the sum 602 of the first threshold voltage V1 and the noise offset 601. The shaded area indicates the invalid range. If the pixel value is between −V1 and the noise offset 601, the first threshold voltage V1 is added to the pixel value, resulting in the pixel value being moved to the range from 0 to the sum 602, as indicated by arrow 621. If the pixel value is between the sum 602 and V1, the first threshold voltage V1 is subtracted from the pixel value. As a result, the pixel value in range 623 is moved to range 624, as indicated by arrow 622.

[0043] At 220, a sample image is formed based on the difference image. As shown in Figure 3, the difference image is transferred from image processor 320 to controller 50 to generate the sample image. Step 220 may include pre-processing the difference image before forming the sample image.

[0044] In this manner, by reading data from the camera at a lower bit depth than the bit depth used to digitize the image sensor readout, the camera can operate at its maximum frame rate for reading sensor data, increasing the overall frame rate for data acquisition. Compression of pixel voltages can be performed quickly by removing one or more bits from the MSB of the digitized pixel voltages. By adjusting the pixel values ​​of the compressed difference frame to a valid range, changes in pixel voltages during sequential image sensor readouts can be reconstructed losslessly. Note that operations described sequentially herein may, in some cases, be reordered or performed simultaneously.

[0045] 5 illustrates a method 500 for detecting sensor overexposure based on compressed frames from a camera output. Sensor overexposure may be detected based on the amount and variance of pixel values ​​in the compressed frames. In one example, overexposure is determined based on one or more compressed frames acquired immediately after a sensor reset.

[0046] At 502, each compressed frame is divided into multiple sub-frames, each containing one or more pixels, and the sub-frames may overlap each other.

[0047] At 504, the sum and variance of all pixel values ​​in a subframe are calculated and compared to a threshold sum and a threshold variance, respectively, at 506. In one example, the variance can be the mathematical variance of pixel values ​​in a subframe. In another example, the variance can be calculated by other simplified approximation methods. The threshold sum can be determined based on the number of pixels in each subframe, the full well capacity of each pixel, and the number of frames since the most recent sensor reset. The threshold variance can be determined by measuring pixel values ​​in actual, intentional (non-damaging) overexposures. If the sum of all pixel values ​​in any subframe is greater than the threshold sum and the variance of the subframe is less than the threshold variance, overexposure is detected at 508. Otherwise, overexposure is not detected at 510.

[0048] The technical effect of compressing pixel voltages read out from an image sensor is to achieve high frame rate data transfer even when the bandwidth between the ADC and readout electronics and / or the bandwidth between the camera and image sensor are limited. The technical effect of compressing pixel voltages by removing one or more bits from the MSB of the digitized pixel voltages is to enable high-speed implementation of the compression. The technical effect of generating a difference frame based on sequentially acquired compressed frames is to determine changes in pixel voltages in response to charged particles impinging on the sensor. The technical effect of correcting the range of the differential compressed frame to obtain the difference frame is to correct for aliasing due to compression. The precision of the digitized compressed pixel voltages and the pixel values ​​in the difference frame is the same.

[0049] In one presentation, a method for acquiring data from a camera including a pixelated image sensor for detecting charged particles includes receiving first and second digitized compressed pixel voltages from the camera, determining a differential compressed pixel voltage by calculating a difference between the first digitized compressed pixel voltage and the second digitized compressed pixel voltage, generating a differential pixel voltage by adjusting the differential compressed pixel voltage to a valid range determined by a predetermined noise offset and a first threshold voltage, and forming an image of a sample based on the differential pixel voltages.

[0050] In another presentation, a camera for detecting charged particles includes an image sensor and one or more ADCs, wherein the camera is configured to: read pixel voltages of one or more pixels of the image sensor multiple times without resetting the image sensor; digitize the pixel voltages into a first number of bits; and output the digitized compressed pixel voltages with a second, lower number of bits, wherein a maximum range of the digitized compressed pixel voltages is smaller than a maximum range of the pixel voltages, and the digitized compressed pixel voltages are generated by removing at least a most significant bit (MSB) of the digitized pixel voltages.

[0051] In one embodiment, a method for acquiring data from a camera including a pixelated image sensor for detecting charged particles includes: reading pixel voltages of one or more pixels of the image sensor multiple times without resetting the image sensor; digitizing the pixel voltages into a first number of bits; and outputting the digitized compressed pixel voltages with a second, lower number of bits, wherein a maximum range of the digitized compressed pixel voltages is less than a maximum range of the pixel voltages, and the digitized compressed pixel voltages are generated by deleting at least a most significant bit (MSB) of the digitized pixel voltages. In a first example of this method, the digitized pixel voltages are unsigned. A second example of this method optionally includes the first example, and further includes, for each pixel of the one or more pixels of the image sensor, sequentially receiving a first digitized compressed pixel voltage and a second digitized compressed pixel voltage, determining a differential compressed pixel voltage by calculating a difference between the first digitized compressed pixel voltage and the second digitized compressed pixel voltage, and generating a differential pixel voltage by adjusting the differential compressed pixel voltage to a valid range, the valid range being determined based on a predetermined noise offset and a maximum range of the digitized compressed pixel voltages. A third example of this method optionally includes one or more of the first through second examples, and further includes the valid range being from the noise offset to a sum of the noise offset and a threshold voltage, and the threshold voltage being determined based on a maximum range of the digitized compressed pixel voltages. A fourth example of this method optionally includes one or more of the first through third examples, and wherein adjusting the differentially compressed pixel voltage to the valid range further includes adding a threshold voltage to the differentially compressed pixel voltage in response to the differentially compressed pixel voltage being less than the noise offset, and subtracting a threshold voltage from the differentially compressed pixel voltage in response to the differentially compressed pixel voltage being greater than the sum of the threshold voltage and the noise offset.A fifth example of this method optionally includes one or more of the first through fourth examples, and further includes determining the second number of bits based on a maximum range of change in pixel value between sequential readouts. A sixth example of this method optionally includes one or more of the first through fifth examples, and further includes the digitized compressed pixel voltage having the same signal precision as the digitized pixel voltage. A seventh example of this method optionally includes one or more of the first through sixth examples, and further includes the digitized compressed pixel voltage being generated by further removing one or more least significant bits from the digitized pixel voltage. An eighth example of this method optionally includes one or more of the first through seventh examples, and further includes detecting overexposure of the image sensor based on the digitized compressed pixel voltage of one or more pixels of the image sensor.

[0052] In one embodiment, a method for acquiring data from a camera including a pixelated image sensor for detecting charged particles includes: repeatedly reading pixel voltages of pixels of the image sensor without resetting the image sensor; compressing the pixel voltages to a compressed pixel voltage, the compressed pixel voltage being the difference between the pixel voltage and a first threshold voltage in response to an amplitude of the pixel voltage greater than or equal to a first threshold voltage and less than a second threshold voltage, the maximum range of the compressed pixel voltage being less than or equal to the first threshold voltage; digitizing the compressed pixel voltage; and outputting the digitized compressed pixel voltage. In a first example of this method, the method further includes subtracting a second threshold voltage from the pixel voltage in response to an amplitude of the pixel voltage greater than or equal to the second threshold voltage and less than a third threshold voltage. A second example of this method optionally includes the first example and further includes the second threshold voltage being twice the first threshold voltage. A third example of this method optionally includes one or more of the first through second examples and further includes resetting the image sensor after reading the pixel voltage of the pixel a predetermined number of times. A fourth example of this method optionally includes one or more of the first through third examples and further includes resetting the image sensor in response to an amplitude of the pixel voltage greater than a maximum amplitude of the pixel voltage. A fifth example of this method optionally includes one or more of the first through fourth examples and further includes the pixel voltage between adjacent sensor resets being a monotonic signal superimposed with a noise signal.A sixth example of this method optionally includes one or more of the first through fifth examples, and further includes sequentially receiving a first digitized compressed pixel voltage and a second digitized compressed pixel voltage from the camera, dark-correcting the first digitized compressed pixel voltage and the second digitized compressed pixel voltage, determining a differential compressed pixel voltage by calculating a difference between the dark-corrected first digitized compressed pixel voltage and the dark-corrected second digitized compressed pixel voltage, and generating a differential pixel voltage by adjusting the differential compressed pixel voltage to a valid range, the valid range being determined based on a predetermined noise offset and a first threshold voltage. A seventh example of this method optionally includes one or more of the first through sixth examples, and further includes the valid range being from the noise offset to a sum of the first threshold voltage amplitude and the noise offset.

[0053] In one embodiment, a system for acquiring data from a sample includes: a charged particle source for irradiating charged particles toward the sample; a camera for detecting charged particles emitted from the sample in response to the irradiation, the camera including an image sensor having a plurality of pixels and one or more analog-to-digital converters (ADCs), the camera configured to: convert charged particles impinging on a pixel of the plurality of pixels into a pixel voltage; compress the pixel voltage into a compressed pixel voltage, the compressed pixel voltage being a difference between the pixel voltage and a first threshold voltage where the amplitude of the pixel voltage is greater than or equal to the amplitude of a first threshold voltage and less than the amplitude of a second threshold voltage, wherein a maximum range of the compressed pixel voltage is less than or equal to the amplitude of the first threshold voltage and the maximum range of the compressed pixel voltage is less than the maximum range of the pixel voltage; digitize the compressed pixel voltage; and output the digitized compressed pixel voltage; an image processor for receiving the digitized compressed pixel voltage from the camera and generating a differential pixel voltage based on the digitized compressed pixel voltage; and a controller for forming an image of the sample based on the differential pixel voltage. In a first example of this system, the system further includes: receiving a digitized compressed pixel voltage from the camera and generating a differential pixel voltage based on the compressed pixel voltage includes sequentially receiving a first digitized compressed pixel voltage and a second digitized compressed pixel voltage, determining a differential compressed pixel voltage by subtracting the first digitized compressed pixel voltage from the second digitized compressed pixel voltage, and generating a differential pixel voltage by adjusting the differential compressed pixel voltage to a valid range, the valid range being determined based on a predetermined noise offset and a first threshold voltage. A second example of this system optionally includes the first example and further includes the digitized compressed pixel voltage and the differential pixel voltage having the same precision.

Claims

1. 1. A method for acquiring data from a camera including a pixelated image sensor for detecting charged particles, comprising: reading pixel voltages of one or more pixels of the image sensor multiple times without resetting the image sensor; digitizing the pixel voltage into a first number of bits; outputting the digitized compressed pixel voltage with a second, lower number of bits, wherein a maximum range of the digitized compressed pixel voltage is smaller than a maximum range of the pixel voltage, and the digitized compressed pixel voltage is generated by deleting at least a most significant bit (MSB) of the digitized pixel voltage; sequentially receiving a first digitized compressed pixel voltage and a second digitized compressed pixel voltage for each pixel of the one or more pixels of the image sensor; determining a differential compressed pixel voltage by calculating the difference between the first digitized compressed pixel voltage and the second digitized compressed pixel voltage; generating a differential pixel voltage by adjusting the differential compressed pixel voltage to a valid range, the valid range being determined based on a predetermined noise offset and the maximum range of the digitized compressed pixel voltage.

2. The method of claim 1 , wherein the digitized pixel voltages are unsigned.

3. 2. The method of claim 1, wherein the valid range is from the noise offset to a sum of a threshold voltage and the noise offset, and the threshold voltage is determined based on the maximum range of the digitized compressed pixel voltage.

4. 4. The method of claim 3, wherein adjusting the differentially compressed pixel voltage to the valid range comprises: adding the threshold voltage to the differentially compressed pixel voltage in response to the differentially compressed pixel voltage being less than the noise offset; and subtracting the threshold voltage from the differentially compressed pixel voltage in response to the differentially compressed pixel voltage being greater than the sum of the threshold voltage and the noise offset.

5. The method according to any one of claims 1 to 4, wherein the second number of bits is determined based on a maximum range of change of pixel values ​​during sequential readout.

6. The method of any of claims 1 to 5, wherein the digitized compressed pixel voltage has the same signal precision as the digitized pixel voltage.

7. The method of any of claims 1 to 6, further comprising detecting overexposure of the image sensor based on the digitized compressed pixel voltages of the one or more pixels of the image sensor.

8. A system for acquiring data from a sample, comprising: a charged particle source for directing charged particles towards the sample; a camera for detecting charged particles emitted from the sample in response to the irradiation, the camera including an image sensor having a plurality of pixels and one or more analog-to-digital converters (ADCs), the camera comprising: reading pixel voltages of one or more pixels of the image sensor multiple times without resetting the image sensor; digitizing the pixel voltage into a first number of bits; a camera configured to output a digitized compressed pixel voltage with a second, lower number of bits, wherein a maximum range of the digitized compressed pixel voltage is smaller than a maximum range of the pixel voltage, and the digitized compressed pixel voltage is generated by deleting at least a most significant bit (MSB) of the digitized pixel voltage; 1. An image processor comprising: sequentially receiving a first digitized compressed pixel voltage and a second digitized compressed pixel voltage for each pixel of the one or more pixels of the image sensor; determining a differential compressed pixel voltage by calculating the difference between the first digitized compressed pixel voltage and the second digitized compressed pixel voltage; and generating a differential pixel voltage by adjusting the differential compressed pixel voltage to a valid range, the valid range being determined based on a predetermined noise offset and the maximum range of the digitized compressed pixel voltage.

9. receiving the digitized compressed pixel voltage from the camera and generating the differential pixel voltage based on the compressed pixel voltage; sequentially receiving a first digitized compressed pixel voltage and a second digitized compressed pixel voltage; determining a differential compressed pixel voltage by subtracting the first digitized compressed pixel voltage from the second digitized compressed pixel voltage; and generating the differential pixel voltage by adjusting the differential compressed pixel voltage to a valid range, the valid range being determined based on a predetermined noise offset and a threshold voltage.

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