Dust collector and dust collection method

Abstract

[Problem] To provide a dust collector that can be installed in a tiny spot and is capable of collecting dust efficiently. [Solution] A dust collector 1 is provided with: a first electrode layer 12 which is formed of a conductor; a second electrode layer 14 that is formed of a conductor, that has gap parts (through-hole 14H, slit 14S) penetrating in the thickness direction, that has a size encompassing the first electrode layer 12 in a planar view, and that is disposed so as to face the first electrode layer 12; and insulating layers (first insulating layer 13, second insulating layer 15) that are formed of an insulating material, that insulate the first electrode layer 12 and the second electrode layer 14, and that respectively form single laminar structures together with the first electrode layer 12 and the second electrode layer 14.

Description

[Technical Field]

[0001] The present invention relates to a dust collector and a dust collection method. [Background technology]

[0002] For example, fine dust particles generated inside or near equipment such as semiconductor manufacturing equipment often have adverse effects on the workpieces manufactured by the equipment, such as foreign matter defects. Therefore, there is a need to reduce particles in and around the equipment, and in the vicinity of the workpieces, to make them cleaner.

[0003] In this regard, techniques such as a filter dust collection system, an electric dust collection system, and an electric field curtain system have been proposed.

[0004] The filter dust collection method sucks particles that have already been released into the air through an air duct and then filters the air. Therefore, particles before they are released cannot be collected, and there is also a large pressure loss, resulting in poor dust collection efficiency.

[0005] In electrostatic precipitators, particles are charged by corona discharge using an ionizer, and the charged particles are collected on one of a pair of opposing electrodes. As a result, the area around the precipitator becomes charged, and the device becomes large, making it difficult to choose where to install it.

[0006] Dust collectors that do not include an ionizer have also been proposed (for example, Patent Document 1). However, because they have a structure in which air passes between a pair of electrodes, there is a limit to how much space can be saved.

[0007] The electric field curtain method applies an alternating current to multiphase linear electrodes embedded in a dielectric to generate an unbalanced electric field that travels in one direction, causing charged particles to float and transport in the direction of travel, thereby collecting dust.This device also becomes large, making it difficult to choose where to install it. [Prior art documents] [Patent documents]

[0008] [Patent Document 1] Patent No. 6620994 Summary of the Invention [Problem to be solved by the invention]

[0009] Therefore, there is a demand for a dust collector and a dust collection method that can be installed in a small space and can efficiently collect dust. [Means for solving the problem]

[0010] The present invention provides a dust collector comprising: a first electrode layer formed of a conductor; a second electrode layer formed of a conductor and having a defect penetrating in the thickness direction, the second electrode layer being large enough to cover the first electrode layer in a plan view and being disposed opposite the first electrode layer; and an insulating layer formed of an insulating material, insulating the first electrode layer and the second electrode layer and forming a single layer structure together with the first electrode layer and the second electrode layer. [Effects of the Invention]

[0011] According to the present invention, it is possible to provide a dust collector and a dust collection method that can be installed in a small space and can collect dust efficiently. [Brief explanation of the drawings]

[0012] [Figure 1] FIG. [Figure 2] 2 is a cross-sectional view of the dust collector taken along line AA in FIG. 1. [Figure 3] FIG. 2 is a plan view of each layer of the dust collector. [Figure 4] FIG. 3 is a cross-sectional view showing an electric field generated in a dust collector. DETAILED DESCRIPTION OF THE INVENTION

[0013] Hereinafter, a dust collector according to an embodiment of the present invention will be described in detail.

[0014] FIG. 1 is an external perspective view of a dust collector 1 according to this embodiment, FIG. 2 is a cross-sectional view of the dust collector 1 taken along line AA in FIG. 1, and FIG.

[0015] As shown in Figures 1 and 2, the dust collector 1 includes a support base layer 11, a first electrode layer 12, a first insulating layer 13, a second electrode layer 14, a second insulating layer 15, and an adsorption layer 16. A power supply unit 2 is connected to the first electrode layer 12 and the second electrode layer 14.

[0016] The support base layer 11 is a layer formed of an insulating material, more preferably an insulating synthetic resin.

[0017] The first electrode layer 12 is a layer formed of a conductor. Examples of the conductor include gold foil, conductive synthetic resin, carbon, etc. The first electrode layer is provided on one surface of the support base layer 11.

[0018] The first insulating layer 13 is a layer formed of an insulator, more preferably an insulating synthetic resin that does not interfere with the electric field. An example of an insulating synthetic resin that does not interfere with the electric field is polyimide. The first insulating layer 13 is provided on the side of the support base layer 11 where the first electrode layer 12 is provided, and surrounds and insulates the first electrode layer 12 together with the support base layer 11 or by the first insulating layer 13 alone.

[0019] The second electrode layer 14 is a layer formed of a conductor. Examples of conductors include gold foil, conductive synthetic resin, and carbon. The second electrode layer 14 is disposed opposite the first electrode layer 12, sandwiching the first insulating layer 13 therebetween. The second electrode layer 14 has a recess that penetrates in the thickness direction and is large enough to cover the first electrode layer 12 in a plan view.

[0020] The second insulating layer 15 is a layer formed of an insulator, more preferably an insulating synthetic resin that does not interfere with the electric field. An example of an insulating synthetic resin that does not interfere with the electric field is polyimide. The second insulating layer 15 is disposed opposite the first insulating layer 13, sandwiching the second electrode layer 14 therebetween, and surrounds and insulates the second electrode layer 14 together with the first insulating layer 13 or by itself.

[0021] The adsorption layer 16 is provided at a position facing the second electrode layer 14, sandwiching the second insulating layer 15. The adsorption layer 16 is formed of a material suitable for adsorbing and retaining fine dust (particles). The material for the adsorption layer 16 can be appropriately selected from adhesives, materials with high intermolecular forces, and materials with high frictional forces.

[0022] The dust collector 1 is formed in the form of a single sheet or plate, with a support base layer 11, a first electrode layer 12, a first insulating layer 13, a second electrode layer 14, a second insulating layer 15, and an adsorption layer 16 layered in this order.

[0023] The first insulating layer 13 and the second insulating layer 15 may be formed integrally. Furthermore, the support base layer 11 may be formed integrally with the first insulating layer 13 and the second insulating layer 15 using the same material as the first insulating layer 13 and the second insulating layer 15.

[0024] 2 and 3, the dust collector 1 of this embodiment can be formed, for example, in a square shape in plan view. Hereinafter, an example in which the dust collector 1 is formed in a square shape will be described, but the dust collector 1 may have other shapes.

[0025] The support base layer 11, the first insulating layer 13, the second insulating layer 15, and the adsorption layer 16 are formed in a square shape with a side length of L1 and substantially the same size in plan view.

[0026] The second electrode layer 14 is formed in a square shape with one side having a length L2 shorter than the length L1.

[0027] The first electrode layer 12 is formed in a square shape with one side having a length L3 shorter than the length L2.

[0028] Therefore, when viewed in a plan view from the adsorption layer 16 side, the first electrode layer 12 is contained within the second electrode layer 14, and the second electrode layer 14 is contained within the support base layer 11, the first insulating layer 13, the second insulating layer 15, and the adsorption layer 16.

[0029] 2, the first electrode layer 12 is formed so that the edge of the first electrode layer 12 is located inward from the edge of the second electrode layer 14 by a width W or more. The width W is preferably 5 mm or more.

[0030] The thickness T1 of the first electrode layer 12 is smaller than the thickness T2 of the first insulating layer 13. The thickness T3 of the second electrode layer 14 is smaller than the thickness T4 of the second insulating layer 15.

[0031] As shown in FIG. 3, in plan view, the support base layer 11, the first electrode layer 12, the first insulating layer 13, the second insulating layer 15, and the adsorption layer 16 each have no missing portions and are formed on one surface.

[0032] In contrast, the second electrode layer 14 has circular through-holes 14H that are provided at equal intervals as cutouts and penetrate the layer in the thickness direction. The through-holes 14H have an inner diameter of, for example, 5 mm to 15 mm, and the distance between adjacent through-holes 14H is 10 mm to 30 mm.

[0033] The second electrode layer 14A of the modified example of the second electrode layer 14 has slits 14S as missing portions. The slits 14S are provided alternately from one side of the second electrode layer 14A to the opposite side, thereby preventing uneven adhesion.

[0034] The recessed portion is provided so as not to prevent current flow to the second electrode layer 14.

[0035] Fig. 4 is a cross-sectional view showing the state of the electric field generated in the dust collector 1. In Fig. 4, the white arrows X and Y indicate the electric field.

[0036] The positive pole of the power supply device 2 is connected to one of the first electrode layer 12 and the second electrode layer 14, and the negative pole is connected to the other, so that electricity is passed through them.

[0037] When the particles are made of an insulating material, it is desirable from the viewpoint of dust collection efficiency to connect the polarity opposite to the polarity that is easily charged of the insulating material to the second electrode layer 14.

[0038] The electric field from the second electrode layer 14 passes from the second electrode layer 14 through the second insulating layer 15 and the adsorption layer 16 as shown by arrow X, reaches the space where the particles are present, passes through the adsorption layer 16 and the second insulating layer 15 again, passes through the defect in the second electrode layer 14 and the first insulating layer 13, and reaches the balance point with the electric field from the first electrode layer 12 as shown by arrow Y.

[0039] Therefore, an unbalanced electric field is generated outward from the adsorption layer 16 of the dust collector 1. The outward electric field repels particles from the workpiece, etc., while the inward electric field moves particles along the field and causes them to be adsorbed onto the adsorption layer 16. Here, the unbalanced electric field refers to the area excluding the zero point where the electric fields cancel each other out and become balanced, and refers to an electric field in which directional Coulomb forces are generated. In this embodiment, the first electrode layer 12 is not at the same height as the second electrode layer 14 in the front view of FIG. 4, but is positioned below the first insulating layer 13, sandwiching it between them. Therefore, the balanced part of the electric field is not at the top of the arrow X in FIG. 4, but at the position where the arrows X and Y face each other, i.e., inside the dust collector 1. Therefore, dust entering the electric field is constantly moved in the fixed direction indicated by the arrow X in FIG. 4 and collected on the adsorption layer 16 provided on the upper surface of the dust collector 1.

[0040] Here, the second electrode layer 14 covers the entire surface of the first electrode layer 12 in a plan view. Therefore, the electric fields from the second electrode layer 14 are all directed toward the missing portion, that is, toward the inside of the dust collector 1 in a plan view, so that particles can be prevented from scattering outside the dust collector 1.

[0041] Furthermore, within the electric field, if the particle is a conductor or some insulators, charging occurs due to electrostatic induction, and if the particle is an insulator or semiconductor, charging occurs due to dielectric polarization; in either case, the particle becomes charged.

[0042] The charged particles are transported by the electric field and are attracted to the attraction layer 16 .

[0043] The results of the experiment will now be described. The dust collector 1 of this embodiment was formed to have a size of 60 mm x 60 mm and an experiment was carried out.

[0044] A voltage of 2 kV was applied to the first electrode layer 12 of the dust collector 1 which was set up vertically to the floor surface, and a voltage of −4 kV, which is a reverse voltage higher than the voltage applied to the first electrode layer 12, was applied to the second electrode layer 14.

[0045] The samples were hung by strings at intervals on the adsorption layer 16 side of the dust collector 1 .

[0046] The aluminum foil sample, measuring 10mm x 0.5mm, was found to have a pulling effect up to a distance of approximately 100mm.

[0047] The pulling effect was confirmed for a sample of 10mm x 0.5mm silicon wafer up to a distance of approximately 50mm.

[0048] The resin (acrylic resin) sample, measuring 10mm x 0.5mm, showed a pulling effect up to a distance of approximately 60mm.

[0049] As described above, the dust collector 1 of this embodiment includes a first electrode layer 12 formed of a conductor, a second electrode layer 14 also formed of a conductor, large enough to cover the first electrode layer 12 in a planar view, having a missing portion (through hole 14H, slit 14S) penetrating in the thickness direction, and arranged opposite the first electrode layer 12, and insulating layers (first insulating layer 13, second insulating layer 15) formed of an insulating material, insulating the first electrode layer 12 and the second electrode layer 14, and forming a single layer structure together with the first electrode layer 12 and the second electrode layer 14.

[0050] In addition, the dust collection method of this embodiment applies a voltage to a second electrode layer 14 that is arranged in layers opposite to the first electrode layer 12 with an insulating layer (first insulating layer 13) sandwiched therebetween and that has a size that covers the first electrode layer 12 in a planar view, and by applying a voltage to the first electrode layer 12, an electric field that is generated in an outward direction from the second electrode layer 14 passes through the defective parts (through holes 14H, slits 14S) that the second electrode layer 14 has, generating an unbalanced electric field that reaches the first electrode layer 12, and particles are transported along this unbalanced electric field.

[0051] Therefore, according to this embodiment, it is possible to provide a dust collector that can be installed in a small space and can efficiently collect dust. [Explanation of symbols]

[0052] 1 dust collector 2 Power supply 11 Support base 12 First electrode layer 13 First insulating layer 14 Second electrode layer 14A Second electrode layer 14H through hole 14S slit 15 Second insulating layer 16 Adsorption layer

Claims

1. a first electrode layer formed by a conductor; a second electrode layer formed of a conductor, having a recess penetrating in a thickness direction, having a size sufficient to cover the first electrode layer in a plan view, and disposed opposite the first electrode layer; an insulating layer formed of an insulating material, insulating the first electrode layer from the second electrode layer, and forming a single layer structure together with the first electrode layer and the second electrode layer; Equipped with The dust collector is configured such that, when a voltage is applied to the first and second electrode layers, an unbalanced electric field is generated in the outward direction from the second electrode layer in the plan view, and reaches the first electrode layer through the defect portion.

2. The first electrode layer comprises:

2. The dust collector according to claim 1, wherein the edge of the first electrode layer is formed so as to be 5 mm or more inward from the edge of the second electrode layer.

3. The dust collector according to claim 1 or 2, further comprising an adsorption layer disposed opposite the second electrode layer with the insulating layer sandwiched therebetween.

4. The dust collector according to claim 1 , further comprising a support base layer disposed opposite the first electrode layer with the insulating layer sandwiched therebetween.

5. The defect portion is 5. The dust collector according to claim 1, wherein the through holes are circular.

6. The defect portion is 6. The dust collector according to claim 5, wherein the inner diameter is 5 mm to 15 mm, and the interval between adjacent cutouts is 10 mm to 30 mm.

7. The defect portion is The dust collector according to any one of claims 1 to 4, wherein the dust collector is a slit.

8. The insulating layer is 8. The dust collector according to claim 1, which is made of polyimide.

9. applying a voltage to a second electrode layer that is disposed in a layered manner facing the first electrode layer with an insulating layer interposed therebetween and that has a size that covers the first electrode layer in a plan view; A dust collection method in which a voltage is applied to the first electrode layer, causing an electric field generated from the second electrode layer in an outward direction to pass through a defect in the second electrode layer and reach the first electrode layer, thereby generating an unbalanced electric field.

10. A dust collection method as described in claim 9, in which particles are transported along the unbalanced electric field.

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