Liquid dispensing device

Abstract

To provide a technique that can elongate service life of a piezoelectric element while suppressing deterioration in discharge performance in association with a displacement characteristic of a piezoelectric material due to increase in the cumulative number of drives in a liquid discharge device.SOLUTION: A liquid discharge device comprises: a liquid discharge head having a pressure chamber substrate including a plurality of pressure chambers, an individual electrode, a common electrode, a piezoelectric material for applying pressure to a liquid in the pressure chamber, and a driver wire electrically connected to the individual electrode and the common electrode; a control part which applies a drive voltage to the individual electrode and applies a reference voltage to the common electrode to drive the piezoelectric material, thereby controlling discharge operation of the liquid discharge head; and an acquisition part which acquires information concerning a cumulative number of drives of the piezoelectric material. The control part drives the piezoelectric material so that a voltage difference between the drive voltage and the reference voltage becomes a first value when the cumulative drive number is a first number, and drives the piezoelectric material so that the voltage difference becomes a second value smaller than the first value when the cumulative drive number is a second number more than the first number.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present disclosure relates to a liquid ejection device. [Background technology]

[0002] In a liquid ejection device equipped with a piezoelectric element, the displacement of the piezoelectric element can change depending on the number of drive pulses applied to the piezoelectric element. For example, in the initial stage after manufacture, the rate of change in the displacement of the piezoelectric element relative to the cumulative number of drive pulses applied is large, but as the cumulative number of drive pulses increases, the rate of change in the displacement of the piezoelectric element decreases and stabilizes. Therefore, in order to suppress variations in ejection characteristics such as the ejection amount and flight speed of liquid in a liquid ejection device, it is known to perform an aging process in which a predetermined number of drive pulses are applied to the manufactured piezoelectric element in advance, thereby stabilizing changes in the displacement of the piezoelectric element (for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2009-26787 Summary of the Invention [Problem to be solved by the invention]

[0004] However, the aging process can shorten the life of the piezoelectric element, so there is a demand for extending the life of the piezoelectric element while suppressing the deterioration of the ejection performance due to changes in the displacement amount of the piezoelectric element. [Means for solving the problem]

[0005] According to a first aspect of the present disclosure, there is provided a liquid ejection device. The liquid ejection device includes a liquid ejection head having a pressure chamber substrate with a plurality of pressure chambers, individual electrodes provided individually for the plurality of pressure chambers, a common electrode provided commonly to the plurality of pressure chambers, a piezoelectric element provided between the individual electrode and the common electrode for applying pressure to liquid in the pressure chambers, and drive wiring electrically connected to the individual electrode and the common electrode, a control unit that controls the ejection operation of the liquid ejection head by applying a drive voltage to the individual electrode and a reference voltage to the common electrode to drive the piezoelectric element, and an acquisition unit that acquires information regarding a cumulative number of times the piezoelectric element has been driven. When the cumulative number of times the piezoelectric element has been driven is a first number, the control unit drives the piezoelectric element so that a voltage difference between the drive voltage and the reference voltage becomes a first value, and when the cumulative number of times the piezoelectric element has been driven is a second number greater than the first number, the control unit drives the piezoelectric element so that the voltage difference becomes a second value smaller than the first value. [Brief explanation of the drawings]

[0006] [Figure 1] FIG. 1 is an explanatory diagram showing a schematic configuration of a liquid ejection system including a liquid ejection apparatus according to a first embodiment of the present disclosure. [Figure 2] FIG. 2 is a block diagram showing the functional configuration of the liquid ejection system. [Figure 3] FIG. 2 is an exploded perspective view showing the configuration of a liquid ejection head. [Figure 4] FIG. 2 is an explanatory diagram showing the configuration of a liquid ejection head in a plan view. [Figure 5] 5 is a cross-sectional view showing the VV position in FIG. 4. [Figure 6] FIG. 5 is an enlarged cross-sectional view showing a part of FIG. 4. [Figure 7] FIG. 7 is a cross-sectional view taken along the line VII-VII in FIG. 6. [Figure 8] FIG. 8 is a cross-sectional view taken along the line VIII-VIII in FIG. 6. [Figure 9] FIG. 4 is an explanatory diagram showing an example of the displacement characteristics of a piezoelectric body. [Figure 10] FIG. 10 is an explanatory diagram showing the results of an experiment investigating factors that affect the amount of voltage shift. [Figure 11] FIG. 4 is an explanatory diagram showing an example of a drive waveform supplied to a piezoelectric body. [Figure 12] 5A and 5B are explanatory diagrams conceptually showing a method of correcting a drive waveform performed by the liquid ejection device according to the first embodiment. [Figure 13] FIG. 10 is an explanatory diagram showing an example of a correction table for a drive waveform. [Figure 14] 10A and 10B are explanatory diagrams conceptually showing a method of correcting a drive waveform performed by a liquid ejection device according to a second embodiment. [Figure 15] FIG. 10 is an explanatory diagram showing a second example of a correction table for a drive waveform. DETAILED DESCRIPTION OF THE INVENTION

[0007] A. First embodiment: FIG. 1 is an explanatory diagram showing a schematic configuration of a liquid ejection system 700 including a liquid ejection device 500 according to a first embodiment of the present disclosure. The liquid ejection system 700 includes the liquid ejection device 500 according to this embodiment and a server 600. X, Y, and Z in FIG. 1 and the subsequent figures represent three mutually orthogonal spatial axes. In this specification, the directions along these axes are also referred to as the X-axis, Y-axis, and Z-axis directions. When specifying a direction, a positive direction is indicated by "+" and a negative direction by "-," and the direction indicated by an arrow in each figure is referred to as the + direction and the opposite direction as the - direction. In this embodiment, the Z direction coincides with the vertical direction, with the +Z direction indicating a vertically downward direction and the -Z direction indicating a vertically upward direction. Furthermore, when the positive and negative directions are not specified, the three X, Y, and Z directions are referred to as the X-axis, Y-axis, and Z-axis.

[0008] In this embodiment, the liquid ejection device 500 is an inkjet printer that ejects ink, as an example of a liquid, onto printing paper P to form an image. The liquid ejection device 500 may eject ink onto any type of medium, such as a resin film or fabric, instead of printing paper P. As shown in FIG. 1, in this embodiment, the liquid ejection device 500 can be connected to a server 600 via a wide area network (WAN) such as the Internet INT.

[0009] The liquid ejection device 500 includes a liquid ejection head 510, an ink tank 550, a transport mechanism 560, a movement mechanism 570, and a control unit 580. The liquid ejection head 510 has a plurality of nozzles formed therein and ejects ink of a total of four colors, for example, black, cyan, magenta, and yellow, in the +Z direction to form an image on printing paper P. The liquid ejection head 510 is mounted on a carriage 572 and moves back and forth in the main scanning direction together with the movement of the carriage 572. In this embodiment, the main scanning direction is the +X direction and the -X direction. The liquid ejection head 510 is not limited to four colors and may also eject ink of any other color, such as light cyan, light magenta, or white.

[0010] The ink tank 550 contains ink to be ejected from the liquid ejection head 510. The ink tank 550 is connected to the liquid ejection head 510 by a resin tube 552. The ink in the ink tank 550 is supplied to the liquid ejection head 510 via the tube 552. Instead of the ink tank 550, a bag-shaped liquid pack made of a flexible film may be provided.

[0011] The transport mechanism 560 transports the printing paper P in the sub-scanning direction. The sub-scanning direction is a direction that intersects with the X-axis direction, which is the main scanning direction, and in this embodiment, is the +Y direction and the -Y direction. The transport mechanism 560 includes a transport rod 564 to which three transport rollers 562 are attached, and a transport motor 566 that rotates the transport rod 564. The transport motor 566 rotates the transport rod 564, thereby transporting the printing paper P in the +Y direction, which is the sub-scanning direction. The number of transport rollers 562 is not limited to three and may be any number. Furthermore, a configuration may be provided with multiple transport mechanisms 560.

[0012] The movement mechanism 570 includes a carriage 572, a conveyor belt 574, a movement motor 576, and a pulley 577. The carriage 572 carries a liquid ejection head 510 that is ready to eject ink. The carriage 572 is fixed to the conveyor belt 574. The conveyor belt 574 is stretched between the movement motor 576 and the pulley 577. When the movement motor 576 is driven to rotate, the conveyor belt 574 moves back and forth in the main scanning direction. As a result, the carriage 572, which is fixed to the conveyor belt 574, also moves back and forth in the main scanning direction.

[0013] Fig. 2 is a block diagram showing the functional configuration of the liquid ejection system 700. In Fig. 2, some components of the liquid ejection device 500, such as the ink tank 550, the transport mechanism 560, and the movement mechanism 570, are omitted.

[0014] The liquid ejection head 510 is equipped with a piezoelectric element 300, a detection resistor 401, a current application circuit 430, and a voltage detection circuit 440. As will be described later, the piezoelectric element 300 generates a pressure change in the ink within the pressure chamber of the liquid ejection head 510. The detection resistor 401 is a resistive wiring used to detect the temperature of the ink within the pressure chamber. The current application circuit 430 applies a current to the detection resistor 401 under the control of the head control unit 520. In this embodiment, the current application circuit 430 is a constant current circuit that passes a predetermined constant current through the detection resistor 401. The voltage detection circuit 440 detects the voltage value of the voltage generated across the detection resistor 401 by the application of the current.

[0015] The control unit 580 is configured as a microcomputer including a CPU 582 and a storage unit 584. The storage unit 584 can be, for example, a non-volatile memory that can be erased with an electrical signal, such as an EEPROM; a non-volatile memory that can be erased with ultraviolet light, such as a one-time PROM or EPROM; or an inerasable non-volatile memory, such as a PROM. The storage unit 584 stores various programs for implementing the functions provided in this embodiment. The CPU 582 functions as the head control unit 520 and the temperature calculation unit 450 by expanding and executing the programs stored in the storage unit 584.

[0016] The temperature calculation unit 450 detects the temperature of the detection resistor 401 by utilizing the characteristic that the electrical resistance value of resistive wiring made of metal, semiconductor, or the like changes with temperature, and estimates the detected temperature of the detection resistor 401 as the temperature of the ink in the pressure chamber. The temperature calculation unit 450 obtains the resistance value of the detection resistor 401 based on the current value of the current applied to the detection resistor 401 from the current application circuit 430 and the voltage value of the voltage generated in the detection resistor 401 detected by the voltage detection circuit 440. The temperature calculation unit 450 derives the temperature of the ink in the pressure chamber using the obtained resistance value of the detection resistor 401 and a temperature calculation formula stored in the memory unit 584. The temperature calculation formula indicates the correspondence relationship between the electrical resistance value of the detection resistor 401 and the temperature. The temperature calculation unit 450 outputs the derived temperature of the ink in the pressure chamber to the head control unit 520.

[0017] The head control unit 520 oversees the control of each unit of the liquid ejection head 510. The head control unit 520 controls, for example, the reciprocating movement of the carriage 572 in the main scanning direction, the transport movement of the printing paper P in the sub-scanning direction, and the ejection operation of the liquid ejection head 510. As the ejection operation of the liquid ejection head 510, for example, the head control unit 520 can control the ejection of ink onto the printing paper P by outputting a drive signal based on the temperature of the ink in the pressure chamber obtained from the temperature calculation unit 450 to the liquid ejection head 510 to drive the piezoelectric element 300. In this embodiment, the head control unit 520 also controls the current supply from the current application circuit 430 to the detection resistor 401, and functions as an acquisition unit that counts and acquires the cumulative drive count, which is the cumulative number of times a drive voltage has been applied to the piezoelectric element.

[0018] The control unit 580 further includes a communication unit 586. The communication unit 586 has a WAN (Wide Area Network) interface and communicates with an external network such as the Internet INT. The communication unit 586 functions as a transmitter that transmits to the server 600 the temperature detected by the detection resistor 401 and the cumulative number of drives acquired by the head control unit 520 as an acquisition unit. The communication unit 586 also functions as a receiver that receives from the server 600 the drive voltage and reference voltage corresponding to the temperature detected by the detection resistor 401 and the cumulative number of drives that have been transmitted.

[0019] The server 600 includes a CPU 610, a storage unit 620, and a communication unit 630. The communication unit 630 communicates with the communication unit 586 of the liquid ejection device 500 via a wide area network such as the Internet INT. The storage unit 620 is, for example, a RAM, a ROM, or a hard disk drive (HDD). The storage unit 620 stores various programs for realizing the functions provided in this embodiment. The CPU 610 executes the programs stored in the storage unit 620, thereby functioning as a voltage calculation unit 612. The storage unit 620 temporarily stores the cumulative number of times of driving and the temperature detected by the detection resistor 401 received from the liquid ejection device 500.

[0020] The voltage calculation unit 612 determines a drive voltage and a reference voltage to be applied to the piezoelectric element 300 as drive conditions for the piezoelectric element 300 corresponding to the cumulative number of drives received from the liquid ejection device 500 and the temperature detected by the detection resistor 401. In this embodiment, the voltage calculation unit 612 determines the drive voltage and the reference voltage using a correction table 622 stored in the storage unit 620. The voltage calculation unit 612 may determine the drive voltage and the reference voltage by calculation using a predetermined formula instead of the correction table 622. As will be described later, the correction table 622 indicates the correspondence between the cumulative number of drives, the temperature detection results by the detection resistor 401, and correction values ​​for the drive voltage and the reference voltage.

[0021] The detailed configuration of the liquid ejection head 510 will be described with reference to FIGS. 3 to 5. FIG. 3 is an exploded perspective view showing the configuration of the liquid ejection head 510. FIG. 4 is an explanatory diagram showing the configuration of the liquid ejection head 510 in a plan view. FIG. 4 shows the configuration of the pressure chamber substrate 10 and its surroundings in the liquid ejection head 510. In FIG. 4, the sealing substrate 30 and the case member 40 are omitted from illustration to facilitate understanding of the technology. FIG. 5 is a cross-sectional view showing the VV position in FIG. 4.

[0022] As shown in FIG. 3, the liquid ejection head 510 includes a pressure chamber substrate 10, a communication plate 15, a nozzle plate 20, a compliance substrate 45, a sealing substrate 30, a case member 40, a vibration plate 50, and an intermediate substrate 120, and further includes a piezoelectric element 300 shown in FIG. 4. The pressure chamber substrate 10, the communication plate 15, the nozzle plate 20, the compliance substrate 45, the vibration plate 50, the piezoelectric element 300, the sealing substrate 30, and the case member 40 are laminated members, and are stacked to form the liquid ejection head 510. In the present disclosure, the direction in which the laminated members that form the liquid ejection head 510 are stacked is also referred to as the "stacking direction." In this embodiment, the stacking direction coincides with the Z-axis direction.

[0023] The pressure chamber substrate 10 is formed using, for example, a silicon substrate, a glass substrate, an SOI substrate, various ceramic substrates, etc. As shown in FIG. 4 , the pressure chamber substrate 10 has a plurality of pressure chambers 12 arranged along a predetermined direction. The direction in which the plurality of pressure chambers 12 are arranged is also referred to as the “arrangement direction.” In a plan view, the pressure chambers 12 are formed in a substantially rectangular shape in which the length in the X-axis direction is longer than the length in the Y-axis direction. In the present disclosure, “plan view” refers to a state in which an object is viewed along the stacking direction. The shape of the pressure chambers 12 is not limited to a rectangular shape, and may be a parallelogram, a polygon, a circle, an oval, etc. An oval shape refers to a shape based on a rectangular shape with semicircular ends at both longitudinal ends, and includes a rounded rectangle, an ellipse, an egg shape, etc.

[0024] In this embodiment, the pressure chambers 12 are arranged in two rows, each with its arrangement direction aligned in the Y-axis direction. In the example of FIG. 4, two pressure chamber rows are formed in the pressure chamber substrate 10: a first pressure chamber row L1 with its arrangement direction aligned in the Y-axis direction, and a second pressure chamber row L2 with its arrangement direction aligned in the Y-axis direction. The first pressure chamber row L1 and the second pressure chamber row L2 are arranged on either side of the relay substrate 120. Specifically, the second pressure chamber row L2 is arranged on the opposite side of the first pressure chamber row L1, across the relay substrate 120, in a direction intersecting the arrangement direction of the first pressure chamber row L1. A direction perpendicular to both the arrangement direction and the stacking direction is also referred to as the "intersecting direction." In the example of FIG. 4, the intersecting direction is the X-axis direction, and the second pressure chamber row L2 is arranged in the -X direction relative to the first pressure chamber row L1, across the relay substrate 120. The multiple pressure chambers 12 do not necessarily have to be arranged in a straight line, and may be arranged in a staggered arrangement along the Y-axis direction, in which every other pressure chamber 12 is staggered in the intersecting direction. The multiple pressure chambers 12 belonging to the first pressure chamber row L1 and the multiple pressure chambers 12 belonging to the second pressure chamber row L2 are arranged so that their positions in the arrangement direction coincide with each other and are adjacent to each other in the intersecting direction.

[0025] As shown in FIG. 3, a communication plate 15, a nozzle plate 20, and a compliance substrate 45 are stacked on the +Z direction side of the pressure chamber substrate 10. The communication plate 15 is a flat plate-like member made of, for example, a silicon substrate, a glass substrate, an SOI substrate, various ceramic substrates, or a metal substrate. Examples of metal substrates include a stainless steel substrate. As shown in FIG. 5, the communication plate 15 is provided with a nozzle communication passage 16, a first manifold portion 17, a second manifold portion 18, and a supply communication passage 19. It is preferable that the communication plate 15 be made of a material with approximately the same thermal expansion coefficient as that of the pressure chamber substrate 10. This makes it possible to suppress warping of the pressure chamber substrate 10 and the communication plate 15 due to differences in thermal expansion coefficients when the temperatures of the pressure chamber substrate 10 and the communication plate 15 change.

[0026] As shown in Fig. 5, the nozzle communication passage 16 is a flow path that communicates between the pressure chambers 12 and the nozzles 21. The first manifold portion 17 and the second manifold portion 18 function as part of a manifold 100 that serves as a common liquid chamber through which the multiple pressure chambers 12 communicate. The first manifold portion 17 is provided so as to penetrate the communication plate 15 in the Z-axis direction. Furthermore, as shown in Fig. 5, the second manifold portion 18 is provided on the surface of the communication plate 15 on the +Z direction side, without penetrating the communication plate 15 in the Z-axis direction.

[0027] As shown in FIG. 5 , the supply communication passage 19 is a flow path connected to a pressure chamber supply path 14 provided in the pressure chamber substrate 10. The pressure chamber supply path 14 is a flow path connected to one end of the pressure chamber 12 in the X-axis direction via a throttle portion 13. The throttle portion 13 is a flow path provided between the pressure chamber 12 and the pressure chamber supply path 14. The throttle portion 13 is a flow path whose inner wall protrudes further than the pressure chamber 12 and the pressure chamber supply path 14 and is formed narrower than the pressure chamber 12 and the pressure chamber supply path 14. As a result, the throttle portion 13 is set to have a higher flow path resistance than the pressure chamber 12 and the pressure chamber supply path 14. With the liquid ejection head 510 configured in this manner, it is possible to reduce or prevent ink from flowing back into the pressure chamber supply path 14 in the pressure chamber 12 even when pressure is applied to the pressure chamber 12 by the piezoelectric element 300 during ink ejection. There are multiple supply communication passages 19, which are arranged in the Y-axis direction, i.e., the arrangement direction, and each is provided individually for each pressure chamber 12. The supply communication passage 19 and the pressure chamber supply passage 14 connect the second manifold portion 18 to each pressure chamber 12, and supply ink in the manifold 100 to each pressure chamber 12.

[0028] The nozzle plate 20 is provided on the opposite side of the communicating plate 15 from the pressure chamber substrate 10, i.e., on the surface of the communicating plate 15 in the +Z direction. The material of the nozzle plate 20 is not particularly limited, and examples thereof include a silicon substrate, a glass substrate, an SOI substrate, various ceramic substrates, and a metal substrate. Examples of metal substrates include a stainless steel substrate. The nozzle plate 20 can also be made of an organic material such as a polyimide resin. However, it is preferable to use a material for the nozzle plate 20 with approximately the same thermal expansion coefficient as the communicating plate 15. This makes it possible to suppress warping of the nozzle plate 20 and the communicating plate 15 due to differences in thermal expansion coefficients when the temperatures of the nozzle plate 20 and the communicating plate 15 change.

[0029] A plurality of nozzles 21 are formed in the nozzle plate 20. Each nozzle 21 is connected to a corresponding pressure chamber 12 via a nozzle communication passage 16. As shown in FIG. 3, the plurality of nozzles 21 are arranged along the arrangement direction of the pressure chambers 12, i.e., the Y-axis direction. The nozzle plate 20 is provided with two nozzle rows, each of which is provided with a plurality of nozzles 21. The two nozzle rows are provided corresponding to the first pressure chamber row L1 and the second pressure chamber row L2, respectively.

[0030] As shown in FIG. 5 , the compliance substrate 45 is provided together with the nozzle plate 20 on the side opposite the pressure chamber substrate 10 across the communicating plate 15, i.e., on the surface of the communicating plate 15 on the +Z direction side. The compliance substrate 45 is provided around the nozzle plate 20 and covers the openings of the first manifold section 17 and the second manifold section 18 provided in the communicating plate 15. In this embodiment, the compliance substrate 45 includes a sealing film 46 made of a flexible thin film and a fixed substrate 47 made of a hard material such as metal. As shown in FIG. 5 , the region of the fixed substrate 47 facing the manifold 100 forms an opening 48 that is completely removed in the thickness direction. Therefore, one side of the manifold 100 forms a compliance section 49 that is sealed only by the sealing film 46.

[0031] As shown in Fig. 5, a vibration plate 50 and a piezoelectric element 300 are laminated on the side of the pressure chamber substrate 10 opposite the nozzle plate 20, etc., i.e., on the surface of the pressure chamber substrate 10 on the -Z direction side. The piezoelectric element 300 flexes and deforms the vibration plate 50, causing a pressure change in the ink inside the pressure chamber 12. In Fig. 5, the configuration of the piezoelectric element 300 is shown in a simplified manner to make the technology easier to understand. The vibration plate 50 is provided on the +Z direction side of the piezoelectric element 300, and the pressure chamber substrate 10 is provided on the +Z direction side of the vibration plate 50.

[0032] As shown in FIG. 5 , a sealing substrate 30, which has approximately the same size as the pressure chamber substrate 10 in a plan view, is bonded to the surface of the pressure chamber substrate 10 on the −Z direction side with an adhesive 39 (described later). The sealing substrate 30 includes a ceiling portion 30T, a wall portion 30W, a holding portion 31, and a through-hole 32. The holding portion 31 is a concave space defined by the ceiling portion 30T and the wall portion 30W, and protects the active portions of the piezoelectric elements 300. The holding portions 31 of the sealing substrate 30 are provided for each column of the piezoelectric elements 300 arranged in the arrangement direction. In this embodiment, two holding portions 31 are formed adjacent to each other in the X-axis direction. The through-hole 32 extends along the Y-axis direction between the two holding portions 31 and penetrates the sealing substrate 30 along the Z-axis direction.

[0033] 5, a case member 40 is fixed on the sealing substrate 30. The case member 40 forms a manifold 100, which communicates with the multiple pressure chambers 12, together with the communication plate 15. The case member 40 has approximately the same outer shape as the communication plate 15 in a plan view, and is joined to cover the sealing substrate 30 and the communication plate 15.

[0034] The case member 40 has a storage section 41, a supply port 44, a third manifold section 42, and a connection port 43. The storage section 41 is a space deep enough to store the pressure chamber substrate 10 and the sealing substrate 30. The third manifold section 42 is a space formed in the case member 40 on both sides of the storage section 41 in the X-axis direction. The third manifold section 42 is connected to the first manifold section 17 and the second manifold section 18 provided on the communication plate 15, thereby forming a manifold 100. The manifold 100 has an elongated shape that is continuous along the Y-axis direction. The supply port 44 communicates with the manifolds 100 and supplies ink to each manifold 100. The connection port 43 is a through hole that communicates with the through hole 32 of the sealing substrate 30, and an intermediate substrate 120 is inserted through the through hole 43.

[0035] 5, ink supplied from the ink tank 550 shown in Fig. 1 is taken in through the supply port 44 shown in Fig. 5, and the internal flow paths from the manifold 100 to the nozzles 21 are filled with ink. Then, a voltage based on a drive signal is applied to each of the piezoelectric elements 300 corresponding to the plurality of pressure chambers 12. This causes the vibration plate 50 to flex and deform together with the piezoelectric elements 300, increasing the pressure inside each pressure chamber 12 and causing ink droplets to be ejected from each nozzle 21.

[0036] The configurations of the piezoelectric element 300 and the detection resistor 401 will be described with reference to Figures 4 and 5 as well as Figures 6 to 8. Figure 6 is an enlarged cross-sectional view showing the range AR in Figure 4. Figure 7 is a cross-sectional view showing the position VII-VII in Figure 6. Figure 8 is a cross-sectional view showing the position VIII-VIII in Figure 6. As shown in Figure 6, the liquid ejection head 510 has, on the -Z direction side of the pressure chamber substrate 10, not only the vibration plate 50 and the piezoelectric element 300, but also individual lead electrodes 91, common lead electrodes 92, measurement lead electrodes 93, and the detection resistor 401.

[0037] As shown in FIG. 7, the diaphragm 50 includes an elastic film 55 made of silicon oxide (SiO2) provided on the pressure chamber substrate 10, and an insulating film 56 made of zirconium oxide (ZrO2) provided on the elastic film 55. The flow paths formed in the pressure chamber substrate 10, such as the pressure chambers 12, are formed by anisotropically etching the pressure chamber substrate 10 from the surface on the +Z direction side. The elastic film 55 forms the surface on the -Z direction side of the flow paths of the pressure chambers 12, etc. Note that the diaphragm 50 may be made up of, for example, either the elastic film 55 or the insulating film 56, or may include other films in addition to the elastic film 55 and the insulating film 56. Examples of materials for the other films include silicon and silicon nitride.

[0038] The piezoelectric element 300 applies pressure to the pressure chamber 12. As shown in Fig. 7, the piezoelectric element 300 has a first electrode 60, a piezoelectric body 70, and a second electrode 80. As shown in Fig. 7, the first electrode 60, the piezoelectric body 70, and the second electrode 80 are stacked in this order from the +Z direction side to the -Z direction side along the stacking direction. The piezoelectric body 70 is provided between the first electrode 60 and the second electrode 80 in the stacking direction in which the first electrode 60, the second electrode 80, and the piezoelectric body 70 are stacked.

[0039] The first electrode 60 and the second electrode 80 are both electrically connected to the relay substrate 120 shown in FIG. 5. The first electrode 60 and the second electrode 80 apply a voltage corresponding to a drive signal to the piezoelectric body 70. A portion of the piezoelectric element 300 where piezoelectric strain occurs in the piezoelectric body 70 when a voltage is applied between the first electrode 60 and the second electrode 80 is also called an active portion. The active portion is a portion of the piezoelectric element 300 where the piezoelectric body 70 is sandwiched between the first electrode 60 and the second electrode 80.

[0040] A driving voltage that varies depending on the amount of ink ejected is applied to the first electrode 60, and a predetermined reference voltage is applied to the second electrode 80 regardless of the amount of ink ejected. When a voltage difference occurs between the first electrode 60 and the second electrode 80 due to the application of the driving voltage and the reference voltage, the piezoelectric body 70 of the piezoelectric element 300 deforms. The portion that actually displaces in the Z-axis direction when the piezoelectric element 300 is driven is also called the flexible portion. The portion of the piezoelectric element 300 that faces the pressure chamber 12 in the Z-axis direction is the flexible portion. The deformation of the piezoelectric body 70 causes the vibration plate 50 to deform or vibrate, changing the volume of the pressure chamber 12. The change in volume of the pressure chamber 12 applies pressure to the ink contained in the pressure chamber 12, causing ink to be ejected from the nozzle 21 via the nozzle communication passage 16.

[0041] The first electrodes 60 are individual electrodes provided for the multiple pressure chambers 12. As shown in FIG. 7, the first electrodes 60 are lower electrodes provided on the opposite side of the piezoelectric body 70 from the second electrode 80, i.e., on the +Z direction side of the piezoelectric body 70, below the piezoelectric body 70. The thickness of the first electrodes 60 is, for example, approximately 80 nanometers. The first electrodes 60 are formed from a conductive material, for example, a metal such as platinum (Pt), iridium (Ir), gold (Au), or titanium (Ti), or a conductive metal oxide such as indium tin oxide (ITO). The first electrodes 60 may be formed by laminating multiple materials, such as platinum (Pt), iridium (Ir), gold (Au), or titanium (Ti). In this embodiment, platinum (Pt) is used as the first electrode 60.

[0042] As shown in Fig. 4, the piezoelectric body 70 has a predetermined width in the X-axis direction and extends along the arrangement direction of the pressure chambers 12, i.e., the Y-axis direction. As shown in Fig. 7, the end 70a of the piezoelectric body 70 in the +X direction is covered by a wiring portion 96 that is formed at the same time as the individual lead electrodes 91. An adhesive 39 is disposed on the upper part of the wiring portion 96 to bond the wall portion 30W of the sealing substrate 30. The wiring portion 96 may be omitted.

[0043] The thickness of the piezoelectric body 70 is, for example, approximately 1000 to 4000 nanometers. Examples of the piezoelectric body 70 include a perovskite-structured crystalline film made of a ferroelectric ceramic material exhibiting electromechanical transduction, which is formed on the first electrode 60, known as a perovskite crystal. Examples of materials that can be used for the piezoelectric body 70 include ferroelectric piezoelectric materials such as lead zirconate titanate (PZT), and materials to which metal oxides such as niobium oxide, nickel oxide, or magnesium oxide are added. Specifically, examples that can be used include lead titanate (PbTiO), lead zirconate titanate (Pb(Zr,Ti)O), lead zirconate (PbZrO), lead lanthanum titanate ((Pb,La),TiO), lead lanthanum zirconate titanate ((Pb,La)(Zr,Ti)O), and magnesium niobate lead zirconium titanate (Pb(Zr,Ti)(Mg,Nb)O). In this embodiment, lead zirconate titanate (PZT) is used as the piezoelectric body 70.

[0044] The material of the piezoelectric body 70 is not limited to lead-based piezoelectric materials containing lead, and lead-free piezoelectric materials can also be used. Examples of lead-free piezoelectric materials include bismuth ferrite ((BiFeO3), abbreviated as "BFO"), barium titanate ((BaTiO3), abbreviated as "BT"), potassium sodium niobate ((K,Na)(NbO3), abbreviated as "KNN"), potassium sodium lithium niobate ((K,Na,Li)(NbO3)), potassium sodium lithium tantalate niobate ((K,Na,Li)(Nb,Ta)O3), bismuth potassium titanate ((Bi1 / 2K1 / 2)TiO3, abbreviated as "BKT"), bismuth sodium titanate ((Bi1 / 2Na1 / 2)TiO3, abbreviated as "BNT"), manganese dioxide (MgO3), ... Examples include bismuth phosphate (BiMnO3, abbreviated as "BM"), composite oxides containing bismuth, potassium, titanium, and iron and having a perovskite structure (x[(BixK1-x)TiO3]-(1-x)[BiFeO3], abbreviated as "BKT-BF"), composite oxides containing bismuth, iron, barium, and titanium and having a perovskite structure ((1-x)[BiFeO3]-x[BaTiO3], abbreviated as "BFO-BT"), and oxides to which metals such as manganese, cobalt, and chromium are added ((1-x)[Bi(Fe1-yMy)O3]-x[BaTiO3] (M is Mn, Co, or Cr)).

[0045] As shown in FIG. 4, the second electrode 80 is a common electrode provided for the multiple pressure chambers 12. The second electrode 80 has a predetermined width in the X-axis direction and extends along the arrangement direction of the pressure chambers 12, i.e., the Y-axis direction. As shown in FIG. 7, the second electrode 80 is an upper electrode provided on the opposite side of the piezoelectric body 70 from the first electrode 60, i.e., on the −Z-direction side of the piezoelectric body 70, above the piezoelectric body 70. The material of the second electrode 80 is not particularly limited, but, like the first electrode 60, conductive materials such as metals such as platinum (Pt), iridium (Ir), gold (Au), and titanium (Ti), and conductive metal oxides such as indium tin oxide (ITO) are used. Alternatively, the second electrode 80 may be formed by stacking multiple materials such as platinum (Pt), iridium (Ir), gold (Au), and titanium (Ti). In this embodiment, iridium (Ir) is used as the second electrode 80.

[0046] As shown in FIG. 7 , a wiring portion 85 is provided further toward the −X direction than the −X direction end portion 80b of the second electrode 80. The wiring portion 85 is formed in the same layer as the second electrode 80 but is electrically discontinuous with the second electrode 80. The wiring portion 85 is formed from the −X direction end portion 70b of the piezoelectric body 70 to the −X direction end portion 60b of the first electrode 60, with a gap between the wiring portion 85 and the end portion 80b of the second electrode 80. The −X direction end portion 60b of the first electrode 60 extends further to the outside than the end portion 70b of the piezoelectric body 70. A plurality of wiring portions 85 are provided for each piezoelectric element 300, and are arranged at predetermined intervals along the Y axis direction. The wiring portion 85 is preferably formed in the same layer as the second electrode 80. This simplifies the manufacturing process of the wiring portion 85 and reduces costs. However, the wiring portion 85 may be formed in a layer separate from the second electrode 80.

[0047] 6 and 7, an individual lead electrode 91 is electrically connected to the first electrode 60, which is an individual electrode, and an extension portion 92a and an extension portion 92b of a common lead electrode 92 are electrically connected to the second electrode 80, which is a common electrode. The individual lead electrode 91 and the common lead electrode 92 function as drive wiring for applying a voltage to the piezoelectric body 70 to drive the piezoelectric body 70. In this embodiment, the power supply circuit for supplying power to the piezoelectric body 70 via the drive wiring and the current application circuit 430 for supplying power to the detection resistor 401 are different circuits.

[0048] The individual lead electrode 91 and the common lead electrode 92 are made of a conductive material, such as gold (Au), copper (Cu), titanium (Ti), tungsten (W), nickel (Ni), chromium (Cr), platinum (Pt), or aluminum (Al). In this embodiment, gold (Au) is used for the individual lead electrode 91 and the common lead electrode 92. The individual lead electrode 91 and the common lead electrode 92 may also have an adhesion layer that improves adhesion to the first electrode 60, the second electrode 80, and the diaphragm 50.

[0049] The individual lead electrode 91 and the common lead electrode 92 are formed in the same layer so as to be electrically discontinuous. This simplifies the manufacturing process and reduces costs compared to when the individual lead electrode 91 and the common lead electrode 92 are formed separately. The individual lead electrode 91 and the common lead electrode 92 may be formed in different layers.

[0050] 6, an individual lead electrode 91 is provided for each first electrode 60. As shown in Fig. 7, the individual lead electrode 91 is connected to the vicinity of the end 60b of the first electrode 60 via a wiring portion 85, and is drawn out in the -X direction onto the diaphragm 50. The individual lead electrode 91 is electrically connected to the end 60b of the first electrode 60 in the -X direction, which is drawn out further to the outside than the end 70b of the piezoelectric body 70. The wiring portion 85 may be omitted, and the individual lead electrode 91 may be directly connected to the end 60b of the first electrode 60.

[0051] 4, the common lead electrode 92 extends along the Y-axis direction, is bent at both ends in the Y-axis direction, and is drawn out in the −X-direction. The common lead electrode 92 has an extension portion 92a and an extension portion 92b that extend along the Y-axis direction. As shown in FIGS. 4 and 5, one end of each of the individual lead electrodes 91 and the common lead electrode 92 extends so as to be exposed in a through hole 32 formed in the sealing substrate 30, and is electrically connected to the relay substrate 120 within the through hole 32.

[0052] The relay substrate 120 is formed of, for example, a flexible substrate (FPC: Flexible Printed Circuit). The relay substrate 120 has a plurality of wirings formed thereon for connection to the control unit 580 and a power supply circuit (not shown). Note that instead of an FPC, any flexible substrate such as an FFC (Flexible Flat Cable) may be used. An integrated circuit 121 having a switching element is mounted on the relay substrate 120. A signal for driving the piezoelectric element 300 is input to the integrated circuit 121. The integrated circuit 121 controls the timing at which the signal for driving the piezoelectric element 300 is supplied to the first electrode 60 based on the input signal. This controls the timing at which the piezoelectric element 300 is driven and the amount of drive of the piezoelectric element 300.

[0053] 4 and 6 show the measurement lead electrode 93. The measurement lead electrode 93 is electrically connected to the detection resistor 401. In this embodiment, the measurement lead electrode 93 is formed in the same layer as the individual lead electrodes 91 and the common lead electrode 92, and is formed so as to be electrically discontinuous with each other. The detection resistor 401 is electrically connected to the relay board 120 by the measurement lead electrode 93, which enables the temperature calculation unit 450 to detect the electrical resistance value of the detection resistor 401.

[0054] The measurement lead electrode 93 is made of a conductive material, such as gold (Au), copper (Cu), titanium (Ti), tungsten (W), nickel (Ni), chromium (Cr), platinum (Pt), or aluminum (Al). The measurement lead electrode 93 is made of the same material as the individual lead electrode 91 and the common lead electrode 92. The measurement lead electrode 93 may be made of any material other than gold (Au), and may be made of a different material from the individual lead electrode 91 and the common lead electrode 92.

[0055] As shown in FIG. 8 , the measurement lead electrode 93 includes wiring portions 93a and 93b extending above the piezoelectric body 70 and a contact hole 93H provided in a through hole 70H that penetrates the piezoelectric body 70. The through hole 70H can be formed, for example, by ion milling when forming the piezoelectric body 70. The wiring portion 93a is electrically connected to the detection resistor 401 via the contact hole 93H. Although not shown, the wiring portion 93b is also electrically connected to the detection resistor 401 via the contact hole 93H. The contact hole 93H may be provided in only one of the wiring portions 93a and 93b. Alternatively, the contact hole 93H may be omitted.

[0056] As shown in Fig. 4, a detection resistor 401 is further provided on the surface of the diaphragm 50 on the -Z direction side. As shown in Fig. 4, in this embodiment, the detection resistor 401 is formed continuously so as to surround the periphery of the first pressure chamber row L1 and the second pressure chamber row L2 in a plan view. More specifically, the detection resistor 401 includes a first extension portion 401A electrically connected to the measurement lead electrode 93, which is the first wiring portion, a second extension portion 401B continuing from the first extension portion 401A, and a third extension portion 401C.

[0057] The first extension portion 401A extends along the X-axis direction, which is the intersecting direction, at a position on one side in the arrangement direction of the multiple pressure chambers 12, specifically on the -Y direction side. In this embodiment, the first extension portion 401A includes a first extension portion 401A1 connected to the wiring portion 93a and a first extension portion 401A2 electrically connected to the wiring portion 93b. The second extension portion 401B extends along the Y-axis direction, which is the arrangement direction. In this embodiment, the second extension portion 401B includes a second extension portion 401B1 continuous with the first extension portion 401A1 and a second extension portion 401B2 continuous with the first extension portion 401A2. The third extension portion 401C extends along the X-axis direction, which is the intersecting direction, at a position on the other side in the arrangement direction of the multiple pressure chambers 12, specifically on the +Y direction side. In this embodiment, the third extension portion 401C is formed continuously from the second extension portion 401B, and electrically connects the second extension portion 401B1 and the second extension portion 401B2.

[0058] As shown in FIGS. 6 and 7 as examples, the detection resistor 401 is disposed so as to pass near the ink flow path in the pressure chamber substrate 10. In this embodiment, the second extension portion 401B of the detection resistor 401 is disposed so as to pass on the −Z direction side of the diaphragm 50 with respect to the throttle portion 13 near each pressure chamber 12. In the example of FIG. 4, the second extension portion 401B of the detection resistor 401 is formed in a so-called meandering pattern, which moves back and forth multiple times along the arrangement direction. By configuring the second extension portion 401B, which is likely to contribute to temperature detection, in this manner, the detection accuracy of the ink temperature in the pressure chamber 12 by the detection resistor 401 can be improved. However, the second extension portion 401B of the detection resistor 401 may be formed in a meandering pattern, which moves back and forth multiple times along the intersecting direction instead of the arrangement direction, or may be formed in any shape, such as a straight line, instead of the meandering pattern.

[0059] The material of the detection resistor 401 is a material whose electrical resistance value is temperature dependent, and can be, for example, gold (Au), platinum (Pt), iridium (Ir), aluminum (Al), copper (Cu), titanium (Ti), tungsten (W), nickel (Ni), chromium (Cr), etc. Of these, platinum (Pt) is suitable for use as the material of the detection resistor 401 from the viewpoints of its large temperature-dependent change in electrical resistance, stability, and high accuracy.

[0060] 7, in this embodiment, the detection resistor 401 is formed in the same layer as the first electrode 60 in the stacking direction, and is electrically discontinuous with the first electrode 60. In this embodiment, the detection resistor 401 is formed together with the first electrode 60 in the process of forming the first electrode 60. That is, the detection resistor 401 is formed of platinum (Pt), which is the same material as the first electrode 60, and the thickness of the detection resistor 401 is about 80 nanometers, the same as the first electrode 60. However, this is not limiting, and the detection resistor 401 may be formed separately from the first electrode 60, or may be formed together with a layer different from that of the first electrode 60.

[0061] From the viewpoint of preventing a decrease in the accuracy of temperature detection, it is preferable to prevent heat radiation from the detection resistor 401. As shown in Fig. 7, in this embodiment, a low thermal conductive layer 402 is further laminated on top of the detection resistor 401. Specifically, the low thermal conductive layer 402 is provided on the surface of the detection resistor 401 opposite to the surface facing the pressure chamber substrate 10, i.e., on the surface on the -Z direction side. The low thermal conductive layer 402 is a layer with lower thermal conductivity than the detection resistor 401.

[0062] As shown in FIG. 8 , the low thermal conductive layer 402 is preferably made of a conductive material such as metal to facilitate electrical connection between the measurement lead electrode 93 and the upper part of the detection resistor 401 via the contact hole 93H. By providing a low thermal conductivity layer on the surface of the detection resistor 401 opposite the surface facing the pressure chamber substrate 10, heat transferred from the ink in the pressure chamber 12 to the detection resistor 401 can be prevented from being dissipated from the surface opposite the surface facing the pressure chamber substrate 10. The low thermal conductive layer 402 is preferably as thick as possible to more reliably prevent heat dissipation from the detection resistor 401. The low thermal conductive layer 402 does not necessarily need to be in contact with the detection resistor 401. For example, an adhesive layer such as iridium (Ir) may be disposed between the detection resistor 401 and the low thermal conductive layer 402 to improve adhesion between the detection resistor 401 and the low thermal conductive layer 402. The low thermal conductive layer 402 can be omitted, and in the following description, unless otherwise specified, the configuration of the low thermal conductive layer 402 will be omitted.

[0063] Fig. 9 is an explanatory diagram showing an example of the displacement characteristics of the piezoelectric body 70. Fig. 9 shows a graph with the horizontal axis representing voltage and the vertical axis representing displacement of the piezoelectric body 70. As shown in Fig. 9, the displacement of the piezoelectric body 70 forms a predetermined hysteresis loop with respect to changes in voltage due to the so-called inverse piezoelectric effect.

[0064] Graph GF1, shown by a dashed line in Figure 9, represents the displacement characteristics of the piezoelectric body 70 immediately after manufacture. In the piezoelectric body 70 immediately after manufacture, the head control unit 520 adjusts the drive voltage applied to the first electrode 60, so that a voltage in the range RG1, equal to or greater than voltage Vc1 and equal to or less than voltage Vc2, is applied to the piezoelectric body 70. As a result, the piezoelectric body 70 immediately after manufacture generates a displacement amount from plot P1 to plot P2, as shown by solid line D1 in graph GF1. In the piezoelectric body 70, a phenomenon in which the hysteresis loop shifts to the lower voltage side can occur due to certain conditions, such as an increase in the number of times it is driven.

[0065] The solid line graph GF2 in FIG. 9 shows an example of the displacement characteristics of piezoelectric body 70 after it has been manufactured, after it has been subjected to certain conditions. In piezoelectric body 70 after the change in displacement characteristics, the hysteresis loop shifts toward lower voltages by a voltage ΔVC. In this case, applying a voltage in the range RG1 to piezoelectric body 70 will not adequately achieve the displacement characteristics of piezoelectric body 70. Therefore, by applying a voltage in the range RG2 to piezoelectric body 70, which is equal to or greater than voltage Vc3, which is lower than voltage Vc1 by a voltage ΔVC, and equal to or less than voltage Vc4, which is lower than voltage Vc2 by a voltage ΔVC, as shown by the thick solid line D2 in graph GF2, it is possible to generate a displacement from plot P3 to plot P4, which is approximately the same as that of piezoelectric body 70 after it has been manufactured.

[0066] FIG. 10 is an explanatory diagram showing the results of an experiment investigating factors that affect the voltage ΔVC. The vertical axis of FIG. 10 represents the voltage ΔVC, and the horizontal axis represents the cumulative number of times the piezoelectric element 300 is driven. In FIG. 10, the unit of the voltage ΔVC is "V," and the unit of the cumulative number of times is "billion times." The "cumulative number of times of driving" refers to the cumulative number of times a driving voltage is applied to the piezoelectric body 70. Information related to the cumulative number of times of driving may be used instead of the cumulative number of times of driving. The "information related to the cumulative number of times of driving" refers to information that indirectly indicates the cumulative number of times of driving and is information from which the cumulative number of times of driving can be derived. The cumulative number of times of driving may include, for example, the driving time of the piezoelectric element 300, the cumulative total time a driving voltage is applied to the piezoelectric body 70, the cumulative total time a reference voltage is applied to the piezoelectric body 70, the number of times ink is ejected from the liquid ejection head 510, and the like.

[0067] In this embodiment, the relationship between the cumulative number of drives and the voltage ΔVC was further investigated for each temperature of the piezoelectric body 70. In the graph of Fig. 10, the test results for the temperature of the piezoelectric body 70 at 25°C are plotted as circles, the test results at 60°C are plotted as triangles, and the test results at 70°C are plotted as squares. Note that the temperature of the piezoelectric body 70 was determined using the detection results of the detection resistor 401.

[0068] As shown in FIG. 10, the following experimental results (1) to (3) were obtained. (1) As the cumulative number of driving times increases, the absolute value of the voltage ΔVC increases, and the amount of shift of the hysteresis loop to the low voltage side increases. (2) When the temperature of the piezoelectric body 70 increases, the absolute value of the voltage ΔVC increases, and the amount of shift of the hysteresis loop to the low voltage side increases. (3) When the cumulative number of times of driving increases to or exceeds a predetermined number, the amount of change in the voltage ΔVC becomes gentler. From the above experimental results, the inventors have newly discovered that it is possible to obtain a displacement amount equivalent to that of the piezoelectric body 70 immediately after manufacture by correcting the drive waveform applied to the piezoelectric body 70 by a voltage ΔVC corresponding to the cumulative number of drives and the temperature of the piezoelectric body 70. By reducing the influence of changes in the displacement characteristics of the piezoelectric body 70 based on the cumulative number of drives and the temperature of the piezoelectric body 70, it is possible to prevent a decrease in the ink ejection performance of the liquid ejection device 500.

[0069] FIG. 11 is an explanatory diagram showing an example of a drive waveform supplied to the piezoelectric element 70. FIG. 11 shows two drive waveforms, with the horizontal axis representing time and the vertical axis representing voltage. The drive waveform input to the piezoelectric element 70 is determined by the voltage difference between the drive voltage applied to the piezoelectric element 70 and a reference voltage. In this embodiment, an arbitrary drive waveform is generated by adjusting the drive voltage over time relative to a predetermined fixed reference voltage. The dashed line graph GF3 shows an example of a drive waveform supplied to the piezoelectric element 70 immediately after manufacture. The drive waveform of graph GF3 is formed using a voltage within the aforementioned range RG1. The solid line graph GF4 shows a drive waveform corrected by shifting the drive waveform of graph GF3 toward a lower voltage by a voltage ΔVc. The drive waveform can be shifted toward a lower voltage by adjusting the voltage difference between the drive voltage and the reference voltage.

[0070] FIG. 12 is an explanatory diagram conceptually illustrating a drive waveform correction method performed by the liquid ejection device 500 according to the first embodiment. In this embodiment, the reference voltage Vbs1 applied to the second electrode 80 is kept constant without correction, and the drive voltage applied to the first electrode 60 is corrected to shift the drive waveform toward a lower voltage. Therefore, the reference voltage Vbs1 is equal before and after correction. In contrast, the drive voltage Vcom1 before correction is corrected toward a lower voltage by a voltage ΔVcom to create a drive voltage Vcom2, thereby obtaining the corrected drive waveform shown by graph GF4 in FIG. 11. The voltage ΔVcom is approximately equal to the voltage ΔVc shown in FIG. 11. In this embodiment, the waveforms of the drive voltages Vcom1 and Vcom2 are approximately identical, and the difference between the maximum and minimum values ​​of the drive voltage Vcom1 is equal to the difference between the maximum and minimum values ​​of the corrected drive voltage Vcom2.

[0071] The voltage difference ΔVA shown in FIG. 12 refers to the voltage difference between the reference voltage Vbs1 and the drive voltage Vcom1 for forming the drive waveform applied to the piezoelectric element 70 immediately after manufacture, i.e., the drive waveform before correction, shown by graph GF3 in FIG. 11. The voltage difference between the reference voltage Vbs1 and the drive voltage Vcom1 for forming the drive waveform applied to the piezoelectric element 70 immediately after manufacture is the initial voltage difference and is also referred to as the "reference voltage difference" in this disclosure. The voltage difference ΔVB is the voltage difference for forming the corrected drive waveform, which is shifted to the lower voltage side. The voltage difference ΔVB is equal to the sum of the reference voltage difference and the voltage ΔVcom serving as the correction value.

[0072] FIG. 13 is an explanatory diagram showing an example of a correction table for a drive waveform. The correction table 622A shown in FIG. 13 is an example of the correction table 622 stored in advance in the storage unit 620 of the server 600. In this embodiment, the correction table 622A specifies a correction value for the drive voltage corresponding to each condition, such as the cumulative number of drives and the temperature of the piezoelectric element 70. The correction table 622A was experimentally created in advance using the test results shown in FIG. 10 . Note that in the correction table 622A and a correction table 622B described later, the temperature detected by the detection resistor 401 is used as the temperature of the piezoelectric element 70. The correction value specified in the correction table 622A corresponds to the voltage ΔVcom shown in FIG. 12. Therefore, a correction value of zero means that an initial drive waveform based on the reference voltage difference is formed.

[0073] As shown in FIG. 13 , when the cumulative number of drives is less than 100 million, the voltage difference between the drive voltage and the reference voltage is the reference voltage difference, i.e., the correction value is zero, and the piezoelectric element 70 is set to be driven with an initial drive waveform. When the cumulative number of drives is a first number, the voltage difference between the drive voltage and the reference voltage is set to a first value. When the cumulative number of drives is a second number, which is greater than the first number, the voltage difference between the drive voltage and the reference voltage is set to a value smaller than the first value. The set value of the voltage difference between the drive voltage and the reference voltage at the second number is also referred to as a “second value.” In the example of FIG. 13 , when the first number is less than 100 million, for example, the first value is the reference voltage difference. When the second number is greater than or equal to 5 billion and less than 7 billion, for example, the second value is “reference voltage difference −0.10.”

[0074] Furthermore, when the voltage value of the drive voltage when the cumulative number of drives is a first number is defined as a "first drive voltage value," the drive voltage is set to a value smaller than the first drive voltage value when the cumulative number of drives is a second number, which is greater than the first number. The drive voltage at the second number is also referred to as a "second drive voltage value." In other words, in correction table 622A, as the cumulative number of drives increases, the absolute value of the correction value increases and the voltage value of the drive voltage decreases. In this case, the reference voltage when the cumulative number of drives is the first number and the reference voltage when the cumulative number of drives is the second number are equal. Therefore, as the cumulative number of drives increases, the voltage difference between the drive voltage and the reference voltage increases, and as a result, the drive waveform shifts to a lower voltage side. Note that the shape of the drive waveform when the cumulative number of drives is the first number and the shape of the drive waveform when the cumulative number of drives is the second number are equal. That is, the difference between the maximum and minimum values ​​of the drive voltage when the cumulative number of times of driving is the first number is equal to the difference between the maximum and minimum values ​​of the drive voltage when the cumulative number of times of driving is the second number.

[0075] The voltage calculation unit 612 determines the drive voltage using a correction table 622A stored in the storage unit 620. Specifically, the voltage calculation unit 612 of the server 600 acquires the temperature detected by the detection resistor 401 and the cumulative number of drives acquired by the head control unit 520 (as an acquisition unit) from the liquid ejection device 500 via the communication unit 586. The voltage calculation unit 612 uses the correction table 622A to derive a drive voltage with a correction value corresponding to the acquired temperature and cumulative number of drives, and transmits the drive voltage to the liquid ejection device 500 via the communication unit 630. The head control unit 520 of the liquid ejection device 500 acquires the corrected drive voltage from the server 600 via the communication unit 586 and applies it to the first electrode 60. As a result, the corrected drive waveform can be supplied to the piezoelectric element 70.

[0076] In this embodiment, the voltage calculation unit 612 performs correction using the correction table 622A and also using the temperature detection result by the detection resistor 401. For example, when the cumulative number of times of driving is a first number and the temperature detected by the detection resistor 401 is an arbitrary first temperature, the voltage difference between the driving voltage and the reference voltage is set to a third value. When the temperature detected by the detection resistor 401 is a second temperature higher than the first temperature, the voltage difference between the driving voltage and the reference voltage is set to a fourth value equal to or greater than the third value. In the example of FIG. 13 , when the first number of times is less than 100 million and the first temperature is 30° C. or less, the correction value is zero. That is, the voltage difference between the driving voltage and the reference voltage is set to a reference voltage difference, which is an example of the third value. Furthermore, when the temperature detected by the detection resistor 401 is a second temperature higher than the first temperature, for example, 60° C., the correction value is the same as the third value, zero, and the voltage difference between the driving voltage and the reference voltage is set to a reference voltage difference, which is an example of the fourth value. The fourth value can also be set to be greater than the third value.

[0077] Furthermore, when the cumulative number of times of actuation is a second number greater than the first number, and the temperature detected by the detection resistor 401 is an arbitrary first temperature, the voltage difference between the drive voltage and the reference voltage is set to a fifth value. If the temperature detected by the detection resistor 401 is a second temperature higher than the first temperature, the voltage difference between the drive voltage and the reference voltage is set to a sixth value greater than the fifth value. In the example of FIG. 13 , when the second number of times is equal to or greater than 5 billion but less than 7 billion, and the first temperature is 30° C. or less, the correction value is “−0.10,” and the voltage difference between the drive voltage and the reference voltage is set to “reference voltage difference −0.10,” an example of the fifth value. On the other hand, when the temperature detected by the detection resistor 401 is a second temperature, for example, 60° C., the correction value is −0.18, and the voltage difference between the drive voltage and the reference voltage is set to “reference voltage difference −0.18,” an example of the sixth value. In this way, the correction table 622A is set so that as the temperature of the detection resistor 401 increases, the absolute value of the correction value increases and the voltage value of the drive voltage decreases.

[0078] As described above, the liquid ejection device 500 of this embodiment comprises a pressure chamber substrate 10 having a plurality of pressure chambers 12, a first electrode 60 as an individual electrode provided individually for each of the plurality of pressure chambers 12, a second electrode 80 as a common electrode provided in common to each of the plurality of pressure chambers 12, a piezoelectric element 70 provided between the individual electrode and the common electrode for applying pressure to the ink in the pressure chambers 12, and an individual lead electrode 91 and a common lead electrode 92 as drive wiring electrically connected to the individual electrode and the common electrode, a control unit 580 that controls the ejection operation of the liquid ejection head 510 by applying a drive voltage to the individual electrode and a reference voltage to the common electrode to drive the piezoelectric element 70, and a head control unit 520 as an acquisition unit that acquires information regarding the cumulative number of times the piezoelectric element 70 has been driven. When the cumulative number of times of driving is a first number, the control unit 580 drives the piezoelectric body so that the voltage difference between the drive voltage and the reference voltage is a first value, and when the cumulative number of times of driving is a second number greater than the first number, the control unit 580 drives the piezoelectric body so that the voltage difference is a second value smaller than the first value. According to this embodiment of the liquid ejection device 500, as the cumulative number of times of driving increases, the voltage difference between the drive voltage and the reference voltage is corrected to increase, thereby suppressing a decrease in ejection performance associated with the displacement characteristics of the piezoelectric body 70 due to an increase in the cumulative number of times of driving. This eliminates the need for aging treatment of the piezoelectric body 70, thereby extending the life of the piezoelectric element 300.

[0079] According to the liquid ejection device 500 of this embodiment, the control unit 580 drives the piezoelectric body 70 so that the drive voltage becomes a first drive voltage value when the cumulative number of drives is a first number, and drives the piezoelectric body 70 so that the drive voltage becomes a second drive voltage value that is smaller than the first drive voltage value when the cumulative number of drives is a second number. According to the liquid ejection device 500 of this embodiment, the drive waveform can be shifted to a lower voltage side by the simple method of correcting the drive voltage, and a decrease in ejection performance can be suppressed.

[0080] According to the liquid ejection device 500 of this embodiment, the control unit 580 drives the piezoelectric element 70 so that the reference voltage when the cumulative number of times of driving is the first number and the reference voltage when the cumulative number of times of driving is the second number are equal to each other. According to the liquid ejection device 500 of this embodiment, when the drive waveform is shifted to the lower voltage side, it is possible to suppress the deterioration of ejection performance by a simpler method without correcting the reference voltage.

[0081] According to the liquid ejection device 500 of this embodiment, the control unit 580 drives the piezoelectric element 70 so that the difference between the maximum and minimum values ​​of the drive voltage when the cumulative number of drives is the first number is equal to the difference between the maximum and minimum values ​​of the drive voltage when the cumulative number of drives is the second number. According to the liquid ejection device 500 of this form, it is possible to maintain the shape of the drive waveform before and after correction, and to suppress changes in the amount of ink ejected before and after correction.

[0082] The liquid ejection device 500 of this embodiment further includes a detection resistor 401 for detecting the temperature of ink in the pressure chamber 12. When the cumulative number of drives is the first number, and if the temperature detected by the detection resistor 401 is the first temperature, the control unit 580 drives the piezoelectric body 70 so that the voltage difference becomes a third value. When the temperature detected by the detection resistor 401 is a second temperature higher than the first temperature, the control unit 580 drives the piezoelectric body 70 so that the voltage difference becomes a fourth value greater than the third value. When the cumulative number of drives is the second number, and if the temperature detected by the detection resistor 401 is the first temperature, the control unit 580 drives the piezoelectric body 70 so that the voltage difference becomes a fifth value. When the temperature detected by the detection resistor 401 is the second temperature, the control unit 580 drives the piezoelectric body 70 so that the voltage difference becomes a sixth value greater than the fifth value. According to this form of liquid ejection device 500, the voltage difference between the driving voltage and the reference voltage is further corrected according to the temperature of the piezoelectric body 70, thereby reducing the effect of changes in displacement characteristics due to temperature changes in the piezoelectric body 70 and further suppressing deterioration in ejection performance.

[0083] According to the liquid ejection device 500 of this embodiment, the detection resistor 401 is formed from the same material as the first electrode 60 serving as an individual electrode. The detection resistor 401 can be formed in the process of forming the first electrode 60, which simplifies the manufacturing process and reduces costs.

[0084] The liquid ejection device 500 of this embodiment further includes a transmission unit that transmits to the server 600 the temperature detected by the detection resistor 401 and the cumulative number of drives acquired by the head control unit 520 as an acquisition unit, and a communication unit 586 that functions as a reception unit that receives from the server 600 the drive voltage and reference voltage corresponding to the temperature and cumulative number of drives transmitted by the transmission unit. According to the liquid ejection device 500 of this form, the function of calculating the correction value for the drive waveform can be provided outside the liquid ejection device 500, thereby simplifying the liquid ejection device 500.

[0085] B. Second embodiment: FIG. 14 is an explanatory diagram conceptually illustrating a drive waveform correction method performed by a liquid ejection device 500 according to the second embodiment. In this embodiment, the drive voltage Vcom1 applied to the first electrode 60 is kept constant without correction, and the reference voltage applied to the second electrode 80 is corrected to shift the drive waveform toward a lower voltage. Therefore, the drive voltage Vcom1 is equal before and after correction. In contrast, as shown in FIG. 14, by applying a reference voltage Vbs2 obtained by correcting the pre-correction reference voltage Vbs1 by a voltage ΔVbs toward the higher voltage side, the corrected drive waveform shown by graph GF4 in FIG. 11 can be obtained. The voltage ΔVbs is approximately equal to the voltage ΔVc shown in FIG. 11.

[0086] The voltage difference ΔVA shown in FIG. 14 is the difference between the reference voltage Vbs1 and the drive voltage Vcom1 used to form the drive waveform applied to the piezoelectric element 70 immediately after manufacture, shown by graph GF3 in FIG. 11, i.e., the drive waveform before correction. The voltage difference ΔVB is the voltage difference used to form the drive waveform after correction, which has been shifted to a lower voltage. In this way, the drive waveform may be shifted to a lower voltage by correcting the reference voltage instead of the drive voltage to a higher voltage. This configuration of the liquid ejection device 500 can also achieve the same effects as the first embodiment.

[0087] 15 is an explanatory diagram showing a second example of a correction table for a drive waveform. Correction table 622B defines correction values ​​for the reference voltage corresponding to each condition, such as the cumulative number of drives and the temperature of the piezoelectric element 70. The method for setting correction table 622B is the same as the method for setting correction table 622A described above, and the absolute values ​​of each correction value in correction table 622B match the absolute values ​​of each correction value in correction table 622A. The correction values ​​defined in correction table 622B correspond to the voltage ΔVbs shown in FIG. 14.

[0088] As shown in FIG. 15 , in correction table 622B, when the cumulative number of driving attempts is a first number, the reference voltage is set to a value greater than the first reference voltage when the cumulative number of driving attempts is a second number, which is greater than the first number. The reference voltage at the second number is also referred to as the second reference voltage. In other words, in correction table 622B, as the cumulative number of driving attempts increases, the absolute value of the correction value increases and the reference voltage value increases. In this case, the drive voltage when the cumulative number of driving attempts is the first number and the drive voltage when the cumulative number of driving attempts is the second number are equal. Therefore, as the cumulative number of driving attempts increases, the voltage difference between the drive voltage and the reference voltage increases, and as a result, the drive waveform shifts to a lower voltage side. Note that the shape of the drive waveform when the cumulative number of driving attempts is the first number and the shape of the drive waveform when the cumulative number of driving attempts is the second number are equal. That is, the difference between the maximum and minimum values ​​of the reference voltage when the cumulative number of times of driving is the first number is equal to the difference between the maximum and minimum values ​​of the reference voltage when the cumulative number of times of driving is the second number.

[0089] According to the liquid ejection device 500 of this embodiment, the control unit 580 drives the piezoelectric body 70 so that the reference voltage becomes a first reference voltage value when the cumulative number of times of driving is a first number, and drives the piezoelectric body 70 so that the reference voltage becomes a second reference voltage value that is greater than the first reference voltage value when the cumulative number of times of driving is a second number. According to the liquid ejection device 500 of this embodiment, the drive waveform can be shifted to a lower voltage side by the simple method of correcting the reference voltage, and deterioration of ejection performance can be suppressed.

[0090] According to the liquid ejection device 500 of this embodiment, the control unit 580 drives the piezoelectric body 70 so that the drive voltage when the cumulative number of times of driving is the first number and the drive voltage when the cumulative number of times of driving is the second number are equal to each other. According to the liquid ejection device 500 of this embodiment, when the drive waveform is shifted to the lower voltage side, it is possible to suppress the deterioration of ejection performance by a simpler method without correcting the drive voltage.

[0091] C. Other Embodiments: (C1) In the first embodiment described above, an example was shown in which the second electrode 80 serving as a common electrode is provided above the piezoelectric body 70, and the first electrode 60 serving as an individual electrode is provided below the piezoelectric body 70. However, the common electrode may be a lower electrode provided below the piezoelectric body 70, and the individual electrodes may be upper electrodes provided above the piezoelectric body 70. In this case, it is preferable that the detection resistor 401 is formed using the same material as the lower electrode serving as a common electrode provided below the piezoelectric body 70. This allows the detection resistor 401 to be formed in the process of forming the common electrode, simplifying the manufacturing process and reducing costs.

[0092] (C2) In the first embodiment, the detection resistor 401 is made of platinum (Pt), the same material as the first electrode 60. However, the detection resistor 401 may be made of the same material as the individual electrode, the common electrode, or the drive wiring. For example, the detection resistor 401 may be made of the same material as the second electrode 80, which is a common electrode. According to the liquid ejection device 500 of this embodiment, for example, the detection resistor 401 can be formed in the process of forming the second electrode 80, thereby simplifying the manufacturing process and reducing costs. Furthermore, the detection resistor 401 may be made of the same material as the individual lead electrode 91 and the common lead electrode 92, which are the drive wiring. According to the liquid ejection device 500 of this embodiment, for example, the detection resistor 401 can be formed in the process of forming the individual lead electrode 91 and the common lead electrode 92, thereby simplifying the manufacturing process and reducing costs.

[0093] (C3) In the first embodiment described above, an example was shown in which the correction table 622 and the voltage calculation unit 612 were provided in the server 600. However, the correction table 622 and the voltage calculation unit 612 may be provided in the control unit 580 of the liquid ejection device 500. Furthermore, the functions of the head control unit 520 and the temperature calculation unit 450, as well as the correction table 622 and the voltage calculation unit 612, may be provided in the liquid ejection head 510.

[0094] (C4) In each of the above embodiments, an example was shown in which the liquid ejection device 500 includes the detection resistor 401. However, for example, if there is no need to perform correction based on the temperature of the piezoelectric body 70, the detection resistor 401 may not be included. Also, in each of the above embodiments, an example was shown in which the detection resistor 401 is included near the pressure chamber 12 inside the liquid ejection head 510. However, the detection resistor 401 may be disposed at any position inside the liquid ejection head 510, rather than near the pressure chamber 12. Also, instead of the detection resistor 401 using resistive wiring, the liquid ejection device 500 may be provided with any temperature sensor capable of detecting the temperature of the piezoelectric body 70, or the temperature sensor may be provided outside the liquid ejection head 510.

[0095] D. Other forms: The present disclosure is not limited to the above-described embodiments and can be realized in various configurations without departing from the spirit thereof. For example, the technical features in the embodiments corresponding to the technical features in each aspect described in the Summary of the Invention section can be appropriately replaced or combined to solve some or all of the above-described problems or achieve some or all of the above-described effects. Furthermore, if a technical feature is not described as essential in this specification, it can be appropriately deleted.

[0096] (1) According to one aspect of the present disclosure, there is provided a liquid ejection device. The liquid ejection device includes a liquid ejection head having a pressure chamber substrate with a plurality of pressure chambers, individual electrodes provided individually for the plurality of pressure chambers, a common electrode provided in common to the plurality of pressure chambers, a piezoelectric element provided between the individual electrode and the common electrode for applying pressure to liquid in the pressure chambers, and drive wiring electrically connected to the individual electrode and the common electrode, a control unit that controls the ejection operation of the liquid ejection head by applying a drive voltage to the individual electrode and a reference voltage to the common electrode to drive the piezoelectric element, and an acquisition unit that acquires information regarding the cumulative number of times the piezoelectric element has been driven. When the cumulative number of times the piezoelectric element has been driven is a first number, the control unit drives the piezoelectric element so that a voltage difference between the drive voltage and the reference voltage becomes a first value, and when the cumulative number of times the piezoelectric element has been driven is a second number greater than the first number, the control unit drives the piezoelectric element so that the voltage difference becomes a second value smaller than the first value. According to this type of liquid ejection device, the difference between the drive voltage and the reference voltage is corrected to increase as the cumulative number of drives increases, thereby suppressing the deterioration of ejection performance associated with the displacement characteristics of the piezoelectric element due to an increase in the cumulative number of drives, thereby eliminating the need for aging the piezoelectric element and extending the life of the piezoelectric element.

[0097] (2) In the liquid ejection device of the above aspect, the control unit may drive the piezoelectric element so that the drive voltage has a first drive voltage value when the cumulative number of drives is the first number, and may drive the piezoelectric element so that the drive voltage has a second drive voltage value smaller than the first drive voltage value when the cumulative number of drives is the second number. According to the liquid ejection device of this aspect, the drive waveform can be shifted to a lower voltage side by a simple method of correcting the drive voltage.

[0098] (3) In the liquid ejection device of the above aspect, the control unit may drive the piezoelectric element so that the reference voltage when the cumulative number of times of driving is the first number is equal to the reference voltage when the cumulative number of times of driving is the second number. According to the liquid ejection device of this aspect, when shifting the drive waveform to a lower voltage side, it is possible to suppress a decrease in ejection performance by a simpler method without correcting the reference voltage.

[0099] (4) In the liquid ejection device of the above aspect, the control unit may drive the piezoelectric element so that a difference between a maximum value and a minimum value of the drive voltage when the cumulative number of times of driving is the first number is equal to a difference between a maximum value and a minimum value of the drive voltage when the cumulative number of times of driving is the second number. According to the liquid ejection device of this aspect, it is possible to maintain the shape of the drive waveform before and after correction, and to suppress a change in the amount of ink ejected before and after correction.

[0100] (5) In the liquid ejection device of the above aspect, the control unit may drive the piezoelectric element so that the reference voltage becomes a first reference voltage value when the cumulative number of times of driving is the first number. When the cumulative number of times of driving is the second number, the control unit may drive the piezoelectric element so that the reference voltage becomes a second reference voltage value that is greater than the first reference voltage value. According to the liquid ejection device of this aspect, the drive waveform can be shifted to a lower voltage side by the simple method of correcting the reference voltage, and a decrease in ejection performance can be suppressed.

[0101] (6) In the liquid ejection device of the above aspect, the control unit may drive the piezoelectric element so that the drive voltage when the cumulative number of times of driving is the first number is equal to the drive voltage when the cumulative number of times of driving is the second number. According to the liquid ejection device of this aspect, when the drive waveform is shifted to a lower voltage side, a decrease in ejection performance can be suppressed by a simpler method without correcting the drive voltage.

[0102] (7) The liquid ejection device of the above aspect may further include a detection resistor for detecting the temperature of the liquid in the pressure chamber. When the cumulative number of driving operations is the first number, and if the temperature detected by the detection resistor is a first temperature, the control unit may drive the piezoelectric element so that the voltage difference becomes a third value. When the temperature detected by the detection resistor is a second temperature higher than the first temperature, the control unit may drive the piezoelectric element so that the voltage difference becomes a fourth value equal to or greater than the third value. When the cumulative number of driving operations is the second number, and if the temperature detected by the detection resistor is the first temperature, the control unit may drive the piezoelectric element so that the voltage difference becomes a fifth value. When the temperature detected by the detection resistor is the second temperature, the control unit may drive the piezoelectric element so that the voltage difference becomes a sixth value greater than the fifth value. According to the liquid ejection device of this aspect, the voltage difference between the drive voltage and the reference voltage is further corrected in accordance with the temperature of the piezoelectric element, thereby reducing the effect of changes in displacement characteristics associated with temperature changes in the piezoelectric element and further suppressing deterioration in ejection performance.

[0103] (8) In the liquid ejection device of the above aspect, the detection resistor may be formed from the same material as any one of the individual electrodes, the common electrode, and the drive wiring. With this aspect of the liquid ejection device, the detection resistor 401 can be formed in the same process as any one of the individual electrodes, the common electrode, and the drive wiring, thereby simplifying the manufacturing process and reducing costs.

[0104] (9) In the liquid ejection device of the above aspect, the common electrode may be provided above the piezoelectric body, and the individual electrodes may be provided below the piezoelectric body.

[0105] (10) The liquid ejection device of the above aspect may further include a transmitter that transmits the cumulative number of times of driving acquired by the acquirer to a server, and a receiver that receives from the server the driving voltage and the reference voltage corresponding to the cumulative number of times of driving acquired by the transmitter. According to this aspect of the liquid ejection device, a function for calculating a correction value for the driving waveform can be provided externally to the liquid ejection device, thereby simplifying the liquid ejection device.

[0106] The present disclosure can also be realized in various forms other than a liquid ejection device, such as a liquid ejection system, a method for manufacturing a liquid ejection device, or a method for controlling a liquid ejection device.

[0107] The present disclosure is not limited to inkjet systems, but can also be applied to any liquid ejection device that ejects liquid other than ink and the liquid ejection heads used in such liquid ejection devices. For example, the present disclosure can be applied to various liquid ejection devices and their liquid ejection heads, such as those listed below. (1) Image recording devices such as facsimile machines. (2) A color material ejection device used in the manufacture of color filters for image display devices such as liquid crystal displays. (3) Electrode material ejection equipment used to form electrodes for organic EL (Electro Luminescence) displays, surface-emitting displays (Field Emission Displays, FEDs), etc. (4) A liquid ejection device that ejects a liquid containing a bioorganic substance used in biochip manufacturing. (5) A sample dispensing device as a precision pipette. (6) Lubricating oil discharge device. (7) A resin liquid ejection device. (8) A liquid ejection device that ejects lubricating oil precisely onto precision machinery such as watches and cameras. (9) A liquid ejection device that ejects transparent resin liquid, such as ultraviolet curable resin liquid, onto a substrate to form minute hemispherical lenses (optical lenses) used in optical communication elements, etc. (10) A liquid ejection device that ejects an acidic or alkaline etching liquid for etching a substrate or the like. (11) A liquid ejection device having a liquid consuming head that ejects any other minute amount of liquid droplets.

[0108] A "liquid" can be any material that can be consumed by a liquid ejection device. For example, a "liquid" can be any material in a liquid phase, and includes materials with high or low viscosity, as well as liquid materials such as sols, gel water, other inorganic solvents, organic solvents, solutions, liquid resins, and liquid metals (metal melts). Furthermore, not only liquids as a state of matter, but also particles of functional materials made of solids such as pigments and metal particles dissolved, dispersed, or mixed in a solvent are also included in the term "liquid." Representative examples of liquids include the following: (1) The main agent and hardener of adhesives. (2) Base paints and thinners, and clear paints and thinners. (3) A main solvent and a dilution solvent containing cells for the cell ink. (4) Metallic leaf pigment dispersion and dilution solvent for ink (metallic ink) that exhibits a metallic luster. (5) Gasoline, diesel and biofuels for vehicles. (6) The active ingredient and protective ingredient of a drug. (7) Phosphors and encapsulants for light-emitting diodes (LEDs). [Explanation of symbols]

[0109] 10...pressure chamber substrate, 12...pressure chamber, 13...throttle portion, 14...pressure chamber supply path, 15...communication plate, 16...nozzle communication path, 17...first manifold portion, 18...second manifold portion, 19...supply communication path, 20...nozzle plate, 21...nozzle, 30...sealing substrate, 30T...ceiling portion, 30W...wall portion, 31...holding portion, 32...through hole, 39...adhesive, 40...case member, 41...accommodation portion, 42...third manifold portion, 43...connection port, 44...supply port, 45...compliance substrate, 46...sealing film, 47...fixed substrate, 48...opening, 49...compliance portion, 50...diaphragm, 55...elastic film, 56...insulating film, 60...first electrode, 60b...end portion, 70...piezoelectric body, 70H...through hole, 70a, 70b...end portion, 80...second electrode, 80b...end portion, 85...wiring portion, 91...individual lead electrode, 92...common lead electrode, 92a, 92b...extension portion, 93...measurement lead electrode, 93H...contact hole, 93a, 93b...wiring portion, 96...wiring portion, 100...manifold, 120...relay substrate, 121...integrated circuit, 300...piezoelectric element, 401...detection resistor, 401A, 401A1, 401A2...first extension portion, 401B, 401B1, 401B2...second extension portion, 401C...third extension portion, 402...low thermal conductive layer, 430...current application circuit, 440...voltage detection circuit, 450...temperature calculation unit, 500...liquid ejection device, 510...liquid ejection head, 520...head control unit, 550...ink tank, 552...tube, 560...transport mechanism, 562...transport roller, 564...transport roller head, 566...transport motor, 570...movement mechanism, 572...carriage, 574...transport belt, 576...movement motor, 577...pulley, 580...control unit, 582...CPU, 584...storage unit, 586...communication unit, 600...server, 610...CPU, 612...voltage calculation unit, 620...storage unit, 622, 622A, 622B...correction table, 630...communication unit, 700...liquid ejection system, INT...Internet, L1...first pressure chamber row, L2...second pressure chamber row, P...printing paper

Claims

1. A liquid ejection device, a pressure chamber substrate having a plurality of pressure chambers; individual electrodes provided for the plurality of pressure chambers; a common electrode provided in common to the plurality of pressure chambers; the individual electrodes and the common electrode; a piezoelectric element for applying pressure to the liquid in the pressure chamber, and a liquid ejection head having an electrode and a drive wiring electrically connected to the common electrode; A drive voltage is applied to the individual electrodes, and a reference voltage is applied to the common electrode to drive the piezoelectric element. a control unit that controls the ejection operation of the liquid ejection head by operating the control unit; an acquisition unit that acquires information regarding the cumulative number of times the piezoelectric body is driven; a detection resistor for detecting the temperature of the liquid in the pressure chamber; Equipped with When the cumulative number of times of driving is a first number of times and the temperature is a first temperature, the control unit The voltage difference between the driving voltage and the reference voltage is a first voltage difference, and the cumulative number of driving times is When the second number of times is greater than the first number of times and the temperature is the first temperature, The difference becomes a second voltage difference that is smaller than the first voltage difference by the absolute value of the first correction value, When the number of times of operation is the first number of times and the temperature is a second temperature higher than the first temperature, the voltage difference is a third voltage difference, the cumulative number of times of driving is the second number of times, and the temperature is the second temperature, the voltage difference is smaller than the third voltage difference by an absolute value of the second correction value. driving the piezoelectric body so as to have a fourth voltage difference that is smaller by the absolute value of the second correction value is greater than the absolute value of the first correction value; Liquid discharge device.

2. The liquid ejection device according to claim 1 , The control unit When the cumulative number of times of driving is the first number of times, the driving voltage becomes a first driving voltage value. driving the piezoelectric body so as to When the cumulative number of times of driving is the second number of times, the driving voltage is set to the first driving voltage value. driving the piezoelectric body to a second drive voltage value smaller than Liquid discharge device.

3. The liquid ejection device according to claim 2, the control unit determines the reference voltage when the cumulative number of times of driving is the first number of times; and the reference voltage when the cumulative number of times of driving is the second number of times. The piezoelectric element is driven in such a manner that Liquid discharge device.

4. 4. The liquid ejection device according to claim 2, wherein: The control unit controls the maximum driving voltage when the cumulative number of driving times is the first number of times. The difference between the maximum value and the minimum value, and the driving voltage when the cumulative number of times of driving is the second number of times The piezoelectric element is driven so that the differences between the maximum and minimum values ​​of the pressure become equal to each other. Liquid discharge device.

5. The liquid ejection device according to claim 1 , The control unit When the cumulative number of times of driving is the first number of times, the reference voltage becomes a first reference voltage value. driving the piezoelectric body so as to When the cumulative number of times of driving is the second number of times, the reference voltage is set to the first reference voltage value. driving the piezoelectric element to a second reference voltage value greater than Liquid discharge device.

6. The liquid ejection device according to claim 5 , the control unit determines the driving voltage when the cumulative number of driving times is the first number of times; and the driving voltage when the cumulative number of times of driving is the second number of times are equal to each other. The piezoelectric element is driven in such a manner that Liquid discharge device.

7. 7. The liquid ejection device according to claim 1, The detection resistor is made of the same material as any one of the individual electrode, the common electrode, and the drive wiring. It is formed by Liquid discharge device.

8. The liquid ejection device according to any one of claims 1 to 7, the common electrode is provided on the upper part of the piezoelectric body, The individual electrodes are provided below the piezoelectric bodies. Liquid discharge device.

9. 9. The liquid ejection device according to claim 1, a transmission unit that transmits the cumulative number of times of driving acquired by the acquisition unit to a server; 、 The driving voltage and the reference voltage corresponding to the cumulative driving number transmitted by the transmitting unit a receiving unit that receives a voltage from the server; Liquid discharge device.

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