Parts handling equipment

Abstract

Ensure stable operation of the equipment. [Solution] A part processing device according to one aspect of the present disclosure comprises a plurality of work holding sections, each of which is configured to hold a work; a support section that supports the plurality of work holding sections so that they are positioned on a circular orbit; a rotation drive section that rotates the support section around the central axis of the circular orbit; an advance / retract drive section that moves a first work holding section, which is one of the plurality of work holding sections, along a predetermined direction when the first work holding section is positioned at a predetermined position on the circular orbit; a processing unit that performs a predetermined process on the work together with the first work holding section driven by the advance / retract drive section at the predetermined position; a transport fixing mechanism configured to fix each of the plurality of work holding sections to the support section in a releasable state; and an advance / retract fixation mechanism configured to fix the first work holding section, when released from fixation by the transport fixing mechanism, to the advance / retract drive section.

Description

[Technical Field]

[0001] The present disclosure relates to part processing machines. [Background technology]

[0002] Patent Document 1 discloses an electronic component delivery device that adsorbs electronic components attached to a wafer sheet onto a collet. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2019-41007 Summary of the Invention [Problem to be solved by the invention]

[0004] The present disclosure provides a parts processing device that is useful for stable operation of the device. [Means for solving the problem]

[0005] A component processing device according to one aspect of the present disclosure includes a plurality of work holding units, each configured to hold a work; a support unit that supports the plurality of work holding units so that they are positioned on a circular orbit; a rotation drive unit that rotates the support unit around the central axis of the circular orbit; an advance / retract drive unit that moves a first work holding unit, one of the plurality of work holding units, along a predetermined direction when the first work holding unit is positioned at a predetermined position on the circular orbit; a processing unit that performs a predetermined process on the work together with the first work holding unit driven by the advance / retract drive unit at the predetermined position; a transport fixing mechanism configured to fix each of the plurality of work holding units to the support unit in a releasable state; and an advance / retract fixation mechanism configured to fix the first work holding unit, when released from fixation by the transport fixing mechanism, to the advance / retract drive unit. [Effects of the Invention]

[0006] According to the present disclosure, a component processing device useful for stable operation of the device is provided. [Brief explanation of the drawings]

[0007] [Figure 1] FIG. 1 is a plan view illustrating a component processing apparatus. [Figure 2] FIG. 2 is a side view schematically illustrating the component processing device. [Figure 3] FIG. 3 is an enlarged side view of a portion of the component processing device shown in FIG. [Figure 4] 4 is an enlarged side view of a portion of the component processing device shown in FIG. 2. FIG. [Figure 5] FIG. 5 is a side view schematically illustrating the component processing device. [Figure 6] FIG. 6 is an enlarged side view of a portion of the component processing device shown in FIG. [Figure 7] 7(a) and 7(b) are enlarged side views illustrating a portion of the component processing device shown in FIG. [Figure 8] FIG. 8 is a block diagram illustrating an example of the hardware configuration of the controller. [Figure 9] FIG. 9 is a flowchart illustrating a process flow executed by the controller at the time of pickup. [Figure 10] FIG. 10 is a graph showing a schematic example of the change over time in the position and load value of each member during pickup. [Figure 11] FIG. 11 is a flowchart illustrating a process flow executed by the controller at the time of pasting. [Figure 12] FIG. 12 is a graph showing a schematic example of the change over time in the position of the suction part and the load value during attachment. [Figure 13] 13(a) and 13(b) are schematic diagrams illustrating the state of each member during pickup. [Figure 14] 14(a) and 14(b) are schematic diagrams illustrating the state of each member during pickup. [Figure 15] FIG. 15 is a flowchart illustrating a process flow executed by the controller at the time of pickup. DETAILED DESCRIPTION OF THE INVENTION

[0008] An embodiment will be described below with reference to the drawings. In the description, identical elements or elements having identical functions are given the same reference numerals, and redundant description will be omitted. Some of the drawings show a Cartesian coordinate system defined by the X-axis, Y-axis, and Z-axis. In the following embodiment, the Z-axis corresponds to the vertical direction, and the X-axis and Y-axis correspond to the horizontal direction. In addition, some elements are omitted in some of the drawings to make it easier to understand the device configuration.

[0009] [Parts handling equipment] FIG. 1 is a schematic plan view (top view) of a component processing device according to an embodiment, and FIG. 2 is a schematic side view of the component processing device according to an embodiment. The component processing device 1 shown in FIGS. 1 and 2 is a device that performs a predetermined process on a workpiece to be processed (hereinafter referred to as "workpiece W"). The component processing device 1 is, for example, a die sorter. The component processing device 1 may also be a mounter or bonder that mounts the workpiece W on a printed circuit board. Below, the contents of the present disclosure will be explained using an example in which the component processing device 1 is a die sorter. The component processing device 1 may transport the workpiece W, classify it into non-defective products and defective products, and then store the workpiece W in a storage member. The component processing device 1 may also inspect the workpiece W to classify it into non-defective products and defective products.

[0010] The component processing device 1 may store only the workpieces W that have been determined to be non-defective by inspection in a storage member, or may store the workpieces W in different storage members depending on the classification results of the inspection. The component processing device 1 may store the workpieces W in a storage member in a state where they can be removed. In one example, after being stored in a storage member in the component processing device 1, the workpieces W are removed from the storage member and subjected to another process in a device other than the component processing device 1. The inspections performed by the component processing device 1 include, for example, at least one of a visual inspection and an electrical characteristic inspection. In addition to inspecting the workpieces W, the component processing device 1 may also perform marking. The storage member that stores the workpieces W after inspection by the component processing device 1 is, for example, a carrier tape, a tray, or a sheet to which the workpieces W can be adhesively attached.

[0011] The workpiece W processed by the component processing device 1 is an electronic component. The type of workpiece W (electronic component) is not limited, and specific examples of the workpiece W include passive components such as resistors, capacitors, and inductors, active components such as transistors, diodes, and integrated circuits, LEDs, and sensors that detect physical quantities. The workpiece W may be configured by combining two or more types of components. The electronic component as the workpiece W may be a semiconductor component (an electronic component using a semiconductor material). The workpiece W may also be a component that is formed in a pre-process of semiconductor manufacturing and then separated into individual components by dicing or the like.

[0012] When the component processing device 1 is a die sorter, it operates at a higher speed than when it functions as a mounter or bonder. In other words, when it functions as a die sorter, the component processing device 1 processes a larger number of workpieces per unit time than when it functions as a mounter or bonder. As shown in FIG. 1 , the component processing device 1 includes, for example, a rotary transport unit 10, multiple processing units 40, multiple load sensors 90, and a controller 100.

[0013] [Rotary conveying unit] The rotary conveying unit 10 is configured to convey a workpiece W along a circular orbit CR. The workpiece W to be conveyed may have principal surfaces Wa and Wb facing opposite directions (see FIG. 3). Each of the principal surfaces Wa and Wb may be rectangular. The rotary conveying unit 10 includes, for example, a support unit 12, multiple workpiece holders 14, a rotation drive unit 16, and one or more forward / backward drive units 18.

[0014] The support unit 12 is configured to support a plurality of workpiece holding units 14. The support unit 12 supports the plurality of workpiece holding units 14 so that each workpiece holding unit 14 is positioned on a circular orbit CR. The support unit 12 is provided so as to be rotatable around a central axis Ax of the circular orbit CR. The circular orbit CR may be a horizontal circular orbit, and the central axis Ax may be a vertical axis (see also FIG. 2). The support unit 12 is, for example, a turntable.

[0015] The multiple workpiece holding parts 14 are arranged at equal intervals around a circumference centered on the central axis Ax and are fixed to the support part 12. Each of the multiple workpiece holding parts 14 is configured to hold a workpiece W and is provided so as to be able to move forward and backward. At least a portion of each workpiece holding part 14 is able to move forward and backward, for example, in the radial direction of the circular orbit CR. The workpiece holding part 14 may hold the workpiece W in any manner. Specific examples of the manner in which the workpiece holding part 14 holds the workpiece W include vacuum suction, electrostatic suction, and gripping.

[0016] The workpiece holding unit 14 may vacuum-suck either of the main surfaces Wa, Wb from one radial side of the circular orbit CR. When the workpiece holding unit 14 holds the workpiece W, the workpiece holding unit 14 and the workpiece W are aligned in the radial direction of the circular orbit CR. In other words, the workpiece holding unit 14 holds the workpiece W so that the workpiece holding unit 14 and the workpiece W are aligned in the radial direction (holding direction) of the circular orbit CR.

[0017] The rotation drive unit 16 is configured to rotate the support unit 12 around the central axis Ax. The rotation drive unit 16 rotates the support unit 12 around the central axis Ax by a direct drive without using gears, using a power source such as an electric motor. In FIG. 1, the direction (orientation) in which the support unit 12 is rotated by the rotation drive unit 16 is indicated by an arrow marked "DR." As the support unit 12 rotates, the multiple workpiece holders 14 move along a horizontal circular orbit CR centered on the central axis Ax. As a result, the workpieces W held by the workpiece holders 14 are transported along the circular orbit CR.

[0018] The rotation drive unit 16 is controlled by the controller 100 so as to repeatedly rotate and stop the support unit 12 at an angular pitch (angular pitch around the central axis Ax) between adjacent workpiece holders 14. Hereinafter, when the rotation drive unit 16 stops the support unit 12, the multiple positions at which the portions of the multiple workpiece holders 14 that hold the workpiece W (for example, the tips of the multiple suction units 22, which will be described later) are located are referred to as "multiple stop positions SP."

[0019] 3 is an enlarged schematic view of an example of the workpiece holding unit 14. In one example, the workpiece holding unit 14 includes a suction unit 22, a holder 24, a correction drive unit 26, and a holding base unit 29. The suction unit 22, the holder 24, and the correction drive unit 26 are supported by the holding base unit 29. The holding base unit 29 is attached to the support unit 12 in a state where it can move along the radial direction of the circular orbit CR.

[0020] The suction part 22 is configured to suction either one of the main surfaces Wa, Wb of the workpiece W. The suction part 22 is arranged, for example, with its suction port facing outward from the circular orbit CR, and suctions and holds the workpiece W at the tip where the suction port of the suction part 22 is provided. The suction part 22 functions as a part (holding part) that holds the workpiece W in the workpiece holding part 14. The holder 24 is configured to hold the suction part 22. The rotary conveying unit 10 may have a valve for switching on and off vacuum suction by the suction part 22 in response to an operation command from the controller 100. A specific example of the valve is an electromagnetic valve.

[0021] The correction drive unit 26 is configured to rotate the suction unit 22 (the suction unit 22 and the holder 24) around an axis that is along the radial direction of the circular orbit CR. The axis that represents the center of rotation by the correction drive unit 26 may be set to pass through the center of the tip (suction port) of the suction unit 22. The correction drive unit 26 holds, for example, the holder 24. The correction drive unit 26 includes a power source such as an electric motor.

[0022] The support part 12 includes a support base part 12a that movably supports each of the multiple workpiece holding parts 14. The rotary transport unit 10 has a transport fixing mechanism 72 corresponding to each of the multiple workpiece holding parts 14. The transport fixing mechanism 72 is configured to releasably fix the corresponding workpiece holding part 14 to the support part 12. The transport fixing mechanism 72 releasably fixes, for example, the holding base part 29 and the support base part 12a of the support part 12. The transport fixing mechanism 72 fixes the workpiece holding part 14 to the support part 12 when the support part 12 rotates around the central axis Ax (i.e., when the workpiece W is transported). By providing the transport fixing mechanism 72, the corresponding workpiece holding part 14 is fixed at the origin position while the support part 12 is rotating.

[0023] The transport fixing mechanism 72 is configured by, for example, a permanent magnet or an electromagnet. In one example, the transport fixing mechanism 72 is configured by a first magnet 72a provided on the holding base portion 29 and a second magnet 72b provided on the support base portion 12a. The transport fixing mechanism 72 may be a mechanism that fixes the workpiece holding portion 14 to the support portion 12 by physical fixing means other than a magnet. Examples of such fixing means include fixing by a clamping mechanism such as an air cylinder or a motor, and fixing by inserting a fixing pin into an insertion hole.

[0024] 1 and 2, the one or more advance / retract drive units 18 are configured to individually advance and retract at least some of the multiple workpiece holders 14. The rotary conveying unit 10 may have multiple advance / retract drive units 18 as the one or more advance / retract drive units 18. When one workpiece holder 14 (first workpiece holder) is positioned at a corresponding stop position SP (predetermined position) on the circular orbit CR, one advance / retract drive unit 18 moves that workpiece holder 14 along the radial direction (predetermined direction) of the circular orbit CR. When another workpiece holder 14 (second workpiece holder, first workpiece holder) is positioned at a corresponding stop position SP (second predetermined position, predetermined position) on the circular orbit CR, another advance / retract drive unit 18 moves that workpiece holder 14 along the radial direction (second predetermined direction, predetermined direction) of the circular orbit CR.

[0025] Each advance / retract drive unit 18 applies a force from the outside to the workpiece holding unit 14 to be driven along the radial direction, thereby advancing and retracting the workpiece holding unit 14. For example, each advance / retract drive unit 18 applies a force to the workpiece holding unit 14 to be driven, which is located at the origin position, thereby moving the workpiece holding unit 14 outward. With the central axis Ax as the reference, the direction away from the central axis Ax is the "outward" direction, and outward movement corresponds to "forward," and inward movement corresponds to "rearward."

[0026] The multiple advance / retract drive units 18 may be provided to correspond to all of the multiple stop positions SP. An advance / retract drive unit 18 may not be provided at a stop position SP where it is not necessary to advance or retract the workpiece holding unit 14. When viewed from the Z-axis direction, the advance / retract drive unit 18 is disposed at the corresponding stop position SP or in the vicinity thereof. The advance / retract drive unit 18 may be provided so as to be located below the workpiece holding unit 14 disposed at the corresponding stop position SP. The advance / retract drive unit 18 moves the workpiece holding unit 14, which is sequentially disposed at the corresponding stop position SP, outward.

[0027] As shown in FIG. 2, each of the multiple advance / retract drive units 18 is disposed below the support unit 12. Each of the multiple advance / retract drive units 18 may be supported by a support member installed on the floor or the like. The multiple advance / retract drive units 18 do not move together with the support unit 12 even when the support unit 12 rotates. As shown in FIG. 3, the advance / retract drive unit 18 includes, for example, a fixed base unit 31, a drive motor 32, and a moving body 34. The fixed base unit 31 supports the drive motor 32. The moving body 34 is provided so as to be movable relative to the fixed base unit 31 along the radial direction of the circular orbit CR. The drive motor 32 moves the moving body 34 along the radial direction of the circular orbit CR.

[0028] In the Z-axis direction, the height position of at least a portion of the movable body 34 may be the same as the height position of at least a portion of the holding base portion 29 of the workpiece holding unit 14. At least a portion of the holding base portion 29 is located outside at least a portion of the movable body 34 in the radial direction of the circular orbit CR. The movable body 34, driven by the drive motor 32, applies a force to the holding base portion 29, causing the workpiece holding unit 14 (suction unit 22) to move outward in the radial direction of the circular orbit CR. FIG. 4 illustrates an example of a state in which the workpiece holding unit 14 (suction unit 22) has moved outward.

[0029] The rotary conveying unit 10 has an advance / retract fixing mechanism 74 corresponding to each of the multiple advance / retract drive units 18. The advance / retract fixing mechanism 74 is configured to fix the workpiece holding unit 14, which is the drive target, to the advance / retract drive unit 18 after the fixation by the conveyance fixing mechanism 72 has been released. The advance / retract fixing mechanism 74 fixes, for example, the holding base portion 29 of the workpiece holding unit 14 and the moving body 34 of the advance / retract drive unit 18. The advance / retract fixing mechanism 74 fixes the drive target workpiece holding unit 14 to the advance / retract drive unit 18 when the advance / retract drive unit 18 moves the drive target workpiece holding unit 14 forward or backward. The advance / retract fixing mechanism 74 does not fix the advance / retract drive unit 18 and the drive target workpiece holding unit 14 when the support unit 12 rotates around the central axis Ax.

[0030] When the moving body 34 moves while the advancing / retreating drive unit 18 and the workpiece holding unit 14 to be driven are fixed to each other by the advancing / retreating fixing mechanism 74, the workpiece holding unit 14 (holding base unit 29) moves in accordance with the movement of the moving body 34. The advancing / retreating fixing mechanism 74 is configured by, for example, a permanent magnet or an electromagnet. In one example, the advancing / retreating fixing mechanism 74 includes a first magnet 74a provided on the holding base unit 29 and a second magnet 74b provided at the tip of the moving body 34.

[0031] In the transfer fixing mechanism 72, the combination (combination of individuals) of the first magnets 72a and second magnets 72b that make up the transfer fixing mechanism 72 is constant. On the other hand, in the advance / retract fixing mechanism 74, the workpiece holder 14 that is the target of drive by the advance / retract driving unit 18 varies depending on the timing, so the combination (combination of individuals) of the first magnets 74a and second magnets 74b that make up the advance / retract fixing mechanism 74 changes. The advance / retract fixing mechanism 74 may be a mechanism that fixes the target of drive, the workpiece holder 14, to the advance / retract driving unit 18 by physical fixing means other than a magnet. Examples of such fixing means include fixing by a clamping mechanism such as an air cylinder or a motor, and fixing by inserting a fixing pin into an insertion hole.

[0032] [Processing unit] Returning to FIG. 1 , the multiple processing units 40 are provided to correspond to several stop positions SP. Each processing unit 40 is configured to perform a predetermined process on the workpiece W in a processing area including the corresponding stop position SP, together with the workpiece holder 14 driven by the advance / retract drive unit 18 at that stop position SP. In the present disclosure, the process that each processing unit 40 performs on the workpiece W together with the workpiece holder 14 is referred to as a "unit process" to distinguish it from the overall process performed by the part processing device 1. The advance / retract drive unit 18 may be located at the stop position SP, where a processing area for performing the unit process by the processing unit 40 is set. The unit process performed on the workpiece W may differ among the multiple processing units 40.

[0033] In this disclosure, "unit processing" performed on the workpiece W includes any action that changes the state of the workpiece W. For example, applying marking or the like to the workpiece W, holding (handing over) the workpiece W to the workpiece holding unit 14, and the workpiece holding unit 14 handing over the workpiece W are considered "unit processing." In addition, performing some kind of inspection on the workpiece W also corresponds to "unit processing" because it changes a state in which the inspection data is unknown to a state in which the inspection data is known. The multiple processing units 40 include, for example, a supply unit 42, a recovery unit 44, and one or more intermediate processing units 46.

[0034] The supply unit 42 is configured to supply workpieces W to the rotary conveying unit 10. The supply unit 42 is arranged at one of the stop positions SP. The supply unit 42 supplies, for example, a plurality of workpieces W housed in a sheet WS1 to the rotary conveying unit 10 in order (at different times). Hereinafter, the stop position SP at which the supply unit 42 supplies the workpieces W will be referred to as the "stop position SP for supply." Specific examples of the supply unit 42 will be described later.

[0035] The recovery unit 44 is configured to recover the workpieces W from the rotary conveying unit 10. The recovery unit 44 is arranged at any one of the stop positions SP different from the stop positions SP for supply. The recovery unit 44, for example, recovers each of the multiple workpieces W arranged at the corresponding stop positions SP by storing them in a sheet WS2 in order (at different times). Hereinafter, the stop position SP from which the recovery unit 44 recovers the workpieces W is referred to as the "recovery stop position SP." The recovery unit 44 may be controlled by the controller 100 so as to recover the workpieces W determined to be non-defective, without recovering the workpieces W determined to be defective. Specific examples of the recovery unit 44 will be described later.

[0036] The intermediate processing unit 46 is configured to perform a predetermined unit process on the workpiece W at any stop position SP other than the supply and recovery stop positions SP. Specific examples of unit processes performed by the intermediate processing unit 46 include electrical property inspection, optical property inspection, correction of at least one of posture and position, and marking (laser marking). The multiple processing units 40 may include, in addition to the recovery unit 44, a unit that recovers workpieces W determined to be defective.

[0037] (supply unit) The supply unit 42 may be arranged outside the circular orbit CR. The supply unit 42 is a unit that supplies workpieces W to the workpiece holders 14 arranged at the corresponding stop positions SP. The supply unit 42 is configured to sequentially (at different times) send out multiple workpieces W attached to a sheet WS1 serving as a storage member to the rotary conveying unit 10. The sheet WS1 may be a wafer sheet. In this case, a semiconductor wafer diced into multiple workpieces W may be attached to one surface of the sheet WS1. Hereinafter, the surface of the sheet WS1 to which the multiple workpieces W are attached will be referred to as the "front surface S1a," and the surface of the sheet WS1 opposite the front surface S1a will be referred to as the "back surface S1b" (see FIG. 2). In other words, the sheet WS1 has a front surface S1a and a back surface S1b facing in opposite directions, and multiple workpieces W are attached to the front surface S1a.

[0038] The main surfaces Wb of the plurality of workpieces W may be attached to the surface S1a of the sheet WS1. When the surface S1a of the sheet WS1 is viewed from a direction perpendicular to the surface S1a, the plurality of workpieces W may be arranged in a matrix in two directions perpendicular to each other. On the surface S1a of the sheet WS1, the gap between adjacent workpieces W may be several tens of μm to several hundreds of μm. The supply unit 42 may include a sheet holding unit 52, a sheet driving unit 53, a push-up member 55, a push-up driving unit 56, a position detection unit 57, and a stage 58.

[0039] The sheet holding unit 52 is configured to hold a sheet WS1 having workpieces W attached to its surface S1a. The sheet holding unit 52 holds the sheet WS1 so that the surface S1a to which multiple workpieces W are attached faces the work holding unit 14. The sheet holding unit 52 may hold the sheet WS1 so that the sheet WS1 is vertical. On the surface S1a of the vertically held sheet WS1, multiple workpieces W may be arranged in a matrix in the Y-axis direction and the Z-axis direction. The sheet holding unit 52 may hold the sheet WS1 in a stretched (expanded) state so as to increase the spacing between the multiple workpieces W.

[0040] The sheet driving unit 53 is configured to move the sheet holding unit 52 in a direction along the surface S1a of the sheet WS1. When the sheet driving unit 53 moves the sheet holding unit 52, the position of the sheet WS1 held by the sheet holding unit 52 changes. The sheet driving unit 53 moves the sheet holding unit 52, for example, in each of the Y-axis direction and the Z-axis direction along which the multiple workpieces W are arranged on the surface S1a. The sheet driving unit 53 includes a driving source such as an electric motor.

[0041] The sheet driving unit 53 operates based on operational instructions from the controller 100. The sheet driving unit 53 may move the sheet holding unit 52 so as to sequentially arrange any of the workpieces W among the plurality of workpieces W (all of the workpieces W) on the surface S1a at positions where they will be pushed up by the push-up member 55. Hereinafter, the position where the workpieces W are pushed up by the push-up member 55 will be referred to as the "push-up position," and the workpieces W arranged at the push-up position will be referred to as the "workpieces W to be supplied." The sheet driving unit 53 may move the sheet holding unit 52 by the distance (pitch) between the centers of adjacent workpieces W when sequentially arranging each of the plurality of workpieces W lined up in a row on the surface S1a at the push-up position.

[0042] Instead of sequentially placing all of the workpieces W on the surface S1a at the push-up positions, the sheet driver 53 may sequentially place only a specific number of workpieces W among all of the workpieces W on the surface S1a at the push-up positions. In this case, the controller 100 may control the sheet driver 53 to sequentially place each of the workpieces W to be supplied at the push-up positions based on rank information previously acquired from a server or the like provided separately from the component processing device 1. The rank information may assign a rank to each workpiece W according to the degree of non-defectiveness based on, for example, the results of an inspection performed in a process prior to the component processing device 1. In one example, the sheet driver 53 moves the sheet holder 52 in response to an operation command from the controller 100 so that multiple workpieces W assigned the same rank are sequentially placed at the push-up positions.

[0043] The push-up member 55 is configured to face the back surface S1b of the sheet WS1. The push-up member 55 is provided so as to be able to push up the workpiece W to be supplied, which is placed at the push-up position, via the sheet WS1. The push-up member 55 is formed to extend in one direction, and the extending direction may be along the radial direction of the circular orbit CR. The push-up member 55 may be a pin member (needle-shaped member) or may be composed of multiple needles. The tip of the push-up member 55 is formed so as to be able to push out a portion of the back surface S1b of the sheet WS1 that is at the push-up position in a direction from the back surface S1b toward the front surface S1a. When the push-up member 55 pushes out the sheet WS1, the area of ​​the portion where the tip of the push-up member 55 comes into contact with the back surface S1b may be smaller than the area of ​​the main surface Wb of the workpiece W. The push-up member 55 may be held by a holder member in a state where it can move along the extending direction.

[0044] The push-up drive unit 56 is configured to move the push-up member 55 along a predetermined direction (e.g., the radial direction) toward the workpiece holding unit 14 that is scheduled to receive the workpiece W to be supplied. Hereinafter, the predetermined direction in which the push-up member 55 is moved by the push-up drive unit 56 will be referred to as the "push-up direction." In the example shown in FIG. 2 etc., the push-up member 55 extends along the push-up direction, which corresponds to the radial direction. The push-up drive unit 56 advances the push-up member 55 so as to approach the workpiece holding unit 14, and retracts the push-up member 55 so as to move away from the workpiece holding unit 14. By advancing the push-up member 55, the workpiece W to be supplied is pushed up via the sheet WS1, and the workpiece W is brought closer to the workpiece holding unit 14. The push-up drive unit 56 includes a drive source such as an electric motor.

[0045] The position detection unit 57 is a sensor configured to detect the position of the push-up member 55 in the above-mentioned push-up direction. The position detection unit 57 may detect the position in the above-mentioned push-up direction of any part of the push-up member 55 or a part connected to the push-up member 55 and driven together. The position detection unit 57 detects, for example, the position of the tip of the push-up member 55 in the radial direction of the circular orbit CR. Note that even if the position of a part other than the tip of the push-up member 55 is detected, the position of the tip of the push-up member 55 can be obtained from the positional relationship between that part and the tip of the push-up member 55.

[0046] The position detection unit 57 may use any method to detect the position of the push-up member 55. The position detection unit 57 is, for example, an encoder installed in a motor (for example, a servo motor) included in the push-up drive unit 56. Instead of an encoder installed in the motor of the push-up drive unit 56, the position detection unit 57 may be a linear encoder installed somewhere in the supply unit 42.

[0047] The position detection unit 57 may detect the position of the push-up member 55 in the push-up direction at least during the period in which the push-up member 55 is driven by the push-up drive unit 56. The position detection unit 57 may repeat detecting the position of the push-up member 55 in the push-up direction at a predetermined sampling period. The position detection unit 57 may output information indicating the result of detecting the position of the push-up member 55 in the push-up direction to the controller 100.

[0048] The stage 58 is configured to adsorb the area around the push-up position on the back surface S1b of the sheet WS1 held by the sheet holding unit 52. The stage 58 may be formed in a cylindrical shape extending parallel to the extension direction of the push-up member 55. The push-up member 55 is disposed in an internal space formed by the stage 58, and gas within the internal space is sucked out by a suction pump or the like. The stage 58 may be fixed to a predetermined position in the direction in which the push-up member 55 moves (the above-mentioned push-up direction), or may be provided movably. Unless otherwise specified below, it is assumed that the stage 58 is fixed to a predetermined position. Note that when the stage 58 is provided movably, the component processing device 1 may have a configuration similar to that described below and may perform the same operations.

[0049] <Example of pickup operation> Here, an example will be given of the operation of the workpiece holding unit 14 (first workpiece holding unit) arranged at the supply stop position SP when it receives the workpiece W to be supplied from the supply unit 42. The outward movement of the workpiece holding unit 14 by the advance / retract drive unit 18 and the advancement of the push-up member 55 by the push-up drive unit 56 may be performed at different times, or may be performed at times that overlap for at least a portion of a period. In one example, the operations involved in the delivery of the workpiece W to be supplied are performed in the following order. While the next operation is being performed, the workpiece holding unit 14 (suction unit 22) may be maintained in a state where it can suck up the workpiece W. For example, when the advance / retract drive unit 18 is driven in the operation (i) below, the advance / retract drive unit 18 and the workpiece holding unit 14 are fixed by the advance / retract locking mechanism 74, and the fixation by the transport locking mechanism 72 is released. (i) The advance / retract drive unit 18 advances the workpiece holder 14 to be driven to a first position further forward than the origin position. (ii) The push-up drive unit 56 advances the push-up member 55 so that the workpiece W to be supplied is sandwiched between the workpiece holding unit 14, which has been advanced to the first position, and the push-up member 55. (iii) After the workpiece W to be supplied is clamped, the push-up drive unit 56 and the advance / retract drive unit 18 advance the push-up member 55 and retract the workpiece holding unit 14 while maintaining the workpiece W in a clamped state. (iv) The push-up drive unit 56 moves the push-up member 55 backward, while the advance / retreat drive unit 18 moves the workpiece holder 14 backward.

[0050] (Recovery Unit) The recovery unit 44 (second processing unit) may be arranged outside the circular orbit CR. The recovery unit 44 performs unit processing on the workpiece W together with the workpiece holder 14 driven by the advance / retract drive unit 18 at the corresponding stop position SP. The recovery unit 44 is a unit that recovers the workpiece W from the workpiece holder 14 arranged at the corresponding stop position SP. The recovery unit 44 is configured to receive the workpiece W from the rotary conveying unit 10 in order (at different times) into multiple planned storage areas set in a sheet WS2 as a storage member. The sheet WS2 is a storage member including a surface to which the workpiece W can be attached by adhesive. The sheet WS2 may be a wafer sheet. Multiple workpieces W transported by the rotary conveying unit 10 may be attached to one surface of the sheet WS2 with gaps between them. Hereinafter, the surface of the sheet WS2 to which multiple workpieces W are attached will be referred to as the "front surface S2a," and the surface of the sheet WS2 opposite to the front surface S2a will be referred to as the "back surface S2b." That is, the sheet WS2 has a front surface S2a and a back surface S2b facing inversely to each other, and a plurality of works W are attached to the front surface S2a by the rotary conveying unit 10.

[0051] The main surfaces Wb of the plurality of workpieces W may be attached to the surface S2a of the sheet WS2. The collection unit 44 may attach the plurality of workpieces W to the surface S2a of the sheet WS2 so that, when the surface S2a is viewed from a direction perpendicular to the surface S2a, the plurality of workpieces W are arranged in a matrix in two directions perpendicular to each other. After the plurality of workpieces W have been attached, the gap between adjacent workpieces W on the surface S2a may be several tens of μm to several hundreds of μm. The collection unit 44 may include a sheet holding unit 62, a sheet driving unit 63, and a stage 68.

[0052] The sheet holding unit 62 is configured to hold a sheet WS2 on whose surface S2a the workpieces W are attached. The sheet holding unit 62 holds the sheet WS2 so that the surface S2a on which the multiple workpieces W are attached faces the rotary conveying unit 10. The sheet holding unit 62 may hold the sheet WS2 so that the sheet WS2 is vertical. Multiple workpieces W may be stored in a matrix in the Y-axis and Z-axis directions on the surface S2a of the sheet WS2 held vertically.

[0053] The sheet driving unit 63 is configured to move the sheet holding unit 62 in a direction along the surface S2a of the sheet WS2. When the sheet driving unit 63 moves the sheet holding unit 62, the position of the sheet WS2 held by the sheet holding unit 62 changes. The sheet driving unit 63 moves the sheet holding unit 62 in, for example, both the Y-axis direction and the Z-axis direction. The sheet driving unit 63 includes a driving source such as an electric motor.

[0054] The sheet driving unit 63 moves the sheet holding unit 62 so that one of the multiple areas on the surface S2a to be accommodated (areas to which the workpieces W are to be attached) is sequentially arranged at a position where the rotary transport unit 10 can attach the workpieces W. Hereinafter, the position at which the rotary transport unit 10 attaches the workpiece W is referred to as the "attaching position," and the workpiece W attached to the surface S2a at the attaching position is referred to as the "workpiece W to be collected." When arranging each of the multiple areas on the surface S2a to be accommodated that are lined up in a row at the attaching position, the sheet driving unit 63 may move the sheet holding unit 62 by a distance such that the distance between the centers of adjacent workpieces W after attachment will be a desired value.

[0055] The stage 68 is configured to adsorb at least a portion of the back surface S2b of the sheet WS2 held by the sheet holding unit 62. The stage 68 may adsorb the entire area of ​​the back surface S2b where multiple workpieces W are to be attached. The stage 68 may be driven by the sheet driving unit 63 together with the sheet holding unit 62. In the following, it is assumed that the stage 68 is driven by the sheet driving unit 63 together with the sheet holding unit 62 in both the Y-axis direction and the Z-axis direction.

[0056] <Example of operations associated with pasting> Here, an example will be given of the operation of the work holding unit 14 (second work holding unit, first work holding unit) arranged at the recovery stop position SP when attaching the work W to be collected. The work holding unit 14 arranged at the recovery stop position SP is displaced along the radial direction (second predetermined direction, predetermined direction) of the circular orbit CR by the advance / retract drive unit 18 (second advance / retract drive unit), and the work W is then delivered from the work holding unit 14 to the collection unit 44. The operations involved in attaching the work W to be collected may be performed in the following order. For example, when driven by the advance / retract drive unit 18 in the operation (i) below, the advance / retract drive unit 18 and the work holding unit 14 are fixed by the advance / retract fixation mechanism 74, and the fixation by the transport fixation mechanism 72 is released. (i) The forward / backward driving unit 18 advances the workpiece holding unit 14, which is the driving target and holds the workpiece W to be collected, from the origin position to a position where the workpiece W to be collected contacts the sheet WS2. (ii) The forward / backward driving unit 18 further advances the workpiece W in contact with the sheet WS2. (iii) The suction of the workpiece W by the workpiece holder 14 is released. (iv) The forward / backward driving unit 18 moves the workpiece holder 14 backward.

[0057] [Load sensor] Each of the multiple load sensors 90 is provided on a corresponding one of the multiple workpiece holding units 14. In other words, one load sensor 90 is provided on each workpiece holding unit 14. The load sensor 90 is configured to detect a load applied to the workpiece holding unit 14. The load sensor 90 is a sensor that detects a load applied to the workpiece holding unit 14 (suction unit 22). The load sensor 90 may detect the load using any method. The load sensor 90 may be a mechanical sensor that detects changes in electrical resistance, such as a strain gauge, or may be a load cell. The load sensor 90 may be provided on the suction unit 22 or the holder 24 of the workpiece holding unit 14.

[0058] At the supply stop position SP, when the workpiece holding unit 14 is in contact with the workpiece W to be supplied, the force that the workpiece holding unit 14 applies to the workpiece W to be supplied (the reaction force received from the workpiece W) and the force that the push-up member 55 applies to the workpiece W to be supplied are reflected in the detection result by the load sensor 90. In other words, at the supply stop position SP, the load applied to the workpiece W at the time of picking up is reflected in the detection result by the load sensor 90.

[0059] At the recovery stop position SP, when both the workpiece holding unit 14 and the sheet WS2 are in contact with the workpiece W to be recovered, the force applied by the workpiece holding unit 14 to the workpiece W (the reaction force received from the workpiece W) is reflected in the detection result by the load sensor 90. In other words, at the recovery stop position SP, the load applied to the workpiece W during bonding is reflected in the detection result by the load sensor 90.

[0060] At the stop position SP where the intermediate processing unit 46 is located, when the workpiece holding section 14 and the intermediate processing unit 46 perform unit processing on the workpiece W to be processed, at least the force that the workpiece holding section 14 applies to the workpiece W to be processed (the reaction force received from the workpiece W) is reflected in the detection result by the load sensor 90. As described above, each of the multiple load sensors 90 detects a load transition that has a different tendency depending on which stop position SP the corresponding workpiece holding section 14 is located at.

[0061] The multiple load sensors 90 are communicatively connected to the controller 100. The multiple load sensors 90 are communicatively connected to the controller 100 by wire or wirelessly. When connected by wire, a slip ring may be used. Each load sensor 90 outputs information indicating the magnitude of the load (load value) to the controller 100. Each load sensor 90 may repeatedly acquire and output information indicating the magnitude of the load at a predetermined measurement period. Each load sensor 90 may continuously acquire and output information indicating the magnitude of the load while the component processing device 1 is operating. Each load sensor 90 may output information indicating the load value to the controller 100 along with information for identifying itself.

[0062] The rotary conveying unit 10 may have a rotation angle detection sensor that detects the rotation angle of the support part 12, and a signal from the rotation angle detection sensor may be output to the controller 100. The rotation angle detection sensor may be provided on the support part 12 (for example, a shaft member of the support part 12), or may be provided on the rotation drive part 16 that rotates and drives the support part 12. The controller 100 may determine which load sensor 90 is located at a specific stop position SP (what is the load detection value at the specific stop position SP) based on the angle detected by the rotation angle detection sensor and individual information from each load sensor 90.

[0063] Instead of outputting individual information from each load sensor 90, detection value outputs from a plurality of load sensors 90 may be output to the controller 100 in a specific order. In this case, the controller 100 may determine which load sensor 90 is located at a specific stop position SP (which is the load detection value at the specific stop position SP) based on the angle detected by the rotation angle detection sensor and the output order (input order) of the detection values.

[0064] 〔camera〕 As shown in FIG. 1, the part processing device 1 may include a camera 80. The camera 80 may be positioned outside the circular orbit CR. The camera 80 captures an image of the workpiece W held by the workpiece holder 14 at a stop position SP (hereinafter referred to as the detection stop position SP) that is located downstream of the supply stop position SP and upstream of the recovery stop position SP. The angle of view of the camera 80 is set, for example, so as to include the entire main surface Wb of the workpiece W held by the workpiece holder 14 (suction portion 22). The camera 80 includes an imaging element such as a CCD image sensor or a CMOS image sensor, and a lens that forms an image on the imaging element.

[0065] [Another example of a rotary conveying unit] 5, the component processing device 1 may include a rotary conveying unit 10A instead of the rotary conveying unit 10. In the rotary conveying unit 10, the workpiece holder moves along the radial direction of the circular orbit CR, whereas in the rotary conveying unit 10A, the workpiece holder moves along the axial direction in which the central axis Ax of the circular orbit CR extends.

[0066] The rotary conveying unit 10A has, for example, a support part 12A, multiple workpiece holding parts 14A, a rotation drive part 16A, and one or more advance / retract drive parts 18A. The support part 12A, the workpiece holding part 14A, the rotation drive part 16A, and the advance / retract drive part 18A correspond to the support part 12, the workpiece holding part 14, the rotation drive part 16, and the advance / retract drive part 18 in the rotary conveying unit 10, respectively.

[0067] The support portion 12A is configured to support a plurality of workpiece holding portions 14A. The support portion 12A supports the plurality of workpiece holding portions 14A so that each workpiece holding portion 14A is positioned on a circular orbit CR about the central axis Ax. The support portion 12A is provided so as to be rotatable about the central axis Ax. The support portion 12A is, for example, a turntable.

[0068] The multiple workpiece holding portions 14A are arranged at equal intervals around a circumference centered on the central axis Ax and are fixed to the support portion 12A. Each of the multiple workpiece holding portions 14A is configured to hold a workpiece W and is provided so as to be able to move forward and backward. At least a portion of each workpiece holding portion 14A is able to move forward and backward, for example, in the vertical direction (Z-axis direction). The workpiece holding portion 14A may hold the workpiece W in any manner. Specific examples of the manner in which the workpiece holding portion 14A holds the workpiece W include vacuum suction, electrostatic suction, and gripping.

[0069] The workpiece holding part 14A may vacuum-suck either of the main surfaces Wa, Wb from one side in a direction perpendicular to the upper surface of the support part 12A. When the workpiece holding part 14A holds the workpiece W, the workpiece holding part 14A and the workpiece W are aligned in the axial direction of the central axis Ax. In other words, the workpiece holding part 14A holds the workpiece W so that the workpiece holding part 14A and the workpiece W are aligned in the axial direction (holding direction) of the central axis Ax.

[0070] The rotation drive unit 16A is configured to rotate the support unit 12A around the central axis Ax. The rotation drive unit 16A rotates the support unit 12A around the central axis Ax by a direct drive without using gears, using a power source such as an electric motor. As the support unit 12A rotates, the multiple workpiece holders 14A move along a horizontal circular orbit CR centered on the central axis Ax. As a result, the workpieces W held by the workpiece holders 14A are transported along the circular orbit CR.

[0071] The rotation drive unit 16A is controlled by the controller 100 so as to repeatedly rotate and stop the support unit 12A at an angular pitch (angular pitch around the central axis Ax) between adjacent workpiece holding units 14A. When the rotation drive unit 16A stops the support unit 12A, the multiple positions where the portions holding the workpieces W of the multiple workpiece holding units 14A (for example, the lower ends of the multiple suction units 22A described below) are located are also referred to as "multiple stop positions SP."

[0072] 6 shows an enlarged schematic view of an example of the workpiece holding unit 14A. In this example, the workpiece holding unit 14A includes a suction unit 22A, a holder 24A, a lifting rod 25A, and a holder 27A. The suction unit 22A and the holder 24A are supported by the lifting rod 25A. The lifting rod 25A is formed in a rod shape so as to extend along the axial direction of the central axis Ax (the Z-axis direction). The lifting rod 25A is attached to the support unit 12A on the outer periphery of the support unit 12A in a state where it can move along the axial direction of the central axis Ax.

[0073] The suction part 22A is configured to suction one of the main surfaces Wa, Wb of the workpiece W. The suction part 22A is arranged, for example, with its suction port facing downward, and suctions and holds the workpiece W at the tip (lower end) where the suction port of the suction part 22A is provided. The suction part 22A functions as a part (holding part) that holds the workpiece W in the workpiece holding part 14A. The holder 24A is configured to hold the suction part 22A. The holder 24A is fixed to the lower end of the lifting rod 25A. The rotary conveying unit 10A may have a valve for switching on and off vacuum suction by the suction part 22A in response to an operation command from the controller 100. A specific example of the valve is an electromagnetic valve.

[0074] The workpiece holding unit 14A may have a correction drive unit corresponding to the correction drive unit 26 of the workpiece holding unit 14. The correction drive unit of the workpiece holding unit 14A is configured to rotate the suction unit 22A (the suction unit 22A and the holder 24A) around an axis along the axial direction of the central axis Ax. The axis representing the center of rotation by the correction drive unit of the workpiece holding unit 14A may be set to pass through the center of the tip (suction port) of the suction unit 22A. The holder 27A is attached near the center of the lifting rod 25A.

[0075] The support portion 12A includes auxiliary base portions 13 corresponding to each of the plurality of workpiece holding portions 14A. The auxiliary base portions 13 include, for example, a first portion fixed to the support portion 12A, a second portion extending from one end of the first portion in the axial direction of the central axis Ax, and a third portion extending from an upper end of the second portion so as to protrude outward. The lift rod 25A passes through the third portion of the auxiliary base portion 13, but the auxiliary base portion 13 does not interfere with the movement of the lift rod 25A.

[0076] The rotary conveying unit 10A has a transport fixing mechanism 73 corresponding to each of the multiple workpiece holding portions 14A. The transport fixing mechanism 73 corresponds to the transport fixing mechanism 72 of the rotary conveying unit 10. The transport fixing mechanism 73 is configured to releasably fix the corresponding workpiece holding portion 14A and the support portion 12A. The transport fixing mechanism 73 releasably fixes, for example, the holder 27A provided on the lifting rod 25A to the auxiliary base portion 13 (the third portion) of the support portion 12A. The transport fixing mechanism 73 fixes the workpiece holding portion 14A to the support portion 12A when the support portion 12A rotates around the central axis Ax (i.e., when the workpiece W is being transported). By providing the transport fixing mechanism 73, the corresponding workpiece holding portion 14A is fixed at the origin position while the support portion 12A is rotating.

[0077] The transport fixing mechanism 73 is configured by, for example, a permanent magnet or an electromagnet. In one example, the transport fixing mechanism 73 is configured by a first magnet 73a provided on the holder 27A and a second magnet 73b provided on the auxiliary base portion 13. The transport fixing mechanism 73 may be a mechanism that fixes the workpiece holding portion 14A to the support portion 12A by physical fixing means other than a magnet. Examples of such fixing means include fixing by a clamping mechanism such as an air cylinder or a motor, and fixing by inserting a fixing pin into an insertion hole.

[0078] Returning to FIG. 5, one or more advance / retract drivers 18A are configured to individually advance and retract at least some of the multiple workpiece holders 14A. The rotary conveying unit 10A may have multiple advance / retract drivers 18A as the one or more advance / retract drivers 18A. When one workpiece holder 14A (first workpiece holder) is positioned at a corresponding stop position SP (predetermined position) on the circular orbit CR, the advance / retract driver 18A moves the workpiece holder 14A along the axial direction (predetermined direction) of the central axis Ax. When another workpiece holder 14A (second workpiece holder, first workpiece holder) is positioned at a corresponding stop position SP (second predetermined position, predetermined position) on the circular orbit CR, the other advance / retract driver 18A moves the other workpiece holder 14A along the axial direction (second predetermined direction, predetermined direction) of the central axis Ax.

[0079] Each advance / retract drive unit 18A applies a force from the outside to the workpiece holding unit 14A to be driven along the axial direction, thereby advancing and retracting the workpiece holding unit 14A. For example, each advance / retract drive unit 18A applies a force to the workpiece holding unit 14A to be driven, which is located at the origin position, thereby moving the workpiece holding unit 14A downward. Downward movement corresponds to "advancement," and upward movement corresponds to "retreat."

[0080] The multiple advance / retract drive units 18A may be provided to correspond to all of the multiple stop positions SP. The advance / retract drive units 18A may not be provided at stop positions SP where it is not necessary to advance or retract the workpiece holding unit 14A. When viewed from the Z-axis direction, the advance / retract drive units 18A are arranged at the corresponding stop positions SP or in the vicinity thereof. The advance / retract drive units 18A may be provided to be located vertically above the workpiece holding units 14A arranged at the corresponding stop positions SP. The advance / retract drive units 18A move downward the workpiece holding units 14A that are sequentially arranged at the corresponding stop positions SP.

[0081] The rotary conveying unit 10A may have a fixed portion 19. The fixed portion 19 is a portion to which a plurality of advance / retract drive units 18A are fixed. The plurality of advance / retract drive units 18A are fixed to the fixed portion 19 so as not to rotate together with the rotation of the support unit 12A. The advance / retract drive unit 18A includes, for example, a drive motor 32A and a drive rod 33A that is displaced by the drive motor 32A and applies a force to the lift rod 25A of the workpiece holding unit 14A.

[0082] The drive rod 33A is positioned vertically above the lift rod 25A. Driven by the drive motor 32A, the drive rod 33A applies a downward force to the lift rod 25A, causing the workpiece holding unit 14A (suction unit 22A) to move downward. Figure 7(a) illustrates an example of the state in which the workpiece holding unit 14A (suction unit 22A) has moved downward.

[0083] The rotary conveying unit 10A has an advance / retract fixing mechanism 75 corresponding to each of the multiple advance / retract drive units 18A. The advance / retract fixing mechanism 75 corresponds to the advance / retract fixing mechanism 74 of the rotary conveying unit 10. The advance / retract fixing mechanism 75 is configured to fix the workpiece holding unit 14A, which is the drive target, to the advance / retract drive unit 18A after the fixation by the conveyance fixing mechanism 73 has been released. The advance / retract fixing mechanism 75 fixes, for example, the lift rod 25A of the workpiece holding unit 14A and the drive rod 33A of the advance / retract drive unit 18A. The advance / retract fixing mechanism 75 fixes the workpiece holding unit 14A, which is the drive target, to the advance / retract drive unit 18A when the advance / retract drive unit 18A moves the workpiece holding unit 14A, which is the drive target, forward or backward.

[0084] 7(b) illustrates an example of how the workpiece holding unit 14A to be driven is moved backward (returned to the origin position). The workpiece holding unit 14A to be driven is moved backward by the advance / retract drive unit 18A while being maintained in a fixed state by the advance / retract fixation mechanism 75. The advance / retract fixation mechanism 75 does not fix the advance / retract drive unit 18A and the workpiece holding unit 14A when the support unit 12A rotates around the central axis Ax.

[0085] When the drive rod 33A moves downward while the advance / retract drive unit 18A and the workpiece holder 14A to be driven are fixed to each other by the advance / retract fixing mechanism 75, the workpiece holder 14A (lift rod 25A) moves in accordance with the movement of the drive rod 33A. The advance / retract fixing mechanism 75 is configured with, for example, a permanent magnet or an electromagnet. In one example, the advance / retract fixing mechanism 75 includes a first magnet 75a provided at the upper end of the lift rod 25A and a second magnet 75b provided at the tip (lower end) of the drive rod 33A.

[0086] In the transfer fixing mechanism 73, the combination (combination of the individual magnets) of the first magnets 73a and second magnets 73b that make up the transfer fixing mechanism 73 is constant. On the other hand, in the advance / retract fixing mechanism 75, the workpiece holder 14A that is the target of drive by the advance / retract driving unit 18A varies depending on the timing, so the combination (combination of the individual magnets) of the first magnets 75a and second magnets 75b that make up the advance / retract fixing mechanism 75 changes. The advance / retract fixing mechanism 75 may be a mechanism that fixes the target of drive, the workpiece holder 14A, to the advance / retract driving unit 18A by a physical fixing means other than a magnet. Examples of such fixing means include fixing by a clamping mechanism such as an air cylinder or a motor, and fixing by inserting a fixing pin into an insertion hole.

[0087] A component processing device 1 equipped with a rotary conveying unit 10A may also be provided with a supply unit 42, a recovery unit 44, and one or more intermediate processing units 46 as the multiple processing units 40. The supply unit 42, the recovery unit 44, and one or more intermediate processing units 46 are each installed in accordance with the direction of movement of the workpiece holder 14A by the advance / retract drive unit 18A.

[0088] The operations involved in the delivery of the workpiece W to be supplied may be performed in the following order: While the following operations are being performed, the workpiece holding unit 14A (suction unit 22A) may be maintained in a state in which it is able to suck up the workpiece W. For example, when driven by the advancing / retreating drive unit 18A in the operation (i) below, the advancing / retreating fixation mechanism 75 fixes the advancing / retreating drive unit 18A and the workpiece holding unit 14A, and the fixation by the transport fixation mechanism 73 is released. (i) The forward / backward driving unit 18A advances the workpiece holding unit 14A, which is the driving target, to a first position located below the original position. (ii) The push-up drive unit 56 advances the push-up member 55 so that the workpiece W to be supplied is sandwiched between the workpiece holding unit 14A, which has been advanced to the first position, and the push-up member 55. (iii) After the workpiece W to be supplied is clamped, the push-up drive unit 56 and the advance / retract drive unit 18A advance the push-up member 55 and retract the workpiece holding unit 14A while maintaining the workpiece W clamped. (iv) The push-up driving unit 56 moves the push-up member 55 backward, while the advance / retreat driving unit 18A moves the workpiece holding unit 14A backward.

[0089] The operations involved in attaching the workpiece W to be collected may be performed in the following order: For example, when the advancing / retreating driving unit 18A is driven in the following operation (i), the advancing / retreating fixing mechanism 75 fixes the advancing / retreating driving unit 18A and the workpiece holding unit 14A, and the fixation by the transport fixing mechanism 73 is released. (i) The forward / backward driving unit 18A advances the workpiece holding unit 14A, which is the driving target and which holds the workpiece W to be collected, from the origin position to a position where the workpiece W to be collected comes into contact with the sheet WS2. (ii) The forward / backward driving unit 18A further advances the workpiece W in contact with the sheet WS2. (iii) The suction of the workpiece W by the workpiece holder 14A is released. (iv) The forward / backward driving unit 18A moves the workpiece holding unit 14A backward.

[0090] A component processing device 1 equipped with a rotary conveying unit 10A may also be provided with multiple load sensors 90. Each of the multiple load sensors 90 is provided to a corresponding one of the multiple workpiece holding units 14A. The load sensor 90 may be provided to the suction unit 22A or the holder 24A in the workpiece holding unit 14A. Note that a component processing device 1 equipped with a rotary conveying unit 10A may not necessarily be provided with multiple load sensors 90, and a component processing device 1 equipped with a rotary conveying unit 10A may not necessarily be provided with multiple load sensors 90.

[0091] 〔controller〕 1, the controller 100 is configured with one or more control computers. The controller 100 may control the rotary conveying units 10, 10A, the multiple processing units 40, the multiple load sensors 90, and the camera 80 according to a predetermined control procedure so that predetermined processing is performed sequentially on the multiple workpieces W. For example, the controller 100 controls the rotary conveying units 10, 10A and the multiple processing units 40 so that corresponding unit processing is performed on the workpieces W at several stop positions SP while conveying the multiple workpieces W along the circular orbit CR.

[0092] In the description of the controller 100 and the processing flow described below, the term "rotary conveying unit 10, 10A" means that the controlled object is the rotary conveying unit 10 when the rotary conveying unit 10 is provided, and the controlled object is the rotary conveying unit 10A when the rotary conveying unit 10A is provided. The term "transport fixing mechanism 72, 73" means that the transport fixing mechanism 72 is provided when the rotary conveying unit 10 is provided, and the transport fixing mechanism 73 is provided when the rotary conveying unit 10A is provided. The term "advance / retraction fixing mechanism 74, 75" means that the advance / retraction fixing mechanism 74 is provided when the rotary conveying unit 10 is provided, and the advance / retraction fixing mechanism 75 is provided when the rotary conveying unit 10A is provided. The terms "workpiece holder 14, 14A" and "advance / retraction driving unit 18, 18A" have similar meanings.

[0093] The controller 100 controls at least the supply unit 42 and the rotary conveying units 10, 10A so that a plurality of workpieces W are sequentially supplied from the supply unit 42 to the rotary conveying units 10, 10A at the supply stop position SP. The controller 100 controls at least the supply unit 42 and the corresponding advance / retract drive units 18, 18A so that the workpieces W to be supplied are supplied to the workpiece holders 14, 14A (suction units 22, 22A) arranged at the supply stop position SP. The controller 100 may control the advance / retract drive units 18, 18A provided at the supply stop position SP based on a detection value by a load sensor 90 (first load sensor) corresponding to the workpiece holder 14 arranged at the supply stop position SP.

[0094] The controller 100 may control the advance / retract drive units 18, 18A based on the detection value of the corresponding load sensor 90 during at least a portion of the execution period of a unit process in which the supply unit 42 supplies the workpieces W. The controller 100 controls the advance / retract drive units 18, 18A, for example, so that the detection value of the corresponding load sensor 90 falls within a first target range. The first target range may be defined by a lower limit value and an upper limit value, or may be defined by only the upper limit value. Instead of feedback control based on the detection value of the corresponding load sensor 90, the controller 100 may detect an abnormality in the load applied to the workpieces W to be supplied based on the detection value of the corresponding load sensor 90 during at least a portion of the execution period of a unit process in which the supply unit 42 supplies the workpieces W.

[0095] The controller 100 may execute the following first and second operation controls regarding the control of unit processing by the supply unit 42. In the first operation control, the controller 100 drives the push-up member 55 and the workpiece holders 14, 14A using the push-up driver 56 and the advance / retract driver 18, 18A based on a predetermined operation command. Driving the driven member based on a predetermined operation command means driving the driven member (controlling the driver that drives the driven member) so that at least one of the position and speed follows a predetermined command. In the first operation control, the controller 100 advances the push-up member 55 using the push-up driver 56 based on the predetermined operation command and advances the workpiece holders 14, 14A using the advance / retract driver 18, 18A based on the predetermined operation command, without taking into account the detection value of the corresponding load sensor 90.

[0096] In the second operation control, the controller 100 continues driving the push-up member 55 by the push-up driver 56 based on the operation command, while driving the workpiece holding unit 14, 14A by the advance / retract driver 18, 18A based on the detected value by the corresponding load sensor 90. In the second operation control, the controller 100 continues advancing the push-up member 55 by the push-up driver 56 in accordance with a predetermined operation command without taking into account the detected value by the corresponding load sensor 90, while executing retraction of the advance / retract driver 18, 18A based on the detected value by the corresponding load sensor 90. In the second operation control, for example, while the advancement of the push-up member 55 continues, the controller 100 retracts the workpiece holding unit 14, 14A (in one example, it adjusts the retraction speed of the workpiece holding unit 14, 14A) so that the detected value by the corresponding load sensor 90 follows the target load.

[0097] The controller 100 controls at least the collection unit 44 and the rotary conveying units 10, 10A so that the collection unit 44 sequentially collects a plurality of workpieces W from the rotary conveying units 10, 10A at the collection stop position SP. The controller 100 controls at least the collection unit 44 and the corresponding advance / retract drive units 18, 18A so that the workpieces W to be collected are collected from the workpiece holders 14, 14A (suction units 22, 22A) arranged at the collection stop position SP to the collection unit 44. The controller 100 may control the advance / retract drive units 18, 18A (second advance / retract drive units) provided at the collection stop position SP based on a detection value by a load sensor 90 (second load sensor) corresponding to the workpiece holder 14 arranged at the collection stop position SP. The forward / backward driving unit 18, 18A provided at the recovery stop position SP may move the corresponding work holding unit 14, 14A during a period that overlaps with at least part of the period during which the forward / backward driving unit 18, 18A provided at the supply stop position SP drives the work holding unit 14, 14A.

[0098] The controller 100 may control the advance / retract drive units 18, 18A based on the detection value of the corresponding load sensor 90 during at least a portion of the execution period of the unit process in which the collection unit 44 collects the workpieces W. The controller 100 controls the advance / retract drive units 18, 18A, for example, so that the detection value of the corresponding load sensor 90 falls within a second target range different from the first target range. The second target range may be defined by a lower limit value and an upper limit value, or may be defined only by the upper limit value. When the first target range and the second target range are defined by a lower limit value and an upper limit value, respectively, one of the lower limit value and the upper limit value may differ between the first target range and the second target range, or both the lower limit value and the upper limit value may differ. Instead of feedback control based on the detection value of the corresponding load sensor 90, the controller 100 may detect an abnormality in the load applied to the workpieces W to be collected based on the detection value of the corresponding load sensor 90 during at least a portion of the execution period of the unit process in which the collection unit 44 collects the workpieces W.

[0099] The controller 100 may execute the following third and fourth operation controls regarding control of unit processing by the collection unit 44. In the third operation control, the controller 100 drives the workpiece holding units 14, 14A using the advance / retract drivers 18, 18A based on a predetermined operation command. In the third operation control, the controller 100 causes the advance / retract drivers 18, 18A to advance the workpiece holding units 14, 14A in accordance with the predetermined operation command, without taking into account the detection value by the corresponding load sensor 90.

[0100] In the fourth operation control, the controller 100 drives the workpiece holder 14, 14A using the advance / retract driver 18, 18A based on the detection value of the corresponding load sensor 90. In the fourth operation control, for example, the controller 100 advances the workpiece holder 14, 14A using the advance / retract driver 18, 18A until the detection value of the corresponding load sensor 90 reaches the target load. After the detection value of the corresponding load sensor 90 reaches the target load, the controller 100 may maintain the rotation driver 16, 16A stopped using the advance / retract driver 18, 18A so that the detection value of the load sensor 90 is maintained at the target load. The target load may be set within the second target range described above.

[0101] 8, the controller 100 includes a circuit 120. The circuit 120 includes one or more processors 121, a memory 122, a storage 123, and an input / output port 125. The storage 123 includes a computer-readable storage medium such as a non-volatile semiconductor memory. The storage 123 stores a program that causes the controller 100 to control the rotary conveying units 10 and 10A, the multiple processing units 40, the multiple load sensors 90, and the camera 80 according to a preset control procedure.

[0102] The memory 122 temporarily stores programs loaded from a storage medium in the storage 123 and calculation results by the processor 121. The processor 121 controls the rotary conveying units 10, 10A, the multiple processing units 40, the multiple load sensors 90, and the camera 80 by executing the programs in cooperation with the memory 122. The input / output port 125 inputs and outputs electrical signals between the rotary conveying units 10, 10A, the multiple processing units 40, the multiple load sensors 90, and the camera 80, etc., in accordance with instructions from the processor 121. Note that the circuit 120 is not necessarily limited to one that configures each function by a program. For example, at least some of the functions of the circuit 120 may be configured by a dedicated logic circuit or an ASIC (Application Specific Integrated Circuit) that integrates such logic circuits.

[0103] [Processing method] Next, a series of processes executed by the controller 100 will be described as an example of a method for processing workpieces W by a part processing device. FIG. 9 is a flowchart illustrating a process flow executed by the controller 100 when supplying one workpiece W from the supply unit 42 to the rotary conveying units 10, 10A. While this process flow is being executed, the controller 100 may continue to acquire load values ​​from each load sensor 90. FIG. 10 schematically illustrates the positions (radial or vertical positions) of the suction portions 22, 22A of the workpiece holders 14, 14A, the position in the push-up direction of the push-up member 55, and the changes over time in the detected values ​​by the corresponding load sensors 90 during the period when the process flow shown in FIG. 11 is being executed.

[0104] When the workpiece W to be supplied is positioned at the push-up position (a position where the push-up member 55 can push it up), the controller 100 executes step S11. In step S11, for example, the controller 100 controls the advance / retract drive units 18, 18A and the push-up drive unit 56 to start the first operation control. Before starting the drive of the push-up member 55, the controller 100 may start advancing the suction units 22, 22A by the advance / retract drive units 18, 18A in accordance with a predetermined operation command. At the start of the advancement of the suction units 22, 22A, the fixation by the transport fixing mechanisms 72, 73 is released, and the advance / retract drive units 18, 18A are fixed to the suction units 22, 22A by the advance / retract fixing mechanisms 74, 75. In the graph illustrated in FIG. 10, the advancement of the suction units 22, 22A begins at time "t0." The operation command for advancing the suction parts 22, 22A may be determined so that the speed of advancement of the suction parts 22, 22A decreases at a deceleration start position where the suction parts 22, 22A are advanced by a predetermined amount from the origin position (0).

[0105] After execution of step S11, for example, the controller 100 controls the advance / withdraw drive units 18, 18A so that the suction units 22, 22A stop when the suction units 22, 22A advance to position P1 (the first position) determined by the operation command to advance the suction units 22, 22A. Then, after the suction units 22, 22A stop, the controller 100 may start advancing the push-up member 55 by the push-up drive unit 56 in accordance with the predetermined operation command.

[0106] Next, the controller 100 executes step S12. In step S12, for example, the controller 100 waits until the push-up member 55 advances by a first predetermined amount p1 from the initial position. The first predetermined amount p1 is set to, for example, an amount at which the workpiece W to be supplied, which has been pushed up by the push-up member 55 via the sheet WS1, contacts the suction portions 22, 22A, or an amount immediately before contact.

[0107] Next, the controller 100 executes step S13. In step S13, for example, the controller 100 controls the advance / retreat drive units 18, 18A and the thrust drive unit 56 to start the second operation control. As a result, the control mode by the controller 100 switches from the first operation control to the second operation control. In the graph illustrated in FIG. 10, the control mode switches to the second operation control at time "t1."

[0108] After step S13 is executed, for example, the controller 100 continues to drive the push-up member 55 by the push-up driver 56 in accordance with a predetermined operation command. During this time, the controller 100 causes the advancing and retracting drivers 18 and 18A to retract the suction units 22 and 22A so that the load detection value by the corresponding load sensor 90 follows the target load TF1. The controller 100 may adjust the speed at which the advancing and retracting drivers 18 and 18A retract the suction units 22 and 22A so that the deviation between the load detection value by the corresponding load sensor 90 and the target load TF1 is reduced.

[0109] Next, the controller 100 executes step S14. In step S14, for example, the controller 100 waits until the push-up member 55 advances by a second predetermined amount p2 from the initial position. The second predetermined amount p2 is set to, for example, an amount that makes it easy to peel the workpiece W to be supplied from the sheet WS1. In the graph illustrated in FIG. 10, at time "t2", the push-up member 55 advances by the second predetermined amount p2.

[0110] Next, the controller 100 executes step S15. In step S15, for example, the controller 100 executes retraction control. In one example, the controller 100 controls the advance / retract drive units 18, 18A and the push-up drive unit 56 so as to stop the suction units 22, 22A and the push-up member 55 for a predetermined time after executing step S14. Then, the controller 100 controls the advance / retract drive units 18, 18A so as to retract the suction units 22, 22A to the origin position, and controls the push-up drive unit 56 so as to retract the push-up member 55 to the initial position. After the suction units 22, 22A retract to the origin position, the suction units 22, 22A are fixed to the support units 12, 12A by the transport fixing mechanisms 72, 73, and the fixation by the advance / retraction fixing mechanisms 74, 75 is released.

[0111] By executing the above process flow, the workpiece W to be supplied is transferred from the supply unit 42 to the rotary conveying units 10, 10A (workpiece holders 14, 14A). Thereafter, the controller 100 may execute the series of processes from steps S11 to S15 again with a different individual workpiece W as the supply target.

[0112] 11 is a flowchart illustrating a processing flow executed by the controller 100 when one workpiece W is collected from the rotary conveying units 10, 10A to the collection unit 44. While this processing is being executed, the controller 100 may continue to acquire a load value from the corresponding load sensor 90. FIG. 12 schematically illustrates the position (radial or vertical position) of the suction portions 22, 22A of the workpiece holders 14, 14A and the time change in the detected value by the corresponding load sensor 90 during the period when the processing flow shown in FIG. 11 is being executed.

[0113] With the workpiece W to be collected placed at the detection stop position SP, the controller 100 executes step S21. In step S21, for example, the controller 100 causes the camera 80 to acquire an image of the workpiece W held by the suction parts 22, 22A placed at the detection stop position SP.

[0114] Next, the controller 100 executes step S22. In step S22, for example, the controller 100 calculates the inclination of the workpiece W with respect to the ideal state based on the image data obtained in step S21, and then calculates a correction amount according to the inclination. The controller 100 calculates the correction amount for the inclination of the workpiece W so that the inclination of the workpiece W approaches zero (so that the posture of the workpiece W approaches the ideal state).

[0115] Next, the controller 100 executes step S23. In step S23, for example, the controller 100 controls the corresponding correction drive unit 26 or the correction drive unit of the corresponding workpiece holding unit 14A so as to rotate the workpiece W (suction unit 22, 22A) around the axis by the correction amount calculated in step S22 (the rotation amount according to the correction amount).

[0116] Then, the controller 100 executes step S24 when the area on the front surface S2a of the sheet WS2 where the workpiece W to be collected is to be accommodated is positioned at the attachment position (a position where attachment can be performed by the suction units 22 and 22A) and the suction units 22 and 22A holding the workpiece W to be collected have moved to the collection stop position SP. In step S24, for example, the controller 100 controls the holding drive unit 82 to start the third operation control. The controller 100 may start advancing the suction units 22 and 22A by the advance / retract drive units 18 and 18A in accordance with a predetermined operation command. At the start of the advancement of the suction units 22 and 22A, the fixation by the transport fixation mechanisms 72 and 73 is released, and the advancing / retraction drive units 18 and 18A fix the suction units 22 and 22A to the advance / retraction drive units 18 and 18A by the advance / retraction fixation mechanisms 74 and 75. In the graph illustrated in FIG. 12, the advancement of the suction units 22 and 22A begins at time "t0."

[0117] Next, the controller 100 executes steps S25 and S26. In step S25, for example, the controller 100 waits until the suction units 22, 22A advance from the origin position to a predetermined deceleration start position. The deceleration start position is set to a position where the workpiece W to be collected held by the suction units 22, 22A does not come into contact with the sheet WS2. In step S26, for example, the controller 100 continues driving the suction units 22, 22A by the advance / retract drive units 18, 18A in accordance with a predetermined operation command so as to continue the third operation control after reducing the operating speed of the suction units 22, 22A. In the graph illustrated in FIG. 12, at time "t1," the suction units 22, 22A advance to the deceleration start position and their speeds decrease.

[0118] Next, the controller 100 executes step S27. In step S27, for example, the controller 100 waits until a predetermined switching condition is met. The switching condition is a condition for switching from the third operation control to the fourth operation control, and is determined in advance through prior experiments, etc. In one example, the rotary conveying unit 10 determines that the switching condition is met when the load detected by the corresponding load sensor 90 exceeds a predetermined threshold. The predetermined threshold may be set in advance to a value at which it is estimated that the workpiece W held by the suction portion 22, 22A has come into contact with the sheet WS2.

[0119] Next, the controller 100 executes step S28. In step S28, for example, the controller 100 controls the advance / retreat drive units 18, 18A to start the fourth operation control. As a result, the control mode by the controller 100 switches from the third operation control to the fourth operation control. In the graph illustrated in FIG. 12, the control mode switches to the fourth operation control at time "t2."

[0120] After the start of the fourth operation control, for example, the controller 100 continues driving (adjusting the position) the adsorption units 22, 22A by the advance / retract drivers 18, 18A so that the load detection value by the corresponding load sensor 90 approaches the target load TF2. In one example, the controller 100 may adjust the position of the adsorption units 22, 22A so that the deviation between the detection value by the corresponding load sensor 90 and the target load TF2 is reduced.

[0121] Next, the controller 100 executes step S29. In step S29, for example, the controller 100 waits until a predetermined time has elapsed since the execution of step S28 was started. The predetermined time is set in advance, for example, to a time that allows the workpiece W to be sufficiently attached to the sheet WS2 without applying an excessive load to the workpiece W. The predetermined time may be set through prior experiments, etc. In the graph illustrated in FIG. 12, at time "t3", the load detected by the corresponding load sensor 90 approximately matches the target load TF2, and in this state, the fourth operation control continues until time "t4". Time "t4" is the point at which the predetermined time has elapsed.

[0122] Next, the controller 100 executes step S30. In step S30, for example, the controller 100 executes retreat control. In one example, the controller 100 controls the advance / withdraw drive units 18, 18A so that the suction units 22, 22A retreat to the origin position. In the graph illustrated in FIG. 12, the suction units 22, 22A return to the origin position at time "t5." After the suction units 22, 22A retreat to the origin position, the suction units 22, 22A are fixed to the support units 12, 12A by the transport fixing mechanisms 72, 73, and the fixation by the advance / withdraw fixing mechanisms 74, 75 is released.

[0123] By executing the above process flow, the workpiece W to be collected is transferred from the rotary conveying units 10, 10A to the collection unit 44. Thereafter, the controller 100 may execute the series of processes of steps S21 to S30 again with a different individual workpiece W as the collection target. The controller 100 may execute the series of processes of steps S24 to S30 during a period that overlaps with at least a part of the period during which the series of processes of steps S11 to S15 illustrated in FIG. 9 is being executed.

[0124] [When a movable stage is provided] Next, with reference to FIGS. 13 to 15, an example of a case where the stage 58 is provided so as to be movable in the direction in which the push-up member 55 moves (the above-mentioned push-up direction) will be described in detail. As described above, the stage 58 is configured to attract the area around the push-up position on the back surface S1b of the sheet WS1 held by the sheet holding unit 52. The area that the stage 58 attracts is an area that corresponds to the workpiece W to be supplied that is arranged in a position overlapping with the push-up position and at least a portion of each of one or more workpieces W located around the workpiece W to be supplied. The one or more workpieces W located around the workpiece W to be supplied include workpieces W that are adjacent to the workpiece W to be supplied in the vertical direction, horizontal direction, or diagonal direction.

[0125] The movably provided stage 58 is capable of adsorbing an area around the push-up position on the back surface S1b of the sheet WS1 and then protruding that area toward the workpiece holder 14 (adsorption portion 22) arranged to face the push-up member 55. As shown in FIG. 13(a) and other figures, the stage 58 includes, for example, a main body 58a and a cover member 58b. The main body 58a is a cylindrical member having an internal space and is open at one end thereof near the sheet WS1 in the push-up direction. The cover member 58b is provided at the open end of the main body 58a and, together with the main body 58a, forms an internal space of the stage 58. The push-up member 55 is housed in the internal space of the stage 58.

[0126] The cover member 58b includes a tip surface that can come into surface contact with the back surface S1b of the sheet WS1. As viewed in the X-axis direction, the size of the cover member 58b is larger than the size of one workpiece W. The cover member 58b is provided with a plurality of suction holes 58c for applying a suction force to the back surface S1b of the sheet WS1. Each of the plurality of suction holes 58c is formed to penetrate the main body portion of the cover member 58b along the X-axis direction. As viewed in the X-axis direction, one suction hole 58c is provided at a position corresponding to the push-up member 55, and the suction hole 58c has a size that allows the push-up member 55 to pass through. At least a portion of the other suction holes 58c located around the suction hole 58c through which the push-up member 55 passes is formed at a position that overlaps with the workpiece W located around the workpiece W to be supplied, as viewed in the X-axis direction. The supply unit 42 may include a stage driver 59a that drives the stage 58 (main body portion 58a and cover member 58b) in the push-up direction.

[0127] The supply unit 42 has a suction unit 59b. The suction unit 59b sucks gas from inside the stage 58 so as to create a negative pressure in the internal space of the stage 58. The suction unit 59b includes, for example, a flow path connecting the internal space of the stage 58 to a suction pump (vacuum pump) and an opening / closing member such as an electromagnetic valve that opens and closes the flow path. The suction unit 59b switches the suction state of the stage 58 between an on state and an off state using, for example, the opening / closing member such as an electromagnetic valve. The open / close state of the opening / closing member included in the suction unit 59b is switched in response to an operation command from the controller 100.

[0128] 13A illustrates an example of the operation of the workpiece holder 14, which is positioned at the supply stop position SP, when it receives the workpiece W to be supplied from the supply unit 42 having a movable stage 58. FIG. 13A illustrates a state in which the suction unit 22, the push-up member 55, and the stage 58 are each positioned at their origin positions. "xs" indicates a position in the X-axis direction, which corresponds to the origin position of the tip of the stage 58. "xa" indicates a position in the X-axis direction, which corresponds to the origin position of the tip of the suction unit 22.

[0129] In one example, the operation associated with the delivery of the workpiece W to be supplied is performed as follows: The transport fixing mechanism 72 and the advance / retreat fixing mechanism 74 may each operate in the same manner as when the stage 58 is fixed. While the next operation is being performed, the workpiece holding unit 14 (suction unit 22) may be maintained in a state in which it is able to suction the workpiece W, and the stage 58 may be maintained in a state in which it is sucking the back surface S1b of the sheet WS1. (a) The push-up member 55 and the stage 58 start to advance at approximately the same timing. During these advances, the tip of the push-up member 55 is kept from protruding from the stage 58. (b) At approximately the same timing as the start of the advancement in (a) above, the adsorption part 22 starts to advance by being driven by the advance / retraction drive part 18. (c) The moving speed of the suction part 22 decreases at a predetermined position further forward than the origin position, and the suction part 22 stops at a further predetermined position. Even after the suction part 22 stops, the push-up member 55 and the stage 58 continue to move forward. (d) When it is detected that the workpiece W to be supplied has come into contact with the suction unit 22, the forward movement of the push-up member 55 and the stage 58 is stopped. Fig. 13(b) illustrates a state in which the suction unit 22, the push-up member 55, and the stage 58 have stopped.

[0130] (e) The stage 58 starts to move backward while the push-up member 55 remains stopped. As the stage 58 moves backward, the tip of the push-up member 55 protrudes from the tip surface of the stage 58, and the workpiece W to be supplied is sandwiched between the suction portion 22 and the push-up member 55, as illustrated in FIG. (f) After the stage 58 starts to move backward, when the push-up member 55 projects a certain amount from the tip of the stage 58, the suction part 22 starts to move backward, and the push-up member 55 starts to move backward. (g) After starting to move backward, the stage 58 stops when it reaches the origin position. (h) After starting to retreat, the suction portion 22 stops when it reaches the origin position, and after starting to retreat, the push-up member 55 stops when it reaches the origin position. 14(b) illustrates a state in which the suction unit 22, the push-up member 55, and the stage 58 are stopped at the origin position, and the workpiece W to be supplied is delivered to the suction unit 22. For ease of understanding, FIG. 14(a) illustrates a state in which the push-up member 55 remains stopped and the stage 58 retreats to the origin position.

[0131] The series of operations (a) to (h) above is an example. After a specific operation of one member is completed, a specific operation of another member may be started. For example, after the adsorption unit 22 has completed advancing to a predetermined position, the push-up member 55 and the stage 58 may start advancing. After the stage 58 has completed retreating, the adsorption unit 22 and the push-up member 55 may each start retreating. During the advancement of the stage 58, the speed of the stage 58 may be decelerated, similar to the adsorption unit 22.

[0132] In the operation (d) above, the controller 100 may determine that the suction unit 22 has come into contact with the workpiece W to be supplied based on the detection value by the load sensor 90 corresponding to the suction unit 22 to be operated (for example, when the detection value exceeds a predetermined contact load). In the series of operations (a) to (h) above, the controller 100 may determine that an abnormal load has been applied to the workpiece W when the detection value by the load sensor 90 corresponding to the suction unit 22 to be operated exceeds an abnormality threshold value that is determined to be abnormal.

[0133] 15 illustrates a processing flow executed by the controller 100 for the series of operations (a) to (h) above. The controller 100 executes step S51 when the workpiece W to be supplied is placed at the push-up position. In step S51, for example, the controller 100 controls the corresponding drive units so that the suction unit 22, the push-up member 55, and the stage 58 start to advance at approximately the same timing.

[0134] Next, the controller 100 executes steps S52 and S53. In step S52, for example, the controller 100 waits until the suction unit 22 advances a predetermined amount from the origin position. In step S53, for example, the controller 100 controls the advance / withdraw drive unit 18 to stop the suction unit 22. At the time step S53 is executed, the workpiece W to be supplied is not in contact with the suction unit 22, and the push-up member 55 and the stage 58 continue to advance.

[0135] Next, the controller 100 executes steps S54 and S55. In step S54, for example, the controller 100 waits until the detection value by the load sensor 90 corresponding to the suction unit 22 stopped in step S53 exceeds a predetermined contact load. The contact load is a load value (threshold value) at which it is determined that the workpiece W to be supplied has come into contact with the suction unit 22, and is determined, for example, through a preliminary experiment. In step S55, for example, the controller 100 controls the push-up driver 56 to stop the push-up member 55, and controls the stage driver 59a to stop the stage 58.

[0136] Next, the controller 100 executes steps S56 and S57. In step S56, for example, the controller 100 controls the stage driver 59a so that the stage 58 retreats to the origin position. At the start of execution of step S56, the suction unit 22 and the push-up member 55 remain stopped. Step S57 is executed while the stage 58 is retreating or after the stage 58 has completed retreating. In step S57, for example, the controller 100 controls the advance / retreat driver 18 so that the suction unit 22 retreats to the origin position, and controls the push-up driver 56 so that the push-up member 55 retreats to the origin position.

[0137] Instead of the series of operations (a) to (h) above, the operations involved in the transfer of the workpiece W to be supplied may be executed as follows. (a1) The push-up member 55 and the stage 58 start to advance at approximately the same timing. (b1) At approximately the same timing as the start of advancement in (a1) above, the adsorption part 22 starts to advance by being driven by the advance / retract drive part 18. (c1) The moving speed of the suction part 22 decreases at a predetermined position further forward than the origin position, and the suction part 22 stops at a further predetermined position. Even after the suction part 22 stops, the push-up member 55 and the stage 58 continue to move forward. (d1) The push-up member 55 continues to move forward, and the stage 58 stops at a predetermined position further forward than the origin position. The predetermined positions at which the suction unit 22 and the stage 58 stop are set to positions at which the workpiece W to be supplied does not come into contact with the suction unit 22 when the suction unit 22 and the stage 58 stop.

[0138] (e1) When it is detected that the workpiece W to be supplied has come into contact with the suction portion 22, the push-up member 55 stops moving forward. (f1) After the push-up member 55 stops advancing, the suction unit 22, the push-up member 55, and the stage 58 start to retreat. (g1) After starting to retreat, the suction unit 22 stops when it reaches the origin position, and after starting to retreat, the stage 58 stops when it reaches the origin position. (h1) After starting to move backward, the push-up member 55 stops when it reaches the origin position.

[0139] In the operation (e1) above, the controller 100 may determine that the suction unit 22 has come into contact with the workpiece W to be supplied based on a detection value by the load sensor 90 corresponding to the suction unit 22 to be operated (for example, when the detection value exceeds a predetermined contact load). In the series of operations (a1) to (h1) above, the controller 100 may determine that an abnormal load has been applied to the workpiece W when a detection value by the load sensor 90 corresponding to the suction unit 22 to be operated exceeds an abnormality threshold value that is determined to be abnormal.

[0140] The series of operations (a) to (h) above and the series of processes in steps S51 to S57 may be executed in a component processing device 1 having a rotary conveying unit 10A. The series of operations (a1) to (h1) above may be executed in a component processing device 1 having a rotary conveying unit 10A.

[0141] [Variations] The processing flows illustrated in Figures 9, 11, and 15 are merely examples and can be modified as appropriate. In the above processing flows, the controller 100 may execute one step and the next step in parallel, or may execute the steps in an order different from that of the above-described example. In any step, the controller 100 may execute processing with content different from that of the above-described example.

[0142] In the process flow shown in Fig. 11, the controller 100 may not execute the series of processes of steps S21 to S23 related to correcting the tilt of the workpiece W to be collected. In this case, the component processing device 1 may not be equipped with the camera 80, and the workpiece holding units 14, 14A may not have a correction drive unit. In the process flow shown in Fig. 9, the controller 100 may execute a series of processes similar to steps S21 to S23 to correct the tilt of the suction units 22, 22A before holding the workpiece W. In this case, the component processing device 1 may be equipped with a camera capable of capturing an image of the tip of the suction units 22, 22A before holding the workpiece W, instead of or in addition to the camera 80.

[0143] When the intermediate processing unit 46 (second processing unit) performs unit processing together with the corresponding workpiece holding unit 14, 14A, the controller 100 may control the corresponding advance / retract drive unit 18, 18A (second advance / retract drive unit) based on the detection value of the corresponding load sensor 90. The corresponding advance / retract drive unit 18, 18A may move the corresponding workpiece holding unit 14, 14A during a period overlapping at least a portion of a period during which the advance / retract drive unit 18, 18A provided at the supply stop position SP drives the workpiece holding unit 14, 14A. The corresponding advance / retract drive unit 18, 18A may move the corresponding workpiece holding unit 14, 14A during a period overlapping at least a portion of a period during which the advance / retract drive unit 18, 18A provided at the recovery stop position SP drives the workpiece holding unit 14, 14A. Instead of feedback control based on the detection value by the corresponding load sensor 90, the controller 100 may detect an abnormality in the load applied to the workpiece W to be processed in the intermediate processing unit 46 based on the detection value by the corresponding load sensor 90.

[0144] The target load ranges for drive control of the suction units 22, 22A based on the detection values ​​of the corresponding load sensors 90 may be different between the intermediate processing unit 46 and the supply unit 42. The target load ranges for drive control of the suction units 22, 22A based on the detection values ​​of the corresponding load sensors 90 may be different between the intermediate processing unit 46 and the collection unit 44. Drive control of the suction units 22, 22A based on the detection values ​​of the corresponding load sensors 90 may be performed in two or more types of processing units 40 arbitrarily selected from the supply unit 42, the collection unit 44, and two or more intermediate processing units 46. Drive control of the suction units 22, 22A based on the detection values ​​of the corresponding load sensors 90 may be performed in one type of processing unit 40 arbitrarily selected from the supply unit 42, the collection unit 44, and two or more intermediate processing units 46.

[0145] In one example of the various examples described above, at least some of the features described in other examples may be combined.

[0146] Summary of this disclosure The present disclosure includes the following configurations [1] to [7].

[0147] [1] A plurality of workpiece holding sections (14, 14A), each configured to hold a workpiece (W); a support section (12, 12A) that supports the plurality of workpiece holding sections (14, 14A) so as to be positioned on a circular orbit (CR); a rotation drive section (16, 16A) that rotates the support section (12, 12A) around a central axis (Ax) of the circular orbit (CR); and a forward / backward drive section (16, 16A) that moves the first workpiece holding section (14, 14A) along a predetermined direction when a first workpiece holding section (14, 14A), which is one of the plurality of workpiece holding sections (14, 14A), is positioned at a predetermined position (SP) on the circular orbit (CR). a processing unit (40) that performs a predetermined process on a workpiece (W) together with a drive unit (18, 18A); a first workpiece holding unit (14, 14A) driven by the advance / retract drive unit (18, 18A) at the predetermined position (SP); transport fixing mechanisms (72, 73) configured to fix each of the plurality of workpiece holding units (14, 14A) to a support unit (12, 12A) in a releasable state; and an advance / retract fixing mechanism (74, 74A) configured to fix the first workpiece holding unit (14, 14A) to the advance / retract drive unit (18, 18A) when the fixation by the transport fixing mechanism (72, 73) is released. In a configuration in which the workpiece holding portion (14, 14A) is moved forward and backward while rotating together with the support portion (12, 12A), a spring element such as a coil spring may be provided in the workpiece holding portion to maintain the workpiece holding portion (14, 14A) at its home position during rotation. In the component processing device (1), instead of providing a spring element, the workpiece holding portion (14, 14A) and the forward and backward drive portion (18, 18A) are fixed to each other to move the workpiece holding portion (14, 14A) forward and backward. This reduces the individual differences between the workpiece holding portions compared to a configuration in which a spring element, which has large individual differences, is provided. As a result, the load variation due to such individual differences is also reduced. Therefore, the component processing device (1) is useful for stable operation of the device.

[0148] Here, we will explain an example of a problem caused by individual differences in spring elements. In a configuration equipped with a spring mechanism, while springs vary from one to another, a rotary conveying unit is provided with multiple workpiece holders (e.g., multiple suction holders), and a coil spring is incorporated into the mounting mechanism of each workpiece holder. When the workpiece holders move forward or backward, they are driven by a drive unit in a direction that resists the coil spring, so individual differences in the springs affect the forward or backward movement. As a result, even when operating with the same parameters, variations can occur in the acceleration and speed of the workpiece holders or in the load applied to the workpiece due to contact when the workpiece is handed over by the workpiece holder. In this case, there is a risk of unnecessary impact loads or static loads being generated on the workpiece, which may result in problems such as workpiece damage or poor attachment. In contrast, the part processing device (1) does not use spring elements for the advancement and retreat of the workpiece holders, thereby reducing the individual differences that occur when operating multiple workpiece holders. This allows each workpiece holder to perform an operation pattern with minimal variation using the same parameter settings, and also reduces variation in the load generated during contact. As a result, the load applied to the workpiece being processed during processing (for example, during delivery) can be uniformed, preventing damage to the workpiece.

[0149] Furthermore, in configurations that include spring elements, the springs deteriorate with repeated use and may even break. For example, if the component processing device (1) is a die sorter, it operates with a very short cycle time and may be required to operate continuously for 24 hours, resulting in a very high number of operations within a given period (for example, approximately 500,000 to 1.5 million cycles per day). This places a heavy burden on mechanical components, including spring elements, and they are prone to deterioration. Continued use with deteriorated spring elements may result in product transport problems or damage to mechanical components. Furthermore, compared to other mechanical parts, the number of cycles of springs is short, making springs a bottleneck in extending the lifespan of mechanical parts. Spring durability is also a bottleneck in extending equipment maintenance intervals and is an issue in improving equipment operating rates. In contrast, by directly connecting the advance / retract drive unit (18, 18A) and the workpiece holder unit (14, 14A) using a magnet or a physical restraint mechanism (such as an insertion pin), and by configuring the system without using a spring element for advance / retraction, mechanical parts with a relatively short repetition life can be eliminated. This extends the life of the entire device and extends the interval between scheduled maintenance. As a result, planned downtime for device maintenance can be reduced, improving device availability. It also reduces the possibility of transport problems and damage to mechanical parts due to deterioration or damage to parts.

[0150] [2] The processing unit (40) further includes a plurality of load sensors (90), each of which is provided in a corresponding work holding portion (14, 14A) of the plurality of work holding portions (14, 14A) and detects a load applied to the corresponding work holding portion (14, 14A). The processing unit (40) is a unit (42) that supplies a work (W) to the first work holding portion (14, 14A). The processing unit (42) includes a sheet holding portion (52) that holds a sheet (WS1) having the work (W) attached to its front surface (S1a), a push-up member (55) that faces the back surface (S1b) of the sheet (WS1), and a push-up drive portion (56) that moves the push-up member (55) in the predetermined direction so that the work (W) is pushed up through the sheet (WS1) and the work (W) approaches the first work holding portion (14, 14A). When processing a workpiece (W), it is necessary to accurately manage the load acting on the workpiece (W). In the part processing device (1), a load sensor (90) is provided on a member holding the workpiece (W), allowing the load acting on the workpiece (W) to be detected near the portion holding the workpiece (W). This allows highly accurate load management through feedback control based on the detected load value or abnormality detection based on the detected load value. Furthermore, since multiple workpiece holding units (14, 14A) are provided, while one workpiece holding unit (14, 14A) is performing processing associated with the supply of the workpiece (W) while managing the load, other processing units and other workpiece holding units (14, 14A) can perform other processing on different individual workpieces (W). Therefore, the part processing device (1) is useful for achieving both highly accurate load management and high productivity. If a spring element such as a coil spring is provided in the workpiece holding portion (14, 14A), the spring element causes disturbance in the detection result of the load sensor (90). In contrast, in the above configuration, the workpiece holding portion (14, 14A) moves forward and backward without the spring element, so that the load can be detected with higher accuracy.

[0151] [3] The component processing device according to [2] above, further comprising a controller (100) communicatively connected to a plurality of load sensors (90) and controlling the advance / retreat drive unit (18, 18A) based on a detection value from the first load sensor (90) corresponding to the first workpiece holding unit (14, 14A). One possible method for detecting the load applied to the workpiece (W) is to detect the load applied to the push-up member (55) that pushes up the workpiece (W), but in this case, the reaction force from the sheet (WS1) is also detected as a load. In contrast, in the above configuration, the load sensor (90) is provided in the workpiece holding portion (14, 14A), so that the load applied to the workpiece (W) can be detected with high accuracy.

[0152] [4] The component processing device (1) described in [2] or [3] above, further comprising: a second advance / retract drive unit (18, 18A) that moves the second work holding unit (14, 14A) along the second predetermined direction (SP) when the second work holding unit (14, 14A), which is another one of the plurality of work holding units (14, 14A), is positioned at a second predetermined position (SP) on the circular orbit (CR); and a second processing unit (44, 46) that performs processing on the workpiece different from that performed by the processing unit (42) together with the second work holding unit (18, 18A) driven by the second advance / retract drive unit (18, 18A) at the second predetermined position (SP). In this case, different processes can be performed at substantially the same time at at least two locations on the circular orbit (CR) while managing the load on the workpiece (W), which is further useful for achieving both highly accurate load management and high productivity.

[0153] [5] The component processing device (1) according to any one of [2] to [4] above, wherein the second processing unit (44) is a unit that retrieves the workpiece (W) from the second workpiece holding section (14, 14A) into a storage member (WS2) that includes a surface to which the workpiece (W) can be attached by adhesive. At two points on the circular orbit (CR), the load on the workpiece (W) can be managed, and the workpiece (W) can be picked up from the sheet (WS1) and attached to the storage member (WS2) at substantially the same time. This is therefore even more useful for achieving both highly accurate load management and high productivity.

[0154] [6] The component processing device (1) described in [1] above, further comprising a plurality of load sensors (90), each of which is provided in a corresponding work holding portion (14, 14A) of the plurality of work holding portions (14, 14A) and detects a load applied to the corresponding work holding portion (14, 14A), wherein the processing unit (40) is a unit (44) that recovers the work (W) from the first work holding portion (14, 14A) driven by the advance / retract drive unit (18, 18A) at a predetermined position (SP1), and the processing unit (44) is configured to recover the work (W) into a storage member (WS2) that includes a surface to which the work (W) can be attached by adhesive. When processing a workpiece (W), it is necessary to accurately manage the load acting on the workpiece (W). In the part processing device (1), a load sensor (90) is provided on a member holding the workpiece (W), allowing the load acting on the workpiece (W) to be detected near the portion holding the workpiece (W). This allows highly accurate feedback control based on the detected load value or highly accurate load management through abnormality detection based on the detected load value. Furthermore, since multiple workpiece holding units (14, 14A) are provided, while one workpiece holding unit (14, 14A) is performing processing related to the collection of the workpiece (W) while managing the load, other processing units and other workpiece holding units (14, 14A) can perform other processing on different individual workpieces (W). Therefore, the part processing device (1) is useful for achieving both highly accurate load management and high productivity. If a spring element such as a coil spring is provided in the workpiece holding portion (14, 14A), the spring element causes disturbance in the detection result of the load sensor (90). In contrast, in the above configuration, the workpiece holding portion (14, 14A) moves forward and backward without the spring element, so that the load can be detected with higher accuracy.

[0155] [7] A component processing device (1) according to any one of [1] to [6] above, wherein each of the plurality of work holding sections (14, 14A) holds a work (W) so that the work holding section and the work (W) are aligned in the holding direction, and each of the plurality of work holding sections (14, 14A) has a holding portion (22, 22A) that holds the work (W) and a correction drive section (26) that rotates the holding portion (22, 22A) around an axis along the holding direction. In this case, deviation of the posture of the workpiece (W) from the ideal state can be reduced.

[0156] [8] The component processing device (1) according to any one of the above items [3] to [5], wherein the second advance / withdraw drive unit (18, 18A) moves the second workpiece holding unit (14, 14A) during a period overlapping with at least a part of a period during which the advance / withdraw drive unit (18, 18A) is driving the first workpiece holding unit (14, 14A), and the controller (100) controls the second advance / withdraw drive unit (18, 18A) based on a detection value by a second load sensor (90) corresponding to the second workpiece holding unit (14, 14A). In this case, different processes are performed at substantially the same timing while managing the load on the workpiece (W) at at least two points on the circular orbit (CR), which is more useful for achieving both highly accurate load control and high productivity.

[0157] [9] The component processing device (1) described in [8] above, wherein the controller (100) controls the forward / backward driving unit (18, 18A) so that the detected value by the first load sensor (90) falls within a first target range, and the controller (100) controls the second forward / backward driving unit (18, 18A) so that the detected value by the second load sensor (90) falls within a second target range different from the first target range. In this case, the load can be appropriately managed in accordance with the processing content at least at two points on the circular orbit (CR). [Explanation of symbols]

[0158] 1...part processing device, W...work, 14, 14A...work holding section, 18, 18A...advance / retreat drive section, 22, 22A...suction section, 26...correction drive section, 40...processing unit, 42...supply unit, 52...sheet holding section, WS1...sheet, S1a...front surface, S1b...back surface, 55...push-up member, 56...push-up drive section, 44...recovery unit, 46...intermediate processing unit, 72, 73...transport fixing mechanism, 74, 75...advance / retreat fixation mechanism, 90...load sensor, 100...controller

Claims

1. a plurality of workpiece holders, each configured to hold a workpiece; a support portion that supports the plurality of workpiece holders so as to be positioned on a circular orbit; a rotation drive unit that rotates the support unit around a central axis of the circular orbit; an advance / retract drive unit that moves a first work holding unit, which is one of the plurality of work holding units, along a predetermined direction when the first work holding unit is disposed at a predetermined position on the circular orbit; a processing unit that performs a predetermined process on the workpiece together with the first workpiece holder driven by the advance / retract drive unit at the predetermined position; a transport fixing mechanism configured to fix each of the plurality of workpiece holding parts to the support part in a releasable state; a forward / backward fixing mechanism configured to fix the first workpiece holding unit to the forward / backward driving unit when the first workpiece holding unit is released from the fixing mechanism for transport, Parts handling equipment.

2. Further, a plurality of load sensors are provided on corresponding workpiece holding portions among the plurality of workpiece holding portions, and each load sensor detects a load applied to the corresponding workpiece holding portion; the processing unit is a unit that supplies a workpiece to the first workpiece holder, The processing unit a sheet holding unit that holds a sheet having a workpiece attached to its surface; a push-up member facing the back surface of the sheet; a push-up drive unit that moves the push-up member in the predetermined direction so that the workpiece is pushed up through the sheet and approaches the first workpiece holding unit, The parts processing device according to claim 1 .

3. a controller connected to the plurality of load sensors so as to be able to communicate with each other and controlling the advance / retract drive unit based on a detection value of a first load sensor corresponding to the first workpiece holder; The parts processing device according to claim 2 .

4. a second forward / backward driving unit that moves a second work holding unit, which is another one of the plurality of work holding units, along a second predetermined direction when the second work holding unit is disposed at a second predetermined position on the circular orbit; and a second processing unit that performs a process on a workpiece different from that performed by the processing unit together with the second workpiece holder that is driven by the second forward / backward driving unit at the second predetermined position. The parts processing device according to claim 3 .

5. The second processing unit is a unit that recovers the workpiece from the second workpiece holding portion into a storage member including a surface to which the workpiece can be attached by adhesive. The parts processing device according to claim 4 .

6. Further, a plurality of load sensors are provided on corresponding workpiece holding portions among the plurality of workpiece holding portions, and each load sensor detects a load applied to the corresponding workpiece holding portion; the processing unit is a unit that retrieves a workpiece from the first workpiece holder driven by the advance / retract drive unit at the predetermined position, The processing unit is configured to collect the workpiece into a storage member including a surface to which the workpiece can be attached by adhesive. The parts processing device according to claim 1 .

7. Each of the plurality of workpiece holding units holds a workpiece so that the workpiece and the workpiece are aligned in a holding direction, Each of the plurality of workpiece holding units has a holding portion that holds a workpiece, and a correction drive unit that rotates the holding portion around an axis along the holding direction. The parts processing device according to any one of claims 1 to 6.

8. the second advance / retract drive unit moves the second workpiece holding unit during a period that overlaps with at least a portion of a period during which the advance / retract drive unit drives the first workpiece holding unit, the controller controls the second forward / backward driving unit based on a detection value by a second load sensor corresponding to the second workpiece holding unit.

6. The parts processing device according to claim 4 or 5.

9. the controller controls the forward / backward driving unit so that the detection value of the first load sensor falls within a first target range; the controller controls the second forward / backward movement drive unit so that the detected value by the second load sensor falls within a second target range different from the first target range. The parts processing device according to claim 8 .

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