Alignment method, laminate manufacturing method, alignment device, laminate manufacturing device, and laminate

Abstract

The present invention includes: a layering step for layering a first object and a second object; a detection step for, after the layering step, detecting a first signal obtained from a first array body of the first object and a second signal obtained from a second array body of the first object, and detecting a third signal obtained from a second array body of the second object, and a fourth signal obtained from a first array body of the second object; a calculating step for fitting each of the first to fourth signals to thereby find a positional deviation between the first object and the second object; and an adjustment step for adjusting the positional deviation. The first array body includes a first periodic structure of a period p1, and the second array body includes a second periodic structure of a period p2. The first array body and the second array body of the first object, and the second array body and the first array body of the second object are disposed such that any one of the array bodies does not overlap when layered.

Description

[Technical Field]

[0001] The present invention relates to an alignment method, a laminate manufacturing method, an alignment device, a laminate manufacturing device, and a laminate. This application claims priority based on Japanese Patent Application No. 2021-001685, filed on January 7, 2021, the contents of which are incorporated herein by reference. [Background technology]

[0002] In recent years, nanoimprint lithography (NIL) has been the subject of much research and development as a technique for transferring fine patterns onto semiconductor and other electronic devices. Optical NIL, a light-irradiation method using a flowable ultraviolet-curable resin (hereafter referred to as "resin"), has attracted attention as an inexpensive pattern transfer technique advantageous for mass production. When fabricating electronic devices using optical NIL, multiple (e.g., 20 or more) micropattern transfers (lithography) are sometimes performed. In this case, alignment marks formed on a substrate (e.g., a wafer) fabricated in a previous process must be aligned with alignment marks on a mold, which is the mold used for the transfer, with high precision.

[0003] As a method for performing such alignment, for example, application of the "moiré phenomenon" has been proposed (see, for example, Non-Patent Document 1). For example, Patent Document 1 proposes a technology for performing alignment by laminating a mold including mold-side alignment marks and mold-side moiré marks, a resin composition layer including a fluorescent dye, and a patterned substrate including substrate-side alignment marks and substrate-side moiré marks, detecting misalignment between the mold-side alignment marks and substrate-side alignment marks, detecting misalignment between the mold-side moiré marks and substrate-side moiré marks based on fluorescent moiré fringes, and moving the patterned substrate relative to the mold based on the two detected misalignments. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Publication No. 2018-22807 [Non-patent literature]

[0005] [Non-Patent Document 1] E.Kikuchi, Y.Ishito, S.Matsubara, T.Nakamura, M.Abe, and M.Nakagawa, "Principle and observation of fluorescence moire fringes for alignment in print and imprint methods", Journal of Vacuum Science & Technology B, 35 (2017) 06G303; doi: 10.1116 / 1.4990844 Summary of the Invention [Problem to be solved by the invention]

[0006] However, conventional alignment by fluorescent imprinting is highly dependent on the pixel length used for detection (= element pixel pitch (specific pixel pitch of the CCD) / observation magnification), and requires a high observation magnification (e.g., 50x), which increases the size and cost of the equipment. Furthermore, conventional techniques make it difficult to align the upper and lower objects with atomic-scale accuracy.

[0007] The present invention has been made in consideration of the above-mentioned problems, and aims to provide an alignment method, a method for manufacturing a stack, an alignment device, a stack manufacturing device, and a stack, which are capable of aligning an upper object and a lower object with an accuracy of atomic-scale error. [Means for solving the problem]

[0008] In order to achieve the above object, an alignment method according to one aspect of the present invention includes a stacking step of stacking a first object and a second object; and a detection step of, after the stacking step, detecting a first light obtained from a first array provided on the first object as a first signal, a second light obtained from a second array provided on the first object as a second signal, a third light obtained from the second array provided on the second object as a third signal, and a fourth light obtained from the first array provided on the second object as a fourth signal; and a calculation step of determining the positional deviation between the first object and the second object by fitting the second signal, the third signal, and the fourth signal, respectively; and an adjustment step of adjusting the positional deviation, wherein the first array has a first periodic structure having a period p1, and the second array has a second periodic structure having a period p2, and the first array and the second array provided on the first object, and the second array and the first array provided on the second object are arranged so that they do not overlap when stacked.

[0009] Furthermore, in an alignment method according to one aspect of the present invention, the first signal, the second signal, the third signal, and the fourth signal obtained from the first array and the second array may be luminescence from a layer located between the first object and the second object.

[0010] Furthermore, in an alignment method according to one aspect of the present invention, the first signal, the second signal, the third signal, and the fourth signal obtained from the first array and the second array may be scattered light from the first array and the second array.

[0011] In the alignment method according to one aspect of the present invention, in the stacking step, the first object and the second object may be stacked so that a gap between them is 3 μm or less.

[0012] Furthermore, in an alignment method according to one aspect of the present invention, the first array may be made up of the first periodic structure having a period of 20 or more, and the second array may be made up of the second periodic structure having a period of 20 or more.

[0013] In order to achieve the above object, a method for manufacturing a laminate according to one aspect of the present invention provides a laminate comprising a first object and a second object, the laminate comprising a first array having a first periodic structure with a period p1 and a second array having a second periodic structure with a period p2 provided on the first object, the second array and the first array provided on the second object being stacked together such that neither overlaps the other when stacked, and a method for manufacturing a laminate comprising the steps of: stacking a first object and a second object; The method includes a detection step of detecting first light as a first signal, detecting second light obtained from the second array as a second signal, detecting third light obtained from the second array provided on the second object as a third signal, and detecting fourth light obtained from the first array as a fourth signal; a calculation step of finding the positional deviation between the first object and the second object by fitting the detected first signal, second signal, third signal, and fourth signal, respectively; and an adjustment step of adjusting the positional deviation.

[0014] In order to achieve the above object, an alignment device according to one aspect of the present invention is an alignment device that stacks a first object and a second object to align a positional deviation between the first object and the second object, the alignment device including: a first array having a first periodic structure with a period p1 and a second array having a second periodic structure with a period p2 provided on the first object; and a stacking unit that stacks the first object and the second object such that one of the first array and the second array does not overlap with the other when the stacked first object and the second object are stacked; The optical system includes a detection means for detecting a first light obtained from a first array provided on the first object as a first signal, a second light obtained from a second array as a second signal, a third light obtained from the second array provided on the second object as a third signal, and a fourth light obtained from the first array as a fourth signal, a calculation means for calculating a positional deviation between the first object and the second object by fitting the detected first signal, the second signal, the third signal, and the fourth signal, respectively, and an adjustment means for adjusting the positional deviation.

[0015] In order to achieve the above object, a laminate manufacturing apparatus according to one aspect of the present invention is an apparatus for manufacturing a laminate by stacking a first object and a second object, the apparatus comprising: a stacking unit that stacks a first array having a first periodic structure with a period p1 and a second array having a second periodic structure with a period p2 provided on the first object, the second array and the first array provided on the second object, such that none of the first and second objects overlap when stacked; and a stacking unit that stacks the first and second objects such that none of the first and second objects overlap when stacked; The device comprises a detection means for detecting a first light obtained from a first array as a first signal, a second light obtained from a second array as a second signal, a third light obtained from a second array provided on the second object as a third signal, and a fourth light obtained from the first array as a fourth signal, a calculation means for determining the positional deviation between the first object and the second object by fitting the detected first signal, the second signal, the third signal, and the fourth signal, respectively, and an adjustment means for adjusting the positional deviation to determine the stacking position.

[0016] In order to achieve the above-mentioned object, a laminate according to one embodiment of the present invention comprises a first object comprising a first array having a first periodic structure having a period p1 and a second array having a second periodic structure having a period p2, and a second object comprising the second array and the first array, wherein the first object and the second object are laminated so that either the first array and the second array provided on the first object or the second array and the first array provided on the second object do not overlap. [Effects of the Invention]

[0017] The alignment method, stack manufacturing method, alignment device, stack manufacturing device, and stack according to the above aspects can align the upper object and the lower object with an accuracy of atomic-scale error. [Brief explanation of the drawings]

[0018] [Figure 1] FIG. 1 is a diagram illustrating an example of the configuration of an alignment device according to an embodiment. [Figure 2] 1A and 1B are diagrams illustrating an example of the configuration of a laminate according to an embodiment. [Figure 3] 10A and 10B are diagrams showing examples of arrangements of arrays formed on a mold and arrays formed on a substrate according to an embodiment. [Figure 4] 10A and 10B are diagrams showing an example of the positional relationship between a mold and an array of substrates in a laminate according to an embodiment. [Figure 5] 3A to 3C are diagrams for explaining the shape, number, etc. of bars according to the embodiment. [Figure 6] 10A and 10B are diagrams illustrating an example of the relationship between a light-emitting body and a pixel size of an imaging element in a comparative example. [Figure 7] 10A and 10B are diagrams illustrating an example of an arrangement of light-emitting elements and an example of fitting of light intensity according to an embodiment. [Figure 8] 10A and 10B are diagrams illustrating an example of the positions of array elements before and after adjustment of misalignment according to an embodiment. [Figure 9] 10 is a flowchart illustrating an example of a procedure for detecting and adjusting a positional deviation amount according to the embodiment. [Figure 10] FIG. 10 is a diagram showing detected values ​​and standard errors when the light intensity resolution is 256 gradations at 8 bits and the analysis cycles are 5, 10, 20, 50, 100, and 120 cycles. [Figure 11] FIG. 10 is a diagram showing detected values ​​and standard errors when the light intensity resolution is 12 bits, 4096 gradations, and the analysis cycles are 5, 10, 20, 30, 40, 50, 100, and 120 cycles. [Figure 12] FIG. 10 is a diagram showing detected values ​​and standard errors when the light intensity resolution is 12 bits, 4096 gradations, and the analysis cycles are 5, 10, 20, 30, 40, 50, 100, and 120 cycles. [Figure 13] FIG. 10 is a diagram showing the relationship between the resolution of light intensity, the analysis period, and the detected value. [Figure 14] FIG. 10 is a diagram showing the results of verifying the dependency of the resolution (number of pixels per 1 μm) on the detection accuracy (detection value and standard error) of the amount of misalignment. [Figure 15]FIG. 10 is a diagram showing an example of the width L in the short-side direction of the bars of the array used in the verification, and the space width S between the bars. [Figure 16] FIG. 10 is a diagram showing an example of the ratio of the width L of a bar in an array to the width S of a space between the bars, the detected value, and the standard error. [Figure 17] FIG. 10 is a diagram showing the relationship between bar width / period and standard error. [Figure 18] FIG. 10 is a diagram showing an example in which the arrays for x-axis direction adjustment and y-axis direction adjustment are independent. [Figure 19] FIG. 10 is a diagram showing an example in which the array is divided into upper and lower and left and right in each direction. [Figure 20] FIG. 10 is a diagram showing an example in which array elements are arranged in an L shape. [Figure 21] FIG. 10 is a diagram showing an example in which array elements are arranged in a cross shape. [Figure 22] FIG. 10 is a diagram showing an example of the results of verifying the period of an array. [Figure 23] FIG. 10 is a diagram showing an example of the results of verifying the period of an array. [Figure 24] This figure shows the detection value, standard error, and verification results of the number of effective gradations that can be used to detect the amount of misalignment out of 4096 gradations with a 12-bit resolution of light intensity for each ratio of the thickness of the residual film to the pattern depth of the bar array body. [Figure 25] 23 is a graph of FIG. 22 showing the relationship between the ratio of the thickness of the residual film to the pattern depth of the bar array body and the standard error of the detected value. [Figure 26] 23 is a graph of FIG. 22 showing the relationship between the ratio of the thickness of the remaining film to the pattern depth of the bar array and the number of effective gradations that can be used to detect the amount of misalignment among 4096 gradations with a 12-bit resolution of light intensity. DETAILED DESCRIPTION OF THE INVENTION

[0019] Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the drawings used in the following description, the scale of each component is appropriately changed so that each component can be recognized.

[0020] <Configuration example of alignment device (laminate manufacturing device)> 1 is a block diagram showing an example of the configuration of an alignment apparatus according to this embodiment. The alignment apparatus 1 is both a laminate manufacturing apparatus 1 and an imprint apparatus 1. As shown in FIG. 1, the alignment apparatus 1 includes a control device 11, a microscope device 12, an ultraviolet irradiation device 13, a fixed stage 14, a coating device 15, an XYZθ-axis movable stage 16, and an illumination device 17.

[0021] The alignment device 1 stacks a mold (first object) 21 and a substrate (second object) 22, and aligns the mold 21 and the substrate 22 based on light from an array formed on the mold 21 and an array formed on the substrate 22. The light from the array is luminescence from a layer located between the mold 21 and the substrate 22, or scattered light from the mold 21 and the substrate 22. The layer 23 between the mold 21 and the substrate 22 is, for example, a liquid such as an ultraviolet-curable visible fluorescent liquid, or a gas such as air. In this embodiment, the luminescence is, for example, fluorescence or phosphorescence from a layer located between the first object and the second object.

[0022] The control device 11 controls the microscope device 12, the ultraviolet irradiation device 13, the fixed stage 14, the coating device 15, the XYZθ-axis movable stage 16, and the illumination device 17 to perform stacking and alignment. The control device 11 calculates the amount of misalignment between the mold 21 and the substrate 22 by fitting a signal obtained by the microscope device 12 detecting light from the array using illumination light from the illumination device 17, using a predetermined formula. The control device 11 aligns the mold 21 and the substrate 22 using the XYZθ-axis movable stage 16 based on the calculated amount of misalignment.

[0023] The microscope device 12 has a plurality of detection pixels and detects light from the array. The observation magnification of the microscope device 12 is, for example, 7 times, and the NA (numerical aperture) is, for example, 0.08. The pixel length used for detection (the pixel length of the detection pixel) is, for example, 0.837 (μm).

[0024] The ultraviolet irradiation device 13, under the control of the control device 11, cures, for example, an ultraviolet curable resin containing a fluorescent dye (an ultraviolet curable visible fluorescent liquid) by irradiating it with ultraviolet light to produce a laminate.

[0025] The fixed stage 14 holds, for example, a mold 21 under the control of the control device 11 .

[0026] The applicator 15 applies, under the control of the controller 11, for example, an ultraviolet-curable visible fluorescent liquid to the substrate 22, which will become a layer located between the mold 21 and the substrate 22.

[0027] The XYZθ-axis movable stage 16 moves, for example, the substrate 22 under the control of the control device 11.

[0028] <Example of laminate configuration> Next, a configuration example of the laminate will be described. Fig. 2 is a diagram showing a configuration example of the laminate according to this embodiment. As shown in Fig. 2, the laminate 2 includes a mold 21, a layer 23, and a substrate 22, as shown in a configuration diagram g1 in the yz plane.

[0029] In the y-axis direction, the mold 21 has a first array 311(21) and a second array 312(21) formed at both ends in the y-axis direction, and a circuit pattern, for example, is formed between the first array 311(21) at one end and the first array 311(21) at the other end. In the y-axis direction, the substrate 22 has a second array 312(22) and a first array 311(22) formed at both ends in the y-axis direction, and a circuit pattern, for example, is formed between the second array 312(22) at one end and the second array 312(22) at the other end.

[0030] As shown in the structural diagram g1, the first array 311 (21) and the second array 312 (21) of the mold 21, and the second array 312 (22) and the first array 311 (22) of the substrate 22 are formed so as not to overlap with each other in the y-axis direction when stacked.

[0031] As shown in the configuration diagram g2 in the xz plane, a first array of bars 300 arranged at a period p1 in the x-axis direction is formed on the mold 21. A second array of bars 300 arranged at a period p2 in the x-axis direction is formed on the substrate 22.

[0032] In addition, when detecting luminescence such as fluorescence as a signal, visible light is irradiated from the illumination device 17 to cause the UV-curable visible fluorescent liquid in the layer 23 to emit luminescence such as fluorescence, and the microscope device 12 detects the optical signals from each array. The detected first, second, third, and fourth signals are respectively fitted to calculate the positional deviation between the first and second objects. After adjusting the positional deviation, UV light is irradiated from the UV irradiation device 13 to solidify the UV-curable visible fluorescent liquid in the layer 23, thereby producing a laminate consisting of the mold 21, the layer 23, and the substrate 22. The illumination device 17 can be, for example, a light source such as an LED (light-emitting diode), a white lamp equipped with a bandpass filter or cutoff filter for adjusting the irradiation wavelength, a Xe (xenon) lamp, or a halogen lamp. When the layer 23 is a UV-curable visible fluorescent liquid, any light source that can maintain the fluidity of the layer 23 and perform alignment while detecting the optical signals from each array is sufficient. The ultraviolet irradiation device 13 can be a light source such as a UV-LED (ultraviolet light emitting diode), an Hg-Xe (mercury-xenon) lamp, or a high-pressure mercury lamp. Any light source can be used as long as it can solidify the ultraviolet-curable visible fluorescent liquid of the layer 23. The microscope device 12 is equipped with an imaging element that removes light of the wavelengths of the irradiation light from the ultraviolet irradiation device 13 and the illumination light from the illumination device 17 and detects luminescence such as fluorescence of longer wavelengths.

[0033] Furthermore, when detecting scattered light as a signal, visible light or the like is irradiated from the illumination device 17 to generate scattered light from the mold 21 and the substrate 22, and the microscope device 12 detects optical signals from each array having the same wavelength as the illumination light. The detected first, second, third, and fourth signals are fitted to each other to determine the positional deviation between the first and second objects using a calculation means. After adjusting the positional deviation, the mold 21 and the substrate 22 are fused together by drawing ultraviolet light from the ultraviolet irradiation device 13 at predetermined positions. This allows for the production of a laminate in which the mold 21 and the substrate 22 are fused together via a gas layer such as air in the layer 23. Note that the ultraviolet irradiation device 13 can be suitably a high-power short-pulse laser, such as a UV laser. Depending on the materials of the mold 21 and the substrate 22, a high-power ultrashort-pulse laser that generates visible light or infrared light can also be used. The microscope device 12 is equipped with an image sensor that detects scattered light having the same wavelength as the illumination light from the illumination device 17.

[0034] <Example of array placement> Next, an example of the arrangement of the array formed on the mold 21 and the array formed on the substrate 22 will be further described. FIG. 3 is a diagram showing an example of the arrangement of the array formed on the mold according to this embodiment and the array formed on the substrate. In FIG. 3, the recessed structure of the array formed on the mold 21 is on the back side of the paper, and the recessed structure of the array formed on the substrate 22 is on the front side of the paper. In FIG. 3, the short-side direction of the bars 300 constituting the array formed on the mold 21 and the substrate 22 is the x-axis direction, and the long-side direction of the bars 300 is the y-axis direction. The assembly of the first array 311(21) and the second array 312(21) arranged on the mold 21, and the assembly of the second array 312(22) and the first array 311(22) arranged on the substrate 22 may be located at, for example, the four corners of the mold 21 and the substrate 22, or at two diagonally opposite corners. Furthermore, the assembly of the arrays is preferably located at both ends of the mold 21 and the substrate 22.

[0035] As shown in FIG. 3, a first array element 311(21) and a second array element 312(21) are formed on the mold 21. A second array element 312(22) and a first array element 311(22) are formed on the substrate 22. In the first array element 311, bars 300 are arranged at a period of p1 in the x-axis direction. The width of the bars 300 in the first array element 311 in the short-side direction (bar width) is L1, and the space width between the bars (space width) is S1. In the second array element 312, bars 300 are arranged at a period of p2 in the x-axis direction. The width of the bars 300 in the second array element 312 in the short-side direction is L2, and the space width between the bars is S2. In the following description, when there is no need to distinguish between the width L1 in the short-side direction of the bars 300 of the first array 311 and the width L2 in the short-side direction of the bars 300 of the second array 312, they will be referred to as the "width L in the short-side direction of the bars 300" or "width L of the bars 300." Furthermore, when there is no need to distinguish between the spatial width S1 of the first array 311 and the spatial width S2 of the second array 312, they will be referred to as the "spatial width S."

[0036] 3, the length in the y-axis direction of each bar 300 constituting the array is longer than the width in the x-axis direction. The shape of each bar 300 is not limited to the rectangular shape shown in FIG. 3, and may be, for example, a square, an oval, or the like. The size of the bars 300 constituting the first array 311 and the size of the bars 300 constituting the second array 312 may be the same or different.

[0037] 4 is a diagram showing an example of the positional relationship between the mold and the substrate array in the laminate according to this embodiment. Plan view g11 is a view of the laminate 2, for example, as seen from the mold 21 side. Cross-sectional view g12 is a cross-sectional view taken along line A-A' in plan view g11. Cross-sectional view g13 is a cross-sectional view taken along line B-B' in plan view g11.

[0038] 4, the first array 311(21) and second array 312(21) of the mold 21, and the second array 312(22) and first array 311(22) of the substrate 22 are arranged so that they do not overlap when stacked. When stacked, the order of the arrays in the y-axis direction is the first array 311(21) of the mold 21, the second array 312(22) of the substrate 22, the second array 312(21) of the mold 21, and the first array 311(22) of the substrate 22. As shown in cross-sectional view g12, a layer 23 coated with, for example, an ultraviolet-curable visible fluorescent liquid exists between the mold 21 and the substrate 22. Also, a layer 23 of a medium with a refractive index different from those of the mold 21 and the substrate 22, for example, a gas layer such as air, exists between the mold 21 and the substrate 22.

[0039] Next, the shape, number, etc. of the bars will be described. Fig. 5 is a diagram for explaining the shape, number, etc. of the bars according to this embodiment. Plan view g21 is a view of the laminate 2 as seen from, for example, the mold 21 side. Cross-sectional view g22 is a cross-sectional view taken along line BB' in plan view g21.

[0040] The first array 311 (21, 22) has a periodic structure with, for example, 125 bars 300 spaced apart by 1000 μm, with a period p1 of 8.0 μm. The second array 312 (21, 22) has a periodic structure with, for example, 123 bars 300 spaced apart by 1000 μm, with a period p2 of 8.1 μm. The length of the bars 300 in the y-axis direction is, for example, 30 μm. The length of the bars 300 in the x-axis direction is preferably half the period p1 or half the period p2. The length of the bars 300 in the second array 312 (21, 22) in the x-axis direction may be different from the length of the bars 300 in the first array 311 (21, 22) or may be the same as the length of the bars 300 in the x-axis direction in the first array 311 (21, 22). 5, when the first, second, third, and fourth signals obtained from the first and second arrays are luminescence from a layer located between the first and second objects, the bar 300 is in a state in which the gaps in the mold 21 and the substrate 22 are filled with an ultraviolet-curable visible fluorescent liquid. It is sufficient to detect luminescence from each array of the mold 21 and the substrate 22, which has a high light intensity from the layer 23, via the microscope device 12.

[0041] Furthermore, in FIG. 5, when the first signal, second signal, third signal, and fourth signal obtained from the first array and the second array are scattered light from the first array and the second array, the bar 300 has a fine recessed structure formed therein. For example, the fine recessed structure has holes with a diameter of 0.2 μm and a depth of 0.1 μm arranged in a hexagonal close-packed pattern at intervals of 0.4 μm. The holes may be circular or rectangular. It is desirable that the diameter of the holes be smaller than the detection pixel length. It is sufficient that scattered light of the same wavelength as the illumination light from the illumination device 17 can be detected via the microscope device 12. The shape and number of the bars 300 shown in FIG. 5 are merely an example and are not limited to this.

[0042] <Relationship between light emitter and detected pixel length (size)> Next, the relationship between the light emitter 400 and the pixel length Ld of the detection pixel 451 imaged by the imaging element 450 of the microscope device 12 will be described. Fig. 6 is a diagram showing an example of the relationship between the light emitter and the pixel length of the detection pixel in a comparative example. Note that the light from the light emitter 400 is light obtained from one of the bars 300 having a length Lx in the x-axis direction of 4.0 (µm) and a length Ly in the y-axis direction of 6.0 (µm). 6, an imaging element 450 has a plurality of detection pixels 451 with a CCD-specific pixel pitch of 7 μm. The imaging magnification is 7 times, and the pixel pitch detected during imaging (the period of the vertical and horizontal dimensions Ld of each detection pixel 451) is 1 μm. The size of the light emitting body 400 detected by the image sensor 450 is detected as being larger than the bar 300 due to the spread of light.

[0043] The comparative example in Fig. 6 is an example of a light emitting body 400. In such a case, for example, the position of the center of gravity in the short-side direction of the bar 300 serving as the light source is estimated by analyzing the light intensity in the short-side direction of the light emitting body 400. However, when the imaging magnification is low at 7x, even if the light intensity is fitted in the x-axis direction, the position can only be estimated with an accuracy of about ±0.1 (µm), for example.

[0044] FIG. 7 is a diagram showing an example of an arrangement of 14 light-emitting elements according to this embodiment and an example of fitting of light intensity. The size of one bar 300 serving as a light source in FIG. 7 is the same as in FIG. 6. The pitch of the bars 300 in the short direction is 8.0 μm, and 14 bars 300 are arranged. The CCD specific pixel pitch is also 7 μm, which is the same as in the comparative example in FIG. 6. Furthermore, the imaging magnification is 7 times, and the pixel pitch detected during imaging is 1 μm, which is the same as in the comparative example in FIG. 6.

[0045] As shown in the arrangement diagram g101, the light emitters 400 are arranged at a predetermined pitch (predetermined period) of 8.0 (μm). In this embodiment, the light intensity of the optical signal from such a light emitter 400 is fitted as shown in graph g111. In graph g111, the horizontal axis represents pixel position and the vertical axis represents light intensity. In addition, in graph g111, point g113 represents the detected light intensity, and line g115 represents the fitted theoretical curve (e.g., a cosine waveform). In this embodiment, the light intensity is detected with a resolution of 12 bits (4096 gradations).

[0046] In this way, in this embodiment, the light emitters 400 are arranged at a predetermined period, and the light intensity is fitted in the x-axis direction with a resolution of 12 bits to estimate the center position of each light emitter 400, so that even at a low magnification of 7 times, the position can be estimated with an accuracy of, for example, about ±0.3 (nm). The size and pitch of the light-emitting bodies, the pixel size of the imaging element, the imaging magnification, the pixel size during imaging, the resolution of light intensity, etc. shown in FIG. 7 are merely examples and are not limiting.

[0047] As described above, according to this embodiment, it is possible to detect the amount of misalignment with high accuracy using a low-magnification optical system without using moiré as in the past. Furthermore, according to this embodiment, it is possible to reduce the dependency on the detection pixel length compared to the past.

[0048] <Alignment> Next, a method for aligning the mold 21 and the substrate 22 will be described. FIG. 8 is a diagram showing an example of the position of the array before and after the misalignment adjustment according to this embodiment. In this embodiment, the amount of misalignment is detected by fitting an optical signal generated by light from the array, and the mold 21 and the substrate 22 are aligned based on the detected amount of misalignment.

[0049] In the stacked state g201 before alignment, the first array 311(21) of the mold 21 and the first array 311(22) of the substrate 22 are misaligned, and the second array 312(21) of the mold 21 and the second array 312(22) of the substrate 22 are misaligned. In the stacked state g202 after alignment, the positions of the first array 311(21) of the mold 21 and the first array 311(22) of the substrate 22 match, and the positions of the second array 312(21) of the mold 21 and the second array 312(22) of the substrate 22 match. Here, the length of the bar 300 in the short direction is 4 μm, and the length of the bar 300 in the long direction is 30 μm. The depth (D) of the bar 300 is 0.1 μm. The period p1 of the first array 311 is 8.0 μm, and the period p2 of the second array 311 is 8.1 μm.

[0050] In the example shown in FIG. 8, an example of alignment in the x-axis direction has been described, but it is also possible to detect the amount of misalignment and align in the y-axis direction by arranging the array as described later.

[0051] FIG. 8 is a flowchart of an example of a procedure for detecting and adjusting the amount of misalignment according to this embodiment. (Step S1) The alignment apparatus 1 forms a first array 311 (21) and a second array 312 (21) in a first object (mold 21). (Step S2) The alignment apparatus 1 forms a second array 312 (22) and a first array 311 (22) on the second object (substrate 22). The processes in steps S1 and S2 may be performed by other devices such as a photolithography device or an electron beam lithography device.

[0052] (Step S3) The alignment device 1 stacks the first object and the second object. (Step S4) The alignment device 1 detects the optical signal from the array.

[0053] (Step S5) The alignment device 1 fits the light intensity of the detected optical signal to calculate the amount of positional deviation between the first object and the second object. (Step S6) The alignment device 1 adjusts the positions of the first object and the second object based on the calculated amount of positional deviation.

[0054] Here, an example of an equation used for fitting will be described. First, the general formula for the light intensity I when there is one array can be expressed as the following formula (1).

[0055]

number

[0056] In equation (1), x is the x-axis position of the detection pixel, x = 0 is the origin, dx is the amount of positional deviation from the origin, a is the amplitude, b is the background light intensity, and p is the period (spacing) of the bars that make up the array. Note that dx = 0 indicates that there is no positional deviation.

[0057] Next, in the case of four independent arrays as shown in FIGS. 4 and 5, the equation used for fitting can be expressed as the following equation (2).

[0058]

number

[0059] In equation (2), i represents each array, and q represents a correction factor that depends on the imaging system. The origin position is set in advance, and a i , b i , q, dx i is found by fitting. The conditions for the equation of light intensity generated by four independent arrays i from 1 to 4 are as follows: (Condition 1) The array (i=1, 3) is formed on the upper mold 21, and the array (i=2, 4) is formed on the lower substrate 22. (Condition 2) When an image is captured from the mold 21 side, array elements i=1,2 and i=3,4 are adjacent to each other. (Condition 3) The amount of misalignment d when the substrate 22 is superimposed on the mold 21 is d=dx2−dx1=dx4−dx3 (where d>0 (when the substrate is misaligned to the left), d<0 (when the substrate is misaligned to the right), |d| <p i / 2,p1=p4,p2=p3).

[0060] In addition, in equation (2), the positional deviation amount dx i = Ideal position deviation d real + error Δd, and standard error = standard deviation σ of the fitting residual, which is the difference between the fitting equation and the observed data.

[0061] In the examples of Figures 4 and 5, i = 1 represents the first array 311(21) of the first object (mold 21), i = 3 represents the second array 312(21) of the first object, i = 2 represents the second array 312(22) of the second object (substrate 22), and i = 4 represents the first array 311(22) of the second object. Furthermore, the period p1 of the first array of the first object is equal to the period p4 of the first array of the second object, and the period p2 of the second array of the first object is equal to the period p3 of the second array of the second object. Furthermore, because they are formed on the same object, the misalignment amount dx1 of the first array of the first object is equal to the misalignment amount dx3 of the second array of the second object, and the misalignment amount dx2 of the second array of the second object is equal to the misalignment amount dx4 of the first array of the second object. The amount of positional deviation (detection value) d between the mold 21 and the substrate 22 can be calculated by the following equation (3).

[0062]

number

[0063] <Verification results> Next, an example of the results of verifying the method of this embodiment will be described. First, we will explain the results of verifying the light intensity resolution. Figure 10 shows the detected values ​​and standard errors when the light intensity resolution is 8 bits (256 gradations) and the analysis cycles are 5, 10, 20, 50, 100, and 120 cycles. 10 is a four-row array of the first array 311(21), the second array 312(22), the second array 312(21), and the first array 311(22); the period p1 of the first array 311 is 8.0 μm; the width L1 of the bar 300 in the short-side direction is 4.0 μm; the spatial width S1 is 4.0 μm; the period p2 of the second array 312 is 8.1 μm; the width L2 of the bar 300 in the short-side direction is 4.0 μm; the spatial width S2 is 4.1 μm; and the pixel length detected during imaging is 1 μm / pixel (px). When the analysis period is 5 periods, this means the result of analyzing a length of 40 μm, which corresponds to 5 periods of the period p1. Here, light with lengths corresponding to 5, 10, 20, 50, 100, and 120 cycles was detected from a four-row array, and the signal was fitted using equation (2) to analyze the amount of positional deviation (detected value) and standard error. The magnification of the optical system was 7x. In addition, the values ​​on the left in the table are the detected value (nm) and the values ​​on the right are the standard error (nm). In addition, in FIG. 10, the "set displacement" is the amount of displacement that is intentionally achieved by displacing the mold 21 and the substrate 22 for verification purposes.

[0064] As shown in Figure 10, when the light intensity resolution is 8 bits, by analyzing a length of 400 (μm), which corresponds to 50 periods, the amount of misalignment between the mold 21 and the substrate 22 can be detected with a standard error of 1 (nm) scale, regardless of whether it is 0 to 100 (nm).

[0065] 11 and 12 are diagrams showing the detected values ​​and standard errors when the light intensity resolution is 12 bits and 4096 gradations, and the analysis periods are 5, 10, 20, 30, 40, 50, 100, and 120. The verification conditions for Fig. 11 and Fig. 12 are the same as Fig. 10, except that the light intensity resolution is 12 bits. As shown in Figures 11 and 12, when the light intensity resolution is set to 12 bits, accuracy can be significantly improved compared to 8 bits. For example, with 50 periods (length 400 μm), the misalignment between the mold 21 and the substrate 22 can be detected with a standard error of 0.26 nm regardless of the range from 0 to 100 nm. With 10 periods (length 80 μm), the misalignment between the mold 21 and the substrate 22 can be detected with a standard error of 0.76 nm regardless of the range from 0 to 100 nm. With 20 periods (length 160 μm), the misalignment between the mold 21 and the substrate 22 can be detected with a standard error of 0.5 nm, which is the atomic-scale detection value.

[0066] According to this embodiment, if the cycle required for analysis is reduced, the size of the image sensor itself can be reduced, and therefore the cost of detecting the amount of positional deviation can be reduced. It goes without saying that by detecting the light intensity at a resolution greater than 12 bits, for example, 14 bits with 16,384 gradations, it is possible to detect the amount of positional deviation on an atomic scale even if the analysis period is reduced.

[0067] The relationship between the light intensity resolution, the analysis period, and the detected value will be further explained with reference to FIGS. FIG. 13 is a diagram showing the relationship between the light intensity resolution, the analysis period, and the detection value. In FIG. 13, the horizontal axis is the period (the number of periods p1), and the vertical axis is the standard error (nm). The period p1 is 8.0 (μm). Graph g301 is a graph showing the relationship between the analysis period and the standard error for 8-bit and 12-bit light intensity resolutions. In addition, in graph g301, the dashed line g302 is the standard error for the analysis period for 8-bit light intensity resolution, and the dashed line g303 is the standard error for the analysis period for 12-bit light intensity resolution. In addition, graph g311 is a graph in which the scale of the vertical axis of the standard error for the analysis period for 12-bit light intensity resolution is changed.

[0068] As shown in Figures 10 to 13, the analysis period required to obtain a standard error of 1 nm is approximately 50 periods (length approximately 400 μm) when the light intensity resolution is 8 bits, and approximately 10 periods (length approximately 80 μm) when the light intensity resolution is 12 bits. Note that with a 12-bit light intensity resolution, an accuracy of 1.4 nm or less can be obtained even with 5 periods (length 40 μm). Furthermore, for example, with 50 periods, the standard error with an 8-bit light intensity resolution is approximately 1 nm, but with a 12-bit light intensity resolution, the standard error improves to approximately 0.25 nm.

[0069] Furthermore, to perform alignment with an accuracy of about 1 nm, the standard error must be about 0.3 nm. In this embodiment, as the light intensity resolution increases, alignment can be performed with high accuracy even with a smaller analysis cycle, even with a positional deviation of about 1 nm.

[0070] Furthermore, according to this embodiment, the length (analysis period) of the array formed on the mold 21 and the substrate 22 can be reduced, that is, the alignment marks for positioning placed on the mold 21 and the substrate 22 can be reduced in size.

[0071] Next, the results of verifying the dependency of the pixel length (resolution) detected during imaging on the detected value of the amount of misalignment between the mold 21 and the substrate 22 will be described. 14 shows the results of verifying the dependency of the resolution on the detected positional deviation value and standard error. The verification conditions were as follows: four rows of the first array 311(21), the second array 312(22), the second array 312(21), and the first array 311(22); the pitch p1 of the first array 311 was 8.0 μm; the width L1 of the bar 300 in the short-side direction was 4.0 μm; the space width S1 was 4.0 μm; the pitch p2 of the second array 312 was 8.1 μm; the width L2 of the bar 300 in the short-side direction was 4.0 μm; the space width S2 was 4.1 μm; and the pixel length detected during imaging was 1 μm / pixel (px). The set displacements, from top to bottom, were 1 nm, 2 nm, and 5 nm. For each value in the table, the left is the detected value (nm) and the right is the standard error (nm). When the analysis cycle is 5 cycles, it means that the result is from analyzing a length of 40 (μm), which corresponds to 5 cycles of cycle p1. The verified resolutions (pixels (px) / μm) are 0.5, 0.75, 1, and 1.25. The light intensity resolution is 12 bits, 4096 levels.

[0072] As shown in FIG. 14, regardless of the period, the higher the resolution, that is, the larger the number of pixels (px) per 1 (μm), the smaller the standard error of the detected value and the more accurate the alignment. To achieve the desired alignment accuracy, for example, when detecting a period p1 of 8.0 (μm), 5 periods (50 pixels) or more are desirable at a resolution of 1.25 pixel / μm, 10 periods (80 pixels) or more are desirable at a resolution of 1 pixel / μm, 20 periods (120 pixels) or more are desirable at a resolution of 0.75 pixel / μm, and 20 periods (320 pixels) or more are desirable at a resolution of 0.5 pixel / μm.

[0073] Next, the results of verifying the detection accuracy of the detection value and standard error at the short-side width (bar width) L (Line) of the bar 300 of the array, the space width S (Space) between the bars, and a set displacement of 5 (nm) will be explained with reference to Figures 15 to 17. FIG. 15 shows examples of bar width L and space width S of an array with a period p1 = 8.0 (μm) used in the verification. As shown in FIG. 15, L:S width ratios of 1:7 (g401), 2:6 (g402), 3:5 (g403), etc. were used in the verification. That is, in 1:7 (g401), L is 1 (μm) and S is 7 (μm). In 2:6 (g402), L is 2 (μm) and S is 6 (μm). In 3:5 (g403), L is 3 (μm) and S is 5 (μm).

[0074] FIG. 16 shows an example of the ratio of the bar width L to the space width S of the array, the detection value (nm), and the standard error (nm). When the period p1 is 8.0 μm, it can be seen that when the L:S width ratio is 3:5, a set displacement of 5 nm can be detected with a detection value of 4.947 nm and a standard error of 0.620 nm. When the L:S width ratio is 4:4, it can be detected with a detection value of 5.049 nm and a standard error of 0.254 nm. When the L:S width ratio is 5:3, it can be detected with a detection value of 5.087 nm and a standard error of 0.614 nm. Therefore, it is desirable for the bar width L of the array and the space width S to be approximately equal in length, as this reduces the standard error.

[0075] 17 is a diagram showing the relationship between the bar width L (Line Width) / period p (period) of an array and the standard error. The dashed line g411 shows a bar width / period of 0 to 0.5, and the dashed line g412 shows a bar width / period of 0.5 to 1.0. 16 and 17, when the L:S ratio is 1:1 and the bar width / period is 0.5, the standard error is small and the detection accuracy is high. Furthermore, when the L:S width ratio is 4.025:3.975 and the bar width L / period p of the array is 0.50313, the standard error is 0.25243 (nm), which is the highest detection accuracy.

[0076] As described above, in this embodiment, the array on the mold 21 side and the array on the substrate 22 side are arranged so as not to overlap when stacked. Furthermore, in this embodiment, the first array and the second array are arranged so as not to overlap. Also, in this embodiment, the first array and the second array are arranged on the mold 21 side, and the second array and the first array are arranged on the substrate 22 side. Also, in this embodiment, the light intensity resolution is set to, for example, 12 bits, or 4096 gradations.

[0077] As a result, according to this embodiment, it is possible to provide an alignment method, a method for manufacturing a stack, an alignment device, a stack manufacturing device, and a stack, which can align an upper object and a lower object with an accuracy of atomic-scale error. Furthermore, according to this embodiment, the optical system can be realized with a lower magnification than conventionally, which reduces the cost of the device. Furthermore, according to this embodiment, the array formed on the stacked objects can be made smaller than conventionally.

[0078] <Modification> In the above-described embodiment, an example of an array in which the bars are periodically arranged in the x-axis direction has been described, but the present invention is not limited to this.

[0079] (First Modification) 18 is a diagram showing an example in which the arrays for x-axis direction adjustment and y-axis direction adjustment are independent from each other. The diagram shows an example of eight independent arrays obtained when imaging from the mold 21 side. Array arrangement example 500 is an example of an arrangement of four arrays for adjustment in the x-axis direction. In array arrangement example 500, for example, a first array 501 and a second array 503 are formed on mold 21, and a second array 502 and a first array 504 are formed on substrate 22. Furthermore, array arrangement example 500 is arranged so that the arrays 501 to 504 do not overlap in this order in the y-axis direction when stacked.

[0080] Array arrangement example 510 is an example of an arrangement of four arrays for adjustment in the y-axis direction. In array arrangement example 510, for example, a first array 511 and a second array 513 are formed on mold 21, and a second array 512 and a first array 514 are formed on substrate 22. Furthermore, array arrangement example 500 is arranged so that the arrays 511 to 514 do not overlap in this order in the x-axis direction when stacked.

[0081] (Second Modification) FIG. 19 is a diagram showing an example in which the array is divided into upper and lower and left and right in each direction. In array arrangement example 550, arrays for adjusting the x-axis direction are formed, for example, with a first array 551 formed above the mold 21, a second array 553 formed below the mold 21, a second array 552 formed above the substrate 22, and a first array 554 formed below the substrate 22. Furthermore, array arrangement example 550 is arranged so that the arrays 551 to 554 do not overlap in this order in the y-axis direction when stacked.

[0082] In array arrangement example 550, arrays for adjusting the y-axis direction are formed, for example, with a first array 561 formed on the left side of mold 21, a second array 563 formed on the right side of mold 21, a second array 562 formed on the left side of substrate 22, and a first array 564 formed on the right side of substrate 22. Moreover, array arrangement example 550 is arranged so that the arrays 561 to 564 do not overlap in this order in the x-axis direction when stacked. 19, for example, the arrangement may be such that the x-axis is approximately 500 μm and the y-axis is approximately 500 μm. Furthermore, for example, if the mold size is 10 mm on the x-axis and 10 mm on the y-axis, the arrangement may be on the upper and lower sides of the entire mold. In this case, it is desirable that array elements 551 and 552, array elements 553 and 554, array elements 561 and 562, and array elements 563 and 564 are paired.

[0083] (Third Modification) FIG. 20 is a diagram showing an example in which the array elements are arranged in an L shape. In array arrangement example 600, arrays for adjusting the x-axis direction are formed, for example, with a first array 601 and a second array 603 formed on the upper side of mold 21, and a second array 602 and a first array 604 formed on the upper side of substrate 22. Moreover, array arrangement example 600 is arranged so that the arrays 601 to 604 do not overlap in this order in the y-axis direction when stacked.

[0084] In the array arrangement example 600, the arrays for adjusting the y-axis direction are formed, for example, with a first array 611 and a second array 613 on the left side of the mold 21, and a second array 612 and a first array 614 on the upper side of the substrate 22. Furthermore, the array arrangement example 600 is arranged so that the arrays 611 to 614 do not overlap in this order in the x-axis direction when stacked. In the case of FIG. 20, eight arrays for the x-axis and eight arrays for the y-axis can be arranged at positions corresponding to two opposing corners of the mold 21, and optical signals from the arrays can be detected.

[0085] (Fourth Modification) FIG. 21 is a diagram showing an example in which array elements are arranged in a cross shape. In array arrangement example 650, arrays for adjusting the x-axis direction are formed, for example, with a first array element 651 and a second array element 653 on the left side of mold 21, a first array element 655 and a second array element 657 on the right side of mold 21, a second array element 652 and a first array element 654 on the left side of substrate 22, and a second array element 656 and a first array element 658 on the right side of substrate 22. Furthermore, array arrangement example 650 is arranged so that when stacked, array elements 651 to 654 and then array elements 655 to 658 do not overlap in the y-axis direction.

[0086] In array arrangement example 650, the arrays for adjusting the y-axis direction are, for example, a first array 661 and a second array 663 formed above the mold 21, a first array 665 and a second array 667 formed below the mold 21, a second array 662 and a first array 664 formed above the substrate 22, and a second array 666 and a first array 668 formed below the substrate 22. Furthermore, array arrangement example 650 is arranged so that when stacked, the arrays 661 to 664 and then the arrays 665 to 668 do not overlap in the x-axis direction. In this way, the arrangement of the array may be such that the center or the like is hollow. In the case of Figure 21, the mold 21 and the substrate 22 can be placed at the four corners, or near the four sides, or in the center of the mold 21 and the substrate 22, depending on the circuit pattern for the device.

[0087] The arrangement examples of the arrays shown in FIGS. 18 to 21 are merely examples, and the present invention is not limited to these.

[0088] (Fifth Modification) In the above-described embodiment and modified example, the period p2 of the second array is greater than the period p1 of the first array, but the present invention is not limited to this. Figures 22 and 23 show examples of the results of verifying the period of the array. The columns show the intentional shift amount and the average value of the standard error, and the rows show the detected value (nm) and standard error (nm) for each period combination. The first example shown in Table g501 of Figure 22 is an example in which the period p1 of the first array described above is 8.0 (μm), the period p2 of the second array is 8.1 (μm), and the optical system has 1 pixel (px) = 1 (μm). In this first example, 30 periods (4 rows) and 100 periods (4 rows) were verified. Note that 4 rows means that four rows of arrays are arranged in the axial direction, as shown in Figure 18, for example.

[0089] The second example shown in Table g502 of Figure 22 is an example in which the period p1 of the first array is 8.00 (μm), the period p2 of the second array is 8.01 (μm), and the optical system has 1 pixel (px) = 1 (μm). The second example is the same as the first example except that the period p2 is 8.01 (μm), the bar width L2 is 4.00 (μm), and the space width S2 is 4.01 (μm). In the second example, 30 periods (4 columns) and 100 periods (4 columns) were tested.

[0090] The third example shown in Table g503 of Figure 22 is an example in which the period p1 of the first array is 8.0 (μm), the period p2 of the second array is 8.8 (μm), and the optical system has 1 pixel (px) = 1 (μm). The third example is the same as the first example except that the period p2 is 8.8 (μm), the bar width L2 is 4.0 (μm), and the space width S2 is 4.8 (μm). In the third example, 30 periods (4 columns) and 100 periods (4 columns) were tested.

[0091] The fourth example shown in Table g504 of Figure 23 is an example in which the period p1 of the first array is 80 μm, the period p2 of the second array is 81 μm, and the optical system has a pixel count (px) of 10 μm. In this fourth example, the period p1 is 80 μm, the bar width L1 is 40 μm, the space width S1 is 40 μm, the period p2 is 88 μm, the bar width L2 is 40 μm, and the space width S2 is 48 μm. In this fourth example, 30 and 100 periods were tested. At an observation magnification of 7x, even if the CCD's native pixel pitch is 70 μm, the standard error for 30 periods is 3.3 nm, demonstrating the accuracy of misalignment detection. Furthermore, even with a reduced optical system with an observation magnification of 0.7x, if the CCD's inherent pixel pitch is 7 μm, it is possible to detect the amount of positional deviation with an average standard error of 3.26 nm over 30 periods and 1.81 nm over 100 periods.

[0092] The fifth example shown in Table g505 of FIG. 23 is an example where the period p1 of the first array is 8.00 (μm), the period p2 of the second array is also the same 8.00 (μm), and the optical system is 1 pixel (px) = 1 (μm). In the fifth example, 60 periods (2 columns) were verified. In the fifth example, for example, as shown in the upper part of FIG. 19, there are only 2 columns of arrays.

[0093] As shown in the verification results of FIGS. 22 and 23, the period can be detected with the desired accuracy not only when p1 < p2, but also when p1 = p2. Also, as shown in FIGS. 22 and 23, if the number of patterns is large (= the number of periods is large) (for example, 100 periods), as in the fifth example, even if there is 1 array on the mold 21 side and 1 array on the substrate 22 side, the accuracy can be ensured. Therefore, even when 2 arrays are provided on the mold 21 side and 2 arrays are provided on the substrate 22 side, the first and second arrays provided on the mold 21 and the second and first arrays provided on the substrate 22 may be arranged so that none of them overlap when laminated.

[0094] Furthermore, as in the fourth example, even with an optical system of 0.7 times magnification (1 pixel ≒ 10 μm), alignment can be performed with a standard error of about 3 (nm). That is, according to the present embodiment, not only the low-magnification optical system of a microscope that magnifies an image, but also an optical system that reduces an image, and further an optical system with the same magnification can perform detection and alignment with higher accuracy than before.

[0095] <Influence of the presence of residual film> Next, we will explain the results of examining the influence of the presence of a residual film in the layer 23 when detecting fluorescence, an example of luminescence, from the mold 21 and the substrate 22. The residual film refers to the layer 23 coated with a UV-curable, visible fluorescent liquid, and the residual film thickness (RLT: Residual Layer Thickness) refers to the thickness of the layer 23. When the UV-curable, visible fluorescent liquid is cured by UV irradiation and used as a resist mask in photo-nanoimprint lithography, a small residual film thickness is desirable to approximate the mask shape to the shape of the transferred object. The array of bars 300 arranged on the mold 21 and the substrate 22 has a concave structure, and the UV-curable fluorescent liquid is filled in this concave structure. Therefore, the fluorescence detected from the layer 23 detects a signal with a higher light intensity from the array of bars 300 on the mold 21 and the substrate 22. In other words, if the thickness of the layer 23, which corresponds to the thickness of the residual film, is large, the signal intensity from the alignment mark decreases, making it difficult to detect the fluorescence that contributes to alignment.

[0096] The verification conditions were a 12-bit light intensity resolution of 4096 gradations, a resolution of 1 pixel (px) = 1 μm, a set displacement of the substrate 22 from the mold 21 of 5 nm, a period p1 of 8.0 μm (bar width L1 of 4.0 μm, space width S1 of 4.0 μm), a period p2 of 8.1 μm (bar width L2 of 4.0 μm, space width S2 of 4.1 μm), and an analysis period of 30 periods (4 rows).The depth (pattern depth) of the recessed structure of the bar array arranged on the mold 21 and the substrate 22 was 0.1 μm.

[0097] Fig. 24 shows the results of verification of the detection value (nm), standard error (nm), and number of effective gradations that can be used to detect misalignment among 4096 gradations with a 12-bit light intensity resolution for each ratio (RLT / D) of residual layer thickness (RLT) to the pattern depth (D) of the bar array. Fig. 25 is a graph of Fig. 24, which shows the relationship between the ratio of residual layer thickness (RLT) to the pattern depth (D) of the bar array and the standard error of the detection value. In Fig. 25, the horizontal axis is the ratio (RLT / D) of residual layer thickness to the pattern depth of the bar array, i.e., residual layer thickness (RLT) / depth (D) of bar 300, and the vertical axis is the standard error (nm). Since the pattern depth of the bar array is 0.1 μm, 1, 2, 3, 4, and 5 on the horizontal axis correspond to residual film thicknesses of 0.1 μm, 0.2 μm, 0.3 μm, 0.4 μm, and 0.5 μm, respectively.

[0098] As shown in Figure 25, the standard error increases as the residual film thickness of layer 23 increases. When the ratio of the residual film thickness to the pattern depth of the bar array (RLT / D) is 0 or 1, the standard error is approximately 0.3 nm. When the residual film thickness is 2, the standard error is approximately 0.4 nm. When the residual film thickness RLT is 3, the standard error is approximately 0.6 nm. When alignment is performed by detecting luminescence such as fluorescence as an optical signal, the smaller the residual film thickness, the more accurate the detected value and standard error of the misalignment amount between mold 21 and substrate 22 can be. Increasing the pattern depth of the bar array to be placed on mold 21 and substrate 22 increases the residual film thickness that allows alignment. With a pattern depth of 1 μm, accurate alignment can be achieved even when the thickness of layer 23 corresponds to the residual film thickness, i.e., the distance between mold 21 and substrate 22 is 3 μm. The above describes the case where luminescence is detected as an optical signal, but when scattered light from alignment marks arranged on the mold 21 and substrate 22 is detected as an optical signal, since the layer 23 is a gas such as air, the dependency of the layer 23 on the distance between the mold 21 and substrate 22 is reduced. If the distance between the mold 21 and substrate 22 increases, an optical system is required to increase the focal depth of the detected light.

[0099] Fig. 26 is a graph of Fig. 22, which shows the relationship between the ratio (RLT / D) of the residual film thickness (RLT) to the pattern depth (D) of the bar array and the number of effective gradations that can be used to detect the amount of misalignment out of 4096 gradations with a 12-bit light intensity resolution. In Fig. 26, the horizontal axis is the ratio (RLT / D) of the residual film thickness to the pattern depth of the bar array, and the vertical axis is the number of effective gradations that can be used to detect the amount of misalignment out of 4096 gradations with a 12-bit light intensity resolution. As shown in Figure 26, the number of effective gradations decreases as the ratio of residual film thickness to pattern depth (RLT / D) increases. When the ratio of residual film thickness to pattern depth is 0, the number of effective gradations is approximately 2600; when the ratio of residual film thickness to pattern depth is 1, the number of effective gradations is approximately 700; and when the ratio of residual film thickness to pattern depth is 2, the number of effective gradations is approximately 250. With a light intensity resolution of 12 bits, the standard error of the detected value of the amount of misalignment increases as the ratio of residual film thickness to pattern depth increases. In such cases, accurate detection is possible by using an image sensor with a light intensity resolution of 14 bits.

[0100] In the above-described embodiment and modified examples, examples in which there are two or four arrays have been described, but there may be six or more arrays.

[0101] In contrast to the present embodiment described above, conventional alignment techniques involve forming alignment marks with different periods on the mold side and the substrate side, and then overlapping the alignment marks when stacked, generating moiré fringes, which are then used for alignment. With this conventional method, the period of the generated moiré fringes is larger than the period of the alignment mark array, resulting in a large observation field for detecting misalignment. The small imaging field of view reduces the moiré analysis period, resulting in large errors. Furthermore, when detecting luminescence such as fluorescence as an optical signal, the inclination of the residual film easily affects the moiré signal intensity. In this embodiment, the alignment marks are arranged so that they do not overlap when stacked. This allows the Fourier transform to eliminate low-frequency noise due to uneven thickness of the residual film caused by the inclination of the residual film, enabling the analysis of the period p1 of the first array and the period p2 of the second array, making it less susceptible to the effects of uneven thickness of the residual film caused by the inclination of the residual film and fluctuations in the residual film thickness. Furthermore, unlike the present embodiment, in which luminescence or scattered light is detected as an optical signal, conventional alignment methods that detect diffracted light as an optical signal have the problem of being easily affected by the edge shape of each bar of the bar array that constitutes the alignment mark. Diffracted light undergoes Fresnel diffraction and other phenomena at the edges of each bar, increasing the light intensity at the edge of each bar. The present embodiment uses luminescence such as fluorescence and light scattering, which maximizes the light intensity at the center of each bar, making it less affected by the edge shape of each bar of the bar array that constitutes the alignment mark and making it easier to measure the center position of the bar width. Furthermore, conventional alignment methods that detect diffracted light as an optical signal require an optically functional film, such as a metal light-shielding film or a high-refractive-index film, on the mold. The present embodiment, in which luminescence or scattered light is detected as an optical signal, does not require an optically functional film on the mold, thereby reducing mold manufacturing costs.

[0102] In addition, in the conventional technology, a first alignment mark is formed on a first object, a second alignment mark is formed on a second object, and the two objects are placed opposite each other. Then, in the conventional technology, an image is captured using an imaging element, and alignment is performed using the deviation between a predetermined position in the first area and the first alignment mark, and the deviation between a predetermined position in the second area and the second alignment mark. In other words, in such conventional technology, alignment is performed by adjusting the alignment marks formed on the objects to predetermined positions.

[0103] In contrast to this, in this embodiment, the amount of misalignment between the array formed on the first object and the array formed on the second object is detected, and the array formed on the first object and the array formed on the second object are aligned based on the detected amount of misalignment, thereby aligning the first object and the second object. As a result, the above-mentioned effects can be obtained.

[0104] A program for implementing all or part of the functions of the control device 11 of the present invention may be recorded on a computer-readable recording medium, and the program recorded on the recording medium may be loaded into a computer system and executed to perform all or part of the processing performed by the control device 11. The term "computer system" as used herein includes hardware such as an OS and peripheral devices. The term "computer system" also includes a WWW system equipped with a homepage provision environment (or display environment). The term "computer-readable recording medium" refers to portable media such as flexible disks, optical magnetic disks, ROMs, and CD-ROMs, as well as storage devices such as hard disks built into computer systems. The term "computer-readable recording medium" also includes devices that retain a program for a certain period of time, such as volatile memory (RAM) within a computer system that acts as a server or client when the program is transmitted via a network such as the Internet or a communication line such as a telephone line.

[0105] The program may also be transmitted from a computer system storing the program in a storage device or the like to another computer system via a transmission medium or by transmission waves in the transmission medium. Here, the "transmission medium" that transmits the program refers to a medium that has the function of transmitting information, such as a network (communication network) such as the Internet or a communication line (communication line) such as a telephone line. The program may also be a program that realizes part of the above-mentioned functions. Furthermore, the program may be a so-called differential file (differential program) that can realize the above-mentioned functions in combination with a program already recorded in the computer system.

[0106] Although the present invention has been described above using the embodiments as modes for carrying out the present invention, the present invention is not limited to these embodiments in any way, and various modifications and substitutions can be made without departing from the spirit of the present invention. For example, in the embodiments and each modification, the alignment device (laminate manufacturing device) has been described using an imprinting device in which the first object is mold 21 and the second object is substrate 22, but the alignment method and alignment device (laminate manufacturing device) of this embodiment and each modification can be applied to alignment for various purposes, and the laminate manufacturing method and alignment device (laminate manufacturing device) of this embodiment and each modification can be applied to alignment, laminate manufacturing, and the like for various purposes in which alignment is important. [Explanation of symbols]

[0107] 1...alignment device, 11...control device, 12...microscope device, 13...ultraviolet irradiation device, 14...fixed stage, 15...coating device, 16...XYZθ-axis movable stage, 17...illumination device, 21...mold, 22...substrate, 23...layer, 311...first array, 312...second array, 400...light emitter, 450...imaging element, 451...detection pixel

Claims

1. a lamination step of laminating a first object and a second object; a detection step after the stacking step of detecting first light obtained from a first array provided on the first object as a first signal, second light obtained from a second array provided on the first object as a second signal, third light obtained from the second array provided on the second object as a third signal, and fourth light obtained from the first array provided on the second object as a fourth signal; a calculation step of finding a positional deviation between the first object and the second object by fitting the detected first signal, the second signal, the third signal, and the fourth signal, respectively; an adjusting step of adjusting the positional deviation; Including, The first array has a period p １ a first periodic structure comprising: The second array has a period p ２ a second periodic structure comprising: the first array and the second array provided on the first object, and the second array and the first array provided on the second object are arranged so that one does not overlap the other when stacked. Alignment method.

2. the first signal, the second signal, the third signal, and the fourth signal obtained from the first array and the second array are luminescence from a layer located between the first object and the second object. The alignment method according to claim 1 .

3. the first signal, the second signal, the third signal, and the fourth signal obtained from the first array and the second array are scattered lights of the first array and the second array, The alignment method according to claim 1 .

4. In the stacking step, the first object and the second object are stacked so that a gap between them is 3 μm or less. The alignment method according to any one of claims 1 to 3.

5. the first array is made up of the first periodic structure having a period of 20 or more, the second array is composed of the second periodic structure having a period of 20 or more; The alignment method according to any one of claims 1 to 4.

6. The stack includes a first object and a second object, The period p provided on the first object １ and a first array having a first periodic structure consisting of ２ a lamination step of laminating the first object and the second object such that the second array and the first array provided on the second object do not overlap each other when laminated; a detection step after the stacking step of detecting first light obtained from the first array provided on the first object as a first signal, detecting second light obtained from the second array as a second signal, detecting third light obtained from the second array provided on the second object as a third signal, and detecting fourth light obtained from the first array as a fourth signal; a calculation step of finding a positional deviation between the first object and the second object by fitting the detected first signal, the second signal, the third signal, and the fourth signal, respectively; an adjusting step of adjusting the positional deviation; A method for producing a laminate comprising the steps of:

7. 1. An alignment apparatus for stacking a first object and a second object and aligning a positional deviation between the first object and the second object, comprising: The period p provided on the first object １ and a first array having a first periodic structure consisting of ２ a second array having a second periodic structure consisting of: a detection means for detecting, for a stack of the first object and the second object, a first light obtained from a first array provided on the first object as a first signal, a second light obtained from a second array provided on the second object as a second signal, a third light obtained from the second array provided on the second object as a third signal, and a fourth light obtained from the first array as a fourth signal; a calculation means for calculating a positional deviation between the first object and the second object by fitting the detected first signal, the second signal, the third signal, and the fourth signal, respectively; an adjusting means for adjusting the positional deviation; An alignment device comprising:

8. A laminate manufacturing apparatus for manufacturing a laminate by stacking a first object and a second object, The period p provided on the first object １ and a first array having a first periodic structure consisting of ２ a second array having a second periodic structure consisting of: a detection means for detecting, for a stack of the first object and the second object, a first light obtained from a first array provided on the first object as a first signal, a second light obtained from a second array provided on the second object as a second signal, a third light obtained from the second array provided on the second object as a third signal, and a fourth light obtained from the first array as a fourth signal; a calculation means for calculating a positional deviation between the first object and the second object by fitting the detected first signal, the second signal, the third signal, and the fourth signal, respectively; an adjusting means for adjusting the positional deviation to determine the stacking position; A laminate manufacturing apparatus comprising:

9. period p １ a first array comprising a first periodic structure consisting of a plurality of first bars with a period p ２ a first object comprising a second array comprising a second periodic structure composed of a plurality of second bars, wherein the plurality of first bars in the first array and the plurality of second bars in the second array are arranged in a first direction; a second object comprising the second array and the first array, wherein the plurality of second bars in the second array and the plurality of first bars in the first array are arranged in the first direction; Equipped with A stack in which the first object and the second object are stacked such that the first array provided on the first object, the second array provided on the first object, the second array provided on the second object, and the first array provided on the second object are aligned in a second direction perpendicular to the first direction and none of them overlap.

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