Method and processing device for determining suitability of injection nozzle

Abstract

To provide: a method for determining appropriateness of a spray nozzle which can prompt exchange of a spray nozzle at appropriate timing by correctly determining appropriateness of the spray nozzle; and a processing device which can execute this method.SOLUTION: A method determines whether or not a spray nozzle is a nozzle appropriate for spraying of water by referring to an image of a depression formed by spraying of water toward a test member from the spray nozzle. In this case, appropriateness of the spray nozzle can be correctly determined. Then, when it is determined that the spray nozzle is inappropriate, information about the determination is notified. Consequently, exchange of the spray nozzle at appropriate timing can be prompted.SELECTED DRAWING: Figure 5

Description

[Technical Field]

[0001] The present invention relates to a method for determining whether a jet nozzle is suitable for jetting water, and to a processing device capable of carrying out this method. [Background technology]

[0002] Chips for devices such as integrated circuits (ICs) are essential components in various electronic devices such as mobile phones and personal computers. These chips are manufactured, for example, by dividing a wafer having multiple devices formed on its front surface along planned division lines.

[0003] Furthermore, such chips may be used to form semiconductor packages such as CSP (Chip Size Package) or QFN (Quad Flat Non-Leaded Package). For example, a QFN is manufactured by first manufacturing a package substrate by die bonding, wire bonding, and sealing with resin on the chip, and then dividing the package substrate along the planned division lines.

[0004] The wafer or package substrate is divided, for example, using a cutting blade obtained by fixing abrasive grains with a bond (see, for example, Patent Document 1). However, when dividing the package substrate using a cutting blade, the metal material contained in the package substrate may undergo plastic deformation, and protrusions called burrs may be formed on the edge of the semiconductor package.

[0005] If a burr is formed on the edge of the semiconductor package, there is a risk that the burr may short-circuit the electrodes included in the semiconductor package. In view of this, a processing device has been proposed that can remove the burr by spraying water toward the burr from a spray nozzle (see, for example, Patent Document 2). [Prior art documents] [Patent documents]

[0006] [Patent Document 1] Japanese Patent Application Laid-Open No. 2007-258590 [Patent Document 2] Japanese Patent Application Publication No. 2018-186133 Summary of the Invention [Problem to be solved by the invention]

[0007] The tip of the jet nozzle that jets water is generally provided with a restriction to throttle the water being supplied. However, repeated jetting of water through this restriction can cause the restriction to widen and the shape of the restriction to become distorted. When the shape of the restriction changes in this way, the force (impact) of the water jetted from the jet nozzle weakens, which can make it difficult to remove burrs with this water.

[0008] Therefore, in this processing device, it is necessary to periodically determine whether the spray nozzle is suitable for spraying water, i.e., whether the shape of the spray nozzle's aperture has changed, and to replace the spray nozzle if it is determined to be unsuitable.

[0009] For example, this determination is made by an operator of the processing device visually checking the shape of the orifice of the injection nozzle. However, in this case, the judgment result is influenced by the subjective judgment of the operator, and the judgment of the suitability of the injection nozzle may be inaccurate.

[0010] Alternatively, this determination may be made by checking changes in the rotation speed of the water pump that supplies water to the spray nozzle. However, changes in the rotation speed of the water pump due to changes in the shape of the spray nozzle orifice are small, and the rotation speed of the water pump may also change due to reasons other than changes in the shape of the spray nozzle orifice. Therefore, in this case as well, the suitability of the spray nozzle may be determined inaccurately.

[0011] In view of these points, an object of the present invention is to provide a method for determining the suitability of a jet nozzle, which can accurately determine the suitability of the jet nozzle and thereby encourage replacement of the jet nozzle at an appropriate time, and a processing device capable of implementing such a method. [Means for solving the problem]

[0012] According to one aspect of the present invention, there is provided a method for determining the suitability of a jet nozzle in a processing device comprising: a jet unit that sprays water from a jet nozzle toward a test component; an imaging unit that images the test component; a notification unit that notifies information related to the jet nozzle; and a control unit that controls the jet unit, the imaging unit, and the notification unit. The method comprises: a jetting step of spraying water from the jet nozzle toward the test component to form a depression in the test component; an imaging step, after the jetting step, of imaging the area of ​​the test component where the depression is formed; a determination step, after the imaging step, of determining whether the jet nozzle is suitable for jetting water by referring to the image of the depression formed based on the image taken in the imaging step; and a notification step, if the jet nozzle is determined to be unsuitable in the determination step, of notifying that fact.

[0013] Preferably, the control unit has a memory unit that stores a threshold value for at least one of the volume or area in a planar view of the depression, and in the judgment process, if at least one of the volume or area in a planar view of the depression calculated by referring to an image of the depression is smaller than the threshold value stored in the memory unit, it is judged that the injection nozzle is inappropriate.

[0014] Furthermore, it is preferable that this method further comprises a preliminary injection step of spraying water toward the test member or the preliminary test member from a nozzle suitable for spraying water in order to form a preliminary depression in the test member or a preliminary test member made of the same material as the test member; a preliminary imaging step of imaging the area of ​​the test member or the preliminary test member in which the preliminary depression is formed after the preliminary injection step; a calculation step of calculating at least one of the volume or area in a planar view of the preliminary depression by referring to the image of the preliminary depression formed based on the imaging taken in the preliminary imaging step; and a setting step of setting the threshold by referring to at least one of the volume or area in a planar view of the preliminary depression.

[0015] Preferably, the injection step includes a pressure increasing step of injecting water from the injection nozzle toward a first region of the test member until the water pressure of the water supplied to the injection nozzle is increased to a desired pressure, and a depression forming step of, after the pressure increasing step, injecting water from the injection nozzle toward a second region of the test member, the water pressure of which has been increased to the desired pressure, thereby forming a depression in the second region.

[0016] According to another aspect of the present invention, there is provided a processing apparatus comprising: an injection unit that sprays water from an injection nozzle toward a test component; an imaging unit that images the test component; an alarm unit that reports information related to the injection nozzle; and a control unit that controls the injection unit, the imaging unit, and the alarm unit, wherein the control unit has: an injection section that controls the injection unit to spray water from the spray nozzle toward the test component to form a depression in the test component; an imaging section that controls the imaging unit to image the area of ​​the test component where the depression is formed; a determination section that determines whether the injection nozzle is suitable for spraying water by referring to an image of the depression formed based on the image captured by the imaging unit; and an alarm section that controls the alarm unit to report that the jet nozzle is unsuitable if the determination section determines that the jet nozzle is unsuitable.

[0017] Preferably, the control unit has a memory unit that stores a threshold value for at least one of the volume or area in a planar view of the depression, and the judgment unit judges that the injection nozzle is inappropriate when at least one of the volume or area in a planar view of the depression calculated by referring to an image of the depression is smaller than the threshold value stored in the memory unit.

[0018] Also, preferably, the injection unit controls the injection unit to spray water from a nozzle suitable for spraying water toward the test member or the preliminary test member in order to form a preliminary depression in the test member or a preliminary test member made of the same material as the test member, the imaging unit controls the imaging unit to image the area of ​​the test member or the preliminary test member in which the preliminary depression is formed, the judgment unit calculates at least one of the volume or area in a planar view of the preliminary depression by referring to an image of the preliminary depression formed based on imaging by the imaging unit, and the threshold value is set by referring to at least one of the volume or area in a planar view of the preliminary depression.

[0019] Preferably, the test piece further includes a moving mechanism for moving the spray nozzle and the test piece relative to each other, and the control unit further includes a drive section for controlling the moving mechanism to change the area of ​​the test piece onto which water is sprayed from the spray nozzle. [Effects of the Invention]

[0020] In the present invention, by referring to an image of a depression formed by spraying water from a spray nozzle toward a test member, it is determined whether or not the spray nozzle is suitable for spraying water. In this case, it is possible to accurately determine the suitability of the spray nozzle.

[0021] In the present invention, if the injection nozzle is determined to be unsuitable, a notification to that effect is given, thereby making it possible to prompt the user to replace the injection nozzle at an appropriate time. [Brief explanation of the drawings]

[0022] [Figure 1] FIG. 1 is a perspective view schematically illustrating an example of a processing device equipped with a spray unit that sprays water from a spray nozzle. [Figure 2] FIG. 2 is a perspective view schematically illustrating an example of a frame unit including a workpiece to be processed in the processing device. [Figure 3] FIG. 3 is a cross-sectional view schematically showing an example of an injection nozzle. [Figure 4] FIG. 4 is a block diagram schematically illustrating an example of a control unit built into the processing device. [Figure 5] FIG. 5 is a flow chart that schematically shows an example of a method for determining the suitability of an injection nozzle. [Figure 6] 6(A) and 6(B) are diagrams each showing an example of an image of a depression formed by imaging with the imaging unit of the processing device. [Figure 7] FIG. 7 is a flow chart that schematically illustrates a number of steps included in the injection step of the method for determining the suitability of an injection nozzle. [Figure 8] FIG. 8 is a flow chart illustrating steps included in another example method for determining the suitability of an injection nozzle. DETAILED DESCRIPTION OF THE INVENTION

[0023]

[0016] An embodiment of the present invention will be described with reference to the accompanying drawings. Fig. 1 is a perspective view showing a schematic example of a processing device equipped with a spray unit that sprays water from a spray nozzle. Note that the X-axis direction (front-rear direction) and the Y-axis direction (left-right direction) shown in Fig. 1 are directions perpendicular to each other on a horizontal plane, and the Z-axis direction (up-down direction) is a direction (vertical direction) perpendicular to the X-axis and Y-axis directions.

[0024] 1 includes a base 4 that supports each component. A groove 4a extending along the X-axis direction is formed on the top surface of the base 4. A flat cover 6 and a bellows-like cover 8 that expands and contracts as the cover 6 moves are provided inside the groove 4a.

[0025] A holding table 10 is provided above the cover 6. The holding table 10 has a disk-shaped porous plate 10a exposed upward. The upper surface of this porous plate 10a serves as the holding surface of the holding table 10, which holds the workpiece. In addition, an X-axis direction movement mechanism (not shown) is provided below the covers 6 and 8, which moves the cover 6 and holding table 10 along the X-axis direction.

[0026] The holding table 10 holds a workpiece to be processed in the processing device 2. Fig. 2 is a perspective view showing a typical example of a frame unit including the workpiece. The frame unit 11 shown in Fig. 2 has a rectangular workpiece (test member) 13 having a thickness of, for example, 0.5 mm to 3 mm, typically 1 mm.

[0027] The test member 13 has generally parallel upper and lower surfaces and is made of, for example, a metal material such as stainless steel or aluminum, or carbon or ceramics. A central region of a circular adhesive tape 15 having a diameter longer than the diagonal line of the test member 13 is attached to the lower surface of the test member 13.

[0028] The adhesive tape 15 has, for example, a flexible film-like base layer and an adhesive layer (glue layer) provided on one surface of the base layer (the surface facing the test member 13). The base layer is made of polyolefin (PO), polypropylene (PP), polyethylene terephthalate (PET), polyvinyl chloride (PVC), polystyrene (PS), or the like. The adhesive layer is made of ultraviolet-curing silicone rubber, an acrylic material, an epoxy material, or the like.

[0029] Additionally, an annular frame 17 having a circular opening with a diameter longer than the diagonal of the test member 13 is attached to the outer periphery of the adhesive tape 15. The frame 17 is made of a metal material such as stainless steel or aluminum. The test member 13 is then placed on the holding surface of the holding table 10 via the adhesive tape 15.

[0030] 1, a suction path (not shown) is formed inside the holding table 10, one end of which is connected to a suction source (not shown), such as an ejector, provided outside the holding table 10. The other end of this suction path reaches the porous plate 10a. Therefore, when the suction source is operated with the test member 13 placed on the holding surface via the adhesive tape 15, the test member 13 is sucked and held to the holding table 10.

[0031] The holding table 10 is connected to a rotation drive source (not shown) such as a motor. When the rotation drive source is operated, the holding table 10 rotates around a rotation axis that passes through the center of the holding surface of the holding table 10 and is aligned in the Z-axis direction.

[0032] A support structure 12 is provided near a groove 4a formed on the upper surface of the base 4. The support structure 12 includes an erected portion 12a extending along the Z-axis direction from the upper surface of the base 4, and an arm portion 12b extending along the Y-axis direction from the upper end of the erected portion 12a so as to span the space above the groove 4a. A Y-axis direction movement mechanism 14 is provided on the front side of the arm portion 12b.

[0033] The Y-axis direction movement mechanism 14 is fixed to the front surface of the arm portion 12b and includes a pair of Y-axis guide rails 16 extending along the Y-axis direction. A Y-axis movement plate 18 is connected to the front surfaces of the pair of Y-axis guide rails 16 in a manner that allows it to slide along the pair of Y-axis guide rails 16.

[0034] A screw shaft 20 extending along the Y-axis direction is disposed between the pair of Y-axis guide rails 16. A motor (not shown) for rotating the screw shaft 20 is connected to one end of the screw shaft 20. A nut portion (not shown) for accommodating balls that roll on the surface of the rotating screw shaft 20 is provided on the surface of the screw shaft 20 on which a spiral groove is formed, thereby forming a ball screw.

[0035] That is, when the screw shaft 20 rotates, the balls circulate inside the nut portion, causing the nut portion to move along the Y-axis direction. In addition, this nut portion is fixed to the rear surface side of the Y-axis moving plate 18. Therefore, when the screw shaft 20 is rotated by a motor connected to one end of the screw shaft 20, the Y-axis moving plate 18 moves along the Y-axis direction together with the nut portion.

[0036] A Z-axis direction moving mechanism 22 is provided on the front side of the Y-axis moving plate 18. This Z-axis direction moving mechanism 22 is fixed to the front side of the Y-axis moving plate 18 and includes a pair of Z-axis guide rails 24 that extend along the Z-axis direction. A Z-axis moving plate 26 is connected to the front side of the pair of Z-axis guide rails 24 in a manner that allows it to slide along the pair of Z-axis guide rails 24.

[0037] A screw shaft 28 extending along the Z-axis direction is disposed between the pair of Z-axis guide rails 24. A motor 30 for rotating the screw shaft 28 is connected to one end of the screw shaft 28. A nut portion (not shown) for accommodating balls that roll on the surface of the rotating screw shaft 28 is provided on the surface of the screw shaft 28 on which a spiral groove is formed, thereby constituting a ball screw.

[0038] That is, when the screw shaft 28 rotates, the balls circulate inside the nut portion, causing the nut portion to move along the Z-axis direction. The nut portion is fixed to the rear surface side of the Z-axis moving plate 26. Therefore, when the screw shaft 28 is rotated by the motor 30, the Z-axis moving plate 26 moves along the Z-axis direction together with the nut portion.

[0039] Furthermore, a spray unit 32 is fixed to the lower part of the Z-axis moving plate 26. This spray unit 32 has a spray nozzle 34 positioned above a groove 4a formed in the upper surface of the base 4. In addition, a hemispherical cover 36 is provided on the spray nozzle 34 so as to surround the lower end thereof.

[0040] 3 is a cross-sectional view schematically showing the injection nozzle 34. A water passage 34a is formed in the injection nozzle 34, and the water passage 34a communicates with a water pump (not shown) for supplying water to the injection nozzle 34 via a valve (not shown) such as a solenoid valve and piping (not shown). Note that the piping may be provided with a sensor for measuring the water pressure.

[0041] A restrictor 38 for restricting the amount of water being supplied is provided at the bottom end of the water passage 34a of the injection nozzle 34. The restrictor 38 is made of, for example, sintered diamond or sapphire. When the water pump is operated with the valve communicating with the water passage 34a open, the water supplied to the water passage 34a passes through the restrictor 38 and is throttled before being sprayed directly downward.

[0042] 1, an imaging unit 40 is provided at a position adjacent to the injection nozzle 34 in the X-axis direction and fixed to the lower part of the Z-axis moving plate 26. This imaging unit 40 is, for example, a camera that captures an image of the holding surface side of the holding table 10 to form an image.

[0043] Furthermore, a cover 42 is provided above the base 4 to enclose the holding table 10, the support structure 12, etc. For convenience, only the edges of the cover 42 are shown by two-dot chain lines in Fig. 1. A touch panel 44 is provided on the side of the cover 42.

[0044] The touch panel 44 is composed of, for example, a touch sensor that functions as an input unit for inputting instructions from the operator to the processing device 2, and a display that functions as a notification unit for notifying the operator of various information. The touch sensor is, for example, a capacitance type touch sensor or a resistive film type touch sensor. The display is, for example, a liquid crystal display or an organic EL (Electro Luminescence) display.

[0045] The processing device 2 also has a built-in control unit that controls the above-mentioned components. Fig. 4 is a block diagram schematically showing an example of a control unit built into the processing device 2. The control unit 46 shown in Fig. 4 has a processing unit 48 and a storage unit 50.

[0046] The processing unit 48 is configured by, for example, a CPU (Central Processing Unit), etc. The storage unit 50 is configured by, for example, a volatile memory such as a DRAM (Dynamic Random Access Memory) or an SRAM (Static Random Access Memory), and a non-volatile memory such as an SSD (Solid State Drive) (NAND flash memory) or an HDD (Hard Disk Drive) (magnetic storage device).

[0047] The storage unit 50 stores various types of information (data, programs, etc.) used in the processing unit 48. For example, the storage unit 50 stores data used when determining whether the spray nozzle 34 is suitable for spraying water. Details of this determination will be described later.

[0048] The processing unit 48 also reads and executes various programs stored in the storage unit 50 to control the components of the processing device 2. The processing unit 48 includes, for example, a drive unit 52, an ejection unit 54, an imaging unit 56, a determination unit 58, and a notification unit 60.

[0049] The drive unit 52 controls the movement and rotation of the components of the processing device 2. Specifically, the drive unit 52 controls an X-axis direction movement mechanism for moving the holding table 10 along the X-axis direction and a rotation drive source for rotating it, a motor for moving the injection unit 32 along the Y-axis direction and a motor 30 for moving it along the Z-axis direction. For example, the drive unit 52 controls these components so that the injection nozzle 34 is positioned directly above the test member 13 held on the holding table 10.

[0050] The jetting section 54 controls the jetting unit 32 to jet water from the jet nozzle 34. Specifically, the jetting section 54 controls the water pump and a valve provided between the water pump and the jet nozzle 34. For example, the jetting section 54 controls the jetting unit 32 to jet high-pressure water toward the test member 13 held on the holding table 10, thereby forming a depression in the upper surface of the test member 13.

[0051] The shape of the depression (for example, the volume and area in a plan view of the depression) changes depending on the shape of the orifice 38 of the jet nozzle 34. Specifically, when the shape of the orifice 38 has hardly changed from its initial shape (the former case), the force (impact force) of the water jetted from the jet nozzle 34 scraping away the upper surface of the test member 13 is hardly weakened.

[0052] On the other hand, if the shape of the orifice 38 expands from its initial shape due to repeated injection of water through the orifice 38, or if the shape of the orifice 38 becomes distorted (the latter case), the impact force will be weakened. Therefore, in the latter case, the volume and area in plan view of the depression will be smaller than in the former case.

[0053] The imaging section 56 controls the imaging unit 40 to capture an image of the holding surface side of the holding table 10. For example, the imaging section 56 controls the imaging unit 40 to capture an image of the test member 13 that is held on the holding table 10 and has a depression formed on its upper surface, and to form an image of the depression.

[0054] The determination unit 58 refers to the image of the depression and determines whether the jet nozzle 34 is suitable for jetting water. For example, the determination unit 58 refers to the image of the depression and calculates the area of ​​the depression in a planar view, and then determines that the jet nozzle 34 is inappropriate if the calculated area of ​​the depression is smaller than a threshold value.

[0055] The threshold value is, for example, stored in advance in the storage unit 50. The threshold value stored in the storage unit 50 may be rewritable by an operator operating the touch panel 44 (more specifically, a touch sensor that functions as an input unit).

[0056] When the determination unit 58 determines that the spray nozzle 34 is inappropriate, the notification unit 60 controls the touch panel 44 (more specifically, the display functioning as a notification unit) to notify the user of this fact. For example, the notification unit 60 controls the touch panel 44 to display a message indicating that the spray nozzle 34 needs to be replaced.

[0057] 5 is a flow chart schematically illustrating an example of a method for determining whether the jet nozzle 34 is suitable for jetting water in the processing device 2. In this method, first, water is jetted from the jet nozzle 34 toward the test member 13 to form a depression in the test member 13 (jetting step: S1).

[0058] Specifically, the drive unit 52 controls the X-axis direction moving mechanism and / or the Y-axis direction moving mechanism 14 so that the test member 13 held on the holding table 10 is positioned directly below the spray nozzle 34, and then the spray unit 54 controls the spray unit 32 so that water is sprayed from the spray nozzle 34 toward the test member 13.

[0059] Next, an image of the area where the depression is formed in the test member 13 is taken (imaging step: S2). Specifically, the driving unit 52 controls the X-axis direction moving mechanism so that the test member 13 held on the holding table 10 is positioned so that it can be imaged by the imaging unit 40, and then the imaging unit 56 controls the imaging unit 40 so that an image of the depression is formed.

[0060] 6(A) and 6(B) are diagrams showing examples of images of a depression formed by imaging with the imaging unit 40. In short, Fig. 6(A) is a diagram showing a diagram showing an image of a depression 19a formed in the test member 13 by spraying water from an appropriate spray nozzle 34, and Fig. 6(B) is a diagram showing an image of a depression 19b formed in the test member 13 by spraying water from an inappropriate spray nozzle 34.

[0061] Next, the determination unit 58 determines whether the injection nozzle 34 is suitable for injection by referring to the images of the depressions 19a and 19b (determination step: S3). For example, in the determination step (S3), if the area of ​​the depressions 19a and 19b in a plan view calculated by referring to the images of the depressions 19a and 19b is smaller than a threshold value stored in the storage unit 50, the determination unit 58 determines that the injection nozzle 34 is inappropriate.

[0062] Then, when the determination unit 58 determines that the injection nozzle 34 is appropriate based on the image of the depression 19a shown in Fig. 6(A) (S4: YES), the method shown in Fig. 5 ends. On the other hand, when the determination unit 58 determines that the injection nozzle 34 is inappropriate based on the image of the depression 19b shown in Fig. 6(B) (S4: NO), it notifies the user that the injection nozzle 34 is inappropriate (notification step: S5).

[0063] For example, the notification unit 60 controls the touch panel 44 (more specifically, the display functioning as the notification unit) to display a message indicating that the spray nozzle 34 needs to be replaced. This completes the method shown in FIG. 5.

[0064] 5, the method for determining the suitability of a jet nozzle is to determine whether the jet nozzle 34 is suitable for jetting water by referring to images of the depressions 19a, 19b formed by jetting water from the jet nozzle 34 toward the test member 13. In this case, it is possible to accurately determine the suitability of the jet nozzle 34.

[0065] In this method, if the injection nozzle 34 is determined to be inappropriate, a notification to that effect is given, which makes it possible to prompt the user to replace the injection nozzle 34 at an appropriate time.

[0066] It should be noted that the above-described content is one aspect of the present invention, and the content of the present invention is not limited to the above-described content. For example, in the processing device of the present invention, in addition to the imaging unit 40, a component (e.g., a laser microscope) capable of measuring the depth of the depressions 19a and 19b may be provided. When such a component is provided in the processing device, the volume of the depressions 19a and 19b can be calculated.

[0067] In this case, in the determination step (S3), the determination unit 58 may determine that the injection nozzle 34 is inappropriate if the volumes of the depressions 19a, 19b are smaller than the thresholds stored in the storage unit 50. Alternatively, in this case, the determination unit 58 may determine that the injection nozzle 34 is inappropriate if both the volumes and the areas in a plan view of the depressions 19a, 19b are smaller than the thresholds stored in the storage unit 50.

[0068] Furthermore, in the processing device of the present invention, another input unit and / or an alarm unit may be provided instead of or in addition to the touch panel 44. Examples of the other input unit include a keyboard, a mouse, a touchpad, or a microphone. Examples of the other alarm unit include a printer, a speaker, or a warning light (pilot lamp).

[0069] If the notification unit includes at least one of a speaker and a warning light, the notification step (S5) can strongly urge the operator to replace the spray nozzle 34. Specifically, the notification unit 60 controls at least one of the speaker and the warning light to emit a warning sound or turn on or flash the warning light, thereby strongly urging the operator to replace the spray nozzle 34.

[0070] Furthermore, in the processing apparatus of the present invention, the water pressure of the water supplied from the water pump to the injection nozzle 34 may be below the desired pressure when injection of water from the injection nozzle 34 begins, and the water pressure may reach the desired pressure by continuing this injection. Note that, in this processing apparatus, if the injection step (S1) is performed for a predetermined period without changing the area onto which water is injected on the test member 13, there is a risk that the shape of the depressions 19a, 19b formed in the test member 13 will not accurately reflect the suitability of the injection nozzle 34.

[0071] For example, even if the injection nozzle 34 is suitable for injecting water, if the water pressure supplied to the injection nozzle 34 takes a long time to reach the desired pressure, the volume and area in a plan view of the depressions 19a, 19b may become small. In such a case, it is preferable to change the area of ​​the test member 13 onto which water is injected in the injection step (S1).

[0072] 7 is a flowchart showing a schematic diagram of a plurality of steps included in the spraying step (S1) in such a case. In this spraying step (S1), first, water is sprayed from the spray nozzle 34 toward the first region of the test member 13 until the water pressure of the water supplied to the spray nozzle 34 is increased to a desired pressure (pressure increase step: S11). The water pressure of the water supplied to the spray nozzle 34 is measured, for example, using a sensor provided in a pipe connecting the water pump and the spray nozzle 34.

[0073] Next, water whose pressure has been increased to a desired pressure is sprayed from the spray nozzle 34 toward the second region of the test member 13, thereby forming depressions 19a, 19b in the second region (depression forming step: S12). When the spraying step (S1) is performed in this manner, it is possible to increase the probability that the shapes of the depressions 19a, 19b formed in the test member 13 accurately reflect the suitability of the spray nozzle 34.

[0074] In addition, in the method of determining the suitability of an injection nozzle of the present invention, the threshold value used in the determination step (S3) may be set using a nozzle suitable for injection. In this method, prior to the determination step (S3) shown in Figure 5, for example, multiple steps shown in Figure 8 are performed.

[0075] Specifically, in this method, water is sprayed toward the test member 13 or a preliminary test member made of the same material as the test member 13 from a nozzle suitable for spraying in order to form a preliminary depression in the test member 13 or a preliminary test member made of the same material as the test member 13 (preliminary spraying process: S6).

[0076] This preliminary injection step (S6) is performed in the same manner as the above-described injection step (S1), and therefore a detailed description thereof will be omitted. As a result, preliminary depressions are formed in regions of the test member 13 that are different from regions where the depressions 19a and 19b are formed or will be formed, or in a preliminary test member that is a structure different from the test member 13.

[0077] Next, an image of the area of ​​the test member 13 or the preliminary test member where the preliminary depression is formed is taken (preliminary imaging step: S7). This preliminary imaging step (S7) is performed, for example, in the same manner as the imaging step (S2) described above, and therefore a detailed description thereof will be omitted. As a result, an image similar to the image shown in FIG. 6(A) is formed.

[0078] Next, the area of ​​the preliminary indentation in a plan view is calculated with reference to the image of the preliminary indentation (calculation step: S8). For example, in this calculation step (S8), the determination unit 58 calculates the area of ​​the preliminary indentation in a plan view with reference to the image of the preliminary indentation. Then, the calculated area of ​​the preliminary indentation is stored in the storage unit 50.

[0079] Next, a threshold value is set with reference to the area of ​​the preliminary indentation in a plan view (setting step: S9). For example, in this setting step (S9), the determination unit 58 calculates the threshold value by multiplying the area of ​​the preliminary indentation calculated in the calculation step (S8) by a coefficient less than 1 stored in the storage unit 50.

[0080] The coefficients stored in the storage unit 50 may be rewritable by an operator operating the touch panel 44 (more specifically, a touch sensor functioning as an input unit). The calculated threshold value is then stored in the storage unit 50 as the threshold value to be used in the determination step (S3).

[0081] In addition, the structures and methods according to the above-described embodiments can be modified as appropriate without departing from the scope of the present invention. [Explanation of symbols]

[0082] 2: Processing equipment 4: Base (4a: Groove) 6,8:Cover 10: Holding table (10a: Porous plate) 11: Frame unit 12: Support structure (12a: standing part, 12b: arm part) 13: Workpiece (test member) 14:Y-axis direction movement mechanism 15: Adhesive tape 16: Y-axis guide rail 17: Frame 18: Y-axis moving plate 19a, 19b: depression 20: Screw shaft 22:Z-axis direction movement mechanism 24: Z-axis guide rail 26: Z-axis moving plate 28: Screw shaft 30: Motor 32: Injection unit 34: Injection nozzle (34a: Water channel) 36: Cover 38: Aperture 40: Imaging unit 42: Cover 44: Touch panel 46: Control unit 48: Processing section 50: Storage section 52: Drive unit 54: Injection part 56: Imaging unit 58: Judgment section 60: Information Department

Claims

1. A method for determining the suitability of a jet nozzle in a processing device including a jet unit that jets water from a jet nozzle toward a test member, an imaging unit that images the test member, a notification unit that notifies information related to the jet nozzle, and a control unit that controls the jet unit, the imaging unit, and the notification unit, the method comprising: a spraying step of spraying water from the spray nozzle toward the test member to form a depression in the test member; an imaging step of imaging the region of the test member where the depression is formed after the spraying step; a determination step of determining, after the imaging step, whether or not the jet nozzle is suitable for jetting water by referring to an image of the depression formed based on the image taken in the imaging step; a notification step of notifying a user that the jet nozzle is determined to be inappropriate in the determination step; A method for determining the suitability of an injection nozzle comprising:

2. the control unit has a storage unit that stores a threshold value for at least one of the volume and the area in a plan view of the depression; In the determination step, when at least one of the volume or the area in a plan view of the dent calculated with reference to the image of the dent is smaller than the threshold value stored in the storage unit, the ejection nozzle is determined to be inappropriate. A method for determining suitability of an injection nozzle according to claim 1.

3. a preliminary injection step of injecting water from a nozzle suitable for injecting the water toward the test member or the preliminary test member to form a preliminary depression in the test member or the preliminary test member made of the same material as the test member; a preliminary imaging step of imaging an area of ​​the test member or the preliminary test member where the preliminary depression is formed after the preliminary injection step; a calculation step of calculating, after the preliminary imaging step, at least one of a volume or an area in a plan view of the preliminary dent by referring to an image of the preliminary dent formed based on the imaging performed in the preliminary imaging step; a setting step of setting the threshold value by referring to at least one of the volume and the area in a plan view of the preliminary depression; The method of claim 2 further comprising:

4. The injection step includes: a step of increasing the pressure of the water supplied to the spray nozzle toward the first region of the test member until the water pressure of the water supplied to the spray nozzle is increased to a desired pressure; and a depression forming step of, after the pressurizing step, spraying water, the water pressure of which has been increased to the desired pressure, from the spray nozzle toward the second region of the test member, thereby forming the depression in the second region. A method for determining suitability of an injection nozzle according to any one of claims 1 to 3.

5. A processing device comprising: a spray unit that sprays water toward a test member from a spray nozzle; an imaging unit that images the test member; a notification unit that notifies information related to the spray nozzle; and a control unit that controls the spray unit, the imaging unit, and the notification unit, The control unit a jetting section that controls the jetting unit to jet water from the jetting nozzle toward the test member to form a depression in the test member; an imaging section that controls the imaging unit so as to image the region of the test member where the depression is formed; a determination unit that determines whether the jet nozzle is suitable for jetting water by referring to an image of the depression formed based on the image captured by the imaging unit; a notification unit that controls the notification unit to notify the user that the jet nozzle is inappropriate when the determination unit determines that the jet nozzle is inappropriate; A processing device having the above structure.

6. the control unit has a storage unit that stores a threshold value for at least one of the volume and the area in a plan view of the depression; the determination unit determines that the ejection nozzle is inappropriate when at least one of the volume or the area in a plan view of the dent, which is calculated with reference to the image of the dent, is smaller than the threshold value stored in the storage unit. The processing device according to claim 5.

7. the jetting section controls the jetting unit to jet water from a nozzle suitable for jetting water toward the test member or the preliminary test member to form a preliminary depression in the test member or the preliminary test member made of the same material as the test member; the imaging section controls the imaging unit to image an area of ​​the test member or the preliminary test member where the preliminary depression is formed; the determination unit calculates at least one of a volume or an area in a plan view of the preliminary depression by referring to an image of the preliminary depression formed based on the image captured by the imaging unit; the threshold value is set with reference to at least one of the volume and the area in a plan view of the preliminary depression. The processing device according to claim 6.

8. a moving mechanism for relatively moving the injection nozzle and the test member; The control unit further includes a drive unit that controls the moving mechanism to change the area of ​​the test member onto which water is sprayed from the spray nozzle. The processing device according to any one of claims 5 to 7.

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