Firing jig

Abstract

To provide a technique capable of better suppressing uneven firing when firing a plurality of firing objects simultaneously. [Solution] A firing jig 100 is used for firing an object to be fired. The firing jig 100 includes a flat substrate 10 having a first surface 12 and a second surface 14 opposite the first surface 12. The substrate 10 has a plurality of storage sections 30 therein that store at least a portion of the object to be fired during firing. The storage sections 30 are through-holes that penetrate the first surface 12 and the second surface 14.

Description

[Technical Field]

[0001] The technology disclosed herein relates to a firing jig. [Background technology]

[0002] In recent years, multilayer ceramic electronic components such as multilayer ceramic capacitors (MLCCs) have been miniaturized to sizes of 1 mm or less. 2 ~1000cm 2 The small electronic components are fired on the surface of a tray-shaped firing jig having an area of ​​100 mm. In firing these small electronic components, first, a large number of objects to be fired (for example, multilayer ceramic electronic components before firing) are supplied to the surface of the firing jig. Next, the piled-up objects to be fired are leveled and made flat. As a result, hundreds to tens of thousands of objects to be fired are dispersed and arranged on the surface of the firing jig. The firing jig is then placed in a firing furnace and fired. This allows a large number of multilayer ceramic electronic components to be produced simultaneously.

[0003] Japanese Patent Application Laid-Open Publication No. 2024-140393 discloses a firing jig for placing a material to be fired. The firing jig includes a base material primarily composed of nickel and a ceramic coating covering at least a portion of the base material. The base material has a flat plate portion for placing the material to be fired. The flat plate portion has a plurality of through holes. The publication states that this configuration favorably achieves both mechanical strength and temperature tracking ability of the firing jig.

[0004] Japanese Patent No. 7560690 discloses a firing jig comprising a tray-shaped frame and a refractory mesh placed above the frame. The frame comprises an outer frame that defines the frame's exterior, ribs bridging the outer frame, gas passage holes surrounded by the outer frame and the ribs, and first protrusions protruding upward from the ribs. When the total area of ​​the upper surfaces of the ribs is taken as 100%, the area in which the first protrusions are formed is 15% or more. The refractory mesh has openings through which the first protrusions pass. The first protrusions protrude above the upper surface of the refractory mesh through the openings. The publication states that this configuration makes it possible to suppress uneven firing when firing multiple objects simultaneously. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Laid-Open No. 2024-140393 [Patent Document 2] Patent No. 7560690 Summary of the Invention [Problem to be solved by the invention]

[0006] The present inventors wish to better prevent uneven firing when firing a plurality of firing objects simultaneously. [Means for solving the problem]

[0007] The technology disclosed herein provides a firing jig for placing objects to be fired. The firing jig includes a flat base having a first surface and a second surface opposite the first surface. The base has a plurality of storage compartments that store at least a portion of the objects to be fired during firing. The storage compartments are through holes that penetrate the first surface and the second surface. This configuration can better prevent uneven firing when firing multiple objects to be fired simultaneously. [Brief explanation of the drawings]

[0008] [Figure 1] FIG. 1 is a schematic plan view of a firing jig 100. As shown in FIG. [Figure 2] FIG. 2 is a partially enlarged view of FIG. [Figure 3] FIG. 3 is a cross-sectional view taken along line III-III in FIG. [Figure 4] FIG. 4 is a partial cross-sectional view of the firing jig 200. As shown in FIG. DETAILED DESCRIPTION OF THE INVENTION

[0009] The following describes embodiments of the technology disclosed herein. Matters necessary for implementation other than those specifically mentioned in this specification (e.g., manufacturing methods for firing jigs, firing conditions for firing objects, etc.) can be understood based on the technical content taught by this specification and the common general technical knowledge of those skilled in the art. The technology disclosed herein can be implemented based on the descriptions in this specification and the common general technical knowledge of those skilled in the art. In the drawings, the same reference numerals are used for components and parts that perform the same function. Dimensional relationships in the drawings (e.g., length, width, thickness) do not reflect actual dimensional relationships. The symbols X, Y, and Z in the drawings represent the first direction, second direction, and third direction, respectively. The symbols L, R, F, Rr, U, and D in the drawings represent left, right, front, rear, top, and bottom, respectively. In this specification and claims, the notation "A to B" indicating a numerical range means greater than or equal to A and less than B, and also means greater than A and less than B.

[0010] The firing jig disclosed herein is used for firing an object to be fired. Examples of firing jigs include firing setters, plates, saggers, and the like for placing the object to be fired. The firing jig, with the object to be fired placed on its surface, is fired (heat-treated) together with the object to be fired in a firing furnace. The firing jig may be used repeatedly in a firing system including, for example, a supply device for supplying the object to be fired, a firing furnace for firing the object to be fired, and a recovery device for recovering the object to be fired after firing. The object to be fired may be, for example, an unfired body of a multilayer ceramic electronic component such as a multilayer ceramic capacitor (MLCC).

[0011] First Embodiment FIG. 1 is a schematic plan view of a firing jig 100. FIG. 2 is a partially enlarged view of FIG. 1. FIG. 2 shows an enlarged view of the structure within frame A in FIG. 1. FIG. 3 is a cross-sectional view taken along III-III in FIG. 2. As shown in FIGS. 1 to 3, the firing jig 100 includes a substrate 10, a coating 20, and a plurality of housing portions 30.

[0012] The shape of the firing jig 100 is not particularly limited and may be adjusted appropriately depending on the type, size, shape, number, etc. of the object to be fired. In the embodiment shown in FIG. 1, the firing jig 100 is a plate-like member that is quadrangular in plan view. Here, in this specification, "quadrangle" includes not only a perfect quadrangular shape (e.g., rectangular, square, etc.), but also a shape in which the corners connecting two sides are rounded to form an R-shape, a shape in which the corners are cut off at a predetermined angle (e.g., 45 degrees) to form a C-face, etc. In other embodiments, the firing jig 100 may be a perfect circle, an ellipse, a polygon, etc. in plan view.

[0013] The size of the firing jig 100 is not particularly limited and may be adjusted appropriately depending on the type, size, shape, number, etc. of the objects to be fired. The length of the firing jig 100 in the first direction X is, for example, 50 mm to 400 mm, or may be 50 mm to 300 mm, or may be 50 mm to 200 mm. The length of the firing jig 100 in the second direction Y may be approximately the same as the length of the firing jig 100 in the first direction X. The thickness t1 (see FIG. 3) of the firing jig 100 (the total thickness of the substrate 10 and the coating 20; the same applies below) is preferably 0.1 mm or more, and more preferably 0.2 mm or more, from the viewpoint of ensuring mechanical strength. On the other hand, the thickness t1 of the firing jig 100 is preferably 2 mm or less, more preferably 1.5 mm or less, and even more preferably 1 mm or less, from the viewpoint of reducing heat capacity. The thickness t1 of the firing jig 100 can be obtained by randomly measuring the thickness of the firing jig 100 at three or more points (for example, five points) and calculating the average value. The thickness of the firing jig 100 can be measured using, for example, an electronic micrometer.

[0014] The substrate 10 here is flat and has a first surface 12 and a second surface 14 opposite the first surface 12 (see FIG. 3). In this embodiment, the substrate 10 is made of metal. Examples of metals constituting the substrate 10 include nickel, tungsten, and stainless steels such as SUS304, SUS430, and SUS410. The substrate 10 is preferably a substrate containing nickel as its main component. Here, the term "nickel-based substrate" means that nickel is the component that is most abundant in terms of atomic number among the metal components constituting the substrate. The term "nickel-based substrate" refers to a substrate in which, for example, 50 atm% or more, 60 atm% or more, 70 atm% or more, preferably 80 atm% or more, 90 atm% or more, or 95 atm% or more (for example, it may be 100 atm%) of the substrate is nickel. The number of metal elements contained in the substrate 10 can be determined, for example, by performing energy dispersive X-ray spectroscopy (EDX) on a cross-sectional SEM image of the substrate.

[0015] The size of the substrate 10 is not particularly limited and may be adjusted appropriately depending on the type, shape, number, etc. of the object to be fired. The length of the substrate 10 in the first direction X and the length of the substrate 10 in the second direction Y may be the same as the length of the firing jig 100 in those directions. From the viewpoint of ensuring mechanical strength, the thickness t2 of the substrate 10 (see FIG. 3) is preferably 0.1 mm or more, more preferably 0.2 mm or more. On the other hand, from the viewpoint of reducing heat capacity, the thickness t2 of the substrate 10 is preferably 2 mm or less, more preferably 1.5 mm or less, and even more preferably 1 mm or less. Here, the thickness t2 of the substrate 10 refers to the average thickness between the first surface 12 and the second surface 14. The average thickness between the first surface 12 and the second surface 14 can be obtained by randomly measuring the thickness between the first surface 12 and the second surface 14 at three or more points (e.g., five points) and calculating the average value. The thickness between the first surface 12 and the second surface 14 can be measured, for example, using an electronic micrometer.

[0016] As shown in FIG. 3, the coating 20 here covers at least a portion of the first surface 12 and at least a portion of the second surface 14. From the perspective of ensuring the mechanical strength of the firing jig 100 and preventing the firing object from reacting with the substrate 10, it is preferable that the coating 20 cover the entire surface of the first surface 12 and the entire surface of the second surface 14. In this embodiment, the coating 20 also covers the inner surface of the housing portion 30 (see FIG. 3). The coating 20 is made of ceramic. The ceramic constituting the coating 20 may be, for example, a ceramic material (oxide ceramic) made of an oxide of various metals, or a ceramic material made of a non-oxide such as carbide, boride, nitride, or apatite. Examples of ceramics include zirconia, alumina, mullite, silica, yttria, chromia, titania, cobaltite, magnesia, calcia, ceria, ferrite, spinel, cordierite, and barium titanate. Coating 20 may contain a single type of ceramic, or may contain two or more types of ceramic.

[0017] Although not particularly limited, the coating 20 preferably contains at least one of zirconia, alumina, mullite, and silica. Among these, the coating 20 is preferably a zirconia coating from the viewpoint of avoiding a reaction between the object to be fired and the substrate 10. The zirconia coating preferably contains, for example, yttria-stabilized zirconia (YSZ), calcia-stabilized zirconia (CSZ), scandia-stabilized zirconia (ScSZ), or the like.

[0018] The thickness t3 of the coating 20 (see FIG. 3) is not particularly limited, but is, for example, 20 μm to 500 μm, preferably 30 μm to 250 μm, and more preferably 50 μm to 100 μm. The thickness t3 of the coating 20 can be obtained by randomly measuring the thickness of the coating 20 at three or more points (for example, five points) and calculating the average value. The thickness t3 of the coating 20 can be obtained, for example, by observing the cross section of the firing jig 100 with an electron microscope (SEM).

[0019] The storage section 30 is a section that stores at least a portion of the object to be fired during firing. Here, with respect to the storage section 30, "storing at least a portion of the object to be fired" refers to a state in which, for example, 20% by volume or more, preferably 30% by volume or more, more preferably 40% by volume or more, and even more preferably 50% by volume or more, or 100% by volume or less, 90% by volume or less, or 80% by volume or less of the object to be fired is stored inside the storage section 30. As shown in FIG. 3, the storage section 30 is a through-hole that penetrates the first surface 12 and the second surface 14 of the base material 10. The storage section 30 is denoted by the reference numerals "31," "32," and "33" in this order from the rear to the front in FIGS. 1 and 3. In the following description, unless a specific storage section is specified, it will be referred to as "storage section 30." When referring to a particular housing, it will be referred to as "housing 31," "housing 32," or "housing 33."

[0020] In the embodiment shown in FIG. 3, the diameter of the storage portion 30 on the first surface 12 is different from the diameter of the storage portion 30 on the second surface 14. As shown in FIG. 3, the storage portion 30 has a first recess 30a and a second recess 30b. In a plan view of the first surface 12 or the second surface 14 of the substrate 10, the first recess 30a and the second recess 30b may both be circular (including a perfect circle or an ellipse) or may have other shapes. Here, the first recess 30a is a recess with a relatively large diameter. Here, the second recess 30b is a recess with a relatively small diameter. In this embodiment, the first recess 30a is recessed from one of the first surface 12 and the second surface 14. The second recess 30b is recessed from the surface opposite to the surface on which the first recess 30a is provided. The bottom of the first recess 30a and the bottom of the second recess 30b are connected to form the accommodation portion 30 which is a through-hole.

[0021] 3, in the storage section 31 and the storage section 33, the first recess 30a is a portion recessed from the first surface 12, and the second recess 30b is a portion recessed from the second surface 14. In the storage section 32, the first recess 30a is a portion recessed from the second surface 14, and the second recess 30b is a portion recessed from the first surface 12. The bottom of the first recess 30a and the bottom of the second recess 30b are connected to form an opening 30h. This makes the storage sections 31 to 33 through holes.

[0022] From the viewpoint of improving the firing efficiency of the firing object, it is preferable that the diameter D1 of the first recess 30a and the diameter D2 of the second recess 30b are both set to a size sufficient to accommodate at least a portion of the firing object. The diameters D1 and D2 may be adjusted appropriately depending on the type and shape of the firing object, the size of the base material 10, and the like, and are not particularly limited. The diameters D1 and D2 may be set to, for example, 0.1 mm to 2 mm, preferably 0.2 mm to 1 mm. While not particularly limited, from the viewpoint of firing a large number of firing objects at once and facilitating the escape of gas generated during firing, the ratio of the diameter D1 to the diameter D2 (D1 / D2) is, for example, 1.1 to 3.5, preferably 1.3 to 3.0, and more preferably 1.5 to 2.5. The diameter D1 can be obtained by randomly measuring the diameter of the first recess 30a at three or more points (e.g., five points) on the first surface 12 or the second surface 14 and calculating the average value. The diameter of the first recess 30a can be measured, for example, using a microscope, etc. The diameter D2 can be obtained by performing similar measurements and calculations on the second recess 30b on the first surface 12 or the second surface 14.

[0023] The diameter D3 of the opening 30h is not particularly limited and may be adjusted appropriately depending on the type and shape of the object to be fired, the size of the substrate 10, etc. From the viewpoint of properly holding the object to be fired in the storage section 30 and facilitating the escape of gas generated during firing, the ratio (D1 / D3) of the diameter D1 of the first recess 30a to the diameter D3 of the opening 30h is, for example, 2.0 to 4.0, preferably 2.5 to 3.5. From the same viewpoint, the ratio (D2 / D3) of the diameter D2 of the second recess 30b to the diameter D3 of the opening 30h is, for example, 1.2 to 1.8, preferably 1.4 to 1.6. The diameter D3 can be obtained by randomly measuring the diameter of the opening 30h at three or more points (e.g., five points) and calculating the average value. The diameter of the opening 30h can be measured, for example, using an SEM or the like.

[0024] The position where the opening 30h is provided in the thickness direction of the substrate 10 is not particularly limited and may be adjusted appropriately depending on the type and shape of the object to be fired, the size of the substrate 10, etc. From the viewpoint of properly holding the object to be fired within the storage section 30 and facilitating the escape of gas generated during firing, the opening 30h may be provided at a depth of, for example, 1 / 4(t2) to 3 / 4(t2), preferably 1 / 3(t2) to 2 / 3(t2), from the first surface 12 toward the second surface 14.

[0025] In this embodiment, the storage sections 30 are provided along the extending direction of the first sides 101a, 101b and the extending direction of the second sides 102a, 102b of the firing jig 100 (see FIGS. 1 and 2). For two storage sections 30 (for example, storage section 31 and storage section 32, or storage section 32 and storage section 33 (see FIGS. 2 and 3)) adjacent in the extending direction of the first sides 101a, 101b (here, second direction Y), the first recess 30a and the second recess 30b are adjacent on the first surface 12 and the second surface 14, respectively. For two adjacent storage sections 30 (for example, storage section 31 and storage section 34, or storage section 34 and storage section 35 (see Figure 2)) in the direction in which the second sides 102a, 102b extend (here, the first direction X), the first recess 30a and the second recess 30b are adjacent to each other on the first surface 12 and the second surface 14, respectively (not shown).

[0026] The distance between two adjacent storage sections 30 in the first direction X or the second direction Y may be adjusted appropriately depending on the type and shape of the object to be fired, the size of the substrate 10, and is not particularly limited. From the viewpoint of ensuring the mechanical strength of the firing jig 100, the distance P1 (see FIG. 3) between two adjacent storage sections 30 in the second direction Y is, for example, 0.55 to 2.0, preferably 0.8 to 1.5, where D1 is the diameter of the first recess 30a. Here, the distance P1 refers to the shortest distance between the centers of the openings 30h of two adjacent storage sections 30 (here, storage sections 32 and 33) in the second direction Y. The distance P1 can be obtained by randomly measuring the shortest distance between the centers of two adjacent storage sections 30 in the second direction Y at three or more points (e.g., five points) and calculating the average value. This shortest distance can be measured using, for example, an SEM.

[0027] The firing jig 100 can be produced, for example, by the following procedure. The method for producing the firing jig 100 includes at least providing a plurality of housing portions 30 in the substrate 10 and forming a coating 20 on the substrate 10. In this embodiment, the production method includes a preparation step, a housing portion formation step, and a coating step.

[0028] In the preparation step, a metal plate is prepared to become the substrate 10. Here, it is preferable to prepare a metal plate that can realize the properties, shape, etc. desired for the substrate 10 described above.

[0029] In the housing portion forming step, a housing portion 30 is provided on the metal plate prepared in the preparation step. In this way, the substrate 10 is obtained. The method for providing the housing portion 30 is not particularly limited, and examples thereof include etching (corrosion treatment), laser processing, drilling, and punching. Considering the smoothness of the inner surface of the housing portion 30, workability, cost, and the like, it is preferable to form the housing portion 30 by etching. In the etching step, wet etching using sulfuric acid, hydrochloric acid, nitric acid, hydrogen peroxide, or the like heated to room temperature or a temperature below its boiling point (for example, 20°C to 40°C) can be preferably used.

[0030] In the coating step, the substrate 10 is provided with a coating 20. This results in a firing jig 100. The method for forming the coating 20 is not particularly limited, but examples include thermal spraying, chemical vapor deposition (CVD), physical vapor deposition (PVD), sputtering, spin coating, dipping, spray painting, and the like. Of these, thermal spraying is preferably used from the viewpoint of improving the adhesion of the coating 20 to the substrate 10. As the thermal spraying method, any conventionally known thermal spraying method used for this type of application can be used without any particular limitation. Note that, prior to the coating step, the surface of the substrate 10 may be roughened as necessary. For the roughening treatment, for example, blasting using abrasive grains of about #10 to #200 may be performed.

[0031] As described above, the firing jig 100 is used to fire an object to be fired. The firing jig 100 includes a flat substrate 10 having a first surface 12 and a second surface 14 opposite the first surface 12. The substrate 10 has a plurality of storage sections 30 therein that store at least a portion of the object to be fired during firing. The storage sections 30 are through-holes that penetrate the first surface 12 and the second surface 14.

[0032] By using the firing jig 100 when firing the object to be fired, at least a portion of the object to be fired is accommodated in the accommodation section 30. This makes it possible to prevent the objects to be fired from overlapping on the firing jig 100. Furthermore, because the accommodation section 30 is a through-hole, gases emitted from the object to be fired during firing (for example, gases derived from organic components such as binders in the object to be fired) can be efficiently removed. This makes it possible to prevent uneven firing of the object to be fired.

[0033] The diameter of the accommodation portion 30 on the first surface 12 and the diameter of the accommodation portion 30 on the second surface 14 may be different from each other. This can increase the mechanical strength of the firing jig 100. Furthermore, the object to be fired can be held more stably in the accommodation portion 30.

[0034] The storage section 30 may have a first recess 30a with a relatively large diameter and a second recess 30b with a relatively small diameter. The first recess 30a may be a portion recessed from one of the first surface 12 and the second surface 14. The second recess 30b may be a portion recessed from the surface opposite to the surface on which the first recess 30a is provided. The bottom of the first recess 30a and the bottom of the second recess 30b may be connected to form a through-hole. This can further improve the ability of the storage section 30 to hold the object to be fired. The bottom of the first recess 30a and the bottom of the second recess 30b are connected inside the thickness direction of the substrate 10, forming an opening 30h (see FIG. 3). This allows gas generated during firing to be more efficiently discharged.

[0035] The substrate 10 may be rectangular. The multiple storage sections 30 may be provided along the long side direction (e.g., first direction X) and short side direction (e.g., second direction Y) of the substrate 10. In two storage sections 30 adjacent in the long side direction or short side direction, the first recess 30a and the second recess 30b may be adjacent on the first surface 12 and the second surface 14. This can further improve the mechanical strength of the firing jig 100. Note that when the substrate 10 is square, the long side direction is the direction in which the pair of opposing first sides 101a and 101b extend, and the short side direction is the direction in which the second sides 102a and 102b extend.

[0036] The firing jig 100 may include a metal substrate 10 and a ceramic coating 20 that covers at least a portion of the surface of the substrate 10. This can prevent the metal constituting the substrate 10 from reacting with the object to be fired.

[0037] The accommodation section 30 may be an etching hole formed by an etching process. This allows the accommodation section 30 to be provided more uniformly. The smoothness of the inner surface of the accommodation section 30 is improved, thereby preventing damage to the object to be fired. Furthermore, since etching holes can be provided inexpensively and in large numbers at one time, the productivity of the firing jig 100 can be improved.

[0038] The coating 20 may be a ceramic spray coating, which can improve adhesion between the coating 20 and the substrate 10. Therefore, even when the firing jig 100 is used repeatedly, reaction between the metal constituting the substrate 10 and the object to be fired can be suppressed.

[0039] The average thickness between the first surface 12 and the second surface 14 may be 0.2 mm to 2 mm, which allows the firing jig 100 to preferably achieve both good mechanical strength and good temperature followability.

[0040] The firing jig 100 may be used in the manufacture of multilayer ceramic electronic components. This allows a large number of multilayer ceramic electronic components to be manufactured at once without uneven firing. The firing jig 100 is preferably used, for example, in the manufacture of multilayer ceramic capacitors.

[0041] Although the embodiments of the technology disclosed herein have been described above, the above-described embodiments are merely examples and do not limit the scope of the claims. The matters disclosed herein may be modified in various ways. As long as no particular problems arise, the components and processes described herein may be omitted or combined as appropriate.

[0042] Second Embodiment Fig. 4 is a partial cross-sectional view of the firing jig 200. Fig. 4 schematically shows the cross-sectional structure of one of the accommodating sections 230 provided in the firing jig 200. As shown in Fig. 4, the firing jig 200 includes a substrate 210 and a coating 220. The substrate 210 includes an accommodating section 230. Although not shown, the substrate 210 is provided with a plurality of accommodating sections 230.

[0043] As shown in FIG. 4, the accommodation portion 230 is a through-hole that penetrates the first surface 212 and the second surface 214 of the base material 210. In this embodiment, the accommodation portion 230 has a first recess 230a with a relatively large diameter and a third recess 230c with a relatively small diameter. Here, the first recess 230a is a recess recessed from the first surface 212. The third recess 230c is a recess recessed from the inner surface of the first recess 230a. The third recess 230c may be, for example, a recess recessed from the bottom of the first recess 230a. The third recess 230c reaches the second surface 214 and has an opening 230h in the second surface 214.

[0044] The diameter D21 of the first recess 230a is not particularly limited as long as it is large enough to accommodate at least a portion of the object to be baked inside the first recess 230. The diameter D21 may be approximately the same as the diameter D1 of the first recess 30a in the first embodiment (see FIG. 3). The diameter D23 of the third recess 230c is not particularly limited as long as it is smaller than the diameter D21 of the first recess 230a. A portion of the object to be baked may or may not be accommodated inside the third recess 230c.

[0045] The diameter D22 of the opening 230h can be set to a size that prevents the object to be fired from slipping off the firing jig 200. The diameter D22 is not particularly limited and may be adjusted appropriately depending on the type and shape of the object to be fired, the size of the base material 210, etc. From the viewpoint of properly holding the object to be fired in the storage section 230 and facilitating the escape of gas generated during firing, the ratio (D21 / D22) of the diameter D21 of the first recess 230a to the diameter D22 of the opening 230h is, for example, 1.5 to 3.0, and preferably 1.8 to 2.5.

[0046] Although not particularly limited, from the viewpoint of firing a larger number of firing objects at once, it is preferable that the first recesses 230a are provided on the same surface of the base material 210. On the other hand, from the viewpoint of further increasing the mechanical strength of the firing jig 200, it is preferable that both the first recesses 230a and the openings 230h are provided on the first surface 212. In this case, it is more preferable that the first recesses 230a and the openings 230h are adjacent to each other on the first surface 212 and the second surface 214 of two adjacent storage sections 230.

[0047] <Other embodiments> The shape of the housing portion is not limited to the shapes in the above-described embodiments, and may be, for example, a tapered through-hole whose diameter decreases from one surface of the base material to the other surface.

[0048] The technology disclosed herein includes the following: Section 1: A firing jig used for firing an object to be fired, The device includes a flat substrate having a first surface and a second surface opposite to the first surface, the base material has a plurality of accommodation portions that accommodate at least a portion of the object to be fired during firing of the object to be fired, The accommodation portion is a through hole that penetrates the first surface and the second surface. Firing jig. Section 2: The diameter of the housing portion on the first surface and the diameter of the housing portion on the second surface are different from each other. Item 1. The firing jig according to item 1. Section 3: the housing portion has a first recess having a relatively large diameter and a second recess having a relatively small diameter, the first recess is a portion recessed from one of the first surface and the second surface, the second recess is a portion recessed from a surface opposite to a surface on which the first recess is provided, The bottom of the first recess and the bottom of the second recess are connected to form a through hole. Item 1 or 2. The firing jig according to item 1 or 2. Section 4: The substrate has a rectangular shape, The plurality of storage sections are provided along the long side direction and the short side direction of the base material, In two storage sections adjacent to each other in the long side direction or the short side direction, the first recess and the second recess are adjacent to each other on the first surface and the second surface. Item 4. The firing jig according to any one of Items 1 to 3. Section 5: The ceramic substrate is made of a metal and has a ceramic coating covering at least a portion of the surface of the substrate. Item 5. The firing jig according to any one of Items 1 to 4. Item 6: The receiving portion is an etching hole. Item 6. The firing jig according to any one of Items 1 to 5. Section 7: The coating is a ceramic thermal spray coating. Item 7. The firing jig according to any one of Items 1 to 6. Section 8: The average thickness between the first surface and the second surface is 0.2 mm to 2 mm. Item 8. The firing jig according to any one of Items 1 to 7. Section 9: Used in the manufacture of multilayer ceramic electronic components, Item 9. The firing jig according to any one of Items 1 to 8. [Explanation of symbols]

[0049] 10 Base material 12 Front page 14 Side 2 20 Coating 30 Storage section 30a First recess 30b Second recess 30h opening 100 Firing jig

Claims

1. A firing jig used for firing an object to be fired, a flat substrate having a first surface and a second surface opposite to the first surface, the base material has a plurality of accommodation portions that accommodate at least a portion of the object to be fired during firing of the object to be fired, the accommodation portion is a through hole that penetrates the first surface and the second surface, the housing portion has a first recess having a relatively large diameter and a second recess having a relatively small diameter, the first recess is a portion recessed from one of the first surface and the second surface, the second recess is a portion recessed from a surface opposite to a surface on which the first recess is provided, a bottom of the first recess and a bottom of the second recess are connected to form a through hole, The substrate has a rectangular shape, The plurality of storage sections are provided along the long side direction and the short side direction of the base material, In two storage sections adjacent to each other in the long side direction or the short side direction, the first recess and the second recess are adjacent to each other on the first surface and the second surface. Firing jig.

2. A firing jig used for firing an object to be fired, a flat substrate having a first surface and a second surface opposite to the first surface, the base material has a plurality of accommodation portions that accommodate at least a portion of the object to be fired during firing of the object to be fired, the accommodation portion is a through hole that penetrates the first surface and the second surface, The ceramic substrate is made of a metal and has a ceramic coating covering at least a portion of the surface of the substrate. Firing jig.

3. The receiving portion is an etching hole. The firing jig according to claim 2 .

4. The coating is a ceramic thermal spray coating. The firing jig according to claim 2 .

5. The diameter of the accommodating portion on the first surface and the diameter of the accommodating portion on the second surface are different from each other. The firing jig according to claim 2 .

6. The average thickness between the first surface and the second surface is 0.2 mm to 2 mm. The firing jig according to claim 1 or 2.

7. Used in the manufacture of multilayer ceramic electronic components, The firing jig according to claim 1 or 2.

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