Processing equipment

Abstract

To prevent a motor power from not being transmitted to a chuck rotating shaft when tension of an endless belt changes during a change of inclination of the chuck rotating shaft.SOLUTION: A processing device 1 includes: a shaft 32 hanging down from a lower surface of a table 30; a housing 33 which arranges a first bearing 331 rotatably supporting the shaft 32; a base table 39 which supports the housing 33 and is provided with a shaft insertion port; a mechanism 34 which is arranged between the base table 39 and the housing 33 and adjusts shaft inclination; and a shaft rotation mechanism 4. The rotation mechanism 4 is provided with: a bearing arranging part 40 arranging a second bearing 42; a first pulley 41 rotatably supported by the second bearing 42; a three-dimensional coupling 5 engaged with the shaft 32 whose inclination has been changed and the first pulley 41; a motor 44 which is separate horizontally from the shaft 32 and is arranged on the base table 39; a second pulley 45 which is connected to the motor 44; and a belt 46 which is engaged with the first pulley 41 and the second pulley 45, and transmits motor power to the shaft 32.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to a processing apparatus for processing a workpiece such as a semiconductor wafer. [Background technology]

[0002] As disclosed in Patent Document 1, a grinding device that holds a wafer on the holding surface of a chuck table and grinds the wafer with the underside of a grinding wheel includes a chuck rotation shaft that rotates the chuck table around the center of the holding surface, and a rotation mechanism that rotates the chuck rotation shaft.

[0003] For example, the rotation mechanism includes a first pulley attached to the chuck rotation shaft, a motor disposed on a base, a second pulley connected to the rotation shaft of the motor, and an endless belt engaged with the first and second pulleys. The endless belt is wound around the first and second pulleys with a predetermined tension and transmits the power of the motor to the chuck rotation shaft, causing the chuck table to rotate around the chuck rotation shaft.

[0004] Furthermore, in order to adjust the parallelism between the holding surface and the underside of the grinding wheel, the grinding machine is equipped with an inclination adjustment mechanism that changes the inclination of the chuck rotation axis, as disclosed in Patent Document 2. The inclination adjustment mechanism is disposed on a base and changes the inclination of the chuck table by changing the vertical distance between the base and the chuck table. In other words, the chuck table is supported on the base via the inclination adjustment mechanism, and the motor that serves as the power source for rotating the chuck table is disposed on the base. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Laid-Open No. 2014-237200 [Patent Document 2] Japanese Patent Application Laid-Open No. 2013-119123 Summary of the Invention [Problem to be solved by the invention]

[0006] During grinding, the inclination of the chuck rotation axis is changed to adjust the longitudinal cross-sectional shape of the wafer. By changing this inclination, the inclination relationship between the first and second pulleys becomes non-parallel. As a result, the distance between the first and second pulleys changes, which in turn changes the tension of the endless belt. This can cause a problem in that the power of the motor may not be transmitted to the chuck rotation axis.

[0007] Therefore, in a processing device, there is a problem of preventing a situation in which the tension of the endless belt changes when the inclination of the chuck rotation shaft is changed, and the power of the motor is not transmitted to the chuck rotation shaft. [Means for solving the problem]

[0008] The present invention, which solves the above-mentioned problems, provides a processing device including a holding mechanism that holds a workpiece on a holding surface, and a processing mechanism that grinds or polishes the workpiece held on the holding surface with the underside of a processing tool that is a grinding stone or a polishing pad, wherein the holding mechanism includes a chuck table having the holding surface on its upper surface, a support plate that supports the underside of the chuck table, a shaft that hangs down from the center of the underside of the support plate, a housing in which a first bearing that rotatably supports the shaft is disposed, and a base that supports the housing and has an insertion opening through which the shaft is inserted. a tilt adjustment mechanism that adjusts the tilt of the chuck table, the support plate, and the shaft relative to the underside of the processing tool by varying the length of at least one of at least three pillars that are arranged between the base and the housing so as to surround the insertion opening; and a rotation mechanism that rotates the shaft inserted into the insertion opening, the rotation mechanism including a bearing arrangement section that is fixed to the base, has an opening corresponding to the insertion opening, and arranges a second bearing therein, an annular first pulley that is rotatably supported on an outer surface by the second bearing arranged in the bearing arrangement section, and a tilt adjustment mechanism that adjusts the tilt of the chuck table, the support plate, and the shaft relative to the underside of the processing tool. a three-dimensional coupling that engages the first pulley with the shaft whose tilt, height, and horizontal position are changed by an adjustment mechanism; a motor that is disposed on the base and spaced horizontally from the shaft; a second pulley that is located on the horizontal outer periphery of the first pulley and spaced apart and connected to a rotary shaft of the motor; and an endless belt that engages with the first pulley and the second pulley with a predetermined tension and transmits the power of the motor to the shaft, and the three-dimensional coupling is disposed below the first pulley and has a first opening whose upper surface is connected to the first pulley and has a first opening corresponding to the insertion port. a pair of first protrusions hanging down from the underside of the first plate with the first opening between them; a second plate connected to the shaft; a pair of second protrusions standing on the upper surface of the second plate at an angle of 90 degrees in plan view from the first protrusions and having a shape similar to the first protrusions; and a floating block having a rectangular outer shape, movable in an area surrounded by the pair of first protrusions and the pair of second protrusions, and having a second opening in the center for inserting the shaft, wherein the first pulley is connected to the bearing arrangement portion via the second bearing, so that when the inclination of the shaft changes,Between the first plate connected to the first pulley and the second plate connected to the shaft, While contacting the pair of first protrusions and the pair of second protrusions The processing device is characterized in that the rotation of the first pulley is transmitted to the shaft by the floating block, and the tension of the endless belt is not changed.

[0009] The shaft has a rotational force transmitting portion having a rectangular cross section at the bottom or a convex or concave shape on the side surface of the bottom, and the three-dimensional coupling has an upper surface but The first pulley linked to a third plate having a third opening corresponding to the insertion opening; a fourth plate disposed below the third plate and having a transmission opening at the center corresponding to the rotational force transmitted part; and a fourth plate connecting the third plate and the fourth plate so that the inclination of the fourth plate relative to the third plate can be changed. The power of the motor is transmitted It is preferable to include a connecting spring.

[0010] The present invention is a wafer processing method using the above-mentioned processing apparatus to grind or polish a wafer, which is a workpiece held on the chuck table, which rotates by transmitting the power of the motor via the three-dimensional coupling. [Effects of the Invention]

[0011] The processing device according to the present invention is provided with a holding mechanism that holds a workpiece on a holding surface, and a processing mechanism that processes the workpiece held on the holding surface, wherein the holding mechanism comprises a chuck table having a holding surface on its upper surface, a support plate that supports the underside of the chuck table, a shaft that hangs down from the center of the underside of the support plate, a housing in which a first bearing that rotatably supports the shaft is disposed, a base that supports the housing and has an insertion opening through which the shaft is inserted, an inclination adjustment mechanism that adjusts the inclination of the shaft by varying the length of at least one of at least three pillars that are disposed so as to surround the insertion opening between the base and the housing, and a rotation mechanism that rotates the shaft inserted in the insertion opening, and the rotation mechanism has an opening that corresponds to the insertion opening and a second bearing that the shaft whose tilt, height and horizontal position are changed by the tilt adjustment mechanism and the first pulley; a motor disposed on a base and spaced horizontally from the shaft; a second pulley connected to the rotating shaft of the motor; and an endless belt that engages with the first pulley and the second pulley with a predetermined tension to transmit the power of the motor to the shaft. This means that even if the tilt of the shaft is changed, the tension of the endless belt does not change, and even though the axis of the shaft and the center of the first pulley are misaligned horizontally, the three-dimensional coupling makes it possible to properly transmit the rotational power of the motor to the shaft.

[0012] Furthermore, in the processing apparatus according to the present invention, the three-dimensional coupling comprises a first plate on whose upper surface a first pulley is arranged and which has a first opening corresponding to the insertion port, a pair of first protrusions hanging down from the underside of the first plate across the first opening, a second plate connected to the shaft, a pair of second protrusions standing on the upper surface of the second plate at an angle of 90 degrees in plan view from the first protrusions and having a shape similar to the first protrusions, and a floating block which has a square outer shape and is movable in an area surrounded by the pair of first protrusions and the pair of second protrusions and has a second opening in the center through which the shaft is inserted. This makes it possible to properly transmit the rotational power of the motor to the shaft by the floating block even if the inclination of the shaft is changed so that the axis of the shaft and the center of the first pulley are misaligned horizontally.

[0013] Furthermore, in the processing apparatus according to the present invention, the shaft has a rotational force receiving part whose lower cross section is rectangular or whose lower side has a convex or concave shape, and the three-dimensional coupling has a third plate on whose upper surface the first pulley is arranged and which has a third opening corresponding to the insertion port, a fourth plate arranged below the third plate and which has a transmission opening in its center corresponding to the rotational force receiving part, and a connecting spring which connects the third plate and the fourth plate and makes it possible to change the inclination of the fourth plate relative to the third plate.By doing this, even if the inclination of the shaft is changed so that the axis of the shaft and the center of the first pulley are misaligned horizontally, the connecting spring becomes deformed (becoming in a state which allows the inclination of the shaft and the fourth plate), so that the tension of the endless belt does not change and it becomes possible to properly transmit the rotational power of the motor to the shaft. [Brief explanation of the drawings]

[0014] [Figure 1] FIG. 1 is a perspective view showing an example of a processing device. [Figure 2] FIG. 2 is a cross-sectional view showing an example of a processing device. [Figure 3] FIG. 1 is an exploded perspective view showing an example of a three-dimensional coupling. [Figure 4] FIG. 10 is a perspective view showing a state in which the lower surface of the bearing arrangement portion faces upward. [Figure 5] FIG. 2 is a perspective view showing a state in which the lower surface of the first plate faces upward. [Figure 6] 10 is a cross-sectional view illustrating the chuck table when not tilted by the tilt adjustment mechanism, the shaft when not tilted, and the rotation mechanism. FIG. [Figure 7] 10 is a cross-sectional view illustrating the chuck table in a state tilted by the tilt adjustment mechanism, the tilted shaft, and the rotation mechanism. FIG. [Figure 8] 10 is a schematic plan view illustrating the three-dimensional coupling in a state where the shaft is tilted by the tilt adjustment mechanism and the first pulley has not rotated from the rotation start position. FIG. [Figure 9]10 is a schematic plan view illustrating the three-dimensional coupling in a state where the shaft is tilted by the tilt adjustment mechanism and the first pulley is rotated 45 degrees from the rotation start position. FIG. [Figure 10] 10 is a schematic plan view illustrating the three-dimensional coupling in a state where the shaft is tilted by the tilt adjustment mechanism and the first pulley is rotated 90 degrees from the rotation start position. FIG. [Figure 11] 10 is a schematic plan view illustrating the three-dimensional coupling in a state where the shaft is tilted by the tilt adjustment mechanism and the first pulley has rotated 135 degrees from the rotation start position. FIG. [Figure 12] FIG. 10 is a perspective view showing an example of a three-dimensional coupling according to a second embodiment. [Figure 13] FIG. 10 is a perspective view showing another example of the three-dimensional coupling of the second embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0015] The processing apparatus 1 shown in Figure 1 is an apparatus that grinds a workpiece 90 held by suction on a chuck table 30 using a processing mechanism 16 (hereinafter referred to as a grinding mechanism 16), and the front (-Y direction side) of the apparatus base 10, whose longitudinal direction is the Y axis direction of the processing apparatus 1, is an attachment / detachment area where the workpiece 90 is attached to and detached from the chuck table 30, and the rear (+Y direction side) of the apparatus base 10 is a grinding processing area where the grinding mechanism 16 grinds the workpiece 90 held by suction on the chuck table 30. The processing apparatus according to the present invention is not limited to a single-axis type grinding mechanism 16 like the processing apparatus 1, but may be a two-axis type that includes a rough grinding mechanism and a finish grinding mechanism and that can position the workpiece 90 below the rough grinding mechanism or the finish grinding mechanism using a rotating turntable. Also, the processing apparatus 1 may be a polishing apparatus that polishes the workpiece 90 with a polishing pad.

[0016] The workpiece 90 shown in Fig. 1 is, for example, a circular semiconductor wafer made of a silicon base material or the like. A surface 900 of the workpiece 90, which faces downward in Fig. 1, has a plurality of devices formed thereon and is protected by a protective tape (not shown). The back surface 903 (top surface 903) of the workpiece 90, which faces upward, becomes the surface to be ground. Note that the workpiece 90 may be made of gallium arsenide, sapphire, gallium nitride, resin, ceramics, silicon carbide, or the like, in addition to silicon, or may be a package substrate or the like.

[0017] 1 is disposed on the apparatus base 10 and has a circular outer shape in a plan view. The chuck table 30 includes a suction unit 300 made of, for example, a porous material or the like that suctions the workpiece 90, and a frame 301 that supports the suction unit 300. The suction unit 300 of the chuck table 30 is connected to a suction source (not shown), such as an ejector unit or a vacuum generator. The suction force generated by the suction source (not shown) is transmitted to a holding surface 302 that is formed by the exposed upper surface of the suction unit 300 and the upper surface of the frame 301, allowing the chuck table 30 to suction-hold the workpiece 90 on the holding surface 302. The chuck table 30 is one of the components of a holding mechanism 3 that holds the workpiece 90 on the holding surface 302. The holding surface 302 is an extremely gentle conical slope with its apex at the center of rotation of the chuck table 30, which is not visible to the naked eye.

[0018] 1 toward the grinding mechanism 16 includes a ball screw 130 having an axis in the Y-axis direction, a pair of guide rails 131 arranged parallel to the ball screw 130, and a motor 132 connected to one end of the ball screw 130 and rotating the ball screw 130. A base 39 constituting the holding mechanism 3 has an internal nut that threads onto the ball screw 130 and a bottom that slides against the guide rails 131. When the motor 132 rotates the ball screw 130, the base 39 is guided by the guide rails 131 and moves linearly in the Y-axis direction, thereby moving the chuck table 30, which is disposed on the base 39 via a shaft 32 or the like shown in FIG. 2, in the Y-axis direction. The horizontal movement unit 13 may be a turntable.

[0019] 1, a column 11 is erected in the grinding processing area, and a grinding feed mechanism 17 that feeds the grinding mechanism 16 in the Z-axis direction (vertical direction) is disposed on the front surface of the column 11 on the -Y direction side. The grinding feed mechanism 17 includes a ball screw 170 whose axial direction is the Z-axis direction, a pair of guide rails 171 disposed parallel to the ball screw 170, an elevator motor 172 connected to the upper end of the ball screw 170 and rotating the ball screw 170, and an elevator plate 173 whose internal nut is threaded onto the ball screw 170 and whose side portion is in sliding contact with the guide rails 171. When the elevator motor 172 rotates the ball screw 170, the elevator plate 173 is guided by the guide rails 171 and moves back and forth in the Z-axis direction, and the grinding mechanism 16 fixed to the elevator plate 173 is fed for grinding in the Z-axis direction.

[0020] 1, the processing device 1 includes a height position detection unit 12 that detects the height position of a grinding mechanism 16 that moves up and down by a grinding feed mechanism 17. The height position detection unit 12 includes a scale 120 that extends in the Z-axis direction along a pair of guide rails 171, and a reader 123 that is fixed to a lifting plate 173, moves along the scale 120 together with the lifting plate 173, and optically reads the graduations of the scale 120.

[0021] The grinding mechanism 16 that grinds the workpiece 90 held on the holding surface 302 of the chuck table 30 comprises a rotating shaft 160 whose axial direction is the Z-axis direction, a housing 161 that rotatably supports the rotating shaft 160, a motor 162 that rotates and drives the rotating shaft 160, an annular mount 163 connected to the lower end of the rotating shaft 160, a grinding wheel 164 that is detachably attached to the underside of the mount 163, and a holder 165 that supports the housing 161 and is fixed to a lifting plate 173 of the grinding feed mechanism 17. The grinding wheel 164 includes a wheel base 1641 and a grinding stone 1644 arranged in an annular shape on the bottom surface of the wheel base 1641 .

[0022] As shown in Figure 2, a flow path 169, which is connected to a grinding water supply source and serves as a passage for grinding water, is provided inside the rotating shaft 160, penetrating the axial direction of the rotating shaft 160. The flow path 169 further passes through the mount 163 and opens at the bottom of the wheel base 1641 so that grinding water can be sprayed toward the grinding wheel 1644.

[0023] 1, for example, a thickness measuring unit 104 that contact-measures the thickness of workpiece 90 is disposed adjacent to grinding mechanism 16 when it has been lowered to the grinding position. Thickness measuring unit 104 measures the height position of holding surface 302, which serves as a reference surface, using a first linear gauge, i.e., in this embodiment, the height position of the upper surface of frame 301, which is at the same height position as holding surface 302, and measures the height position of upper surface 903 of workpiece 90 to be ground using a second linear gauge, and calculates the difference between the measurements of both linear gauges, thereby making it possible to sequentially measure the thickness of workpiece 90 during grinding. The thickness measuring unit 104 may be of a non-contact type.

[0024] The holding mechanism 3 shown in Figures 1 and 2 holds the workpiece 90 on a holding surface 302 and includes a chuck table 30 having an upper surface as the holding surface 302, a support plate 31 that supports the underside of the chuck table 30, a shaft 32 that hangs down from the center of the underside of the support plate 31, a housing 33 in which a first bearing 331 that rotatably supports the shaft 32 is disposed, a base 39 that supports the housing 33 and has an insertion opening 390 through which the shaft 32 is inserted, an inclination adjustment mechanism 34 that adjusts the inclination of the shaft 32 by changing the length of at least one of at least three pillars that are arranged between the base 39 and the housing 33 to surround the insertion opening 390, and a rotation mechanism 4 that rotates the shaft 32 inserted into the insertion opening 390.

[0025] 2 includes a cylindrical upper portion 323 and a cylindrical lower portion 321 that is integrally formed with the upper portion 323 and has a smaller diameter than the upper portion 323, and a first bearing 331 is in contact with the outer surface of the upper portion 323. The first bearing 331 is a ball bearing, a roller bearing, or an air bearing.

[0026] The base 39 includes, for example, a cylindrical side plate 396, a top plate 394 connected to the upper end of the cylindrical side plate 396, extending radially inward, and then rising vertically, and having a cylindrical wall, and a bottom plate 392 connected to the lower end of the side plate 396, extending radially inward, and having a circular insertion opening 390 in the center.

[0027] For example, a skirt-shaped cover portion 305 is formed on the outer surface of the chuck table 30, extending radially outward and further hanging down.By positioning the cover portion 305 outside the vertically rising wall portion of the top plate 394, grinding water and the like flowing down from the holding surface 302 is prevented from entering the gap between the base 39 and the chuck table 30.

[0028] The housing 33 is arranged in the internal space of the base 39 so as to surround the shaft 32 inserted so as to penetrate from the opening in the top plate 394 to the insertion port 390 in the bottom plate 392. The housing 33 is formed, for example, in a cylindrical shape, and a first bearing 331 that abuts against the shaft 32 is arranged on its inner surface.

[0029] In this embodiment, the tilt adjustment mechanism 34 includes, for example, two lifting columns arranged 120 degrees apart in the circumferential direction around the center of the holding surface 302, and one fixed column (not shown) arranged 120 degrees apart in the circumferential direction from each of the lifting columns. That is, the two lifting columns and the fixed column are located at the vertices of an imaginary equilateral triangle formed on the X-axis / Y-axis plane. The two lifting columns are, for example, electric actuators capable of moving the housing 33 up and down in the Z-axis direction. The housing 33, which moves up and down due to the two lifting columns, can adjust the tilt of the shaft 32, which is rotatably supported by a first bearing 331 arranged in the housing 33.

[0030] The rotation mechanism 4 shown in Figure 2 includes a bearing arrangement section 40 having an opening 403 corresponding to the insertion port 390 of the base 39 and in which the second bearing 42 is arranged, an annular first pulley 41 rotatably supported by the second bearing 42, a three-dimensional coupling 5 that engages the first pulley 41 with the shaft 32 whose tilt and height and horizontal position have been changed by the tilt adjustment mechanism 34, a motor 44 that is disposed on the base 39 and spaced horizontally from the shaft 32, a second pulley 45 that is connected to the rotating shaft of the motor 44, and an endless belt 46 that engages with the first pulley 41 and the second pulley 45 with a predetermined tension and transmits the power of the motor 44 to the shaft 32.

[0031] The motor 44 is connected to the base 39 via a holder or the like (not shown), and the second pulley 45 connected to the rotating shaft of the motor 44 is rotatable, for example, within the insertion opening 390 of the base 39 or inside the base 39.

[0032] The bearing arrangement portion 40 shown in Figures 2, 3, and 4 includes, for example, a plate base 400 that is rectangular in plan view, a cylindrical boss portion 401 that is vertically disposed approximately in the center of the underside 4006 of the plate base 400, and a circular opening 403 that is formed to penetrate the boss portion 401 and the plate base 400. 3 and 4, bolt holes 4002 are formed in the four corners of the plate base 400, and the bearing arrangement section 40 is inserted into the insertion opening 390 with its center roughly aligned with the center of the bottom plate 392 of the base 39 shown in Fig. 2, with the boss section 401 facing downward, and the four corners are bolted to the bottom plate 392 with bolts (not shown). Note that Fig. 4 shows the lower surface 4006 of the bearing arrangement section 40 facing upward. The opening 403 has a diameter larger than the diameter of the lower portion 321 of the shaft 32, and a gap is formed between the opening 403 and the lower portion 321 of the shaft 32 so that the lower portion 321 can be tilted at a predetermined angle.

[0033] 3 has a plurality of rolling balls 422 arranged between an inner ring 420 and an outer ring 423, and a cage (not shown) maintains a constant distance between the rolling balls 422 to prevent them from contacting each other, allowing for smooth rolling motion. The second bearing 42 is, for example, coupled (press-fitted) to a boss portion 401 to which the inner ring 420 is fixed, and the outer ring 423 is coupled to the inner circumferential surface 412 of the rotating first pulley 41 or the first opening 511 of the first plate 51, thereby rotatably supporting the first pulley 41 by the second bearing 42. The second bearing 42 may be a roller bearing.

[0034] As shown in Figure 2, an endless belt 46 is wound around the second pulley 45, and the endless belt 46 is also wound around the first pulley 41 shown in Figures 2 and 3, so that the rotational power generated by the motor 44 is also transmitted to the first pulley 41.

[0035] 2 and 3 in this embodiment (hereinafter referred to as the three-dimensional coupling 5 of embodiment 1), as shown in detail in FIG. 3, includes: a first plate 51 having an upper surface 515 on which the first pulley 41 is arranged and a first opening 511 corresponding to the insertion port 390 (see FIG. 2) of the base 39 and the opening 403 of the bearing arrangement section 40; a pair of first protrusions 55 hanging down from a lower surface 514 of the first plate 51 across the first opening 511; a second plate 52 connected to the shaft 32; a pair of second protrusions 56 standing on an upper surface 524 of the second plate 52 at an angle of 90 degrees in a plan view with respect to the first protrusions 55 and having a shape similar to that of the first protrusions 55; and a floating block 58 having a rectangular outer shape, movable in an area 57 surrounded by the pair of first protrusions 55 and the pair of second protrusions 56, and having a second opening 582 in the center for inserting the shaft 32. The three-dimensional coupling 5 has a function similar to that of a so-called Oldham coupling, which allows for misalignment between the center of the first pulley 41 and the axis of the shaft 32, and the first plate 51, which brings a pair of first protrusions 55 into contact with the side surface of the floating block 58, and the second plate 52, which brings a pair of second protrusions 56 into contact with the side surface of the floating block 58, allow for changes in the distance in the axial direction of the shaft 32.

[0036] For example, an upper surface 515 of a first plate 51 is fixed to a lower surface 415 of a first pulley 41 shown in FIG. 3, and the first plate 51 rotates together with the first pulley 41 to which the rotational power of the motor 44 shown in FIG. 2 is transmitted.

[0037] The first plate 51 shown in FIGS. 3 and 5 includes, for example, a plate portion 510 and a circular first opening 511 formed through the center of the plate portion 510. Two opposing sides of the plate portion 510 in the Y-axis direction are formed in an arc shape, and two opposing sides in the X-axis direction are formed in a straight line. A pair of first protrusions 55, each having a flat inner surface and an arc-shaped outer surface, hangs down by a predetermined length from both end regions of the lower surface 514 of the first plate 51. The pair of first protrusions 55 sandwich the first opening 511 in the planar direction of the lower surface 514. Note that in FIG. 5, the first plate 51 is shown with the lower surface 514 facing upward.

[0038] 3, the second plate 52 includes, for example, a plate portion 520 and a shaft connecting portion 525 formed in the center of an upper surface 524 of the plate portion 520. Two opposing sides of the plate portion 520 in the X-axis direction are formed in an arc shape, and two opposing sides in the Y-axis direction are formed in a straight line. A pair of second protrusions 56, each having a flat inner surface and an arc-shaped outer surface, are provided vertically at a predetermined length in a region on both ends of the upper surface 524 of the second plate 52 in the X-axis direction.

[0039] The shaft connecting portion 525 includes, for example, two bolt insertion holes 526 into which fixing bolts (not shown) are screwed into the lower end surface of the shaft 32. By aligning the bolt insertion holes 526 with two screw holes (not shown) formed in the lower end surface of the shaft 32 and screwing the fixing bolts inserted into the bolt insertion holes 526 into the screw holes of the shaft 32, the shaft 32, which is inserted through, in order from above, the opening 403 of the bearing arrangement portion 40, the second bearing 42, the first opening 511 of the first plate 51, and the second opening 582 of the floating block 58, can be connected to the second plate 52.

[0040] The bolt insertion hole 526 of the shaft connecting portion 525 may be, for example, a fitting hole that fits onto two protrusions (not shown) formed on the lower end surface of the shaft 32. When the two protrusions of the shaft 32 fit into the bolt insertion hole 526, which is a fitting hole, the shaft 32 is connected to the second plate 52, and the rotational force of the rotating second plate 52 is transmitted.

[0041] For example, as shown in FIG. 2, a suction flow path (not shown) is formed from the frame body 301 of the connected chuck table 30 to the lower end side inside the shaft 32 along the extension direction of the shaft 32, and the lower end of the suction flow path is connected to a suction hole 523 formed in the second plate 52 shown in FIG. 3. 2, for example, a rotary joint 529 is connected to the lower part of the second plate 52, and a suction flow path (not shown) communicates with a suction source (not shown), such as an ejector mechanism or a vacuum generator, via the suction hole 523 and the rotary joint 529. The rotary joint 529 transfers the suction force generated by the suction source to the rotating shaft 32 without any omissions.

[0042] The floating block 58 shown in FIG. 3 is formed, for example, in the shape of a rectangular (e.g., square) plate in a plan view, with a circular second opening 582 for inserting the shaft 32 formed in the center and penetrating in the thickness direction. The pair of second protrusions 56 of the second plate 52, with the floating block 58 placed on the upper surface 524, are shifted by 90 degrees in a plan view relative to the pair of first protrusions 55 of the first plate 51, as shown in FIG. 3, and the first plate 51 is placed over the floating block 58 on the second plate 52. A rectangular parallelepiped area 57 having a substantially square shape in a plan view is formed, surrounded by the lower surface 514 of the first plate 51, the inner surfaces of the pair of first protrusions 55, the upper surface 524 of the second plate 52, and the inner surfaces of the pair of second protrusions 56. The lower surface 514 of the first plate 51 is supported by the upper surface of the floating block 58 accommodated in the area 57 so as to be floating. The floating block 58 is movable in the planar direction of the upper surface 524 of the second plate 52 within a rectangular parallelepiped area 57 that is substantially square in plan view.

[0043] The diameter of the circular opening 403 of the bearing arrangement portion 40, the diameter of the first opening 511 of the first plate 51, and the diameter of the second opening 582 of the floating block 58 are made larger than the diameter of the lower portion 321 into which the shaft 32 is inserted, thereby allowing tilting movement of the shaft 32 inserted into the opening 403, the first opening 511, and the second opening 582.

[0044] The operation of the processing apparatus 1 shown in FIG. 1 when grinding the workpiece 90 held on the chuck table 30 will be described below. First, in the attachment / detachment area, the workpiece 90 is placed on the holding surface 302 of the chuck table 30 with their centers substantially aligned. Then, a suction force generated by a suction source (not shown) is transmitted to the holding surface 302 through the rotary joint 529 shown in FIG. 2 and a suction flow path (not shown) formed inside the shaft 32, and the like, causing the chuck table 30 to suction-hold the workpiece 90 on the holding surface 302.

[0045] Next, the chuck table 30 holding the workpiece 90 by suction is moved in the +Y direction from the attachment / detachment area to below the grinding mechanism 16 in the processing area by the horizontal movement unit 13. Then, the center of rotation of the grinding wheel 1644 of the grinding mechanism 16 is shifted horizontally by a predetermined distance from the center of rotation of the workpiece 90, and the rotational trajectory of the grinding wheel 1644 is aligned so that it passes through the center of rotation of the workpiece 90.

[0046] 6, for example, when the lengths in the Z-axis direction of two lifting columns arranged 120 degrees apart around the holding surface 302 of the tilt adjustment mechanism 34 and one fixed column (not shown) arranged 120 degrees apart from each lifting column are made to match, the holding surface 302, which has an extremely gentle conical slope, is not parallel to the underside of the grinding wheel 1644. Furthermore, in this state, the axis 320 of the shaft 32 and the center of the chuck table 30 are not misaligned with the center 418 of the first pulley 41 within the X- and Y-axis plane.

[0047] Next, as shown in Figure 7, the tilt of the chuck table 30 is adjusted by the tilt adjustment mechanism 34 so that the holding surface 302, which is an extremely gentle conical slope, becomes parallel to the grinding surface (lower surface) of the grinding wheel 1644 of the grinding mechanism 16, thereby making the holding surface 302, which is an extremely gentle conical slope, approximately parallel to the lower surface of the grinding wheel 1644. Specifically, for example, of the two lifting columns, which are electric actuators or the like, of the two tilt adjustment mechanisms 34 shown in FIG. 7 , the lifting column on the −Y direction side is lowered by a predetermined amount to shorten the tilt adjustment mechanism 34, and the lifting column on the +Y direction side is raised by a predetermined amount to lengthen the tilt adjustment mechanism 34. As a result, in FIG. 7 , the area on the +Y direction side of the holding surface 302 of the chuck table 30 is raised relatively higher than the area on the −Y direction side and becomes approximately parallel to the underside of the grinding wheel 1644. Also, in FIG. 6 , the shaft 32, whose axis 320 is parallel to the vertical direction (Z-axis direction), is tilted by a predetermined angle counterclockwise as viewed from the front side of the page. Meanwhile, as shown in FIGS. 6 and 7 , the first pulley 41 is connected to the bearing arrangement portion 40 attached to the bottom plate 392 of the base 39 via the second bearing 42, so that no change in tilt occurs. Therefore, the horizontal distance between the first pulley 41 and the second pulley 45 does not change, and the tension of the endless belt 46 does not change, causing the endless belt 46 to become loose. Therefore, the rotational power generated by the motor 44 is appropriately transmitted via the second pulley 45 and the endless belt 46 to the first pulley 41 in the state shown in FIG. The tilt adjustment mechanism 34 may be operated on only one side to change the tilt of the holding surface 302 .

[0048] 7, a predetermined distance is shifted between the center 418 of the first pulley 41 and the axis 320 of the shaft 32 in the X-axis / Y-axis plane, and a change occurs in the distance between the first plate 51 and the second plate 52 in the axial direction (Z-axis direction) of the shaft 32. In other words, a misalignment of the axes occurs, but this shift is tolerated by the three-dimensional coupling 5. 8 is a schematic plan view illustrating the three-dimensional coupling 5 in a state where the shaft 32 is tilted by the tilt adjustment mechanism 34 as described above and the first pulley 41 has not rotated from the rotation start position (rotation angle 0 degrees). As shown in FIG. 8, because the shaft 32 is tilted by the tilt adjustment mechanism 34 as described above, the second plate 52 connected to the lower end of the shaft 32 moves in the +Y direction relative to the first plate 51 fixed in the horizontal plane and is inclined with respect to the horizontal plane. The position indicator P on the first pulley 41 shown in FIG. 8 moves as the first pulley 41 rotates.

[0049] To start grinding the workpiece 90, the motor 162 (see FIG. 1) rotates the rotary shaft 160 at a predetermined rotational speed, which also rotates the grinding wheel 164 shown in FIG. 7. Then, the grinding mechanism 16 is fed in the −Z direction by the grinding feed mechanism 17 (see FIG. 1), and the rotating grinding wheel 1644 comes into contact with the back surface 903 of the workpiece 90, thereby performing grinding.

[0050] 7 rotates the second pulley 45, for example, in the counterclockwise direction as viewed from the +Z direction side, causing the endless belt 46 to rotate, and in response, the first pulley 41, which is rotatably supported by the second bearing 42 arranged in the bearing arrangement part 40, rotates in the counterclockwise direction as viewed from the +Z direction side. As the first pulley 41 rotates, the first plate 51, which is fixedly connected to the lower surface 415 of the first pulley 41, rotates in the same direction.

[0051] As shown in FIG. 9 , together with the first plate 51 rotating counterclockwise as viewed from the +Z direction side, the floating block 58, which has a rectangular outer shape in a plan view, presses two outer surfaces forming one corner of the +X direction side against the inner surface of the first protrusion 55 on the +X direction side of the pair of first protrusions 55 and the inner surface of the second protrusion 56 on the +X direction side of the pair of second protrusions 56, and floats to slide toward the surface of the upper surface 524 of the second plate 52 within area 57. Therefore, the rotational force of the first plate 51 is transmitted to the second plate 52 via the floating block 58, and the second plate 52 and the shaft 32 connected to the second plate 52 also rotate counterclockwise as viewed from the +Z direction side at the same rotational speed as the first plate 51. Note that FIG. 9 shows a state in which the first pulley 41 has rotated 45 degrees counterclockwise from the rotation start position shown in FIG. 8 .

[0052] 9, the first pulley 41 rotates another 45 degrees (90 degrees from the rotation start position shown in FIG. 8) as shown in FIG. 10, and together with the rotating first plate 51, the floating block 58 moves freely within the area 57 in the planar direction of the upper surface 524 of the second plate 52 while coming into contact with and pressing against the inner surface of the second protrusion 56 on the +Y direction side of the pair of second protrusions 56. Therefore, the rotational force of the first plate 51 is transmitted to the second plate 52 via the floating block 58, causing the second plate 52 to rotate. Furthermore, as first pulley 41 rotates another 45 degrees from the state shown in FIG. 10 (135 degrees from the rotation start position shown in FIG. 8) as shown in FIG. 11, together with the rotating first plate 51, floating block 58 comes into contact with the inner surface of the first protrusion 55 on the −X direction side of the pair of first protrusions 55 and the inner surface of the second protrusion 56 on the −X direction side of the pair of second protrusions 56 so as to press the two outer surfaces forming one corner portion on the −X direction side, and floats in the surface direction of upper surface 524 of second plate 52 within area 57.

[0053] 9 to 11, while the first pulley 41 is rotating, a predetermined distance is offset between the center 418 of the first pulley 41 and the axis 320 of the shaft 32 in the X-axis and Y-axis plane. However, the rotational force generated by the motor 44 shown in FIG. 7 is appropriately transmitted to the first pulley 41 via the second pulley 45 and the endless belt 46, whose tension does not change, and is further appropriately transmitted to the second plate 52 and the shaft 32 via the first pulley 41, the first plate 51, and the floating block 58. In other words, the chuck table 30, which is connected to the upper end of the rotating shaft 32 by appropriately transmitting the rotational force, can also continue to rotate appropriately with the holding surface 302 approximately parallel to the lower surface of the grinding wheel 1644.

[0054] 7 is rotated at a predetermined rotational speed, the workpiece 90 held on the holding surface 302 also rotates, so that the grinding wheel 1644 grinds the entire back surface 903 of the workpiece 90. In addition, grinding water passing through the flow path 169 is supplied to the contact area between the grinding wheel 1644 and the workpiece 90, cooling and cleaning the contact area. After the workpiece 90 has been ground to the desired thickness, the grinding mechanism 16 is pulled upward by the grinding feed mechanism 17, and the grinding wheel 1644 is separated from the workpiece 90, thereby completing the grinding.

[0055] As described above, the processing apparatus 1 according to the present invention is equipped with the holding mechanism 3 that holds the workpiece 90 on the holding surface 302 and the processing mechanism 16 (grinding mechanism 16) that processes the workpiece 90 held on the holding surface 302. The holding mechanism 3 is equipped with the chuck table 30 having the holding surface 302 on its upper surface, the support plate 31 that supports the underside of the chuck table 30, the shaft 32 that hangs down from the center of the underside of the support plate 31, the housing 33 in which the first bearing 331 that rotatably supports the shaft 32 is disposed, the base 39 that supports the housing 33 and has an insertion opening 390 through which the shaft 32 is inserted, the tilt adjustment mechanism 34 that adjusts the tilt of the shaft 32 by varying the length of at least one of at least three pillars that are arranged so as to surround the insertion opening 390 between the base 39 and the housing 33, and the rotation mechanism 4 that rotates the shaft 32 inserted into the insertion opening 390. a bearing arrangement section 40 in which a second bearing 42 is arranged, an annular first pulley 41 rotatably supported by the second bearing 42, a three-dimensional coupling 5 that engages the first pulley 41 with the shaft 32 whose tilt and height and horizontal position are changed by the tilt adjustment mechanism 34, a motor 44 that is disposed on a base 39 and spaced horizontally from the shaft 32, a second pulley 45 that is connected to the rotating shaft of the motor 44, and an endless belt 46 that engages with the first pulley 41 and the second pulley 45 with a predetermined tension and transmits the power of the motor 44 to the shaft 32.As a result, even if the tilt of the shaft 32 is changed, the tension of the endless belt 46 does not change, and even if the axis of the shaft 32 and the center of the first pulley 41 are misaligned horizontally, the rotational power of the motor 44 can be appropriately transmitted to the shaft 32, making it possible to continue to rotate the chuck table 30 appropriately during grinding.

[0056] Furthermore, in the processing device 1 according to the present invention, the three-dimensional coupling 5 includes a first plate 51 having a first opening 511 on an upper surface 515 on which the first pulley 41 is arranged and which corresponds to the insertion opening 390, a pair of first protrusions 55 hanging down from a lower surface 514 of the first plate 51 across the first opening 511, a second plate 52 connected to the shaft 32, and a pair of second protrusions 55 standing on an upper surface 524 of the second plate 52 at an angle of 90 degrees in a plan view with respect to the first protrusions 55 and having a shape similar to that of the first protrusions 55. By providing the protrusion 56 and the floating block 58, which has a rectangular outer shape and is movable in an area 57 surrounded by a pair of first protrusions 55 and a pair of second protrusions 56, and which has a second opening 582 in the center for inserting the shaft 32, it is possible to continue to properly transmit the rotational power of the motor 44 to the shaft 32 by the floating block 58, which floats within the area 57, even if the inclination of the shaft 32 is changed and the axis of the shaft 32 and the center of the first pulley 41 are misaligned horizontally.

[0057] The processing apparatus 1 according to the present invention is not limited to the above embodiment, and may be embodied in various different forms within the scope of its technical concept. Furthermore, the steps of grinding the workpiece 90 using the processing apparatus 1 are not limited to the above embodiment, and may be modified as appropriate within the scope of the effects of the present invention.

[0058] For example, the processing device 1 may include the three-dimensional coupling 7 of the second embodiment shown in FIG. 12, instead of the three-dimensional coupling 5 of the first embodiment shown in FIGS. The three-dimensional coupling 7 comprises a third plate 73 having a third opening 733 on an upper surface 735 on which the first pulley 41 is arranged and which corresponds to the insertion port 390 shown in FIG. 2 , a fourth plate 74 arranged below the third plate 73 and having a transmission opening 746 in the center corresponding to a rotational force transmission portion 328 of the shaft 32, which will be described later, and a connecting spring 76 which connects the third plate 73 and the fourth plate 74 and enables the inclination of the fourth plate 74 relative to the third plate 73 to be changed.

[0059] 12, the first pulley 41 is rotatably supported by a second bearing 42 attached to a boss portion 401 of the bearing arrangement portion 40. The configurations of the bearing arrangement portion 40, the second bearing 42, and the first pulley 41, and the connection configuration are similar to those of the three-dimensional coupling 5 of the first embodiment.

[0060] For example, the upper surface 735 of the third plate 73 is fixed to the lower surface 415 of the first pulley 41, and the third plate 73 rotates together with the first pulley 41 to which the rotational power of the motor 44 shown in Figure 2 is transmitted via the endless belt 46. The third plate 73 is formed, for example, in an annular shape in plan view, and has a circular third opening 733 formed in the center.

[0061] Three long, plate-like connecting springs 76 are connected to the outer surface of the third plate 73, with their longitudinal direction in the Z-axis direction, at equal intervals of, for example, 120 degrees around the circumferential direction of the third plate 73. The lower end of each connecting spring 76 is connected to the outer surface of the fourth plate 74.

[0062] The fourth plate 74 is formed, for example, in a circular shape in plan view with an outer diameter the same as that of the third plate 73, and has a transmission opening 746 that is, for example, rectangular in plan view, formed at the center thereof and penetrates in the thickness direction. The centers of the fourth plate 74 and the third plate 73 substantially coincide with each other when the connecting spring 76 is in a natural length state without deformation.

[0063] 12 , when used together with the three-dimensional coupling 7 of the second embodiment, the lower part of the shaft 32 has a rectangular cross section that fits into the transmission opening 746, and serves as the rotational force transmitted part 328. By inserting the shaft 32, from top to bottom, through the opening 403 of the bearing arrangement part 40, the second bearing 42, and the third opening 733 of the third plate 73, and fitting the rotational force transmitted part 328 into the transmission opening 746 of the fourth plate 74, it becomes possible to transmit the rotational force from the fourth plate 74 to the shaft 32.

[0064] The diameter of the circular opening 403 of the bearing arrangement portion 40 and the diameter of the third opening 733 of the third plate 73 are formed larger than the diameter of the shaft 32, allowing tilting movement of the shaft 32 inserted into the opening 403 and the third opening 733.

[0065] For example, as shown in Fig. 13, a convex rotational force transmitted portion 327 may be formed on the lower side surface of the entirely cylindrical shaft 32 when used with the three-dimensional coupling 7 of the second embodiment. Correspondingly, the transmission opening of the fourth plate 74 may be a transmission opening 746 having a shape combining a circular shape and a concave shape into which the convex rotational force transmitted portion 327 fits, as shown in Fig. 13. Note that if the rotational force transmitted portion 327 of the shaft 32 is concave, the transmission opening 746 of the fourth plate 74 may also be formed with a corresponding convex shape facing the inside of the circular opening.

[0066] The rotation of the chuck table 30 during grinding of the workpiece 90 when the processing apparatus 1 shown in FIG. 1 is equipped with the three-dimensional coupling 7 of the second embodiment shown in FIG. 12 will be described below. The positioning of the chuck table 30 holding the workpiece 90 by suction relative to the grinding wheel 1644 is the same as in the previous case.

[0067] The tilt of the chuck table 30 is adjusted by the tilt adjustment mechanism 34 shown in Figure 7 so that the holding surface 302, which is an extremely gentle conical slope, becomes parallel to the grinding surface (lower surface) of the grinding wheel 1644 of the grinding mechanism 16, and thereby the upper surface 903 of the workpiece 90, which is held by suction in accordance with the holding surface 302, which is a conical slope, becomes approximately parallel to the lower surface of the grinding wheel 1644. Here, the first pulley 41 is connected to the bearing arrangement part 40 attached to the bottom plate 392 of the base 39 via the second bearing 42, so that no change in inclination occurs. Therefore, the rotational power generated by the motor 44 is appropriately transmitted to the first pulley 41 via the second pulley 45 and the endless belt 46 in which no slack occurs.

[0068] On the other hand, when the shaft 32 tilts, a misalignment occurs between the center 418 of the first pulley 41 and the axis 320 of the shaft 32 in the X-axis / Y-axis plane, but this misalignment is tolerated by the three-dimensional coupling 7 shown in FIG. 12. Also, a misalignment occurs in the shaft 32 in the axial direction (Z-axis direction) of the shaft 32, but this is tolerated because the rotational force transmitted portion 328 slides in the Z-axis direction within the transmission opening 746. That is, because the rotational force transmitted portion 328 of the shaft 32 is slidably fitted into the transmission opening 746 of the fourth plate 74, when the shaft 32 tilts, the fourth plate 74 also tilts by a predetermined angle from a state parallel to the horizontal plane, and the rotational force transmitted portion 328 slides in the Z-axis direction within the transmission opening 746. Here, the connecting spring 76 deforms to allow the fourth plate 74 to tilt, and the shaft 32 is also allowed to tilt within the opening 403 of the bearing arrangement portion 40 and within the third opening 733 of the third plate 73.

[0069] 7 rotates the second pulley 45, for example, in a counterclockwise direction as viewed from the +Z direction side, causing the endless belt 46 to rotate, and in response, the first pulley 41, which is rotatably supported by the second bearing 42 arranged in the bearing arrangement part 40, rotates in the counterclockwise direction as viewed from the +Z direction side. When the first pulley 41 rotates, the third plate 73 shown in FIG. 12, which is fixedly connected to the underside 415 of the first pulley 41, and the fourth plate 74, which is connected via the connecting spring 76 in a deformed state and is in an obliquely inclined state, rotate in the same direction together with the third plate 73 and the connecting spring 76.

[0070] As described above, while the first pulley 41 is rotating, a predetermined distance is offset between the center 418 of the first pulley 41 and the axis 320 of the shaft 32 in the X-axis and Y-axis plane. However, the rotational force generated by the motor 44 is appropriately transmitted to the first pulley 41 via the second pulley 45 and the endless belt 46, whose tension does not change, and is further appropriately transmitted to the shaft 32 by the rotational force transmitted portion 327 via the rotating first pulley 41, the rotating third plate 73, and the transmission opening 746 of the fourth plate 74 connected to the rotating third plate 73 via the connecting spring 76. That is, the chuck table 30 connected to the upper end side of the shaft 32 can also continue to rotate appropriately with the holding surface 302 approximately parallel to the lower surface of the grinding wheel 1644 (with the holding surface 302 tilted).

[0071] As described above, in the processing device 1 according to the present invention, the shaft 32 includes a rotational force transmitted portion 327 having a cross section of the lower portion formed, for example, rectangular, and the three-dimensional coupling 7 of the second embodiment includes a third plate 73 having a third opening 733 corresponding to the insertion opening 390 of the base 39 and on an upper surface 735 of which the first pulley 41 is arranged, a fourth plate 74 arranged below the third plate 73 and having a transmission opening 746 in the center corresponding to the rotational force transmitted portion 327, and a third plate 75 connecting the third plate 73 and the fourth plate 74. By providing a connecting spring 76 that allows the inclination of the fourth plate 74 relative to the shaft 73 to be changed, even if the inclination of the shaft 32 is changed so that the axis of the shaft 32 and the center of the first pulley 41 are misaligned horizontally, the connecting spring 76 becomes deformed (becoming in a state that allows the inclination of the shaft 32 to be tolerated), so that the tension of the endless belt 46 does not change, and the rotational power of the motor 44 can be appropriately transmitted to the shaft 32 during grinding processing, making it possible to rotate the chuck table 30. [Explanation of symbols]

[0072] 90: Workpiece 900: Surface 903: Top surface (back surface) 1: Processing equipment 10: Equipment base 11: Column 13: Horizontal movement unit 130: Ball screw 132: Motor 16: Grinding mechanism (processing mechanism) 164: Grinding wheel 1644: Grinding stone 17: Grinding feed mechanism 170: Ball screw 172: Lifting motor 12: Height position detection unit 123: Reader 104: Thickness measurement unit 3: Holding mechanism 30: Chuck table 300: Suction part 301: Frame 302: Holding surface 305: Cover part 31: Support plate 32: Shaft 323: Upper part of shaft 321: Lower part of shaft 33: Housing 331: First bearing 39: Base 390: Insertion port 396: Side panel 394: Top panel 392: Bottom panel 34: Tilt adjustment mechanism 4: Rotation mechanism 40: Bearing arrangement portion 400: Plate base 4006: Underside of plate base 401: Boss portion 403: Opening 4002: Bolt hole 41: First pulley 42: Second bearing 420: Inner ring 422: Rolling ball 423: Outer ring 44: Motor 45: Second pulley 46: Endless belt 5: Three-dimensional coupling of embodiment 1 51: First plate 510: Plate portion 511: First opening 514: Lower surface of first plate 515: Upper surface of first plate 55: Pair of first protrusions 52: Second plate 520: Plate portion 524: Upper surface of second plate 525: Shaft connecting portion 526: Bolt insertion hole 523: Suction hole 56: Pair of second protrusions 529: Rotary joint 57: Area 58: Floating block 582: Second opening 7: Three-dimensional coupling of embodiment 2 73: Third plate 733: Third opening 74: 4th plate 746: Transmission opening 76: Connecting spring 32: Shaft 328: Rotational force receiving part 327: Convex-shaped rotational force receiving part

Claims

1. A processing device including a holding mechanism that holds a workpiece on a holding surface, and a processing mechanism that grinds or polishes the workpiece held on the holding surface with a lower surface of a processing tool that is a grinding wheel or a polishing pad, The holding mechanism includes: a chuck table having the holding surface on its upper surface, a support plate supporting the underside of the chuck table, a shaft hanging down from the center of the underside of the support plate, a housing in which a first bearing for rotatably supporting the shaft is disposed, a base supporting the housing and having an insertion opening through which the shaft is inserted, an inclination adjustment mechanism that varies the length of at least one of at least three pillars arranged between the base and the housing to surround the insertion opening, thereby adjusting the inclination of the chuck table, the support plate, and the shaft relative to the underside of the processing tool, and a rotation mechanism that rotates the shaft inserted into the insertion opening, The rotation mechanism includes: a bearing placement portion fixed to the base, having an opening corresponding to the insertion opening, and in which a second bearing is placed; an annular first pulley rotatably supported at its outer surface by the second bearing disposed in the bearing arrangement portion; a three-dimensional coupling that engages the shaft, the tilt, height, and horizontal position of which have been changed by the tilt adjustment mechanism, with the first pulley; a motor disposed on the base and spaced horizontally from the shaft; a second pulley located on the horizontal outer circumferential side of the first pulley and spaced apart, the second pulley being connected to a rotary shaft of the motor; an endless belt that is engaged with the first pulley and the second pulley with a predetermined tension and transmits the power of the motor to the shaft; The three-dimensional coupling is located below the first pulley, a first plate having an upper surface connected to the first pulley and having a first opening corresponding to the insertion opening; a pair of first protrusions extending downward from the lower surface of the first plate across the first opening; a second plate coupled to the shaft; a pair of second protrusions that are erected on the upper surface of the second plate at 90 degrees angle from the first protrusions in a plan view and have a shape similar to that of the first protrusions; a floating block having a rectangular outer shape, movable in an area surrounded by the pair of first protrusions and the pair of second protrusions, and having a second opening at the center into which the shaft is inserted; The first pulley is connected to the bearing arrangement portion via the second bearing, and when the inclination of the shaft changes, the rotation of the first pulley is transmitted to the shaft by the floating block that floats between the first plate connected to the first pulley and the second plate connected to the shaft while contacting the pair of first convex portions and the pair of second convex portions, thereby preventing a change in the tension of the endless belt.

2. The shaft a rotational force transmitted part having a lower section formed in a rectangular cross section or a side surface of the lower section formed in a convex or concave shape; The three-dimensional coupling is a third plate having an upper surface connected to the first pulley and having a third opening corresponding to the insertion opening; a fourth plate disposed below the third plate and having a transmission opening at its center corresponding to the rotational force transmitted portion; 2. The processing device according to claim 1, further comprising a connecting spring that connects the third plate and the fourth plate and transmits the power of the motor by varying the inclination of the fourth plate relative to the third plate.

3. 3. A wafer processing method using the processing apparatus of claim 1 or 2, in which a wafer, which is a workpiece held on the chuck table that rotates by transmitting the power of the motor via the three-dimensional coupling, is ground or polished.

Images