Electronic parts cleaning method

Abstract

This electric component cleaning method for cleaning the surface of a wafer includes: wet cleaning steps (S102-S104) for performing wet cleaning of the surface of the wafer using hydrogen water and pure water; a dry cleaning step (S109), after the wet cleaning steps, for performing dry cleaning of the surface of an electronic component using an atmospheric-pressure plasma; and a hydrogen water processing step (S113), after the dry cleaning step, for cleaning the surface of the wafer using hydrogen water obtained by dissolving hydrogen gas in water.

Description

[Technical Field]

[0001] The present disclosure relates to a method for cleaning the surfaces of electronic components such as wafers, semiconductor chips, substrates, and the like. [Background technology]

[0002] When manufacturing a semiconductor device by bonding, it is necessary to clean the surfaces of wafers such as silicon wafers and compound semiconductor wafers. Patent Document 1 discloses a bonding system in which, when bonding two wafers, the surfaces of the wafers are scrubbed and washed with a cleaning device, the surfaces of the wafers are modified by plasma treatment, and the wafer surfaces are made hydrophilic with pure water before bonding. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Publication No. 2020-155759 Summary of the Invention [Problem to be solved by the invention]

[0004] However, when the surface is modified using plasma and then hydrophilized using pure water, as in the prior art described in Patent Document 1, the hydrophilicity of the surface decreases over time, which can lead to a decrease in bonding quality.

[0005] Therefore, an object of the present disclosure is to maintain the surface of an electronic component in a highly hydrophilic state. [Means for solving the problem]

[0006] The electronic component cleaning method disclosed herein is a method for cleaning the surfaces of electronic components, and is characterized by including a wet cleaning process in which the surfaces of the electronic components are wet-cleaned using a liquid, a dry cleaning process in which the surfaces of the electronic components are dry-cleaned using atmospheric pressure plasma after the wet cleaning, and a hydrogen water treatment process in which the surfaces of the electronic components are hydrophilized using hydrogen water in which hydrogen gas is dissolved in water after the dry cleaning process.

[0007] In this way, by performing hydrogen water treatment after dry cleaning using atmospheric pressure plasma, the surfaces of electronic components can be kept highly hydrophilic, thereby improving bonding quality.

[0008] In the electronic component cleaning method of the present disclosure, the hydrogen water treatment process may be started immediately after the dry cleaning process is completed, within 30 seconds after the dry cleaning process is completed, or within 10 seconds after the dry cleaning process is completed.

[0009] This allows the surface of the electronic component to remain highly hydrophilic for a longer period of time.

[0010] In the electronic component cleaning method of the present disclosure, the hydrogen water treatment step may involve spraying ultrasonically vibrated hydrogen water onto the surfaces of the electronic components.

[0011] This makes it possible to increase the hydrophilicity of the surface of the electronic component.

[0012] In the electronic component cleaning method of the present disclosure, the electronic component may be a wafer, a semiconductor chip, or a substrate for a semiconductor device. Here, the semiconductor chip may be attached onto a support material. [Effects of the Invention]

[0013] The present disclosure can maintain the surface of an electronic component in a highly hydrophilic state. [Brief explanation of the drawings]

[0014] [Figure 1] 1 is a plan view of the first floor of an electronic component cleaning apparatus for carrying out an electronic component cleaning method according to an embodiment of the present invention; [Figure 2] FIG. 2 is a plan view of the second floor of the electronic component cleaning apparatus shown in FIG. [Figure 3] 2 is a cross-sectional elevation view of a wet cleaning unit and a dry cleaning unit of the electronic part cleaning apparatus shown in FIG. 1. FIG. [Figure 4] FIG. 2 is a system diagram showing a control system of the electronic part cleaning apparatus shown in FIG. [Figure 5] 3 is a flowchart showing the operation of the electronic component cleaning apparatus shown in FIG. 1 when performing the electronic component cleaning method of the embodiment. [Figure 6] 4 is a cross-sectional elevation view showing the operation of the electronic component cleaning apparatus shown in FIG. 3 when performing the electronic component cleaning method of the embodiment, showing a state in which a wafer is held on a processing stage. FIG. [Figure 7] 4 is a cross-sectional elevation view showing the operation of the electronic component cleaning apparatus shown in FIG. 3 when performing the electronic component cleaning method of the embodiment, during wet cleaning. FIG. [Figure 8] FIG. 4 is a cross-sectional elevation view showing the operation of the electronic component cleaning apparatus shown in FIG. 3 when performing the electronic component cleaning method of the embodiment, showing a state in which the wafer has been moved from the wet cleaning chamber to the dry cleaning chamber. [Figure 9] FIG. 4 is a cross-sectional elevation view showing the operation of the electronic component cleaning apparatus shown in FIG. 3 when performing the electronic component cleaning method of the embodiment, during dry cleaning. [Figure 10] 4 is a cross-sectional view showing the operation of the electronic component cleaning apparatus shown in FIG. 3 when performing the electronic component cleaning method of the embodiment, during hydrogen water treatment. FIG. [Figure 11] 10 is a graph showing the change over time in the pure water contact angle and hydrophilicity after dry cleaning using atmospheric pressure plasma, and the change over time in the pure water contact angle and hydrophilicity after hydrogen water treatment when dry cleaning using atmospheric pressure plasma is followed by hydrogen water treatment. [Figure 12] 10 is a cross-sectional elevation view of an electronic component cleaning apparatus according to another embodiment for carrying out the electronic component cleaning method of the embodiment. FIG. [Figure 13]FIG. 13 is a system diagram showing a control system of the electronic part cleaning apparatus shown in FIG. [Figure 14] 13 is a flowchart showing the operation of the electronic component cleaning apparatus shown in FIG. 12 when performing the electronic component cleaning method of another embodiment. [Figure 15] 1 is a cross-sectional view showing a semiconductor chip attached onto a dicing film and a ring to which the dicing film is attached. DETAILED DESCRIPTION OF THE INVENTION

[0015] Hereinafter, an electronic component cleaning apparatus 100 that performs an electronic component cleaning method according to an embodiment will be described with reference to the drawings. Note that the following description will be directed to a case in which the electronic component cleaning apparatus 100 is used to clean a surface 81 of a wafer 80, which is an electronic component, but the electronic component cleaning apparatus 100 can also clean a surface 89 of a semiconductor chip 85 (see FIG. 15 ), or the surface of a substrate for a semiconductor device to which the semiconductor chip 85 is bonded.

[0016] 1 and 2, the electronic component cleaning apparatus 100 has a two-story structure with a first floor shown in Fig. 1 and a second floor shown in Fig. 2. As shown in Fig. 1, a wet cleaning unit 10 and a lateral conveyance unit 60 are arranged adjacent to each other on the first floor. Also, a control unit 17 is arranged on the first floor. A dry cleaning unit 40 is arranged on the second floor, overlapping the wet cleaning unit 10.

[0017] As shown in Figures 1 and 3, the wet cleaning unit 10 includes an approximately rectangular casing 11, a wet cleaning chamber 13 arranged inside 12 of the casing 11, a processing stage 14, a stage drive device 16 that drives the processing stage 14, a water nozzle 21, an ultrasonic vibrator 22, a nozzle arm 23, a nozzle arm drive unit 24, a wiping head 31, a head arm 32, a head arm drive unit 33, a rotary pressure drive unit 35, a wiping member 34, a pure water tank 26, a hydrogen water tank 27, an ozone water tank 28, and a cleaning water tank 37.

[0018] The processing stage 14 is a disk-shaped member that holds a wafer 80 on its upper surface. A shaft 15 is connected to the underside of the processing stage 14. The shaft 15 is driven to rotate by a stage drive device 16 as indicated by an arrow 95a in FIG. 3 and also driven vertically as indicated by an arrow 95b in FIG. 3. Therefore, the processing stage 14 is driven to rotate and vertically while holding the wafer 80 by the stage drive device 16. The processing stage 14 constitutes a transport unit that transports the wafer 80 vertically between the wet cleaning chamber 13 of the wet cleaning unit 10 and the dry cleaning chamber 44 of the dry cleaning unit 40 when the shutter 48 is open, as will be described later.

[0019] Water nozzle 21 is positioned above processing stage 14 and sprays pure water, ozone water, and hydrogen water onto wafers 80 held on the upper surface of processing stage 14. Water nozzle 21 is attached to the tip of nozzle arm 23. The base of nozzle arm 23 is connected to nozzle arm driver 24. Nozzle arm driver 24 rotates nozzle arm 23 within a plane as shown by arrow 91 in Figure 1, moving water nozzle 21 attached to the tip of nozzle arm 23 in and out of the upper surface of processing stage 14. An ultrasonic vibrator 22 is attached to the top of water nozzle 21, which applies ultrasonic vibrations to the pure water, hydrogen water, and ozone water sprayed from water nozzle 21.

[0020] The wiping head 31 is disposed above the processing stage 14, and a rotary pressure drive unit 35 attached to the upper end drives a wiping member 34 attached to the lower end to rotate as shown by arrow 95c in FIG. 3, and the wiping member 34 is brought into contact with the upper surface of the wafer 80 to wipe and clean the surface 81 of the wafer 80. The wiping member 34 may be, for example, a woven or knitted fabric using microfiber. The wiping head 31 also incorporates a cleaning water nozzle that sprays cleaning water toward the wafer 80.

[0021] The wiping head 31 is attached to the tip of a head arm 32. The base of the head arm 32 is connected to a head arm drive unit 33. The head arm drive unit 33 rotates and moves the head arm 32 within a plane as indicated by an arrow 92 in FIG. 1 , thereby moving the wiping head 31 attached to the tip of the head arm 32 in and out of the upper surface of the processing stage 14.

[0022] The wet cleaning chamber 13 is provided below the processing stage 14 and is a circular pan that receives the pure water, ozone water, or hydrogen water sprayed from the water nozzle 21, or the cleaning water sprayed from the wiping head 31, and has an opening that narrows toward the top. The opening at the top is large enough to allow the wafer 80 to be put in and taken out.

[0023] The pure water tank 26, hydrogen water tank 27, and ozone water tank 28 are tanks that store pure water, hydrogen water, and ozone water, respectively. Here, hydrogen water is water in which hydrogen gas has been dissolved, and ozone water is water in which ozone gas has been dissolved. Note that instead of the hydrogen water tank 27 and the ozone water tank 28, a hydrogen water generator that produces hydrogen water and an ozone water generator that produces ozone water may be provided. The cleaning water tank 37 stores cleaning water such as pure water, hydrogen water, alkaline hydrogen water, and carbonated water.

[0024] The pure water tank 26, hydrogen water tank 27, and ozone water tank 28 are connected to the water nozzle 21 via a pure water valve 26a, a hydrogen water valve 27a, and an ozone water valve 28a, respectively, and piping 25. The cleaning water tank 37 is connected to the wiping head 31 via a cleaning water valve 37a and piping 36.

[0025] As shown in FIG. 1, a horizontal transfer unit 60 is disposed adjacent to the wet cleaning unit 10 on the first floor. The horizontal transfer unit 60 includes a casing 61, a wafer transfer stage 63 disposed inside 62 of the casing 61, and a horizontal transfer robot 64 serving as a horizontal transfer device. The wafer transfer stage 63 receives uncleaned wafers 80 from the outside and transfers cleaned wafers 80 thereto. An opening 66 is provided in the side wall 11a of the casing 11 of the wet cleaning unit 10 and in the side wall 61a of the horizontal transfer unit 60 for transferring wafers 80 between the horizontal transfer unit 60 and the wet cleaning unit 10. The horizontal transfer robot 64 transfers wafers 80 between the wafer transfer stage 63 and the processing stage 14 of the wet cleaning unit 10 through the opening 66, as indicated by arrow 93 in FIG. 1.

[0026] As shown in Figures 2 and 3, the dry cleaning unit 40 includes a roughly rectangular parallelepiped casing 41 placed on top of the casing 11 of the wet cleaning unit 10, a floor panel 42, a ceiling panel 43, a ceiling rail 46, an atmospheric pressure plasma head 51, a plasma ignition device 52, a plasma gas tank 53, and a plasma head drive unit 56.

[0027] The space partitioned by the wall of the casing 41, the floor board 42, and the ceiling board 43 constitutes a dry cleaning chamber 44 in which dry cleaning processing is performed using atmospheric pressure plasma sprayed from the atmospheric pressure plasma head 51. In addition, the space above the ceiling board 43 constitutes an equipment arrangement space 45 into which atmospheric pressure plasma does not enter.

[0028] The atmospheric plasma head 51 may be, for example, a device in which multiple plasma generators are arranged side by side, each of which includes a ceramic tube through which plasma gas flows, a negative electrode disposed on the outside of the ceramic tube, and a ground electrode disposed inside the ceramic tube. A high voltage is applied between the negative electrode and the ground electrode to generate a discharge inside the ceramic tube, ejecting plasma from the tip. The atmospheric plasma head 51 is attached to the ceiling rail 46 via a plasma head driver 56. The plasma head driver 56 moves the atmospheric plasma head 51 back and forth horizontally, as shown by arrow 94a in Figure 3.

[0029] An opening 47 is provided in the center of the floor plate 42, above the processing stage 14 of the wet cleaning unit 10 located below, through which the processing stage 14 can move up and down. A shutter 48 is provided on the underside of the floor plate 42 for opening and closing the opening 47. The shutter 48 slides, as indicated by arrow 94b in FIG. 2, by a drive unit (not shown), to open and close the opening 47. When the shutter 48 is opened, as shown in FIG. 8, the processing stage 14 of the wet cleaning unit 10 can move upward, as indicated by arrow 95d, from the wet cleaning chamber 13 into the dry cleaning chamber 44. The shutter 48 is closed after the processing stage 14 has moved into the dry cleaning chamber 44. A semicircular notch 49 (see FIG. 2) is provided in the center of the mating surfaces of the two shutters 48 to form an opening through which the shaft 15 can pass between the wet cleaning unit 10 and the dry cleaning unit 40.

[0030] The plasma ignition device 52 is a device that supplies a high voltage to an electrode arranged inside the atmospheric pressure plasma head 51 , and is connected to the atmospheric pressure plasma head 51 by a connection line 55 .

[0031] The plasma gas tank 53 is a tank that stores gas for plasma. As the gas for plasma, an inert gas such as argon or helium may be used. The plasma gas tank 53 and the atmospheric pressure plasma head 51 are connected by a plasma gas valve 53a and a pipe 54.

[0032] The control unit 17 is a computer internally equipped with a CPU 18 and memory 19. As shown in FIG. 4, the control unit 17 is connected to the nozzle arm driver 24, ultrasonic vibrator 22, pure water valve 26a, hydrogen water valve 27a, ozone water valve 28a, head arm driver 33, rotary pressure driver 35, cleaning water valve 37a, stage driver 16, and shutter 48 of the wet cleaning unit 10, and adjusts the operation of each device in the wet cleaning unit 10 and the processing stage 14 constituting the transfer unit. The control unit 17 is also connected to the atmospheric pressure plasma head 51, plasma head driver 56, plasma ignition device 52, and plasma gas valve 53a, and adjusts the operation of each device in the dry cleaning unit 40. The control unit 17 is also connected to the lateral transfer robot 64 of the lateral transfer unit 60, and adjusts the operation of the lateral transfer robot 64.

[0033] Next, with reference to FIGS. 5 to 10, the operation of the electronic component cleaning apparatus 100 configured as described above when the electronic component cleaning apparatus 100 performs the electronic component cleaning method of the embodiment to clean the wafer 80 will be described.

[0034] 6, in the initial state, the shutter 48 is closed, and the wet cleaning unit 10 and the dry cleaning unit 40 are separated by the floor panel 42 of the casing 41 of the dry cleaning unit 40 and the shutter 48. Also, as shown in FIG. 1, the nozzle arm 23 and the head arm 32 have the water nozzle 21 and the wiping head 31 retracted to positions that do not overlap the processing stage 14.

[0035] 5, the control unit 17 operates the lateral transfer robot 64 shown in Fig. 1 to pick up the uncleaned wafer 80 placed on the wafer transfer stage 63, and carries it into the wet cleaning unit 10 as shown in Fig. 6, and places it on the processing stage 14. The control unit 17 holds the wafer 80 on the upper surface of the processing stage 14.

[0036] The control unit 17 performs wet cleaning of the front surface 81 of the wafer 80 in steps S102 to S104 of Fig. 5. Here, steps S102 to S104 of Fig. 5 constitute a wet cleaning process. First, the control unit 17 performs hydrogen water cleaning as shown in step S102 of Fig. 5.

[0037] 7, the control unit 17 operates the nozzle arm driver 24 to rotate the nozzle arm 23 and move the water nozzle 21 upward on the processing stage 14. Then, the control unit 17 rotates the processing stage 14 using the stage driver 16, and opens the hydrogen water valve 27a to spray hydrogen water from the water nozzle 21 toward the wafer 80, thereby cleaning the wafer 80. At this time, the control unit 17 operates the ultrasonic vibrator 22 to apply ultrasonic vibrations to the hydrogen water, and the ultrasonically vibrated hydrogen water is sprayed onto the surface of the wafer 80.

[0038] Next, the control unit 17 performs wiping cleaning with pure water in step S103 of Fig. 5. As shown in Fig. 7, the control unit 17 operates the head arm driver 33 to rotate the head arm 32 and move the wiping head 31 above the processing stage 14. Because the water nozzle 21 has moved upward to the processing stage 14 during the previous hydrogen water cleaning, the control unit 17 opens the pure water valve 26a to spray pure water from the water nozzle 21 toward the wafer 80, and operates the rotary pressure driver 35 of the wiping head 31 to rotate the wiping member 34 and bring it into contact with the upper surface of the wafer 80. The control unit 17 uses the head arm driver 33 to move the wiping head 31 along the surface 81 of the wafer 80 to wipe and clean the surface 81 of the wafer 80. At this time, the control unit 17 may open the cleaning water valve 37 a to cause the wiping head 31 to spray cleaning water while wiping and cleaning the front surface 81 of the wafer 80 .

[0039] Next, the control unit 17 executes the hydrogen water cleaning again in step S104 in FIG. 5 in the same manner as in step S102 in FIG.

[0040] By wet cleaning from step S102 to step S104 in FIG. 5, inorganic and organic foreign matter is removed from the surface 81 of the wafer 80.

[0041] After completing the wet cleaning, the control unit 17 transfers the wet-cleaned wafer 80 from the wet cleaning chamber 13 to the dry cleaning chamber 44 in steps S105 to S108 of FIG.

[0042] The control unit 17 opens the shutter 48 in step S105 of FIG. 5. The control unit 17 also operates the nozzle arm driver 24 and the head arm driver 33 to retract the nozzle arm 23, the head arm 32, the water nozzle 21, and the wiping head 31 to positions where they do not overlap the processing stage 14. After opening the shutter 48 as shown in FIG. 8, the control unit 17 operates the stage driver 16 to raise the processing stage 14 as shown by arrow 95d in FIG. 8, as shown in step S107 of FIG. 5 and FIG. 8. As a result, the control unit 17 moves the processing stage 14 from the wet cleaning chamber 13 into the dry cleaning chamber 44, and transfers the wafer 80 from the wet cleaning chamber 13 into the dry cleaning chamber 44.

[0043] Then, after the control unit 17 moves the processing stage 14 into the dry cleaning chamber 44, it closes the shutter 48 in step S108 of FIG.

[0044] Next, the control unit 17 performs dry cleaning using atmospheric pressure plasma in step S109 of Fig. 5. Here, step S109 of Fig. 5 constitutes the dry cleaning process. The control unit 17 operates the plasma head driver 56 to move the atmospheric pressure plasma head 51 above the processing stage 14, as shown in Fig. 9. The control unit 17 then operates the plasma ignition device 52 to supply high voltage from the plasma ignition device 52 to the atmospheric pressure plasma head 51, and opens the plasma gas valve 53a to supply plasma gas from the plasma gas tank 53 to the atmospheric pressure plasma head 51, thereby generating atmospheric pressure plasma in the atmospheric pressure plasma head 51. The control unit 17 then operates the plasma head driver 56 to move the atmospheric pressure plasma head 51 back and forth above the wafer 80, as shown by arrow 96 in Fig. 9, to spray atmospheric pressure plasma onto the surface 81 of the wafer 80.

[0045] 5, the dry cleaning in step S109 removes foreign matter adhering to the surface 81 of the wafer 80 by irradiating it with atmospheric pressure plasma, and also performs a hydrophilic treatment on the surface of the wafer 80. Therefore, after the dry cleaning, the surface 81 of the wafer 80 has a high hydrophilicity.

[0046] Next, in steps S110 to S112 of Fig. 5, the control unit 17 transfers the dry-cleaned wafer 80 from the dry cleaning chamber 44 to the wet cleaning chamber 13. As described above, the control unit 17 opens the shutter 48 in step S110 of Fig. 5, and operates the stage driving device 16 to lower the processing stage 14 in step S111 of Fig. 5, and moves the processing stage 14 from the dry cleaning chamber 44 into the wet cleaning chamber 13 to transfer the wafer 80 from the dry cleaning chamber 44 into the wet cleaning chamber 13. Then, the control unit 17 closes the shutter 48 in step S112 of Fig. 5.

[0047] Next, control unit 17 proceeds to step S113 in FIG. 5 to hydrophilize surface 81 by hydrogen water treatment. Here, step S113 in FIG. 5 constitutes a hydrogen water treatment process. As with the hydrogen water cleaning described in step S102 in FIG. 5, as shown in FIG. 10, nozzle arm driver 24 is operated to rotate nozzle arm 23, water nozzle 21 is moved upward on processing stage 14, processing stage 14 is rotated by stage driver 16, and hydrogen water valve 27a is opened to spray hydrogen water from water nozzle 21 toward wafer 80, thereby performing hydrogen water treatment on wafer 80. At this time, control unit 17 operates ultrasonic vibrator 22 to apply ultrasonic vibration to the hydrogen water, and the ultrasonically vibrated hydrogen water is sprayed onto the surface of wafer 80.

[0048] The hydrogen water treatment is a process similar to the hydrogen water cleaning in steps S102 and S104 of FIG. 5, but rather than removing foreign matter from surface 81 of wafer 80, it performs a hydrophilic treatment on surface 81, and the treatment time is shorter than that of the hydrogen water cleaning in steps S102 and S104 of FIG. 5.

[0049] 5, where the control unit 17 performs a spin drying process. The control unit 17 rotates the process stage 14 at high speed using the stage driving device 16, and dries the surface 81 by scattering the hydrogen water remaining on the surface 81 of the wafer 80 toward the outer periphery using centrifugal force.

[0050] 5, the control unit 17 unloads the wafer 80 from the wet cleaning unit 10. The control unit 17 operates the lateral transfer robot 64 shown in FIG. 1 to pick up the cleaned wafer 80 placed on the upper surface of the processing stage 14, unload the wafer 80 from the wet cleaning unit 10, and place the wafer 80 on the wafer transfer stage 63 of the lateral transfer unit 60.

[0051] Next, a change in the hydrophilicity of surface 81 of wafer 80 will be described with reference to Fig. 11. The solid line a in Fig. 11 shows the change over time in the contact angle of pure water on surface 81 when hydrophilization is performed by hydrogen water treatment immediately after dry cleaning with atmospheric pressure plasma, as in the cleaning operation of wafer 80 in electronic component cleaning apparatus 100 of the embodiment described above. The dashed line b in Fig. 11 shows the change over time in the contact angle of pure water on surface 81 when only dry cleaning with atmospheric pressure plasma is performed.

[0052] Here, the pure water contact angle is the angle between the liquid surface and surface 81 at the point where the free surface of stationary pure water comes into contact with surface 81; when the pure water contact angle is large, the hydrophilicity is low, and when the pure water contact angle is small, the hydrophilicity is high.

[0053] First, the change in the pure water contact angle and hydrophilicity of surface 81 when only dry cleaning using atmospheric pressure plasma is performed, as indicated by the dashed line b in FIG. 11, will be described.

[0054] When dry cleaning using atmospheric pressure plasma is performed at time t1 in Figure 11, foreign matter on the surface 81 is removed by the atmospheric pressure plasma irradiation, and the surface 81 is made hydrophilic, resulting in a significant decrease in the pure water contact angle compared to before the dry cleaning. In other words, the surface becomes more hydrophilic. After dry cleaning using atmospheric pressure plasma, if the wafer 80 is left in the atmosphere, the pure water contact angle gradually increases over time from time t1 to time t2 when the dry cleaning is completed. Then, from time t2 to time t3, the pure water contact angle increases more significantly than it did between time t1 and t2. Then, after time t3, the pure water contact angle gradually increases again.

[0055] In this way, when wafer 80 is left in the atmosphere after dry cleaning using atmospheric pressure plasma, the pure water contact angle on the surface of wafer 80 becomes higher than that at the end of dry cleaning between time t2 and time t3, as shown by arrow d in Figure 11, and then gradually increases. In terms of a change in hydrophilicity, the hydrophilicity of surface 81 of wafer 80 becomes lower than that at the end of hydrophilization between time t2 and time t3, and then gradually decreases.

[0056] On the other hand, when hydrophilization by hydrogen water treatment is performed immediately after dry cleaning with atmospheric pressure plasma, the pure water contact angle of surface 81 gradually decreases from time t1 when the hydrogen water treatment is completed to time t2, even if wafer 80 is left in the atmosphere, and after time t2, the pure water contact angle of surface 81 gradually increases, as shown by arrow c in Figure 11. In terms of a change in hydrophilicity, the hydrophilicity of surface 81 gradually increases from time t1 when the hydrogen water treatment is completed to time t2, and then gradually decreases after time t2.

[0057] Therefore, when hydrophilization by hydrogen water treatment is carried out immediately after dry cleaning using atmospheric pressure plasma, the hydrophilicity can be maintained for a longer period of time than at the end of the hydrogen water treatment.

[0058] The reason why hydrophilicity increases over time after the end of hydrogen water treatment is thought to be that the hydrogen water treatment causes hydroxyl groups to attach to surface 81 of wafer 80. Here, research by the inventors has shown that if the time between dry cleaning with atmospheric pressure plasma and the start of hydrogen water treatment is not short, the effect of hydrophilicity increasing over time after the end of hydrogen water treatment as described above will not be achieved.

[0059] Therefore, in the electronic component cleaning apparatus 100 that performs the electronic component cleaning method of the embodiment, the dry cleaning unit 40 is stacked on top of the wet cleaning unit 10, and the processing stage 14 is moved up and down to transport the wafer 80 between the dry cleaning unit 40 and the wet cleaning unit 10, thereby shortening the interval between the dry cleaning process using atmospheric pressure plasma and the hydrophilization process using hydrogen water. As a result, the electronic component cleaning method of the embodiment can start the hydrogen water treatment process immediately after the dry cleaning process using atmospheric pressure plasma is completed, more specifically, 5 to 10 seconds after the dry cleaning process is completed. Therefore, the electronic component cleaning apparatus 100 of the embodiment can maintain high hydrophilicity of the surface 81 of the wafer 80 for a long period of time, thereby improving bonding quality.

[0060] Next, an electronic component cleaning apparatus 200 that executes the electronic component cleaning method of the embodiment will be described with reference to Figures 12 to 14. The same components as those in the electronic component cleaning apparatus 100 previously described with reference to Figures 1 to 11 will be assigned the same reference numerals and will not be described again.

[0061] 12 shows an electronic component cleaning apparatus 200 in which a vertical transfer unit 70 is disposed adjacent to the side walls 11b, 41b of a wet cleaning unit 10 and a dry cleaning unit 240 that are arranged one above the other. The vertical transfer unit 70 transfers wafers 80 between the wet cleaning chamber 13 and the dry cleaning chamber 44. Although not shown in FIG. 12, the electronic component cleaning apparatus 200 also includes a control unit 17.

[0062] The vertical conveying unit 70 includes a casing 71 and a vertical conveying device 75 disposed inside the casing 71 .

[0063] The casing 71 is disposed adjacent to the side surfaces of the wet cleaning unit 10 and the dry cleaning unit 240, and is a substantially rectangular parallelepiped member extending vertically across the wet cleaning unit 10 and the dry cleaning unit 240. An opening 72a is provided in a first-floor side wall 72 of the casing 71, which communicates with an opening 11c in a side wall 11b of the casing 11 of the wet cleaning unit 10. Similarly, an opening 73a is provided in a second-floor side wall 73, which communicates with an opening 41c in a side wall 41b of the casing 41 of the dry cleaning unit 240. Shutters 72b and 73b are attached to the openings 72a and 73a, respectively.

[0064] The vertical transfer device 75 is disposed inside the casing 71 and transfers the wafers 80 into and out of the wet cleaning chamber 13 and the dry cleaning chamber 44, and also transfers the wafers 80 between the wet cleaning chamber 13 and the dry cleaning chamber 44.

[0065] As shown in Fig. 12, the vertical conveying device 75 is composed of a main body 76 that moves up and down as indicated by an arrow 99 in Fig. 12, and a chuck 77 that is attached to the main body 76 and slides horizontally. The chuck 77 grips a wafer 80 and moves back and forth horizontally as indicated by arrows 98a and 98b in Fig. 12.

[0066] The wet cleaning unit 10 has the same configuration as the wet cleaning unit 10 of the electronic component cleaning apparatus 100 previously described with reference to FIGS. 1 to 11, except that an opening 11c is provided in the side wall 11b of the casing 11.

[0067] The dry cleaning unit 240 includes a processing stage 58 that holds a wafer 80 inside the dry cleaning chamber 44, and a slide drive unit 57 that moves the processing stage 58 back and forth in the direction of arrow 97 shown in Figure 12. The atmospheric plasma head 51 is attached to the ceiling rail 46 by a bracket 56a, and unlike the dry cleaning unit 40 previously described with reference to Figures 1 to 11, the atmospheric plasma head 51 does not move back and forth. In addition, an opening 41c is provided in the side wall 41b of the casing 41.

[0068] 13 , in the electronic component cleaning apparatus 200, the control unit 17 is connected to the nozzle arm driver 24, ultrasonic vibrator 22, pure water valve 26a, hydrogen water valve 27a, ozone water valve 28a, head arm driver 33, rotary pressure driver 35, cleaning water valve 37a, stage driver 16, and shutter 72b of the wet cleaning unit 10, and adjusts the operation of each component of the wet cleaning unit 10. The control unit 17 is also connected to the atmospheric pressure plasma head 51, slide driver 57, plasma ignition device 52, plasma gas valve 53a, and shutter 73b, and adjusts the operation of each component of the dry cleaning unit 40. The control unit 17 is also connected to the vertical conveyance device 75 of the vertical conveyance unit 70, and adjusts the operation of the vertical conveyance device 75.

[0069] Next, with reference to Fig. 14, the operation of electronic component cleaning apparatus 200 configured as described above when it executes the electronic component cleaning method of the embodiment to clean wafer 80 will be described. Operations similar to those of electronic component cleaning apparatus 100 previously described with reference to Fig. 5 will be assigned the same step numbers, and descriptions thereof will be omitted.

[0070] In step S101 of FIG. 14, the control unit 17 of the electronic component cleaning apparatus 200 operates the vertical conveying device 75 to load the wafer 80 into the wet cleaning unit 10, and performs the wet cleaning process in steps S102 to S104 of FIG. 14, similar to the electronic component cleaning apparatus 100.

[0071] 14, the control unit 17 opens the shutters 72b and 73b, and operates the vertical conveyance device 75 to convey the wafer 80 from the wet cleaning unit 10 to the dry cleaning unit 240 in step S201 of FIG. 14. After conveyance of the wafer 80 is completed, the control unit 17 closes the shutters 72b and 73b in step S108 of FIG. 14. Then, in step S109 of FIG. 14, the control unit 17 performs a dry cleaning process by causing the slide drive unit 57 to reciprocate the processing stage 58, which holds the wafer 80 on its upper surface. After the dry cleaning process is completed, the control unit 17 opens the shutters 72b and 73b in step S110 of FIG. 14, and conveys the wafer 80 to the wet cleaning unit 10 by the vertical conveyance device 75 in step S202 of FIG. 14. Then, the control unit 17 closes the shutters 72b and 73b in step S112 of Fig. 14, proceeds to step S113 of Fig. 14, and performs a hydrogen water treatment process in the wet cleaning unit 10. Then, the control unit 17 performs a spin drying process in step S114 of Fig. 14, and then, in step S115 of Fig. 14, carries out the wafer 80 from the wet cleaning unit 10 by the vertical conveying device 75.

[0072] Like electronic component cleaning apparatus 100, electronic component cleaning apparatus 200 can start hydrophilization using a hydrogen water treatment process immediately after the completion of the dry cleaning process using atmospheric pressure plasma, thereby maintaining surface 81 of wafer 80 in a highly hydrophilic state and improving bonding quality.

[0073] In the above description, the electronic component cleaning apparatuses 100 and 200 have been described as performing the electronic component cleaning method of the embodiment to clean the surface 81 of the wafer 80. However, they can also clean the surfaces of semiconductor chips 85. As shown in FIG. 15 , the semiconductor chips 85 are formed by attaching a silicon dicing film 87, which serves as a support material, to the underside of the disk-shaped wafer 80 and then cutting the wafer 80 into lattice-like pieces from above with a dicing saw. The upper surface of the outer periphery of the dicing film 87 is attached to a ring 86. Therefore, the semiconductor chips 85 are handled together with the ring 86 while attached to the upper surface of the dicing film 87. Reference numeral 89 in FIG. 15 denotes the surface 89 of the semiconductor chip 85. The semiconductor chips 85 are not limited to those attached to the dicing film 87, but may also be attached to a silicon wafer, a glass plate, or a substrate.

[0074] In the above description, the wet cleaning process is performed using hydrogen water, but this is not limiting and ozone water may also be used. In addition, in the hydrogen water cleaning process and hydrogen water treatment process, hydrogen water may be sprayed onto the surface 81 of the wafer 80 without applying ultrasonic vibration. [Explanation of symbols]

[0075] 10 Wet cleaning unit, 11, 41, 61, 71 Casing, 11a, 11b, 41b, 61a, 72, 73 Side wall, 11c, 41c, 47, 66, 72a, 73a Opening, 12, 62 Interior, 13 Wet cleaning chamber, 14, 58 Processing stage, 15 Shaft, 16 Stage drive device, 17 Control unit, 18 CPU, 19 Memory, 21 Water nozzle, 22 Ultrasonic vibrator, 23 Nozzle arm, 24 Nozzle arm drive unit, 25, 36, 54 Piping, 26 Pure water tank, 26a Pure water valve, 27 Hydrogen water tank, 27a Hydrogen water valve, 28 Ozone water tank, 28a Ozone water valve, 31 Wiping head, 32 Head arm, 33 Head arm drive unit, 34 Wiping member, 35 Rotation pressure drive unit, 37 Cleaning water tank, 37a cleaning water valve, 40, 240 dry cleaning unit, 42 floor board, 43 ceiling board, 44 dry cleaning chamber, 45 equipment arrangement space, 46 ceiling rail, 48, 72b, 73b shutter, 49 notch, 51 atmospheric pressure plasma head, 52 plasma ignition device, 53 plasma gas tank, 53a plasma gas valve, 55 connecting line, 56 plasma head drive unit, 56a bracket, 57 slide drive unit, 60 horizontal transfer unit, 63 wafer delivery stage, 64 horizontal transfer robot, 70 vertical transfer unit, 75 vertical transfer device, 76 main body, 77 chuck, 80 wafer, 81, 89 surface, 85 semiconductor chip, 86 ring, 87 dicing film, 100, 200 electronic component cleaning device.

Claims

1. An electronic component cleaning method for cleaning a surface of an electronic component, comprising: a wet cleaning step of wet-cleaning the surface of the electronic component with a liquid; a dry cleaning step of performing dry cleaning of the surfaces of the electronic components using atmospheric pressure plasma after the wet cleaning; a hydrogen water treatment step of performing a cleaning treatment on the surfaces of the electronic components using hydrogen water obtained by dissolving hydrogen gas in water after the dry cleaning step; Including, The method for cleaning electronic parts is characterized in that the hydrogen water treatment step is started within 30 seconds after the end of the dry cleaning step.

2. 2. The method for cleaning electronic components according to claim 1, The hydrogen water treatment process is started within 10 seconds after the end of the dry cleaning process. A method for cleaning electronic parts, comprising:

3. 2. The method for cleaning electronic components according to claim 1, starting the hydrogen water treatment process immediately after the completion of the dry cleaning process; A method for cleaning electronic parts, comprising:

4. The method for cleaning electronic components according to any one of claims 1 to 3, the hydrogen water treatment step includes spraying the ultrasonically vibrated hydrogen water onto the surface of the electronic component; A method for cleaning electronic parts, comprising:

5. The method for cleaning electronic components according to any one of claims 1 to 4, the electronic component is a wafer, a semiconductor chip, or a substrate for a semiconductor device; A method for cleaning electronic parts, comprising:

6. 6. The method for cleaning electronic components according to claim 5, the semiconductor chip is attached onto a support material; A method for cleaning electronic parts, comprising:

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