Systems and methods for in-line monitoring of air contamination and process integrity

Abstract

To describe embodiments of an airborne molecular contamination (AMC) monitoring apparatus.SOLUTION: An AMC apparatus includes a manifold having a plurality of inlets and one or more outlets. A sampling tube bus fluidly is coupled to the manifold, the sampling tube bus comprising a plurality of individual sampling tubes, each individual sampling tube being fluidly coupled to one of the plurality of inlets. One or more analyzers are each fluidly coupled to one of the one or more outlets of the manifold to analyze fluid drawn into the manifold through one or more of the plurality of individual sampling tubes. A control and communication system is coupled to the one or more analyzers.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS This application claims priority under Article 8 of the Patent Cooperation Treaty (PCT) to U.S. Patent Application No. 15 / 496,931, filed April 25, 2017, and U.S. Provisional Patent Application No. 62 / 329,791, filed April 29, 2016.

[0002] The disclosed embodiments relate generally to air contamination monitors, and particularly, but not exclusively, to systems and methods for in-line monitoring of air contamination and process health. [Background technology]

[0003] Air quality and airborne molecular contamination (AMC) are receiving increasing attention in semiconductor, memory, and other similar high-tech industries (e.g., displays) as their processes advance. In these industries, AMC, among other things, is recognized as a significant contributor to manufacturing defect rates, and the impact of AMC on manufacturing process yields is only exacerbated as manufacturing technologies enable smaller component sizes. Long-term exposure to AMC is also recognized as a potential risk to human health.

[0004] Manufacturers are making considerable efforts to continuously monitor and control the ambient cleanliness of their facilities using on-site or offline AMC sensing equipment. Detailed studies and continuous improvements are being conducted to identify contamination sources and prevention procedures to reduce AMC in the ambient air of their facilities. Summary of the Invention [Problem to be solved by the invention]

[0005] However, despite considerable efforts to control the air quality around facilities, the cleanliness inside manufacturing equipment, such as processing equipment modules and mobile carriers (e.g., front-opening integrated pods (FOUPs) used as substrate / wafer transport containers in the semiconductor industry), has not been thoroughly studied. While specific processing equipment modules or mobile carriers may also contribute to AMC, in most situations, processing equipment modules and substrates have their own sealed microenvironments, meaning that on-site facility ambient monitors cannot detect AMC-related issues associated with processing equipment modules or mobile carriers. Furthermore, when processing equipment modules or mobile carriers become contaminated, AMC secondary contamination can occur on the manufacturing line, and the mobile carriers serve as AMC carriers, spreading the contamination to various locations. As a result, even if AMC is later found in a mobile carrier or processing equipment module, tracing the source of the contamination can be extremely difficult.

[0006] Non-exhaustive and non-exhaustive embodiments are described with reference to the following drawings, in which like reference numerals refer to like parts throughout the various views unless otherwise specified. [Brief explanation of the drawings]

[0007] [Figure 1A] 1 is a diagram of an embodiment of a manufacturing process used in semiconductor manufacturing. [Figure 1B] 1 is a diagram of an embodiment of a manufacturing process used in semiconductor manufacturing. [Figure 2] 1 illustrates an embodiment of an in-line monitor application of Total Airborne Molecular Contamination (TAMC) equipment in semiconductor manufacturing. [Figure 3A] FIG. 1 is a block diagram of an embodiment of a TAMC device. [Figure 3B] FIG. 3B is a block diagram of an embodiment of a manifold that can be used with the embodiment of the TAMC device shown in FIG. 3A. [Figure 3C] FIG. 3B is a block diagram of an embodiment of a manifold that can be used with the embodiment of the TAMC device shown in FIG. 3A. [Figure 3D]FIG. 3B is a block diagram of an embodiment of a manifold that can be used with the embodiment of the TAMC device shown in FIG. 3A. [Figure 4] FIG. 10 is a block diagram of another embodiment of an in-line monitoring application using an embodiment of a TAMC device. [Figure 5] FIG. 10 is a block diagram of another embodiment of an in-line monitoring application using an embodiment of a TAMC device. [Figure 6] FIG. 10 is a block diagram of another embodiment of an in-line monitoring application using an embodiment of a TAMC device. [Figure 7] FIG. 10 is a block diagram of another embodiment of an in-line monitoring application using an embodiment of a TAMC device. [Figure 8] FIG. 10 is a block diagram of another embodiment of an in-line monitoring application using an embodiment of a TAMC device. [Figure 9] FIG. 10 is a block diagram of another embodiment of an in-line monitoring application using an embodiment of a TAMC device. DETAILED DESCRIPTION OF THE INVENTION

[0008] Embodiments of systems and methods for in-line monitoring of air contamination and process health are described. While specific details are described to provide an understanding of the embodiments, those skilled in the art will recognize that the invention can be practiced without one or more of the described details, or by using other methods, components, materials, etc. In some cases, well-known structures, materials, connections, or operations are not shown or described in detail, yet remain within the scope of the invention.

[0009] References throughout this specification to "one embodiment" or "an embodiment" mean that a described feature, structure, or characteristic may be included in at least one described embodiment, and appearances of "in one embodiment" or "in an embodiment" do not necessarily refer to the same embodiment. Furthermore, particular features, structures, or characteristics may be combined in any suitable manner in one or more embodiments.

[0010] 1A-1B illustrate an embodiment of a manufacturing line 100. The manufacturing line 100 can be used, for example, in semiconductor manufacturing, although in other embodiments it can be used for other purposes and with different equipment than that shown.

[0011] The manufacturing line 100 is positioned within an enclosure 102, which may be a building, a room or compartment within a building, or some other type of enclosure. One or more processing equipment modules 104 are positioned within the enclosure 102. Each processing equipment module 104 includes a load port and may include one or more chambers, each of which performs a different function associated with the manufacturing step being performed by that particular processing equipment module.

[0012] A manufacturing process typically involves many steps, with each processing equipment module performing only a portion of the steps in the overall manufacturing process. As a result, the items being manufactured on manufacturing line 100—i.e., in a semiconductor manufacturing facility, semiconductor wafers carrying processors, memory, MEMS chips, optical chips, etc.—must be moved from one processing equipment module to another until all steps in the process have been performed. Movement of the manufactured items is often accomplished internally using a movable carrier 106, which carries the manufactured items within a sealed microenvironment. In the illustrated embodiment of the semiconductor manufacturing facility, the movable carrier 106 is referred to as a front-opening integrated pod (FOUP), wafer container, or substrate container because it is used to transport semiconductor wafers. However, in other embodiments, other types of movable carriers may be used.

[0013] A transport system carries each movable carrier 106 from one processing equipment module 104 load port to another so that different steps can be performed on the manufactured item carried inside the movable carrier. In the illustrated embodiment, the transport system is an overhead truck and hoist system. Wheeled and motorized carriages 110 travel along tracks 108. A hoist 112 is mounted on each wheeled carriage 110 and has the potential to lift the movable carriers 106 in the z-direction and also move them in the y-direction (into and out of the page), allowing the movable carriers 106 to be placed in load ports that can accept multiple carriers.

[0014] 1B, the track 108 winds through the facility 102, transporting the movable carriers 106, and therefore the manufactured items carried inside the movable carriers, to a number of processing equipment modules; the illustrated embodiment has seven processing equipment modules P1-P7, although other embodiments may have a different number. After the manufactured items have passed through all of the processing equipment modules 104 in a particular enclosure 102, the transport system exits the enclosure 102 with the movable carriers.

[0015] While considerable effort and research has been devoted to controlling the facility-wide air quality within the enclosure 102, the cleanliness of the environment inside the processing equipment modules 104 and the mobile carrier 106 has not been well studied. In addition to facility-wide contaminants, i.e., contaminants originating from the equipment's overall air handling system, such as ventilation and air conditioning, the processing equipment modules 104 or the mobile carrier / FOUP 106 may contribute to airborne molecular contamination (AMC). Because the processing equipment modules 104 and the mobile carrier 106 comprise enclosed chambers with their own internal microenvironments, on-site global equipment environmental monitors cannot capture AMC problems associated with the processing equipment modules or mobile carriers. For example, if a processing equipment module or mobile carrier is contaminated, cross-contamination can spread AMC to the manufacturing line, and the mobile carrier 106 serves as an AMC carrier, transmitting AMC to various locations. However, with existing global equipment environmental monitors, it is extremely difficult to trace the source of contamination, even if AMC is later found in the mobile carrier or processing equipment module.

[0016] An alternative approach is to install an on-site mobile carrier-specific AMC monitor system. In such a system, after wafers are finished in one processing equipment module and stored in a mobile carrier for transport to another processing equipment module, the mobile carrier is diverted from its normal processing sequence and sent to the on-site AMC mobile carrier monitor system for analysis of its internal atmosphere. However, although such an AMC monitor system can be an on-site monitoring tool, it is an off-process monitoring method because the mobile carrier no longer follows a regular processing sequence. Similarly, because the mobile carrier must be diverted from normal manufacturing for analysis, this approach introduces additional uncertainty due to the disruption to the normal processing sequence. Furthermore, in such an approach, the on-site mobile carrier-specific AMC monitor system has limited functionality and can only inspect a limited number of mobile carriers (thus, it has little impact on processing throughput). Similarly, even if the monitor system could enhance screening capabilities, the need to divert the mobile carrier still adds an extra processing sequence to manufacturing, which in turn slows processing throughput. Therefore, such an approach is limited to screening only mobile carriers. It is not suitable for the purpose of in-line AMC monitoring of moving carriers and processing equipment modules.

[0017] 2 illustrates an embodiment of an in-line monitoring system 200 that uses a Total Airborne Molecular Contamination (TAMC) device 226 fluidly coupled to a processing equipment module 202. In the illustrated embodiment, the processing equipment module 202 includes a load port 204 that can be loaded with one or more movable carriers 206 (FOUPs in this embodiment); while the illustrated embodiment shows a load port that can accept four movable carriers, in other embodiments, the load port can accommodate a different number of movable carriers than shown. The processing equipment module 202 includes three chambers in addition to the load port 204: a front interface 208 adjacent to the load port 204; a processing load lock chamber 210 adjacent to the front interface 208; and finally, a processing chamber 212 adjacent to the load lock chamber 210, in which the associated manufacturing steps are performed on the manufactured item.

[0018] An individual sampling tube is fluidly coupled to each chamber within the processing equipment module 202. As used herein, components are "fluidically coupled" to mean coupled so that fluid can flow from one to the other or through the other. An individual sampling tube 216 is fluidly coupled to the processing chamber 212, an individual sampling tube 218 is fluidly coupled to the load lock chamber 210, and an individual sampling tube 220 is fluidly coupled to the front interface 208. The individual sampling tubes 216, 218, and 220 form a sampling tube bus 214. An individual sampling tube 222 is fluidly coupled to the load port 204, or more specifically, to components within the load port 204 that are fluidly coupled to the interior of the movable carrier 206. In the illustrated embodiment, there are four individual sampling tubes 222 because the load port 204 can accommodate four movable carriers; however, in other embodiments, the number of individual sampling tubes can be adapted to the number of movable carriers that the load port can accommodate. The sampling tube bus 214 and the individual sampling tubes 222 then form a further sampling tube bus 224 that is fluidly coupled to a TAMC 226 .

[0019] The TAMC 226 is communicatively coupled, either wired or wirelessly, to a remote data / control server 228. The processing device module 202 is also communicatively coupled, either wired or wirelessly, to the remote data / control server 228 and / or directly to the TAMC 226. The remote data / control server 228 can also be communicatively coupled, either wired or wirelessly, directly to the processing device module 202.

[0020] In operation of the in-line monitoring system 200, movable carriers / FOUPs are transferred to the load port so that their bottom air inlets and outlets are fluidly coupled to the load port's mating inlets / outlets, which release either N2 or clean air to flush air / AMC from the interior of the movable carrier 206 to an exhaust port below the load port. In one embodiment, individual sampling tubes 222 can be connected to the exhaust ports of the load port purge system, which can then collect, analyze, and report the cleanliness of the air purged from each movable carrier 206. The exhaust cleanliness represents the contamination level of the microenvironment within each movable carrier and can be related to the cleanliness of their previous processing elsewhere. After a short purge process, the front door of the movable carrier is opened, and the wafers inside are transferred to other chambers of the processing equipment module, i.e., the front interface 208, the load lock 210, and the processing chamber 212, for the required manufacturing steps.

[0021] In addition to monitoring the AMC in the movable carrier 206, the system 200 can also or simultaneously monitor the AMC in the front interface (FI) chamber 208, the load lock chamber 210, or the processing chambers 212, which can be sampled and analyzed by the TAMC device 226 to determine the cleanliness of each chamber. While waiting for each wafer (typically 25 wafers in a FOUP) to be processed in the chambers of the processing equipment module 202, the TAMC device 226 continues to sample and analyze the air collected from each channel (i.e., each individual sampling tube) to record changes in the AMC level. Such an AMC monitoring process provides in-line, real-time AMC results for specific processing steps and locations without changing existing manufacturing procedures, because air samples from specific targets can be collected in-line directly through the corresponding tube channels without interrupting the normal manufacturing process sequence. With the system 200, it is not necessary to withdraw the movable carrier / FOUP 206 from its normal processing for AMC analysis.

[0022] Either or both of the TAMC 226 and the processing equipment module 202 can communicate with the remote data / control server 288 via wired or wireless communication to receive instructions regarding the time and channel (i.e., individual sampling tube) to sample and analyze. Meanwhile, the TAMC 226 can report test results to the remote server 228 as feedback for manufacturing process control, which can communicate via wired or wireless communication with the processing equipment module 202 to effect adjustments such as fabrication recipe modifications. In another embodiment, the TAMC device 226 can be programmed to communicate directly with the processing equipment via wired or wireless communication to control the manufacturing process based on in-line AMC results measured by the TAMC device. Sampling and analysis at the load port 204, front interface 208, load lock 210, or processing chamber 212 can be performed in chronological order or in parallel, and can either be preprogrammed into the TAMC device 226 or performed upon command from the remote data / control server 228.

[0023] Figures 3A-3C together illustrate an embodiment of a TAMC apparatus 300 that can be used in in-line monitoring systems and methods for air contamination and process health monitoring, such as those shown in Figures 2 and 4-9. Figure 3A is a block diagram of an embodiment of a TAMC apparatus 300, which has a combination of several devices for collecting, analyzing, and reporting AMC detection results.

[0024] The TAMC 300 is contained in a housing 302, which can be fixed or movable. For example, the housing 302 can be a fixed or movable cabinet, or in some embodiments, a movable carrier such as the movable carrier 206 (see, e.g., FIG. 9). The TAMC 300 includes a manifold 304 having inlets fluidly coupled to individual sampling tubes from the sampling tube bath 224 (see, e.g., FIGS. 3B-3C). The manifold 304 also includes one or more outlets fluidly coupled to various analyzers through tubing 306. The tubing 306 includes a valve 307 so that output from the manifold can be selectively directed to any analyzer or combination of analyzers. The tubing 306 is inert to all AMC compounds and does not attract AMC compounds. It can be passivated or coated metal tubing or inert plastic tubing (e.g., PFA or Teflon).

[0025] The analyzers 308-328 may include sensors or sensor arrays for their particular type of detection, but in some embodiments may include additional components including gas chromatographs, pre-concentrators, traps, filters, valves, etc. Different embodiments may use various gas analyzers (VOC, acid, base, etc.), particle counters, humidity sensors, temperature sensors, ion analyzers, etc. Embodiments of the TAMC 300 may include one or more of the following types of analyzers, among others, and without limitation to the listed analyzers: - an analyzer that collects and analyzes the concentration of specific (individual) volatile organic compounds (VOCs), such as IPA, and / or detects the total concentration of VOCs; - an analyzer for collecting and analyzing the concentration of specific (individual) acid compounds (e.g., HF, H2SO4, HCl, etc.) and / or detecting the total acid concentration; - an analyzer for collecting and analyzing the concentration of specific (individual) base compounds (e.g., NH4OH, NaOH, etc.) and / or detecting the total concentration of bases; - an analyzer for collecting and analyzing the concentration of specific (individual) sulfide-based compounds and / or detecting the total concentration of sulfides; - an analyzer for collecting and analyzing the concentration of specific (individual) amine compounds and / or detecting the total concentration of amines; an analyzer connected to the manifold device to detect the number of airborne particles or aerosols; - an analyzer for detecting sample humidity, - an analyzer for detecting the sample temperature, an analyzer for detecting fluoride-based compounds such as chemical coolants (e.g., fluorocarbons (CxF)) or dry etching chemicals (e.g., CxFy) and / or for detecting the total concentration of chemical coolants such as fluorocarbons or the total concentration of dry etching chemicals; analyzers that collect and analyze the concentration of specific (individual) anions (negatively charged ions) such as F, Cl, PO, NO, SO, and / or detect the total concentration of anions; an analyzer that collects and analyzes the concentration of specific (individual) cations (negatively charged ions), such as -NH4+, and / or detects the total concentration of cations; - analyzers that collect and analyze the concentration of specific (individual) metal ions and / or detect the total concentration of metal ions; -An analyzer that collects specific (individual) silicon dopant ions and analyzes their concentration and / or detects the total concentration of dopants.

[0026] The analyzers 308-328 are communicatively coupled to a control and communication system 332, which coordinates the operation of all analyzers and devices included in the TAMC device 300. The control and communication system 332 is used to receive, process, and / or interpret data from the analyzers 308-328, and each analyzer and its associated valve 307 can be controlled by the control and communication system for sample analysis. In one embodiment, the hardware of the control and communication system 332 can be a general-purpose computer including a processor, memory, storage, etc., along with software having instructions that cause the listed hardware to perform the required functions. However, in another embodiment, the control and communication system 332 can be a special-purpose computer, such as an application-specific integrated circuit (ASIC), also having software having instructions that cause the listed hardware to perform the required functions.

[0027] The control and communication system 332 can be communicatively coupled, wired or wirelessly, to one or more processing device modules and / or to a remote data / control server (see, e.g., FIG. 2) that can collect data from each TAMC and control each TAMC and its associated processing device. Thus, the TAMC system can receive and transmit real-time test result updates or receive operational commands from the server, such as a particular sampling channel (i.e., a particular individual sampling tube) on which to perform in-line TAMC analysis.

[0028] As shown and described elsewhere (see Figures 2 and 4-9), one or more TAMCs 300 can be used to monitor multiple movable carriers / FOUPs, multiple chambers in one or more processing equipment modules, or a combination of movable carriers and processing equipment modules. Use of a TAMC 300 provides a method of direct in-line monitoring without interfering with normal manufacturing processes.

[0029] 3B illustrates an embodiment of a manifold 350 that can be used in the TAMC system 300. The manifold 350 includes one or more inlet tubes 354 fluidly coupled to individual sampling tubes 352 through three-way valves 356. While the illustrated embodiment includes five individual sampling tubes 352a-352e with corresponding valves 356a-356e, other embodiments may include a different number of individual sampling tubes and valves, and not all sampling tubes need have valves.

[0030] In the illustrated embodiment, the inlet tubes 354 have a design that eliminates dead spaces that can trap contaminants in the inlet tubes. Each three-way valve 356 has an additional port that can be used as a wash port for the individual sampling tubes, although in alternative embodiments, other types of valves can be used in place of the three-way valves 356.

[0031] Buffer tank 360 is fluidly coupled to inlet tubing 354 through three-way valve 358. The buffer tank allows TAMC system 300 to collect large sample volumes in a short period of time (e.g., 20 liters in less than 5 seconds). In some situations, AMC contamination levels can change in less than 10 seconds. Valves 358 and 270 (which can be three-way or switching valves) are positioned at the inlet and outlet of buffer tank 360; these valves open when air sampling is required and close when the air sample has been collected. Buffer tank 360 also allows for the collection of transient AMC from the outlet at a specific location for an analyzer to later measure contamination levels.

[0032] Buffer tank 360 has a clean air inlet fluidly coupled to its interior through pressure controller 362 and valve 364, and a clean air outlet fluidly coupled to the interior of buffer tank 360 by valve 366. The clean air inlet and clean air outlet provide the ability to flush the interior of buffer tank 360 and clean any sample remaining inside the buffer tank or sampling tubing. Buffer tank 360 can also have an ambient air inlet 372 fluidly coupled to the interior of buffer tank 360 by valve 374, if desired.

[0033] An optional sampling pump 368 may be fluidly coupled to the interior of the buffer tank 360 through a valve 370. If present, the sampling pump 368 may be used to draw sample received at the inlet tube 354 into the interior of the buffer tank 360. The sampling pump 368 reduces pressure within the buffer tank 360 to remove air from the load port exhaust, FI, load lock, or process chamber outlet. In embodiments where the load port exhaust, FI chamber, load lock chamber, or process chamber output and therefore the output of the individual sampling tubes 352 have positive pressure / flow, the sampling pump 368 may not be required.

[0034] One or more analyzers, up to N analyzers, can be fluidly coupled to the outlet of buffer tank 360 through valve 376, these analyzers corresponding to analyzers 308-328 shown in Figure 3A. A non-limiting list of types of analyzers that can be used in different embodiments is provided above in connection with Figure 3A.

[0035] FIG. 3C shows an embodiment of a manifold 375 that can be used with the TAMC 300. Manifold 375 is similar in most respects to manifold 350. The primary difference between manifold 375 and 350 is that it may be useful to analyze samples before they enter buffer tank 360. Some analyzers / sensors have fast sensing responses or include internal high-speed sampling modules that do not require connection to a buffer tank to share the collected sample. To accommodate this, manifold 375 includes a flow divider 380 fluidly coupled to tubing 354 upstream of three-way valve 358. Flow divider 380 is fluidly coupled to one or more analyzers, such as a temperature / humidity analyzer 382 or other type of analyzer 384. In such an embodiment, the analyzer / sensor does not consume the sample collected in buffer tank 360.

[0036] 3D shows another embodiment of manifold 390. Manifold 390 is similar in most respects to manifolds 350 and 370. The primary difference is that manifold 390 does not include buffer tank 360. In embodiments where a buffer tank for collecting and storing large sample volumes is not needed, buffer tank 360 can be replaced with tubing 392 having fluid connections to individual analyzers. For example, in embodiments, multiple flow dividers (e.g., like flow divider 380 in the embodiment) connected in series to tubing 392 can be used to couple tubing 392 to N analyzers to direct the sample fluid to one or more of the N individual analyzers.

[0037] 4 illustrates an embodiment of an in-line monitoring system 400 that uses an embodiment of a TAMC device such as TAMC 300. In monitoring system 400, one or more processing equipment modules are positioned on a manufacturing device. The illustrated embodiment has two processing equipment modules 402 and 404, although other embodiments may include more or fewer processing equipment modules than shown. A transport system moves a movable carrier, in this embodiment, a FOUP, from one processing equipment module to another.

[0038] The processing instrument module 402 has a sampling tube bus 408 coupled to one or more of its chambers, and the processing instrument module 404 similarly has a sampling tube bus 410 coupled to one or more of its chambers. The sampling tube buses 408 and 410 are shown in simplified form to avoid cluttering the figure, but in embodiments, the sampling tube buses 408 and 410 may each comprise a set of individual sampling tubes and tube buses fluidly coupled to the processing instrument module 402 shown in FIG.

[0039] The TAMC 406 is mobile and can be quickly connected and disconnected from the sampling tube buses 408 and 410. Using the ability to quickly connect and disconnect from the tube buses 408 and 410, the TAMC 406 can be easily moved between the process equipment modules 402 and 404, for example, by being housed in a rolling cabinet. The TAMC device 406 is initially fluidly coupled to the process equipment module 402 for a specific period of time to monitor the cleanliness of the process equipment in-line and also to monitor FOUPs transferred to the process equipment. The TAMC system can then be moved and fluidly coupled to the process equipment module 404 to continue to monitor its cleanliness and the cleanliness within the FOUPs transferred to it.

[0040] 5 illustrates another embodiment of an in-line monitor system 500. In the system 500, multiple TAMCs can be connected to a process equipment module 502 and focused to independently monitor specific chambers within the process equipment module.

[0041] In the illustrated embodiment, the processing equipment module 502 has multiple chambers, and as before, it has a load port into which one or more movable carriers, such as FOUPs, can be mated, and in the illustrated embodiment, also has a front interface, a processing load lock chamber, and a processing chamber. Different TAMCs are fluidly coupled to different chambers within the processing equipment module 502; in the illustrated embodiment, one TAMC 504 is fluidly coupled to the load port, another TAMC 506 is fluidly coupled to the front interface, and a third TAMC 508 is fluidly coupled to the load lock chamber and the processing chamber. In other embodiments, the fluid couplings may differ from those shown. Although not shown, the TAMCs 504-508 and the processing equipment module 502 can be communicatively coupled to each other, to a central server, or to each other and to a central server, via wires or wirelessly, as shown in FIG. 2.

[0042] FIG. 6 illustrates another embodiment of an in-line monitoring system 600. The system 600 includes multiple processing equipment modules; the illustrated embodiment has 16 processing equipment modules, labeled L1-L16, although other embodiments may have more or fewer processing equipment modules than shown. The system includes two separate sampling tube buses 602 and 604. The sampling tube bus 602 includes one or more individual sampling tubes fluidly coupled to all of the processing equipment modules L1-L16, and the sampling tube bus 604 also includes one or more individual sampling tubes fluidly coupled to all of the processing equipment modules L1-L16.

[0043] Various sampling tube bus configurations are possible in different embodiments of system 600. In one embodiment, for example, sampling tube bus 602 can have all of its individual sampling tubes coupled to one type of processing equipment module chamber, while sampling tube bus 604 can have its individual sampling tubes coupled to another type of chamber. For example, sampling tube bus 602 can have its individual sampling tubes coupled to the load ports of processing equipment modules L1-L16, while sampling tube bus 604 can have its individual sampling tubes coupled to the processing chambers of processing equipment modules L1-L16. In another embodiment, bus 602 can have its individual sampling tubes coupled to one combination of chambers in each processing equipment module, while bus 604 can have its individual sampling tubes coupled to a different combination of chambers in each processing equipment module. In yet another embodiment, buses 602 and 604 can both have all of their individual sampling tubes coupled to all chambers of all processing equipment modules, as shown, for example, in FIG. 2 .

[0044] A TAMC is fluidly coupled to each sampling tube bus to collect a sample from each individual sampling tube and analyze the collected sample; i.e., TAMC 606 is fluidly coupled to sampling tube bus 602 and TAMC 608 is fluidly coupled to sampling tube bus 604; therefore, there is a one-to-one correspondence of TAMCs to sampling tube buses. However, in other embodiments, sampling tube buses 602 and 604 can be separated and directed to a greater or lesser number of TAMCs than shown. As in other illustrated embodiments, TAMCs 602-608 and individual processing equipment modules L1-L16 can be communicatively coupled, wired or wirelessly, to each other and / or to a central or remote server / control center 610 as shown in FIG. 2. Communication connections between processing equipment modules L1-L16 and server 610 are not shown to avoid cluttering the figure.

[0045] In the case of in-line monitor system 600, a combination of different in-line TAMC systems can be used to cover the same processing area. One or more in-line TAMC systems can be fluidly coupled to focus on monitoring the load port FOUP exhaust, while another in-line TAMC system can be fluidly coupled to focus on monitoring the FI chambers of all equipment in the target processing area. The same is true for additional in-line TAMC systems for all load lock chambers and / or processing chambers in the target processing area in the fab.

[0046] FIG. 7 illustrates another embodiment of an in-line monitoring system 700. The system 700 includes multiple processing equipment modules; the illustrated embodiment has 16 processing equipment modules, labeled L1 through L16, although other embodiments may have more or fewer processing equipment modules than shown. The system includes two separate sampling tube buses 702 and 704. The sampling tube bus 702 includes one or more individual sampling tubes fluidly coupled to a subset of the processing equipment modules, in this embodiment, chambers L1 through L4 and L9 through L12, while the sampling tube bus 704 also includes one or more individual sampling tubes fluidly coupled to a different subset of the processing equipment modules, in this embodiment, chambers L5 through L8 and L13 through L16.

[0047] Various sampling tube bus configurations are possible in different embodiments of system 700. In one embodiment, for example, sampling tube bus 702 can have all of its individual sampling tubes coupled to one type of processing equipment module chamber, while sampling tube bus 704 can have its individual sampling tubes coupled to another type of chamber. For example, sampling tube bus 702 can have its individual sampling tubes coupled to the load ports of processing equipment modules L1-L4 and L9-L12, while sampling tube bus 704 can have its individual sampling tubes coupled to the processing chambers of processing equipment modules L5-L8 and L13-L16. In another embodiment, bus 702 can have its individual sampling tubes coupled to one combination of chambers in each processing equipment module in its subset, while bus 704 can have its individual sampling tubes coupled to another combination of chambers in each processing equipment module in its subset. In yet another embodiment, both buses 702 and 704 can have all of their individual sampling tubes coupled to all chambers in all processing equipment modules, as shown, for example, in FIG. 2 .

[0048] A TAMC is fluidly coupled to each sampling tube bus to collect a sample from each individual sampling tube and analyze the collected sample; i.e., TAMC 706 is fluidly coupled to sampling tube bus 702 and TAMC 708 is fluidly coupled to sampling tube bus 704; however, in alternative embodiments, sampling tube buses 702 and 704 may be disconnected and directed to a greater or lesser number of TAMCs than shown. As in the other illustrated embodiments, TAMCs 702-708 and individual processing equipment modules L1-L16 may be communicatively coupled, wired or wirelessly, to one another and / or to a central or remote server / control center 710 as shown in FIG. 2. Communication connections between processing equipment modules L1-L16 and server 710 are not shown to avoid cluttering the figure.

[0049] For in-line monitor system 700, TAMCs 706 and 708 can be used to connect to multiple processing tools / modules with an expanded manifold design (i.e., more sampling channels) to cover specific processing areas within a manufacturing tool. Each in-line TAMC can be configured to monitor the FOUP load port exhaust, FI, load lock, or processing chamber for a specific total number of processing tools (and FOUPs).

[0050] FIG. 8 illustrates another embodiment of an in-line monitoring system 800. The system 800 includes multiple processing equipment modules; the illustrated embodiment has 16 processing equipment modules, labeled L1 through L16, although other embodiments may have more or fewer processing equipment modules than shown. The system includes two separate sampling tube buses 802 and 804. The sampling tube bus 802 includes one or more individual sampling tubes fluidly coupled to a subset of the processing equipment modules, in this embodiment, chambers L1 through L4 and L9 through L12, while the sampling tube bus 804 also includes one or more individual sampling tubes fluidly coupled to a different subset of the processing equipment modules, in this embodiment, chambers L5 through L8 and L13 through L16.

[0051] Various sampling tube bus configurations are possible in different embodiments of system 800. In one embodiment, for example, sampling tube bus 802 can have all of its individual sampling tubes coupled to one type of processing equipment module chamber, while sampling tube bus 804 can have its individual sampling tubes coupled to another type of chamber. For example, sampling tube bus 802 can have its individual sampling tubes coupled to the load ports of processing equipment modules L1-L4 and L9-L12, while sampling tube bus 804 can have its individual sampling tubes coupled to the processing chambers of processing equipment modules L5-L8 and L13-L16. In another embodiment, bus 802 can have its individual sampling tubes coupled to one combination of chambers in each processing equipment module in its subset, while bus 804 can have its individual sampling tubes coupled to another combination of chambers in each processing equipment module in its subset. In yet another embodiment, buses 802 and 804 can both have all of their individual sampling tubes coupled to all chambers in all processing equipment modules, as shown, for example, in FIG. 2 .

[0052] In the illustrated embodiment, a movable TAMC 806 is fluidly coupled to each sampling tube bus to collect samples from each individual sampling tube within that bus and analyze the collected samples. Using the ability to quickly connect and disconnect to the sampling tube buses 802 and 804, the TAMC 806 can be easily moved between the sampling tube buses, for example, by being housed in a rolling cabinet. The TAMC 806 is initially coupled to the sampling tube bus 802. Once the TAMC 806 has finished monitoring its corresponding subset of processing equipment modules, it is disconnected from the sampling tube bus 802 and fluidly coupled to the sampling tube bus 804. As in the other illustrated embodiments, the TAMC 806 and the individual processing equipment modules L1-L16 can be communicatively coupled, wired or wirelessly, to each other and / or to a central or remote server / control center 810, as shown in FIG. 2 . The communication connections between the processing equipment modules L1-L16 and the server 810 are not shown to avoid cluttering the figure.

[0053] In the case of in-line monitor system 800, a single in-line TAMC system can be connected to multiple processing devices / modules with an expanded manifold design (more sampling channels) to cover specific processing areas within the manufacturing equipment. The in-line TAMC can be moved from location A to location B to cover AMC monitors in location B areas with multiple processing devices. In another embodiment, a single in-line TAMC system can be made movable, connected to multiple processing devices / modules with an expanded manifold design (more sampling channels) to cover specific processing areas within the manufacturing equipment. The in-line TAMC can be moved from location A to location B to cover AMC monitors in location B areas with multiple processing devices.

[0054] Figure 9 illustrates another embodiment of an in-line monitor system 900. The monitor system 900 is similar in most respects to the monitor system 200 shown in Figure 2, with the fluidic couplings between the TAMC 226 and the different chambers of the processing equipment modules, such as 202, being substantially the same, and the communication connections between the TAMC 226, the processing equipment modules 202, and the remote data / control server 228 being substantially the same.

[0055] The primary difference between system 900 and system 200 is that in system 900, TAMC 226 includes its own load port 902 to which the mobile carrier can be mated for analysis, just as mobile carrier 904 can be mated to load port 204 of processing equipment module 202. In one embodiment, load port 902 provides an additional location to which mobile carriers 904 and 206 can be docked for analysis. In another embodiment, load port 902 allows TAMC 226 to serve as a base station for purpose-specific mobile carriers 904. For example, mobile carrier 904 can be a specialized process health monitor FOUP that carries a battery-powered sensor or sampling collector inside the FOUP (instead of the semiconductor wafers it normally carries) for more detailed TAMC analysis, FOUP cleaning, or in-FOUP battery charging. The purpose-specific mobile carriers / FOUPs can also be transported to the same load port 204 as regular processing FOUPs. The load port 902 can also be used to perform AMC analysis directly on standard mobile carriers or process FOUPs, with or without wafers inside.

[0056] The above description of embodiments, including those described in the Abstract, is not intended to be exhaustive or to limit the invention to the described forms. While specific embodiments of, and examples related to, the invention have been described herein for illustrative purposes, those skilled in the art will recognize that various equivalent modifications are possible within the scope of the invention in light of the above detailed description. The in-line TAMC system with load port is designed for direct FOUP docking and analysis.

[0057] The terms used in the following claims should not be construed to limit the invention to the specific embodiments disclosed in the specification and the claims. Rather, the scope of the invention shall be determined entirely by the following claims, which are to be construed using established doctrines of claim interpretation. [Explanation of symbols]

[0058] 200 Inline Monitor System 202 Processing Equipment Module 206 Movable carrier (FOUP) 214 Sampling Tube Bath 226 Total Airborne Molecular Contamination (TAMC) Device

Claims

[Claim 1] A manifold comprising: an inlet tube fluidly coupled to a plurality of individual sampling tubes in the sampling tube bath; a first valve fluidly coupling the plurality of individual sampling tubes to the inlet tube and operable to discharge fluid toward the inlet tube and toward the plurality of individual sampling tubes; a buffer tank having a clean air inlet and a clean air outlet; a second valve fluidly connecting the buffer tank to the inlet tube and capable of discharging fluid toward the inlet tube and the buffer tank; a plurality of outlet tubes fluidly coupled to the buffer tank; a manifold including: one or more analyzers each fluidly coupled to one of the one or more outlets of the manifold for analyzing fluid drawn into the manifold through one or more of the plurality of individual sampling tubes; a third valve fluidly coupling the analyzer and the plurality of outlet tubes; a control and communication system coupled to the one or more analyzers; the manifold is configured to fluidly couple the first valve fluidly coupling the plurality of individual sampling tubes to the inlet tube, the second valve fluidly coupling the inlet tube to the buffer tank, and the third valve fluidly coupling the outlet tube to the analyzer so as to enable flushing of the manifold via the clean air inlet and the clean air outlet. An airborne molecular contamination (AMC) monitor device.

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