Action device, light deflector, light deflection device, distance measuring device, image projection device and moving body

Abstract

To prevent destruction of an operating device.SOLUTION: An operating device according to an aspect of the present invention is an operating device in which an oscillation part can oscillate around a predetermined oscillation axis, and comprises: a movable part that is connected at one end with the oscillation part through a first connection part and a support part that is connected with the other end of the movable part through a second connection part. The movable part has a beam member that is stretched in an intersection direction intersecting with the oscillation axis. At least either one of the first connection part and the second connection part includes an axial direction connection extension part that extends in an axial direction along the oscillation axis, and an axial direction connection thick part that is thick and extends in the axial direction. The axial direction connection thick part is at least partially included in the axial direction connection extension part.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to an operating device, an optical deflector, an optical deflection device, a distance measuring device, an image projection device, and a moving object. [Background technology]

[0002] With the advancement of micromachining technology, the development of MEMS (Micro Electro Mechanical Systems) devices, which are manufactured by microfabricating silicon or glass, is progressing. One such MEMS device is a motion device in which an oscillating part with a reflective surface oscillates around a predetermined oscillation axis.

[0003] In addition, in order to suppress crosstalk in oscillation in an operating device such as an optical deflector in which an oscillating part such as a reflecting part oscillates in two axial directions, a configuration has been disclosed in which a rib is provided on a drive beam connected to the reflecting part (see, for example, Patent Document 1). Summary of the Invention [Problem to be solved by the invention]

[0004] However, the configuration of Patent Document 1 leaves room for improvement in that, when the swing angle of the swinging part is increased, stress is concentrated on the movable parts such as the drive beams, making them more susceptible to breakage.

[0005] An object of the present invention is to prevent damage to an operating device. [Means for solving the problem]

[0006] An operating device according to one aspect of the present invention is an operating device in which a swinging part is swingable about a predetermined swing axis, and includes a movable part having one end connected to the swinging part via a first connecting part, and a support part connected to the other end of the movable part via a second connecting part, wherein the movable part has a beam member extending in a direction intersecting the swing axis, and at least one of the first connecting part and the second connecting part includes an axial connection extending part extending in an axial direction along the swing axis, and a thick axial connection thick part extending in the axial direction, and at least a portion of the axial connection thick part is included in the axial connection extending part. At least one of the first connecting portion and the second connecting portion includes a cross-direction connecting extension portion extending from the beam member in the cross direction, and a thick cross-direction connecting thick portion at least partially included in the cross-direction connecting extension portion and extending in the axial direction. . [Effects of the Invention]

[0007] According to the present invention, damage to the operating device can be suppressed. [Brief explanation of the drawings]

[0008] [Figure 1] 1(a) to 1(c) are diagrams showing an example of the configuration of a movable device according to a first embodiment. [Figure 2] FIG. 2 is a cross-sectional view taken along the oscillation axis E of FIG. [Figure 3] 10(a) to 10(c) are diagrams showing the configuration of a movable device according to a comparative example. [Figure 4A] FIG. 10 is a diagram showing a first example of elastic deformation distribution in the vicinity of a connection portion. [Figure 4B] FIG. 10 is a diagram showing a second example of the distribution of elastic deformation in the vicinity of the connection portion. [Figure 4C] 10A and 10B are diagrams illustrating an example of the relationship between the length of the axially extending portion and the breaking swing angle. [Figure 5] 10(a) and 10(b) are diagrams showing an example of the configuration of a movable device according to a modified example of the first embodiment. [Figure 6] 10(a) and 10(b) are diagrams showing an example of the configuration of a movable device according to a second embodiment. [Figure 7] 10(a) and 10(b) are diagrams showing an example of the configuration of a movable device according to a modified example of the second embodiment. [Figure 8] 10(a) and 10(b) are diagrams showing an example of the configuration of a movable device according to a third embodiment. [Figure 9] FIG. 8(b) is a partially enlarged view of the vicinity of region C in FIG. 8(a). [Figure 10] 10(a) and 10(b) are diagrams showing an example of the configuration of a movable device according to a modified example of the third embodiment. [Figure 11] 10(a) and 10(b) are diagrams showing an example of the configuration of a movable device according to a fourth embodiment. [Figure 12] 10(a) and 10(b) are diagrams showing an example of the configuration of a movable device according to a modified example of the fourth embodiment. [Figure 13] 10(a) and 10(b) are diagrams showing an example of the configuration of a movable device according to a fifth embodiment. [Figure 14] FIG. 1 is a schematic diagram of an example optical scanning system. [Figure 15] FIG. 1 is a diagram illustrating a hardware configuration of an example of an optical scanning system. [Figure 16] FIG. 2 is a functional block diagram of an example of a control device. [Figure 17] 10 is a flowchart of an example of processing related to the optical scanning system. [Figure 18] FIG. 1 is a schematic diagram of an example of an automobile equipped with a head-up display device. [Figure 19] FIG. 1 is a schematic diagram of an example of a head-up display device. [Figure 20] FIG. 1 is a schematic diagram of an example of an image forming apparatus equipped with an optical writing device. [Figure 21] FIG. 1 is a schematic diagram of an example of an optical writing device. [Figure 22] FIG. 1 is a schematic diagram of an example of an automobile equipped with a laser radar device. [Figure 23] FIG. 1 is a schematic diagram of an example of a laser radar device. [Figure 24] 1 is a schematic diagram of an example of a laser headlamp. [Figure 25] FIG. 1 is a perspective view of an example of the appearance of a head-mounted display. [Figure 26] FIG. 1 is a diagram illustrating a partial configuration of a head-mounted display. [Figure 27] 1 is a schematic diagram of an example of a packaged movable device. DETAILED DESCRIPTION OF THE INVENTION

[0009] Hereinafter, embodiments of the invention will be described with reference to the drawings. In each drawing, the same components are designated by the same reference numerals, and redundant explanations may be omitted. Furthermore, the embodiments shown below are examples of operating devices and optical deflectors that embody the technical concepts of the present invention, and the present invention is not limited to the embodiments shown below. Unless otherwise specified, the dimensions, materials, shapes, relative positions, etc. of the components described below are intended for illustrative purposes only and are not intended to limit the scope of the present invention. Furthermore, the sizes and positional relationships of components shown in the drawings may be exaggerated for clarity.

[0010] In the drawings shown below, for convenience, the direction parallel to the oscillation axis E of the movable part of the operating device is defined as the X direction, the direction perpendicular to the X direction is defined as the Y direction, and the direction perpendicular to both the X direction and the Y direction (height direction) is defined as the Z direction. However, these directions do not limit the orientation of the operating device, and the orientation of the operating device is arbitrary.

[0011] [First embodiment] <Configuration example of the movable device 13> First, the configuration of the movable device 13 according to the first embodiment will be described in detail with reference to Fig. 1. Fig. 1 is a diagram illustrating an example of the configuration of a double-supported movable device 13 capable of deflecting light in one axial direction. Fig. 1(a) is a plan view, Fig. 1(b) is a rear view, and Fig. 1(c) is a partial enlarged view of the vicinity of region A in Fig. 1(b).

[0012] As shown in FIG. 1, the movable device 13 includes a reflecting unit 120, movable units 130a and 130b, driving units 140a and 140b, and a support unit 150. In this embodiment, the reflecting unit 120 is rectangular and has a rectangular reflective surface 14 that reflects incident light on its surface in the +Z direction. The reflecting unit 120 is not limited to a rectangular shape and may have a shape other than a rectangular shape. Examples of shapes other than a rectangle include a circular shape and an elliptical shape. The movable device 13 is an example of an operating device in which the reflecting unit 120 having the reflective surface 14 oscillates about an oscillation axis E, and is also an example of an optical deflector having an operating device. The reflecting unit 120 is an example of an oscillating unit.

[0013] One end of the movable part 130a is connected to the reflecting part 120 via the first connecting part 160a, and one end of the movable part 130b is connected to the reflecting part 120 via the first connecting part 160b. The movable device 13 has movable parts 130b and 130b arranged in positions facing each other across the reflecting part 120, and the movable parts 130b and 130b support the reflecting part 120 so that it can swing. Note that, although an example of an optical deflection device having a pair of movable parts is shown in this embodiment, the number of movable parts may be one, or may be multiple as in a vector scan system.

[0014] The support unit 150 is a frame-shaped member that supports the movable unit 130a and the movable unit 130b by connecting to the other end of the movable unit 130a via the second connecting unit 170a and connecting to the other end of the movable unit 130b via the second connecting unit 170b. The support unit 150 may be configured so that a portion of the support unit 150 in a direction intersecting the oscillation axis can pass through or transmit light reflected by the reflecting unit 120. For example, the support unit 150 may be configured so that a portion of the support unit 150 in a direction intersecting the oscillation axis is open, allowing light reflected by the reflecting unit 120 to pass through, or a portion of the support unit 150 in a direction intersecting the oscillation axis is formed of a light-transmittable material such as glass, allowing light reflected by the reflecting unit 120 to transmit through. With such a configuration, it is possible to prevent the light deflected by the reflecting unit 120 from being blocked by the support unit 150 even when the oscillation angle of the reflecting unit 120 is increased.

[0015] The driving unit 140a elastically deforms the movable unit 130a, and the driving unit 140b elastically deforms the movable unit 130b, thereby causing the reflecting unit 120 to oscillate (rotationally oscillate) around the oscillation axis E. The movable device 13 has the driving unit 140a on the movable unit 130a and the driving unit 140b on the movable unit 130b.

[0016] The movable device 13 has wiring provided on the movable part 130a in an area other than the driving part 140a, on the movable part 130b in an area other than the driving part 140b, and on the support part 150 for transmitting the driving voltage applied to the electrode terminals provided on the support part 150 to the driving parts 140a and 140b.

[0017] The movable section 130a has two movable beams 131a and 132a arranged approximately parallel to each other. Each of the movable beams 131a and 132a is an example of a linear beam member extending in a direction intersecting the oscillation axis E (Y direction), and adjacent ends are connected to each other to form a folded structure (meandering structure). In other words, the movable section 130a has a folded structure in which the ends of adjacent movable beams 131a and 132a are connected to each other via a folded portion.

[0018] The movable beam 131a located on the reflecting portion 120 side of the movable portion 130a is connected to the reflecting portion 120 via a first connecting portion 160a, and the movable beam 132a located on the supporting portion 150 side of the movable portion 130a is connected to the supporting portion 150 via a second connecting portion 170a.

[0019] The movable part 130b has two movable beams 131b and 132b arranged approximately parallel to each other. Each of the movable beams 131b and 132b is an example of a linear beam member extending in a direction intersecting the oscillation axis E, and adjacent ends are connected to each other to form a folded structure. In other words, the movable part 130b has a folded structure in which the ends of adjacent movable beams 131b and 132b are connected to each other via a folded portion.

[0020] The movable beam 131b located on the reflecting portion 120 side of the movable portion 130b is connected to the reflecting portion 120 via a first connecting portion 160b, and the movable beam 132b located on the supporting portion 150 side of the movable portion 130b is connected to the supporting portion 150 via a second connecting portion 170b.

[0021] The driving unit 140a has two piezoelectric elements 141a and 142a. Each of the piezoelectric elements 141a and 142a has a rectangular shape with the longitudinal direction in the Y direction. The movable beam 131a has the piezoelectric element 141a on its surface on the +Z direction side, and the movable beam 132a has the piezoelectric element 142a on its surface on the +Z direction side.

[0022] The driving unit 140b has two piezoelectric elements 141b and 142b. Each of the piezoelectric elements 141b and 142b has a rectangular shape with its longitudinal direction in the Y direction. The movable beam 131b has the piezoelectric element 141b on its surface facing the +Z direction, and the movable beam 132b has the piezoelectric element 142b on its surface facing the +Z direction.

[0023] In this embodiment, the movable units 130a and 130b each have a folded structure with two movable beams, but the number of movable beams is not limited to this. Each of the movable units 130a and 130b may have one movable beam or three or more movable beams. When there is one movable beam, the movable device 13 does not have a folded structure. The number of actuators 140a and 140b may be equal to the number of movable beams, or one movable beam may be provided with multiple actuators, or a movable beam without an actuator may be provided. Furthermore, a piezoelectric element that does not function as a actuator, for example, for detecting the swing angle, may be provided on the movable beam separately from the piezoelectric element serving as the actuator.

[0024] The first connecting portion 160a is a portion where the reflecting portion 120 and the movable portion 130a are connected. The first connecting portion 160a also includes an axial extending portion 180a extending from the movable beam 131a in the −X direction (the axial direction along the oscillation axis E). The axial extending portion 180a is provided at an end of the first connecting portion 160a on the opposite side in the X direction from the side where the movable beam 131a is connected to the reflecting portion 120, and is a portion that protrudes from the movable beam 131a in the −X direction. The axial extending portion 180a is an example of an axial connecting extending portion.

[0025] 1(a), the first connection portion 160a corresponds to the range in the X direction from the portion where the movable beam 131a is connected to the reflecting portion 120 to the end of the axial extension portion 180a provided on the opposite side in the X direction from the side where it is connected to the reflecting portion 120. In addition, in the Y direction, the range corresponds to a width that is approximately equal to the width where the movable beam 131a is connected to the reflecting portion 120.

[0026] The first connection portion 160b is a portion where the reflecting portion 120 and the movable portion 130b are connected. The first connection portion 160b also includes an axial extension portion 180b extending from the movable beam 131b in the +X direction. The axial extension portion 180b is provided at an end of the first connection portion 160b on the opposite side in the X direction from the side where the movable beam 131b is connected to the reflecting portion 120, and is a portion that protrudes from the movable beam 131b in the +X direction. The axial extension portion 180b is an example of an axial connection extension portion.

[0027] 1(a), the first connection portion 160b corresponds to the range in the X direction from the portion where the movable beam 131b is connected to the reflecting portion 120 to the end of the axially extending portion 180b provided on the opposite side in the X direction from the side where it is connected to the reflecting portion 120. In addition, in the Y direction, the range corresponds to a width that is approximately equal to the width where the movable beam 131b is connected to the reflecting portion 120.

[0028] 1(b), the first connecting portion 160a includes an axial connection thick portion 161a on the -Z direction side of the movable beam 131a. The axial connection thick portion 161a is a portion that is thicker than the other portions of the first connecting portion 160a. The axial connection thick portion 161a is a portion that is included in the axial extending portion 180a in the X direction and extends in the X direction. Because the axial connection thick portion 161a is formed thick, it has the function of suppressing distortion of the first connecting portion 160a and suppressing abnormal oscillation of the reflecting portion 120, such as a shift in resonance frequency, caused by distortion of the first connecting portion 160a.

[0029] Similarly, the first connecting portion 160b includes an axial connection thick portion 161b on the −Z direction side of the movable beam 131b. The axial connection thick portion 161b is a thicker portion than the other portions of the first connecting portion 160b than the axial connection thick portion 161b. Furthermore, the axial connection thick portion 161b is at least partially included in the axial extending portion 180b in the X direction, is a portion that extends in the X direction, and is thicker than the other portions of the first connecting portion 160b than the axial connection thick portion 161b. Because the axial connection thick portion 161b is formed thick, it has the function of suppressing distortion of the first connecting portion 160b and suppressing abnormal oscillation of the reflecting portion 120, such as a shift in resonance frequency, caused by distortion of the first connecting portion 160a.

[0030] The thick portion for reflector 121 is a portion that is thicker than the other portions of the reflector 120. The thick portion for reflector 121 is formed to be thick, and thereby has the function of suppressing distortion of the reflector 120 and stabilizing light deflection. The thick portion for reflector 121 is an example of a thick portion for oscillation portion.

[0031] The thickness of each of the axial connecting thick portions 161a and 161b is approximately equal to the thickness of the reflector-use thick portion 121 included on the -Z direction side of the reflector 120. Therefore, it can be said that each of the axial connecting thick portions 161a and 161b is connected to the thick reflector-use thick portion 121 included on the -Z direction side of the reflector 120.

[0032] As shown in Fig. 1(c), the axial extending portion 180b has a length d in the X direction and a length e in the Y direction, and is approximately equal in thickness to the movable beam 131b. Similarly, the axial extending portion 180a has a length d in the X direction and a length e in the Y direction, and is approximately equal in thickness to the movable beam 131a. The length w in Fig. 1(c) is the width of the movable beam 131b in the X direction.

[0033] 1(a), the second connection portion 170a is a portion where the support portion 150 and the movable portion 130a are connected. The support portion 150 has an axial support frame 151a extending in the X direction, and the movable portion 130a is connected to the axial support frame 151a via the second connection portion 170a.

[0034] 1(a), the second connecting portion 170a has a range in the X direction that is approximately equal to the width at which the movable beam 132a is connected to the support portion 150. Note that the second connecting portion 170a according to this embodiment does not include the axial connecting thick portion 161a and the axial extending portion 180a, as the first connecting portion 160a does, and therefore there is no particular limitation on the range of the second connecting portion 170a in the Y direction.

[0035] The second connecting portion 170b is a portion where the support portion 150 and the movable portion 130b are connected. The support portion 150 has an axial support frame 151b extending in the X direction, and the movable portion 130b is connected to the axial support frame 151b via the second connecting portion 170b.

[0036] 1(a), the second connection portion 170b has a range in the X direction that is approximately equal to the width at which the movable beam 132b is connected to the support portion 150. Note that the second connection portion 170b according to this embodiment does not include the axial connection thick portion 161b and the axial extending portion 180b, as the first connection portion 160b does, and therefore there is no particular limitation on the range of the second connection portion 170b in the Y direction.

[0037] Next, Fig. 2 is a cross-sectional view of the movable device 13 taken along the oscillation axis E in Fig. 1. The movable device 13 is manufactured by processing, for example, a single SOI (Silicon On Insulator) substrate by etching or the like, and then forming the reflecting surface 14 and the driving units 140a and 140b on the processed substrate.

[0038] The SOI substrate includes a silicon support layer 301 made of single-crystal silicon (Si), a silicon oxide layer 302 formed on the silicon support layer 301 (on the +Z direction side), and a silicon active layer 303 made of single-crystal silicon formed on the silicon oxide layer 302. The silicon oxide layer 302 can also be called a BOX (Buried Oxide) layer.

[0039] The thickness of the silicon active layer 303 in the Z direction is smaller than that in the X or Y direction. Therefore, a member consisting of only the silicon active layer 303, which is obtained by etching away the silicon support layer 301 and the silicon oxide layer 302 from the SOI substrate, has low rigidity in the Z direction.

[0040] The support portion 150 is made up of a silicon support layer 301, a silicon oxide layer 302, a silicon active layer 303, etc., and has higher rigidity than a member made up of only the silicon active layer 303.

[0041] The reflecting section 120 includes a silicon active layer 303. The reflecting section 120 has a reflecting surface 14 formed on its surface (+Z direction side) by depositing a thin film including aluminum, gold, silver, a dielectric multilayer film, etc. The reflecting section 120 has a reinforcing thick reflecting section portion 121 on the surface opposite to the reflecting surface 14. The thick reflecting section portion 121 is formed by patterning the silicon support layer 301 and the silicon oxide layer 302 by etching.

[0042] Similar to the reflector thick portion 121, the axial connection thick portions 161a and 161b shown in FIG. 1 can also be formed by patterning the silicon support layer 301 and the silicon oxide layer 302 by etching.

[0043] The movable parts 130a and 130b are formed by patterning the silicon active layer 303 through etching. The movable parts 130a and 130b are made up of only the silicon active layer 303, and therefore have low rigidity and elasticity.

[0044] Piezoelectric elements 141a and 142a, and 141b and 142b are formed by laminating a lower electrode, a piezoelectric portion, and an upper electrode, respectively. The upper electrode and lower electrode are made of gold (Au), platinum (Pt), or the like. The piezoelectric portion is made of, for example, PZT (lead zirconate titanate), a piezoelectric material. When a positive or negative voltage is applied in the polarization direction, the piezoelectric portion undergoes deformation (e.g., expansion and contraction) proportional to the potential of the applied voltage, exhibiting the so-called inverse piezoelectric effect.

[0045] The movable parts 130a and 130b are elastically deformed by the deformation of the piezoelectric elements 141a and 142a, and 141b and 142b.

[0046] The movable device 13 configured as above is operated by applying a drive voltage from the electrode terminals to the drive units 140a and 140b. The drive voltage has, for example, a sinusoidal waveform and a frequency of, for example, 600 Hz.

[0047] Specifically, of the piezoelectric elements 141a and 142a, and 141b and 142b, the piezoelectric elements 141a and 142b are designated as a first piezoelectric element group, and the piezoelectric elements 142a and 141b are designated as a second piezoelectric element group, and drive voltages with inverted voltage levels are applied to the first piezoelectric element group and the second piezoelectric element group. As a result, the drive units 140a and 140b themselves expand and contract, periodically deforming the movable beams 131a and 132b and the movable beams 132a and 131b in opposite directions to each other. As a result, the reflecting unit 120 oscillates around the oscillation axis E.

[0048] In the above embodiment, a piezoelectric optical deflector is shown, in which a driving force is obtained by a piezoelectric element, but the optical deflector may be driven by any driving method. Examples of driving methods other than the piezoelectric method include an electrostatic method.

[0049] <Action of Movable Device 13> Next, the operation of the movable device 13 will be described. First, before describing the operation of the movable device 13, the configuration of a movable device 13X according to a comparative example will be described with reference to Fig. 3. Fig. 3 is a diagram showing the configuration of the movable device 13X. Fig. 3(a) is a plan view, Fig. 3(b) is a rear view, and Fig. 3(c) is a partial enlarged view of region B in Fig. 3(b).

[0050] The movable device 13X according to the comparative example illustrates an optical deflector when the embodiment is not applied. In Fig. 3, to facilitate comparison with the movable device 13, components having the same functions as those of the movable device 13 are assigned the same part numbers.

[0051] As shown in FIG. 3, the movable device 13X has connecting portions 160a' and 160b'. The connecting portion 160a' is a portion that connects the reflecting portion 120 and the movable portion 130a, and the connecting portion 160b' is a portion that connects the reflecting portion 120 and the movable portion 130b. The connecting portion 160a' has a thick portion 161a' on the -Z direction side that suppresses abnormal oscillation of the reflecting portion 120. The connecting portion 160b' has a thick portion 161b' on the -Z direction side that suppresses abnormal oscillation of the reflecting portion 120.

[0052] However, unlike the first connecting portion 160a according to the embodiment, the connecting portion 160a' does not have the axially extending portion 180a. Similarly, unlike the first connecting portion 160b according to the embodiment, the connecting portion 160b' does not have the axially extending portion 180b.

[0053] In the configuration of the movable device 13X, when the reflecting unit 120 is swung at a large swing angle, stress is concentrated at the ends of the thick-walled portions 161a' and 161b' due to elastic deformation of the connecting portions 160a' and 160b', and the connecting portions 160a' and 160b' may be broken by the stress. The stress concentration point 300 shown in Figure 3(c) is a point corresponding to the corner of the thick-walled portion 161b' in the connecting portion 160b', and is an example of a point where stress is particularly likely to concentrate when the reflecting unit 120 is swung at a large swing angle.

[0054] In order to avoid damage to the connecting portions 160a' and 160b' due to stress concentration, it is preferable to suppress elastic deformation of the connecting portions 160a' and 160b' by limiting the swing angle of the reflecting portion 120. As a result, there are cases where the movable device 13X cannot deflect light at a large swing angle.

[0055] In contrast to this, in this embodiment, the first connecting portion 160a includes an axial extending portion 180a, and the end of the axial connecting thick portion 161a is included in the axial extending portion 180a. The first connecting portion 160b includes an axial extending portion 180b, and the end of the axial connecting thick portion 161b is included in the axial extending portion 180b.

[0056] 4A and 4B are diagrams showing elastic deformation distributions near the connection portion. Fig. 4A is a first example, a contour diagram of the elastic deformation distribution when the reflecting portion 120 is swung in a configuration without axial extending portions 180a and 180b. Fig. 4B is a second example, a contour diagram of the elastic deformation distribution when the reflecting portion 120 is swung in a configuration with axial extending portions 180a and 180b.

[0057] In connection portion 160a' shown in Fig. 4A, portion 41 is a portion that experiences large elastic deformation, and portion 42 is a portion that experiences small elastic deformation. In first connection portion 160a shown in Fig. 4B, portion 43 is a portion that experiences large elastic deformation, and portions 44 and 45 are portions that experience small elastic deformation.

[0058] As can be seen from FIGS. 4A and 4B, by extending the axial extension portion 180a from the movable beam 131a toward the -X direction side, the elastic deformation of the first connection portion 160a is reduced. As a result, the stress in each of the axial connection thick portion 161a and the end of the axial connection thick portion 161a is reduced.

[0059] Similarly, since the axial extension portion 180b extends from the movable beam 131b in the +X direction, the elastic deformation of the first connection portion 160a when the reflecting portion 120 is swung is reduced. As a result, the stress at each end of the axial connection thick portion 161b and the axial connection thick portion 161b is reduced.

[0060] Here, FIG. 4C is a diagram showing an example of the relationship between the length of the axial extension portion 180b and the breaking swing angle. The breaking swing angle means the swing angle when the movable portions 130a and 130b are broken.

[0061] In FIG. 4C, the horizontal axis represents the ratio d / w of the length d of the axial extension portion 180b in the X direction to the width w of the movable beam 131b in the X direction (see FIG. 1(c)), and the vertical axis represents the breaking swing angle. However, the vertical axis is a value normalized by the breaking swing angle when the length d is 0.

[0062] As shown in FIG. 4C, as the length d of the axial extension portion 180b increases and the ratio d / w increases, the breaking swing angle increases. That is, the larger the ratio d / w, the larger the swing angle at which the reflecting portion 120 can be swung.

[0063] In the X direction, it is preferable to provide a predetermined interval between the adjacent movable beams, the movable beam 131b and the movable beam 132b. Therefore, when the length of the predetermined interval is G, it is preferable to satisfy the condition 0 < d < G. Also, in the case of the length L of the movable beams 131b and 132b in the Y direction, it is preferable that the length e of the axial extension portion in the Y direction satisfies the condition 0 < e < L / 2. Although the axial extension portion 180b has been described as an example, the same applies to the axial extension portion 180a.

[0064] <Effect of Movable Device 13> As described above, the movable device 13 according to this embodiment includes the movable part 130a, one end of which is connected to the reflecting part 120 via the first connecting part 160a, and the support part 150, the other end of which is connected to the movable part 130a via the second connecting part 170a. The movable part 130a has a linear movable beam 131a extending in the Y direction (a direction intersecting the oscillation axis E), and the first connecting part 160a includes an axial extending part 180a extending from the movable beam 131a in the X direction (an axial direction along the oscillation axis E), and a thick axial connecting part 161a that is partially provided on the axial extending part 180a and extends in the X direction.

[0065] In this configuration, the end of the axial connection thick portion 161a is included in the axial extending portion 180a. As described above with reference to Fig. 4B, since the axial extending portion 180a extends in the -X direction from the movable beam 131a, elastic deformation when the reflecting portion 120 is swung is small.

[0066] Therefore, stress at each end of the axial connection thick portion 161a and the axial connection thick portion 161b caused by elastic deformation can be reduced. The same applies to the first connection portion 160b including the axial extending portion 180b and the axial connection thick portion 161b.

[0067] This can prevent damage to the movable device 13. Furthermore, the limit on the swing angle can be relaxed to increase the swing angle of the reflecting section 120, and the movable device 13 can deflect light at a larger swing angle.

[0068] In addition, when multiple axial extension portions such as axial extension portions 180a and 180b are provided, if the length d differs for each axial extension portion or the length e differs for each axial extension portion, the stress generated by elastic deformation will be unevenly distributed, and fracture may occur in areas where the stress is greatest.

[0069] Therefore, in order to suitably improve the fracture swing angle, it is preferable to make the lengths d and e of the multiple axially extending portions 180a and 180b equal to each other so as to eliminate uneven distribution of stress.

[0070] 4B, in the first connecting portion 160a and the first connecting portion 160b, the closer to the oscillation axis E, the larger the elastic deformation caused by the oscillation of the reflecting portion 120. Therefore, by providing the axial direction connection thick-walled portion 161a in a position as far as possible from the oscillation axis E in the first connecting portion 160a, and by providing the axial direction connection thick-walled portion 161b in a position as far as possible from the oscillation axis E in the first connecting portion 160b, the breaking oscillation angle can be more suitably increased.

[0071] Furthermore, the length (width) of each of the axial connection thick portions 161a and 161b along the Y direction may be less than the length e of the axial extension portions 180a and 180b in the Y direction. However, since it is preferable to provide the axial connection thick portions 161a and 161b at positions as far as possible from the oscillation axis E within the movable beams 131a and 131b, it is preferable that the length of each of the axial connection thick portions 161a and 161b in the Y direction be e / 2 or less.

[0072] Furthermore, when a semiconductor process is applied as a manufacturing method for the movable device 13, it is more preferable to make the thicknesses of the axial connection thick portions 161a and 161b and the reflective portion thick portion 121 equal, as this simplifies manufacturing and reduces costs.

[0073] Furthermore, if the thicknesses of the axial connecting thick portions 161a and 161b and the thick portion 121 for the reflecting portion are all made equal, there will be no steps between the thick portions, which will avoid stress concentration and allow the fracture swing angle to be made larger.

[0074] <Modification of the first embodiment> Here, Fig. 5 is a diagram illustrating an example of the configuration of a movable device 13a according to a modified example of the first embodiment. Fig. 5(a) is a plan view, and Fig. 5(b) is a rear view. In Fig. 5, components having the same functions as those of the movable device 13 according to the first embodiment are assigned the same part numbers. This also applies to each embodiment and each modified example described below.

[0075] 5, one end of movable section 130a in movable device 13a is connected to reflecting section 120 via first connecting section 160a, and the other end is connected to supporting section 150 via second connecting section 170aa. Furthermore, one end of movable section 130b is connected to reflecting section 120 via first connecting section 160b, and the other end is connected to supporting section 150 via second connecting section 170ba.

[0076] The second connection portion 170aa is a portion where the support portion 150 and the movable portion 130a are connected. The support portion 150 has a cross-direction support frame 152a extending in the Y direction, and the movable portion 130a is connected to the cross-direction support frame 152a via the second connection portion 170aa.

[0077] The second connection portion 170aa also includes an axial extension portion 190a extending from the movable beam 132a in the +X direction. The axial extension portion 190a is provided at an end of the second connection portion 170aa on the opposite side in the X direction from the side where the movable beam 132a is connected to the support portion 150, and is a portion that protrudes from the movable beam 132a in the +X direction. The axial extension portion 190a is an example of an axial connection extension portion.

[0078] 5(a), the second connection portion 170aa corresponds to the range in the X direction from the portion where the movable beam 132a connects to the support portion 150 to the end of the axially extending portion 190a provided on the opposite side in the X direction from the side where the movable beam 132a connects to the support portion 150. In addition, in the Y direction, the range corresponds to a width that is approximately equal to the width where the movable beam 132a connects to the support portion 150.

[0079] The second connection portion 170ba is a portion where the support portion 150 and the movable portion 130b are connected. The support portion 150 has a cross-direction support frame 152b extending in the Y direction, and the movable portion 130b is connected to the cross-direction support frame 152b via the second connection portion 170ba.

[0080] The second connection portion 170ba also includes an axial extension portion 190b extending from the movable beam 132b in the −X direction. The axial extension portion 190b is provided at an end of the second connection portion 170ba on the opposite side in the X direction from the side where the movable beam 132b is connected to the support portion 150, and is a portion that protrudes from the movable beam 132b in the −X direction. The axial extension portion 190b is an example of an axial connection extension portion.

[0081] 5(a), the second connection portion 170ba corresponds to the range in the X direction from the portion where the movable beam 132b connects to the support portion 150 to the end of the axially extending portion 190b provided on the opposite side in the X direction from the side where the movable beam 132b connects to the support portion 150. In addition, in the Y direction, the range corresponds to a width that is approximately equal to the width where the movable beam 132b connects to the support portion 150.

[0082] 5(b), the second connecting portion 170aa includes an axial connection thick portion 171aa on the −Z direction side of the movable beam 132a. The axial connection thick portion 171aa is a portion of the second connecting portion 170aa that is thicker than the remaining portion of the second connecting portion 170aa. The axial connection thick portion 171aa is a portion that is included in the axial extending portion 190a in the X direction and extends in the X direction. Because the axial connection thick portion 171aa is formed thick, it has the function of suppressing distortion of the second connecting portion 170aa and suppressing abnormal oscillation of the reflecting portion 120, such as a shift in resonance frequency, that is caused by distortion of the second connecting portion 170aa.

[0083] Similarly, the second connection portion 170ba includes an axial connection thick portion 171ba on the -Z direction side of the movable beam 132b. The axial connection thick portion 171ba is a portion of the second connection portion 170ba that is thicker than the portions other than the axial connection thick portion 171ba. The axial connection thick portion 171ba is a portion that is included in the axial extending portion 190b in the X direction and extends in the X direction. Because the axial connection thick portion 171ba is formed thick, it has the function of suppressing distortion of the second connection portion 170ba and suppressing abnormal oscillation of the reflecting portion 120, such as a shift in resonance frequency, that is caused by distortion of the second connection portion 170ba.

[0084] The thickness of each of the axial connecting thick portions 171aa and 171ba is approximately equal to the thickness of the support portion 150. Therefore, it can be said that each of the axial connecting thick portions 171aa and 171ba is connected to the support portion 150.

[0085] In this modification, the end of the axial connection thick portion 171aa is included in the axial extending portion 190a, and the end of the axial connection thick portion 171ba is included in the axial extending portion 190b. The axial extending portion 190a extends in the +X direction from the movable beam 132a, and the axial extending portion 190b extends in the -X direction from the movable beam 132b, so that elastic deformation when the reflecting portion 120 is swung is small.

[0086] Therefore, stress on the axial connection thick portion 171aa, the axial connection thick portion 171ba, and their respective ends caused by elastic deformation can be reduced. This relaxes the restriction on the swing angle, allowing the swing angle of the reflecting portion 120 to be expanded, and light deflection can be performed at a larger swing angle by the movable device 13a. Note that other effects and advantages are the same as those shown in the first embodiment.

[0087] [Second embodiment] Next, a movable device 13b according to a second embodiment will be described. Figure 6 is a diagram illustrating an example of the configuration of the movable device 13b. Figure 6(a) is a plan view, and Figure 6(b) is a rear view.

[0088] 6, the movable device 13b includes a folded structure in which the ends of adjacent movable beams 131a and 132a of the movable beams 131a and 132a are connected to each other via a connecting portion 200a. The movable device 13b also includes a folded structure in which the ends of adjacent movable beams 131b and 132b of the movable beams 131b and 132b are connected to each other via a connecting portion 200b.

[0089] The connecting portion 200a is a portion where the movable beam 131a and the movable beam 132a are connected. The connecting portion 200a also includes an axial extending portion 210a extending from the movable beam 131a in the +X direction, and an axial extending portion 220a extending from the movable beam 132a in the -X direction. The axial extending portions 210a and 220a are each an example of an axial connecting extending portion.

[0090] The axial extending portion 210a is provided at the end of the connecting portion 200a on the reflecting portion 120 side in the X direction, and is a portion that protrudes in the +X direction from the movable beam 131a. The axial extending portion 220a is provided at the end of the connecting portion 200a on the opposite side to the reflecting portion 120 side in the X direction, and is a portion that protrudes in the -X direction from the movable beam 132a.

[0091] 6(a), the connecting portion 200a corresponds to the range in the X direction from the end of the axially extending portion 210a on the +X direction side to the end of the axially extending portion 220a on the -X direction side, and in the Y direction, corresponds to the range approximately equal to the width of the axially extending portions 210a and 220a in the Y direction.

[0092] The connecting portion 200b is a portion where the movable beam 131b and the movable beam 132b are connected. The connecting portion 200b also includes an axial extending portion 210b extending from the movable beam 131b in the -X direction and an axial extending portion 220b extending from the movable beam 132b in the +X direction. The axial extending portions 210b and 220b are each an example of an axial connecting extending portion.

[0093] The axial extending portion 210b is provided at the end of the connecting portion 200b on the reflecting portion 120 side in the X direction, and is a portion that protrudes in the -X direction from the movable beam 131b. The axial extending portion 220b is provided at the end of the connecting portion 200b on the opposite side to the reflecting portion 120 side in the X direction, and is a portion that protrudes in the +X direction from the movable beam 132b.

[0094] 6(a), the connecting portion 200b corresponds to the range in the X direction from the end of the axially extending portion 210b on the -X direction side to the end of the axially extending portion 220b on the +X direction side, and in the Y direction, corresponds to the range approximately equal to the width of the axially extending portions 210a and 220a in the Y direction.

[0095] 6(b), the connecting portion 200a includes an axial connecting thick portion 201a on the -Z direction side of the movable beam 131a. The axial connecting thick portion 201a is a portion that is thicker than the other portions of the connecting portion 200a. The axial connecting thick portion 201a is a portion that is included in the connecting portion 200a and the axial extending portions 210a and 220a in the X direction and extends in the X direction. Because the axial connecting thick portion 201a is formed thick, it has the function of suppressing distortion of the connecting portion 200a and suppressing abnormal oscillation of the reflecting portion 120, such as a shift in resonance frequency, caused by distortion of the connecting portion 200a.

[0096] Similarly, the connecting portion 200b includes an axial connecting thick portion 201b on the -Z direction side of the movable beam 131b. The axial connecting thick portion 201b is a portion that is thicker than the other portions of the connecting portion 200b. The axial connecting thick portion 201b is a portion that is included in the connecting portion 200b and the axial extending portions 210b and 220b in the X direction and extends in the X direction. Because the axial connecting thick portion 201b is formed thick, it has the function of suppressing distortion of the connecting portion 200b and suppressing abnormal oscillation of the reflecting portion 120, such as a shift in resonance frequency, caused by distortion of the connecting portion 200b.

[0097] In this embodiment, the end of the axial connection thick portion 201a is included in each of the axial extending portions 210a and 220a, and the end of the axial connection thick portion 201b is included in each of the axial extending portions 210b and 220b. The axial extending portion 210a extends in the +X direction from the movable beam 131a, and the axial extending portion 220a extends in the -X direction from the movable beam 132a. The axial extending portion 210b extends in the -X direction from the movable beam 131b, and the axial extending portion 220b extends in the +X direction from the movable beam 132b. Therefore, the axial extending portions 210a, 220a, 210b, and 220b each undergo small elastic deformation when the reflecting portion 120 is oscillated.

[0098] Therefore, it is possible to reduce the stress at each end of the axial connecting thick portion 201a and the axial connecting thick portion 201b that occurs due to elastic deformation, thereby relaxing the restriction on the swing angle and increasing the swing angle of the reflecting portion 120, and light deflection can be performed at a larger swing angle by the movable device 13b.

[0099] In addition, since distortion increases on the oscillation axis E side of the connecting portions 200a and 200b, if the axial connecting thick portions 201a and 201b are brought closer to the oscillation axis, concentrated stress at the tip of the thick portions increases. Therefore, to obtain a better stress reduction effect, it is preferable to provide the axial connecting thick portions 201a and 201b at positions away from the oscillation axis E.

[0100] Moreover, the other effects and advantages are the same as those shown in the first embodiment.

[0101] <Modification of the second embodiment> 7A and 7B are diagrams illustrating an example of the configuration of a movable device 13c according to a modified example of the second embodiment, in which Fig. 7A is a plan view and Fig. 7B is a rear view.

[0102] 7, one end of movable section 130a in movable device 13c is connected to reflecting section 120 via first connecting section 160a, and the other end is connected to supporting section 150 via second connecting section 170aa. Furthermore, one end of movable section 130b is connected to reflecting section 120 via first connecting section 160b, and the other end is connected to supporting section 150 via second connecting section 170ba.

[0103] The configurations and functions of the second connecting portions 170aa and 170ba are similar to those described in the modified example of the first embodiment (see FIG. 5), and therefore a duplicated description will be omitted here. Also, the effect of the movable device 13c is similar to that of the movable device 13a according to the modified example of the first embodiment, and therefore a duplicated description will be omitted.

[0104] [Third embodiment] Next, a movable device 13d according to a third embodiment will be described. Figure 8 is a diagram illustrating an example of the configuration of the movable device 13d. Figure 8(a) is a plan view, and Figure 8(b) is a rear view.

[0105] 8, one end of the movable portion 130a in the movable device 13d is connected to the reflecting portion 120 via a first connecting portion 160ad, and one end of the movable portion 130b is connected to the reflecting portion 120 via a first connecting portion 160bd.

[0106] The first connection portion 160ad is a portion where the reflecting portion 120 and the movable portion 130a are connected. The first connection portion 160ad also includes a cross-direction extending portion 230a extending from the movable beam 131a in the Y direction (a cross direction that crosses the oscillation axis E). The cross-direction extending portion 230a is provided at an end of the first connection portion 160ad on the side where the movable beam 131a is connected to the reflecting portion 120 in the Y direction, and is a portion that protrudes from the movable beam 131a in the +Y direction. The cross-direction extending portion 230a is an example of a cross-direction connecting extending portion.

[0107] 8(a), the first connection portion 160ad corresponds to the range in the X direction from the portion where the movable beam 131a is connected to the reflecting portion 120 to the end of the axial extending portion 180a provided on the opposite side in the X direction from the side where the movable beam 131a is connected to the reflecting portion 120. In addition, in the Y direction, the range corresponds to the range from the end of the cross-direction extending portion 230a in the Y direction to the end on the -Y direction side (opposite the end of the cross-direction extending portion 230a in the +Y direction) of the portion where the movable beam 131a is connected to the reflecting portion 120.

[0108] The first connection portion 160bd is a portion where the reflecting portion 120 and the movable portion 130b are connected. The first connection portion 160bd also includes a cross-direction extending portion 230b extending from the movable beam 131b in the Y direction. The cross-direction extending portion 230b is provided at an end of the first connection portion 160bd on the side where the movable beam 131b is connected to the reflecting portion 120 in the Y direction, and is a portion that protrudes from the movable beam 131b in the +Y direction.

[0109] 8(a), the first connection portion 160bd corresponds to the range in the X direction from the portion where the movable beam 131b is connected to the reflecting portion 120 to the end of the axial extending portion 180b provided on the opposite side in the X direction from the side where the movable beam 131b is connected to the reflecting portion 120. In addition, in the Y direction, the range corresponds to the range from the end of the cross-direction extending portion 230b in the Y direction to the end on the +Y direction side (opposite the end of the cross-direction extending portion 230b in the -Y direction) of the portion where the movable beam 131b is connected to the reflecting portion 120.

[0110] 8(b), the first connection portion 160ad includes a cross-direction connection thick portion 161ad on the -Z direction side of the movable beam 131a. The cross-direction connection thick portion 161ad is thicker than the other portions of the first connection portion 160ad. The cross-direction connection thick portion 161ad is partly included in the cross-direction extending portion 230a in the Y direction and extends in the X direction. Because the cross-direction connection thick portion 161ad is formed thick, it has the function of suppressing distortion of the first connection portion 160ad and suppressing abnormal oscillation of the reflecting portion 120, such as a shift in resonance frequency, caused by distortion of the first connection portion 160ad.

[0111] Similarly, the first connection portion 160bd includes a cross-direction connection thick portion 161bd on the -Z direction side of the movable beam 131b. The cross-direction connection thick portion 161bd is a portion of the first connection portion 160bd that is thicker than the portions other than the cross-direction connection thick portion 161bd. The cross-direction connection thick portion 161bd is a portion that is included in the cross-direction extending portion 230b in the Y direction and extends in the X direction. Because the cross-direction connection thick portion 161bd is formed thick, it has the function of suppressing distortion of the first connection portion 160bd and suppressing abnormal oscillation of the reflecting portion 120, such as a shift in resonance frequency, caused by distortion of the first connection portion 160bd.

[0112] The thickness of each of the intersecting direction connecting thick portions 161ad and 161bd is approximately equal to the thickness of the reflector-use thick portion 121. Therefore, it can be said that each of the intersecting direction connecting thick portions 161ad and 161bd is connected to the reflector-use thick portion 121.

[0113] Here, Fig. 9 is a partially enlarged view of the vicinity of region C in Fig. 8(a). Outline 90 indicates the end face portion of the outline of first connection portion 160bd, and outline 91 indicates the end face portion of the outline of first connection portion 160b shown in the first embodiment. As shown in Fig. 9, outline 90 protrudes in the -Y direction relative to outline 90. This protruding portion corresponds to intersecting direction extending portion 230b.

[0114] In this embodiment, the end of the intersecting direction connecting thick portion 161ad is included in the intersecting direction extending portion 230a, and the end of the intersecting direction connecting thick portion 161bd is included in the intersecting direction extending portion 230b. Since the intersecting direction extending portion 230a extends from the movable beam 131a in the +Y direction, and the intersecting direction extending portion 230b extends from the movable beam 131b in the -Y direction, elastic deformation when the reflecting portion 120 is swung is small.

[0115] Therefore, stress on the intersecting direction connecting thick portion 161ad, the intersecting direction connecting thick portion 161bd, and their respective ends caused by elastic deformation can be reduced. This relaxes the restriction on the swing angle, allowing the swing angle of the reflecting portion 120 to be expanded, and light deflection can be performed at a larger swing angle by the movable device 13d. Note that other effects and advantages are the same as those shown in the first embodiment.

[0116] <Modification of the third embodiment> 10A and 10B are diagrams illustrating an example of the configuration of a movable device 13e according to a modified example of the third embodiment, in which Fig. 10A is a plan view and Fig. 10B is a rear view.

[0117] 10, one end of the movable section 130a in the movable device 13e is connected to the reflecting section 120 via a first connecting section 160ad, and the other end is connected to the supporting section 150 via a second connecting section 170ae. In addition, one end of the movable section 130b is connected to the reflecting section 120 via a first connecting section 160bd, and the other end is connected to the supporting section 150 via a second connecting section 170be.

[0118] The second connecting portion 170ae has a cross-direction extending portion 240a and a cross-direction connecting thick portion 171ae, and the second connecting portion 170be has a cross-direction extending portion 240b and a cross-direction connecting thick portion 171be.

[0119] The configuration and function of the second connecting portion 170ae are the same as those of the first connecting portion 160ad. The configuration and function of the second connecting portion 170be are the same as those of the first connecting portion 160bd. Therefore, a duplicated description will be omitted here. Furthermore, the effect of the movable device 13e is the same as that of the movable device 13d according to the third embodiment, so a duplicated description will be omitted.

[0120] [Fourth embodiment] Next, a movable device 13f according to a fourth embodiment will be described. Figure 11 is a diagram illustrating an example of the configuration of the movable device 13f. Figure 11(a) is a plan view, and Figure 11(b) is a rear view.

[0121] 11, the movable device 13f includes a folded structure in which the ends of adjacent movable beams 131a and 132a are connected to each other via a connecting portion 200af. The movable device 13f also includes a folded structure in which the ends of adjacent movable beams 131b and 132b are connected to each other via a connecting portion 200bf.

[0122] The connecting portion 200af is a portion where the movable beam 131a and the movable beam 132a are connected. The connecting portion 200af includes a cross-direction extending portion 250a extending from the movable beam 131a in the -Y direction. The cross-direction extending portion 250a is provided at an end of the connecting portion 200af on the opposite side in the Y direction from the side where the movable beam 131a is connected to the reflecting portion 120, and is a portion that protrudes from the movable beam 131a in the -Y direction.

[0123] The connecting portion 200af also includes a cross-direction extending portion 260a extending from the movable beam 132a in the -Y direction. The cross-direction extending portion 260a is provided at the end of the connecting portion 200af on the opposite side in the Y direction from the side where the movable beam 132a is connected to the support portion 150, and is a portion that protrudes from the movable beam 132a in the -Y direction.

[0124] 11(a), the connecting portion 200af corresponds to the range in the X direction from the end of the axially extending portion 210a on the +X direction side to the end of the axially extending portion 220a on the -X direction side, and in the Y direction, corresponds to the range approximately equal to the width of the axially extending portions 210a and 220a in the Y direction.

[0125] The connecting portion 200bf is a portion where the movable beam 131b and the movable beam 132b are connected. The connecting portion 200bf includes an intersecting direction extending portion 250b extending from the movable beam 131b in the +Y direction. The intersecting direction extending portion 250b is provided at an end of the connecting portion 200bf on the opposite side in the Y direction from the side where the movable beam 131b is connected to the reflecting portion 120, and is a portion that protrudes from the movable beam 131b in the +Y direction.

[0126] The connecting portion 200bf also includes a cross-direction extending portion 260b extending from the movable beam 132b in the +Y direction. The cross-direction extending portion 260b is provided at the end of the connecting portion 200bf on the opposite side in the Y direction from the side where the movable beam 132b is connected to the support portion 150, and is a portion that protrudes in the +Y direction from the movable beam 132b.

[0127] 11(a), the connecting portion 200bf corresponds to the range in the X direction from the end of the axially extending portion 210b on the -X direction side to the end of the axially extending portion 220b on the +X direction side, and in the Y direction, corresponds to the range approximately equal to the width of the axially extending portions 210a and 220a in the Y direction.

[0128] 11(b), the connecting portion 200af includes a cross-direction connecting thick portion 201af on the -Z direction side of each of the movable beams 131a and 132a. The cross-direction connecting thick portion 201af is thicker than the other portions of the connecting portion 200af. The cross-direction connecting thick portion 201af is included in each of the connecting portion 200af and the cross-direction extending portions 250a and 260a in the Y direction and extends in the X direction. Because the cross-direction connecting thick portion 201af is formed thick, it has the function of suppressing distortion of the connecting portion 200af and suppressing abnormal oscillation of the reflecting portion 120, such as a shift in resonance frequency, caused by distortion of the connecting portion 200af.

[0129] Similarly, the connecting portion 200af includes a transverse direction connecting thick portion 201bf on the -Z direction side of each of the movable beams 131b and 132b. The transverse direction connecting thick portion 201bf is thicker than the other portions of the connecting portion 200bf. The transverse direction connecting thick portion 201bf is included in each of the connecting portion 200bf and the transverse direction extending portions 250b and 260b in the Y direction and extends in the X direction. Because the transverse direction connecting thick portion 201bf is formed thick, it has the function of suppressing distortion of the connecting portion 200bf and suppressing abnormal oscillation of the reflecting portion 120, such as a shift in resonance frequency, caused by distortion of the connecting portion 200bf.

[0130] In this embodiment, the end of the cross-direction connecting thick portion 201af is included in each of the cross-direction extending portions 250a and 260a, and the end of the cross-direction connecting thick portion 201bf is included in each of the cross-direction extending portions 250b and 260b. The cross-direction extending portion 250a extends in the -Y direction from the movable beam 131a, and the cross-direction extending portion 260a extends in the -Y direction from the movable beam 132a. The cross-direction extending portion 250b extends in the +Y direction from the movable beam 131b, and the cross-direction extending portion 260b extends in the +Y direction from the movable beam 132b. Therefore, elastic deformation when the reflecting portion 120 is swung is small.

[0131] Therefore, stresses on the cross-direction connecting thick portions 201af and 201bf and their respective ends that occur due to elastic deformation can be reduced, which relaxes restrictions on the swing angle and increases the swing angle of the reflecting unit 120, allowing the movable device 13f to deflect light at a larger swing angle.

[0132] In addition, since distortion increases on the side of the connecting portions 200af and 200bf facing the oscillation axis E, if the intersecting-direction connecting thick portions 201af and 201bf are brought closer to the oscillation axis, the concentrated stress at the tip of the thick portions increases. Therefore, in order to obtain a better stress reduction effect, it is preferable to provide the intersecting-direction connecting thick portions 201af and 201bf at positions away from the oscillation axis E.

[0133] Moreover, the other effects and advantages are the same as those shown in the first embodiment.

[0134] <Modification of the Fourth Embodiment> 12A and 12B are diagrams illustrating an example of the configuration of a movable device 13g according to a modified example of the fourth embodiment, in which Fig. 12A is a plan view and Fig. 12B is a rear view.

[0135] 12, one end of the movable section 130a in the movable device 13g is connected to the reflecting section 120 via a first connecting section 160ad, and the other end is connected to the supporting section 150 via a second connecting section 170ae. In addition, one end of the movable section 130b is connected to the reflecting section 120 via a first connecting section 160bd, and the other end is connected to the supporting section 150 via a second connecting section 170be.

[0136] The configuration and function of the second connecting portion 170ae are the same as those of the first connecting portion 160ad. The configuration and function of the second connecting portion 170be are the same as those of the first connecting portion 160bd. Therefore, a duplicated description will be omitted here. Furthermore, the effect of the movable device 13g is the same as that of the movable device 13e according to the modified example of the third embodiment, so a duplicated description will be omitted.

[0137] [Fifth embodiment] Next, a movable device 13h according to a fifth embodiment will be described. Figure 13 is a diagram illustrating an example of the configuration of the movable device 13h. Figure 13(a) is a plan view, and Figure 13(b) is a rear view.

[0138] In this embodiment, the movable part 130ha has only the movable beam 131a, and the driving part 140ha has only the piezoelectric element 141a provided on the movable beam 131a. The movable part 130hb has only the movable beam 131b, and the driving part 140hb has only the piezoelectric element 141b provided on the movable beam 131b. In this case, there may be multiple piezoelectric elements 141a. Furthermore, a piezoelectric element that does not function as a driving part, for example, for detecting the swing angle, may be provided on the movable beam 131a separately from the driving parts 140ha and 140b.

[0139] Even in the configuration in which the movable parts 130ha and 130hb each have one movable beam, by applying the axial extending parts 180a and 180b and the axial connecting thick parts 161a and 161b, it is possible to obtain the same effects as in the first embodiment. Also, in each of the above-mentioned embodiments and modifications, it is possible to obtain the same effects by using a configuration in which the movable parts 130ha and 130hb each have one movable beam.

[0140] [Other Preferred Embodiments] The movable device 13 according to the above-described embodiment can be applied to various systems and devices. Examples of application of the movable device 13 to various systems and devices will be described below.

[0141] [Optical scanning system] First, an optical scanning system to which the movable device of this embodiment is applied will be described in detail with reference to Figs. 14 to 17. Fig. 14 shows a schematic diagram of an example of an optical scanning system. As shown in Fig. 14, the optical scanning system 10 is a system that deflects light emitted from a light source device 12 by a reflecting surface 14 of a movable device 13 under the control of a control device 11, thereby optically scanning a scanned surface 15. The optical scanning system 10 is an example of an optical deflection device.

[0142] The optical scanning system 10 comprises a control device 11, a light source device 12, and a movable device 13 having a reflecting surface 14.

[0143] The control device 11 is an electronic circuit unit including, for example, a CPU (Central Processing Unit) and an FPGA (Field-Programmable Gate Array). The movable device 13 is, for example, a MEMS (Micro Electromechanical Systems) device having a reflective surface 14 that is movable. The movable device 13 is an example of an optical deflection device.

[0144] The light source device 12 is, for example, a laser device that emits a laser beam. The scanned surface 15 is, for example, a screen.

[0145] Control device 11 generates control commands for light source device 12 and movable device 13 based on the acquired optical scanning information, and outputs drive signals to light source device 12 and movable device 13 based on the control commands. Light source device 12 emits light based on the input drive signal. Movable device 13 rotationally vibrates reflective surface 14 in at least one axial direction or two axial directions based on the input drive signal.

[0146] As a result, for example, by controlling the control device 11 based on image information, which is an example of optical scanning information, the reflecting surface 14 of the movable device 13 is rotated and vibrated back and forth in two axial directions within a predetermined range, and as a result, the irradiated light from the light source device 12 incident on the reflecting surface 14 is deflected around a certain axis to perform optical scanning, thereby making it possible to project any image onto the scanned surface 15. Details of the movable device of this embodiment and details of the control by the control device will be described later.

[0147] Next, a hardware configuration of an example of the optical scanning system 10 will be described with reference to Fig. 15. Fig. 15 is a hardware configuration diagram of an example of the optical scanning system 10. As shown in Fig. 15, the optical scanning system 10 includes a control device 11, a light source device 12, and a movable device 13, which are electrically connected to each other. Of these, the control device 11 includes a CPU 20, a RAM 21 (Random Access Memory), a ROM 22 (Read Only Memory), an FPGA 23, an external I / F 24, a light source device driver 25, and a movable device driver 26.

[0148] The CPU 20 is a computing device that reads out programs and data from a storage device such as the ROM 22 onto the RAM 21, executes processing, and realizes the overall control and functions of the control device 11.

[0149] The RAM 21 is a volatile storage device that temporarily stores programs and data.

[0150] The ROM 22 is a non-volatile storage device that can retain programs and data even when the power is turned off, and stores processing programs and data that the CPU 20 executes to control each function of the optical scanning system 10.

[0151] The FPGA 23 is a circuit that outputs control signals suitable for the light source device driver 25 and the movable device driver 26 in accordance with the processing of the CPU 20 .

[0152] The external I / F 24 is, for example, an interface with an external device or a network. Examples of external devices include higher-level devices such as a PC (Personal Computer), and storage devices such as a USB memory, an SD card, a CD, a DVD, a HDD, and an SSD. Examples of networks include a CAN (Controller Area Network) or a LAN (Local Area Network) in an automobile, the Internet, etc. The external I / F 24 may have any configuration as long as it enables connection or communication with an external device, and an external I / F 24 may be provided for each external device.

[0153] The light source device driver 25 is an electric circuit that outputs a drive signal such as a drive voltage to the light source device 12 in accordance with an input control signal.

[0154] The movable device driver 26 is an electric circuit that outputs a drive signal such as a drive voltage to the movable device 13 in accordance with the input control signal.

[0155] In the control device 11, the CPU 20 acquires optical scanning information from an external device or a network via the external I / F 24. Note that any configuration may be used as long as the CPU 20 can acquire the optical scanning information, and the optical scanning information may be stored in the ROM 22 or FPGA 23 in the control device 11, or a new storage device such as an SSD may be provided in the control device 11 and the optical scanning information may be stored in the storage device.

[0156] Here, the optical scanning information is information indicating how to optically scan the scanned surface 15. For example, when an image is displayed by optical scanning, the optical scanning information is image data. Also, for example, when optical writing is performed by optical scanning, the optical scanning information is writing data indicating the writing order and writing locations. Additionally, for example, when object recognition is performed by optical scanning, the optical scanning information is irradiation data indicating the timing and irradiation range of irradiating light for object recognition.

[0157] The control device 11 can realize the following functional configuration by instructions from the CPU 20 and the hardware configuration shown in FIG.

[0158] Next, the functional configuration of the control device 11 of the optical scanning system 10 will be described with reference to Fig. 16. Fig. 16 is a functional block diagram of an example of the control device 11 of the optical scanning system.

[0159] As shown in FIG. 16, the control device 11 has a control section 30 and a drive signal output section 31 as functions.

[0160] The control unit 30 is realized by, for example, the CPU 20, the FPGA 23, etc., and acquires optical scanning information from an external device, converts the optical scanning information into a control signal, and outputs it to the drive signal output unit 31. For example, the control unit 30 acquires image data from an external device, etc. as optical scanning information, generates a control signal from the image data by performing predetermined processing, and outputs it to the drive signal output unit 31. The drive signal output unit 31 is realized by the light source device driver 25, the movable device driver 26, etc., and outputs a drive signal to the light source device 12 or the movable device 13 based on the input control signal.

[0161] The drive signal is a signal for controlling the drive of the light source device 12 or the movable device 13. For example, in the light source device 12, the drive signal is a drive voltage that controls the timing and intensity of irradiation of the light source. Also, in the movable device 13, the drive signal is a drive voltage that controls the timing and range of movement of the reflective surface 14 of the movable device 13.

[0162] Next, the process of optically scanning the surface 15 to be scanned by the optical scanning system 10 will be described with reference to Fig. 17. Fig. 17 is a flowchart showing an example of the process related to the optical scanning system.

[0163] In step S11, the control unit 30 acquires optical scanning information from an external device or the like. In step S12, the control unit 30 generates a control signal from the acquired optical scanning information and outputs the control signal to the drive signal output unit 31. In step S13, the drive signal output unit 31 outputs a drive signal to the light source device 12 and the movable device 13 based on the input control signal. In step S14, the light source device 12 emits light based on the input drive signal. Furthermore, the movable device 13 rotationally vibrates the reflecting surface 14 based on the input drive signal. By driving the light source device 12 and the movable device 13, light is deflected in any direction and optical scanning is performed.

[0164] In the optical scanning system 10, one control device 11 has the devices and functions to control the light source device 12 and the movable device 13, but the control device for the light source device and the control device for the movable device may be provided separately.

[0165] In the optical scanning system 10, the functions of the control unit 30 for the light source device 12 and the movable device 13 and the drive signal output unit 31 are provided in one control device 11, but these functions may exist separately, for example, a drive signal output device having the drive signal output unit 31 may be provided separately from the control device 11 having the control unit 30. Note that, in the optical scanning system 10, the movable device 13 having the reflective surface 14 and the control device 11 may form an optical deflection system that performs optical deflection.

[0166] In this way, by applying the movable device 13 of the embodiment to an optical scanning system, it is possible to provide an optical scanning system capable of enlarging the swing angle and performing optical scanning at a large scanning angle.

[0167] [Image projection device] Next, an image projection device to which the movable device of this embodiment is applied will be described in detail with reference to FIGS.

[0168] Fig. 18 is a schematic diagram of an embodiment of an automobile 400 equipped with a head-up display device 500, which is an example of an image projection device. Fig. 6 is a schematic diagram of an example of the head-up display device 500. The automobile 400 is an example of a moving body.

[0169] The image projection device is a device that projects an image by optical scanning, and is, for example, a head-up display device.

[0170] As shown in Fig. 18, the head-up display device 500 is installed near the windshield (windshield 401 or the like) of an automobile 400, for example. Projection light L emitted from the head-up display device 500 is reflected by the windshield 401 and directed toward an observer (driver 402) who is a user. This allows the driver 402 to visually recognize an image or the like projected by the head-up display device 500 as a virtual image. Note that a combiner may be installed on the inner wall surface of the windshield, and the user may visually recognize a virtual image by the projection light reflected by the combiner.

[0171] 19 , in a head-up display device 500, laser beams are emitted from red, green, and blue laser light sources 501R, 501G, and 501B. The emitted laser beams pass through an incident optical system including collimator lenses 502, 503, and 504 provided for each laser light source, two dichroic mirrors 505 and 506, and a light amount adjuster 507, and are then deflected by a movable device 13 having a reflecting surface 14. The deflected laser beams then pass through a projection optical system including a free-form surface mirror 509, an intermediate screen 510, and a projection mirror 511, and are projected onto a screen. In the head-up display device 500, the laser light sources 501R, 501G, and 501B, the collimator lenses 502, 503, and 504, and the dichroic mirrors 505 and 506 are unitized by an optical housing as a light source unit 530.

[0172] The head-up display device 500 projects an intermediate image displayed on an intermediate screen 510 onto a windshield 401 of an automobile 400, thereby allowing a driver 402 to visually recognize the intermediate image as a virtual image.

[0173] The color laser beams emitted from laser light sources 501R, 501G, and 501B are converted into approximately parallel beams by collimator lenses 502, 503, and 504, respectively, and then combined by two dichroic mirrors 505 and 506. The combined laser beams have their light intensity adjusted by light intensity adjustment unit 507, and are then two-dimensionally scanned by movable device 13 having reflective surface 14. Projection light L two-dimensionally scanned by movable device 13 is reflected by free-form surface mirror 509, where distortion is corrected, and then focused on intermediate screen 510, displaying an intermediate image. Intermediate screen 510 is composed of a microlens array in which microlenses are arranged two-dimensionally, and the projection light L incident on intermediate screen 510 is magnified by each microlens.

[0174] The movable device 13 reciprocates the reflective surface 14 in two axial directions, thereby two-dimensionally scanning the projection light L incident on the reflective surface 14. The drive control of this movable device 13 is performed in synchronization with the light emission timing of the laser light sources 501R, 501G, and 501B.

[0175] The above has described the head-up display device 500 as an example of an image projection device, but the image projection device may be any device that projects an image by performing optical scanning with the movable device 13 having the reflective surface 14. For example, the present invention can be similarly applied to a projector that is placed on a desk or the like and projects an image onto a display screen, or a head-mounted display device that is mounted on a mounting member that is worn on the observer's head or the like and projects an image onto a reflective / transmissive screen that the mounting member has, or projects an image using the observer's eyeball as a screen.

[0176] Furthermore, the image projection device may be mounted not only on a vehicle or a mounting member, but also on a moving body such as an aircraft, a ship, or a mobile robot, or on a non-moving body such as a work robot that operates a driving object such as a manipulator without moving from its location.

[0177] In this way, by applying the movable device 13 of the embodiment to an image projection device, it is possible to provide an image projection device capable of expanding the swing angle and performing optical scanning at a large scanning angle.

[0178] [Optical writing device] Next, an optical writing device to which the movable device of this embodiment is applied will be described in detail with reference to FIGS.

[0179] Fig. 20 shows an example of an image forming apparatus incorporating an optical writing device 600. Fig. 21 is a schematic diagram of an example of an optical writing device.

[0180] 20, the optical writing device 600 is used as a component of an image forming apparatus such as a laser printer 650 having a laser light printer function. In the image forming apparatus, the optical writing device 600 optically writes on the photosensitive drum, which is the scanned surface 15, by optically scanning the photosensitive drum with one or more laser beams.

[0181] As shown in Fig. 21, in an optical writing device 600, laser light from a light source device 12 such as a laser element passes through an imaging optical system 601 such as a collimator lens, and is then deflected in one or two axial directions by a movable device 13 having a reflecting surface 14. The laser light deflected by the movable device 13 then passes through a scanning optical system 602 consisting of a first lens 602a, a second lens 602b, and a reflecting mirror unit 602c, and is irradiated onto a surface to be scanned 15 (e.g., a photosensitive drum or photosensitive paper), thereby performing optical writing. The scanning optical system 602 forms an image of the light beam in a spot shape on the surface to be scanned 15. Furthermore, the light source device 12 and the movable device 13 having the reflecting surface 14 are driven under the control of a control device 11.

[0182] In this way, the optical writing device 600 can be used as a component of an image forming device having a laser printer function. Also, by changing the scanning optical system to enable optical scanning not only in one axis direction but also in two axes directions, the optical writing device 600 can be used as a component of an image forming device such as a laser label device that prints by deflecting and optically scanning a laser beam onto a thermal medium and heating it.

[0183] The movable device 13 having the reflective surface 14 used in the optical writing device described above consumes less power to drive than a rotating polygon mirror or the like, which is advantageous for reducing the power consumption of the optical writing device. In addition, the wind noise generated when the movable device 13 vibrates is smaller than that of a rotating polygon mirror, which is advantageous for improving the quietness of the optical writing device. The optical writing device requires significantly less installation space than a rotating polygon mirror, and the movable device 13 generates only a small amount of heat, making it easy to reduce the size, which is advantageous for reducing the size of the image forming device.

[0184] In this way, by applying the movable device 13 of the embodiment to an optical writing device, it is possible to provide an optical writing device that can widen the swing angle and perform optical scanning at a large scanning angle.

[0185] [Distance measuring device] Next, a distance measuring device to which the movable device of this embodiment is applied will be described in detail with reference to FIGS. 22 and 23. FIG.

[0186] Fig. 22 is a schematic diagram of an automobile in which a laser radar device, which is an example of a distance measurement device, is mounted in a lamp unit that mounts the automobile's headlights, and Fig. 23 is a schematic diagram of an example of a laser radar device.

[0187] A distance measuring device is a device that measures the distance to an object in a target direction, such as a laser radar device.

[0188] 22, a laser radar device 700 is mounted on, for example, an automobile 701, and measures the distance to an object 702 by optically scanning the object in the target direction and receiving reflected light from the object 702 present in the target direction. The automobile 701 is an example of a moving body.

[0189] As shown in FIG. 23 , laser light emitted from light source device 12 passes through an incident optical system composed of a collimator lens 703, which converts divergent light into approximately parallel light, and a plane mirror 704, and is scanned in one or two axes by movable device 13 having a reflective surface 14. The light then passes through a projection lens 705 and other components of a projection optical system and is irradiated onto an object 702 in front of the device. The drive of light source device 12 and movable device 13 is controlled by control device 11. The reflected light reflected by object 702 is detected by a photodetector 709. That is, the reflected light passes through a condenser lens 706 and other components of an incident light detection and light receiving optical system and is received by an image sensor 707, which outputs a detection signal to a signal processing device 708. The signal processing device 708 performs predetermined processing, such as binarization and noise reduction, on the input detection signal and outputs the result to a distance measurement circuit 710.

[0190] The distance measurement circuit 710 recognizes the presence or absence of the target object 702 based on the time difference between when the light source device 12 emits laser light and when the laser light is received by the photodetector 709, or the phase difference between each pixel of the image sensor 707 that receives the light, and further calculates distance information from the target object 702.

[0191] The movable device 13 with the reflective surface 14 is less likely to break than a polygonal mirror and is small, making it possible to provide a highly durable and compact radar device. Such a laser radar device can be attached to, for example, a vehicle, an aircraft, a ship, a robot, etc., and can optically scan a predetermined area to determine the presence or absence of obstacles and the distance to the obstacles.

[0192] The above distance measuring device has been described as an example of a laser radar device 700, but the distance measuring device may be any device that performs optical scanning by controlling a movable device 13 having a reflective surface 14 with a control device 11, and measures the distance to the target object 702 by receiving reflected light with a photodetector, and is not limited to the above-mentioned embodiment.

[0193] For example, it can be similarly applied to biometric authentication that calculates object information such as shape from distance information obtained by optically scanning a hand or face and recognizes the target by referring to the record, security sensors that recognize intruding objects by optically scanning a target range, and components of 3D scanners that calculate and recognize object information such as shape from distance information obtained by optical scanning and output it as 3D data.

[0194] In this way, by applying the movable device 13 of the embodiment to a distance measuring device, it is possible to provide a distance measuring device capable of widening the swing angle and performing optical scanning at a large scanning angle.

[0195] [Laser headlamp] Next, a laser headlamp 50 in which the movable device of the present embodiment is applied to an automobile headlight will be described with reference to Fig. 24. Fig. 24 is a schematic diagram illustrating an example of the configuration of the laser headlamp 50.

[0196] The laser headlamp 50 includes a control device 11, a light source device 12b, a movable device 13 having a reflective surface 14, a mirror 51, and a transparent plate 52.

[0197] Light source device 12b is a light source that emits blue laser light. The light emitted from light source device 12b is incident on movable device 13 and reflected by reflective surface 14. Movable device 13 moves the reflective surface in the X and Y directions based on a signal from control device 11, and performs two-dimensional scanning of the blue laser light from light source device 12b in the X and Y directions.

[0198] The scanning light from the movable device 13 is reflected by a mirror 51 and enters a transparent plate 52. The front or back surface of the transparent plate 52 is coated with a yellow phosphor. When the blue laser light from the mirror 51 passes through the yellow phosphor coating on the transparent plate 52, it changes to white, which is within the legal range for headlight colors. As a result, the front of the vehicle is illuminated with white light from the transparent plate 52.

[0199] The scanning light from the movable device 13 is scattered in a predetermined manner when passing through the phosphor of the transparent plate 52. This reduces glare on the illuminated object in front of the automobile.

[0200] When the movable device 13 is applied to an automobile headlight, the colors of the light source device 12b and the phosphor are not limited to blue and yellow, respectively. For example, the light source device 12b may be near-ultraviolet, and the transparent plate 52 may be covered with a uniform mixture of phosphors of the three primary colors of light: blue, green, and red. Even in this case, the light passing through the transparent plate 52 can be converted to white, and the front of the automobile can be illuminated with white light.

[0201] In this way, by applying the movable device 13 of the embodiment to a laser headlamp, it is possible to provide a laser headlamp that can widen the swing angle and perform optical scanning at a large scanning angle.

[0202] [Head-mounted display] Next, a head-mounted display 60 to which the movable device of the present embodiment is applied will be described with reference to Figures 25 and 26. Here, the head-mounted display 60 is a head-mounted display that can be worn on a human head, and can have a shape similar to glasses, for example. The head-mounted display will be abbreviated as HMD hereinafter.

[0203] Fig. 25 is a perspective view illustrating an example of the appearance of the HMD 60. In Fig. 25, the HMD 60 is composed of a front 60a and temples 60b, which are provided in a pair on the left and right sides and are substantially symmetrical. The front 60a can be composed of, for example, a light guide plate 61, and the optical system, control device, etc. can be built into the temples 60b.

[0204] Fig. 26 is a diagram illustrating a portion of the configuration of the HMD 60. Note that Fig. 26 illustrates the configuration for the left eye, but the HMD 60 has a similar configuration for the right eye.

[0205] The HMD 60 includes a control device 11 , a light source unit 530 , a light amount adjusting section 507 , a movable device 13 having a reflecting surface 14 , a light guide plate 61 , and a half mirror 62 .

[0206] As described above, the light source unit 530 is a unit formed by combining the laser light sources 501R, 501G, and 501B, the collimator lenses 502, 503, and 504, and the dichroic mirrors 505 and 506 using an optical housing. In the light source unit 530, the three color laser beams from the laser light sources 501R, 501G, and 501B are combined by the dichroic mirrors 505 and 506. The light source unit 530 emits the combined parallel light.

[0207] The light from the light source unit 530 is adjusted in amount by the light amount adjusting section 507 and then enters the movable device 13. The movable device 13 moves the reflecting surface 14 in the X and Y directions based on a signal from the control device 11, and performs two-dimensional scanning with the light from the light source unit 530. The drive control of this movable device 13 is performed in synchronization with the light emission timing of the laser light sources 501R, 501G, and 501B, and a color image is formed by the scanning light.

[0208] The scanning light from the movable device 13 is incident on the light guide plate 61. The light guide plate 61 reflects the scanning light on its inner wall surface and guides it to the half mirror 62. The light guide plate 61 is made of a resin or the like that is transparent to the wavelength of the scanning light.

[0209] The half mirror 62 reflects the light from the light guide plate 61 towards the back side of the HMD 60 and emits it in the direction of the eyes of a wearer 63 of the HMD 60. The half mirror 62 has, for example, a free-form surface shape. An image formed by the scanning light is formed on the retina of the wearer 63 by reflection from the half mirror 62. Alternatively, an image is formed on the retina of the wearer 63 by reflection from the half mirror 62 and the lens effect of the crystalline lens in the eyeball. Furthermore, spatial distortion of the image is corrected by reflection from the half mirror 62. The wearer 63 can observe the image formed by the light scanned in the X and Y directions.

[0210] Since 62 is a half mirror, an image based on light from the outside world and an image based on the scanning light are superimposed and observed by the wearer 63. By providing a mirror instead of half mirror 62, it is possible to eliminate light from the outside world and to configure so that only the image based on the scanning light can be observed.

[0211] In this way, by applying the movable device 13 of the embodiment to a head-mounted display, it is possible to provide a head-mounted display capable of enlarging the swing angle and performing optical scanning at a large scanning angle.

[0212] [Packaging] Next, packaging of the movable device of this embodiment will be described with reference to FIG.

[0213] FIG. 27 is a schematic diagram of an example of a packaged movable device.

[0214] 27, the movable device 13 is attached to an attachment member 802 arranged inside a packaging member 801, and is packaged by covering a portion of the packaging member with a transparent member 803 and sealing it. Furthermore, an inert gas such as nitrogen is sealed inside the package. This prevents the movable device 13 from deteriorating due to oxidation and improves its durability against environmental changes such as temperature.

[0215] Although examples of embodiments of the present invention have been described above, the present invention is not limited to such specific embodiments, and various modifications and variations are possible within the scope of the gist of the present invention as described in the claims.

[0216] In the above-described embodiment, a configuration in which a reflective surface is provided on the movable part is exemplified, but this is not limited to this, and the movable part may be provided with other optical elements such as a diffraction grating, or may be provided with both a reflective surface and other optical elements.

[0217] In the above-described embodiment, the oscillating unit has a reflecting unit, but the present invention is not limited to this. For example, the oscillating unit may have a diffraction grating, a photodiode, a heater (e.g., a heater using SiN), a light source (e.g., a surface-emitting laser), etc. instead of a reflecting unit. [Explanation of symbols]

[0218] 10 Optical scanning system 13, 13a to 13h Movable device (example of operating device, example of optical deflector) 14 Reflective surface 120 Reflecting part (an example of a swinging part) 121 Thick part for reflector (example of thick part for swinging part) 130a, 130b moving parts 131a to 132a, 131b to 132b: Movable beams (examples of beam members) 140a, 140b drive unit 141a to 142a, 141b to 142b Piezoelectric elements 150 Support part 151a, 151b Axial support frame 152a, 152b Cross direction support frame 160a, 160b First connecting portion 161a, 161b, 171aa, 171ba Axial connection thick part 161ad, 161bd Cross-direction connection thick section 170a, 170b Second connecting portion 180a, 180b, 190a, 190b Axial extension portions (examples of axial connection extension portions) 200a, 200b connection part 201a, 201b Axial connection thick wall part 201af, 201bf Cross-direction connecting thick section 210a, 210b, 220a, 220b Axial extension portions (an example of an axial connection extension portion) 230a, 230b, 240a, 240b: Intersecting extensions (examples of intersecting connection extensions) 250a, 250b, 260a, 260b: Intersecting extensions (examples of intersecting connection extensions) 301 Silicon support layer 302 silicon oxide layer 303 Silicon active layer [Prior art documents] [Patent documents]

[0219] [Patent Document 1] Japanese Patent Application Laid-Open No. 2019-144497

Claims

1. An operating device in which a swinging part can swing on a predetermined swing axis, a movable part having one end connected to the swing part via a first connection part; a support portion connected to the other end of the movable portion via a second connection portion, the movable portion has a beam member extending in a direction intersecting the oscillation axis, At least one of the first connection portion and the second connection portion is an axial connection extension portion extending in an axial direction along the swing shaft; a thick-walled axial connection thick-walled portion extending in the axial direction, the axial connection thick-walled portion is at least partially included in the axial connection extending portion, At least one of the first connection portion and the second connection portion is a cross-direction connecting extension portion extending from the beam member in the cross-direction; and a thickened cross-direction connecting portion at least partially included in the cross-direction connecting extension and extending in the axial direction.

2. the movable portion has a plurality of the beam members, A folded structure in which the ends of the adjacent beam members are connected to each other, an axial connection extension portion extending in an axial direction along the swing shaft; The operating device of claim 1, further comprising a thick-walled axial connecting thick portion that is included in each of the connecting portion between the ends of the beam members in the folded structure and the axial connecting extension portion and extends in the axial direction.

3. Each of the first connection portion and the second connection portion is The axial connection extension portion, the cross-direction connection extension portion, and the cross-direction connection thick portion are included, The movable part is a folded structure in which ends of adjacent beam members among the plurality of beam members are connected to each other, An operating device as described in claim 1 or 2, which includes a thick-walled cross-direction connecting thick portion that is included in each of the connecting portion between the ends of the beam members in the folded structure and the cross-direction connecting extension portion and extends in the axial direction.

4. The support portion has an axial support frame extending in the axial direction, The movable portion is connected to the axial support frame via the second connection portion.

4. An operating device according to any one of claims 1 to 3.

5. the support portion has a cross-direction support frame extending in the cross direction, The movable portion is connected to the cross-direction support frame via the second connecting portion.

4. An operating device according to any one of claims 1 to 3.

6. the first connection portion includes the axial connection thick-walled portion, the swinging portion includes a swinging portion thick portion that is thicker than the swinging portion, The axial connection thick portion is connected to the swing portion thick portion.

6. An operating device according to any one of claims 1 to 5.

7. the second connection portion includes the axial connection thick-walled portion, The axial connection thick portion is connected to the support portion.

7. An operating device according to any one of claims 1 to 6.

8. A device comprising the operating device according to any one of claims 1 to 7, The oscillating portion is an optical deflector having a reflecting portion.

9. A light source and and an operating device according to any one of claims 1 to 7, The operating device deflects the light emitted by the light source. Light deflection device.

10. The optical deflection device according to claim 9 Distance measuring device.

11. The optical deflection device according to claim 9 Image projection device.

12. A moving object comprising at least one of the distance measuring device according to claim 10 and the image projection device according to claim 11.

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