Apparatus and method for manufacturing a structure

Abstract

To suppress the generation of a non-coated part in a channel when manufacturing a structure by introducing slurry to channels with different thicknesses included in a base material.SOLUTION: Slurry (83) is supplied to a base material (90) by moving a piston (50) toward the base material (90), and the slurry (83) is introduced to a channel (95). The slurry (83) is introduced to a second channel (95B) with a small cross-sectional area in such a state that a first channel (95A) with a large cross-sectional area is at least partially blocked by bringing a protrusion part (60) into contact with a portion of one end (90a) of the base material (90).SELECTED DRAWING: Figure 13

Description

[Technical Field]

[0001] The present invention relates to an apparatus and method for manufacturing a structure (for example, an exhaust gas purification catalyst) that includes a substrate having channels and a functional layer (for example, a catalyst layer) provided in the channels. [Background technology]

[0002] Patent Document 1 discloses a technique for introducing a slurry into a channel of a substrate. The slurry introduced into the substrate is subjected to appropriate treatments such as drying and firing to form a functional layer with desired functions.

[0003] The substrate includes a plurality of channels formed substantially parallel to each other and extending in the axial direction of the substrate, the plurality of channels being open at one end and the other end in the axial direction of the substrate, and the slurry is pumped to one end of the substrate and introduced into each channel.

[0004] If the channel is narrow, it is difficult to introduce the slurry into the channel. It is also possible that the slurry will not reach the other end of the channel. In this case, an uncoated portion where the slurry is not supplied will be generated in the channel. If an uncoated portion is generated, the functional layer will not be able to fully perform its expected function. For example, Patent Document 1 proposes evacuating the other end of the channel when introducing the slurry into the channel. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Special Publication No. 2016-519616 Summary of the Invention [Problem to be solved by the invention]

[0006] The substrate may have channels of different thicknesses (channels with different cross-sectional areas). For example, in a metal honeycomb substrate, which is widely used as a substrate for exhaust gas catalysts, a thick first channel (with a large cross-sectional area) is located on the central axis, and a thin second channel (with a small cross-sectional area) is located around it. In this case, the introduction of the slurry into the thick first channel is promoted, while the slurry cannot be sufficiently introduced into the thin second channel. As a result, uncoated areas of the slurry may occur in the second channel, and the functional layer of the resulting structure may not function properly.

[0007] Therefore, the present invention aims to provide an apparatus and method for manufacturing a structure by introducing slurry into channels of different thicknesses contained in a substrate, which can suppress the occurrence of uncoated areas within the channels. [Means for solving the problem]

[0008] The present invention includes the following inventions. [1] An apparatus for manufacturing a structure, The structure includes a substrate having a plurality of channels extending therethrough in an axial direction, and a functional layer disposed within the channels; the channels include a first channel and a second channel having a cross-sectional area smaller than a cross-sectional area of ​​the first channel; The device comprises: a slurry supply unit that supplies a slurry containing raw materials for the functional layer to the substrate from one end in the axial direction; The slurry supply unit includes: a cylinder that communicates with the one end of the base material; a piston movably disposed within the cylinder; a protrusion supported by the piston so as to be movable relative to the piston, the protrusion protruding from the piston toward the base material within the cylinder, the protrusion is capable of contacting a portion of the one end to at least partially close the first channel; The piston is capable of supplying the slurry to the substrate by moving toward the substrate and introducing the slurry into the first channel that is not blocked by the protrusion and the second channel. [2] The device described in [1], wherein the area of ​​the tip surface contacting the one end of the protrusion is smaller than the area of ​​the region enclosed by the outer contour of the tip surface of the piston. [3] The apparatus according to [1] or [2], wherein the slurry supply unit includes a biasing means for biasing the protrusion from the piston toward the substrate. [4] The slurry supply unit includes a drive unit that drives the piston, The device described in [3], wherein the driving unit drives the piston against the biasing force from the biasing means to bring it closer to the substrate while the protrusion is in contact with the one end by the biasing means. [5] The first channel is located on a central axis of the substrate; The device according to any one of [1] to [4], wherein the protrusion is located on the central axis of the cylinder. [6] The device according to any one of [1] to [5], wherein the tip surface of the protrusion has substantially the same shape as the opening at the one end of the first channel.

[0009] The present invention includes the following inventions. [7] A method for manufacturing a structure, comprising: The structure includes a substrate having a plurality of channels extending therethrough in an axial direction, and a functional layer disposed within the channels; the channels include a first channel and a second channel having a cross-sectional area smaller than a cross-sectional area of ​​the first channel; The method comprises: a first supply step of supplying a slurry containing raw materials for the functional layer to the substrate from one end in the axial direction and introducing the slurry into the first channel and the second channel; a second supply step, which is initiated during the introduction of the slurry into the second channel, of supplying the slurry to the substrate and introducing the slurry into the second channel while the first channel is at least partially closed by contacting a protrusion with a portion of the one end. [8] In the first supplying step, the piston moves together with the protruding portion in a cylinder that communicates with the one end of the substrate until the protruding portion contacts a portion of the one end, thereby supplying the slurry contained in the cylinder to the substrate; [7] The method according to [7], wherein in the second supplying step, the piston moves within the cylinder while the protrusion is in contact with the one end and stopped, thereby supplying the slurry to the substrate. [9] The protrusion is supported by the piston so as to be movable relative to the piston, and is biased from the piston toward the one end of the base material by a biasing means; [8] The method according to [8], wherein in the second supply step, the protrusion abuts against the one end due to the biasing force of the biasing means, and the piston moves toward the one end against the biasing force.

[10] The method includes a preparation step of supplying the slurry onto the protrusion and the piston within the cylinder; the protrusion protrudes upward in a vertical direction from the piston, In the first supplying step, the piston and the protruding portion move upward in the vertical direction within the cylinder to approach the base material, The method according to [8] or [9], wherein in the preparing step, the slurry is supplied onto the piston to a position higher than the protrusion height from the piston of the protrusion.

[11] The method according to any one of [8] to

[10] , wherein in the first supplying step, the slurry is introduced into the first channel over the entire length along the axial direction.

[12] The method according to any one of [7] to

[11] , wherein the amount of the slurry supplied to the substrate in the first supply step is determined taking into consideration one or more of the cross-sectional area of ​​the first channel and the cross-sectional area of ​​the second channel, the supply rate of the slurry to the substrate in the first supply step, and the properties of the slurry. [Effects of the Invention]

[0010] According to the present invention, when a structure is manufactured by introducing a slurry into channels of different diameters contained in a substrate, it is possible to suppress the occurrence of uncoated portions in the channels. [Brief explanation of the drawings]

[0011] [Figure 1] FIG. 1 is a diagram for explaining an embodiment, and is a side view showing an example of a structure. [Figure 2] FIG. 2 is a plan view showing the structure of FIG. 1 from one side in the axial direction. [Figure 3] FIG. 3 is a partial cross-sectional view showing a cross section of the structure of FIG. [Figure 4] FIG. 4 is a perspective view for explaining a method for manufacturing the internal structure of the substrate included in the structure of FIG. [Figure 5] FIG. 5 is a diagram for explaining one embodiment, and is a schematic diagram showing the configuration of a specific example of a structure manufacturing apparatus. [Figure 6] FIG. 6 is a schematic plan view showing the configuration of a substrate processing section that can be included in the structure manufacturing apparatus of FIG. [Figure 7] FIG. 7 is a vertical cross-sectional view showing a slurry supply unit that can be included in the structure manufacturing apparatus of FIG. [Figure 8] FIG. 8 is a vertical cross-sectional view showing a part of the slurry supply unit of FIG. [Figure 9] FIG. 9 is a longitudinal sectional view corresponding to FIG. 7, and is a view for explaining the method for manufacturing the structure. [Figure 10] FIG. 10 is a longitudinal sectional view corresponding to FIG. 7, and is a view for explaining the method for manufacturing the structure. [Figure 11] FIG. 11 is a vertical cross-sectional view corresponding to FIG. 7, and is a view for explaining the method for manufacturing the structure. [Figure 12] FIG. 12 is a vertical cross-sectional view corresponding to FIG. 7, and is a view for explaining the method for manufacturing the structure. [Figure 13] FIG. 13 is a vertical cross-sectional view corresponding to FIG. 7, and is a view for explaining the method for manufacturing the structure. [Figure 14] FIG. 14 is a vertical cross-sectional view corresponding to FIG. 7, and is a view for explaining the method for manufacturing the structure. [Figure 15] FIG. 15 is a longitudinal sectional view corresponding to FIG. 7, and is a view for explaining the method for manufacturing the structure. [Figure 16] FIG. 16 is a longitudinal sectional view corresponding to FIG. 7, and is a view for explaining the method for manufacturing the structure. DETAILED DESCRIPTION OF THE INVENTION

[0012] An embodiment of the present invention will be described below with reference to the drawings. In the drawings accompanying this specification, the scale and aspect ratios have been appropriately changed and exaggerated from those of the actual objects for the sake of ease of illustration and understanding. Furthermore, configurations shown in some drawings may be omitted in other drawings.

[0013] In this specification, terms that specify shapes, geometric conditions, and their degrees, such as "parallel," "orthogonal," and "identical," as well as values ​​of lengths and angles, are not limited to their strict meanings, but are interpreted to include a range within which similar functions can be expected.

[0014] To clarify the relationship between directions between drawings, common directions are indicated in several drawings by arrows with common symbols. The tip of the arrow is the first side of each direction, and the side opposite the first side is the second side. Arrows pointing toward the paper in a direction perpendicular to the paper surface of the drawing are indicated by a symbol with a dot in a circle, as shown in Figure 1, for example. Arrows pointing toward the paper in a direction perpendicular to the paper surface of the drawing are indicated by a symbol with an x ​​in a circle, as shown in Figure 2, for example. Directions D1, D2, and D3 are mutually orthogonal directions and are used for manufacturing equipment. Directions DX, DY, and DZ are mutually orthogonal directions and are used for substrates.

[0015] Figures 1 to 16 are diagrams for explaining one embodiment. Figures 1 to 4 are diagrams showing a substrate and a structure. Figures 5 and 6 are diagrams showing a manufacturing apparatus for manufacturing the structure. Figures 7 to 16 are diagrams showing a manufacturing apparatus and a manufacturing method for manufacturing the structure.

[0016] First, the structure 80 and the substrate 90 will be described with reference to the specific example shown in FIGS.

[0017] The structure 80 includes a substrate 90 and a functional layer 82 formed on the substrate 90. The substrate 90 includes an axial direction DX. The substrate 90 includes a plurality of channels 95 extending in the axial direction DX. The functional layer 82 is disposed within the channels 95. The channels 95 include a first channel 95A and a second channel 95B. The first channel 95A and the second channel 95B have different thicknesses. The second channel 95B is thinner than the first channel 95A. The area (cross-sectional area) of the second channel 95B in a cross section perpendicular to the axial direction DX is smaller than the area (cross-sectional area) of the first channel 95A in a cross section perpendicular to the axial direction DX. The channel 95 is open at both ends in the axial direction DX.

[0018] In the illustrated example, the substrate 90 has one end 90a in the axial direction DX and another end 90b in the axial direction DX. The substrate 90 has an overall cylindrical profile. The axial direction DX is parallel to the central axis CA1 of the cylindrical shape of the substrate 90. The first channel 95A and the second channel 95B open at one end 90a of the substrate 90. The first channel 95A and the second channel 95B open at the other end 90b of the substrate 90.

[0019] The illustrated substrate 90 includes one first channel 95A. The one first channel 95A is located on a central axis CA1 of the substrate 90. The substrate 90 includes multiple second channels 95B. The second channels 95B are located around the first channel 95A so as to surround the first channel 95A.

[0020] 1 to 4 show a carrier for an exhaust gas purification catalyst as an example of a substrate 90. As shown in FIGS. 1 and 2, the substrate 90 includes an outer casing 91 and an internal structure 92. The outer casing 91 has a cylindrical shape. The internal structure 92 is held within the outer casing 91. The internal structure 92 may be a honeycomb carrier. As shown in FIGS. 2 and 3, the internal structure 92 includes a first plate 92A and a second plate 92B. The first plate 92A has a corrugated plate shape. The second plate 92B has a flat plate shape. Each channel 95 is defined by the first plate 92A and the second plate 92B. The first plate 92A and the second plate 92B form walls that define the channels 95. As shown in FIG. 4, the internal structure 92 is formed by overlapping and winding the corrugated first plate 92A and the flat second plate 92B. The thick first channel 95A is formed by the winding core and is located on the winding axis RC of the first plate material 92A and the second plate material 92B.

[0021] The outer cylinder 91, the first plate material 92A, and the second plate material 92B may be made of a material that is resistant to an environment where the outer cylinder 91 is exposed to high-temperature exhaust gas, such as a metal such as stainless steel. The first plate material 92A may be obtained by, for example, forming a flat plate into irregularities by press molding.

[0022] The length of the structure 80 and the substrate 90 in the axial direction DX may be 30 mm or more and 300 mm or less. The width or diameter of the structure 80 and the substrate 90 in a direction perpendicular to the axial direction DX may be 35 mm or more and 92 mm or less. The thickness of the first plate material 92A and the second plate material 92B may be 20 μm or more and 60 μm or less. The length of the first channel 95A and the second channel 95B in the axial direction DX may be 10 mm or more and 280 mm or less. The cross-sectional area of ​​the first channel 95A in a cross section perpendicular to the axial direction DX may be 15 mm or more. 2 More than 180mm 2 The number of the second channels 95B per square inch in the cross section perpendicular to the axial direction DX may be 200 pieces / inch or less. 2 More than 500 pieces / inch 2 The following is also acceptable.

[0023] The functional layer 82 is supported on the substrate 90 having the above-described configuration. The functional layer 82 can exhibit a predetermined function. The functional layer 82 can have various functions. The functional layer 82 can be made using various materials that have the functions expected of the functional layer 82. As shown in FIG. 3 , the functional layer 82 is supported by walls that define the channel 95. The functional layer 82 is laminated on the surfaces of the first plate material 92A and the second plate material 92B. The functional layer 82 can be formed by introducing a slurry 83 containing the raw materials of the functional layer 82 into the channel 95 of the substrate 90 to form a coating film (slurry layer) of the slurry 83 on the walls that define the channel 95, and then post-treating this coating film (slurry layer) as necessary. Examples of post-treatment include drying and firing.

[0024] In the illustrated example, the structure 80 is an exhaust gas purification catalyst or its precursor, and the functional layer 82 is a catalyst layer or its precursor layer. The functional layer 82 as a catalyst layer may contain a catalytically active component, which will be described later. The catalyst layer is formed by drying a slurry layer, if necessary, and then firing it. The thickness of the functional layer 82 as a catalyst layer may be 10 μm or more and 400 μm or less. The precursor layer of the catalyst layer includes a slurry layer before drying and a slurry layer after drying. The exhaust gas purification catalyst is a structure including a substrate 90 and a catalyst layer provided on the substrate 90. The precursor of the exhaust gas purification catalyst includes a structure including a substrate 90 and a slurry layer before drying provided on the substrate 90, and a structure including a substrate 90 and a slurry layer after drying provided on the substrate 90.

[0025] Next, the manufacturing apparatus 10 for manufacturing the structure 80 will be described with reference to the illustrated specific example. First, the overall configuration of the manufacturing apparatus 10 will be described with reference mainly to Figures 5 and 6. The manufacturing apparatus 10 manufactures the structure 80 by supplying a slurry 83 that forms a functional layer 82 to a substrate 90.

[0026] The manufacturing apparatus 10 shown in FIG. 5 includes a substrate processing unit 11 and a control unit 18. The substrate processing unit 11 processes a substrate 90. The control unit 18 is electrically connected to the substrate processing unit 11 via a wired or wireless connection. The control unit 18 controls the operation of the substrate processing unit 11. The control unit 18 may include a processing unit such as a processor (CPU: Central Processing Unit) and a storage unit such as RAM. The storage unit may store a computer program that defines the processing procedures of the manufacturing apparatus 10. The processing unit may control the operation of the substrate processing unit 11 by executing a program stored in the storage unit or by following instructions input via an interface or communication means.

[0027] As shown in FIG. 6, the substrate processing unit 11 may include a carry-in station 12 and a processing station 15. In FIG. 6, a substrate 90 to be processed is indicated by a dotted line. The carry-in station 12 transports the substrate 90 to be processed to the processing station 15. The carry-in station 12 may include a mounting unit 13 on which the substrate 90 to be processed is mounted, and a transport unit 14 that transports the substrate 90 from the mounting unit 13 to the processing station 15. In the illustrated example, the transport unit 14 includes a transport path 14A and a transport mechanism 14B. The transport path 14A may extend between the mounting unit 13 and the processing station 15. The transport path 14A defines a transport path for the substrate 90. The transport mechanism 14B moves on the transport path 14A. The transport unit 14 receives the substrate 90 from the mounting unit 13. The transport unit 14 is capable of moving along the transport path 14A while holding the substrate 90. The transport unit 14 delivers the substrate 90 held to the processing station 15. The transport mechanism 14B may hold the substrate 90 in such a way that the position of the substrate 90 in the vertical direction, the orientation of the substrate 90, and the front and back of the substrate 90 can be changed.

[0028] The processing station 15 shown in FIG. 6 includes a slurry supply unit 20. The transport unit 14 transports the substrate 90 to the slurry supply unit 20. The slurry supply unit 20 supplies the slurry to the substrate 90. The slurry supply unit 20 will be described later. The processing station 15 may also include a firing processing unit. The firing processing unit dries the substrate 90, to which the slurry has been supplied by the slurry supply unit 20, as necessary, and then fires it.

[0029] The transport unit 14 may transport the substrate 90 between the placement unit 13 and the slurry supply unit 20. The transport unit 14 may transport the substrate 90 placed on the placement unit 13 to the slurry supply unit 20, and transport the substrate 90 treated in the slurry supply unit 20 from the slurry supply unit 20 to the placement unit 13. The transport unit 14 may further transport the substrate 90 between the slurry supply unit 20 and the firing treatment unit, and between the firing treatment unit and the placement unit 13. The transport unit 14 may transport the substrate 90 from the placement unit 13 to the slurry supply unit 20, transport the substrate 90 treated in the slurry supply unit 20 from the slurry supply unit 20 to the firing treatment unit, and transport the substrate 90 after the firing treatment from the firing treatment unit to the placement unit 13.

[0030] Next, the slurry supply unit 20 will be described, mainly with reference to the specific examples shown in Figures 7 and 8. The slurry supply unit 20 supplies a slurry 83 to the substrate 90. The slurry supply unit 20 supplies the slurry 83 to the substrate 90 from one end 90a in the axial direction DX. The slurry 83 contains raw materials for the functional layer 82. The slurry 83 may optionally contain desired functional components, a carrier for holding the functional components, and a dispersion medium. The slurry 83 is usually viscous.

[0031] The slurry supply unit 20 includes, as its main components, a cylinder 30, a piston 50, and a protrusion 60. The cylinder 30 is cylindrical. The cylinder 30 is connected to one end 90a of the substrate 90. The piston 50 is movably disposed within the cylinder 30. As the piston 50 moves closer to the substrate 90 within the cylinder 30, the slurry 83 within the cylinder 30 is supplied to the substrate 90. The protrusion 60 is supported by the piston 50. The protrusion 60 is movable relative to the piston 50. The protrusion 60 protrudes from the piston 50 toward the substrate 90 within the cylinder 30. As described below, the protrusion 60 supported by the piston 50 blocks the first channel 95A, thereby preventing the slurry from being supplied unevenly to the first channel 95A and allowing the slurry 83 to be sufficiently supplied to the second channel 95B as well. This prevents the second channel 95B from being left uncoated with the slurry 83.

[0032] The cylinder 30 is cylindrical overall. The cylinder 30 has an internal space 30A that corresponds to the external shape of the piston 50. The piston 50 is movable in a first direction D1 within the internal space 30A of the cylinder 30. The cross-sectional shape of the internal space 30A of the cylinder 30 in a cross section perpendicular to the first direction D1 may be constant at each position along the first direction D1 in which the piston 50 is accommodated. This allows the cylinder 30 to restrict movement of the piston 50 in a second direction D2 or a third direction D3 that are perpendicular to the first direction D1. In the illustrated example, the internal space 30A is a substantially cylindrical space. The cylinder 30, together with the accommodated piston 50, forms a space for holding the slurry 83.

[0033] As shown in FIG. 7, the cylinder 30 may include a cylindrical cylinder main body 40. The illustrated cylinder main body 40 has a cylindrical inner circumferential surface. The cylinder main body 40 is generally cylindrical. A central axis CA2 of the cylinder main body 40 is parallel to the first direction D1. In the illustrated example, the cylinder 30 is arranged so that the first direction D1 is parallel to the vertical direction. The cylinder main body 40 may be made of a metal such as stainless steel.

[0034] 7, the cylinder 30 may include a supply tube portion 32 and a suction tube portion 34. The supply tube portion 32 and the suction tube portion 34 are connected to a tube main body portion 40. The supply tube portion 32 and the suction tube portion 34 form a flow path through which the slurry 83 can pass. The connection position of the supply tube portion 32 to the tube main body portion 40 is closer to the substrate 90 in the first direction D1 than the connection position of the suction tube portion 34 to the tube main body portion 40. The connection position of the supply tube portion 32 to the tube main body portion 40 is located vertically higher than the connection position of the suction tube portion 34 to the tube main body portion 40.

[0035] In the example shown in FIG. 7, the supply tube 32 is connected to the slurry storage section 22 via transfer means 21. The slurry storage section 22 is a tank or the like that stores the slurry 83. The transfer means 21 transfers the slurry 83 in the slurry storage section 22 to the internal space 30A of the cylinder 30. The suction tube 34 is connected to suction means 23. The suction means 23 discharges the slurry 83 from the internal space 30A of the cylinder 30. The slurry 83 discharged by the suction means 23 may be recovered or discarded. The transfer means 21 and the suction means 23 may be pumps.

[0036] As shown in FIGS. 7 and 9, the cylinder 30 may include an adjuster 42 and a mounting fixture 44. The mounting fixture 44 secures the adjuster 42 to the cylinder main body 40. The mounting fixture 44 may be a fastener such as a bolt. The adjuster 42 may be an annular plate. The adjuster 42 may be a circular plate with a through-hole in the center. As shown in FIG. 9, the adjuster 42 supports the substrate 90 from the second side in the first direction D1, which is, in the illustrated example, from the lower side in the vertical direction. An outer cylinder 91 of the substrate 90 is positioned on the adjuster 42. The internal structure 92 communicates with the interior of the cylinder main body 40 via the through-hole of the adjuster 42. The conveying unit 14 may load the substrate 90 onto the cylinder main body 40. The conveying unit 14 may retrieve the substrate 90 from the cylinder main body 40.

[0037] As shown in FIG. 7 , the slurry supply unit 20 may include a clamp member 27. The clamp member 27 is movable in a first direction D1. The clamp member 27 can move to either a first side or a second side in the first direction D1. The clamp member 27 can contact the substrate 90 placed on the cylinder 30 from the first side in the first direction D1, i.e., from the upper side in the vertical direction. The clamp member 27 can press the substrate 90 toward the cylinder 30 from the first side to the second side in the first direction D1. At this time, the substrate 90 is sandwiched between the clamp member 27 and the cylinder 30.

[0038] The substrate 90 is clamped between the cylinder 30 and the clamp member 27, thereby fixing the substrate 90 to the cylinder 30. The substrate 90 is restricted from moving relative to the cylinder 30 in directions DY, DZ, D2, and D3 perpendicular to the axial directions DX and D1. One end 90a of the substrate 90 is exposed toward the internal space 30A of the cylinder 30. The axial direction DX of the substrate 90 is parallel to the first direction D1, which is the axial direction of the cylinder 30. The central axis CA2 of the substrate 90 is aligned with the central axis CA1 of the internal space 30A of the cylinder 30.

[0039] Substrates 90 of different shapes and dimensions may be brought into the manufacturing apparatus 10 and processed. In the cylinder 30 of this manufacturing apparatus 10, the adjuster 42 is preferably detachable from the cylindrical main body 40 and replaceable with another adjuster having a different shape or dimensions. According to this example, by changing the shape, size, etc. of the adjuster 42, various substrates 90 can be processed in the slurry supply unit 20. In other words, versatility can be imparted to the manufacturing apparatus 10.

[0040] Next, the piston 50 and the protrusion 60 will be described. The piston 50 is disposed in the internal space 30A of the cylinder 30. The piston 50 moves within the internal space 30A to supply the slurry 83 within the internal space 30A to the substrate 90. The slurry supply unit 20 further includes a drive unit 25 that drives the piston 50. The drive unit 25 moves the piston 50 in a first direction D1 within the internal space 30A. The drive unit 25 can be configured by various devices that can drive the piston 50 in one direction (capable of driving in both the first and second directions of the first direction D1). Examples of the drive unit 25 include a hydraulic cylinder device, a pneumatic cylinder device, a combination of a rotary drive device such as a motor and a ball screw mechanism, a linear motor device, etc.

[0041] As shown in Figures 7 and 8, the protrusion 60 is supported by the piston 50. The protrusion 60 can move relative to the piston 50. The protrusion 60 may be movable relative to the piston 50 in a first direction D1. The protrusion 60 protrudes from the piston 50 along the first direction D1. The first direction D1 is the axial direction of the cylinder 30. The first direction D1 is the direction in which the piston 50 can move within the internal space 30A of the cylinder 30. The protrusion 60 protrudes from the piston 50 to a first side in the first direction D1. The protrusion 60 protrudes from the piston 50 toward a base material 90 fixed to the cylinder 30.

[0042] The protrusion 60 faces the first channel 95A of the base material 90 fixed to the cylinder 30 in the first direction D1, which is the movement direction of the piston 50. In the illustrated example, the protrusion 60 is located on the central axis CA2 of the cylinder 30. As will be described later, the protrusion 60 can come into contact with one end 90a of the base material 90 when it moves toward the first side in the first direction D1 along with the piston 50. The size of the tip surface 61 of the protrusion 60 is smaller than the size of the one end 90a. The tip surface 61 of the protrusion 60 may have substantially the same shape as the opening to the one end 90a of the first channel 95A. The tip surface 61 is the surface of the protrusion 60 facing the first side in the first direction D1.

[0043] The area of ​​the tip surface 61 of the protrusion 60 may be smaller than the area surrounded by the outer contour of the tip surface 51 of the piston 50. The tip surface 51 is a surface facing the first side of the piston 50 in the first direction D1. The outer contour of the tip surface 61 of the protrusion 60 may be smaller than the outer contour of the tip surface 51 of the piston 50. When projected along the first direction D1 onto a plane perpendicular to the first direction D1 (projection onto the plane formed by directions D2 and D3), the outer contour of the tip surface 61 of the protrusion 60 may be located inward and away from the outer contour of the tip surface 51 of the piston 50 over its entire circumference. In the illustrated example, the tip surface 61 of the protrusion 60 has a circular shape. In the illustrated example, the outer contour of the tip surface 51 of the piston 50 has a circular shape.

[0044] In the example shown in FIG. 8, the piston 50 has an internal space 50A. The internal space 50A is open to a tip end surface 51. That is, the internal space 50A has an opening 51a in the tip end surface 51. The opening 51a opens the internal space 50A to a first side in the first direction D1. The piston 50 shown in FIG. 8 includes a head main body portion 52 and a head cover portion 56. The head main body portion 52 has a through hole 53 extending on the central axis CA1. The through hole 53 constitutes the internal space 50A of the piston 50. The through hole 53 forms an opening 51a in the tip end surface 51. The through hole 53 has an inner flange portion 53a on the first side in the first direction D1. The inner flange portion 53a forms a flange portion that protrudes inward and approaches the central axis CA1 along a radial direction (e.g., direction D2, D3) perpendicular to the first direction D1. The inner flange portion 53a may be annular. The inner width and inner diameter of the through hole 53 and the internal space 50A are reduced at the inner flange portion 53a. The cross-sectional shape of the internal space 50A and the through hole 53 in a cross section perpendicular to the first direction D1 is not particularly limited, and may be a circle, an ellipse, a rectangle, or a polygon.

[0045] In the example shown in FIG. 8 , the head main body 52 includes a core part 52A and a tubular part 52B. The core part 52A includes a core tube portion 52A1 and a top plate portion 52A2. The core tube portion 52A1 defines a through hole 53. The core tube portion 52A1 is a tubular portion located around the through hole 53. The core tube portion 52A1 may be cylindrical or rectangular. The top plate portion 52A2 is connected to the core tube portion 52A1 from a first side in the first direction D1. The top plate portion 52A2 forms the tip surface 51. The top plate portion 52A2 may be formed as an integral part with the core tube portion 52A1. A through hole for attaching a fixing device 67 is formed in the top plate portion 52A2. The fixing device 67 can be used to fix an attachment 65 (described later) to the top plate portion 52A2.

[0046] The tubular part 52B is a tubular part. The tubular part 52B has an internal space that accommodates the core tubular portion 52A1. The tubular part 52B surrounds the core tubular portion 52A1 from the radially outer side. The tubular part 52B faces the top plate portion 52A2 from the second side in the first direction D1. A through hole for attaching a connector 52C is formed in the tubular part 52B. The connector 52C fixes the core part 52A and the tubular part 52B. The connector 52C may be a fastener such as a bolt. In the illustrated example, the connector 52C extends radially and is screwed into the core tubular portion 52A1 of the core part 52A.

[0047] The head cover part 56 is fixed to the head main body part 52 from a second side opposite to the first side in the first direction D1. The head cover part 56 may be fixed to the head main body part 52 using a fixing device 59. The fixing device 59 may be a fastener such as a bolt or a screw. The through hole 53 is closed from the second side in the first direction D1 by the head cover part 56.

[0048] In the example shown in FIG. 8 , the protrusion 60 includes a main body 62 and a base flange 63. The main body 62 and the base flange 63 may be seamlessly formed as a single unit, or may be joined by welding, a bonding material, or the like. The main body 62 passes through the opening 51a and extends from the piston 50. The width or diameter of the main body 62 may be constant at each position in the first direction D1. The cross-sectional shape of the main body 62 in a cross section perpendicular to the first direction D1 may be constant at each position in the first direction D1. The cross-sectional shape of the main body 62 is not particularly limited as long as it can pass through the inner flange 53a, and may be circular, elliptical, rectangular, or polygonal. With the above configuration, the main body 62 passes through the opening 51a and is movable relative to the piston 50 in the first direction D1.

[0049] The base flange portion 63 is connected to the main body portion 62 from the second side in the first direction D1. The base flange portion 63 forms an outer flange portion that protrudes outward away from the central axis CA1 in a radial direction (e.g., directions D2 and D3) perpendicular to the first direction D1. The base flange portion 63 may be annular. The protruding portion 60 includes the main body portion 62 and the base flange portion 63, and the base flange portion 63 has a larger width or outer diameter than the main body portion 62. The width or outer diameter of the base flange portion 63 is larger than the width or outer diameter of the inner flange portion 53a of the through hole 53. The base flange portion 63 cannot pass through the inner flange portion 53a of the through hole 53. The base flange portion 63 contacts the inner flange portion 53a, thereby restricting the relative movement of the protruding portion 60 with respect to the piston 50 toward the first side in the first direction D1. This defines the range within which the protruding portion 60 can move relative to the piston 50 toward the first side in the first direction D1.

[0050] The illustrated slurry supply unit 20 further includes a biasing means 58. The biasing means 58 is disposed between the protrusion 60 and the piston 50. The biasing means 58 biases the protrusion 60 from the piston 50 toward the substrate 90. Due to the biasing force of the biasing means 58, the base flange 63 of the protrusion 60 is maintained in contact with the inner flange 53 a of the piston 50 from the second side in the first direction D1 when no external force is applied to the protrusion 60. That is, the biasing means 58 moves the protrusion 60 to a position where it has moved furthest relative to the piston 50 toward the first side in the first direction D1.

[0051] In the illustrated example, the protrusion 60 moves relative to the piston 50 toward the second side in the first direction D1 by compressing and shortening the biasing means 58. This relative movement of the protrusion 60 toward the second side in the first direction D1 with respect to the piston 50 is restricted when the biasing means 58 supported by the head cover part 56 is fully shortened. This defines the range within which the protrusion 60 can move relative to the piston 50 toward the second side in the first direction D1.

[0052] 8, the biasing means 58 is disposed in the through-hole 53 of the head main body 52. ​​The biasing means 58 is located between the base end flange 63 and the head cover 56. The biasing means 58 shown in the figure is a compression spring. However, the biasing means 58 is not limited to the example shown in the figure, and may be an elastic body other than a compression spring, such as a tension spring.

[0053] When projected in the first direction D1, the outer contour of the tip end surface 51 of the piston 50 may be larger than the outer contour of one end 90a of the base material 90 fixed to the cylinder 30. When projected in the first direction D1, the outer contour of the tip end surface 51 of the piston 50 may be located outwardly and away from the outer contour of one end 90a of the base material 90 fixed to the cylinder 30 over its entire circumference. In other words, when projected in the first direction D1 in which the piston 50 can move within the cylinder 30, the outer contour of the piston 50 may encompass the outer contour of one end 90a of the base material 90.

[0054] As shown in FIGS. 7 and 8 , the slurry supply unit 20 further includes an attachment 65 provided on the piston 50. The attachment 65 is provided on the tip surface 51. The attachment 65 has a through hole 66. The protrusion 60 protruding from the piston 50 passes through the through hole 66 and protrudes from the attachment 65 toward a first side in the first direction D1. The width or diameter of the attachment 65 is the same as or smaller than the width or diameter of the tip surface 51 of the piston 50 at each position in the first direction D1. When projected in the first direction D1, the outer contour of the attachment 65 may be located inwardly and away from the outer contour of the tip surface 51 of the piston 50 around its entire circumference. The attachment 65 protrudes from the piston 50 toward the first side in the first direction D1. The cross-sectional shape of the attachment 65 in a cross section perpendicular to the first direction D1 is not particularly limited, and may be a circle, an ellipse, a rectangle, or a polygon.

[0055] 8, the fastener 67 is a bolt or a screw. The fastener 67 penetrates the top plate portion 52A2 of the piston 50 and is screwed into the attachment 65. In the illustrated example, by removing the fastener 67 from the attachment 65, the attachment 65 can be removed from the piston 50 and replaced with another attachment 65 having at least one of a different shape and dimensions.

[0056] In the illustrated example, first, the attachment 65 is fixed to the top plate portion 52A2 using the fixing device 67. Next, the tubular part 52B is fixed to the core part 52A using the connecting device 52C. After that, the head cover part 56 is fixed to the head main body part 52 using the fixing device 59. This allows the piston 50 to be assembled with the attachment 65 attached. By following the steps in reverse, the piston 50 can be disassembled and the attachment 65 can be removed from the piston 50.

[0057] As shown in FIG. 8 , the slurry supply unit 20 may further include a sealing member 68 provided between the protrusion 60 and the piston 50. The sealing member 68 seals the gap between the protrusion 60 and the piston 50, effectively preventing leakage of the slurry 83. The sealing member 68 may be a gasket or an O-ring. In the example shown in FIG. 8 , an annular housing portion 53b is formed in the head main body 52. ​​The annular housing portion 53b may be an annular recess formed in the inner flange portion 53a. In addition to the illustrated sealing member 68, the slurry supply unit 20 may further include a sealing member provided between the attachment 65 and the protrusion 60, a sealing member provided between the attachment 65 and the piston 50, or a sealing member provided between the core part 52A and the tubular part 52B.

[0058] 9 to 16, an example of a method for manufacturing the structure 80 by supplying the slurry 83 to the substrate 90 will be described. The manufacturing method described below uses the manufacturing apparatus 10 described above.

[0059] First, the conveying unit 14 brings the substrate 90 to be processed into the slurry supplying unit 20. The substrate 90 is placed on the cylinder 30. In the illustrated example, the substrate 90 is placed on the adjuster 42 of the cylinder 30. One end 90a of the substrate 90 is positioned on the adjuster 42. Next, the clamping member 27 moves from the first side to the second side in the first direction D1 and contacts the other end 90b of the substrate 90. The clamping member 27 presses the substrate 90 toward the cylinder 30. The substrate 90 is held between the clamping member 27 and the cylinder 30.

[0060] In the state shown in Figure 9, the axial direction DX of the substrate 90 is parallel to the first direction D1 of the cylinder 30. The axial direction DX and the first direction D1 are aligned vertically. The central axis CA1 of the substrate 90 is located on the central axis CA2 of the cylinder 30. The substrate 90 is located on the upper side of the cylinder 30 in the vertical direction, with one end 90a facing downward. The internal space 30A of the cylinder 30 is connected to one end 90a of the substrate 90.

[0061] Next, the preparation step shown in Fig. 10 is carried out. In the preparation step, slurry 83 is supplied into the internal space 30A of the cylinder 30. The slurry 83 is supplied onto the piston 50 and the protruding portion 60 inside the cylinder 30. In the example shown in Fig. 10, the slurry 83 stored in the slurry storage portion 22 is supplied to the internal space 30A by the transfer means 21 through the supply tube portion 32. The supply tube portion 32 is located vertically above the tip surface 51 of the piston 50 and the tip surface 61 of the protruding portion 60.

[0062] 11 , in the preparation step, the slurry 83 is supplied onto the piston 50 to a position higher than the protruding height of the protrusion 60 from the piston 50. That is, the slurry 83 is supplied onto the tip surface 51 to a position higher than the tip surface 61 of the protrusion 60. As a result, the tip surface 61 is immersed in the slurry 83 held on the tip surface 51.

[0063] An on-off valve may be provided at or near the position where the supply tube portion 32 connects to the tube main body portion 40. The supply tube portion 32 may be closed by the on-off valve in steps other than the preparation step shown in FIG.

[0064] A sealing material such as a gasket may be provided between the piston 50 and the cylindrical main body 40. This sealing material can prevent the slurry 83 from leaking out from between the piston 50 and the cylindrical main body 40.

[0065] Thereafter, the piston 50 moves within the cylindrical main body 40. The operation of the piston 50 is controlled by the control unit 18. The drive unit 25 drives the piston 50 in response to a control signal from the control unit 18. As shown in FIG. 12, the piston 50 moves to the first side in the first direction D1 within the internal space 30A and approaches one end 90a of the substrate 90. At this time, the slurry 83 held on the tip surface 51 also moves to the first side in the first direction D1. Furthermore, the protrusion 60 supported by the piston 50 also moves to the first side in the first direction D1.

[0066] Next, a description will be given of the supplying step of supplying the slurry 83 to the substrate 90. The supplying step of the slurry 83 includes a first supplying step and a second supplying step that are carried out in sequence. As will be described later, the first supplying step promotes the introduction of the slurry 83 into the first channel 95A, and the second supplying step promotes the introduction of the slurry 83 into the second channel 95B.

[0067] In the preparation step, the slurry 83 is supplied onto the piston 50 to a position higher than the protruding height of the protrusion 60 from the piston 50. Therefore, when the liquid surface of the slurry 83 contacts one end 90a as the piston 50 rises, the tip surface 61 of the protrusion 60 is located within the slurry 83 and is separated from the one end 90a in the first direction D1. As the piston 50 further rises from this state, the slurry 83 is supplied from the one end 90a to the substrate 90 and introduced into the channel 95. In this first supply step, the slurry 83 more easily enters the first channel 95A, which has a larger cross-sectional area, than the second channel 95B, which has a smaller cross-sectional area. In particular, in the illustrated example, the first channel 95A, which has a larger cross-sectional area, is located on the central axis CA2 of the cylinder 30. For this reason, the slurry 83 more easily enters the first channel 95A than the second channel 95B. 12, the introduction of the slurry 83 into the first channel 95A of the channels 95 proceeds, while the introduction of the slurry 83 into the second channel 95B is delayed. The rate at which the liquid level of the slurry 83 rises in the second channel 95B is slower than the rate at which the liquid level of the slurry 83 rises in the first channel 95A.

[0068] The viscous slurry 83 is supplied to the base material 90 at high pressure by the piston 50 and forced into the channel 95. Therefore, the pressure in the internal space 30A filled with the slurry 83 increases. However, the first channel 95A is located on the central axis CA1 of the base material 90, and the protruding portion 60 is located on the central axis CA2 of the cylinder 30 correspondingly. Therefore, the posture of the protruding portion 60 protruding from the piston 50 can be more stably maintained within the high-pressure slurry 83.

[0069] As shown in FIG. 13, when the piston 50 further rises, the protrusion 60 protruding upward from the piston 50 comes into contact with one end 90a. The protrusion 60 faces the first channel 95A in the first direction D1. That is, the protrusion 60 comes into contact with one end 90a at a position facing the first channel 95A. As a result, the tip surface 61 of the protrusion 60 closes the opening of the first channel 95A at the one end 90a. This completes the first supply step of supplying the slurry to the substrate 90.

[0070] In the example shown in FIG. 13 , at the end of the first supply step, the slurry 83 has been introduced into the first channel 95A over the entire length along the first direction D1. The introduction of the slurry 83 is promoted in the channel 95 having a larger cross-sectional area. Therefore, in the first supply step in which the slurry 83 is supplied to both the first channel 95A and the second channel 95B, the introduction of the slurry 83 into the first channel 95A having a larger cross-sectional area is promoted more than the introduction of the slurry 83 into the second channel 95B having a smaller cross-sectional area. That is, of the slurry 83 supplied to the internal space 30A in the preparation step, most of the slurry 83 located above the tip surface 61 is preferentially introduced into the first channel 95A. Therefore, at the end of the first supply step, the slurry 83 has been introduced into only a portion of the second channel 95B.

[0071] Even after the first supply step is completed, the piston 50 continues to rise. As the piston 50 rises, the supply of the slurry 83 to the substrate 90 continues, and the second supply step begins. When transitioning from the first supply step to the second supply step, the movement speed of the piston 50 may be maintained at a constant speed, may increase, or may decrease.

[0072] In the illustrated manufacturing apparatus 10, the protrusion 60 is supported by the piston 50 so as to be relatively movable, and is urged by urging means 58 from the piston 50 toward one end 90a of the substrate 90. Therefore, in the second supplying step, the tip surface 61 of the protrusion 60 is in contact with one end 90a of the substrate 90. As a result, the opening at one end 90a of the first channel 95A directly facing the protrusion 60 in the first direction is closed by the protrusion 60.

[0073] Then, with the protrusion 60 abutting against one end 90a by the biasing means 58, the driving unit 25 drives the piston 50 against the biasing force from the biasing means 58 to bring it closer to the substrate 90. As a result, the slurry 83 is supplied from one end 90a to the substrate 90. Because the first channel 95A is closed by the protrusion 60, the slurry 83 in the internal space 30A is introduced into the second channel 95B by the piston 50.

[0074] In the illustrated example, the tip surface 61 of the protrusion 60 has substantially the same shape as the opening at one end 90a of the first channel 95A. Therefore, the protrusion 60 can completely close the opening of the first channel 95A. Additionally, the protrusion 60 can avoid closing the opening of the second channel 95B, which is positioned around the first channel 95A. This allows the slurry 83 to be introduced only into the second channel 95B in the second supply step. As a result, the second channel 95B, which is difficult to fill with the slurry 83, can be stably filled with the slurry 83. In other words, the occurrence of uncoated areas in the second channel 95B, which is difficult to fill with the slurry 83, can be suppressed.

[0075] In this manner, as shown in FIG. 14, the slurry 83 can be introduced into the second channel 95B over the entire length in the axial direction DX, and the second supply step is completed.

[0076] 13 and 14, the protrusion 60 completely closes the opening of the first channel 95A during the second supply step. In this example, the introduction of the slurry 83 into the first channel 95A is restricted during the second supply step. Therefore, as described above, it is useful to introduce the slurry into the first channel 95A over the entire length along the axial direction DX during the first supply step. This makes it possible to prevent uncoated areas from occurring within the first channel 95A.

[0077] As described above, in the preparation step, the slurry 83 is supplied onto the tip surface 51 of the piston 50 in the cylinder 30 to a position higher than the protrusion height of the protrusion 60 from the piston 50. That is, before the first supply step is started, the tip surface 61 of the protrusion 60 is immersed in the slurry 83. This allows the slurry 83 to be stably introduced into the first channel 95A in the first supply step. This makes it possible to prevent the occurrence of uncoated areas in the first channel 95A. Furthermore, in the preparation step, the functional layer 82 may be supplied in an amount greater than the amount of slurry 83 that can fill the entire first channel 95A and the second channel 95B in the state shown in FIG. 14. This makes it possible to prevent the occurrence of uncoated areas in the channels 95A.

[0078] The amount of slurry 83 supplied to the substrate 90 in the first supply step may be determined taking into consideration one or more of the cross-sectional areas of the first channel 95A and each of the second channels 95B, the supply rate of the slurry 83 to the substrate 90 in the first supply step, and the properties of the slurry. The ratio of the amount of slurry 83 introduced into the first channel 95A and the second channel 95B in the first supply step varies depending on the cross-sectional areas of the first channel 95A and each of the second channels 95B, the supply rate of the slurry 83 to the substrate 90 in the first supply step, and the properties of the slurry. In other words, by taking these factors into consideration, the slurry 83 can be introduced into the entire length of the first channel 95 in the first supply step.

[0079] When the ratio or difference between the cross-sectional area of ​​the first channel 95A and the cross-sectional area of ​​each second channel 95B becomes large, the introduction of the slurry 83 into the first channel 95A is promoted and the introduction of the slurry 83 into the second channel 95B is restricted. When the supply rate (mL / s) of the slurry 83 to the substrate 90 in the first supply step is large, that is, when the movement speed (mm / s) of the piston 50 is fast, the introduction of the slurry 83 into the first channel 95A is promoted and the introduction of the slurry 83 into the second channel 95B is restricted.

[0080] The amount (L) of slurry 83 supplied to the base material 90 in the first supply step is the amount of slurry 83 located vertically above (on the first side in the first direction D1) the tip surface 61 of the protruding portion 60 out of the amount of slurry 83 supplied to the internal space 30A of the cylinder 30 in the preparation step. Therefore, the amount (L) of slurry 83 supplied to the base material 90 in the first supply step can be adjusted not only by the amount of slurry 83 supplied to the internal space 30A of the cylinder 30 in the preparation step, but also by the protruding height of the protruding portion 60 from the tip surface 51 of the piston 50 in the first direction D1.

[0081] In the illustrated slurry supply unit 20, the area of ​​the tip surface 61 of the protrusion 60 that contacts one end 90a of the substrate 90 is smaller than the area of ​​the region surrounded by the outer contour of the tip surface 51 of the piston 50. Furthermore, the outer contour of the tip surface 61 of the protrusion 60 is smaller than the outer contour of the tip surface 51 of the piston 50. When projected in the first direction D1, the outer contour of the tip surface 61 of the protrusion 60 is located inside and away from the outer contour of the tip surface 51 of the piston 50 over its entire circumference. This configuration allows a sufficient amount of slurry 83 to be supplied to the substrate 90 during the second supply step, in which the movement of the protrusion 60 stops and only the piston 50 moves. This effectively prevents uncoated areas from occurring within the second channel 95B.

[0082] Furthermore, in the illustrated slurry supply unit 20, when projected in the first direction D1, the outer contour of the tip surface 51 of the piston 50 may be substantially the same as or larger than the outer contour of one end 90a of the substrate 90 fixed to the cylinder 30. When projected in the first direction D1, the outer contour of the tip surface 51 of the piston 50 may be substantially the same as or located outside the outer contour of one end 90a of the substrate 90 fixed to the cylinder 30 over its entire circumference. That is, when projected in the first direction D1 in which the piston 50 is movable within the cylinder 30, the outer contour of the tip surface 51 of the piston 50 encompasses the outer contour of one end 90a of the substrate 90. With these configurations, a sufficient amount of slurry 83 can be supplied to the substrate 90 by moving the piston 50 in the first direction D1. This more effectively prevents uncoated areas in the channel 95. Furthermore, the slurry 83 can be supplied to one end 90a of the substrate 90 at high pressure. This also makes it possible to more effectively prevent the occurrence of uncoated areas in the channel 95.

[0083] 15, when the introduction of the slurry 83 into the first channel 95A and the second channel 95B is completed, the driving unit 25 moves the piston 50 to the second side in the first direction D1, which is the downward side in the vertical direction in the illustrated example. The piston 50 moves to the second side in the first direction D1 together with the slurry 83 that was not introduced into the channel 95. The slurry 83 has viscosity, and the slurry 83 introduced into the second channel 95B, which has a smaller cross-sectional area, remains in the second channel 95B.

[0084] The protrusion 60 is urged by the urging means 58 toward the first side in the first direction D1 from the piston 50. Therefore, as shown in Fig. 15, even if the piston 50 moves toward the second side in the first direction D1, the protrusion 60 is maintained in contact with one end 90a of the substrate 90. Therefore, the slurry 83 introduced into the first channel 95A having a large cross-sectional area is also maintained in the first channel 95A.

[0085] In the state shown in Fig. 15, the protrusion 60 protrudes to the maximum extent from the piston 50. When the piston 50 moves further toward the second side in the first direction D1 from the state shown in Fig. 15, the protrusion 60 moves toward the second side in the first direction D1 together with the piston 50 and moves away from the one end 90a, as shown in Fig. 16. This releases the closure of the first channel 95A by the protrusion 60, and the opening of the first channel 95A is released.

[0086] As described above, the introduction of the slurry 83 into the first channel 95A is completed before the introduction into the second channel 95B. The opening of the first channel 95A into which the introduction of the slurry 83 has finished is closed by the protrusion 60. The closure of the first channel 95A by the protrusion 60 continues for a while even after the supply of the slurry 83 to the second channel 95B has stopped.

[0087] 16, the movement of the piston 50 stops at a position where the tip surface 51 overlaps with the opening of the suction tube portion 34 in the first direction D1. As a result, the slurry 83 remaining in the internal space 30A of the cylinder 30 is discharged from the suction tube portion 34. At this timing, suction by the suction means 23 may be started to suck and remove the slurry 83 from the channel 95 of the substrate 90, thereby adjusting the amount of slurry 83 in the channel 95 to an appropriate amount. The slurry 83 discharged from the internal space 30A via the suction tube portion 34 is collected or discarded.

[0088] An on-off valve may be provided at or near the position where the suction tube portion 34 connects to the tube main body portion 40. In steps other than the suction step shown in FIG. 16, the suction tube portion 34 may be closed by the on-off valve.

[0089] However, when the flow path of the slurry 83 from the internal space 30A to one end 90a of the substrate 90 becomes narrow, as in the illustrated slurry supply unit 20, the tip surface 51 of the piston 50 cannot approach the vicinity of one end 90a. In this case, a large amount of the slurry 83 that cannot be used for introduction into the channel 95 may remain between the tip surface 51 of the piston 50 that has moved to its upper limit and one end 90a of the substrate 90.

[0090] In this regard, the above-described slurry supply unit 20 includes an attachment 65 provided on the piston 50. The attachment 65 protrudes from the piston 50 with a reduced width toward the substrate 90. The attachment 65 fills the space between the tip surface 51 of the piston 50 that has moved to its upper limit and one end 90a of the substrate 90, thereby reducing the amount of remaining slurry 83 and enabling the slurry 83 to be saved.

[0091] Furthermore, the viscous slurry 83 is supplied to the substrate 90 at high pressure by the piston 50 and forced into the channel 95. Therefore, the pressure in the internal space 30A filled with the slurry 83 increases. In this regard, the attachment 65 has a through-hole 66. The protrusion 60 protruding from the piston 50 passes through the through-hole 66 of the attachment 65. The attachment 65 allows the posture of the protrusion 60 to be stably maintained. Therefore, the tip surface 61 of the protrusion 60 can stably close the first channel 95A.

[0092] This completes the suction process, completing the supply of the slurry 83 to the substrate 90 using the slurry supply unit 20. The substrate 90 to which the slurry 83 has been supplied is transported from the slurry supply unit 20 by the transport unit 14. In the example shown, the transport unit 14 transports the substrate 90 from the slurry supply unit 20 to the placement unit 13. Thereafter, a drying process is performed to dry the slurry 83 in the channel 95, and a firing process is performed to fire the slurry 83 in the channel 95 to produce a functional layer 82 from a coating of the slurry 83, thereby obtaining the structure 80.

[0093] Substrates 90 of different shapes and dimensions may be brought into the manufacturing apparatus 10 and processed. In this manufacturing apparatus 10, the protrusion 60 is preferably detachable from the piston 50 and replaceable with another protrusion having at least one of a different shape and dimensions. According to this example, by changing the protruding length of the protrusion 60 from the piston 50, the size of the protrusion 60, etc., it is possible to introduce slurry 83 into the channels 95 of various substrates 90. In other words, versatility can be imparted to the manufacturing apparatus 10.

[0094] Similarly, it is preferable that the attachment 65 is detachable from the piston 50 and replaceable with another attachment having at least one of a different shape and dimensions. According to this example, by changing the length of the attachment 65 protruding from the piston 50 or the size of the attachment 65, it is possible to save slurry 83 when treating various substrates 90. Furthermore, it is possible to stably maintain the posture of the protruding portion 60 when treating various substrates 90. In other words, it is possible to impart versatility to the manufacturing apparatus 10.

[0095] In the embodiment described above, the manufacturing apparatus 10 manufactures the structure 80, and the manufacturing method manufactures the structure 80. The structure 80 includes a substrate 90 having a plurality of channels 95 penetrating in the axial direction DX, and a functional layer 82 provided in the channels 95. The channels 95 include a first channel 95A and a second channel 95B having a cross-sectional area smaller than the cross-sectional area of ​​the first channel 95A.

[0096] The manufacturing apparatus 10 includes a slurry supply unit 20 that supplies a slurry 83 containing raw materials for a functional layer 82 to a substrate 90 from one end 90a in the axial direction. The slurry supply unit 20 includes a cylinder 30 that communicates with one end 90a of the substrate 90, a piston 50 that is movably disposed within the cylinder 30, and a protrusion 60 that is supported on the piston 50 and is movable relative to the piston 50. The protrusion 60 protrudes from the piston 50 toward the substrate 90 within the cylinder 30. The protrusion 60 can contact a portion of the one end 90a to at least partially close the first channel 95A. The piston 50 moves toward the substrate 90 to supply the slurry 83 to the substrate 90 and can introduce the slurry 83 into the first channel 95A and the second channel 95B that are not blocked by the protrusion 60.

[0097] The manufacturing method includes a first supplying step and a second supplying step in which a slurry 83 containing raw materials for the functional layer 82 is supplied to the substrate 90 from one end 90a in the axial direction DX. In the first supplying step, the slurry 83 is introduced into the first channel 95A and the second channel 95B. The second supplying step is started while the slurry 83 is being introduced into the second channel 95B. In other words, the second supplying step is started before the introduction of the slurry 83 into the second channel 95B is completed. In the second supplying step, the slurry is supplied to the substrate 90 and the slurry 83 is introduced into the second channel 95B while the first channel 95A is at least partially closed by contacting a portion of the one end 90a with a protrusion.

[0098] According to the manufacturing apparatus 10 and manufacturing method of this embodiment, by at least partially closing the first channel 95A, it is possible to prevent the slurry 83 from being introduced unevenly into the first channel 95A of the channels 95. Therefore, it is possible to supply a sufficient amount of slurry 83 to the second channel 95B, which has a smaller cross-sectional area than the first channel 95A. This makes it possible to prevent the occurrence of uncoated portions of the slurry 83 in the second channel 95B. In the manufactured structure 80, the functional layer 82 can effectively exhibit the desired function.

[0099] In one specific example of the manufacturing apparatus of the present embodiment, the slurry supply unit 20 includes a biasing means 58 that biases the protrusion 60 from the piston 50 toward the substrate 90. According to this example, it is not necessary to control the protrusion 60, and it is possible to simplify the configuration and control of the manufacturing apparatus 10. By simply controlling the manufacturing apparatus 10 with a simple configuration, it is possible to prevent the slurry 83 from being introduced unevenly into the first channel 95A having a large cross-sectional area, and thereby it is possible to prevent the occurrence of uncoated portions of the slurry 83 in the second channel 95B having a small cross-sectional area.

[0100] In one specific example of the manufacturing apparatus of this embodiment, the slurry supply unit 20 includes a drive unit 25 that drives the piston 50. With the protrusion 60 in contact with one end 90a by the biasing means 58, the drive unit 25 drives the piston 50 against the biasing force from the biasing means 58 to bring it closer to the substrate 90. This manufacturing apparatus 10 eliminates the need to control the protrusion 60. Furthermore, no special control is required for controlling the piston 50, making it extremely simple. By easily controlling the manufacturing apparatus 10 with a simple configuration, it is possible to prevent the occurrence of uncoated areas of the slurry 83 in the second channel 95B, which has a small cross-sectional area.

[0101] In one specific example of the manufacturing method of this embodiment, in the first supplying step, the piston 50 moves together with the protruding portion 60 within the cylinder 30, which is connected to one end 90a of the substrate 90, until the protruding portion 60 contacts a portion of the end 90a, thereby supplying the slurry 83 contained within the cylinder 30 to the substrate 90. In the second supplying step, the piston 50 moves within the cylinder 30 while the protruding portion 60 is stationary, thereby supplying the slurry 83 to the substrate 90. According to this manufacturing method, by simply controlling the protruding portion 60 and the piston 50, it is possible to prevent the slurry 83 from being unevenly introduced into the first channel 95A, which has a large cross-sectional area. In other words, by simply controlling the protruding portion 60 and the piston 50, it is possible to prevent the slurry 83 from being left uncoated in the second channel 95B, which has a small cross-sectional area.

[0102] In one specific example of the manufacturing method of this embodiment, the protrusion 60 is supported by the piston 50 so as to be relatively movable. The protrusion 60 is urged from the piston 50 toward one end 90a of the substrate 90 by the urging means 58. In the second supplying step, the protrusion 60 abuts against the one end 90a due to the urging force of the urging means 58, and the piston 50 moves toward the one end 90a against the urging force. This manufacturing method makes it possible to eliminate the need to control the protrusion 60. Furthermore, no special control is required for the piston 50, making it extremely easy to control.

[0103] Although one embodiment has been described with reference to specific examples, the above-described specific examples do not limit the present invention. The above-described embodiment can be implemented with various other specific examples, and various omissions, substitutions, changes, additions, etc. can be made without departing from the spirit of the present invention.

[0104] In the second supplying step of the specific example described above, the entire opening of the first channel 95A, which is open at one end 90a of the substrate 90, is closed by the protrusion 60. However, this is not limiting. In the second supplying step, the protrusion 60 may close only a portion of the opening of the first channel 95A. Closing only a portion of the opening of the first channel 95A can also restrict the inflow of the slurry 83 into the first channel 95A.

[0105] In the first supply step of the above-described specific example, the slurry 83 is introduced into the first channel 95A over the entire length along the axial direction DX. However, this is not limiting. In the first supply step, the slurry 83 may be introduced into only a portion of the first channel 95A along the axial direction DX. In this example, additional slurry 83 may be introduced into the first channel 95A in the second supply step or in a separate step.

[0106] In the above-described specific example, the protrusion 60 is biased by the biasing means 58 so as to protrude from the piston 50 toward the base material 90. However, the present invention is not limited to this example, and the relative position of the protrusion 60 with respect to the piston 50 may be controlled by a driving means. Examples of the driving means include a hydraulic cylinder device, a pneumatic cylinder device, a combination of a rotation driving device such as a motor and a ball screw mechanism, a linear motor device, etc. [Explanation of symbols]

[0107] 10 Manufacturing apparatus, 20 Slurry supply section, 25 Drive section, 30 Cylinder, 50 Piston, 51 Tip surface, 58 Urging means, 60 Protrusion, 61 Tip surface, 90 Base material, 90a One end, 95 Channel, 95A First channel, 95B Second channel

Claims

1. An apparatus for manufacturing a structure, comprising: The structure includes a substrate having a plurality of channels extending therethrough in an axial direction, and a functional layer disposed within the channels; the channels include a first channel and a second channel having a cross-sectional area smaller than a cross-sectional area of ​​the first channel; The device comprises: a slurry supply unit that supplies a slurry containing raw materials for the functional layer to the substrate from one end in the axial direction; The slurry supply unit includes: a cylinder that communicates with the one end of the base material; a piston movably disposed within the cylinder; a protrusion supported by the piston so as to be movable relative to the piston, the protrusion protruding from the piston toward the base material within the cylinder, the protrusion is capable of contacting a portion of the one end to at least partially close the first channel; The piston is capable of supplying the slurry to the substrate by moving toward the substrate and introducing the slurry into the first channel that is not blocked by the protrusion and the second channel.

2. The device according to claim 1 , wherein the area of ​​the tip surface of the protrusion that contacts the one end is smaller than the area of ​​the region surrounded by the outer contour of the tip surface of the piston.

3. The apparatus according to claim 1 or 2, wherein the slurry supply unit includes a biasing means for biasing the protrusion from the piston toward the substrate.

4. the slurry supply unit includes a drive unit that drives the piston, The device according to claim 3 , wherein the driving section drives the piston against the biasing force from the biasing means to approach the substrate while the protrusion is in contact with the one end by the biasing means.

5. the first channel is located on a central axis of the substrate; The device of claim 1 , wherein the protrusion is located on a central axis of the cylinder.

6. The device according to claim 1 , wherein a tip surface of the protrusion has substantially the same shape as an opening at the one end of the first channel.

7. 1. A method of manufacturing a structure, comprising: The structure includes a substrate having a plurality of channels extending therethrough in an axial direction, and a functional layer disposed within the channels; the channels include a first channel and a second channel having a cross-sectional area smaller than a cross-sectional area of ​​the first channel; The method comprises: a first supply step of supplying a slurry containing raw materials for the functional layer to the substrate from one end in the axial direction and introducing the slurry into the first channel and the second channel; a second supply step, which is initiated during the introduction of the slurry into the second channel, of supplying the slurry to the substrate and introducing the slurry into the second channel while the first channel is at least partially closed by contacting a protrusion with a portion of the one end.

8. In the first supplying step, the piston moves together with the protruding portion in a cylinder that communicates with the one end of the substrate until the protruding portion contacts a portion of the one end, thereby supplying the slurry contained in the cylinder to the substrate; The method according to claim 7 , wherein in the second supplying step, the piston moves within the cylinder while the protrusion is in contact with the one end and is stopped, thereby supplying the slurry to the substrate.

9. the protrusion is supported by the piston so as to be relatively movable, and is biased from the piston toward the one end of the base material by a biasing means; 9. The method according to claim 8, wherein in the second supplying step, the protrusion abuts against the one end due to the biasing force of the biasing means, and the piston moves toward the one end against the biasing force.

10. The method includes a preparation step of providing the slurry on the protrusion within the cylinder and on the piston; the protrusion protrudes upward in a vertical direction from the piston, In the first supplying step, the piston and the protruding portion move upward in the vertical direction within the cylinder to approach the base material, The method according to claim 8 or 9, wherein in the preparing step, the slurry is supplied onto the piston to a position higher than a protrusion height of the protrusion from the piston.

11. The method according to claim 8 , wherein the slurry is introduced into the first channel over the entire length along the axial direction in the first supplying step.

12. 8. The method according to claim 7, wherein the amount of the slurry supplied to the substrate in the first supply step is determined taking into consideration one or more of the cross-sectional areas of the first channel and the second channel, the supply rate of the slurry to the substrate in the first supply step, and properties of the slurry.

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