Spectrophotometer

Abstract

To provide a spectroscopic measurement device for suppressing deterioration of efficiency in using optical irradiation energy.SOLUTION: A spectroscopic measurement device includes: a stage on which a sample is set; an electromagnetic wave source for emitting an electromagnetic wave; one or more optical elements for performing emission by changing a spatial energy distribution of the electromagnetic wave; and a reflection type objective lens for condensing the electromagnetic wave after conversion of the spatial energy distribution so as to irradiate the sample with the electromagnetic wave.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present disclosure relates to a spectroscopic measurement device. [Background technology]

[0002] Spectroscopic analysis technology can analyze the composition of a substance or identify the components of contaminants based on the wavelength characteristics of the reflectance and absorptance of light irradiated onto the substance. There are various methods for spectroscopic analysis, including infrared spectroscopy, Raman spectroscopy, and NV center spectroscopy (NMR). To enable the component analysis of various substances, it is advantageous to broaden the wavelength band of the light used for measurement. To ensure measurement stability, it is necessary to irradiate the measurement target with light of a broad wavelength band coaxially. Objective lenses using conventional optical lenses cannot use light of a broad band because the focal position shifts along the optical axis depending on the wavelength (chromatic aberration). Therefore, it is possible to use reflective objective lenses, which do not produce chromatic aberration.

[0003] Patent Document 1 discloses a technique in which a sample is periodically heated with an infrared laser and the resulting expansion and contraction of the sample is measured with a confocal detector using a visible light laser. In Patent Document 1, a reflective objective lens is used as the objective lens. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] International Publication No. 2013 / 078471 Summary of the Invention [Problem to be solved by the invention]

[0005] However, due to its structure, a reflective objective lens cannot utilize light in the center of the incident light path and loses some peripheral light, resulting in a decrease in the utilization efficiency of the light irradiation energy. Patent Document 1 does not consider at all the decrease in the utilization efficiency of the laser (light) irradiation energy caused by the structure of the reflective objective lens.

[0006] Therefore, the present disclosure provides a spectroscopic measurement device that suppresses a decrease in the utilization efficiency of light irradiation energy. [Means for solving the problem]

[0007] In order to solve the above problem, the spectroscopic measurement device disclosed herein is characterized by comprising a stage on which a sample is placed, an electromagnetic wave source that emits electromagnetic waves, one or more optical elements that change the spatial energy distribution of the electromagnetic waves and emit the changed waves, and a reflective objective lens that focuses the electromagnetic waves after the spatial energy distribution has been converted and irradiates the sample.

[0008] Further features related to the present disclosure will become apparent from the description of this specification and the accompanying drawings. Also, aspects of the present disclosure are achieved and realized by the elements and combinations of various elements and the aspects of the following detailed description and the appended claims. The description of this specification is merely exemplary and does not limit the scope or application of the claims of the present disclosure in any way. [Effects of the Invention]

[0009] According to the spectroscopic measurement device of the present disclosure, it is possible to suppress a decrease in the efficiency of use of the irradiation energy of light. Problems, configurations, and effects other than those described above will become apparent from the following description of the embodiment. [Brief explanation of the drawings]

[0010] [Figure 1] 1 is a schematic diagram showing the overall configuration of a spectroscopic measurement device according to a first embodiment. [Figure 2A] FIG. 1 is a cross-sectional view of a reflective objective lens. [Figure 2B] 10 is a bottom view showing an example of the configuration of a support body of the first reflecting mechanism. FIG. [Figure 2C] 10 is a bottom view showing another example of the configuration of the support body of the first reflecting mechanism. FIG. [Figure 3A] 10A and 10B are diagrams illustrating an optical element that converts the spatial energy distribution of a light beam into a ring-like shape. [Figure 3B] 10A and 10B are diagrams illustrating an optical element that converts the spatial energy distribution of a light beam into four parts. [Figure 3C] 10A and 10B are diagrams illustrating an optical element that converts the spatial energy distribution of a light beam into three parts. [Figure 4] FIG. 2 is a schematic diagram showing the configuration of a detector. [Figure 5] FIG. 2 is a functional block diagram of a control device. [Figure 6] FIG. 10 is a schematic diagram showing the overall configuration of a spectroscopic measurement device according to a second embodiment. [Figure 7] FIG. 10 is a schematic diagram showing the overall configuration of a spectroscopic measurement device according to a third embodiment. [Figure 8] 1A and 1B are diagrams for explaining an energy beam and a light beam irradiated onto a sample. DETAILED DESCRIPTION OF THE INVENTION

[0011] Hereinafter, embodiments of the technology of the present disclosure will be described with reference to the drawings.

[0012] In the following embodiments, for convenience, the description will be divided into multiple sections or multiple embodiments when necessary. Unless otherwise specified, the multiple sections or multiple embodiments are not unrelated to each other, and one may be related to the other in part or whole as a modification, detail, supplementary explanation, etc.

[0013] Furthermore, in the following embodiments, when the number of elements (including the number, numerical value, amount, range, size, etc.) is mentioned, unless otherwise specified or when it is clearly limited in principle to a specific number, etc., the number of elements, etc. mentioned is not limited, and may be more or less than the mentioned value.

[0014] Furthermore, it goes without saying that in the following embodiments, the constituent elements (including element steps, etc.) are not necessarily essential unless otherwise specified or unless they are clearly essential in principle.

[0015] Similarly, in the following embodiments, when referring to the shapes, positional relationships, etc. of components, etc., unless otherwise specified or clearly not in principle, it is intended to include those that are substantially similar or approximate to those shapes, etc. The same applies to the above numerical values ​​and ranges.

[0016] In all the drawings for explaining the embodiments, the same components are generally designated by the same reference numerals, and repeated explanations thereof will be omitted. In order to make the drawings easier to understand, hatching may be used even in plan views.

[0017] [First embodiment] <Configuration example of spectroscopic measurement device> 1 is a schematic diagram showing the overall configuration of a spectroscopic measurement device 100 according to a first embodiment. In FIG. 1, the up-down direction (vertical direction) is the Z direction, and the horizontal directions are the X direction and the Y direction. The spectroscopic measurement device 100 includes a stage 101, a reflective objective lens 102, a stage 103, a light source 104, a beam splitter 105, an optical element 110, a detection system 120, and a control device 140.

[0018] A sample 1 is placed on a stage 101. The stage 101 is configured to be movable in the X, Y, and Z directions. By moving the stage 101 in the X and Y directions, any region on the surface of the sample 1 can be analyzed. By moving the stage 101 in the Z direction, any region at any height on the sample 1 can be analyzed.

[0019] The reflective objective lens 102 is fixed to a stage 103 for focus adjustment. The stage 103 is configured to be movable in the Z direction. Focus adjustment may be performed by driving the stage 101 in the Z direction instead of the stage 103. By using the reflective objective lens 102, chromatic aberration, which causes the focal position to shift in the optical axis direction depending on the wavelength, does not occur.

[0020] The light source 104 (electromagnetic wave source) emits a light beam 10 (electromagnetic wave). The light beam 10 includes light of one or more wavelengths in a wide band, for example, from ultraviolet to infrared. The light source 104 is configured to be able to convert the wavelength of the light beam 10, for example, within a range of 19 nm to 30 μm. The light beam 10 passes through a beam splitter 105, passes through an optical element 110, is focused by a reflective objective lens 102, and is then irradiated onto a sample 1. The sample 1 irradiated with the light beam 10 absorbs the applied energy and undergoes thermal expansion. The light beam 10 irradiated onto the sample 1 is reflected by the surface of the sample 1, returns to the beam splitter 105 along the original optical path, and is reflected toward a detection system 120.

[0021] Optical element 110 is configured to change the spatial energy distribution of light beam 10. Details of optical element 110 will be described later. Although only one optical element is shown as optical element 110 in Fig. 1, it may be a combination of multiple optical elements.

[0022] The detection system 120 detects the light beam 10 reflected by the sample 1 and then reflected by the beam splitter 105. Note that the characteristics of the light beam 10 emitted from the light source 104 may differ from the characteristics of the light beam 10 detected by the detection system 120 (other electromagnetic waves resulting from the electromagnetic waves incident on the sample). The detection system 120 outputs the detection result of the light beam 10 to the control device 140. The structure of the detection system 120 will be described in detail later.

[0023] The control device 140 can be configured by a computer device such as a general-purpose computer, a smartphone, a tablet terminal, or a mobile phone. The control device 140 has a processor, a memory, a storage device, an input device, and an output device, all of which are not shown. The control device 140 is configured to control each component of the spectroscopic measurement device 100 (including the stage 101, the stage 103, the light source 104, and the detection system 120). The control device 140 is also configured to process the detection result of the light beam 10 received from the detection system 120 and analyze the sample 1. The functions of the control device 140 will be described in detail below.

[0024] The stage 101 and the stage 103 constitute a stage mechanism system of the spectroscopic measurement device 100. The reflective objective lens 102, the beam splitter 105, and the detection system 120 constitute a measurement system of the spectroscopic measurement device 100. The light source 104, the beam splitter 105, the optical element 110, and the reflective objective lens 102 constitute an optical system of the spectroscopic measurement device 100. The beam splitter 105 and the reflective objective lens 102 are shared with the measurement system. The control device 140 constitutes a control system of the spectroscopic measurement device 100.

[0025] <Internal structure of a reflective objective lens> 2A is a cross-sectional view of the reflective objective lens 102. The reflective objective lens 102 has a first reflecting mechanism 201, a second reflecting mechanism 202, an entrance 203, and a support 204. The first reflecting mechanism 201 and the second reflecting mechanism 202 may be any element capable of reflecting light of a predetermined wavelength, and may be formed, for example, by a mirror or a reflective lens having a curved surface. The support 204 supports the first reflecting mechanism 201.

[0026] The light beam 10 enters the reflective objective lens 102 through the entrance 203 and enters the first reflecting mechanism 201. Conventionally, when the light beam 10 is a light beam with a Gaussian distribution or a uniform distribution, the light beam 10 is split into a light beam component 11 and a light beam component 12 by the first reflecting mechanism 201. The light beam component 11 can be reflected toward the second reflecting mechanism 202. The light beam component 12 is reflected at the central region of the first reflecting mechanism 201 (the peripheral region around the optical axis of the reflective objective lens 102) and cannot be reflected toward the second reflecting mechanism 202. The light beam component 12 does not serve as an illumination component and is lost. The dead area, which is the region where the light beam component 12 is reflected by the first reflecting mechanism 201, is generally 15 to 60% of the effective area of ​​the first reflecting mechanism 201. The light beam component 11 is reflected again by the second reflecting mechanism 202 and focused at a predetermined lens focal point.

[0027] Fig. 2B is a bottom view showing an example of the configuration of the support 204 of the first reflecting mechanism 201. In the example of Fig. 2B, the support 204 has four arms 205 arranged radially.

[0028] Fig. 2C is a bottom view showing another example of the configuration of the support 204 of the first reflecting mechanism 201. In the example of Fig. 2C, the support 204 has three arms 206 arranged radially.

[0029] <Conversion of spatial energy distribution of light beam by optical elements> Conventionally, when the light beam 10 has a Gaussian distribution or a uniform distribution, the presence of the arm 205 or 206 of the reflective objective lens 102 blocks a portion of the light beam component 11 reflected by the second reflecting mechanism 202. Furthermore, as described above, the light beam 10 incident on the central region of the first reflecting mechanism 201 is lost. This reduces the utilization efficiency of the irradiation energy of the light beam 10. To address this issue, the present embodiment provides an optical element 110 on the optical path of the light beam 10. The optical element 110 changes the spatial energy distribution of the light beam 10 to distribute the energy so as to avoid the peripheral region of the optical axis of the reflective objective lens 102 and the region corresponding to the arm. By making the light beam 10 with its spatial energy distribution converted in this manner incident on the reflective objective lens 102, it is possible to suppress the reduction in the utilization efficiency of the irradiation energy of the light beam 10, which is caused by the structure of the reflective objective lens 102.

[0030] The optical element 110 may be, for example, an optical mode converter, a phase plate, a conical lens (axicon lens), a vortex lens, a conical mirror, a two-dimensional microlens, or a combination of a plurality of optical elements. The optical mode converter may be, for example, a Gaussian beam (TEM 00 The optical element is configured to be able to convert a light source (such as a cone lens) into a high-order Hermite-Gaussian mode. As a combination of multiple optical elements, for example, a combination of a cone lens and a convex lens, or a combination of a vortex lens and a convex lens, can be used.

[0031] FIG. 3A is a diagram illustrating an optical element 111 that converts the spatial energy distribution of a light beam 10 into a ring-shaped distribution. The left side of FIG. 3A shows a schematic diagram of the light beam 10 and the optical element 111. The center of the light beam 10 is incident on the center of the optical element 111. The right side of FIG. 3A shows a spatial energy distribution 20 of the light beam 10 before passing through the optical element 111 and a spatial energy distribution 21 of the light beam 10 after passing through the optical element 111. The spatial energy distribution 20 of the light beam 10 before passing through the optical element 111 is a Gaussian beam. That is, the energy is distributed so that the energy is high at the center of the light beam 10 and the intensity decreases as the radial distance from the center of the light beam 10 increases. The spatial energy distribution 21 of the light beam 10 after passing through the optical element 111 is ring-shaped. Thus, in the example of FIG. 3A, the optical element 111 is configured to convert the spatial energy distribution of the light beam 10 into a ring-shaped distribution. As such optical element 111, for example, a conical lens, a phase plate, a vortex lens, a conical mirror, a two-dimensional micro lens, a combination of a conical lens and a convex lens, a combination of a vortex lens and a convex lens, or the like can be used.

[0032] FIG. 3B is a diagram illustrating an optical element 112 that converts the spatial energy distribution of the light beam 10 into four parts. The center of the light beam 10 is incident on the center of the optical element 112. After passing through the optical element 112, the spatial energy distribution 22 of the light beam 10 is divided into four parts point-symmetrically around the optical axis (for example, TEM 11 3B, the optical element 112 is configured to convert the spatial energy distribution of the light beam 10 into a four-split state. For example, an optical mode converter or the like can be used as the optical element 112.

[0033] FIG. 3C is a diagram illustrating an optical element 113 that converts the spatial energy distribution of light beam 10 into a three-part distribution. The center of light beam 10 is incident on the center of optical element 113. After passing through optical element 113, spatial energy distribution 23 of light beam 10 is divided into three parts around the optical axis. Thus, in the example of FIG. 3C, optical element 113 is configured to convert the spatial energy distribution of light beam 10 into a three-part distribution. For example, an optical mode converter or the like can be used as optical element 113.

[0034] As shown in FIGS. 3A to 3C , in the spatial energy distributions 21 to 23 after conversion by the optical elements 111 to 113 (optical element 110), energy is not distributed in the center of the light beam 10. The design of the optical elements 111 to 113 (optical element 110) (e.g., the position of the optical element 110, the distance between the multiple optical elements, etc.) is adjusted so that the area of ​​this energy-free region corresponds to the dead area of ​​the first reflecting mechanism 201 of the reflective objective lens 102 described above. This can be generalized as follows: The optical element 110 has a first region on the entrance surface that has a predetermined radius from the center of the entrance surface, and a second region on the exit surface that has the same predetermined radius from the center of the exit surface. The optical element 110 causes the light beam 10 that is incident on the first region on the entrance surface to exit from a region other than the second region on the exit surface. The areas of the first region and the second region correspond to the dead area of ​​the first reflecting mechanism 201 of the reflective objective lens 102. This prevents the energy from being lost as the light beam component 12 described above.

[0035] 3B and 3C, in the spatial energy distributions 22 and 23, the energy of the light beam 10 is not distributed at positions corresponding to the four arms 205 or the three arms 206 (see FIGS. 2B and 2C) of the reflective objective lens 102. This makes it possible to avoid light blocking and loss due to the arm 205 or the arm 206.

[0036] <Detection system configuration example> 4 is a schematic diagram showing the configuration of the detection system 120. The detection system 120 includes a dichroic mirror 122, a spectrometer 123, a condenser lens 124, a half mirror 125, a pinhole 126, a photodetector 127, a pinhole 128, a photodetector 129, a beam splitter 130, an aperture stop 131, and a photodetector 132.

[0037] The light beam 10 is reflected from the surface of the sample 1 and enters the detection system 120, where it is separated into some light components with wavelengths different from the original wavelength by the dichroic mirror 122. These light components are transmitted through the dichroic mirror 122 and enter a spectrometer 123. The remaining light components are reflected by the dichroic mirror 122.

[0038] The beam splitter 130 is disposed between the dichroic mirror 122 and the condenser lens 124. The beam splitter 130 reflects a part or almost all of the light beam 10 toward the aperture stop 131. That is, if the beam splitter 130 is a partial reflection mirror, a part of the light beam 10 is directed toward the aperture stop 131, and if the beam splitter 130 is a total reflection mirror, almost all of the light beam 10 is directed toward the aperture stop 131.

[0039] The photodetector 132 detects the light beam 10 that has passed through the aperture stop 131 to measure the scattering state of the surface of the sample 1 .

[0040] The light component transmitted through the beam splitter 130 enters the condenser lens 124, is focused, and then enters the half mirror 125. At the half mirror 125, approximately half of the focused light beam 10 is transmitted toward the pinhole 126, and approximately the remaining half is reflected toward the pinhole 128. Of the light beam 10 transmitted through the half mirror 125, the light beam 10 that passes through the pinhole 126 is detected by the photodetector 127. Of the light beam 10 reflected by the half mirror 125, the light beam 10 that passes through the pinhole 128 is detected by the photodetector 129. The pinholes 126 and 128 are positioned away from the focal position of the condenser lens 124. That is, the pinhole 126 is positioned at a distance L from the focal position of the condenser lens 124 in a direction away from the sample 1. The pinhole 128 is positioned at a distance L from the focal position of the condenser lens 124 in a direction approaching the sample 1.

[0041] The configuration of the detection system 120 is not limited to the above-described configuration and can be changed as desired. It is not necessary for all of the spectrometer 123 and the photodetectors 127, 129, and 132 to be present; it is sufficient to have one or more. The photodetectors 127, 129, and 132 can be, for example, photodiodes (PDs), avalanche photodiodes (APDs), photomultiplier tubes (PMTs), CCD sensors, CMOS sensors, or other devices capable of converting photons into a current or voltage signal.

[0042] <Controller function> 5 is a functional block diagram of the control device 140. The control device 140 has an overall control unit 141, an energy source control unit 142, a lock-in detection unit 143, a probe light intensity correction unit 144, a spectrometer control unit 145, a defocus amount calculation unit 146, and an XY scan control unit 147. The functions of each unit of the control device 140 can be realized by a processor executing a program stored in a memory.

[0043] The overall control unit 141 is a computing unit that controls each unit and processes and transmits data generated by each unit. The overall control unit 141 can be configured, for example, by a CPU (Central Processing Unit) or an MPU (Micro Processing Unit). Each unit other than the overall control unit 141 may be configured by dedicated hardware using, for example, an ASIC (Application Specific Integrated Circuit) or an FPGA (Field-Programmable Gate Array), or may be configured by software that runs on a computing unit.

[0044] The energy source control unit 142 controls the wavelength, intensity, etc. of the light beam 10 emitted from the light source 104. By scanning the wavelength, the absorption spectrum of the sample 1 can be measured. Furthermore, by modulating the intensity of the light beam 10, lock-in detection by the lock-in detection unit 143, which will be described later, becomes possible.

[0045] The lock-in detection unit 143 detects the amount of light detected by the photodetector 127 and the amount of light detected by the photodetector 129 while comparing them with the modulation signal transmitted from the energy source control unit 142, thereby performing so-called lock-in detection.

[0046] Instead of lock-in detection, so-called AM detection may be used, in which a displacement signal corresponding to the modulation frequency of the light beam 10 is extracted using a filter and then its amplitude is measured. Alternatively, the displacement signal may be subjected to spectrum analysis using FFT or the like, and the intensity of the spectral peak corresponding to the modulation frequency may be measured. Furthermore, other common amplitude detection methods may be used.

[0047] The probe light intensity correction unit 144 monitors the output of the above detection and corrects the intensity of the light beam 10 .

[0048] The spectrometer control unit 145 performs parameter adjustment and signal recovery for the spectrometer 123 .

[0049] The defocus amount calculation unit 146 drives the stage 101 or the stage 103 to control the position in the Z direction of the reflective objective lens 102. Controlling the position in the Z direction of the reflective objective lens 102 enables the light beam 10 to follow the irregularities on the surface of the sample 1.

[0050] The XY scan control unit 147 moves the stage 101 or the stage 103 in the X and Y directions. By moving the stage 101 or the stage 103, the light beam 10 can be irradiated at any position on the sample 1, enabling spectroscopic measurement of a two-dimensional plane on the surface of the sample 1. Alternatively, when combined with the stage 101 or 103 that can move in the Z axis, three-dimensional optical measurement becomes possible.

[0051] <Summary of the First Embodiment> As described above, the spectroscopic measurement device 100 according to the first embodiment includes the stage 101 on which the sample 1 is placed, the light source 104 (electromagnetic wave source) that emits the light beam 10 (electromagnetic wave), the optical element 110 (one or more optical elements) that changes the spatial energy distribution of the light beam 10 and emits it, and the reflective objective lens 102 that focuses the light beam 10 after its spatial energy distribution has been changed and irradiates the sample 1. By converting the spatial energy distribution of the light beam 10 incident on the reflective objective lens 102 in this way, it is possible to suppress a decrease in the utilization efficiency of the irradiation energy of the light beam 10 that is caused by the structure of the reflective objective lens 102. As a result, it is possible to improve the detection sensitivity of the light beam 10 reflected from the sample 1. Furthermore, it is possible to use a relatively inexpensive, low-power light source as the light source 104, which also leads to cost reduction.

[0052] [Second embodiment] In the above-described first embodiment, a configuration has been described in which the beam splitter 105 is disposed in front of the optical element 110. The position of the beam splitter 105 is not limited to in front of the optical element 110. Therefore, in the second embodiment, a configuration in which the position of the beam splitter 105 is changed will be described.

[0053] <Configuration example of spectroscopic measurement device> Fig. 6 is a schematic diagram showing the overall configuration of a spectroscopic measurement device 200 according to the second embodiment. In Fig. 6, a beam splitter 105 is arranged behind the optical element 110. This allows the light components reflected from the sample 1 to be directly incident on the detection system 120 without passing through the optical element 110, thereby reducing the loss of light due to the optical element 110. The other configuration is the same as that of the spectroscopic measurement device 100 of the first embodiment (Fig. 1), so a description thereof will be omitted.

[0054] [Third embodiment] In the first embodiment, the spectroscopic measurement device 100 has been described as having only one light source 104. In the third embodiment, a configuration having a plurality of light sources will be described.

[0055] <Configuration example of spectroscopic measurement device> 7 is a schematic diagram showing the overall configuration of a spectroscopic measurement device 300 according to the third embodiment. The spectroscopic measurement device 300 further includes an energy supply light source 106, a dichroic mirror 107, and a spatial filter 108. The other configurations are the same as those of the spectroscopic measurement device 100 according to the first embodiment.

[0056] The energy supply light source 106 (electromagnetic wave source) emits an energy beam 50 (electromagnetic waves) for imparting energy to the sample 1. The wavelength of the energy beam 50 can be, for example, 19 nm to 30 μm. In particular, the energy beam 50 can be, for example, an infrared beam. The energy beam 50 passes through a dichroic mirror 107, passes through an optical element 110, is focused by a reflective objective lens 102, and is then irradiated onto the sample 1. The sample 1 irradiated with the energy beam 50 absorbs the imparted energy and undergoes physical phenomena such as thermal expansion and magnetism. In order to measure the physical phenomena occurring in the sample 1, the light beam 10 (measurement electromagnetic wave) emitted from the light source 104 is set to an electromagnetic wave capable of measuring the physical properties of the sample 1. The wavelength of the light beam 10 can be, for example, 19 nm to 2 μm. The light beam 10 is reflected by the dichroic mirror 107 toward the reflective objective lens 102. The light beam 10 reflected by the dichroic mirror 107 has its spatial energy distribution converted by the optical element 110, light in a predetermined wavelength range is filtered by the spatial filter 108, and the light is focused by the reflective objective lens 102 before being irradiated onto the sample 1.

[0057] The light beam 10 reflected from the sample 1 passes through the spatial filter 108, is reflected by the beam splitter 105, and enters the detection system 120. By using a spatial filter 108 that eliminates light in a wavelength range that is not the target of detection from the light beam 10, the S / N ratio in the detection system 120 can be improved. A multifocal lens can be used instead of or in combination with the spatial filter 108. The spatial filter 108 and the multifocal lens are not necessarily required. Furthermore, the spatial filter 108 and the multifocal lens can be similarly arranged in the spectroscopic measurement device 100 of the first embodiment and the spectroscopic measurement device 200 of the second embodiment.

[0058] FIG. 8 is a diagram for explaining the energy beam 50 and light beam 10 irradiated onto the sample 1. As described above, both the energy beam 50 and the light beam 10 are focused by the reflective objective lens 102 and irradiated onto the sample 1. The light beam 10 has a smaller beam diameter than the energy beam 50 and irradiates an area narrower than the area irradiated by the energy beam 50. This makes it possible to measure the physical property values ​​of the area irradiated by the energy beam 50 with high spatial resolution. In particular, when the light beam 10 is a visible light beam, the spatial resolution of the measurement is approximately <1 μm. Furthermore, a confocal detector can be used as the measurement system.

[0059] <Summary of the third embodiment> As described above, the spectroscopic measurement device 300 according to the third embodiment includes the energy supply light source 106 and the light source 104 as light sources, and irradiates the sample 1 with the energy beam 50 that causes a physical phenomenon in the sample 1 and the light beam 10 that measures the physical properties of the sample 1. The spatial energy distributions of both the energy beam 50 and the light beam 10 are converted by the optical element 110, and the energy beam 50 and the light beam 10 can be irradiated onto areas that avoid the central area of ​​the optical axis of the reflective objective lens 102 and areas where the arms are present. Therefore, a decrease in the energy efficiency of both the energy beam 50 and the light beam 10 is suppressed.

[0060] [Variations] The present disclosure is not limited to the above-described embodiments and includes various modifications. For example, the above-described embodiments have been described in detail to clearly explain the present disclosure, and it is not necessary to include all of the described configurations. Furthermore, a part of one embodiment can be replaced with a configuration of another embodiment. Furthermore, a configuration of another embodiment can be added to a configuration of one embodiment. Furthermore, a part of the configuration of each embodiment can be added to, deleted from, or substituted for a part of the configuration of another embodiment. [Explanation of symbols]

[0061] 1...Sample 10...Light beam 20~23…Spatial energy distribution 100, 200, 300...Spectrometer 110...Optical element

Claims

1. a stage on which a sample is placed; an electromagnetic wave source that emits electromagnetic waves; one or more optical elements that change the spatial energy distribution of the electromagnetic wave and output the wave; a reflective objective lens that focuses the electromagnetic wave after the spatial energy distribution has been converted and irradiates the sample with the focused electromagnetic wave; Equipped with The one or more optical elements are: a first area on the incident surface, the first area being defined by a predetermined radius from the center of the incident surface; and a second area on the exit surface, the second area being defined by the predetermined radius from the center of the exit surface; The electromagnetic wave incident on the first region is emitted from a region other than the second region of the emission surface, The one or more optical elements are configured to convert the spatial energy distribution of the electromagnetic wave into a three-part distribution. Spectrometer.

2. a stage on which a sample is placed; an electromagnetic wave source that emits electromagnetic waves; one or more optical elements that change the spatial energy distribution of the electromagnetic wave and output the wave; a reflective objective lens that focuses the electromagnetic wave after the spatial energy distribution has been converted and irradiates the sample with the focused electromagnetic wave; Equipped with The one or more optical elements are: a first area on the incident surface, the first area being defined by a predetermined radius from the center of the incident surface; and a second area on the exit surface, the second area being defined by the predetermined radius from the center of the exit surface; The electromagnetic wave incident on the first region is emitted from a region other than the second region of the emission surface, The one or more optical elements are configured to transform the spatial energy distribution of the electromagnetic wave into a quadrant. Spectrometer.

3. 3. The spectroscopic measurement device according to claim 1, the reflective objective lens has a reflecting mechanism and a support that supports the reflecting mechanism; A spectroscopic measurement device in which the one or more optical elements convert the spatial energy distribution so that the electromagnetic waves enter the reflective objective lens while avoiding the peripheral area of ​​the optical axis of the reflective objective lens and the area of ​​the support.

4. 3. The spectroscopic measurement device according to claim 1, the electromagnetic wave source includes a plurality of light sources; The spectroscopic measurement device, wherein the plurality of light sources include an energy source that irradiates a predetermined region of the sample with an energy beam, and a measurement electromagnetic wave source that irradiates the sample with a measurement electromagnetic wave.

5. 3. The spectroscopic measurement device according to claim 1, The spectroscopic measurement device, wherein the one or more optical elements include an axicon lens, a phase plate, a vortex lens, a conical mirror, a two-dimensional microlens, or an optical mode converter.

6. 3. The spectroscopic measurement device according to claim 1, The electromagnetic wave source is a spectrometer configured to be able to convert the wavelength of the electromagnetic wave from 19 nm to 30 μm.

7. The spectroscopic measurement device according to claim 4, The energy source is a spectroscopic measurement device configured to be able to emit the energy beam having a wavelength of 19 nm to 30 μm.

8. The spectroscopic measurement device according to claim 4, The measurement electromagnetic wave source is a spectroscopic measurement device configured to be able to emit the measurement electromagnetic wave having a wavelength of 19 nm to 2 μm.

9. 3. The spectroscopic measurement device according to claim 1, The spectroscopic measurement apparatus further comprises a drive device that drives the stage or the reflective objective lens so as to change the relative position between the sample and the reflective objective lens in three axial directions.

10. 3. The spectroscopic measurement device according to claim 1, The spectrometer further includes a detector for detecting other electromagnetic waves resulting from the electromagnetic waves incident on the sample.

11. The spectroscopic measurement device according to claim 10, The spectroscopic measurement device further comprises a spatial filter or a multifocal lens positioned in front of the detector.

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