Hyperspectral element, hyperspectral sensor including same, and hyperspectral image generating device

Abstract

To provide a hyperspectral element, a hyperspectral sensor, and a hyperspectral image generating apparatus.SOLUTION: A hyperspectral element provided herein comprises a multi filter configured to pass first wavelength light of a first wavelength and second wavelength light of a second wavelength, and a multi detector configured to detect the first wavelength light and the second wavelength light, where the multi filter comprises a first sub filter configured to pass the first wavelength light and a second sub filter configured to pass the second wavelength light. The first sub filter and the second sub filter are arranged in series.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a hyperspectral element, a hyperspectral sensor, and a hyperspectral image generating device. [Background technology]

[0002] Image sensors using spectral filters are one of the most important optical devices in the optical field. Conventional image sensors contain various optical elements, making them bulky and heavy. Recently, in response to the demand for miniaturization of image sensors, research is being conducted into simultaneously implementing integrated circuits and optical elements on a single semiconductor chip.

[0003] Hyperspectral imaging technology is a method for simultaneously acquiring image and spectral information. Methods for generating hyperspectral images can be broadly divided into scanning and non-scanning snapshot methods. The scanning method can be implemented by combining a scanning device with a spectral image sensor. The non-scanning snapshot method is a method in which different filters are directly implemented on image pixels for measurement.

[0004] The scanning hyperspectral measurement method is advantageous for obtaining high-resolution hyperspectral images, but it requires a long measurement time and is difficult to miniaturize the scanning equipment.The non-scanning snapshot method has the advantages of being able to measure in a short time like a general camera and being advantageous for miniaturization, but it limits the space of image pixels for spectral resolution, resulting in a decrease in image resolution. Summary of the Invention [Problem to be solved by the invention]

[0005] The problem that the present invention aims to solve is to provide a hyperspectral element that has high resolution and broadband characteristics.

[0006] Another problem to be solved by the present invention is to provide a hyperspectral sensor having high resolution and broadband characteristics.

[0007] Another problem to be solved by the present invention is to provide a hyperspectral image generating device having high resolution and broadband characteristics.

[0008] However, the problem to be solved by the present invention is not limited to the above disclosure. [Means for solving the problem]

[0009] In one aspect, a multi-filter that passes first wavelength light having a first wavelength and second wavelength light having a second wavelength different from the first wavelength, and a multi-detector that senses the first wavelength light and the second wavelength light, the multi-filter includes a first sub-filter that passes the first wavelength light and a second sub-filter that passes the second wavelength light, and the first sub-filter and the second sub-filter are arranged in series to form a super-spectral element.

[0010] The optical transmission spectrum of the first sub-filter has a first utilization band and a first sub-optical transmission region outside the first utilization band, and the optical transmission spectrum of the second sub-filter has a second utilization band and a second sub-optical transmission region outside the second utilization band, but the first wavelength is also included in the first utilization band and the second sub-optical transmission region, and the second wavelength is also included in the second utilization band and the first sub-optical transmission region.

[0011] The first and second usage bands may partially overlap.

[0012] The multi-detector includes a first sub-detector having a first light-sensing band that overlaps with the first wavelength and the second wavelength, and a second sub-detector having a second light-sensing band that overlaps with either the first wavelength or the second wavelength, and the first sub-detector and the second sub-detector are also arranged in series.

[0013] In one aspect, the optical system further includes a spectroscopic processor, wherein the first sub-detector generates a first channel signal related to the first wavelength light and the second wavelength light and provides it to the spectroscopic processor, and the second sub-detector generates a second channel signal related to the second wavelength light and provides it to the spectroscopic processor, and the spectroscopic processor can generate information related to the intensities of the first wavelength light and the second wavelength light based on the first channel signal and the second channel signal.

[0014] The multi-detector further includes an ultraviolet detector, which is also arranged in series with the first sub-detector and the second sub-detector.

[0015] The multi-detector further includes an infrared detector, which is also arranged in series with the first sub-detector and the second sub-detector.

[0016] The first sub-filter and the second sub-filter each include a first refractive index film and a second refractive index film stacked on top of each other, and the first refractive index film may have a different refractive index from the second refractive index film.

[0017] The first refractive index film of the first sub-filter and the first refractive index film of the second sub-filter may have different thicknesses.

[0018] Each of the first sub-filter and the second sub-filter includes a first reflective layer, a second reflective layer, and a nanostructured layer provided between the first reflective layer and the second reflective layer, wherein the nanostructured layer includes a plurality of nanorods, and the plurality of nanorods are also arranged asymmetrically.

[0019] Each of the first sub-filter and the second sub-filter includes a first reflective layer, a second reflective layer, and a nanostructured layer provided between the first reflective layer and the second reflective layer, wherein the nanostructured layer includes a plurality of nanoholes, and the plurality of nanoholes are also arranged asymmetrically.

[0020] The multi-detector includes an n-type film and a p-type film stacked on top of each other, and the n-type film and the p-type film can form a first photodiode and a second photodiode that is positioned deeper than the first photodiode.

[0021] The multi-filter is provided on the multi-detector, and the first photodiode can sense the first wavelength light and the second wavelength light, and the second photodiode can sense light having a relatively longer wavelength between the first wavelength light and the second wavelength light.

[0022] The optical fiber further includes a spectroscopic processor, wherein the first photodiode generates a first channel signal related to the first wavelength light and the second wavelength light and provides it to the spectroscopic processor, and the second photodiode generates a second channel signal related to the second wavelength light and provides it to the spectroscopic processor, and the spectroscopic processor generates information related to the intensities of the first wavelength light and the second wavelength light based on the first channel signal and the second channel signal.

[0023] The optical filter further includes a microlens, which is arranged in series with the multi-filter and can focus incident light onto the multi-filter.

[0024] In one aspect, a light transmission spectrum detector includes a plurality of pixels that sense an optical transmission spectrum of incident light, a spectroscopic processor, and a main processor, each of the plurality of pixels including a first multi-filter that passes first wavelength light having a first wavelength and second wavelength light having a second wavelength longer than the first wavelength among the incident light, a first multi-detector that generates first channel signals relating to the first wavelength light and the second wavelength light and second channel signals relating to the second wavelength light and provides the first channel signals and the second channel signals to the spectroscopic processor, a third wavelength light having a third wavelength among the incident light, and and a second multi-filter that passes a fourth wavelength light having a fourth wavelength longer than the third wavelength, and a second multi-detector that generates a third channel signal related to the third wavelength light and the fourth wavelength light and a fourth channel signal related to the fourth wavelength light and provides the third channel signal and the fourth channel signal to the spectroscopic processor, wherein the spectroscopic processor generates information related to the intensities of the first wavelength light to the fourth wavelength light based on the first channel signal to the fourth channel signal and provides the information related to the intensities of the first wavelength light to the fourth wavelength light to a main processor.

[0025] The first multi-filter includes a first sub-filter and a second sub-filter, and the optical transmission spectrum of the first sub-filter has a first utilization band and a first sub-transmission region outside the first utilization band, and the optical transmission spectrum of the second sub-filter has a second utilization band and a second sub-transmission region outside the second utilization band, but the first wavelength is included in the first utilization band and the second sub-transmission region, and the second wavelength is included in the second utilization band and the first sub-transmission region.

[0026] The first and second usage bands may partially overlap.

[0027] The second multi-filter includes a third sub-filter and a fourth sub-filter, and the optical transmission spectrum of the third sub-filter has a third utilization band and a third sub-transmission region, and the optical transmission spectrum of the fourth sub-filter has a fourth utilization band and a fourth sub-transmission region, wherein the third wavelength is included in the third utilization band and the fourth sub-transmission region, and the fourth wavelength is also included in the fourth utilization band and the third sub-transmission region.

[0028] The third and fourth usage bands may partially overlap.

[0029] The first multi-filter and the second multi-filter are arranged in parallel, the first sub-filter and the second sub-filter are also arranged in series, and the third sub-filter and the fourth sub-filter are also arranged in series.

[0030] The first multi-detector includes a first sub-detector that receives the first wavelength light and the second wavelength light and generates the first channel signal, and a second sub-detector that receives the second wavelength light and generates the second channel signal, and the second multi-detector also includes a third sub-detector that receives the third wavelength light and the fourth wavelength light and generates the third channel signal, and a fourth sub-detector that receives the fourth wavelength light and generates the fourth channel signal.

[0031] Within each of the second multi-detectors, the first sub-detector and the second sub-detector are also arranged in series.

[0032] In one aspect, the hyperspectral image generating device includes: a hyperspectral element that receives incident light provided from an object to be measured and generates a first channel signal related to light having a first wavelength and light having a second wavelength, and a second channel signal related to the light having the first wavelength; a spectroscopic processor that generates first hyperspectral information related to the intensity of light having the first wavelength at each position of the object to be measured and second hyperspectral information related to the intensity of light having the second wavelength at each position of the object to be measured based on the first channel signal and the second channel signal; a main processor that generates hyperspectral image information based on the first hyperspectral information and the second hyperspectral information; and a display element that displays a hyperspectral image based on the hyperspectral image information, wherein the hyperspectral element is also the hyperspectral image generating device. [Effects of the Invention]

[0033] The present disclosure can provide a hyperspectral element with high resolution and broadband characteristics.

[0034] The present disclosure can provide a hyperspectral sensor with high resolution and broadband characteristics.

[0035] The present disclosure can provide a hyperspectral image generating device with high resolution and broadband characteristics.

[0036] However, the effects are not limited to those described above. [Brief explanation of the drawings]

[0037] [Figure 1] FIG. 1 is a schematic block diagram of an image sensor in accordance with an exemplary embodiment; [Figure 2] FIG. 1 is a block diagram of a hyperspectral element in accordance with an exemplary embodiment; [Figure 3] 3 is a flowchart illustrating a method for measuring light using the hyperspectral element of FIG. 2. [Figure 4] 3 is a diagram showing the optical transmission spectra of the first to third sub-filters and the multi-filter of FIG. 2; [Figure 5] 3 is a diagram showing the optical transmission spectrum of the multi-filter of FIG. 2 and the optical sensing bands of the first to third sub-detectors. [Figure 6] 1 is a cross-sectional view of a hyper-splitting element according to an exemplary embodiment; [Figure 7] 7 is an exemplary optical transmission spectrum graph of the first to third sub-filters of FIG. 6. [Figure 8] 7 is an exemplary optical transmission spectrum of the multi-filter of FIG. 6. [Figure 9] 1 is a cross-sectional view of a hyper-splitting element according to an exemplary embodiment; [Figure 10] 10 is an exemplary perspective view of a multi-filter according to an exemplary embodiment of the hyper-dispersive element of FIG. 9. [Figure 11] 10 is an exemplary perspective view of a multi-filter according to an exemplary embodiment of the hyper-dispersive element of FIG. 9. [Figure 12] 10 is an exemplary perspective view of a multi-filter according to an exemplary embodiment of the hyper-dispersive element of FIG. 9. [Figure 13] 10 is an exemplary perspective view of a multi-filter according to an exemplary embodiment of the hyper-dispersive element of FIG. 9. [Figure 14] 10 is an exemplary optical transmission spectrum of the multi-filter of FIG. 9. [Figure 15] 1 is a cross-sectional view of a hyper-splitting element according to an exemplary embodiment; [Figure 16] 1 is a cross-sectional view of a hyper-splitting element according to an exemplary embodiment; [Figure 17] FIG. 1 is a block diagram of a hyperspectral sensor according to an exemplary embodiment. [Figure 18] FIG. 18 is a block diagram of the pixel of FIG. 17. [Figure 19] 18 is a flowchart for explaining a method for measuring light using the hyperspectral sensor of FIG. 17. [Figure 20] 19 is a graph showing the optical transmission spectrum of the multi-filter of FIG. 18. [Figure 21] 18 is a cross-sectional view of a pixel according to an exemplary embodiment of the hyperspectral sensor of FIG. 17. [Figure 22] 1 is a block diagram of a hyperspectral image generating device including a hyperspectral sensor according to an exemplary embodiment; [Figure 23] FIG. 1 is a block diagram illustrating an example of an electronic device including an image sensor. [Figure 24] FIG. 24 is a block diagram that schematically illustrates the camera module of FIG. 23. [Figure 25] 1A to 1C are diagrams illustrating various examples of electronic devices to which image sensors according to exemplary embodiments are applied; [Figure 26] 1A to 1C are diagrams illustrating various examples of electronic devices to which image sensors according to exemplary embodiments are applied; [Figure 27] 1A to 1C are diagrams illustrating various examples of electronic devices to which image sensors according to exemplary embodiments are applied; [Figure 28] 1A to 1C are diagrams illustrating various examples of electronic devices to which image sensors according to exemplary embodiments are applied; [Figure 29] 1A to 1C are diagrams illustrating various examples of electronic devices to which image sensors according to exemplary embodiments are applied; [Figure 30] 1A to 1C are diagrams illustrating various examples of electronic devices to which image sensors according to exemplary embodiments are applied; [Figure 31] 1A to 1C are diagrams illustrating various examples of electronic devices to which image sensors according to exemplary embodiments are applied; [Figure 32] 1A to 1C are diagrams illustrating various examples of electronic devices to which image sensors according to exemplary embodiments are applied; [Figure 33] 1A to 1C are diagrams illustrating various examples of electronic devices to which image sensors according to exemplary embodiments are applied; [Figure 34] 1A to 1C are diagrams illustrating various examples of electronic devices to which image sensors according to exemplary embodiments are applied; DETAILED DESCRIPTION OF THE INVENTION

[0038] Hereinafter, the present embodiment will be described in detail with reference to the accompanying drawings. The described embodiment is merely exemplary, and various modifications are possible from such an embodiment. In the following drawings, the same reference numerals refer to the same components, and the size of each component in the drawings may be exaggerated for clarity and convenience of explanation.

[0039] In the following description, the terms "upper" and "above" may include not only something that is directly above in contact with something, but also something that is above without contacting something.

[0040] The singular expression includes the plural expression unless the context clearly indicates otherwise. Furthermore, when a part "comprises" a certain element, it does not mean that it excludes other elements, but that it may further include other elements, unless otherwise specified to the contrary.

[0041] In the following description, "arranged in series" means arranged on one optical path.

[0042] In the following description, "arranged in parallel" means arranged on different optical paths.

[0043] FIG. 1 is a schematic block diagram of an image sensor according to an example embodiment.

[0044] 1, the image sensor 4000 may include a pixel array 4100, a timing controller (T / C) 4010, a row decoder 4020, and an output circuit 4030. The image sensor 4000 may include, but is not limited to, a charge coupled device (CCD) image sensor or a complementary metal oxide semiconductor (CMOS) image sensor.

[0045] The pixel array 4100 may include a multi-filter array 4110 and a multi-detector array 4120. The multi-filter array 4110 includes a plurality of multi-filters arranged two-dimensionally by transmitting light in different wavelength regions.

[0046] The multi-detector array 4120 includes a plurality of multi-detectors that detect light of different wavelengths transmitted through a plurality of multi-filters. Specifically, the multi-detector array 4120 includes multi-detectors that are two-dimensionally arranged along a plurality of rows and columns.

[0047] The pixel array 4100 may include a plurality of pixels arranged two-dimensionally. Each of the plurality of pixels may include a plurality of sub-pixels. Each of the plurality of sub-pixels may include multiple filters and multiple detectors corresponding to each other. The arrangement of the plurality of pixels may be realized in various ways.

[0048] The row decoder 4020 selects one of the rows of the multi-detector array 4120 in response to a row address signal output from the timing controller 4010. The output circuit 4030 outputs a photodetection signal in units of a column from a plurality of multi-detectors arranged along the selected row. To this end, the output circuit 4030 may include a column decoder and an analog-to-digital converter (ADC).

[0049] For example, the output circuit 4030 may include a plurality of ADCs arranged for each column between the column decoder and the multi-detector array 4120, or a single ADC arranged at the output end of the column decoder. The timing controller 4010, the row decoder 4020, and the output circuit 4030 may be implemented on a single chip or on separate chips. A processor for processing the video signal output via the output circuit 4030 may also be implemented on a single chip together with the timing controller 4010, the row decoder 4020, and the output circuit 4030.

[0050] Figure 2 is a block diagram of a hyperspectral element according to an exemplary embodiment, and Figure 3 is a flowchart illustrating a method for measuring light using the hyperspectral element of Figure 2.

[0051] Figure 4 shows the optical transmission spectrum of the first to third sub-filters and the optical transmission spectrum of the multi-filter in Figure 2. Figure 5 shows the optical transmission spectrum of the multi-filter in Figure 2 and the optical sensitivity bands of the first to third sub-detectors.

[0052] Referring to FIG. 2, a super-spectral element 10 is provided. The super-spectral element 10 may include a multi-filter 100, a multi-detector 200, and a spectroscopic processor 300. The multi-filter 100 and the multi-detector 200 are also included in the multi-filter array 4110 (FIG. 1) and the multi-detector array 4120 (FIG. 1), respectively, described with reference to FIG. 1. In other words, the multi-filter 100 is one of the multiple multi-filters that make up the multi-filter array 4110 (FIG. 1), and the multi-detector 200 is one of the multiple multi-detectors that make up the multi-detector array 4120 (FIG. 1). The spectroscopic processor 300 is also substantially the same as the processor described with reference to FIG. 1. The multi-filter 100 and the multi-detector 200 are also arranged in series. In this specification, "arranged in series" means arranged on one optical path. The multi-filter 100 and the multi-detector 200 are also arranged on the optical path of the incident light IL. For example, incident light IL can pass through multiple filters 100 and multiple detectors 200 in sequence.

[0053] The multi-filter 100 may include multiple sub-filters 102, 104, and 106. The multiple sub-filters 102, 104, and 106 may have different optical transmission characteristics. The optical transmission spectra of the multiple sub-filters 102, 104, and 106 may also be different from one another. While the multi-filter 100 is illustrated as including a first sub-filter 102, a second sub-filter 104, and a third sub-filter 106, the number of sub-filters is not limited. In other exemplary embodiments, the multi-filter 100 may include fewer or more than three sub-filters. The multi-filter 100 may emit filtered light FL. The filtered light FL is also incident light IL filtered by the multi-filter 100. The filtered light FL may have multiple wavelength bands determined by the different optical transmission characteristics of the multiple sub-filters 102, 104, and 106. The optical transmission spectra of the first sub-filter 102, the second sub-filter 104, the third sub-filter 106, and the multi-filter 100 are described below.

[0054] The multi-detector 200 can sense the filtered light FL. The multi-detector 200 may include multiple sub-detectors 202, 204, and 206. The multiple sub-detectors 202, 204, and 206 may have different light-sensing characteristics. The light-sensing characteristics of the multiple sub-detectors 202, 204, and 206 will be described below. While the multi-detector 200 is illustrated as including a first sub-detector 202, a second sub-detector 204, and a third sub-detector 206, the number of sub-detectors is not limited. In other exemplary embodiments, the multi-detector 200 may include fewer or more than three sub-detectors. The first sub-detector 202, the second sub-detector 204, and the third sub-detector 206 may also be arranged in series. For example, the first sub-detector 202, the second sub-detector 204 and the third sub-detector 206 are also arranged in order on the optical path of the filtered light FL.

[0055] The multi-filter 100 and multi-detector 200 of the present disclosure are also provided within one sub-pixel, which will be described later. The first sub-filter 102, the second sub-filter 104, and the third sub-filter 106, and the first sub-detector 202, the second sub-detector 204, and the third sub-detector 206 are also combined to measure multiple wavelength bands required in one sub-pixel. An exemplary method for the hyper-spectral element 10 to measure multiple wavelength bands will be described below.

[0056] 3 and 4, incident light IL is filtered by the multi-filter 100 to generate filtered light FL having a first wavelength band, a second wavelength band, and a third wavelength band (S110). The incident light IL is emitted from an object to be measured and provided to the multi-filter 100. The filtered light FL is obtained by blocking light having wavelengths other than the first wavelength band, the second wavelength band, and the third wavelength band from the incident light IL. FIG. 4 illustrates the optical transmission spectrum T(1) (circled number 1 in FIG. 4) of the first sub-filter 102, the optical transmission spectrum T(2) (circled number 2 in FIG. 4) of the second sub-filter 104, the optical transmission spectrum T(3) (circled number 3 in FIG. 4) of the third sub-filter 106, and the optical transmission spectrum T(4) (circled number 4 in FIG. 4) of the multi-filter 100. For ease of explanation, the transmittance of the first sub-filter 102, the second sub-filter 104 and the third sub-filter 106, and the light transmittance of the multi-filter 100 are denoted as either 0 or 1.

[0057] The optical transmission spectrum T(1) of the first sub-filter 102 may have a first pass wavelength PB1, a first use band UB1, a 1a sub-light-transmitting region STR1a, and a 1b sub-light-transmitting region STR1b. The first use band UB1 is also provided between the 1a sub-light-transmitting region STR1a and the 1b sub-light-transmitting region STR1b. In other words, the 1a sub-light-transmitting region STR1a and the 1b sub-light-transmitting region STR1b are also regions outside the first use band UB1. The first pass wavelength PB1 is also adjusted within the first use band UB1. Light having wavelengths included in the first use band UB1 other than the first pass wavelength PB1 is also blocked by the first sub-filter 102. The first use band UB1 is also a wavelength band in which the first sub-filter 102 can function as a transmission filter that passes light having a specific wavelength.

[0058] The optical transmission spectrum T(2) of the second sub-filter 104 may have a second pass wavelength PB2, a 2a sub-light-transmitting region STR2a, and a 2b sub-light-transmitting region STR2b. A second use band UB2 is also provided between the 2a sub-light-transmitting region STR2a and the 2b sub-light-transmitting region STR2b. In other words, the 2a sub-light-transmitting region STR2a and the 2b sub-light-transmitting region STR2b are also regions outside the second use band UB2. The second pass wavelength PB2 is also adjusted within the second use band UB2. Light having wavelengths included in the second use band UB2, excluding the second pass wavelength PB2, is also blocked by the second sub-filter 104. The second use band UB2 is also a wavelength band in which the second sub-filter 104 can act as a transmission filter that passes light having a specific wavelength.

[0059] The optical transmission spectrum T(3) of the third sub-filter 106 may have a third pass wavelength PB3, a 3a sub-transmitting region STR3a, and a 3b sub-transmitting region STR3b. A third use band UB3 is also provided between the 3a sub-transmitting region STR3a and the 3b sub-transmitting region STR3b. In other words, the 3a sub-transmitting region STR3a and the 3b sub-transmitting region STR3b are also regions outside the third use band UB3. The third pass wavelength PB3 is also adjusted within the third use band UB3. Light having wavelengths included in the third use band UB3, excluding the third pass wavelength PB3, is also blocked by the third sub-filter 106. The third use band UB3 is also a wavelength band in which the third sub-filter 106 can function as a transmission filter that passes light having a specific wavelength.

[0060] The first utilization band UB1 may overlap one of the 2a-th sub-light-transmitting region STR2a and the 2b-th sub-light-transmitting region STR2b, and one of the 3a-th sub-light-transmitting region STR3a and the 3b-th sub-light-transmitting region STR3b. For example, the first utilization band UB1 may overlap the 2a-th sub-light-transmitting region STR2a and the 3a-th sub-light-transmitting region STR3a. While the first utilization band UB1 is illustrated as partially overlapping the 2a-th sub-light-transmitting region STR2a and completely overlapping the 3a-th sub-light-transmitting region STR3a, this is merely an example. As another example, the first utilization band UB1 may completely overlap the 2a-th sub-light-transmitting region STR2a and the 3a-th sub-light-transmitting region STR3a.

[0061] The first transmission wavelength PB1 is also determined to completely overlap one of the 2a sub-light-transmitting regions STR2a and 2b sub-light-transmitting regions STR2b, and one of the 3a sub-light-transmitting regions STR3a and 3b sub-light-transmitting regions STR3b, which overlap the first utilization band UB1. For example, the first transmission wavelength PB1 may completely overlap the 2a sub-light-transmitting regions STR2a and 3a sub-light-transmitting regions STR3a. The second utilization band UB2 may overlap one of the 1a sub-light-transmitting regions STR1a and 1b sub-light-transmitting regions STR1b, and one of the 3a sub-light-transmitting regions STR3a and 3b sub-light-transmitting regions STR3b. For example, the second utilization band UB2 may overlap the 1b sub-light-transmitting regions STR1b and 3a sub-light-transmitting regions STR3a. Although the second utilization band UB2 is illustrated as partially overlapping with each of the 1b sub-light-transmitting region STR1b and the 3a sub-light-transmitting region STR3a, this is for illustrative purposes only. In other examples, the second utilization band UB2 may completely overlap with the 1b sub-light-transmitting region STR1b and the 3a sub-light-transmitting region STR3a.

[0062] The second transmission wavelength PB2 is also determined to completely overlap one of the 1a sub-light-transmitting region STR1a and the 1b sub-light-transmitting region STR1b, and one of the 3a sub-light-transmitting region STR3a and the 3b sub-light-transmitting region STR3b, which overlap the second utilization band UB2. For example, the second transmission wavelength PB2 may completely overlap the 1b sub-light-transmitting region STR1b and the 3a sub-light-transmitting region STR3a.

[0063] The third utilization band UB3 may overlap one of the 1a sub-light-transmitting region STR1a and the 1b sub-light-transmitting region STR1b, and one of the 2a sub-light-transmitting region STR2a and the 2b sub-light-transmitting region STR2b. For example, the third utilization band UB3 may overlap the 2b sub-light-transmitting region STR2b and the 3b sub-light-transmitting region STR3b. While the third utilization band UB3 is illustrated as completely overlapping the 1b sub-light-transmitting region STR1b but partially overlapping the 2b sub-light-transmitting region STR2b, this is merely an example. In other examples, the third utilization band UB3 may completely overlap the 2b sub-light-transmitting region STR2b and the 1b sub-light-transmitting region STR1b.

[0064] The third transmission wavelength PB3 is also determined to completely overlap one of the 1a sub-light-transmitting region STR1a and the 1b sub-light-transmitting region STR1b, and one of the 2a sub-light-transmitting region STR2a and the 2b sub-light-transmitting region STR2b, which overlap the third utilization band UB3. For example, the third transmission wavelength PB3 may completely overlap the 1b sub-light-transmitting region STR1b and the 2b sub-light-transmitting region STR2b.

[0065] The 1a sub-light-transmitting region STR1a, the 2a sub-light-transmitting region STR2a, and the 3a sub-light-transmitting region STR3a may have overlapping regions. For example, the overlapping region of the 1a sub-light-transmitting region STR1a, the 2a sub-light-transmitting region STR2a, and the 3a sub-light-transmitting region STR3a may be substantially the same as the 1a sub-light-transmitting region STR1a. The 1b sub-light-transmitting region STR1b, the 2b sub-light-transmitting region STR2b, and the 3b sub-light-transmitting region STR3b may have overlapping regions. For example, the overlapping region of the 1b sub-light-transmitting region STR1b, the 2b sub-light-transmitting region STR2b, and the 3b sub-light-transmitting region STR3b may be substantially the same as the 3b sub-light-transmitting region STR3b.

[0066] The optical transmission spectrum T(4) of the multi-filter 100 is also determined by the optical transmission spectrum T(1) of the first sub-filter 102, the optical transmission spectrum T(2) of the second sub-filter 104, and the optical transmission spectrum T(3) of the third sub-filter 106. The wavelength range that passes through the multi-filter 100 is also the wavelength range that passes through all of the first sub-filter 102, the second sub-filter 104, and the third sub-filter 106. The wavelength range that cannot pass through the multi-filter 100 is also the wavelength range that cannot pass through at least one of the first sub-filter 102, the second sub-filter 104, and the third sub-filter 106.

[0067] The optical transmission spectrum T(4) of the multi-filter 100 may have a first final pass wavelength TPB1, a second final pass wavelength TPB2, and a third final pass wavelength TPB3, which are substantially the same as the first pass wavelength PB1, the second pass wavelength PB2, and the third pass wavelength PB3, respectively.

[0068] The light transmission spectrum T(4) of the multi-filter 100 may include a first final sub-light-transmitting region TSTR1 and a second final sub-light-transmitting region TSTR2. The first final sub-light-transmitting region TSTR1 is substantially identical to the region where the 1a sub-light-transmitting region STR1a, the 2a sub-light-transmitting region STR2a, and the 3a sub-light-transmitting region STR3a all overlap. For example, the first final sub-light-transmitting region TSTR1 is substantially identical to the 1a sub-light-transmitting region STR1a. The second final sub-light-transmitting region TSTR2 is substantially identical to the region where the 1b sub-light-transmitting region STR1b, the 2b sub-light-transmitting region STR2b, and the 3b sub-light-transmitting region STR3b all overlap. For example, the second final sub-light-transmitting region TSTR2 is substantially identical to the 3b sub-light-transmitting region STR3b.

[0069] The wavelength band between the first final sub-light-transmitting region TSTR1 and the second final sub-light-transmitting region TSTR2 is also referred to as the final utilization band TUB. The final utilization band TUB is also a wavelength band in which the multi-filter 100 can function as a transmission filter that passes light having a specific wavelength. The final utilization band TUB is also the sum of the first utilization band UB1, the second utilization band UB2, and the third utilization band UB3. The final utilization band TUB is wider than each of the first utilization band UB1, the second utilization band UB2, and the third utilization band UB3.

[0070] The present disclosure can provide a multi-filter 100 that has a wider bandwidth than any one sub-filter 102, 104 or 106.

[0071] 3 and 5, the optical transmission spectrum T(4) of the multi-filter 100, the first optical sensing band DB1 of the first sub-detector 202, the second optical sensing band DB2 of the second sub-detector 204, and the third optical sensing band DB3 of the third sub-detector 206 are provided. The first sub-detector 202, the second sub-detector 204, and the third sub-detector 206 sense the filtered light FL and generate a first channel signal, a second channel signal, and a third channel signal (S120). The first optical sensing band DB1, the second optical sensing band DB2, and the third optical sensing band DB3 are wavelength bands that the first sub-detector 202 can sense, the second sub-detector 204 can sense, and the third sub-detector 206 can sense, respectively. The first optical sensing band DB1, the second optical sensing band DB2, and the third optical sensing band DB3 may overlap with each other. For example, the first photosensitive band DB1 may include the second photosensitive band DB2 and the third photosensitive band DB3, and the second photosensitive band DB2 may include the third photosensitive band DB3. In one example, the first photosensitive band DB1, the second photosensitive band DB2, and the third photosensitive band DB3 are also provided between the first final sub-light-transmitting region TSTR1 and the second final sub-light-transmitting region TSTR2. The first photosensitive band DB1, the second photosensitive band DB2, and the third photosensitive band DB3 are not sensitive to light having wavelengths within the first final sub-light-transmitting region TSTR1 and the second final sub-light-transmitting region TSTR2. The first photosensitive band DB1 may include a first final pass wavelength TPB1, a second final pass wavelength TPB2, and a third final pass wavelength TPB3. The first final pass wavelength TPB1, the second final pass wavelength TPB2, and the third final pass wavelength TPB3 are also sensed by the first sub-detector 202. The first sub-detector 202 can generate first channel signals associated with the first final pass wavelength TPB1, the second final pass wavelength TPB2, and the third final pass wavelength TPB3. The first channel signals are also electrical signals associated with the first final pass wavelength TPB1, the second final pass wavelength TPB2, and the third final pass wavelength TPB3. The first sub-detector 202 can provide the first channel signals to the spectroscopic processor 300.

[0072] The second optical sensing band DB2 includes the second final pass wavelength TPB2 and the third final pass wavelength TPB3, but does not include the first final pass wavelength TPB1. The second final pass wavelength TPB2 and the third final pass wavelength TPB3 are also sensed by the second sub-detector 204. The second sub-detector 204 can generate second channel signals related to the second final pass wavelength TPB2 and the third final pass wavelength TPB3. The second channel signals are also electrical signals related to the second final pass wavelength TPB2 and the third final pass wavelength TPB3. The second sub-detector 204 can provide the second channel signals to the spectroscopic processor 300.

[0073] The third optical sensing band DB3 includes a third final pass wavelength TPB3 but does not include the first final pass wavelength TPB1 or the second final pass wavelength TPB2. The third final pass wavelength TPB3 is also sensed by the third sub-detector 206. The third sub-detector 206 can generate a third channel signal associated with the third pass wavelength. The third channel signal can also be an electrical signal associated with the third pass wavelength. The third sub-detector 206 can provide the third channel signal to the spectroscopic processor 300.

[0074] The spectroscopic processor 300 can generate information related to the intensity of light having the first final pass wavelength TPB1, light having the second final pass wavelength TPB2, and light having the third final pass wavelength TPB3 based on the first channel signal to the third channel signal (S130).

[0075] The present disclosure may provide a multi-filter 100 including multiple sub-filters 102, 104, and 106 arranged in series. The final usable bandwidth TUB of the multi-filter 100 is equal to the sum of the usable bandwidths UB1, UB2, and UB3 of the multiple sub-filters 102, 104, and 106. The multi-filter 100 has a wider usable bandwidth than each of the sub-filters 102, 104, and 106. The multi-detector 200 of the present disclosure may include multiple sub-detectors 202, 204, and 206 to detect light having multiple wavelengths. The multiple sub-detectors 202, 204, and 206 may be arranged within a single sub-pixel. This allows a single sub-pixel to have a large area. This allows the hyper-spectral element 10 to have high resolution.

[0076] FIG. 6 is a cross-sectional view of a hyper-splitting element according to an exemplary embodiment.

[0077] 6, a super-spectral element 12 is provided. The super-spectral element 12 may include a multi-detector 210, a light blocking film ST, a multi-filter 110, a microlens ML, and a spectral processor 300. The multi-detector 210 and the multi-filter 110 may have substantially the same characteristics as those described with reference to FIGS.

[0078] The substrate 1 may include a semiconductor material. For example, the substrate 1 may be a silicon (Si) substrate, a germanium (Ge) substrate, or a silicon germanium (SiGe) substrate. The substrate 1 may include an electronic element. The electronic element may form a processor that controls the multi-detector 210 and receives channel signals from the multi-detector 210. For example, the multi-detector 210 is also electrically connected to the electronic element.

[0079] The light-sensing characteristics of the multi-detector 210 are also substantially the same as those of the multi-detector 210 described with reference to FIGS. 2 to 5. The multi-detector 210 may include multiple p-type layers PL and multiple n-type layers NL stacked on top of each other. FIG. 6 exemplarily illustrates two p-type layers PL and two n-type layers NL. The two p-type layers PL and two n-type layers NL can be stacked on top of each other to form three photodiodes PD1, PD2, and PD3. These photodiodes are also referred to as the first photodiode PD1, the second photodiode PD2, and the third photodiode PD3 in descending order of proximity to the multi-filter 110.

[0080] The light sensing characteristics of the first photodiode PD1, the second photodiode PD2, and the third photodiode PD3 are substantially the same as the light sensing characteristics of the first sub-detector 202, the second sub-detector 204, and the third sub-detector 206, respectively. The first photodiode PD1, the second photodiode PD2, and the third photodiode PD3 can generate a first channel signal, a second channel signal, and a third channel signal, respectively. The first photodiode PD1, the second photodiode PD2, and the third photodiode PD3 can provide the first channel signal, the second channel signal, and the third channel signal to the spectroscopic processor 300. The spectroscopic processor 300 can generate information related to the intensities of light having different wavelengths based on the first channel signal, the second channel signal, and the third channel signal. A light-shielding film ST is provided on the side of the multi-detector 210. The light-shielding film ST can prevent the multi-detector 210 from detecting unwanted light. The light-shielding film ST may include a material that blocks light. For example, the light-shielding film ST may include amorphous silicon or amorphous germanium.

[0081] A multi-filter 110 is provided on the multi-detector 210. The light transmission characteristics of the multi-filter 110 are substantially the same as those of the multi-filter 110 described with reference to FIGS. 2 to 5. The multi-filter 110 may include multiple sub-filters 112, 114, and 116. Exemplarily, a first sub-filter 112, a second sub-filter 114, and a third sub-filter 116 are illustrated. The light transmission characteristics of the first sub-filter 112, the second sub-filter 114, and the third sub-filter 116 are substantially the same as the light sensing characteristics of the first sub-detector 202, the second sub-detector 204, and the third sub-detector 206, respectively. The first sub-filter 112, the second sub-filter 114, and the third sub-filter 116 may also be arranged in series. For example, the third sub-filter 116, the second sub-filter 114, and the first sub-filter 112 may be stacked in this order, starting from the region closest to the multi-detector 210. However, the stacking order of the first sub-filter 112, the second sub-filter 114, and the third sub-filter 116 is not limited. The positions of the first sub-filter 112, the second sub-filter 114, and the third sub-filter 116 may be interchangeable.

[0082] The first sub-filter 112, the second sub-filter 114, and the third sub-filter 116 may include distributed Bragg reflector (DBR) filters. For example, the first sub-filter 112, the second sub-filter 114, and the third sub-filter 116 may each include a first refractive index layer and a second refractive index layer stacked on top of each other. The first refractive index layer and the second refractive index layer may have different refractive indices. For example, the first refractive index layer and the second refractive index layer may include SiO2 and TiO2, respectively. For example, the first refractive index layer and the second refractive index layer may include SiO2 and Si3N4, respectively. The transmission characteristics of the DBR (distributed Bragg reflector) filter may be adjusted by adjusting the thicknesses of the first refractive index layer and the second refractive index layer. The thicknesses of the first and second refractive index layers of the first sub-filter 112, the second sub-filter 114, and the third sub-filter 116 may be different from one another. For example, the thicknesses of the first and second refractive index layers of the first sub-filter 112, the second sub-filter 114, and the third sub-filter 116 are determined so that each of the sub-filters 112, 114, and 116 has a desired light transmission spectrum.

[0083] A microlens ML is provided on the multi-filter 110. The microlens ML can receive incident light IL and focus it on the multi-filter 110. For example, the microlens ML can refract the incident light IL.

[0084] The present disclosure can provide a hyper-dispersive element 12 with high resolution and broadband characteristics. Figure 7 is an exemplary optical transmission spectrum graph of the first through third sub-filters of Figure 6. Figure 8 is an exemplary optical transmission spectrum of the multi-filter of Figure 6.

[0085] 7, a first optical transmission spectrum DBR1 of the first sub-filter 112, a second optical transmission spectrum DBR2 of the second sub-filter 114, and a third optical transmission spectrum DBR3 of the third sub-filter 116 are provided. The first optical transmission spectrum DBR1 has a pass wavelength of about 570 nm and a useful band of about 470 nm to about 720 nm. The second optical transmission spectrum DBR2 has a pass wavelength of about 450 nm and a useful band of about 350 nm to about 550 nm. The third optical transmission spectrum DBR3 has a pass wavelength of about 760 nm and a useful band of about 600 nm to about 900 nm.

[0086] 8, there is provided an optical transmission spectrum (SS) of a multi-filter 110 formed by combining a first sub-filter 112, a second sub-filter 114, and a third sub-filter 116. The optical transmission spectrum SS of the multi-filter 110 is also determined by the optical transmission spectra DBR1, DBR2, and DBR3 of the first sub-filter 112, the second sub-filter 114, and the third sub-filter 116. For example, for a specific wavelength having a transmission value of 0 in the first optical transmission spectrum DBR1, even if the transmission value is not 0 in the second optical transmission spectrum DBR2 and the third optical transmission spectrum DBR3, the transmission value in the optical transmission spectrum SS of the multi-filter 110 is also 0.

[0087] The utilization bands of the first optical transmission spectrum DBR1, the second optical transmission spectrum DBR2, and the third optical transmission spectrum DBR3 are also continuous wavelength bands. Therefore, the final utilization band of the multi-filter 110 is also from approximately 350 nm, which is the lower limit of the utilization band of the second optical transmission spectrum DBR2, to approximately 900 nm, which is the upper limit of the utilization band of the third optical transmission spectrum DBR3. The transmission wavelengths of the optical transmission spectrum SS of the multi-filter 110 are also approximately 450 nm, approximately 570 nm, and approximately 760 nm.

[0088] Figure 9 is a cross-sectional view of a hyper-dispersive element according to an exemplary embodiment. Figures 10 to 13 are exemplary perspective views of multi-filters according to exemplary embodiments of the hyper-dispersive element of Figure 9. For simplicity of explanation, substantially the same content as that described with reference to Figure 6 will not be described.

[0089] 9, a super-dispersive element 14 is provided. The super-dispersive element 14 may include a substrate 1, a multi-detector 210, a light-shielding film ST, a multi-filter 120, a microlens ML, and a spectral processor 300. The substrate 1, the multi-detector 210, the light-shielding film ST, the microlens ML, and the spectral processor 300 are substantially the same as those described with reference to FIG.

[0090] The light transmission characteristics of multi-filter 120 are also substantially the same as the light transmission characteristics of multi-filter 100 described with reference to Figures 2 to 5. Multi-filter 120 may include a first reflective layer RL1, a second reflective layer RL2, and an asymmetric nanostructured layer ANL provided between the first reflective layer RL1 and the second reflective layer RL2.

[0091] Each of the first and second reflective layers RL1 and RL2 is also a distributed Bragg reflector (DBR) layer. For example, the first and second reflective layers RL1 and RL2 are substantially the same DBR layer. The first and second reflective layers RL1 and RL2 may have substantially the same light reflectance properties.

[0092] The asymmetric nanostructured layer ANL may include a plurality of nanostructures arranged asymmetrically, and can transmit light having a plurality of wavelengths within the utilization band of the multi-filter 120 determined by the first and second reflective layers RL1 and RL2.

[0093] In the following, with reference to Figures 10 to 13, examples of multi-filters including an asymmetric nanostructured layer ANL will be described.

[0094] 10, a multi-layer filter 120a is provided, including a first reflective layer RL1, a second reflective layer RL2, and an asymmetric nanostructured layer ANLa. The asymmetric nanostructured layer ANLa may include a base layer BL, a plurality of nanorods NR, and a capping layer CL. The base layer BL is also provided on the first reflective layer RL1. For example, the base layer BL may include any one of polymers such as PC, PS, and PMMA, and SiO2.

[0095] The nanorods NR may also be arranged asymmetrically on the base layer BL. For example, the nanorods NR on both sides of an imaginary line that passes through the center of the upper surface of the base layer BL but extends parallel to the upper surface of the base layer BL may have different arrangements and / or numbers. The width of the nanorods NR is smaller than the wavelength of the incident light entering the asymmetric nanostructure layer ANL. The distance between the nanorods NR and the width of the nanorods NR are determined so that the multi-filter 120a has a desired transmission spectrum. While the nanorods NR are shown to have a rectangular prism shape, the shape of the nanorods NR is not limited thereto. In other examples, the nanorods NR may have a cylindrical shape, a polygonal prism shape, a hemisphere shape, or a polyhedral shape other than a polygonal prism shape. The nanorods NR may include a material having a refractive index higher than that of the base layer BL. For example, the nanorods NR may include any one of single crystal silicon, polycrystalline silicon (poly Si), amorphous silicon (amorphous Si), Si3N4, GaP, TiO2, AlSb, AlAs, AlGaAs, AlGaInP, BP, and ZnGeP2. A capping layer CL is also provided on the base layer BL and the plurality of nanorods NR. The capping layer CL may include a material having a refractive index lower than that of the plurality of nanorods NR. For example, the capping layer CL may include any one of a polymer such as PC, PS, or PMMA, or SiO2.

[0096] Referring to FIG. 11, a multi-layer filter 120b is provided, including a first reflective layer RL1, a second reflective layer RL2, and an asymmetric nano-structured layer ANLb. The asymmetric nano-structured layer ANLb may include a base layer BL, a plurality of nanoholes NH, and a capping layer CL. Unlike the configuration described with reference to FIG. 10, a plurality of nanoholes NH are provided in the base layer BL. The nanoholes NH may penetrate the base layer BL. For example, the nanoholes NH may extend perpendicular to the top surface of the base layer BL. The nanoholes NH may also be arranged asymmetrically. For example, the arrangement and / or number of nanoholes NH on both sides of an imaginary line passing through the center of the top surface of the base layer BL but extending parallel to the top surface of the base layer BL may be different. The width of the nanoholes NH is smaller than the wavelength of light incident on the asymmetric nano-structured layer ANLb. The distance between the nanoholes NH and the width of the nanoholes NH are determined so that the multi-layer filter 120b has a desired transmission spectrum. Although the nanoholes NH have a cylindrical shape, the shape of the nanoholes NH is not limited thereto. In other examples, the nanoholes NH may have a polygonal pillar shape, a hemisphere shape, or a polyhedron shape other than a polygonal pillar shape.

[0097] A capping layer CL is also provided on the base layer BL, the materials of which are substantially the same as those described with reference to FIG.

[0098] 12, a multi-layer filter 120c is provided, including a first reflective layer RL1, a second reflective layer RL2, and an asymmetric nanostructured layer ANLc. The asymmetric nanostructured layer ANLc may include a base layer BL, a plurality of nanorods NR, a plurality of nanoholes NH, and a capping layer CL. Unlike the configurations described with reference to FIGS. 10 and 11, the plurality of nanorods NR and the plurality of nanoholes NH may be provided together. The plurality of nanorods NR and the plurality of nanoholes NH may also be arranged asymmetrically. The base layer BL, the plurality of nanorods NR, the plurality of nanoholes NH, and the capping layer CL are substantially the same as those described with reference to FIGS. 10 and 11.

[0099] Referring to FIG. 13, a multi-filter 120d is provided, including a first reflective layer RL1, a second reflective layer RL2, and an asymmetric nanostructured layer ANLd. The asymmetric nanostructured layer ANLd may include a base layer BL, a plurality of nanostripes NS, and a capping layer CL. The base layer BL and the capping layer CL are substantially the same as those described with reference to FIG. 10. A plurality of nanostripes NS are also provided on the base layer BL. The plurality of nanostripes NS are arranged asymmetrically on the base layer BL. For example, with respect to an imaginary line passing through the center point of the upper surface of the base layer BL but extending in a direction parallel to the upper surface of the base layer BL, the arrangement shape and / or number of nanostripes NS arranged on both sides of the imaginary line may be different from each other. The plurality of nanostripes NS may extend along a first direction DR1 parallel to the upper surface of the base layer BL. The width of the plurality of nanostripes NS is smaller than the wavelength of the incident light incident on the asymmetric nanostructured layer ANLd. The present disclosure can provide a super-dispersive element 14 (FIG. 9) with high resolution.

[0100] FIG. 14 is an exemplary optical transmission spectrum of the multi-filter of FIG.

[0101] 14, the optical transmission spectrum of the multi-pass filter may have a first pass wavelength λ1 and a second pass wavelength λ2. The first pass wavelength λ1 is approximately 580 nm, and the second pass wavelength λ2 is approximately 600 nm. The optical transmission spectrum of the multi-pass filter may have a usable band from approximately 490 nm to approximately 680 nm.

[0102] 15 is a cross-sectional view of a hyper-splitting element according to an exemplary embodiment. For the sake of brevity, the description will not be given for the parts that are substantially the same as those described with reference to FIG. 6 and those described with reference to FIG. 9.

[0103] 15, a super-dispersive element 16 is provided. The super-dispersive element 16 may include a substrate 1, a multi-detector 210, a light-shielding film ST, a multi-filter 130, a microlens ML, and a spectral processor 300. The substrate 1, the multi-detector 210, the light-shielding film ST, the microlens ML, and the spectral processor 300 are substantially the same as those described with reference to FIG.

[0104] The multi-filter 130 may include a first sub-filter 132, a second sub-filter 134, and a third sub-filter 136. Each of the first sub-filter 132, the second sub-filter 134, and the third sub-filter 136 is substantially identical to the multi-filter including the asymmetric nanostructure layer ANL described with reference to FIG. 9 . The first sub-filter 132, the second sub-filter 134, and the third sub-filter 136 are also arranged in series. The first sub-filter 132, the second sub-filter 134, and the third sub-filter 136 may have different optical transmission spectra. For example, the optical transmission spectrum of the first sub-filter 132 may have the first utilization band UB1 of the first sub-filter 112 described with reference to FIG. 4 , but may have two pass wavelengths within the first utilization band UB1, as shown in FIG. 14 . The optical transmission spectrum of the second sub-filter 134 has the second utilization band UB2 of the second sub-filter 114 described with reference to Figure 4, but may have two pass wavelengths within the second utilization band UB2, as shown in Figure 14. The optical transmission spectrum of the third sub-filter 136 has the third utilization band UB3 of the third sub-filter 116 described with reference to Figure 4, but may have two pass wavelengths within the third utilization band UB3, as shown in Figure 14.

[0105] The present disclosure can provide a hyper-dispersive element 16 with broadband and high-resolution characteristics.

[0106] 16 is a cross-sectional view of a hyper-splitting element according to an exemplary embodiment. For the sake of brevity, the description will not be given for the parts that are substantially the same as those described with reference to FIG. 6 and those described with reference to FIG. 15.

[0107] 16, a super-dispersive element 18 is provided. The super-dispersive element 18 may include a substrate 1, a multi-detector 220, a light-shielding film ST, a multi-filter 130, a microlens ML, and a spectral processor 300. The substrate 1, the light-shielding film ST, the microlens ML, and the spectral processor 300 are substantially the same as the substrate 1, the light-shielding film ST, the microlens ML, and the spectral processor 300 described with reference to FIG. 6, respectively. The multi-filter 130 is also substantially the same as the multi-filter 130 described with reference to FIG. 15.

[0108] 6, the multi-detector 220 may further include an ultraviolet detector UD and an infrared detector IRD. For example, the ultraviolet detector UD is provided between the stacked structure of the p-type layer PL and the n-type layer NL and the multi-filter 130, and the infrared detector IRD is also provided between the stacked structure of the p-type layer PL and the n-type layer NL and the substrate 1.

[0109] The present disclosure can provide a hyperspectral element 18 that can measure light in the visible, ultraviolet, and infrared regions and has broadband and high-resolution characteristics.

[0110] Fig. 17 is a block diagram of a hyperspectral sensor according to an exemplary embodiment. Fig. 18 is a block diagram of a pixel of Fig. 17. Fig. 19 is a flowchart illustrating a method for measuring light using the hyperspectral sensor of Fig. 17. Fig. 20 is a light transmission spectrum graph of the multi-filter of Fig. 18. For simplicity of explanation, substantially the same content as that described with reference to Figs. 2 to 5 will not be described.

[0111] 17 to 20, a hyperspectral sensor 20 is provided. The hyperspectral sensor 20 may include a pixel array PA, a spectroscopic processor 300, and a main processor 1000. The pixel array PA may include a plurality of pixels PX. The plurality of pixels PX are also arranged within the pixel array PA. The plurality of pixels PX are also substantially identical to one another.

[0112] 18, each of the pixels PX may include a plurality of subpixels SPX1, SPX2, SPX3, and SPX4. For example, the subpixels SPX1, SPX2, SPX3, and SPX4 may also include a first subpixel SPX1, a second subpixel SPX2, a third subpixel SPX3, and a fourth subpixel SPX4. However, the number of the subpixels SPX1, SPX2, SPX3, and SPX4 is not limited. In other examples, one pixel PX may include fewer or more than four subpixels.

[0113] The first subpixel SPX1 to the fourth subpixel SPX4 are provided with a first super-dispersing element SS1, a second super-dispersing element SS2, a third super-dispersing element SS3, and a fourth super-dispersing element SS4, respectively. The first super-dispersing element SS1 to the fourth super-dispersing element SS4 may include a first multi-detector MD1, a second multi-detector MD2, a third multi-detector MD3, and a fourth multi-detector MD4, respectively. Each of the first multi-detector MD1 to the fourth multi-detector MD4 corresponds to the multi-detector 200 (FIG. 2) described with reference to FIGS. 2 to 5. The first multi-detector MD1 to the fourth multi-detector MD4 may also be substantially identical to each other. The first multi-detector MD1 to the fourth multi-detector MD4 may have the same light-sensing characteristics. For example, each of the first multi-detector MD1 to the fourth multi-detector MD4 may also be substantially identical to the multi-detector 200 described with reference to FIG. 2. Each of the first to fourth multi-detectors MD1 to MD4 may include a first sub-detector that measures light having a wavelength within a first photosensitive band DB1, a second sub-detector that measures light having a wavelength within a second photosensitive band DB2, and a third sub-detector that measures light having a wavelength within a third photosensitive band DB3. The first, second, and third photosensitive bands DB1, DB2, and DB3 are also substantially the same as those described with reference to Figures 2 to 5.

[0114] The first to fourth super-splitting elements SS1 to SS4 may include a first multi-filter MF1, a second multi-filter MF2, a third multi-filter MF3, and a fourth multi-filter MF4, respectively. The first to fourth multi-filters MF1 to MF4 may be substantially identical to one another. The first to fourth multi-filters MF1 to MF4 may have different light transmission characteristics. For example, each of the first to fourth multi-filters MF1 to MF4 may include three sub-filters as described with reference to FIG. 2.

[0115] The first to fourth multi-filters MF1 to MF4 may filter the incident light IL to generate first, second, third, and fourth filtered lights FL1, FL2, FL3, and FL4, respectively (S210). The first to fourth filtered lights FL1 to FL4 may have different spectra. The light transmission characteristics of the first to fourth multi-filters MF1 to MF4 will be described below.

[0116] 20 show the optical transmission spectra of the first multi-filter MF1 through the fourth multi-filter MF4, respectively. Referring to the graph T(1), the first multi-filter MF1 can transmit light having the 1a final pass wavelength TPB1a, light having the 1b final pass wavelength TPB1b, and light having the 1c final pass wavelength TPB1c, as well as light having wavelengths in the 1a final sub-light-transmitting region TSTR1a and light having wavelengths in the 1b final sub-light-transmitting region TSTR1b.

[0117] Referring to the T(2) graph, the second multi-filter MF2 can transmit light having the 2a final pass wavelength TPB2a, light having the 2b final pass wavelength TPB2b, and light having the 2c final pass wavelength TPB2c, as well as light having wavelengths within the 2a final sub-light transmission region TSTR2a and light having wavelengths within the 2b final sub-light transmission region TSTR2b.

[0118] Referring to the T(3) graph, the third multi-filter MF3 can transmit light having the 3a final pass wavelength TPB3a, light having the 3b final pass wavelength TPB3b, and light having the 3c final pass wavelength TPB3c, as well as light having wavelengths within the 3a final sub-light transmission region TSTR3a and light having wavelengths within the 3b final sub-light transmission region TSTR3b.

[0119] Referring to the T(4) graph, the fourth multi-filter MF4 can transmit light having the 4a final pass wavelength TPB4a, light having the 4b final pass wavelength TPB4b, and light having the 4c ​​final pass wavelength TPB4c, as well as light having wavelengths within the 4a final sub-light transmission region TSTR4a and light having wavelengths within the 4b final sub-light transmission region TSTR4b.

[0120] 1a final passage wavelength TPB1a, 2a final passage wavelength TPB2a, 3a final passage wavelength TPB3a, 4a final passage wavelength TPB4a, 1b final passage wavelength TPB1b, 2b final passage wavelength TPB2b, 3b final passage wavelength TPB3b, The 4b final passing wavelength TPB4b, the 1c final passing wavelength TPB1c, the 2c final passing wavelength TPB2c, the 3c final passing wavelength TPB3c, and the 4c ​​final passing wavelength TPB4c are also different wavelengths located within the first photosensing band DB1. The 1b final pass wavelength TPB1b, the 2b final pass wavelength TPB2b, the 3b final pass wavelength TPB3b, the 4b final pass wavelength TPB4b, the 1c final pass wavelength TPB1c, the 2c final pass wavelength TPB2c, the 3c final pass wavelength TPB3c, and the 4c ​​final pass wavelength TPB4c are also different wavelengths located in the second photosensing band DB2. The 1c final pass wavelength TPB1c, the 2c final pass wavelength TPB2c, the 3c final pass wavelength TPB3c, and the 4c ​​final pass wavelength TPB4c are also different wavelengths located in the third photosensing band DB3.

[0121] The first to fourth multi-detectors MD1 to MD4 can sense the filtered light and generate channel signals (S220). The first sub-detector MD1a of the first multi-detector MD1 can sense the 1a final pass wavelength TPB1a, the 1b final pass wavelength TPB1b, and the 1c final pass wavelength TPB1c and generate a 1a channel signal. The first sub-detector MD1a of the first multi-detector MD1 can provide the 1a channel signal to the spectroscopic processor 300. The second sub-detector MD1b of the first multi-detector MD1 can sense the 1b final pass wavelength TPB1b and the 1c final pass wavelength TPB1c and generate a 1b channel signal. The second sub-detector MD1b of the first multi-detector MD1 can provide the 1b channel signal to the spectroscopic processor 300. The third sub-detector MD1c of the first multi-detector MD1 can sense the 1c final pass wavelength TPB1c and generate a 1c channel signal, which can be provided to the spectroscopic processor 300.

[0122] The first sub-detector MD2a of the second multi-detector MD2 can sense the 2a final pass wavelength TPB2a, the 2b final pass wavelength TPB2b, and the 2c final pass wavelength TPB2c and generate a 2a channel signal. The first sub-detector MD2a of the second multi-detector MD2 can provide the 2a channel signal to the spectroscopic processor 300. The second sub-detector MD2b of the second multi-detector MD2 can sense the 2b final pass wavelength TPB2b and the 2c final pass wavelength TPB2c and generate a 2b channel signal. The second sub-detector MD2b of the second multi-detector MD2 can provide the 2b channel signal to the spectroscopic processor 300. The third sub-detector MD2c of the second multi-detector MD2 can sense the 2c final pass wavelength TPB2c and generate a 2c channel signal. The third sub-detector MD2c of the second multi-detector MD2 can provide the 2c-channel signal to the spectroscopic processor 300.

[0123] The first sub-detector MD3a of the third multi-detector MD3 can sense the 3a final pass wavelength TPB3a, the 3b final pass wavelength TPB3b, and the 3c final pass wavelength TPB3c and generate a 3a channel signal. The first sub-detector MD3a of the third multi-detector MD3 can provide the 3a channel signal to the spectroscopic processor 300. The second sub-detector MD3b of the third multi-detector MD3 can sense the 3b final pass wavelength TPB3b and the 3c final pass wavelength TPB3c and generate a 3b channel signal. The second sub-detector MD3b of the third multi-detector MD3 can provide the 3b channel signal to the spectroscopic processor 300. The third sub-detector MD3c of the third multi-detector MD3 can sense the 3c final pass wavelength TPB3c and generate a 3c channel signal. The third sub-detector MD3c of the third multi-detector MD3 can provide the 3c-channel signal to the spectroscopic processor 300.

[0124] The first sub-detector MD4a of the fourth multi-detector MD4 can sense the 4a final pass wavelength TPB4a, the 4b final pass wavelength TPB4b, and the 4c ​​final pass wavelength TPB4c and generate a 4a channel signal. The first sub-detector MD4a of the fourth multi-detector MD4 can provide the 4a channel signal to the spectroscopic processor 300. The second sub-detector MD4b of the fourth multi-detector MD4 can sense the 4b final pass wavelength TPB4b and the 4c ​​final pass wavelength TPB4c and generate a 4b channel signal. The second sub-detector MD4b of the fourth multi-detector MD4 can provide the 4b channel signal to the spectroscopic processor 300. The third sub-detector MD4c of the fourth multi-detector MD4 can sense the 4c ​​final pass wavelength TPB4c and generate a 4c channel signal. The third sub-detector MD4c of the fourth multi-detector MD4 can provide the 4c-th channel signal to the spectroscopic processor 300.

[0125] The spectroscopic processor 300 can generate information related to the intensity of light having the 1a final pass wavelength TBP1a through the 4c ​​final pass wavelength TBP4c based on the 1a channel signal through the 4c ​​channel signal (S230). The spectroscopic processor 300 can provide the information related to the intensity of light having the 1a final pass wavelength TBP1a through the 4c ​​final pass wavelength TBP4c to the main processor 1000.

[0126] The main processor 1000 can generate hyperspectral information based on the information related to the light intensity, for example, the main processor 1000 can generate hyperspectral image information.

[0127] Light having three different wavelengths can be detected in each of the first to fourth sub-pixels SPX1 to SPX4, and one pixel PX including the first to fourth sub-pixels SPX1 to SPX4 can detect light having wavelengths within 12 wavelength bands.

[0128] If one subpixel detects only light of one wavelength, n subpixels are required to detect light of n wavelengths. In the field of hyperspectral sensors, which require detecting as many wavelengths of light as possible, increasing the number of subpixels reduces the area per subpixel, resulting in a decrease in resolution.

[0129] The present disclosure can provide a hyperspectral sensor 20 including subpixels that detect light having multiple wavelengths. Since the present disclosure uses subpixels that are fewer than the number of wavelengths to be detected, it is possible to provide subpixels with a larger area than when one subpixel detects light having only one wavelength. This provides a hyperspectral sensor 20 with high resolution.

[0130] The present disclosure can provide a hyperspectral sensor 20 with broadband and high resolution characteristics.

[0131] Figure 21 is a cross-sectional view of a pixel according to an exemplary embodiment of the hyperspectral sensor of Figure 17. For the sake of brevity, the description will not be made of substantially the same content as that described with reference to Figure 6 and with reference to Figures 17 to 20.

[0132] 21, a pixel PX of the hyperspectral sensor 20 is provided. The pixel PX may include a substrate 1, a first multi-detector MD11 through a fourth multi-detector MD14, a light blocking film ST, a first multi-filter MF11 through a fourth multi-filter MF14, and a first microlens ML11 through a fourth microlens ML14. The substrate 1 is substantially the same as that described with reference to FIG. 6.

[0133] A first to fourth multi-detector MD11 to MD14 are also provided on the substrate 1. Each of the first to fourth multi-detectors MD11 to MD14 is also substantially identical to the multi-detector 210 described with reference to Fig. 6. The light-sensing characteristics of each of the first to fourth multi-detectors MD11 to MD14 are also substantially identical to the light-sensing characteristics of the first to fourth multi-detectors MD1 to MD4 described with reference to Figs. 18 to 20, respectively.

[0134] The light blocking film ST is also provided on the side surfaces of the first to fourth multi-detectors MD11 to MD14. The light blocking film ST can separate the first to fourth multi-detectors MD11 to MD14 from each other. The light blocking film ST can optically isolate the first to fourth multi-detectors MD11 to MD14 so that the first to fourth multi-detectors MD11 to MD14 do not detect unwanted light.

[0135] First to fourth multi-filters MF11 to MF14 are provided on the first to fourth multi-detectors MD11 to MD14, respectively. Each of the first to fourth multi-filters MF11 to MF14 is illustrated as being identical to the multi-filter described with reference to FIG. 15, but this is not limiting. In another example, each of the first to fourth multi-filters MF11 to MF14 is also the multi-filter 110 of FIG. 6 or the multi-filter 120 of FIG. 9. The light transmission characteristics of the first to fourth multi-filters MF11 to MF14 are also substantially identical to the light transmission characteristics of the first to fourth multi-filters MF1 to MF4 described with reference to FIGS. 16 to 19, respectively.

[0136] A planarization layer 400 is provided on the first to fourth multi-filters MF11 to MF14. The top surface of the planarization layer 400 is also parallel to the top surface of the substrate 1. For example, the planarization layer 400 may include SiO2.

[0137] A first microlens ML11 to a fourth microlens ML14 are provided on the planarization layer 400. The first microlens ML11 to the fourth microlens ML14 are also arranged to correspond to the first multi-filter MF11 to the fourth multi-filter MF14, respectively. The first microlens ML11 to the fourth microlens ML14 can collect light into the first multi-filter MF11 to the fourth multi-filter MF14, respectively.

[0138] The present disclosure can provide a pixel PX that includes multiple sub-pixels SPX1, SPX2, SPX3, and SPX4 that are sensitive to light having multiple wavelengths.

[0139] 22 is a block diagram of a hyperspectral image generating device including a hyperspectral sensor according to an exemplary embodiment. For the sake of brevity, details that are substantially the same as those described with reference to FIGS. 17 to 21 will not be described.

[0140] Referring to FIG. 22, a hyperspectral image generating device 30 is provided. For example, the hyperspectral image generating device 30 may also be an image sensor. The hyperspectral image generating device 30 may include a pixel array PA, a spectroscopic processor 300, a main processor 1000, a memory element 2000, and a display element 3000. The pixel array PA and the spectroscopic processor 300 are also referred to as a hyperspectral sensor unit 22. The pixel array PA and the spectroscopic processor 300 are substantially the same as the pixel array PA and the spectroscopic processor 300 described with reference to FIGS. 16 to 20, respectively. The pixel array PA may receive incident light provided from a measurement object. The spectroscopic processor 300 may generate information related to the position of the measurement object and the intensity of light by wavelength. The information related to the position of the measurement object and the intensity of light by wavelength is also referred to as hyperspectral information. The spectroscopic processor 300 may provide the hyperspectral information to the main processor 1000. The main processor 1000 can generate hyperspectral image information based on the hyperspectral information obtained from the spectroscopic processor 300. The main processor 300 can provide the hyperspectral image information to the display element 2000.

[0141] The display element 2000 can output various information including hyperspectral image information. For example, the display element 2000 can display hyperspectral image information, the operating status of the hyperspectral image generating device 30, and a user interface window for selecting functions and options selected by the user.

[0142] The memory element 3000 stores various data for the operation of the hyperspectral image generating device 30, such as programs for processing or controlling the main processor 1000. For example, the memory element 3000 may store a number of application programs run by the hyperspectral image generating device 30, and data and commands for the operation of the hyperspectral image generating device 30. The memory element 3000 is accessed by the main processor 1000, and data can be read, written, modified, deleted, updated, etc. by the main processor 1000. The memory element 3000 may be implemented not only as a recording medium within the hyperspectral image generating device 30, but also as an external recording medium, a removable disk including a universal serial bus (USB) memory, a web server via a network, etc.

[0143] The present disclosure can provide a hyperspectral image generating device 30 including a hyperspectral sensor unit 22 having high optical resolution and a wide available bandwidth.

[0144] FIG. 23 is a block diagram illustrating an example of an electronic device including an image sensor.

[0145] 23 , in a network environment ED00, an electronic device ED01 can communicate with another electronic device ED02 via a first network ED98 (e.g., a short-range wireless communication network) or with another electronic device ED04 and / or a server ED08 via a second network ED99 (e.g., a long-range wireless communication network). The electronic device ED01 can communicate with the electronic device ED04 via the server ED08. The electronic device ED01 may include a processor ED20, a memory ED30, an input device ED50, an audio output device ED55, a display device ED60, an audio module ED70, a sensor module ED76, an interface ED77, a haptic module ED79, a camera module ED80, a power management module ED88, a battery ED89, a communication module ED90, a subscriber identity module ED96, and / or an antenna module ED97. Some of the components (e.g., the display device ED60) may be omitted from the electronic device ED01, or other components may be added. Some of the components may be implemented as a single integrated circuit. For example, the sensor module ED76 (fingerprint sensor, iris sensor, illuminance sensor, etc.) may be embedded in the display device ED60 (display, etc.). In addition, if the image sensor 4000 (FIG. 1) includes a spectroscopic function, some functions of the sensor module ED76 (color sensor, illuminance sensor) may be implemented in the image sensor 4000 itself, rather than in a separate sensor module.

[0146] The processor ED20 can execute software (e.g., program ED40) and control one or more other components (e.g., hardware components, software components) of the electronic device ED01 coupled to the processor ED20, thereby performing various data processing or calculations. As part of the data processing or calculations, the processor ED20 can load instructions and / or data received from other components (e.g., sensor module ED76, communication module ED90) into volatile memory ED32, process the instructions and / or data stored in volatile memory ED32, and store the resulting data in non-volatile memory ED34. The processor ED20 may include a main processor ED21 (e.g., central processing unit, application processor) and an auxiliary processor ED23 (e.g., graphics processing unit, image signal processor, sensor hub processor, communication processor, etc.) that may operate independently of or in conjunction with the main processor ED21. The auxiliary processor ED23 may use less power than the main processor ED21 and perform specialized functions.

[0147] The auxiliary processor ED23 can take over for the main processor ED21 while the main processor ED21 is in an inactive state (sleep state), or can control functions and / or states related to some of the components of the electronic device ED01 (such as the display device ED60, sensor module ED76, and communication module ED90) together with the main processor ED21 while the main processor ED21 is in an active state (application execution state). The auxiliary processor ED23 (such as an image signal processor or communication processor) can also be embodied as part of other functionally related components (such as the camera module ED80 and communication module ED90).

[0148] The memory ED30 can store various data required by the components of the electronic device ED01 (such as the processor ED20 and the sensor module ED76). The data may include, for example, software (such as the program ED40) and input and / or output data related to the instructions associated therewith. The memory ED30 may include a volatile memory ED32 and / or a non-volatile memory ED34. The non-volatile memory ED32 may include an internal memory ED36 fixedly mounted within the electronic device ED01 and a removable external memory ED38.

[0149] The programs ED40 are also stored as software in the memory ED30 and may include an operating system ED42, middleware ED44 and / or applications ED46.

[0150] The input device ED50 can receive instructions and / or data from outside the electronic device ED01 (e.g., a user) for use by components of the electronic device ED01 (e.g., the processor ED20). The input device ED50 may include a microphone, a mouse, a keyboard, and / or a digital pen (e.g., a stylus pen).

[0151] The audio output device ED55 can output audio signals to the outside of the electronic device ED01. The audio output device ED55 may include a speaker and / or a receiver. The speaker is used for general purposes such as playing or recording multimedia content, and the receiver is used for receiving incoming calls. The receiver may be integrated into the speaker or may be implemented as a separate device.

[0152] The display device ED60 can visually provide information external to the electronic device ED01. The display device ED60 may include a display, a holographic device, or a projector, and control circuitry for controlling the device. The display device ED60 may include touch circuitry configured to sense a touch and / or sensor circuitry (such as a pressure sensor) configured to measure the strength of a force caused by the touch.

[0153] The audio module ED70 can convert sound into an electrical signal or vice versa, and can acquire sound via the input device ED50 or output sound via speakers and / or headphones of other electronic devices (such as the electronic device ED02) directly or wirelessly coupled to the audio output device ED55 and / or the electronic device ED01.

[0154] The sensor module ED76 can sense the operating state of the electronic device ED01 (such as power, temperature, etc.) or the external environmental state (such as a user state) and generate an electrical signal and / or a data value corresponding to the sensed state. The sensor module ED76 may include a gesture sensor, a gyro sensor, a barometric pressure sensor, a magnetic sensor, an acceleration sensor, a grip sensor, a proximity sensor, a color sensor, an IR (infrared) sensor, a biometric sensor, a temperature sensor, a humidity sensor, and / or an illuminance sensor.

[0155] The interface ED77 may support one or more specified protocols that may be used to connect the electronic device ED01 directly or wirelessly to other electronic devices (such as the electronic device ED02). The interface ED77 may include a high definition multimedia interface (HDMI), a USB interface, an SD card interface, and / or an audio interface.

[0156] The connection terminal ED78 may include a connector that allows the electronic device ED01 to be physically connected to another electronic device (such as the electronic device ED02). The connection terminal ED78 may include an HDMI connector, a USB connector, an SD card connector, and / or an audio connector (such as a headphone connector).

[0157] The haptic module ED79 can convert electrical signals into mechanical stimuli (such as vibrations or movements) or electrical stimuli that can be perceived by the user via touch or kinesthetic sensations. The haptic module ED79 may include motors, piezoelectric elements, and / or electrical stimulators.

[0158] Camera module ED80 can capture still and video images. Camera module ED80 may include a lens assembly including one or more lenses, image sensor 4000 (FIG. 1), an image signal processor, and / or a flash. The lens assembly included in camera module ED80 can collect light emitted from a subject of interest for image capture.

[0159] The power management module ED88 can manage the power supplied to the electronic device ED01. The power management module ED88 can also be embodied as part of a power management integrated circuit (PMIC).

[0160] The battery ED89 can provide power to the components of the electronic device ED01. The battery ED89 may include a non-rechargeable primary battery, a rechargeable secondary battery, and / or a fuel cell.

[0161] The communication module ED90 can support the establishment of direct (wired) and / or wireless communication channels between the electronic device ED01 and other electronic devices (such as the electronic device ED02, the electronic device ED04, and the server ED08) and the execution of communication via the established communication channels. The communication module ED90 may include one or more communication processors that operate independently of the processor ED20 (such as an application processor) and support the direct and / or wireless communication. The communication module ED90 may include a wireless communication module ED92 (such as a cellular communication module, a short-range wireless communication module, or a global navigation satellite system (GNSS) communication module) and / or a wired communication module ED94 (such as a local area network (LAN) communication module, a power line communication module, etc.). Among these communication modules, a corresponding communication module can communicate with other electronic devices via a first network ED98 (a short-range communication network such as Bluetooth, Wi-Fi (wireless fidelity) direct, or IrDA (infrared data association)) or a second network ED99 (a long-range communication network such as a cellular network, the Internet, or a computer network (LAN, WAN (wide area network), etc.)). Such various types of communication modules can be integrated into one component (e.g., a single chip) or embodied in multiple separate components (multiple chips). The wireless communication module ED92 can identify and authenticate the electronic device ED01 within a communication network such as the first network ED98 and / or the second network ED99 using subscriber information (e.g., an international mobile subscriber identity (IMSI)) stored in the subscriber identity module ED96.

[0162] The antenna module ED97 can transmit signals and / or power to or receive signals from the outside (such as other electronic devices). The antenna may include a reflector made of a conductive pattern formed on a substrate (such as a printed circuit board (PCB)). The antenna module ED97 may include one or more antennas. When multiple antennas are included, the communication module ED90 can select an antenna from the multiple antennas that is suitable for a communication method used in a communication network such as the first network ED98 and / or the second network ED99. Signals and / or power can be transmitted and received between the communication module ED90 and other electronic devices via the selected antenna. Components other than antennas (such as a radio frequency integrated circuit (RFIC)) may be included as part of the antenna module ED97. Some of the components are connected to each other via a peripheral communication method (bus, GPIO (general purpose input and output), SPI (serial peripheral interface), MIPI (mobile industry processor interface), etc.) and can exchange signals (commands, data, etc.) with each other.

[0163] Commands or data are transmitted and received between the electronic device ED01 and an external electronic device ED04 via a server ED08 connected to a second network ED99. The other electronic devices ED02 and ED04 may be the same as or different from the electronic device ED01. All or part of the operations performed by the electronic device ED01 may be performed by one or more of the other electronic devices ED02, ED04, and ED08. For example, when the electronic device ED01 must perform a certain function or service, it may request one or more other electronic devices to perform the function or service in whole or in part, instead of performing the function or service itself. Upon receiving the request, the one or more other electronic devices may perform additional functions or services related to the request and transmit the results of the execution to the electronic device ED01. For this purpose, cloud computing, distributed computing, and / or client-server computing technologies may be used.

[0164] FIG. 24 is a block diagram that schematically illustrates the camera module of FIG.

[0165] Referring to FIG. 24, the camera module ED80 may include a lens assembly CM10, a flash CM20, an image sensor 4000, an image stabilizer CM40, a memory CM50 (e.g., a buffer memory), and / or an image signal processor CM60. The lens assembly CM10 can collect light emitted from a subject to be imaged. The camera module ED80 may include multiple lens assemblies CM10, in which case the camera module ED80 may function as a dual camera, a 360° camera, or a spherical camera. Some of the multiple lens assemblies CM10 may have the same lens attributes (e.g., angle of view, focal length, autofocus, F-number, optical zoom, etc.), or may have different lens attributes. The lens assembly CM10 may include a wide-angle lens or a telephoto lens.

[0166] The flash CM20 can emit light used to enhance light emitted or reflected from an object. The flash CM20 can include one or more light-emitting diodes (e.g., red-green-blue (RGB) LEDs, white LEDs, infrared LEDs, ultraviolet LEDs, etc.) and / or a xenon lamp. The image sensor 4000, which is also the image sensor described in FIG. 1, can capture an image corresponding to the object by converting light emitted or reflected from the object and transmitted through the lens assembly CM10 into an electrical signal. The image sensor 4000 can include one or more sensors selected from image sensors with different attributes, such as an RGB sensor, a black and white (BW) sensor, an infrared (IR) sensor, or an ultraviolet (UV) sensor. Each sensor included in the image sensor 4000 can be embodied as a charge coupled device (CCD) sensor and / or a complementary metal oxide semiconductor (CMOS) sensor.

[0167] The image stabilizer CM40 responds to movement of the camera module ED80 or the electronic device CM01 including it by moving one or more lenses or image sensor 4000 included in the lens assembly CM10 in a specific direction or controlling the operating characteristics of the image sensor 4000 (such as adjusting the readout timing) to compensate for negative effects of the movement. The image stabilizer CM40 can sense the movement of the camera module ED80 or the electronic device ED01 using a gyro sensor (not shown) or an acceleration sensor (not shown) arranged inside or outside the camera module ED80. The image stabilizer CM40 can also be embodied optically.

[0168] The memory CM50 can store part or all of the data of an image acquired via the image sensor 4000 for subsequent image processing. For example, when multiple images are acquired at high speed, the acquired original data (Bayer-patterned data, high-resolution data, etc.) is stored in the memory CM50, and after displaying only the low-resolution image, the original data of the selected (e.g., user-selected) image is transmitted to the image signal processor CM60. The memory CM50 may be integrated with the memory ED30 of the electronic device ED01, or may be configured as a separate memory operated independently.

[0169] The image signal processor CM60 can perform image processing on images acquired via the image sensor 4000 or image data stored in the memory CM50. The image processing can include depth map generation, 3D modeling, panorama generation, feature point extraction, image synthesis, and / or image compensation (noise reduction, resolution adjustment, brightness adjustment, blurring, sharpening, softening, etc.). The image signal processor CM60 can perform control (such as exposure time control or readout timing control) on components included in the camera module ED80 (such as the image sensor 4000). Images processed by the image signal processor CM60 can be further stored in the memory CM50 for additional processing or provided to external components of the camera module ED80 (such as the memory ED30, display device ED60, electronic device ED02, electronic device ED04, server ED08, etc.). The image signal processor CM60 may be integrated into the processor ED20 or may be configured as a separate processor that operates independently of the processor ED20. When the image signal processor CM60 is configured as a separate processor from the processor ED20, the image processed by the image signal processor CM60 is also displayed on the display device ED60 after undergoing additional image processing by the processor ED20.

[0170] The electronic device ED01 may include multiple camera modules ED80, each with different attributes or functions. In such a case, one of the multiple camera modules ED80 may be a wide-angle camera and another may be a telephoto camera. Similarly, one of the multiple camera modules ED80 may be a front camera and another may be a rear camera.

[0171] 25 to 34 are diagrams illustrating various examples of electronic devices to which image sensors according to exemplary embodiments are applied.

[0172] The image sensor 4000 according to an embodiment of the present invention may also be applied to a mobile phone or smartphone 5100m shown in FIG. 25, a tablet or smart tablet 5200 shown in FIG. 26, a digital camera or camcorder 5300 shown in FIG. 27, a laptop computer 5400 shown in FIG. 28, or a television or smart TV 5500 shown in FIG. 29. For example, the smartphone 5100m or the smart tablet 5200 may include multiple high-resolution cameras, each equipped with a high-resolution image sensor. The high-resolution cameras may be used to extract depth information of an object in an image, adjust out-of-focus of the image, or automatically identify an object in the image.

[0173] The image sensor 4000 is also applicable to the smart refrigerator 5600 shown in FIG. 30, the security camera 5700 shown in FIG. 31, the robot 5800 shown in FIG. 32, and the medical camera 5900 shown in FIG. 33. For example, the smart refrigerator 5600 can automatically recognize food in the refrigerator using an image sensor and notify a user via a smartphone of the presence or absence of a specific food item and the type of food that has been stored or removed. The security camera 5700 can provide ultra-high-resolution images and can recognize objects or people in images even in dark environments using high sensitivity. The robot 5800 can be deployed in disaster sites or industrial sites where people cannot directly approach and can provide high-resolution images. The medical camera 5900 can provide high-resolution images for diagnosis or surgery and can dynamically adjust its field of view.

[0174] The image sensor 4000 may also be applied to a vehicle 6000, as shown in Fig. 34. The vehicle 6000 may include a plurality of vehicle cameras 6010, 6020, 6030, and 6040 arranged at various positions, and each of the vehicle cameras 6010, 6020, 6030, and 6040 may include an image sensor according to this embodiment. The vehicle 6000 may provide the driver with various information related to the interior or surroundings of the vehicle 6000 by using the plurality of vehicle cameras 6010, 6020, 6030, and 6040, and may automatically recognize objects or people in the image and provide information necessary for autonomous driving.

[0175] The above description of the embodiments of the technical concept of the present invention provides examples for explaining the technical concept of the present invention. Therefore, the technical concept of the present invention is not limited to the above embodiments, and it is apparent that various modifications and changes, such as combining and implementing the above embodiments, are possible by those skilled in the art within the technical concept of the present invention. [Explanation of symbols]

[0176] 10,12,14,16,18 hyperspectral elements 20 Hyperspectral Sensor 30 Hyperspectral Image Generator 100,110,120,130,MF1~4,MF11~14 Multi-filter 200,200,220,MD1~4,MD11~14 Multi-detector 300 processors 400 Planarization layer 1000 Main Processor 2000 memory elements 3000 display elements 4000 image sensor ED01 Electronic equipment

Claims

1. a multi-filter that passes first wavelength light having a first wavelength and second wavelength light having a second wavelength different from the first wavelength; a multi-detector that senses the first wavelength light and the second wavelength light; The multi-filter comprises: a first sub-filter that passes the first wavelength light; a second sub-filter that passes the second wavelength light; the first sub-filter and the second sub-filter are arranged in series; the optical transmission spectrum of the first sub-filter has a first utilization band and a first sub-optical transmission region outside the first utilization band; the optical transmission spectrum of the second sub-filter has a second utilization band and a second sub-optical transmission region outside the second utilization band; the first wavelength is included in the first utilization band and the second sub-light transmission region; The second wavelength is included in the second utilization band and the first sub-light transmission region.

2. The hyper-splitting element of claim 1 , wherein the first and second bands of use partially overlap.

3. A multi-filter that passes first wavelength light having a first wavelength and second wavelength light having a second wavelength different from the first wavelength; a multi-detector that senses the first wavelength light and the second wavelength light; The multi-filter comprises: a first sub-filter that passes the first wavelength light; a second sub-filter that passes the second wavelength light; the first sub-filter and the second sub-filter are arranged in series; The multi-detector a first sub-detector having a first light-sensing band that overlaps the first wavelength and the second wavelength; a second sub-detector having a second light-sensing band overlapping with one of the first wavelength and the second wavelength, The first sub-detector and the second sub-detector are arranged in series, a hyper-spectral element.

4. further comprising a spectroscopic processor; the first sub-detector generates a first channel signal associated with the first wavelength light and the second wavelength light, and provides the first channel signal to the spectroscopic processor; the second sub-detector generates a second channel signal associated with the second wavelength light and provides the second channel signal to the spectroscopic processor; The hyper-spectral element according to claim 3 , wherein the spectroscopic processor generates information relating to the intensities of the first wavelength light and the second wavelength light based on the first channel signal and the second channel signal.

5. the multi-detector further includes an ultraviolet detector; The hyperspectral element of claim 3 , wherein the ultraviolet detector is arranged in series with the first sub-detector and the second sub-detector.

6. the multi-detector further includes an infrared detector; The hyperspectral element of claim 3 , wherein the infrared detector is arranged in series with the first sub-detector and the second sub-detector.

7. A multi-filter that passes first wavelength light having a first wavelength and second wavelength light having a second wavelength different from the first wavelength; a multi-detector that senses the first wavelength light and the second wavelength light; The multi-filter comprises: a first sub-filter that passes the first wavelength light; a second sub-filter that passes the second wavelength light; the first sub-filter and the second sub-filter are arranged in series; Each of the first sub-filter and the second sub-filter comprises: a first reflective layer; and a second reflective layer; and a nanostructured layer provided between the first reflective layer and the second reflective layer; the nanostructured layer comprises a plurality of nanorods; The plurality of nanorods are arranged asymmetrically, forming a super-spectral element.

8. A multi-filter that passes first wavelength light having a first wavelength and second wavelength light having a second wavelength different from the first wavelength; a multi-detector that senses the first wavelength light and the second wavelength light; The multi-filter comprises: a first sub-filter that passes the first wavelength light; a second sub-filter that passes the second wavelength light; the first sub-filter and the second sub-filter are arranged in series; Each of the first sub-filter and the second sub-filter comprises: a first reflective layer; and a second reflective layer; and a nanostructured layer provided between the first reflective layer and the second reflective layer; the nanostructured layer comprises a plurality of nanoholes; The nanoholes are arranged asymmetrically.

9. A multi-filter that passes first wavelength light having a first wavelength and second wavelength light having a second wavelength different from the first wavelength; a multi-detector that senses the first wavelength light and the second wavelength light; The multi-filter comprises: a first sub-filter that passes the first wavelength light; a second sub-filter that passes the second wavelength light; the first sub-filter and the second sub-filter are arranged in series; the multi-detector includes an n-type film and a p-type film stacked on top of each other; the n-type film and the p-type film form a first photodiode and a second photodiode disposed at a deeper position than the first photodiode; the multiple filters are provided on the multiple detectors; the first photodiode senses the first wavelength light and the second wavelength light; The second photodiode is a super-spectroscopic element that senses light having a relatively longer wavelength out of the first wavelength light and the second wavelength light.

10. further comprising a spectroscopic processor; the first photodiode generates a first channel signal associated with the first wavelength light and the second wavelength light, and provides the first channel signal to the spectroscopic processor; the second photodiode generates a second channel signal associated with the second wavelength light and provides the second channel signal to the spectroscopic processor; The hyper-spectral element of claim 9 , wherein the spectroscopic processor generates information related to the intensities of the first wavelength light and the second wavelength light based on the first channel signal and the second channel signal.

11. each of the first sub-filter and the second sub-filter includes a first refractive index film and a second refractive index film stacked on top of each other; The super-splitting element according to claim 1 , wherein the first refractive index film has a different refractive index than the second refractive index film.

12. The super-splitting element according to claim 11 , wherein the first refractive index film of the first sub-filter and the first refractive index film of the second sub-filter have different thicknesses.

13. further comprising a microlens; The hyper-dispersive element according to any one of claims 1 to 12, wherein the microlens is arranged in series with the multi-filter and focuses incident light onto the multi-filter.

14. a plurality of pixels that sense an optical transmission spectrum of incident light; a spectroscopic processor; a main processor; each of the plurality of pixels includes: a first multi-filter that passes first wavelength light having a first wavelength and second wavelength light having a second wavelength longer than the first wavelength among the incident light; a first multi-detector that generates first channel signals related to the first wavelength light and the second wavelength light and second channel signals related to the second wavelength light and provides the first channel signals and the second channel signals to the spectroscopic processor; a second multi-filter that passes third wavelength light having a third wavelength and fourth wavelength light having a fourth wavelength longer than the third wavelength among the incident light; and a second multi-detector that generates third channel signals related to the third wavelength light and the fourth wavelength light and a fourth channel signal related to the fourth wavelength light and provides the third channel signals and the fourth channel signals to the spectroscopic processor; the spectroscopic processor generates information relating to the intensities of the first wavelength light, the second wavelength light, the third wavelength light, and the fourth wavelength light based on the first channel signal, the second channel signal, the fourth channel signal, and provides the information relating to the intensities of the first wavelength light, the second wavelength light, and the fourth wavelength light to a main processor; The first multi-filter comprises: a first sub-filter that passes the first wavelength light; a second sub-filter that passes the second wavelength light; the first sub-filter and the second sub-filter are arranged in series; the optical transmission spectrum of the first sub-filter has a first utilization band and a first sub-optical transmission region outside the first utilization band; the optical transmission spectrum of the second sub-filter has a second utilization band and a second sub-optical transmission region outside the second utilization band; the first wavelength is included in the first utilization band and the second sub-light transmission region; The second wavelength is included in the second utilization band and the first sub-light transmission region.

15. The hyperspectral sensor of claim 14 , wherein the first and second utilized bands partially overlap.

16. the second multi-filter includes a third sub-filter and a fourth sub-filter; the optical transmission spectrum of the third sub-filter has a third utilization band and a third sub-optical transmission region; the optical transmission spectrum of the fourth sub-filter has a fourth utilization band and a fourth sub-optical transmission region; the third wavelength is included in the third utilization band and the fourth sub-light transmission region; The hyperspectral sensor according to claim 14 , wherein the fourth wavelength is included in the fourth utilization band and the third sub-light transmission region.

17. The hyperspectral sensor of claim 16 , wherein the third and fourth utilized bands partially overlap.

18. the first multi-filter and the second multi-filter are arranged in parallel; The hyperspectral sensor of claim 16 , wherein the third sub-filter and the fourth sub-filter are arranged in series.

19. A plurality of pixels that sense an optical transmission spectrum of incident light; a spectroscopic processor; a main processor; each of the plurality of pixels includes: a first multi-filter that passes first wavelength light having a first wavelength and second wavelength light having a second wavelength longer than the first wavelength among the incident light; a first multi-detector that generates first channel signals related to the first wavelength light and the second wavelength light and second channel signals related to the second wavelength light and provides the first channel signals and the second channel signals to the spectroscopic processor; a second multi-filter that passes third wavelength light having a third wavelength and fourth wavelength light having a fourth wavelength longer than the third wavelength among the incident light; and a second multi-detector that generates third channel signals related to the third wavelength light and the fourth wavelength light and a fourth channel signal related to the fourth wavelength light and provides the third channel signals and the fourth channel signals to the spectroscopic processor; the spectroscopic processor generates information relating to the intensities of the first wavelength light, the second wavelength light, the third wavelength light, and the fourth wavelength light based on the first channel signal, the second channel signal, the fourth channel signal, and provides the information relating to the intensities of the first wavelength light, the second wavelength light, and the fourth wavelength light to a main processor; The first multi-filter comprises: a first sub-filter that passes the first wavelength light; a second sub-filter that passes the second wavelength light; the first sub-filter and the second sub-filter are arranged in series; The first multi-detector includes: a first sub-detector having a first light-sensing band that overlaps the first wavelength and the second wavelength; a second sub-detector having a second light-sensing band overlapping with one of the first wavelength and the second wavelength, A hyperspectral sensor, wherein the first sub-detector and the second sub-detector are arranged in series.

20. The second multi-detector comprises: a third sub-detector that receives the third wavelength light and the fourth wavelength light and generates the third channel signal; a fourth sub-detector that receives the fourth wavelength light and generates the fourth channel signal.

21. a hyperspectral element that receives incident light provided from a measurement object and generates a first channel signal associated with light having a first wavelength, a first channel signal associated with light having a second wavelength, and a second channel signal associated with the light having the first wavelength; a spectroscopic processor that generates first hyperspectral information relating to the intensity of light having the first wavelength at each position of the object to be measured, and second hyperspectral information relating to the intensity of light having the second wavelength at each position of the object to be measured, based on the first channel signal and the second channel signal; a main processor for generating hyperspectral image information based on the first hyperspectral information and the second hyperspectral information; and a display element for displaying a hyperspectral image based on the hyperspectral image information, 14. A hyperspectral image generating device, wherein the hyperspectral element is one of the elements according to any one of claims 1 to 13.

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