Substrate storage container

Abstract

A substrate storage container 1 includes: a container body 2 including a cylindrical wall portion 20 in which a container body opening portion is formed in one end portion thereof on a front side D11 and another end portion thereof on a rear side D12 is closed by a back wall 22, the inner surface of the wall portion 20 forming a substrate storage space 27 capable of storing a plurality of substrates and in communication with the container body opening portion; and a lid body detachable from the container body opening portion and capable of closing the container body opening portion. The back wall 22 has a gate trace 226 projecting toward the rear side D12. The gate trace 226 projects toward the rear side D12 from the outer surface of the back wall 22 around the gate trace 226, and a base portion of the gate trace 226 is connected to the outer surface of the back wall 22 over an area equal to or greater than the area of a gate cut section.

Description

Substrate storage container

[0001] The present invention relates to a substrate storage container used for storing, preserving, transporting, and shipping substrates such as semiconductor wafers.

[0002] BACKGROUND ART Substrate storage containers for storing substrates made of semiconductor wafers and transporting them during processes within a factory have been known in the past that have a configuration comprising a container body and a lid (see, for example, Patent Document 1).

[0003] One end of the container body has an opening periphery where a container body opening is formed. The other end of the container body has a closed cylindrical wall. A substrate storage space is formed within the container body. The substrate storage space is formed by being surrounded by the wall and is capable of storing multiple substrates. The lid is detachable from the opening periphery and is capable of closing the container body opening. When the container body opening is closed by the lid, the substrate storage container holds multiple substrates in a state where adjacent substrates are spaced apart at a predetermined interval and arranged side by side.

[0004] The substrate storage container is formed by injection molding a molding material such as polycarbonate resin. The resin flows from an injection device through a mold's sprue (a resin flow path to the runner), a runner branching from the sprue (a resin flow path to the gate), and a gate (a resin inlet into the cavity) to flow into the cavity, filling the cavity and transferring the shape of the cavity to form the container body (see, for example, Patent Document 1). Gate marks (also called gate marks) are inevitably formed in the molded container body at positions corresponding to the gates.

[0005] JP 2017-050494 A

[0006] Due to manufacturing constraints, gate marks are sometimes placed on the inner wall (rear wall) of the container body. However, around the gate marks placed on the inner wall of the container body, water is likely to accumulate or remain during cleaning or drying, and particles generated during gate processing are likely to accumulate.

[0007] The present invention aims to provide a substrate storage container having a gate mark on the rear wall of the container body, which can prevent water from accumulating or remaining around the gate mark during cleaning or drying, and particles from accumulating during gate processing.

[0008] The present invention is a substrate storage container comprising: a container body having a cylindrical wall portion with a container body opening formed at one end on the front side and the other end on the rear side closed by a rear wall, the inner surface of the wall portion forming a substrate storage space capable of storing a plurality of substrates and communicating with the container body opening; and a lid body that is detachable from the container body opening and can close the container body opening, wherein the rear wall has a gate mark that protrudes rearward, the gate mark protruding rearward more rearward than the outer surface of the rear wall around the gate mark, and the gate mark is connected to the outer surface of the rear wall at the base of the gate mark by an area greater than the area of ​​the gate cut portion.

[0009] In addition, the rear wall has one or more legs that form a contact surface when the container body is placed with the rear wall facing downward, and some or all of the gate marks may function as some or all of the legs.

[0010] The gate mark may be smoothly connected to the outer surface of the rear wall at a base of the gate mark.

[0011] According to the present invention, a substrate storage container can be provided that has a gate mark on the back wall of the container body, and that can prevent water from accumulating or remaining around the gate mark during cleaning or drying, or particles from accumulating during gate processing.

[0012] FIG. 3B is an exploded perspective view showing a state in which a plurality of substrates W are stored in a substrate storing container 1 according to a first embodiment of the present invention. FIG. 4 is an upper perspective view showing, from the front, a container body 2 of the substrate storing container 1 according to the first embodiment of the present invention. FIG. 5 is an upper perspective view showing, from the rear, a container body 2 of the substrate storing container according to the first embodiment of the present invention. FIG. 6 is a cross-sectional view taken along A-A in FIG. 3A. FIG. 7 is a schematic view showing a first example of the shape of a gate mark 226. FIG. 8 is a schematic view showing a second example of the shape of a gate mark 226. FIG. 9 is a schematic view showing a third example of the shape of a gate mark 226. FIG. 10 is an upper perspective view showing, from the rear, a container body 2A of a substrate storing container according to a second embodiment of the present invention. FIG. 11 is a cross-sectional view taken along B-B in FIG.

[0013] A substrate storing container 1 according to a first embodiment will be described below with reference to the drawings. FIG. 1 is an exploded perspective view showing a state in which a plurality of substrates W are stored in a substrate storing container 1 according to a first embodiment of the present invention. FIG. 2 is a top perspective view showing a container body 2 of the substrate storing container 1 according to the first embodiment of the present invention from the front. FIG. 3A is a top perspective view showing a container body 2 of the substrate storing container according to the first embodiment of the present invention from the rear. FIG. 3B is a top view of the container body 2 of the substrate storing container according to the first embodiment of the present invention. FIG. 3C is a cross-sectional view taken along line A-A in FIG. 3A.

[0014] For ease of explanation, the direction from the container body 2 (described below) to the lid 3 (direction from the upper right to the lower left in FIG. 1 ) is defined as the front direction D11 or front side D11, and the opposite direction is defined as the rear direction D12 or rear side D12, collectively defined as the front-to-rear direction D1. Furthermore, the direction from the lower wall 24 (described below) to the upper wall 23 (upward direction in FIG. 1 ) is defined as the upward direction D21, and the opposite direction is defined as the downward direction D22, collectively defined as the up-down direction D2. Furthermore, the direction from the second side wall 26 (described below) to the first side wall 25 (direction from the lower right to the upper left in FIG. 1 ) is defined as the leftward direction D31, and the opposite direction is defined as the rightward direction D32, collectively defined as the left-right direction D3 or lateral direction D3. Arrows indicating these directions are illustrated in some drawings.

[0015] The substrates W (see FIG. 1) stored in the substrate storage container 1 are disc-shaped silicon wafers, glass wafers, sapphire wafers, etc., and are thin wafers used in industry. In this embodiment, the substrates W are silicon wafers with a diameter of 300 mm.

[0016] 1, a substrate storage container 1 is used as a shipping container for storing substrates W made of silicon wafers as described above and transporting the substrates W by land, air, sea, or other transportation means, and is composed of a container body 2 and a lid 3. The container body 2 has side substrate support portions 5 and a rear substrate support portion 6 (see FIG. 2, etc.). The lid 3 has a front retainer (not shown) as a lid-side substrate support portion.

[0017] The container body 2 has a cylindrical wall portion 20 with a container body opening 21 formed at one end and a closed other end. A substrate storage space 27 is formed inside the container body 2. The substrate storage space 27 is surrounded by the wall portion 20. Side substrate support portions 5 and a rear substrate support portion 6 are arranged in the portion of the wall portion 20 that forms the substrate storage space 27. As shown in FIG. 1 , the substrate storage space 27 can store a plurality of substrates W.

[0018] The side substrate support portions 5 are provided on the wall portion 20 so as to form a pair inside the substrate storage space 27. When the container body opening 21 is not closed by the lid body 3, the side substrate support portions 5 abut against the edges of the plurality of substrates W, thereby supporting the edges of the plurality of substrates W while arranging adjacent substrates W in parallel with a predetermined distance between them. At the rear side of the side substrate support portions 5, a rear substrate support portion 6 is provided and molded integrally with the side substrate support portions 5.

[0019] The rear substrate support portion 6 (see FIG. 2, etc.) is provided on the wall portion 20 so as to form a pair with the front retainer inside the substrate storage space 27. When the container body opening 21 is closed by the lid 3, the rear substrate support portion 6 can support the rear portions of the edges of the substrates W by abutting against the edges of the substrates W.

[0020] The lid 3 is detachable from the opening periphery 28 that forms the container body opening 21, and is capable of closing the container body opening 21. The front retainer is provided on the lid 3 at a portion that faces the substrate storage space 27 when the container body opening 21 is closed by the lid 3. The front retainer is disposed inside the substrate storage space 27 so as to form a pair with the rear substrate support part 6.

[0021] When the container body opening 21 is closed by the lid 3, the front retainer can support the front portions of the edges of the substrates W by abutting against the edges of the substrates W. When the container body opening 21 is closed by the lid 3, the front retainer supports the substrates W in cooperation with the rear substrate support portion 6, thereby holding adjacent substrates W in a parallel arrangement with a predetermined distance between them.

[0022] The substrate storage container 1 is made of a resin such as a plastic material, and examples of the resin include thermoplastic resins such as polycarbonate, cycloolefin polymer, polyetherimide, polyetherketone, polybutylene terephthalate, polyetheretherketone, and liquid crystal polymer, as well as alloys of these. To impart conductivity to these resin materials, conductive materials such as carbon fiber, carbon powder, carbon nanotubes, and conductive polymers are selectively added. Glass fiber, carbon fiber, and the like can also be added to increase rigidity.

[0023] Each part will be described in detail below. As shown in Fig. 1, the wall part 20 of the container body 2 has a rear wall 22, an upper wall 23, a lower wall 24, a first side wall 25, and a second side wall 26. The rear wall 22, the upper wall 23, the lower wall 24, the first side wall 25, and the second side wall 26 are integrally molded from the above-mentioned materials.

[0024] The first side wall 25 and the second side wall 26 face each other in the lateral direction D3, and the upper wall 23 and the lower wall 24 face each other in the vertical direction D2. The rear end of the upper wall 23, the rear end of the lower wall 24, the rear end of the first side wall 25, and the rear end of the second side wall 26 are all connected to the rear wall 22. The front end of the upper wall 23, the front end of the lower wall 24, the front end of the first side wall 25, and the front end of the second side wall 26 are positioned opposite the rear wall 22 and constitute an opening periphery 28 that forms the substantially rectangular container body opening 21.

[0025] The opening periphery 28 is provided at one end of the container body 2, and the rear wall 22 is located at the other end of the container body 2. The container body 2 has a box-like outer shape formed by the outer surfaces of the walls 20. The inner surfaces of the walls 20, i.e., the inner surfaces of the rear wall 22, the upper wall 23, the lower wall 24, the first side wall 25, and the second side wall 26, form a substrate storage space 27 surrounded thereby. The container body opening 21 formed in the opening periphery 28 is surrounded by the walls 20 and communicates with the substrate storage space 27 formed inside the container body 2. A maximum of 25 substrates W can be stored in the substrate storage space 27.

[0026] 1, latch engagement recesses 231A, 231B, 241A, and 241B recessed outward from the board storage space 27 are formed in the upper wall 23 and the lower wall 24 near the opening periphery 28. A total of four latch engagement recesses 231A, 231B, 241A, and 241B are formed, one near each of the left and right ends of the upper wall 23 and the lower wall 24.

[0027] 1, ribs 235 are formed integrally with the upper wall 23 on the outer surface of the upper wall 23. The ribs 235 increase the rigidity of the container body 2. A top flange 236 is fixed to the center of the upper wall 23. The top flange 236 is a member that is hung on and suspended from the substrate storage container 1 when the substrate storage container 1 is suspended in an AMHS (automated wafer transport system), PGV (wafer substrate transport vehicle), or the like.

[0028] The side board supports 5 are provided on the first side wall 25 and the second side wall 26, respectively, and are interior components arranged in pairs in the left-right direction D3 within the board storage space 27. Specifically, as shown in Fig. 2, the side board supports 5 have a plate 51 and a support wall 52 serving as a plate support. The plate 51 and the support wall 52 are integrally molded from a resin material, and the plate 51 is supported by the support wall 52.

[0029] The plate portions 51 have a generally arcuate plate shape when viewed in the vertical direction D2. A total of 50 plate portions 51 are provided, 25 on each of the first side walls 25 and the second side walls 26, in the vertical direction D2. Adjacent plate portions 51 are spaced apart and parallel to each other in the vertical direction D2. Above the topmost plate portion 51, another plate-like member is arranged parallel to the plate portion 51. This plate-like member is located above the topmost plate portion 51 and serves as a guide for the substrate W being inserted into the substrate storage space 27.

[0030] The 25 plate portions 51 provided on the first side wall 25 and the 25 plate portions 51 provided on the second side wall 26 are positioned opposite each other in the left-right direction D3. The 50 plate portions 51 and the plate-shaped guide members parallel to the plate portions 51 are positioned parallel to the inner surface of the bottom wall 24. As shown in Fig. 2, convex portions 511 are provided on the upper surfaces of the plate portions 51. The substrate W supported by the plate portions 51 comes into contact only with the protruding ends of the convex portions 511 and does not come into contact with the plate portions 51 at their surfaces.

[0031] The support wall 52 has a plate shape extending in the up-down direction D2 and approximately in the front-rear direction D1. The support wall 52 has a predetermined length in the longitudinal direction of the plate portion 51 and is connected to the side edge of the plate portion 51. The plate-shaped support wall 52 curves along the outer edge of the plate portion 51 toward the board storage space 27.

[0032] That is, the 25 plate portions 51 provided on the first side wall 25 are connected to the support wall 52 provided on the first side wall 25 side. Similarly, the 25 plate portions 51 provided on the second side wall 26 are connected to the support wall 52 provided on the second side wall 26 side. The support wall 52 is fixed to the first side wall 25 and the second side wall 26, respectively.

[0033] The lateral substrate support portion 5 configured in this manner is capable of supporting the edges of multiple substrates W while keeping adjacent substrates W spaced apart at a predetermined distance and parallel to each other.

[0034] As shown in FIG. 1 and other figures, the lid 3 has a generally rectangular shape that roughly matches the shape of the opening periphery 28 of the container body 2. The lid 3 is detachable from the opening periphery 28 of the container body 2, and when the lid 3 is attached to the opening periphery 28, the lid 3 can close the container body opening 21. An annular seal member 4 is attached to the inner surface of the lid 3 (the back surface of the lid 3 shown in FIG. 1 ), on a sealing surface that faces a stepped portion formed immediately behind the opening periphery 28 in the rear direction D12 when the lid 3 is closing the container body opening 21. The seal member 4 is made of various thermoplastic elastomers, such as elastically deformable polyesters and polyolefins, fluororubber, silicone rubber, etc. The seal member 4 is arranged around the outer periphery of the lid 3.

[0035] When the lid 3 is attached to the opening periphery 28, the sealing member 4 is sandwiched between the sealing surface and the inner surface of the lid 3 and elastically deforms, so that the lid 3 hermetically closes the container body opening 21. By removing the lid 3 from the opening periphery 28, it becomes possible to load and unload the substrates W into and from the substrate storage space 27 inside the container body 2.

[0036] The lid 3 is provided with a latch mechanism. The latch mechanism is provided near both left and right ends of the lid 3, and as shown in Fig. 1, includes two upper latch portions 32A that can protrude in an upward direction D21 from the upper edge of the lid 3 and two lower latch portions 32B that can protrude in a downward direction D22 from the lower edge of the lid 3. The two upper latch portions 32A are located near both left and right ends of the upper edge of the lid 3, and the two lower latch portions 32B are located near both left and right ends of the lower edge of the lid 3.

[0037] An operating portion 33 is provided on the outer surface of the lid 3. By operating the operating portion 33 from the front side of the lid 3, the upper latch portion 32A and the lower latch portion 32B can be made to protrude from the upper and lower edges of the lid 3, or can be made not to protrude from the upper and lower edges. The upper latch portion 32A protrudes in the upward direction D21 from the upper edge of the lid 3 and engages with the latch engagement recesses 231A and 231B of the container body 2, and the lower latch portion 32B protrudes in the downward direction D22 from the lower edge of the lid 3 and engages with the latch engagement recesses 241A and 241B of the container body 2, thereby fixing the lid 3 to the opening peripheral edge 28 of the container body 2.

[0038] Next, the rear wall 22 will be described in detail. As shown in Figures 3A to 3C, the rear wall 22 has legs 221 on its outer surface (rear side D12) that form a contact surface CP (shown by a two-dot chain line in Figure 3C) when the container body 2 is placed with the rear wall 22 facing downward. For example, the container body 2 may be placed with the rear wall 22 facing downward when it does not contain any substrates W. The number and shape of the legs 221 are not limited as long as they can form the contact surface CP. For example, if the leg 221 has a large area and is a straight plane, one leg 221 can form the contact surface CP.

[0039] In the first embodiment, the rear wall 22 has four legs 221, one at each corner. The bottom surfaces 222 (surfaces on the rear side D12) of the legs 221 are straight planes parallel to the D2-D3 plane (a plane perpendicular to the front-to-rear direction D1). The bottom surfaces 222 of the four legs 221 are positioned so as to form the vertices of a rectangle, forming a ground plane CP parallel to the D2-D3 plane. In other words, the ground plane CP is formed by the bottom surfaces 222 of one or more legs 221.

[0040] The portions of the rear wall 22 other than the legs 221 on the rear side D12 are located forward D11 of the bottom surfaces 222 of the legs 221 that form the ground contact surface CP. The portions of the rear wall 22 other than the legs 221 on the rear side D12 can have various shapes depending on the container body 2. For example, a recessed area 223 that is recessed forward D11 from the bottom surfaces 222 of the legs 221 is provided between two legs 221 aligned in the vertical direction D2. Two linear grooves 224 that are recessed toward the front D11 and extend in the vertical direction D2 are provided inside the horizontal direction D3 of the legs 221 and the recessed area 223 aligned in the horizontal direction D3. The depth of the linear grooves 224 from the ground contact surface CP is, for example, 20 to 40 mm.

[0041] An island region 225 is provided between two linear grooves 224 aligned in the horizontal direction D3. The surface of the rear side D12 of the island region 225 is located on the front side D11 of the bottom surface 222 of the leg portion 221. Corresponding to the linear grooves 224, a linear bulge 271 is provided in the board storage space 27, bulging out toward the front side D11 and extending in the up-down direction D2.

[0042] The rear wall 22 has a gate mark 226 facing the rear side D12. The gate mark 226 is located on the front side D11 of the ground plane CP. The gate mark 226 is provided in the island region 225. More specifically, the surface of the rear side D12 of the island region 225 is the outer surface of the rear wall 22 other than the bottom surface 22 of the leg 221, which is located on the front side D11 of the ground plane CP, and is located on the front side D11 of the bottom surface 222 of the leg 221. The gate mark 226 is provided on the surface of the rear side D12 of the island region 225. By being disposed on the outer surface of the island region 225, the gate mark 226 is located on the front side D11 of the ground plane CP.

[0043] A gate is an inlet through which molten resin is poured from an injection molding machine into a mold (molded product). A gate mark inevitably remains in the molded product at a position corresponding to the gate. When the container body 2 of the substrate storage container 1 is manufactured by molding, the gate mark is often located on the back wall 22 of the container body 2 due to constraints such as the shape of the container body 2 and molding conditions.

[0044] The gate mark 226 protrudes rearward D12 beyond the outer surface of the rear wall 22 around the gate mark 226, and is connected to the outer surface of the rear wall 22 at a base 2261 of the gate mark 226 by an area S61 that is equal to or greater than the area S62 of the gate cut portion 2262. In this embodiment, the gate mark 226 protrudes rearward D12 beyond the outer surface of the island region 225 of the rear wall 22. The gate mark 226 is smoothly connected to the outer surface of the island region 225 of the rear wall 22 at a base 2261 of the gate mark 226 by an area S61 that is equal to or greater than the area S62 of the gate cut portion 2262.

[0045] The height H226 of the gate mark 226 (see FIG. 3C) is, for example, 1.0 to 3.0 mm, and preferably 1.5 to 2.0 mm. The ratio S61 / S62 of the area S61 of the base 2261 of the gate mark 226 to the area S62 of the gate cut portion 2262 is, for example, 5 to 10 times.

[0046] The gate cut portion 2262 is a portion cut off at the top of the gate mark 226 during gate processing, and generally, the entire top of the gate mark 226 becomes the gate cut portion 2262. However, if the shape of the gate mark 226 is columnar (typically, cylindrical), then part of the top of the gate mark 226 becomes the gate cut portion 2262 (see, for example, the shape shown in FIG. 4C ).

[0047] Examples of the shape of the gate mark 226 will now be described. Fig. 4A is a schematic diagram showing a first example of the shape of the gate mark 226. Fig. 4B is a schematic diagram showing a second example of the shape of the gate mark 226. Fig. 4C is a schematic diagram showing a third example of the shape of the gate mark 226.

[0048] The shape of the gate mark 226 is not limited. For example, as shown in Fig. 4A, the gate mark 226 may be substantially hemispherical. As shown in Fig. 4B, the gate mark 226 may be substantially frustoconical. As shown in Fig. 4C, the gate mark 226 may be substantially cylindrical. In the substantially cylindrical gate mark 226, the entire top of the gate mark 226 is the gate cut portion 2262.

[0049] The identification member 245 (see FIG. 3A) is a detachable member attached to the lower rear part of the container body 2 in order to identify information about the substrates W stored in the substrate storage container 1. Depending on its shape, the identification member 245 may be located at a position D12 behind the ground plane CP when attached to the container body 2. However, when the container body 2 is to be placed with the rear wall 22 facing downward, the identification member 245 is removed from the container body 2 beforehand.

[0050] The substrate storage container 1 according to the first embodiment can provide the following effects. The substrate storage container 1 of the first embodiment includes a container body 2 having a cylindrical wall 20 with a container body opening 21 formed at one end on the front side D11 and the other end on the rear side D12 closed by a back wall 22, the inner surface of the wall 20 defining a substrate storage space 27 capable of storing a plurality of substrates W and communicating with the container body opening 21, and a lid 3 that is detachable from the container body opening 21 and can close the container body opening 21. The back wall 22 has a gate mark 226 that protrudes toward the rear side D12, the gate mark 226 protruding toward the rear side D12 further than the outer surface of the back wall 22 around the gate mark 226, and is connected to the outer surface of the back wall 22 at a base 2261 of the gate mark 226 by an area that is equal to or greater than the area of ​​a gate cut portion 2262.

[0051] Therefore, in the substrate storage container 1 having the gate mark 226 on the rear wall 22 of the container body 2, no depression or flat surface is formed around the gate mark 226. When attempting to clean or dry the container body 2 with the rear wall 22 facing upward, it is possible to prevent water from pooling or remaining around the gate mark 226. It is also possible to prevent particles generated during gate processing from pooling around the gate mark 226.

[0052] 4A or 4B, the gate mark 226 smoothly connects to the outer surface of the rear wall 22 at its base 2261. Therefore, the aforementioned accumulation or residue of water, accumulation of particles, etc. are even less likely to occur near the base 2261 of the gate mark 226.

[0053] Next, a substrate storing container according to a second embodiment of the present invention will be described with reference to the drawings. Fig. 5A is a top perspective view showing a container body 2A of the substrate storing container according to the second embodiment of the present invention from the rear. Fig. 5B is a cross-sectional view taken along line B-B shown in Fig. 5A.

[0054] In the second embodiment, the features of the present invention differ from those of the first embodiment, for example, in the function, position, and number of gate marks 226. Other configurations are generally the same as those of the first embodiment, so the same components are denoted by the same reference numerals and their description will be omitted (the description of the configuration and effects of the first embodiment will be applied to the other embodiments as appropriate).

[0055] 5A and 5B , in a container body 2A of a substrate storage container according to the second embodiment, the rear wall 22 has one or more legs 221 that form a contact surface CP when the container body 2A is placed with the rear wall 22 facing downward. Part or all of the gate marks 226 function as part or all of the legs 221. In this embodiment, the gate marks 226 protrude rearward D12 beyond the outer surface of the rear wall 22 around the gate marks 226. The gate marks 226 are connected to the outer surface of the rear wall 22 at a base 2261 of the gate marks 226 by an area S61 that is equal to or greater than the area S62 of the gate cut portion 2262.

[0056] All (four) of the gate marks 226 function as all (four) of the leg portions 221. Note that some of the gate marks 226 may function as all of the leg portions 221, some of the gate marks 226 may function as part of the leg portions 221, or all of the gate marks 226 may function as part of the leg portions 221. The number of legs 221 is not limited and may be, for example, one, two, or three.

[0057] The substrate storage container according to the second embodiment can provide the following effects: In the substrate storage container according to the second embodiment, the rear wall 22 has one or more legs 221 that form the contact surface CP when the container body 2A is placed with the rear wall 22 facing downward, and part or all of the gate marks 226 function as part or all of the legs 221. Therefore, the gate marks 226 can be used as the legs 221.

[0058] The present invention is not limited to the above-described embodiments, and modifications are possible within the technical scope defined in the claims.

[0059] For example, the shapes of the container body and the lid, and the number and dimensions of the substrates W that can be stored in the container body are not limited to the shapes of the container body 2 and the lid 3 in this embodiment, and the number and dimensions of the substrates W that can be stored in the container body 2. Furthermore, although the substrates W in this embodiment are silicon wafers with a diameter of 300 mm, they are not limited to this value.

[0060] REFERENCE SIGNS LIST 1 Substrate storage container 2 Container body 3 Lid 21 Container body opening 20 Wall 22 Back wall 27 Substrate storage space 221 Leg 226 Gate mark 2261 Base 2262 Gate cut portion CP Ground surface D11 Front side D12 Rear side W Substrate

Claims

1. a container body having a cylindrical wall portion with a container body opening formed at one end on the front side and the other end on the rear side closed by a back wall, the inner surface of the wall portion forming a substrate storage space capable of storing a plurality of substrates and communicating with the container body opening; a lid body that is detachable from the container body opening and that can close the container body opening, The rear wall has a gate mark protruding rearward, the gate mark protrudes rearward from the outer surface of the rear wall around the gate mark, and is connected to the outer surface of the rear wall at a base of the gate mark over an area equal to or greater than an area of ​​a gate cut portion, the rear wall has one or more legs that form a contact surface when the container body is placed with the rear wall facing downward, A substrate storage container, wherein part or all of the gate trace functions as part or all of the leg portion.

2. The substrate storage container according to claim 1 , wherein the gate mark smoothly connects to the outer surface of the rear wall at a base of the gate mark.