Valve testing device and method

Abstract

Embodiments of the present application provide a valve testing device and method. The valve testing device comprises a first input pipeline and a first output pipeline; one end of a valve under test is connected to a liquid outlet end of a liquid supply assembly by means of the first input pipeline, and the other end of the valve under test is connected to a liquid inlet end of the liquid supply assembly by means of the first output pipeline; the first input pipeline is provided with a first input switch valve; the first output pipeline is provided with a first output switch valve and a first sampling part. The valve testing method is applied to the valve testing device. A circulation circuit is specially used for testing a valve under test, has no other functional pipelines or redundant pipelines, is clear and concentrated, and has the advantages of simple testing structure and easy implementation.

Description

Valve testing device and method Technical Field

[0001] The present application relates to the field of semiconductor technology, and in particular to a valve testing device and method. Background Art

[0002] Wafer cleaning is the process of removing contaminants generated by contact with various organic matter, particles, and metals during wafer processing and polishing. Specifically, semiconductor cleaning equipment uses various chemical solutions to clean wafers. Because these solutions often involve strong acids and bases, a large number of resin valves are required in the piping of semiconductor cleaning equipment. Therefore, SEMI (Semiconductor Equipment and Materials International) certification of these resin valves is crucial.

[0003] Among them, the testing of resin valves mainly includes: process performance test and mechanical performance test; the existing testing method mainly targets the application valves on the cleaning machine in semiconductor cleaning equipment, and passively tests the valve quality after replacement. However, there are the following disadvantages: (1) The types of pipeline applications of semiconductor cleaning equipment are divergent, which is not conducive to the verification requirements of all types of resin valves; (2) The types of pipelines in semiconductor cleaning equipment are complex, and some resin valve positions cannot be immersed in the process and sampled; (3) If the process performance of the tested resin valve is poor, it will contaminate the semiconductor cleaning equipment, thereby affecting the process performance test of the entire semiconductor cleaning equipment; (4) If multiple valves are tested, cross contamination is likely to occur, thereby interfering with the test results; (5) Due to the use of pipeline benchmark position replacement testing, there is no real-time valve comparison performance data, which reduces the accuracy of the test results. In addition, the test cycle of a single valve is long, resulting in a long test time. Therefore, how to quickly and effectively test resin valves is an urgent problem to be solved.

[0004] Summary of the Invention

[0005] In view of this, the purpose of this application is to provide a valve testing device and method to alleviate at least some of the above-mentioned technical problems.

[0006] The valve testing device provided in the embodiment of the present application includes: a first input pipeline and a first output pipeline;

[0007] One end of the valve to be tested is connected to the liquid outlet of the liquid supply component through the first input pipeline, and the other end is connected to the liquid inlet of the liquid supply component through the first output pipeline;

[0008] The first input pipeline is provided with a first input switching valve;

[0009] The first output pipeline is provided with a first output switching valve and a first sampling portion.

[0010] In some embodiments, the first sampling portion is located between the liquid inlet of the first output pipeline and the first output switching valve;

[0011] And / or, the first sampling portion is connected to a first sampling pipeline, and the first sampling pipeline is provided with a first sampling switch valve.

[0012] In some embodiments, a first side pipeline is further included, wherein a first end of the first side pipeline is connected to the first input pipeline and is located between the first input switch valve and the valve to be tested, and a second end of the first side pipeline is connected to the liquid inlet end of the liquid supply component; the first side pipeline is provided with a first side switch valve.

[0013] In some embodiments, the first side switch valve is a needle valve;

[0014] And / or, the first input switch valve is a manual valve or an electric valve;

[0015] And / or, the first output switching valve is a needle valve;

[0016] And / or, the first sampling switch valve is a needle valve;

[0017] And / or, the liquid supply component is a semiconductor cleaning device.

[0018] In some embodiments, the first input line is provided with a first pressure gauge;

[0019] The first pressure gauge is close to the liquid outlet of the first input pipeline.

[0020] In some embodiments, the valve testing device further comprises: a second input pipeline and a second output pipeline;

[0021] One end of the comparison valve is connected to the liquid outlet of the liquid supply assembly through the second input pipeline, and the other end of the comparison valve is connected to the liquid inlet of the liquid supply assembly through the second output pipeline;

[0022] The second input pipeline is provided with a second input switching valve;

[0023] The second output pipeline is provided with a second output switching valve and a second sampling portion.

[0024] In some embodiments, the second sampling portion is located between the liquid inlet of the second output pipeline and the second output switching valve;

[0025] And / or, the second sampling position is connected to a second sampling pipeline, and the second sampling pipeline is provided with a second sampling switch valve.

[0026] In some embodiments, a second side pipeline is further included, wherein a first end of the second side pipeline is connected to the second input pipeline and is located between the second input switch valve (211) and the comparison valve (200), and a second end of the second side pipeline is connected to the liquid inlet end of the liquid supply component; and the second side pipeline is provided with a second side switch valve.

[0027] In some embodiments, the second side switch valve is a needle valve;

[0028] And / or, the second input switch valve is a manual valve or an electric valve;

[0029] And / or, the second output switching valve is a needle valve;

[0030] And / or, the second sampling switch valve is a needle valve.

[0031] In some embodiments, the second input line is provided with a second pressure gauge;

[0032] The second pressure gauge is close to the liquid outlet of the second input pipeline.

[0033] In some embodiments, the first input pipeline, the valve to be tested, and the first output pipeline constitute a pipeline to be tested;

[0034] The second input pipeline, the comparison valve and the second output pipeline constitute a comparison pipeline;

[0035] The pipeline to be tested and the comparison pipeline are arranged in parallel;

[0036] The liquid inlet of the first input pipeline is connected to the liquid inlet of the second input pipeline, and both are connected to the liquid outlet of the liquid supply component through the main input pipeline;

[0037] The liquid outlet of the first output pipeline and the liquid outlet of the second output pipeline are communicated with each other, and are both connected to the liquid inlet end of the liquid supply component through the main output pipeline.

[0038] In some embodiments, both the first input line and the second input line are provided with flow meters;

[0039] Alternatively, the main input pipeline is provided with a flow meter.

[0040] In some embodiments, the liquid supply assembly includes a liquid storage chamber and a liquid outlet pipeline connected to the liquid storage chamber, the liquid outlet end of the liquid outlet pipeline is connected to the first input pipeline, and the liquid outlet pipeline is provided with a pump.

[0041] In some embodiments, the liquid outlet pipeline is provided with a heater, and the heater is located at the liquid outlet end of the pump;

[0042] And / or, the liquid outlet pipeline is provided with a thermometer, and the thermometer is located between the heater and the liquid outlet end of the liquid outlet pipeline;

[0043] And / or, the liquid outlet pipeline is provided with a filter, and the filter is located between the heater and the liquid outlet end of the liquid outlet pipeline.

[0044] The present invention provides a valve testing method using the above-mentioned valve testing device. The method includes the following steps:

[0045] After the valve to be tested is installed in place, the liquid supply assembly is controlled to provide circulating ultrapure water and clean the valve to be tested;

[0046] Controlling the liquid supply component to provide a circulating acidic solution to flow through and soak the valve to be tested according to a first preset period and a first preset flow rate; sampling and detecting the acidic solution in the first output pipeline to obtain an actual content of the element to be tested in the acidic environment, and comparing the actual content of the element to be tested in the acidic environment with a preset content of the element to be tested in the acidic environment;

[0047] Controlling the liquid supply component to provide a circulating alkaline solution to flow through and soak the valve to be tested according to a second preset period and a second preset flow rate; sampling and detecting the alkaline solution in the first output pipeline to obtain an actual content of the element to be tested in the alkaline environment, and comparing the actual content of the element to be tested in the alkaline environment with a preset content of the element to be tested in the alkaline environment;

[0048] According to the comparison results obtained from the acidic environment detection and the comparison results obtained from the alkaline environment detection, it is judged whether the valve to be tested meets the quality requirements.

[0049] The present invention provides another valve testing method, which uses the above-mentioned valve testing device and includes the following steps:

[0050] After the valve to be tested and the comparison valve are installed in place, the liquid supply assembly is controlled to provide circulating ultrapure water and clean the valve to be tested and the comparison valve;

[0051] Controlling the liquid supply assembly to provide a circulating acidic solution to flow through and soak the valve to be tested according to a first preset period and a first preset flow rate, sampling and testing the acidic solution in the first output pipeline to obtain a detection content of the element to be tested in the first acidic environment;

[0052] Controlling the liquid supply assembly to provide a circulating acidic solution to flow through and soak the comparison valve according to a first preset period and a first preset flow rate, sampling and detecting the acidic solution in the second output pipeline to obtain a detection content of the element to be measured in the second acidic environment;

[0053] comparing the detected content of the element to be detected in the first acidic environment with the detected content of the element to be detected in the second acidic environment;

[0054] Controlling the liquid supply assembly to provide a circulating alkaline solution to flow through and soak the valve to be tested according to a second preset period and a second preset flow rate, sampling and detecting the alkaline solution in the first output pipeline to obtain a detection content of the element to be tested in the first alkaline environment;

[0055] Controlling the liquid supply assembly to provide a circulating alkaline solution to flow through and soak the comparison valve according to a second preset period and a second preset flow rate, sampling and detecting the alkaline solution in the second output pipeline to obtain a detection content of the element to be measured in the second alkaline environment;

[0056] comparing the detected content of the element to be detected in the first alkaline environment with the detected content of the element to be detected in the second alkaline environment;

[0057] Determining whether the valve to be tested meets quality requirements based on a comparison result of the detected content of the element to be tested in the first acidic environment and the detected content of the element to be tested in the second acidic environment, and a comparison result of the detected content of the element to be tested in the first alkaline environment and the detected content of the element to be tested in the second alkaline environment;

[0058] The detected content of the element to be detected in the second acidic environment is the reference content of the element to be detected in the acidic environment, and the detected content of the element to be detected in the second alkaline environment is the reference content of the element to be detected in the alkaline environment.

[0059] The present application provides another valve testing method, which is applied to the above-mentioned valve testing device. The method includes the following steps:

[0060] Pressurize the liquid in the valve to be tested to the allowable boundary pressure;

[0061] Wrapping the test paper or test cloth on the outer surface of the valve to be tested for a preset time, and obtaining the initial parameters of the test paper or test cloth before wrapping and the actual parameters after wrapping for the preset time;

[0062] Compare the initial parameters with the actual parameters to determine whether the valve under test is leaking or the extent of the leakage;

[0063] The parameters in the initial parameters and the actual parameters include at least one of color and weight.

[0064] The present application provides another valve testing method, which is applied to the above-mentioned valve testing device. The method includes the following steps:

[0065] Pressurize the liquids in the valve to be tested and the comparison valve to the allowable boundary pressure;

[0066] Wrapping the test paper or test cloth on the outer surface of the valve to be tested and the comparison valve for a preset time, and obtaining the initial parameters of the test paper or test cloth before wrapping and the actual parameters after wrapping for the preset time;

[0067] Compare the initial parameters and actual parameters corresponding to the valve to be tested, and compare the initial parameters and actual parameters corresponding to the valve to be tested;

[0068] Use the comparison result of the comparison valve as a benchmark to determine whether the valve under test is leaking or the extent of the leakage;

[0069] The parameters in the initial parameters and the actual parameters include at least one of color and weight.

[0070] The present application provides another valve testing method, which is applied to the above-mentioned valve testing device. The method includes the following steps:

[0071] Controlling the first input switch valve and the first output switch valve to be in an open state, and controlling the operating parameters of the fluid in the first input pipeline to be preset operating parameters; the operating parameters include: at least one of temperature, flow rate, and pressure;

[0072] Triggering the valve to be tested at a preset frequency, and after a preset time, observing whether the valve to be tested can be triggered normally, whether there are any debris dropped around the valve body of the valve to be tested, and whether there are any debris in the first output pipeline;

[0073] Based on the observation results, it is determined whether the working durability of the valve to be tested meets the requirements.

[0074] The present application provides another valve testing method, which is applied to the above-mentioned valve testing device. The method includes the following steps:

[0075] Controlling the first input switch valve and the first output switch valve to be in an open state, and controlling the operating parameters of the fluid in the first input pipeline to be preset operating parameters; the operating parameters include: at least one of temperature, flow rate, and pressure;

[0076] Triggering the valve to be tested at a preset frequency, and after a preset time, observing whether the valve to be tested can be triggered normally, whether there are any debris dropped around the valve body of the valve to be tested, and whether there are any debris in the first output pipeline;

[0077] controlling the second input switch valve and the second output switch valve to be in an open state, and controlling the operating parameters of the fluid in the second input pipeline to be the preset operating parameters;

[0078] triggering the comparison valve at the preset frequency, and after the preset time, observing whether the comparison valve can be triggered normally, whether there are any debris dropped around the valve body of the comparison valve, and whether there are any debris in the second output pipeline;

[0079] Based on the observation result corresponding to the comparison pipeline, the observation result corresponding to the valve to be tested is compared with the observation result corresponding to the comparison valve to determine whether the working durability of the valve to be tested meets the requirements.

[0080] The valve testing device and method provided in the embodiments of the present application have the following beneficial effects:

[0081] In the valve testing device and method provided by the present application, a liquid supply assembly, a first input pipeline, a valve to be tested, and a first output pipeline are sequentially connected along the direction of fluid flow to form a circulation loop. When the valve to be tested is tested, the fluid flowing through the valve to be tested or the fluid condition within the valve to be tested is controlled by controlling the operating states of the first input switch valve on the first input pipeline and the first output switch valve on the first output pipeline. Based on the corresponding fluid condition, whether the valve to be tested meets quality requirements is determined. The circulation loop is specifically used to test the valve to be tested, without other functional pipelines, that is, no redundant pipelines, and the pipelines are clear and centralized, with the advantages of a simple detection structure and easy implementation. The valve to be tested can be opened and closed by controlling the first input switch valve and the first output switch valve. When the switch valves at both ends of the valve to be tested are closed, the valve to be tested can be immersed and liquid sampling can be performed on it in the first sampling portion. The content of the element to be tested can be detected based on the detection of the sampled liquid. Because the circulation loop is independent of other functional pipelines, it will not contaminate other functional pipelines, for example, it will not affect semiconductor cleaning equipment and its process performance testing.

[0082] Other features and advantages of the present application will be described in the following description, and in part will become apparent from the description, or understood by practicing the present application. The purpose and other advantages of the present application are realized and obtained by the structures particularly pointed out in the description and drawings.

[0083] In order to make the above-mentioned objects, features and advantages of the present application more obvious and easy to understand, preferred embodiments are given below and described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0084] In order to more clearly illustrate the specific implementation methods of the present application or the technical solutions in the prior art, the following will briefly introduce the drawings required for use in the specific implementation methods or the description of the prior art. Obviously, the drawings described below are some implementation methods of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0085] FIG1 is a schematic diagram of the principle of a valve testing device provided in an embodiment of the present application;

[0086] FIG2 is a schematic diagram of the principle of another valve testing device provided in an embodiment of the present application;

[0087] FIG3 is a flow chart of a first valve testing method provided in an embodiment of the present application;

[0088] FIG4 is a flow chart of a second valve testing method provided in an embodiment of the present application;

[0089] FIG5 is a flow chart of a third valve testing method provided in an embodiment of the present application;

[0090] FIG6 is a flow chart of a fourth valve testing method provided in an embodiment of the present application;

[0091] FIG7 is a flow chart of a fifth valve testing method provided in an embodiment of the present application;

[0092] FIG8 is a flow chart of a sixth valve testing method provided in an embodiment of the present application.

[0093] Description of reference numerals:

[0094] 100-valve to be tested;

[0095] 110 - first input pipeline; 111 - first input switch valve; 112 - first pressure gauge;

[0096] 113 - first side pipeline; 114 - first side switch valve;

[0097] 120 - first output pipeline; 121 - first output switch valve; 122 - first sampling pipeline;

[0098] 123-first sampling switch valve;

[0099] 200-Comparison valve;

[0100] 210 - second input pipeline; 211 - second input switch valve; 212 - second pressure gauge;

[0101] 213 - second side pipeline; 214 - second side switch valve;

[0102] 220 - second output pipeline; 221 - second output switch valve; 222 - second sampling pipeline;

[0103] 223-second sampling switch valve;

[0104] 300-main input pipeline; 310-flow meter;

[0105] 400-main output pipeline;

[0106] 500-total side pipe;

[0107] 600-liquid supply assembly;

[0108] 610-liquid storage chamber; 620-pump; 630-liquid outlet pipeline; 640-heater; 650-filter;

[0109] 660-Thermometer. DETAILED DESCRIPTION

[0110] To make the purpose, technical solutions, and advantages of the embodiments of this application more clear, the technical solutions of this application will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the embodiments described are part of the embodiments of this application, not all of them. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0111] The embodiment of the present application provides a valve testing device and method for testing a valve 100 to be tested. Taking the detection of the valve 100 to be tested as a resin valve as an example, the device and method are used to detect the content of the element to be tested, pressure resistance, durability, etc. in the resin valve, and determine whether it meets the quality requirements based on the test results. To facilitate understanding of this embodiment, the embodiment of the present application is introduced in detail below.

[0112] Example 1

[0113] The valve testing device provided in the embodiment of the present application, as shown in Figure 1, includes: a first input pipeline 110 and a first output pipeline 120; wherein, one end of the valve to be tested 100 is connected to the liquid outlet end of the liquid supply component 600 through the first input pipeline 110, and the other end is connected to the liquid inlet end of the liquid supply component 600 through the first output pipeline 120; the first input pipeline 110 is provided with a first input switch valve 111; the first output pipeline 120 is provided with a first output switch valve 121 and a first sampling part.

[0114] When the valve testing device provided in the embodiment of the present application is used to perform corresponding inspections on the valve to be tested 100, the two ends of the valve to be tested 100 are connected to the liquid supply assembly 600 through the first input pipeline 110 and the first output pipeline 120, respectively. That is, along the direction of fluid flow, the liquid supply assembly 600, the first input pipeline 110, the valve to be tested 100, and the first output pipeline 120 are connected in sequence to form a circulation loop. When the valve to be tested 100 is tested, the working states of the first input switch valve 111 on the first input pipeline 110 and the first output switch valve 121 on the first output pipeline 120 are controlled to control the fluid flowing through the valve to be tested 100 or the fluid condition in the valve to be tested 100, and based on the corresponding fluid condition, it is judged whether the valve to be tested 100 meets the quality requirements. This circulation loop is specifically designed for testing the valve 100 under test. It has no other functional pipelines, meaning no redundant pipelines. The pipelines are clear and centralized, offering the advantages of a simple testing structure and easy implementation. The valve 100 under test can be switched on and off by controlling the first input on-off valve 111 and the first output on-off valve 121. When both on-off valves under test are closed, the valve 100 under test can be immersed, and liquid sampling can be performed in the first sampling portion. The content of the element under test can be determined based on the testing of the sampled liquid. Because the circulation loop is independent of other functional pipelines, it does not contaminate other functional pipelines, for example, without affecting semiconductor cleaning equipment and its process performance testing. For example, to test the element under test content (element leaching) of the valve 100 under test, a predetermined solution is introduced into the circulation loop. A fluid sample is drawn from the first sampling portion, and the fluid flowing through the valve 100 under test is tested for the element under test content. The test result is compared with a baseline content, and the comparison result is used to determine whether the valve 100 under test meets quality requirements.

[0115] In the embodiment of the present application, as shown in FIG1 , the first sampling portion is located between the liquid inlet of the first output pipeline 120 and the first output switch valve 121. With this arrangement, when sampling is performed, when the first output switch valve 121 is in a closed state, fluid backflow can be avoided, which affects the sampling accuracy. Moreover, with this arrangement, the first sampling portion can be located closer to the valve to be tested 100, so that a fluid sample that is closer to the fluid inside the valve to be tested 100 can be obtained, thereby ensuring the accuracy of the test results.

[0116] In the embodiment of the present application, as shown in FIG1 , the first sampling portion is connected to a first sampling pipeline 122 . The first sampling pipeline 122 is provided with a first sampling switch valve 123 . The first switch valve can be a needle valve to facilitate sampling.

[0117] In the embodiment of the present application, as shown in FIG1 , a first side conduit 113 is further included. A first end of the first side conduit 113 is connected to the first input conduit 110 and is located between the first input on / off valve 111 and the valve to be tested 100 . A second end of the first side conduit 113 is connected to the liquid inlet of the liquid supply assembly 600 . A first side on / off valve 114 is provided in the first side conduit 113 , which can be a needle valve. When sampling in the first sampling section, the first input on / off valve 111 and the first output on / off valve 121 are both closed. At this time, the first side on / off valve 114 is opened, allowing the first side conduit 113 to communicate with the outside world, facilitating smooth sampling in the first sampling section. A second end of the first side conduit 113 , corresponding to its first end, can be connected to the liquid inlet of the liquid supply assembly 600 .

[0118] In some embodiments, the first input switch valve 111 may be a manual valve or an electric valve.

[0119] In some embodiments, the first output switching valve 121 is a needle valve.

[0120] Due to the provision of the first side pipeline 113 and the first side valve 114, when only the first input on-off valve 111 and the first side on-off valve 114 are opened, a circulation loop is formed along the direction of fluid flow by the liquid supply assembly 600, the first input pipeline 110, and the first side pipeline 113. That is, the fluid does not pass through the valve to be tested 100, but instead flows directly back into the liquid storage chamber 610 of the liquid supply assembly 600 through the first side pipeline 113. With this arrangement, during the testing of the valve to be tested 100, if the hydraulic pressure at the inlet end of the valve to be tested 100 is too high, the pressure at the inlet end can be relieved by controlling the first side on-off valve 114, thereby effectively protecting the entire circulation loop and the valve to be tested 100.

[0121] In the embodiment of the present application, as shown in FIG1 , the first input pipeline 110 is provided with a flow meter 310 to detect the fluid flow at the corresponding portion, and can cooperate with the first input switch valve 111 and other switch valves to control the fluid flow of the circulation loop.

[0122] In the embodiment of the present application, as shown in FIG1 , a first pressure gauge 112 is provided in the first input pipeline 110; the first pressure gauge 112 is located near the liquid outlet of the first input pipeline 110. The provision of the first pressure gauge 112 enables real-time detection of the fluid pressure within the circulation loop. The first pressure gauge 112, in conjunction with the corresponding on / off valve, can effectively control the fluid pressure within the circulation loop and even within the valve 100 under test.

[0123] In the embodiment of the present application, as shown in FIG1 , the liquid supply assembly 600 includes a liquid storage chamber 610 and a liquid outlet pipeline 630 connected to the liquid storage chamber 610. The liquid outlet end of the liquid outlet pipeline 630 is connected to the first input pipeline 110. The liquid outlet pipeline 630 is provided with a pump 620. During the detection process, the pump 620 drives the solution in the liquid storage chamber 610 to be output to the liquid outlet pipeline 630, and further input to the first input pipeline 110, thereby achieving the circulation of the solution in the circulation loop.

[0124] Specifically, in the embodiment of the present application, as shown in Figure 1, the liquid outlet pipeline 630 is provided with a heater 640, which is located at the liquid outlet end of the pump 620. The setting of the heater 640 heats the solution in the circulation loop to control the temperature of the solution in the circulation loop; the liquid outlet pipeline 630 is provided with a thermometer 660, which is located between the heater 640 and the liquid outlet end of the liquid outlet pipeline 630. The thermometer 660 cooperates with the heater 640 to effectively control the temperature of the solution in the circulation loop; the liquid outlet pipeline 630 is provided with a filter 650, which is located between the heater 640 and the liquid outlet end of the liquid outlet pipeline 630, for example, between the heater 640 and the thermometer 660. The setting of the filter 650 can achieve the purpose of filtering the solution and prevent impurities from entering the valve 100 to be tested and affecting the accuracy of the test results.

[0125] In the embodiment of the present application, the liquid supply component 600 can choose to use semiconductor cleaning equipment, that is, directly choose to use the corresponding components such as the liquid storage tank (liquid storage chamber 610) and the pump 620 in the semiconductor cleaning equipment. With this arrangement, when inspecting the valve 100 to be tested used in the semiconductor equipment, there is no need to additionally set up components such as the liquid storage tank and the pump 620, which effectively utilizes the existing equipment and reduces costs.

[0126] The valve testing device provided in the embodiment of the present application can be based on semiconductor cleaning equipment. By modifying its pipeline area, a performance testing device for the valve to be tested can be constructed, so that the metal precipitation amount and mechanical performance index evaluation test of the valve to be tested can be quickly and effectively performed through the testing device. Subsequent embodiments will further illustrate this; in addition, the testing device can also be attached to other cleaning machines, relying on semiconductor cleaning equipment to achieve rapid disassembly and assembly, which is convenient for promotion and implementation in practical applications.

[0127] Example 2

[0128] The valve testing device provided in the embodiment of the present application is different from the above-mentioned embodiment 1 in that, as shown in Figure 2, the valve testing device also includes: a second input pipeline 210 and a second output pipeline 220; one end of the comparison valve 200 is connected to the liquid outlet end of the liquid supply component 600 through the second input pipeline 210, and the other end of the comparison valve 200 is connected to the liquid inlet end of the liquid supply component 600 through the second output pipeline 220; the second input pipeline 210 is provided with a second input switch valve 211; the second output pipeline 220 is provided with a second output switch valve 221 and a second sampling part.

[0129] In the valve testing device provided by the embodiment of the present application, the two ends of the valve to be tested 100 are connected to the liquid supply component 600 through the first input pipeline 110 and the first output pipeline 120 respectively, that is, along the direction of fluid flow, the liquid supply component 600, the first input pipeline 110, the valve to be tested 100, and the first output pipeline 120 are connected in sequence to form a first circulation loop; the two ends of the comparison valve 200 are connected to the liquid supply component 600 through the second input pipeline 210 and the second output pipeline 220 respectively, that is, along the direction of fluid flow, the liquid supply component 600, the second input pipeline 210, the valve to be tested 100, and the second output pipeline 220 are connected in sequence to form a second circulation loop, the first circulation loop and the second circulation loop share the liquid supply component 600, and the comparison valve 200 and the valve to be tested 100 are arranged in parallel; when the valve to be tested 100 is connected to the liquid supply component 600, the comparison valve 200 is connected to the liquid supply component 600. During testing, the fluid flowing through the valve under test 100 or the fluid condition in the valve under test 100 is controlled by controlling the operating states of the first input on-off valve 111 on the first input pipeline 110 and the first output on-off valve 121 on the first output pipeline 120. The fluid flowing through the comparison valve 200 or the fluid condition in the comparison valve 200 is controlled by controlling the operating states of the second input on-off valve 211 on the second input pipeline 210 and the second output on-off valve 221 on the second output pipeline 220. When the fluid parameters of the first circulation loop and the second circulation loop are controlled to meet the consistency requirements during the circulation process, and the comparison valve 200 is a valve that meets the quality requirements, the detection result of the valve under test 100 is compared with the detection result of the comparison valve 200, and whether the valve under test 100 meets the quality requirements is determined based on the comparison result. Still taking the detection of the content of the element to be tested (precipitated amount) of the valve to be tested 100 as an example, a preset solution is introduced into the circulation loop, and by extracting a fluid sample from the sampling part, the content of the element to be tested is detected for the fluid after passing through the valve to be tested 100 and the comparison valve 200, respectively. The detection results of the two are compared, and whether the valve to be tested 100 meets the quality requirements is judged based on the comparison result. This not only has the advantages of a simple detection structure and easy implementation, but also, during the detection process, there is no need to know in advance the specific content parameters of the element to be tested of the valve that meets the quality requirements. During the detection process, the baseline content (precipitated amount) of the element to be tested of the comparison valve 200 can be obtained in real time, and real-time detection can be achieved, wherein the comparison valve 200 is a qualified valve that meets the quality requirements, for example, a valve that meets SEMI requirements.

[0130] In addition, in the valve testing device, on the premise that the preset content of the element to be tested of the valve that meets the requirements is known, multiple valves to be tested 100 can be tested at the same time to see whether they meet the quality requirements. The setting of the filter 650 can reduce or even avoid cross-contamination of each circulation loop, thereby reducing or even avoiding interference with the test results; of course, when the preset content of the element to be tested of the valve that meets the requirements is not known, multiple circulation loops can be set in parallel, and one of the circulation loops is used to detect the comparison valve 200 (the valve that meets the quality requirements is used as the reference valve), so as to realize the detection of whether multiple valves to be tested 100 meet the quality requirements in the same detection device, which is not limited here.

[0131] In addition, in the embodiment of the present application, there is no need to perform replacement testing on the reference position in the pipeline, thereby realizing real-time comparative detection data of the valve, improving detection accuracy, ensuring the accuracy of the detection results, and having the advantage of short testing time.

[0132] In the embodiment of the present application, as shown in FIG2 , the second sampling portion is located between the liquid inlet of the second output pipeline 220 and the second output switch valve 221 ; with this arrangement, when sampling is performed, when the second output switch valve 221 is in a closed state, fluid backflow can be avoided, which may affect the sampling accuracy; moreover, with this arrangement, the second sampling portion can be set at a position closer to the comparison valve 200 , so that a fluid sample that is closer to the fluid inside the comparison valve 200 can be obtained, thereby ensuring the accuracy of the test results.

[0133] In the embodiment of the present application, as shown in FIG2 , the second sampling portion is connected to a second sampling pipeline 222 , and the second sampling pipeline 222 is provided with a second sampling switch valve 223 , which can be a needle valve for facilitating sampling.

[0134] In the embodiment of the present application, as shown in Figure 2, it also includes a second side pipeline 213, the first end of the second side pipeline 213 is connected to the second input pipeline 210, and is located between the second input switch valve 211 and the comparison valve 200, and the second end of the second side pipeline 213 is connected to the liquid inlet end of the liquid supply component 600; the second side pipeline 213 is provided with a second side switch valve 214, and the second side switch valve 214 is a needle valve; when sampling in the second sampling part, the second input switch valve 111 and the second output switch valve 121 are both in the closed state. At this time, the second side switch valve 214 is in the open state to connect the second side pipeline 213 with the outside world, which is conducive to smooth sampling in the second sampling part. The second end of the second side line 213 corresponding to its first end can be connected to the liquid inlet end of the liquid supply component 600; or, the second side line 213 and the first side line 113 are connected in parallel to one end of the total side line 500, and the other end of the total side line 500 is connected to the liquid inlet end of the liquid supply component 600.

[0135] In some embodiments, the second input switch valve 211 may be a manual valve or an electric valve.

[0136] In some embodiments, the second output switching valve 221 is a needle valve.

[0137] Due to the provision of the second side pipeline 213 and the second side valve 214, when only the second input on-off valve 211 and the second side on-off valve 214 are opened, a circulation loop is formed along the direction of fluid flow by the liquid supply assembly 600, the second input pipeline 210, and the second side pipeline 213. That is, the fluid does not pass through the comparison valve 200, but instead flows directly back into the liquid storage chamber 610 of the liquid supply assembly 600 through the second side pipeline 213. With this arrangement, during the testing of the comparison valve 200, if the hydraulic pressure at the inlet end of the comparison valve 200 is too high, the pressure at the inlet end can be relieved by controlling the second side on-off valve 214, thereby effectively protecting the entire circulation loop and the comparison valve 200.

[0138] In the embodiment of the present application, as shown in FIG2 , the first input pipeline 110, the valve to be tested 100 and the first output pipeline 120 constitute the pipeline to be tested (the first circulation loop); the second input pipeline 210, the comparison valve 200 and the second output pipeline 220 constitute the comparison pipeline (the second circulation loop); the pipeline to be tested and the comparison pipeline are arranged in parallel; the liquid inlet of the first input pipeline 110 and the liquid inlet of the second input pipeline 210 are connected, and are both connected to the liquid outlet end of the liquid supply component 600 through the main input pipeline 300, that is, the liquid inlet of the first input pipeline 110, the liquid inlet of the second input pipeline 210, and the liquid outlet end of the main input pipeline 300 are connected. The three liquid outlets are connected and communicated, for example, through a three-way valve, the liquid inlet of the main input pipeline 300 is connected and communicated with the liquid outlet end of the liquid supply component 600 (the liquid outlet end of the liquid outlet pipeline 630); the liquid outlet of the first output pipeline 120 and the liquid outlet of the second output pipeline 220 are communicated, and both are connected to the liquid inlet end of the liquid supply component 600 through the main output pipeline 400, that is, the liquid outlet of the first output pipeline 120, the liquid outlet of the second output pipeline 220, and the liquid inlet of the main output pipeline 400 are connected and communicated, for example, through a three-way valve, the liquid outlet of the main output pipeline 400 is connected to the liquid inlet end of the liquid supply component 600. As shown in FIG2 , the flow meter 310 can be set in the main input pipeline 300 and close to the liquid outlet of the main input pipeline 300 . Of course, in addition to this setting method, two flow meters 310 can also be set, respectively in the first input pipeline 110 and the second input pipeline 210 .

[0139] In the embodiment of the present application, as shown in Figure 2, the main input pipeline 300 is provided with a flow meter 310, and the first input pipeline 110 and the second input pipeline 210 are not provided with a flow meter 310; in addition to this setting method, it can also be set that the main input pipeline 300 is not provided with a flow meter 310, and the first input pipeline 110 and the second input pipeline 210 are respectively provided with a flow meter 310; the flow meter 310 is set to detect the fluid flow in the corresponding pipeline, and the flow meter 310 can cooperate with the first input switch valve 111 or the second input switch valve 211 and other switch valves to control the corresponding circulation loop fluid flow.

[0140] In the embodiment of the present application, as shown in Figure 2 , a second pressure gauge 212 is provided in the second input pipeline 210; the second pressure gauge 212 is located near the liquid outlet of the second input pipeline 210. The second pressure gauge 212 enables real-time monitoring of the fluid pressure within the second circulation loop. In conjunction with the corresponding on / off valve, the second pressure gauge 212 effectively controls the fluid pressure within the circulation loop or the comparison valve 200. The second pressure gauge 212, along with the first pressure gauge 112, enables real-time monitoring of the consistency of the fluid pressure within the valve under test 100 and the comparison valve 200.

[0141] In addition, the second embodiment of the present application has the same technical effects as the above-mentioned first embodiment, which will not be repeated here.

[0142] Example 3

[0143] The present embodiment provides a valve testing method, which uses the valve testing device of the first embodiment to detect whether the content of the element to be tested in the valve 100 to be tested meets the quality requirements. Referring to FIG. 3 , the method includes the following steps:

[0144] S310, after the valve 100 to be tested is installed in place, the liquid supply assembly 600 is controlled to provide circulating ultrapure water (UPW) and clean the valve 100 to be tested;

[0145] In this step, an appropriate amount of ultrapure water is added to the liquid storage chamber 610 in the liquid supply component 600 (for example, filled up), the first input switch valve 111 and the first output switch valve 121 are opened, and the pump 620 in the liquid supply component 600 circulates for a preset time, for example, after 5 minutes, the valve to be tested 100 is flushed for a preset time, and the ultrapure water in the liquid storage chamber 610 is discharged. Then, ultrapure water is added to the liquid storage chamber 610 again to flush the valve to be tested 100, and the flushing cycle is repeated for multiple cycles, for example, 10 times; during the flushing process, the heater 640 may not work.

[0146] S320, controlling the liquid supply assembly 600 to provide a circulating acidic solution to flow through and soak the valve 100 to be tested according to a first preset period and a first preset flow rate; sampling and detecting the acidic solution in the first output pipeline 120 to obtain an actual content of the element to be tested in the acidic environment, and comparing the actual content of the element to be tested in the acidic environment with a preset content of the element to be tested in the acidic environment;

[0147] In this step, taking the element to be measured as a metal ion or particle as an example, the metal ion may be an iron ion or the like; and the acidic solution may be a sulfuric acid solution (H2SO4) as an example; the specific operation may be as follows:

[0148] Add sulfuric acid solution to the liquid storage chamber 610 of the liquid supply assembly 600, open the first input switch valve 111 and the first output switch valve 121, start the pump 620, and the sulfuric acid solution will circulate in the circulation loop. During this process, the solution temperature in the circulation loop can be controlled by the heater 640 and the thermometer 660 to maintain a preset temperature range. The solution flow in the circulation loop is controlled by adjusting the first output switch valve 121 (for example, a needle valve). In each cycle of this step, the solution circulates for a preset time (for example, 30 minutes) and is stopped for a preset soaking time (for example, 30 minutes). This cycle is repeated several times (for example, 10 times).

[0149] Close the first input on-off valve 111 and the first output on-off valve 121, open the first sampling on-off valve 123 and the first side on-off valve 114, and sample the acidic solution in the first sampling portion. During the sampling process, opening the first side on-off valve 114 allows air to enter the first side pipe 113, thereby facilitating the smooth outflow of the sampled liquid.

[0150] The content of the sulfuric acid solution sample liquid is detected to obtain the content of iron ions and particles in the sulfuric acid solution;

[0151] The content test result is compared with a baseline content under the same test conditions. Based on the comparison results, a conclusion is drawn as to whether the iron ion and particle content of the valve under test 100 meets quality requirements. The same test conditions mean that the sulfuric acid concentration, temperature, flow rate, and other parameters used during the test of the valve under test 100 are substantially consistent with the corresponding parameters required for the comparison / reference valve that meets the requirements.

[0152] S330: Control the liquid supply assembly 600 to provide a circulating alkaline solution to flow through and soak the valve 100 to be tested according to a second preset period and a second preset flow rate; sample and detect the alkaline solution in the first output pipeline 120 to obtain the actual content of the element to be tested in the alkaline environment, and compare the actual content of the element to be tested in the alkaline environment with the preset content of the element to be tested in the alkaline environment;

[0153] In this step, the element to be measured is still taken as a metal ion or particle. The metal ion can be an iron ion or the like. The alkaline solution is taken as ammonia monohydrate (NH3H2O) as an example. Specifically, the following operations can be performed:

[0154] Add ammonia monohydrate solution into the liquid storage chamber 610 of the liquid supply assembly 600, open the first input switch valve 111 and the first output switch valve 121, start the pump 620, and the ammonia monohydrate solution will circulate in the circulation loop. During this process, the temperature of the solution in the circulation loop can be controlled by the heater 640 and the thermometer 660 to maintain it within a preset temperature range. The flow rate of the solution in the circulation loop is controlled by adjusting the first output switch valve 121 (for example, a needle valve). In each cycle of this step, the solution circulates for a preset time (for example, 30 minutes) and then stops to soak for a preset time (for example, 30 minutes). This cycle is repeated several times (for example, 10 times).

[0155] Close the first input on-off valve 111 and the first output on-off valve 121, open the first sampling on-off valve 123 and the first side on-off valve 114, and sample the alkaline solution in the first sampling portion. During the sampling process, opening the first side on-off valve 114 allows air to enter the first side pipe 113, thereby facilitating the smooth outflow of the sampled liquid.

[0156] Detecting the content of the ammonia monohydrate solution in the sampled liquid to obtain the content of iron ions and particles in the ammonia monohydrate solution;

[0157] The content test result is compared with a baseline content under the same test conditions. Based on the comparison result, it is determined whether the iron ion and particle content of the valve under test 100 meets the quality requirements. The same test conditions mean that the parameters such as ammonia monohydrate concentration, temperature, and flow rate used during the test of the valve under test 100 are substantially consistent with the corresponding parameters required for the baseline valve that meets the requirements.

[0158] It should be noted that, before step S330 , a flushing step as in step 310 above needs to be performed, which will not be described in detail here.

[0159] S340 , judging whether the valve to be tested 100 meets the quality requirements based on the comparison result obtained from the acidic environment detection and the comparison result obtained from the alkaline environment detection.

[0160] The quality requirements here may be, for example, SEMI requirements.

[0161] In addition, the third embodiment of the present application is applied to the valve testing device in the above-mentioned first embodiment, and has the same technical effects as the above-mentioned first embodiment, which will not be repeated here.

[0162] Example 4

[0163] This embodiment of the present application provides another valve testing method, which uses the valve testing device of the second embodiment to detect whether the content of the element to be tested in the valve 100 to be tested meets the quality requirements. Referring to FIG. 4 , the method includes the following steps:

[0164] S410, after the valve to be tested 100 and the comparison valve 200 are installed in place, the liquid supply assembly 600 is controlled to provide circulating ultrapure water to clean the valve to be tested 100 and the comparison valve 200;

[0165] Among them, in this step, when the valve to be tested 100 is cleaned before testing, an appropriate amount of ultrapure water is added to the liquid storage chamber 610 in the liquid supply component 600 (for example, filled up), the first input switch valve 111 and the first output switch valve 121 are opened, and the pump 620 in the liquid supply component 600 circulates for a preset time, for example, after 5 minutes, the valve to be tested 100 is flushed for a preset time, and the ultrapure water in the liquid storage chamber 610 is discharged. Then, ultrapure water is added to the liquid storage chamber 610 again to flush the valve to be tested 100, and the flushing cycle is repeated multiple times, for example, 10 times; during the flushing process, the heater 640 may not work.

[0166] Similarly, in this step, when the comparison valve 200 is cleaned before testing, an appropriate amount of ultrapure water is added to the liquid storage chamber 610 in the liquid supply component 600 (for example, filled up), the second input switch valve 211 and the second output switch valve 221 are opened, and the pump 620 in the liquid supply component 600 circulates for a preset time, for example, after 5 minutes, the comparison valve 200 is flushed for a preset time, and the ultrapure water in the liquid storage chamber 610 is discharged. Then, ultrapure water is added to the liquid storage chamber 610 again to flush the comparison valve 200, and the flushing cycle is repeated for multiple cycles, for example, 10 times; during the flushing process, the heater 640 may not work.

[0167] It should be noted that when the valve to be tested 100 and the comparison valve 200 are cleaned before testing, they can be cleaned in the order of front and back, that is, the first circulation loop and the second circulation loop are controlled to work respectively. At this time, the cleaning solution conditions are kept consistent as much as possible, such as the flow rate, pressure, flushing cycle, etc. of ultrapure water; the valve to be tested 100 and the comparison valve 200 can also be cleaned at the same time, that is, the first circulation loop and the second circulation loop are controlled to work at the same time. At this time, the cleaning solution conditions are also kept consistent as much as possible, such as the flow rate, pressure, flushing cycle, etc. of ultrapure water.

[0168] S420: Control the liquid supply assembly 600 to provide a circulating acidic solution to flow through and soak the valve 100 to be tested according to a first preset period and a first preset flow rate, and sample and detect the acidic solution in the first output pipeline 120 to obtain the detection content of the element to be tested in the first acidic environment;

[0169] In this step, taking the element to be measured as a metal ion or particle as an example, the metal ion may be an iron ion or the like; and the acidic solution may be a sulfuric acid solution (H2SO4) as an example; the specific operation may be as follows:

[0170] Add sulfuric acid solution to the liquid storage chamber 610 of the liquid supply assembly 600, open only the first input switch valve 111 and the first output switch valve 121, start the pump 620, and the sulfuric acid solution will circulate in the circulation loop. During this process, the temperature of the solution in the circulation loop can be controlled by the heater 640 and the thermometer 660 to maintain it within a preset temperature range. The flow rate of the solution in the circulation loop is controlled by adjusting the first output switch valve 121 (e.g., a needle valve). In each cycle of this step, the solution circulates for a preset time (e.g., 30 minutes) and then stops and soaks for a preset time (e.g., 30 minutes). This cycle is repeated several times (e.g., 10 times).

[0171] Close the first input on-off valve 111 and the first output on-off valve 121, and only open the first sampling on-off valve 123 and the first side on-off valve 114 to sample the acidic solution in the first sampling portion. During the sampling process, opening the first side on-off valve 114 allows air to enter the first side pipe 113, thereby facilitating the smooth outflow of the sampled liquid.

[0172] The content of the sulfuric acid solution in the sampled liquid is detected to obtain the content of iron ions and particles in the sulfuric acid solution.

[0173] S430: Control the liquid supply assembly 600 to provide a circulating acidic solution to flow through and soak the comparison valve 200 according to a first preset period and a first preset flow rate, and sample and detect the acidic solution in the second output pipeline 220 to obtain the detection content of the element to be tested in the second acidic environment;

[0174] In this step, the element to be detected is still taken as metal ions or particles. The metal ions can be iron ions, etc., and the detection purpose is the same as that in step 420. The acidic solution is taken as sulfuric acid solution (H2SO4) as an example. Specifically, the following operations can be performed:

[0175] Sulfuric acid solution is added to the liquid storage chamber 610 of the liquid supply assembly 600. Only the second input switch valve 211 and the second output switch valve 221 are opened, and the pump 620 is started. The sulfuric acid solution circulates in the circulation loop. During this process, the temperature of the solution in the circulation loop can be controlled by the heater 640 and the thermometer 660 to maintain it within a preset temperature range. The flow rate of the solution in the circulation loop is controlled by adjusting the second output switch valve 221 (e.g., a needle valve). In each cycle of this step, the solution circulates for a preset time (e.g., 30 minutes) and then stops and soaks for a preset time (e.g., 30 minutes). This cycle is repeated for several times (e.g., 10 times).

[0176] The second input on-off valve 211 and the second output on-off valve 221 are closed, and only the second sampling on-off valve 223 and the second side on-off valve 214 are opened to sample the acidic solution in the second sampling portion. During the sampling process, the second side on-off valve 214 is opened to allow air to enter the second side pipe 213, so that the sampled liquid can flow out smoothly.

[0177] The content of the sulfuric acid solution in the sampled liquid is detected to obtain the content of iron ions and particles in the sulfuric acid solution.

[0178] It should be noted that before step S430, the comparison valve 200 can be flushed in the above-mentioned step 410 to further ensure the accuracy of the measurement results. If this flushing step is not performed, since the filter 650 is provided in the liquid outlet pipe 630 in the liquid supply component 600, the necessary filtering can be performed on the solution, thereby ignoring the impurities generated in the same acidic solution in the previous step.

[0179] S440, comparing the detected content of the element to be measured in the first acidic environment with the detected content of the element to be measured in the second acidic environment;

[0180] In this step, the content test results of the valve under test 100 are compared with the content test results of the comparison valve 200 under the same test conditions. Based on the comparison results, it is determined whether the iron ion and particle content of the valve under test 100 meets the quality requirements (SEMI requirements). The same test conditions mean that the sulfuric acid concentration, temperature, flow rate, and other parameters used during the testing of the valve under test 100 are substantially consistent with the corresponding parameters required by the comparison valve 200 that meets the conditions. In this case, the comparison valve 200 is a reference valve that meets the requirements (SEMI requirements). The content test results of the comparison valve 200 are used as a reference to compare the content test results of the valve under test 100 with those of the comparison valve 200 to determine the quality of the valve under test 100.

[0181] S450: Control the liquid supply assembly 600 to provide a circulating alkaline solution to flow through and soak the valve 100 to be tested according to a second preset period and a second preset flow rate, and sample and detect the alkaline solution in the first output pipeline 120 to obtain the detection content of the element to be tested in the first alkaline environment;

[0182] In this step, the element to be measured is still taken as a metal ion or particle. The metal ion can be an iron ion or the like. The alkaline solution is taken as ammonia monohydrate (NH3H2O) as an example. Specifically, the following operations can be performed:

[0183] Add ammonia monohydrate solution into the liquid storage chamber 610 of the liquid supply assembly 600, open only the first input switch valve 111 and the first output switch valve 121, start the pump 620, and the ammonia monohydrate solution will circulate in the circulation loop. During this process, the temperature of the solution in the circulation loop can be controlled by the heater 640 and the thermometer 660 to maintain it within a preset temperature range. The flow rate of the solution in the circulation loop is controlled by adjusting the first output switch valve 121 (e.g., a needle valve). In each cycle of this step, the solution circulates for a preset time (e.g., 30 minutes) and then stops to soak for a preset time (e.g., 30 minutes). This cycle is repeated several times (e.g., 10 times).

[0184] Close the first input on-off valve 111 and the first output on-off valve 121, and only open the first sampling on-off valve 123 and the first side on-off valve 114 to sample the alkaline solution in the first sampling portion. During the sampling process, opening the first side on-off valve 114 allows air to enter the first side pipe 113, thereby facilitating the smooth outflow of the sampled liquid.

[0185] The content of the monohydrate ammonia solution in the sampled liquid is detected to obtain the content of iron ions and particles in the monohydrate ammonia solution.

[0186] S460: Control the liquid supply assembly 600 to provide a circulating alkaline solution to flow through and soak the comparison valve 200 according to a second preset period and a second preset flow rate, sample and detect the alkaline solution in the second output pipeline 220 to obtain the detection content of the element to be tested in the second alkaline environment;

[0187] In this step, the element to be detected is still taken as a metal ion or particle. The metal ion can be an iron ion, etc., and the detection purpose is the same as that in step 420. The alkaline solution is taken as ammonia monohydrate (NH3H2O) as an example. Specifically, the following operations can be performed:

[0188] Add ammonia monohydrate solution into the liquid storage chamber 610 of the liquid supply assembly 600, open only the second input switch valve 211 and the second output switch valve 221, start the pump 620, and the ammonia monohydrate solution will circulate in the circulation loop. During this process, the temperature of the solution in the circulation loop can be controlled by the heater 640 and the thermometer 660 to maintain it within a preset temperature range. The flow rate of the solution in the circulation loop is controlled by adjusting the second output switch valve 221 (e.g., a needle valve). In each cycle of this step, the solution circulates for a preset time (e.g., 30 minutes) and then stops to soak for a preset time (e.g., 30 minutes). This cycle is repeated several times (e.g., 10 times).

[0189] The second input on-off valve 211 and the second output on-off valve 221 are closed, and only the second sampling on-off valve 223 and the second side on-off valve 214 are opened to sample the alkaline solution in the second sampling portion. During the sampling process, the second side on-off valve 214 is opened to allow air to enter the second side pipe 213, thereby facilitating the smooth outflow of the sampled liquid.

[0190] The content of the monohydrate ammonia solution in the sampled liquid is detected to obtain the content of iron ions and particles in the monohydrate ammonia solution.

[0191] It should be noted that before step S460, the comparison valve 200 can be flushed in the above-mentioned step 410 to further ensure the accuracy of the measurement results. If this flushing step is not performed, since the filter 650 is provided in the liquid outlet pipe 630 in the liquid supply component 600, the necessary filtering can be performed on the solution, thereby ignoring the impurities generated in the same alkaline solution in the previous step.

[0192] S470, comparing the detected content of the element to be measured in the first alkaline environment with the detected content of the element to be measured in the second alkaline environment;

[0193] In this step, the content test results of the valve under test 100 are compared with the content test results of the comparison valve 200 under the same test conditions. Based on the comparison results, it is determined whether the iron ion and particle content of the valve under test 100 meets the quality requirements (SEMI requirements). The same test conditions mean that the concentration, temperature, flow rate, and other parameters of the monohydrate ammonia solution used in the testing process of the valve under test 100 are substantially consistent with the corresponding parameters required by the comparison valve 200 that meets the conditions. In this case, the comparison valve 200 is a reference valve that meets the requirements (SEMI requirements). The content test results of the comparison valve 200 are used as a reference, and the content test results of the valve under test 100 are compared with the content test results of the comparison valve 200 to determine the quality of the valve under test 100.

[0194] S480, judging whether the valve 100 to be tested meets the quality requirements based on the comparison result of the detected content of the element to be tested in the first acidic environment and the detected content of the element to be tested in the second acidic environment, and the comparison result of the detected content of the element to be tested in the first alkaline environment and the detected content of the element to be tested in the second alkaline environment;

[0195] The detected content of the element to be detected in the second acidic environment is the reference content of the element to be detected in the acidic environment, and the detected content of the element to be detected in the second alkaline environment is the reference content of the element to be detected in the alkaline environment.

[0196] In addition, the fourth embodiment of the present application is applied to the valve testing device in the above embodiment, and has the same technical effects as the above embodiment two, which will not be repeated here.

[0197] Example 5

[0198] The present embodiment provides a valve testing method, which is applied to the valve testing device of the above embodiment to detect the pressure resistance of the valve 100 to be tested. Referring to FIG. 5 , the method includes the following steps:

[0199] S510, pressurizing the liquid in the valve to be tested 100 to the allowable boundary pressure;

[0200] In this step, only the first input switch valve 111 is opened, and the pump 620 in the liquid supply assembly 600 is started. When the pressure reaches the allowable boundary pressure, the pump 620 is stopped.

[0201] S520, wrapping the test paper or test cloth on the outer surface of the valve to be tested 100 for a preset time, and obtaining the initial parameters of the test paper or test cloth before wrapping and the actual parameters after wrapping for the preset time;

[0202] The parameter in this step can be whether the color of the test paper or test package changes, or the specific color change situation. If there is a color change, it means there is leakage (for example, the valve 100 to be tested leaks outward due to pressure). The degree of leakage can be roughly judged based on the specific color change situation. For example, the degree of leakage can be judged based on the depth of the color change. The parameter can also be the weight change of the test paper or test cloth. If there is a weight change, it means there is leakage, and the size of the weight change can directly reflect the amount of leakage.

[0203] S530, comparing the initial parameters and the actual parameters to determine whether the valve 100 to be tested is leaking or the extent of the leakage;

[0204] The initial parameters refer to the parameters of the test paper or test cloth immediately after wrapping, and the actual parameters refer to the parameters of the test paper or test cloth after wrapping for a preset time.

[0205] By determining whether the valve 100 under test leaks and the extent of the leakage, it is possible to determine whether the pressure resistance of the valve 100 meets the requirements. Specifically, during the determination process, the leakage of the valve 100 under test is compared with a reference leakage condition, which is known.

[0206] In addition, the fifth embodiment of the present application is applied to the valve testing device in the above-mentioned first embodiment, and has the same technical effects as the above-mentioned first embodiment, which will not be repeated here.

[0207] Example 6

[0208] The present embodiment provides another valve testing method, which is applied to the valve testing device in the second embodiment to detect the pressure resistance of the valve 100 to be tested. Referring to FIG. 6 , the method includes the following steps:

[0209] S610, pressurizing the liquids in the valve to be tested 100 and the comparison valve 200 to the allowable boundary pressure;

[0210] In this step, only the first input switch valve 111 and the second input switch valve 211 are opened, and the pump 620 in the liquid supply component 600 is started. When the pressure is detected to reach the allowable boundary pressure, the pump 620 is shut down. During this process, the pressure in the pipeline where the valve to be tested 100 is located is kept consistent with the pressure in the pipeline where the comparison valve 200 is located as much as possible.

[0211] S620, wrapping the test paper or test cloth around the outer surfaces of the valve to be tested 100 and the comparison valve 200 for a preset time, and obtaining initial parameters of the test paper or test cloth before wrapping and actual parameters after wrapping for the preset time;

[0212] The parameter in this step can be whether the color of the test paper or test package changes, or the specific color change situation. If there is a color change, it means there is leakage (for example, the valve 100 to be tested leaks outward due to pressure). The degree of leakage can be roughly judged based on the specific color change situation. For example, the degree of leakage can be judged based on the depth of the color change. The parameter can also be the weight change of the test paper or test cloth. If there is a weight change, it means there is leakage, and the size of the weight change can directly reflect the amount of leakage.

[0213] S630, comparing the initial parameters and actual parameters corresponding to the valve to be tested 100, and comparing the initial parameters and actual parameters corresponding to the comparison valve 200;

[0214] The initial parameters refer to the parameters of the test paper or test cloth immediately after wrapping, and the actual parameters refer to the parameters of the test paper or test cloth after wrapping for a preset time.

[0215] S640, using the comparison result corresponding to the comparison valve 200 as a reference, determining whether the valve to be tested 100 is leaking or the extent of the leakage;

[0216] Comparison valve 200 is a valve that meets requirements (e.g., SEMI requirements) and serves as a reference valve. By comparing the comparison results corresponding to valve 100 under test with those corresponding to comparison valve 200, it is further determined whether the leakage of valve 100 under test meets the requirements. Whether valve 100 under test leaks under pressure and the extent of the leakage are further determined to determine whether the pressure resistance of valve 100 under test meets the requirements.

[0217] In addition, the sixth embodiment of the present application is applied to the valve testing device in the above-mentioned second embodiment, and has the same technical effects as the above-mentioned second embodiment, which will not be repeated here.

[0218] Example 7

[0219] The present embodiment provides a valve testing method, which is applied to the valve testing device in the first embodiment to detect the durability of the valve 100 to be tested. Referring to FIG. 7 , the method includes the following steps:

[0220] S710, controlling the first input switch valve 111 and the first output switch valve 121 to be in an open state, and controlling the operating parameters of the fluid in the first input pipeline 110 to be preset operating parameters;

[0221] The operating parameters include: at least one of temperature, flow, and pressure; specifically, the first input switch valve 111 is opened and the first output switch valve 121 is adjusted to simulate the actual operating flow and pressure conditions, the pump 620 in the liquid supply component 600 is started, and the fluid in the pipeline where the valve 100 to be tested is located begins to circulate. During this process, the liquid temperature in the liquid outlet pipeline 630 (or the first input pipeline 110, or the main input pipeline 300) in the liquid supply component 600 is controlled by the heater 640 and the thermometer 660.

[0222] S720, triggering the valve 100 to be tested at a preset frequency, and after a preset time, observing whether the valve 100 to be tested can be triggered normally, whether there is any debris around the valve body of the valve 100 to be tested, and whether there is any debris in the first output pipeline 120;

[0223] Specifically, in this step, the valve 100 to be tested is triggered once every approximately 0.5 seconds. The valve 100 to be tested is triggered at this frequency. After one week, it is observed whether the valve 100 to be tested can be triggered normally, whether there are abnormal debris such as debris falling around the valve body, and whether there are abnormal debris such as debris in the circulation loop.

[0224] S730: Based on the observation result, determine whether the working durability of the valve 100 to be tested meets the requirements.

[0225] In this step, the above observation results are compared with known valve conditions that meet the requirements, and whether the working durability of the valve to be tested 100 meets the requirements is determined based on the comparison results.

[0226] Among them, in the above steps, the valve 100 to be tested is mainly a pneumatic control valve; when the valve 100 to be tested is a pressure-stabilizing valve, it is necessary to observe the pressure fluctuation of the rear-end pipeline for a long time; when the valve 100 to be tested is a needle valve, it is necessary to observe the flow fluctuation of the rear-end pipeline for a long time.

[0227] In addition, the seventh embodiment of the present application is applied to the valve testing device in the above-mentioned first embodiment, and has the same technical effects as the above-mentioned first embodiment, which will not be repeated here.

[0228] Example 8

[0229] The present embodiment provides another valve testing method, which is applied to the valve testing device in the second embodiment to detect the durability of the valve 100 to be tested. Referring to FIG. 8 , the method includes the following steps:

[0230] S810, controlling the first input switch valve 111 and the first output switch valve 121 to be in an open state, and controlling the operating parameters of the fluid in the first input pipeline 110 to be preset operating parameters;

[0231] The operating parameters include: at least one of temperature, flow, and pressure; specifically, the first input switch valve 111 is opened and the first output switch valve 121 is adjusted to simulate the actual operating flow and pressure conditions, the pump 620 in the liquid supply component 600 is started, and the fluid in the pipeline where the valve 100 to be tested is located begins to circulate. During this process, the liquid temperature in the liquid outlet pipeline 630 (or the first input pipeline 110, or the main input pipeline 300) in the liquid supply component 600 is controlled by the heater 640 and the thermometer 660.

[0232] S820, triggering the valve 100 to be tested at a preset frequency, and after a preset time, observing whether the valve 100 to be tested can be triggered normally, whether there is any debris around the valve body of the valve 100 to be tested, and whether there is any debris in the first output pipeline 120;

[0233] In this step, the valve 100 to be tested is triggered once every 0.5 seconds. The valve 100 to be tested is triggered at this frequency. After one week, it is observed whether the valve 100 to be tested can be triggered normally, whether there are abnormal debris such as debris falling around the valve body, and whether there are abnormal debris such as debris in the circulation loop.

[0234] S830, controlling the second input switch valve 211 and the second output switch valve 221 to be in an open state, and controlling the operating parameters of the fluid in the second input pipeline 210 to be preset operating parameters;

[0235] The operating parameters include: at least one of temperature, flow, and pressure; specifically, the second input switch valve 211 is opened and the second output switch valve 221 is adjusted to simulate actual operating flow and pressure conditions, the pump 620 in the liquid supply component 600 is started, and the fluid in the pipeline where the valve 100 to be tested is located begins to circulate. During this process, the temperature of the liquid in the liquid outlet pipeline 630 (or the second input pipeline 210, or the main input pipeline 300) in the liquid supply component 600 is controlled by the heater 640 and the thermometer 660; the operating parameters in the first input pipeline 110 and the second input pipeline 210 are kept basically consistent.

[0236] S840, triggering the comparison valve 200 at a preset frequency, and after a preset time, observing whether the comparison valve 200 can be triggered normally, whether there is any debris around the valve body of the comparison valve 200, and whether there is any debris in the second output pipeline 220;

[0237] In this step, the comparison valve 200 is triggered once every 0.5 seconds. The comparison valve 200 is triggered at this frequency for one week to observe whether the comparison valve 200 can be triggered normally, whether there are abnormal debris such as debris falling around the valve body, and whether there are abnormal debris such as debris in the circulation loop.

[0238] S850 , using the observation result corresponding to the comparison pipeline as a reference, the observation result corresponding to the valve under test 100 is compared with the observation result corresponding to the comparison valve 200 to determine whether the working durability of the valve under test 100 meets the requirements.

[0239] In addition, the eighth embodiment of the present application is applied to the valve testing device in the above-mentioned second embodiment, and has the same technical effects as the above-mentioned second embodiment, which will not be repeated here.

[0240] Those skilled in the art can clearly understand that, for the convenience and brevity of description, the specific working process of the method described above can refer to the corresponding process in the aforementioned device embodiment, and will not be repeated here.

[0241] In addition, in the description of the embodiments of this application, unless otherwise specified or limited, the terms "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to internal connections between two components. Those skilled in the art will understand the specific meanings of the above terms in this application based on the specific circumstances.

[0242] If the functions are implemented in the form of software functional units and sold or used as independent products, they can be stored in a non-volatile computer-readable storage medium that is executable by a processor. Based on this understanding, the technical solution of the present application, or the part that contributes to the prior art, or the part of the technical solution, can be embodied in the form of a software product. The computer software product is stored in a storage medium and includes several instructions for enabling a computer device (which can be a personal computer, a server, or a network device, etc.) to execute all or part of the steps of the method described in each embodiment of the present application. The aforementioned storage medium includes various media that can store program codes, such as a USB flash drive, a mobile hard disk, a read-only memory (ROM), a random access memory (RAM), a magnetic disk, or an optical disk.

[0243] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely to facilitate the description of this application and simplify the description. They do not indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0244] Finally, it should be noted that the above-described embodiments are only specific implementation methods of the present application, which are used to illustrate the technical solutions of the present application, rather than to limit them. The scope of protection of the present application is not limited thereto. Although the present application has been described in detail with reference to the above-described embodiments, those skilled in the art should understand that any person skilled in the art can modify or easily conceive of changes to the technical solutions described in the above-described embodiments within the technical scope disclosed in the present application, or perform equivalent replacements for some of the technical features thereof. These modifications, changes, or replacements do not deviate from the spirit and scope of the technical solutions of the embodiments of the present application, and should be included in the scope of protection of the present application. Therefore, the scope of protection of the present application shall be subject to the scope of protection of the claims.

Claims

1. A valve testing device, characterized in that: include: A first input pipeline (110) and a first output pipeline (120); One end of the valve to be tested (100) is connected to the liquid outlet of the liquid supply component (600) through the first input pipeline (110), and the other end is connected to the liquid inlet of the liquid supply component (600) through the first output pipeline (120); The first input pipeline (110) is provided with a first input switch valve (111); The first output pipeline (120) is provided with a first output switch valve (121) and a first sampling portion.

2. The valve testing device according to claim 1, characterized in that: The first sampling portion is located between the liquid inlet of the first output pipeline (120) and the first output switch valve (121); And / or, the first sampling portion is connected to a first sampling pipeline (122), and the first sampling pipeline (122) is provided with a first sampling switch valve (123).

3. The valve testing device according to claim 2, characterized in that: The device further comprises a first side pipeline (113), wherein a first end of the first side pipeline (113) is connected to the first input pipeline (110) and is located between the first input switch valve (111) and the valve to be tested (100), and a second end of the first side pipeline (113) is connected to a liquid inlet end of the liquid supply component (600); and the first side pipeline (113) is provided with a first side switch valve (114).

4. The valve testing device according to claim 3, characterized in that: The first side switch valve (114) is a needle valve; And / or, the first input switch valve (111) is a manual valve or an electric valve; And / or, the first output switch valve (121) is a needle valve; And / or, the first sampling switch valve (123) is a needle valve; And / or, the liquid supply component (600) is a semiconductor cleaning device.

5. The valve testing device according to claim 1, characterized in that: The first input pipeline (110) is provided with a first pressure gauge (112); The first pressure gauge (112) is close to the liquid outlet of the first input pipeline (110).

6. The valve testing device according to any one of claims 1 to 5, characterized in that: Also includes: A second input pipeline (210) and a second output pipeline (220); One end of the comparison valve (200) is connected to the liquid outlet of the liquid supply component (600) through the second input pipeline (210), and the other end of the comparison valve (200) is connected to the liquid inlet of the liquid supply component (600) through the second output pipeline (220); The second input pipeline (210) is provided with a second input switch valve (211); The second output pipeline (220) is provided with a second output switch valve (221) and a second sampling portion.

7. The valve testing device according to claim 6, characterized in that: The second sampling portion is located between the liquid inlet of the second output pipeline (220) and the second output switch valve (221); And / or, the second sampling position is connected to a second sampling pipeline (222), and the second sampling pipeline (222) is provided with a second sampling switch valve (223).

8. The valve testing device according to claim 6, characterized in that: The invention also comprises a second side pipeline (213), wherein a first end of the second side pipeline (213) is connected to the second input pipeline (210) and is located between the second input switch valve (211) and the comparison valve (200), and a second end of the second side pipeline (213) is connected to the liquid inlet end of the liquid supply component (600); and the second side pipeline (213) is provided with a second side switch valve (214).

9. The valve testing device according to claim 8, characterized in that: The second side switch valve (214) is a needle valve; And / or, the second input switch valve (211) is a manual valve or an electric valve; And / or, the second output switch valve (221) is a needle valve; And / or, the second sampling switch valve (223) is a needle valve.

10. The valve testing device according to claim 6, characterized in that: The second input pipeline (210) is provided with a second pressure gauge (212); The second pressure gauge (212) is close to the liquid outlet of the second input pipeline (210).

11. The valve testing device according to claim 6, characterized in that: The first input pipeline (110), the valve to be tested (100) and the first output pipeline (120) constitute a pipeline to be tested; The second input pipeline (210), the comparison valve (200) and the second output pipeline (220) constitute a comparison pipeline; The pipeline to be tested and the comparison pipeline are arranged in parallel; The liquid inlet of the first input pipeline (110) and the liquid inlet of the second input pipeline (210) are in communication, and are both connected to the liquid outlet of the liquid supply component (600) through the main input pipeline (300); The liquid outlet of the first output pipeline (120) and the liquid outlet of the second output pipeline (220) are in communication, and are both connected to the liquid inlet end of the liquid supply component (600) through the main output pipeline (400).

12. The valve testing device according to claim 1, characterized in that: The liquid supply assembly (600) comprises a liquid storage chamber (610) and a liquid outlet pipeline (630) connected to the liquid storage chamber (610); the liquid outlet end of the liquid outlet pipeline (630) is connected to the first input pipeline (110); and the liquid outlet pipeline (630) is provided with a pump (640).

13. A valve testing method, characterized in that: Applied to the valve testing device according to any one of claims 1 to 5, the method comprises the following steps: After the valve to be tested (100) is installed in place, the liquid supply assembly (600) is controlled to provide circulating ultrapure water and clean the valve to be tested (100); Controlling the liquid supply component (600) to provide a circulating acidic solution to flow through and soak the valve to be tested (100) according to a first preset period and a first preset flow rate; sampling and detecting the acidic solution in the first output pipeline (120) to obtain the actual content of the element to be tested in the acidic environment, and comparing the actual content of the element to be tested in the acidic environment with the preset content of the element to be tested in the acidic environment; Controlling the liquid supply component (600) to provide a circulating alkaline solution to flow through and soak the valve to be tested (100) according to a second preset period and a second preset flow rate; sampling and detecting the alkaline solution in the first output pipeline (120) to obtain the actual content of the element to be tested in the alkaline environment, and comparing the actual content of the element to be tested in the alkaline environment with the preset content of the element to be tested in the alkaline environment; According to the comparison result obtained from the acidic environment detection and the comparison result obtained from the alkaline environment detection, it is judged whether the valve (100) to be tested meets the quality requirements.

14. A valve testing method, characterized in that: Applied to the valve testing device according to any one of claims 6 to 12, the method comprises the following steps: After the valve to be tested (100) and the comparison valve (200) are installed in place, the liquid supply assembly (600) is controlled to provide circulating ultrapure water and clean the valve to be tested (100) and the comparison valve (200); Controlling the liquid supply component (600) to provide a circulating acidic solution to flow through and soak the valve to be tested (100) according to a first preset period and a first preset flow rate, sampling and detecting the acidic solution in the first output pipeline (120) to obtain the detection content of the element to be tested in the first acidic environment; Controlling the liquid supply component (600) to provide a circulating acidic solution to flow through and soak the comparison valve (200) according to a first preset period and a first preset flow rate, sampling and detecting the acidic solution in the second output pipeline (220) to obtain the detection content of the element to be detected in the second acidic environment; Comparing the detected content of the element to be detected in the first acidic environment with the detected content of the element to be detected in the second acidic environment; Controlling the liquid supply component (600) to provide a circulating alkaline solution to flow through and soak the valve to be tested (100) according to a second preset period and a second preset flow rate, sampling and detecting the alkaline solution in the first output pipeline (120) to obtain the detection content of the element to be tested in the first alkaline environment; Controlling the liquid supply component (600) to provide a circulating alkaline solution to flow through and soak the comparison valve (200) according to a second preset period and a second preset flow rate, sampling and detecting the alkaline solution in the second output pipeline (220) to obtain a detection content of the element to be detected in the second alkaline environment; Comparing the detected content of the element to be detected in the first alkaline environment with the detected content of the element to be detected in the second alkaline environment; According to the comparison result of the detected content of the element to be detected in the first acidic environment and the detected content of the element to be detected in the second acidic environment, and the comparison result of the detected content of the element to be detected in the first alkaline environment and the detected content of the element to be detected in the second alkaline environment, judging whether the valve to be tested (100) meets the quality requirements; The second detected content of the element to be detected in the acidic environment is the reference content of the element to be detected in the acidic environment, and the second detected content of the element to be detected in the alkaline environment is the reference content of the element to be detected in the alkaline environment.

15. A valve testing method, characterized in that: Applied to the valve testing device according to any one of claims 1 to 5, the method comprises the following steps: Pressurizing the liquid in the valve to be tested (100) to an allowable boundary pressure; Wrapping the test paper or test cloth on the outer surface of the valve (100) to be tested for a preset time, and obtaining the initial parameters of the test paper or test cloth before wrapping and the actual parameters after wrapping for the preset time; The initial parameters are compared with the actual parameters to determine whether the valve (100) to be tested is leaking or the extent of the leakage.

16. A valve testing method, characterized in that: Applied to the valve testing device according to any one of claims 6 to 12, the method comprises the following steps: The liquids in the valve to be tested (100) and the comparison valve (200) are pressurized to an allowable boundary pressure; Wrap the test paper or test cloth on the outer surface of the valve to be tested (100) and the comparison valve (200) for a preset time, and obtain the initial parameters of the test paper or test cloth before wrapping and the preset wrapping time. The actual parameters after the length; Comparing the initial parameters and actual parameters corresponding to the valve to be tested (100), and comparing the initial parameters and actual parameters corresponding to the comparison valve (200); The comparison result corresponding to the comparison valve (200) is used as a reference to determine whether the valve (100) to be tested is leaking or the extent of the leakage.

17. A valve testing method, characterized in that: Applied to the valve testing device according to any one of claims 1 to 5, the method comprises the following steps: Controlling the first input switch valve (111) and the first output switch valve (121) to be in an open state, and controlling the operating parameters of the fluid in the first input pipeline (110) to be preset operating parameters; the operating parameters include: at least one of temperature, flow rate, and pressure; The valve to be tested (100) is triggered at a preset frequency, and after a preset time, it is observed whether the valve to be tested (100) can be triggered normally, whether there are debris dropped around the valve body of the valve to be tested (100), and whether there are debris in the first output pipeline (120); Based on the observation results, it is determined whether the working durability of the valve (100) to be tested meets the requirements.

18. A valve testing method, characterized in that: Applied to the valve testing device according to any one of claims 6 to 12, the method comprises the following steps: Controlling the first input switch valve (111) and the first output switch valve (121) to be in an open state, and controlling the operating parameters of the fluid in the first input pipeline (110) to be preset operating parameters; the operating parameters include: at least one of temperature, flow rate, and pressure; The valve to be tested (100) is triggered at a preset frequency, and after a preset time, it is observed whether the valve to be tested (100) can be triggered normally, whether there are debris dropped around the valve body of the valve to be tested (100), and whether there are debris in the first output pipeline (120); The second input switch valve (211) and the second output switch valve (221) are controlled to be in an open state, and the operating parameters of the fluid in the second input pipeline (210) are controlled to be the preset operating parameters. row parameters; The comparison valve (200) is triggered at the preset frequency, and after the preset time, it is observed whether the comparison valve (200) can be triggered normally, whether there are debris dropped around the valve body of the comparison valve (200), and whether there are debris in the second output pipeline (220); Taking the observation result corresponding to the comparison pipeline as a reference, the observation result corresponding to the valve to be tested (100) is compared with the observation result corresponding to the comparison valve (200) to determine whether the working durability of the valve to be tested (100) meets the requirements.

Images