Laser apparatus for cleaning thermal field graphite parts and method of using same

Abstract

A laser apparatus for cleaning thermal field graphite parts and a method of using same. A mobile platform (10) is used, so that a worker can transfer and carry the whole apparatus; a swing arm (11) facilitates the worker to correspondingly adjust the positions of different thermal field graphite parts, and a rotating frame (20) is used to drive laser devices to rotate around the thermal field graphite parts, so as to perform cleaning in conjunction with laser light emitted by the laser devices (50). During cleaning, the laser devices (50) are not in contact with the thermal field graphite parts, thereby avoiding damage to the thermal field graphite parts during cleaning. Height-adjustment devices (30) are used to adjust the heights of the laser devices, and the laser apparatus can adapt to cleaning of the surfaces of thermal field graphite parts of different heights; and rotating mechanisms (40) are used to adjust the spatial swing angles of the laser devices, facilitating cleaning of impurities at the tops and the bottoms of the thermal field graphite parts and in gaps in the side surfaces thereof, thereby improving cleaning efficiency and guaranteeing cleaning quality.

Description

Laser equipment for cleaning thermal field graphite parts and its use method Technical Field

[0001] The present invention relates to the technical field of single crystal silicon processing equipment, and in particular to a laser device for cleaning thermal field graphite parts and a method for using the same. Background Art

[0002] After a single crystal furnace's hot zone is completed, it needs to be dismantled and cleaned. The dismantled hot zone graphite components are transported to the graphite cleaning room using a tooling trolley, where impurities such as silicon carbide and silicon vapor adhere to the components. Currently, cleaning hot zone graphite components is primarily done manually. Operators first polish the components with a scouring pad, which produces a large amount of silicide dust that adheres to the components' surface. Then, they use an air gun and a vacuum wind tunnel to clean the components. However, these methods yield poor cleaning quality and low cleanliness, failing to meet the quality requirements for furnace reuse. Furthermore, operators often stand or bend over when cleaning hot zone graphite components, which is ergonomically unsuitable and imposes high workload on operators. Furthermore, regular dismantling and cleaning can significantly damage the hot zone graphite components, making it impossible to maintain consistent positioning after repeated dismantling and cleaning. This shift in the hot zone graphite components alters the temperature gradient within the furnace, directly impacting the subsequent single crystal silicon drawing process.

[0003] With the rapid development of the industry, some thermal field graphite parts cleaning tools and cleaning platforms have been proposed in recent years. However, they are not practical and the cleaning effect is not good. Most of them rely on manual labor. Moreover, some of the current cleaning platforms have great dust hazards and are easy to damage graphite parts.

[0004] Summary of the Invention

[0005] In order to overcome one of the deficiencies of the prior art, the present invention aims to provide a laser device for cleaning thermal field graphite parts and a method for using the same. The laser device for cleaning thermal field graphite parts does not require removal of the thermal field graphite parts, thereby reducing damage to the equipment and can adapt to the cleaning of thermal field graphite parts of different specifications and sizes. The method for using the laser device for cleaning thermal field graphite parts is simple to operate and has good cleaning effect.

[0006] In order to solve the above problems, the technical solutions adopted by the present invention are as follows:

[0007] A laser device for cleaning hot field graphite parts includes a mobile platform, a rotating frame and at least one pair of lifting devices. The mobile platform is provided with a rotatable swing arm; the rotating frame is rotatably mounted on an outward end of the swing arm, and the rotating frame is provided with at least one outwardly extending cross arm; each pair of the lifting devices is slidably mounted on each of the cross arms; a rotating mechanism is provided on the telescopic ends of the two lifting devices, and a laser device is installed on each rotating mechanism; the laser device can rotate on the rotating mechanism.

[0008] In some possible implementations, the rotating mechanism includes a rotating seat and a rotating assembly disposed on the rotating seat, the rotating seat can be rotatably mounted on the corresponding telescopic end of the lifting device, and the laser device is mounted on the rotating end of the rotating assembly.

[0009] In some possible implementations, the rotating component is a rotary cylinder or a rotary motor.

[0010] In some possible implementations, the rotating assembly includes a hemispherical shell, a drive seat, an arc-shaped rack, a drive motor and a rotating motor. The hemispherical shell can be installed on the open cavity of the rotating seat, and the hemispherical shell can swing relative to the rotating seat. The drive seat is installed on the hemispherical shell, and the drive motor is installed on the drive seat. The rotating seat is located at the open end of the open cavity and is rotatably mounted with a rotating ring. The two ends of the arc-shaped rack are respectively mounted on the opposite outer walls of the rotating ring. The output end of the drive motor can always keep in meshing with the arc-shaped rack through a gear. The rotating motor is installed on the rotating seat, and the output end of the rotating motor is also engaged with the gear ring on the rotating ring through a gear. The laser device is mounted on the drive seat.

[0011] In some possible implementations, a rotating ring platform is provided on the peripheral side of the opening end of the open cavity of the rotating seat, the rotating ring can be rotatably mounted on the rotating ring platform, the gear ring on the rotating ring is an outer gear ring, and the rotating motor is installed in the mounting position of the outer wall of the rotating seat.

[0012] In some possible implementations, the rotating seat is located in the installation position and the outer cover is equipped with a protective cover, which extends to one end close to the rotating ring and covers the rotating ring.

[0013] In some possible implementations, the lifting device includes a movable seat, a telescopic electric cylinder, and a base installed on the telescopic end of the telescopic electric cylinder. An adjustment motor is installed on the base, the rotating mechanism is installed on the output end of the adjustment motor, and the movable seat is slidably installed on the rodless electric cylinder of the cross arm.

[0014] In some possible implementations, three groups of the cross arms are evenly arranged on the rotating frame, and each group of the cross arms is provided with a pair of the lifting devices; the center of the rotating frame is rotatably mounted on the outward end of the swing arm through a rotating shaft, and the swing arm is provided with a main motor for driving the rotating shaft to rotate.

[0015] In some possible implementations, a locking mechanism is provided on the mobile platform, and the locking mechanism is used to lock the relative swing angle of the swing arm relative to the mobile platform.

[0016] A method for using a laser device for cleaning a hot field graphite part, which can be implemented on the laser device of the above embodiment, comprises the following steps:

[0017] Fix the thermal field graphite component, adjust the position of the mobile platform and the swing position of the swing arm, so that the rotating frame is placed directly above the thermal field graphite component and on the axis of the thermal field graphite component, ensuring that the working range of the lifting device on the cross arm can cover the entire thermal field graphite component;

[0018] Adjust the position of each pair of lifting devices on the cross arm so that the two lifting devices on each cross arm are respectively placed on the inner and outer sides of the thermal field graphite piece; adjust the rotation angle of the rotating mechanism so that the laser emitted by the laser device is facing the surface of the thermal field graphite piece;

[0019] Select the top or bottom of the thermal field graphite piece as the working zero surface, and adjust the extension and contraction of the lifting device so that the laser emitted by the laser device is on the uncleaned side of the thermal field graphite piece after irradiating the surface of the thermal field graphite piece;

[0020] Drive the rotating frame to rotate. After the laser device cleans one circle of hot field graphite parts, adjust the lifting device accordingly so that the laser device cleans the surface of the next circle of hot field graphite parts. Repeat the above operation until the side of the hot field graphite parts is cleaned.

[0021] Adjust the swing angles of the two laser devices on the corresponding rotating seats so that the lasers emitted by the laser devices can illuminate the gaps on the sides of the thermal field graphite parts, and control the lifting device to move up and down; repeat the above operation until the sides of the gaps in the thermal field graphite parts are cleaned;

[0022] Adjust the swing angles of the two laser devices on the corresponding rotating seats so that the lasers emitted by the laser devices can irradiate the bottom surface of the hot field graphite part; drive the rotating frame to rotate one circle, and adjust the moving position of the lifting device on the cross arm accordingly so that the lasers emitted by the laser devices are located on the uncleaned area of ​​the next circle of the hot field bottom surface. Drive the rotating frame to rotate one circle again, and repeat the above operation until the entire hot field bottom surface is cleaned;

[0023] Control the two lifting devices on each horizontal arm to rise until the laser device is above the top of the thermal field graphite part, swing the swing arm to make the rotating frame swing out of the working area of ​​the thermal field graphite part to complete the cleaning of the thermal field graphite part.

[0024] Compared with the prior art, the present invention has the following beneficial effects:

[0025] The laser device for cleaning thermal field graphite parts of the present invention is movable, making it easy for workers to move and transport the entire device, making it suitable for operation in different locations and spaces. A swing arm design also facilitates adjustment of the position of different thermal field graphite parts, improving ease of use. Furthermore, a rotating frame is used to drive the laser device to rotate around the thermal field graphite part. The high energy and high concentration of the laser light emitted by the laser device illuminate the graphite part being cleaned. After absorbing the laser energy, the silicides and oxides on the substrate surface melt, vaporize, and expand instantaneously upon heating, being driven away from the surface of the thermal field graphite part by the steam, thereby achieving a highly efficient cleaning effect. A contactless cleaning method is employed between the laser device and the thermal field graphite part, significantly reducing damage to the thermal field graphite part. A lifting mechanism is designed to adjust the height of the laser device, thereby accommodating the surface cleaning of thermal field graphite parts at different heights. A rotating mechanism is used to adjust the spatial swing angle of the laser device, facilitating cleaning of the top and bottom of the thermal field graphite part, while also removing impurities from side crevices, thereby improving cleaning efficiency and ensuring cleaning quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0027] FIG1 is a structural diagram of an embodiment of the present invention;

[0028] FIG2 is a second structural diagram of an embodiment of the present invention;

[0029] FIG3 is a third structural diagram of an embodiment of the present invention;

[0030] FIG4 is a schematic diagram of the installation structure of a rotating assembly in another embodiment of the present invention;

[0031] FIG5 is a cross-sectional view of a rotating assembly according to another embodiment of the present invention.

[0032] Description of Figure Numbers:

[0033] Mobile platform 10, swing arm 11, main motor 12, locking mechanism 13;

[0034] Rotating frame 20, cross arm 21;

[0035] Lifting device 30, moving base 31, telescopic cylinder 32, base 33;

[0036] Rotating mechanism 40, rotating seat 41, hemispherical shell 42, driving seat 43, arc-shaped rack 44, driving motor 45, rotating motor 46, opening cavity 47, rotating ring 48, rotating ring platform 49, mounting position 4a;

[0037] Laser device 50. DETAILED DESCRIPTION

[0038] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention. In the following, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the embodiments of the present disclosure, unless otherwise specified, "multiple" means two or more.

[0039] Referring to Figures 1 to 3 , a laser device for cleaning hot-field graphite parts comprises a mobile platform 10, a rotating frame 20, and at least one pair of lifting devices 30. The mobile platform 10 is provided with a rotatable swing arm 11. The rotating frame 20 is rotatably mounted on the outward end of the swing arm 11. The rotating frame 20 is provided with at least one outwardly extending cross arm 21. Each pair of lifting devices 30 is slidably mounted on each cross arm 21. A rotating mechanism 40 is provided at the telescopic end of each lifting device 30, and each rotating mechanism 40 is mounted on a laser device 50. The laser device 50 is rotatable on the rotating mechanism 40. The laser device 50 can be a conventional laser device, such as the portable laser cleaning device disclosed in Patent Publication No. CN218251933U. Due to installation space limitations in this application, the laser machine of the prior art can be mounted on the rotating mechanism 40, while the chassis is mounted on the mobile platform 10, and the two can be connected by wiring, which effectively conforms to the structure of this application.

[0040] It should be noted that the thermal field graphite parts cleaned in this application are indicated by the figure mark A, which is annular or quasi-annular. In addition, the mobile platform 10 is a vehicle body structure, and four casters are provided at the bottom thereof, wherein the caster area is provided with a support structure that can be adjusted to rise and fall, so as to facilitate leveling the entire mobile platform 10 and the rotating frame 20 to ensure the quality of cleaning. In addition, in this application, a rotating frame 20 is provided on one end of the swing arm 11, which easily causes the center of gravity of the mobile platform 10 to be unstable. In order to ensure stability, a counterweight is provided in the mobile platform 10. In addition, in order to prevent the swing arm 11 from bending due to force, a support structure, such as a reinforcing rib, is provided at one end of the swing arm 11 close to the mobile platform 10 in this application.

[0041] This laser device features a movable design, making it easy for workers to move and transport the entire device, making it suitable for operation in different locations and spaces. The swing arm 11 design also allows workers to adjust the position of different graphite parts A, improving ease of use. A rotating frame 20 is also used for installation, which drives the laser device 50 to rotate around the graphite part A. The laser device 50 emits a high-energy, highly concentrated laser beam to illuminate the graphite part to be cleaned, causing the solid silicides and oxides on the surface of the substrate to absorb the laser energy, melt, vaporize, and volatilize. The solid silicides and oxides further expand instantaneously due to heat and are driven away from the surface of the graphite part A by the steam, thereby achieving a highly efficient cleaning effect. A non-contact cleaning method is used between the laser device 50 and the graphite part A, significantly reducing damage to the graphite part A. The lifting device 30 is designed to adjust the height of the laser device 50, so that it can adapt to the surface cleaning of graphite parts A of different heights; and the rotating mechanism 40 is used to adjust the spatial swing angle of the laser device 50, which facilitates the cleaning of the top and bottom of the graphite part A, and can also clean impurities in the side gaps, thereby improving the cleaning efficiency and ensuring the cleaning quality.

[0042] Referring to Figures 1 to 3, in some possible implementations, the rotating mechanism 40 includes a rotating base 41 and a rotating assembly disposed on the rotating base 41. The rotating base 41 is rotatably mounted on the corresponding telescopic end of the lifting device 30, and the laser device 50 is mounted on the rotating end of the rotating assembly. The rotating assembly is a rotary cylinder or a rotary motor. It should be noted that in this application, since the laser device 50 only needs to adjust its swing angle in one direction and cooperate with the spatial rotation of the rotating frame 20 to achieve the cleaning requirements of the circumferential side surface of the graphite part A, this design is mainly used for processing regular graphite parts A.

[0043] Further referring to FIG4 and FIG5, since there are certain gaps or possible eccentric cavities or eccentric surfaces in some graphite parts A, in the above embodiment, the laser device 50 can only swing in one spatial direction, so it is difficult to clean impurities in the above areas. In order to solve such problems, in another embodiment of the present application, the rotating assembly includes a hemispherical shell 42, a driving seat 43, an arcuate rack 44, a driving motor 45 and a rotating motor 46. The hemispherical shell 42 can be installed on the open cavity 47 of the rotating seat 41, and the hemispherical shell 42 can swing relative to the rotating seat 41. The driving seat 43 is installed on the hemispherical shell 42, and the driving motor 45 is installed on the driving seat 43. The rotating seat 41 is located at the open end of the open cavity 47 and is rotatably mounted with a rotating ring 48. The two ends of the arcuate rack 44 are respectively mounted on the opposite side outer walls of the rotating ring 48. The output end of the driving motor 45 can always keep in meshing with the arcuate rack 44 through a gear. The rotating motor 46 is installed on the rotating seat 41, and the output end of the rotating motor 46 is also engaged with the gear ring on the rotating ring 48 through a gear. The laser device 50 is installed on the driving seat 43. Among them, the above-mentioned hemispherical shell 42 and rotating seat 41 cooperate with each other to form a universal structure. Therefore, through the dual functions of the rotating motor 46 and the driving motor 45, the laser device 50 can basically achieve arbitrary position adjustment on the semi-spherical surface; if in order to increase the working area, that is, to increase the hemispherical shell 42 and replace it with a spherical shell, the rotation space range between the hemispherical shell 42 and the rotating seat 41 will be larger. The above design is selected according to actual needs.

[0044] It should be noted that in the above-described embodiment, the opening of the hemispherical shell 42 and the rotating seat 41 can be mutually constrained by some restrictive structure. For example, a removable restricting ring structure is provided on the opening cavity 47 to confine the hemispherical shell 42 within the opening cavity 47. Of course, in some improved embodiments, to address the above-mentioned issues and the installation problem of the rotating ring 48, the rotating seat 41 is provided with a rotating ring base 49 on the peripheral side of the opening end of the opening cavity 47. The rotating ring 48 is rotatably mounted on the rotating ring base 49. The ring gear on the rotating ring 48 is an external ring gear, and the rotating motor 46 is mounted in the mounting position 4a on the outer wall of the rotating seat 41. The rotating ring 48 and the rotating ring base 49 are connected by a snap-fit ​​connection. This arrangement allows the rotating ring 48 to not only drive the above-described arc-shaped rack 44 in rotation but also to restrict the rotation of the hemispherical shell 42, achieving two goals at one. Of course, in some embodiments, its movement can also be restricted from inside the hemispherical shell 42. For example, some expandable structures are set at the bottom of the opening 47. The expandable structure can be opened and retracted, such as an umbrella-like structure. The expansion and contraction can be achieved by using a stud and nut structure, and the opening degree of the expandable structure can be adjusted. The expandable end of the expandable structure is provided with rollers, and the two rollers are used to abut the inner wall of the hemispherical shell 42.

[0045] Further referring to Figures 4 and 5 , in some possible implementations, to better protect the rotating motor 46 and the interface between the gear and the outer ring of the rotating ring 48, a protective cover is installed on the outer housing of the rotating base 41 located at mounting position 4a. The protective cover extends from the end adjacent to the rotating ring 48 and covers the rotating ring 48. Of course, in some improved embodiments, the protective cover extends entirely across the rotating ring 48, providing more comprehensive coverage and preventing foreign matter from entering between the rotating ring 48 and the gear during cleaning, potentially affecting their meshing.

[0046] Further referring to Figures 1 to 3 , in this application, the lifting mechanism 30 can be a conventional lifting screw structure, while the rotating mechanism 40 is directly mounted on one end of the lifting screw. However, considering practical installation issues, in one embodiment of the present application, the lifting mechanism 30 includes a movable base 31, a telescopic electric cylinder 32, and a base 33 mounted on the telescopic end of the telescopic electric cylinder 32. An adjustment motor 34 is mounted on the base 33. The rotating mechanism 40 is mounted on the output end of the adjustment motor 34, and the movable base 31 is slidably mounted on the rodless electric cylinder 22 of the cross arm 21. Compared to traditional telescopic cylinders, the telescopic electric cylinder 32 can achieve arbitrary extension control, facilitating control of the lifting height of the rotating mechanism 40. The same is true for the rodless electric cylinder 22. Furthermore, compared to traditional rack and pinion motion, the rodless electric cylinder 22 can reduce the overall structural complexity to a certain extent. The adjustment motor 34 primarily functions to adjust the relative rotation angle of the rotating mechanism 40 around the telescopic electric cylinder 32, particularly to accommodate cleaning needs for irregularly curved surfaces.

[0047] Further referring to Figures 1 to 3, since the rotating frame 20 rotates to drive the laser device 50 relative to the graphite workpiece A, and the laser spot emitted by the laser device 50 is relatively small, in order to improve the cleaning effect, in actual use, three sets of cross arms 21 are evenly arranged on the rotating frame 20, and each set of cross arms 21 is equipped with a pair of lifting devices 30. By providing multiple sets of cross arms 21 and the corresponding lifting devices 30, rotating mechanism 40, and laser device 50, the length of the laser spot in the cleaning direction of the graphite workpiece A is increased, thereby improving the overall cleaning efficiency. To better rotate the rotating frame 20, the center of the rotating frame 20 is rotatably mounted on the outward end of the swing arm 11 via a rotating shaft. The swing arm 11 is equipped with a main motor 12 for driving the rotating shaft. The main motor 12 is a conventional servo motor installed inside the swing arm 11. In this application, the swing arm 11 is made of square steel to save structure. Among them, the main motor 12 is installed on a mounting plate, and the mounting plate is installed and sealed on the swing end of the swing arm 11 by screws, so that the main motor 12 can be effectively hidden in the swing arm 11 to prevent external impurities from entering and interfering with its normal operation.

[0048] In an improved embodiment of the present application, to increase intelligence and improve work efficiency, the cleaning equipment also includes a control system. The control system is located on each of the rotating mechanisms 40 and is equipped with a position sensor. The control system can adjust the sliding position of the corresponding lifting device 30 on the cross arm 21 and the rotation angle of the laser device 50 on the rotating mechanism 40 based on the detection results of the position sensor. Among them, the position sensor can remotely detect the distance between the laser device 50 and the corresponding surface of the graphite piece A, and then control the cross arm 21 to adaptively adjust the distance between the lifting device 30 and the corresponding surface of the graphite piece A. This allows the laser device 50 to maintain a safe distance from the corresponding surface of the graphite piece A during the rotation of the rotating frame 20. At the same time, due to the flying dust at the cleaning site, a large amount of dust will partially block the laser, so this design can also ensure the normal cleaning power of the laser. In addition, the control system can raise and lower the telescopic cylinder 32 in the lifting device 30 and adjust the rotation of the motor 34 to adjust the height and direction of the rotating mechanism 40 to meet different cleaning requirements. The control system controls the rotation of the rotating mechanism 40 to adjust the spatial oscillation of the laser device 50, allowing the laser device 50 to adjust its orientation for cleaning different curved surfaces or gaps. It should be noted that the control system can be a control system composed of a traditional editable controller and conventional electronic components, or a conventional control module system, such as the cleaning device and corresponding control module in the welding gun cleaning method, device, apparatus, and storage medium disclosed in Patent Publication No. CN114952085A, which will not be described in detail in this application.

[0049] Further referring to Figures 1 to 3, in order to lock the relative position of the swing arm 11 relative to the graphite part A during the cleaning process, in one embodiment of the present application, a locking mechanism 13 is provided on the mobile platform 10, and the locking mechanism 13 is used to lock the relative swing angle of the swing arm 11 relative to the mobile platform 10. Among them, the locking mechanism 13 can be a matching structure of a conventional pin and a positioning hole, or a structure in which a traditional servo motor drives the gear movement, which is selected according to actual use requirements. The present application gives priority to the structure in which a traditional servo motor drives the gear movement, wherein a gear is provided on the swing arm 11, and a traditional servo motor is installed on the mobile platform 10, and the servo motor is used to drive the swing arm 11 to rotate relative to the mobile platform 10. Among them, the servo motor is also electrically connected to the control system in the above embodiment.

[0050] The present invention also provides a method for using a laser device for cleaning a thermal field graphite part, comprising the following steps:

[0051] S100, fix the graphite piece A, adjust the position of the movable platform 10 and the swing position of the swing arm 11, so that the rotating frame 20 is placed directly above the graphite piece A and on the axis of the graphite piece A, and ensure that the working range of the lifting device 30 on the cross arm 21 can cover the entire graphite piece A;

[0052] S200, adjusting the position of each pair of lifting devices 30 on the cross arm 21 so that the two lifting devices 30 on each cross arm 21 are respectively placed on the inner and outer sides of the graphite piece A; adjusting the rotation angle of the rotating mechanism 40 so that the laser emitted by the laser device 50 is directly facing the surface of the graphite piece A;

[0053] S300, selecting the top or bottom of the graphite piece A as the working zero surface, and adjusting the extension and contraction of the lifting device 30 so that the laser light emitted by the laser device 50 is irradiated on the surface of the graphite piece A and is located on the uncleaned side of the graphite piece A;

[0054] S400, driving the rotating frame 20 to rotate, and after the laser device 50 cleans one circle of graphite parts A, adjusting the lifting device 30 accordingly so that the laser device 50 cleans the side surface of the next circle of graphite parts A, repeating the above operation until the side surface of the graphite parts A is completely cleaned;

[0055] S500, adjusting the swing angles of the two laser devices 50 on the corresponding rotating bases 41 so that the lasers emitted by the laser devices 50 can illuminate the gap on the side of the graphite piece A, and controlling the lifting device 30 to move upward and downward; repeating the above operation until the side of the gap in the graphite piece A is completely cleaned;

[0056] Adjust the swing angles of the two laser devices 50 on the corresponding rotating bases 41 so that the laser light emitted by the laser devices 50 can illuminate the bottom surface of the graphite workpiece A; drive the rotating frame 20 to rotate one circle, and adjust the movement position of the lifting device 30 on the cross arm 21 accordingly so that the laser light emitted by the laser device 50 is located on the next uncleaned area of ​​the bottom surface of the graphite workpiece A. Drive the rotating frame 20 to rotate one circle again, and repeat the above operation until the entire bottom surface of the graphite workpiece A is cleaned.

[0057] S600 , control the two lifting devices 30 on each cross arm 21 to rise until the laser device 50 is above the top of the graphite piece A, swing the swing arm 11 to make the rotating frame 20 swing out of the working area of ​​the graphite piece A, and complete the cleaning of the graphite piece A.

[0058] Among them, in this operation method, it is mainly a semi-automatic operation process, which is mainly aimed at some graphite parts A with complex structures. Such a setting can reduce the manufacturing cost and system complexity of intelligent control to a certain extent. In the above step S400, since the side of the graphite part A to be cleaned is relatively regular and the working surface is relatively large, a control system can be used to control the lifting and lowering of the lifting device 30, which greatly simplifies the control difficulty and processing method. In addition, in the above step S500, it is also possible to manually calibrate the emission angle of the laser device 50 first, and then use the control system to control the displacement of the two lifting devices 30 on each cross arm 21 on the cross arm 21. This can also improve the automation level of the entire cleaning equipment to a certain extent.

[0059] Of course, in an improved embodiment of the present application, in order to realize intelligent design to the greatest extent, in the present application, a position sensor is provided on each of the rotating mechanisms 40, that is, after the staff moves the mobile platform 10 into position and initially swings the swing arm 11 into position, the position sensors on all the rotating mechanisms 40 simultaneously detect the distance between each of them and the graphite part A, and feed the distance back to the control system. The control system calculates the virtual center of the entire graphite part A based on the data measured in real time by all the position sensors, and then controls the swing arm 11 to swing and fine-tune the position of the mobile platform 10 so that the center of the rotating mechanism 40 coincides with the virtual center obtained by the above measurement. This operation method is relatively simple and makes it easy to operate. Subsequently, it is only necessary to control the position of the lifting device 30 on each cross arm 21, thus solving the problem of controlling the movement of the lifting device 30 on the cross arm 21. After adjusting the center of the control rotating mechanism 40 to coincide with the virtual center measured above, the controller within the control system calculates the distance between the rotating mechanism 40 on each cross arm 21 and the side of the graphite part A and compares it with a preset distance value. If the actual measured distance value is less than the preset value, the corresponding lifting device 30 is controlled to move on the cross arm 21 so that the rotating mechanism 40 approaches the side of the graphite part A. Conversely, if the actual measured distance value is greater than the preset value, the lifting device 30 is controlled to move on the cross arm 21 so that the rotating mechanism 40 moves away from the side of the graphite part A. After all the rotating mechanisms 40 are adjusted away from the side of the graphite part A, the staff assists the control system in setting a zero reference plane for the graphite part A. Of course, in more intelligent settings, the control system can automatically find the top or bottom surface of the graphite part A as the zero reference plane using a position sensor or other auxiliary equipment according to a preset program. After the zero reference surface is aligned, the control system controls the rotating frame 20 to rotate, and automatically controls the lifting device 30 on each cross arm 21 to raise or lower the height of the laser spot after each rotation until the side of the entire graphite workpiece A is completely cleaned.

[0060] After cleaning the entire side of graphite piece A, the control system controls the adaptive movement of all lifting devices 30 on each cross arm 21. It also controls the rotation mechanism 40 on each lifting device 30 to adjust the orientation of the laser device 50. The control system automatically adjusts the movement position of the lifting device 30 on the corresponding cross arm 21 based on the position sensor on each rotation mechanism 40. Then, using the two sides of graphite piece A as the zero reference point, it moves inward to clean. The visual system connected to the control system takes photos and compares them to determine the cleaning distance until the cleaning is complete. After cleaning the bottom of graphite piece A, the control system controls all lifting devices 30 to rise and reset, then drives the swing arm 11 to swing away from the area above graphite piece A, completing the cleaning of graphite piece A.

[0061] The above embodiments are only preferred embodiments of the present invention and cannot be used to limit the scope of protection of the present invention. Any non-substantial changes and replacements made by technicians in this field on the basis of the present invention fall within the scope of protection required by the present invention.

Claims

1. A laser device for cleaning thermal field graphite parts, characterized in that: include: A mobile platform, on which a rotatable swing arm is provided; A rotating frame, which is rotatably mounted on an outward end of the swing arm, and the rotating frame is provided with at least one outwardly extending cross arm; At least one pair of lifting devices, each pair of the lifting devices is slidably mounted on each of the cross arms; a rotating mechanism is provided on the telescopic ends of the two lifting devices, and a laser device is installed on each rotating mechanism; the laser device can rotate on the rotating mechanism.

2. A laser device for cleaning thermal field graphite parts according to claim 1, characterized in that: The rotating mechanism comprises a rotating seat and a rotating assembly arranged on the rotating seat. The rotating seat can be rotatably mounted on the corresponding telescopic end of the lifting device, and the laser device is mounted on the rotating end of the rotating assembly.

3. A laser device for cleaning thermal field graphite parts according to claim 2, characterized in that: The rotating component is a rotary cylinder or a rotary motor.

4. The laser device for cleaning thermal field graphite parts according to claim 2, characterized in that: The rotating assembly includes a hemispherical shell, a driving seat, an arc-shaped rack, a driving motor and a rotating motor. The hemispherical shell can be installed on the open cavity of the rotating seat, and the hemispherical shell can swing relative to the rotating seat. The driving seat is installed on the hemispherical shell, and the driving motor is installed on the driving seat. The rotating seat is located at the open end of the open cavity and is rotatably mounted with a rotating ring. The two ends of the arc-shaped rack are respectively mounted on the opposite outer walls of the rotating ring. The output end of the driving motor can always keep meshing with the arc-shaped rack through a gear. The rotating motor is installed on the rotating seat, and the output end of the rotating motor is also meshed with the gear ring on the rotating ring through a gear. The laser device is installed on the driving seat.

5. The laser device for cleaning thermal field graphite parts according to claim 4, characterized in that: The rotating seat is provided with a rotating ring platform on the peripheral side of the opening end of the opening cavity, the rotating ring is rotatably mounted on the rotating ring platform, the gear ring on the rotating ring is an external gear ring, and the rotating motor is mounted in the mounting position of the outer wall of the rotating seat.

6. The laser device for cleaning thermal field graphite parts according to claim 5, characterized in that: The rotating seat is located at the installation position and the outer cover is equipped with a protective cover, which extends from one end close to the rotating ring and covers the rotating ring.

7. The laser device for cleaning thermal field graphite parts according to claim 1, characterized in that: The lifting device includes a moving seat, a telescopic electric cylinder and a base installed on the telescopic end of the telescopic electric cylinder. An adjustment motor is installed on the base. The rotating mechanism is installed on the output end of the adjustment motor. The moving seat is slidably installed on the rodless electric cylinder of the cross arm.

8. The laser device for cleaning thermal field graphite parts according to claim 1, characterized in that: Three groups of the horizontal arms are evenly arranged on the rotating frame, and each group of the horizontal arms is provided with a pair of the lifting devices; the center of the rotating frame is rotatably mounted on an outward end of the swing arm through a rotating shaft, and the swing arm is provided with a main motor for driving the rotating shaft to rotate.

9. The laser device for cleaning thermal field graphite parts according to claim 1, characterized in that: The mobile platform is provided with a locking mechanism, and the locking mechanism is used to lock the relative swing angle of the swing arm relative to the mobile platform.

10. A method for using a laser device for cleaning a thermal field graphite part, the method can be implemented on the laser device according to any one of claims 1 to 9, characterized in that: The following steps are involved: Fix the thermal field graphite piece, adjust the position of the mobile platform and the swing position of the swing arm, so that the rotating frame is placed directly above the thermal field graphite piece and on the axis of the thermal field graphite piece, and ensure that the working range of the lifting device on the cross arm can cover the entire thermal field graphite piece; Adjust the position of each pair of lifting devices on the cross arm so that the two lifting devices on each cross arm are Placed on the inner and outer sides of the thermal field graphite piece; adjusting the rotation angle of the rotating mechanism so that the laser emitted by the laser device faces the surface of the thermal field graphite piece; The top or bottom of the thermal field graphite piece is selected as the working zero surface, and the extension amount of the lifting device is adjusted so that the laser emitted by the laser device is on the uncleaned side of the thermal field graphite piece after irradiating the surface of the thermal field graphite piece; Drive the rotating frame to rotate, and after the laser device cleans a circle of thermal field graphite parts, adjust the lifting device accordingly so that the laser device cleans the surface of the next circle of thermal field graphite parts, and repeat the above operation until the side of the thermal field graphite parts is cleaned; Adjust the swing angles of the two laser devices on the corresponding rotating seats so that the lasers emitted by the laser devices can irradiate the gaps on the sides of the thermal field graphite parts, and control the lifting device to move up and down; repeat the above operation until the sides of the gaps in the thermal field graphite parts are cleaned; Adjust the swing angles of the two laser devices on the corresponding rotating seats so that the lasers emitted by the laser devices can irradiate the bottom surface of the thermal field graphite piece; drive the rotating frame to rotate one circle, and adjust the moving position of the lifting device on the cross arm accordingly so that the lasers emitted by the laser devices are located on the uncleaned area of ​​the next circle of the bottom surface of the thermal field graphite piece, and drive the rotating frame to rotate one circle again, and repeat the above operation until the entire bottom surface of the thermal field graphite piece is cleaned; The two lifting devices on each horizontal arm are controlled to rise until the laser device is above the top of the thermal field graphite part, and the swing arm is swung to make the rotating frame swing out of the working area of ​​the thermal field graphite part to complete the cleaning of the thermal field graphite part.

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