Test arrangement for testing optical components, method for operating a test arrangement, and control unit

Abstract

The approach presented here develops a test arrangement (100) for testing at least one optical component (120), wherein the test arrangement (100) comprises a coupling module (105) for transmitting and / or receiving a light ray (110) and / or a light beam to / from the optical component (120) to be tested and the optical component (120) to be tested, the latter comprising a grating coupler (115) having an irregular grating structure (150).

Description

[0001] Test arrangement for testing optical components, method for operating a

[0002] Test arrangement and control unit

[0003] The approach presented here creates a test arrangement for testing optical components, a method for operating a test arrangement and a control unit according to the main claims.

[0004] From the applicant's documents, such a test arrangement is generically known under the name "UFO Probe".

[0005] The optical components can be manufactured on a wafer, with several of the optical components being arranged on the wafer for subsequent separation and further processing. Testing optical and electronic functionalities is a crucial factor in wafer production. In large-scale production, it is important to keep both test and setup times short in order to remain cost-effective. Testing of the optical components can advantageously be carried out in the wafer assembly. This can make it possible to test the electrical and optical components of each chip simultaneously, thus saving time. It can advantageously be based on a concept for optical scanning of photonic integrated circuits that is insensitive to alignment tolerances of the wafer prober.

[0006] To test the functionality of optical components or devices, it is often necessary to couple light or a bundle of light rays into an optical component under test (DuT = device under test = component to be tested). This is often achieved using at least one grating coupler, which, however, has several disadvantages in unfavorable application scenarios. For example, one disadvantage is that, on the one hand, the irradiation of the optical coupling points on the DuT (which achieves the positional tolerance) reduces the coupling efficiency, since only a fraction of the provided intensity hits the "active" surface of the coupler. This results in very high insertion loss (typically greater than 10 dB).On the other hand, direct coupling via fibers is disadvantageous. While fiber coupling can achieve very high coupling efficiency due to mode locking, this coupling requires very precise positioning (in all three spatial directions). In this case, the fiber must be actively aligned for each coupler on the DuT and for each DuT on the wafer, which drastically increases the measurement time. Without active alignment, sufficient reproducibility of the power coupled into the DuT cannot be guaranteed due to the lack of positioning tolerance of the wafer prober.

[0007] Position tolerance-insensitive arrangements are known from WO 2019029765 A1, WO 2021 / 078318 A1, WO 2022 / 033618 A1, DE 102021119192, and DE 102021109605. In these known arrangements, the mode field diameter of the grating coupler is overexposed to compensate for any positioning tolerance. A disadvantage is the low coupling efficiency between the UFO probe card (ultra-fast optoelectronic probe card) and the wafer, as described in the previous paragraph, due to overexposition of the grating coupler.

[0008] Against this background, it is the object of the present invention to provide an improved test arrangement for testing optical components, an improved method for operating such a test arrangement and an improved control unit.

[0009] This problem is solved by the subject matter of the main claims.

[0010] The present approach provides a test arrangement for testing optical components, the test arrangement comprising the following features: a coupling module for outputting and / or receiving a light beam and / or a light beam bundle onto a coupling element of at least one optical component to be tested; and the optical component to be tested comprising a grating coupler having a non-regular grating structure.

[0011] The optical component can include a waveguide. It can also be specifically electro-optical components. Electro-optical components can, for example, convert electrical signals into optical signals and / or vice versa.

[0012] The grating coupler can, but does not have to, be provided as a functional component of the optical component. In this case, light can be coupled in and / or out using the grating coupler during subsequent operation of the optical component.

[0013] Alternatively, the grating coupler can be designed solely for testing the optical component on a wafer. The grating coupler can be designed to be separated from the optical component after testing, allowing the optical component from which the grating coupler was separated to be further processed into a component in a subsequent process. In this case, the grating coupler can be optimized for the testing task without subsequently impairing the function of the optical component.

[0014] A coupling module can be understood, for example, as an output interface and / or input interface for outputting light or light beams, for example laser light. The coupling module can be arranged, for example, on a probe card. Several coupling modules can be arranged on the probe card. The light beams can, but do not have to, advantageously be single-mode. This can be understood to mean that they predominantly or exclusively have a fundamental mode (e.g., LPoo or LPoi). The light beams can have a diffraction index M 2 from 1.0 to 1.5, advantageously 1.0 to 1.2).

[0015] Alternatively, and also advantageously, the light beams can be multi-mode. The light beams can have a diffraction index M 2 from 1.5 to 10, advantageously 2 to 5.

[0016] From this coupling module, the laser light can, for example, be output to a grating coupler of the optical component to be tested or, if light is output via the grating coupler, can be read in by the grating coupler. In this case, for example, a sensor can also be provided which receives the intensity or other properties of the output or received light and feeds them to a corresponding evaluation unit or control unit. A non-regular grating structure can, for example, be understood to mean that the grating coupler has a grating structure which has at least two, but advantageously more than two or three sections in which the structure of the grating coupler differs. For example, grooves or webs in the different sections of the grating structure can have different widths, different bends orThey can have different shapes, different spacing, or the like, forming a non-homogeneous pattern in the grating coupler. Transitions between different sections of the grating structure of the grating coupler can also be continuous.

[0017] The approach presented here is based on the finding that by using the non-regular grating structure, a significantly larger area of ​​the grating coupler can be used as a mode field for the acceptance modes of the grating coupler. This allows for an enlargement of the acceptance mode field of the grating coupler, which leads to an increase in the efficiency of the coupling between the coupling element and the grating coupler (in both directions) because the modes are better matched. At the same time, the tolerance regarding positioning accuracies is maintained because these shrink relative to the enlarged mode.

[0018] The grating coupler can have an acceptance mode field diameter that is greater than 5 pm (pm denotes micrometers), advantageously greater than 10 pm, and particularly advantageously greater than 20 pm. In some cases, a mode field diameter greater than 50 pm can also be advantageous. On the other hand, it can be advantageous not to choose a mode field diameter that is too large, because then wavefront errors could occur, which can impair the reproducibility of the coupling. Furthermore, the possible mode field diameter can be limited by the fact that several grating couplers are to be arranged next to one another at a certain distance (pitch), and therefore the available space for the individual grating coupler is limited. Therefore, a maximum value for the mode field diameter of 200 pm, advantageously 100 pm, can be selected. In some cases, a mode field diameter of 60 pm or less can be advantageous.

[0019] The grating coupler can be used to transmit and / or receive light beams with a diffraction index M 2 from 1.0 to 1.5, advantageously from 1.0 to 1.2, and also advantageously from 1.0 to 1.1. It may also be advantageous for certain applications if the grating coupler is designed to suppress light from outside the fundamental mode. The latter may mean that the coupling coefficient for light from outside the fundamental mode is low, for example, at most 10% of the coupling coefficient for light in the fundamental mode.

[0020] The grating coupler can alternatively and also advantageously be used for transmitting and / or receiving multimode light beams, in particular with a diffraction index M 2 from 1.5 to 20, advantageously from 2 to 10, also advantageously from 2 to 5. Multimode optical components can then be tested with the test setup. The fundamental mode can also be received and / or transmitted by the grating coupler.

[0021] A particularly advantageous embodiment of the approach proposed here is one in which the non-regular grating structure of the grating coupler is formed over more than half of the surface of the grating coupler, in particular over more than two-thirds or more than three-quarters of the surface of the grating coupler. Such an embodiment offers the advantage of providing a large receiving or output area for light due to the large area of ​​the non-regular grating structure of the grating coupler, thus further increasing coupling efficiency.

[0022] According to a further embodiment, the coupling module can also be configured to transmit and / or receive a predetermined mode of the light beam with lower attenuation than the other modes, and the grating coupler can be specifically configured to receive and / or transmit this predetermined mode of the light beam with lower attenuation than the other modes. Such an embodiment offers the advantage that, by adapting the modes to be transmitted or received, a specific adaptation and very efficient coupling of light from the coupling module to the grating coupler, or vice versa, can be achieved.

[0023] According to a further embodiment of the approach proposed here, the irregular grating structure of the grating coupler can be formed by varying the depth of grating grooves in the grating structure, varying the ridge radii of the grating structure, by differently designed sections in the grating structure within a base body and / or varying the spacing of grating grooves and / or ridges and / or a grating fill factor within the grating structure in different sections of the grating coupler. In particular, in addition to abrupt variations, continuous transitions in the grating structure are also possible. Such an embodiment offers the advantage of a grating coupler that is very simple and cost-effective to manufacture and can efficiently implement the aforementioned advantages. A depth can be understood as a vertical dimension of the grating grooves above the base of the grating coupler.

[0024] All variations that constitute the non-regular lattice structure, namely the variations of depths, ridge radii, ridge widths and fill factors, can change continuously across the entire GC, but they can also change alternatively or simultaneously in sections above the GC.

[0025] Another advantageous embodiment of the approach proposed here is one in which the grating coupler is designed as a substantially planar, laterally funnel-shaped and / or planar, laterally triangular recess in the optical component to be tested and / or one in which the grating coupler has a base component onto whose surface the grating coupler is mounted or placed as a separate element. Such an embodiment offers the advantage of efficient guidance of the light from the grating coupler to an interface of the optical component to be tested. One embodiment of the approach presented here is particularly advantageous in which the grating coupler opens into a light guide embedded in the optical component to be tested. In particular, the grating coupler can be embedded in a substrate of the optical component to be tested and directly coupled to a corresponding light guide.Such an embodiment advantageously enables a cost-effective and integrated production of the component to be tested including the grating coupler.

[0026] A particularly efficient embodiment of the approach presented here for coupling light into or out of the optical component under test via the grating coupler is one in which the grating coupler has a different grating structure in at least two, and in particular more than two, grating sections. The grating sections can also change continuously.

[0027] A particularly fast and efficient testing of optical components under test can be achieved with an embodiment of the approach presented here, in which the coupling module is designed to emit and / or receive light into a region of at least half, in particular two-thirds, of the surface of the grating coupler. Such an embodiment offers the advantage of avoiding the need for a highly precise arrangement of the optical component under test with respect to the coupling module.

[0028] Specifically for the mass testing of optical components, for example in a manufacturing plant, according to a further embodiment of the approach proposed here, a holding unit for receiving the optical component to be tested and at least one further optical component to be tested can be provided, which has a further grating coupler that has a further non-regular grating structure. As a result, for example, light can be emitted sequentially or in parallel via the coupling module onto the corresponding grating couplers of the individual optical components to be tested (for example also by moving the holding unit), without the need to manually reinsert the optical components to be tested. A substrate or wafer in which the optical component to be tested and / or the grating coupler is embedded can be used as the holding unit.This can have the advantage that the optical components can be tested directly in the wafer assembly. An advantageous embodiment of the approach presented here is one in which the grating coupler has an acceptance mode field diameter that is greater than 5 μm and less than 500 μm and / or in which the grating coupler is designed to emit and / or receive light beams from a light beam bundle with a diffraction index of 1.0 to 1.5. Such an embodiment offers the advantage of being able to test optical components suitable for mass production in a particularly space-saving manner using the approach presented here.

[0029] Another possible embodiment of the approach presented here is one in which the grating coupler is designed to transmit and / or receive multimode light beams. Such an embodiment offers the advantage of being able to use the optical components for a wide range of applications thanks to the multimode transmission capability of light beams.

[0030] According to a further embodiment of the approach proposed here, a method for operating a test arrangement according to a variant presented here for testing an optical component to be tested is proposed, the method comprising the following steps:

[0031] Emitting light from the coupling module to the grating coupler of the optical component to be tested and / or light from the optical component to be tested of the grating coupler to the coupling module; and

[0032] Evaluating a light received from the grating coupler and / or coupling module to test the optical component.

[0033] Advantageously, the modes of the grating coupler and the coupling module can be matched to each other according to the above-mentioned mode field diameters.

[0034] Such an embodiment also allows the advantages presented here to be realized quickly and efficiently. A particularly advantageous embodiment is one in which the modes and mode properties of the grating coupler and the coupling module are matched to each other, for example, according to the aforementioned mode field diameters.

[0035] The approach presented here further creates a control unit that is designed to carry out, control, or implement the steps of a variant of a method presented here in corresponding devices. This embodiment of the invention in the form of a control unit also allows the problem underlying the invention to be solved quickly and efficiently. For this purpose, the control unit can have at least one computing unit for processing signals or data, at least one memory unit for storing signals or data, at least one interface to a sensor or an actuator for reading in sensor signals from the sensor or for outputting control signals to the actuator, and / or at least one communication interface for reading in or outputting data that is embedded in a communication protocol.The computing unit can be, for example, a signal processor, a microcontroller, or the like, and the storage unit can be a flash memory or a magnetic storage unit. The communication interface can be configured to read in or output data wirelessly and / or via a wired connection. A communication interface capable of reading in or outputting wired data can read this data electrically or optically from a corresponding data transmission line or output it to a corresponding data transmission line, for example.

[0036] In this case, a control unit can be understood as an electrical device that processes sensor signals and outputs control and / or data signals depending on them. The control unit can have an interface that can be implemented in hardware and / or software. In a hardware implementation, the interfaces can, for example, be part of a so-called system ASIC, which contains a wide variety of functions of the control unit. However, it is also possible for the interfaces to be separate integrated circuits or to consist at least partially of discrete components. In a software implementation, the interfaces can be software modules that are present, for example, on a microcontroller alongside other software modules.

[0037] Also advantageous is a computer program product or computer program with program code that can be stored on a machine-readable carrier or storage medium such as a semiconductor memory, a hard disk memory or an optical memory and is used to carry out, implement and / or control the steps of the method according to one of the embodiments described above, in particular when the program product or program is executed on a computer or a device.

[0038] A presentation of the exemplary embodiment is explained in more detail below with reference to the attached figures. They show: Figure 1 shows a schematic representation of a test setup according to an exemplary embodiment of the approach proposed here;

[0039] Figure 2A is a schematic representation of a grating coupler embedded in a substrate of an optical component 130 to be tested;

[0040] Figure 2B is a schematic sectional view through the grating coupler to explain the operation of this grating coupler;

[0041] Figure 3A is a schematic plan view of a grating coupler for use in an embodiment of the approach proposed here;

[0042] Figure 3B is a schematic plan view of another grating coupler for use in an embodiment of the approach proposed here;

[0043] Figure 3C shows a schematic plan view of a grating coupler for use in an embodiment of the approach proposed here;

[0044] Figure 4 shows a flow diagram of an embodiment of a method for operating a test arrangement according to a variant presented here for testing an optical component to be tested; and

[0045] Figure 5 is a block diagram of an embodiment of a control unit for executing and / or controlling steps of the above-mentioned method.

[0046] In the following figures, identical or similar elements are given identical or similar reference symbols, whereby a repeated description is omitted for reasons of brevity and clarity.

[0047] Figure 1 shows a schematic representation of a test arrangement 100 according to an embodiment of the approach proposed here. An (optical) coupling module 105 is provided, which is designed to emit and / or receive light 110 as a corresponding mode of the optical coupling module 105. This light 110 can, for example, be laser light or light from an LED and / or be formed as a bundle of light rays. This light 110 is directed, for example, onto a grating coupler 115 of an optical component 120 to be tested, which is positioned on a holding unit 125. On the holding unit 125, which is formed, for example, as a wafer substrate, a further optical component 130 to be tested can be formed, which comprises a further grating coupler 135.

[0048] Figure 2A shows a schematic representation of a grating coupler 115 embedded in a substrate 200 of an optical component 130 to be tested. The grating coupler 115 is formed as a recess in the substrate 200 and includes a region with a non-regular grating structure. Furthermore, the grating coupler terminates via a taper 210 in a waveguide 220, which is embedded or formed, for example, as a trench structure in the substrate 200.

[0049] Figure 2B shows a schematic sectional view through the grating coupler 115 to explain the operation of this grating coupler 115. It can be seen that a grating structure 250 has ridges 265 (or generally elevations) or grooves 270 on a surface 260 of the grating coupler 115. An incident wave or light 110, which strikes the surface 260 of the grating coupler 115 provided with the grating structure 250 at an angle θE, is thus deflected by the different refractive indices n0 or n1<, so that this light now has the angle 0 min the layer 275 below the surface 260 of the grating coupler 115. Specifically, the grating structure 250 of the grating coupler 115 can be precisely adapted to a light 110 emitted by the coupling module 105 as shown in Fig. 1. This can be achieved in particular by selecting the distances between and / or heights of the ridges or elevations 265. In this way, a high efficiency in coupling the light 110 can be achieved, especially for testing the optical component 120 to be tested.

[0050] Figure 3A shows a schematic top view of a grating coupler 115 for use in an embodiment of the approach proposed here. It can be seen that the grating coupler 115 shown in Figure 3A has different sections 300 in which the grating structure 250 is configured differently. For example, the webs 265 or grooves 270 (or elevations in general) shown in Figure 2B can have different spacings or widths or generally different shapes, which are arranged and formed in a large area of ​​a surface 310 of the grating coupler 115. In particular, it can be seen that the grating coupler 115 as a whole has a triangular or funnel-shaped basic shape in order to couple light received via this grating coupler into a light guide 120.

[0051] Figure 3B shows a schematic top view of another grating coupler 115 for use in an embodiment of the approach proposed here. It can also be seen that individual sections 300 are provided at which the grating structure 250 of the grating coupler 115 differs from one another.

[0052] Figure 3C shows a schematic top view of a grating coupler 115 for use in one embodiment of the approach proposed here. It can also be seen that a very large portion 320 of the light 110 of the light beam emitted by the coupling module 105 as shown in Figure 1 can be used as the acceptance mode of this grating coupler 115, thus enabling high efficiency in coupling the light 110 via the grating coupler 115 into the optical element 120 to be tested as shown in Figure 1.

[0053] In summary, it should be noted that an important aspect of the approach presented here is to increase the coupling efficiency of the UFO probe solution or the test setup 100 (to reduce the insertion loss) while maintaining the positioning tolerance as much as possible. This should or can be achieved, on the one hand, by adapting the mode of the optical coupler, or in this case, the grating coupler 115 on the DuT or the component 120 under test, to that of the optical coupling module 105. For this purpose, special grating couplers 115 with an enlarged acceptance mode field diameter can be applied to the DuT or the component 120 under test to couple the light 110. These can either replace the grating couplers previously used (if these are not needed in the final packaging step anyway, because the light is fed into the chip or the device via edge coupling, for example), orthe component to be tested) or, in addition to the grating coupler with a small acceptance mode field diameter, additional grating couplers 115 with a larger acceptance mode field diameter are applied to the DuT. These grating couplers 115, for example, are "design-for-test" elements.

[0054] Furthermore, in a second step, the mode field diameter generated by the optical module of the UFO sample or the test setup 100 is adapted to the mode of the grating coupler 115. This allows for an iterative adjustment of the coupling behavior, thus generating an optimal coupling behavior.

[0055] For example, by matching the mode of the grating coupler 115 to that of the optical coupling module 105 of the UFO probe test solution or the test setup 100, the insertion loss is significantly reduced. Since the mode diameter of the design-for-test grating coupler 115 is matched to that of the optical coupling module 105, which typically has values ​​of 30 pm - 40 pm, the positional tolerance is maintained.

[0056] The figures provided here provide examples of how such a solution works. The approach presented here is illustrated graphically, but not to scale. The black circle in Figure 3C illustrates the acceptance mode field of the grating coupler 115, while the open circle in Figure 3C illustrates the acceptance mode field of the illumination via the probe card (UFO probe card) or the light 110 emitted by the coupling module 105. The difference between the two modes is a measure of the insertion loss of the system or the test setup 100. Consequently, the insertion loss of the matched grating coupler 115 is very favorable.

[0057] It can also be seen that the positional tolerance between the UFO probe card mode and the grating coupler mode allows a large amount of light to be coupled in. The union of both modes, taking this positional tolerance into account, is a measure of the coupling stability.

[0058] Possible implementations of the mode matching of the grating coupler 115 (optical coupling element on the chip) can be achieved, for example, by varying the grating structure. Typically used grating couplers 115 are binary structures with a constant depth between grating grooves 270 and ridges 265. Furthermore, the gratings 250 start at the tip of the triangular grating coupler base body. The ridges (or grooves), for example, run in a circular arc with a constant radius. However, it is also conceivable that variations in the spacing and / or depth of the grating grooves 270 and ridges 265 can be achieved. The optimization of the acceptance mode (or the output mode) of the grating coupler 115 can be achieved by modulating the following parameters:

[0059] - Variation of the depth of the grid grooves (from groove to groove and within a groove)

[0060] - Starting point of the modulation on the grating coupler base body

[0061] - Variation of the web radii (from web to web and within a web)

[0062] - Fractures in the lattice structure within the base body

[0063] - Variation of the grating frequency and the grating fill factor within the 2D structure of the grating

[0064] Figure 4 shows a flowchart of an embodiment of a method 400 for operating a test arrangement according to a variant presented here for testing an optical component to be tested. The method 400 comprises a step 410 of emitting light from the coupling module to the grating coupler of the optical component to be tested and / or of emitting light from the optical component to be tested of the grating coupler to the coupling module. Furthermore, the method 400 comprises a step 420 of evaluating light received from the grating coupler and / or coupling module in order to test the optical component. Figure 5 shows a block diagram of an embodiment of a control unit 500 for executing and / or controlling steps 410 and 420, respectively, of the aforementioned method 400.The control unit 500 is, for example, embedded in the (optical) coupling module 105 or implemented at another location in the corresponding test arrangement 100. The control unit 500 comprises a unit 510 for.

[0065] Controlling the emission of light from the coupling module to the grating coupler of the optical component to be tested and / or the emission of light from the optical component of the grating coupler to be tested to the coupling module. Furthermore, the control unit 500 comprises an evaluation unit 520 for evaluating light received from the grating coupler and / or coupling module in order to test the optical component.

Claims

Patent claims 1. A test arrangement (100) for testing at least one optical component (120), the test arrangement (100) having the following features: a coupling module (105) for outputting and / or receiving a light beam (110) and / or a light beam bundle onto the optical component (120) to be tested; and the optical component (120) to be tested, which has a grating coupler (115) having a non-regular grating structure (150).

2. Test arrangement (100) according to claim 1, wherein the non-regular grating structure (250) of the grating coupler (115) is formed in more than half of the area (310) of the grating coupler (115), in particular in more than two thirds or in more than three quarters of the area (310) of the grating coupler (115).

3. Test arrangement (100) according to one of the preceding claims, wherein the coupling module (105) is designed to transmit and / or receive a predetermined mode of a plurality of modes of the light beam (115) with lower attenuation than the other modes and wherein the grating coupler (115) is specially designed to receive and / or transmit this predetermined mode of the light beam (110) with lower attenuation than the other modes.

4. Test arrangement (100) according to one of the preceding claims, in which the non-regular grating structure (250) of the grating coupler (115) is formed by a variation of a depth of grating grooves (270) of the grating structure (250), a variation of ridge radii of the grating structure (250), in particular wherein the variation comprises continuously varying ridge radii, by differently designed sections in the grating structure (250) within a base body or substrate (200) and / or a variation of the spacing of grating grooves (270) and / or grating ridges (265) and / or a grating fill factor within the grating structure (250).

5. Test arrangement (100) according to one of the preceding claims, in which the grating coupler (115) is designed as a substantially planar, laterally funnel-shaped and / or triangular recess in the optical component (120) to be tested and / or in which the grating coupler (115) is a base component on the surface of which the grating coupler (115) is placed or placed as a separate element.

6. Test arrangement (100) according to one of the preceding claims, in which the grating coupler (115) opens into a light guide (220) embedded in the optical component (120) to be tested.

7. Test arrangement (100) according to one of the preceding claims, in which the grating coupler (115) has a different grating structure (250) in at least two, in particular more than two, grating sections (300).

8. Test arrangement (100) according to one of the preceding claims, in which the coupling module (105) is designed to emit and / or receive light into a region of at least half, in particular two-thirds of the area of ​​the grating coupler (115).

9. Test arrangement (100) according to one of the preceding claims, with a holding unit (125) for receiving the optical component (120) to be tested and at least one further optical component (130) to be tested, which has a further grating coupler (135) having a further non-regular grating structure (250).

10. Test arrangement (100) according to one of the preceding claims, wherein the grating coupler (115) has an acceptance mode field diameter which is greater than 5 pm and less than 500 pm and / or wherein the grating coupler (115) is provided for emitting and / or receiving light beams (110) of a light beam bundle with a diffraction index of 1.0 to 1.

5.

11. Test arrangement (100) according to one of the preceding claims, wherein the grating coupler (115) is provided for transmitting and / or receiving multimode light beams.

12. A method (400) for operating a test arrangement (100) according to one of claims 1 to 11 for testing an optical component (120) to be tested, the method (400) comprising the following steps: Emitting (410) light (110) from the coupling module (105) to the grating coupler (115) of the optical component (120) to be tested and / or light from the optical component (120) to be tested to the coupling module (105); and Evaluating (420) a light received from the grating coupler (115) and / or coupling module (105) to test the optical component (120).

13. Control unit (500) which is configured to execute and / or control the steps (410, 420) of the method (400) according to claim 12 in corresponding units (510, 520).

14. Computer program configured to execute and / or control the steps of the method (400) according to claim 12.

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