Optical system and projection exposure system

Abstract

The invention relates to an optical system (200) for a projection exposure system (1A, 1B), having an optical assembly (100) with an optical element (108), a manipulator frame (202) which supports the optical assembly (100), and a clamping assembly (212, 212A, 212B, 212C, 212D, 212E, 212F, 212G, 214, 216) which is attached to the manipulator frame (202) and which can be brought from a closed state (Z20), in which the clamping assembly (212, 212A, 212B, 212C, 212D, 212E, 212F, 212G, 214, 216) produces a mechanical connection between the optical assembly (100) and the manipulator frame (202), into an open state (Z10), in which the mechanical connection between the optical assembly (100) and the manipulator frame (202) is released, and vice versa, wherein the clamping assembly (212A) has a contact element (250) which is connected to the optical element (108), a groove element (238) which is connected to the manipulator frame (202) and on which the contact element (250) rests, and a locking unit (262) for mechanically connecting the contact element (250) to the groove element (238) in the closed state (Z20) of the clamping assembly (212A); or the contact element (250) is connected to the manipulator frame (202), and the groove element (238) is connected to the optical element (108). The contact element (250) has a spherical cap-shaped contact section (252), and the groove element (238) has a V-shaped groove (242) with two contact surfaces (244, 246) which are oriented diagonally relative to each other. The contact section (252) rests on the contact surfaces (244, 246), or the contact element (250) and the groove element (238) rest against each other at a surface contact or at a tetrahedron-shaped contact. The locking unit (262) has a locking element (266) and a drive element (264) for driving the locking element (266), and the drive element (264) is designed to bring the locking element (266) from a locking state (Z1), in which the locking element (266) engages behind the contact element (250) in order to produce a form-fitting connection between the locking element (266) and the contact element (250), into an unlocking state (Z2), in which the form-fitting connection between the locking element (266) and the contact element (250) is released, and vice versa.

Description

[0001] OPTICAL SYSTEM AND PROJECTION EXPOSURE SYSTEM

[0002] The present invention relates to an optical system for a projection exposure apparatus and a projection exposure apparatus having such an optical system.

[0003] The content of the priority application DE 10 2023 207 632.2 is incorporated in its entirety by reference.

[0004] Microlithography is used to manufacture microstructured components, such as integrated circuits. The microlithography process is carried out using a lithography system that has an illumination system and a projection system. The image of a mask (reticle) illuminated by the illumination system is projected by the projection system onto a substrate coated with a light-sensitive layer (photoresist) and arranged in the image plane of the projection system, for example, a silicon wafer, in order to transfer the mask structure to the light-sensitive coating of the substrate.

[0005] Driven by the pursuit of ever smaller structures in the manufacture of integrated circuits, EUV lithography systems, which use light with a wavelength in the range of 0.1 nm to 30 nm, particularly 13.5 nm, and DUV lithography systems, which use light with a wavelength in the range of 30 nm to 250 nm, are currently being developed. In particular, such EUV lithography systems require the use of reflective optics, i.e., mirrors, instead of the previously used refractive optics, i.e., lenses, due to the high absorption of light at this wavelength by most materials.

[0006] It is desirable to be able to replace such mirrors at the site of use of such a lithography system. Due to the limited space and the tolerances required to maintain when replacing such a mirror, this is a significant time and labor intensive operation and is therefore usually not possible at the site of use of the lithography system.

[0007] Against this background, one object of the present invention is to provide an improved optical system. Accordingly, an optical system for a projection exposure system is proposed. The optical system comprises an optical assembly with an optical element, a manipulator frame that supports the optical assembly, and a clamping assembly attached to the manipulator frame, which can be moved from a closed state, in which the clamping assembly establishes a mechanical connection between the optical assembly and the manipulator frame, to an open state, in which the mechanical connection between the optical assembly and the manipulator frame is released, and vice versa. The clamping assembly has a contact element connected to the optical element, a groove element connected to the manipulator frame, on which the contact element rests,and a locking unit for mechanically connecting the contact element to the groove element in the closed state of the clamping assembly, or wherein the contact element is connected to the manipulator frame and the groove element to the optical element, wherein the contact element has a spherical cap-shaped contact section and the groove element has a V-shaped groove with two contact surfaces oriented obliquely to one another, wherein the contact section rests on the contact surfaces, or wherein the contact element and the groove element abut one another at a surface contact or at a tetrahedron-shaped contact, wherein the locking unit has a locking element and a drive element for driving the locking element, and wherein the drive element is designed to move the locking element from a locking state in which the locking element engages behind the contact element,in order to establish a positive connection between the locking element and the contact element, into an unlocking state in which the positive connection between the locking element and the contact element is released, and vice versa.

[0008] Using the clamping assembly, the optical assembly can be connected and disconnected from the manipulator frame as often as required. This allows for field replacement of the optical assembly.

[0009] The optical system is suitable for both EUV lithography and DUV lithography. The optical system can be a projection optics unit or part of a projection optics unit of the projection exposure system. However, the optical system can also be an illumination optics unit or part of an illumination optics unit of the projection exposure system. The optical system can comprise several optical assemblies. The optical assembly is a mirror or a mirror module or can be referred to as such. The optical assembly can also be a mirror assembly or be referred to as such.

[0010] The optical element is, in particular, a mirror, preferably a DUV mirror or an EUV mirror. However, the optical element can also be a lens. The optical element comprises an optically effective surface, in particular a mirror surface, which is designed to reflect illumination radiation, in particular DUV radiation or EUV radiation. The optically effective surface can be realized with the aid of a coating.

[0011] In addition to the optical element, the optical assembly can have a mount that supports the optical element. For example, the optical element is glued to the mount. However, the mount is optional. If no mount is provided, the clamping assembly can connect the optical element directly to the manipulator frame. The fact that the manipulator frame "supports" the optical assembly means, in this case, in particular, that the manipulator frame can absorb the weight of the optical assembly or optical element.

[0012] Preferably, several actuators, for example three, are assigned to the manipulator frame, with the aid of which the position of the manipulator frame together with the optical assembly can be changed or adjusted. The manipulator frame is thus actuatable. The optical assembly has, in particular, six degrees of freedom, namely three translational degrees of freedom along a first spatial direction or x-direction, a second spatial direction or y-direction, and a third spatial direction or z-direction, as well as three rotational degrees of freedom about the x-direction, the y-direction, and the z-direction. This means that a position and an orientation of the optical assembly can be determined or described using the six degrees of freedom.

[0013] The "position" of the optical assembly refers in particular to its coordinates in the x-direction, the y-direction, and the z-direction. The "orientation" of the optical assembly refers in particular to its tilt in these three directions. This means that the optical assembly can be tilted in the x-direction, the y-direction, and / or the z-direction. This results in the six degrees of freedom for the position and orientation of the optical assembly. An "attitude" of the optical assembly encompasses both its position and its orientation. The term "attitude" can therefore be replaced by the phrase "position and orientation," and vice versa.

[0014] With the help of the actuators, the manipulator frame, including the optical assembly, can be adjusted or aligned. The manipulator frame can therefore be referred to as an adjustable or alignable manipulator frame. "Adjusting" or "aligning" refers in particular to changing the position of the optical assembly or the manipulator frame including the optical assembly. Alternatively, the manipulator frame including the optical assembly can also be unactuated.

[0015] Preferably, a plurality of clamping assemblies are provided. In particular, exactly three clamping assemblies can be provided, which are arranged evenly distributed around a symmetry or central axis of the optical assembly or the optical element. For example, the clamping assemblies can be offset by 120° from one another. The clamping assemblies can be screwed to the manipulator frame, for example. It is possible for at least one of the clamping assemblies to be removable from the manipulator frame. This simplifies the replacement of the optical assembly. This applies when replacement takes place in a plane spanned by the x-direction and the y-direction. Replacement in the z-direction is also possible without a removable clamping assembly.

[0016] In the closed state, the clamping assembly preferably applies a clamping force to the optical assembly, in particular to the mount of the optical assembly or to a mount strut mounted on the mount. The mount strut preferably has two decoupling planes that prevent parasitic forces from being applied to the optical element. Accordingly, the clamping assembly should be prevented from pressing directly on the mount. Decoupling elements, for example in the form of solid-state joints, can be provided for decoupling.

[0017] In the open state, the clamping force is not applied to the optical assembly. The optical assembly is therefore forceless or force-free in the open state of the clamping assembly. "Forceless" or "force-free" in this context means that the clamping force is not effective. However, this does not preclude the weight of the optical assembly from acting on the manipulator frame even in the open state. A "mechanical connection" between the optical assembly and the manipulator frame is understood in particular to mean that a detachable connection is established between the optical assembly and the manipulator frame, which connects the optical assembly and the manipulator frame in such a way that the optical assembly cannot be separated from the manipulator frame when the clamping assembly is closed. The mechanical connection is thus realized by the clamping assembly.The mechanical connection can be released by opening the clamping assembly. Once the clamping assembly is in the open position, the optical assembly can be released from the manipulator frame. A linear contact is established between the mounting strut and the clamping assembly. A force flow runs through arm sections of the mounting struts into the manipulator frame.

[0018] The mechanical connection is, in particular, a positive connection. A positive connection is created by the interlocking or engaging of two connecting partners, in this case the clamping assembly and the optical assembly, in particular the mount of the optical assembly. A positive connection can be established and released as often as desired. The positive connection between the clamping assembly and the optical assembly is established by moving the clamping assembly from the open state to the closed state. The positive connection is released by moving the clamping assembly from the closed state to the open state.

[0019] In this case, the mechanical connection can be understood in particular as a detachable clamping connection established with the aid of the clamping assembly. The mechanical connection between the optical assembly and the manipulator frame can be established in particular by the clamping assembly engaging behind or engaging into the optical assembly, or by applying the clamping force to the optical assembly.

[0020] The clamping assembly has a contact element connected to the optical element, a groove element connected to the manipulator frame, on which the contact element rests, and a locking unit for mechanically connecting the contact element to the groove element when the clamping assembly is closed. Alternatively, the contact element is connected to the manipulator frame and the groove element is connected to the optical element. For example, the contact element is glued to a rear side of the optical element. Alternatively, the contact element can also be arranged on the front side of the optical element, in particular next to the optically active surface. The groove element is in particular screwed to the manipulator frame. Preferably, a plurality of contact elements and a plurality of groove elements are provided. In particular, exactly three contact elements and exactly three groove elements can be provided, with each contact element being assigned a groove element.For example, each groove element can be assigned two of the previously mentioned degrees of freedom. However, it is not necessary to provide exactly three contact elements and three groove elements. The clamping assembly can also be used to restrict certain degrees of freedom. For example, a tetrahedron can be provided. With six contact surfaces, six degrees of freedom can be defined. However, internal degrees of freedom can also be defined. Any number of clamping assemblies can be provided for this purpose. With the help of the locking unit, it is possible to create a positive connection between the contact element and the groove element.

[0021] The contact element has a spherical cap-shaped contact section, and the groove element has a V-shaped groove with two contact surfaces oriented at an angle to each other, with the contact section resting on the contact surfaces. Alternatively, the contact element and the groove element are in contact with each other at a surface contact or at a tetrahedron-shaped contact.

[0022] In particular, the contact section rests on the contact surfaces with two point-like contacts. A "spherical cap" is understood here to mean a section of a sphere. Alternatively, the contact section can also be cylindrical. A decoupling element is preferably arranged between the optical element and the contact element. In particular, a receiving section of the contact element can also be provided between the decoupling element and the contact section. This means that the contact section is coupled to the decoupling element via the receiving section. The decoupling element serves to mechanically decouple the contact section from the optical element. The decoupling element can, for example, have one or more universal joints and / or leaf spring elements and / or solid-state joints.In this context, a "rigid joint" is understood to be a region of a component that allows relative movement between two rigid body regions through bending and / or torsion. In this case, for example, the receiving section and the optical element can function as rigid body regions, between which the decoupling element is provided as a rigid body joint. For example, the two contact surfaces are inclined at an angle of 90° to each other.

[0023] The locking unit has a locking element and a drive element for driving the locking element, wherein the drive element is configured to move the locking element from a locking state, in which the locking element engages behind the contact element to establish a positive connection between the locking element and the contact element, into an unlocking state, in which the positive connection between the locking element and the contact element is released, and vice versa.

[0024] The positive connection prevents parasitic effects from being transmitted to the optical element due to the application of force. For this reason, the aforementioned decoupling planes are provided. The drive element is particularly suitable for rotating the locking element about a central or symmetry axis of the clamping assembly and for moving it linearly along the symmetry axis. The drive element can, for example, comprise an electric, hydraulic, pneumatic drive, or a piezo drive. The drive element can also have a gear. In the locked state, the locking element engages around or behind the contact section of the contact element. In particular, in the locked state, the locking element is at least partially received in the receiving section of the contact element.By appropriately controlling the drive element, the contact element is pressed against the groove element with the aforementioned clamping force. Because the contact element is directly connected to the optical element and mechanically decoupled from it by the decoupling element, the clamping force is not introduced into the optical element. The clamping force can be measured using a sensor if necessary. A feedback loop can then be generated, which enables control via the clamping force. Furthermore, anomalies can be detected.

[0025] According to one embodiment, the contact element has an opening, wherein the locking element has a head portion, wherein the head portion engages behind the contact element in the locked state in order to establish the positive connection between the locking element and the contact element, and wherein the head portion can only be passed through the opening in the unlocked state. In particular, the contact element can be placed onto the groove element in the unlocked state. The locking element is threaded through the opening provided in the contact element. In particular, the opening is provided on or in the contact portion of the contact element. Preferably, the opening in the contact portion is in the shape of an elongated hole. The opening can have an oval or a rectangular geometry.However, the geometry of the opening can be chosen arbitrarily, as long as the head section of the locking element can engage behind the contact element. For this purpose, the opening can preferably be designed axially or asymmetrically to ensure the functionality explained above. The head section is preferably cuboid-shaped. The head section is connected to the drive element by means of a cylindrical shaft section. The locking element is guided through an opening provided centrally in the groove element. However, only the shaft section can be guided through this opening. The head section can preferably not be guided through the opening in the groove element. The opening provided on the contact element is preferably rectangular and has a geometry such that the head section can be guided through the opening in the contact element in the unlocked state.By rotating the head section relative to the opening, the head section engages behind the contact section of the contact element so that the contact element can no longer be lifted off the groove element.

[0026] According to a further embodiment, the clamping assembly comprises a clamping element and a drive element for moving the clamping element in order to move the clamping assembly from the closed state to the open state and vice versa.

[0027] The drive element is particularly suitable for linear movement of the clamping element. The clamping element is particularly designed to apply the clamping force to the respective mounting strut of the optical assembly. The drive element can comprise an electric, pneumatic, hydraulic, or piezoelectric drive. With the aid of the drive element, the clamping element can be lifted from the respective mounting strut and lowered back onto it in order to apply the clamping force to the mounting strut. According to a further embodiment, the clamping element is operatively connected to the drive element by means of a threaded spindle.

[0028] The threaded spindle, in particular, has an external thread. The clamping element has an internal thread corresponding to the external thread of the threaded spindle, which is provided in a threaded bore in the clamping element. When the threaded spindle rotates with the aid of the drive element, the clamping element moves up or down along the threaded spindle. The threaded spindle is mounted on the manipulator frame. For this purpose, a plate-shaped base element can be provided on which the threaded spindle is mounted. The base element can be screwed to the manipulator frame.

[0029] According to a further embodiment, the clamping element and / or the threaded spindle are arranged at least in sections within a bellows.

[0030] The bellows can be made of rubber, for example. However, the bellows can also be made of a metallic material. Multiple bellows can be provided. Preferably, at least the threaded spindle is positioned entirely within the bellows. The clamping element can protrude from the bellows. With the help of the bellows, any particles that may be formed during rotation of the threaded spindle relative to the clamping element can be retained within the bellows.

[0031] According to a further embodiment, the clamping element is operatively connected to the drive element by means of an eccentric element.

[0032] In this case, a rotational axis of the eccentric element is oriented perpendicular to a direction of movement of the clamping element, in particular a clamping section of the clamping element. For example, the clamping element has a cylindrical or pot-shaped receiving section into which the eccentric element projects. The receiving section can have a contact area on the inside that projects radially into the receiving section and is always in contact with the eccentric element. If the eccentric element rotates about its rotational axis, this moves the contact area and thus also the clamping element. The clamping element can be suspended from a fixed world by means of leaf spring elements. The fixed world can be connected to the manipulator frame or be part of the manipulator frame. According to a further embodiment, the clamping element is coupled to the eccentric element by means of a spring element, wherein the spring element preloads the clamping element against the eccentric element.

[0033] This means, in particular, that the spring element elongates when the eccentric element is moved from a non-deflected state to a deflected state. The spring element is, in particular, a tension spring. The spring element can be a cylindrical spring. The spring element is coupled to the eccentric element, in particular, at the rotational axis of the eccentric element. The spring element is also connected internally to the receiving section of the clamping element. The spring element is thus positioned within the receiving section of the clamping element. The eccentric element can have an oval or egg-shaped geometry in cross-section.

[0034] According to a further embodiment, the clamping assembly comprises a clamping element and a hydraulic cylinder for moving the clamping element in order to move the clamping assembly from the closed state to the open state and vice versa.

[0035] In particular, the clamping element is moved linearly, i.e., along a straight line. The hydraulic cylinder can be single-acting or double-acting. "Single-acting" means that the hydraulic cylinder can be extended, for example, with the aid of a corresponding hydraulic pressure from a hydraulic fluid contained in the hydraulic cylinder, while retracting the hydraulic cylinder occurs, for example, purely by gravity. "Double-acting" accordingly means that the hydraulic cylinder can be both extended and retracted with the aid of hydraulic pressure. In the case of a single-acting hydraulic cylinder, it can be assigned a spring element suitable for preloading a piston of the hydraulic cylinder. However, the hydraulic cylinder can also be suitable for tilting the clamping element in order to move the clamping assembly from the closed state to the open state and vice versa.In this case, the clamping element is pivoted about a rotational axis. The hydraulic cylinder comprises, in particular, a housing in which the piston, which is coupled to the clamping element, is mounted for linear movement. The housing is filled with the aforementioned hydraulic fluid, which is configured to move the piston within the housing. The housing can be connected to a hydraulic motor, for example in the form of a pump, via hydraulic lines. According to a further embodiment, the clamping element is suspended from a fixed base by means of elastically deformable leaf spring elements.

[0036] As previously mentioned, the fixed world can be connected to the manipulator frame or be part of the manipulator frame. "Fixed world" in this context specifically means that the fixed world is fixed relative to the clamping element. The elastically deformable leaf spring elements act as flexural joints and enable linear movement of the clamping element toward or away from the respective mounting strut.

[0037] According to a further embodiment, the clamping element is suspended from a frame by means of first leaf spring elements, wherein the frame is suspended from the fixed world by means of second leaf spring elements.

[0038] In this case, a set of first leaf spring elements and a set of second leaf spring elements are provided. The first leaf spring elements couple the clamping element to the frame, which is suspended from the fixed world via the second leaf spring elements. The frame is further coupled via another leaf spring element to another frame, which is also operatively connected to the fixed world. In addition, the clamping element is also coupled to the latter frame by means of another leaf spring element.

[0039] According to a further embodiment, the optical assembly comprises a mount with a mount strut which is supported on the manipulator frame, wherein the clamping element applies a clamping force to the mount strut in the closed state of the clamping assembly.

[0040] The number of mounting struts is fundamentally arbitrary. Preferably, exactly three mounting struts are provided. The mounting struts can be offset from one another at an angle of 120°. Exactly one mounting strut can be assigned to each clamping assembly. This means that preferably three clamping assemblies are provided. In the event that no mounting struts are provided, the clamping assembly can, as previously mentioned, engage directly with the optical element. In this case, the previously mentioned contact element can be glued directly to the optical element. However, decoupling is important to prevent parasitic forces from being introduced into the optical element. The fact that the mounting struts are "supported" on the manipulator frame can, in this case, mean, in particular, that the weight of the optical assembly is transferred into the manipulator frame via the mounting struts.In particular, "supporting" can also simply mean that the mounting strut, especially arm sections of the mounting strut, contact the manipulator frame, especially a frame strut of the manipulator frame. Ideally, this is only a point contact to prevent static overdetermination. In the event that the stresses are too high for point contacts, surface contacts or line contacts, for example, can also be provided.

[0041] Furthermore, a projection exposure system with such an optical system is proposed.

[0042] The optical system is preferably a projection optics system of the projection exposure system. However, the optical system can also be an illumination system. The projection exposure system can be an EUV lithography system. EUV stands for "Extreme Ultraviolet" and refers to a wavelength of the working light between 0.1 nm and 30 nm. The projection exposure system can also be a DUV lithography system. DUV stands for "Deep Ultraviolet" and refers to a wavelength of the working light between 30 nm and 250 nm.

[0043] "One" in this case is not necessarily limited to a single element. Rather, multiple elements, such as two, three, or more, may also be included. Any other counting term used here should not be understood as implying a limitation to the exact number of elements mentioned. Rather, numerical deviations upwards and downwards are possible, unless otherwise stated.

[0044] The embodiments and features described for the optical system apply accordingly to the proposed projection exposure system and vice versa.

[0045] Further possible implementations of the invention also include combinations of features or embodiments described above or below with respect to the exemplary embodiments that are not explicitly mentioned. In this case, the person skilled in the art will also add individual aspects as improvements or additions to the respective basic form of the invention.

[0046] Further advantageous embodiments and aspects of the invention are the subject of the dependent claims and the exemplary embodiments of the invention described below. The invention is explained in more detail below using preferred embodiments with reference to the accompanying figures.

[0047] Fig. 1 shows a schematic meridional section of an embodiment of a projection exposure system for EUV projection lithography!

[0048] Fig. 2 shows a schematic view of an embodiment of a projection exposure system for DUV projection lithography!

[0049] Fig. 3 shows a schematic plan view of an embodiment of an optical assembly for the projection exposure apparatus according to Fig. 1 or according to Fig. 2;

[0050] Fig. 4 shows a schematic rear view of the optical assembly according to Fig. 3;

[0051] Fig. 5 shows a schematic view of an optical system for the projection exposure apparatus according to Fig. 1 or Fig. 2;

[0052] Fig. 6 shows a further schematic view of the optical system according to Fig. 5;

[0053] Fig. 7 shows a schematic sectional view of an embodiment of a clamping assembly for the optical system according to Fig. 5;

[0054] Fig. 8 shows a further schematic sectional view of the clamping assembly according to Fig. 7!

[0055] Fig. 9 shows a schematic bottom view of the clamping assembly according to Fig. 7;

[0056] Fig. 10 shows a schematic plan view of the clamping assembly according to Fig. 7;

[0057] Fig. 11 shows a schematic sectional view of another embodiment of a clamping assembly for the optical system according to Fig. 5;

[0058] Fig. 12 shows a further schematic sectional view of the clamping assembly according to Fig. 11;

[0059] Fig. 13 shows a schematic sectional view of another embodiment of a clamping assembly for the optical system according to Fig. 5; Fig. 14 shows another schematic sectional view of the clamping assembly according to Fig. 13;

[0060] Fig. 15 shows a schematic sectional view of another embodiment of a clamping assembly for the optical system according to Fig. 5;

[0061] Fig. 16 shows a further schematic sectional view of the clamping assembly according to Fig. 15;

[0062] Fig. 17 shows a schematic sectional view of another embodiment of a clamping assembly for the optical system according to Fig. 5;

[0063] Fig. 18 shows a further schematic sectional view of the clamping assembly according to Fig. 17;

[0064] Fig. 19 shows a schematic sectional view of another embodiment of a clamping assembly for the optical system according to Fig. 5; and

[0065] Fig. 20 shows a schematic sectional view of another embodiment of a clamping assembly for the optical system according to Fig. 5.

[0066] In the figures, identical or functionally equivalent elements are provided with the same reference numerals unless otherwise indicated. Furthermore, it should be noted that the representations in the figures are not necessarily to scale.

[0067] Fig. 1 shows an embodiment of a projection exposure system 1A (lithography system), in particular an EUV lithography system. One embodiment of an illumination system 2 of the projection exposure system 1A has, in addition to a light or radiation source 3, an illumination optics 4 for illuminating an object field 5 in an object plane 6. In an alternative embodiment, the light source 3 can also be provided as a separate module from the rest of the illumination system 2. In this case, the illumination system 2 does not include the light source 3.

[0068] A reticle 7 arranged in the object field 5 is exposed. The reticle 7 is held by a reticle holder 8. The reticle holder 8 can be displaced via a reticle displacement drive 9, particularly in a scanning direction. For illustrative purposes, Fig. 1 shows a Cartesian coordinate system with an x-direction x, a y-direction y, and a z-direction z. The x-direction x runs perpendicular to the drawing plane. The y-direction y runs horizontally, and the z-direction z runs vertically. In Fig. 1, the scanning direction runs along the y-direction y. The z-direction z runs perpendicular to the object plane 6.

[0069] The projection exposure system 1A comprises a projection optics 10. The projection optics 10 serves to image the object field 5 into an image field 11 in an image plane 12. The image plane 12 runs parallel to the object plane 6. Alternatively, an angle other than 0° between the object plane 6 and the image plane 12 is also possible.

[0070] A structure on the reticle 7 is imaged onto a light-sensitive layer of a wafer 13 arranged in the image plane 12 in the region of the image field 11. The wafer 13 is held by a wafer holder 14. The wafer holder 14 can be displaced, in particular along the y-direction y, via a wafer displacement drive 15. The displacement of the reticle 7, on the one hand, via the reticle displacement drive 9, and the displacement of the wafer 13, on the other hand, via the wafer displacement drive 15, can be synchronized with each other.

[0071] The light source 3 is an EUV radiation source. The light source 3 emits, in particular, EUV radiation 16, which is also referred to below as useful radiation, illumination radiation, or illumination light. The useful radiation 16 has, in particular, a wavelength in the range between 5 nm and 30 nm. The light source 3 can be a plasma source, for example an LPP source (Laser Produced Plasma, plasma generated with the aid of a laser) or a DPP source (Gas Discharged Produced Plasma, plasma generated by gas discharge). It can also be a synchrotron-based radiation source. The light source 3 can be a free-electron laser (FEL).

[0072] The illumination radiation 16 emanating from the light source 3 is focused by a collector 17. The collector 17 can be a collector with one or more ellipsoidal and / or hyperboloidal reflection surfaces. The at least one reflection surface of the collector 17 can be exposed to the illumination radiation 16 at grazing incidence (Gl), i.e., at angles of incidence greater than 45°, or at normal incidence (NI), i.e., at angles of incidence less than 45°. The collector 17 can be structured and / or coated, on the one hand, to optimize its reflectivity for the useful radiation and, on the other hand, to suppress stray light.

[0073] After the collector 17, the illumination radiation 16 propagates through an intermediate focus in an intermediate focal plane 18. The intermediate focal plane 18 can represent a separation between a radiation source module, comprising the light source 3 and the collector 17, and the illumination optics 4.

[0074] The illumination optics 4 comprises a deflecting mirror 19 and, downstream of this in the beam path, a first facet mirror 20. The deflecting mirror 19 can be a flat deflecting mirror or, alternatively, a mirror with a beam-influencing effect beyond the pure deflection effect. Alternatively or additionally, the deflecting mirror 19 can be designed as a spectral filter that separates a useful light wavelength of the illumination radiation 16 from stray light of a different wavelength. If the first facet mirror 20 is arranged in a plane of the illumination optics 4 that is optically conjugate to the object plane 6 as the field plane, it is also referred to as a field facet mirror. The first facet mirror 20 comprises a plurality of individual first facets 21, which can also be referred to as field facets. Only a few of these first facets 21 are shown in Fig. 1 as examples.

[0075] The first facets 21 can be designed as macroscopic facets, in particular as rectangular facets or as facets with an arcuate or partially circular edge contour. The first facets 21 can be designed as flat facets or, alternatively, as convexly or concavely curved facets.

[0076] As is known, for example, from DE 10 2008 009 600 A1, the first facets 21 themselves can also be composed of a plurality of individual mirrors, in particular a plurality of micromirrors. The first facet mirror 20 can, in particular, be designed as a microelectromechanical system (MEMS system). For details, reference is made to DE 10 2008 009 600 A1.

[0077] Between the collector 17 and the deflecting mirror 19, the illumination radiation 16 runs horizontally, i.e. along the y-direction y.

[0078] In the beam path of the illumination optics 4, a second facet mirror 22 is arranged downstream of the first facet mirror 20. If the second facet mirror 22 is arranged in a pupil plane of the illumination optics 4, it is also referred to as a pupil facet mirror. The second facet mirror 22 can also be arranged at a distance from a pupil plane of the illumination optics 4. In this case, the combination of the first facet mirror 20 and the second facet mirror 22 is also referred to as a specular reflector. Specular reflectors are known from US 2006 / 0132747 A1, EP 1 614 008 B1, and US Pat. No. 6,573,978.

[0079] The second facet mirror 22 comprises a plurality of second facets 23. In the case of a pupil facet mirror, the second facets 23 are also referred to as pupil facets.

[0080] The second facets 23 can also be macroscopic facets, which can, for example, be round, rectangular, or hexagonal, or alternatively facets composed of micromirrors. Reference is also made to DE 10 2008 009 600 A1 in this regard.

[0081] The second facets 23 can have planar or alternatively convex or concave curved reflection surfaces.

[0082] The illumination optics 4 thus form a double-faceted system. This basic principle is also known as a honeycomb condenser (EnglJ Fly's Eye Integrator).

[0083] It may be advantageous to arrange the second facet mirror 22 not exactly in a plane that is optically conjugate to a pupil plane of the projection optics 10. In particular, the second facet mirror 22 can be arranged tilted relative to a pupil plane of the projection optics 10, as described, for example, in DE 10 2017 220 586 A1.

[0084] With the help of the second facet mirror 22, the individual first facets 21 are imaged into the object field 5. The second facet mirror 22 is the last beam-forming mirror or actually the last mirror for the illumination radiation 16 in the beam path before the object field 5.

[0085] In a further embodiment of the illumination optics 4 (not shown), a transmission optics can be arranged in the beam path between the second facet mirror 22 and the object field 5, which transmission optics contributes in particular to the imaging of the first facets 21 into the object field 5. The transmission optics can have exactly one mirror, but alternatively also two or more mirrors, which are arranged one behind the other in the beam path of the illumination optics 4. The transmission optics can in particular comprise one or two mirrors for normal incidence (Ni mirrors, normal incidence mirrors) and / or one or two mirrors for grazing incidence (Gl mirrors, grazing incidence mirrors).

[0086] In the embodiment shown in Fig. 1, the illumination optics 4 has exactly three mirrors after the collector 17, namely the deflection mirror 19, the first facet mirror 20 and the second facet mirror 22.

[0087] In a further embodiment of the illumination optics 4, the deflection mirror 19 can also be omitted, so that the illumination optics 4 can then have exactly two mirrors after the collector 17, namely the first facet mirror 20 and the second facet mirror 22.

[0088] The imaging of the first facets 21 by means of the second facets 23 or with the second facets 23 and a transmission optics into the object plane 6 is usually only an approximate imaging.

[0089] The projection optics 10 comprises a plurality of mirrors Mi, which are numbered according to their arrangement in the beam path of the projection exposure system 1A.

[0090] In the example shown in Fig. 1, the projection optics 10 comprises six mirrors M1 to M6. Alternatives with four, eight, ten, twelve, or a different number of mirrors M1 are also possible. The projection optics 10 is a double-obscured optic. The penultimate mirror M5 and the last mirror M6 each have a passage opening for the illumination radiation 16. The projection optics 10 has an image-side numerical aperture that is greater than 0.5 and can also be greater than 0.6, for example, 0.7 or 0.75.

[0091] Reflection surfaces of the mirrors Mi can be designed as freeform surfaces without a rotational symmetry axis. Alternatively, the reflection surfaces of the mirrors Mi can be designed as aspherical surfaces with exactly one rotational symmetry axis of the reflection surface shape. The mirrors Mi, like the mirrors of the illumination optics 4, can have highly reflective coatings for the illumination radiation 16. These coatings can be designed as multilayer coatings, in particular with alternating layers of molybdenum and silicon. The projection optics 10 has a large object-image offset in the y-direction y between a y-coordinate of a center of the object field 5 and a y-coordinate of the center of the image field 11. This object-image offset in the y-direction y can be approximately as large as a z-distance between the object plane 6 and the image plane 12.

[0092] The projection optics 10 can, in particular, be anamorphic. It has, in particular, different magnifications ßx, ßy in the x and y directions x, y. The two magnifications ßx, ßy of the projection optics 10 are preferably (ßx, ßy) = (+ / - 0.25, + / - 0.125). A positive magnification ß means an image without image inversion. A negative sign for the magnification ß means an image with image inversion.

[0093] The projection optics 10 thus leads to a reduction in the ratio 44 in the x-direction x, i.e. in the direction perpendicular to the scanning direction.

[0094] The projection optics 10 leads to a reduction of 84 in the y-direction y, i.e. in the scanning direction.

[0095] Other magnifications are also possible. Magnifications with the same sign and absolutely identical in the x and y directions (x, y), for example, with absolute values ​​of 0.125 or 0.25, are also possible.

[0096] The number of intermediate image planes in the x- and y-directions x, y in the beam path between the object field 5 and the image field 11 can be the same or can be different, depending on the design of the projection optics 10. Examples of projection optics with different numbers of such intermediate images in the x- and y-directions x, y are known from US 2018 / 0074303 A1.

[0097] Each of the second facets 23 is assigned to exactly one of the first facets 21 to form a respective illumination channel for illuminating the object field 5. This can, in particular, result in illumination according to the Köhler principle. The far field is divided into a plurality of object fields 5 using the first facets 21. The first facets 21 generate a plurality of images of the intermediate focus on the second facets 23 assigned to them.

[0098] The first facets 21 are each assigned a second facet

[0099] 23 are imaged onto the reticle 7 in an overlapping manner to illuminate the object field 5. The illumination of the object field 5 is, in particular, as homogeneous as possible. It preferably has a uniformity error of less than 2%. Field uniformity can be achieved by superimposing different illumination channels.

[0100] By arranging the second facets 23, the illumination of the entrance pupil of the projection optics 10 can be geometrically defined. By selecting the illumination channels, in particular the subset of the second facets 23 that guide light, the intensity distribution in the entrance pupil of the projection optics 10 can be adjusted. This intensity distribution is also referred to as the illumination setting or illumination pupil fill.

[0101] A likewise preferred pupil uniformity in the area of ​​defined illuminated sections of an illumination pupil of the illumination optics 4 can be achieved by redistributing the illumination channels.

[0102] Further aspects and details of the illumination of the object field 5 and in particular of the entrance pupil of the projection optics 10 are described below.

[0103] The projection optics 10 can, in particular, have a homocentric entrance pupil. This can be accessible. It can also be inaccessible.

[0104] The entrance pupil of the projection optics 10 cannot usually be precisely illuminated with the second facet mirror 22. When imaging the projection optics 10, which telecentrically images the center of the second facet mirror 22 onto the wafer 13, the aperture rays often do not intersect at a single point. However, a surface can be found in which the pairwise determined spacing of the aperture rays is minimized. This surface represents the entrance pupil or a surface conjugate to it in spatial space. In particular, this surface exhibits a finite curvature.

[0105] It is possible that the projection optics 10 have different entrance pupil positions for the tangential and sagittal beam paths. In this case, an imaging element, in particular an optical component of the transmission optics, should be provided between the second facet mirror 22 and the reticle 7. With the help of this optical element, the different positions of the tangential entrance pupil and the sagittal entrance pupil can be taken into account. In the arrangement of the components of the illumination optics 4 shown in Fig. 1, the second facet mirror 22 is arranged in a surface conjugated to the entrance pupil of the projection optics 10. The first facet mirror 20 is arranged tilted relative to the object plane 6. The first facet mirror 20 is arranged tilted relative to an arrangement plane defined by the deflection mirror 19.The first facet mirror 20 is arranged tilted to an arrangement plane which is defined by the second facet mirror 22.

[0106] Fig. 2 shows a schematic view of a projection exposure system 1B, in particular a DUV lithography system, which comprises a beam shaping and illumination system 24 (also referred to herein as "illumination optics") and a projection optics system 25 (also referred to herein as "projection lens"). DUV stands for "deep ultraviolet" (DUV) and denotes a wavelength of the working light between 30 nm and 250 nm.

[0107] The beam-shaping and illumination system 24 and the projection optics 25 are preferably each arranged in a vacuum housing (not shown). Each vacuum housing is evacuated using an evacuation device (not shown). The vacuum housings are surrounded by a machine room (not shown), in which drive devices for mechanically moving or adjusting optical elements can be provided. Furthermore, electrical controls and the like can also be arranged in the machine room.

[0108] The projection exposure system 1B has a light source 26. An ArF excimer laser, for example, can be provided as the light source 6, which emits radiation 27 in the DUV range at, for example, 193 nm. In the beam-shaping and illumination system 24, the radiation 27 is focused, and a desired operating wavelength (working light) is filtered out of the radiation 27. The beam-shaping and illumination system 24 can have optical elements (not shown), such as mirrors or lenses.

[0109] After passing through the beam-shaping and illumination system 24, the radiation 27 is directed onto a photomask (EnglJ reticle) 28. The photomask 28 is designed as a transmissive optical element and can be arranged outside the beam-shaping and illumination system 24 and the projection optics 25. The photomask 28 has a structure which is imaged in reduced size onto a wafer 29 by means of the projection optics 25. The projection optics 25 has a plurality of lenses 30, 31, 32 and / or mirrors 33, 34 for imaging the photomask 28 onto the wafer 29. Individual lenses 30, 31, 32 and / or mirrors 33, 34 of the projection optics 25 can be arranged symmetrically to an optical axis 35 of the projection optics 25. It should be noted that the number of lenses 30, 31, 32 and mirrors 33, 34 shown here is purely exemplary and is not limited to the number shown.More or fewer lenses 30, 31, 32 and / or mirrors 33, 34 may also be provided.

[0110] An air gap between a final lens (not shown) and the wafer 29 can be replaced by a liquid medium 36 having a refractive index > 1. The liquid medium 36 can be, for example, ultrapure water. Such a setup is also referred to as immersion lithography and features increased photolithographic resolution. The medium 36 can also be referred to as an immersion liquid.

[0111] Fig. 3 shows a schematic top view of an embodiment of an optical assembly 100 for the projection exposure apparatus 1A, 1B. Fig. 4 shows a schematic rear view of the optical assembly 100. Fig. 5 shows a schematic view of an optical system 200 comprising the optical assembly 100. Reference is made to Figs. 3 to 5 simultaneously below.

[0112] The optical assembly 100 can be part of a projection optics system 10, 25 as previously explained. However, the optical assembly 100 can also be part of an illumination optics system 4 as previously mentioned or a beam shaping and illumination system 24 as previously explained. However, it is assumed below that the optical assembly 100 is part of such a projection optics system 10, 25. The optical assembly 100 is suitable for DUV lithography. However, the optical assembly 100 can also be suitable for EUV lithography.

[0113] The optical assembly 100 can be one of the mirrors M1 to M6, 33, 34 or one of the lenses 30, 31, 32. The optical assembly 100 can accordingly be a mirror or mirror module or can be referred to as such. The optical assembly 100 can be a mirror assembly or can be referred to as such. In particular, the optical assembly 100 can be an EUV mirror or a DUV mirror or can be referred to as such. The optical assembly 100 can be assigned the coordinate system comprising the x-direction x, the y-direction y, and the z-direction z. The x-direction x can also be referred to as the x-axis, the y-direction y can also be referred to as the y-axis, and the z-direction z can also be referred to as the z-axis.

[0114] The optical assembly 100 has a symmetry or central axis 102 that is oriented parallel to or coincides with the z-direction z. The optical assembly 100 can be constructed to be substantially rotationally symmetrical to the central axis 102. Two semi-axes 104, 106 are assigned to the optical assembly 100, which intersect the central axis 102. A radial direction R of the optical assembly 100 is oriented perpendicular to the central axis 102 and away from it. A circumferential direction U is oriented around the central axis 102.

[0115] The optical assembly 100 is exchangeable (swap). This means that the optical assembly 100 can be removed from the projection optics 10 described above and reinserted into it. Alternatively, the optical assembly 100 can also be replaced with another optical assembly 100. A corresponding replacement tool (not shown) can be provided for replacing the optical assembly 100. The replacement of the optical assembly 100 is preferably carried out "in the field," i.e., directly at the operating location of the projection exposure system 1A, 1B.

[0116] The optical assembly 100 has an optical element 108. The optical element 108 can be a mirror. The optical element 108 has an optically effective surface 110. The optically effective surface 110 is suitable for reflecting illumination radiation 16, in particular EUV radiation, during operation of the optical assembly 100. The optically effective surface 110 is a mirror surface. The optically effective surface 110 can be implemented using a coating.

[0117] Facing away from the optically effective surface 110, the optical element 108 has a rear side 112. The rear side 112 has no defined surface properties. This means, in particular, that the rear side 112 is not a mirror surface and therefore has no reflective properties. An outer surface 114 of the optical element 108 is provided between the optically effective surface 110 and the rear side 112. The outer surface 114 can be cylindrical. The outer surface 114 can be configured rotationally symmetrically to the central axis 102.

[0118] In addition to the optical element 108, the optical assembly 100 has a mount 116 that supports the optical element 108. The mount 116 is connected to the optical element 108, in particular to the outer surface 114. For this purpose, a material-to-material connection can be provided. In material-to-material connections, the connecting partners are held together by atomic or molecular forces. Material-to-material connections are non-detachable connections that can only be separated by destroying the connecting means and / or the connecting partners. Material-to-material connection can be achieved, for example, by gluing. This means that the mount 116 can be glued to the optical element 108, in particular to the outer surface 114.

[0119] The socket 116 is a one-piece component, in particular a one-piece material component. "One-piece" or "single-piece" means in particular that the socket 116 is not composed of different subcomponents, but rather that the socket 116 forms a continuous component. "One-piece material" in this case means in particular that the socket 116 is made entirely of the same material. For example, the socket 116 can be made of copper, aluminum, steel, or the like. The socket 116 can be manufactured using an additive or generative manufacturing process, in particular using a 3D printing process. Furthermore, the socket 116 can also be manufactured using an eroding process.

[0120] Mounting struts 118, 120, 122 are attached to the socket 116. In particular, a first socket strut 118, a second socket strut 120, and a third socket strut 122 are provided. The socket struts 118, 120, 122 are so-called A-struts or can be referred to as such. Preferably, exactly three socket struts 118, 120, 122 are provided, which are arranged offset by 120° from one another.

[0121] The socket struts 118, 120, 122 are firmly connected to the socket 116, in particular by screwing. In particular, each socket strut 118, 120, 122 has a housing to which the socket 116 is connected. The socket struts 118, 120, 122 are preferably constructed identically. Therefore, only the socket strut 118 will be discussed below. All statements regarding the socket strut 118 apply to the socket struts 120, 122, and vice versa.

[0122] As shown in Fig. 5, each mount strut 118 has two arm sections 124, 126. In addition to the optical assembly 100, the optical system 200 includes a manipulator frame 202 (EnglJ Manipulator Frame). The arm sections 124, 126 are supported on the manipulator frame 202. For this purpose, six frame struts 204, 206 are provided on the manipulator frame 202, only two of which are shown in Fig. 5. The optical assembly 100 is coupled to the manipulator frame 202 by means of the frame struts 204, 206. As previously mentioned, the inner ring 120 is not shown in Fig. 5.

[0123] Each mount strut 118, 120, 122 is assigned two of these frame struts 204, 206. This means that each mount strut 118, 120, 122 rests against two of these frame struts 204, 206. The mount struts 118, 120, 122 mechanically decouple the optical assembly 100 from the manipulator frame 202. For this purpose, each mount strut 118, 120, 122 has joints, in particular so-called solid-state joints. Each mount strut 118, 120, 122 has a support surface 128, 130, 132 (Fig. 4). The support surfaces 128, 130, 132 are oriented upward in the orientation shown in Fig. 5.

[0124] The optical assembly 100 is housed within a housing 208 of the optical system 200. The housing 208 can be a mirror housing or be designated as such. To replace the optical assembly 100, it must be removed from the housing 208. A new optical assembly 100 must then be inserted into the housing 208. The optical assembly 100 is replaced through an opening 210 provided in the housing 208. The opening 210 is closable. A suitable cover is provided for this purpose.

[0125] The optical system 200 comprises a plurality of clamping assemblies 212, 214, 216 (Fig. 4). In particular, exactly three clamping assemblies 212, 214, 216 are provided. Preferably, a first clamping assembly 212, a second clamping assembly 214, and a third clamping assembly 216 are provided. Each mount strut 118, 120, 122 is assigned a clamping assembly 212, 214, 216. The clamping assemblies 212, 214, 216 are shown only in a highly abstract manner in Figs. 4 and 5. The precise structural design of the clamping assemblies 212, 214, 216 will be explained later.

[0126] The clamping assemblies 212, 214, and 216 are arranged offset by 120° from one another. The clamping assemblies 212, 214, and 216 are designed differently, as explained below. At least one of the clamping assemblies 212, 214, and 216, for example, the clamping assembly 216, can be removable so that it does not hinder the replacement of the optical assembly 100 through the opening 210 of the housing 208.

[0127] With the aid of the clamping assemblies 212, 214, 216, a suitable clamping force F (Fig. 5) can be applied to the respective support surface 128, 130, 132 of the mount struts 118, 120, 122 in order to couple the optical assembly 100 to the manipulator frame 202. The respective clamping force F is introduced into the corresponding mount strut 118, 120, 122. Although the mount struts 118, 120, 122 are connected to the mount 116, they are mechanically decoupled from the mount 116 in such a way that the clamping forces F are not introduced into the mount 116 and thus into the optical element 108, but only into the mount struts 118, 120, 122.

[0128] The clamping assemblies 212, 214, 216 are connected to the manipulator frame 202, wherein at least one of the clamping assemblies 212, 214, 216, for example the clamping assembly 216, can be removable from the manipulator frame 202. For this purpose, a plug-in and / or screw connection can be provided, which enables easy assembly and disassembly of the removable clamping assembly 216.

[0129] Fig. 6 shows another view of the optical system 200.

[0130] The optical system 200 is shown only in a highly abstract manner in Fig. 6. For example, the mount struts 118, 120, 122 and the clamping assemblies 212, 214, 216, which couple the mount 116 to the manipulator frame 202, are not shown in Fig. 6. The mount 116 is also not shown in Fig. 6.

[0131] The optical assembly 100, or the optically effective surface 110 of the optical element 108 of the optical assembly 100, has six degrees of freedom, namely three translational degrees of freedom along the first spatial direction or x-direction x, the second spatial direction or y-direction y, and the third spatial direction or z-direction z, as well as three rotational degrees of freedom about the x-direction x, the y-direction y, and the z-direction z. This means that a position and an orientation of the optical assembly 100, or the optically effective surface 110, can be determined or described using the six degrees of freedom.

[0132] The "position" of the optical assembly 100 or the optically effective surface 110 refers in particular to its coordinates or the coordinates of a measuring point provided on the optical assembly 100 with respect to the x-direction x, the y-direction y, and the z-direction z. The "orientation" of the optical assembly 100 or the optically effective surface 110 refers in particular to its tilt with respect to the three directions x, y, and z. This means that the optical assembly 100 or the optically effective surface 110 can be tilted about the x-direction x, the y-direction y, and / or the z-direction z.

[0133] This results in six degrees of freedom for the position and orientation of the optical assembly 100 or the optically effective surface 110. A "position" of the optical assembly 100 or the optically effective surface 110 encompasses both its position and its orientation. The term "position" can therefore be replaced by the phrase "position and orientation," and vice versa.

[0134] In Fig. 6, an actual position IL of the optical assembly 100 or of the optical element 108 with the optically effective surface 110 is shown by solid lines, and a desired position SL of the optical assembly 100 or of the optical element 108 with the optically effective surface 110 is shown by dashed lines and the reference symbols 100', 108', 110'. An actual position IL of the manipulator frame 202 coupled to the optical assembly 100 is also shown by solid lines. A desired position SL of the manipulator frame 202 is shown by dashed lines and the reference symbol 202'.

[0135] The optical assembly 100, together with the manipulator frame 202, can be moved from the actual position IL to the target position SL and vice versa. For example, the optical assembly 100 or the optically effective surface 110 in the target position SL meets certain optical specifications or requirements that the optical assembly 100 or the optically effective surface 110 in the actual position IL does not meet.

[0136] To move the optical assembly 100 from the actual position IL to the desired position SL, the optical system 200 includes an adjustment device 218. The adjustment device 218 is configured to adjust the optical assembly 100. "Adjusting" or "aligning" in this context refers in particular to changing the position of the optical assembly 100. When changing the position of the optical assembly 100, the mounting struts 118, 120, 122 and the clamping assemblies 212, 214, 216, as well as the manipulator frame 202, are moved along with the optical assembly 100.

[0137] For example, the optical assembly 100 can be moved from the actual position IL to the desired position SL and vice versa using the adjustment device 218. The adjustment or alignment of the optical assembly 100 can thus be performed in all six aforementioned degrees of freedom using the adjustment device 218. The adjustment device 218 is a so-called hexapod or can be referred to as such.

[0138] The adjustment device 218 comprises a plurality of actuators 220, 222, 224, which are shown only very schematically in Fig. 6. The actuators 220, 222, 224 can also be referred to as actuators or adjusting elements. The actuators 220, 222, 224 can be so-called bipods or can be referred to as such. Preferably, exactly three actuators 220, 222, 224 are provided, which are arranged offset by 120° around the central axis 102. The actuators 220, 222, 224 are preferably of identical construction.

[0139] The actuators 220, 222, 224 are connected to the manipulator frame 202 by means of connection points 226, only one of which is provided with a reference symbol in Fig. 6. For example, an adhesive connection or a screw connection can be provided at each connection point 226. Preferably, exactly three connection points 226 are provided, with each connection point 226 being assigned an actuator 220, 222, 224. The optical assembly 100, in turn, is operatively connected to the manipulator frame 202 by means of the mounting struts 118, 120, 122 and the clamping assemblies 212, 214, 216.

[0140] Furthermore, each actuator 220, 222, 224 is coupled to a support structure 232 via two connection points 228, 230, only two of which are provided with a reference symbol in Fig. 6. The support structure 232 can be a force frame or another immovable structure. The support structure 232 can also be referred to as a fixed world.

[0141] With the help of the actuators 220, 222, 224, the manipulator frame 202 and the optical assembly 100 can be moved relative to the support structure 232. Each actuator 220, 222, 224 can be assigned two of the aforementioned degrees of freedom. With the three actuators 220, 222, 224, adjustment of the optical assembly 100 in all six degrees of freedom is thus possible.

[0142] The actuators 220, 222, 224 can be controlled by a control and regulation unit 234 of the adjustment device 218 in order to adjust the optical assembly 100 or the optical element 108. All actuators 220, 222, 224 are operatively connected to the control and regulation unit 234, so that the control and regulation unit 234 can adjust the optical assembly 100 together with the manipulator frame 202 in all six degrees of freedom by appropriately controlling the actuators 220, 222, 224. This can be done based on sensor signals from a sensor system (not shown), which can detect the actual position IL and the desired position SL of the optical assembly 100.

[0143] Fig. 7 shows a schematic sectional view of an embodiment of a clamping assembly 212A as mentioned above. Fig. 8 shows another schematic sectional view of the clamping assembly 212A. Fig. 9 shows a schematic bottom view of the clamping assembly 212A. Fig. 10 shows a schematic top view of the clamping assembly 212A. In the following, reference is made simultaneously to Figs. 7 to 10.

[0144] When using the clamping assembly 212A, the previously discussed mounting struts 118, 120, 122 are dispensable. The mounting 116 is also optional. This means that the clamping assembly 212A can be connected directly to the optical element 108. The clamping assembly 212A is assigned a central or symmetry axis 236, to which the clamping assembly 212A can be constructed to be substantially rotationally symmetrical.

[0145] The clamping assembly 212A comprises a groove element 238. The groove element 238 can be constructed rotationally symmetrically to the axis of symmetry 236. The groove element 238 comprises a rear side 240, at which the groove element 238 is connected to the manipulator frame 202. Facing away from the rear side 240, a V-shaped groove 242 with two contact surfaces 244, 246 oriented obliquely to one another is provided on the groove element 238. The groove element 238 is penetrated by an opening 248. The opening 248 can be a bore.

[0146] The clamping assembly 212A further comprises a contact element 250 configured to engage the contact surfaces 244, 246. The contact element 250 has a contact section 252. The contact section 252 can be cylindrical or spherical cap-shaped. A "spherical cap" is understood here to mean a section of a sphere. Preferably, the contact section 252 is semi-spherical. The contact section 252 is pierced by an opening 254. The opening 254 can be an elongated hole extending along the x-direction x. The contact section 252 has a rear side 256.

[0147] In addition to the contact section 252, the contact element 250 has a receiving section 258. The contact element 250 is connected with its receiving section 258 to a decoupling element 260. The decoupling element 260 serves to mechanically decouple the contact element 250 from the optical element 108. The decoupling element 260 can have a universal joint and / or leaf springs.

[0148] The decoupling element 260 can be connected, in particular glued, to the rear side 112 of the optical element 108. However, the decoupling element 260 can also be connected to the front side of the optical element 108, in particular next to the optically effective surface 110.

[0149] The clamping assembly 212A further includes a locking unit 262, with the aid of which the groove element 238 can be connected to the contact element 250. The locking unit 262 includes a drive element 264. The drive element 264 can comprise a hydraulic drive, a pneumatic drive, a piezoelectric element, and / or an electric motor. The drive element 264 can generate a linear movement along the axis of symmetry 236 as well as a rotational movement about the axis of symmetry 236.

[0150] The drive element 264 drives a locking element 266. The locking element 266 has a shaft portion 268 that is coupled to the drive element 264 and driven by it. The shaft portion 268 extends through the opening 248 of the groove element 238. The shaft portion 268 can have a circular cross-section. A head portion 270 is provided at the end of the shaft portion 268. The head portion 270 has a cuboid geometry. The locking element 266 thus has a hammer-shaped geometry.

[0151] The locking element 266 is driven by the drive element 264. The drive element 264 enables movement of the locking element 266 along the axis of symmetry 236 upwards and downwards, as shown in Fig.

[0152] 7 by means of a double arrow 272. Furthermore, the drive element 264 also enables rotation of the locking element 266 about the axis of symmetry 236, as indicated in Fig. 10 by means of a double arrow 274.

[0153] For example, the drive element 264 can be configured to move the locking element 266 by 90° from a locking state Z1, in which the head portion 270 cannot be passed through the opening 254 of the contact element 250, into an unlocking state Z2, in which the head portion 270 can be passed through the opening 254. In the unlocking state Z2, the head portion 270 is shown in Fig. 10 with dashed lines and provided with the reference numeral 270'. The clamping assembly 212A can be moved from an open state Z10 shown in Fig. 7 to a closed state Z20 shown in Fig. 8, and vice versa.In order to move the clamping assembly 212A from the open state Z10 to the closed state Z20, the drive element 264 rotates the locking element 266 into the unlocked state Z2 and extends it along the axis of symmetry 236 so far that the locking element 266 can be guided through the opening 254 of the contact element 250.

[0154] The contact portion 252 is placed on the contact surfaces 244, 246 of the groove element 238, wherein the locking element 266, which is in the unlocked state Z2, is threaded into the opening 254. When the contact portion 252 rests on the contact surfaces 244, 246 and the head portion 270 is located within the receiving portion 258, the locking element 266 is rotated and moved into the locked state ZI.

[0155] Furthermore, the head portion 270 arranged within the receiving portion 258 is pulled toward the rear side 256 of the contact from the portion 252, so that the head portion 270 engages behind the contact portion 252 and rests against the rear side 256. The head portion 270 now applies a suitable clamping force K to the contact element 250.

[0156] Eliminating the mounting struts 118, 120, 122 enables a simple structure and simplifies the replacement of the optical assembly 100. Both the replacement process itself and the adjustment of the optical assembly 100 can be improved in terms of both labor and time. The downtime of the projection exposure system 1A, 1B during the replacement of the optical assembly 100 can be significantly reduced. Because the decoupling element 260 is bonded to the optical element 108 and because the decoupling element 260 is provided, so-called surface figure deformations (SFD) are reduced.

[0157] The locking element 266 can be moved when the optical assembly 100 is already located within the housing 208. The locking element 266 can thus be actuated remotely within the housing 208. A tool for moving the clamping assembly 212A from the open state Z10 to the closed state Z20 and vice versa, or directly manipulating the clamping assembly 212A, is unnecessary.

[0158] Fig. 11 shows a schematic sectional view of another embodiment of a clamping assembly 212B. Fig. 12 shows another schematic sectional view of the clamping assembly 212B. Reference is made to Figs. 11 and 12 simultaneously below.

[0159] The clamping assembly 212B comprises a central or symmetry axis 276, to which the clamping assembly 212B can be constructed to be substantially rotationally symmetrical. The clamping assembly 212B comprises a base element 278, which can be rigidly connected, in particular screwed, to the manipulator frame 202. The base element 278 can be plate-shaped or frame-shaped. The base element 278 can be part of a housing (not shown) of the clamping assembly 212B.

[0160] A threaded spindle 282 is rotatably mounted on the base element 278 by means of a bearing 280, which can be a roller bearing or a plain bearing. The threaded spindle 282 has an external thread 284. The threaded spindle 282 has a first end portion 286, on which the bearing 280 is provided. The first end portion 286 faces the manipulator frame 202. A second end portion 288 of the threaded spindle 282 faces away from the manipulator frame 202.

[0161] At the second end portion 288, the threaded spindle 282 has another bearing 290, which may be a roller bearing or a plain bearing. The bearing 290 may be accommodated in the aforementioned housing of the clamping assembly 212B. The threaded spindle 282 is thus rotatably mounted about the axis of symmetry 276 by means of the bearings 280, 290.

[0162] The clamping assembly 212B has a drive element 292 coupled to the threaded spindle 282 to rotate it about the axis of symmetry 276. The drive element 292 can be an electric motor. The drive element 292 is positioned adjacent to the bearing 290. Thus, the drive element 292 is operatively connected to the threaded spindle 282 at the second end portion 288. The drive element 292 can be non-rotatably received in the aforementioned housing of the clamping assembly 212B.

[0163] The threaded spindle 282 is housed in a bellows 294. The bellows 294 retains any particles that may be formed during the rotation of the threaded spindle 282. The bellows 294 can be compressed and expanded along the axis of symmetry 276. The bellows 294 can be made of rubber or metal.

[0164] The threaded spindle 282 carries a clamping element 296. The clamping element 296 can be cuboid-shaped. The clamping element 296 has a threaded bore 298 through which the threaded spindle 282 is guided. Furthermore, the clamping element 296 has a contact surface 300 configured to bear against the support surface 128 of the socket strut 118.

[0165] By rotating the threaded spindle 282 with the aid of the drive element 292, the clamping element 296 can be moved upwards or downwards in the orientation of Fig. 11, as indicated by a double arrow 302.

[0166] The clamping assembly 212B can be moved from an open state Z10 shown in Fig. 11 to a closed state Z20 shown in Fig. 12, and vice versa. To move the clamping assembly 212B from the open state Z10 to the closed state Z20, the drive element 292 rotates the threaded spindle 282.

[0167] The clamping element 296 then moves downward in the orientation of Figs. 11 and 12 until the contact surface 300 of the clamping element 296 rests against the support surface 128 of the socket strut 118. The clamping element 296 then applies a clamping force K to the socket strut 118. The clamping force K can be adjusted or changed using the drive element 292.

[0168] The clamping assembly 212B simplifies the clamping of the optical assembly 100. The drive element 292 can rotate the threaded spindle 282 around the axis of symmetry 276 electrically, hydraulically, pneumatically, or with the aid of a piezoelectric element. Moving the clamping assembly 212B from the open state Z10 to the closed state Z20 can be remotely controlled from outside the housing 208. Direct or manual opening or closing of the clamping assembly 212B is unnecessary.

[0169] Sensors, such as torque sensors or force sensors, can be associated with the threaded spindle 282 and / or the drive element 292, enabling calibration of the drive element 292. The clamping force K can then be adjusted via the motor current and / or the motor voltage of the drive element 292. This enables direct control of the clamping force K. The provision of the bellows 294 makes the clamping assembly 212B cleanroom compatible, as the bellows 294 retains particles.

[0170] Fig. 13 shows a schematic sectional view of another embodiment of a clamping assembly 212C. Fig. 14 shows another schematic sectional view of the clamping assembly 212C. Reference is made to Figs. 13 and 14 simultaneously.

[0171] The clamping assembly 212C comprises an eccentric element 306 rotatable about a rotation axis 304. The eccentric element 306 can have an egg-shaped or oval geometry in cross-section. The eccentric element 306 is moved by means of a drive element 308 from a non-deflected state Z100 shown in Fig. 13 to a deflected state Z200 shown in Fig. 14, and vice versa. For this purpose, the drive element 308 rotates the eccentric element 306 about the rotation axis 304.

[0172] The drive element 308 can comprise a gear mechanism. Furthermore, the drive element 308 can comprise a hydraulic, pneumatic, or electric drive. Furthermore, the drive element 308 can also have a piezoelectric drive. The drive element 308 can be mounted on the manipulator frame 202 or on a housing of the clamping assembly 212C, so that the drive element 308 is stationary.

[0173] The clamping assembly 212C further includes a clamping element 310 that cooperates with the eccentric element 306 to move the clamping element 310 up and down in the orientation of FIGS. 13 and 13A, as indicated in FIG. 13 by a double-headed arrow 312. The clamping element 310 includes a clamping portion 314 with a contact surface 316 configured to bear against the support surface 128 of the socket strut 118. Furthermore, the clamping element 310 includes a receiving portion 318 that receives the eccentric element 306. The receiving portion 318 may be cup-shaped or cylindrical.

[0174] On the inside of the receiving section 318, i.e., in the direction of the rotation axis 304, a contact area 320 is provided, which is in contact with the eccentric element 306. In order to preload the contact area 320 against the eccentric element 306, the eccentric element 306 is coupled to the clamping element 310 by means of a spring element 322. The spring element 322 is a tension spring. The spring element 322 can be a cylindrical spring. The spring element 322 is arranged within the receiving section 318. On the outside of the clamping element 310, a plurality of connection sections 324, 326 are provided, with the aid of which the clamping element 310 is connected to a supporting structure or fixed world 332 via leaf spring elements 328, 330. The fixed world 332 may be connected to the manipulator frame 202 or be part of the manipulator frame 202. The term "fixed world" herein means that the fixed world 332 is fixed relative to the movable clamping element 310.

[0175] The clamping assembly 212C can be moved from an open state Z10 shown in Fig. 13 to a closed state Z20 shown in Fig. 14, and vice versa. To move the clamping assembly 212C from the open state Z10 to the closed state Z20, the drive element 308 rotates the eccentric element 306.

[0176] By rotating the eccentric element 306, the eccentric element 306 presses the contact area 320 downward, as shown in Fig. 14, whereby the clamping element 310, together with the clamping section 314, also moves downward toward the support surface 128 of the socket strut 118. The spring element 322 is thereby lengthened, and the leaf spring elements 328, 330 are deflected.

[0177] As soon as the contact surface 316 of the clamping element 310 contacts the support surface 128, a clamping force K is applied to the support surface 128. The clamping force K can be adjusted by rotating the eccentric element 306 with the aid of the drive element 308. To retain any particles that may be formed, the eccentric element 306, the clamping element 310, and / or the drive element 308 can be accommodated within a particle trap, for example, within a bellows.

[0178] Fig. 15 shows a schematic sectional view of another embodiment of a clamping assembly 212D. Fig. 16 shows another schematic sectional view of the clamping assembly 212D. Reference is made to Figs. 15 and 16 simultaneously below.

[0179] The clamping assembly 212D includes a clamping element 334 having a contact surface 336 configured to rest on the support surface 128 of the socket strut 118. The clamping element 334 can be moved up and down in the orientation of Figs. 15 and 16 by means of a hydraulic cylinder 338, as indicated in Fig. 15 by means of a double-headed arrow 340.

[0180] The hydraulic cylinder 338 is a double-acting hydraulic cylinder. The hydraulic cylinder 338 comprises a housing 342 in which a piston 344 is accommodated. The piston 344 can be pressurized with a hydraulic fluid 346 on both sides. The piston 344 is coupled to the clamping element 334 by means of a piston rod 348.

[0181] The clamping assembly 212D can be moved from an open state Z10 shown in Fig. 15 to a closed state Z20 shown in Fig. 16, and vice versa. To move the clamping assembly 212D from the open state Z10 to the closed state Z20, the hydraulic cylinder 338 moves the clamping element 334 downward in the orientation of Figs. 15 and 16 until the clamping element 334 contacts the support surface 128. The clamping element 334 now applies a clamping force K to the socket strut 118.

[0182] Fig. 17 shows a schematic sectional view of another embodiment of a clamping assembly 212E. Fig. 18 shows another schematic sectional view of the clamping assembly 212E. Reference is made to Figs. 17 and 18 simultaneously below.

[0183] The clamping assembly 212E has a clamping element 350. The clamping element 350 includes a clamping portion 352 with a contact surface 354 configured to rest on the support surface 128 of the socket strut 118. The clamping element 350 further includes two stop portions 356, 358. Each stop portion 356, 358 is associated with an end stop 360, 362. The end stops 360, 362 limit downward and upward movement of the clamping element 350 in the orientation of Fig. 17. The stop portion 356 can come into contact with the end stop 360. The stop portion 358 can come into contact with the end stop 362.

[0184] The clamping element 350 further comprises a piston rod 364. The piston rod 364 is connected to a piston 366 of a double-acting hydraulic cylinder 368. The piston 366 is received in a housing 370 of the hydraulic cylinder 368. The housing 370 is filled with a hydraulic fluid 372. The housing 370 can be supplied with hydraulic fluid 372 via hydraulic lines 374, 376. The clamping element 350 is coupled to a fixed shaft 382 by means of leaf spring elements 378, 380. The leaf spring elements 378, 380 are connected to the stop sections 356, 358. The fixed shaft 382 can be coupled to the manipulator frame 202 or be part of the manipulator frame 202. With the help of the hydraulic cylinder 368, the clamping element 350 can be moved up and down, as indicated in Fig. 17 by a double arrow 384. In the process, the leaf spring elements 378, 380 deform.

[0185] The clamping assembly 212E can be moved from an open state Z10 shown in Fig. 17 to a closed state Z20 shown in Fig. 18, and vice versa. To move the clamping assembly 212E from the open state Z10 to the closed state Z20, the hydraulic cylinder 368 moves the clamping element 350 downward in the orientation of Figs. 17 and 18 until the clamping section 352 contacts the support surface 128. The clamping section 352 now applies a clamping force K to the socket strut 118.

[0186] Fig. 19 shows a schematic sectional view of another embodiment of a clamping assembly 212F.

[0187] The clamping assembly 212F includes a clamping element 386. The clamping element 386 has a contact portion 388 with a spherical cap-shaped contact surface 390. The contact surface 390 is adapted to rest on the support surface 128 of the socket strut 118. Such a contact portion 388 with a curved contact surface 390 can also be provided in the previously explained clamping assemblies 212B, 212C, 212D, 212E.

[0188] The clamping element 386 is pivotally mounted on a fixed shaft 394 about a rotation axis 396 by means of a spring device 392. The fixed shaft 394 can be connected to the manipulator frame 202 or be part of the manipulator frame 202. The spring device 392 can have a plurality of spring elements, for example in the form of leaf spring elements, and / or solid-state joints.

[0189] The clamping assembly 212F further comprises a single-acting hydraulic cylinder 398 with a piston 400 housed in a housing 402. A hydraulic fluid 406 is applied to the piston 400 via a hydraulic line 404. The spring device 392 preloads the piston 400 such that the hydraulic fluid 406 acts against a spring force of the spring device 392. The piston 400 is coupled to the clamping element 386 by means of a coupling element 408. For this purpose, the coupling element 408 is connected to the piston 400 at a connection point 410 and to the clamping element 386 at a connection point 412.

[0190] As previously described with reference to the different embodiments of the clamping assembly 212A, 212B, 212C, 212D, 212E, the clamping assembly 212F can be moved from an open state Z10 shown in Fig. 19 to a closed state Z20 (not shown). For this purpose, the piston 400 is pressurized with the hydraulic fluid 406. The piston 400 is thereby moved upward in the orientation shown in Fig. 19. The piston 400 thereby works against the spring force of the spring device 392.

[0191] The clamping element 386 pivots about the rotation axis 396, whereby the contact section 388 is pivoted, as indicated in Fig. 19 by a double arrow 414. As soon as the contact surface 390 contacts the support surface 128 of the socket strut 118, a clamping force K is applied thereto as previously explained.

[0192] Fig. 20 shows a schematic sectional view of another embodiment of a clamping assembly 212G.

[0193] The clamping assembly 212G comprises a clamping element 416 with a clamping section 418. The clamping section 418 has a contact surface 420 configured to rest on the support surface 128 of the socket strut 118. The clamping element 416 further has two connecting sections 422, 424, by means of which the clamping element 416 is connected to a frame 430 via leaf spring elements 426, 428. The leaf spring elements 426, 428 may be referred to as first leaf spring elements. The frame 430 may also be referred to as the first frame.

[0194] The clamping element 416 further includes a piston 432, which is part of a double-acting hydraulic cylinder 434. The hydraulic cylinder 434 includes a housing 436 in which the piston 432 is accommodated. The piston 432 can be supplied with hydraulic fluid 442 via hydraulic lines 438, 440. With the aid of the hydraulic cylinder 434, the clamping element 416 can be moved up and down in the orientation of Fig. 20, as indicated by a double arrow 444. The frame 430 is connected to a fixed base 450 by means of leaf spring elements 446, 448. The fixed base 450 can be connected to the manipulator frame 202 or be part of the manipulator frame 202. The leaf spring elements 446, 448 can be referred to as second leaf spring elements. Furthermore, the frame 430 is connected to another frame 454 via a leaf spring element 452. The frame 454 can also be referred to as the second frame.

[0195] The clamping element 416 is also connected to the frame 454 by means of a leaf spring element 456. The frame 454 is connected to the fixed base 450 by means of a spring device 458. The spring device 458 can have multiple spring elements and / or solid-state joints. With the help of the spring device 458, the frame 454 is pivotally mounted on the fixed base 450 about a rotation axis 460.

[0196] The clamping element 416 is assigned two end stops 462, 464, which limit upward and downward movement of the clamping element 416 in the orientation shown in Fig. 20. The end stop 462 is assigned to the connecting section 422. The end stop 464 is assigned to the connecting section 424.

[0197] As previously described with reference to the different embodiments of the clamping assembly 212A, 212B, 212C, 212D, 212E, 212F, the clamping assembly 212G can be moved from an open state Z10 shown in Fig. 20 to a closed state Z20 (not shown). For this purpose, the piston 432 is pressurized with the hydraulic fluid 442. The piston 432 is thereby moved downward in the orientation shown in Fig. 20.

[0198] As soon as the clamping section 418 rests on the support surface 128 of the socket strut 118, a clamping force K is applied to the socket strut 118. The leaf spring elements 426, 428, 446, 448 are deflected. The structural design of the clamping assembly 212G with the frames 430, 454 and the leaf spring elements 426, 428, 446, 448, 452, 456 ensures that no parasitic movements of the clamping element 416 occur along and against the y direction y.

[0199] Although the present invention has been described using exemplary embodiments, it is capable of being modified in many ways.

[0200] 1A projection exposure system

[0201] 1B projection exposure system

[0202] 2 lighting system

[0203] 3 Light source

[0204] 4 Lighting optics

[0205] 5 Object field

[0206] 6 Object level

[0207] 7 reticles

[0208] 8 reticle holders

[0209] 9 Reticle displacement drive

[0210] 10 Projection optics

[0211] 11 Image field

[0212] 12 Image plane

[0213] 13 wafers

[0214] 14 wafer holders

[0215] 15 Wafer relocation drive

[0216] 16 Illumination radiation

[0217] 17 Collector

[0218] 18 Intermediate focal plane

[0219] 19 Deflecting mirrors

[0220] 20 first facet mirror

[0221] 21 first facet

[0222] 22 second facet mirror

[0223] 23 second facet

[0224] 24 Beam shaping and lighting system

[0225] 25 Projection optics

[0226] 26 Light source

[0227] 27 Radiation

[0228] 28 Photomask

[0229] 29 wafers

[0230] 30 lenses

[0231] 31 lens

[0232] 32 lens

[0233] 33 mirrors

[0234] 34 mirrors

[0235] 35 optical axis

[0236] 36 Medium

[0237] 100 optical assembly 102 central axis

[0238] 104 semi-axle

[0239] 106 semi-axle

[0240] 108 optical element

[0241] 108' optical element

[0242] 110 optically effective area

[0243] 112 Back

[0244] 114 exterior area

[0245] 116 version

[0246] 118 socket strut

[0247] 120 socket strut

[0248] 122 socket strut

[0249] 124 arm section

[0250] 126 arm section

[0251] 128 contact surface

[0252] 130 contact surface

[0253] 132 contact surface

[0254] 200 Optical System

[0255] 202 Manipulator frame

[0256] 204 frame strut

[0257] 206 frame strut

[0258] 208 housings

[0259] 210 Opening

[0260] 212 clamping assembly

[0261] 212A terminal assembly

[0262] 212B clamping assembly

[0263] 212C clamp assembly

[0264] 212D clamping assembly

[0265] 212E clamping assembly

[0266] 212F clamping assembly

[0267] 212G clamping assembly

[0268] 214 clamping assembly

[0269] 216 clamping assembly

[0270] 218 Adjustment device

[0271] 220 Actuator

[0272] 222 Actuator

[0273] 224 Actuator

[0274] 226 Connection point

[0275] 228 Connection point

[0276] 230 Connection point 232 Supporting structure

[0277] 234 Control and regulation unit

[0278] 236 axis of symmetry

[0279] 238 Groove element

[0280] 240 back

[0281] 242 groove

[0282] 244 contact surface

[0283] 246 contact surface

[0284] 248 Breakthrough

[0285] 250 contact element

[0286] 252 Contact section

[0287] 254 Breakthrough

[0288] 256 back

[0289] 258 Recording section

[0290] 260 decoupling element

[0291] 262 locking unit

[0292] 264 drive element

[0293] 266 locking element

[0294] 268 shaft section

[0295] 270 head section

[0296] 270' head section

[0297] 272 Double Arrow

[0298] 274 Double arrow

[0299] 276 axis of symmetry

[0300] 278 Basic element

[0301] 280 warehouses

[0302] 282 threaded spindle

[0303] 284 external thread

[0304] 286 final section

[0305] 288 final section

[0306] 290 warehouses

[0307] 292 drive element

[0308] 294 Bellows

[0309] 296 clamping element

[0310] 298 threaded hole

[0311] 300 contact area

[0312] 302 Double Arrow

[0313] 304 axis of rotation

[0314] 306 eccentric element

[0315] 308 Drive element 310 Clamping element

[0316] 312 Double Arrow

[0317] 314 clamping section

[0318] 316 contact surface

[0319] 318 Recording section

[0320] 320 Contact area

[0321] 322 spring element

[0322] 324 Connection section

[0323] 326 Connection section

[0324] 328 leaf spring element

[0325] 330 leaf spring element

[0326] 332 solid world

[0327] 334 clamping element

[0328] 336 contact surface

[0329] 338 hydraulic cylinders

[0330] 340 Double Arrow

[0331] 342 housings

[0332] 344 pistons

[0333] 346 Hydraulic fluid

[0334] 348 piston rod

[0335] 350 clamping element

[0336] 352 clamping section

[0337] 354 contact surface

[0338] 356 stop section

[0339] 358 stop section

[0340] 360 end stop

[0341] 362 End stop

[0342] 364 piston rod

[0343] 366 pistons

[0344] 368 hydraulic cylinders

[0345] 370 housing

[0346] 372 Hydraulic fluid

[0347] 374 Hydraulic line

[0348] 376 Hydraulic line

[0349] 378 leaf spring element

[0350] 380 leaf spring element

[0351] 382 solid world

[0352] 384 Double arrow

[0353] 386 clamping element

[0354] 388 Contact section 390 Contact surface

[0355] 392 spring device

[0356] 394 solid world

[0357] 396 axis of rotation

[0358] 398 hydraulic cylinders

[0359] 400 pistons

[0360] 402 housing

[0361] 404 Hydraulic line

[0362] 406 Hydraulic fluid

[0363] 408 coupling element

[0364] 410 Connection point

[0365] 412 Connection point

[0366] 414 Double Arrow

[0367] 416 clamping element

[0368] 418 clamping section

[0369] 420 contact area

[0370] 422 connection section

[0371] 424 Connection section

[0372] 426 leaf spring element

[0373] 428 leaf spring element

[0374] 430 frames

[0375] 432 pistons

[0376] 434 hydraulic cylinders

[0377] 436 housings

[0378] 438 Hydraulic line

[0379] 440 hydraulic line

[0380] 442 Hydraulic fluid

[0381] 444 Double Arrow

[0382] 446 leaf spring element

[0383] 448 leaf spring element

[0384] 450 solid world

[0385] 452 leaf spring element

[0386] 454 frames

[0387] 456 leaf spring element

[0388] 458 spring device

[0389] 460 rotation axis

[0390] 462 End stop

[0391] 464 End stop

[0392] K Clamping force Ml Mirror

[0393] M2 mirror

[0394] M3 mirror

[0395] M4 mirror M5 mirror

[0396] M6 mirror

[0397] R Radial direction

[0398] U Circumferential direction x x- direction yy direction z z- direction

[0399] Z1 locking state

[0400] Z2 unlocking state

[0401] Z10 Condition Z20 Condition

[0402] Z100 condition

[0403] Z200 condition

Claims

PATENT CLAIMS 1. Optical system (200) for a projection exposure apparatus (1A, 1B), comprising an optical assembly (100) with an optical element (108), a manipulator frame (202) which carries the optical assembly (100), and a clamping assembly (212, 212A, 212B, 212C, 212D, 212E, 212F, 212G, 214, 216) attached to the manipulator frame (202), which clamping assembly can be moved from a closed state (Z20), in which the clamping assembly (212, 212A, 212B, 212C, 212D, 212E, 212F, 212G, 214, 216) forms a mechanical connection between the optical assembly (100) and the manipulator frame (202) produces, into an open state (Z10), in which the mechanical connection between the optical assembly (100) and the manipulator frame (202) is released, and vice versa, wherein the clamping assembly (212A) has a contact element (250) connected to the optical element (108), a groove element (238) connected to the manipulator frame (202) on which the contact element (250) rests,and a locking unit (262) for mechanically connecting the contact element (250) to the groove element (238) in the closed state (Z20) of the clamping assembly (212A), or wherein the contact element (250) is connected to the manipulator frame (202) and the groove element (238) is connected to the optical element (108), wherein the contact element (250) has a spherical cap-shaped contact section (252) and the groove element (238) has a V-shaped groove (242) with two contact surfaces (244, 246) oriented obliquely to one another, wherein the contact section (252) rests on the contact surfaces (244, 246), or wherein the contact element (250) and the groove element (238) bear against one another at a surface contact or at a tetrahedron-shaped contact, wherein the locking unit (262) has a locking element (266) and a drive element (264) for driving the locking element (266), and wherein the drive element (264) is adapted toto move the locking element (266) from a locking state (Z1), in which the locking element (266) engages behind the contact element (250) to establish a positive connection between the locking element (266) and the contact element (250), into an unlocking state (Z2), in which the positive connection between the locking element (266) and the contact element (250) is released, and vice versa.

2. Optical system according to claim 1, wherein the contact element (250) has an opening (254), wherein the locking element (266) has a head section (270), wherein the head section (270) engages behind the contact element (250) in the locking state (Z1) in order to establish the positive connection between the locking element (266) and the contact element (250), and wherein the head section (270) can only be passed through the opening (254) in the unlocking state (Z2).

3. The optical system of claim 1, wherein the clamping assembly (212B, 212C) comprises a clamping element (296, 310) and a drive element (292, 308) for moving the clamping element (296, 310) to move the clamping assembly (212B, 212C) from the closed state (Z20) to the open state (Z10) and vice versa.

4. Optical system according to claim 3, wherein the clamping element (296) is operatively connected to the drive element (292) by means of a threaded spindle (282).

5. Optical system according to claim 4, wherein the clamping element (296) and / or the threaded spindle (282) are arranged at least partially within a bellows (294).

6. Optical system according to claim 3, wherein the clamping element (310) is operatively connected to the drive element (308) by means of an eccentric element (306).

7. Optical system according to claim 6, wherein the clamping element (310) is coupled to the eccentric element (306) by means of a spring element (322), and wherein the spring element (322) biases the clamping element (310) against the eccentric element (306).

8. The optical system of claim 1, wherein the clamping assembly (212D, 212E, 212F, 212G) comprises a clamping element (334, 350, 386, 416) and a hydraulic cylinder (338, 368, 398, 434) for moving the clamping element (334, 350, 386, 416) to move the clamping assembly (212D, 212E, 212F, 212G) from the closed state (Z20) to the open state (Z10) and vice versa.

9. Optical system according to claim 8, wherein the clamping element (350, 416) is suspended from a fixed world (382, 450) by means of elastically deformable leaf spring elements (378, 380, 426, 428, 446, 448).

10. Optical system according to claim 9, wherein the clamping element (416) is suspended from a frame (430) by means of first leaf spring elements (426, 428), and wherein the frame (430) is suspended from the fixed world by means of second leaf spring elements (446, 448).

11. Optical system according to one of claims 3 - 10, wherein the optical assembly (100) has a mount (116) with a mount strut (118, 120, 122) which is supported on the manipulator frame (202), and wherein the clamping element (296, 310, 334, 350, 416) applies a clamping force (K) to the mount strut (118, 120, 122) in the closed state of the clamping assembly (212, 212B, 212C, 212D, 212E, 212G, 214, 216).

12. Projection exposure apparatus (1A, 1B) with an optical system (200) according to one of claims 1 - 11.

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