Vacuum generation device and suction device

Abstract

This vacuum generation device is provided with a body (500) and a suction device (100) provided with a vacuum pump (160). The suction device (100) is removable from the body. The body (500) and the suction device (100) are engaged with each other by engagement mechanisms (134, 135, 514, 515). The suction device (100) is provided with terminals (181-185) for supplying power to the vacuum pump (160), and piping (167) through which air sucked by the operation of the vacuum pump (160) passes. The body (500) is provided with a connector (518) to which the terminals (181-185) are connected, and a connection port (517) to which the piping (167) is connected. The terminals (181-185) of the suction device (100) and the connector (518) of the body (500), and the piping (167) of the suction device (100) and the connection port (517) of the body (500) are connected to each other on the same surface as the surface (S1) on which the engagement mechanisms (134, 135, 514, 515) engage.

Description

Vacuum generator and suction device

[0001] The present invention relates to a vacuum generating device and a suction device.

[0002] A vacuum generating device equipped with a vacuum pump is known, and is used in a suction device for gripping an object, etc. In such a case, a technology is known in which the suction device such as the vacuum pump is assembled into a cartridge, so that the cartridge can be easily separated from the main body and replaced.

[0003] JP 2019-5839 A JP 2000-343471 A

[0004] When connecting the cartridge to the main body, it is necessary to align and individually connect the air tube for sucking air and the wiring jack, which can make the cartridge replacement process complicated.

[0005] In one aspect, an object of the present invention is to provide a vacuum generating device and an adsorption device in which the vacuum pump can be easily replaced.

[0006] In one aspect, a vacuum generating device comprises a main body and a suction device equipped with a vacuum pump. The suction device is detachable from the main body. The main body and the suction device are engaged with each other by an engagement mechanism. The suction device comprises a terminal for supplying power to the vacuum pump and a pipe through which air sucked by the operation of the vacuum pump passes. The main body comprises a connector to which the terminal is connected and a connection port to which the pipe is connected. The wiring portion of the suction device and the connector of the main body, and the pipe of the suction device and the connection port of the main body are connected to each other on the same surface as the surface where the engagement mechanism engages.

[0007] According to one aspect, the vacuum pump can be easily replaced.

[0008] FIG. 1 is a perspective view showing an example of a conveyance system according to an embodiment. FIG. 2 is a top view showing an example of a conveyance system according to an embodiment. FIG. 3 is a perspective view showing an example of a suction device according to an embodiment. FIG. 4 is a perspective view showing another example of a suction device according to an embodiment. FIG. 5 is a cross-sectional view showing an example of a suction device according to an embodiment. FIG. 6 is an exploded perspective view showing an example of a vacuum generating device according to an embodiment. FIG. 7 is a side cross-sectional view showing an example of an attachment attached to a main body according to an embodiment. FIG. 8 is an exploded perspective view showing an example of a cartridge according to an embodiment. FIG. 9 is a perspective view showing an example of a cartridge cover according to an embodiment. FIG. 10 is a perspective view showing an example of a cartridge according to an embodiment. FIG. 11 is a perspective view showing an example of a bottom of a cartridge according to an embodiment. FIG. 12 is a top view showing an example of a slot in a main body according to an embodiment. FIG. 13 is a cross-sectional view showing an example of a suction device according to an embodiment. FIG. 14 is a cross-sectional view showing an example of a main body according to an embodiment. FIG. 15 is a cross-sectional view showing an example of a first ventilation path according to an embodiment. FIG. 16 is a perspective view showing examples of first and second ventilation paths according to an embodiment. FIG. 17 is a perspective view showing an example of a suction device according to a first modified example. Fig. 18 is a perspective view showing an example of a suction frame in a first modified example. Fig. 19 is a side cross-sectional view showing an example of a suction device in the first modified example. Fig. 20 is a perspective view showing an example of a transport system in a second modified example. Fig. 21 is a side view showing another example of a transport system in the second modified example. Fig. 22 is a view showing an example of a cartridge in a third modified example. Fig. 23 is a view showing an example of a transport system including a vacuum generating device in a fourth modified example. Fig. 24 is a view showing an example of a transport system including a vacuum generating device in the fourth modified example.

[0009] Hereinafter, embodiments of a vacuum generating device and a suction device disclosed herein will be described in detail with reference to the drawings. Note that the dimensional relationships and ratios of elements in the drawings may differ from reality. The dimensional relationships and ratios may also differ between the drawings. For ease of understanding, the drawings may illustrate a coordinate system in which the top surface 111 of the cartridge 100 (described later) is the positive side of the Y axis, and the cartridge 100 is mounted on the positive side of the X axis and the negative side of the Z axis of the main body 500. Note that the same components are designated by the same reference numerals throughout the description of the embodiments.

[0010] [Embodiment] First, a transfer system according to an embodiment will be described with reference to Fig. 1 and Fig. 2. Fig. 1 is a perspective view showing an example of a transfer system according to an embodiment. Fig. 2 is a top view showing an example of a transfer system according to an embodiment. As shown in Fig. 1, a transfer system 1 according to an embodiment includes a suction device 10 and a robot arm 900.

[0011] The robot arm 900 is, for example, a known vertical multi-joint robot arm including a plurality of joints, a plurality of arms, and a support portion. The robot arm 900 moves the suction device 10 attached to the support portion by rotating or bending and extending the plurality of joints. Note that the robot arm 900 may also be a known horizontal multi-joint robot arm, etc.

[0012] The suction device 10 in the embodiment grips an object (not shown) by suctioning it using a vacuum pump. As shown in FIGS. 2 to 5 , the suction device 10 in the embodiment includes a main body 500, cartridges 100 to 400, suction pads 710 to 770, and an attachment 800. FIG. 3 is a perspective view showing an example of the suction device in the embodiment. FIG. 4 is a perspective view showing another example of the suction device in the embodiment. FIG. 5 is a cross-sectional view showing an example of the suction device in the embodiment. FIG. 5 shows a cross-section taken along line A-A in FIG. 3. Note that in FIG. 4, the bottom surface 690 of the main body 500 shown in FIG. 5 is omitted in order to illustrate the internal structure of the main body 500. Also, FIG. 4 shows a state in which the cartridges 200 and 400 are not attached to the main body 500. Note that the cartridges 100 to 400 are examples of suction devices, and the main body 500 is an example of a vacuum control device.

[0013] As shown in Fig. 2, the main body 500 is attached to a robot arm 900 via an attachment 800. The robot arm 900 and the main body 500 are electrically connected by a cable 905 shown in Fig. 2. Note that in the following drawings, the cable 905 and other components may be omitted from illustration.

[0014] As shown in FIGS. 2 and 3 , the cartridges 100 to 400 are attached to the positive side in the Y-axis direction, i.e., the top surface 590 side of the main body 500 shown in FIG. 5 . The cartridges 100 to 400 are detachable from the main body 500, as shown in FIGS. 4 and 6 . FIG. 6 is an exploded perspective view showing an example of a vacuum generating device in this embodiment. Note that in FIG. 6 , the bottom 140, terminal block 180, and circuit board 189 of the cartridge 100, which will be described later, are shown by dashed lines. In this embodiment, the main body 500 to which the cartridges 100 to 400 are attached, as shown in FIG. 6 , is an example of a vacuum generating device. The suction device 10 is the vacuum generating device shown in FIG. 6 , and includes suction pads 710 to 770 that are detachable from the main body and are attached to the negative side in the Y-axis direction, i.e., the bottom surface 690 side of the main body 500 shown in FIG. 5 .

[0015] As shown in FIG. 4 , ventilation paths 610 to 670 are formed in the main body 500. As will be described later, the ventilation paths 610 to 640 communicate with connection ports 517 to 547, which are connected to the suction holes 167 to 467 of the cartridges 100 to 400, respectively. The ventilation paths 610 to 640 also communicate with sockets 617 to 647, to which suction pads 710 to 740 are connected, respectively. In this case, the socket 617 communicates with the connection port 517 via the ventilation path 610. For example, the airtightness of the ventilation path 630 is ensured by an O-ring 638 or the like shown in FIG. 5 . That is, the ventilation path 610 connects the connection port 517 and the suction pad 710. The ventilation paths 650 to 670 are also connected to suction pads 750 to 770, respectively, as shown in FIG. 4 . Furthermore, the O-ring 638 and the like may be replaced with other sealing members that can ensure airtightness, such as screws, gaskets, packing, and fluorine tape.

[0016] 4, connecting pipes 656 to 676 are formed in the main body 500 to connect the ventilation paths 610 to 640 and the ventilation paths 650 to 670. In this embodiment, the ventilation paths 650 to 670, the portions of the ventilation paths 610 to 640 that face the suction pads 710 to 740, and the connecting pipes 656 to 676 form a space that is in a vacuum state. Also, as shown in FIG. 4, the main body 500 further includes a substrate 580.

[0017] The attachment 800 attaches the main body 500 to an external device such as a robot arm 900. As shown in Fig. 7, the attachment 800 includes a display unit 810, a pressure sensor 820, a solenoid valve 830, and a mounting unit 890. Fig. 7 is a side cross-sectional view showing an example of an attachment attached to the main body in this embodiment. Fig. 7 shows a cross section taken along line B-B in Fig. 3.

[0018] The attachment 800 is connected to the ventilation path 670 via a connection port 577 shown in FIG. 7. The ventilation path 670 is opened to the atmosphere when the solenoid valve 830 is opened. The display unit 810 displays, for example, the air pressure inside the connecting pipe 676 measured by a pressure sensor 820. The attachment 800 is fixed to the upper surface 590 of the main body 500 by, for example, bolts 851 and 854 shown in FIG. 4, a bolt 853 shown in FIGS. 3 and 6, and a bolt 852 shown in FIG. 3.

[0019] Air inside the main body 500 is sucked by a vacuum pump 160 provided in the cartridge 100 shown in Figure 8. Figure 8 is an exploded perspective view showing an example of a cartridge in the embodiment. Note that, since the cartridges 100 to 400 in the embodiment all have the same structure, the structure of the cartridge 100 will be described below. Furthermore, when expressing components of the cartridges 200, 300, or 400 in a particularly distinguishable manner, they will be denoted by the reference numerals 2nn, 3nn, and 4nn, respectively, such as the vacuum pump 260 of the cartridge 200 and the vacuum pump 360 of the cartridge 300 shown in Figure 5.

[0020] 8, the cartridge 100 in this embodiment includes a cover 110, a bottom 140, a vacuum pump 160, a terminal block 180, and a base plate 189. The vacuum pump 160 is housed in the cover 110 and the bottom 140 and is fixed to the bottom 140 by bolts 196 to 198 shown in FIG.

[0021] The vacuum pump 160 has a side surface 161 and a bottom surface 164. The bottom surface 164 has a suction hole 167 and a discharge hole 169 shown in FIG. 8 . The vacuum pump 160 sucks air through the suction hole 167 and discharges it through the discharge hole 169, for example, by rotating an impeller or the like using a motor. The suction hole 167 is an example of a pipe through which air passes when the vacuum pump is operated, and the side surface 161 is an example of an outer wall of the vacuum pump.

[0022] The cover 110 has a top surface 111 shown in Fig. 9 and a side surface 120 shown in Fig. 10. Fig. 9 is a perspective view showing an example of a cover of a cartridge in an embodiment. Fig. 10 is a perspective view showing an example of a cartridge in an embodiment. The top surface 111 is formed at a position opposite the bottom portion 140 in the Y-axis direction.

[0023] 10 , the side surface 120 of the cover 110 includes flat surfaces 121, 122, and 123 and a curved surface 130. The flat surfaces 121 and 123 protrude radially outward, i.e., in a direction intersecting the direction in which the cartridge 100 is attached to the main body 500. In this case, the flat surfaces 121, 122, and 123 form portions that protrude radially outward, i.e., portions that protrude in a direction intersecting the direction in which the cartridge 100 is attached to the main body 500. The flat surfaces 121, 122, and 123 are an example of the inner walls of the protruding portions.

[0024] The curved surface 130 of the cover 110 has bosses 131 to 133 that protrude outward in the radial direction. The bosses 131 to 133 are fixed to the bottom 140 by bolts 191 to 193, respectively, as shown in FIGS.

[0025] A pair of claws 134 and 135 are formed on the curved surface 130. As shown in Figures 6 and 9, the claws 134 and 135 protrude further in the negative direction along the Y axis than the bottom 140. As shown in Figures 9 and 10, slits 135a and 135b are formed on both sides of the claw 135 in the circumferential direction. As shown in Figure 10, slits 134a and 134b are also formed in the claw 134. Note that the number of claws is not limited to one pair, and other claws may be formed in addition to the claws 134 and 135.

[0026] 9 and 10 , a pair of exhaust ports 136 and 137 are formed on the curved surface 130 on the top surface 111 side in the Y-axis direction. The exhaust ports 136 and 137 are an example of a second opening formed on the top surface side.

[0027] 8, the terminal block 180 holds terminals 181 to 185 that electrically connect the main body 500 and the cartridge 100. The substrate 189 electrically connects an external power source (not shown) and the vacuum pump 160 via the terminals 181 to 185.

[0028] In the embodiment, as shown in Fig. 11 , protrusions 141 to 143 are formed on the bottom 140 at positions facing the bosses 131 to 133 of the cover 110. Fig. 11 is a perspective view showing an example of the bottom of the cartridge in the embodiment. Through holes through which bolts 191 to 193 are inserted are formed in the protrusions 141 to 143, respectively. Furthermore, as shown in Fig. 11 , through holes 156 to 158 through which bolts 196 to 198 are inserted are formed in the bottom 140.

[0029] The bottom portion 140 includes a bottom surface 150 and side walls 151 to 155 and 159 that protrude toward the positive side in the Y-axis direction and extend in a direction intersecting the Y-axis direction. The side walls 151 to 155 and 159 are an example of a wall portion.

[0030] 11 , recesses 144 and 145 are formed in the bottom portion 140 at positions corresponding to the claws 134 and 135 of the cover 110. The claws 134 and 135 of the cover 110 can be elastically deformed radially inward by the slits 134a, 134b, 135a, and 135b and the recesses 144 and 145 of the bottom portion 140.

[0031] The bottom 140 also includes a through hole 148 through which the terminal block 180 is inserted, and a support portion 149 that supports the substrate 189. In this embodiment, the support portion 149 is disposed in a portion that protrudes outward in the radial direction. As a result, the substrate 189 is disposed in the protruding portion. Furthermore, the bottom 140 is formed with a through hole 147 through which the suction hole 167 is inserted. Note that the through hole 147 is an example of a first opening formed in the bottom surface.

[0032] Furthermore, a slot 510 into which the cartridge 100 is attached is formed on the top surface 590 of the main body 500, as shown in Fig. 12. Fig. 12 is a top view showing an example of a slot of the main body in this embodiment. Fig. 12 is an enlarged view of the portion indicated by the frame F1 of the main body 500 shown in Fig. 2. Note that the slots 520 to 540 into which the cartridges 200 to 400 are attached, respectively, have the same configuration as the slot 510, and therefore the description of each slot also applies to the other slots unless otherwise specified.

[0033] 12, the slot 510 includes support walls 511 to 513, engaged portions 514 and 515, a connection port 517, and a connector 518. As shown in FIG. 12, for example, the engaged portions 514 and 515 are through-holes formed in an upper surface 590 of the main body 500, and are formed in positions facing the claw portions 134 and 135 of the cartridge 100. The connector 518 is connected to, for example, the substrate 580 shown in FIG. 4. The connection port 517 is connected to the ventilation path 610 shown in FIG. 4.

[0034] The claws 134 and 135 of the cartridge 100 are respectively inserted into the engaged portions 514 and 515 formed on the upper surface 590 of the main body 500 while being elastically deformed inward in the radial direction. Thereafter, the claws 134 and 135 return to their outward positions in the radial direction, whereby the claws 134 and 135 engage with the engaged portions 514 and 515, respectively. This completes the installation of the cartridge 100 in the main body 500. In this case, the support walls 511 to 513 serve as guides for aligning the bosses 131 to 133.

[0035] As shown in FIG. 13 , the tip of the claw portion 135 of the cartridge 100 extends toward the negative side in the Y-axis direction and engages with the engaged portion 515 of the slot 510 shown in FIG. 12 . FIG. 13 is a cross-sectional view showing an example of a suction device according to an embodiment. FIG. 13 shows a cross section taken along line CC in FIG. 2 . That is, the cartridge 100 and the main body 500 are engaged with each other by the claw portion 135 and the engaged portion 515. The claw portion 135 and the engaged portion 515 constitute an engagement mechanism. The same applies to the claw portion 134 and the engaged portion 514, which are not shown in FIG. 13 . The engagement mechanism is not limited to one that uses a claw, and may be one that engages with a screw, for example.

[0036] At this time, the terminal 184 of the cartridge 100 extends on the negative side in the Y-axis direction and is connected to the connector 518 as shown in Fig. 13. The same applies to the terminals 181 to 183 and 185, which are not shown in Fig. 13. Also, as shown in Fig. 13, when the cartridge 200 is attached to the slot 520, the suction hole 267 protruding on the negative side in the Y-axis direction is inserted into the connection port 527 of the main body 500. In this case, the terminal 184 of the cartridge 100 and the connector 518 of the main body 500, and the suction hole 267 of the cartridge 200 and the connection port 527 of the main body 500 are connected to each other on the same surface as the surface S1, which is the surface on which the claw portion 134 and the engaged portion 514, which constitute the engagement mechanism, engage, as shown in Fig. 13.

[0037] In the cartridge 100, the terminals 181 to 185, the suction hole 167, and the claws 134 and 135 that are part of the engagement mechanism also extend in the same direction. Furthermore, the terminals 181 to 185 of the cartridge 100 and the connector 518 of the main body 500, and the suction hole 167 of the cartridge 100 (not shown in Figure 13) and the connection port 517 of the main body 500 are connected to each other on the same surface as the surfaces where the claws 134 and 135 and the engaged portions 514 and 515 that are part of the engagement mechanism engage. This eliminates the need to align the plug 167, terminals 181 to 185, etc., and allows the cartridge 100 to be easily attached to the main body 500.

[0038] 12 , the slot 510 of the main body 500 is provided with a seal packing 519. On the upper surface 590, the connection port 517 and the connector 518 are surrounded by the seal packing 519. That is, when the cartridge 100 is attached to the main body 500, the seal packing 519 surrounds the terminals 181 to 185 and the connector 518, as well as the suction hole 167 and the connection port 517. With this configuration, the propagation of vibration between the cartridge 100 and the main body 500 is suppressed, and the intrusion of foreign matter and water into the slot 510 is suppressed, thereby improving the durability of the connection portion between the cartridge 100 and the slot 510.

[0039] The slots 510, 520, 530, and 540 are formed on the top surface 590 of the main body 500 so as to surround the attachment 800. In this embodiment, the slot 540 into which the cartridge 300 and the adjacent cartridge 400 are attached is formed in a different direction from the slot 530, as shown in FIG. 2 . In this case, the adjacent cartridges 300 and 400 are attached to the main body 500 so that their protruding portions face in different directions. That is, as shown in FIG. 2 , the protruding portion of the cartridge 300 faces the negative side of the X axis and the negative side of the Z axis (direction D1), while the protruding portion of the cartridge 400 faces the positive side of the X axis and the positive side of the Z axis (direction D2). The same applies to the cartridges 100 and 200.

[0040] 2, the gap G between the cartridges 300 and 400 is increased. This makes it easier to insert fingers into the gap between the cartridges and grasp them, even when the suction device 10 is attached to the robot arm 900, and therefore the cartridges 100 to 400 can be easily attached and detached.

[0041] Furthermore, the suction device 10 in this embodiment can operate even when one or more of the cartridges 100 to 400 are not installed, as shown in FIG. 4. The cartridges 100 to 400 can also be controlled independently of the operation of the other cartridges. For example, FIG. 5 shows a state in which the vacuum pump 360 of cartridge 300 is operating, but the vacuum pump 260 of cartridge 200 is stopped. Control of the air flow in this case will be described below.

[0042] As shown in FIGS. 5 and 14 , a ventilation path 630 through which air drawn by the cartridge 300 passes is provided with a vent 635 and a check valve 633 that switches the ventilation path 635 between an open state and a closed state. FIG. 14 is a cross-sectional view showing an example of the main body according to the embodiment. FIG. 14 shows a cross-section taken along line D-D in FIG. 5 . Similarly, as shown in FIG. 14 , check valves 613, 623, and 643 and ventilation paths 615, 625, and 645 are respectively provided in the ventilation paths 610, 620, and 640. Also, as shown in FIG. 5 , the ventilation path 620 includes a spring 624, and the ventilation path 630 includes a spring 634. Note that in FIG. 14 , the ventilation paths 615, 625, and 645 are covered by the check valves 613, 623, and 643, respectively, and are therefore not visible. Note that the substrate 580 is not shown in FIG. 14 .

[0043] As shown in FIG. 5 , the check valve 623 in this embodiment is biased by a spring 624 toward the negative Y-axis direction, i.e., in a direction that closes the vent hole 625. The spring 624 is an example of a biasing member. That is, in this embodiment, the main body 500 includes a biasing member 624 that biases the check valve 623 in a direction that closes the check valve 623. In this state, air sucked through the suction pad 720 is blocked by the check valve 623, as indicated by the arrow in FIG. 5 . The biasing member is not limited to a spring and may be other members such as rubber, a magnet, a shape-memory alloy, or a disk-shaped bimetal (thermal expansion valve). For example, a disk-shaped bimetal can be used as appropriate depending on the temperature of the gas being sucked.

[0044] 5, when air is sucked into the ventilation path 630 by the cartridge 300, the check valve 633 moves in the positive direction in the Y-axis direction, i.e., in the direction that opens the ventilation port 635. That is, in this embodiment, the check valve 633 is in a closed state when the vacuum pump 360 of the cartridge 300 connected to the connection port 537 is stopped, and is in an open state when the vacuum pump 360 is operating. In this case, in addition to the air sucked into the suction pad 730, air sucked into the suction pads 720 and 760 is also sucked into the cartridge 300 from the connection port 537 via the connecting pipe 666, as shown in FIG.

[0045] Furthermore, when the cartridge 300 stops operating, the check valve 633 returns to the closed state due to the biasing force of the spring 634. In this configuration, the check valve 633 remains closed even after the cartridge 300 is removed. That is, while the suction pads 710 to 770 are adsorbing an object, the vacuum state inside the main body 500 is maintained even after the vacuum pump 360 stops operating or the cartridge 300 is removed, thereby preventing the object from falling off.

[0046] Furthermore, in the embodiment, another vacuum pump 260 is connected to a connection port 527 other than the connection port 537. In this case, the check valve 633 connected to the connection port 537 can operate independently of the other check valve 623. For example, even when the vacuum pump 260 of the cartridge 200 is stopped and the check valve 623 is closed, if the vacuum pump 360 of the cartridge 300 is operating, the other check valve 633 may be open. In other words, the check valve 623 operates independently of the operation of the vacuum pump connected to the other check valve.

[0047] 5, the suction pad 730, the check valve 633, and the connection port 537 are arranged in a straight line. This configuration simplifies the structure of the ventilation path 630 of the main body 500, and also reduces the thickness T1 of the main body 500 shown in FIG.

[0048] 5, the check valve 623 in the closed state divides the ventilation path 620 into a first space 621 and a second space 622. That is, the ventilation path 620 includes the first space 621 formed between the check valve 623 and the connection port 527, and the second space 622 formed between the check valve 623 and the suction pad 720. In this case, the check valve 623 maintains the closed state regardless of the air pressure in the second space 622. The first space 621 is not included in the space that is in a vacuum state.

[0049] In this configuration, the vacuum state of the second space 622 is released by operating the solenoid valve 830 of the attachment 800. Specifically, the solenoid valve 830, which is connected to the second space 622 via the connecting pipes 666, 676 and the connection port 577, transitions from a closed state to an open state, thereby releasing the vacuum state of the second space 622 to the atmosphere. With this configuration, the vacuum state can be released without operating the individual check valves 613 to 643, thereby simplifying the structure and reducing the power consumption associated with releasing the vacuum state. In particular, when multiple vacuum pumps are used, the weight of the main body can be reduced by reducing the number of solenoid valves (for example, making them fewer than the number of vacuum pumps).

[0050] Furthermore, the air sucked out by the vacuum pump 160 of the cartridge 100 is discharged from the exhaust hole 169 of the vacuum pump 160 shown in Figure 8. When the discharged air is discharged from the exhaust ports 136 and 137 formed in the cover 110, it passes through the first ventilation path formed by the side walls 151 to 155 and 159 of the bottom 140.

[0051] The side walls 151 to 155 and 159 shown in Fig. 11 form a first ventilation path P1 having a plurality of continuous arcs, as shown in Fig. 15. Fig. 15 is a cross-sectional view showing an example of the first ventilation path in this embodiment. Fig. 15 shows a cross-section taken along line E-E in Fig. 10. As shown in Fig. 15, the first ventilation path P1 continues from the exhaust hole 169 of the vacuum pump 160 to the through-hole 148 in which the terminal block 180 is disposed, repeatedly bending back and forth.

[0052] 16 , the first ventilation path P1 is formed by the bottom surface 150 and side walls 151 to 155 and 159 of the bottom portion 140 and the bottom surface 164 of the vacuum pump 160. FIG. 16 is a perspective view showing an example of the first and second ventilation paths in this embodiment. As indicated by the arrows in FIG. 16 , air discharged from the first ventilation path P1 passes through the second ventilation path P2, which continues to the exhaust ports 136 and 137, while contacting the substrate 189 at the support portion 149. At this time, the air is discharged from the exhaust ports 136 and 137 while contacting the side surface 161 of the vacuum pump 160 and the flat surfaces 121, 122, 123 and curved surface 130 of the cover 110. That is, as shown in FIG. 16 , the second ventilation path P2 is formed by the inner walls 121, 122, and 123 of the protruding portion and the outer wall 161 of the vacuum pump 160.

[0053] With this configuration, it is possible to lengthen the path that the air discharged from the discharge hole 169 takes until it is discharged outside the cartridge 100, thereby reducing exhaust noise. In addition, by arranging the substrate 189 in the path of the exhaust and further discharging the exhaust along the side surface 161 of the vacuum pump 160, the exhaust can be used to cool the vacuum pump 160 and the substrate 189.

[0054] As described above, the vacuum generator in this embodiment includes a main body 500 and a cartridge 100 including a vacuum pump 160. The cartridge 100 is removable from the main body 500. The main body 500 and the cartridge 100 are engaged with each other by engagement mechanisms 134, 135, 514, and 515. The cartridge 100 includes terminals 181 to 185 that supply power to the vacuum pump 160, and a pipe 167 through which air sucked in by the operation of the vacuum pump 160 passes. The main body 500 includes a connector 518 to which the terminals 181 to 185 are connected, and a connection port 517 to which the pipe 167 is connected. The terminals 181 to 185 of the cartridge 100 and the connector 518 of the main body 500, and the pipe 167 of the cartridge 100 and the connection port 517 of the main body 500 are connected to each other on the same surface as the surface S1 where the engagement mechanisms 134, 135, 514, and 515 engage, respectively. With this configuration, the vacuum pump can be easily replaced.

[0055] Furthermore, the vacuum control device 500 in this embodiment includes a connection port 527 connected to the vacuum pump 260 and through which air sucked by operation of the vacuum pump 260 passes, ventilation paths 621, 622, and 625 that are continuous with the connection port 527 and to which the suction pad 720 is connected, and a check valve 623 that is disposed in the ventilation path 621 and switches the ventilation path 625 between an open state and a closed state. The check valve 623 is closed when the vacuum pump 260 is stopped and is open when the vacuum pump 260 is operating. This configuration can simplify the structure of the device.

[0056] The suction device 100 according to the embodiment includes a vacuum pump 160, a bottom 140, a top surface 111 formed at a position opposite the bottom 140 in the axial direction, a first opening 147 formed in the bottom 140, and second openings 136, 137 formed on the top surface 111 side in the axial direction. A first ventilation path P1 is formed in the bottom 140, and a second ventilation path P2 is formed between the bottom 140 and the second openings 136, 137. Suctioned air passes through the first ventilation path P1 and the second ventilation path P2 and is discharged from the second openings 136, 137. This configuration reduces noise caused by exhaust from the vacuum pump, etc.

[0057] [Modifications] While the configurations of the respective embodiments have been described above, the embodiments are not limited thereto. For example, an example has been described in which the suction device 10 is attached to a robot arm 900 that performs bending, stretching, and rotating movements as shown in FIG. 1 , but the present invention is not limited thereto. For example, the suction device may be attached to a robot arm that performs telescopic movements, or may be configured so that the suction device is movable along a rail. Furthermore, the suction device may not be attached to a robot arm or rail, but may be configured so that an operator can move the suction device by hand, for example.

[0058] Furthermore, the check valve in the embodiment can also be applied to an adsorption device equipped with a vacuum pump other than the cartridge 100. The shape of the bottom 140 of the cartridge 100 may also be applied to a vacuum pump other than the cartridge 100.

[0059] Although the configuration has been described in which suction pads 710 to 770 of the same shape are attached to all of sockets 617 to 677, suction pads 710 to 770 may also be detachable, and a configuration in which no suction pads are attached to one or more sockets, or a configuration in which suction pads of different shapes are attached to each of multiple sockets, may also be used. Note that suction pads 710 to 770 may be connected to sockets 617 to 677 via, for example, anti-detachment valves (not shown).

[0060] 17, a suction frame C00 having a plurality of suction pads as shown in FIG. 18 may be attached to one or more of the sockets 617 to 677. FIG. 17 is a perspective view showing an example of a suction device in the first modified example. FIG. 18 is a perspective view showing an example of a suction frame in the first modified example. In the following modified examples, the same parts as those shown in the drawings described above are designated by the same reference numerals, and duplicated explanations will be omitted.

[0061] 18, the suction frame C00 in the first modification includes suction pads C10 to C40 attached to a frame C50. The suction pads C10 to C40 are connected to a connection port C77 formed in a mounting portion C90 via ventilation paths C16 to C46, ​​respectively.

[0062] As shown in Fig. 19, the main body B00 of the suction device A10 in the first modified example differs from the main body 500 in the embodiment in that it includes a suction frame connection part B77 instead of the socket 677. Fig. 19 is a side cross-sectional view showing an example of the suction device in the first modified example. Fig. 19 shows a cross section taken along line F-F in Fig. 17. The attachment part C90 of the suction frame C00 shown in Fig. 18 is attached to the suction frame connection part B77. Airtightness is maintained between the suction frame connection part B77 and the connection port C77 of the suction frame C00 by an O-ring B80 or the like.

[0063] 19, the other sockets 657 and 667 to which the suction frame C00 is not connected are fitted with rubber stoppers 751 and 761 to prevent air from leaking from inside the main body B00. The same applies to the sockets 617 to 647 not shown in FIG.

[0064] 17, the distance between the suction pads C20 and C30 in the X-axis direction is larger than the size of the main body B00 in the X-axis direction. Also, the distance between the suction pads C10 and C20 in the Z-axis direction is larger than the size of the main body B00 in the Z-axis direction. With this configuration, a larger object can be adsorbed.

[0065] As described above, the suction device A10 in the first modified example includes suction pads C10 to C40 that are detachable from the main body B00. The suction pads C10 to C40 may also be attached to the suction frame C00. With this configuration, the number and arrangement of the suction pads can be easily changed depending on the size and weight of the object.

[0066] Although the configuration in which the suction frame connection part B77 is provided instead of the socket 677 has been described, the suction frame connection part B77 may be attached to the socket 677. Furthermore, the socket to which the suction frame connection part B77 is attached is not limited to the socket 677, and the suction frame connection part B77 may be attached to one or more other sockets.

[0067] Furthermore, although the attachment 800 has been described as including a display unit 810, a pressure sensor 820, a solenoid valve 830, and a mounting unit 890, the configuration is not limited thereto, and the solenoid valve 830 and the like may be provided externally, as shown in Figures 20 and 21. Figure 20 is a perspective view showing an example of a transport system in a second modified example. Figure 21 is a side view showing another example of a transport system in the second modified example. Note that Figure 21 shows a state in which the cartridges 200 and 400 are not attached to the main body 500.

[0068] As shown in Fig. 20 , in the transport system E1 of the second modified example, the suction device E10 includes a main body 500 to which cartridges 100 to 400 are attached, and an attachment F00. As shown in Fig. 21 , the attachment F00 of the second modified example includes a connection unit F40 instead of the display unit 810, pressure sensor 820, and solenoid valve 830. The connection unit F40 is a portion that connects the attachment F00 to, for example, an external solenoid valve (not shown). Furthermore, the connection unit F40 may be configured to connect to an external display unit (not shown) or pressure sensor (not shown).

[0069] 21 , the height H1 of the top surface of the attachment F00 in the Y-axis direction in the second modified example is smaller than the height in the Y-axis direction of the cartridge 100. With this configuration, the mounting center of gravity between the robot arm 900 and the suction device E10 can be lowered, thereby improving the portability of the transport system E1 (the load that the robot can lift; the weight that meets the specifications for use).

[0070] The shape of the cartridge 100 is also an example, and the cartridge may be configured without the boss portions 131 to 133 or the flat surfaces 121, 122, or 123. For example, a cartridge that does not have the boss portions 131 to 133 may be configured to be welded to the main body.

[0071] Furthermore, as shown in Fig. 22, the shape of the portion constituting the second ventilation path may be different. Fig. 22 is a diagram showing an example of a cartridge in a third modified example. The cover M10 of the cartridge shown in Fig. 22 includes a storage portion M21 and a ventilation portion M22 that protrude radially outward. The storage portion M21 stores the terminal block 180 and the circuit board 189 shown in Fig. 8. The ventilation portion M22 forms a second ventilation path continuing to the exhaust ports 136 and 137.

[0072] 8 to 10 are also examples, and may have a shape as shown in Fig. 22. Fig. 22 is a diagram showing another example of a cartridge in the third modified example. As shown in Fig. 22, the shape of the accommodation portion M21 that accommodates the circuit board 189 and the terminal block 180 may be different from the shape of the ventilation portion M22 that forms the second ventilation path.

[0073] Furthermore, the vacuum generator with the cartridges 100 to 400 attached to the main body 500 does not have to be attached to a robot arm, as shown in Figures 23 and 24, as long as suction via a suction pad is possible. Figures 23 and 24 are diagrams showing an example of a transfer system equipped with a vacuum generator according to the fourth modified example. As shown in Figures 23 and 24, the vacuum generator K50 according to the fourth modified example includes the cartridges 100 to 400, a main body 500, and an attachment 800. A vacuum air pipe J80 is connected to a socket 677 of the vacuum generator K50.

[0074] 23 and 24, the side of the main body 500 and the top of at least one of the cartridges 100 to 400 of the vacuum generator K50 are in contact with the ground surface G00. This stabilizes the vacuum generator K50. Note that the top of the attachment 800 may also be in contact with the ground surface G00.

[0075] Furthermore, the robot arm J00 in the fourth modified example is formed with a vacuum air pipe J80 that connects the vacuum generator K50 and the suction pad K70. The vacuum air pipe J80 is formed, for example, inside the robot arm J00, as shown in Figures 22 and 23. Note that the vacuum air pipe J80 may also be formed, for example, outside (on the side surface) of the robot arm J00. In this configuration, the suction pad K70 is attached to the attachment portion J70 of the robot arm J00.

[0076] According to this transport system J1, the tip of the robot arm J00 can be made even lighter, thereby further improving portability.

[0077] Furthermore, the cartridges and vacuum generating devices shown in each embodiment and each modified example can be used not only for the suction devices shown in the embodiments and each modified example, but also for vacuuming other devices such as semiconductor manufacturing equipment and vacuum molding equipment.

[0078] While the present invention has been described above based on the embodiments and modifications, it goes without saying that the present invention is not limited to the embodiments and modifications, and various modifications are possible without departing from the spirit of the present invention. Such modifications without departing from the spirit of the present invention are also included in the technical scope of the present invention, and this will be clear to those skilled in the art from the description of the claims.

[0079] 1, E1, J1 Transfer system, 10, A10, E10 Suction device, K50 Vacuum generator, 100, 200, 300, 400 Cartridge, 110 Cover, 111 Top surface, 120 Side surface, 121, 122, 123 Flat surface, 130 Curved surface, 131 to 133 Boss portion, 134, 135 Claw portion, 136, 137 Exhaust port, 140 Bottom portion, 141 to 143 Protrusion portion, 144, 145 Recess, 147, 148 Through hole, 149 Support portion, 150 Bottom surface, 151 to 155, 159 Side wall, 156 to 158 Through hole, 160, 260, 360 Vacuum pump, 161 Side surface, 164 Bottom surface, 167, 267, 467 Suction hole, 169 Discharge hole, 180 Terminal block, 181 to 185 Terminal, 189 Board, 191 to 193, 196 to 198 Bolt, 500, B00 Main body, 510, 520, 530, 540 Slot, 511 to 513 Support wall, 514, 515 Engaged portion, 517, 527, 537, 547, 577, C77 Connection port, 518 Connector, 519 Seal packing, 580 Board, 590 Upper surface, 610, 620, 630, 640, 650, 660, 670, C16, C26, C36, C46 Ventilation path, 621 First space, 622 Second space, 613, 623, 633, 643 Check valve, 624, 634 Spring, 615, 625, 635, 645 Vent, 656, 666, 676 Connecting pipe, 617, 627, 637, 647, 657, 667, 677 Socket, 690 Bottom, 710, 720, 730, 740, 750, 760, 770, C10, C20, C30, C40, K70 Suction pad, 751, 761 Rubber stopper, 800, F00 Attachment, 810 Display unit, 820 Pressure sensor, 830 Solenoid valve, 890 Mounting unit, 900, J00 Robot arm, C00 Suction frame, C50 Frame, F40 Connection unit, G00 Ground surface, J80 Vacuum air piping

Claims

1. A vacuum generating device comprising: a main body; and a suction device equipped with a vacuum pump which is removable from the main body, wherein the main body and the suction device are mutually engaged by an engagement mechanism, the suction device comprises a terminal which supplies power to the vacuum pump and a pipe through which air sucked in by the operation of the vacuum pump passes, the main body comprises a connector to which the terminal is connected and a connection port to which the pipe is connected, and the terminal of the suction device and the connector of the main body, and the pipe of the suction device and the connection port of the main body are mutually connected on the same surface as the surface where the engagement mechanism engages.

2. The vacuum generating device according to claim 1, wherein in said suction device, said terminal, said piping, and a part of said engagement mechanism extend in the same direction.

3. The vacuum generating device according to claim 1, wherein the suction device has a portion that protrudes in a direction intersecting the direction in which it is attached to the main body, and adjacent suction devices are attached to the main body so that their protruding portions face in different directions.

4. The vacuum generating device according to claim 1, further comprising a seal packing surrounding said terminal and said connector, as well as said piping and said connection port.

5. A vacuum generating device according to any one of claims 1 to 4, further comprising an attachment for mounting the main body to an external device, the height of the top surface of the attachment being smaller than the height of the top surface of the suction device.

6. The vacuum generating device according to claim 5, wherein the solenoid valve is formed outside the attachment, and the attachment has a portion that connects the attachment and the solenoid valve.

7. A vacuum generating device as claimed in claim 6, comprising: an air vent path communicating with said connection port; and a check valve disposed in said air vent path for switching said air vent path between an open state and a closed state, said check valve being in a closed state when said vacuum pump is stopped, and being in an open state when said vacuum pump is operating.

8. The vacuum generating device of claim 7, wherein the check valve remains closed even when the suction device is removed.

9. A vacuum generating device as described in claim 8, wherein a plurality of suction devices are connected to the main body, and the vacuum pump of each suction device and the check valve connected to the suction device operate independently of the operation of the vacuum pump of the other suction devices.

10. A suction device comprising: the vacuum generating device according to claim 1; and a suction pad removable from the main body.

11. The suction device according to claim 10, further comprising a socket communicating with the connection port via an air passage, the suction pad being connected to the socket.

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