Connecting apparatus, substrate thermal treatment unit, and coating and developing device

Abstract

Disclosed in the present invention are a connecting apparatus, a substrate thermal treatment unit, and a coating and developing device. The connecting apparatus is configured to connect two adjacent cavities, vent holes are formed in the opposite sides of the adjacent cavities, and a preset distance is formed between the adjacent cavities. The connecting apparatus is of a tubular structure and is configured to extend and retract in the length direction of the connecting apparatus; in an extended state, the connecting apparatus has a first preset length greater than the preset distance; and in a compressed state, the connecting apparatus has a second preset length less than or equal to the preset distance, so that the connecting apparatus can be provided between the adjacent cavities, and two ends of the connecting apparatus are respectively connected to the corresponding vent holes, so as to form an air discharge channel between the adjacent cavities. The substrate thermal treatment unit employs the connecting apparatus, thereby realizing the technical effects of reducing the overall size of the thermal treatment unit and facilitating maintenance.

Description

Connecting device, substrate heat treatment unit and glue coating and developing equipment Technical Field

[0001] The present application relates to the field of semiconductor processing equipment, and further relates to a connecting device, a substrate heat treatment unit and a glue coating and developing device. Background Art

[0002] The photolithography process mainly includes the coating process, exposure process and development process, as well as the baking process performed between the above processes.

[0003] With the development of the semiconductor industry and the evolution of technology, the overall size and production capacity of coating and developing equipment are becoming increasingly demanding. Limited by the design requirements of the overall equipment size, increasing production capacity requires a more compact internal structure, which in turn reduces the operating space inside the equipment and increases the difficulty of maintenance.

[0004] The coating and developing equipment is equipped with a heat treatment unit for the aforementioned baking process. As shown in FIG14 , the heat treatment unit 500 includes multiple vertically stacked rows of heat treatment modules 510. Each heat treatment module 510 is independent of one another, and each row of heat treatment modules 510 is generally equipped with a vertical exhaust duct 520. Each heat treatment module 510 is electrically connected to a corresponding vertical exhaust duct 520 to facilitate the timely discharge of hot air generated within the cavity of the heat treatment module 510, thereby maintaining the internal thermal balance of the equipment. On the one hand, each row of heat treatment modules 510 is connected by a vertical exhaust duct 520, which takes up a lot of space and prevents the addition of additional processing modules to increase equipment production capacity. On the other hand, during maintenance, the heat treatment module 510 needs to be individually removed from the heat treatment unit 500. However, since the heat treatment module 510 is connected to the vertical exhaust duct 520, the connection between the heat treatment module 510 and the vertical exhaust duct 520 must be disconnected before removal, making disassembly cumbersome and increasing maintenance costs.

[0005] Summary of the Invention

[0006] In response to the above technical problems, the present invention discloses a connecting device, a substrate heat treatment unit and a glue coating and developing device, which aim to reduce the overall size of the heat treatment unit and facilitate maintenance.

[0007] In some embodiments, the connecting device is used to connect adjacent cavities, and air vents are opened on opposite sides of adjacent cavities, and the adjacent cavities have a preset spacing. The connecting device has a tubular structure and is constructed to be retractable along its length; wherein, in the extended state, the connecting device has a first preset length greater than the preset spacing; in the compressed state, the connecting device has a second preset length less than or equal to the preset spacing, so that the connecting device can be installed between adjacent cavities, and the two ends of the connecting device are respectively connected to the corresponding air vents to form an exhaust channel between the adjacent cavities.

[0008] In some embodiments, the substrate heat treatment unit includes: a plurality of heat treatment modules, each heat treatment module includes a cavity, and the above-mentioned connecting device is provided between at least two adjacent heat treatment modules to form an exhaust channel between the adjacent heat treatment modules.

[0009] In some embodiments, the coating and developing equipment includes an equipment front-end module, a process station and an interface station connected in sequence, and the process station includes: a coating unit for coating the substrate; a developing unit for developing the substrate; the above-mentioned substrate heat treatment unit; a transmission unit for transferring the substrate located at the equipment front-end module to the coating unit, and then transferring the substrate that has completed the coating process to the interface station; and returning the substrate that has completed the development process in the developing unit to the equipment front-end module.

[0010] Compared with the prior art, the present invention has the following beneficial effects:

[0011] In the present application, adjacent cavities are electrically connected via a connecting device, thereby forming an exhaust passage between adjacent cavities. Furthermore, the connecting device is applied to a substrate heat treatment unit, where adjacent heat treatment modules are electrically connected via the connecting device, so that adjacent heat treatment modules are mutually conductive. Heat treatment modules in the same row only need to be equipped with one vertical exhaust duct to extract gas from each heat treatment module in that row, thereby reducing the number of vertical exhaust ducts installed and the space they occupy, while also reducing the impact of the number of vertical exhaust ducts on the overall size of the heat treatment unit. Furthermore, the connecting device has different lengths in the extended and compressed states, facilitating installation or removal between heat treatment modules and facilitating the extraction of heat treatment modules during equipment maintenance.

[0012] Summary of the Figures

[0013] The features and performance of the present application are further described by the following examples and drawings.

[0014] The preferred embodiments will be described below in a clear and understandable manner with reference to the accompanying drawings to further illustrate the above-mentioned characteristics, technical features, advantages and implementation methods of the present invention.

[0015] FIG1 is a schematic diagram of a connection device according to an embodiment of the present application;

[0016] FIG2 is a front view of the connecting device shown in FIG1 in an extended state;

[0017] FIG3 is a front view of the connecting device shown in FIG1 in a compressed state;

[0018] FIG4 a is a schematic diagram of the connection device shown in FIG1 during installation;

[0019] FIG4b is a view of FIG4a along a viewing direction V1;

[0020] FIG5 a is a schematic diagram of the connecting device shown in FIG1 in a preset position;

[0021] FIG5b is a view of FIG5a along a viewing direction V2;

[0022] FIG6 is an exploded view of the connecting device shown in FIG1 ;

[0023] FIG7 is a cross-sectional view of the connecting device shown in FIG1 along section C;

[0024] FIG8 is a schematic diagram of a heat treatment module according to an embodiment of the present application;

[0025] FIG9 is a schematic diagram of a substrate heat treatment unit according to an embodiment of the present application;

[0026] Figure 10 is a left side view of Figure 9;

[0027] FIG11 is an exploded view of FIG9 ;

[0028] FIG12 is a schematic diagram of a coating and developing device according to an embodiment of the present application;

[0029] FIG13 is a cross-sectional view taken along the aa direction in FIG12;

[0030] FIG14 is a schematic diagram of a substrate heat treatment unit.

[0031] Preferred embodiment of this application

[0032] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the specific embodiments of the present invention will be described below with reference to the accompanying drawings. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings and other embodiments can be obtained based on these drawings without inventive work.

[0033] To simplify the drawings, only portions relevant to the invention are schematically depicted in each figure; they do not represent the actual structure of the product. Furthermore, to simplify the drawings and facilitate understanding, in some figures, only one component with the same structure or function is schematically depicted or labeled. In this document, "one" not only means "only one" but also "more than one."

[0034] It should be noted that, unless otherwise specified or limited, the terms "mounted," "connected," and "connected" should be understood broadly. For example, they can refer to fixed, detachable, or integral connections; mechanical or electrical connections; direct or indirect connections through an intermediary; and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0035] In addition, in the description of the present application, the terms "first", "second", etc. are only used to distinguish the description and cannot be understood as indicating or implying relative importance.

[0036] As shown in Figures 1 to 3, a connection device 130 according to an embodiment of the present application is disclosed, which is used to connect adjacent chambers 600. Ventilation holes 1121 are provided on facing sides of adjacent chambers 600, and a predetermined spacing d1 is provided between adjacent chambers 600. Referring to Figure 9, the connection device 130 can be applied to a substrate thermal processing unit 100, which includes multiple rows of horizontally arranged thermal processing modules 110. The thermal processing modules 110 include chambers 600. Each row of thermal processing modules 110 is stacked vertically, and a predetermined spacing d1 is provided between adjacent thermal processing modules 110 in the same row or column.

[0037] Specifically, the connecting device 130 is tubular and is configured to be retractable along its length direction s. As shown in FIG2 , in its extended state, the connecting device 130 has a first predetermined length d2 that is greater than the predetermined spacing d1. As shown in FIG3 , in its compressed state, the connecting device 130 has a second predetermined length d3 that is less than or equal to the predetermined spacing d1, allowing the connecting device 130 to be installed between adjacent cavities 600. The two ends of the connecting device 130 are respectively connected to corresponding vents 1121 to form an exhaust passage between adjacent cavities 600.

[0038] In practical applications, the connecting device 130 can be installed between adjacent heat treatment modules 110 in the same row or column to directly connect the adjacent heat treatment modules 110. Similarly, if the connecting device 130 is installed between adjacent heat treatment modules 110 in the same row, if the number of heat treatment modules 110 in the same row is n, then the heat treatment modules 110 in the same row can be connected by (n-1) connecting devices 130. In this case, the heat treatment module 110 only needs to be connected to one vertical exhaust duct 120 to extract the gas in all the heat treatment modules 110 in the row. The vertical exhaust duct 120 can be installed at the end of the heat treatment modules 110 in the same row and connected by the connecting device 130. In addition, multiple rows of heat treatment modules 110 can be connected to the same vertical exhaust duct 120, thereby reducing the number of vertical exhaust ducts 120 installed and the space occupied, while reducing the overall size of the heat treatment unit. In addition, the connecting device 130 has different lengths in the extended state and the compressed state. The connecting device 130 can be quickly installed or removed without changing the preset spacing d1 between adjacent heat treatment modules 110. After the connecting device 130 is removed, the corresponding heat treatment module 110 can be extracted for maintenance, which facilitates equipment maintenance.

[0039] Preferably, the connecting device 130 includes a guide slide 137, which is installed at least at one end of the connecting device 130 and is used to reduce the friction between the connecting device 130 and the surface of the cavity 600 when the connecting device 130 is installed between adjacent cavities 600, so as to move the connecting device 130 between adjacent cavities 600, for example, sliding the connecting device 130 from the position shown in Figure 4a along the direction t shown in Figure 4b to the preset position shown in Figures 5a and 5b. It should be noted that, in conjunction with the embodiment shown in Figure 1, the connecting device 130 is a tubular structure, and one end of the connecting device 130 includes both end surfaces of the connecting device 130 along its length direction s, and also includes the outer tube wall near the above-mentioned end surfaces. In the embodiment shown in Figure 1, the guide slide 137 is installed on the outer tube wall near the end surface of the connecting device 130.

[0040] In addition, the connecting device 130 includes a sealing member 138, which is installed on at least one end surface of the connecting device 130 and is used to form a seal between the connecting device 130 and the surface of the cavity 600 to prevent the air flow from leaking at the connection between the connecting device 130 and the cavity 600 when the adjacent cavity 600 transports the air flow through the connecting device 130.

[0041] Preferably, the connecting device 130 includes a fixed tube 131, a first tube 132, and an elastic member 134. The first tube 132 is slidably mounted on one end of the fixed tube 131. The elastic member 134 is disposed on the fixed tube 131 and elastically connected to the first tube 132 to provide elastic force along the length direction s to the first tube 132, thereby switching the connecting device 130 between an extended state and a compressed state.

[0042] Preferably, the connecting device 130 further includes a second tube member 133, which is slidably mounted on an end of the fixed tube member 131 away from the first tube member 132. An elastic member 134 is elastically connected to the second tube member 133 to provide elastic force along the length direction s for the second tube member 133. The distal end surfaces of the first tube member 132 and the second tube member 133 each have an annular contact surface 135 corresponding to the adjacent cavity 600.

[0043] Preferably, the connecting device 130 further includes a first guide wheel 1321 and a second guide wheel 1331, which are equivalent to the aforementioned guide slide 137. Specifically, the first guide wheel 1321 is mounted on the end of the first tube 132 away from the fixed tube 131, and the second guide wheel 1331 is mounted on the end of the second tube 133 away from the fixed tube 131. The axial direction of the first guide wheel 1321 and the axial direction of the second guide wheel 1331 are parallel and perpendicular to the aforementioned length direction s. The first guide wheel 1321 and the second guide wheel 1331 each protrude from the annular contact surface 135, so that the connecting device 130 can slide between adjacent cavities 600 to a predetermined position in a compressed state. For example, the connecting device 130 can slide along direction t from the position shown in Figures 4a and 4b to the predetermined position shown in Figures 5a and 5b.

[0044] Specifically, grooves 1122 are provided on the facing sides of adjacent cavities 600. Grooves 1122 are adapted to the first guide wheel 1321 or the second guide wheel 1331. When the connecting device 130 slides to a preset position, the first guide wheel 1321 and the second guide wheel 1331 are respectively inserted into the corresponding grooves 1122. At this time, the annular contact surface 135 is in sealing contact with the edge of the vent 1121. In addition, in conjunction with the embodiments shown in Figures 4a and 4b, in order to prevent the first guide wheel 1321 and the second guide wheel 1331 from being inserted into the vent 1121 before reaching the groove 1122, the vent 1121 is constructed with a guide bar 1126 along the travel direction of the first guide wheel 1321 and the second guide wheel 1331 so that the first guide wheel 1321 and the second guide wheel 1331 can pass through, and the guide bar 1126 separates the vent 1121 into two parts.

[0045] Preferably, a sealing gasket 136 is provided at each of the distal ends of the first and second tubes 132, 133. Sealing gaskets 136 are equivalent to the aforementioned sealing member 138. Specifically, the aforementioned annular contact surface 135 is located on the end of the sealing gasket 136 distal from the fixed tube 131. When the connecting device 130 slides to a predetermined position, the first and second tubes 132, 133, respectively, squeeze the corresponding sealing gaskets 136 under the elastic force of the elastic member 134, thereby ensuring that the annular contact surfaces 135 are in sealed contact with the edge of the vent 1121. The aforementioned sealing gaskets 136 are preferably made of an elastic material, such as rubber.

[0046] Specifically, as shown in Figures 6 and 7, the connection structure between the first and second pipe fittings 132, 133, and the fixed pipe fitting 131 is as follows: a first flange 1311 is configured at one end of the fixed pipe fitting 131, and a second flange 1312 is configured at the other end of the fixed pipe fitting 131. A first inner retaining ring 1322 is configured on the inner wall of the first pipe fitting 132, corresponding to the first flange 1311, and a second inner retaining ring 1332 is configured on the inner wall of the second pipe fitting 133, corresponding to the second flange 1312. When the connecting device 130 switches between an extended state and a compressed state, the first and second inner retaining rings 1322, 1332 are respectively constrained to slide between the first and second flanges 1311, 1312, along a length direction s, under the elastic force of the elastic member 134, thereby limiting the extension and contraction distance of the first and second pipe fittings 132, 133. In addition, gaskets 1313 can be installed on the facing sides of the first flange 1311 and the first inner retaining ring 1322, and on the facing sides of the second flange 1312 and the second inner retaining ring 1332, respectively, to form a seal between the first flange 1311 and the first inner retaining ring 1322, and between the second flange 1312 and the second inner retaining ring 1332 when the connecting device 130 is in a compressed state.

[0047] Preferably, the elastic member 134 is a torsion spring 1341. The wall of the fixed tube 131 is provided with at least two fixing posts 1342 for securing the torsion spring 1341. The main body of the torsion spring 1341 is sleeved on the fixing posts 1342, and the two elastic contacts of the torsion spring 1341 respectively abut against the facing sides of the first inner retaining ring 1322 and the second inner retaining ring 1332. Specifically, with reference to the embodiment shown in FIG6 , the fixed tube 131 has a square tubular structure and includes four tube walls arranged opposite each other, with fixing posts 1342 provided on the surfaces of at least two of the tube walls, and the two tube walls corresponding to each other.

[0048] In the extended state, the distance between the first tube member 132 and the second tube member 133 increases under the elastic force of the torsion spring 1341 until the first inner retaining ring 1322 abuts the first flange 1311 and the second inner retaining ring 1332 abuts the second flange 1312. In the compressed state, the distance between the first tube member 132 and the second tube member 133 decreases under the action of an external force, overcoming the elastic force of the torsion spring 1341, until the overall length of the connecting device 130 is shortened to a second predetermined length d3 that is less than or equal to the predetermined distance d1, so that the connecting device 130 can be inserted between adjacent cavities 600. After the connecting device 130 is inserted between adjacent cavities 600, the first guide wheel 1321 and the second guide wheel 1331 respectively abut against the facing sides of the adjacent cavities 600, facilitating the pushing of the connecting device 130 to the predetermined position. When the connecting device 130 reaches the preset position, the first guide wheel 1321 and the second guide wheel 1331 are respectively inserted into the corresponding grooves 1122, and the distance between the first tube 132 and the second tube 133 is slightly increased under the elastic force of the torsion spring until the annular contact surface 135 is sealed in contact with the edge of the vent hole 1121, completing the conductive connection between the adjacent cavities 600.

[0049] In actual applications, before extracting the heat treatment module 110 for equipment maintenance, it is necessary to first remove the connecting device 130 between the two adjacent heat treatment modules 110. When removing the connecting device 130 between the two adjacent heat treatment modules 110, push the connecting device 130 to first slide the first guide wheel 1321 and the second guide wheel 1331 of the connecting device 130 out of the corresponding groove 1122, or compress the connecting device 130 before pushing it, so that it is in a compressed state, and then push it out from between the two adjacent heat treatment modules 110. In addition, referring to Figures 4a and 4b, in order to facilitate sliding the first guide wheel 1321 or the second guide wheel 1331 out of the groove 1122, a guide sliding surface 1123 can be provided at the entrance edge of the groove 1122, and the guide sliding surface 1123 can be constructed as a flat chamfer or a curved chamfer.

[0050] As shown in Figures 9 to 11, a substrate heat treatment unit 100 according to an embodiment of the present invention is disclosed. The substrate heat treatment unit 100 includes a plurality of heat treatment modules 110. Each heat treatment module 110 includes a chamber 600. The aforementioned connecting device 130 is disposed between at least two adjacent heat treatment modules 110 to form an exhaust passage between the adjacent heat treatment modules 110. In combination with the aforementioned connecting device 130, the chamber 600 in the substrate heat treatment unit 100 is specifically implemented as a transfer chamber 112 of the heat treatment modules 110. The connecting device 130 is installed between the transfer chambers 112 of adjacent heat treatment modules 110.

[0051] Specifically, the heat treatment modules 110 are arranged horizontally in multiple rows, and the multiple rows of heat treatment modules 110 are stacked. A connecting device 130 is provided between adjacent heat treatment modules 110 in the same row to connect the heat treatment modules 110 in sequence.

[0052] Preferably, the substrate heat treatment unit 100 includes a vertical exhaust duct 120, which is located at the same end of multiple rows of heat treatment modules 110, and the vertical exhaust duct 120 is connected to the adjacent heat treatment modules 110 through a connecting device 130, so that each row of heat treatment modules 110 is connected to the vertical exhaust duct 120 in turn, for exhausting the gas inside each heat treatment module 110.

[0053] Furthermore, in other embodiments of the present application, a connecting device 130 may be installed between two adjacent heat treatment modules 110 in the same row, so that the heat treatment modules 110 in the same row are sequentially connected. Specifically, the substrate heat treatment unit 100 includes a transverse exhaust duct, which passes through each row of heat treatment modules 110 in sequence. The transverse exhaust duct is connected to the adjacent heat treatment modules 110 via the connecting device 130, so that each row of heat treatment modules 110 is sequentially connected to the transverse exhaust duct for exhausting gas from each heat treatment module 110.

[0054] Preferably, as shown in Figure 8, the heat treatment module 110 includes a heat treatment module body 111 and a transfer air chamber 112. The heat treatment module body 111 is used for heat treatment of the substrate. The transfer air chamber 112 is arranged on the front side or the rear side of the heat treatment module body 111, and is connected to the interior of the heat treatment module body 111. The above-mentioned cavity 600 includes a transfer air chamber 112, that is, vents 1121 are provided on the opposite sides of adjacent transfer air chambers 112 in the same row. The vents 1121 are connected to the interior of the transfer air chamber 112. The connecting device 130 has an annular contact surface 135 corresponding to the adjacent transfer air chamber 112 at both ends. When the connecting device 130 slides to the preset position, the annular contact surface 135 is in sealing contact with the edge of the vent 1121. Specifically, the heat treatment module body 111 is connected to the transfer air chamber 112 through a conduit 1125.

[0055] Preferably, the heat treatment module 110 further includes a control unit 113 , which is installed on a side of the transfer chamber 112 away from the heat treatment module body 111 and is used to control substrate processing parameters of the heat treatment module 110 , such as substrate processing temperature, gas flow rate and gas type.

[0056] Preferably, referring again to FIG3 , the heat treatment module 110 includes a blocking mechanism 1124 . The blocking mechanism 1124 cooperates with the vent 1121 of the chamber 600 to open the vent 1121 when the connecting device 130 is in a preset position, and to block the vent 1121 when the connecting device 130 is not in the preset position. Specifically, the blocking mechanism 1124 includes a sealing plate and a driving member. When the vent 1121 needs to be blocked, the driving member drives the sealing plate to cover and block the vent 1121; when the vent 1121 needs to be opened, the driving member drives the sealing plate away from the vent 1121.

[0057] In actual application, if only one heat treatment module 110 is extracted for maintenance or inspection, the connecting device 130 connected to it is extracted first. After the connecting device 130 connected to it is extracted, the heat treatment module 110 adjacent to the heat treatment module 110 can automatically block the corresponding vent 1121 through the blocking mechanism 1124 to prevent gas from leaking from the vent 1121 of the transfer air chamber 112 and affecting the exhaust of other heat treatment modules 110.

[0058] Furthermore, in some preferred embodiments, grooves 1122 are further provided on the facing sides of adjacent transfer air chambers 112 in the same row. These grooves 1122 are located near the vents 1121 and are adapted to accommodate guide members 137 of the connecting device 130, such as the first guide wheel 1321 and the second guide wheel 1331. When the connecting device 130 slides to a predetermined position, the first guide wheel 1321 and the second guide wheel 1331 respectively snap into their corresponding grooves 1122, and the annular contact surface 135 seals against the edge of the vent 1121.

[0059] Preferably, the substrate heat treatment unit 100 is equipped with a plurality of vertical exhaust ducts 120, each of which is connected to a different row of heat treatment modules 110. As an example, in FIG9 , there are three columns and twelve rows of heat treatment modules 110, and three vertical exhaust ducts 121, 122, and 123. The vertical exhaust ducts 121, 122, and 123 are installed on the same side (right side) of each row of heat treatment modules 110, and each vertical exhaust duct 121, 122, and 123 is simultaneously electrically connected to four rows of heat treatment modules 110. It should be noted that in actual applications, the number and arrangement of the heat treatment modules 110, the number of vertical exhaust ducts 120, and the number of rows of heat treatment modules 110 to which each vertical exhaust duct 120 is connected can be adaptively adjusted according to actual conditions.

[0060] The above-mentioned method of connecting each vertical exhaust duct 120 to a different row of heat treatment modules 110 can, on the one hand, prevent large errors in the exhaust volume of the heat treatment modules 110 connected to different positions of the vertical exhaust ducts 120, and ensure that the exhaust efficiency of the vertical exhaust ducts 120 for each row of heat treatment modules 110 is basically the same; on the other hand, the exhaust status of the heat treatment modules 110 connected to different vertical exhaust ducts 121 does not affect each other. To extract a row of heat treatment modules 110 for maintenance or overhaul, it is only necessary to close the vertical exhaust ducts 120 connected to it, and the remaining vertical exhaust ducts 120 can still perform exhaust operations for the heat treatment modules 110 connected to them.

[0061] As shown in FIG. 12 and FIG. 13 , the present application further discloses a coating and developing device 10 , which includes a device front-end module 11 , a process station 12 , and an interface station 13 connected in sequence.

[0062] Specifically, the process station 12 includes a coating unit 200, a developing unit 300, a transfer unit 400, and the substrate thermal treatment unit 100 described in the above embodiment. The coating unit 200 is used to coat substrates; the developing unit 300 is used to develop substrates; and the transfer unit 400 is used to transfer substrates between the front-end module 11, the process station 12, and the interface station 13, as well as within the process station 12.

[0063] It should be noted that the above embodiments can be freely combined as needed. The above are only preferred embodiments of the present invention. For those skilled in the art, without departing from the principles of the present invention, several improvements and modifications can be made, and these improvements and modifications should also be considered as the scope of protection of the present invention.

Claims

1. A connecting device for connecting adjacent cavities, wherein the adjacent cavities have vents on the opposite sides thereof and there is a preset distance between the adjacent cavities, characterized in that: The connecting device is a tubular structure and is configured to be retractable along its length; wherein, In the extended state, the connecting device has a first preset length greater than the preset spacing; In the compressed state, the connecting device has a second preset length that is less than or equal to the preset spacing, so that the connecting device can be installed between adjacent cavities, and the two ends of the connecting device are respectively connected to the corresponding air holes to form an exhaust channel between adjacent cavities.

2. The connection device according to claim 1, characterized in that: include: A sliding guide is installed at least at one end of the connecting device, and is used to reduce the friction between the connecting device and the surface of the cavity when the connecting device is installed between adjacent cavities.

3. The connection device according to claim 1, characterized in that: include: A sealing member is at least mounted on one end surface of the connecting device and is used to form a seal between the connecting device and the surface of the cavity.

4. The connection device according to claim 1, characterized in that: include: Fixing pipe fittings; A first pipe member, which is slidably sleeved on the end of the fixed pipe member; An elastic member is arranged on the fixed pipe member and elastically connected to the first pipe member, and is used to provide elastic force along the length direction for the first pipe member so that the connecting device switches between the extended state and the compressed state.

5. The connection device according to claim 4, characterized in that: Also includes: The second pipe member is slidably mounted on an end of the fixed pipe member away from the first pipe member, and the elastic member is also elastically connected to the second pipe member to provide elastic force for the second pipe member along the length direction; wherein, The first tube member and the second tube member have respective annular contact surfaces corresponding to the adjacent cavities on their sides away from each other.

6. The connection device according to claim 5, characterized in that: Also includes: A first guide wheel, mounted on an end of the first pipe member away from the fixed pipe member; The second guide wheel is installed at one end of the second pipe away from the fixed pipe; wherein, The axial direction of the first guide wheel and the axial direction of the second guide wheel are parallel and perpendicular to the length direction respectively, and the first guide wheel and the second guide wheel protrude from the annular contact surface respectively, so that the connecting device can slide to a preset position between adjacent cavities in the compressed state.

7. The connection device according to claim 6, characterized in that: Grooves are provided on opposite sides of adjacent cavities, and the grooves are adapted to the first guide wheel or the second guide wheel. When the connecting device slides to the preset position, the first guide wheel and the second guide wheel are respectively inserted into the corresponding grooves, and the annular contact surface is in sealing contact with the edge of the vent hole.

8. The connection device according to claim 5, characterized in that: Sealing pads are respectively arranged at the ends of the first pipe member and the second pipe member that are away from each other.

9. The connection device according to claim 5, characterized in that: One end of the fixed pipe is configured with a first flange, and the other end of the fixed pipe is configured with a second flange; The inner wall of the first pipe fitting is constructed with a first inner retaining ring corresponding to the first flange, and the inner wall of the second pipe fitting is constructed with a second inner retaining ring corresponding to the second flange, the inner diameter of the first inner retaining ring is smaller than the outer diameter of the first flange, and the inner diameter of the second inner retaining ring is smaller than the outer diameter of the second flange, wherein, when the connecting device switches between the extended state and the compressed state, the first inner retaining ring and the second inner retaining ring are respectively limited to slide between the first flange and the second flange along the length direction under the elastic force of the elastic member.

10. A substrate heat treatment unit, characterized in that: include: A plurality of heat treatment modules, each of which comprises a cavity, and a connecting device as described in any one of claims 1 to 9 is arranged between at least two adjacent heat treatment modules to form an exhaust passage between the adjacent heat treatment modules.

11. The substrate heat treatment unit according to claim 10, characterized in that: The heat treatment modules are arranged horizontally in multiple rows, and the multiple rows of heat treatment modules are stacked. The connecting device is provided between the adjacent heat treatment modules in the same row, so that the heat treatment modules in the same row are conductively connected in sequence.

12. The substrate heat treatment unit according to claim 11, characterized in that: include: The vertical exhaust duct is located on the same side of the multiple rows of the heat treatment modules, and the vertical exhaust duct is connected to the adjacent heat treatment modules through the connecting device, so that each row of the heat treatment modules is connected to the vertical exhaust duct in turn to exhaust the gas inside each heat treatment module.

13. The substrate heat treatment unit according to claim 12, characterized in that: The heat treatment module also includes: The heat treatment module body is used for heat treatment of the substrate; The cavity includes a transfer air chamber, which is connected to the interior of the heat treatment module body. The vent is opened on the opposite side of the adjacent transfer air chamber. Both ends of the connecting device have annular contact surfaces corresponding to the adjacent transfer air chamber. When the connecting device slides to a preset position, the annular contact surface is in sealing contact with the edge of the vent.

14. The substrate heat treatment unit according to claim 10, characterized in that: include: The blocking mechanism cooperates with the vent hole and is used to open the vent hole when the connecting device is in the preset position and to block the vent hole when the connecting device is not in the preset position.

15. The substrate heat treatment unit according to claim 13, characterized in that: The connecting device comprises a guide slide, which is installed at least at one end of the connecting device and is used to reduce the distance between the connecting device and the adjacent transfer air chambers when the connecting device is installed between the adjacent transfer air chambers. Friction on the cavity surface; The adjacent transfer air chambers in the same row are provided with grooves on the facing sides, and the grooves are matched with the guide slides. When the connecting device slides to the preset position, the guide slides into the grooves, and the annular contact surface is in sealing contact with the edge of the vent hole.

16. The substrate heat treatment unit according to claim 12, characterized in that: There are multiple vertical exhaust ducts, and each of the vertical exhaust ducts is connected to a different row of the heat treatment modules.

17. A coating and developing device, comprising a device front-end module, a process station and an interface station connected in sequence, characterized in that: The process station comprises: The substrate heat treatment unit according to any one of claims 10 to 16; A coating unit, used for coating the substrate; A developing unit, used for developing the substrate; A transmission unit is used to transmit the substrate between the equipment front-end module, the process station and the interface station, and to transmit the substrate within the process station.

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